U.S. patent application number 16/170433 was filed with the patent office on 2019-02-28 for solid-state imaging apparatus and imaging system.
The applicant listed for this patent is CANON KABUSHIKI KAISHA. Invention is credited to Takeshi Ichikawa, Masatsugu Itahashi, Kazunari Kawabata, Masahiro Kobayashi, Mineo Shimotsusa.
Application Number | 20190068903 16/170433 |
Document ID | / |
Family ID | 54070399 |
Filed Date | 2019-02-28 |
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United States Patent
Application |
20190068903 |
Kind Code |
A1 |
Shimotsusa; Mineo ; et
al. |
February 28, 2019 |
SOLID-STATE IMAGING APPARATUS AND IMAGING SYSTEM
Abstract
Provided is a solid-state imaging apparatus, including pixels
each including: a photoelectric conversion unit; a charge
accumulation unit; a transistor including a control electrode; a
waveguide; and a light-shielding portion. The waveguide includes an
incident portion and an output portion, the light-shielding portion
includes a first portion that covers the control electrode of the
transistor and a second portion that covers a part of the
photoelectric conversion unit, the output portion and the
photoelectric conversion unit are arranged with an interval
therebetween, the interval between the output portion and the
photoelectric conversion unit is larger than an interval between a
lower end of the second portion of the light-shielding portion and
the photoelectric conversion unit, and the interval between the
output portion and the photoelectric conversion unit is smaller
than an interval between an upper end of the second portion of the
light-shielding portion and the photoelectric conversion unit.
Inventors: |
Shimotsusa; Mineo;
(Machida-shi, JP) ; Itahashi; Masatsugu;
(Yokohama-shi, JP) ; Kobayashi; Masahiro; (Tokyo,
JP) ; Kawabata; Kazunari; (Kawasaki-shi, JP) ;
Ichikawa; Takeshi; (Hachioji-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
CANON KABUSHIKI KAISHA |
Tokyo |
|
JP |
|
|
Family ID: |
54070399 |
Appl. No.: |
16/170433 |
Filed: |
October 25, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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15862292 |
Jan 4, 2018 |
10158817 |
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16170433 |
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15094032 |
Apr 8, 2016 |
9906743 |
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15862292 |
|
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14628828 |
Feb 23, 2015 |
9344653 |
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15094032 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H04N 5/37452 20130101;
H01L 27/14685 20130101; H01L 27/14612 20130101; H01L 27/14629
20130101; H01L 27/14645 20130101; H04N 5/369 20130101; H01L
27/14621 20130101; H01L 27/14636 20130101; H01L 27/14627 20130101;
H01L 27/14609 20130101; H01L 27/14625 20130101; H04N 5/238
20130101; H01L 27/14623 20130101 |
International
Class: |
H04N 5/369 20060101
H04N005/369; H04N 5/238 20060101 H04N005/238; H01L 27/146 20060101
H01L027/146; H04N 5/3745 20060101 H04N005/3745 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 14, 2014 |
JP |
2014-051422 |
Claims
1.-19. (canceled)
20. A photoelectric conversion apparatus, comprising: a
semiconductor substrate; a plurality of pixels arranged in the
semiconductor substrate, each pixel including a photoelectric
conversion unit configured to generate a signal charge by
photoelectric conversion of incident light, a charge accumulation
unit configured to accumulate the signal charge transferred from
the photoelectric conversion unit, a transistor configured to
transfer the signal charge from the photoelectric conversion unit
to the charge accumulation unit, the transistor including a gate
electrode, and a floating diffusion portion configured to receive
the signal charge transferred from the charge accumulation unit; a
waveguide configured to guide the incident light into the
photoelectric conversion unit; a light-shielding portion covering
at least the gate electrode and the charge accumulation unit; and a
plurality of wiring layers arranged above the light-shielding
portion so that the plurality of wiring layers overlap with the
light-shielding portion when viewed in a planer view, the light
shielding portion being arranged between the plurality of wiring
layers and the substrate, wherein: the waveguide has an upper end
located at a position farther from the semiconductor substrate than
at least a part of the plurality of wiring layers and a lower end
located at a position closer to the semiconductor substrate than
the at least part of the plurality of wiring layers, an insulating
layer is arranged between the lower end of the waveguide and the
semiconductor substrate, and a distance between the lower end of
the waveguide and the semiconductor substrate is smaller than a
distance between an upper end of the light-shielding portion and
the semiconductor substrate.
21. The photoelectric conversion apparatus according to claim 20,
wherein the insulating layer includes a silicon-nitride.
22. The photoelectric conversion apparatus according to claim 21,
wherein the insulating layer includes a portion arranged between
the light-shielding portion and the gate electrode, the portion
overlapping with the gate electrode when viewed in the planar
view.
23. The photoelectric conversion apparatus according to claim 22,
further comprising a second insulating layer arranged between the
light-shielding portion and the portion of the insulating layer
overlapping with the gate electrode.
24. The photoelectric conversion apparatus according to claim 23,
further comprising a third insulating layer arranged between the
insulating layer and the substrate, wherein the third insulating
layer includes a silicon oxide.
25. The photoelectric conversion apparatus according to claim 24,
wherein the third insulating layer includes a portion arranged
between the gate electrode and the substrate.
26. The photoelectric conversion apparatus according to claim 25,
wherein the insulating layer forms a reflection preventing
layer.
27. The photoelectric conversion apparatus according to claim 26,
wherein the portion of the third insulating layer arranged between
the gate electrode and the substrate forms a gate insulating
film.
28. The photoelectric conversion apparatus according to claim 20,
further comprising a second transistor configured to discharge the
signal charge from the photoelectric conversion unit to a drain
portion, the second transistor including a second gate
electrode.
29. The photoelectric conversion apparatus according to claim 28,
wherein the light-shielding portion covers at least a portion of
the second gate electrode.
30. The photoelectric conversion apparatus according to claim 28,
further comprising a third insulating layer arranged between the
insulating layer and the substrate, wherein the third insulating
layer includes a silicon oxide, and wherein the third insulating
layer includes a portion arranged between the second gate electrode
and the substrate.
31. The photoelectric conversion apparatus according to claim 25,
further comprising a second transistor configured to discharge the
signal charge from the photoelectric conversion unit to a drain
portion, the second transistor including a second gate
electrode.
32. The photoelectric conversion apparatus according to claim 31,
wherein the light-shielding portion covers at least a portion of
the second gate electrode.
33. The photoelectric conversion apparatus according to claim 32,
wherein the third insulating layer includes a second portion
arranged between the second gate electrode and the substrate.
34. The photoelectric conversion apparatus according to claim 20,
wherein a width of an opening of the light-shielding portion is
larger than a width of the lower end of the waveguide.
35. The photoelectric conversion apparatus according to claim 20,
wherein a width of the upper end of the waveguide is larger than a
width of the lower end of the waveguide.
36. The photoelectric conversion apparatus according to claim 25,
wherein a width of an opening of the light-shielding portion is
larger than a width of the lower end of the waveguide, and wherein
a width of the upper end of the waveguide is larger than a width of
the lower end of the waveguide.
37. The photoelectric conversion apparatus according to claim 33,
wherein a width of an opening of the light-shielding portion is
larger than a width of the lower end of the waveguide, and wherein
a width of the upper end of the waveguide is larger than a width of
the lower end of the waveguide.
38. The photoelectric conversion apparatus according to claim 20,
wherein the waveguide includes a carbon.
39. The photoelectric conversion apparatus according to claim 20,
wherein the waveguide includes an organic material.
40. The photoelectric conversion apparatus according to claim 25,
wherein the waveguide includes a carbon.
41. The photoelectric conversion apparatus according to claim 25,
wherein the waveguide includes an organic material.
42. The photoelectric conversion apparatus according to claim 33,
wherein the waveguide includes a carbon.
43. The photoelectric conversion apparatus according to claim 33,
wherein the waveguide includes an organic material.
44. The photoelectric conversion apparatus according to claim 37,
wherein the waveguide includes a carbon.
45. The photoelectric conversion apparatus according to claim 37,
wherein the waveguide includes an organic material.
46. The photoelectric conversion apparatus according to claim 20,
wherein at least a part of an edge of an opening of the
light-shielding portion is positioned between the upper end and the
lower end when viewed in the planar view.
47. The photoelectric conversion apparatus according to claim 20,
wherein a width of an opening of the light-shielding portion is
larger than a width of the lower end and smaller than a width of
the upper end.
48. The photoelectric conversion apparatus according to claim 20,
wherein the lower end of the waveguide includes an interface
between the waveguide and an etching stop layer.
49. The photoelectric conversion apparatus according to claim 20,
wherein the lower end of the waveguide includes an interface
between the waveguide and an interlayer insulating layer.
50. The photoelectric conversion apparatus according to claim 20,
wherein the lower end of the waveguide has a shape having a
difference in level.
51. The photoelectric conversion apparatus according to claim 20,
wherein the light-shielding portion includes a first portion which
is arranged at a same height from the semiconductor substrate as
the gate electrode and a second portion which is arranged above the
gate electrode.
52. The photoelectric conversion apparatus according to claim 51,
wherein the first portion and the gate electrode are provided with
a distance therebetween, and the second portion and the gate
electrode are provided with a distance therebetween.
53. The photoelectric conversion apparatus according to claim 52,
wherein the light-shielding portion includes a third portion which
is arranged at a same height as the gate electrode, and the gate
electrode is arranged between the first portion and the third
portion in a cross section including the gate electrode and the
light-shielding portion.
54. The photoelectric conversion apparatus according to claim 53,
wherein the charge accumulation unit includes a first semiconductor
region of a first conductivity type holding the signal charge and a
second semiconductor region of a second conductivity type arranged
between the first semiconductor region and the light-shielding
portion.
55. The photoelectric conversion apparatus according to claim 53,
further comprising a color filter and a microlens which are
arranged above the waveguide.
56. The photoelectric conversion apparatus according to claim 25,
further comprising a color filter and a microlens which are
arranged above the waveguide.
57. The photoelectric conversion apparatus according to claim 33,
further comprising a color filter and a microlens which are
arranged above the waveguide.
58. The photoelectric conversion apparatus according to claim 37,
further comprising a color filter and a microlens which are
arranged above the waveguide.
59. A photoelectric conversion apparatus, comprising: a
semiconductor substrate; a plurality of pixels arranged in the
semiconductor substrate, each pixel including a photoelectric
conversion unit configured to generate a signal charge by
photoelectric conversion of incident light, a charge accumulation
unit configured to accumulate the signal charge transferred from
the photoelectric conversion unit, a transistor configured to
transfer the signal charge from the photoelectric conversion unit
to the charge accumulation unit, the transistor including a gate
electrode, and a floating diffusion portion configured to receive
the signal charge transferred from the charge accumulation unit; a
waveguide configured to guide the incident light into the
photoelectric conversion unit; a light-shielding portion covering
at least the gate electrode and the charge accumulation unit; and a
plurality of wiring layers arranged above the light-shielding
portion so that the plurality of wiring layers overlap with the
light-shielding portion when viewed in a planer view, the light
shielding portion being arranged between the plurality of wiring
layers and the substrate, wherein: an insulating layer is arranged
between the waveguide and the semiconductor substrate, and the
waveguide includes a first portion which is arranged at a same
height from the semiconductor substrate as at least one of the
plurality of wiring layers and a second portion which is arranged
at a same height from the semiconductor substrate as at least a
part of the light-shielding portion.
60. The photoelectric conversion apparatus according to claim 59,
wherein the insulating layer includes a silicon-nitride.
61. The photoelectric conversion apparatus according to claim 60,
wherein the insulating layer includes a portion arranged between
the light-shielding portion and the gate electrode, the portion
overlapping with the gate electrode when viewed in the planar
view.
62. The photoelectric conversion apparatus according to claim 61,
further comprising a second insulating layer arranged between the
light-shielding portion and the portion of the insulating layer
overlapping with the gate electrode.
63. The photoelectric conversion apparatus according to claim 62,
further comprising a third insulating layer arranged between the
insulating layer and the substrate, wherein the third insulating
layer includes a silicon oxide.
64. The photoelectric conversion apparatus according to claim 63,
wherein the third insulating layer includes a portion arranged
between the gate electrode and the substrate.
65. The photoelectric conversion apparatus according to claim 64,
wherein the insulating layer forms a reflection preventing
layer.
66. The photoelectric conversion apparatus according to claim 65,
wherein the portion of the third insulating layer arranged between
the gate electrode and the substrate forms a gate insulating
film.
67. The photoelectric conversion apparatus according to claim 59,
further comprising a second transistor configured to discharge the
signal charge from the photoelectric conversion unit to a drain
portion, the second transistor including a second gate
electrode.
68. The photoelectric conversion apparatus according to claim 67,
wherein the light-shielding portion covers at least a portion of
the second gate electrode.
69. The photoelectric conversion apparatus according to claim 67,
further comprising a third insulating layer arranged between the
insulating layer and the substrate, wherein the third insulating
layer includes a silicon oxide, and wherein the third insulating
layer includes a portion arranged between the second gate electrode
and the substrate.
70. The photoelectric conversion apparatus according to claim 64,
further comprising a second transistor configured to discharge the
signal charge from the photoelectric conversion unit to a drain
portion, the second transistor including a second gate
electrode.
71. The photoelectric conversion apparatus according to claim 70,
wherein the light-shielding portion covers at least a portion of
the second gate electrode.
72. The photoelectric conversion apparatus according to claim 71,
wherein the third insulating layer includes a second portion
arranged between the second gate electrode and the substrate.
73. The photoelectric conversion apparatus according to claim 59,
wherein a width of an opening of the light-shielding portion is
larger than a width of a lower end of the waveguide.
74. The photoelectric conversion apparatus according to claim 59,
wherein a width of an upper end of the waveguide is larger than a
width of a lower end of the waveguide.
75. The photoelectric conversion apparatus according to claim 64,
wherein a width of an opening of the light-shielding portion is
larger than a width of a lower end of the waveguide, and wherein a
width of an upper end of the waveguide is larger than a width of a
lower end of the waveguide.
76. The photoelectric conversion apparatus according to claim 65,
wherein a width of an opening of the light-shielding portion is
larger than a width of a lower end of the waveguide, and wherein a
width of an upper end of the waveguide is larger than a width of a
lower end of the waveguide.
77. The photoelectric conversion apparatus according to claim 59,
wherein the waveguide includes a carbon.
78. The photoelectric conversion apparatus according to claim 59,
wherein the waveguide includes an organic material.
79. The photoelectric conversion apparatus according to claim 64,
wherein the waveguide includes a carbon.
80. The photoelectric conversion apparatus according to claim 64,
wherein the waveguide includes an organic material.
81. The photoelectric conversion apparatus according to claim 72,
wherein the waveguide includes a carbon.
82. The photoelectric conversion apparatus according to claim 72,
wherein the waveguide includes an organic material.
83. The photoelectric conversion apparatus according to claim 76,
wherein the waveguide includes a carbon.
84. The photoelectric conversion apparatus according to claim 76,
wherein the waveguide includes an organic material.
85. The photoelectric conversion apparatus according to claim 59,
wherein at least a part of an edge of an opening of the
light-shielding portion is positioned between an upper end of the
waveguide and a lower end of the waveguide when viewed in the
planar view.
86. The photoelectric conversion apparatus according to claim 59,
wherein a width of an opening of the light-shielding portion is
larger than a width of a lower end of the waveguide and smaller
than a width of an upper end of the waveguide.
87. The photoelectric conversion apparatus according to claim 59,
wherein the lower end of the waveguide includes an interface
between the waveguide and an etching stop layer.
88. The photoelectric conversion apparatus according to claim 59,
wherein the lower end of the waveguide includes an interface
between the waveguide and an interlayer insulating layer.
89. The photoelectric conversion apparatus according to claim 59,
wherein the light-shielding portion includes a first portion which
is arranged at a same height from the semiconductor substrate as
the gate electrode and a second portion which is arranged above the
gate electrode.
90. The photoelectric conversion apparatus according to claim 89,
wherein the first portion and the gate electrode are provided with
a distance therebetween, and the second portion and the gate
electrode are provided with a distance therebetween.
91. The photoelectric conversion apparatus according to claim 90,
wherein the light-shielding portion includes a third portion which
is arranged at a same height as the gate electrode, and the gate
electrode is arranged between the first portion and the third
portion in a cross section including the gate electrode and the
light-shielding portion.
92. The photoelectric conversion apparatus according to claim 91,
wherein the charge accumulation unit includes a first semiconductor
region of a first conductivity type holding the signal charge and a
second semiconductor region of a second conductivity type arranged
between the first semiconductor region and the light-shielding
portion.
93. The photoelectric conversion apparatus according to claim 91,
further comprising a color filter and a microlens which are
arranged above the waveguide.
94. The photoelectric conversion apparatus according to claim 64,
further comprising a color filter and a microlens which are
arranged above the waveguide.
95. The photoelectric conversion apparatus according to claim 72,
further comprising a color filter and a microlens which are
arranged above the waveguide.
96. The photoelectric conversion apparatus according to claim 76,
further comprising a color filter and a microlens which are
arranged above the waveguide.
97. An imaging system, comprising: the photoelectric conversion
apparatus according to claim 20; and an image signal processing
unit configured to process a signal output from the photoelectric
conversion apparatus.
98. An imaging system, comprising: the photoelectric conversion
apparatus according to claim 59; and an image signal processing
unit configured to process a signal output from the photoelectric
conversion apparatus.
99. A photoelectric conversion apparatus, comprising: a plurality
of pixels, each pixel including a photoelectric conversion unit
configured to generate a signal charge by photoelectric conversion
of incident light, a charge accumulation unit configured to
accumulate the signal charge transferred from the photoelectric
conversion unit, a transistor configured to transfer the signal
charge from the photoelectric conversion unit to the charge
accumulation unit, the transistor including a gate electrode, and a
floating diffusion portion configured to receive the signal charge
transferred from the charge accumulation unit; a waveguide
configured to guide the incident light into the photoelectric
conversion unit; and a light-shielding portion covering at least a
part of the charge accumulation unit and at least a part of the
gate electrode of the transistor, and having a portion which is
between the waveguide and the gate electrode of the transistor,
wherein: the photoelectric conversion unit, the charge accumulation
unit, and the floating diffusion portion are included in a
substrate, a second distance between the waveguide and the
substrate is longer than a first distance between the portion of
the light-shielding portion and the substrate, and the second
distance is shorter than a sum of the first distance and a
thickness of the light-shielding portion.
100. The photoelectric conversion apparatus according to claim 99,
further comprising: a plurality of wiring layers provided above the
light-shielding portion; and an insulating layer provided between
the plurality of wiring layers, wherein the waveguide has a
refractive index higher than a refractive index of the insulating
layer.
101. The photoelectric conversion apparatus according to claim 100,
further comprising an etching stop layer arranged between the
waveguide and the substrate.
102. The photoelectric conversion apparatus according to claim 101,
wherein an angle of a side surface of the waveguide is set to
39.8.degree. or less with respect to a direction normal to the
substrate.
103. The photoelectric conversion apparatus according to claim 99,
wherein: the waveguide comprises an incident portion which the
light enters and an output portion from which the light is output,
the light-shielding portion has an opening, and a width of the
opening is larger than a width of the output portion and smaller
than a width of the incident portion.
104. The photoelectric conversion apparatus according to claim 99,
wherein: the photoelectric conversion unit includes a first
semiconductor region of a first conductivity type and a second
semiconductor region of a second conductivity type, arranged in the
substrate, the second semiconductor region forms at least a part of
the substrate, and the first semiconductor region is arranged below
the second semiconductor region and configured to accumulate the
signal charge.
105. The photoelectric conversion apparatus according to claim 99,
wherein each of the plurality of pixels includes a second
transistor configured to transfer the signal charge from the charge
accumulation unit to the floating diffusion portion.
106. The photoelectric conversion apparatus according to claim 99,
wherein, in the planar view, the photoelectric conversion unit and
the charge accumulation unit are arranged in a first direction, and
in the planar view, the photoelectric conversion unit and floating
diffusion portion are arranged in a second direction which is
different from the first direction.
107. A photoelectric conversion apparatus, comprising: a plurality
of pixels, each pixel including a photoelectric conversion unit
configured to generate a signal charge by photoelectric conversion
of incident light, a charge accumulation unit configured to
accumulate the signal charge transferred from the photoelectric
conversion unit, a transistor configured to transfer the signal
charge from the photoelectric conversion unit to the charge
accumulation unit, the transistor including a gate electrode, and a
floating diffusion portion configured to receive the signal charge
transferred from the charge accumulation unit; a waveguide
configured to guide the incident light into the photoelectric
conversion unit; and a light-shielding portion covering at least a
part of the charge accumulation unit, at least a part of the gate
electrode of the transistor and at least a part of the
photoelectric conversion unit, wherein: the light-shielding portion
is arranged with an interval of a first distance from a surface of
the photoelectric conversion unit, a second distance between the
waveguide and the surface of the photoelectric conversion unit is
longer than the first distance, and the second distance is shorter
than a sum of the first distance and a thickness of a part of the
light-shielding portion covering the part of the photoelectric
conversion unit.
108. The photoelectric conversion according to claim 107, further
comprising: a plurality of wiring layers provided above the
light-shielding portion; and an insulating layer provided between
the plurality of wiring layers, wherein the waveguide has a
refractive index higher than a refractive index of the insulating
layer.
109. The photoelectric conversion apparatus according to claim 108,
further comprising an etching stop layer arranged between the
waveguide and the surface of the photoelectric conversion unit.
110. The photoelectric conversion apparatus according to claim 109,
wherein an angle of a side surface of the waveguide is set to
39.8.degree. or less with respect to a direction normal to the
surface of the photoelectric conversion unit.
111. The photoelectric conversion apparatus according to claim 107,
wherein the waveguide comprises an incident portion which the light
enters and an output portion from which the light is output, an
opening formed by the light-shielding portion, and a width of the
opening is larger than a width of the output portion and smaller
than a width of the incident portion.
112. The photoelectric conversion apparatus according to claim 107,
wherein: the photoelectric conversion unit includes a first
semiconductor region of a first conductivity type and a second
semiconductor region of a second conductivity type, the second
semiconductor region is provided in contact with a surface of a
semiconductor substrate and forms at least a part of the surface of
the photoelectric conversion unit, and the first semiconductor
region is arranged below the second semiconductor region and
configured to accumulate the signal charge.
113. The photoelectric conversion apparatus according to claim 107,
wherein each of the plurality of pixels includes a second
transistor configured to transfer the signal charge from the charge
accumulation unit to the floating diffusion portion.
114. The photoelectric conversion apparatus according to claim 107,
wherein, in a planar view, the photoelectric conversion unit and
the charge accumulation unit are arranged in a first direction, and
in the planar view, the photoelectric conversion unit and floating
diffusion portion are arranged in a second direction which is
different from the first direction.
115. A photoelectric conversion apparatus, comprising: a plurality
of pixels, each pixel including a photoelectric conversion unit
configured to generate a signal charge by photoelectric conversion
of incident light, a charge accumulation unit configured to
accumulate the signal charge transferred from the photoelectric
conversion unit, a transistor configured to transfer the signal
charge from the photoelectric conversion unit to the charge
accumulation unit, the transistor including a gate electrode, and a
floating diffusion portion configured to receive the signal charge
transferred from the charge accumulation unit; a waveguide
configured to guide the incident light into the photoelectric
conversion unit; and a light-shielding portion covering at least a
part of the charge accumulation unit, at least a part of the gate
electrode of the transistor and at least a part of the
photoelectric conversion unit, wherein: the light-shielding portion
is arranged with an interval of a first distance from a surface of
the photoelectric conversion unit, a second distance between the
waveguide and the surface of the photoelectric conversion unit is
longer than the first distance, the waveguide comprises an incident
portion which the light enters and an output portion from which the
light is output, and at least a part of an end of the
light-shielding portion is located between an outer edge of the
incident portion and an outer edge of the output portion, when
viewed from an optical axis direction of the waveguide.
116. The photoelectric conversion apparatus according to claim 115,
wherein the second distance is shorter than a sum of the first
distance and a thickness of a part of the light-shielding portion
covering the part of the photoelectric conversion unit.
117. The photoelectric conversion apparatus according to claim 115,
wherein the second distance is longer than a sum of the first
distance and a thickness of a part of the light-shielding portion
covering the part of the photoelectric conversion unit.
118. The photoelectric conversion apparatus according to claim 115,
further comprising: a plurality of wiring layers provided above the
light-shielding portion; and an insulating layer provided between
the plurality of wiring layers, wherein the waveguide has a
refractive index higher than a refractive index of the insulating
layer.
119. The photoelectric conversion apparatus according to claim 118,
further comprising an etching stop layer arranged between the
waveguide and the surface of the photoelectric conversion unit.
120. The photoelectric conversion apparatus according to claim 119,
wherein an angle of a side surface of the waveguide is set to
39.8.degree. or less with respect to a direction normal to the
surface of the photoelectric conversion unit.
121. The photoelectric conversion apparatus according to claim 115,
wherein: the waveguide further comprises an opening formed by the
light-shielding portion, and a width of the opening is larger than
a width of the output portion and smaller than a width of the
incident portion.
122. The photoelectric conversion apparatus according to claim 115,
wherein: the photoelectric conversion unit includes a first
semiconductor region of a first conductivity type and a second
semiconductor region of a second conductivity type, the second
semiconductor region is provided in contact with a surface of a
semiconductor substrate and forms at least a part of the surface of
the photoelectric conversion unit, and the first semiconductor
region is arranged below the second semiconductor region and
configured to accumulate the signal charge.
123. The photoelectric conversion apparatus according to claim 115,
wherein each of the plurality of pixels includes a second
transistor configured to transfer the signal charge from the charge
accumulation unit to the floating diffusion portion.
124. The photoelectric conversion apparatus according to claim 115,
wherein, in a planar view, the photoelectric conversion unit and
the charge accumulation unit are arranged in a first direction, and
in the planar view, the photoelectric conversion unit and floating
diffusion portion are arranged in a second direction which is
different from the first direction.
Description
BACKGROUND OF THE INVENTION
Field of the Invention
[0001] The present invention relates to a solid-state imaging
apparatus and an imaging system including the same.
Description of the Related Art
[0002] In Japanese Patent Application Laid-Open No. 2011-238949,
there is a disclosure of a solid-state imaging apparatus having
arranged pixels, in which the solid-state imaging apparatus
includes a photoelectric conversion unit, an optical waveguide, and
a charge accumulation unit to which charge is transferred from the
photoelectric conversion unit. The optical waveguide is formed so
as to converge light into the photoelectric conversion unit.
Regions other than the photoelectric conversion unit are covered
with a light-shielding film. Further, in Japanese Patent
Application Laid-Open No. 2011-238949, there is a disclosure that
the transfer of charge from the photoelectric conversion unit to
the charge accumulation unit are started and ended simultaneously
with respect to all the pixels, and thus an in-plane synchronous
electronic shutter is realized.
[0003] When light enters the charge accumulation unit, charge is
generated in the charge accumulation unit, which may cause noise.
In Japanese Patent Application Laid-Open No. 2011-238949, there is
no specific disclosure of the positional relationship between the
optical waveguide and a light-shielding portion. Depending on the
positional relationship between the optical waveguide and the
light-shielding portion, the incident light may enter the charge
accumulation unit to cause noise.
SUMMARY OF THE INVENTION
[0004] According to one embodiment of the present invention, there
is provided a solid-state imaging apparatus, including a plurality
of pixels each including: a photoelectric conversion unit
configured to generate a signal charge by photoelectric conversion
of incident light; a charge accumulation unit configured to
accumulate the signal charge transferred from the photoelectric
conversion unit; a transistor configured to transfer the signal
charge from the photoelectric conversion unit to the charge
accumulation unit, the transistor including a control electrode; a
floating diffusion portion configured to receive the signal charge
transferred from the charge accumulation unit; a waveguide
configured to guide the incident light into the photoelectric
conversion unit; and a light-shielding portion covering at least
the charge accumulation unit and having an opening that allows the
light output from the waveguide to pass therethrough. The waveguide
includes an incident portion which the light enters and an output
portion from which the light is output, the light-shielding portion
includes a first portion that covers the control electrode of the
transistor and a second portion that covers a part of the
photoelectric conversion unit, the output portion and the
photoelectric conversion unit are arranged with an interval
therebetween, the interval between the output portion and the
photoelectric conversion unit is larger than an interval between a
lower end of the second portion of the light-shielding portion and
the photoelectric conversion unit, and the interval between the
output portion and the photoelectric conversion unit is smaller
than an interval between an upper end of the second portion of the
light-shielding portion and the photoelectric conversion unit.
[0005] Further features of the present invention will become
apparent from the following description of exemplary embodiments
with reference to the attached drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0006] FIG. 1 is a diagram illustrating a circuit configuration of
a pixel according to a first embodiment of the present
invention.
[0007] FIG. 2A is a plan view of the pixel according to the first
embodiment.
[0008] FIG. 2B is a sectional view of the pixel according to the
first embodiment.
[0009] FIG. 3 is a view illustrating the positional relationship
between a light-shielding film and a waveguide according to the
first embodiment.
[0010] FIG. 4A is a view illustrating a modified example of the
positional relationship between the light-shielding film and the
waveguide according to the first embodiment.
[0011] FIG. 4B is a view illustrating another modified example of
the positional relationship between the light-shielding film and
the waveguide according to the first embodiment.
[0012] FIG. 5 is a view illustrating the positional relationship
between a light-shielding film and a waveguide according to a
second embodiment of the present invention.
[0013] FIG. 6 is a view illustrating the positional relationship
between a light-shielding film and a waveguide according to a third
embodiment of the present invention.
[0014] FIG. 7A is a plan view of a pixel according to a fourth
embodiment of the present invention.
[0015] FIG. 7B is a sectional view of the pixel according to the
fourth embodiment.
[0016] FIG. 8 is a plan view of a pixel according to a fifth
embodiment of the present invention.
[0017] FIG. 9 is a sectional view of the pixel according to the
fifth embodiment.
[0018] FIG. 10 is a block diagram of an imaging system according to
a sixth embodiment of the present invention.
DESCRIPTION OF THE EMBODIMENTS
[0019] Preferred embodiments of the present invention will now be
described in detail in accordance with the accompanying drawings.
Like components are denoted by like reference symbols throughout
the drawings, and descriptions of overlapping components are
sometimes omitted. Further, the embodiments below describe one
aspect of the present invention in an exemplary manner, and hence
the present invention is not limited to the embodiments below.
First Embodiment
[0020] FIG. 1 is a diagram illustrating a circuit configuration of
a pixel according to a first embodiment of the present invention.
Each of pixels serves as an element configured to convert incident
light into an electric signal and output the electric signal. The
pixels are arranged in matrix so as to form a pixel array serving
as a light-receiving unit of a solid-state imaging apparatus. The
pixel is formed on a semiconductor substrate made of silicon (Si)
or the like.
[0021] The pixel includes a photoelectric conversion unit 1, a
charge accumulation unit 2, a floating diffusion portion (FD
portion) 3, a vertical output line 8, and an overflow drain portion
(OFD portion) 15. The pixel further includes a first transfer
transistor 4, a second transfer transistor 5, a select transistor
7, a reset transistor 9, a source follower transistor 10, and an
OFD transistor 16, so as to switch connection and non-connection of
each of the above-mentioned components or to amplify a signal. Each
of the transistors is formed of a MOSFET or the like and includes a
gate electrode formed as a control electrode between a drain and a
source.
[0022] The photoelectric conversion unit 1 serves as an element
configured to generate signal charge in accordance with the amount
of the incident light. The charge accumulation unit 2 is connected
to the photoelectric conversion unit 1 through the first transfer
transistor 4. The charge accumulation unit 2 serves as a grounded
capacitor in terms of a circuit and temporarily accumulates charge
transferred from the photoelectric conversion unit 1.
[0023] The FD portion 3 converts the charge transferred from the
charge accumulation unit 2 into a voltage signal. The FD portion 3
is connected to the charge accumulation unit 2 through the second
transfer transistor 5. Further, the FD portion 3 is also connected
to a source terminal of the reset transistor 9 and a gate terminal
of the source follower transistor 10. A power source voltage is
supplied to a drain terminal of the reset transistor 9. When the
reset transistor 9 is turned on, the voltage at the FD portion 3 is
reset to the power source voltage. In this case, a reset signal
voltage is output to a source terminal of the source follower
transistor 10.
[0024] When the transfer transistor 5 is turned on, and the charge
is transferred from the charge accumulation unit 2 to the FD
portion 3, a pixel signal voltage corresponding to the amount of
the transferred charge is output to the source terminal of the
source follower transistor 10.
[0025] The source terminal of the source follower transistor 10 is
connected to a drain terminal of the select transistor 7. A source
terminal of the select transistor 7 is connected to the vertical
output line 8. When the select transistor 7 is turned on, a reset
signal or a pixel signal is output to the vertical output line 8.
Thus, a signal is read from the pixel.
[0026] The photoelectric conversion unit 1 is further connected to
the OFD portion 15 through the OFD transistor 16. When the OFD
transistor 16 is turned on, the charge accumulated in the
photoelectric conversion unit 1 is discharged to the OFD portion
15. The charge is discharged to the OFD portion 15 simultaneously
with respect to all the pixels, and thereafter the accumulated
charge is transferred to the charge accumulation unit 2. Thus, an
electronic shutter configured to set a predetermined exposure time
simultaneously with respect to all the pixels is realized. With
this, exposure timing lag, which is caused by reading charge from
each pixel successively, is suppressed, with the result that an
image distortion is reduced.
[0027] FIG. 2A is a plan view of the pixel according to the first
embodiment of the present invention, and FIG. 2B is a sectional
view taken along the line X-X' of FIG. 2A. Components corresponding
to those of the circuit of FIG. 1 are denoted by the same reference
symbols as those of FIG. 1, and the descriptions of the
configurations and functions that are described above may be
omitted.
[0028] The pixel further includes, as an optical system arranged
immediately above the photoelectric conversion unit 1, a color
filter 100, a microlens 101, an in-layer lens 102, and a waveguide
31. A buried photodiode is used as the photoelectric conversion
unit 1. Light that enters from above the photoelectric conversion
unit 1 passes through the microlens 101, the color filter 100, the
in-layer lens 102, and the waveguide 31 in the stated order, and
enters the photoelectric conversion unit 1 so as to be converted
into an electron. Note that, although regions between the
respective components including the in-layer lens 102, the
waveguide 31, interconnects 41, 42, 43, the photoelectric
conversion unit 1, and the like are illustrated as gaps in FIG. 2B,
an interlayer insulating layer (not shown) is formed in each
gap.
[0029] The microlens 101 and the in-layer lens 102 serve to
increase the sensitivity by converging the incident light into the
photoelectric conversion unit 1. The color filter 100 is formed of
a thin film that selectively transmits light having a specific
wavelength and is formed so as to obtain an image signal containing
color information.
[0030] The waveguide 31 includes an upper opening (incident
portion) facing the in-layer lens 102 side, which light enters, and
a lower opening (output portion) facing the photoelectric
conversion unit 1, from which the light is output. As illustrated
in FIG. 2A, an end portion 31b of the upper opening and an end
portion 31a of the lower opening have a circular shape. The
waveguide 31 has a trapezoidal shape having a width of the upper
opening wider than a width of the lower opening in the cross
section taken along the line X-X' illustrated in FIG. 2B. Note
that, although an upper surface of the waveguide 31 is illustrated
as a circular shape, the upper surface may have a square shape, a
rectangular shape, an oval shape, a polygonal shape, or the
like.
[0031] The waveguide 31 serves to guide or converge the incident
light into the photoelectric conversion unit 1. The amount of light
entering the photoelectric conversion unit 1 increases due to the
waveguide 31, and hence the sensitivity is increased compared to
the case where the waveguide 31 is not formed. In particular, in
the case where the area of the photoelectric conversion unit 1 is
small or the F-number is large, there may arise a problem of a
decrease in sensitivity. However, through formation of the
waveguide 31, such a problem can be relieved.
[0032] As a material for the interlayer insulating layer between
the interconnects, a silicon oxide film (SiO) having a refractive
index of about 1.5 can be used. As a material for the waveguide 31,
a silicon oxynitride film (SiON) having a refractive index of about
1.8 can be used. Light that enters an interface between the
waveguide 31 and the interlayer insulating layer diagonally at a
predetermined angle is totally reflected from the interface. Thus,
the light propagates in the waveguide 31 without leaking to the
interlayer insulating layer so as to be guided into the
photoelectric conversion unit 1.
[0033] The materials for the interlayer insulating layer and the
waveguide 31 are not limited to a combination of the silicon
nitride film and the silicon oxynitride film. It is sufficient that
the materials be combined so that the refractive index of the
waveguide 31 becomes higher than that of the interlayer insulating
layer, and any material may be selected. For example, the
interlayer insulating layer may be formed of a silicon oxide film
and the waveguide 31 may be formed of a silicon nitride film (SiN)
having a refractive index of about 2.0. Further, an organic film
material or a material obtained by mixing particles of titanium
oxide or the like in the organic film material may be used. The
interlayer insulating layer may be formed of a laminated film made
of different materials. In this case, it is sufficient that the
interlayer insulating layer be formed so that the refractive index
of the waveguide 31 becomes higher than a volume average of the
refractive index of the interlayer insulating layer on the
periphery of the waveguide 31.
[0034] The tilt angle of a side wall of the waveguide 31 can be
determined in accordance with the Snell's law. For example, in the
case where the waveguide 31 has a refractive index of 1.9 and the
interlayer insulating layer has a refractive index of 1.46, light
that enters the waveguide 31 at an incident angle of 50.2.degree.
or more with respect to the normal to the side wall of the
waveguide 31 is totally reflected. For example, when the angle of
the side wall of the waveguide 31 is set to 39.8.degree. or less
with respect to the direction normal to the substrate, the leakage
of the light that enters the waveguide 31 perpendicularly thereto
is suppressed, and the light reaches the photoelectric conversion
unit 1. As a ratio of the refractive index of the waveguide 31 with
respect to the refractive index of the interlayer insulating layer
is larger, a range of an incident angle at which the light can be
totally reflected is widened, with the result that the degree of
design freedom of the angle of the side wall of the waveguide 31 is
increased.
[0035] A reflection preventing layer may be formed in an optical
path of the incident light between the upper opening of the
waveguide 31 and the in-layer lens 102 and between the lower
opening and the photoelectric conversion unit 1, for example. With
this, the loss of the amount of light caused by the reflection is
reduced and the transmittance of the incident light is increased.
Therefore, the sensitivity can be increased.
[0036] The pixel further includes the interconnects 41, 42, 43
configured to transmit a signal and the like. The interconnects 41,
42, 43 are formed of a material such as aluminum or copper that is
less likely to transmit light, and hence the interconnects 41, 42,
43 are arranged on the periphery of the waveguide 31 while avoiding
the waveguide 31.
[0037] Next, the structures of the photoelectric conversion unit 1
and the charge accumulation unit 2 are described. The photoelectric
conversion unit 1 includes a first semiconductor region 11 of a
first conductivity type and a second semiconductor region 12 of a
second conductivity type. The second semiconductor region 12 is
formed on a surface of the substrate, and the first semiconductor
region 11 is arranged immediately below the second semiconductor
region 12. The description is made hereinafter assuming that the
first conductivity is an n-type and the second conductivity is a
p-type. However, the first conductivity may be the p-type, and the
second conductivity may be the n-type. A junction interface between
the first semiconductor region 11 and the second semiconductor
region 12 forms PN junction. Specifically, the photoelectric
conversion unit 1 has a buried structure in which the PN-junction
interface is located in the substrate so as not to be brought into
contact with the surface of the substrate. In the buried structure,
the PN-junction interface is buried in the substrate, and hence the
influence of noise on the surface of the substrate is
suppressed.
[0038] An n-type third semiconductor region 13 is further formed
immediately below the first semiconductor region 11. The
concentration of impurities of the third semiconductor region 13 is
lower than that of the first semiconductor region 11. With this,
electrons that have been subjected to photoelectric conversion in
the third semiconductor region 13 can be collected in the first
semiconductor region 11. Note that, the third semiconductor region
13 may be of the p-type.
[0039] A fourth semiconductor region 17 is formed in a lower
portion of the third semiconductor region 13, and the fourth
semiconductor region 17 extends to an area below the charge
accumulation unit 2 and the FD portion 3. The fourth semiconductor
region 17 is a p-type semiconductor region. The fourth
semiconductor region 17 serves as a potential barrier with respect
to the electrons generated in the photoelectric conversion unit 1
so as to suppress the leakage of the electrons to the
substrate.
[0040] The charge accumulation unit 2 includes an n-type fifth
semiconductor region 201 and a p-type sixth semiconductor region
202. The sixth semiconductor region 202 is formed on the surface of
the substrate, and the fifth semiconductor region 201 is arranged
immediately below the sixth semiconductor region 202. The charge
accumulation section 2 also has a buried structure in the same way
as in the photoelectric conversion unit 1 and can suppress noise on
the surface of the substrate. Note that, it is also possible to
adopt such a structure that the sixth semiconductor region 202 is
omitted, and only the fifth semiconductor region 201 is arranged so
as to form the charge accumulation unit 2. In this case, noise
caused on the surface of the substrate can be suppressed by causing
a gate electrode of the first transfer transistor 4 to extend so as
to cover the charge accumulation unit 2 and applying a negative
potential to the gate electrode so as to induce holes to the
surface of the substrate.
[0041] The pixel further includes a light-shielding film 203 as a
light-shielding portion configured to cover regions other than a
region immediately above the photoelectric conversion unit 1. The
light-shielding film 203 is arranged so as to cover at least the
charge accumulation unit 2 and the gate electrode of the first
transfer transistor 4. It is necessary that the regions other than
the region immediately above the photoelectric conversion unit 1 be
shielded from light, and the photoelectric conversion unit 1 be
irradiated with light. Therefore, the region of the light-shielding
film 203 immediately above the photoelectric conversion unit 1
serves as an opening that allows light output from the waveguide 31
to pass therethrough. Note that, the light-shielding film 203 may
partially extend to above the end portion of the photoelectric
conversion unit 1.
[0042] The light-shielding film 203 suppresses the entry of light
into the charge accumulation unit 2 and the like. This suppresses
the occurrence of noise caused by the generation of charge in the
charge accumulation unit 2 due to the incident light. The
light-shielding film 203 can be formed of a material, which is less
likely to transmit visible light, such as tungsten, tungsten
silicide, a tungsten oxide film, aluminum, or an alloy film
thereof. The light-shielding film 203 has a thickness of, for
example, about from 100 to 200 nm. The light-shielding film 203 is
formed at a time in a region in which the gate electrode is
arranged and in a region in which the gate electrode is not
arranged. Therefore, the light-shielding film 203 has unevenness
caused by the thickness of the gate electrode.
[0043] FIG. 3 is a view illustrating the positional relationship
between the light-shielding film 203 and the waveguide 31 in this
embodiment. FIG. 3 is a sectional view taken along the line X-X''
of FIG. 2A and is an enlarged view of the vicinity of the
photoelectric conversion unit 1 of FIG. 2B.
[0044] Dotted lines of FIG. 3, which are indicated by reference
symbols h2031, h2032, h2033, and h311, represent intervals
(heights) between the light-shielding film 203 and the waveguide
31, and the photoelectric conversion unit 1 that corresponds to the
surface of the substrate. For example, the dotted line indicated by
reference symbol h311 means that the position of a bottom portion
(output portion) of the waveguide 31 has the height h311. In the
description below, the expression "height of the bottom portion of
the waveguide 31 is h311" and the like may be used with reference
to the reference symbols.
[0045] It is assumed that the height of a lower end of the
light-shielding film 203 is h2031, the height of an upper end of
the light-shielding film 203 in a region in which the gate
electrode is not formed is h2032, and the height of an upper end of
the light-shielding film 203 in a region in which the
light-shielding film 203 is formed on the gate electrode is h2033.
It is preferred that the height h311 of the bottom portion of the
waveguide 31 be set to be higher than the height h2031 of the lower
end of the light-shielding film 203. In this embodiment, the height
h311 of the bottom portion of the waveguide 31 is located between
the height h2032 and the height 2033.
[0046] In the case where the height h311 of the bottom portion of
the waveguide 31 is lower than the height h2031 of the lower end of
the light-shielding film 203, light radiated from the bottom
portion of the waveguide 31 is diffracted to spread and enters not
only the photoelectric conversion unit 1 but also the charge
accumulation unit 2. When the light enters the charge accumulation
unit 2, charge is generated in a PN-junction portion of the charge
accumulation unit 2 and may cause noise. In contrast, in this
embodiment, the height h311 of the bottom portion of the waveguide
31 is higher than the height h2031 of the lower end of the
light-shielding film 203. Thus, even when the light radiated from
the bottom portion of the waveguide is diffracted to spread, the
light is blocked by the light-shielding film 203. Thus, the entry
of the light into the charge accumulation unit 2 can be alleviated
or prevented, and hence the occurrence of noise can be
suppressed.
[0047] FIGS. 4A and 4B are views illustrating modified examples of
the positional relationship between the waveguide 31 and the
light-shielding film 203. FIGS. 4A and 4B are also sectional views
taken along the line X-X'' of FIG. 2A, illustrating the vicinity of
the photoelectric conversion unit 1 of FIG. 2B in an enlarged
state. In FIGS. 4A and 4B, the position of the waveguide 31 varies
with respect to the configuration illustrated in FIG. 3.
[0048] In FIG. 4A, the height h311 of the bottom portion of the
waveguide 31 is located between the height h2031 of the lower end
of the light-shielding film 203 and the height h2032 of the upper
end of the light-shielding film 203 in the region in which the gate
electrode is not formed (in a region in which the light-shielding
film 203 extends to above a part of the photoelectric conversion
unit 1). In this case, the light that is radiated from the bottom
portion of the waveguide 31 and then diffracted is reflected from a
side surface of the light-shielding film 203. Thus, the entry of
the light into the charge accumulation unit 2 can be alleviated or
prevented in the same way as in the above-mentioned case, and hence
the occurrence of noise can be suppressed. The light reflected from
the side surface of the light-shielding film 203 can enter the
photoelectric conversion unit 1. A light component reflected from
an upper surface of the light-shielding film 203 is reduced, and
the amount of light reflected from the side surface of the
light-shielding film 203 so as to be guided into the photoelectric
conversion unit 1 increases. Thus, higher sensitivity can be
obtained.
[0049] In FIG. 4B, the height h311 of the bottom portion of the
waveguide 31 is higher than the height h2033 of the upper end of
the light-shielding film 203 in the region in which the
light-shielding film 203 is formed on the gate electrode. The
waveguide 31 is formed so as to transmit the light entering the
pixel through a layer in which the interconnects 41, 42, 43 and the
interlayer insulating layers therebetween are formed, and to
converge the light into the photoelectric conversion unit 1.
Therefore, it is sufficient that the waveguide 31 be formed so as
to pass through at least one layer in which the interconnects 41,
42, 43 of the circuit and the interlayer insulating layers are
formed. It is assumed that the heights of the interconnects 41, 42,
43 of the circuit and an upper end surface of the interlayer
insulating layer formed on the interconnect 43 are h413, h423,
h433, and h443, respectively. In this case, the above-mentioned
effect can be obtained as long as the height h311 of the bottom
portion of the waveguide 31 is lower than at least the height h433.
It is more preferred that the height h311 of the bottom portion of
the waveguide 31 be lower than the height h423 of an upper end
surface of the interconnect 42. FIG. 4B illustrates, as a more
preferred example, the case where the height h311 of the bottom
portion of the waveguide 31 is located between the height h423 of
the upper end surface of the interconnect 42 and the height h413 of
an upper end surface of the interconnect 41.
Second Embodiment
[0050] FIG. 5 is a view illustrating the positional relationship
between the light-shielding film 203 and the waveguide 31 according
to a second embodiment of the present invention. FIG. 5 is a
sectional view of a portion taken along the line X-X'' of FIG. 2A,
illustrating the vicinity of the photoelectric conversion unit 1 in
an enlarged state. In this embodiment, a reflection preventing
layer 52 is arranged between the waveguide 31 and the photoelectric
conversion unit 1 in addition to the configuration of the first
embodiment.
[0051] A gate insulating film 51 is formed between the gate
electrodes of the first transfer transistor 4 and the OFD
transistor 16, and the substrate. The gate insulating film 51 is
formed of, for example, a silicon oxide film and has a thickness of
about 10 nm. The reflection preventing layer 52 is formed on the
gate insulating film 51.
[0052] The reflection preventing layer 52 is formed of, for
example, a silicon nitride film and has a thickness of about 50 nm.
A buffer film 53 is formed between the reflection preventing layer
52 and the light-shielding film 203. The buffer film 53 is formed
of, for example, a silicon oxide film and has a thickness of about
from 20 to 100 nm. In order to obtain the effect of preventing
reflection, it is necessary to set a suitable distance between the
waveguide 31 and the reflection preventing layer 52. Assuming that
the wavelength of light is 550 nm, and the refractive index of the
waveguide 31 is 1.8, it is appropriate that the distance between
the waveguide 31 and the reflection preventing layer 52 be about
110 nm. Therefore, the distance from the substrate to the height
h311 of the bottom portion of the waveguide 31 is about 170 nm, and
the distance from the substrate to the height h2031 of the lower
end of the light-shielding film 203 is about from 80 to 160 nm.
Based on the relationship of those distances, the distance between
the height h311 of the bottom portion of the waveguide 31 and the
height h2031 of the lower end of the light-shielding film 203 is
from 10 to 90 nm. That is, it is possible to set the height h311 of
the bottom portion of the waveguide 31 to be higher than the height
h2031 of the lower end of the light-shielding film 203.
[0053] Thus, also in this embodiment, the entry of the light into
the charge accumulation section 2 can be alleviated or prevented in
the same way as in the first embodiment, and hence the occurrence
of noise can be suppressed. In addition, due to the effect of the
reflection preventing layer 52, the loss of the amount of light
caused by the reflection is reduced and the transmittance of the
incident light is increased. Therefore, the sensitivity can be
increased.
Third Embodiment
[0054] FIG. 6 is a view illustrating the positional relationship
between the light-shielding film 203 and the waveguide 31 according
to a third embodiment of the present invention. FIG. 6 is a
sectional view of a portion taken along the line X-X'' of FIG. 2A,
illustrating the vicinity of the photoelectric conversion unit 1 in
an enlarged state.
[0055] The waveguide 31 of FIG. 6 forms a T-shape in which an upper
opening has a region extending outwardly, in addition to the
above-mentioned trapezoidal shape. Further, an etching stop layer
(ESL) 32 to be used for forming the waveguide 31 is formed in the
bottom portion of the waveguide 31 of FIG. 6. The ESL 32 is a layer
formed so as to complete an etching step stably at a predetermined
depth. The ESL 32 has a thickness of, for example, 50 nm. In the
case where the ESL 32 has the same refractive index as that of the
waveguide 31, the ESL 32 has the effect of converging or guiding
the incident light in the same way as in the waveguide 31. The
shape of this embodiment may be adopted for manufacturing
reasons.
[0056] It is assumed that the width of an opening in the bottom
portion of the waveguide 31 (waveguide lower opening width) is
w31a, the width of an opening in a top portion of the waveguide 31
(waveguide upper opening width) is w31b, and the width of an
opening of the light-shielding film 203 (light-shielding opening
width) is w203a. In the same way as in the first embodiment, the
height h311 of the bottom portion of the waveguide 31 is higher
than the height h2031 of the lower end of the light-shielding film
203. The effect obtained from this configuration is the same as
described above in the first embodiment. In addition, in this
embodiment, the light-shielding opening width w203a of the
light-shielding film 203 is larger than the waveguide lower opening
width w31a and smaller than the waveguide upper opening width w31b.
In this case, an end portion 203a of the light-shielding film 203
is located between the end portion 31a of the bottom portion of the
waveguide 31 and an end portion 31b of the top portion of the
waveguide 31, when viewed from an optical axis direction of the
waveguide 31. The effect obtained from this configuration is
hereinafter described.
[0057] In the case where the light-shielding opening width w203a is
smaller than the waveguide lower opening width w31a, a part of the
light output from the bottom portion of the waveguide 31 is
reflected from the light-shielding film 203, and the light flowing
into the photoelectric conversion unit 1 is reduced, with the
result that the sensitivity may be decreased. In contrast, in this
embodiment, the light-shielding opening width w203a is set to be
larger than the waveguide lower opening width w31a. Therefore, the
light output from the bottom portion of the waveguide 31 is less
liable to be reflected from the light-shielding film 203, and hence
the sensitivity is increased.
[0058] On the other hand, in the case where the light-shielding
opening width w203a is larger than the waveguide upper opening
width w31b, the incident light cannot be taken in the waveguide 31
sufficiently, with the result that the sensitivity may be
decreased. Further, when the light-shielding opening width w203a is
larger than the waveguide upper opening width w31b, the diffracted
light may enter the charge accumulation unit 2 to cause noise. In
contrast, in this embodiment, the light-shielding opening width
w203a is set to be smaller than the waveguide upper opening width
w31b. Therefore, the sensitivity is increased, and the entry of the
light into the charge accumulation unit 2 is prevented, with the
result that the occurrence of noise is suppressed.
[0059] Note that, it is sufficient that the interconnects 41, 42,
43 be positioned on an outer side with respect to the end portion
31a of the bottom portion of the waveguide 31, and the
interconnects 41, 42, 43 may be positioned on an inner side with
respect to the end portion 31b of the top portion of the waveguide
31. The same also applies to the other embodiments.
Fourth Embodiment
[0060] FIG. 7A is a plan view of a pixel according to a fourth
embodiment of the present invention. FIG. 7B is a sectional view
taken along the line Y-Y' of FIG. 7A. The corresponding components
are denoted by the same reference symbols.
[0061] This embodiment is different from each of the
above-mentioned embodiments in that, as illustrated in FIGS. 7A and
7B, the opening of the light-shielding film 203 partially overlaps
with the source follower transistor 10, the select transistor 7,
and the reset transistor 9. Therefore, a difference in level is
formed during formation of the ESL 32 due to the difference in
level of the gate electrodes of the source follower transistor 10
and the like, with the result that the bottom portion of the
waveguide 31 has a shape having a difference in level.
[0062] For the above-mentioned reason, the light-shielding of the
charge accumulation unit 2 is required in order to prevent noise.
In contrast, the light-shielding of the source follower transistor
10, the select transistor 7, and the reset transistor 9 is not
necessarily required.
[0063] Also in this embodiment, it is sufficient that the end
portion 203a of the light-shielding film 203 is located between the
end portion 31a of the bottom portion of the waveguide 31 and the
end portion 31b of the top portion of the waveguide 31 in a
direction from the photoelectric conversion unit 1 to the charge
accumulation unit 2, in the same way as in the third embodiment.
Specifically, it is sufficient that the gate electrodes of the
source follower transistor 10 and the like overlap with the opening
of the light-shielding film 203. With this arrangement, the usage
efficiency of the element area can be enhanced while the
light-shielding of the charge accumulation unit 2 is maintained.
Thus, both the reduction in size of the pixel and the suppression
of noise can be satisfied by using the shape and element layout of
the waveguide 31 of the fourth embodiment.
Fifth Embodiment
[0064] A fifth embodiment of the present invention is described
with reference to FIGS. 8 and 9. In FIGS. 8 and 9, the components
having the same functions as those of FIGS. 2A and 2B are denoted
by the same reference symbols as those of FIGS. 2A and 2B. FIG. 8
is a plan view of a pixel according to the fifth embodiment, and
FIG. 9 is a sectional view of the pixel according to the fifth
embodiment taken along the line Z-Z' of FIG. 8. The pixel according
to the fifth embodiment is used as a pixel to be arranged on the
periphery of a pixel array of a solid-state imaging apparatus.
There may be a case where light radiated from a subject diagonally
enters the pixel on the periphery of the pixel array. The light
that diagonally enters the pixel is partially blocked by the
light-shielding film 203, and the amount of light entering the
photoelectric conversion unit 1 may be reduced. As a result, the
amount of light becomes insufficient on the periphery of the pixel
array. When an image is photographed with a photographing system
such as a camera using such a pixel array, the periphery of the
image may become darker due to the shortage of the amount of
light.
[0065] In order to enhance the waveguide performance or the
converging performance of the incident light also with respect to
the diagonal incident light, in this embodiment, a microlens 501, a
color filter 500, an in-layer lens 502, and a waveguide 531 are
arranged so as to be shifted in a direction of a center of an
imaging area of a sensor chip from a normal P passing through the
center of the pixel. The waveguide 531 has an opening 531a in a
bottom portion as illustrated in FIGS. 8 and 9. With this, compared
to the case where the centers of the microlens 101, the in-layer
lens 102, the waveguide 31, and the like are matched with the
normal P as illustrated in FIG. 2B, the loss of light caused when
the diagonal incident light is blocked by the light-shielding film
203 is suppressed. Thus, the shortage of the amount of light on the
periphery of the pixel array can be relieved by using the pixel
according to this embodiment on the periphery of the pixel array.
Note that, the "center of the pixel" corresponding to the position
of the normal P may be defined by the center of gravity of the
opening of the light-shielding film 203 or by the center of gravity
of the semiconductor regions of the first and second
conductivities, which form the photoelectric conversion unit 1.
[0066] Note that, the shift amount of the optical members such as
the microlens 501, the in-layer lens 502, and the waveguide 531 may
be appropriately adjusted based on the sensitivity, the optical
characteristics, and the light-shielding performance of the charge
accumulation unit 2. For example, each apex of the microlens 501,
the in-layer lens 502, and the waveguide 531 may be set uniformly
with respect to a row or a column of each pixel. The shift amount
may be increased in accordance with the distance from the center of
the pixel array. In two pixels illustrated in FIG. 9, the pixel on
the left side is closer to the center of the imaging area, compared
to the pixel on the right side. In this case, as illustrated in
FIG. 9, it is preferred that a shift amount S2 of the waveguide 531
of the pixel on the right side far from the center of the imaging
area (pixel array) be set to be larger than a shift amount S1 of
the waveguide 531 of the pixel on the left side close to the center
of the imaging area.
[0067] Optical members to be shifted from the center of the pixel
array can be selected appropriately. Only one of the microlens 501,
the in-layer lens 502, the waveguide 531, and the color filter 500
may be shifted or two or more of those may be shifted. The shift
amount may be varied in the respective optical members, and it is
preferred that the shift amount of the optical member positioned
farther from the photoelectric conversion unit 1 be set to be
larger.
[0068] Further, as a modified example of this embodiment, the
optical members may be shifted in a direction in which the
photoelectric conversion unit 1 and the charge accumulation unit 2
are arrayed (vertical direction of FIG. 8). The entry of the light
into the charge accumulation unit 2 can be further alleviated or
prevented, and hence the occurrence of noise can be further
suppressed.
Sixth Embodiment
[0069] FIG. 10 is a diagram illustrating a configuration of an
imaging system including a solid-state imaging apparatus according
to a sixth embodiment of the present invention. An imaging system
800 includes an optical unit 810, a solid-state imaging apparatus
820, an image signal processing unit 830, a memory/communication
unit 840, a timing control unit 850, a system control unit 860, and
a reproduction/display unit 870. As the solid-state imaging
apparatus 820, the solid-state imaging apparatus described above as
the first to fifth embodiments is used.
[0070] The optical unit 810, which is an optical system such as a
lens, forms an image of light from a subject on the pixel array of
the solid-state imaging apparatus 820 in which a plurality of
pixels are two-dimensionally arranged, to thereby form an image of
the subject. The solid-state imaging apparatus 820 outputs a signal
corresponding to the light whose image is formed on the pixel at
the timing based on a signal transmitted from the timing control
unit 850. The signal output from the solid-state imaging apparatus
820 is input to the image signal processing unit 830. The image
signal processing unit 830 processes the input signal in accordance
with a method determined by a program or the like. The signal
obtained through the processing in the image signal processing unit
830 is transmitted to the memory/communication unit 840 as image
data. The memory/communication unit 840 transmits a signal for
forming an image to the reproduction/display unit 870, to thereby
cause the reproduction/display unit 870 to reproduce or display a
moving image or a still image. Further, in response to the signal
from the image signal processing unit 830, the memory/communication
unit 840 communicates to/from the system control unit 860 and
records the signal for forming an image in a recording medium (not
shown).
[0071] The system control unit 860 controls the operation of the
imaging system 800 in a comprehensive manner, and controls the
drive of the optical unit 810, the timing control unit 850, the
memory/communication unit 840, and the reproduction/display unit
870. The system control unit 860 includes a memory device (not
shown), such as a recording medium. A program and the like
necessary for controlling the operation of the imaging system 800
are recorded in the memory device. The system control unit 860
supplies the imaging system 800 with a signal for switching a drive
mode in accordance with a user's operation, for example.
Specifically, the system control unit 860 supplies the imaging
system 800 with a signal for performing switching, such as the
change of a row to be read or a row to be reset, the change of the
angle of view accompanying electronic zooming, and the shift of the
angle of view accompanying electronic image stabilization. The
timing control unit 850 controls drive timings of the solid-state
imaging apparatus 820 and the image signal processing unit 830
based on the control by the system control unit 860.
[0072] Through mounting of the solid-state imaging apparatus 820
according to this embodiment, the imaging system 800 capable of
suppressing the occurrence of noise can be implemented.
[0073] While the present invention has been described with
reference to exemplary embodiments, it is to be understood that the
invention is not limited to the disclosed exemplary embodiments.
The scope of the following claims is to be accorded the broadest
interpretation so as to encompass all such modifications and
equivalent structures and functions.
[0074] This application claims the benefit of Japanese Patent
Application No. 2014-051422, filed Mar. 14, 2014, which is hereby
incorporated by reference herein in its entirety.
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