U.S. patent application number 16/047952 was filed with the patent office on 2018-11-29 for reducing autodoping of iii-v semiconductors by atomic layer epitaxy (ale).
The applicant listed for this patent is International Business Machines Corporation. Invention is credited to Guy M. Cohen, Christian Lavoie.
Application Number | 20180342392 16/047952 |
Document ID | / |
Family ID | 57684407 |
Filed Date | 2018-11-29 |
United States Patent
Application |
20180342392 |
Kind Code |
A1 |
Cohen; Guy M. ; et
al. |
November 29, 2018 |
Reducing Autodoping of III-V Semiconductors By Atomic Layer Epitaxy
(ALE)
Abstract
In one aspect, a method for forming a doped III-V semiconductor
material on a substrate includes the steps of: (a) forming a first
monolayer on the substrate, wherein the first monolayer comprises
at least one group III or at least one group V element; and (b)
forming a doped second monolayer on a side of the first monolayer
opposite the substrate, wherein the second monolayer comprises
either i) at least one group V element if the first monolayer
comprises at least one group III element, or ii) at least one group
III element if the first monolayer comprises at least one group V
element, wherein a dopant is selectively introduced only during
formation of the second monolayer, and wherein steps (a) and (b)
are performed using atomic layer epitaxy. Doped III-V semiconductor
materials are also provided.
Inventors: |
Cohen; Guy M.; (Ossining,
NY) ; Lavoie; Christian; (Pleasantville, NY) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
International Business Machines Corporation |
Armonk |
NY |
US |
|
|
Family ID: |
57684407 |
Appl. No.: |
16/047952 |
Filed: |
July 27, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
14755636 |
Jun 30, 2015 |
10062567 |
|
|
16047952 |
|
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
C30B 29/40 20130101;
H01L 21/02576 20130101; H01L 21/02549 20130101; H01L 21/02543
20130101; H01L 21/02392 20130101; H01L 21/0262 20130101; C30B
25/165 20130101; H01L 21/02579 20130101; H01L 21/02546 20130101;
H01L 21/0254 20130101 |
International
Class: |
H01L 21/02 20060101
H01L021/02; C30B 29/40 20060101 C30B029/40; C30B 25/16 20060101
C30B025/16 |
Claims
1. A method for forming a doped III-V semiconductor material on a
substrate, the method comprising the steps of: (a) forming a first
monolayer on the substrate, wherein the first monolayer comprises
at least one group III or at least one group V element; and (b)
forming a doped second monolayer on a side of the first monolayer
opposite the substrate by first depositing a dopant onto the first
monolayer and then depositing either i) at least one group V
element if the first monolayer comprises at least one group III
element, or ii) at least one group III element if the first
monolayer comprises at least one group V element onto the first
monolayer, wherein steps (a) and (b) are performed using atomic
layer epitaxy.
2. The method of claim 1, wherein the substrate comprises an indium
phosphide substrate.
3. The method of claim 1, wherein the step (a) comprises the steps
of: contacting the substrate with at least one group III or at
least one group V element vapor phase epitaxy source under
conditions sufficient to form the first monolayer on the substrate;
and purging any remaining reactants.
4. The method of claim 3, wherein the conditions sufficient to form
the first monolayer on the substrate comprise a temperature of from
about 350.degree. C. to about 500.degree. C., and ranges
therebetween, and a duration of from about 1 second to about 20
seconds, and ranges therebetween.
5. The method of claim 3, wherein the purging is performed using an
inert gas flow.
6. The method of claim 5, wherein the inert gas flow comprises a
hydrogen gas flow.
7. The method of claim 3, wherein the III-V semiconductor material
comprises indium gallium arsenide (InGaAs) and, in the step (a),
the substrate is contacted with at least one group V element vapor
phase epitaxy source.
8. The method of claim 7, wherein the at least one group V element
vapor phase epitaxy source comprises tertiary butyl arsine.
9. The method of claim 1, wherein the step (b) comprises the step
of: contacting the substrate and the first monolayer with a dopant
source under conditions sufficient to form a non-continuous
monolayer of dopant atoms on the first monolayer.
10. The method of claim 9, wherein the conditions sufficient to
form the non-continuous monolayer of dopant atoms on the first
monolayer comprise a temperature of from about 350.degree. C. to
about 500.degree. C., and ranges therebetween, and a duration of
from about 1 second to about 20 seconds, and ranges
therebetween.
11. The method of claim 1, wherein the step (b) comprises the steps
of: contacting the substrate with at least one group III or at
least one group V element vapor phase epitaxy source and a source
of the dopant under conditions sufficient to form the second
monolayer on the substrate; and purging any remaining
reactants.
12. The method of claim 11, wherein the conditions sufficient to
form the second monolayer on the substrate comprise a temperature
of from about 350.degree. C. to about 500.degree. C., and ranges
therebetween, and a duration of from about 1 second to about 20
seconds, and ranges therebetween.
13. A method for forming a doped III-V semiconductor material on a
substrate, the method comprising the steps of: (a) forming a first
monolayer on the substrate, wherein the first monolayer comprises
at least one group III or at least one group V element, and wherein
the step (a) comprises the steps of: contacting the substrate with
at least one group III or at least one group V element vapor phase
epitaxy source under conditions sufficient to form the first
monolayer on the substrate, and purging any remaining reactants;
and (b) forming a doped second monolayer on a side of the first
monolayer opposite the substrate by first depositing a dopant onto
the first monolayer and then depositing either i) at least one
group V element if the first monolayer comprises at least one group
III element, or ii) at least one group III element if the first
monolayer comprises at least one group V element onto the first
monolayer, wherein the step (b) comprises the steps of: contacting
the substrate with at least one group III or at least one group V
element vapor phase epitaxy source and a source of the dopant under
conditions sufficient to form the second monolayer on the
substrate, and purging any remaining reactants, wherein steps (a)
and (b) are performed using atomic layer epitaxy.
14. The method of claim 13, wherein the substrate comprises an
indium phosphide substrate.
15. The method of claim 13, wherein the conditions sufficient to
form the first monolayer on the substrate comprise a temperature of
from about 350.degree. C. to about 500.degree. C., and ranges
therebetween, and a duration of from about 1 second to about 20
seconds, and ranges therebetween.
16. The method of claim 13, wherein the conditions sufficient to
form the second monolayer on the substrate comprise a temperature
of from about 350.degree. C. to about 500.degree. C., and ranges
therebetween, and a duration of from about 1 second to about 20
seconds, and ranges therebetween.
17. A doped III-V semiconductor material, comprising: at least one
first monolayer, wherein the at least one first monolayer comprises
only group V atoms; and at least one second monolayer on the at
least one first monolayer, wherein the at least one second
monolayer comprises only group III atoms and dopant atoms, such
that the dopant atoms occupy only group III sites in the doped
III-V semiconductor material.
18. The doped III-V semiconductor material of claim 17, wherein the
at least one first monolayer is disposed on a substrate.
19. The doped III-V semiconductor material of claim 17, wherein the
substrate comprises an indium phosphide substrate.
20. The doped III-V semiconductor material of claim 17, wherein the
dopant atoms comprise silicon, tin, germanium or carbon atoms.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of U.S. application Ser.
No. 14/755,636 filed on Jun. 30, 2015, the contents of which are
incorporated by reference herein.
FIELD OF THE INVENTION
[0002] The present invention relates to doping of III-V
semiconductor materials, and more particularly, to techniques for
reducing autodoping of III-V semiconductor materials using atomic
layer epitaxy (ALE).
BACKGROUND OF THE INVENTION
[0003] Making an Ohmic contact to a semiconductor can be
challenging. One factor for controlling the contact resistivity is
to ensure that the interface (e.g., between the metal and the
semiconductor material) is as clean as possible. Thus proper
surface cleaning and preparation steps can be implemented prior to
depositing the metal over the semiconductor.
[0004] Another factor for improving the contact resistivity is to
increase the amount of doping in the semiconductor material. Doping
can be used to narrow the Schottky barrier that is formed at the
metal-semiconductor interface so carriers can tunnel through the
barrier. Doping of III-V materials can, however, present some
notable challenges. Namely, when doping a III-V material there is
generally a preference as to whether the dopant substitutes a group
III atom or a group V atom in the material. However, since III-V
materials contain both group III and group V elements, it is not
always easy to predict which atoms (group III or group V) the
dopant will replace.
[0005] For instance, most commonly used n-type dopants for III-V
materials systems are group IV elements such as silicon (Si) and
tin (Sn). The group IV dopants are known as amphoteric dopants
since they can occupy a group-III site and provide an electron
(i.e., an n-type dopant) or they can occupy a group-V site and
"give a hole" (i.e., a p-type dopant). Considering the example of
the III-V material indium gallium arsenide (InGaAs), at low doping
levels Si will be an n-type dopant (occupying group-III sites).
However, as more Si is added to the InGaAs, the Si atoms will also
populate group-V sites and auto-compensate (counter dope) the
InGaAs. As a result, it is experimentally observed that at doping
levels of about 1.times.10.sup.19 to 3.times.10.sup.19 cm.sup.-3,
the carrier concentration is saturated even if more Si (chemical
doping) is added to InGaAs.
[0006] Thus, III-V semiconductor material growth techniques that
reduce auto-compensation would be desirable.
SUMMARY OF THE INVENTION
[0007] The present invention provides techniques for reducing
autodoping of III-V semiconductor materials using atomic layer
epitaxy (ALE). In one aspect of the invention, a method for forming
a doped III-V semiconductor material on a substrate is provided.
The method includes the steps of: (a) forming a first monolayer on
the substrate, wherein the first monolayer comprises at least one
group III or at least one group V element; and (b) forming a doped
second monolayer on a side of the first monolayer opposite the
substrate, wherein the second monolayer comprises either i) at
least one group V element if the first monolayer comprises at least
one group III element, or ii) at least one group III element if the
first monolayer comprises at least one group V element, wherein a
dopant is selectively introduced only during formation of the
second monolayer, and wherein steps (a) and (b) are performed using
atomic layer epitaxy.
[0008] In another aspect of the invention, another method for
forming a doped III-V semiconductor material on a substrate is
provided. The method includes the steps of: (a) forming a first
monolayer on the substrate, wherein the first monolayer comprises
at least one group III or at least one group V element; and (b)
forming a doped second monolayer on a side of the first monolayer
opposite the substrate by first depositing a dopant onto the first
monolayer and then depositing either i) at least one group V
element if the first monolayer comprises at least one group III
element, or ii) at least one group III element if the first
monolayer comprises at least one group V element onto the first
monolayer, wherein steps (a) and (b) are performed using atomic
layer epitaxy.
[0009] In yet another aspect of the invention, a doped III-V
semiconductor material is provided. the doped III-V semiconductor
material includes at least one first monolayer, wherein the at
least one first monolayer comprises only group V atoms; and at
least one second monolayer on the at least one first monolayer,
wherein the at least one second monolayer comprises only group III
atoms and dopant atoms, such that the dopant atoms occupy only
group III sites in the doped III-V semiconductor material.
[0010] A more complete understanding of the present invention, as
well as further features and advantages of the present invention,
will be obtained by reference to the following detailed description
and drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] FIG. 1 is a diagram illustrating an exemplary methodology
for forming a doped III-V semiconductor material on a substrate
according to an embodiment of the present invention;
[0012] FIG. 2 is a diagram illustrating an exemplary methodology
for forming n.sup.++ InGaAs on a substrate using ALE according to
an embodiment of the present invention;
[0013] FIG. 3 is a diagram illustrating advantages of the present
ALE-based doping techniques as compared to conventional processes
such as metalorganic vapor phase chemical vapor deposition (MOCVD)
according to an embodiment of the present invention;
[0014] FIG. 4 is a diagram illustrating an exemplary methodology
for forming n.sup.++ InGaAs on a substrate using ALE wherein the
dopant is introduced separately from the group III constituents
according to an embodiment of the present invention; and
[0015] FIG. 5 is a diagram illustrating an exemplary methodology
for forming n.sup.++ InGaAs on a substrate using ALE wherein the
group III and group V elements are each introduced individually in
separate monolayers according to an embodiment of the present
invention.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0016] Provided herein are atomic layer epitaxy (ALE)-based
techniques for both forming and in-situ doping a III-V
semiconductor material, wherein the III-V semiconductor material is
grown layer-by-layer, and wherein the dopant is selectively
introduced during (or immediately before) formation of a particular
one of the layers for which in-situ doping is desired. As provided
above, with amphoteric dopants such as group IV dopants, it can be
difficult to control whether the dopant occupies a group-III site
or a group-V site since auto-compensation can occur.
Advantageously, with the present techniques, the dopant is
selectively introduced when there is only either group-III or
group-V sites available (but not both) thus effectively forcing the
dopant to occupy a particular site, and generally eliminating the
possibility for auto-compensation to occur.
[0017] To use a simple example to illustrate this concept, if a
layer containing a group V element(s) (a group V layer) is formed
separately from another layer containing a group III element(s) (a
group III layer), then in order to achieve n-type (n.sup.++)
doping, the dopant can be selectively introduced only during growth
of the group III layer. The dopant will thus be forced to occupy
group-III sites since only group III vacancies are available to be
populated with the dopant atom at the time of doping.
[0018] A general overview of the present techniques is now provided
by way of reference to FIG. 1 which illustrates an exemplary
methodology 100 for forming a doped III-V semiconductor material on
a substrate. The term III-V semiconductor material (or simply III-V
material), as used herein, refers to a material that includes at
least one group III element and at least one group V element from
the periodic table of elements. By way of example only, suitable
III-V materials include, but are not limited to, one or more of
aluminum gallium arsenide (AlGaAs), aluminum gallium nitride
(AlGaN), aluminum indium arsenide (AlInAs), aluminum nitride (AlN),
gallium antimonide (GaSb), gallium arsenide (GaAs), gallium nitride
(GaN), indium antimonide (InSb), indium arsenide (InAs), indium
gallium arsenide (InGaAs), indium gallium nitride (InGaN), indium
nitride (InN), indium phosphide (InP) and combinations including at
least one of the foregoing materials. According to an exemplary
embodiment, the III-V material is InGaAs. Likewise, reference will
be made herein to group IV dopants. These are elements selected
from group IV of the periodic table, such as silicon (Si) and tin
(Sn).
[0019] III-V semiconductor materials can be grown on a variety of
different substrates. According to an exemplary embodiment, the
III-V semiconductor material (In.sub.0.53Ga.sub.0.47As) is grown on
a lattice-matched substrate, such as an indium phosphide (InP)
substrate.
[0020] In step 102, ALE is used to grow a first (either group III
or group V) monolayer on the substrate. In general, each of the
layers in methodology 100 is grown using ALE to form monolayers
typically one atom thick. According to an exemplary embodiment, the
steps of methodology 100 are carried out in a reaction vessel which
separates the reactants either spatially (e.g., by way of a
multi-chamber reactor design) or temporally. See, for example, S.
P. DenBaars et al., "Atomic Layer Epitaxy of Compound
Semiconductors With Metalorganic Precursors," Journal of Crystal
Growth 98 (1989) 195-208 (hereinafter "DenBaars"), the contents of
which are incorporated by reference as if fully set forth herein,
for a description of suitable reactor designs that may be used in
accordance with the present techniques. In general, the III-V
semiconductor material will be grown monolayer-by-monolayer. After
each individual monolayer is grown, excess reactants are
removed/purged (e.g., using an inert gas such as hydrogen H.sub.2).
Further, as will be described in detail below, doping will be
performed in situ--i.e., during growth of a particular
monolayer(s).
[0021] The first monolayer grown on the substrate is either a group
III element-containing monolayer (or simply "a group III layer")
(i.e., a monolayer containing one or more group III elements--and
no group V elements) or a group V element-containing monolayer (or
simply "a group V layer") (i.e., a monolayer containing one or more
group V elements--and no group III elements). Namely, in order to
be able to direct the dopant to either group III or group V sites,
in this example, the group III elements and the group V elements
are separated into different monolayers--and the dopant is applied
(directed) only during deposition of either the group III monolayer
or group IV monolayer, rather than being available all the time
during the crystal growth.
[0022] According to an exemplary embodiment, the (first) monolayer
grown in step 102 is a group V layer. What is important however is
that the first monolayer grown (whether it be a group III or a
group V layer) is different (in terms of whether it contains group
III or group V elements) from the second monolayer grown, and vice
versa. Thus, if the first monolayer grown (in step 102) is a group
V layer, then the second layer grown (see below) should be a group
III layer, and vice versa. As provided above, this will ensure that
doping will occur at the desired (group V or group III) sites.
[0023] By way of example only, step 102 may be carried out by
contacting the substrate with a source (or sources) of group III or
group V atoms under conditions (e.g., temperature, duration, etc.)
sufficient to form the first (either group III or group V) layer on
the substrate. Sources for vapor phase epitaxy of group III-V
materials such as indium (In), gallium (Ga), arsenic (As), aluminum
(Al), antimony (Sb), nitrogen (N), etc. are known in the art. See,
for example, DenBaars. By way of example only, trimethylindium,
trimethylgallium (or triethylgallium), and trimethylaluminum TMAl
are suitable organometallic sources for vapor phase epitaxy of
group III elements indium, gallium, and aluminum, respectively.
Tertiary butyl arsine (TBA) is a suitable source for vapor phase
epitaxy of the group V element As, tertiary butyl phosphine (TBP)
is a suitable source for vapor phase epitaxy of the group V element
phosphorous (P), trimethylantimony TMSb and triethylantimony TESb
are suitable sources for vapor phase epitaxy of the group V element
antimony (Sb), and ammonia NH.sub.3 and hydrazine N.sub.2H.sub.4
are suitable sources for vapor phase epitaxy of the group V element
nitrogen (N).
[0024] By way of example only, in step 102 the substrate can be
contacted with the group III or group V source(s) at a temperature
of from about 350.degree. C. to about 500.degree. C., and ranges
therebetween, for a duration of from about 1 second to about 20
seconds, and ranges therebetween.
[0025] Following formation of the first (either group III or group
V) monolayer on the substrate, in step 104 excess reactants are
flushed or purged leaving behind the corresponding group III or
group V atoms. See, for example, DenBaars. According to an
exemplary embodiment, this purging involves contacting the sample
with an inert gas flow under conditions sufficient to flush/purge
any of the remaining reactants (e.g., methyl radicals in the case
of TBA/TBP). Suitable inert gasses include, but are not limited to,
hydrogen (H.sub.2) gas. By way of example only, in step 104 the
sample can be contacted with the inert gas flow at a temperature of
from about 350.degree. C. to about 500.degree. C., and ranges
therebetween, for a duration of from about 1 second to about 20
seconds, and ranges therebetween, with a gas flow rate of from
about 1 standard cubic centimeters per minute (sccm) to about 200
sccm, and ranges therebetween. It is generally desirable to keep
the temperature constant during the growth (e.g., a constant
temperature of from about 350.degree. C. to about 500.degree. C.,
and ranges therebetween, is employed throughout each growth and
purge step in the process). Further, a low temperature growth
process--such as that described herein--advantageously avoids
dopant diffusion. As described in DenBaars, the gas phase
decomposition of III-V material sources such as tertiary butyl
arsine, trimethylindium and trimethylgallium occurs in multiple
stages. Upon deposition two methyl radicals are lost. However,
higher temperatures are needed to shed the third methyl radical.
Accordingly, elevated temperatures are employed during the purge in
step 104 (as compared, e.g., to step 102).
[0026] In this example, the next task will be to grow (and in situ
dope) a second monolayer on the first monolayer. This can be
carried out in a number of different ways. In one exemplary
embodiment, a dopant source is introduced along with the source(s)
of the components for the second monolayer (see step 106--described
below). Alternatively, the dopant can be introduced separately from
(e.g., prior to) the components for the second monolayer, and
become incorporated during growth of the second monolayer (see
steps 110-114--described below). This alternative scenario permits
a maximum amount of doping to be achieved since the dopant atoms
will have less competition for sites to occupy in the second
monolayer.
[0027] Each of these doping scenarios will now be described in
detail. According to the first scenario, in step 106 a second
monolayer is formed on the first monolayer wherein a dopant source
is added along with the source(s) of the components for ALE growth
of the second layer. As provided above, the second monolayer is
preferably different (in terms of whether it contains group III or
group V atoms) from the first monolayer. Thus, if the first
monolayer is a group V layer, then the second monolayer should be a
group III layer, and vice versa. By segregating the monolayers in
this manner, the dopant (when selectively introduced) will then be
directed to occupy only group III or group V sites--whichever is
available.
[0028] Preferably, the dopant is a group IV dopant such as silicon
(Si), tin (Sn), germanium (Ge), or carbon (C). By way of example
only, Si, Sn, and Ge are suitable n-type dopants, and C is a
suitable p-type dopant. As provided above, group IV dopants are
amphoteric as they can occupy either group III or group V sites.
Thus group IV dopants can be employed in accordance with the
present techniques whether the second monolayer is a group III
layer (having group III sites) or a group V layer (having group V
sites). In the example provided above, the first monolayer formed
is a group V layer. In that case, the second monolayer would be a
group III layer. Thus, the dopant introduced in step 106 would
occupy group III sites in the second (group III) monolayer.
Alternatively, if the first monolayer formed is instead a group III
layer, then the second monolayer would be a group V layer and the
dopant introduced in step 106 would occupy group V sites in the
second (group V) monolayer.
[0029] In either case, step 106 may be carried out by contacting
the substrate/first monolayer with a source(s) of group III or
group V atoms and a source of group IV dopant atoms under
conditions sufficient to form an in situ doped second (either group
III or group V) monolayer on a side of the first monolayer opposite
the substrate. As provided above, sources for vapor phase epitaxy
of group III-V materials are known in the art. By way of example
only, trimethylindium and trimethylgallium are suitable
organometallic sources for vapor phase epitaxy of In and Ga,
respectively, and TBA and TBP are suitable sources for vapor phase
epitaxy of As and P, respectively. Trimethylsilane, silane
(SiH.sub.4), disilane (SiH.sub.6), silicon tetrabromide
(SiBr.sub.4) and silicon tetrachloride, for example, are suitable
sources for vapor phase epitaxy of the dopant Si. Tetraethyltin
Sn(C.sub.2H.sub.5).sub.4 and tetramethyltin Sn(CH.sub.3).sub.4, for
example, are suitable sources for vapor phase epitaxy of the dopant
Sn. Germane GeH.sub.4 is a suitable source for vapor phase epitaxy
of the dopant Ge. Carbon tetrabromide (CBr.sub.4) is a suitable
source for vapor phase epitaxy of the dopant C. By way of example
only, in step 106 the substrate can be contacted with the group III
or group V, and dopant source(s) at a temperature of from about
350.degree. C. to about 500.degree. C., and ranges therebetween,
for a duration of from about 1 second to about 20 seconds, and
ranges therebetween. By way of example only, if an n-type doped
III-V semiconductor material is desired, then in step 106 the
substrate/first monolayer may be contacted with a source(s) of
group III atoms and a source of Si, Sn, or Ge as the dopant.
Alternatively, if a p-type doped III-V semiconductor material is
desired, then in step 106 the substrate/first monolayer may be
contacted with a source(s) of group V atoms and a source of C as
the dopant. For instance, if a p-type InGaAs layer is desired
carbon doping may be achieved by practicing ALE cycles of 10 second
TMGa/TMI, 10 second 1-12 purge, 10 second TBAs and carbon
tetrabromide (CBr.sub.4), and a 10 second H.sub.2 purge
[0030] It is notable that multiple group III (or group V) elements
can be introduced together in step 102 and/or in step 106, so long
as there is no intermixing of group III and group V elements in the
same monolayer. For instance, to use n-type (n.sup.++) InGaAs as an
example, sources of both In and Ga (e.g., trimethylindium and
trimethylgallium) can be introduced together in step 106 (along
with the dopant). Alternatively, embodiments are presented herein
where the elements of a ternary III-V material are introduced
individually in separate steps.
[0031] Following formation of the doped second (either group III or
group V) monolayer on the first monolayer, in step 108 excess
reactants are again flushed or purged. As above, the purging can
involve contacting the sample with an inert gas (e.g., H.sub.2 gas)
flow under conditions sufficient to flush (purge) excess reactants
from the chamber (e.g., methyl radicals in the case of TMIn, TMGa,
SiH.sub.4, GeH.sub.4, etc.) leaving behind the corresponding group
III or group V and dopant atoms. By way of example only, in step
108 the sample can be contacted with the inert gas flow at a
temperature of from about 350.degree. C. to about 500.degree. C.,
and ranges therebetween, for a duration of from about 1 second to
about 20 seconds, and ranges therebetween, with a gas flow rate of
from about 1 sccm to about 200 sccm, and ranges therebetween.
[0032] Alternatively, the dopant and the components for the second
monolayer may be introduced in separate steps. Namely, the dopant
atoms may be deposited onto the first monolayer followed by growth
of the second monolayer (during which the dopant atoms become
incorporated in the second monolayer). See steps 110-114.
Specifically, the second monolayer is grown on the first monolayer
in multiple steps using ALE by first (in step 110) depositing a
discontinuous monolayer of dopant atoms on the first monolayer
substrate. By way of example only, step 110 may be carried out by
contacting the substrate/first monolayer with a source of (e.g.,
group IV) dopant atoms under conditions sufficient to form a
non-continuous monolayer of dopant atoms on a side of the first
monolayer opposite the substrate. Suitable sources for vapor phase
epitaxy of group IV dopants (such as Si, Sn, Ge, and C) were
provided above. By way of example only, in step 110 the substrate
can be contacted with the dopant source at a temperature of from
about 350.degree. C. to about 500.degree. C., and ranges
therebetween, for a duration of from about 1 second to about 20
seconds, and ranges therebetween. The reason that the dopant atoms
may not form a continuous monolayer is due to strain energy and
electronic energy effects. See, for example, E. F. Schubert,
"Doping in III-V Semiconductors," Cambridge University Press, pgs.
288-289, AT&T 1993, the contents of which are incorporated by
reference as if fully set forth herein. Namely, when doping levels
are in the percentage range (e.g., are a percent of the total atoms
in the alloy) strain effects are significant (since the donor atom
size is typically different than In, Ga or As). Additional bonding
becomes energetically unfavorable due to the strain energy.
Similarly when the doping level (or more accurately the number of
free electrons) becomes high the electronic energy increases since
the difference between the Fermi level and the donor level becomes
larger. Adding more electrons becomes energetically less favorable.
This is the reason the group IV dopants exhibit an amphoteric
behavior. Both the increase in strain energy and electronic energy
will typically prevent the formation of a full monolayer of the
donor (or acceptor).
[0033] Following formation of the dopant layer on the substrate, in
step 112 excess dopant reactants are removed, e.g., flushed or
purged. As described, for example, in conjunction with the
description of steps 104 and 108, above, the purging can involve
contacting the sample with an inert gas (e.g., H.sub.2 gas) flow
under conditions sufficient to flush (purge) excess reactants from
the chamber (e.g., methyl radicals in the case of trimethylsilane
or tetraethyltin) leaving behind the corresponding group IV and
dopant atoms. By way of example only, in step 112 the sample can be
contacted with the inert gas flow at a temperature of from about
350.degree. C. to about 500.degree. C., and ranges therebetween,
for a duration of from about 1 second to about 20 seconds, and
ranges therebetween, with a gas flow rate of from about 1 sccm to
about 200 sccm, and ranges therebetween.
[0034] An advantage to this alternative doping scheme is that since
the dopant atoms are being deposited first, they do not have to
compete for sites in the second monolayer. By comparison, in the
first scenario (see step 106--described above) the dopant atoms
will compete with the group III or group V atoms for sites in the
second monolayer.
[0035] Next, in step 114 group III or group V atoms are added to
complete the second monolayer. Step 114 may be carried out by
contacting the substrate/first monolayer/non-continuous monolayer
of dopant atoms with a source(s) of group III or group V atoms
under conditions sufficient to form an in situ doped second (either
group III or group V) monolayer on a side of the first monolayer
opposite the substrate. By way of example only, in step 114 the
substrate/first monolayer/non-continuous monolayer of dopant atoms
can be contacted with the group III or group V source(s) at a
temperature of from about 350.degree. C. to about 500.degree. C.,
and ranges therebetween, for a duration of from about 1 second to
about 20 seconds, and ranges therebetween. A purge is then
performed in step 108 to remove/flush excess reactants. The details
of step 108 were provided above.
[0036] As shown in FIG. 1, multiple iterations of the process may
be performed. This may be done for instance when the elements of a
ternary III-V material are introduced individually in separate
steps. An example of this scenario is provided below wherein
multiple group III elements are deposited individually into
different monolayers (i.e., first, second, third, fourth, etc.
monolayers).
[0037] It is to be understood that the steps described herein may
be applied in any order and/or combined in a manner not explicitly
shown or described in the figures. For instance, while examples are
provided herein that place the dopant atoms in the second, fourth,
etc. (even number) monolayers, one might also (in the same manner
described) place a dopant in the first, third, etc. (odd number)
monolayers. By way of example only, if one wanted to make a p-type
doping using carbon, then the first monolayer could be a group V
layer with carbon, the second monolayer could be a group III
monolayer, and the third monolayer could be another group V layer
with carbon doping.
[0038] Advantageously, by way of the present ALE-based doping
techniques a greater free carrier concentration can be obtained in
the resulting epitaxial layer as compared to conventional
processes. For instance, with an epitaxial layer resulting from the
present process a free carrier concentration originated from the
dopants in the layer is generally greater than 6.times.10.sup.19
cm.sup.-3 (as compared, e.g., to conventional process which can
achieve at most a free carrier concentration of up to
6.times.10.sup.19 cm.sup.-3).
[0039] Given the above general description, specific
implementations will now be provided. While the following examples
focus on the formation of a specific III-V material, namely InGaAs,
they serve to further illustrate the above-described
techniques.
[0040] Turning now to FIG. 2, an exemplary methodology 200 is
provided for forming n-type doped InGaAs (n.sup.++ InGaAs) on a
substrate using ALE. As provided above, III-V semiconductor
materials can be grown on a variety of different substrates.
According to an exemplary embodiment, the n.sup.++ InGaAs layer in
this example is grown to be lattice-matched to an InP
substrate.
[0041] Generally, in the schematic representations provided in
FIGS. 2-5 shading and patterning are used to differentiate
different elements/compounds. A key is given at the bottom left of
each figure. For instance, solid black circles are used to
represent methyl compounds, a checkered pattern is used to
represent. In atoms, a hashed pattern is used to represent Ga
atoms, a dotted pattern is used to represent As atoms, a horizontal
line pattern is used to represent Si atoms, etc.
[0042] In step 202, a first monolayer of group V atoms is formed on
the substrate. Specifically, in this example the substrate is
contacted with a flow of tertiary butyl arsine (TBA). As provided
above, TBA is a source for vapor phase epitaxy of the group V
element As. Suitable conditions for forming the first monolayer on
the substrate were provided in conjunction with the description of
step 102 of FIG. 1, above.
[0043] As also provided above, the gas phase decomposition of III-V
material sources such as TBA, TBP, trimethylindium and
trimethylgallium generally occurs in multiple stages. Namely, upon
deposition two methyl radicals are lost. See FIG. 2--labeled
"methyl radicals." However, further processing is needed to shed
the third methyl radical. Specifically, a purge is performed in
step 204 to remove excess reactants (including the third methyl
radical--compare step 204 with step 206). Suitable conditions for
the purging step (including the elevated temperatures needed to
shed the third methyl radical) were provided in conjunction with
the description of step 104 of FIG. 1, above.
[0044] Next, in step 206 a second monolayer of group III and group
IV dopant atoms is formed on a side of the first monolayer opposite
the substrate. Specifically, in this example the substrate/first
monolayer is contacted with a flow of trimethylindium (TMIn),
trimethylgallium (TMGa), and silane (SiH.sub.4). As provided above,
TMIn is a source for vapor phase epitaxy of the group III element
In, TMGa is a source for vapor phase epitaxy of the group III
element Ga, and SiH.sub.4 is a source for vapor phase epitaxy of
the group IV dopant Si. Suitable conditions for forming the second
monolayer on the first monolayer were provided in conjunction with
the description of step 106 of FIG. 1, above.
[0045] In step 208, a purge is again performed to remove excess
reactants. Suitable conditions for the purging step were provided
in conjunction with the description of step 108 of FIG. 1,
above.
[0046] FIG. 3 is a diagram illustrating advantages of the present
ALE-based doping techniques as compared to conventional processes
such as metalorganic vapor phase chemical vapor deposition (MOCVD).
An example of sample prepared using the present techniques is shown
on the left in FIG. 3 (labeled "ALE doping"), and an example
showing a sample prepared using MOCVD is shown on the fight in FIG.
3 (labeled "MOCVD doping"). As shown in FIG. 3, with the ALE sample
the Si dopant atoms are present only in the monolayers containing
group III atoms. Namely, in this example the Si dopants are
directed, by way of the present techniques, to occupy only group
III sites. As described in detail above, this is due to segregation
of the group III and group V atoms into separate monolayers, and
the selective introduction of the dopants only when group III sites
are available.
[0047] By comparison, in the MOCVD sample Si dopant atoms occupy
both group HI and group V sites which can occur based on the
amphoteric nature of group IV dopants when both group III and group
V sites are available. As provided above, this result is
disadvantageous due to its counter-doping effect.
[0048] As provided above, the dopant can (optionally) be introduced
separately (e.g., prior to) the other constituents which affords a
greater amount of doping since the dopant atoms are not competing
for sites in the monolayer. An example of this scenario is depicted
in FIG. 4.
[0049] FIG. 4 provides an exemplary methodology 400 for forming
n.sup.++ InGaAs on a substrate using ALE wherein the dopant is
introduced separately from the group III constituents. As provided
above, III-V semiconductor materials can be grown on a variety of
different substrates. According to an exemplary embodiment, the
n.sup.++ InGaAs layer in this example is grown to be
lattice-matched to an InP substrate.
[0050] In step 402, a first monolayer of group V atoms is formed on
the substrate. Specifically, in this example the substrate is
contacted with a flow of TBA. As provided above, TBA is a source
for vapor phase epitaxy of the group V element As. Suitable
conditions for forming the first monolayer on the substrate were
provided in conjunction with the description of step 102 of FIG. 1,
above.
[0051] A purge is then performed in step 404 to remove excess
reactants (including the third remaining methyl radical--see
above). Suitable conditions for the purging step were provided in
conjunction with the description of step 104 of FIG. 1, above.
[0052] Next, the dopant and the components for the second monolayer
are, in this example, introduced in separate steps. Namely, the
dopant atoms are deposited onto the first monolayer followed by
growth of the second monolayer (during which the dopant atoms
become incorporated in the second monolayer). See steps 406-410.
Specifically, the second monolayer is grown on the first monolayer
in multiple steps using ALE by first (in step 406) depositing a
discontinuous monolayer of dopant atoms on a side the first
monolayer opposite the substrate. Specifically, in this example the
substrate/first monolayer is contacted with a flow of silane
(SiH.sub.4). As provided above, SiH.sub.4 is a source for vapor
phase epitaxy of the group IV dopant Si. Trimethylsilane may also
be used as a source for Si doping. Suitable conditions for forming
the discontinuous monolayer of dopant atoms on the first monolayer
were provided in conjunction with the description of step 110 of
FIG. 1, above.
[0053] In step 408, a purge is performed to remove excess (dopant)
reactants. Suitable conditions for the purging step were provided
in conjunction with the description of step 112 of FIG. 1,
above.
[0054] In step 410, group III atoms are added to complete the
second monolayer. Specifically, in this example the substrate/first
monolayer/discontinuous dopant monolayer is contacted with a flow
of trimethylindium (TMIn) and trimethylgallium (TMGa). As provided
above, TMIn is a source for vapor phase epitaxy of the group III
element In, and TMGa is a source for vapor phase epitaxy of the
group III element Ga. Suitable conditions for completing growth of
the second monolayer on the first monolayer were provided in
conjunction with the description of step 114 of FIG. 1, above.
[0055] Finally, in step 412, a purge is performed to remove excess
reactants. Suitable conditions for the purging step were provided
in conjunction with the description of step 108 of FIG. 1,
above.
[0056] The above description of the method was provided with the
assumption that the growth of the epitaxial layer is taking place
"layer by layer," where a group V monolayer is followed by a group
III monolayer. Such a description is true for a crystallographic
oriented (100) surface. However, for some crystallographic
orientations both group III and group V elements are present in
each monolayer. For example, when the disclosed method of FIG. 4 is
applied to the growth of a (110) oriented surface, a group V
precursor is first applied to attach the group V atoms to all of
the available group III atoms. Following a purge, an n-type dopant
precursor is applied to attach the dopant atoms to the vacant group
III sites. Following a purge a group III precursor is applied to
fill the remaining vacant group III sites. It is noted that the
dopant precursor and the group III precursor can be applied
together as discussed for the method of FIG. 2.
[0057] As provided above, in accordance with the present
techniques, the elements of a ternary III-V material may be
introduced individually in separate steps. For instance, each group
III and group V element may be deposited individually into
different monolayers (i.e., first, second, third, fourth, etc.
monolayers). An example of this scenario is depicted in FIG. 5.
[0058] FIG. 5 provides an exemplary methodology 500 for forming
n.sup.++ InGaAs on a substrate using ALE wherein the group III and
group V elements are each introduced individually in separate
monolayers. As provided above, III-V semiconductor materials can be
grown on a variety of different substrates. According to an
exemplary embodiment, the n.sup.++ In.sub.0.5Ga.sub.0.5As layer in
this example is grown slightly mismatched to an InP substrate by
growing alternating monolayers of InAs/GaAs. In order to obtained
exact lattice-matching with the InP substrate, a composition of 53%
indium and 47% gallium is needed (In.sub.0.53Ga.sub.0.47As). Other
III-V semiconductors such as In.sub.0.5Ga.sub.0.5P which are
exactly lattice-matched to a GaAs substrate may also be grown by
making alternating monolayers of InP/GaP. In yet another example,
In.sub.0.5Al.sub.0.5As can be grown latticed matched to InP by
making alternating mono-layers of InAs/AlAs.
[0059] In step 502, a first monolayer of group V atoms is formed on
the substrate. Specifically, in this example the substrate is
contacted with a flow of TBA. As provided above, TBA is a source
for vapor phase epitaxy of the group V element As. Suitable
conditions for forming the first monolayer on the substrate were
provided in conjunction with the description of step 102 of FIG. 1,
above.
[0060] A purge is then performed in step 504 to remove excess
reactants (including the third remaining methyl radical--see
above). Suitable conditions for the purging step were provided in
conjunction with the description of step 104 of FIG. 1, above.
[0061] Next, in step 506 a second monolayer of group III and group
IV dopant atoms is formed on a side of the first monolayer opposite
the substrate. Specifically, in this example the substrate/first
monolayer is contacted with a flow of trimethylindium (TMIn) and
silane (SiH.sub.4) or trimethylsilane. As provided above, TMIn is a
source for vapor phase epitaxy of the group III element In, and
SiH.sub.4 is a source for vapor phase epitaxy of the group IV
dopant Si. Suitable conditions for forming the second monolayer on
the first monolayer were provided in conjunction with the
description of step 106 of FIG. 1, above.
[0062] In step 508, a purge is again performed to remove excess
reactants. Suitable conditions for the purging step were provided
in conjunction with the description of step 108 of FIG. 1,
above.
[0063] The process is then repeated (see, for example, the
description FIG. 1 above wherein it is described how multiple
iterations of methodology 100 may be performed) to form third,
fourth, etc. monolayers. Namely, in step 510 a third monolayer of
group V atoms is formed on a side of the second monolayer opposite
the first monolayer. Specifically, in this example the
substrate/first monolayer/second monolayer is again contacted with
a flow of TBA. Suitable conditions for forming the first monolayer
on the substrate were provided in conjunction with the description
of step 102 of FIG. 1, above.
[0064] A purge is then performed in step 512 to remove excess
reactants. Suitable conditions for the purging step were provided
in conjunction with the description of step 104 of FIG. 1,
above.
[0065] Next, in step 514 a fourth monolayer of group III and group
IV dopant atoms is formed on a side of the third monolayer opposite
the second monolayer. Specifically, in this example the
substrate/first monolayer/second monolayer/third monolayer is
contacted with a flow of trimethylgallium (TMGa) and silane
(SiH.sub.4) or trimethylsilane. As provided above, TMGa is a source
for vapor phase epitaxy of the group III element Ga, and SiH.sub.4
is a source for vapor phase epitaxy of the group IV dopant Si.
Suitable conditions for forming the fourth monolayer on the third
monolayer were provided in conjunction with the description of step
106 of FIG. 1, above.
[0066] Finally, in step 516, a purge is again performed to remove
excess reactants. Suitable conditions for the purging step were
provided in conjunction with the description of step 108 of FIG. 1,
above. In this example a super-lattice, i.e., a periodic structure
of layers of two (or more) materials, is formed. Basically, in this
case a lattice is formed of alternating monolayers of InAs/GaAs.
This super-lattice has ordering which is not the same as
In0.5Ga0.5As which is an alloy where the In and Ga locations are
random, but on the average there is 50% In and 50% Ga.
[0067] Although illustrative embodiments of the present invention
have been described herein, it is to be understood that the
invention is not limited to those precise embodiments, and that
various other changes and modifications may be made by one skilled
in the art without departing from the scope of the invention.
* * * * *