U.S. patent application number 16/199807 was filed with the patent office on 2019-06-06 for joined structure, joining method, and joining material.
The applicant listed for this patent is Panasonic Intellectual Property Management Co., Ltd.. Invention is credited to TAKAHIRO KUMAKAWA.
Application Number | 20190172810 16/199807 |
Document ID | / |
Family ID | 66659511 |
Filed Date | 2019-06-06 |
![](/patent/app/20190172810/US20190172810A1-20190606-D00000.png)
![](/patent/app/20190172810/US20190172810A1-20190606-D00001.png)
![](/patent/app/20190172810/US20190172810A1-20190606-D00002.png)
![](/patent/app/20190172810/US20190172810A1-20190606-D00003.png)
![](/patent/app/20190172810/US20190172810A1-20190606-D00004.png)
United States Patent
Application |
20190172810 |
Kind Code |
A1 |
KUMAKAWA; TAKAHIRO |
June 6, 2019 |
JOINED STRUCTURE, JOINING METHOD, AND JOINING MATERIAL
Abstract
A joined structure includes: a first member; and a second member
that faces the first member and that is joined to the first member
via a joining layer. The joining layer includes a metal material
and a solder material, apart of the metal material has at least one
pore, and the solder material is located in a part of an internal
area of the at least one pore. Also disclosed is a joining method
that makes it possible to produce the joined structure. Further
disclosed is a joining material used in the joining method. The
joining method makes it possible to achieve non-pressurization
sintering processes while maintaining high precise thickness of a
joining layer between the first layer and the second layer based on
the spacer.
Inventors: |
KUMAKAWA; TAKAHIRO; (Kyoto,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Panasonic Intellectual Property Management Co., Ltd. |
Osaka |
|
JP |
|
|
Family ID: |
66659511 |
Appl. No.: |
16/199807 |
Filed: |
November 26, 2018 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 24/32 20130101;
H01L 2224/83192 20130101; H01L 2224/83001 20130101; H01L 2224/29291
20130101; H01L 24/29 20130101; B22F 1/0018 20130101; H01L 2224/293
20130101; H01L 2224/32225 20130101; H01L 2224/29213 20130101; B22F
1/0059 20130101; B22F 7/064 20130101; H01L 2224/2731 20130101; H01L
2224/2732 20130101; H01L 24/83 20130101; H01L 2224/29499 20130101;
H01L 2924/12041 20130101; H01L 2224/75272 20130101; B23K 35/025
20130101; H01L 2224/83136 20130101; H01L 2224/29209 20130101; B32B
15/04 20130101; B32B 15/16 20130101; H01L 2224/2929 20130101; H01L
2224/8384 20130101; B32B 2264/105 20130101; H01L 2224/83447
20130101; H01L 2224/83439 20130101; H01L 2224/83211 20130101; H01L
2224/29239 20130101; H01L 2224/29294 20130101; H01L 2224/75251
20130101; H01L 2224/3201 20130101; H01L 24/75 20130101; H01L
2224/8384 20130101; H01L 2924/00012 20130101; H01L 2224/83001
20130101; H01L 2924/00012 20130101; H01L 2224/83136 20130101; H01L
2924/00012 20130101; H01L 2224/293 20130101; H01L 2924/014
20130101; H01L 2224/2732 20130101; H01L 2924/00014 20130101; H01L
2224/2731 20130101; H01L 2924/00014 20130101; H01L 2224/83447
20130101; H01L 2924/00014 20130101; H01L 2224/83439 20130101; H01L
2924/00014 20130101; H01L 2224/2929 20130101; H01L 2224/83862
20130101; H01L 2224/3201 20130101; H01L 2924/00012 20130101 |
International
Class: |
H01L 23/00 20060101
H01L023/00; B23K 35/02 20060101 B23K035/02; B22F 7/06 20060101
B22F007/06 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 1, 2017 |
JP |
2017-231347 |
Claims
1. A joined structure, comprising: a first member; and a second
member that faces the first member and that is joined to the first
member via a joining layer, wherein the joining layer comprises a
metal material and a solder material, a part of the metal material
is porous state, and the solder material is located in a part of
the porous state.
2. The joined structure according to claim 1, wherein an alloy of
the metal material and the solder material is present in a part of
the joining layer.
3. The joined structure according to claim 1, wherein the porous
state comprises multiple pores, and an alloy of the metal material
and the solder material is present in parts of the multiple
pores.
4. The joined structure according to claim 1, wherein the metal
material is a sintered metal.
5. The joined structure according to claim 2, wherein the alloy has
a melting point higher than a melting point of the solder
material.
6. The joined structure according to claim 1, wherein the solder
material comprises Bi or In.
7. The joined structure according to claim 2, wherein the metal
material is Ag, and the alloy at least comprises Ag and Bi, or Ag
and In.
8. The joined structure according to claim 2, wherein the solder
material and/or the alloy are locally and continuously located over
an area from the first member and the second member.
9. A joining method, comprising: (i) supplying, onto a first
surface of a first member, a nanometal paste at least comprising
metal nanoparticles and a solvent, and a spacer; (ii) facing a
second member to the first member, and pushing said second member
onto the spacer, to mount said second member over the first member;
(iii) heating a product obtained in Step (ii) at a temperature
equal to or lower than a temperature where the solvent in the
nanometal paste is evaporated, to cause the spacer to melt or
decompose; (iv) heating the product resulting from Step (iii) at
the temperature where the solvent in the nanometal paste is
evaporated; and (v) heating the product resulting from Step (iv) at
a temperature where the metal nanoparticles are sintered.
10. The joining method according to claim 9, wherein an area
between the first member and the second member is not pressurized
in Steps (iii), (iv) and (v).
11. The joining method according to claim 9, wherein the spacer is
a solder material.
12. The joining method according to claim 11, wherein the solder
material comprises Bi or In.
13. The joining method according to claim 9, wherein the spacer has
a spherical shape, a columnar shape, a wire shape, or a foil
shape.
14. The joining method according to claim 9, wherein, in Step (i),
the nanometal paste comprising the spacer in advance is supplied
onto the first surface of the first member.
15. A nanometal paste joining material, comprising metal
nanoparticles, a solvent, and a spacer that is melted or decomposed
at a temperature lower than a boiling point of the solvent.
16. The nanometal paste joining material according to claim 15,
wherein the spacer is a solder material.
17. The nanometal paste joining material according to claim 16,
wherein the solder material comprises Bi or In.
Description
TECHNICAL FIELD
[0001] The technical field relates to joined structures that may be
semiconductor devices, joining methods, and joining materials. In
particular, the technical field relates to joining methods in which
semiconductor devices are joined to certain materials based on
metal nanoparticles, and resulting joined structures.
BACKGROUND
[0002] For the methods of mounting semiconductor devices (e.g.
semiconductor power devices and super luminosity LEDs) onto circuit
substrates and heat-radiation boards, techniques based on metal
nanoparticles serving as joining materials have attracted a great
deal of attention.
[0003] The metal nanoparticles are metal particles that have a size
smaller than 100 nm, and that may be made of Au, Ag, Cu, Sn, or the
like.
[0004] The metal nanoparticles have high surface activity, and have
lower melting points, because of their fine structures. Therefore,
the metal nanoparticles make it possible to sinter at lower
temperatures (e.g. 150-350.degree. C.)
[0005] Furthermore, when the metal nanoparticles are joined to one
another, thus having larger sizes, the metal nanoparticles have
higher melting points that would be almost equal to melting points
of ordinary-size metal materials having a millimeter scale
thickness or an even larger thickness (hereinafter, referred to as
bulk metal materials).
[0006] Therefore, the metal nanoparticles are suitable for
applications to a wide range of products that require reductions in
heat stress caused in mounting of semiconductor devices, and
improvements on service temperature limits even after the
semiconductor devices are mounted.
[0007] In general, joining processes based on the metal
nanoparticles are carried out based on nanometal pastes that are
formed by dispersion of metal nanoparticles, protected by
dispersing agents, in solvents.
[0008] In the conventional joining methods, the nanometal pastes
are supplied onto first members (e.g. substrates) based on screen
printing, use of dispensers, etc., second members (e.g.
semiconductor elements) are temporarily immobilized thereon with
mounters. Subsequently, the resulting products are preheated to
certain temperatures (e.g. 100-150.degree. C.) in high-temperature
furnaces, thereby causing solvents in the nanometal pastes to
evaporate. Then, the products are heated to sintering temperatures
(e.g. 200-300.degree. C.) to progress the sintering process,
thereby forming joining layers.
[0009] Furthermore, pressurization treatments may be carried out
together with the heat treatments during the sintering process in
order to form more rigid joining layers. However, in recent years,
a variety of non-pressurization sintering-type nanometal pastes
that realizes sufficient joining strength even without any
particular pressurization treatments have been increased, because
dispersing agents and solvents included in the nanometal pastes,
and materials for the metal nanoparticles have been improved, and
compositions for the nanometal pastes have been optimized.
[0010] Degrees of precision of the thickness of joining layers
after sintering and joining of the metal nanoparticles would be
determined depending almost on accuracy of the step of temporal
immobilization of the second members. This is because volumetric
shrinkages of the nanometal pastes are uniformly achieved during
evaporation of solvents and the sintering process, when the joint
areas are viewed in macroeconomic terms.
[0011] Furthermore, when the products are heated while they are
pressurized, heating in the sintering process, and accuracy in the
pressurization process become dominant.
[0012] As a method for enhancing degrees of precision of thickness
of the joining layers, methods in which spacers are placed between
joined areas have previously been studied (e.g. see
JP-A-2011-71301).
[0013] FIGS. 3A-3D show a conventional joining method disclosed in
JP-A-2011-71301 using metal nanoparticles.
[0014] At first, as shown in FIG. 3A, a nanometal paste 102, and
spacers 103a are coated onto a joining surface of a first member
101, and then, a second member 104 is mounted thereon as shown in
FIG. 3B. Subsequently, a resulting product is heated to a
temperature that causes solvents contained in the nanometal paste
102 to evaporate, in a high-temperature furnace, thereby removing
the solvents (not shown in the figure). In this case, a volumetric
shrinkage of the nanometal paste 102 will occur due to evaporation
of the solvents.
[0015] Since original shapes and sizes of spacers 103a are
maintained at this point, the spacers 103a serve as propping bars,
and, consequently, spaces equivalent to the volumetric shrinkage
are produced between the nanometal paste 102 and the second member
104.
[0016] Next, as shown in FIG. 3C, while the product is pressurized
at a pressure causing plastic deformation of the spacer 103b, with
a pressure device 106, the product is heated to a temperature that
achieves sintering of metal nanoparticles, in a high-temperature
furnace 105.
[0017] Thus, the sintering process is progressed to form a joined
structure 200.
[0018] By way of continuing the pressurization to realize the
plastic deformation as seen in the spacers 103b, the aforementioned
space caused in association with the volumetric shrinkage of the
nanometal paste during the evaporation of solvents is squashed, and
the rigid junction is realized after the sintering process.
SUMMARY
[0019] However, since a certain pressure is required to cause the
plastic deformation of the spacer during the sintering process in
the above-described convention joining method, an apparatus for
controlling heating and pressurization at the same time is always
required.
[0020] In general, accuracy of control of pressurization at a
high-temperature state is difficult due to influences of strain
caused from thermal expansion of the equipment.
[0021] As a consequence, there are problems in which the facility
would become expensive, and daily maintenance of the equipment
would become laborious.
[0022] Furthermore, since not only a mere heat treatment but also a
pressurization treatment are required, mass production, in which,
for example, multiple joined structure are processed at the same
time, would be difficult, and thus, there is a problem of
difficulty in improving the productivity.
[0023] The purpose of the disclosure is to solve the
above-described problems in the conventional art. That is, an
object of the disclosure is to provide joining materials having
high precision of thickness of joining layers, joining methods, and
joined structures.
[0024] In order to achieve the above-mentioned purpose, according
to a first aspect of the disclosure, provided is a joined
structure, including: a first member; and a second member that
faces the first member and that is joined to the first member via a
joining layer, wherein the joining layer includes a metal material
and a solder material, a part of the metal material has at least
one pore, and the solder material is located in a part of an
internal area of the at least one pore.
[0025] Moreover, according to a second aspect of the disclosure,
provided is a joining method, including: (i) supplying, onto a
first surface of a first member, a nanometal paste at least
including metal nanoparticles and a solvent, and a spacer; (ii)
facing a second member to the first member, and pushing the second
member onto the spacer, to mount the second member over the first
member; (iii) heating a product obtained in Step (ii) at a
temperature equal to or lower than a temperature where the solvent
in the nanometal paste is evaporated, to cause the spacer to melt
or decompose; (iv) heating the product resulting from Step (iii) at
the temperature where the solvent in the nanometal paste is
evaporated; and (v) heating the product resulting from Step (iv) at
a temperature where the metal nanoparticles are sintered.
[0026] Furthermore, according to a third aspect of the disclosure,
provided is a nanometal paste joining material, including metal
nanoparticles, a solvent, and a spacer that is melted or decomposed
at a temperature lower than a boiling point of the solvent.
[0027] As described above, according to the joining methods of the
disclosure, in formation of joining layers in the sintering step
using nanometal pastes, the spacers are never melted or decomposed
before the step of evaporation of solvents in the nanometal paste,
and thus, subduction of the first member relative to the second
member in association of the volumetric shrinkage caused during the
evaporation of solvents or the progress of the sintering process is
never impeded.
[0028] Accordingly, in the process from the temporal immobilization
step to the sintering step, no spaces are caused between joining
members and the nanometal paste even in a non-pressurized state,
and thus, sufficient joint strength will be obtained.
[0029] Moreover, high-precision mounting of the second member using
spacers becomes possible in the mounting step in which the temporal
immobilization of the second member is carried out, and precision
of thickness of the joining layer in the non-pressurization
sintering process is determined. Therefore, high precision of the
thickness of the joining layer can be maintained even after the
sintering process.
[0030] Furthermore, because formation of the joining layer becomes
possible in non-pressurization sintering processes according to the
disclosure, any equipment involving control of high pressurization
within a high-temperature atmosphere is not required, and also, it
becomes possible to carryout a sintering treatment to multiple
joined structures based on high-temperature furnace, at the same
time.
[0031] Accordingly, the disclosure can provide cost-effective
production processes.
[0032] Furthermore, some of pores produced in parts of the sintered
metal in the joining layer formed by the above-described joining
method are filled with spacer materials that have been melted and
resolidified.
[0033] Accordingly, thermal conductivity can locally be increased
around such pores, compared with hollow states.
[0034] Additionally, parts of the sintered metal, and the solder
material, which serves as a material for the spacers, form an
alloy, and thus, the formed alloy has a melting point higher than
the solder material serving as the material for the spacers before
the melting process. Therefore, remelting of the material can be
prevented in the joined structure.
BRIEF DESCRIPTION OF THE DRAWINGS
[0035] FIGS. 1A-1F are flowchart diagrams showing steps in a
joining method according to a present embodiment.
[0036] FIG. 2 is a cross-section view showing a state of a joining
layer in a present embodiment.
[0037] FIG. 3A-3D flowchart diagrams showing steps in the
conventional joining method disclosed in JP-A-2011-71301.
DESCRIPTION OF EMBODIMENTS
[0038] Hereinafter, embodiments of the disclosure will be described
with reference to the drawings.
Embodiments
<Process>
[0039] FIGS. 1A-1F are flowchart diagrams showing steps in a
joining method according to a present embodiment
(i) Step of Supplying a Paste
[0040] As shown in FIG. 1A, a nanometal paste 2, and spacers 3a are
supplied onto a joining surface (top surface) of a first member
1.
[0041] The nanometal paste 2 has a composition including a solvent,
and metal nanoparticles that are protected by a dispersing agent
and that are dispersed in the solvent.
[0042] The first member 1 may be a printed wiring substrate, a
ceramic wiring substrate, a heat releasing substrate having high
thermal conductivity, or the like.
[0043] As an example of a method for supplying the paste onto the
first member 1, a method in which the nanometal paste 2 including
spacers 3a is supplied thereon based on screen printing or by using
a dispenser can be mentioned.
[0044] When the spacers 3a are mixed into the nanometal paste 2 in
advance, shapes of the spacers 3a may preferably be spherical.
Otherwise, it would become very difficult to control orientations
of the spacers 3a when the nanometal paste 2 is supplied onto the
first member 1.
[0045] The joining surface of the first member 1 used in present
embodiments may preferably be formed of a Cu solid material.
Alternatively, the joining surface may preferably be Ag- or
Au-plated, because such a joining surface realizes excellent
bondability with respect to metal nanoparticles.
[0046] Moreover, although the shapes of spacers 3a may preferably
be spherical in present embodiments as mentioned above, the spacers
3a may be wire- or foil-shaped in cases in which a nanometal paste
2, and the spacers 3a are separately supplied onto the first member
1. In that case, the wire- or foil-shaped spacers 3a may be placed
onto the first member 1, and then, the nanometal paste 2 may be
coated thereon.
[0047] Furthermore, columnar solder-plated objects serving as
spacers 3a are formed on the first member 1 in advance, and then,
the nanometal paste 2 may be supplied thereto.
[0048] For the metal nanoparticles in the nanometal paste 2, metal
particles (metal nanoparticles) with a mean particle diameter from
about 0.5 nm to about 100 nm may be employed.
[0049] As an example of such metal nanoparticles, NPG-J
manufactured by Harima Chemicals Group, Inc. (particle size: 3-7
nm) can be mentioned.
[0050] Furthermore, the metal nanoparticles may be made of a
mono-element metal such as Ag, Au, Cu or Sn, or a multi-element
metal such as SnAg, SnSb, or AuSn.
[0051] Additionally, metal particles with a particle size of 100 nm
or more may be mixed into the nanometal paste 2, together with the
metal nanoparticles.
[0052] For a solvent contained in the nanometal paste 2, terpineol,
decanol, tetradecane, toluene, decalin, and the like can be
employed.
[0053] For the spacers 3a, solder materials having a melting point
equal to or lower than a boiling point of the solvent contained in
the nanometal paste 2 may preferably be employed. For example, when
terpineol or cecanol, which has a boiling point of above
200.degree. C., is employed as a solvent for the nanometal paste 2,
an SnZn-type solder having a melting point from about 190.degree.
C. to about 200.degree. C. may be employed.
[0054] When decalin, which has a boiling point of about 186.degree.
C., is employed, for example, an SnBi-type solder having a melting
point of about 140.degree. C., an SnIn-type solder having a melting
point of about 120.degree. C. may be employed.
[0055] When toluene, which has a boiling point of about 110.degree.
C., a BiIn-type solder having a melting point of about 70.degree.
C. may preferably be employed.
[0056] Needless to say, other types of binary solders, and ternary
or even higher multi-element solders can also be employed.
[0057] Additionally, thermoplastic resin materials, or rubbers that
are decomposed at a temperature equal to or lower than a boiling
point of the solvent contained in the nanometal paste 2 may be
employed instead of solders.
(ii) Step Mounting a Second Member
[0058] As shown in FIG. 1B, a second member 4 is mounted onto the
first member 1 via the nanometal paste 2.
[0059] For example, the second member 4 may be a semiconductor
element.
[0060] When the second member 4 is mounted thereon, the second
member 4 is pushed onto the first member 1 such that the second
member 4 is brought into contact with the spacers 3a.
[0061] In that case, by controlling the pressure such that a
shrinkage of spacers becomes equal to or smaller than a certain
value, a gap between the first member 1 and the second member 4 can
highly precisely be maintained.
[0062] According to the present joining method, a device used for
mounting the second member 4 onto the first member, a high degree
of accuracy of the positional control in the mounting height
direction is not required since the level can be adjusted only
based on pressure control.
[0063] That is, even an inexpensive mounter or the like that not
requires any expensive positional control functions be
employed.
[0064] In heating steps described below, an area between the second
member 4 and the first member 1 is not pressurized.
(iii) First Heating Step
[0065] As shown in FIG. 1C, the product is heated in a
high-temperature furnace 5 or the like, and thus, the spacers 3a
are melted at a temperature where the solvent in the nanometal
paste 2 is not evaporated, thereby forming spacers 3b in a molten
state.
[0066] When the solvent contained in the nanometal paste 2 has a
boiling point of 150.degree. C. or higher, for example, an Sn58Bi
solder having a melting point of around 140.degree. C., and an
Sn49In solder having a melting point of around 120.degree. C. may
preferably be employed for materials for the spacers.
[0067] Furthermore, when the solvent contained in the nanometal
paste 2 has a boiling point of about 100.degree. C., for example,
an In33Bi solder having a melting point of around 80.degree. C. may
be employed for materials for the spacers.
[0068] As other types of solder materials, ternary solder materials
such as SnBiIn and the like can be employed.
[0069] Additionally, although the spacers 3b are melted, the
spacers 3b do not almost spread to the peripheries.
[0070] Wettability of the spacers 3b is different from wettability
of surrounding materials, and therefore, the spacers 3b do not
substantially spread thereto.
(iv) Second Heating Step
[0071] As shown in FIG. 1D, the product is heated to a temperature
where the solvent contained in the nanometal paste 2 is evaporated,
and thus, an amount of the solvent is reduced.
[0072] In that case, since a volume of the nanometal paste 2 is
reduced depending on evaporation of the solvent, the second member
4 is caused to entirely subside, and thus, the joint level become
smaller. However, components of the metal nanoparticles are
uniformly remained over the entire joining surface of the second
member 4, and therefore, precision of the joint level is
maintained.
[0073] Furthermore, a molten state of the spacers 3b are
maintained, and therefore, the subduction is not hindered.
[0074] Additionally, the reductions in the volume of the nanometal
paste 2 in this step is determined almost depending on a blending
ratio of the solvent in the nanometal paste 2, and the metal
nanoparticles, and may typically be about 30% to about 50%.
[0075] Therefore, when spherical spacers 3a are employed, the size
is preferably about 200% to about 285% of the volume of the joining
layer 8 (FIG. 1F) in the produced joined structure, in
consideration of shrinkages of the spacers 3a due to the pressure
caused when the second member 4 is mounted onto the first member
1.
(v) Third Heating Step
[0076] As shown in FIG. 1E, the product is heated to a temperature
where the dispersing agent in the nanometal paste 2 is removed and
where the metal nanoparticles are sintered, and is further allowed
to stand at such a temperature until the sintering process is
sufficiently progressed, thereby forming a sintered metal 7 mainly
containing a rigid bulk metal.
(VI) Cooling Step
[0077] At last, as shown in FIG. 1F, by cooling the resulting
material to an ordinary temperature, the molten spacers 3b are
cooled, and thus, resolidified spacers 3c are formed, thereby
forming a joining layer 8.
<Advantages>
[0078] In the steps of FIGS. 1C-1E in which heating treatments are
involved, any pressurization is not required, and therefore, any
steps requiring advanced control of pressurization in a
high-temperature state becomes unnecessary.
[0079] Furthermore, in the step involving heating treatments, it
becomes possible to employ general-purpose large high-temperature
furnace or the like, and thus, treatments of multiple products
becomes possible at the same time.
[0080] Accordingly, it becomes possible to reduce production
costs.
[0081] Additionally, although a high-temperature furnace is
employed for the heating steps in this embodiment, for example, a
hot plate may be employed instead of it. Heating device used in the
disclosure is not particularly limited to a high-temperature
furnace.
<Prepared Semiconductor Devices>
[0082] With reference to FIG. 2, a configuration of the joined
structure 300 prepared based on the above-described joining method
will be described.
[0083] FIG. 2 is a cross-section of the prepared joined structure
300.
[0084] The joining layer 8 is formed by a sintered metal 7 that is
formed through sintering of metal nanoparticles, a porous state 9
that is caused as a space that is caused because insufficient
linkage of parts of metal nanoparticles during the sintering
process, or a pore that is formed as a remining route, through
which gases of the remained solvent or dispersing agent had passed,
spacers 3c, that had been melted and then resolidified, and an
alloy 10 including a sintered metal 7 and spacers 3c.
[0085] In this case, the resolidified spacers 3c are filled within
some of pores.
[0086] Moreover, the above-mentioned paces and pores are small, and
therefore, do not cause any adverse effects on bondability between
the first member 1 and the second member 4.
[0087] However, the alloy 10 may not be formed depending on types
of elements in the sintered metal and spacers.
[0088] Furthermore, any spacers 3c may not be present in some of
the pores.
[0089] For example, although a bulk Ag material has a thermal
conductivity of 418 W/mK, the actual thermal resistance would go
down as low as about 80-330 W/mK since pores will be present in the
sintered joining layer 8 when an Ag-based nanometal paste is
sintered. However, according to the disclosure, it becomes possible
to improve the thermal conductivity because some of the pores are
filled with resolidified spacers 3c.
[0090] Additionally, for example, when the sintered metal 7 is Ag,
and the material for the spacers 3c is a 67In-33Bi solder having a
melting point of about 73.degree. C., an AgBi alloy or the like
having a melting point of about 262.degree. C. is formed as the
alloy 10.
[0091] When the alloying process of the spacers 3c is progressed,
the melting point of the spacer 3c, which originally had a lower
melting point, is shifted toward a higher temperature region, and
thus, it becomes possible to prevent the jointed structure from
remelting even when the resulting joined structure is subjected to
a heat treatment or the like.
[0092] Furthermore, when a 42Sn-58Bi solder having a melting point
of about 139.degree. C. is employed as another type of material for
the spacers 3c, an AgBi alloy having a melting point of about
262.degree. C. or higher, an AgSn alloy having a melting point of
about 221.degree. C. or higher, or the like may be formed as an
alloy 10.
[0093] For other materials for the spacers 3c, a binary solder
material such as SnIn, and multielement solder materials such as
SnBiIn may also be employed.
[0094] According to the disclosure, it becomes possible to secure
excellent heat-releasing properties through the joining layer, and
high joining reliability, while securing high precision of
thickness of joining layer in the non-pressurization sintering
joining process based on the metal nanoparticles.
[0095] Furthermore, since the disclosure does not require any
expensive pressurization-control equipment under high-temperature
environment, it becomes possible to reduce production costs.
[0096] Even if the area between first member 1 and the second
member 4 is not pressurized in the heating steps, the first member
1 and the second member 4 can be joined without causing any large
spaces.
[0097] In addition, the solder material (spacers 3c) and/or an
alloy 10 are locally and continuously located throughout an area
from the first member 1 to the second member 4 in the joined
structure 300, as a result of the above process.
[0098] The disclosure is suitable for joining processes for
production of high-heat-generating semiconductor devices requiring
high heat resistance and heat releasing properties (e.g. power
semiconductor devices and super luminosity LEDs).
* * * * *