U.S. patent application number 15/572168 was filed with the patent office on 2019-02-14 for substrate and evaporation device used for manufacturing organic light emitting display panel.
The applicant listed for this patent is WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.. Invention is credited to Wei YU.
Application Number | 20190051827 15/572168 |
Document ID | / |
Family ID | 60690633 |
Filed Date | 2019-02-14 |
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United States Patent
Application |
20190051827 |
Kind Code |
A1 |
YU; Wei |
February 14, 2019 |
SUBSTRATE AND EVAPORATION DEVICE USED FOR MANUFACTURING ORGANIC
LIGHT EMITTING DISPLAY PANEL
Abstract
The present disclosure provides a substrate and an evaporation
device used for manufacturing an organic light emitting display
panel. The substrate includes a base plate; a plurality of layer
formation areas on the base plate, wherein the layer formation
areas are where an organic light emitting layer is formed; a
plurality of first spacers disposed on the base plate at a
clearance region between the layer formation areas; and a plurality
of second spacers disposed on the base plate at outer peripheries
of the layer formation areas, wherein each of the second spacers
includes a photoresist material and a plurality of magnetic polymer
microspheres.
Inventors: |
YU; Wei; (Wuhan, Hubei,
CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY
CO., LTD. |
Wuhan, Hubei |
|
CN |
|
|
Family ID: |
60690633 |
Appl. No.: |
15/572168 |
Filed: |
September 6, 2017 |
PCT Filed: |
September 6, 2017 |
PCT NO: |
PCT/CN2017/100705 |
371 Date: |
November 7, 2017 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 51/56 20130101;
H01L 2251/5369 20130101; H01L 51/5237 20130101; H01L 51/5012
20130101; H01L 51/001 20130101; Y02E 10/549 20130101; C23C 14/042
20130101; H01L 51/0011 20130101; H01L 51/0096 20130101; C23C 14/24
20130101 |
International
Class: |
H01L 51/00 20060101
H01L051/00; H01L 51/52 20060101 H01L051/52; H01L 51/56 20060101
H01L051/56 |
Foreign Application Data
Date |
Code |
Application Number |
Aug 9, 2017 |
CN |
201710674503.0 |
Claims
1. A substrate used for manufacturing an organic light emitting
display panel, comprising: a base plate; a plurality of layer
formation areas spaced from one another on the base plate, wherein
an organic light emitting layer is formed on the layer formation
areas; a plurality of first spacers disposed on the base plate at a
clearance region between the layer formation areas; and a plurality
of second spacers disposed on the base plate at outer peripheries
of the layer formation areas, wherein each of the second spacers
includes a photoresist material and a plurality of magnetic polymer
microspheres, the magnetic polymer microspheres have a particulate
diameter ranging from 30 nm to 100 nm, and the first spacers and
the second spacers are of a same material.
2. The substrate used for manufacturing an organic light emitting
display panel according to claim 1, wherein the magnetic polymer
microspheres are magnetic polyacrolein-based microspheres.
3. The substrate used for manufacturing an organic light emitting
display panel according to claim 1, wherein the first spacers and
the second spacers are formed by a same process.
4. The substrate used for manufacturing an organic light emitting
display panel according to claim 1, wherein a height of the second
spacers and a height of the first spacers are identical.
5. The substrate used for manufacturing an organic light emitting
display panel according to claim 1, wherein a total number of the
second spacers and a total number of the layer formation areas are
identical.
6. A substrate used for manufacturing an organic light emitting
display panel, comprising: a base plate; a plurality of layer
formation areas spaced from one another on the base plate, wherein
the layer formation areas are where an organic light emitting layer
is formed; a plurality of first spacers disposed on the base plate
at a clearance region between the layer formation areas; and a
plurality of second spacers disposed on the base plate at outer
peripheries of the layer formation areas, wherein each of the
second spacers includes a photoresist material and a plurality of
magnetic polymer microsphere.
7. The substrate used for manufacturing an organic light emitting
display panel according to claim 6, wherein the magnetic polymer
microspheres are magnetic polyacrolein-based microspheres.
8. The substrate used for manufacturing an organic light emitting
display panel according to claim 6, wherein the first spacers and
the second spacers are of the same material.
9. The substrate used for manufacturing an organic light emitting
display panel according to claim 6, wherein the first spacers and
the second spacers are formed by a same process.
10. The substrate used for manufacturing an organic light emitting
display panel according to claim 6, wherein a height of the second
spacers and a height of the first spacers are identical.
11. The substrate used for manufacturing an organic light emitting
display panel according to claim 6, wherein the magnetic polymer
microspheres have a particulate diameter ranging from 30 nm to 100
nm.
12. The substrate used for manufacturing an organic light emitting
display panel according to claim 6, wherein a total number of the
second spacers and a total number of the layer formation areas are
identical.
13. An evaporation device used for performing an evaporation
treatment for a substrate disposed above a mask plate, the
evaporation device comprising: an evaporation source for providing
an organic light emitting material; the mask plate having a
plurality of perforations configured for the evaporation treatment;
and the substrate, the substrate comprising: a base plate; a
plurality of layer formation areas spaced from one another on the
base plate, wherein the layer formation areas are where an organic
light emitting layer is formed; a plurality of first spacers
disposed between the base plate and the mask plate at a clearance
region between the layer formation areas; and a plurality of second
spacers disposed between the base plate and the mask plate at outer
peripheries of the layer formation areas, wherein each of the
second spacers includes a photoresist material and a plurality of
magnetic polymer microspheres.
14. The evaporation device according to claim 13, wherein the first
spacers and the second spacers are of the same material.
15. The evaporation device according to claim 13, wherein a height
of the second spacers and a height of the first spacers are
identical.
16. The evaporation device according to claim 13, wherein the
magnetic polymer microspheres are magnetic polyacrolein-based
microspheres.
17. The evaporation device according to claim 13, wherein the first
spacers and the second spacers are formed by a same process.
18. The evaporation device according to claim 13, wherein the
magnetic polymer microspheres have a particulate diameter ranging
from 30 nm to 100 nm.
19. The evaporation device according to claim 13, wherein a total
number of the second spacers and a total number of the layer
formation areas are identical.
Description
FIELD OF THE DISCLOSURE
[0001] The present disclosure relates to the field of display
panels, and more particularly to a substrate and an evaporation
device used for manufacturing an organic light emitting display
panel.
BACKGROUND
[0002] Organic light emitting diode (OLED) displays possess many
outstanding properties, including self-illumination, short response
time, large viewing angles, and high color saturation, and thus are
used widely in a variety of applications. OLED displays include an
organic light emitting layer on the substrate, where the organic
light emitting layer is sandwiched between a cathode electrode and
an anode electrode. A voltage is applied to the cathode electrode
and the anode electrode to cause the organic light emitting layer
to illuminate.
[0003] To form the organic light emitting layer of OLED displays,
an evaporation device is utilized to consecutively deposit a
plurality of films on the substrate. OLED evaporation techniques
heat an evaporation source that has been filled with an OLED
material under a vacuum, so as to sublimate or gasify the material
through a mask plate and make the material deposit on the
substrate. The dashed lines in FIG. 1 show a flow direction of the
OLED material. As shown in FIG. 1, for carrying out OLED
evaporation, the evaporation source is located at lowest level, and
the substrate 11 is disposed above the mask plate 21. The mask
plate 21 includes a plurality of perforations 211 configured for
the evaporation treatment. As shown in FIG. 2, a plurality of
spacers 13 are disposed on the substrate 11 at outer peripheries of
the layer formation areas 12. Generally, smaller gaps between the
substrate 11 and the mask plate 21 is, means less influence caused
by the shadowing effect. However, the spacers 13 have a certain
height and the gap between the substrate 11 and the mask plate 21
cannot be reduced further. For substrate of high resolution, this
makes the evaporation material diffuse to other color regions to
some extent, causing color mixing.
[0004] Therefore, to solve the problems encountered by the prior
art, there is a need to provide a substrate and an evaporation
device used for manufacturing an organic light emitting display
panel.
SUMMARY OF THE DISCLOSURE
[0005] One of the objectives of the present disclosure is to
provide a substrate and an evaporation device used for
manufacturing an organic light emitting display panel, in order to
prevent the evaporation material from diffusing to other color
regions and address the color mixing issue.
[0006] To solve the above mentioned problems, the present
disclosure provides a substrate used for manufacturing an organic
light emitting display panel, comprising:
[0007] a base plate;
[0008] a plurality of layer formation areas spaced from one another
on the base plate, wherein the layer formation areas are where an
organic light emitting layer is formed;
[0009] a plurality of first spacers disposed on the base plate at a
clearance region between the layer formation areas; and
[0010] a plurality of second spacers disposed on the base plate at
outer peripheries of the layer formation areas, wherein each of the
second spacers includes a photoresist material and a plurality of
magnetic polymer microspheres, the magnetic polymer microspheres
have a particulate diameter ranging from 30 nm to 100 nm, and the
first spacers and the second spacers are of the same material.
[0011] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, the magnetic polymer microspheres are magnetic
polyacrolein-based microspheres.
[0012] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, the first spacers and the second spacers are formed by
a same process.
[0013] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, a height of the second spacers and a height of the
first spacers are identical.
[0014] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, a total number of the second spacers and a total number
of the layer formation areas are identical.
[0015] The present disclosure further provides a substrate used for
manufacturing an organic light emitting display panel,
comprising:
[0016] a base plate;
[0017] a plurality of layer formation areas spaced from one another
on the base plate, wherein the layer formation areas are where an
organic light emitting layer is formed;
[0018] a plurality of first spacers disposed on the base plate at a
clearance region between the layer formation areas; and
[0019] a plurality of second spacers disposed on the base plate at
outer peripheries of the layer formation areas, wherein each of the
second spacers includes a photoresist material and a plurality of
magnetic polymer microsphere.
[0020] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, the magnetic polymer microspheres are magnetic
polyacrolein-based microspheres.
[0021] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, the first spacers and the second spacers are of the
same material.
[0022] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, the first spacers and the second spacers are formed by
a same process.
[0023] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, a height of the second spacers and a height of the
first spacers are identical.
[0024] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, the magnetic polymer microspheres have a particulate
diameter ranging from 30 nm to 100 nm.
[0025] In accordance with the substrate used for manufacturing an
organic light emitting display panel according to the present
disclosure, a total number of the second spacers and a total number
of the layer formation areas are identical.
[0026] Additionally, the present disclosure provides an evaporation
device used for performing an evaporation treatment for a substrate
disposed above a mask plate, the evaporation device comprising:
[0027] an evaporation source for providing an organic light
emitting material;
[0028] the mask plate having a plurality of perforations configured
for the evaporation treatment; and
[0029] the substrate, the substrate comprising: [0030] a base
plate; [0031] a plurality of layer formation areas spaced from one
another on the base plate, wherein the layer formation areas are
where an organic light emitting layer is formed; [0032] a plurality
of first spacers disposed between the base plate and the mask plate
at a clearance region between the layer formation areas; and [0033]
a plurality of second spacers disposed between the base plate and
the mask plate at outer peripheries of the layer formation areas,
wherein each of the second spacers includes a photoresist material
and a plurality of magnetic polymer microspheres.
[0034] In accordance with the evaporation device of the present
disclosure, the first spacers and the second spacers are of the
same material.
[0035] In accordance with the evaporation device of the present
disclosure, a height of the second spacers and a height of the
first spacers are identical.
[0036] In accordance with the evaporation device of the present
disclosure, the magnetic polymer microspheres are magnetic
polyacrolein-based microspheres.
[0037] In accordance with the evaporation device of the present
disclosure, the first spacers and the second spacers are formed by
a same process.
[0038] In accordance with the evaporation device of the present
disclosure, the magnetic polymer microspheres have a particulate
diameter ranging from 30 nm to 100 nm.
[0039] In accordance with the evaporation device of the present
disclosure, a total number of the second spacers and a total number
of the layer formation areas are identical.
[0040] According to the present disclosure, another spacers are
disposed at outer peripheries of the layer formation areas on the
substrate of the evaporation device used for manufacturing an
organic light emitting display panel, and the spacers include
magnetic polymer microspheres, therefore the spacers are bonded to
the mask plate tightly and the evaporation material is blocked from
diffusing to other color regions to address the color mixing
issue.
BRIEF DESCRIPTION OF THE DRAWINGS
[0041] FIG. 1 is a cross-sectional side view of a substrate used
for manufacturing an organic light emitting display panel according
to the prior art.
[0042] FIG. 2 is a top view of a substrate used for manufacturing
an organic light emitting display panel according to the prior
art.
[0043] FIG. 3 is a top view of a substrate used for manufacturing
an organic light emitting display panel according to the present
disclosure.
[0044] FIG. 4 is a cross-sectional side view of a substrate used
for manufacturing an organic light emitting display panel according
to the present disclosure.
DETAILED DESCRIPTION
[0045] The following embodiments refer to the accompanying drawings
for exemplifying specific implementable embodiments of the present
disclosure. Moreover, directional terms described by the present
disclosure, such as upper, lower, front, back, left, right, inner,
outer, side, etc., are only directions by referring to the
accompanying drawings, and thus the used directional terms are used
to describe and understand the present disclosure, but the present
disclosure is not limited thereto. In the drawings, the same
reference symbol represents the same or similar components.
[0046] Please refer to FIGS. 3 and 4. FIG. 3 is a top view of a
substrate used for manufacturing an organic light emitting display
panel according to the present disclosure.
[0047] As shown in FIGS. 3 and 4, the substrate used for
manufacturing an organic light emitting display panel according to
the present disclosure includes a base plate 31, a plurality of
layer formation areas 32, a plurality of first spacers 33, and a
plurality of second spacers 34. The substrate 30 is used for
forming of an organic light emitting layer of the organic light
emitting display panel. The base plate 31 is made of conductive
glass, i.e., ITO glass.
[0048] The layer formation areas 32 are spaced from one another on
the base plate 31. The layer formation areas 32 are where an
organic light emitting layer is formed. Specifically, the organic
light emitting layer is formed by utilizing an evaporation source
40 to perform an evaporation treatment for the substrate 30.
[0049] The first spacers 33 are disposed on the base plate 31 at a
clearance region between the layer formation areas 32. The first
spacers 33 are spaced from the layer formation areas 32.
[0050] The second spacers 34 are disposed on the base plate 31 at
outer peripheries of the layer formation areas 32. That is, an
outer periphery of each of the layer formation areas 32 includes
one of the second spacers 34. A total number of the second spacers
34 and a total number of the layer formation areas 32 are
identical.
[0051] Each of the second spacers 34 includes a photoresist
material and a plurality of magnetic polymer microspheres. Each of
the second spacers 34 have a structure that the magnetic polymer
microspheres are dispersed in the photoresist material. The
magnetic polymer microspheres have a particulate diameter ranging
from 30 nm to 100 nm. Since the particulate diameter of the
magnetic polymer microspheres falls within this range, the magnetic
polymer microspheres are highly magnetic. This increases adhesion
ability of the magnetic polymer microspheres to the mask plate. In
one embodiment, the magnetic polymer microspheres are magnetic
polyacrolein-based microspheres.
[0052] Since the magnetic property presented by the magnetic
polymer microspheres attracts the mask plate 21, the mask plate 21
are bonded to the second spacers 34 tightly. In this way, the
organic light emitting material that is evaporated and deposited
onto the substrate 30 is blocked by the second spacers 34 which
surround the layer formation areas, preventing shadowing from
occurring and addressing color mixing.
[0053] In one embodiment, the second spacers 34 and the first
spacers 33 are of different material. The first spacers 33 are made
of a photoresist material.
[0054] In another embodiment, the first spacers 33 and the second
spacers 34 are of the same material. In other words, each of the
first spacers 33 also includes a photoresist material and a
plurality of magnetic polymer microspheres. Since the magnetic
property presented by the magnetic polymer microspheres attracts
the mask plate 21, the mask plate 21 are bonded to the first
spacers 33 tightly, reducing the gap between the substrate and the
mask plate and further preventing shadowing from occurring.
[0055] In one embodiment, the first spacers 33 and the second
spacers 34 are formed by a same process. For example, the first
spacers 33 and the second spacers 34 are formed simultaneously by a
lithography process that includes a coating step and a developing
step.
[0056] In one embodiment, a height of the second spacers 34 and a
height of the first spacers 33 are identical for simplifying the
manufacturing process and lowering the manufacturing cost.
[0057] According to the present disclosure, another spacers are
disposed at outer peripheries of the layer formation areas on the
substrate used for manufacturing an organic light emitting display
panel, and the spacers include magnetic polymer microspheres,
therefore the spacers are bonded to the mask plate tightly and the
evaporation material is blocked from diffusing to other color
regions to address the color mixing issue.
[0058] The present disclosure further provides an evaporation
device used for performing an evaporation treatment for a substrate
disposed above a mask plate. As shown in FIGS. 3 and 4, the
evaporation device includes a mask plate 21, a substrate 30, and an
evaporation source 40. The evaporation source 40 is disposed below
the mask plate 21 for providing an organic light emitting material
in order to form an organic light emitting layer on the substrate
30. In carrying out the evaporation treatment, the evaporation
device has to be disposed within an air-tight space that is
vacuum-sealed. The evaporation device can further include a heating
device (not shown) for removing impurities on surface of the
evaporation source 40.
[0059] The mask plate 21 includes a plurality of perforations 211
configured for the evaporation treatment. The mask plate 21 can be
made of metal. The organic light emitting layer is formed by
providing the light emitting material through the perforations 211
on the mask plate 21. The dashed lines in FIG. 4 show the flow
direction of the light emitting material.
[0060] The substrate 30 is used for forming of an organic light
emitting layer of the organic light emitting display panel. The
substrate 30 includes a base plate 31, a plurality of layer
formation areas 32, a plurality of first spacers 33, and a
plurality of second spacers 34. The base plate 31 is made of
conductive glass, i.e., ITO glass.
[0061] The layer formation areas 32 are spaced from one another on
the base plate 31. The layer formation areas 32 are where an
organic light emitting layer is formed. Specifically, the organic
light emitting layer is formed by utilizing an evaporation source
40 to perform an evaporation treatment for the substrate 30.
[0062] The first spacers 33 are disposed on the base plate 31 at a
clearance region between the layer formation areas 32. The first
spacers 33 are disposed between the base plate 31 and the mask
plate 21. The first spacers 33 are spaced from the layer formation
areas 32.
[0063] The second spacers 34 are disposed on the base plate 31 and
between the base plate 31 and the mask plate 21. The second spacers
34 are disposed at outer peripheries of the layer formation areas
32. That is, an outer periphery of each of the layer formation
areas 32 includes one of the second spacers 34. A total number of
the second spacers 34 and a total number of the layer formation
areas 32 are identical.
[0064] Each of the second spacers 34 includes a photoresist
material and a plurality of magnetic polymer microspheres. Each of
the second spacers 34 have a structure that the magnetic polymer
microspheres are dispersed in the photoresist material. The
magnetic polymer microspheres have a particulate diameter ranging
from 30 nm to 100 nm. Since the particulate diameter of the
magnetic polymer microspheres falls within this range, the magnetic
polymer microspheres are highly magnetic. This increases adhesion
ability of the magnetic polymer microspheres to the mask plate. In
one embodiment, the magnetic polymer microspheres are magnetic
polyacrolein-based microspheres.
[0065] Since the magnetic property presented by the magnetic
polymer microspheres attracts the mask plate 21, the mask plate 21
is bonded to the second spacers 34 tightly. In this way, the
organic light emitting material that is evaporated and deposited
onto the substrate 30 is blocked by the second spacers 34 which
surround the layer formation areas, preventing the shadowing effect
from occurring and addressing the color mixing issue.
[0066] In one embodiment, the second spacers 34 and the first
spacers 33 are of different material. The first spacers 33 are made
of a photoresist material.
[0067] In another embodiment, the first spacers 33 and the second
spacers 34 are of the same material. In other words, each of the
first spacers 33 also includes a photoresist material and a
plurality of magnetic polymer microspheres. Since the magnetic
property presented by the magnetic polymer microspheres attracts
the mask plate 21, the mask plate 21 is bonded to the first spacers
33 tightly, reducing the gap between the substrate and the mask
plate and further preventing the shadowing effect from
occurring.
[0068] In one embodiment, the first spacers 33 and the second
spacers 34 are formed by a same process. For example, the first
spacers 33 and the second spacers 34 are formed simultaneously by a
lithography process that includes a coating step and a developing
step.
[0069] In one embodiment, a height of the second spacers 34 and a
height of the first spacers 33 are identical for simplifying the
manufacturing process and lowering the manufacturing cost.
[0070] According to the present disclosure, another spacers are
disposed at outer peripheries of the layer formation areas on the
substrate of the evaporation device used for manufacturing an
organic light emitting display panel, and the spacers include
magnetic polymer microspheres, therefore the spacers are bonded to
the mask plate tightly and the evaporation material is blocked from
diffusing to other color regions to address the color mixing
issue.
[0071] While the present disclosure has been described with the
aforementioned preferred embodiments, it is preferable that the
above embodiments should not be construed as limiting of the
present disclosure. Anyone having ordinary skill in the art can
make a variety of modifications and variations without departing
from the spirit and scope of the present disclosure as defined by
the following claims.
* * * * *