U.S. patent application number 15/997172 was filed with the patent office on 2018-12-06 for control plate for a high conductance valve.
The applicant listed for this patent is VistadelTek, LLC. Invention is credited to Kim Ngoc Vu.
Application Number | 20180347707 15/997172 |
Document ID | / |
Family ID | 64459723 |
Filed Date | 2018-12-06 |
United States Patent
Application |
20180347707 |
Kind Code |
A1 |
Vu; Kim Ngoc |
December 6, 2018 |
CONTROL PLATE FOR A HIGH CONDUCTANCE VALVE
Abstract
A high purity fluid control valve includes a moveable control
plate having a flow-through passage to enhance fluid sweep of the
internal valve volume. The valve is of jet and seat type using
nested orifice ridges to achieve high conductance with small
actuator movement. The flow-through control plate is especially
useful in fast acting proportional control applications such as gas
delivery in semiconductor manufacturing.
Inventors: |
Vu; Kim Ngoc; (Yorba Linda,
CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
VistadelTek, LLC |
Yorba Linda |
CA |
US |
|
|
Family ID: |
64459723 |
Appl. No.: |
15/997172 |
Filed: |
June 4, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
62515063 |
Jun 5, 2017 |
|
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|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
F16K 27/02 20130101;
F16K 1/36 20130101; F16K 41/12 20130101; F16K 1/42 20130101 |
International
Class: |
F16K 1/36 20060101
F16K001/36; F16K 41/12 20060101 F16K041/12; F16K 27/02 20060101
F16K027/02 |
Claims
1. A control plate for a high-conductance valve comprising: a
control plate body formed as a basically circular disk having a
flat side and an opposed side opposite the flat side, the control
plate configured to be moved within a valve by an actuator, the
flat side having a continuous uninterrupted flat portion to
shut-off fluid flow in the valve; and at least one fluid passageway
defined in the control plate body, the at least one fluid
passageway extending from the flat side through to the opposed
side.
2. The control plate of claim 1, wherein the at least one fluid
passageway includes a plurality of fluid passageways defined in the
control plate body and extending from the flat side through to the
opposed side.
3. The control plate of claim 2, wherein the plurality of fluid
passageways are disposed about a center of the control plate body
and the continuous uninterrupted flat portion of the flat side
surrounds each of the plurality of fluid passageways.
4. The control plate of claim 3, further comprising one of a
central thru-hole extending through the center of the control plate
body and a blind hole formed in the opposed side in the center of
the control plate body, the one of the central thru-hole and the
blind hole being constructed to mount the control plate body onto a
control shaft.
5. The control plate of claim 2, further comprising a recess formed
in the flat side of the control plate body in a center of the
control plate body, wherein the plurality of fluid passageways
extend outwardly from the recess through to the opposed side at an
angle, and wherein the continuous uninterrupted flat portion of the
flat side surrounds each of the plurality of fluid passageways.
6. The control plate of claim 2, wherein the plurality of fluid
passageways includes a first plurality of angled fluid passageways
disposed about a center of the control plate body and a second
plurality of straight fluid passageways disposed about a radially
outer portion of the control plate body and extending substantially
straight through the control plate body, the first plurality of
angled fluid passageways angling radially inwardly from the opposed
side to the flat side.
7. The control plate of claim 6, wherein the flat side includes a
first continuous uninterrupted flat portion disposed between the
plurality of angled fluid passageways and the plurality of straight
fluid passageways and a second continuous uninterrupted flat
portion disposed radially outward of the plurality of straight
fluid passageways.
8. The control plate of claim 1, further comprising: an amplifier
disc coupled to the control plate body, the amplifier disc having
an inner segment and an outer periphery, the inner segment coupled
to and spaced apart from the outer periphery by connecting arms
such that axial displacement of the inner segment causes asymmetric
displacement of an opposing portion of the outer periphery of the
amplifier disc; wherein the control plate includes a ring-shaped
groove defined in the control plate body, the ring-shaped groove
having a relief surface opposite the flat side, the at least one
fluid passageway including a thru-hole defined in the control plate
body and intersecting the ring-shaped groove.
9. A valve assembly comprising: a valve body having a valve
chamber, at least one first fluid conduit aperture in fluid
communication with the valve chamber, at least one second fluid
conduit aperture in fluid communication with the valve chamber, and
at least one pair of adjacent orifice ridge segments, the at least
one pair of adjacent orifice ridge segments extending from the
valve body into the valve chamber and defining an intermediate
valve chamber region between the at least one pair of adjacent
orifice ridge segments; and a control plate including a control
plate body having a first side and a second side opposed to the
first side, the control plate body being movable between a closed
position in which a surface region of the first side sealingly
contacts the at least one pair of adjacent orifice ridge segments
and an open position in which an open gap is present between the
surface region and the at least one pair of adjacent orifice ridge
segments, the control plate having at least one fluid passageway
extending through the control plate body from the first side to the
second side within a perimeter of the at least one pair of adjacent
orifice ridge segments.
10. The valve assembly of claim 9, wherein the at least one pair of
adjacent orifice ridge segments includes two adjacent orifice ridge
segments that are substantially circular in shape and further
define an outer valve chamber portion disposed outside the two
adjacent orifice ridge segments and an inner valve chamber portion
disposed inside the two adjacent orifice ridge segments.
11. The valve assembly of claim 10, further comprising a first
fluid conduit in fluid communication with the at least one first
fluid conduit aperture and a second fluid conduit in fluid
communication with the at least one second fluid conduit aperture,
wherein when the control plate body is in the closed position, the
at least one first fluid conduit aperture is in fluid communication
with the inner valve chamber portion, the at least one second fluid
conduit aperture is in fluid communication with the intermediate
valve chamber portion, and the surface region of the first side of
the control plate body sealingly contacts the two adjacent orifice
ridge segments to prevent fluid flow from flowing between the at
least one first fluid conduit aperture and the at least one second
fluid conduit aperture.
12. The valve assembly of claim 11, wherein when the control plate
body is in the closed position, the at least one fluid passageway
of the control plate provides fluid communication between the inner
valve chamber portion and the outer valve chamber portion.
13. The valve assembly of claim 10, further comprising a first
fluid conduit in fluid communication with the at least one first
fluid conduit aperture and a second fluid conduit in fluid
communication with the at least one second fluid conduit aperture,
wherein when the control plate body is in the closed position, the
at least one first fluid conduit aperture is in fluid communication
with the outer valve chamber portion, the at least one second fluid
conduit aperture is in fluid communication with the intermediate
valve chamber portion, and the surface region of the first side of
the control plate body sealingly contacts the two adjacent orifice
ridge segments to prevent fluid from flowing between the at least
one first fluid conduit aperture and the at least one second fluid
conduit aperture.
14. The valve assembly of claim 13, wherein when the control plate
body is in the closed position, the at least one fluid passageway
of the control plate provides fluid communication between the outer
valve chamber portion and the inner valve chamber portion.
15. The valve assembly of claim 9, wherein the at least one pair of
adjacent orifice ridge segments includes four adjacent orifice
ridge segments that are substantially circular in shape, the four
adjacent orifice ridge segments including a largest orifice ridge
segment, a first smaller orifice ridge segment surrounded by the
largest orifice ridge segment, a second smaller orifice ridge
segment surrounded by the first smaller orifice ridge segment, and
a smallest orifice ridge segment surrounded by the second smaller
orifice ridge segment, the four adjacent orifice ridge segments
defining an outer valve chamber portion disposed outside the four
adjacent orifice ridge segments, an inner valve chamber portion
disposed inside the four adjacent orifice ridge segments, a first
intermediate valve chamber portion disposed between the largest
orifice ridge segment and the first smaller orifice ridge segment,
a second intermediate valve chamber portion disposed between the
first smaller orifice ridge segment and the second smaller orifice
ridge segment, and a third intermediate valve chamber portion
disposed between the second smaller orifice ridge segment and the
smallest orifice ridge segment.
16. The valve assembly of claim 15, further comprising a first
fluid conduit in fluid communication with the at least one first
fluid conduit aperture and a second fluid conduit in fluid
communication with the at least one second fluid conduit aperture,
wherein when the control plate body is in the closed position, the
at least one first fluid conduit aperture is in fluid communication
with the inner valve chamber portion, the at least one second fluid
conduit aperture is in fluid communication with the first
intermediate valve chamber portion and a first continuous
uninterrupted flat portion of the surface region of the first side
of the control plate body sealingly contacts the largest orifice
ridge segment and the first smaller orifice ridge segment to
prevent fluid from flowing between the at least one first fluid
conduit aperture and the at least one second fluid conduit
aperture.
17. The valve assembly of claim 16, wherein the valve body further
includes at least one third fluid conduit aperture in fluid
communication with the second fluid conduit, and wherein when the
control plate body is in the closed position, the at least one
third fluid conduit aperture is in fluid communication with the
third intermediate valve chamber portion and a second continuous
uninterrupted flat portion of the surface region of the first side
of the control plate body sealingly contacts the second smaller
orifice ridge segment and the smallest orifice ridge segment to
prevent fluid from flowing between the at least one first fluid
conduit aperture and the at least one third fluid conduit
aperture.
18. The valve assembly of claim 17, wherein the at least one fluid
passageway includes a first plurality of angled fluid passageways
disposed about a radially inner portion of the control plate body
and a second plurality of straight fluid passageways disposed about
a radially outer portion of the control plate body and extending
substantially straight through the control plate body, the first
plurality of angled fluid passageways angling radially inwardly
from the second side of the control plate body to the first
side.
19. The valve assembly of claim 18, wherein the second continuous
uninterrupted flat portion of the surface region of the first side
of the control plate body is disposed between the plurality of
angled fluid passageways and the plurality of straight fluid
passageways and the second continuous uninterrupted flat portion of
the surface region is disposed radially outward of the plurality of
straight fluid passageways.
20. The valve assembly of claim 19, wherein when the control plate
body is in the closed position, the first plurality of angled fluid
passageways in the control plate provide fluid communication
between the inner valve chamber portion and the outer valve chamber
portion, and the first plurality of angled fluid passageways and
the second plurality of straight fluid passageways provide fluid
communication between the inner valve chamber portion, the outer
valve chamber portion, and the second intermediate valve chamber
portion.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefit under 35 U.S.C. .sctn.
119(e) to U.S. Provisional Application Ser. No. 62/515,063 titled
"CONTROL PLATE WITH FLOW-THROUGH PASSAGE FOR A VALVE," filed 5 Jun.
2017, which is incorporated by reference herein in its entirety for
all purposes. This application is related to U.S. patent
application Ser. No. 15/204,245 titled "CONTROL PLATE IN A VALVE,"
filed 7 Jul. 2016, U.S. patent application Ser. No. 15/182,978
titled "LOW HYSTERESIS DIAPHRAGM FOR A VALVE," filed 15 Jun. 2016,
U.S. patent application Ser. No. 14/932,086 titled "VALVE STROKE
AMPLIFIER MECHANISM ASSEMBLY," filed 4 Nov. 2015, and U.S. patent
application Ser. No. 14/737,564 titled "HIGH CONDUCTANCE VALVE FOR
FLUIDS AND VAPORS," filed 12 Jun. 2015, each of which is
incorporated by reference herein in its entirety for all
purposes.
BACKGROUND
[0002] The present invention is related to a moveable portion of a
fluid control valve that may be actively positioned, anywhere
between an extreme open condition and an extreme closed condition,
to adjust a flow of fluid passing through the valve. The movable
portion includes provision for a portion of the flowing fluid to
pass through a control plate thereby improving cleanliness by
reducing potential fluid stagnation. The invention is particularly
useful in valves intended for high purity proportional control or
modulating control of fluid delivery within industrial processes
making semiconductor devices, pharmaceuticals, or fine chemicals,
and many similar fluid delivery systems that simultaneously demand
a leak-tight shut-off in the fully closed condition along with
proportional control.
SUMMARY
[0003] In consideration of the foregoing, applicant has invented a
high purity fluid control valve that includes a moveable control
plate having at least one flow-through passage to enhance fluid
sweep of the internal valve volume. The valve is of jet and seat
type wherein a relatively narrow planar land is formed at the
opening of a fluid passageway and a flat seat may be moved into
contact with the land to close off fluid flow. In this disclosure
the jet element is usually described as an orifice ridge and the
seat element is usually described as a control plate. The valve
uses nested orifice ridges to achieve high conductance with small
actuator movement by providing large control gap length with small
enclosed area. The control plate has a continuous uninterrupted
flat portion sized to bridge adjacent orifice ridge segments to
shut-off fluid flow in the fully closed condition. The orifice
ridge segments are coplanar and may be lapped to provide a smooth
surface for the control plate to seat against. The flow-through
control plate is especially useful in fast acting proportional
control applications such as gas delivery in semiconductor
manufacturing.
[0004] According to an embodiment a control plate comprises a
control plate body formed as a basically circular disk having a
flat side, wherein the control plate body is pierced through by at
least one fluid passageway, and the at least one fluid passageway
extends from the flat side to an opposed side.
[0005] According to another embodiment a valve assembly comprises a
valve body including nested orifice ridges defining an intermediate
valve chamber portion between the orifice ridges which is fluidly
connected to a fluid passageway, and a control plate including at
least one fluid passageway through the control plate, wherein the
at least one fluid passageway through the control plate enables
controlled flow of a fluid between the an inner valve chamber
portion located inside both nested orifice ridges and an outer
valve chamber portion located outside both nested orifice ridges,
so that some of the controlled fluid flow sweeps through possibly
stagnant volumes within the complete valve assembly.
[0006] According to an aspect of the present invention, a control
plate for a high-conductance valve is provided. The control plate
comprises a control plate body formed as a basically circular disk
having a flat side and an opposed side opposite the flat side, the
control plate configured to be moved within a valve by an actuator,
the flat side having a continuous uninterrupted flat portion to
shut-off fluid flow in the valve; and at least one fluid passageway
defined in the control plate body, the at least one fluid
passageway extending from the flat side through to the opposed
side. In accordance with various examples, the at least one fluid
passageway includes a plurality of fluid passageways defined in the
control plate body and extending from the flat side through to the
opposed side.
[0007] In accordance with one example, the plurality of fluid
passageways are disposed about a center of the control plate body
and the continuous uninterrupted flat portion of the flat side
surrounds each of the plurality of fluid passageways. In accordance
with another example, the control plate further comprises a recess
formed in the flat side of the control plate body in a center of
the control plate body, the plurality of fluid passageways extend
outwardly from the recess through to the opposed side at an angle,
and the continuous uninterrupted flat portion of the flat side
surrounds each of the plurality of fluid passageways.
[0008] In accordance with yet another example, the plurality of
fluid passageways includes a first plurality of angled fluid
passageways disposed about a center of the control plate body and a
second plurality of straight fluid passageways disposed about a
radially outer portion of the control plate body and extending
substantially straight through the control plate body, the first
plurality of angled fluid passageways angling radially inwardly
from the opposed side to the flat side. In accordance with an
aspect of this example, the flat side includes a first continuous
uninterrupted flat portion disposed between the plurality of angled
fluid passageways and the plurality of straight fluid passageways
and a second continuous uninterrupted flat portion disposed
radially outward of the plurality of straight fluid passageways. In
accordance with an aspect of each of the above-described examples,
the control plate further comprises one of a central thru-hole
extending through the center of the control plate body and a blind
hole formed in the opposed side in the center of the control plate
body, the one of the central thru-hole and the blind hole being
constructed to mount the control plate body onto a control
shaft.
[0009] In accordance with another example, the control plate may
further comprise an amplifier disc coupled to the control plate
body. The amplifier disc has an inner segment and an outer
periphery, the inner segment coupled to and spaced apart from the
outer periphery by connecting arms such that axial displacement of
the inner segment causes asymmetric displacement of an opposing
portion of the outer periphery of the amplifier disc. In accordance
with this example, the control plate further includes a ring-shaped
groove defined in the control plate body, the ring-shaped groove
having a relief surface opposite the flat side, wherein the at
least one fluid passageway includes a thru-hole defined in the
control plate body and intersecting the ring-shaped groove.
[0010] In accordance with another aspect of the present invention,
a valve assembly is provided. The valve assembly comprises a valve
body and a control plate. The valve body has a valve chamber, at
least one first fluid conduit aperture in fluid communication with
the valve chamber, at least one second fluid conduit aperture in
fluid communication with the valve chamber, and at least one pair
of adjacent orifice ridge segments, the at least one pair of
adjacent orifice ridge segments extending from the valve body into
the valve chamber and defining an intermediate valve chamber region
between the at least one pair of adjacent orifice ridge segments.
The control plate includes a control plate body having a first side
and a second side opposed to the first side, the control plate body
being movable between a closed position in which a surface region
of the first side sealingly contacts the at least one pair of
adjacent orifice ridge segments and an open position in which an
open gap is present between the surface region and the at least one
pair of adjacent orifice ridge segments. The control plate has at
least one fluid passageway extending through the control plate body
from the first side to the second side within a perimeter of the at
least one pair of adjacent orifice ridge segments. In accordance
with various examples, the at least one pair of adjacent orifice
ridges may be concentric with one another and substantially
centered in the valve chamber, or they may be positioned off-center
within the valve chamber and nested.
[0011] In accordance with one example, the at least one pair of
adjacent orifice ridge segments includes two adjacent orifice ridge
segments that are substantially circular in shape and further
define an outer valve chamber portion disposed outside the two
adjacent orifice ridge segments and an inner valve chamber portion
disposed inside the two adjacent orifice ridge segments. In
accordance with an aspect of this example, the valve assembly may
further comprise a first fluid conduit in fluid communication with
the at least one first fluid conduit aperture and a second fluid
conduit in fluid communication with the at least one second fluid
conduit aperture, wherein when the control plate body is in the
closed position, the at least one first fluid conduit aperture is
in fluid communication with the inner valve chamber portion, the at
least one second fluid conduit aperture is in fluid communication
with the intermediate valve chamber portion, and the surface region
of the first side of the control plate body sealingly contacts the
two adjacent orifice ridge segments to prevent fluid flow from
flowing between the at least one first fluid conduit aperture and
the at least one second fluid conduit aperture. In accordance with
yet a further aspect of this example, when the control plate body
is in the closed position, the at least one fluid passageway of the
control plate provides fluid communication between the inner valve
chamber portion and the outer valve chamber portion.
[0012] In accordance with an alternative aspect of this example,
the valve assembly may further comprise a first fluid conduit in
fluid communication with the at least one first fluid conduit
aperture and a second fluid conduit in fluid communication with the
at least one second fluid conduit aperture, wherein when the
control plate body is in the closed position, the at least one
first fluid conduit aperture is in fluid communication with the
outer valve chamber portion, the at least one second fluid conduit
aperture is in fluid communication with the intermediate valve
chamber portion, and the surface region of the first side of the
control plate body sealingly contacts the two adjacent orifice
ridge segments to prevent fluid from flowing between the at least
one first fluid conduit aperture and the at least one second fluid
conduit aperture. In accordance with a further aspect of this
example, when the control plate body is in the closed position, the
at least one fluid passageway of the control plate provides fluid
communication between the outer valve chamber portion and the inner
valve chamber portion.
[0013] In accordance with an alternative example, the at least one
pair of adjacent orifice ridge segments includes four adjacent
orifice ridge segments that are substantially circular in shape,
the four adjacent orifice ridge segments including a largest
orifice ridge segment, a first smaller orifice ridge segment
surrounded by the largest orifice ridge segment, a second smaller
orifice ridge segment surrounded by the first smaller orifice ridge
segment, and a smallest orifice ridge segment surrounded by the
second smaller orifice ridge segment, the four adjacent orifice
ridge segments defining an outer valve chamber portion disposed
outside the four adjacent orifice ridge segments, an inner valve
chamber portion disposed inside the four adjacent orifice ridge
segments, a first intermediate valve chamber portion disposed
between the largest orifice ridge segment and the first smaller
orifice ridge segment, a second intermediate valve chamber portion
disposed between the first smaller orifice ridge segment and the
second smaller orifice ridge segment, and a third intermediate
valve chamber portion disposed between the second smaller orifice
ridge segment and the smallest orifice ridge segment.
[0014] In accordance with an aspect of the alternative example, the
valve assembly further comprises a first fluid conduit in fluid
communication with the at least one first fluid conduit aperture
and a second fluid conduit in fluid communication with the at least
one second fluid conduit aperture, wherein when the control plate
body is in the closed position, the at least one first fluid
conduit aperture is in fluid communication with the inner valve
chamber portion, the at least one second fluid conduit aperture is
in fluid communication with the first intermediate valve chamber
portion and a first continuous uninterrupted flat portion of the
surface region of the first side of the control plate body
sealingly contacts the largest orifice ridge segment and the first
smaller orifice ridge segment to prevent fluid from flowing between
the at least one first fluid conduit aperture and the at least one
second fluid conduit aperture.
[0015] In accordance with a further aspect of this alternative
example, the valve body further includes at least one third fluid
conduit aperture in fluid communication with the second fluid
conduit, and wherein when the control plate body is in the closed
position, the at least one third fluid conduit aperture is in fluid
communication with the third intermediate valve chamber portion and
a second continuous uninterrupted flat portion of the surface
region of the first side of the control plate body sealingly
contacts the second smaller orifice ridge segment and the smallest
orifice ridge segment to prevent fluid from flowing between the at
least one first fluid conduit aperture and the at least one third
fluid conduit aperture.
[0016] In accordance with yet a further aspect of this alternative
example, the at least one fluid passageway includes a first
plurality of angled fluid passageways disposed about a radially
inner portion of the control plate body and a second plurality of
straight fluid passageways disposed about a radially outer portion
of the control plate body and extending substantially straight
through the control plate body, the first plurality of angled fluid
passageways angling radially inwardly from the second side of the
control plate body to the first side. In accordance with a another
aspect of this alternative example, the second continuous
uninterrupted flat portion of the surface region of the first side
of the control plate body is disposed between the plurality of
angled fluid passageways and the plurality of straight fluid
passageways and the second continuous uninterrupted flat portion of
the surface region is disposed radially outward of the plurality of
straight fluid passageways. In accordance with this alternative
example, when the control plate body is in the closed position, the
first plurality of angled fluid passageways in the control plate
provide fluid communication between the inner valve chamber portion
and the outer valve chamber portion, and the first plurality of
angled fluid passageways and the second plurality of straight fluid
passageways provide fluid communication between the inner valve
chamber portion, the outer valve chamber portion, and the second
intermediate valve chamber portion.
BRIEF DESCRIPTION OF DRAWINGS
[0017] FIG. 1A illustrates a plan view of a representative
high-conductance valve body having centered concentric orifice
ridges;
[0018] FIG. 1B illustrates a cross-sectional view of the
high-conductance valve body of FIG. 1A taken along line I-I;
[0019] FIG. 1C illustrates a top perspective view of the
high-conductance valve body of FIG. 1A;
[0020] FIG. 1D illustrates a top perspective cross-sectional view
of the high-conductance valve body of FIG. 1A taken along line
I-I;
[0021] FIG. 2A illustrates a plan view of an embodiment of a
control plate with flow-through passages for a high-conductance
valve;
[0022] FIG. 2B illustrates a cross-sectional view of the control
plate of FIG. 2A taken along line II-II;
[0023] FIG. 2C illustrates a top perspective view of the control
plate of FIG. 2A;
[0024] FIG. 2D illustrates a top perspective cross-sectional view
of the control plate of FIG. 2A taken along line II-II;
[0025] FIG. 3A illustrates a plan view of another embodiment of a
control plate with flow-through passages for a high-conductance
valve;
[0026] FIG. 3B illustrates a cross-sectional view of the control
plate of FIG. 3A taken along line III-III;
[0027] FIG. 3C illustrates a top perspective view of the control
plate of FIG. 3A;
[0028] FIG. 3D illustrates a top perspective cross-sectional view
of the control plate of FIG. 3A taken along line III-III;
[0029] FIG. 4A illustrates a plan view of an embodiment of a
control plate with flow-through passages in accordance with FIGS.
2A-D combined with a valve topworks installed atop a
high-conductance valve body having concentric centered orifice
ridges in accordance with FIGS. 1A-1D;
[0030] FIG. 4B illustrates a cross-sectional view of the embodiment
of FIG. 4A taken along line IV-IV;
[0031] FIG. 4C illustrates a top perspective view of the embodiment
of FIG. 4A;
[0032] FIG. 4D illustrates a top perspective cross-sectional view
of the embodiment of FIG. 4A taken along line IV-IV;
[0033] FIG. 5A illustrates a plan view of an embodiment of a
control plate with flow-through passages in accordance with FIGS.
3A-3D combined with a valve topworks installed atop a
high-conductance valve body having centered concentric orifice
ridges in accordance with FIGS. 1A-1D;
[0034] FIG. 5B illustrates a cross-sectional view of the embodiment
of FIG. 5A taken along line V-V;
[0035] FIG. 5C illustrates a top perspective view of the embodiment
of FIG. 5A;
[0036] FIG. 5D illustrates a top perspective cross-sectional view
of the embodiment of FIG. 5A taken along line V-V;
[0037] FIG. 6A illustrates a plan view of another representative
high-conductance valve body having offset concentric orifice
ridges;
[0038] FIG. 6B illustrates a cross-sectional view of the
high-conductance valve body of FIG. 6A taken along line VI-VI;
[0039] FIG. 6C illustrates a top perspective view of the
high-conductance valve body of FIG. 6A;
[0040] FIG. 6D illustrates a top perspective cross-sectional view
of the high-conductance valve body of FIG. 6A taken along line
VI-VI;
[0041] FIG. 7A illustrates an embodiment of a control plate with
flow-through passages combined with a valve stroke amplifier
disc;
[0042] FIG. 7B illustrates a cross-sectional view of the control
plate and valve stroke amplifier disc of FIG. 7A taken along line
VII-VII;
[0043] FIG. 7C illustrates a top perspective view of the control
plate of the combined control plate and valve stroke amplifier disc
of FIG. 7A;
[0044] FIG. 7D illustrates a top perspective cross-sectional view
of the control plate of the combined control plate and valve stroke
amplifier disc of FIG. 7A taken along line VII-VII;
[0045] FIG. 7E illustrates a top perspective view of the combined
control plate and valve stroke amplifier disc of FIG. 7A;
[0046] FIG. 7F illustrates a top perspective cross-sectional view
of the combined control plate and valve stroke amplifier disc of
FIG. 7A taken along line VII-VII;
[0047] FIG. 8A illustrates a plan view of a control plate with
flow-through passages and amplifier disc in accordance with FIGS.
7A-7F combined with a valve topworks installed atop a
high-conductance valve body having offset concentric orifice ridges
in accordance with FIGS. 6A-6D;
[0048] FIG. 8B illustrates a cross-sectional view of the embodiment
of FIG. 8A taken along line VIII-VIII;
[0049] FIG. 8C illustrates a top perspective view of the embodiment
of FIG. 8A;
[0050] FIG. 8D illustrates a top perspective cross-sectional view
of the embodiment of FIG. 8A taken along line VIII-VIII;
[0051] FIG. 9A illustrates a plan view of another embodiment of a
control plate with flow-through passages for a high-conductance
valve;
[0052] FIG. 9B illustrates a cross-sectional view of the control
plate of FIG. 9A taken along line IX-IX;
[0053] FIG. 9C illustrates a top perspective view of the control
plate of FIG. 9A;
[0054] FIG. 9D illustrates a top perspective cross-sectional view
of the control plate of FIG. 9A taken along line IX-IX;
[0055] FIG. 10A illustrates a plan view of another representative
high-conductance valve body having two nested groups of concentric
orifice ridges;
[0056] FIG. 10B illustrates a cross-sectional view of the
high-conductance valve body of FIG. 10A taken along line X-X;
[0057] FIG. 10C illustrates a top perspective view of the
high-conductance valve body of FIG. 10A;
[0058] FIG. 10D illustrates a top perspective cross-sectional view
of the high-conductance valve body of FIG. 10A taken along line
X-X;
[0059] FIG. 11A illustrates a plan view of a control plate with
flow-through passages in accordance with FIGS. 9A-9D combined with
a valve topworks installed atop a high-conductance valve body
having nested groups of concentric orifice ridges in accordance
with FIGS. 10A-10D;
[0060] FIG. 11B illustrates a cross-sectional view of the
embodiment of FIG. 11A taken along line XI-XI;
[0061] FIG. 11C illustrates a top perspective view of the
embodiment of FIG. 11A; and
[0062] FIG. 11D illustrates a top perspective cross-sectional view
of the embodiment of FIG. 11A taken along line XI-XI.
DETAILED DESCRIPTION
[0063] This invention is not limited in its application to the
details of construction and the arrangement of components set forth
in the following description or illustrated in the drawings. The
invention is capable of other embodiments and of being practiced or
of being carried out in various ways. Also, the phrasing and
terminology used herein is for the purpose of description and
should not be regarded as limiting. The use of "including,"
"comprising," or "having," "containing," "involving," and
variations thereof herein, is meant to encompass the items listed
thereafter and equivalents thereof as well as additional items. The
use of directional adjectives "inner, "outer," "upper," "lower,"
and like terms, are meant to assist with understanding relative
relationships among design elements and should not be construed as
meaning an absolute direction in space nor regarded as
limiting.
[0064] A representative example of a high-conductance valve body
190 having centered concentric orifice ridges 120, 121 is
illustrated in FIGS. 1A-1D. A more complete exemplary valve
assembly 100 may have a topworks including a valve housing 160
removably joined to the valve body 190 by deforming a metallic
gasket 165 as a leak-free assembly further illustrated in FIGS.
4A-4D. The topworks may include an actuator (not shown) chosen for
a specific application. For example, a pneumatic actuator might be
used for a simple on-off high-conductance valve, but a
piezoelectric actuator might be used for a proportional control
high-conductance valve adapted to a mass flow controller
electronics system. Open cavities 154, 158, 159 formed in an upper
surface of the valve body 190 may be considered as lower portions
of a valve chamber 150 while an upper portion 157 of the valve
chamber is formed in a lower surface of the valve housing 160
thereabove. A large orifice ridge 120 formed as a circular upward
projection from the valve body 190 separates an outer valve chamber
portion 158 from an intermediate valve chamber portion 154 which is
surrounded by the large orifice ridge 120. A generally concentric
small orifice ridge 121 is also formed as a circular upward
projection from the valve body 190 surrounded by the large orifice
ridge 120 and further separates an inner valve chamber portion 159
from the intermediate valve chamber portion 154. Throughout this
disclosure a contiguous volume located between a pair of adjacent
orifice ridge segments (e.g., between the large orifice ridge 120
and the small orifice ridge 121) may be referred to as an
intermediate valve chamber portion, an adjacent contiguous volume
disposed outside the pair (or pairs) of adjacent orifice ridge
segments may be referred to as an outer valve chamber portion
(e.g., 158), and an adjacent contiguous volume disposed inside the
pair (or pairs) of adjacent orifice ridge segments may be referred
to as an inner valve chamber portion (e.g., 159) for purposes of
identification only and is not indicative of the direction of fluid
flow. A gasket sealing region 164 may be formed in the upper
surface of the valve body 190 to receive the metallic gasket 165
adjacent the periphery of the outer valve chamber portion 158.
[0065] The exemplary valve 100 may further comprise a first fluid
conduit 110 (typically an inlet) and a second fluid conduit 114
(typically an outlet), both which conduits communicate fluid to the
valve chamber 150, a valve chamber sealing diaphragm 170, and a
control element moveable by deflection of the valve chamber sealing
diaphragm 170. The moveable control element may be comprised of a
control plate 200 (further described below) affixed to a control
shaft 182 that is affixed to the diaphragm 170. In the design of
the exemplary valve 100, a first fluid conduit aperture 112
provides fluid communication between the inner valve chamber
portion 159 and the first fluid conduit 110. Similarly, a second
fluid conduit aperture 116 provides fluid communication between the
intermediate valve chamber portion 154 and the second fluid conduit
114. In the present illustrations of FIGS. 4A-4D, the valve 100 is
completely closed in a shut-off no-flow condition so the control
plate 200 is shown contacting both the large orifice ridge 120 and
the small orifice ridge 121. Designers will appreciate the first
fluid conduit 110 and second fluid conduit 114 may provide fluid
passage to a surface mount component interface rather than the tube
stubs illustrated. The K1S and W-Seal are surface mount component
interface examples well known in semiconductor capital equipment
design and therefore not illustrated in the drawings of this
disclosure. The parts comprising said valve may be constructed from
materials chosen for desired chemical inertness relative to the
fluids to be handled and may include, for example, stainless
steels, Monel.RTM. metals, titanium alloys, Hastelloy.RTM. alloys,
Elgiloy.RTM., brass, or polymers such as Teflon.RTM., Kel-F.RTM.,
Vespel.RTM., Kynar.RTM., and combinations of metals and polymers
either separate or together. For example, a type 316L stainless
steel valve body 190 may be used with a Hastelloy.RTM. nickel alloy
control plate 200 and an Elgiloy.RTM. cobalt alloy sealing
diaphragm 170.
[0066] An example of a flow-through control plate 200 illustrated
in FIGS. 2A-2D comprises a control plate body 240 formed as a
basically circular disk having one or more features on the opposed
sides of the disk. Those features may include a central thru-hole
242, a counterbore 244, and one or more top holes 246. The
counterbore 244 would typically be centered and usually be formed
in a flat disk side intended to face the orifice ridges 120,121.
The one or more top holes 246 may pierce the control plate body 240
from the opposite disk side and thereby leave one or more webs 248
between the central thru-hole 242 and the control plate body 240.
Alternatively, the top holes 246 may be placed to intersect the
counterbore 244 while also leaving one or more webs 248 between the
central thru-hole 242 and the rest of the control plate body 240.
The webs 248 bridge over the counterbore 244. In either case the
top holes 246 constitute fluid passageways through which fluid may
pass from one side of the control plate body 240 to the opposite
side without need to transit around the outside diameter periphery.
As illustrated in FIGS. 4A-4D, the control plate 200 may be mounted
onto a stub of the control shaft 182 and thereby suspended within
the valve chamber 150. Any suitable mounting method may be used
such as press fit (see, for example, FIGS. 9A-9D), swaging the head
of the stub, a threaded fastener, welding, or similar design
choices according to the desires of a practitioner, so long as the
fluid passageways through the top holes 246 are not obscured. It
should be appreciated that, rather than the control plate being
mounted to the stub of the control shaft 182 using a thru-hole 242
as shown in FIGS. 2A-2D, a blind hole mounting may instead be used
as depicted in FIGS. 9A-9D.
[0067] The manner of controlling fluid flow may be further
understood by considering the inner valve chamber portion 159
surrounded by the small orifice ridge 121, being connected by the
first fluid conduit aperture 112 in fluid communication with the
first fluid conduit 110, whereby at least a portion of the control
plate 200 may be moved toward or away from the small orifice ridge
121 to create a first control gap (not shown) through which a first
fluid portion may controllably flow. The controllable first fluid
portion may transit directly to the intermediate valve chamber
portion 154 through the first control gap from the inner valve
chamber portion 159 from whence it may exit through an offset
second fluid conduit aperture 116 in fluid communication with the
second fluid conduit 114. In the present example valve 100, an
actuator (not shown) may apply a force to the control shaft 182 to
deflect the diaphragm 170 and thereby modulate the conductance
through the valve 100 by changing the first control gap.
[0068] Simultaneous with the preceding described flow of the first
fluid portion, moving at least a portion of the control plate 200
toward or away from the large orifice ridge 120 similarly creates a
second control gap (not shown) through which a second fluid portion
may controllably flow. The controllable second fluid portion may
transit from the inner valve chamber portion 159 through the top
holes 246 of the control plate 200 and sweep through the upper
valve chamber portion 157 into the outer valve chamber portion 158
from whence the second fluid portion may exit through the second
control gap into the intermediate valve chamber portion 154. Upon
reaching the intermediate valve chamber portion 154, the
controllable second fluid portion also may exit through the offset
second fluid conduit aperture 116 in fluid communication with the
second fluid conduit 114. Thus in the present example valve 100,
the actuator (not shown) applying a force to the control shaft 182
and deflecting the diaphragm 170 thereby additionally modulates the
conductance through the valve 100 by changing the second control
gap. It should be appreciated that while the valve 100 is closed,
fluid may pass through the holes in the control plate 200, but
cannot go further. When the valve 100 is closed, fluid cannot pass
from the first fluid conduit 110 to the second fluid conduit
114.
[0069] Designers may appreciate the large 120 and small 121 orifice
ridges need merely be nested rather than exactly concentric;
moreover, the nested pair of orifice ridges 120,121 may be placed
asymmetrically with respect to the shape and dimensions of the
internal valve chamber 150. The flow-through control plate 200 of
course needs to have a continuous uninterrupted surface region, on
the lower flat side of the disk shaped body 240, sufficient to span
between contacting the large 120 and small 121 orifice ridges and
cover the entire intermediate valve chamber portion 154. A single
orifice ridge of non-circular shape (not shown) may also have
adjacent segments enclosing an intermediate valve chamber portion
that a flow-through control plate can entirely cover. Designers
will also appreciate the described directions of fluid flow,
progressing from the first fluid conduit 110 to the second fluid
conduit 114, are used for convenience and clarity but are not
limiting. Fluid may flow in an opposite direction, from the second
fluid conduit 114 to the first fluid conduit 110, and the complete
valve chamber 150 will still be beneficially swept by the
controllable fluid flow. The valve design illustrated in FIGS.
4A-4D substantially eliminates any concerns about internal dead
space versus swept volumes and may also improve dynamic response of
the exemplary valve design. The flow-through control plate enables
the use of nested orifice ridges 120,121 that together create total
control gap length nearly double the circumference of a single
large orifice while substantially reducing the area which must be
closed to achieve shut-off. This combination provides
high-conductance with low closing force. It should be appreciated
that in a diaphragm sealed valve of the type illustrated in FIGS.
4A-4D, the amount of axial displacement (e.g., upward and downward
in the cross-sectional view of FIG. 4B) of the control plate 200 is
quite limited (e.g., about 50 .mu.m for a piezoelectric actuated
valve and about 200 .mu.m for a solenoid actuated valve). The use
of nested orifice ridges thus permits higher conductance that is
nearly double that which could be achieved with only a single
orifice ridge.
[0070] Another example of a flow-through control plate 300 is
illustrated in FIGS. 3A-3D and comprises a control plate body 341
formed as a basically circular disk having one or more features on
the opposed sides of the disk. Those features may include a central
thru-hole 343, a spherical pocket (or recess) 345, and one or more
angled top holes 347. The spherical pocket 345 would typically be
centered and usually be formed in a flat disk side intended to face
the orifice ridges 120,121. The one or more angled top holes 347
may pierce the control plate body 341 from the spherical pocket 345
to the opposite disk side and thereby leave one or more webs 349
between the central thru-hole 343 and the rest of the control plate
body 341. The webs 349 bridge over the spherical pocket 345. The
spherical pocket 345 is useful when drilling the angled top holes
347 because entry of those angled holes may be locally
perpendicular to the pocket surface thereby minimizing drill wobble
or bending. It should be appreciated that rather than a spherical
pocket or recess 345, a suitable angled conical pocket or recess
could alternatively be used to aid in drilling the angled top holes
347. The angled top holes 347 constitute fluid passageways through
which fluid may pass from one side of the control plate body 341 to
the opposite side without need to transit around the outside
diameter periphery. As illustrated in FIGS. 5A-5D, the control
plate 300 maybe be mounted onto a stub of the control shaft 182 and
thereby suspended within the valve chamber 150. Any suitable
mounting method may be used such as press fit (see, for example,
FIGS. 9A-9D), swaging the stub head, a threaded fastener, welding,
or similar design choices according to the desires of a
practitioner, so long as the fluid passageways through the angled
top holes 347 are not obscured. It should be appreciated that,
rather than the control plate being mounted to the stub of the
control shaft 182 using a thru-hole 343 as shown in FIGS. 3A-3D, a
blind hole mounting may instead be used as depicted in FIGS.
9A-9D.
[0071] The manner of controlling fluid flow for the valve assembly
illustrated in FIGS. 5A-5D, using the exemplary flow-through
control plate 300, may be further understood as essentially
identical to that described for the valve assembly illustrated in
FIGS. 4A-4D using the earlier mentioned exemplary flow-through
control plate 200. A controllable first fluid portion may transit
directly to the intermediate valve chamber portion 154 through a
first control gap (not shown) from the inner valve chamber portion
159 from whence it may exit through an offset second fluid conduit
aperture 116 in fluid communication with the second fluid conduit
114. Particular to the flow-through control plate design 300, a
controllable second fluid portion may transit from the inner valve
chamber portion 159 through the angled top holes 347 of the control
plate 300 to sweep through the upper valve chamber portion 157 into
the outer valve chamber portion 158, from whence the second fluid
portion may exit through the second control gap into the
intermediate valve chamber portion 154. The flow-through control
plate 300 also needs to have a continuous uninterrupted surface
region, on the lower flat side of the disk shaped body 341,
sufficient to span between contacting the large 120 and small 121
orifice ridges and cover the entire intermediate valve chamber
portion 154. Designers will also appreciate the described
directions of fluid flow are used for convenience and clarity but
are not limiting in the exemplary valve assembly illustrated in
FIGS. 5A-5D. Fluid may flow in an opposite direction and the
complete valve chamber 150 will still be beneficially swept by the
controllable fluid flow. The valve assembly design illustrated in
FIGS. 5A-5D substantially eliminates any concerns about internal
dead space versus swept volumes and may also improve dynamic
response of the exemplary valve design. The flow-through control
plate enables the use of nested orifice ridges 120,121 that
together create total control gap length nearly double the
circumference of a single large orifice while substantially
reducing the area which must be closed to achieve shut-off. This
combination provides high-conductance with low closing force.
[0072] A representative example of another high-conductance valve
body 490 having nested orifice ridges 420, 421 is illustrated in
FIGS. 6A-6D. A more complete exemplary valve assembly 400 may have
a topworks including a valve housing 460 removably joined to the
valve body 490 by deforming a metallic gasket 465 as a leak-free
assembly further illustrated in FIGS. 8A-8D. The topworks may
include an actuator (not shown) chosen for a specific application.
For example, a pneumatic actuator might be used for a simple on-off
high-conductance valve, but a piezoelectric actuator might be used
for a proportional control high-conductance valve adapted to a mass
flow controller electronics system. Open cavities 454, 458, 459
formed in an upper surface of the valve body 490 may be considered
as lower portions of a valve chamber while an upper portion 457 of
the valve chamber is formed in a lower surface of the valve housing
460 thereabove. A large orifice ridge 420 formed as a generally
circular upward projection offset within the valve body 490
separates an outer valve chamber portion 458 from an intermediate
valve chamber portion 454 which the large orifice ridge 420
surrounds. A nested small orifice ridge 421 also formed as a
circular upward projection from the valve body 490 further
separates an inner valve chamber portion 459 from the intermediate
valve chamber portion 454 which surrounds it. A gasket sealing
region 464 may be formed in the upper surface of the valve body 490
to receive the metallic gasket 465 adjacent the periphery of the
outer valve chamber portion 458.
[0073] The exemplary valve 400 may further comprise a first fluid
conduit 417 (typically an inlet) and a second fluid conduit 414
(typically an outlet), both which conduits communicate fluid to the
valve chamber, a valve chamber sealing diaphragm 470, and a control
element moveable by deflection of the valve chamber sealing
diaphragm 470. The control element may be comprised of a control
plate 600 (further described below) including a valve stroke
amplifier mechanism affixed to a control shaft 482 that is affixed
to the diaphragm 470. In the design of the exemplary valve 400, a
first fluid conduit aperture 419 provides fluid communication
between the outer valve chamber portion 458 and the first fluid
conduit 417. Similarly, a second fluid conduit aperture 416
provides fluid communication between the intermediate valve chamber
portion 454 and the second fluid conduit 414. In the present
illustrations of FIGS. 8A-8D the valve assembly 400 is completely
closed in a shut-off no-flow condition so the control plate 600 is
shown contacting both the large orifice ridge 420 and the small
orifice ridge 421. Designers will appreciate the first fluid
conduit 417 and the second fluid conduit 414 may provide fluid
passage to a surface mount component interface rather than the tube
stubs illustrated. The K1S and W-Seal are surface mount component
interface examples well known in semiconductor capital equipment
design and therefore not illustrated in the drawings of this
disclosure. The parts comprising said valve may be constructed from
materials chosen for desired chemical inertness relative to the
fluids to be handled and may include, for example, stainless
steels, Monel.RTM. metals, titanium alloys, Hastelloy.RTM. alloys,
Elgiloy.RTM., brass, or polymers such as Teflon.RTM., Kel-F.RTM.,
Vespel.RTM., Kynar.RTM., and combinations of metals and polymers
either separate or together. For example, a type 316L stainless
steel valve body 490 may be used with a Hastelloy.RTM. nickel alloy
control plate 600 and an Elgiloy.RTM. cobalt alloy sealing
diaphragm 470.
[0074] Another example of a flow-through control plate 600
illustrated in FIGS. 7A-7F, and included in FIGS. 8A-8D, comprises
a control plate body 640 and a Valve Stroke Amplification Mechanism
amplifier disc 641 as described in U.S. patent application Ser. No.
14/932,086 filed by the present inventor Kim Ngoc Vu on Nov. 4,
2015. As illustrated in FIGS. 7A-7F the control plate body 640 is
formed as a basically circular disk with features which include a
central thru-hole 642, a ring-shaped groove 644, and a top relief
646. The ring-shaped groove 644 and top relief 646 are formed in
the disk side opposite the flat side intended to face one or more
orifice ridges. The top relief 646 is placed to intersect the
ring-shaped groove 644 and a portion of the central thru-hole 642
thereby providing an open fluid passageway through which fluid may
pass from one side of the control plate body 640 to the opposite
side without need to transit around its outside diameter periphery.
The amplifier disc 641 is described in detail within the cited U.S.
patent application Ser. No. 14/932,086. Amplifier disc features of
interest for the instant application include a lifting hole 643, a
passive segment, an active segment 649, a void passageway 639
adjacent the active segment, attachment points 645, and torsion
bars 648. The control plate body 640 and amplifier disc 641 are
attached to each other by welding at the two attachment points 645
whereby the torsion bars 648 and active segment 649 constitute a
web that bridges over a portion of the top relief 646 and
ring-shaped groove 644. A portion of the void passageway 639 is
directly next to the top relief 646 thereby providing a fluid
pathway through which fluid may pass from one side of the control
plate 600 to the opposite side without need to transit around the
outside diameter periphery of the assembly. As illustrated in FIGS.
8A-8D, the control plate 600 may be mounted onto a stub of the
control shaft 482 using the stroke amplifier disc lifting hole 643
and thereby suspended within the valve chamber. Any suitable
mounting method may be used such as press fit, swaging the stub
head, a threaded fastener, welding, or similar design choices
according to the desires of a practitioner, so long as the fluid
passageway through the top relief 646 and amplifier disc void
passageway 639 is not obscured.
[0075] A force from a topworks actuator (not shown) applied at the
amplifier disc lifting hole 643 in the active segment 649 will be
communicated to the attachment points 645 by the torsion bars 648.
When such applied force is a lifting instance, the passive segment
647 will hold downward an off center first portion of the
flow-through control plate body 640 while a diametrically opposite
second portion is lifted upward by the diametrical force imparted
at the attachment points 645. The resulting motion will open a
wedge-like gap between the control plate planar bottom surface and
both the large 420 and small 421 orifice ridges in the exemplary
valve 400 illustrated in FIGS. 8A-8D. When the valve 400 is in a
closed condition (as shown in FIGS. 8A-8D) the various amplifier
disc elements are nominally coplanar and the flow-through control
plate body 640 contacts the large 420 and small 421 orifice
ridges.
[0076] The manner of controlling fluid flow may be further
understood by considering the outer valve chamber portion 458 fed
by the first fluid conduit aperture 419 in fluid communication with
the first fluid conduit 417, whereby at least a portion of the
control plate 600 may be moved toward or away from the large
orifice ridge 420 to create a wedge-like first control gap (not
shown) through which a first fluid portion may controllably flow.
The controllable first fluid portion may transit directly from the
outer valve chamber portion 458 through the first control gap into
the intermediate valve chamber portion 454 from whence it may exit
through the second fluid conduit aperture 416 in fluid
communication with the second fluid conduit 414. In the present
example valve 400, an actuator (not shown) may apply a force to the
control shaft 482 to deflect the diaphragm 470 and thereby modulate
the conductance through the valve 400 by changing the first control
gap. It should be appreciated that while the valve 400 is closed,
fluid may pass from the first fluid conduit 417, through the first
fluid conduit aperture 419, around an outer periphery of the
control plate 600, into the outer valve chamber portion 458 and the
upper portion 457 of the valve chamber and through the holes in the
control plate 600 to the inner valve chamber portion 459, but
cannot go further. Thus, when the valve 400 is closed, fluid cannot
pass from the first fluid conduit 417 to the second fluid conduit
414.
[0077] Simultaneous with the preceding described flow of the first
fluid portion, moving at least a portion of the control plate 600
toward or away from the small orifice ridge 421 similarly creates a
wedge-like second control gap (not shown) through which a second
fluid portion may controllably flow. The controllable second fluid
portion may transit from the outer valve chamber portion 458
sweeping through the upper valve chamber portion 457 and then
through the control plate 600, via the amplifier disc void
passageway 639 and the top relief 646 of the control plate body
640, into the inner valve chamber portion 459, and then the
controllable second fluid portion may transit from the inner valve
chamber portion 459 through the second control gap into the
intermediate valve chamber portion 454 from whence the second fluid
portion may exit through the second conduit aperture 416 in fluid
communication with the second fluid conduit 414. Thus in the
present example valve 400, the actuator (not shown) applying a
force to the control shaft 482 and deflecting the diaphragm 470
thereby additionally modulates the conductance through the valve
400 by changing the second control gap. Designers will also
appreciate the described directions of fluid flow are used for
convenience and clarity but are not limiting in the exemplary valve
assembly illustrated in FIGS. 8A-8D. Fluid may flow in an opposite
direction and the complete valve chamber 450 will still be
beneficially swept by the controllable fluid flow. The valve design
illustrated in FIGS. 8A-8D substantially eliminates any concerns
about internal dead space versus swept volumes and may also improve
dynamic response of the exemplary valve design. The flow-through
control plate enables the use of nested orifice ridges 420,421 that
together create total control gap length nearly double the
circumference of a single large orifice while substantially
reducing the area which must be closed to achieve shut-off. This
combination provides high-conductance with low closing force.
[0078] A representative example of another high-conductance valve
body 890 having two nested groups of centered concentric orifice
ridges 820, 821, 822, 823 is illustrated in FIGS. 10A-10D. A more
complete exemplary valve assembly 1000 may have a topworks
including a valve housing 860 removably joined to the valve body
890 by deforming a metallic gasket 865 as a leak-free assembly
further illustrated in FIGS. 11A-11D. The topworks may include an
actuator (not shown) chosen for a specific application. For
example, a manual actuator might be used for a simple on-off
high-conductance valve, but a piezoelectric or solenoid actuator
might be used for a proportional control high-conductance valve
adapted to a mass flow controller electronics system. Open cavities
852, 854, 856, 858, 859 formed in an upper surface of the valve
body 890 may be considered as lower portions of a valve chamber
while an upper portion 857 of the valve chamber is formed in a
lower surface of the valve housing 860 thereabove. A largest
orifice ridge 820 formed as a circular upward projection from the
valve body 890 separates an outer valve chamber portion 858 from a
first intermediate valve chamber portion 856 which is surrounded by
the largest orifice ridge 820. A generally concentric first smaller
orifice ridge 821 is also formed as a circular upward projection
from the valve body 890 surrounded by the largest orifice ridge 820
and further separates an enclosed second intermediate valve chamber
portion 854 from the first intermediate valve chamber portion 856.
A generally concentric second smaller orifice ridge 822 is also
formed as a circular upward projection from the valve body 890
surrounded by the first smaller orifice ridge 821 and further
separates an enclosed third intermediate valve chamber portion 852
from the second intermediate valve chamber portion 854. A generally
concentric smallest orifice ridge 823 is also formed as a circular
upward projection from the valve body 890 surrounded by the second
smaller orifice ridge 822 and further separates an inner valve
chamber portion 859 from the third intermediate valve chamber
portion 852. A gasket sealing region 864 may be formed in the upper
surface of the valve body 890 to receive the metallic gasket 865
adjacent the periphery of the outer valve chamber portion 858.
[0079] The exemplary valve 1000 may further comprise a first fluid
conduit 810 (typically an inlet) and a second fluid conduit 814
(typically an outlet), both which conduits communicate fluid to the
valve chamber, a valve chamber sealing diaphragm 870, and a control
element moveable by deflection of the valve chamber sealing
diaphragm 870. The moveable control element may be additionally
comprised of a control plate 900 (further described below) affixed
to a control shaft 882 that is affixed to the diaphragm 870. In the
design of the exemplary valve 1000, a first fluid conduit aperture
812 provides fluid communication between the inner valve chamber
portion 859 and the first fluid conduit 810. Similarly, one or more
second fluid conduit apertures 816 provide fluid communication
between the first intermediate valve chamber portion 856 and the
second fluid conduit 814. Also provided are one or more third inner
fluid conduit apertures 818 which provide fluid communication
between the third intermediate valve chamber portion 852 and the
second fluid conduit 814. In the present illustration of FIGS.
11A-11D, the valve 1000 is completely closed in a shut-off no-flow
condition so the control plate 900 is shown contacting all four
orifice ridges: largest 820, first smaller 821, second smaller 822,
and smallest 823. Designers will appreciate the first fluid conduit
810 and second fluid conduit 814 may provide fluid passage to a
surface mount component interface rather than the tube stubs
illustrated. The K1S and W-Seal are surface mount component
interface examples well known in semiconductor capital equipment
design and therefore not illustrated in the drawings of this
disclosure. The parts comprising said valve may be constructed from
materials chosen for desired chemical inertness relative to the
fluids to be handled and may include, for example, stainless
steels, Monel.RTM. metals, titanium alloys, Hastelloy.RTM. alloys,
Elgiloy.RTM., brass, or polymers such as Teflon.RTM., Kel-F.RTM.,
Vespel.RTM., Kynar.RTM., and combinations of metals and polymers
either separate or together. For example, a type 316L stainless
steel valve body 890 may be used with a Hastelloy.RTM. nickel alloy
control plate 900 and an Elgiloy.RTM. cobalt alloy sealing
diaphragm 870. Alternatively, the valve body, sealing diaphragm,
and control plate body, may all be made from the same stainless
steel alloy.
[0080] An example of a flow-through control plate 900 illustrated
in FIGS. 9A-9D comprises a control plate body 940 formed as a
basically circular disk having one or more features on the opposed
sides of the disk. Those features may include a central mounting
hole 942 (blind or through), one or more first middle thru-holes
944, and one or more second middle thru-holes 946. As illustrated
in FIGS. 11A-11D, the control plate 900 may be mounted onto a stub
of the control shaft 882 and thereby suspended within the valve
chamber. Any suitable mounting method may be used such as press
fit, swaging the head of the stub, a threaded fastener, welding, or
similar design choices according to the desires of a practitioner,
so long as the fluid passageways formed by the first middle 944 and
second middle 946 thru-holes are not obscured. It should be
appreciated that, rather than the control plate 900 being mounted
to the stub of the control shaft 882 using a blind hole as shown in
FIGS. 9A-9D, a thru-hole mounting may instead be used as depicted
in FIGS. 2A-2D, 3A-3D, and 7A-7F.
[0081] The one or more first middle thru-holes 944 pierce the
control plate body 940 and typically are uniformly spaced around a
constant diameter first circle surrounding the central mounting
hole 942. The diameter of the first circle and diameter of the
first middle thru-holes 944 are chosen so those thru-holes only
cover the inner valve chamber portion 859 and do not overlap the
adjacent smallest orifice ridge 823. Angle drilling the first
middle thru-holes 944, as illustrated in FIGS. 9A-9D and FIGS.
11A-11D, allows use of larger diameter holes while not overlapping
the smallest orifice ridge 823. It should be appreciated that
although not shown, a spherical pocket or recess may be used to aid
in drilling of the first middle thru-holes 944 in the manner
discussed previously with respect to FIGS. 3A-3D. The first middle
thru-holes 944 constitute fluid passageways through which fluid may
pass from one side of the control plate body 940 to the opposite
side without need to transit around the outside diameter periphery.
More particularly, the first middle thru-holes 944 fluidly connect
the inner valve chamber portion 859 with the upper valve chamber
portion 857. Webs of material 945 between the one or more adjacent
first middle thru-holes 944 provide mechanical connection from the
central mounting hole 942 to a continuous uninterrupted first
surface region 941, on the lower flat side of the disk shaped body
940, that first surface region 941 having radial extent sufficient
to span between contacting the second smaller orifice ridge 822 and
the smallest orifice ridge 823 while covering the entire third
intermediate valve chamber portion 852.
[0082] The one or more second middle thru-holes 946 pierce the
control plate body 940 and typically are uniformly spaced around a
constant diameter second circle further surrounding the first
surface region 941 and first middle thru-holes 944. The diameter of
the second circle and diameter of the second middle thru-holes 946
are chosen so those thru-holes only cover the second intermediate
valve chamber portion 854 and do not overlap the adjacent first
smaller orifice ridge 821 nor the second smaller orifice ridge 822.
The second middle thru-holes 946 constitute fluid passageways
through which fluid may pass from one side of the control plate
body 940 to the opposite side without need to transit around the
outside diameter periphery. More particularly, the second middle
thru-holes 946 fluidly connect the second intermediate valve
chamber portion 854 with the upper valve chamber portion 857. Webs
of material 947 between the one or more adjacent middle thru-holes
946 provide mechanical connection from the first surface region 941
to a continuous uninterrupted second surface region 943, on the
lower flat side of the disk shaped body 940, that second surface
region 943 having radial extent sufficient to span between
contacting the largest orifice ridge 820 and first smaller orifice
ridge 821 while covering the entire first intermediate valve
chamber portion 856.
[0083] The manner of controlling fluid flow may be further
understood by considering the inner valve chamber portion 859
surrounded by the smallest orifice ridge 823, being fed by the
first fluid conduit aperture 812 in fluid communication with the
first fluid conduit 810, whereby at least a portion of the control
plate 900 may be moved toward or away from the smallest orifice
ridge 823 to create a first control gap (not shown) through which a
first fluid portion may controllably flow. The controllable first
fluid portion may transit directly into the third intermediate
valve chamber portion 852 from whence it may exit through one or
more third fluid conduit apertures 818 in fluid communication with
the second fluid conduit 814. A second fluid portion may transit
from the inner valve chamber portion 859 upward through the one or
more first middle thru-holes 944 into the upper portion 857 of the
valve chamber, and therefrom transit downward through the one or
more second middle thru-holes 946 into the second intermediate
valve chamber portion 854. Moving at least a portion of the control
plate 900 toward or away from the second smaller orifice ridge 822
will create a second control gap (not shown) through which the
second fluid portion may also controllably flow directly into the
third intermediate valve chamber portion 852 from the second
intermediate valve chamber portion 854 and then exit through one or
more third fluid conduit apertures 818 in fluid communication with
the second fluid conduit 814. In the present example valve 1000, an
actuator (not shown) may apply a force to the control shaft 882 to
deflect the diaphragm 870 and thereby modulate the conductance
through the valve 1000 by changing the first control gap and the
second control gap.
[0084] Simultaneous with the preceding described flow of the first
fluid portion and second fluid portion, moving at least a portion
of the control plate 900 toward or away from the largest orifice
ridge 820 similarly creates a third control gap (not shown) through
which a third fluid portion may controllably flow. The controllable
third fluid portion may transit from the inner valve chamber
portion 859 upward through the one or more first middle thru-holes
944 of the control plate 900 and sweep through the upper valve
chamber portion 857 into the outer valve chamber portion 858 from
whence the third fluid portion may exit through the third control
gap into the first intermediate valve chamber portion 856. Upon
reaching the first intermediate valve chamber portion 856 the
controllable third fluid portion may exit through the one or more
second fluid conduit apertures 816 in fluid communication with the
second fluid conduit 814. A fourth fluid portion may transit from
the inner valve chamber portion 859 upward through the one or more
first middle thru-holes 944 into the upper portion 857 of the valve
chamber, and therefrom transit downward through the one or more
second middle thru-holes 946 into the second intermediate valve
chamber portion 854. Moving at least a portion of the control plate
900 toward or away from the first smaller orifice ridge 821 will
create a fourth control gap (not shown) through which the fourth
fluid portion may also controllably flow directly into the first
intermediate valve chamber portion 856 from whence it may exit
through one or more second inner fluid conduit apertures 816 in
fluid communication with the second fluid conduit 814. Thus in the
present example valve 1000, the actuator (not shown) applying a
force to the control shaft 882 and deflecting the diaphragm 870
thereby additionally modulates the conductance through the valve
1000 by changing the third control gap and the fourth control gap.
It should be appreciated that while the valve 1000 is closed, fluid
may pass through the holes in the control plate 900 and into the
upper portion 857 of the valve chamber, the outer valve chamber
portion 858 and the second intermediate valve chamber portion 854,
but cannot go further. Thus, when the valve 1000 is closed, fluid
cannot pass from the first fluid conduit 810 to the second fluid
conduit 814.
[0085] Designers may appreciate the largest 820 and first smaller
821 orifice ridges need merely be nested rather than exactly
concentric; moreover, the nested pair of orifice ridges 820,821 may
be placed asymmetrically with respect to the shape and dimensions
of the internal valve chamber. The flow-through control plate 900
of course primarily needs to have a continuous uninterrupted second
surface region 943, on the lower flat side of the disk shaped body
940, sufficient to span between contacting the largest 820 and
first smaller 821 orifice ridges and cover the entire first
intermediate valve chamber portion 856. In similar fashion the
second smaller 822 and smallest 823 orifice ridges need merely be
nested rather than exactly concentric; moreover, the nested pair of
orifice ridges 822,823 may be placed asymmetrically with respect to
the shape and dimensions of the internal valve chamber 850. The
flow-through control plate 900 of course primarily needs to have a
continuous uninterrupted first surface region 941, on the lower
flat side of the disk shaped body 940, sufficient to span between
contacting the second smaller 822 and smallest 823 orifice ridges
and cover the entire third intermediate valve chamber portion 852.
Designers will also appreciate the described directions of fluid
flow, progressing from the first fluid conduit 810 to the second
fluid conduit 814, are used for convenience and clarity but are not
limiting. Fluid may flow in an opposite direction, from the second
fluid conduit 814 to the first fluid conduit 810, and the complete
valve chamber will still be beneficially swept by the controllable
fluid flow. The valve design illustrated in FIGS. 11A-11D
substantially eliminates any concerns about internal dead space
versus swept volumes and may also improve dynamic response of the
exemplary valve design. The flow-through control plate enables the
use of nested orifice ridges 820,821,822,823 that together create
total control gap length about triple the circumference of a single
large orifice while substantially reducing the area which must be
closed to achieve shut-off. This combination provides
high-conductance with low closing force.
[0086] Having thus described several aspects of at least one
embodiment of this invention, it is to be appreciated various
alterations, modifications, and improvements will readily occur to
those skilled in the art. Such alterations, modifications, and
improvements are intended to be part of this disclosure, and are
intended to be within the scope of the invention. Accordingly, the
foregoing description and drawings are by way of example only.
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