U.S. patent application number 16/252301 was filed with the patent office on 2019-08-08 for three-dimensional vertical nor flash thin-film transistor strings.
This patent application is currently assigned to SUNRISE MEMORY CORPORATION. The applicant listed for this patent is SUNRISE MEMORY CORPORATION. Invention is credited to Eli Harari.
Application Number | 20190244971 16/252301 |
Document ID | / |
Family ID | 67475152 |
Filed Date | 2019-08-08 |
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United States Patent
Application |
20190244971 |
Kind Code |
A1 |
Harari; Eli |
August 8, 2019 |
Three-dimensional vertical NOR Flash Thin-Film Transistor
Strings
Abstract
A memory structure, includes active columns of polysilicon
formed above a semiconductor substrate, each active column includes
one or more vertical NOR strings, with each NOR string having
thin-film storage transistors sharing a local source line and a
local bit line, the local bit line is connected by one segment of a
segmented global bit line to a sense amplifier provided in the
semiconductor substrate.
Inventors: |
Harari; Eli; (Saratoga,
CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SUNRISE MEMORY CORPORATION |
Los Gatos |
CA |
US |
|
|
Assignee: |
SUNRISE MEMORY CORPORATION
Los Gatos
CA
|
Family ID: |
67475152 |
Appl. No.: |
16/252301 |
Filed: |
January 18, 2019 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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16107732 |
Aug 21, 2018 |
10249370 |
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16252301 |
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62625818 |
Feb 2, 2018 |
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62630214 |
Feb 13, 2018 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/11573 20130101;
H01L 23/53257 20130101; G11C 16/0483 20130101; H01L 27/11582
20130101; G11C 16/26 20130101; G11C 16/30 20130101; H01L 27/11565
20130101; H01L 29/0649 20130101; H01L 29/78642 20130101; H01L
23/528 20130101; H01L 23/5329 20130101; H01L 27/1157 20130101; H01L
29/1037 20130101; H01L 23/5226 20130101; G11C 16/14 20130101 |
International
Class: |
H01L 27/11582 20060101
H01L027/11582; H01L 29/10 20060101 H01L029/10; H01L 23/528 20060101
H01L023/528; H01L 29/786 20060101 H01L029/786; H01L 27/11573
20060101 H01L027/11573; H01L 27/1157 20060101 H01L027/1157; G11C
16/30 20060101 G11C016/30; G11C 16/14 20060101 G11C016/14; H01L
29/06 20060101 H01L029/06; H01L 23/532 20060101 H01L023/532; H01L
23/522 20060101 H01L023/522; H01L 27/11565 20060101 H01L027/11565;
G11C 16/04 20060101 G11C016/04; G11C 16/26 20060101 G11C016/26 |
Claims
1. A memory structure, comprising: a semiconductor substrate having
a substantially planar surface and including circuitry formed
therein for memory circuit operation; a plurality of active columns
of semiconducting material formed above the semiconductor
substrate, each active column extending along a first direction
orthogonal to the planar surface of semiconductor substrate and
including a first heavily doped region, a second heavily doped
region, and one or more lightly doped regions each adjacent both
the first and second heavily doped regions, wherein the active
columns are arranged in a two-dimensional array having rows of
active columns extending along a second direction and rows of
active columns extending along a third direction, the second
direction and the third direction each being parallel to the planar
surface of the semiconductor substrate; charge-trapping material
provided over one or more surfaces of each active columns; and a
plurality of word line conductors that are electrically isolated
from each other provided between the active columns in a plurality
of stacks, each stack extending lengthwise along the third
direction, wherein the active columns, the charge-trapping material
and the word line conductors together form a plurality of
variable-threshold thin-film transistors, each variable-threshold
thin-film transistor comprising an associated one of the word line
conductors, a portion of the lightly doped region of an active
column, the charge-trapping material between the portion of the
lightly doped region and the word line conductor, and the first and
second heavily doped regions; first and second pluralities of
interconnection conductors running lengthwise along the second
direction above and beneath the active columns, respectively,
wherein (i) the first heavily doped region forms a local bit line
and serves as a first drain or source terminal of the
variable-threshold thin-film transistor, the local bit line being
selectably connected to an associated one of the second plurality
of interconnection conductors, (ii) the associated word line
conductor serves as a gate terminal to provide a control voltage to
the variable-threshold thin-film transistor; and (iii) the second
heavily doped region forms a local source line and serves as a
second drain or source terminal of the variable-threshold thin-film
transistor, the local source line being connected to an associated
one of the first plurality of interconnection conductors.
2. The memory structure of claim 1, wherein the second pluralities
of interconnection conductors comprise a plurality of bit line
segments beneath each row of active columns along the second
direction, wherein the bit line segments are selectably
electrically isolated from each other and each connect a
predetermined number of local bit lines in the row of active
columns.
3. The memory structure of claim 2, further comprising a plurality
of regional bit line segments, wherein a plurality of bit line
segments are selectably connected to each regional bit line
segment.
4. The memory structure of claim 2, further comprising a plurality
of segment-select transistors each selectably connecting a
corresponding bit line segment to the circuitry in the
semiconductor substrate.
5. The memory structure of claim 4, wherein the circuitry in the
semiconductor substrate comprises at least a plurality of sense
amplifiers distributed throughout the planar surface of the
semiconductor substrate, the sense amplifiers being each connected
by a different group of one or more segment-select transistors to
corresponding bit line segments.
6. The memory structure of claim 4, wherein the segment-select
transistors are formed in the semiconductor substrate.
7. The memory structure of claim 2, wherein each word line
conductor provides gate terminals for variable-threshold thin-film
transistors in active columns on opposite sides of the word line
conductor, and wherein the local bit lines in adjacent active
columns on opposite side of the word conductor are associated with
different bit line segments.
8. The memory structure of claim 1, wherein the first pluralities
of interconnection conductors comprise a plurality of source line
segments above each row of active columns along the second
direction, wherein the source line segments each connect a
predetermined number of local source lines in the row of active
columns.
9. The memory structure of claim 8, wherein the source line
segments are selectably electrically isolated from each other.
10. The memory structure of claim 9, further comprising a global
source line and a plurality of segment-select transistors, each
segment-select transistor connecting a predetermined number of
source line segments to the global source line.
11. The memory structure of claim 10, further comprising in each
active column a pre-charge transistor for electrically connecting
the local source line of the active column to the local bit line of
the active column.
12. The memory structure of claim 11, wherein the local source
lines connected by each source line segment provide a capacitance
that serves as a virtual voltage source during a read, programming,
program-inhibit or erase operation on one or more
variable-threshold thin-film transistors in the active columns
associated with the source line segment.
13. The memory structure of claim 8, further comprising a body bias
voltage source in the semiconductor substrate, wherein the lightly
doped region of each active column is connected to the body bias
voltage source by a conductor above or below the active column.
14. The memory structure of claim 13, wherein the conductor above
the active column comprises one of the first plurality of
interconnection conductors.
15. The memory structure of claim 13, wherein the conductor above
the active column is routed along the third direction.
16. The memory structure of claim 8 further comprising a plurality
of charging columns each being associated with one of the source
line segments, each charging column having first and second heavily
doped regions structurally substantially the same as the first and
second heavily doped regions of one of the active columns, wherein
each charging column further comprises a plurality of pass
transistors each selectably connecting the first and second heavily
doped regions of the charging column, wherein at least one of the
first and second heavily doped regions is connected to the
circuitry in the semiconductor substrate.
17. The memory structure of claim 16, wherein each charging column
is formed between two neighboring source line segments.
18. The memory structure of claim 16, wherein one or more of the
word line conductors activate one or more of the pass transistors
in one or more of the charge columns.
19. The memory structure of claim 18, further comprising a global
source line that connects one or more of the word lines that
activate one or more of the pass transistors in the one or more
charge columns.
20. The memory structure of claim 16, wherein each charging column
is connected to a voltage source in the semiconductor substrate by
a segment-select transistor in the semiconductor substrate.
21. The memory structure of claim 20, wherein the voltage source
supplies an erase voltage for a source line during an erase
operation.
22. The memory structure of claim 1, wherein the active columns are
isolated from each other by an isolation dielectric material or by
an air gap.
23. The memory structure of claim 1, wherein the word line
conductors in a stack are insulated from each other by an isolation
dielectric material or air gap.
24. The memory structure of claim 1, wherein the variable-threshold
thin-film transistors associated with each active column are
organized in parallel into one or more NOR thin-film transistor
strings.
25. The memory structure of claim 1, wherein the word line
conductors in each stack at different positions along the first
direction form steps of a stair-case structure and wherein each
word line conductor is connected at the stair-case structure by
vias to a corresponding one of the first or second pluralities of
interconnection conductors.
26. The memory structure of claim 25, wherein selected word line
conductors at selected steps of the stair-case structures in
different stacks are connected to a selected one of the first or
second pluralities of interconnection conductors.
27. A memory structure comprising first and second modular memory
structures provided one on top of the other, wherein each modular
memory structure comprises the memory structure of claim 25.
28. The memory structure of claim 27, wherein the first and second
modular memory structures are isolated from each other by a
dielectric layer.
29. The memory structure of claim 28, wherein active columns in the
first and second modular memory structures are aligned along the
first direction and wherein in local source lines of corresponding
active columns are connected by vias through the dielectric
layer.
30. The memory structure of claim 1, further comprising metallic
pylons embedded in either one or both of the local source line and
the local bit line of one or more active columns,
31. The memory structure of claim 30, wherein the metallic pylons
each comprises one or more of titanium nitride, tungsten nitride or
tungsten.
32. The memory structure of claim 31, wherein the metallic pylon is
formed using an atomic layer deposition technique.
33. The memory structure of claim 1, wherein the lightly doped
region in each active column comprises a first section and a second
section, and wherein the first section of the lightly doped region
serves as channel regions for the variable-threshold thin-film
transistors of the active columns and wherein the second section of
the lightly doped region has a dopant concentration multiple times
that of the first section of the lightly doped region.
Description
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] The present application is a continuation-in-part
application of copending U.S. patent application ("Non-Provisional
application I"), Ser. No. 16/107,732, entitled "Three-dimensional
vertical NOR Flash Thin-Film Transistor Strings," filed on Aug. 21,
2018, which is a continuation application of U.S. patent
application Ser. No. 15/837,734 entitled "Three-dimensional
vertical NOR Flash Thin-Film Transistor Strings," filed on Dec. 11,
2017, now U.S. Pat. No. 10,096,364, which is a divisional
application of U.S. patent application, Ser. No. 15/343,332,
entitled "Three-dimensional vertical NOR Flash Thin-Film Transistor
Strings," filed on Nov. 4, 2016, now U.S. Pat. No. 9,842,651, which
claims priority of (i) U.S. provisional patent application
("Provisional application I"), Ser. No. 62/260,137, entitled
"Three-dimensional Vertical NOR Flash Thin-film Transistor
Strings," filed on Nov. 25, 2015; (ii) copending U.S.
non-provisional patent application ("Non-Provisional application
II"), Ser. No. 15/220,375, entitled "Multi-Gate NOR Flash Thin-film
Transistor Strings Arranged in Stacked Horizontal Active Strips
With Vertical Control Gates," filed on Jul. 26, 2016, now U.S. Pat.
No. 9,892,800; and (iii) copending U.S. provisional patent
application ("Provisional application II"), Ser. No. 62/363,189,
entitled "Capacitive Coupled Non-Volatile Thin-film Transistor
Strings," filed Jul. 15, 2016; and (iv) copending U.S.
non-provisional patent application ("Non-Provisional patent
application III"), Ser. No. 15/248,420, entitled "Capacitive
Coupled Non-Volatile Thin-film Transistor Strings in
Three-Dimensional Array," filed Aug. 26, 2016.
[0002] The present application is also related to and claims
priority of U.S. provisional application ("Provisional application
III"), Ser. No. 62/625,818, entitled "Three-dimensional vertical
NOR Flash Thin-Film Transistor Strings," filed on Feb. 2, 2018 and
U.S. provisional patent application ("Provisional application IV"),
Ser. No. 62/630,214, entitled "Three-dimensional vertical NOR Flash
Thin-Film Transistor Strings," filed on Feb. 13, 2018.
[0003] The disclosures of Provisional Applications I-IV and
Non-Provisional application I-III are hereby incorporated by
reference in their entireties.
BACKGROUND OF THE INVENTION
1. Field of the Invention
[0004] The present invention relates to high-density memory
structures. In particular, the present invention relates to
high-density memory structures formed by interconnected thin film
storage elements, such as thin film storage transistors formed in
vertical strips with horizontal word lines.
2. Discussion of the Related Art
[0005] In this disclosure, memory circuit structures are described.
These structures may be fabricated on planar semiconductor
substrates (e.g., silicon wafers) using conventional fabrication
processes. To facilitate clarity in this description, the term
"vertical" refers to the direction perpendicular to the surface of
a semiconductor substrate, and the term "horizontal" refers to any
direction that is parallel to the surface of that semiconductor
substrate.
[0006] A number of high-density non-volatile memory structures,
such as "three-dimensional vertical NAND strings," are known in the
prior art. Many of these high-density memory structures are formed
using thin film storage transistors formed out of deposited thin
films (e.g., polysilicon thin films), and organized as arrays of
"memory strings." One type of memory strings is referred to as NAND
memory strings or simply "NAND strings". A NAND string consists of
a number of series-connected thin film storage transistors
("TFTs"). Reading or programming the content of any of the
series-connected TFTs requires activation of all series-connected
TFTs in the string. Thin film NAND transistors have lower
conductivity than NAND transistors formed in single crystal
silicon, therefore the low read current that is required to be
conducted through a long string of NAND TFTs results in a
relatively slow read access (i.e. long latency).
[0007] Another type of high density memory structures is referred
to as the NOR memory strings or "NOR strings." A NOR string
includes a number of storage transistors each of which is connected
to a shared source region and a shared drain region. Thus, the
transistors in a NOR string are connected in parallel, so that a
read current in a NOR string is conducted over a much lesser
resistance than the read current through a NAND string. To read or
program a storage transistor in a NOR string, only that storage
transistor needs to be activated (i.e., "on" or conducting), all
other storage transistors in the NOR string may remain dormant
(i.e., "off" or non-conducting). Consequently, a NOR string allows
much faster sensing of the activated storage transistor to be read.
Conventional NOR transistors are programmed by a channel
hot-electron injection technique, in which electrons are
accelerated in the channel region by a voltage difference between
the source region and the drain region and are injected into the
charge-trapping layer between the control gate and the channel
region, when an appropriate voltage is applied to the control gate.
Channel hot-electron injection programming requires a relatively
large electron current to flow through the channel region,
therefore limiting the number of transistors that can be programmed
in parallel. Unlike transistors that are programmed by hot-electron
injection, in transistors that are programmed by Fowler-Nordheim
tunneling or by direct tunneling, electrons are injected from the
channel region to the charge-trapping layer by a high electric
field that is applied between the control gate and the source and
drain regions. Fowler-Nordheim tunneling and direct tunneling are
orders of magnitude more efficient than channel hot-electron
injection, allowing massively parallel programming; however, such
tunneling is more susceptible to program-disturb conditions.
[0008] 3-Dimensional NOR memory arrays are disclosed in U.S. Pat.
No. 8,630,114 to H. T Lue, entitled "Memory Architecture of 3D NOR
Array", filed on Mar. 11, 2011 and issued on Jan. 14, 2014.
[0009] U.S. patent Application Publication US2016/0086970 A1 by
Haibing Peng, entitled "Three-Dimensional Non-Volatile NOR-type
Flash Memory," filed on Sep. 21, 2015 and published on Mar. 24,
2016, discloses non-volatile NOR flash memory devices consisting of
arrays of basic NOR memory groups in which individual memory cells
are stacked along a horizontal direction parallel to the
semiconductor substrate with source and drain electrodes shared by
all field effect transistors located at one or two opposite sides
of the conduction channel.
[0010] Three-dimensional vertical memory structures are disclosed,
for example, in U.S. Pat. No. 8,878,278 to Alsmeier et al.
("Alsmeier"), entitled "Compact Three-Dimensional Vertical NAND and
Methods of Making Thereof," filed on Jan. 30, 2013 and issued on
Nov. 4, 2014. Alsmeier discloses various types of high-density NAND
memory structures, such as "terabit cell array transistor" (TCAT)
NAND arrays (FIG. 1A), "pipe-shaped bit-cost scalable" (P--BiCS)
flash memory (FIG. 1B) and a "vertical NAND" memory string
structure. Likewise, U.S. Pat. No. 7,005,350 to Walker et al.
("Walker I"), entitled "Method for Fabricating Programmable Memory
Array Structures Incorporating Series--Connected Transistor
Strings," filed on Dec. 31, 2002 and issued on Feb. 28, 2006, also
discloses a number of three-dimensional high-density NAND memory
structures.
[0011] U.S. Pat. No. 7,612,411 to Walker ("Walker II"), entitled
"Dual-Gate Device and Method" filed on Aug. 3, 2005 and issued on
Nov. 3, 2009, discloses a "dual gate" memory structure, in which a
common active region serves independently controlled storage
elements in two NAND strings formed on opposite sides of the common
active region.
[0012] 3-Dimensional NOR memory arrays are disclosed in U.S. Pat.
No. 8,630,114 to H.T Lue, entitled "Memory Architecture of 3D NOR
Array," filed on Mar. 11, 2011 and issued on Jan. 14, 2014.
[0013] A three-dimensional memory structure, including horizontal
NAND strings that are controlled by vertical polysilicon gates, is
disclosed in the article "Multi-layered Vertical gate NAND Flash
Overcoming Stacking Limit for Terabit Density Storage" ("Kim"), by
W. Kim et al., published in the 2009 Symposium on VLSI Tech. Dig.
of Technical Papers, pp 188-189. Another three-dimensional memory
structure, also including horizontal NAND strings with vertical
polysilicon gates, is disclosed in the article, "A Highly Scalable
8-Layer 3D Vertical-gate (VG) TFT NAND Flash Using Junction-Free
Buried Channel BE-SONOS Device," by H.T. Lue et al., published in
the 2010 Symposium on VLSI: Tech. Dig. Of Technical Papers, pp.
131-132.
[0014] FIG. 1a shows three-dimensional vertical NAND strings 111
and 112 in the prior art. FIG. 1b shows basic circuit
representation 140 of a three-dimensional vertical NAND string in
the prior art. Specifically, vertical NAND string 111 and 112 of
FIG. 1a and their circuit representation 150 are each essentially a
conventional horizontal NAND string which--rather than each
connecting 32 or more transistors in series along the surface of a
substrate--is rotated 90 degrees, so as to be perpendicular to the
substrate. Vertical NAND strings 111 and 112 are serially-connected
thin-film transistors (TFTs) in a string configuration that rises
like a skyscraper from the substrate, with each TFT having a
storage element and a control gate provided by one of the word line
conductors in an adjacent stack of word line conductors. As shown
in FIG. 1b, in the simplest implementation of a vertical NAND
string, TFTs 15 and 16 are the first and last memory transistors of
NAND string 150, controlled by separate word lines WL0 and WL31,
respectively. Bit line select transistor 11, activated by signal
BLS, and ground select transistor 12, activated by signal SS, serve
to connect an addressed TFT in vertical NAND string 150 to
corresponding global bit line GBL at terminal 14 and global source
line (ground) GSL, at terminal 13, during read, program,
program-inhibit and erase operations. Reading or programming the
content of any one TFT, (e.g., TFT 17) requires activation of all
32 TFTs in vertical NAND string 150, which exposes each TFT to
read-disturb and program-disturb conditions. Such conditions limit
the number of TFTs that can be provided in a vertical NAND string
to no more than 64 or 128 TFTs. Furthermore, the polysilicon thin
films upon which a vertical NAND string is formed have much lower
channel mobility--and therefore higher resistivity--than
conventional NAND strings formed in a single-crystal silicon
substrate, thereby resulting in a low read current relative to the
read current of a conventional NAND string.
[0015] U.S. Patent Application Publication 2011/0298013 ("Hwang"),
entitled "Vertical Structure Semiconductor Memory Devices And
Methods OF Manufacturing. The Same," discloses three-dimensional
vertical NAND strings. In its FIG. 4D, Hwang shows a block of three
dimensional vertical NAND strings addressed by wrap-around stacked
word lines 150 (reproduced herein as FIG. 1c).
[0016] U.S. Pat. No. 5,768,192 to Eitan, entitled "Memory Cell
utilizing asymmetrical charge trapping" filed Jul. 23, 1996 and
issued Jun. 16, 1998 discloses NROM type memory transistor
operation of the type employed in an embodiment of the current
invention.
[0017] U.S. Pat. No. 8,026,521 to Zvi Or-Bach et al, entitled
"Semiconductor Device and Structure," filed on Oct. 11, 2010 and
issued on Sep. 27, 2011 to Zvi-Or Bach et al discloses a first
layer and a second layer of layer-transferred mono-crystallized
silicon in which the first and second layers include horizontally
oriented transistors. In that structure, the second layer of
horizontally oriented transistors overlays the first layer of
horizontally oriented transistors, each group of horizontally
oriented transistors having side gates.
[0018] Transistors that have a conventional non-volatile memory
transistor structure but short retention times may be referred to
as "quasi-volatile." In this context, conventional non-volatile
memories have data retention time exceeding tens of years. A planar
quasi-volatile memory transistor on single crystal silicon
substrate is disclosed in the article "High-Endurance Ultra-Thin
Tunnel Oxide in Monos Device Structure for Dynamic Memory
application", by H. C. Wann and C. Hu, published in IEEE Electron
Device letters, Vol. 16, No. 11, November 1995, pp 491-493. A
quasi-volatile 3-D NOR array with quasi-volatile memory is
disclosed in the U.S. Pat. No. 8,630,114 to H. T Lue, mentioned
above.
[0019] The Article "A 768 Gb 3b/cell 3D-Floating-Gate NAND Flash
Memory," by T. Tanaka et al., published in the Digest of Technical
Papers, the 2016 IEEE International Solid-State Circuits
Conference, pp. 142-144, discloses placing CMOS logic circuits
underneath a 3-dimensional NAND memory array.
SUMMARY
[0020] According to one embodiment of the present invention, a
high-density memory structure, referred to as a three-dimensional
vertical NOR Flash memory string ("multi-gate vertical NOR string,"
or simply "vertical NOR string"). The vertical NOR string includes
a number of thin-film transistors ("TFTs") connected in parallel,
having a shared source region and a shared drain region each
extending generally in a vertical direction. In addition, the
vertical NOR string includes multiple horizontal control gates each
controlling a respective one of the TFTs in the vertical NOR
string. As the TFTs in a vertical NOR string are connected in
parallel, a read current in a vertical NOR string is conducted over
a much lesser resistance than the read current through a NAND
string of a comparable number of TFTs. To read or program any one
of the TFTs in a vertical NOR string, only that TFT needs to be
activated, all other TFTs in the vertical NOR string can remain
non-conducting.
[0021] Consequently, a vertical NOR string may include many more
TFTs (e.g., several hundreds or more), while allowing faster
sensing and minimizing program-disturb or read-disturb
conditions.
[0022] In one embodiment, the shared drain region of a vertical NOR
string is connected to a global bit line ("voltage V.sub.bl") and
the shared source region of the vertical NOR string is connected to
a global source line ("voltage V.sub.ss"). Alternatively, in a
second embodiment, only the shared drain region is connected to a
global bit line biased to a supply voltage, while the shared source
region is pre-charged to a voltage determined by a quantity of
charge in the shared source region. To perform the pre-charge, one
or more dedicated TFTs may be provided to pre-charge the parasitic
capacitance C of the shared source region.
[0023] According to one embodiment of the present invention,
multi-gate NOR flash thin-film transistor string arrays
("multi-gate NOR string arrays") are organized as arrays of
vertical NOR strings each running perpendicular to the surface of a
silicon substrate. Each multi-gate NOR string array includes a
number of vertical active columns arranged in rows, each row
extending along a first horizontal direction, with each active
column having two vertical heavily-doped polysilicon regions of a
first conductivity, which are separated by one or more vertical
polysilicon regions that are undoped or lightly doped to a second
conductivity. The heavily-doped regions each form a shared source
or drain region and, in conjunction with one or more stacks of
horizontal conductors each extending orthogonally to the first
horizontal direction, the lightly-doped regions each form multiple
channel regions. A charge-trapping material forms multiple storage
elements, covering at least the channel regions of TFTs in the
active column. The horizontal conductive lines in each stack are
electrically isolated from each other and form control gates over
the storage elements and the channel regions of the active column.
In this manner, the multi-gate NOR string array forms a
three-dimensional array of storage TFTs.
[0024] In one embodiment, support circuitry is formed in a
semiconductor substrate to support multiple multi-gate NOR string
arrays formed above the support circuitry and the semiconductor
substrate. The support circuitry may include address encoders,
address decoders, sense amplifiers, input/output drivers, shift
registers, latches, reference cells, power supply lines, bias and
reference voltage generators, inverters, NAND, NOR, Exclusive-Or
and other logic gates, other memory elements, sequencers and state
machines, among others. The multi-gate NOR string arrays may be
organized as multiple blocks of circuits, with each block having
multiple multi-gate NOR string arrays.
[0025] According to embodiments of the present invention,
variations in threshold voltages of TFTs within a vertical NOR
string may be compensated by providing one or more electrically
programmable reference vertical NOR strings in the same or another
multi-gate vertical NOR string array. Background leakage currents
inherent to a vertical NOR string can be substantially neutralized
during a read operation by comparing the results of the TFT being
read to that of a TFT that is concurrently read on a programmable
reference vertical NOR string. In some embodiments, each TFT of a
vertical NOR string is shaped so as to amplify the capacitive
coupling between each control gate and its corresponding channel
region thereby to enhance tunneling from the channel regions into
the charge-trapping material (i.e., the storage element) during
programming, and to reduce the charge injection from the control
gate to the charge-trapping material during erasing. This favorable
capacitive coupling is particularly useful for storing more than
one bit in each TFT of a vertical NOR string. In another
embodiment, the charge-trapping material of each TFT may have its
structure modified to provide a high write/erase cycle endurance,
albeit at a lower retention time that requires refreshing of the
stored data. However, as the refreshing required of a vertical NOR
string array is expected to be much less frequently than in a
conventional dynamic random-access memory (DRAM), the multi-gate
NOR string arrays of the present invention may operate in some DRAM
applications. Such use of the vertical NOR strings allows a
substantially lower cost-per-bit figure of merit, as compared to
conventional DRAMs, and a substantially lower read-latency, as
compared to conventional NAND string arrays.
[0026] In another embodiment the vertical NOR string can be
programmed, erased and read as NROM/Mirror-bit TFT string.
[0027] Organizing the TFTs as vertical NOR strings--rather than the
prior art vertical NAND strings--results in (i) a reduced
read-latency that can approach that of a dynamic random access
memory (DRAM) array, (ii) reduced sensitivities to read-disturb and
program-disturb conditions that are associated with long NAND Flash
strings, and (iii) reduced cost per bit, as compared to a NAND
Flash string.
[0028] According to an alternative embodiment of the present
invention, each active column in the memory structure includes one
or more vertical NOR strings, with each NOR string having thin-film
storage transistors sharing a local source line and a local bit
line, the local bit line is connected by one segment of a segmented
global bit line to a sense amplifier provided in the semiconductor
substrate. To significantly reduce the read sense latency, rather
than a global bit line that spans a substantial distance (e.g.,
between a half to the complete length of the chip), multiple,
shorter global bit line segments are provided. Each such global
segment connects one or more neighboring local bit lines through a
segment connector to a segment sense amplifier provided in the
semiconductor substrate. In embodiments in which the local source
lines are pre-charged to a virtual ground voltage (e.g., V.sub.ss),
the parasitic capacitance of the virtual ground is increased
substantially by providing a short global source line segment
connector which connects a group of neighboring local source lines
into one local source line segment. The number of local source
lines included in the segment determines the combined parasitic
capacitance (C).
[0029] The present invention is better understood upon
consideration of the detailed description below, in conjunction
with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0030] FIG. 1a shows three-dimensional vertical NAND strings 111
and 112 in the prior art.
[0031] FIG. 1b shows basic circuit representation 140 of a
three-dimensional vertical NAND string in the prior art.
[0032] FIG. 1c shows a three-dimensional representation of a block
of three-dimensional vertical NAND strings addressed by wrap-around
stacked word lines 150.
[0033] FIG. 2 shows conceptualized memory structure 100, which
illustrates a 3-dimensional organization of memory cells; the
memory cells are provided in vertical NOR strings, with each
vertical NOR string having memory cells each being controlled by
one of a number of horizontal word lines, according to one
embodiment of the present invention.
[0034] FIG. 3a shows a basic circuit representation in a Z-Y plane
of vertical NOR string 300 formed in an active column; vertical NOR
string 300 represents a three-dimensional arrangement of
non-volatile storage TFTs, with each TFT sharing local source line
(LSL) 355 and local bit line (LBL) 354, being accessed respectively
by global bit line (GBL) 314 and global source line (GSL) 313
according to one embodiment of the current invention.
[0035] FIG. 3b shows a basic circuit representation in a Z-Y plane
of vertical NOR string 305 formed in an active column; vertical NOR
string 305 represents a three-dimensional arrangement of
non-volatile storage TFTs, including a dedicated pre-charge TFT 370
for setting a voltage ("V.sub.ss") on shared local source line 355,
which has a parasitic capacitance C, according to one embodiment of
the present invention.
[0036] FIG. 3c shows a basic circuit representation of dynamic
non-volatile storage transistor 317 having one or more programmed
threshold voltages and connected to parasitic capacitor 360;
capacitor 360 is pre-charged to temporarily hold a virtual voltage
V.sub.ss on source terminal 355 so as to allow the threshold
voltage of transistor 317 to be dynamically detected by the
discharging of voltage V.sub.ss, when control gate 323p is raised
to a voltage that exceeds the threshold voltage.
[0037] FIG. 3d shows a variation of the vertical NOR memory array
circuit architecture in the embodiment of FIG. 3a, in which global
bit line (GBL) 314 is replaced by bit line segments MSBL.sub.1,
MSBL.sub.2, . . . , each connecting multiple neighboring local
vertical bit lines 374-1, 374-2, . . . ; the segments are in turn
connected through segment-select thin-film transistors 586-1, . . .
, 586-n to regional bit line segments SGBL.sub.1, SGBL.sub.2, . . .
that are each associated with multiple bit line segments, and that
are isolated by dielectric 393 from the sense amplifiers and other
circuitry in silicon substrate 310 below them.
[0038] FIG. 3e shows a variation in the circuit architecture in the
embodiment of FIG. 3d, in which global source-select line 313
accesses, through source-select transistor SLS.sub.1, a group of
neighboring vertical local source lines 375-1, 375-2, . . . that
are associated with source line segment MSSL.sub.1.
[0039] FIG. 3f shows a variation in circuit architecture in the
embodiment of FIG. 3e, in which global source line 313 is
eliminated and replaced by local source line segment MSSL.sub.1
connecting vertical local source lines 375-1, 375-2, . . . , which
are charged and held at virtual ground voltage Vss through
pre-charge transistors (e.g., pre-charge transistor 370).
[0040] FIG. 3g shows a variation in circuit architecture in the
embodiment of FIG. 3f, in which regional bit line segments
SGBL.sub.1, SGBL.sub.2, . . . , are merged with bit line segments
MSBL.sub.1, MSBL.sub.2, . . . , and are connected through vias 322
to segment-select transistors 315-1, 315-2 . . . , which are
located in the substrate (thereby replacing segment-select
thin-film transistors 586-1, 586-2, . . . , of FIG. 3d.
[0041] FIG. 3h shows a circuit architecture of the embodiment in
FIG. 3g, in which two neighboring bit line segments MSBL.sub.1,
MSBL.sub.2 have their local source line segments MSSL.sub.1,
MSSL.sub.2 connected from substrate 310 through dedicated active
vertical column 381 formed in the space labeled BL0 between the two
bit line segments.
[0042] FIGS. 3i and 3i-1 (the the key to 3i and 3i-1) is show a top
X-Y plane view of the embodiment of FIG. 3h, in which each vertical
local source line in source segment MSSL.sub.1 is held at voltage
Vss or Vbl supplied through column 381.
[0043] FIG. 4a is a cross section in a Z-Y plane showing
side-by-side active columns 431 and 432, each of which may form a
vertical NOR string that has a basic circuit representation
illustrated in either FIG. 3a or FIG. 3b, according to one
embodiment of the present invention.
[0044] FIG. 4a-1 is a top view of a vertical NOR string of FIG. 4a,
in which the conductivity of the vertical local source line or
drain line is enhanced by including metallic material 420(M) in the
core of the pillars of the local source line or drain line.
[0045] FIG. 4b is a cross section in the Z-X plane showing active
columns 430R, 430L, 431R and 431L, charge-trapping layers 432 and
434, and word lines 423p-L and 423p-R, according to one embodiment
of the present invention.
[0046] FIG. 4c shows a basic circuit representation in the Z-X
plane of vertical NOR string pairs 491 and 492, according to one
embodiment of the present invention.
[0047] FIG. 5a is a cross section in the Z-Y plane showing
connections of a vertical NOR string of active column 531 to global
bit line 514-1 (GBL.sub.1), global source line 507 (GSL.sub.1), and
common body bias source 506 (V.sub.bb), according to one embodiment
of the present invention.
[0048] FIG. 5b is a cross section in the Z-Y plane showing,
according to one embodiment of the present invention, connection of
body region 556 (providing the P.sup.- channel material) to
conductive pillar 591, which is formed in dielectric layer 592 out
of P.sup.+ polysilicon, for example, to conductor 590 provided
above active column 581 and running parallel to the word lines;
conductor 590 receives body bias voltage V.sub.bb from voltage
source 594 in substrate 505 through via 593 in an opening through
dielectric isolation 509.
[0049] FIG. 6a is a cross section in the X-Y plane showing,
according to one embodiment of the present invention, TFT 685
(T.sub.L) of vertical NOR string 451a and TFT 684 (T.sub.R) of
vertical NOR string 451b in vertical NOR string pair 491, as
discussed in conjunction with FIG. 4c; in FIG. 6a, global bit line
614-1 accesses alternate ones of local bit lines LBL-1, and
predetermined curvature 675 of transistor channel 656L amplifies
the capacitive coupling between each control gate and the
corresponding channel during programming
[0050] FIG. 6b is a cross section in the X-Y plane showing,
according to one embodiment of the current invention, TFT
685(T.sub.L) of vertical NOR string 451a sharing an active region
with TFT 684 (T.sub.R) of vertical NOR string 451b in vertical NOR
string pair 491, as discussed in conjunction with FIG. 4c; in FIG.
6b, global bit line 614-1 accesses alternate (odd) ones of local
bit lines 654 (LBL-1), global bit line 614-2 addresses alternate
(even) ones of local bit lines 657-2 (LBL-2), local source lines
LSL-1 and LSL-2 are pre-charged to provide virtual supply voltage
V.sub.ss.
[0051] FIG. 6c is a cross section in the X-Y plane showing, in
accordance with one embodiment of the current invention, dedicated
word line stacks 623p, each having word lines each surrounding
("wrapping around") a TFT of a vertical NOR string, and local
vertical pillar bit line 654 (extending along the Z-direction) and
local vertical pillar source line 655 (extending along the
Z-direction), which are accessed by global horizontal bit line 614
and global horizontal source line 615, respectively; in FIG. 6c,
adjacent word line stacks 623p are isolated from each other by air
gap 610 or another dielectric isolation.
[0052] FIG. 6d is a cross section in the X-Y plan showing,
according to the embodiment of the present invention, staggered
close-packing of vertical NOR strings, similar to those shown in
FIG. 6c, sharing word-line stacks 623p and with pre-charged
parasitic capacitors 660 each providing a pre-charged virtual
V.sub.ss supply voltage.
[0053] FIG. 6e shows in the X-Y plane providing body bias voltage
V.sub.bb (e.g., through conductors 690-1 and 690-2) that is shared
between body regions 656 (L+R) in adjacent rows of active columns,
using the layout of the embodiment shown in FIG. 6b.
[0054] FIG. 6f illustrates one implementation of global word lines
for connecting the local word lines on one plane (i.e., at one
stair-case step) in conjunction with the bit line segmentation
scheme of the present invention.
[0055] FIG. 6g illustrates one implementation of a vertical NOR
string memory array that avoids doubling of the silicon area taken
up by word line stair-case steps when the number of layers of
storage transistors are doubled in the vertical direction,
according to one embodiment of the present invention.
[0056] FIGS. 7a, 7b, 7c and 7d are cross sections of intermediate
structures formed in a fabrication process for a multi-gate NOR
string array, in accordance with one embodiment of the present
invention.
[0057] FIG. 7d-1 shows in the X-Y plane the inclusion of conductive
material 720(M) at the core of vertical pillars of the local source
line or local bit line.
[0058] FIG. 8a is a schematic representation of a read operation
for embodiments where the local source line (LSL) of a vertical NOR
string is hard-wired; in FIG. 8a, "WLs" represents the voltage on
the selected word line, and all non-select word lines ("WL.sub.NS")
in the vertical NOR string are set at 0V during the read
operation.
[0059] FIG. 8b is a schematic representation of a read operation
for embodiments where the local source line is floating at
pre-charge virtual voltage V.sub.ss; in FIG. 8b, "WL.sub.CHG"
represents the gate voltage on the pre-charge transistor (e.g.,
pre-charge transistor 317 or 370 in FIG. 3c).
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0060] FIG. 2 shows conceptualized memory structure 100, which
illustrates a 3-dimensional organization of memory cells (or
storage elements) provided in vertical NOR strings. In
conceptualized memory structure 100, each vertical NOR string
includes memory cells that are each controlled by a corresponding
horizontal word line, according to one embodiment of the present
invention. In conceptualized memory structure 100, each memory cell
is formed in deposited thin films provided "vertically", i.e.,
along a direction perpendicular to the surface of substrate layer
101. Substrate layer 101 may be, for example, a conventional
silicon wafer used for fabricating integrated circuits, familiar to
those of ordinary skill in the art. In this detailed description, a
Cartesian coordinate system (such as indicated in FIG. 2) is
adopted solely for the purpose of facilitating discussion. Under
this coordinate system, the surface of substrate layer 101 is
considered a plane which is parallel to the X-Y plane. Thus, as
used in this description, the term "horizontal" refers to any
direction parallel to the X-Y plane, while "vertical" refers to the
Z-direction.
[0061] In FIG. 2, each vertical column in the Z-direction
represents storage elements or TFTs in a vertical NOR string (e.g.,
vertical NOR string 121). The vertical NOR strings are arranged in
a regular manner in rows each extending along the X-direction. (Of
course, the same arrangement may also be seen alternatively as an
arrangement of rows each extending along the Y-directions). The
storage elements of a vertical NOR string share a vertical local
source line and a vertical local bit line (not shown). A stack of
horizontal word lines (e.g., WL 123) run along the Y-direction,
with each word line serving as control gates for corresponding TFTs
of vertical NOR strings located adjacent the word line along the
Y-direction. Global source lines (e.g., GSL 122) and global bit
lines (e.g., GBL 124) are provided along the X-direction generally
running either below the bottom of or on top of conceptualized
memory structure 100. Alternatively, signal lines GSL 122 and GBL
124 can both be routed below (or both be routed on top of)
conceptualized memory structure 100, each of these signal lines may
be selectively connected by access transistors (not shown) to the
local source lines and local bit lines of individual vertical NOR
strings. Unlike a vertical NAND string of the prior art, in a
vertical NOR string of the present invention, writing or reading
any one of its storage elements does not involve activation of any
other storage element in the vertical NOR string. As shown in FIG.
2, solely for illustrative purpose, conceptualized memory block 100
is a multi-gate vertical NOR string array consisting of a 4.times.5
arrangement of vertical NOR strings, with each NOR string typically
having 32 or more storage elements and access selection
transistors. As a conceptualized structure, memory block 100 is
merely an abstraction of certain salient characteristics of a
memory structure of the present invention. Although shown in FIG. 2
as a 4.times.5 arrangement of vertical NOR strings, with each
vertical NOR strings having a number of storage elements, a memory
structure of the present invention may have any number of vertical
NOR strings in each row along either of the X- and Y-directions,
and any number of storage elements in each vertical NOR string. For
example, there may be thousands of vertical NOR strings arrayed in
rows along both the X- and Y-directions, with each NOR string
having, for example, 2, 4, 8, 16, 32, 64, 128, or more storage
elements.
[0062] The number of storage elements in each vertical NOR string
of FIG. 2 (e.g., vertical NOR string 121) corresponds to the number
of word lines (e.g., WL 123) providing control gates to the
vertical NOR string. The word lines are formed as narrow, long
metallic strips each extending along the Y-direction. The word
lines are stacked one on top of each other, and electrically
isolated from each other by dielectric insulation layers
there-between. The number of word lines in each stack may be any
number, but preferably an integer power of 2 (i.e., 2.sup.n, where
n is an integer). The selection of a power of 2 for the number of
word lines follows a customary practice in conventional memory
design. It is customary to access each addressable unit of memory
by decoding a binary address. This custom is a matter of preference
and need not be followed. For example, within the scope of the
present invention, conceptualized memory structure 100 may have M
vertical NOR strings along each row in the X- and Y-directions,
with M being a number that is not necessarily 2.sup.n, for any
integer n. In some embodiments to be described below, two vertical
NOR strings may share a vertical local source line and a vertical
local bit line, but their respective storage elements are
controlled by two separate word line stacks. This effectively
doubles the storage density of the vertical NOR string.
[0063] As conceptualized memory structure 100 of FIG. 2 is provided
merely to illustrate an organization of memory cells, it is not
drawn to specific scale in any of the X-, Y-, and Z-directions.
[0064] FIG. 3a shows a basic circuit representation in a Z-Y plane
of vertical NOR string 300 formed in an active column; vertical NOR
string 300 represents a three-dimensional arrangement of
non-volatile storage TFTs, with each TFT sharing local source line
355 and local bit line 354, according to one embodiment of the
current invention. In this detailed description, the term "active
region," "active column" or "active strip" refers to a region,
column or strip of one or more semiconductor materials on which an
active device (e.g., a transistor or a diode) may be formed. As
shown in FIG. 3a, vertical NOR string 300 runs along the
Z-direction, with TFTs 316 and 317 connected in parallel between
vertical local source line 355 and vertical local drain or bit line
354. Bit line 354 and source line 355 are spaced apart, with the
region there-between (i.e., body region 356) providing channel
regions for the TFTs in the vertical NOR string. Storage elements
are formed at the intersections between channel region 356 and each
horizontal word line 323p, where p is the index of the word line in
the word line stack; in this example, p may take any value between
0 and 31. The word lines extend along the Y-direction. Local bit
line 354 is connected through bit line access select transistor 311
to horizontal global bit line (GBL) 314, which runs along the
X-direction and connects local bit line 354 to access bit line
supply voltage V.sub.bl. Local source line 355 is connected through
horizontal global source line (GSL) 313 to source supply voltage
V.sub.ss. An optional source-select transistor (not shown in FIG.
3a) can be provided to connect between local source line 355 and
GSL 313. The optional source-select transistor may be controlled by
source decoding circuitry which can be implemented either in the
substrate (e.g., semiconductor substrate 101 of FIG. 2) or above
the substrate and below memory structure 100, as is known to a
person skilled in the art. Body region 356 of the active column may
be connected at terminal 331 to substrate bias voltage V.sub.bb.
Substrate bias voltage V.sub.bb may be used, for example during an
erase operation. The V.sub.bb supply voltage can be applied to an
entire multi-gate vertical NOR string array, or be applied
selectively to one or more rows of vertical NOR strings via a
decoding mechanism. Lines connecting the V.sub.bb supply voltage to
body region 356 run preferably along the direction of the word
lines.
[0065] FIG. 3b shows a basic circuit representation in a Z-Y plane
of vertical NOR string 305 formed in an active column; vertical NOR
string 305 represents a three-dimensional arrangement of
non-volatile storage TFTs, including (optionally) dedicated
pre-charge TFT 370 for momentarily setting a voltage ("V.sub.ss")
on shared local source line 355, which has a parasitic capacitance
C (represented by capacitor 360), according to one embodiment of
the present invention. Unlike vertical NOR string 300 of FIG. 3a,
vertical NOR string 305 does not implement GSL 313, replacing it
with pre-charge transistor 370 which pre-charges parasitic
capacitor 360, which temporarily holds a voltage of V.sub.ss volts.
Under this pre-charging scheme, global source lines (e.g., global
source lines 313 of FIG. 3a) and its decoding circuitry are
rendered unnecessary, thereby simplifying both the manufacturing
process as well as circuit layout, and providing a very tight
footprint for each vertical NOR string. FIG. 3c highlights the
structure of non-volatile storage TFT 317, which can also be used,
in addition to its normal storage function, to perform the
pre-charge function of dedicated pre-charge transistor 370. A
dynamic read operation for TFT 317 is described below in
conjunction with sensing the correct one of several threshold
voltages that is programmed into storage element 334 of TFT
317.
[0066] FIG. 4a is a cross section in a Z-Y plane showing
side-by-side active columns 431 and 432, each of which may form a
vertical NOR string that has a basic circuit representation
illustrated in either FIG. 3a or FIG. 3b, according to one
embodiment of the present invention. As shown in FIG. 4a, active
columns 431 and 432 each include vertical N+ doped local source
region 455 and vertical N+ doped local drain or bit line region
454, separated by lightly P- doped or undoped channel region 456.
P- doped channel region 456, N+ doped local source region 455 and
N+ doped local drain or bit line region 454 may be biased to body
bias voltage V.sub.bb, source supply voltage V.sub.ss, and bit line
voltage V.sub.bl, respectively. In some embodiments of the current
invention, use of body bias voltage V.sub.bb is optional, such as
when the active strip is sufficiently thin (e.g., 10 nanometers or
less). For a sufficiently thin active strip, the active region is
readily fully depleted under appropriate voltage on the control
gate, such that voltage V.sub.bb may not provide a solid supply
voltage to the channel regions of the TFTs along the vertical NOR
string. Isolation region 436, which electrically insulates active
columns 431 and 432, may be either a dielectric insulator or an
air-gap. A vertical stack of word lines 423p, respectively labeled
WL0-WL3i (and optionally WL.sub.CHG), provides control gates to the
TFTs in the vertical NOR strings formed in active columns 431 and
432. Word line stack 423p is typically formed as long narrow
metallic conductors (e.g., tungsten, a silicide or silicide) that
extend along the Y-direction, electrically isolated from each other
by dielectric layers 426, each typically formed out of silicon
oxide (e.g., SiO.sub.2) or an air gap. A non-volatile storage
element may be formed at the intersection of each word line 423p
and each P- doped channel region 456 by providing a charge-trapping
material (not shown) between word line 423p and P- doped channel
region 456. For example, FIG. 4a indicates by dashed boxes 416 the
locations where nonvolatile storage elements (or storage
transistors) T.sub.0 to T.sub.31 may be formed. Dashed box 470
indicates where a dedicated pre-charge transistor may be formed,
which, when momentarily switched on, allows charge to be
transferred from common local bit line region 454 to common local
source line region 455 when all transistors T.sub.0 to T.sub.31 are
in their off state.
[0067] FIG. 4b is a cross section in the Z-X plane showing active
columns 430R, 430L, 431R and 431L, charge-trapping layers 432 and
434, and word line stacks 423p-L and 423p-R, according to one
embodiment of the present invention. Similar to FIG. 4a, each of
vertical word line stacks 423p-L and 423p-R in FIG. 4b denotes a
stack of long narrow conductors, where p is an index labeling the
word lines in stack (e.g., word lines WL.sub.0 to WL.sub.31). As
shown in FIG. 4b, each word line serves as control gates for the
nonvolatile TFTs in the vertical NOR strings formed on adjacent
active columns 430-L and 431-R on opposite sides of the word line
(within region 490). For example, in FIG. 4b, word line WL.sub.31
in word line stack 423p-R serves as control gates for both
transistor 416L on active column 430L and transistor 416R on active
column 431R. Adjacent word line stacks (e.g., word lines stacks
423p-L and 423p-R) are separated by a distance 495, which is the
width of a trench formed by etching through successive word line
layers, as described below. Active columns 430R and 430L, and their
respective charge-trapping layers 432 and 434, are subsequently
formed inside the trench etched through the word line layers.
Charge-trapping layer 434 is provided interposed between word line
stack 423p-R and vertical active columns 431R and 430L. As
elaborated below, during programming of transistor 416R, charge
injected into charge-trapping layer 434 is trapped in the portion
of charge-trapping layer 434 within dash box 480. The trapped
charge alters the threshold voltage of TFT 416R, which may be
detected by measuring a read current flowing between local source
region 455 and local drain region 454 on active column 431R (these
regions are shown, e.g., FIG. 4a in the orthogonal cross section of
the active column). In some embodiments, pre-charge word line 478
(i.e., WL.sub.CHG) is provided as control gate of pre-charge TFT
470 that is used to charge parasitic capacitance C of local source
line 455 (see, capacitor 360 of FIG. 3b and local source line 455
of FIG. 4a) to a ground or source supply voltage V.sub.ss. For
expediency, charge-trapping layer 434 also provides a storage
element in pre-charge transistor 470, which however is not itself
used as a memory transistor. Pre-charging may alternatively be
performed using any of memory transistors T.sub.0 to T.sub.31
formed on active column 431R. One or more of these memory
transistors, in addition to their storage function, can perform the
function of the pre-charge transistor. To perform the pre-charge,
the voltage on the word line or control gate is temporarily raised
to a few volts above its highest programmable threshold voltage,
thereby allowing voltage V.sub.ss applied to local bit line 454 to
be transferred to local source line 455 (FIG. 4a). Having memory
transistors T.sub.0 to T.sub.31 perform the pre-charge function
eliminates the need for separate dedicated pre-charge TFT 470. Care
must be taken, however, to avoid unduly disturbing the threshold
voltage of such memory TFT when it is performing its pre-charging
function.
[0068] Although active columns 430R and 430L are shown in FIG. 4b
as two separate active columns separated by an air-gap or
dielectric insulation 433, the adjacent vertical N+ local source
lines may be implemented by a single shared vertical local source
line. Likewise, the vertical N+ local drain or bit lines may be
implemented by a single shared vertical local bit line. Such a
configuration provides "vertical NOR string pair". In that
configuration, active columns 430L and 430R may be seen as two
branches (hence the "pair") in one active column. The vertical NOR
string pair provides double-density storage through charge-trapping
layers 432 and 434 interposed between active columns 430R and 430L
and word lines stacks 423p-L and 423p-R on opposite sides. In fact,
active columns 430R and 430L may be merged into one active string
by eliminating the air gap or dielectric insulation 433, yet still
achieve the pair of NOR TFT strings implemented at the two opposite
faces of the single active column. Such a configuration achieves
the same double-density storage, as the TFTs formed in the opposite
faces of the active columns are controlled by separate word line
stacks and are formed out of separate charge-trapping layers 434
and 432. Maintaining separate thin active columns 430R and 430L
(i.e., instead of merging them into one active column) is
advantageous because TFTs on each active column are thinner than
the merged column and can therefore more readily be fully depleted
under appropriate control gate voltage conditions, thereby
substantially reducing source-drain subthreshold leakage current
between vertical source regions 455 and vertical drain regions 454
of the active columns (FIG. 4a). Having ultra-thin (and therefore
highly resistive) active columns is possible for even very long
vertical NOR strings (e.g., 128 TFTs or longer) because the TFTs in
a vertical NOR string are connected in parallel and because only
one of the many TFTs is switched on at any one time, in contrast
with the high resistance of a NAND TFT string where TFTs in the
string are connected in series and must therefore all be switched
on to sense any one of TFTs in the string. For example, in a 32-TFT
vertical NOR string, to be able to read transistor T.sub.30 (FIG.
4a), the channel length of channel region 456 may span just 20
nanometers, as compared to the corresponding channel length of a
NAND string, which may be 32 times longer, or 640 nanometers.
[0069] FIG. 4c shows a basic circuit representation in the Z-X
plane of vertical NOR string pairs 491 and 492, according to one
embodiment of the present invention. As shown in FIG. 4c, vertical
NOR strings 451b and 452a share a common word line stack 423p-R, in
the manner shown for the vertical NOR strings of active strips 430L
and 431R of FIG. 4b. For their respective commonly-connected local
bit lines, vertical NOR string pairs 491 and 492 are served by
global bit line 414-1 (GBL.sub.1) through access select transistor
411 and global bit line 414-2 (GBL.sub.2) through access select
transistor 414, respectively. For their respective
commonly-connected local source lines, vertical NOR string pairs
491 and 492 are served by global source line 413-1 (GSL.sub.1) and
global source line 413-2 (GSL.sub.2), respectively (source line
select access transistors can be similarly provided and are not
shown in FIG. 4c). As shown in FIG. 4c, vertical NOR string pair
491 includes vertical NOR strings 451a and 451b that share local
source line 455, local bit line 454, and optional body connection
456. Thus, vertical NOR string pair 491 represent the vertical NOR
strings formed on active columns 430R and 430L of FIG. 4b. Word
line stacks 423p-L and 423p-R (where, in this example,
31.gtoreq.p.gtoreq.0) provide control gates for vertical NOR string
451a and vertical NOR string 451b, respectively. The word lines to
control gates in the stack are decoded by decoding circuitry formed
in the substrate to ensure that appropriate voltages are applied to
the addressed TFT (i.e., the activated word line) and to the
unaddressed TFTs (i.e., all other non-activated word lines in the
string). FIG. 4c illustrates how storage transistors 416L and 416R
on active columns 430L and 431R of FIG. 4b are served by the same
word line stack 423p-R. Thus, vertical NOR string 451b of vertical
NOR string pair 491 and vertical NOR string 452a of vertical string
pair 492 correspond to the adjacent vertical NOR strings formed on
active columns 430L and 431R of FIG. 4b. Storage transistors of
vertical NOR string 451a (e.g., storage transistor 415R) are served
by word line stack 423p-L.
[0070] In another embodiment, the hard-wired global source lines
413-1, 413-2 of FIG. 4c are eliminated, to be substituted for by a
parasitic capacitance (e.g., the parasitic capacitance represented
by capacitor 460 of FIG. 4c or capacitor 360 of FIG. 3c) between
shared N+ local source line 455--which is common to both vertical
NOR strings 451a and 451b--and its numerous associated word lines
423p-L and 423p-R. In a vertical stack of 32 TFTs, each of the 32
word lines contribute their parasitic capacitance to provide total
parasitic capacitance C, such that it is sufficiently large to
temporarily hold the voltage supplied by pre-charge TFT 470 to
provide a virtual source voltage V.sub.ss during the relatively
short duration of read or programming operations. In this
embodiment, the virtual source voltage temporarily held on the
parasitic capacitor (C) is provided to local source line 455 from
global bit line GBL.sub.1 through access transistor 411 and
pre-charge transistor 470. Alternatively, dedicated pre-charge
transistor 470 can be eliminated, if one or more of the memory TFTs
in the vertical NOR sting are used, in addition to their storage
function, to pre-charge local source line 455, by bringing its word
line voltage momentarily higher than its highest programmed
voltage. Using a storage TFT for this purpose, care must be taken,
however, to avoid over-programming the storage TFT. Using the
virtual V.sub.ss voltage provides the significant advantage of
eliminating hard-wired global source lines (e.g., GLS.sub.1,
GLS.sub.2) and their associated decoding circuitry and access
transistors, thereby materially simplifying the process flow and
design challenges and resulting in a significant more compact
vertical NOR string.
[0071] FIG. 5a is a cross section in the Z-Y plane showing
connections of vertical NOR string of active column 531 to global
bit line 514-1 (GBL.sub.1), global source line 507 (GSL.sub.1), and
common body bias source 506 (V.sub.bb), according to one embodiment
of the present invention. As shown in FIG. 5a, bit-line access
select transistor 511 connects GBL.sub.1 with local bit line 554,
and buried contact 556 optionally connects a P- body region on the
active strip to body bias source 506 (V.sub.bb) in the substrate.
Bit-line access select transistor 511 is formed in FIG. 5a above
active column 531. However, alternatively, bit-line access select
transistor 511 may be formed at the bottom of active column 531 or
in substrate 505 (not shown in FIG. 5a). In FIG. 5a, bit-line
access select transistor 511 can for example be formed in an
isolated island of an N+/P-/N+ doped polysilicon stack together
with access select word line 585. When a sufficiently large voltage
is applied to select word line 585, the P- channel is inverted,
thereby connecting local bit line 554 to GBL.sub.1. Word line 585
runs along the same direction (i.e., the Y-direction) as the word
lines 523p which serve as control gates to the TFTs of the vertical
NOR string. Word line 585 may be formed separately from word lines
523p. In one embodiment, GBL.sub.1 runs horizontally along the
X-direction (i.e., perpendicular to the directions of the word
lines), and bit-line access select transistor 511 provides access
to local bit line 554, which is the local bit line of merely one of
many vertical NOR strings that are served by GBL.sub.1. To increase
read and program operation efficiency, in a multi-gate NOR string
array, thousands of global bit lines may be used to access in
parallel the local bit lines of thousands of vertical NOR strings
that are accessed by word line 585. In FIG. 5a, local source line
555 is connected through contact 557 to global source line 513-1
(GSL.sub.1), which may be decoded, for example by decoding
circuitry in substrate 505. Alternatively, as described already,
the global source line may be eliminated by providing a virtual
source voltage V.sub.ss on local bit line 555 and temporarily
pre-charging the parasitic capacitor 560 (i.e., parasitic
capacitance C) of local source line 555 through TFT 570.
[0072] Support circuitry formed in substrate 505 may include
address encoders, address decoders, sense amplifiers, input/output
drivers, shift registers, latches, reference cells, power supply
lines, bias and reference voltage generators, inverters, NAND, NOR,
Exclusive-Or and other logic gates, other memory elements,
sequencers and state machines, among others. The multi-gate NOR
string arrays may be organized as multiple blocks of circuits, with
each block having multiple multi-gate NOR string arrays.
[0073] FIG. 6a is a cross section in the X-Y plane, showing TFT 685
(T.sub.L) of vertical NOR string 451a and TFT 684 (T.sub.R) of
vertical NOR string 451b in vertical NOR string pair 491, as
discussed above in conjunction with FIG. 4c. As shown in FIG. 6,
TFTs 684 and 685 share N+ local source region 655 and N+ local
drain or bit line region 654, both regions extending in long narrow
pillars along the Z-direction. (N+ local source region 655
corresponds to local source line 455 of FIG. 4a, N+ local drain
region 654 corresponds to local bit line 454 of FIG. 4a). In this
embodiment, P- doped channel regions 656L and 656R form a pair of
active strings between local source pillar 655 and local drain
pillar 654 and extend along the Z-direction, isolated from each
other by isolation region 640. Charge-trapping layer 634 is formed
between word lines 623p-L (WL.sub.31-0) and 623p-R (WL.sub.31-1)
and the outside of channel regions 656L and 656R respectively.
Charge trapping layer 634 may be a transistor gate dielectric
material consisting of, for example, a thin film of tunnel
dielectric (e.g., silicon dioxide), followed by a thin layer of
charge trapping material such as silicon nitride or conductive
nanodots embedded in a non-conducting dielectric material, or
isolated floating gates, and is capped by a layer of blocking
dielectric such as ONO (an oxide-nitride-oxide triple-layer) or a
high dielectric constant film such as aluminum oxide or hafnium
oxide or some combination of such dielectrics. Source-drain
conduction is controlled by word lines 623p-L and 623p-R,
respectively, forming control gates on the outside of
charge-trapping layer 634. When programming or reading TFT 684
(T.sub.R), TFT 685 (T.sub.L) is turned off by maintaining an
appropriate inhibit voltage at word line 623p-L. Similarly, when
programming or reading TFT 685 (T.sub.L), TFT 684 (T.sub.R) is
turned off by maintaining an appropriate inhibit voltage at word
line 623p-R.
[0074] In the embodiment shown in FIG. 6a, word lines 623p-L and
623p-R are contoured to enhance tunneling efficiency into the TFTs
684 and 685 during programming, while reducing reverse-tunneling
efficiency during erasing. Specifically, as is known to a person
skilled in the art, curvature 675 of channel region 656R amplifies
the electric field at the interface between the active channel
polysilicon and the tunneling dielectric during programming, while
reducing the electric field at the interface between the word line
and the blocking dielectric during erasing. This feature is
particularly helpful when storing more than one bit per TFT
transistor in a multi-level cell (MLC) configuration. Using this
technique, 2, 3, or 4 bits or more may be stored in each TFT. In
fact, TFTs 684 and 685 may be used as analog storage TFTs with a
continuum of stored states. Following a programming sequence (to be
discussed below), electrons are trapped in charge-trapping layer
634, as indicated schematically by dashed lines 680. In FIG. 6a,
global bit lines 614-1 and 614-2 run perpendicularly to word lines
623p-R and 623p-L and are provided either above or underneath the
vertical NOR strings, corresponding to bit lines 414-1 and 414-2
respectively of FIG. 4c. As discussed above in conjunction with
FIG. 2, the word lines may span the entire length of memory block
100 along the X-direction, while the global bit lines span the
width of memory block 100 along the Y-direction. Of importance, in
FIG. 6a, word line 623p-R is shared by TFTs 684 and 683 of two
vertical NOR strings on opposite sides of word line 623p-R.
Accordingly, to allow TFTs 684 and 683 to be read or programmed
independently, global bit line 614-1 (GBL.sub.1) contacts local
drain or bit line region 657-1 ("odd addresses"), while global bit
line 614-2 (GBL.sub.2) contacts local drain or bit line region
657-2 ("even addresses"). To achieve this effect, contacts along
global bit lines 614-1 and 614-2 are staggered, with each global
bit line contacting every other one of the vertical NOR string pair
along the X-direction row.
[0075] In like manner, global source lines (not shown in FIG. 6a),
which may be located either at the bottom or above the multi-gate
NOR string array, may run parallel to the global bit lines and may
contact the local source lines of vertical NOR string pairs
according to even or odd addresses. Alternatively, where
pre-charging of the parasitic capacitor (i.e., capacitor 660)
temporarily to virtual source voltage V.sub.ss is used, the global
source lines need not be provided, thereby simplifying the decoding
scheme as well as the process complexity.
[0076] FIG. 6a shows only one of several possible embodiments by
which vertical NOR string pairs may be provided with stacked word
lines. For example, curvature 675 in channel region 656R can be
further accentuated. Conversely such curvature can be altogether
eliminated (i.e. straightened out) as shown in the embodiment of
FIG. 6b. In the embodiment of FIG. 6b isolation spacing 640 of FIG.
6a may be reduced or altogether eliminated by merging channel
regions 656L and 656R into a single region 656(L+R), achieving
greater area efficiency without sacrificing the dual-channel
configuration: for example TFTs 685 (T.sub.L) and 684 (T.sub.R)
reside on opposite faces of the same active strip. In the
embodiments of FIGS. 6a, 6b, vertical NOR strings sharing a word
line may be laid out in a staggered pattern relative to each other
(not shown), such that they may be brought closer to each other,
thereby reducing the effective footprint of each vertical NOR
string. Although FIGS. 6a and 6b show direct connection via a
contact between global bit line 614-1 and N+ doped local drain bit
line pillar 654 (LBL-1), such connection can also be accomplished
using a bit-line access selection transistor (e.g., bit line access
select transistor 511 of FIG. 5a, not shown in already crowded
FIGS. 6a and 6b).
[0077] In the embodiments of FIGS. 6a and 6b, dielectric isolation
between N+ doped local drain region 654 and its adjacent local N+
doped source region 658 (corresponding to isolation region 436 of
FIG. 4a) can be established by, for example, defining the
separation 676 between word lines 623p-R and 623p-L to be less than
the thicknesses of two back-to-back charge-trapping layers, so that
the charge-trapping layers are merged together during their
deposition. The resulting merging of the deposited charge-trapping
layers creates the desired dielectric isolation. Alternatively,
isolation between adjacent active strings can be achieved by using
a high aspect-ratio etch of N+ polysilicon to create gap 676 (air
gap or dielectric filled) isolating N+ pillar 658 of one string
from N+ pillar 654 of the adjacent string (i.e., creating gap 436
shown in FIG. 4a).
[0078] Contrasting between the prior art vertical NAND strings and
the vertical NOR strings of the current invention, although both
types of devices employ thin-film transistors with similar word
line stacks as control gates, their transistor orientations are
different: in the prior art NAND string, each vertical active strip
may have 32, 48 or more TFTs connected in series. In contrast, each
active column forming the vertical NOR strings of the present
invention the vertical column may have one or two sets of 32, 48 or
more TFTs connected in parallel. In the prior art NAND strings, the
word lines in some embodiments typically wrap around the active
strip. In some embodiments of the vertical NOR string of the
present invention separate designated left and right word lines are
employed for each active strip, thereby to achieve a doubling (i.e.
a pair) storage density for each global bit line, as illustrated in
FIGS. 4c, 6a and 6b. The vertical NOR strings of the present
invention do not suffer from program-disturb or read-disturb
degradation, nor do they suffer from the slow latency of the prior
art NAND strings. Thus, a much larger number of TFTs may be
provided in a vertical NOR string than in a vertical NAND strings.
Vertical NOR strings, however, may be more susceptible to
subthreshold or other leakage between the long vertical source and
drain diffusions (e.g., local source region 455 and local drain
region 454, respectively, illustrated in FIG. 4a).
[0079] Two additional embodiments of the vertical NOR string of
this invention are shown in FIG. 6c and FIG. 6d. In these
embodiments, all word lines in each word-line stack wrap around the
vertical active strip.
[0080] In FIG. 6c, a vertical NOR string is formed inside the voids
that are formed by etching through a stack of metal word lines and
the dielectric isolation layers between the word lines. The
manufacturing process flow is similar to that of the prior art
vertical NAND strings, except that the transistors in a vertical
NOR string are provided parallel to each other, rather than
serially in a vertical NAND string. Formation of transistors in a
vertical NOR string is facilitated by the N+ doped vertical pillars
extending to the entire depth of the void, providing shared local
source line 655 (LSL) and shared local bit line (drain) 654 (LBL)
for all the TFTs along the vertical NOR string, with undoped or
lightly doped channel region 656 adjacent to both. Charge storage
element 634 is positioned between channel 656 and word line stack
623p, thus forming a stack of 2, 4, 8, . . . 32, 64 or more TFTs
(e.g., device 685 (T.sub.10)) along the vertical active strip. In
the embodiment of FIG. 6c, the word line stacks run in the
Y-direction, with individual horizontal strips 623p (WL.sub.31-0),
623p (WL.sub.31-1) being separated from each other by air gap or
dielectric isolation 610. Global bit lines 614 (GBL) and global
source lines 615 (GSL) run horizontally in rows along the
X-direction, perpendicular to the word lines. Each global bit line
614 accesses local bit line pillars 654 (LBL) along the row of
vertical strips through access select transistors (511 in FIG. 5a,
not shown here) that can be positioned either below the memory
array or above it. Similarly, each global source line 615 accesses
the local source line pillars along the row. While the structures
shown in FIGS. 6a and 6b are able to fit a pair of vertical NOR
strings in roughly the same area taken up by a single vertical NOR
string in the embodiment of FIG. 6c, each TFT in each vertical NOR
string shown in FIG. 6c has two parallel conduction channels (i.e.,
channel regions 656a and 656b), and therefore may store more charge
and increase or double the read current, thereby enabling storing
more bits in each TFT.
[0081] FIG. 6d shows a more compact vertical NOR string with
wrap-around word lines, according to one embodiment of the present
invention. As shown in FIG. 6d, vertical NOR strings are staggered
as to be closer together, so that word line stack 623p
(WL.sub.31-0) can be shared by more vertical NOR strings. The
staggered configuration is enabled by using the parasitic capacitor
(i.e., parasitic capacitors 660) of local source line pillar 655
(LSL). By pre-charging capacitors 660 to temporarily hold virtual
voltage V.sub.ss during read and program operations, as described
below, the need for hard-wired global source lines (e.g., GSL 615
in FIG. 6c) is obviated. Although the vertical NOR strings of FIGS.
6c and 6d may not by themselves offer significant areal
efficiencies, as compared to prior art vertical NAND strings (e.g.,
the NAND strings of FIG. 1c), such vertical NOR strings achieve
much greater string lengths than vertical NAND strings. For
example, while vertical NOR strings of the present invention may
well support strings of length 128 to 512 or more TFTs in each
stack, such string lengths are simply not practical for a vertical
NAND string, given the serious limitations attendant with
series-connected TFT strings.
Alternative Embodiments with Long Global Bit Lines that are
Partitioned into Short, Segmented Bit Lines to Facilitate Fast
Access to Sense Amplifiers
[0082] The inventor notes that, with sense amplifiers and other
support circuits provided in the semiconductor substrate, routing
global bit lines using global interconnect conductors provided
above or below a memory array to connect to vertical local bit
lines (e.g., global bit line GBL1 connecting to the vertical local
bit line 554 of FIG. 5a) results in large RC delays because of the
substantial length of the wiring involved. Furthermore, it is
highly desirable to use the area of the silicon substrate
underneath the memory arrays (as opposed to taking up precious
silicon area beside the arrays) to form the numerous support
circuitry, such as sense amplifiers, decoders, voltage sources and
other circuits necessary for memory operations.
[0083] According to one embodiment of the present invention, a
conductor that otherwise would be used as a global bit line may be
segmented into a multiplicity of relatively short line segments
(e.g., each line segment may have a length that is 1/100 or less of
the global bit line). Each line segment provides a horizontal line
connector for connecting a group of neighboring vertical local bit
lines. The bit line segment may reside preferably between, and
dielectrically isolated from, the substrate and the memory arrays.
The bit line segment facilitates connections between the
neighboring vertical local bit lines in the group and dedicated
sense amplifiers and other support circuits formed in the
semiconductor substrate underneath the array of vertical NOR
strings. In this detailed description, the term "bit line segment"
may refer to the collection of local bit lines connected by a line
connector.
[0084] Similarly, a conductor that otherwise would be used as a
global source line may also be segmented into a multiplicity of
relatively short line segments each providing a horizontal line
connector for connecting a group of neighboring local vertical
source lines. The line connector and its associated local vertical
source lines form a common source line whose parasitic capacitance
is multiple times the parasitic capacitance of just one local
vertical source line. The common source line connector may be
connected by a segment-select transistor to a global source line,
preferably at the top of the array. In this detailed description,
the term "source line segment" may refer to the collection of local
source lines connected by a line connector. Where the source line
segment may be further divided into smaller groups of connected
local source lines, each such smaller group may be referred to as a
"source line sub-segment."
[0085] In another alternative embodiment of the present invention,
global source lines running on top of, or below the memory stacks
are not provided, but each source line segment and its associated
group of neighboring local vertical source lines is operated as a
local common source region. In that configuration, one or more of
pre-charge transistors are provided in each active column connected
to the source line segment to transfer a virtual ground voltage
(V.sub.ss) from the substrate. In a 64-layer vertical NOR memory
array, each local source line may have a parasitic capacitance that
is about 1 femtofarad (i.e., 1.0.times.10.sup.-15 farads), which
provides in some instances too small a charge to maintain a virtual
ground voltage (V.sub.ss) during a charge-sharing read operation.
By combining the capacitances of a group of, say 64 local source
lines, their combined pre-charged capacitance C is increased to
approximately 64 femtofarads, which would be more than adequate for
the charge-sharing read operation.
[0086] FIGS. 3d, 3e, 3f and 3g show embodiments of the present
invention that achieve fast read access and utilize the silicon
substrate underneath the array to form support circuitry, such as
sense amplifiers, decoders, registers, and voltage sources. As
shown in FIG. 3d, vertical NOR string 380 represents a
three-dimensional arrangement of non-volatile storage TFTs, with
each TFT sharing local source line 375 and local bit line 374,
according to one embodiment of the present invention. Local bit
line 374 and local source line 375 are spaced apart by body region
356, which provides channel regions for the TFTs in vertical NOR
string 380. Storage elements are formed at the intersections
between channel region 356 and each horizontal word line 323p,
where p is the index of the word line in the word line stack; in
this example, p may take any value between 0 and 31. The word lines
extend along the Y-direction. In this embodiment, source line
supply voltage Vss is provided to local vertical source line 375
through source select transistor (SLS) 371 from substrate 310
through global source line (GSL.sub.1) 313 shown running on top of
the vertical column Note that body region 356, providing the
transistor channels of the active column, may be connected at
terminal 331 to substrate bias voltage V.sub.bb. However,
electrically connecting the P- doped channel 556 can also be
achieved from the top of the vertical NOR string (see below the
discussion relating to FIG. 5b).
[0087] In FIG. 3d, neighboring active columns (e.g., the active
column of vertical NOR string 380) are grouped, with the local bit
lines of each group of active columns being connected to an
associated bit line segment (e.g., bit line segments MSBL.sub.1 and
MSBL.sub.2) provided beneath the memory array. Bit line segment
MSBL.sub.1 provides a low-resistivity connector 373, which may be
implemented by, for example, a narrow strip of N+ doped
polysilicon, a silicide or a refractory metal. The group of
neighboring local vertical bit lines 374-1, 374-2, . . . 374-n
connected by horizontal bit line segment MSBL.sub.1 may be provided
lengthwise along the X-direction, orthogonally to word lines
WL.sub.0 to WL.sub.31. Bit line segments MSBL.sub.1, MSBL.sub.2, .
. . are formed on dielectric insulator 392 and may be relatively
short, such as encompassing from 1 (i.e., no segmentation) to 16,
64, 256, 512 or more vertical local bit lines. Each bit line
segment can be connected through a segment-select transistor (e.g.,
segment-select transistors 586-1, . . . , 586-n, which may be
implemented as thin-film transistors) to longer horizontal
conductors forming regional bit line segments SGBL.sub.1,
SGBL.sub.2 that include multiple MSBL.sub.1-type bit line segments.
Horizontal regional bit line segment SGBL.sub.1 may be formed on an
insulating layer 393 above substrate 310, to allow logic elements
such as sense amplifiers to be formed in the substrate immediately
underneath the regional bit line segment. Preferably the regional
segment is sufficiently long to allow sense amplifiers, decoders,
registers, voltage sources and other circuitry formed in the
substrate to physically fit underneath the regional bit line
segment.
[0088] In a double-density configuration, such as shown in FIG. 6e,
each word line services both active columns on both sides of the
word line. In that configuration, two adjacent local bit lines on
opposite sides of the word line are associated respectively with
bit line segments MSBL.sub.1(L) and MSBL.sub.1(R) and their
respective segment sense amplifiers and decoders, which are closely
spaced apart from and run parallel to each other. This spacing is
also the spacing along the Y-direction between adjacent vertical
active columns in the memory array. It may not be possible to
provide a dedicated sense amplifier and other supporting circuits
for each of the bit line segments laid out along the Y-direction.
In such an arrangement, each sense amplifier may serve 1, 2, 4, 8
or more adjacent bit line segments through a segment-select decoder
in the substrate. In the X-direction, a 1-terabit 3-dimensional
vertical NOR flash memory chip may have hundreds of regional bit
line segments, rather than a long global bit line, thereby
significantly reducing the bit-line RC delay.
[0089] FIG. 3e shows a variation of the circuit architecture in the
embodiment of FIG. 3d, in which groups of neighboring vertical
local source lines 375-1, 375-2, . . . are connected by source line
segments MSSL.sub.1, MSSL.sub.2, running along the same X-direction
as the bit-line segments. This grouping of local source lines
connected by source line segments reduces the number of source line
select transistors SLS.sub.1, SLS.sub.2, . . . needed to provide
source voltage V.sub.ss to each of the vertical NOR strings
associated with the source line segment. Furthermore, as previously
noted, connecting a group of vertical local source lines by a
source line segment contributes directly to increasing the
cumulative parasitic capacitance (C). The vertical local source
lines connected by a horizontal source line segment are also
closely associated with the vertical local bit lines connected by
the corresponding horizontal bit line segment. However, the number
of vertical local bit-lines associated with a bit line segment need
not be the same as the number of vertical local source lines
associated with a source line segment. As a result, a bit line
segment may be associated, for example, with multiple source line
segments. For example, bit line segment MSBL.sub.1 may be
associated with 256 local vertical bit lines 374-1, 374-2, . . . ,
which may be associated with eight source line segments, each of
which may only be associated with 32 local source lines 375-1,
375-2, . . . . Each source line segment can have its voltage
V.sub.ss separately imparted to it through its dedicated
source-line select transistor (e.g., source-line select transistor
SLS.sub.1).
[0090] FIG. 3f shows a variation of the circuit architecture of the
embodiment in FIG. 3e, in which neither global source line (e.g.,
global source line 313) nor source line-select transistor (e.g.,
source-select transistor SLS.sub.1) is provided. In FIG. 3f, the
local vertical source lines associated with each source line
segment are pre-charged to source voltage V.sub.ss through a
pre-charge transistor (e.g., pre-charge transistor 370) whose word
line W.sub.CHG is turned on with a voltage pulse sufficient to
transfer voltage V.sub.bl supplied from the circuitry in substrate
310 through the associated local vertical bit lines associated with
the source line segment. The number of local vertical bit lines
associated with the source line segment is an optimization between
maximizing the parasitic capacitance (C) of the source line segment
to hold the virtual ground voltage V.sub.ss during a read of the
cell, balanced by the need to keep the background leakage current
attendant to all the "off" transistors in the vertical NOR strings
associated with the source line segment sufficiently low, so as not
to interfere with reading the accessed storage transistor within
the source line segment. Within a bit line segment, any unselected
source line sub-segment can be pre-charges to have its V.sub.ss
voltage equalized with its associated bit line segment voltage
V.sub.bl to eliminate its background leakage current.
[0091] FIG. 3g is a variation of the circuit architecture in the
embodiment of FIG. 3e. In FIG. 3g, the connectivity between the
memory array and the substrate is further simplified by merging
regional bit line segments SGBL.sub.1, SGBL.sub.2, . . . with their
respective local bit line segments MSBL.sub.1, MSBL.sub.2, . . . ,
and having each bit line segment connecting through respective vias
or conductors (e.g., buried contacts) to segment-select transistors
315-1, 315-2, . . . in the substrate underneath the bit line
segments. In this configuration, rather than providing thin-film
segment-select transistors above the silicon substrate (e.g.,
segment-select transistors 586-1, . . . , 586-n of FIG. 3f), the
segment-select transistors are provided by high-efficiency
transistors in single-crystal substrate 310. This configuration
provides robust access to the sense amplifiers, decoders,
registers, voltage sources and other circuitry associated with the
bit line segment. By eliminating global source line select
transistors SLS.sub.1, SLS.sub.2, . . . , made possible by the
pre-charge path, and by eliminating segment-select thin-film
transistors 586-1, . . . , 586-n (or select transistors built with
costly selective epitaxy silicon, as is commonly done in
conventional 3D NAND arrays), made possible by having each bit line
segment positioned close to its segment circuitry in the substrate,
materially simplifies the process integration flow.
[0092] FIGS. 3h and 3i show another embodiment similar to the
embodiment of FIG. 3g. In FIGS. 3h and 3i, the voltage on source
line segment connectors MSSL.sub.1 and MSSL.sub.2, and hence also
the voltage on local vertical source lines 375(LSL) within each
source line segment, is supplied from substrate 310 through an
active column 381 ("charging column") that mimics in construction
any of the storage active columns (e.g., active column 380) of the
memory array but is however not used for memory storage. In other
words, charging column 381 is dedicated to charging the local
source lines in source line segments MSSL.sub.1 and MSSL.sub.2. (In
other embodiments, each charging column may supply only a single
source line segment.) As shown in FIG. 3h, charging column 381 may
be formed, for example, in the opening BL0 between neighboring bit
line segments SEG.sub.1 and SEG.sub.2. Throughout a read operation
(and optionally, any programming, program-inhibit, or erase
operation), charging column 381 delivers and holds a required
voltage on the vertical local source lines in source line segments
MSSL.sub.1 and MSSL.sub.2. (Source line segments MSSL.sub.1 and
MSSL.sub.2 are both served by charging column 381.) In this regard,
charging column 381 obviates the need for global source line GSL1
313 of FIG. 3e, for example, and eliminates the need for the
associated source line segment-select transistor SLS.sub.1. It also
eliminates, for example, the need for pre-charge transistors
370--which requires extra word line plane WL.sub.chg--in the memory
stack, such as shown for the embodiment of FIG. 3g.
[0093] In the segmentation structure of FIGS. 3h and 3i, in a read
operation of any storage transistor on any of the memory planes,
the source voltage on each local source line of source line
segments MSSL.sub.1 and MSSL.sub.2 are imposed at V.sub.ss (e.g., 0
volts) through connection VSL from vertical source line 375(LSL) of
charging column 381. Voltage V.sub.ss is delivered from substrate
310 through a decoded select transistor (shown in FIG. 3h as 315X)
in silicon substrate 310, bit-line mini-segment SSVss, vertical
local bit line 374(LBL), pass transistor 371 and vertical local
source line 375(LSL). (Pass transistor 371 is activated and held in
the conducting or "on" state by word line WL31 throughout the read
operation.) Source voltage to be imposed on source line segments
MSSL.sub.1 and MSSL.sub.2 during any programming, program-inhibit
or erase operation may be similarly provided. Select transistor
315X in silicon substrate 310 may be a high voltage transistor that
is able to withstand a high voltage imposed on local bit line 374
(LBL) during an erase operation.
[0094] FIG. 3i shows in greater detail a top X-Y plane view of the
embodiment of FIG. 3h, in which each vertical local source line in
source segment MSSL.sub.1 is held at voltage V.sub.ss or V.sub.bl
supplied through column 381. In FIG. 3i, the memory array has a
layout similar to that shown in the embodiment of FIG. 6b. As shown
in FIG. 3i, between bit line segments SEG.sub.1 and SEG.sub.2 is
provided an array of charging columns, with each row extending
along the X-direction having two charging columns and a
predetermined number (e.g. 2048) of such rows laid out in along the
Y-direction. This array of charging columns is provided between the
two discontinuities or openings in the bit lines (labeled in FIG.
3i as "BLO".) In one row of the active columns, between the two
dash lines, a source line connector extending along the X-direction
connects the right charging column to the local source lines in
source line segment MSSL.sub.1 (i.e., every other active column
along the upper dash line) in bit line segment SEG.sub.1. The same
right charging column is connected to the local source lines of the
active columns of source line segment MSSL.sub.2 in bit line
segment SEG.sub.2. The source voltage is provided from the silicon
substrate to a bit line connector to the local bit line of the
right active column. The word lines labeled "WL.sub.31" activate a
pass transistor in the charging column to transfer the source
voltage to the local source line labeled VSL, which provides the
source voltage to the local source lines of source line segments
MSSL.sub.1 and MSSL.sub.2. (This circuit configuration is shown in
the circuit of FIG. 3h.) The left charging column in this row of
charging columns between the dash lines is connected to another
pair of source line segments along the lower dash line in similar
manner.
[0095] In a 3-dimensional vertical NOR string memory array having
multiple word-line planes, the local word lines for all planes in a
stack may be arranged in staircase steps WL.sub.STC at the edge of
the array (see, e.g., FIG. 3i and FIG. 6g). One or more dedicated
global word lines (labeled, for example, "GWL.sub.chg" in FIG. 3i)
may be required for each memory plane to activate a charging column
(e.g., charging column 381) for each pair of neighboring bit line
segments (e.g., bit line segments SEG.sub.1 and SEG.sub.2 in FIG.
3h). As shown in the example of FIG. 3i (see the insert), the
global word lines labeled GWL.sub.chg are all connected to local
word line WL.sub.31 corresponding to active column 381 and skip
over all other word lines in bit line segments SEG.sub.1 and
SEG.sub.2. In contrast, each global word line for the storage
transistors of the memory array (e.g., GWL) is hard wire-connected
to the numerous local word lines associated with bit line segments
SEG.sub.1 and SEG.sub.2, while skipping over the word lines of
charging column 381. The global word lines of charging column 381
(all labeled "GWL.sub.chg" in the insert of FIG. 3i) on different
memory planes can be shorted together at the periphery circuitry
(not shown), thereby activating any (or all) of the pass
transistors of charging column 381 associated with word lines
WL.sub.0-WL.sub.31. In one embodiment, the pass transistors of all
charging columns in a block of connected source line segments may
be activated together when the chip is powered up; however, any
source line segment or source line segment pair within the block
can be unselected by having its corresponding charging column
isolated from the silicon substrate by switching off its associated
segment-select transistor (e.g., segment-select transistor
315X).
[0096] The embodiment of FIGS. 3h and 3i eliminates the need for a
pre-charge sequence of the floating source, such as performed in
the embodiment of FIG. 3g Eliminating the pre-charge sequence
speeds up a read operation because the source voltage can be set
and then held steady at voltage V.sub.ss before the start of the
read operation, thus eliminating the overhead time required for the
floating source pre-charge pulse. Furthermore, as charging column
381 holds the local source lines of source line segment MSSL.sub.1
at voltage Vss throughout the read operation (i.e. not just a
momentary pre-charge pulse), the steady current provided through
connection VSL compensates for any source-drain leakage which, if
excessive, could compromise the read sensing of the addressed
storage transistor.
[0097] To summarize, charging column 381 serves as a local vertical
connector for transferring voltages V.sub.ss or V.sub.bl from the
silicon substrate to the local source lines in the vertical NOR
memory strings. Any voltage V.sub.ss or V.sub.bl on the vertical
local source line of a charging column can be transferred to its
associated local bit line through a pass transistor (e.g., pass
transistor 371), although the local bit line may also be directly
charged from bit line connector MSBL1, which may be connected to
voltage sources in the silicon substrate through segment-select
decoders 315-1.
[0098] In a three-dimensional vertical NOR memory stack with 64 or
128 memory planes, the height of the stack, which is also the
length of charging column 381, can exceed 5 microns, which is a
rather long distance for vertical local source line 375(LSL) or
local bit line 374 (LBL) of charging column 381 (FIG. 3h). The
electrical resistance (R; in ohms) of the corresponding N+ doped
polysilicon pillars 455 and 454 (see, FIG. 4a; also shown as
655(N+) LSL-1 and 654 (N+) LBL-1 in FIG. 6e and sometimes referred
to as pylons) may become excessive, introducing an RC delay that
adversely impacts the read path primarily. The pillar's resistance
R can be reduced by an order of magnitude or more by providing a
low-resistivity metallic material in the core of the pillar. For
example, in the detailed description below, FIG. 4a-1 shows
metallic core 420 (M) and FIG. 7d-1 shows metallic core 720
(M).
[0099] FIG. 5b is a cross section in the Z-Y plane showing,
according to one embodiment of the present invention, connection of
body region 556 (providing the P.sup.- channel material) by
conductive pillar 591, which is formed in dielectric layer 592 out
of P.sup.+ polysilicon, for example, to a conductor 590 provided
above active column 581 and running in one configuration parallel
to the word lines. Conductor 590 may also be formed out of heavily
doped polysilicon, or a silicide or metallic conductor. In this
arrangement, body bias voltage (V.sub.bb) 594 can be provided to
conductor 590 from substrate 505 through via 593 in an opening in
dielectric isolation 509, to facilitate block erase operations.
[0100] FIG. 6e illustrates providing the body bias voltage through
conductors 690-1 and 690-2("body bias conductors"). The body bias
voltage is shared between body regions in adjacent rows of active
columns, using the layout of the embodiment shown in FIG. 6b. In
this configuration, word line 592 (i.e., word line 623p-L) runs
coincidentally with body bias conductor 690-1. The block size of an
erase operation is limited to the active columns on the left and
the active columns on the right of each body bias conductor (e.g.,
conductor 690-1). Larger erase blocks can be configured for example
by having a cluster of body bias conductors tied together to match
the number of word lines addressing a bit line segment. A decoder
in the substrate provides the appropriate body bias voltage (e.g.,
the erase voltage) to one or more selected erase blocks.
[0101] Referring back to FIG. 5b, after the active columns (e.g.,
active column 581) are formed, dielectric layer 592 is formed over
the active columns. Thereafter, via holes are anisotropically
etched from the top of dielectric layer 592 to the top of body
region 556. A layer of Pt-doped polysilicon is then deposited over
dielectric layer 592, filling the via holes to form conductive
pillars (e.g., conductive pillars 591). This layer of P.sup.+-doped
polysilicon is then patterned and etched to form conductors (e.g.,
conductor 590) to connect through vias 593 to voltage source 594,
which provides body bias voltage V.sub.bb. Body bias voltage
V.sub.bb can be a positive high voltage applied during erase or a
low negative substrate bias voltage applied during read to raise
the TFT threshold voltage or reduce its sub-threshold leakage. FIG.
6e is a top view showing P.sup.+-doped polysilicon features 690-1
and 690-2 formed.
[0102] In the embodiment shown in FIG. 5b, conductor 590 is
provided above body region 556. In other embodiments, however,
conductor 590 may be provided underneath body region 556 to contact
body region 556 from below. In fact, it may be advantageous to
provide a body bias voltage from both above body region 556 and
from below. In case of providing a body bias voltage from below, a
conductor similar to conductor 590 may be provided or directly from
the substrate through a via in the interlayer dielectric, similar
to that shown in FIG. 5a.
Modes of Operation of Segmented Local Bit Line and Segmented Local
Source Line Arrays.
[0103] In a memory stack of say 64 planes of word lines with bit
line segments, such as described above with respect to the
embodiments of the current invention, when reading a storage
transistor on any plane (e.g., plane 25) associated with a selected
bit line segment, all word lines at all planes that are associated
with the selected bit line segment are held at their "off"
threshold voltage, except for the word line on the selected plane
that is addressing the selected storage transistor. When the word
line voltage is brought up, a storage transistor that is in the
erased state (i.e. conducting or "on" state) will discharge its bit
line voltage (V.sub.bl) to its local source line (and its
associated source line segment, if applicable), which has
previously been pre-charged to virtual ground potential (V.sub.ss).
The rate of discharge of bit line voltage V.sub.bl is sensed by the
sense amplifier for the bit line segment. Other storage transistors
on the selected plane (i.e., 25.sup.th plane, in this example) that
are associated with other bit line segments along the Y-direction
sharing the same word line, or other storage transistors associated
with other bit line segments along the X-direction that are
addressed by different word lines, can be read concurrently, since
each bit line segment has its dedicated sense amplifier. For a read
operation, the virtual source voltage is first pre-charged by
setting the local bit line to 0V during the pre-charge operation.
(Alternatively, the virtual source voltage can be elevated to
.about.1V.) After the pre-charge, the local bit line is charged to
the sense amplifier voltage (e.g., at .about.0.1V to 0.5V higher
than the source voltage), the substrate is set to voltage V.sub.bb
(e.g., .about.0V to .about.-2V) and word line WL is raised to
.about.1V-3V above the erase threshold voltage.
[0104] For embodiments in which the storage transistors on both
sides of each word line (e.g., embodiments of FIGS. 6a and 6e),
care must be taken to ensure that only one of the two storage
transistors is conducting at any time during a read operation. This
is achieved, as discussed above, by providing separate bit line
segments running parallel to each other, but each being served by
their own sense amplifiers, decoders, voltage sources and other
support circuitry. As shown in FIG. 6e, the bit line segments are
MSBL.sub.1(L) for the left-side storage transistors and
MSBL.sub.1(R) for the right-side storage transistor.
[0105] To program a storage transistor, all word lines on all
planes except the selected plane (i.e., 25.sup.th plane, in this
example) are set at ground potential, while the word line
addressing the selected storage transistor (i.e., on the 25.sup.th
plane) is raised to a suitable programming voltage using, for
example, incremental voltage steps (e.g., starting at .about.8
volts and applying voltage pulses of increasing magnitude in
incremental steps) until the desired programmed voltage is verified
by a read operation to have been reached. During the programming
operation, the voltage on the bit line segment is held at ground
potential, as is the associated source line segment.
[0106] To inhibit further programming while continuing to program
storage transistors on the selected plane that are associated with
other bit line segments sharing the same word line, the bit line
segment and the source line segment are raised to a program-inhibit
voltage (e.g., around one third to one half of the programming
voltage), until the end of the programming sequence, with read
verify cycles in-between successive programming pulses. All program
and program inhibit voltages to the local bit lines and the local
source lines within a bit line or source line segment are provided
solely through the bit line segment (through pre-charge operation
for the source line). As with the read operation, storage
transistors associated with other bit line segments along the
Y-direction (i.e., sharing the same word line as the selected
storage transistor), and storage transistors associated with other
bit line segments along the X-direction (i.e., associated with
different word lines), can be programmed or program-inhibited
concurrently.
[0107] An erase operation may be accomplished by holding all word
lines for storage transistors associated with the bit line
segments, the source line segments, or blocks to be erased at 0V,
while raising the body bias voltage (V.sub.bb) to .about.12V for
virgin storage transistors (i.e., storage transistors that have
never been programmed or erased), and up to 20V or higher for high
cycle-count storage transistors. All sense amplifiers associated
with a bit line segment may be isolated from their bit lines or bit
line segments, as the floating N+ vertical local source lines and
N+ vertical local bit lines within the erase block follow the
positive voltage applied to their p- body regions.
[0108] It is possible to read, program, program-inhibit and erase
through other conditions familiar to a person of ordinary skill in
the art.
Low-Latency Partitioned Local and Global Word Lines.
[0109] The bit line segmentation in embodiments of the present
invention serves to significantly reduce the RC delays in
conventional global bit lines of conventional 3D NAND and 3D NOR
memory arrays. Another major contributor to long read latency are
the long and highly capacitive local word line conductors that
typically run almost half or the entire width of the chip,
orthogonal to the global bit lines. Thus, the 3D vertical NOR Flash
memory arrays of US 2017/0092371 A1, like conventional 3D NAND
Flash memory arrays, require a minimum of one layer of local word
line conductors for each memory plane. In a 64-plane NAND or NOR
memory array, these word line conductors are constructed in tall
stair-case steps. Because local word lines supply high voltage
during programming, their decoders require high voltage transistors
circuitry that can occupy significant silicon real estate for each
such stair-case step.
[0110] To reduce their associated overhead cost, word lines are
typically made to be very long, which translates into high RC
delays and poor read latency (e.g., in the range of a few
microseconds). In a conventional 3D NAND memory array, the global
bit lines too are long and have slow rise or fall times, which
essentially hides the long word line latency. With the bit line
segments of the present invention, since the bit-line response time
can be very short (e.g., in the range of 100 nanoseconds), long
word line RC delays become the limiting factor to fast read access.
According to one embodiment of the present invention, one partial
solution makes the 3D NOR memory chip long and narrow (i.e., short
along the direction of the word lines and long along the direction
of the bit line segments). While such a design does not reduce the
silicon area for forming the word line decoders, the lengths and
the RC delays of the word lines are significantly reduced without
significantly increasing the RC delays along the bit line
segments.
[0111] According to another embodiment of the present invention,
word line delays may be further reduced by partitioning the memory
array into more blocks with shorter word lines, each formed with
its repeat stair-case steps. Partitioning the memory arrays by
doubling the number of stair-case steps and their word line
decoders reduce the RC delays by 4-fold.
[0112] Another significant contributor to long read latency is the
large RC delays of the global word lines (GWL) that run in the
X-direction spanning the length of the memory array above the
stair-case steps along the sides of the memory array. FIG. 6f
illustrates one implementation of global word lines for connecting
the local word lines on one plane (i.e., at one stair-case step) in
conjunction with the bit line segmentation scheme of the present
invention. In FIG. 6f, only the local word lines at one X-Y plane
through a stair-case step along the side of a memory array, the
global word lines above the stair-case steps and their
interconnections are shown. For clarity of illustration, all other
details (e.g., P.sup.- channel material layers and charge trapping
layers) are omitted. As shown in FIG. 6f, word lines WL.sub.0,
WL.sub.1, . . . , of the memory array (e.g., the memory array
corresponding to the embodiment shown in FIG. 6e) run along the
Y-direction. Global word lines GWL.sub.0, GWL.sub.1, . . . , run
along the X-direction above the stair-case steps. The global word
lines connect the word lines at each plane of the memory array to
their respective decoders, voltage sources and other support
circuitry in substrate 605. In applying bit line segmentation to
the architecture, for example, of FIGS. 3d, 3e, 3f and 3g, each
step in the stair-case accommodates up to n global word lines that
matches the number n of local word lines within a bit line segment.
In the embodiment of FIG. 6f, for example, each bit line segment
may include 128 bit lines and each storage transistor at each step
is selected by a corresponding word line. Thus, there are 128 word
lines at each step of a bit line segment. Hence, each global word
line connects to every 128.sup.th word line. For example, on each
plane, global word line GWL.sub.0 connects to word lines WL-0,
WL-127, . . . through vias VIA.sub.0, VIA.sub.127, . . . , and
GWL.sub.1 connects to word lines WL-1, WL-129, . . . through vias
VIA.sub.1, VIA.sub.128, . . . to its substrate decoders and voltage
sources in substrate 605. This arrangement allows 128 sets of
storage transistors on each plane to be concurrently read by
activating the common global word line and their dedicated sense
amp decoders. For example, storage transistors associated with word
lines WLi, WL.sub.i+128, . . . (generally, WL.sub.i+128k, k=0, 1, .
. . ) may be simultaneously read or programmed by activating global
word line GWLi, while all other global word lines at the same step
and at the other steps can be at ground potential (i.e. all other
storage transistors off) or floated at ground potential.
[0113] The embodiment illustrated in FIG. 6f may be considered
costly in silicon real estate: if there are 128 word lines in each
bit line segment and 64 steps in the stair-case, 128 global word
lines would be required for every step of a 64-step stair-case (or
8192 global word lines in total). According to one embodiment of
the present invention, the number of global word lines required can
be reduced by a factor of 2, 4, 8, 16 or more by having each global
word line contact more than one local word line within each
bit-line segment. For example, global word line GSL.sub.1 may
contact not only word line WL.sub.1, WL.sub.129, . . . but also
word lines WL.sub.33, WL.sub.65, . . . , (generally, WL.sub.1+32k,
k=0, 1, . . . ) thereby reducing by a factor of four the number of
global word lines required per step, and reducing by a factor of
four the total width of the stair-case. Of course, either
additional decoding circuitry, or four times the number of
dedicated sense amplifiers for each bit line segment, are required
in the silicon substrate. (Alternatively, the single sense
amplifier of the bit line segment may be time-shared through four
consecutive read or program sequences.)
[0114] As the global word lines are implemented at the top of the
memory array above the stair-case steps, the global word lines can
be implemented using low resistivity copper interconnects.
Capacitance between adjacent global word lines within a step can be
reduced by substitution air gaps as the dielectric between them, as
known to a person of ordinary skill in the art. The global word
line RC delays can be reduced further by connecting global word
line decoders and voltage sources in the silicon substrate
underneath the stair-case steps to access the global word lines
every half, quarter or eighth of their length through breaks along
the length of the global word lines.
[0115] When going from say, a 32-layer stack to a 64-layer stack,
the number of word line stair-case steps is doubled from 32 to 64.
FIG. 6g shows an implementation of a vertical NOR string memory
array that avoids such step-doubling, according to one embodiment
of the present invention. In FIG. 6g, a Z-Y cross section of a
memory array is shown with the total number of planes in the memory
array being provided as two or more successively formed stacks
(e.g., STK.sub.1 and STK.sub.2), one on top of another. Each stack
is provided its own set of stair-case steps completed before the
next stack is formed. In 3-dimensional NAND memory arrays of the
prior art, two stacks of memory cells, each of 32 planes, are
formed. Thereafter, a 64-plane stair-case of steps are then formed
separately, followed by forming their associated global word lines.
In contrast, FIG. 6f shows forming stacks STK.sub.1 and stack
STK.sub.2 each having just 32 stair-case wide steps (Steps A, Steps
B), each step being a word line (running along the Y-direction)
connected by one of global word line GWL.sub.1, GWL.sub.2, . . . ,
GWL.sub.32 (running along the X-direction). Stacks STK1 and STK2
are isolated from each other by isolation layer 617, thus reduced
in half the total width of providing 64 stair-case steps. Under
this scheme, local bit line (e.g., BL 654) and local source line
(e.g. SL 655) in stack STK.sub.2 are connected to their
corresponding local bit line and local source line in stack
STK.sub.1 by etching openings through isolation layer 617 to expose
the top of the N+ doped vertical columns, thereby connecting the
vertical active columns of the top 32 planes to their counterparts
in the lower 32 planes above substrate 605. Likewise, P- doped
channel regions (e.g., channel region 656, corresponding to channel
region 556 of FIG. 5b) of both stacks STK.sub.1 and STK.sub.2 are
connected together by P+ doped plugs 691, which is formed in
isolation layer 617 prior to forming STK.sub.2.
[0116] The silicon substrate area associated with the global word
lines can be reduced by positioning the global word line decoders
and voltage sources either below the stair-case steps or on top of
the memory arrays rather than outside of the arrays in the
substrate. Such placement may be provided in conjunction with
memory arrays of FIGS. 3f and 3g. In those embodiments, the top
surface of the memory array is clear of any source line or bit line
interconnects. Of course, such word line decoders and voltage
sources are implemented using thin-film transistors that must be
able to support the relatively high voltages (e.g., in the range of
12V-20V) required on the global word lines during programming Such
thin-film transistors may be achieved through shallow (Excimer)
laser anneal to partially recrystallize deposited polysilicon or
through other seeding techniques developed for solar panels or LED
displays or other applications. The top surface of the memory array
can also be exploited to run wider or taller global word line
interconnects with greater spacing in-between to reduce their RC
delays without unduly increasing the memory chip area.
3D Vertical NOR Arrays with Segmented Bit Lines for Quasi-Volatile
NOR Strings.
[0117] Non-provisional patent application III, which is
incorporated by reference above and which is now published as US
2017/0092371A1 ("the '237 publication"), discloses quasi-volatile
NOR strings (see the '237 publication, at paragraphs [0128]-[0131])
that are suitable for replacing DRAM in certain storage
applications that do not require extremely high cycle endurance. To
that end, the read access time of quasi-volatile NOR strings
approaches the read access time of DRAM, which, at under 100
nanoseconds, is approximately 500 times faster than conventional 3D
NAND flash memory. In the three-dimensional vertical NOR strings
disclosed in this detailed description, the segmented bit-lines at
the bottom of the array with their dedicated sense amplifiers,
decoders in the substrate beneath the bit line segment (e.g., shown
in FIGS. 3d, 3e, 3f, and 3g) closely emulate the horizontal strings
of Non-Provisional patent application III and are equally capable
of achieving near-DRAM read latency. The process steps for building
these quasi-volatile vertical NOR strings are similar to the steps
described at paragraph [0129] of '237 publication. Because of the
relatively short retention time (e.g., in the range of one hour to
a few days) of the quasi-volatile storage transistors, they need to
be frequently read-refreshed; in that context, having the ability
to read or reprogram a large number of storage transistors
concurrently (i.e. reading and reprogramming storage transistors
associated with many bit line segments in parallel) is critical for
minimizing interruption of normal reads when chip densities
approach 1-terabit.
[0118] Non-Provisional patent application III also discloses
pairing two storage transistors for a fast-read cache memory in
horizontal NOR strings (see, the '237 publication, at paragraphs
[0194]-[0196]). The segmented bit line with dedicated segment sense
amplifier in the vertical NOR strings, as disclosed in this
detailed description, is well-suited for such fast read cache
memory, wherein a dual transistor pair may be used to program data
on one transistor and the inverse data (i.e. the erased state) on
an adjacent transistor sharing the same word line. For example, in
FIG. 6e, the read output signals from the two transistors T.sub.L
(683), T.sub.R (682) in two adjacent bit-line segments
MSBL.sub.1(L), MSBL.sub.1(R) sharing the two sides of the same word
line WL.sub.31-1 are fed into a differential sense amplifier in the
silicon substrate. The differential sense amplifier is shared
between the two adjacent bit line segments along the Y-direction.
This dual segment arrangement, although it cuts by 50% the array
bit efficiency, provides superior immunity to process variations
and string leakage, parameter drifts or device sensitivities across
the chip, while providing very fast sensing, higher cycle
endurance, and dispensing with the need for programmable reference
strings. Because of the isolation between bit line segments along
the X-direction (i.e., along the same direction as the global bit
lines), it is possible to have on the same chip blocks of bit line
segments that are configured with paired transistors differential
sensing for cache storage while other blocks employ the regular
sensing of single transistors at a time for double density. This
flexibility allows the same chip to serve as partially a cache
memory, part a storage memory. It also allow storing files that
require many pages of storage (e.g., one photo image requiring 4 MB
of storage occupies 2,000 pages each of 2 KB) to have their first
one or more pages written into the segments with fast cache memory
and the rest in the non-cache segments on the same chip, then
retrieve the image by reading its first page very fast, while
employing pipeline reads for the other pages to enjoy the lower
read latency for the entire 4 MB.
[0119] Although the segmentation of a global bit line into regional
bit line segments with corresponding segment sense amplifiers and
the global word line segmentation (discussed in conjunction with
FIGS. 6f and 6h) of the present invention have been described for
3-dimensional vertical NOR strings, it can be similarly applied to
conventional 3D vertical NAND memory strings.
Fabrication Process
[0120] FIGS. 7a, 7b, 7c and 7d are cross sections of intermediate
structures formed in a fabrication process for a multi-gate NOR
string array, in accordance with one embodiment of the present
invention.
[0121] FIG. 7a shows a cross section in the Z-Y plane of
semiconductor structure 700, after low resistivity layers 723p have
been formed above substrate 701, in accordance with one embodiment
of the present invention. In this example, p is an integer between
0 and 31, representing each of 32 word lines. As shown in FIG. 7a,
semiconductor structure 700 includes low resistivity layers 723-0
to 723-31. Semiconductor substrate 701 represents, for example, a
P- doped bulk silicon wafer on and in which support circuits for
memory structure 700 may be formed prior to forming the vertical
NOR strings. Such support circuits may include both analog and
digital logic circuits. Some examples of such support circuits may
include shift registers, latches, sense amplifiers, reference
cells, power supply lines, bias and reference voltage generators,
inverters, NAND, NOR, Exclusive-OR and other logic gates,
input/output drivers, address decoders, including bit-line and word
line decoders, other memory elements, sequencers and state
machines. To provide these support circuits, the building blocks of
conventional N-Wells, P-Wells, triple wells (not shown), N.sup.+
diffusion regions (e.g., region 707-0) and P.sup.+ diffusion
regions (e.g., region 706), isolation regions, low and high voltage
transistors, capacitors, resistors, diodes and interconnects are
provided, as known to a person skilled in the art.
[0122] After the support circuits have been formed in and on
semiconductor substrate 701, insulating layers 708 are provided,
which may be deposited or grown thick silicon dioxide, for example.
In some embodiments, one or more metallic interconnect layers may
be formed, including global source line 713-0, which may be
provided as horizontal long narrow strips running along a
predetermined direction. Global source line 713-0 is connected
through etched openings 714 to circuitry 707 in substrate 701. To
facilitate discussion in this detailed description, the global
source lines are presumed to run along the X-direction. The
metallic interconnect lines may be formed by applying
photo-lithographical patterning and etching steps on one or more
deposited metal layers. (Alternatively, these metallic interconnect
lines can be formed using a conventional damascene process, such as
a conventional copper or tungsten damascene process). Thick
dielectric layer 709 is then deposited, followed by planarization
using conventional chemical mechanical polishing (CMP).
[0123] Conductor layers 723-0 to 723-31 are then successively
formed, each conductor layer being insulated from the layer
underneath it and the layer above it by an intervening insulating
layers 726. In FIG. 7a, although thirty two conductor layers are
indicated, any number of such layers may be provided. In practice,
the number of conductor layers that can be provided may depend on
the process technology, such as the availability of a
well-controlled anisotropic etching process that allows cutting
through the multiple conductor layers and dielectric isolation
layers 726 there-between. For example, conductor layers 723p may be
formed by first depositing 1-2 nm thick layer of titanium nitride
(TiN), followed by depositing a 10-50 nm thick layer of tungsten
(W) or a similar refractory metal, or a silicide such as silicides
of nickel, cobalt or tungsten among others, or a salicide, followed
by a thin layer of etch-stop material such as aluminum oxide
(Al.sub.2O.sub.3). Each conductor layer is etched in a block 700
after deposition, or is deposited as a block through a conventional
damascene process. In the embodiment shown in FIG. 7a, each
successive conductor layer 723p extends in the Y-direction a
distance 727 short of (i.e. recessed from) the edge of the
immediately preceding metal layer, so that all conductor layers may
be contacted from the top of structure 700 at a later step in the
process. However, to reduce the number of masking and etch steps
necessary to form the stepped conductors stack of FIG. 7a, it is
possible to achieve recessed surfaces 727 simultaneously for
multiple conductor layers by employing other process techniques
known to a person skilled in the art that do not require each
individual conductor plane to be separately masked and etched to
create exposed recessed surfaces 727. After the conductor layer is
deposited and etched, the corresponding one of dielectric isolation
layers 726 is then deposited. Dielectric isolation layers 726 may
be, for example, a silicon dioxide of a thickness between 15 and 50
nanometers. Conventional CMP prepares the surface of each
dielectric layer for depositing the next conductor layer. The
number of conductor layers in the stack of block 700 corresponds to
at least the number of memory TFTs in a vertical NOR string, plus
any additional conductor layers that may be used as control gates
of non-memory TFTs such as pre-charge TFTs (e.g., pre-charge TFT
575 of FIG. 5a), or as control gates of bit-line access select TFTs
(e.g., 585 bit-line access select TFT 511 of FIG. 5a). The
conductor layer deposition and etch steps and the dielectric layer
deposition and CMP process are repeated until all conductor layers
are provided.
[0124] Dielectric isolation layer 710 and hard mask layer 715 are
then deposited. Hard mask 715 is patterned to allow etching of
conductor layers 723p to form long strips of yet to be formed word
lines. The word lines extend in length along the Y-direction. One
example of a masking pattern is shown in FIG. 6 for word lines
623p-R, 623p-L, which includes features such as the extensions in
adjacent word lines towards each other at separation 676 and the
recesses in each word line to create the desired curvatures 675.
Deep trenches are created by anisotropically etching through
successive conductor layers 723p and their respective intervening
dielectric insulator layers 726, until dielectric layer 709 at the
bottom of conductor layers 723p is reached. As a large number of
conductor layers are etched, a photoresist mask by itself may not
be sufficiently robust to hold the desired word line pattern
through numerous successive etches. To provide a robust mask, hard
mask layer 715 (e.g., carbon) is preferred, as is known to a person
of ordinary skill in the art. Etching may terminate at dielectric
material 709, or at landing pads 713 on the global source lines, or
at substrate 701. It may be advantageous to provide an etch-stop
barrier film (e.g., aluminum oxide) to protect landing pads 713
from etching.
[0125] FIG. 7b illustrates, in a cross section in the Z-X plane of
semiconductor structure 700, etching through successive conductor
layers 723p and corresponding dielectric layers 726 to form
trenches (e.g., deep trench 795), which reach down to dielectric
layer 709, according to one embodiment of the present invention. In
FIG. 7b, conductor layers 723p are anisotropically etched to form
conductor stacks 723p-R and 723p-L, which are separated from each
other by deep trench 795. This anisotropic etch is a high
aspect-ratio etch. To achieve the best result, etch chemistry may
have to be alternated between conductor material etch and
dielectric etch, as the materials of the different layers are
etched through, as in known to a person skilled in the art. The
anisotropy of the multi-step etch is important, as undercutting of
any of the layers should be avoided, so that a resulting word line
at the bottom of a stack would have approximately the same
conductor width and trench spacing as the corresponding width and
spacing of a word line near or at the top of the stack. Naturally,
the greater the number of conductor layers in the stack, the more
challenging it becomes to maintain a tight pattern tolerance
through the numerous successive etches. To alleviate the difficulty
associated with etching through, for example, 64 or 128 or more
conductor layers, etching may be conducted in sections of, say, 32
layers each. The separately etched sections can then be stitched
together, as taught, for example, in the Kim reference mentioned
above.
[0126] Etching through multiple conductor layers 723p of conductor
material (e.g., tungsten or other refractory materials) is much
more difficult and time-consuming than etching of the intervening
insulating layers 726. For that reason, an alternative process may
be adopted that eliminates the need for multiple etches of
conductor layers 723p. That process, well known to a person skilled
in the art, consists of first substituting sacrificial layers of a
readily etchable material in place of conductor layers 723p of FIG.
7b. For example, insulating layers 726 can be silicon dioxide and
sacrificial layers (occupying the spaces shown as 723p in FIG. 7b)
can be silicon nitride or another fast etching dielectric material.
Deep trenches are then etched anisotropically through the ONON
(Oxide-Nitride-Oxide-Nitride) alternating dielectric layers to
create tall stacks of the dual dielectrics. At a later step in the
manufacturing process flow (to be described below), these stacks
are supported by active vertical strips of polysilicon, allowing
the sacrificial layers to be etched away, preferably through
selective chemical or isotropic etch. The cavities thus created are
then filled through conformal deposition of the conductor material,
resulting in conductor layers 723p separated by intervening
insulating layers 726.
[0127] After the structure of FIG. 7b is formed, charge-trapping
layers 734 and polysilicon layers 730 are then deposited in
succession conformally on the vertical sidewalls of the etched
conductor word line stacks. A cross section in the Z-X plane of the
resulting structure is shown in FIG. 7c. As shown in FIG. 7c,
charge-trapping layers 734 are formed, for example, by first
depositing blocking dielectric 732a, between 5 to 15 nanometers
thick and consisting of a dielectric film of a high dielectric
constant (e.g., aluminum oxide, hafnium oxide, or some combination
silicon dioxide and silicon nitride). Thereafter, charge-trapping
material 732b is deposited to a thickness of 4 to 10 nanometers.
Charge-trapping material 732b may be, for example, silicon nitride,
silicon-rich oxynitride, conductive nanodots embedded in a
dielectric film, or thin conductive floating gates isolated from
adjacent TFTs sharing the same vertical active strip.
Charge-trapping 732b may then be capped by a deposited conformal
thin tunnel dielectric film in the thickness range of 2 to 10
nanometers (e.g., a silicon dioxide layer, or a silicon
oxide-silicon nitride-silicon oxide ("ONO") triple-layer). The
storage element formed out of charge-trapping layers 734 may be any
one of SONOS, TANOS, nanodot storage, isolated floating gates or
any suitable charge-trapping sandwich structures known to a person
of ordinary skill in the art. The combined thickness of
charge-trapping layers 734 is typically between 15 and 25
nanometers.
[0128] After deposition of charge-trapping layer 734, contact
openings are made at the bottom of trench 795, using a masking step
and by anisotropically etching through charge-trapping layers 734
and dielectric layer 709 at the bottom of trench 795, stopping at
bottom global source line landing pad 713 for the source supply
voltage V.sub.ss (see, FIG. 7b), or at global bit line voltage
V.sub.bl (not shown), or at P+ region 706 for contact to a back
bias supply voltage V.sub.bb (see, FIG. 7c). In some embodiments,
this etch step is preceded by a deposition of an ultra-thin film of
polysilicon (e.g. 2 to 5 nanometers thick) to protect the vertical
surfaces of tunnel dielectric layer 732c during the contact-opening
etch of charge-trapping material 734 at the bottom of trench 795.
In one embodiment, each global source line is connected only to
alternate ones in a row of vertical NOR string pairs. For example,
in FIG. 5a, for odd address word lines, electrical contacts (e.g.,
contact opening 557) are etched to connect the N+ doped local
source lines (e.g., local source line 555 in FIG. 5a) to global
source line 513-1. Likewise, for even address word lines,
electrical contacts are etched to connect the N+ doped local source
lines in the row of vertical NOR string pairs to global source line
513-2 (not shown in FIG. 5a). In the embodiment employing virtual
V.sub.ss through parasitic capacitor C (i.e., capacitors 560 in
FIG. 5a) the step of etching through charge trapping layer 734 at
the bottom of trench 795 may be skipped.
[0129] Thereafter, polysilicon thin film 730 is deposited to a
thickness ranging between 5 and 10 nanometers. In FIG. 7c,
polysilicon thin film 730 is shown on the opposite sidewalls of
trench 795, labeled respectively 730R and 730L. Polysilicon thin
film 730 is undoped or preferably doped P- with boron, at a doping
concentration typically in the range of 1.times.10.sup.16 per
cm.sup.3 to 1.times.10.sup.17 per cm.sup.3, which allows a TFT to
be formed therein to have an enhancement native threshold voltage.
Trench 795 is sufficiently wide to accommodate charge-trapping
layers 734 and polysilicon thin film 730 on its opposing sidewalls.
Following the deposition of polysilicon 730, the sacrificial layers
in the stack described above are etched away and the cavities thus
formed are filled with the conformally deposited conductor layers
723p (FIG. 7c).
[0130] As shown in FIG. 7b, trench 795 extends along the
Y-direction. After formation of isolated word line stacks 723p-L
and 723p-R, in one example semiconductor structure 700 may have
16,000 or more side-by-side word line stacks, each serving as
control gates for 8,000 or more active columns to be formed along
the length of each stack, or 16,000 TFTs (8,000 TFTs on each side
of the stack). With 64 word lines in each stack, 16 billion TFTs
may eventually be formed in each of such multi-gate vertical NOR
string array. If each TFT stores two data bits, such a multi-gate
vertical NOR string array would store 32 gigabits of data.
Approximately 32 such multi-gate vertical NOR string arrays (plus
spare arrays) may be formed on a single semiconductor substrate,
thereby providing a 1-terabit integrated circuit chip.
[0131] FIG. 7d is a cross section view in the X-Y plane of the top
surface of the structure of FIG. 7c in one embodiment. Nestled
between word lines 723p-L and 723p-R are the two sidewalls 730L and
730R of the vertical deposited P- doped polysilicon structure
(i.e., an active column). The deep void 740 between sidewalls 730L
and 730R may be filled with a fast-etching insulating dielectric
material (e.g., silicon dioxide or liquid glass or carbon doped
silicon oxide). The top surface may then be planarized using
conventional CMP. A photolithographic step then exposes openings
776 and 777, which is followed by a high aspect-ratio selective
etching to excavate the fast-etching dielectric material in exposed
areas 776 and 777 all the way down to the bottom of trench 795. A
hard mask may be required in this etching step to avoid excessive
pattern degradation during etch. The excavated voids are then
filled with an in-situ N+ doped polysilicon. The N+ dopants diffuse
into the very thin lightly doped active polysilicon pillars 730L
and 730R within the exposed voids to make them N+ doped.
Alternatively, prior to filling the voids with the in-situ N+ doped
polysilicon the lightly doped polysilicon inside the voids can be
etched away through a brief isotropic plasma etch or selective wet
etch. CMP or top surface etching then removes the N+ polysilicon
from the top surface, leaving tall N+ polysilicon pylons in areas
754 (N+) and 755(N+). These N+ pylons form the shared vertical
local source line and the shared vertical local bit line for the
TFTs in the resulting vertical NOR strings.
[0132] FIG. 7d-1 shows materially enhancing electrical conductivity
of the tall vertical source/drain pylons by only partially filling
the exposed voids 776 of vertical pylons 754 and 755, for example,
by first depositing ultra-thin layers of N+ doped polysilicon
754(N+) and 755(N+), each of thickness between 5 and 15 nanometers
(which is insufficient to fill the voids), followed by depositing
(e.g., using Atomic Layer Deposition (ALD)) a metallic conductive
material (e.g., titanium nitride, tungsten nitride or tungsten) to
fill remaining void 720(M) at the core of the source/drain pylons.
See, also, FIG. 4a-1, which shows in the Y-Z plane metallic
conductor 420(M) occupying the core of the pylons, in close contact
with ultra-thin N+ poly 454 (N+). Because of the relatively
significantly higher conductivity of the metallic material at the
core, the N-type doping concentration of the ultra-thin N+ doped
polysilicon can be reduced by one or two orders of magnitude,
reducing undesirable thermal diffusion of the N-type dopant into
the P-type dopant of the channel. The N+/metallic conductor
structure can be applied to either one or both of the source and
drain pylons. In another embodiment, the thin P- doped polysilicon
that is in region 757--outside the channel region 756--can first be
more heavily doped P+(e.g., 10.sup.19 per cm.sup.3 or higher),
compared to the P- doping in channel region 756, which may be
2.times.10.sup.18 per cm.sup.3 or lower. Adding the P+ poly in the
source pylon that contacts the P- poly in the channel can enhance
erase efficiency when the local source line is raised to a high
positive voltage during an erase operation.
[0133] Next, a dielectric isolation layer is deposited and
patterned using photolithographic masking and etching steps. The
etching step opens contacts for connecting the vertical local bit
lines to the horizontal global bit lines (e.g., contacts 657-1 to
strings at odd addresses and 657-2 to strings at even addresses, as
shown in FIG. 6). A low resistivity metal layer (e.g., tungsten) is
deposited. The deposited metal is then patterned using
photolithographic and etching steps to form global bit-lines (e.g.,
global word line 614-1 or GBL1 for strings at odd addresses, and
global bit line 614-2 (GBL2) for strings at even addresses, as
shown in FIG. 6). Alternatively, the global bit lines may be formed
using conventional copper damascene process. All global bit lines,
as well as all metal layers 723p of the word line stacks (FIG. 7a)
are connected by etched vias to word line and bit-line decoding and
sensing circuits in the substrate, as is known to a person skilled
in the art. Switch and sensing circuits, decoders and reference
voltage sources can be provided to global bit lines and global word
lines, either individually or shared by several ones of the bit
lines and word lines.
[0134] In some embodiments, bit line access select transistors (511
in FIG. 5a) and their associated control gate word lines (e.g.,
word lines 585 in FIG. 5a) are formed as isolated vertical N+P--N+
transistors, as known to a person skilled in the art, to
selectively connect odd and even global bit lines (e.g., bit lines
614-1 and 614-2 in FIG. 6a) to vertical NOR strings at alternate
odd and even addresses (e.g., local bit lines 657-1 and 657-2,
respectively, in FIG. 6a).
Read Operation
[0135] Because the TFTs of a vertical NOR string are connected in
parallel, in all embodiments of the current invention, all TFTs in
an active column (including an active column having formed thereon
a vertical NOR string pair) should preferably be in enhancement
mode--i.e., each TFT should have a positive gate-to-source
threshold voltage--so as to suppress leakage currents during a read
operation between the shared local source line and the shared local
bit line (e.g., local bit line 455 and local source line 454 shown
in FIG. 4c). Enhancement mode TFTs are achieved by doping the
channel regions (e.g., P- channel region 756 of FIG. 7c) with boron
in a concentration typically between 1.times.10.sup.16 and
1.times.10.sup.17 per cm.sup.3, targeting for a native TFT
threshold voltage of around 1V. With such TFTs, all unselected word
lines in the vertical NOR string pair of an active column may be
held at 0V. Alternatively, the read operation may raise the voltage
on the shared local N+ source line (e.g., local source line 455 of
FIG. 4c) to around 1.5V, while raising the voltage on the shared
local N+ drain line (e.g., local bit line 454) to around 2V and
holding all unselected local word lines at 0V. Such a configuration
is equivalent to setting the word line to -1.5V with respect to the
source, thereby suppressing leakage current due to TFTs that are in
slightly depleted threshold voltage, which occurs, for example, if
the TFTs are slightly over-erased.
[0136] After erasing the TFTs of a vertical NOR string, a soft
programming operation may be required to shift any TFT in the
vertical NOR string that is over-erased (i.e., now having a
depletion mode threshold voltage) back to an enhancement mode
threshold voltage. In FIG. 5a, an optional connection 556 is shown
by which P- channel is connected to back bias voltage 506
(V.sub.bb,) (also shown as body connection 456 in FIG. 4c). A
negative voltage may be used for V.sub.bb to modulate the threshold
voltage of the TFTs in each active column to reduce subthreshold
leakage currents between the shared N+ source and the shared N+
drain/local bit line. In some embodiments, a positive V.sub.bb
voltage can be used during an erase operation to tunnel-erase TFTs
whose control gates are held at 0V.
[0137] To read the data stored in a TFT of a vertical NOR string
pair, all TFTs on both vertical NOR strings of the vertical NOR
string pair are initially placed in the "off" state by holding all
word lines in the multi-gate NOR string array at 0V. The addressed
vertical NOR string can either share a sensing circuit among
several vertical NOR strings along a common word line through use
of decoding circuitry. Alternatively, each vertical NOR string may
be directly connected through a global bit-line (e.g., GBL1 of FIG.
4c) to a dedicated sensing circuit. In the latter case, one or more
vertical NOR strings sharing the same word line plane may be sensed
in parallel. Each addressed vertical NOR string has its local
source line set at V.sub.ss.about.0V, either through its hard-wired
global source line (e.g., GSL1 in FIG. 4c) as shown schematically
in FIG. 8a, or as a virtual V.sub.ss.about.0V through a pre-charge
transistor (e.g., pre-charge transistor 470 in FIG. 4c or
transistor 317 in FIG. 3c) which momentarily transfers
V.sub.bl.about.0V to parasitic capacitance C (e.g., capacitor 460
or capacitor 360) of floating local source line 455 or 355) during
the pre-charge, as shown schematically in FIG. 8b.
[0138] Immediately after turning off pre-charge transistor 470, the
local bit line (e.g., local bit line 454 of FIG. 4c) is set at
V.sub.bl.about.2V through the bit line access select transistor
(e.g., bit line access select transistor 411 of FIG. 4c or access
select transistor 511 in FIG. 5a). V.sub.bl.about.2V is also the
voltage at the sense amplifiers for the addressed vertical NOR
strings. At this time, the addressed word line is raised in small
incremental voltage steps from 0V to typically about 6V, while all
the un-selected word lines at both the odd address TFTs and the
even address TFTs of the vertical NOR string pair remain at 0V. In
the embodiment of hard-wired V.sub.ss of FIG. 8a, the addressed TFT
has been programmed in one example to a threshold voltage of 2.5V,
therefore the voltage V.sub.bl at local bit line LBL begins to
discharge through the selected TFT towards the 0V of the local
source line (V.sub.ss) as soon as its WLs exceeds 2.5V, thus
providing a voltage drop (shown by the dashed arrow in FIG. 8a)
that is detected at the sense amplifier serving the selected global
bit line. In the embodiment of the virtual V.sub.ss of FIG. 8b,
pre-charge transistor word line WL.sub.CHG momentarily is turned on
to pre-charge floating local source line LSL to 0V at the start of
the read sequence. Then, selected word line WL.sub.S goes through
its incremental voltage steps, and as soon as it exceeds the
programmed 2.5V, the selected TFT momentarily dips the voltage on
its local bit line from its V.sub.bl.about.2V. This voltage dip
(shown by the dashed arrow in FIG. 8b) is detected by the sense
amplifier of the global bit line connected to the selected local
bit line. There are other alternative schemes to correctly read the
programmed threshold voltage of the selected TFT as known to a
person skilled in the art. The embodiments relying on parasitic
capacitance C to temporarily hold virtual voltage V.sub.ss, the
higher the vertical stack the bigger is capacitance C and therefore
the longer is the hold time and the greater is the read signal
presented to the selected sense amplifier. To further increase C it
is possible to add in one embodiment one or more dummy conductors
in the vertical string whose primary purpose is to increase
capacitance C.
[0139] In the case of an MLC implementation (i.e., a "multi-level
cell" implementation, in which each TFT stores more than one bit),
the addressed TFT may have been programmed to one of several
voltages (e.g., 1V (erased state), 2.5V, 4V or 5.5V). The addressed
word line WLs is raised in incremental voltage steps until
conduction in the TFT is detected at the sense amplifier.
Alternatively, a single word line voltage can be applied (e.g.,
.about.6 volts), and the rate of discharge of the local bit line
LBL (V.sub.bl) can be compared with the rates of discharge from
several programmable reference voltages representative of the
voltage states of the stored multi-bit. This approach can be
extended for a continuum of states, effectively providing analog
storage. The programmable reference voltages maybe stored in
dedicated reference vertical NOR strings located within the
multi-gate vertical NOR string array, so that the characteristics
during read, program, and background leakage are closely tracked.
In a vertical NOR string pair, only the TFTs on one of the two
vertical NOR strings can be read in each read cycle; the TFTs on
the other vertical NOR string are placed in the "off" state (i.e.,
all word lines at 0V). During a read cycle, as only one of the TFTs
in a vertical NOR string is exposed to the read voltages, read
disturb conditions are essentially absent.
[0140] In one example of an embodiment of this invention, 64 TFTs
and one or more pre-charge TFTs may be provided on each vertical
NOR string of a vertical NOR string pair. Each word line at its
intersection with the local vertical N+ source line pillar forms a
capacitor (see, e.g., capacitor 660 of FIG. 6a). A typical value
for such a capacitor may be, for example, 1.times.10.sup.-18
farads. Including all the capacitors in both vertical NOR strings
of a vertical NOR string pair, the overall distributed capacitance
C totals approximately 1.times.10.sup.-16 farads, which is
sufficient for a local source line to preserve a pre-charged source
voltage (V.sub.ss) during a read cycle, which is completed in
typically less than a microsecond immediately following the
pre-charge operation. The charging time through bit-line access
select transistors 411 and pre-charge TFT 470 is in the order of a
few nanoseconds, thus the charging time does not add noticeably to
the read latency. Reading from a TFT in a vertical NOR string is
fast, as the read operation involves conduction in only one of the
TFTs in the vertical NOR string, unlike the read operation on a
NAND string, in which many TFTs connected in series are required to
be conducting.
[0141] There are two major factors contributing to the read latency
of vertical NOR strings of the current invention: (a) the RC time
delay associated with resistance R.sub.bl and capacitance C.sub.bl
of a global bit line (e.g., GBL 614-1 in FIGS. 6a), and (b) the
response time of a sense amplifier to a voltage drop V.sub.bl on
the local bit line (e.g., LBL-1) when the addressed TFT begins
conducting. The RC time delay associated with a global bit line
serving, for example, 16,000 vertical NOR strings is of the order
of a few tens of nanoseconds. The read latency for reading a TFT of
a prior art vertical NAND string (e.g., the NAND string of FIG. 1b)
is determined by the current through 32 or more series-connected
TFTs and select transistors discharging capacitance C.sub.bl of the
global bit line. By contrast, in a vertical NOR string of the
present invention, the read current discharging C.sub.bl is
provided through just the one addressed transistor (e.g.,
transistor 416L of FIG. 4a) in series with bit line access select
transistor 411, resulting in a much faster discharge of the local
bit line voltage (V.sub.bl). As a result, a much lower latency is
achieved.
[0142] In FIG. 4c, when one TFT (e.g., TFT 416L in the vertical NOR
string 451b) is read at a time, all other TFTs in either vertical
NOR string 451a and 451b of vertical NOR string pair 491 are held
in their "off" states, their word lines being held at 0V. Even
though TFT 416R in vertical NOR string 452a of vertical NOR string
pair 492 shares word line W31 with TFT 416L, TFT 416R may be read
simultaneously with TFT 416L because vertical NOR string 452a is
served by global bit line 414-2, while vertical NOR string 451b is
served by global bit line 414-1. (FIGS. 6a and 6b illustrate how
global bit lines 614-1 and 614-2 serve adjacent vertical NOR string
pairs).
[0143] In one embodiment, a word line stack includes 32 or more
word lines provided in 32 planes. In one multi-gate vertical NOR
string array, each plane may include 8000 word lines controlling
16,000 TFTs, each of which may be read in parallel through 16,000
global bit lines, provided that each bit line is connected to a
dedicated sense amplifier. Alternatively, if several global bit
lines share a sense amplifier through a decode circuit, the 16000
TFTs are read over several successive read cycles. Reading in
parallel a massive number of discharging TFTs can cause a voltage
bounce in the ground supply (V.sub.ss) of the chip, which may
result in read errors. However, an embodiment that uses the
pre-charged parasitic capacitor C in the local source line (i.e.,
providing a virtual source voltage (V.sub.ss) for vertical NOR
string) has a particular advantage in that such ground voltage
bounce is eliminated. This is because the virtual source voltages
in the vertical NOR strings are independent and are not connected
to the ground supply of the chip.
Program (Write) and Program-Inhibit Operations.
[0144] Programming of an addressed TFT may be achieved by
tunneling--either direct tunneling or Fowler-Nordheim
tunneling,--of electrons from the channel region of the TFT (e.g.,
channel region 430L shown in FIG. 4b) to the charge-trapping layer
(e.g., charge trapping layer 434) when a high programming voltage
is applied between the selected word line (e.g., word line 423p-R)
and the active channel region (e.g., active channel region 456 in
FIG. 4a). As tunneling is highly efficient, requiring very little
current to program a TFT, parallel programming of tens of thousands
of TFTs may be achieved at low power dissipation. Programming by
tunneling may require, for example, a 20V, 100-microsecond pulse.
Preferably, the programming is implemented through a succession of
shorter duration stepped voltage pulses, starting at around 14V and
going as high as approximately 20V. Stepped voltage pulsing reduces
electrical stress across the TFT and avoids overshooting the
intended programmed threshold voltage.
[0145] After each programming high-voltage pulse the addressed
transistor is read to check if it has reached its target threshold
voltage. If the target threshold voltage has not been reached, the
next programming pulse applied to the selected word line is
incremented typically by a few hundred millivolts. This
program-verify sequence is repeatedly applied to the one addressed
word line (i.e., a control gate) with 0V applied to the local bit
line (e.g., local bit line 454 of FIG. 4a) of the active column
(e.g., column 430L of FIG. 4b). At these programming high word line
voltages, TFT 416L's channel region is inverted and is held at 0V,
so that electrons tunnel into the charge storage layer of TFT 416L.
When the read sensing indicates that the addressed TFT has reached
its target threshold voltage, the addressed TFT must be inhibited
from further programming, while other TFTs sharing the same word
line may continue programming to their higher target threshold
voltages. For example, when programming TFT 416L in vertical NOR
string 451b, programming of all other TFTs in vertical NOR strings
451b and 451a must be inhibited by keeping all their word lines at
0V.
[0146] To inhibit further programming or TFT 416L once it has
reached its target threshold voltage, a half-select voltage (i.e.,
approximately 10V) is applied to local bit line 454. With 10V being
placed in the channel region and 20V being placed on the control
gate, only net 10V is applied across the charge trapping layer,
therefore the Fowler-Nordheim tunneling current is insignificant
and no meaningful further programming takes place on TFT 416L
during the remaining sequence of stepped pulse voltages up to the
maximum 20V. By raising the local bit line 454 to 10V while
continuing to increment the programming voltage pulses on word line
WL31, all TFTs on vertical NOR strings sharing the same selected
word line are programmed correctly to their higher target threshold
voltages. The sequence of "program-read-program inhibit" is
indispensable for correctly programming tens of thousands TFTs in
parallel to their various target threshold voltage states in
multilevel cell storage. Absent such program inhibit of individual
TFTs over-programming may cause overstepping or merging with the
threshold voltage of the next higher target threshold voltage
state. Although TFT 416R and TFT 416L share the same word line,
they belong to different vertical NOR string pairs 452 and 451. It
is possible to program both TFT 416L and TFT 416R in the same
programming pulsed voltage sequence, as their respective bit line
voltages are supplied through GBL1 and GBL2 and are independently
controlled. For example, TFT 416L can continue to be programmed
while TFT 416R can be inhibited from further programming at any
time. These program and program-inhibit voltage conditions can be
met because vertical NOR strings 451a and 451b of vertical NOR
string pair 491 are controlled by separate word lines 423p-L and
423p-R respectively, and the voltage on each local bit line can be
set independently from all other vertical NOR string pairs. During
programming, any unselected word line within an addressed word line
stack or within unaddressed word line stacks can be brought to 0V,
half-select 10 volts, or floated. In the embodiment where global
source line (e.g., GSL1 of FIG. 4c) is accessed through a source
access select transistor (not shown in FIG. 4c), the access select
transistor is off during programming, resulting in the voltage on
local source line 455 following the voltage on local bit line 454
during program and program inhibit. The same is true for the
embodiment where the voltage on the local source line is provided
by its parasitic capacitance C represented by capacitor 460 in FIG.
4c. In the embodiment of FIG. 4c, where there is a global source
line but not a source access select transistor, the voltage applied
to the global source line 413-1 of the addressed string should
preferably track the voltage of the addressed global bit line 414-1
during program and program-inhibit.
[0147] Each of the incrementally higher voltage programming pulses
is followed by a read cycle to determine if TFTs 416L and 416R have
reached their respective target threshold voltage. If so, the
drain, source and body voltages are raised to 10V (alternatively,
these voltages are floated to close to 10V) to inhibit further
programming, while word line WL31 continues to program other
addressed TFTs on the same plane that have not yet attained their
target threshold voltages. This sequence terminates when all
addressed TFTs have been read-verified to be correctly programmed.
In the case of MLC, programming of one of the multiple threshold
voltage states can be accelerated by setting each addressed global
bit line to one of several predetermined voltages (e.g., 0V, 1.5V,
3.0V, or 4.5V, representing the four distinct states of the 2-bit
data to be stored), and then applying the stepped programming
pulses (up to around 20V) to word line WL31. In this manner, the
addressed TFT receives a predetermined one of the effective
tunneling voltages (i.e., 20, 18.5, 17, and 15.5 volts,
respectively), resulting in one of predetermined threshold voltages
being programmed into a TFT in a single programming sequence. Fine
programming pulses may be subsequently provided at the individual
TFT level.
Accelerated Whole-Plane Parallel Programming
[0148] Because of the parasitic capacitance C intrinsic to every
local source line in a multi-gate vertical NOR string array, all
local source lines in a multi-gate vertical NOR string array can
have 0V (for program) or 10V (for inhibit) momentarily placed
(e.g., through global bit line GBL1 and bit line access string
select transistor 411 and pre-charge transistor 470) on all
vertical NOR strings in advance of applying the high voltage
pulsing sequence. This procedure may be carried out by addressing
the word line planes plane-by-plane. For each addressed word line
plane, the programming pulsing sequence may be applied to many or
all word lines on the addressed word line plane, while holding all
word lines on the other word line planes at 0V, so as to program in
parallel a large number of TFTs on the addressed plane, followed by
individual read-verify, and where necessary, resetting the local
source line of a properly programmed TFT into program-inhibit
voltage. This approach provides a significant advantage, as
programming time is relatively long (i.e., around 100 microsecond),
while pre-charging all local source line capacitors or
read-verifying all TFTs sharing the addressed word line plane is
more than 1,000 times faster. Therefore, it pays to parallel
program as many TFTs as possible in each word line plane. This
accelerated programming feature provides even greater advantage in
MLC programming which is considerably slower than single bit
programming.
Erase Operation
[0149] For some charge-trapping materials, the erase operation is
performed by reverse-tunneling of the trapped charge, which can be
rather slow, sometimes requiring tens of milliseconds of 20V or
higher pulsing. Therefore, the erase operation may be implemented
at the vertical NOR string array level ("block erase"), often
performed in the background. A typical vertical NOR string array
may have 64 word line planes, with each word line plane
controlling, for example, 16,384.times.16,384 TFTs, for a total of
approximately seventeen billion TFTs. A one-terabit chip may
therefore include approximately 30 such vertical NOR string arrays,
if two bits of data are stored on each TFT. In some embodiments,
block erase may be carried out by applying around 20V to the P-
channel shared by all TFTs in a vertical NOR string (e.g., body
connection 456 in FIG. 4c and contact 556 in FIG. 5a), while
holding all word lines in the block at 0V. The duration of the
erase pulse should be such that most TFTs in the block are erased
to a slight enhancement mode threshold voltage, i.e., between zero
and one volt. Some TFTs will overshoot and be erased into depletion
mode (i.e., a slightly negative threshold voltage). A soft
programming may be required to return the over-erased TFTs back
into a slight enhancement mode threshold voltage after the
termination of the erase pulses, as part of the erase command
Vertical NOR strings that may include one of more depletion mode
TFTs that cannot be programmed into enhancement mode may have to be
retired, to be replaced by spare strings.
[0150] Alternatively, rather than providing the erase pulses to the
body (i.e., the P- layer), the local source lines and the local bit
lines (e.g., local source line 455 and local bit line 454 in FIG.
4c) on all vertical NOR string pairs in the vertical NOR string
array are raised to around 20V, while holding all word lines on all
word line planes at 0V for the duration of the erase pulse. This
scheme requires that the global source line and the global bit line
select decoders employ high voltage transistors that can withstand
the 20V at their junctions. Alternatively, all TFTs sharing an
addressed word line plane can be erased together by applying -20V
pulses to all word lines on the addressed plane, while holding word
lines on all other planes at 0V. All other voltages in the vertical
NOR string pairs are held at 0V. This will erase only the X-Y slice
of all TFTs touched by the one addressed plane of word lines.
Semi Non-Volatile NOR TFT Strings
[0151] Some charge-trapping materials (e.g., oxide-nitride-oxide or
"ONO") suitable for use in the vertical NOR string have long data
retention time, typically in the order of many years, but
relatively low endurance (i.e., performance degrades after some
number of write-erase cycles, typically of the order of ten
thousand cycles or less). However, in some embodiments one may
select charge-trapping materials that store charge for much reduced
retention times, but with much increased endurances (e.g.,
retention times in order of minutes or hours, endurance in the
order of tens of millions of write-erase cycles). For example, in
the embodiment of FIG. 7c, the tunnel dielectric layer 732c,
typically a 6-8 nanometer layer of SiO.sub.2, can be reduced in
thickness to around 2 nanometers, or be replaced by another
dielectric material (e.g., SiN) of similar thickness. The much
thinner dielectric layer makes possible the use of modest voltages
to introduce electrons by direct tunneling (as distinct from
Fowler-Nordheim tunneling, which requires a higher voltage) into
the charge-trapping layer, where they will be trapped from a few
minutes to a few hours or days. Charge-trapping layer 732b can be
silicon nitride, conductive nanodots dispersed in a thin dielectric
film, or a combination of other charge-trapping films, including
isolated thin floating gates. Blocking layer 732a can be silicon
dioxide, aluminum oxide, hafnium oxide, silicon nitride, a high
dielectric constant dielectric, or any combination thereof.
Blocking layer 732a blocks electrons in charge-trapping layer 732b
from escaping to the control gate word line. Trapped electrons will
eventually leak out back into active region 730R, either as a
result of the breakdown of the ultra-thin tunnel dielectric layer,
or by reverse direct tunneling. However, such loss of trapped
electrons is relatively slow. One may also use other combinations
of charge storage materials, resulting in a high endurance but low
retention "semi-volatile" storage TFT that requires periodic write
or read refresh operations to replenish the lost charge. Because
the vertical NOR strings of the present invention have a relatively
fast read access (i.e. low latency), they may be used in some
applications that currently require the use of dynamic random
access memories (DRAMs). The vertical NOR strings of the present
invention have significant advantages over DRAMs, having a much
lower cost-per-bit, as DRAMs cannot be built in three dimensional
stacks, and having a much lower power dissipation, as the refresh
cycles need only be run approximately once every few minutes or
every few hours, as compared to every few milliseconds required to
refresh DRAMs. The three-dimensional semi-volatile storage TFTs of
the present invention are achieved by selecting an appropriate
material, such as those discussed above, for the charge-trapping
material and by appropriately adapting the
program/read/program-inhibit/erase conditions and incorporating the
periodic data refreshes.
NROM/Mirror Bit NOR TFT Strings
[0152] In another embodiment of the current invention, the vertical
NOR strings may be programmed using a channel hot-electron
injection approach, similar to that which is used in
two-dimensional NROM/Mirror Bit transistors, known to a person
skilled in the art. Using the embodiment of FIG. 4a as an example,
programming conditions for channel hot-electron injection may be:
8V on control gate 423p, 0V on local source line 455 and 5V on
local drain line 454. Charge representing one bit is stored in the
charge storage layer at one end of channel region 456 next to the
junction with local bit line 454. By reversing polarity of local
source line 455 and local bit line 454, charge representing a
second bit is programmed and stored in the charge storage layer at
the opposite end of channel region 456 next to the junction with
local source line 455. Reading both bits requires reading in
reverse order of the programming, as is well known to those skilled
in the art. Channel hot-electron programming is much less efficient
than programming by direct tunneling or Fowler-Nordheim tunneling
and therefore it does not lend itself to the massively parallel
programming possible with tunneling. However, each TFT has twice
the bit density, making it attractive for applications such as
archival memory. Erase for the NROM TFT embodiment can be achieved
by employing the conventional NROM erase mechanism of band to band
tunneling-induced hot-hole injection to neutralize the charge of
the trapped electrons: apply -5V on the word line, 0V to local
source line 455 and 5V to local bit line 454. Alternatively, the
NROM TFT can be erased by applying a high positive substrate
voltage V.sub.bb to body region 456 with the word line at 0V.
Because of the high programming current attendant to channel hot
electron injection programming, all embodiments of vertical NROM
TFT strings must employ hard-wired local source line and local bit
line, such as in the embodiments of FIGS. 3a and 6c.
[0153] The above detailed description is provided to illustrate
specific embodiments of the present invention and is not intended
to be limiting. Numerous variations and modification within the
scope of the present invention are possible. The present invention
is set forth in the accompanying claims.
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