U.S. patent application number 16/017307 was filed with the patent office on 2018-10-25 for method and device for generating a jet of fluid for material processing and fluid nozzle for use in said device.
This patent application is currently assigned to SYNOVA SA. The applicant listed for this patent is SYNOVA SA. Invention is credited to Bernold RICHERZHAGEN, Akos SPIEGEL.
Application Number | 20180304403 16/017307 |
Document ID | / |
Family ID | 34932352 |
Filed Date | 2018-10-25 |
United States Patent
Application |
20180304403 |
Kind Code |
A1 |
RICHERZHAGEN; Bernold ; et
al. |
October 25, 2018 |
METHOD AND DEVICE FOR GENERATING A JET OF FLUID FOR MATERIAL
PROCESSING AND FLUID NOZZLE FOR USE IN SAID DEVICE
Abstract
The invention relates to a method and a device for generating a
jet of liquid which is suitable, in the manner of a waveguide, to
carry a laser beam injected into it and which is used to process a
work piece. Said device comprises a liquid nozzle for generating a
jet of liquid and a gas outlet nozzle, disposed at a distance from
the liquid nozzle and producing a flow of gas enclosing the jet of
liquid on the exterior thereof. A gas storage is defined between
the liquid nozzle and the gas outlet nozzle. The jet of liquid is
passed or ejected through the gas outlet nozzle. The jet of liquid
has a diameter of preferably 60 m or less and the flow of gas has a
diameter of 1-2 mm.
Inventors: |
RICHERZHAGEN; Bernold;
(St-Sulpice, CH) ; SPIEGEL; Akos; (Chavannes,
CH) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SYNOVA SA |
Ecublens |
|
CH |
|
|
Assignee: |
SYNOVA SA
Ecublens
CH
|
Family ID: |
34932352 |
Appl. No.: |
16/017307 |
Filed: |
June 25, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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11667484 |
May 10, 2007 |
10016845 |
|
|
PCT/CH2005/000636 |
Nov 1, 2005 |
|
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16017307 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B23K 26/702 20151001;
B23K 26/0665 20130101; B23K 26/146 20151001; B23K 26/123
20130101 |
International
Class: |
B23K 26/12 20060101
B23K026/12; B23K 26/146 20060101 B23K026/146; B23K 26/06 20060101
B23K026/06; B23K 26/70 20060101 B23K026/70 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 10, 2004 |
EP |
04 405 689.3 |
Claims
1. A method for generating a jet of fluid which is suitable for
guiding, in the manner of a waveguide, a laser beam which is
injected into it, for the purpose of processing a workpiece,
wherein the jet of fluid is generated with a fluid nozzle, and
wherein the jet of fluid is surrounded on the outside by a gas
stream, characterized in that the jet of fluid is guided through a
gas outlet nozzle which is arranged at a distance from the fluid
nozzle and forms the gas stream.
2. The method as claimed in claim 1, characterized in that the jet
of fluid is generated with a diameter of 200 .mu.m or less and in
that the gas stream has a diameter of 0.5-2 mm.
3. The method as claimed in one of claim 1, characterized in that
the gas of the gas stream has a kinematic gas viscosity which is
less than that of a surrounding atmospheric gas.
4. The method as claimed in claim 1, characterized in that gas for
generating the gas stream flows into a first flow region without
affecting the jet of fluid and is deflected into a second flow
region, adjoining said first flow region, so as to flow around the
jet of fluid, a junction between said first and second flow regions
being at a predefined radial distance from the jet of fluid, and
the gas being fed into said first flow region at a plurality of
locations which are placed at regular angles around an axis of the
jet of fluid.
5. The method as claimed in claim 4, characterized in that in a
third flow region a direction of flow counter to the gas outlet
nozzle is impressed on the gas, wherein in the third flow region a
gas stream which accelerates in the outflow direction of the jet of
fluid is produced.
6. A device for generating a jet of fluid which is suitable for
guiding, in the manner of a waveguide, a laser beam which is
injected into it, for the purpose of processing a workpiece,
comprising a fluid nozzle for generating the jet of fluid, having a
gas outlet nozzle which is arranged at a distance downstream from
the fluid nozzle and forms a gas stream surrounding the jet of
fluid on the outside with a gas stream wherein he jet of fluid can
be directed through the gas outlet nozzle.
7. The device as claimed in claim 6, characterized in that a gas
retaining space is provided between the fluid nozzle and the gas
outlet nozzle.
8. The device as claimed in claim 6, characterized in that the
fluid nozzle forms a circular passage through which the jet of
fluid can pass together with the gas stream.
9. The device as claimed in claim 6, characterized in that a jet
axis which is assigned to the fluid nozzle and an axis which is
assigned to the gas outlet nozzle essentially coincide.
10. The device as claimed in claim 6, characterized in that the
fluid nozzle has a diameter in the range from 20 .mu.m to 200
.mu.m, and the diameter of the gas outlet nozzle has a diameter in
the range from 0.5 mm to 2 mm.
11. The device as claimed in claim 6, characterized in that the gas
outlet nozzle has an internal diameter which is essentially 10 to
20 times as large as the internal diameter of the fluid nozzle.
12. A device for optimizing the coherence of a jet of fluid which
is generated with a fluid nozzle, as a jet director for processing
a workpiece, characterized by a housing with a circumferential wall
which holds the fluid nozzle, and with at least one gas inlet for
the applied gas, wherein the gas inlet is arranged downstream of
the fluid nozzle in terms of flow.
13. The device as claimed in claim 12, characterized in that the at
least one gas inlet defines an inflow direction into the housing
for the applied gas and the wall has a circular cross section in
the region of the at least one gas inlet and the inflow direction
impacts on this wall tangentially, in a way which does not affect
the fluid jet directly.
14. The device as claimed in one of claim 12, characterized in that
the housing is embodied as a double cone, wherein the fluid nozzle
is arranged in one of the cone tips and the other cone tip has the
gas outlet nozzle, and the at least one gas inlet is arranged in a
direct vicinity of the largest diameter of the double cone.
15. A fluid nozzle for a device as claimed in claim 12 having a
nozzle duct which generates a jet of fluid, characterized by a
sharp-edged transition from a nozzle surface at a nozzle inlet into
the nozzle duct, the sharp-edged transition having a radius of less
than 10 micrometers, preferably less than 2 micrometers.
16. The fluid nozzle as claimed in claim 15, characterized in that
the nozzle duct has a length which is less than five times,
preferably three times, a diameter of the nozzle duct.
17. The fluid nozzle as claimed in claim 15, characterized in that
the length of the nozzle duct and thus the thickness of the fluid
nozzle is selected to be just so thick that the nozzle just
withstands the fluid inlet pressure loading it, wherein, in order
to mechanically reinforce the stability, a slope is formed running
outward in the manner of a cone on the underside of the nozzle,
starting from a cylindrical nozzle duct inner wall at the nozzle
duct outlet, and the slope is constructed so that it extends at an
angle between 90.degree. and 150.degree. with respect to a
longitudinal axis of the nozzle duct.
18. A method for generating a jet of fluid guiding a laser beam in
the manner of a waveguide, for the purpose of processing a
workpiece, comprising the steps of: generating the jet of fluid
with a fluid jet nozzle, injecting the laser beam into the fluid
jet at the fluid jet nozzle, directing the jet of fluid, which
guides the laser beam, through a gas outlet nozzle which is
arranged at a distance downstream from the fluid nozzle, said gas
outlet nozzle forming a gas stream surrounding the jet of fluid on
the outside by a gas stream.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a Continuation of copending application
Ser. No. 11/667,484, filed on May 10, 2007, which is the National
Phase under 35 U.S.C. .sctn. 371 of International Application No.
PCT/CH2005/000636, filed on Nov. 1, 2005, which claims the benefit
under 35 U.S.C. .sctn. 119(a) to Patent Application No. 04 405
689.3 filed in the European Patent Office on Nov. 10, 2004, all of
which are hereby expressly incorporated by reference into the
present application.
TECHNICAL FIELD
[0002] The invention relates to a method for generating a jet of
liquid which is suitable for guiding, in the manner of a waveguide,
a laser beam which is injected into it, for the purpose of
processing a workpiece, wherein the jet of liquid is generated with
a liquid nozzle, and wherein the jet of liquid is surrounded on the
outside by a gas stream. Furthermore, the invention relates to a
device for carrying out the method and to a liquid nozzle for such
a method.
PRIOR ART
[0003] The processing of materials by means of laser radiation has
become established in many fields in the last few years. A further
developed technical variant of this is cutting with a
water-jet-guided laser (EP 0 762 947 B1, WO 99/56907). The laser
beam is injected into a thin jet of water in order to be guided to
the processing point for the material. Since the jet of water
guides the laser beam in the manner of an optical waveguide, the
beam energy remains concentrated over a relatively large length on
the cross section which is predefined by the jet of water. The
greater the coherence length of the jet of water, i.e. the later
the time at which the jet of water collapses into droplets, the
greater the variability of the working distance of the device.
[0004] JP 2000-334590 likewise describes a device for laser
processing which is guided by water jet. In this context it is
proposed to surround the jet of water with a gas jet (for example
nitrogen, argon, oxygen or air) by virtue of the fact that the
water jet nozzle is surrounded by an annular nozzle for the
gas.
[0005] A widespread alternative to laser processing is water jet
cutting. This involves using very fine nozzles of significantly
less than 1 mm to generate a jet of water whose kinetic energy can
be used to process the workpiece. DE 101 13 475 A1 discloses here
that the coherence length of the jet of water can be increased by
using the jet of water in a working space with a controlled
atmosphere. The working space is provided, for example, with a
partial vacuum or charged with a scavenging gas whose density is
less than that of air (in particular hydrogen, helium or methane).
The scavenging gas pours in a large volume over the workpiece from
a chamber arranged behind the water jet nozzle.
[0006] The technology described in U.S. Pat. No. 4,047,580 is based
on quite different ideas. Said technology relates to a method for
eroding, penetrating or comminuting bottom layers with a large
high-speed jet of water. So that the jet of water can penetrate
over a relatively large distance even in a fluid (for example under
water), it is surrounded by a gas jet which is at least half the
speed of sound. A concentric double nozzle is used to generate the
jet. The jet of water emerges from the circular internal nozzle,
and the gas jet emerges from the annular external nozzle. The gas
jet provides as it were a free space in the water-flooded working
range so that the working jet of water does not eddy in the water
volume but rather can propagate in an "underwater air duct".
[0007] The previously known methods for extending the coherence
length of a jet of water are either not suitable for the
water-jet-guided laser technology or do not in fact provide any
usable results with thin jets of fluid.
SUMMARY OF THE INVENTION
[0008] The object of the invention is to provide a method which is
associated with the technical field mentioned at the beginning and
which also permits a sufficiently large degree of coherence of the
jet length of the jet of liquid which is improved in particular
compared to the prior art, even in the case of very thin jets of
fluid. Furthermore the object of the invention is to specify a
device for carrying out the method.
[0009] According to the invention, the solution consists in the
fact that the jet of liquid is guided through a gas outlet nozzle
which is arranged at a distance from the liquid nozzle and forms
the gas stream. The jet of liquid does not touch the gas outlet
nozzle but rather flows freely through the latter.
[0010] The liquid nozzle and gas outlet nozzle are therefore not at
the same position (as in JP 2000-334590 mentioned at the beginning)
on the z axis (jet axis) but rather offset with respect to one
another in the z direction. At first, the liquid nozzle forms the
(preferably very thin) jet of liquid and then the gas outlet nozzle
forms the gas stream. This arrangement makes it possible to design
the gas outlet nozzle in an optimum way for the hydrodynamic
requirements for good generation of a gas jet. In contrast to the
"integrated" arrangement according to JP 2000-334590, the gas
outlet does not need to be constructed around a liquid nozzle (and
it is consequently not necessary to allow for the conditions of the
liquid nozzle). A further advantage compared to the "integrated"
arrangement is that the liquid nozzle can be designed to be
exchangeable. This means that the (technically difficult and
therefore easily damaged) liquid nozzle can be replaced without at
the same time having to replace the gas outlet nozzle.
[0011] The gas outlet nozzle according to the invention is
typically formed by a passage with a circular cross section. The
jet of water essentially extends centrally through the passage. The
gas jet is directly formed onto the jet of liquid. There are
therefore no dividing walls between the central jet of liquid and
the outlet or the location at which the gas jet is generated, as
for example in JP 2000-334590 mentioned at the beginning. Undesired
turbulence in the gas stream (in particular between the jet of
liquid and the gas stream) can thus be minimized.
[0012] Downstream of a nozzle 1 which generates a jet, each jet of
liquid has, as indicated in FIG. 1, a stable jet length l.sub.s.
This stable (coherent) region is adjoined by a region with a length
l.sub.u in which the outer part of the jet begins to constrict.
This "constricted region" is referred to as the junction region.
After the junction region, the jet collapses into individual
droplets which change into slightly flattened, approximately
spherical droplets over the drop length l.sub.p. The stable jet
length l.sub.s is longer for a freely emerging jet than for a jet
which impacts against a workpiece surface in order to process
material.
[0013] If material processing is carried out with an "abrasive"
high-pressure jet of liquid, it is also possible to work in the
junction region, possibly with a jet of liquid which is separating
into droplets. However, if the jet of liquid is used as a jet
director into which, for example, the radiation of a laser beam is
injected, in order to obtain a "cold cut" or a "cold" erosion of
material such as are described, for example, in WO 95/32834 and WO
99/56907, radiation which is injected into the jet of liquid in the
junction region already begins to emerge laterally from the jet of
liquid. This radiation which has already emerged is lost as far as
the processing of material is concerned.
[0014] With conventional laser processing, with which the laser
radiation is focused on the workpiece surface to be processed, the
focal point must be made to track a surface profile in terms of
depth (i.e. in the direction of the z axis). On the other hand, in
the case of laser radiation which is injected into a jet of liquid
this depthwise adjustment here of the nozzle is dispensed with if
the profile differences are smaller than the stable jet length
l.sub.s (minus nozzle dimensions). Therefore, for optimum
processing of materials with a laser beam which is injected into a
jet of liquid a stable fluid jet length which is as large as
possible should be obtained.
[0015] In order to obtain a jet of liquid which serves as a jet
director for laser radiation and which has a stable jet length
l.sub.s which is as long as possible, in contrast to the prior art
the jet of liquid is firstly generated with the laser radiation
injected and this jet of liquid is then guided through a gas outlet
nozzle. The gas outlet nozzle forms a gas jet which surrounds the
jet of liquid. Typically (but not necessarily) the jet axis of the
jet of liquid (with the exception of a tolerance) coincides with
the nozzle axis of the gas outlet nozzle. Between the nozzle which
generates the jet of liquid and the gas outlet nozzle, as it were,
a retaining space is formed for the gas. It is in the nature of a
nozzle that it constitutes a constriction for the fluid which is
intended to flow from a first region (here the region between the
fluid jet nozzle and gas outlet nozzle) through the nozzle (here
the gas outlet nozzle) into a second region (here the region
between the gas outlet nozzle and the surface of the material).
[0016] When material is processed with a laser beam which is guided
in the jet of liquid (for example radiation from a Nd:YAG laser
with a wavelength of 1.06 .mu.m), the jet of liquid typically has a
diameter in the region from 20 .mu.m to 200 .mu.m. The gas outlet
nozzle has a diameter of typically 0.5 mm to 2 mm. As a guideline
value the diameter of the nozzle duct of the gas outlet nozzle
should be approximately 10 to 20 times as large as the diameter of
the duct of the liquid nozzle. However, this is not a compulsory
predefined value for the dimensions of the invention. A tolerance
for the coordination of the gas jet axis and the fluid jet axis in
the gas outlet nozzle region is preferably such that the jet of
liquid should pass through the center of the gas outlet nozzle with
a tolerance of .+-.200 .mu.m.
[0017] In contrast to the prior art, long stable jet lengths are
obtained if, as stated above, the jet of liquid is firstly formed
with the laser radiation injected and the applied gas is fed in
only after a predefined amount of travel (i.e. downstream with
respect to the liquid nozzle). In the prior art, the applied gas is
always fed in in the direct vicinity in order to form the jet of
liquid, with the outflow directions of the fluid of the jet of
liquid and those of the applied gas having been selected so as to
be parallel to one another.
[0018] The invention is based on the fact that the application of
gas must be carried out in such a way that as far as possible the
jet of liquid cannot be disrupted at the location where the gas
flows in. Disruption acting on the jet of liquid in fact has a
significantly stronger effect on the shortening of the jet length
than an achievable lengthening as a result of the properties of the
applied gas.
[0019] An applied gas is preferably introduced into a cavity in a
housing in such a way that the introduced gas stream does not
directly impinge on the jet of liquid but rather the entire cavity
can be filled with the applied gas (i.e. the gas is not retained),
and in such a way that the applied gas leaves the housing in such a
way that it envelops the jet of liquid.
[0020] The applied gas is preferably introduced into the interior
of the housing. In the housing, the liquid nozzle is then arranged
opposite an outlet embodied as a gas nozzle. As is also expressed
in detail below, the jet of liquid which is generated by the liquid
nozzle is then immediately surrounded by the applied gas.
[0021] Not every gas is equally well suited as an applied gas. The
kinematic gas viscosity of the applied gas used should be smaller
than that of atmospheric gas (ambient gas at the processing
location). If operations are not carried out under a protective
gas, air is the atmospheric gas. Kinematic gas viscosity is
understood to be viscosity with respect to the specific weight of
the gas. The kinematic gas viscosity of air is 151.110.sup.-3
cm.sup.2/sec at 20.degree. C. and a pressure of 1 atm.
[0022] According to the American Institute of Physics Handbook,
Second Edition, pages 2-229, the following gases, for example,
would thus be possible, the stipulated values having the dimension
10.sup.-3 cm.sup.2/sec:
Hydrogen (H.sub.2) 1.059
Helium (He) 1.179
[0023] Acetylene (C.sub.2H.sub.2) 80.6 Ammonia (NH.sub.3)*.sup.
.dagger. 138
Argon (Ar) 134.3
Bromium gas *(Br.sub.2) 22.50
[0024] isobutane (C.sub.4H.sub.10) 31.0 n-butane (C.sub.4H.sub.10)
35.1 Chlorine (Cl.sub.2) *.sup..dagger. 150.6 Chloroform
(CHCl.sub.3) *.sup..dagger. 20.16 Cyanogen (C.sub.2N.sub.2)
.sup..dagger. 46.35 Ethane (C.sub.2H.sub.6) 72.9 Ethylene
(C.sub.2H.sub.4) 85.8410.sup.-3 cm.sup.2/sec Hydrogen bromide
*.sup..dagger. (HBr) 54.79 Hydrogen chloride gas (HCl)
*.sup..dagger. 93.99 Hydrogen iodide * (HJ) 34.42 Carbon dioxide
(CO.sub.2) 80.9
Krypton (Kr) 72.44
[0025] Methyl bromide (CH.sub.3Br)*33.64 Methyl chloride .sup.
.dagger. (CH.sub.3Cl) 50.97 Nitrous oxide *.sup. .dagger.
(N.sub.2O) 150.9 Propane (C.sub.3H.sub.8) 43.7 Sulfur dioxide gas
(SO.sub.2) *.sup..dagger. 46.94
Xenon (Xe) 42.69
[0026] The gases designated by * can be dissolved in the jet of
liquid if a jet of water is used as said fluid. Depending on the
application, caution is thus recommended. The gases designated by
.sup. are combustible and the gases designated by .sup..dagger. are
poisonous or injurious to the health, and care should also be taken
when using these gases. Gases without the above characterizations,
such as for example helium, argon, carbon dioxide, krypton and
xenon can be used without safety precautions.
[0027] The gas is preferably input in a straight direction of flow,
directed away from the jet of liquid, at a radial distance from the
axis of the jet of liquid. This makes it possible to ensure that
the application of gas does not, as far as possible, affect the jet
of liquid at the location of the gas inlet or its surroundings.
This first direction of gas flow is configured in such a way that
the stream is in tangential contact with a circle which is
positioned centrally around the jet of liquid. This first direction
of flow is then deflected in a second direction of flow which
rotates about the jet of liquid. The gas supply can then be
provided at a single location. However, a plurality of feed
locations which are equally spaced apart from one another will
preferably be selected and the first direction of gas flow will be
at the same angle ("tangential" direction) as a result of which a
reaction on the jet of liquid owing to a largely homogeneous flow
of the input gas is reduced. Two adjacent feed locations then
respectively have the same centering angle starting from the jet
axis.
[0028] If the jet of liquid flows vertically, as is generally
customary, the first gas inflow direction can be horizontal.
However, the first gas inflow direction can also be directed upward
or downward. In the upward direction an angle less than 30.degree.
will be selected, and in the downward direction an angle less than
70.degree. will be selected.
[0029] As stated above, the first direction of gas flow will be
tangential to a circle which is central around the jet of liquid,
i.e. and its jet axis. If this circle lies in a plane which is
penetrated perpendicularly by the jet axis, the first direction of
gas flow can be in this plane or can be directed upward (up to
+30.degree.) or downward (-70.degree.) with respect to this
plane.
[0030] Instead of a "tangential" gas supply it is also possible to
select a radial one. The gas supply can also be diffuse depending
on the direction. While in the case of a directional (radial, i.e.
aimed at the axis of the jet of liquid, or "tangential", i.e. aimed
at an angle to the axis of the jet of liquid) gas supply direction
the gas has a certain direction impressed on it (for example by
means of suitably formed gas supply ducts), in contrast in the case
of a diffuse gas supply no specific direction, and at least no
uniform direction, is predefined.
[0031] The second gas flow which rotates about the jet of liquid is
subsequently preferably deflected into a third gas flow which
corresponds to that of the jet of liquid. The deflection is carried
out from a first, approximately quiet application of gas phase into
a rotating gas stream with gas stream which is accelerated in the
direction of flow of the jet of liquid, it also being possible to
increase the rotation speed. Such a "rotating" inlet, in which this
rotational movement rather quickly ceases, produces, as stated
below, a large stable fluid jet length l.sub.s.
[0032] In order to cause a jet of liquid to be surrounded by gas,
which brings about a large stable fluid jet length l.sub.s, a
housing which is provided with a circumferential wall is used. A
liquid nozzle and at least one gas inlet are arranged in the
housing. In addition, there is a gas outlet nozzle through which
the jet of liquid can be guided in such a way that a first axis of
the jet of liquid and a second axis of the gas flowing out through
the gas outlet nozzle essentially coincide (i.e. with the exception
of a tolerance indicated above).
[0033] A gas inlet will preferably not be situated at the location
of the liquid nozzle, as in the prior art, but rather will be
arranged downstream of the liquid nozzle in terms of fluid
dynamics. However, if the gas retaining space is made sufficiently
large, the gas inlet can also be arranged at another location (for
example directly downstream of the liquid nozzle).
[0034] The housing will preferably be embodied as a double cone
which is positioned vertically (i.e. aligned parallel to the fluid
jet axis) and has cone tips which lie opposite one another. The
liquid nozzle is then arranged in the one upper cone tip, and the
gas outlet nozzle is arranged in the opposite, lower cone tip. The
gas inlet will preferably be arranged in the region of the largest
diameter of the double cone. The wall which constricts in the
downward direction in the shape of a funnel then produces a flow
speed which increases in the downwardly directed flow. An initial
rotation of the gas flow as a result of the "tangential" gas inlets
ceases quite quickly since the jet of water carries along the gas
due to friction. This type of gas inlet serves only for the most
homogeneous possible application of gas to the jet of liquid and
for the avoidance of disruption of the jet of water.
[0035] The intermediate space which is formed between the liquid
nozzle and the gas outlet nozzle (i.e. the "gas retaining space")
can also be embodied differently. It can have, for example, an
essentially constant cross section over its entire length
("cylinder") or be asymmetrical in the z direction (conical or
pyramid shaped). It can also be cuboid. Its maximum diameter
perpendicular to the axis of the jet of liquid is, in particular,
10 to 100 times, preferably approximately 20 times, the diameter of
the jet of liquid.
[0036] Further advantageous embodiments and feature combinations of
the invention emerge from the following detailed description and
the entirety of the patent claims.
BRIEF DESCRIPTION OF THE DRAWINGS
[0037] In the drawings used to explain the exemplary
embodiment:
[0038] FIG. 1 is a schematic illustration of an embodiment variant
of the device according to the invention,
[0039] FIG. 2 shows a cross section through an enlarged
illustration of a nozzle duct of a liquid nozzle of the device
illustrated in FIG. 1, and
[0040] FIG. 3 shows a cross section through the device illustrated
in FIG. 1, along the line III-III there,
[0041] FIG. 4 shows a stable jet length l.sub.s of a jet of liquid
in air when flowing out freely (curves -.-. and ---) as well as
impinging on a surface (curve-),
[0042] FIG. 5 shows an illustration which is analogous to FIG. 4
but in which the jet of liquid has helium applied to it, in an
analogous fashion to the invention, and
[0043] FIG. 6 shows a cross section through a device with a radial
gas supply.
[0044] Basically, identical components in the figures are provided
with identical reference symbols.
WAYS OF EMBODYING THE INVENTION
[0045] The embodiment variant of the device according to the
invention illustrated in FIG. 1 for stabilizing a jet 5 of fluid
generated with a liquid nozzle 1 has a housing 7 which is embodied
as what is referred to as a nozzle. The liquid nozzle 1 is embodied
as what is referred to as a nozzle block. More details are not
given here on the supply of the fluid 9 for the jet 5 of fluid,
here water, and the injection of laser radiation 10 into the jet 5
of fluid. This is described in detail in WO 95/32834 and in WO
99/56907, which will be considered to be included in the present
document by reference. In the present context it is sufficient to
note that a laser (not illustrated) is present and that a suitable
optical system can inject the laser radiation generated by the
laser into the jet of water (for example illustrated in the
documents mentioned at the beginning).
[0046] An enlarged illustration of a nozzle duct 11 of the liquid
nozzle 1 which is embodied as a nozzle block and has the purpose of
generating the jet 5 of fluid is shown in cross section in FIG. 2.
The liquid nozzle 1 has a smooth surface 13 and is preferably
fabricated from diamond or some other hard material. It has a
thickness of 0.5-2 mm and a diameter of, for example, 3 mm, that is
to say is in the shape of a small cylindrical block. A radius
r.sub.k of a perforated edge 15 as an inlet into the nozzle duct 11
is selected to be as small as possible in order to come as close as
possible to a theoretical "sharp-edged inlet". The radius r.sub.k
should be less than 10 .mu.m and is smaller than 2 Mm here. This
sharp-edged inlet generates a jet of liquid with a stable jet
length l.sub.s which is already large. Typical diameters of the
nozzle duct 11 are 20 .mu.m to 200 .mu.m.
[0047] The cylindrical part of the nozzle duct 11 which adjoins the
sharp-edged inlet 15 is kept as short as possible and is in the
order of magnitude of less than five times the diameter d of the
nozzle duct 11; it is three times smaller here. As a result of such
a configuration, the flow of the jet 5 of fluid already becomes
detached from the inner wall 17 of the nozzle duct at the
perforated edge 15. An excessively long nozzle duct 11 would lead
to eddying of a gas between the inner wall 17 of the nozzle duct
and the jet 5 of fluid. The smallest disruptions acting on the jet
of liquid lead to "wavy sheet disintegration" (i.e. disintegration
or degeneration of the jet of liquid into a jet region l.sub.u
which is wavy in the z direction) and thus to a shortened usable
jet length (when laser radiation is injected). The cylindrical part
17 of the nozzle duct wall is adjoined by a conical wall region 19.
This conical part 19 is intended to reduce possible interactions of
the jet of liquid with possible gas eddies. This conical part 19 as
a slope should have an angle between 90.degree. and 150.degree.,
preferably between 130.degree. and 140.degree. with a longitudinal
axis of the nozzle duct 11. Here the slope 19 has an angle of
135.degree. with a manufacturing tolerance.
[0048] An ideal nozzle 1 would thus be a hole in a wall with a wall
thickness e=0. Such a nozzle would however not withstand the water
pressure of several atmospheres pressure. It is thus necessary to
find a compromise between a sufficient rigidity of the nozzle 1 and
the stable fluid jet length l.sub.s. The use of the abovementioned
slope 19 is therefore proposed.
[0049] The inner wall 20 of the housing 7 which adjoins the nozzle
block 1 extends to a maximum, circular internal diameter 21 and
then tapers again conically as an inner wall part 24 toward a gas
outlet nozzle 23. The housing 7 is embodied as a double cone, with
the liquid nozzle 1 (nozzle block) being arranged in the one cone
tip and the gas outlet nozzle 23 being arranged opposite, that is
to say below it.
[0050] At the location of the maximum internal diameter 21, at
least one gas inlet for the applied gas is arranged at the same
radial distance r.sub.s from the jet 5 of fluid or from its jet
axis. In the example shown here, four gas inlets 25a to 25d are
present. The respective gas inlet is embodied as a cylindrical pipe
26a to 26d. Each of these pipes 26a to 26d leads in tangentially on
the inner wall 27 in the region of the maximum internal diameter 21
(i.e. at the radial distance r.sub.s). The gas flow from each of
the pipes 26a to 26d thus flows "tangentially" (that is to say not
radially in the present example) against the inner wall 27 in a
first flow part 29 and is deflected into a circumferential, i.e. a
second flow part 31 with a rotating flow component when it impinges
on the inner wall 27.
[0051] The gas outlet nozzle 23 is arranged in such a way that it
is penetrated centrally by the jet 5 of fluid which guides the
laser radiation. Since a gas outlet is possible only through this
gas outlet nozzle 23, the flow of the applied gas is deflected
downward against the gas outlet nozzle 23 in a third flow part 33
as a result of the friction with the jet 5 of fluid, accompanied by
the downwardly directed flow component being increased. The jet 5
of fluid which emerges from the housing 7 through the gas outlet
nozzle 23 is then largely screened from the ambient air 36 by a
stream 35 of applied gas which is located around the exterior of
the jet of liquid. An initial flow rotation in the region of the
four gas inlet nozzles 25a to 25d increasingly has the downwardly
directed flow component superimposed on it and is also largely
dominated by it within the housing 7.
[0052] As is illustrated in FIG. 2, an intermediate space 37 is
formed between the exterior 39 of the jet 5 of fluid and the
cylindrical nozzle duct inner wall 17, downstream of the perforated
edge 15 in terms of flow. In accordance with the effect of a water
jet pump, the applied gas is, as indicated by the arrow 41, drawn
into the intermediate space 37 and carried along with the jet 5 of
fluid. Since only a little of the applied gas penetrates the
intermediate space 37, there is a partial vacuum in an atmosphere
of applied gas here.
[0053] To summarize, in order to generate a long, stable fluid jet
length l.sub.s it is possible to state that (according to the
exemplary embodiment described above) [0054] directly after the
formation of the jet 5 of fluid it is located in a partial vacuum
region but in an atmosphere of applied gas, [0055] the applied gas
is fed into the "gas retaining space" at the largest possible
distance from the jet of liquid in a direction of flow which is not
aimed at said fluid, [0056] a flow component which rotates around
the jet of liquid can be impressed on the applied gas, and a flow
component can be applied in the direction of flow of the jet of
liquid, with both flow components being directed in an accelerating
fashion against the exterior of the jet of liquid, [0057] the jet 5
of fluid enters the "open air" through the center of a gas outlet
nozzle 23 only after the gas has been applied, [0058] the liquid
nozzle duct is made as short as possible compared to its diameter,
[0059] the liquid nozzle duct inlet is shaped with edges which are
as sharp as possible.
[0060] Each of these features contributes to lengthening the stable
region of the jet length l.sub.s. However, the emphasis should
preferably be placed on the fact that [0061] the jet of liquid is
guided through a gas outlet nozzle which forms a jet of applied gas
at a distance from the liquid nozzle, with the axis of the jet of
liquid and the axis of the gas jet formed essentially coinciding
(i.e. with the exception of a tolerance) or [0062] that the applied
gas is fed in only after a predefined distance downstream in terms
of flow away from the liquid nozzle.
[0063] In order to experimentally illustrate the statement above,
the diagram illustrated in FIG. 4 shows the stable jet length
l.sub.s of a jet 5 of water generated with a nozzle block 1, the
nozzle duct cross section of the nozzle block 1 being 30 .mu.m. The
stable jet length l.sub.s is given on the ordinate, and the fluid
pressure of the fluid directly upstream of the inlet into the
nozzle duct 11 is given on the abscissa. The dot-dash measuring
curve with the measuring points ".box-solid." gives the respective
maximum stable jet length l.sub.s and the dashed measuring curve
with the measuring points ".diamond-solid." gives the respective
minimum stable jet length is. (The jet length fluctuates between
the given maximum and minimum jet length over time). In the
dot-dash measuring curve and in the dashed measuring curve the jet
of liquid has a free outflow, i.e. the fluid which now no longer
constitutes a jet impinges on a surface only at a distance of
several centimeters in the disintegrating jet length l.sub.p. The
third lower, continuous measuring curve with the measuring points
".tangle-solidup." represents the stable jet length of a jet of
liquid which impinges on a surface.
[0064] If, for example, helium (whose kinematic gas viscosity is
less than air) is now applied to the jet of liquid with the above
device in accordance with the method described above, as shown in
FIG. 5 an increase occurs in the region of 5 mm, that is to say of
15-25%, for the maximum and minimum stable jet lengths l.sub.s
(dot-dash and dashed curve) but a sudden increase occurs for the
stable jet length l.sub.s of the jet of liquid which impinges, and
therefore does not end in the open.
[0065] It is clearly apparent that without the gas jet jacket
according to the invention, the jet of liquid forms a jet length of
3-5 mm (FIG. 4) only at relatively high pressure values (from
approximately 300 bar). At pressure values under 200 bar, the
relatively fine jet of 30 .mu.m experiences strong disruption as a
result of its impingement on a surface. This shows that the jet of
liquid cannot be used at all as a waveguide for the processing of
material by laser radiation without the application of gas
according to the invention. As is shown by FIG. 5, the gas stream
according to the invention gives the jet the necessary stability.
Although a certain reduction in the stable jet length l.sub.s can
also be observed with the jet of liquid which is surrounded by a
gas jet according to the invention when said jet of liquid impinges
on a surface, nevertheless jet lengths of 25 mm can be obtained at
400 bar and above. Even at slightly above 100 bar the jet of liquid
reaches a stable jet length of 10 mm.
[0066] The gas outlet nozzle 23, through the center of which the
jet 5 of fluid flows, can then be arranged, as illustrated in FIG.
1, directly at the end of the conically tapering inner wall 24 but
it is also possible to mount a small, circular cylindrical wall
part in front.
[0067] The gas inlet can, as illustrated in FIG. 1, be located in a
plane which is penetrated perpendicularly by the jet 5 of fluid.
The gas inlet pipes 26a to 26d can however also be directed upward
against the liquid nozzle (nozzle block) 1 or downward against the
gas outlet nozzle 23. In the upward direction there should not be
an angle larger than 30.degree. and in the downward direction there
should not be an angle larger than 70.degree..
[0068] The number of gas inlets is not very significant but it
should be ensured that gas is input uniformly at the largest
possible distance from the exterior of the jet 5 of fluid.
[0069] The "tangential gas inlet" described above has proven
successful. However, it is also possible to use other inlet angles.
All that has to be ensured is that the jet 5 of fluid is not
directly hit and disrupted.
[0070] FIG. 6 shows a cross section through an embodiment with a
radial inflow of the applied gas. In the text which follows the
terms "at the top" and "at the bottom" (which correspond to the
illustration in FIG. 6) are used as alternatives for "toward the
inlet side" or "toward the outlet side". A mount 51 has, on its
upper side, an annular connecting part 53 which forms a type of
funnel for an optical system (not illustrated) which feeds in the
laser radiation and focuses it into the nozzle duct of the liquid
nozzle 71. In the mount 51 there are preferably a plurality of
obliquely outwardly and downwardly extending discharge ducts 55
provided, said ducts carrying away the fluid which could collect,
for example, if there is a fault in the connecting part 53.
[0071] The mount 51 has a large, continuous, circular cylindrical
cavity in which a cylindrical functional part 57 is inserted from
below (according to the illustration in FIG. 6) in the manner of a
stopper. The mount 51 therefore surrounds the functional part 57 in
an annular shape and hold it in a coaxial arrangement. At the top
(i.e. toward the connecting part 53) the functional part 57 has an
opening 59 which tapers conically from top to bottom. At the lower
end of the conical opening a shoulder is formed on which the window
element 61 bears against its upper side. On the underside of the
window element 61 there is a closure part 65. A thin, for example
disk-shaped, intermediate space 63 which serves as a fluid inflow
line is provided between the window element 61 and the closure part
65. Viewed in the axial direction of the functional part 57 the
intermediate space 63 has a thickness of, for example, 0.1 to 0.4
mm. Its lateral extent (diameter) may be in the region of several
millimeters (for example 5-10 mm).
[0072] The fluid (for example water) is fed in with the necessary
pressure (for example 400 bar) via an annular duct 69 which is
formed on the inside of the mount 51 and then via one (or more)
radial lines 67 of the functional part 57 into the intermediate
space 63.
[0073] The closure part 65 is inserted from below into a
cylindrical interior space of the functional part 57 in the manner
of a stopper. The window element 61 can thus be exchanged if the
closure part 65 is removed.
[0074] The closure part 65 has, on its upper side facing the
intermediate space 63, a recess in which a liquid nozzle 71
(referred to as nozzle block) is inserted.
[0075] The nozzle block has a central, axial duct which forms the
fine jet of liquid which guides the laser radiation in the manner
of an optical waveguide. The duct has a diameter corresponding to
the diameter of the desired jet of liquid, for example 30 to 60
micrometers. The nozzle block itself has a diameter of 2-4 mm and a
thickness of, for example, 0.5 to 2 mm.
[0076] Adjoining the liquid nozzle 71 there is a gas retaining
space which is formed in the present example from an upper partial
space 73 and a lower partial space 75. The upper partial space 73
widens successively from top to bottom. It can become wider in a
continuous or incremental, conical fashion. In the present
embodiment, it is composed of a first cylindrical and then a first
conical section 73a, and then a following second cylindrical and
finally a second conical section 73b. It widens in this way from
top to bottom by three to five times the diameter. The objective is
to allow the applied gas, which is fed in at the lower end of the
closure part 65, to circulate upward to the output of the nozzle
duct as far as possible without disrupting the jet of liquid.
[0077] A gas nozzle part 77 is mounted on the underside of the
closure part 65. Said gas nozzle part 77 is held by the functional
part 65 (by virtue of the fact that it is, for example, screwed
into a corresponding thread on the functional part 65). The gas
nozzle part 77 has a cavity which forms the lower partial space 75.
It tapers from top to bottom conically and leads to the gas nozzle
duct 79. The gas nozzle duct 79 has a diameter of, for example, 1-2
mm.
[0078] At the location where the two partial spaces 73 and 75
adjoin one another and form the greatest diameter, the gas inlet
region 83 is located. Here, the applied gas is introduced through
gas feed ducts 81a, 81b (for example six of such gas feed ducts are
provided) which extend in a star shape or radially. This is the
location where there is a maximum (radial) distance from the jet of
liquid which runs along the axis of the closure part 65. The gas
feed ducts 81a, 81b are formed, for example, in the upper side of
the gas nozzle part 77 as depressions. They are supplied through an
annular space 85 which is formed between the closure part 65 and
functional part 57. The external gas supply to the annular space 85
is not illustrated in more detail.
[0079] The functional part 57 has, at the lower end, a flange 87
which can be secured against the lower end side of the mount 51
with a holding ring 89.
[0080] The invention is of course not restricted to the exemplary
embodiment shown. The structural separation into the various
elements (mount, functional part, closure part etc.) permits the
module to be disassembled in order, for example, to replace the
nozzle block or the window element. Since the fluid (for example
water) has to be fed in at high pressure, seals are necessary at
suitable locations between the individual parts. (These are shown
in FIG. 6 but not described in more detail). The module can, for
example, be divided at other locations. It does not have to be
possible to disassemble the module from below. The gas retaining
space can also be embodied in a cylindrical fashion with an
essentially constant cross section instead of widening and tapering
conically. The applied gas can, for example, be fed in at the upper
end of such a cylindrical gas retaining space, specifically also in
an axial direction (instead of a radial one). The gas can also be
fed in axially via a plurality of ducts, preferably at a large
distance from the axis of the retaining space (i.e. at a large
distance from the jet of liquid).
[0081] The gas nozzle duct 79 forms the constricted gas outlet of
the gas retaining space. Depending on requirements it can have a
specific aerodynamic shape in order to shape the gas stream. It is
advantageous to make the gas jet as fine as possible (small
diameter). With a gas outlet nozzle in the range from 0.5 to 2 mm
it is possible to generate a gas stream with the corresponding
diameter. (It is understood in this context that the diameter of
the gas stream can change as the propagation distance increases
because, for example, gas is lost or slowed down at the outer
edge). A thin gas stream also has the advantage that the quantity
of gas required can be kept small. However, there is no prohibition
whatsoever on operating with gas streams with a relatively large
diameter (for example 5 mm).
[0082] To summarize it is to be noted that the invention makes it
possible to operate with very fine jets of fluid and consequently
to make very thin cuts or carry out very fine surface
processing.
* * * * *