U.S. patent application number 16/373629 was filed with the patent office on 2019-07-25 for manufacturing method of sample collection component.
This patent application is currently assigned to Materials Analysis Technology Inc.. The applicant listed for this patent is Materials Analysis Technology Inc.. Invention is credited to Pin Chang, Hung-Jen Chen, Ying-Chan Hung.
Application Number | 20190226946 16/373629 |
Document ID | / |
Family ID | 59065991 |
Filed Date | 2019-07-25 |
![](/patent/app/20190226946/US20190226946A1-20190725-D00000.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00001.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00002.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00003.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00004.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00005.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00006.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00007.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00008.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00009.png)
![](/patent/app/20190226946/US20190226946A1-20190725-D00010.png)
United States Patent
Application |
20190226946 |
Kind Code |
A1 |
Chang; Pin ; et al. |
July 25, 2019 |
MANUFACTURING METHOD OF SAMPLE COLLECTION COMPONENT
Abstract
A manufacturing method of a sample collection component, by
which a removable light shielding component is disposed on a main
body of the sample collection component to shield at least a
portion of the light that passes through a storing space of the
sample collection component.
Inventors: |
Chang; Pin; (Hsinchu City,
TW) ; Hung; Ying-Chan; (Changhua County, TW) ;
Chen; Hung-Jen; (Hsinchu City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Materials Analysis Technology Inc. |
Hsinchu County |
|
TW |
|
|
Assignee: |
Materials Analysis Technology
Inc.
Hsinchu County
TW
|
Family ID: |
59065991 |
Appl. No.: |
16/373629 |
Filed: |
April 3, 2019 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
15063514 |
Mar 8, 2016 |
10309875 |
|
|
16373629 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B01L 3/502715 20130101;
H01J 2237/201 20130101; G02B 5/003 20130101; G02B 5/208 20130101;
G02B 21/34 20130101; G02B 21/00 20130101; H01J 37/00 20130101; B01L
2300/168 20130101; B01L 2300/0816 20130101; B01L 2300/0887
20130101; G01N 1/02 20130101; H01J 37/20 20130101; G01N 23/2204
20130101 |
International
Class: |
G01N 1/02 20060101
G01N001/02; H01J 37/00 20060101 H01J037/00; G01N 23/2204 20060101
G01N023/2204; G02B 5/20 20060101 G02B005/20; G02B 21/00 20060101
G02B021/00 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 22, 2015 |
TW |
104143103 |
Claims
1. A manufacturing method of a sample collection component,
comprising: bonding a first substrate to a second substrate and
forming a spacer between the first substrate and the second
substrate to connect and fix the first substrate and the second
substrate, so as to form a sample storing space that is sealable
and allows a light to pass through between the first substrate and
the second substrate; and forming a removable light shielding
component on the first substrate corresponding to the sample
storing space to shield at least a portion of the light that passes
through the sample storing space.
2. The manufacturing method according to claim 1, wherein a method
of forming the removable light shielding component comprises
attaching a sheet material onto the first substrate, and the sheet
material covers at least a portion of the sample storing space.
3. The manufacturing method according to claim 2, further
comprising forming a recess on a first surface of the first
substrate corresponding to the sample storing space for forming an
observation window that exposes the sample storing space, wherein
the sheet material seals the recess to form a sealed space of a
particular pressure in the recess.
4. The manufacturing method according to claim 2, wherein a method
of attaching the sheet material onto the first substrate comprises
attaching the sheet material onto the first substrate by bonding,
clamping, or electrostatic adsorption from outside of the first
substrate.
5. The manufacturing method according to claim 2, wherein a
material of the sheet material comprises a conductor of gold,
copper, or aluminum, or a semiconductor of silicon, or a
non-conductor of plastic, ceramics, or a polymer material.
6. The manufacturing method according to claim 1, wherein a method
of forming the removable light shielding component comprises
forming a material layer on the first surface of the first
substrate, and the sheet material covers at least a portion of the
sample storing space.
7. The manufacturing method according to claim 6, wherein a method
of forming the material layer on the first substrate comprises
applying the material layer onto the first substrate by vapor
deposition, sputtering, or coating.
8. A manufacturing method of a sample collection component,
comprising: providing a first substrate, wherein a removable light
shielding component is formed on the first substrate in a process
of manufacturing the first substrate; and bonding the first
substrate to a second substrate, wherein a spacer is formed between
the first substrate and the second substrate to connect and fix the
first substrate and the second substrate, so as to form a sample
storing space that is sealable and allows a light to pass through
between the first substrate and the second substrate, and the
removable light shielding component corresponds to the sample
storing space to shield at least a portion of the light that passes
through the sample storing space.
9. The manufacturing method according to claim 8, wherein the
removable light shielding component comprises a structural member
that is manufactured simultaneously with the first substrate, and
the structural member is connected with the first substrate by a
connection part.
10. The manufacturing method according to claim 8, further
comprising forming a recess on a first surface of the first
substrate corresponding to the sample storing space for forming an
observation window that exposes the sample storing space, wherein
the removable light shielding component comprises a material layer
that is located on a bottom surface of the observation window and
extends to a portion of a junction between the sample storing space
and the first substrate.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a divisional application of and claims
the priority benefit of U.S. application Ser. No. 15/063,514, filed
on Mar. 8, 2016, now allowed, which claims the priority benefit of
Taiwan application serial no. 104143103, filed on Dec. 22, 2015.
The entirety of each of the above-mentioned patent applications is
hereby incorporated by reference herein and made a part of this
specification.
BACKGROUND OF THE INVENTION
Field of the Invention
[0002] The invention relates to a sample collection component and a
manufacturing method thereof, and more particularly relates to a
sample collection component having a light shielding component and
a manufacturing method thereof.
Description of Related Art
[0003] With the advance in microscopy technology, various devices
for microscopic observation, such as atomic force microscope (AFM),
electron microscope (e.g., transmission electron microscope (TEM)
and scanning electron microscope (SEM)), and so on, have been
invented. Different types of sample collection components are
required for different microscopes.
[0004] In terms of the current sample collection components,
however, before and after a liquid sample is loaded into the sample
storing space of the sample collection component, irradiation of
external light may provide energy to the liquid sample or cause the
temperature of the liquid sample to change. As a result, fluidity
of the liquid sample may change, the components of the liquid
sample may react with each other, or the sample composition may
even deteriorate, and affect the final observation result of the
display device.
SUMMARY OF THE INVENTION
[0005] The invention provides a sample collection component, which
efficiently shields light before and after a liquid sample is
loaded into the sample collection component.
[0006] The invention provides a manufacturing method of a sample
collection component, by which a removable light shielding
component is further disposed on a main body of the sample
collection component to shield at least a portion of the light that
passes through a storing space of the sample collection
component.
[0007] The invention provides a manufacturing method for
manufacturing a sample collection component that includes a
removable light shielding component for shielding at least a
portion of the light that passes through a storing space of the
sample collection component.
[0008] A sample collection component of the invention includes a
main body and a removable light shielding component. The main body
has a sample storing space that is sealable and allows light to
pass through. The removable light shielding component is disposed
on the main body and located outside the sample storing space for
shielding at least a portion of the light that passes through the
sample storing space.
[0009] A manufacturing method of a sample collection component of
the invention includes bonding a first substrate to a second
substrate, and forming a spacer between the first substrate and the
second substrate to connect and fix the first substrate and the
second substrate, so as to form a sample storing space, which is
sealable and allows light to pass through, between the first
substrate and the second substrate. A removable light shielding
component is formed on the first substrate. The removable light
shielding component corresponds to the sample storing space for
shielding at least a portion of the light that passes through the
sample storing space.
[0010] A manufacturing method of a sample collection component of
the invention includes providing a first substrate. A removable
light shielding component is formed on the first substrate in the
process of manufacturing the first substrate. The first substrate
is bonded to a second substrate. A spacer is formed between the
first substrate and the second substrate to connect and fix the
first substrate and the second substrate, so as to form a sample
storing space that is sealable and allows light to pass through
between the first substrate and the second substrate. The removable
light shielding component corresponds to the sample storing space
for shielding at least a portion of the light that passes through
the sample storing space.
[0011] According to an embodiment of the invention, the removable
light shielding component includes a sheet material. The sheet
material is attached onto the main body and covers at least a
portion of the sample storing space.
[0012] According to an embodiment of the invention, the main body
includes a recess corresponding to the sample storing space, for
forming an observation window that exposes the sample storing
space. The sheet material seals the recess to form a sealed space
of a particular pressure in the recess.
[0013] According to an embodiment of the invention, the removable
light shielding component includes a material layer. The material
layer covers a surface of the main body and at least a portion of
the sample storing space.
[0014] According to an embodiment of the invention, the removable
light shielding component includes a structural member that is
manufactured simultaneously with the main body. The structural
member is connected with the main body by a connection part.
[0015] According to an embodiment of the invention, the main body
includes a recess corresponding to the sample storing space for
forming an observation window that exposes the sample storing
space. The removable light shielding component includes a material
layer that is located on a bottom surface of the observation window
and extends to a portion of a junction between the sample storing
space and the main body.
[0016] According to an embodiment of the invention, the main body
includes a first substrate, a second substrate, and a spacer. The
first substrate has a first surface and a second surface opposite
to each other. The second substrate has a third surface and a
fourth surface opposite to each other. The first substrate and the
second substrate are stacked on each other and the second surface
faces the third surface. The spacer is disposed between the second
surface and the third surface and connects and fixes the first
substrate and the second substrate to form the sample storing space
between the first substrate and the second substrate.
[0017] According to an embodiment of the invention, the main body
further includes a first thin film and a second thin film. The
first thin film is located on the second surface of the first
substrate. The second thin film is located on the third surface of
the second substrate. The first thin film, the second thin film,
and the spacer together surround the sample storing space.
[0018] According to an embodiment of the invention, the first
substrate includes a first recess located on the first surface and
a bottom of the first recess is connected with the first thin film
to form an observation window that exposes the sample storing
space. The removable light shielding component includes a material
layer. The material layer is located on a bottom surface of the
observation window and extends to a portion of a junction between
the sample storing space and the main body.
[0019] According to an embodiment of the invention, the second
substrate includes a second recess located on the fourth surface. A
bottom of the second recess is connected with the second thin film
to form a second observation window that exposes the sample storing
space.
[0020] According to an embodiment of the invention, the removable
light shielding component includes a light filtering material or a
light valve component.
[0021] According to an embodiment of the invention, a material of
the removable light shielding component is a conductor of gold,
copper, or aluminum, or a semiconductor of silicon or a
non-conductor of plastic, ceramics, or a polymer material.
[0022] According to an embodiment of the invention, the light
filtering material filters a light having a wavelength of 100 nm to
1 mm.
[0023] According to an embodiment of the invention, a method of
forming the removable light shielding component includes attaching
a sheet material onto the first substrate. The sheet material
covers at least a portion of the sample storing space.
[0024] According to an embodiment of the invention, a material of
the sheet material is a conductor of gold, copper, or aluminum, or
a semiconductor of silicon, or a non-conductor of plastic,
ceramics, or a polymer material.
[0025] According to an embodiment of the invention, the
manufacturing method of the sample collection component further
includes forming a recess on a first surface of the first substrate
corresponding to the sample storing space for forming an
observation window that exposes the sample storing space. The sheet
material seals the recess to form a sealed space of a particular
pressure in the recess.
[0026] According to an embodiment of the invention, a method of
attaching the sheet material onto the first substrate includes
attaching the sheet material onto the first substrate by bonding,
clamping, or electrostatic adsorption from outside of the first
substrate.
[0027] According to an embodiment of the invention, a method of
forming the removable light shielding component includes forming a
material layer on the first surface of the first substrate. The
sheet material covers at least a portion of the sample storing
space.
[0028] According to an embodiment of the invention, a method of
forming the material layer on the first substrate includes applying
the material layer onto the first substrate by vapor deposition,
sputtering, or coating.
[0029] According to an embodiment of the invention, the removable
light shielding component includes a structural member that is
manufactured simultaneously with the first substrate, and the
structural member is connected with the first substrate by a
connection part.
[0030] According to an embodiment of the invention, the
manufacturing method of the sample collection component further
includes forming a recess on a first surface of the first substrate
corresponding to the sample storing space for forming an
observation window that exposes the sample storing space. The
removable light shielding component includes a material layer. The
material layer is located on a bottom surface of the observation
window and extends to a portion of a junction between the sample
storing space and the first substrate.
[0031] Based on the above, the sample collection component of the
invention shields and filters at least a portion of the light,
which enters the sample storing space through the main body, with
the removable light shielding component. Therefore, before and
after the liquid sample is loaded into the sample storing space of
the sample collection component, the removable light shielding
component shields the light and prevents the fluidity or component
properties of the liquid sample from being changed due to reaction
between the components of the liquid sample and the incident light,
which may affect the subsequent observation result.
[0032] To make the aforementioned and other features and advantages
of the invention more comprehensible, several embodiments
accompanied with drawings are described in detail as follows.
BRIEF DESCRIPTION OF THE DRAWINGS
[0033] The accompanying drawings are included to provide a further
understanding of the invention, and are incorporated in and
constitute a part of this specification. The drawings illustrate
exemplary embodiments of the invention and, together with the
description, serve to explain the principles of the invention.
[0034] FIG. 1A is a schematic view of the sample collection
component according to an embodiment of the invention.
[0035] FIG. 1B is a schematic cross-sectional view of the sample
collection component of FIG. 1A along the plane A-A'.
[0036] FIG. 2 is a schematic view of the sample collection
component according to another embodiment of the invention.
[0037] FIG. 3 is a schematic view of the sample collection
component according to another embodiment of the invention.
[0038] FIG. 4A and FIG. 4B are schematic views of the sample
collection component according to another embodiment of the
invention.
[0039] FIG. 5A and FIG. 5B are schematic views of the sample
collection component according to another embodiment of the
invention.
[0040] FIG. 6A is a schematic view of the sample collection
component according to another embodiment of the invention.
[0041] FIG. 6B is a schematic view of the sample collection
component according to another embodiment of the invention.
[0042] FIG. 7A, FIG. 7B, and FIG. 7C are schematic views of the
sample collection component according to another embodiment of the
invention.
[0043] FIG. 8A, FIG. 8B, and FIG. 8C are schematic views of the
sample collection component according to another embodiment of the
invention.
[0044] FIG. 9 is a schematic view of the sample collection
component according to another embodiment of the invention.
[0045] FIG. 10A is a flowchart showing the manufacturing method of
the sample collection component according to an embodiment of the
invention.
[0046] FIG. 10B is a flowchart showing the manufacturing method of
the sample collection component according to another embodiment of
the invention.
[0047] FIG. 11A is a flowchart showing the manufacturing method of
the sample collection component according to another embodiment of
the invention.
[0048] FIG. 11B is a flowchart showing the manufacturing method of
the sample collection component according to another embodiment of
the invention.
DESCRIPTION OF THE EMBODIMENTS
[0049] FIG. 1A is a schematic view of a sample collection component
according to an embodiment of the invention. FIG. 1B is a schematic
cross-sectional view of the sample collection component of FIG. 1A
along the plane A-A'. A sample collection component 100 includes a
main body 110 and a removable light shielding component 120. In
this embodiment, the main body 110 has a sample storing space 130
that is sealable. The sample storing space 130 allows light to pass
through. Moreover, a removable light shielding component 120 is
disposed on the main body 110 and located outside the sample
storing space 130.
[0050] In this embodiment, the removable light shielding component
120 is a sheet material, for example, which is attached onto the
main body 110 to cover a portion of the sample storing space 130.
The sheet material may be formed of a conductive material, such as
gold, copper, and aluminum. Alternatively, the sheet material may
be formed of silicon, plastic, ceramics, a polymer conductor, or a
semiconductor material. For example, the removable light shielding
component 120 may be a copper foil, which may be attached to a
surface 111 of the main body 110 by bonding, clamping, or
electrostatic adsorption. Moreover, in this embodiment, the
removable light shielding component 120 may be a material layer
composed of a metal, such as gold and aluminum, which is formed by
sputtering, vapor deposition, or spin coating and covers the
surface 111 of the main body 110 and a portion of the sample
storing space 130.
[0051] The removable light shielding component 120 may include a
light filtering component formed of an organic material and a metal
material, or a light valve component formed of a liquid crystal
material, for example. The removable light shielding component 120
may shield a portion of the light that enters the main body 110 by
filtering, absorbing, or reflecting the light. If the removable
light shielding component 120 is formed of a light filtering
material, the light shielded by the removable light shielding
component 120 has a wavelength that ranges from 100 nm to 1 mm,
i.e., a range between UVC and LWIR, for example.
[0052] In this embodiment, the main body 110 of the sample
collection component 100 is provided with the removable light
shielding component 120 thereon. Therefore, before and after a
liquid sample to be observed is loaded into the sample storing
space 130, the removable light shielding component 120 is
temporarily fixed to cover the main body 110 to prevent a visible
light, such as ultraviolet light, or an invisible light, such as
infrared light, from passing through the main body 110 of the
sample collection component 100 and irradiating the sample storing
space 130 and causing components of the liquid sample to react or
change in property due to the light irradiation. Moreover, after
the loading of the liquid sample is completed, the removable light
shielding component 120 may be removed to facilitate observation of
the sample performed by using a microscope device, such as an
electron microscope. In addition, in this embodiment, a thin film
118 may be further disposed in a periphery of the sample storing
space 130 to serve as a surface of contact between the sample
storing space 130 and the liquid sample, so as to enhance flow or
adsorption of the liquid sample in the sample storing space
130.
[0053] In this embodiment, after the loading of the liquid sample
into the sample storing space 130 is completed, the removable light
shielding component 120 may be removed by a physical method, such
as applying an external force, current, or electric field, and
changing the temperature, or by a chemical method, such as
dissolution, etching, or other chemical reactions, according to
different composition structures, materials, and forming
methods.
[0054] FIG. 2 is a schematic view of the sample collection
component according to another embodiment of the invention. A
sample collection component 200 of this embodiment has a structure
similar to the structure of the sample collection component 100 of
the previous embodiment. Therefore, identical or similar components
are assigned with the same or similar reference numerals, and
detailed description thereof is not repeated hereinafter. In this
embodiment, the main body 110 of the sample collection component
200 may further has a recess corresponding to the sample storing
space 130 for forming an observation window 213 that exposes the
sample storing space 130. Moreover, in this embodiment, the sample
collection component 200 includes a removable light shielding
component 220, which may be a sheet material. The sheet material is
used to seal the recess where the observation window 213 is formed,
so as to form a sealed space of a particular pressure in the
recess. The pressure is in a range of about 0.01 KPa to 150 KPa.
For example, the pressure of the sealed space may be smaller than
or greater than an external pressure, such that the removable light
shielding component 220 is more securely attached to the surface
111 of the main body 110 due to the difference between the internal
and external pressures, so as to form an airtight space in the
sealed space.
[0055] FIG. 3 is a schematic view of the sample collection
component according to another embodiment of the invention. A
sample collection component 300 of this embodiment has a structure
similar to the structure of the sample collection component 200 of
the embodiment of FIG. 2. Therefore, identical or similar
components are assigned with the same or similar reference
numerals, and detailed description thereof is not repeated
hereinafter. A difference between the sample collection component
300 of this embodiment and the sample collection component 200 of
the previous embodiment is that: a removable light shielding
component 320 of this embodiment is a metal material layer, such as
gold and aluminum, formed by sputtering, vapor deposition, or spin
coating, for example. As shown in FIG. 3, the removable light
shielding component 320 may be disposed on a bottom surface of the
observation window 213 and extend to a portion of a junction
between the sample storing space 130 and the main body 110.
[0056] FIG. 4A and FIG. 4B are schematic views of the sample
collection component according to another embodiment of the
invention. Referring to FIG. 4A and FIG. 4B, a sample collection
component 400 of this embodiment has a structure similar to the
structure of the sample collection component 200 of FIG. 2.
Therefore, identical or similar components are assigned with the
same or similar reference numerals, and detailed description
thereof is not repeated hereinafter. A difference between the
sample collection component 400 of this embodiment and the sample
collection component 300 of the previous embodiment is that: a
removable light shielding component 420 of this embodiment is a
light shielding structural member that is manufactured and
completed at the same time as the main body 110, and the removable
light shielding component 420 is connected with the main body 110
through a connection part 421. In other words, the sample
collection component 400 already includes the removable light
shielding component 420 when being completed. It is not required to
additionally attach or deposit a light shielding structure onto the
sample collection component 400. In this embodiment, the removable
light shielding component 420 is a silicon structure, for example,
or may be formed through a characteristic change of a construction
material of the main body 110. For example, if the main body 110
includes a liquid crystal material, the liquid crystal material may
change the light shielding effect by an electric field, so as to
form the removable light shielding component 420 for shielding
light. As shown in FIG. 4B, in this embodiment, after the loading
of the liquid sample into the sample storing space 130 is
completed, the removable light shielding component 420 is removed
by an external force P, for example, so as to facilitate the
subsequent sample observation performed by using a microscope
device.
[0057] FIG. 5A and FIG. 5B are schematic views of the sample
collection component according to another embodiment of the
invention. Referring to FIG. 5A, in the sample collection component
400 of this embodiment, the removable light shielding component
425, formed of SiC for example, may be disposed corresponding to
the sample storing space 130 directly by vapor deposition,
sputtering, or spin coating simultaneously when the main body 110
is manufactured. In addition, the sample storing space 130 may be
covered by a thin film 418 formed of silicon nitride, for example,
which serves as an etch stop layer of the sample storing space 130
and forms the surface of contact between the sample storing space
130 and the liquid sample. Referring to FIG. 5B, after the loading
of the liquid sample into the sample storing space 130 is
completed, a portion of the removable light shielding component 425
that shields above the sample storing space 130 may be removed by
plasma dry etching in the direction indicated by the arrow of FIG.
5B for performing the subsequent sample observation step.
[0058] FIG. 6A is a schematic view of the sample collection
component according to another embodiment of the invention.
Referring to FIG. 6A, a sample collection component 500 of this
embodiment has a structure similar to the structure of the sample
collection component 200 of the embodiment of FIG. 1A and FIG. 1B.
Therefore, identical or similar components are assigned with the
same or similar reference numerals, and detailed description
thereof is not repeated hereinafter. In this embodiment, a
difference between the sample collection component 500 and the
sample collection component 200 is that: a main body 510 of the
sample collection component 500 may include a first substrate 512,
a second substrate 514, and a spacer 516. The first substrate 512
has a first surface 512a and a second surface 512b opposite to each
other, and the second substrate 514 has a third surface 514a and a
fourth surface 514b opposite to each other. Moreover, the first
substrate 512 and the second substrate 514 are stacked on each
other vertically, for example, and the second surface 512b of the
first substrate 512 faces the third surface 514a of the second
substrate 514.
[0059] In this embodiment, a material of the first substrate 512
and the second substrate 514 is a semiconductor material or a metal
oxide material, for example. In addition, the semiconductor
material is a double polished or single polished single crystal
silicon, and the metal oxide is aluminum oxide, for example. The
thicknesses of the first substrate 512 and the second substrate 514
may be changed according to the design or actual needs. For
example, if the sample collection component 500 is applied for
observation using an electron microscope, the thicknesses of the
first substrate 512 and the second substrate 514 may be designed
respectively to be in a range of about 0.2 mm to 0.8 mm.
[0060] As shown in FIG. 6A, the spacer 516 is disposed between the
second surface 512b and the third surface 514a to connect and fix
the first substrate 512 and the second substrate 514 and form a
sample storing space 530 between the first substrate 512 and the
second substrate 514. In this embodiment, the sample storing space
530 defined by the spacer 516 may be a flow channel that has
openings at the front and rear ends. The liquid sample may enter
the sample storing space 530 through the openings at the front and
rear ends to be contained in the sample storing space 530.
[0061] In this embodiment, the spacer 516 may also maintain a
distance between the first substrate 512 and the second substrate
514 and bond and fix the first substrate 512 and the second
substrate 514. The spacer 516 has a height in a range of about 0.1
.mu.m to 20 .mu.m, or even in a range of 0.1 .mu.m to 10 .mu.m. In
other words, the distance between the first substrate 512 and the
second substrate 514, i.e., the height of the sample storing space
530, is in a range of 0.1 .mu.m to 20 .mu.m, or even in a range of
0.1 .mu.m to 10 .mu.m. The manufacturing and configuration method
of this embodiment as described above has an advantage that: if the
liquid sample contains suspended particles, some suspended
particles that are greater than 10 .mu.m in the liquid sample may
be excluded from the sample storing space 530. Thus, the sample
collection component 500 of this embodiment may be used for
performing separation observation for blood cells and plasma in
blood.
[0062] In this embodiment, considering the materials, manufacturing
processes, and other possible factors of the first substrate 512
and the second substrate 514, the spacer 516 may be an adhesive
material, such as epoxy resin, an ultraviolet glue, or a silicone
material. Alternatively, the spacer 516 may be a non-adhesive
material, such as silicon or an oxide thereof. Furthermore, the
spacer 516 may be bonded between the first substrate 512 and the
second substrate 514 by anodic bonding between silicon or a silicon
oxide, for example. Moreover, the spacer 516 may be applied by
screen printing and seal, for example, to be formed on the second
surface 512b of the first substrate 512 and the third surface 514a
of the second substrate 514. Alternatively, in the sample
collection component 500, the spacer 516 may be formed on the
second surface 512b of the first substrate 512 and the third
surface 514a of the second substrate 514 by chemical vapor
deposition.
[0063] In this embodiment, the main body 510 may have a first thin
film 518a and a second thin film 518b, wherein the first thin film
518a is located on the second surface 512b of the first substrate
512 and the second thin film 518b is located on the third surface
514a of the second substrate 514. The first thin film 518a, the
second thin film 518b, and the spacer 516 together maintain the
sample storing space 530. In this embodiment, a method of forming
the first thin film 518a and the second thin film 518b respectively
on the second surface 512b and the third surface 514a includes
chemical vapor deposition, acid washing, surface material
deposition, and polymer deposition, wherein the chemical deposition
method is performed by plasma enhanced chemical vapor deposition
(PECVD), for example. Details regarding the method of forming the
first thin film 518a and the second thin film 518b may be known
from the current semiconductor manufacturing or MEMS
(microelectromechanical) manufacturing technology and thus are not
explained hereinafter.
[0064] A material of the first thin film 518a and the second
material 518b may be selected from a group of silicon, silicon
nitride, silicon oxide, silicon dioxide, silicon oxynitride,
carbon, diamond film, silicon carbide, graphene, silicon carbide,
aluminum oxide, titanium nitride, carbon oxide, and a combination
thereof. In addition, the first thin film 518a and the second thin
film 518b need to use a material that has a high electron
penetration rate for an electron beam from a transmission electron
microscope, for example, to pass through, so as to meet the
observation requirement of the transmission electron microscope.
Furthermore, the thicknesses of the first thin film 518a and the
second thin film 518b may be changed according to the design or
actual needs. For example, the first thin film 518a and the second
thin film 518b respectively have a thickness that is in a range of
about 2 nm to 200 nm, so as to facilitate the observation through a
microscope device, such as transmission electron microscope. The
above describes a silicon wafer manufacturing process as an
example. Nevertheless, the invention may also be applied to other
substrate materials considering the mechanical strength, density,
light transmittance, electron penetration rate, process integration
of the thin film and the substrate, residual stress, and surface
properties of the thin film.
[0065] Furthermore, the first thin film 518a and the second thin
film 518b of this embodiment may serve as the surface for contact
with the liquid sample, which may be a hydrophilic material or a
hydrophobic material. In this embodiment, the hydrophilic material
may enhance the adsorption strength for adsorbing polar liquid
sample. The hydrophobic material may enhance the adsorption
strength for adsorbing non-polar liquid sample. In addition, the
surface properties of the first thin film 518a and the second thin
film 518b may be physically modified through UV ozone modification
or plasma modification, or be chemically modified by pickling,
etching, anodizing, or connecting a functional group, for
example.
[0066] In this embodiment, the removable light shielding component
520 covers the first surface 512a of the first substrate 512, and
the removable light shielding component 520 may be a sheet material
or a material layer formed by sputtering, vapor deposition, or spin
coating. Moreover, a material for forming the removable light
shielding component 520 may include a conductive material, such as
gold, copper, and aluminum, or a semiconductor or non-conductive
material, such as silicon, plastic, ceramics, or a polymer
material.
[0067] FIG. 6B is a schematic view of the sample collection
component according to another embodiment of the invention.
Referring to FIG. 6A and FIG. 6B, in addition to using the
removable light shielding component 520 to cover the first surface
512a of the first substrate 512 of the sample collection component
500 as shown in FIG. 6A, in this embodiment, the fourth surface
514b of the second substrate 514 of the sample collection component
500 may also be covered with the removable light shielding
component 520 to enhance the light shielding effect of the sample
collection component 500.
[0068] FIG. 7A, FIG. 7B, and FIG. 7C are schematic views of the
sample collection component according to another embodiment of the
invention. Referring to FIG. 7A, a sample collection component 600
of this embodiment has a structure similar to the structure of the
sample collection component 500 of the embodiment of FIG. 6.
Therefore, identical or similar components are assigned with the
same or similar reference numerals, and detailed description
thereof is not repeated hereinafter. A difference between the
sample collection component 600 of this embodiment and the sample
collection component 500 includes that: a first substrate 612 of a
main body 610 of the sample collection component 600 includes a
first recess on a second surface 612b to form a first observation
window 613a that exposes the sample storing space 530, and a bottom
of the first observation window 613a is connected with the first
thin film 518a. Moreover, the removable light shielding component
520 may cover the first observation window 613a to form a sealed
space in the first recess that forms the first observation window
613a.
[0069] Referring to FIG. 7B and FIG. 7C, in this embodiment, in
addition to forming the removable light shielding component 520
with the sheet material or the material layer described above,
removable light shielding components 620 and 625 may be
manufactured simultaneously with the main body 610 of the sample
collection component 600, as shown in FIG. 7B or FIG. 7C, to shield
the light that enters the sample storing space 630 according to the
actual needs. Referring to FIG. 7B, the removable light shielding
component 620 has composition material and structure similar to
those of the aforementioned removable light shielding component
420, and the removable light shielding component 620 may be
manufactured simultaneously with the first substrate 612 of the
main body 610 when the sample collection component 600 is
manufactured, wherein the removable light shielding component 620
is connected with the first surface 612a of the first substrate 612
through a connection part 621. Moreover, after the loading of the
liquid sample into the sample storing space 130 is completed, the
removable light shielding component 620 may be removed by an
external force, as shown in FIG. 4B.
[0070] Referring to FIG. 7C, in the sample collection component 600
of this embodiment, during the manufacturing process of the first
substrate 612 of the main body 610, a removable light shielding
component 625 that is formed of a SiC material for example may be
applied to the second surface 612b of the first substrate
corresponding to the sample storing space 530 to form the material
layer for shielding the light. The removable light shielding
component 625 of this embodiment has structure and composition
material similar to those of the removable light shielding
component 425. Moreover, after the loading of the liquid sample
into the sample storing space 630 of the sample collection
component 600 is completed, the removable light shielding component
625 may also be removed by plasma dry etching.
[0071] Referring to FIG. 7A, the second substrate 614 includes a
second recess on the third surface 614a to form a second
observation window 613b that exposes the sample storing space 530,
and a bottom of the second recess is connected with the second thin
film 518b. In this embodiment, the sample collection component 600
is placed on a working platform by the fourth surface 614b of the
second substrate 614, for example. Therefore, a side of the fourth
surface 614b of the second substrate 614 is shielded by the working
platform directly and does not require a light shielding structure.
In other embodiments not illustrated here, the sample collection
component 600 may be placed on the working platform by the first
surface 612a of the first substrate 612, and the removable light
shielding component 520 may be disposed on the fourth surface 614b
of the second substrate 614 instead.
[0072] FIG. 8A, FIG. 8B, and FIG. 8C are schematic views of the
sample collection component according to another embodiment of the
invention. As shown in FIG. 8A, FIG. 8B, and FIG. 8C, in addition
to the sample collection component 600 shown in FIG. 7A, FIG. 7B,
and FIG. 7C, the removable light shielding component 520, 620, or
625 may be further disposed on the first surface 612a of the first
substrate 612. In this embodiment, the removable light shielding
component 520, 620, or 625 may also be disposed on the fourth
surface 614b of the second substrate 614 of the sample collection
component 600, so as to shield light for the first observation
window 613a and the second observation window 613b of the sample
collection component 600.
[0073] In particular, if the sample collection component 600 is not
placed on the working platform, such as desktop, light may enter
the sample storing space 530 through the second observation window
613b formed in the second substrate 614. Therefore, by disposing
the removable light shielding component 520, 620, or 625 on both
the first surface 612a of the first substrate 612 and the fourth
surface 614b of the second substrate 614, light leakage is
prevented and the light shielding effect for the sample storing
space 530 is enhanced.
[0074] FIG. 9 is a schematic view of the sample collection
component according to another embodiment of the invention. A
sample collection component 700 of this embodiment has a structure
similar to the structure of the sample collection component 600 of
FIG. 7A, FIG. 7B, and FIG. 7C. Therefore, identical or similar
components are assigned with the same or similar reference
numerals, and detailed description thereof is not repeated
hereinafter. In this embodiment, grooves 715a and 715b may be
formed respectively on the second surface 712b of the first
substrate 712 and the third surface 714a of the second substrate
714 of the sample collection component 700 corresponding to the
sample storing space 530. In the sample collection component 700,
the amount of the liquid sample that can be stored in the sample
storing space 530 is adjustable by changing the sizes of the
grooves 715a and 715b.
[0075] Moreover, the sample collection component 700 may be similar
to the sample collection component 500 and further have the
removable light shielding component 520 on the main body 710.
Alternatively, the sample collection component 700 may be similar
to the sample collection component 600, in which the removable
light shielding component 620 or 625 is formed simultaneously when
the main body 710 is manufactured.
[0076] FIG. 10A is a flowchart showing the manufacturing method of
the sample collection component according to an embodiment of the
invention. Referring to FIG. 7A and FIG. 10A, in this embodiment,
the manufacturing method of the sample collection component 500
includes: bonding the first substrate 612 to the second substrate
614, and forming the spacer 516 between the first substrate 612 and
the second substrate 614 (Step S801) to connect and fix the first
substrate 612 and the second substrate 614, so as to form the
sample storing space 530, which is sealable and allows light to
pass through, between the first substrate 612 and the second
substrate 614. Then, the removable light shielding component 520 is
formed on the first substrate 512 (Step S802). The removable light
shielding component 520 corresponds to the sample storing space 530
and shields at least a portion of the light that passes through the
sample storing space 530.
[0077] In this embodiment, the removable light shielding component
520 is a sheet material, for example, which is attached onto the
first substrate 612 by external overlap, clamping, or electrostatic
adsorption. Alternatively, the removable light shielding component
520 may be a material layer formed on the first substrate 612 by
vapor deposition, sputtering, or coating. The sample collection
component 500 shields at least a portion of the light that enters
the sample storing space 530 with the removable light shielding
component 520.
[0078] Referring to FIG. 7A again, in this embodiment, like the
aforementioned sample collection component 600, the sample
collection component 500 may further have the first recess formed
on the first surface 612a of the first substrate 612 corresponding
to the sample storing space 530, so as to form the first
observation window 613a that exposes the sample storing space 530.
In addition, the first observation window 613a may be temporarily
covered by the removable light shielding component 520, which is
formed of a sheet material for example, so as to form a sealed
space of a particular pressure in the first observation window
613a. The pressure is in a range of 0.01 KPa to 150 KPa, for
example, to enhance the stability of the sheet material attached
onto the first surface 612a.
[0079] FIG. 10B is a flowchart showing the manufacturing method of
the sample collection component according to an embodiment of the
invention. Referring to FIG. 8A and FIG. 10B, in the manufacturing
process of the sample collection component 600, after the bonding
of the first substrate 612 to the second substrate 614 is completed
and the spacer 516 is formed between the first substrate 612 and
the second substrate 614 (Step S901), in addition to forming the
removable light shielding component 520 on the first substrate 612
of the sample collection component 600 as shown in FIG. 10A, in
this embodiment, the removable light shielding component 520 may be
simultaneously formed on the second substrate 614 of the sample
collection component 600 (Step S902), so as to provide the light
shielding effect for both the first observation window 613a and the
second observation window 613b of the sample collection component
600 and enhance the light shielding effect of the sample storing
space 530.
[0080] FIG. 11A is a flowchart showing the manufacturing method of
the sample collection component according to another embodiment of
the invention. Referring to FIG. 7C and FIG. 11A, in this
embodiment, the manufacturing method of the sample collection
component 600 includes providing the first substrate 612, and the
removable light shielding component 625 is formed on the first
substrate 612 in the process of manufacturing the first substrate
612 (Step S1001). Then, the first substrate 612 is bonded to the
second substrate 614 and the spacer 516 is formed between the first
substrate 612 and the second substrate 614 (Step S1002) to form the
sample storing space 530 that is sealable and allows light to pass
through between the first substrate 612 and the second substrate
614. In this embodiment, the removable light shielding component
625 is disposed corresponding to the sample storing space 530 to
shield at least a portion of the light that passes through the
sample storing space 530.
[0081] As described above, the first surface 612a of the first
substrate 612 in this embodiment may be formed with the first
recess corresponding to the sample storing space 530, so as to form
the first observation window 613a that exposes the sample storing
space 530. Moreover, the removable light shielding component 625 of
this embodiment may be a material layer formed of SiC, which is
disposed on the bottom surface of the first observation window 613a
and extends to a portion of a junction between the sample storing
space 530 and the first substrate 612.
[0082] In this embodiment, in the manufacturing method of the
sample collection component 600, the removable light shielding
component 620 may be used as the light shielding structure, as
shown in FIG. 7B. As described above, the removable light shielding
component 620 is a structural member formed simultaneously with the
first substrate 612, and the removable light shielding component
620 may be connected with the first substrate 612 through the
connection part 621 to shield at least a portion of the light that
passes through the sample storing space 530.
[0083] FIG. 11B is a flowchart showing the manufacturing method of
the sample collection component according to an embodiment of the
invention. Referring to FIG. 8C and FIG. 11B, in the manufacturing
method of the sample collection component 600 in this embodiment,
in addition to forming the removable light shielding component 625
on the first substrate 612 in the step of manufacturing the first
substrate 612 as shown in FIG. 11A, the removable light shielding
component 520 may be formed on the second substrate 614 while the
second substrate 614 is manufactured (Step S1101). Then, the first
substrate 612 and the second substrate 614 respectively having the
removable light shielding component 520 formed on the surfaces
thereof are bonded to each other, and the spacer 516 is formed
between the first substrate 612 and the second substrate 614 (Step
S1102).
[0084] To sum up, the sample collection component disclosed in the
above embodiments of the invention is provided with the removable
light shielding component to shield at least a portion of the light
that passes through the sample storing space. Before the liquid
sample is loaded into the sample storing space, the removable light
shielding component prevents unnecessary light from entering the
sample storing space through the main body of the sample collection
component by filtering, reflecting, or absorbing the light.
Therefore, before observation is performed with a microscope
device, such as an electron microscope, the removable light
shielding component prevents the fluidity or component properties
of the liquid sample from being changed due to irradiation of
external light or reaction between the components of the liquid
sample and the light, which may affect the observation result.
[0085] It will be apparent to those skilled in the art that various
modifications and variations can be made to the disclosed
embodiments without departing from the scope or spirit of the
invention. In view of the foregoing, it is intended that the
invention covers modifications and variations provided that they
fall within the scope of the following claims and their
equivalents.
* * * * *