Solid Precursor, Apparatus for Supplying Source Gas and Deposition Device Having the Same

Musarrat; Hasan ;   et al.

Patent Application Summary

U.S. patent application number 16/019907 was filed with the patent office on 2019-06-20 for solid precursor, apparatus for supplying source gas and deposition device having the same. The applicant listed for this patent is Samsung Electronics Co., Ltd.. Invention is credited to Ik Soo Kim, Jang Hee Lee, So Young Lee, Hasan Musarrat.

Application Number20190186002 16/019907
Document ID /
Family ID66815633
Filed Date2019-06-20

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US20190186002A1 – US 20190186002 A1

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