U.S. patent application number 15/923787 was filed with the patent office on 2018-08-16 for field effect transistor and multilayered epitaxial film for use in preparation of field effect transistor.
The applicant listed for this patent is Renesas Electronics Corporation. Invention is credited to Yuji Ando, Takashi Inoue, Naotaka Kuroda, Hironobu Miyamoto, Yasuhiro Murase, Tatsuo Nakayama, Yasuhiro Okamoto, Kazuki Ota, Akio Wakejima, Katsumi Yamanoguchi.
Application Number | 20180233590 15/923787 |
Document ID | / |
Family ID | 38228026 |
Filed Date | 2018-08-16 |
United States Patent
Application |
20180233590 |
Kind Code |
A1 |
Inoue; Takashi ; et
al. |
August 16, 2018 |
FIELD EFFECT TRANSISTOR AND MULTILAYERED EPITAXIAL FILM FOR USE IN
PREPARATION OF FIELD EFFECT TRANSISTOR
Abstract
In a group III nitride-type field effect transistor, the present
invention reduces a leak current component by conduction of
residual carriers in a buffer layer, and achieves improvement in a
break-down voltage, and enhances a carrier confinement effect
(carrier confinement) of a channel to improve pinch-off
characteristics (to suppress a short channel effect). For example,
when applying the present invention to a GaN-type field effect
transistor, besides GaN of a channel layer, a composition-modulated
(composition-gradient) AlGaN layer in which aluminum composition
reduces toward a top gradually or stepwise is used as a buffer
layer (hetero buffer). To gate length Lg of a FET to be prepared, a
sum a of layer thicknesses of an electron supply layer and a
channel layer is selected so as to fulfill Lg/a.gtoreq.5, and in
such a case, the layer thickness of the channel layer is selected
in a range of not exceeding 5 times (about 500 .ANG.) as long as a
de Broglie wavelength of two-dimensional electron gas accumulated
in the channel layer in room temperature.
Inventors: |
Inoue; Takashi; (Tokyo,
JP) ; Nakayama; Tatsuo; (Saitama, JP) ; Ando;
Yuji; (Tokyo, JP) ; Murase; Yasuhiro; (Tokyo,
JP) ; Ota; Kazuki; (Tokyo, JP) ; Miyamoto;
Hironobu; (Tokyo, JP) ; Yamanoguchi; Katsumi;
(Tokyo, JP) ; Kuroda; Naotaka; (Tokyo, JP)
; Wakejima; Akio; (Tokyo, JP) ; Okamoto;
Yasuhiro; (Tokyo, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Renesas Electronics Corporation |
Kanagawa |
|
JP |
|
|
Family ID: |
38228026 |
Appl. No.: |
15/923787 |
Filed: |
March 16, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
14470403 |
Aug 27, 2014 |
9954087 |
|
|
15923787 |
|
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|
|
12159599 |
Jun 27, 2008 |
8853666 |
|
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PCT/JP2006/321275 |
Oct 25, 2006 |
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14470403 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 29/205 20130101;
H01L 29/42316 20130101; H01L 29/7783 20130101; H01L 29/0607
20130101; H01L 29/2003 20130101; H01L 29/7787 20130101; H01L 29/155
20130101 |
International
Class: |
H01L 29/778 20060101
H01L029/778; H01L 29/423 20060101 H01L029/423; H01L 29/20 20060101
H01L029/20; H01L 29/06 20060101 H01L029/06; H01L 29/15 20060101
H01L029/15; H01L 29/205 20060101 H01L029/205 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 28, 2005 |
JP |
2005-380137 |
Apr 25, 2006 |
JP |
2006-121042 |
Claims
1. A semiconductor device comprising: a substrate; a multilayered
epitaxial grown layer formed on the substrate, having: an AlGaN
buffer layer; a GaN channel layer formed on the AlGaN buffer layer;
and an AlGaN electron supply layer formed on the GaN channel layer;
source and drain electrodes formed on a surface of the AlGaN
electron supply layer; and a gate electrode formed on the surface
of the AlGaN electron supply layer between the source and drain
electrodes, wherein an Al composition of the AlGaN buffer layer
positioned at vicinity of the GaN channel layer is relatively lower
than an Al composition of the AlGaN buffer layer positioned at
vicinity of the substrate, and wherein an Al composition of the
AlGaN buffer layer is monotonically reduced in a direction from the
substrate toward the GaN channel layer.
2. The semiconductor device according to claim 1, wherein an Al
composition of the AlGaN buffer layer is step-wisely reduced in a
direction from the substrate toward the GaN channel layer.
3-6. (canceled)
Description
CROSS REFERENCE TO RELATED APPLICATION
[0001] The present application is a continuation of application
Ser. No. 12/159,599, filed Jun. 27, 2008, which claims priority to
PCT/JP2006/0321275, filed Oct. 25, 2006, which claims priority to
JP 2006-121042, filed Apr. 25, 2006, which claims priority to
JP2005-380137, filed Dec. 28, 2005.
TECHNICAL FIELD
[0002] The present invention relates to a GaN-type field effect
transistor (FET), and in particular, to a high frequency GaN-type
FET, and especially, to a GaN-type FET fit for millimeter wave band
or for sub-millimeter wave band. In particular, the present
invention relates to a heterojunction FET (HJFET) with use of
two-dimensional electron gas being formed in so-called HEMT
structure. Furthermore, the present invention relates to
construction of a multilayered epitaxial film used for preparation
of the GaN-type field effect transistor (FET).
BACKGROUND ART
[0003] In a GaN-type FET, and in particular, a high frequency
GaN-type FET, and especially, a GaN-type FET fit for millimeter
wave band or for submillimeter wave band, in order to achieve a
high frequency performance, structure of an HJFET with use of
two-dimensional electron gas is used widely. Specifically,
construction that an AlGaN/GaN heterojunction is provided under a
gate electrode and electrons supplied from the AlGaN which
functions as an electron supply layer are stored at this
heterojunction interface to form two-dimensional electron gas is
generally adopted. In such a case, as substrate 1, a sapphire
substrate, a SiC substrate, a Si substrate, and the like are used,
an extremely thin nucleation layer, which functions as a growth
nucleus of epitaxial growth, is formed on its surface, and a
GaN-type epitaxial layer is grown on this nucleation layer.
Conventionally, an AlN nucleation layer is selected as a nucleation
layer, a GaN layer is subsequently formed as a buffer layer, and
also a GaN layer is continuously grown up as a channel layer. By
growing up AlGaN electron supply layer 5 on a surface of GaN layer
4 that is continuously formed as the buffer layer and channel
layer, band gap difference .DELTA.E.sub.c in a conduction band
therebetween is use to achieve confinement of two-dimensional
electron gas at a heterojunction interface between the GaN layer of
the channel layer and AlGaN electron supply layer 5. FIG. 4
illustrates the construction of a multilayered epitaxial film for
preparation of an AlGaN/GaN HJFET in which a GaN layer is adopted
as this buffer layer and a GaN layer of the channel layer is
continuously formed by epitaxial growth, and, FIG. 5 illustrates an
example of device structure of the AlGaN/GaN HJFET prepared using a
multilayered epitaxial film with said construction.
DISCLOSURE OF THE INVENTION
Problems to be Solved by the Invention
[0004] However, in the structure of HJFET that is illustrated in
FIG. 5, which is prepared using the multilayered epitaxial film
with such a construction employing a GaN layer as a buffer layer as
shown in FIG. 4, since the GaN layer itself used for the buffer
layer is originally an n.sup.--GaN layer whose residual carrier
concentration is such a level of n=10.sup.15 to 10.sup.16 cm.sup.-3
and its film thickness is set about 1000 nm, it has the following
problems.
[0005] In order to apply the GaN-type HJFET with the structure
illustrated in FIG. 5 to a FET for submillimeter wave or millimeter
wave band particularly, it is necessary to perform miniaturization
of a gate, that is, further shortening gate length Lg. Although a
short channel effect arises in connection with this shortening of
gate length Lg, in the AlGaAs/GaAs-type HJFET, the short channel
effect has been suppressed effectively by taking a measure of
setting aspect ratio Lg/a of gate length Lg to active layer
thickness (a gate-to-channel distance: here, a distance from a gate
electrode to a bottom face of a channel layer) a at 10 or more, in
the past. As for the GaN-type HJFET with such construction as
illustrated in FIG. 5, in the case of setting the gate length Lg in
such size which is adapted for a FET used in millimeter wave or
submillimeter wave band, an extent of an effect on reducing the
short channel effect, which is attained by the approach of setting
aspect ratio Lg/a of gate length Lg to active layer thickness
(gate-to-channel distance) a at 10 or more, is extremely small.
[0006] When a band diagram under a gate electrode is schematically
illustrated regarding the GaN-type HJFET with the construction
illustrated in FIG. 5, it shows such a shape as illustrated in FIG.
6. Attention is centered on GaN layer 4 used as the buffer
layer/channel layer thereof, which is formed on AlN nucleation
layer 2 that is formed on substrate 1. As AlN nucleation layer 2 is
an insulating layer, Fermi level E.sub.f is located in a center of
its band gap at an interface between AlN nucleation layer 2 and GaN
used for the buffer layer. A position of a conduction band edge of
GaN for the buffer layer relative to Fermi level E.sub.f is
determined by a difference .DELTA.E.sub.c (AlN/GaN) between
conduction band energies E.sub.c of AlN and GaN at this interface.
On the other hand, a Schottky junction is formed at an interface
between AlGaN electron supply layer 5 and gate electrode 8, and a
level of a conduction band edge of AlGaN electron supply layer 5
relative to Fermi level E.sub.f is determined in a height of the
Schottky junction. AlGaN electron supply layer 5 supplies electrons
and is depleted, and therefore, at the interface between AlGaN
electron supply layer 5 and GaN of the channel layer, a position of
the conduction band edge of AlGaN electron supply layer 5 relative
to Fermi level E.sub.f is determined by a thickness of this AlGaN
electron supply layer 5, and an amount of fixed electric charges
generated by depletion.
[0007] In such a case when whole AlGaN electron supply layer 5 is
depleted, as shown in FIG. 6, at the interface between AlGaN
electron supply layer 5 and GaN of the channel layer, a position of
the conduction band edge of AlGaN electron supply layer 5 to Fermi
level E.sub.f becomes higher a little than the Fermi level E.sub.f.
When taking account of state density N.sub.C of the conduction band
in AlGaN electron supply layer 5, residual donor density N.sub.D
which generate residual carriers and so on, at the interface
between AlGaN electron supply layer 5 and GaN of the channel layer,
a position of the conduction band edge of AlGaN electron supply
layer 5 positions at a higher level by, for example, about 3 kT (k
denotes a Boltzmann's constant and T denotes about 300K of
temperature) than the Fermi level E.sub.f. On the other hand, at
the interface, a position of a conduction band edge of a channel
layer GaN is pinned at a level which is lower than the position of
the conduction band edge of AlGaN electron supply layer 5, by
energy being corresponding to a difference .DELTA.E.sub.c
(AlGaN/GaN) between conduction band energies E.sub.c of AlGaN and
GaN. Hence, since the position of the conduction band edge of the
channel layer GaN is set greatly lower than Fermi level E.sub.f at
this interface, electrons are locally accumulated in a high
concentration to composes two-dimensional electron gas thereof. In
addition, the elecreons of two-dimensional electron gas to be
accumulated at this interface are supplied from AlGaN electron
supply layer 5, which includes contribution of electrons supplied
from a shallow donor level which exists in AlGaN electron supply
layer 5, and contribution by polarized charges of the AlGaN
itself.
[0008] That is, at the interface between AlN nucleation layer 2 and
the GaN for a buffer layer, the position of the conduction band
edge of the GaN used for the buffer layer is set high by
{1/2.times.E.sub.g(AlN)-.DELTA.E.sub.c(AlN/GaN)} in comparison with
Fermi level E.sub.f. On the other hand, at the interface between
AlGaN electron supply layer 5 and the GaN used for the channel
layer, the position of the conduction band edge of the GaN for the
channel layer is set at a low position by approximately
{.DELTA.E.sub.c(AlGaN/GaN)-3 kT} (k denotes a Boltzmann's constant
and T denotes about 300K of temperature) relative to Fermi level
E.sub.f. On the other hand, when the GaN layer is an n.sup.--GaN
layer whose residual carrier concentration is at such level of
n=10.sup.15 to 10.sup.16 cm.sup.-3 or so, the position of the
conduction band edge of the GaN layer is at a higher position by
about 3 kT (k denotes a Boltzmann's constant and T denotes about
300K of temperature) than Fermi level E.sub.f. That is, when the
GaN layer itself used for the buffer layer is originally an
n.sup.--GaN layer whose residual carrier concentration is as low as
n=10.sup.15 to 10.sup.16 cm.sup.-3 or so and its film thickness is
also as thin as about 1000 nm, near the interface between AlN
nucleation layer 2 and the GaN for the buffer layer, the position
of the conduction band edge of the GaN for the buffer layer
composes such band structure, in which its position is lowered in
the concave form relative to Fermi level E.sub.f. In contrast, near
the interface between AlGaN electron supply layer 5 and the GaN
used for the channel layer, the position of the conduction band
edge of the GaN for the channel layer rises rapidly in a convex
form, and intersects Fermi level E.sub.f. The two-dimensional
electron gas formed at the interface between AlGaN electron supply
layer 5 and the GaN for the channel layer is kept in a state of
being confined within a narrow region until the position of the
conduction band edge of the GaN used for the channel layer
intersecting Fermi level E.sub.f. However, since the GaN layer
itself used for the buffer layer is originally an n.sup.--GaN layer
whose residual carrier concentration is as low as n=10.sup.15 to
10.sup.16 cm.sup.-3 or so and its film thickness is also as thin as
about 1000 nm, the position of the conduction band edge of the GaN
used for the buffer layer is held in a state of being high by only
about 3 kT (k denotes a Boltzmann's constant and T denotes about
300K of temperature) from Fermi level E.sub.f in a region close to
the GaN for the channel layer. That is, in the region close to the
GaN for the channel layer, since the position of the conduction
band edge of the GaN used for the buffer layer is close to Fermi
level E.sub.f, electrons can be easily injected into the GaN used
for the buffer layer. Electrons injected into this GaN used for the
buffer layer will be a factor causing the lowering of break-down
voltage and failure of pinch-off. In particular, in the GaN-type
HJFET with the construction illustrated in FIG. 5, when gate length
Lg is shortened so as to be adapted for a FET used in millimeter
wave or submillimeter wave band, it is considered to become, for
instance, a factor which causes such a device performance
degradation that is exemplified in FIG. 7, which results from the
short channel effect.
[0009] As the buffer layer, when AlGaN with a low aluminum content
ratio is employed instead of GaN, usually, this AlGaN with a low
aluminum content ratio itself is an n.sup.- layer where a residual
carrier concentration is as low as n=10.sup.14 to 10.sup.15
cm.sup.-3 or so. In addition, when the whole buffer layer is formed
of such n.sup.--type AlGaN with a low aluminum content ratio, its
band structure becomes what is obtained by shifting the band
structure in the case of employing the GaN buffer layer as
exemplified in FIG. 4 by energy corresponding to a difference
.DELTA.E.sub.c (AlGaN/GaN) between conduction band energies E.sub.c
of the AlGaN and GaN. Hence, in the case that the difference
.DELTA.E.sub.c (AlGaN/GaN) between the conduction band energies
E.sub.c of the AlGaN and GaN does not exceed 2 kT (k denotes a
Boltzmann's constant and T denotes about 300K of temperature), an
influence that electrons are injected from the GaN of the channel
layer to the AlGaN of the buffer layer with exceeding this slight
step cannot be fully excluded.
[0010] The present invention is to solve the above-mentioned
problems, and objects of the present invention are to provide
structure of an HJFET which can avoid device performance
degradation caused by a short channel effect in the case of
shortening gate length Lg that is fit to a FET for millimeter wave
or submillimeter wave band, so as to suppress effectively an
influence of electron injection from the channel layer to the
buffer layer, and a multilayered epitaxial film used for
preparation of the HJFET. In particular, in an AlGaN/GaN/-type
HJFET or an AlGaInN/GaInN-type HJFET, the object is to provide
structure of an HJFET which can avoid device performance
degradation caused by a short channel effect in the case of
shortening gate length Lg that is fit to a FET for millimeter wave
or submillimeter wave band, so as to suppress effectively an
influence of electron injection from the channel layer to the
buffer layer, and a multilayered epitaxial film used for
preparation of the HJFET.
Means for Solving the Problems
[0011] First of all, the inventors of the present invention
analyzed technical features of conventional methods which can
suppress electron injection from GaN of the channel layer to AlGaN
of the buffer layer, and can achieve a carrier (electron)
confinement effect into the GaN channel layer in the case where the
AlGaN is employed as the buffer layer, as mentioned above.
[0012] In the case when a group III nitride semiconductor
containing Al is provided on a substrate as an underlying layer of
the channel layer (electron travelling layer) and the GaN channel
layer and the AlGaN electron supply layer are formed on its upper
face, such a structure that the composition of the underlying layer
changes continuously or step-wise from a substrate side to the GaN
channel layer are proposed as means of suppressing a phenomenon
that a distortion stress is accumulated in the underlying layer
formed on the above-mentioned substrate, and thereby a crack
generates (see JP 2004-289005 A, JP 2002-359255 A, JP 2003-45899 A,
JP 2004-327882 A, JP 2005-167275 A, and the like). For example, it
is suggested that it is possible to achieve an effect of
suppressing crack generation in the underlying layer by using such
a structure in which nitriding treatment is carried out on a
surface of a sapphire substrate to form a surface nitrided layer
thereon, and thereafter, the composition of the underlying layer is
set AlN at a substrate side and Al.sub.0.5Ga.sub.0.5N at a GaN
channel layer side. Specifically, since there is a difference
between a lattice constant of the sapphire substrate, and a lattice
constant of the AlN, a tensile stress due to this lattice
mismatching is applied to the AlN layer with a short lattice
constant, and hence, as a film thickness of the AlN layer
increases, crack generation is induced. When its composition is
changed to increase the lattice constant while the film thickness
increases, an increase in the tensile stress is suppressed as the
whole underlying layer; whereby, an effect of avoiding the stress
reaching a threshold value which causes the crack generation is
obtained. When forming the whole underlying layer with AlN, a
barrier corresponding to a difference .DELTA.E.sub.c(AlN/GaN)
between both conduction band edge energies thereof is generated at
the interface between the GaN channel layer and AlN underlying
layer; but, on the other hand, when the composition of the
underlying layer is changed so as to be Al.sub.0.5Ga.sub.0.5N at
the GaN channel layer side, a barrier corresponding to a difference
.DELTA.E.sub.c(Al.sub.0.5Ga.sub.0.5N/GaN) between both conduction
band edge energies thereof is generated at the interface between
the GaN channel layer and underlying layer. It is also suggested
that, as
.DELTA.E.sub.c(AlN/GaN)>.DELTA.E.sub.c(Al.sub.0.5Ga.sub.0.5N/GaN),
the barrier height at the interface is reduced, but it is possible
to obtain enough the carrier (electron) confinement effect into the
GaN channel layer also in the case of the barrier height of
.DELTA.E.sub.c(Al.sub.0.5Ga.sub.0.5N/GaN). It is suggested that,
also when the composition of the underlying layer is set AlN at the
substrate side and Al.sub.0.5Ga.sub.0.5N at the GaN channel layer
side instead of the AlN underlying layer, an effect to enhancement
in sheet carrier density in the GaN channel layer will be no
inferiority.
[0013] In the above-described method, at the step of forming the
AlN underlying layer on the sapphire substrate, a very thin film
thickness of surface nitrided layer or a low-temperature growth AlN
layer is provided on the sapphire substrate surface, and hence,
distortion stresses, resulting from lattice mismatching, is
concentrated in the very thin film thickness of layer provided at
the interface to generate misfit dislocations in a high density
therein, which relieve a considerable part of the tensile stress
applied to the AlN underlying layer. However, the AlN epitaxial
film which contacts this interface is still left in such a state
that the lattice constant in an inplane direction is widened by the
residual tensile stress. In addition, when successively growing the
AlN epitaxial film thereon, such a state that the lattice constant
in the inplane direction is widen is also maintained, and, as a
whole, the tensile stress is further] accumulated as the film
thickness increases. On the other hand, when the composition is
gradually changed from AlN to Al.sub.0.5Ga.sub.0.5N in the
epitaxial film which is grown succeedingly, since a lattice
constant of the AlGaN itself in an inplane direction is larger than
the lattice constant of the AlN in the inplane direction, the
increase in the tensile stress to be accumulated therein with the
increase in the film thickness is reduced as a result. It is also
suggested that this effect becomes more remarkable when the
composition change to the Al.sub.0.5Ga.sub.0.5N from the AlN is
made at comparatively high rate, and it is preferable to select,
for example, a ratio (reduction percentage) that a variation
.DELTA.Al of Al composition per 0.05 .mu.m of increase .DELTA.t of
film thickness t is -0.05, i.e. such a large rate of composition
change as .DELTA.Al/.DELTA.t=-1 (.mu.m.sup.-1).
[0014] That is, the method mentioned above is effective in
suppression of crack generation, which is generated when selecting
the sapphire substrate, which has a lattice constant significantly
larger than the lattice constant of AlN, as a substrate, in the
case that AlN that can be originally insulated is used as the
buffer layer; however, the method does not by any means have a
function for improving degradation of crystalline property which is
essentially caused by lattice mismatching, for example, in the case
when a substrate which has a lattice constant smaller than the
lattice constant of the AlN, or a substrate which has an almost
equal lattice constant (for instance, a SiC substrate or the like)
is used.
[0015] On the other hand, the present inventors found that the
following technical features were exerted when gradually reducing
Al composition of AlGaN, which constructs an AlGaN buffer layer,
from a substrate side to a GaN channel layer when using a substrate
which has a lattice constant smaller than or almost equal to the
lattice constant of AlN: [0016] Effectiveness of suppressing an
influence that electrons are injected from GaN used as the channel
layer to AlGaN used as the buffer layer [0017] This suppressing
effect is remarkable when comparatively thickening a film thickness
of the AlGaN buffer layer, and in particular, even if it is a case
that Al composition of the AlGaN at an interface between the GaN
channel layer and the AlGaN buffer layer is set as low as 0.05, a
carrier (electron) confinement effect into the GaN channel layer is
obtained enough, and the present inventors revealed the
characteristic principle of operation thereof. The present
inventors came to complete the present invention on the basis of
the above-mentioned findings.
[0018] That is, as means of solving the above-mentioned problems,
the present invention employs a buffer layer which is made up of
semiconductor alloy material which is given "composition
modulation", forms a heterojunction which comprises an electron
supply layer/a channel layer on the buffer layer, and constructs a
heterojunction FET using two-dimensional electron gas, as explained
below. In particular, as construction of a multilayered epitaxial
film which is used for preparation of the heterojunction FET using
two-dimensional electron gas according to the present invention,
for example, also when using a substrate which has a lattice
constant smaller than the lattice constant of AlN, the carrier
(electron) confinement effect into the channel layer is improved by
an principle of operation, which is completely different from those
of the conventional methods mentioned above, by selecting such
construction that employs the buffer layer which is made up of
semiconductor alloy material which is given "composition
modulation", and forms a heterojunction which comprises the
electron supply layer/channel layer on the buffer layer.
[0019] That is, the multilayered epitaxial film according to the
present invention is
[0020] a multilayered epitaxial film epitaxial grown on a
substrate, which is usable in fabrication of a field-effect
transistor, characterized in that
[0021] the multilayered epitaxial film is formed out of compound
semiconductors which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof, and
comprises layered structure in which a heterojunction which is made
up of an electron supply layer/a channel layer is formed on a
buffer layer;
[0022] the buffer layer comprises a region made up of a
semiconductor material whose composition monotonically changes
along a direction from a substrate surface to the channel layer,
wherein the composition of the semiconductor material is selected
so that energy of a conduction band edge of the semiconductor
material in the region reduces monotonically;
[0023] composition of the semiconductor material in the region is
selected so that energy of the conduction band edge of the
semiconductor material in the region is higher in comparison with
the energy of the conduction band edge of the semiconductor
material which makes up of the channel layer at an interface
between the region and the channel layer; and
[0024] the energy of the conduction band edge in the region
exhibits a shape convex toward a side where electronic energy is
higher, along a direction from the substrate surface to the channel
layer.
[0025] In such a case, it is preferable to adopt such structure
that the multilayered epitaxial film is formed of group III
nitride-type compound semiconductors or semiconductor alloys
thereof,
[0026] the channel layer is formed of GaN, InGaN, or
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0),
[0027] the electron supply layer is formed of AlGaN, InAlN, or
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0),
[0028] the buffer layer is formed of AlGaN, InAlN, or
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0), and
[0029] a composition change of semiconductor material in the region
is set such that Al composition is monotonically reduced or In
composition is monotonically increased along a direction from the
substrate surface to the channel layer.
[0030] Furthermore, the multilayered epitaxial film can be
constructed in such a form that the film comprises a barrier layer
between the channel layer and the buffer layer, wherein the barrier
layer is formed of InAlGaN, or
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and
[0031] energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the barrier layer
is higher than energy of a conduction band edge of the III group
nitride-type semiconductor material which forms the channel layer
in contact with the barrier layer, and higher than energy of a
conduction band edge of the group III nitride-type semiconductor
material which forms the buffer layer at an interface between the
buffer layer and the barrier layer.
[0032] For example, it is preferable that the buffer layer is
formed of Al.sub.xGa.sub.1-xN (where, x is 1.gtoreq.x.gtoreq.0),
and Al composition x is monotonically reduced along a direction
from the substrate surface to the channel layer, and a rate of
change: |.differential.x(z)/.differential.z| of the Al composition
x in a direction from the substrate surface to the channel layer (Z
direction) is selected within a range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
[0033] In addition, in the multilayered epitaxial film according to
the present invention,
[0034] It is desirable to have such a form in which a composition
change of the semiconductor material in the region is formed in
such a shape that the composition changes continuously or changes
step-wise.
[0035] In the multilayered epitaxial film according to the present
invention mentioned above,
[0036] it is desirable to fulfill such a condition that a total
amount of positive space charges generated in the electron supply
layer is equal to or more than a total amount of negative space
charges generated in the buffer layer and at an interface between
the buffer layer and the channel layer.
[0037] On the other hand, a field-effect transistor according to
the present invention is
[0038] a field-effect transistor fabricated using a multilayered
epitaxial film epitaxial grown on a substrate, characterized in
that
[0039] the multilayered epitaxial film is formed out of compound
semiconductors which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof, and
comprises layered structure in which a heterojunction which is made
up of an electron supply layer/a channel layer is formed on a
buffer layer;
[0040] the buffer layer comprises a region made up of a
semiconductor material whose composition monotonically changes
along a direction from a substrate surface to the channel layer,
wherein the composition of the semiconductor material is selected
so that energy of a conduction band edge of the semiconductor
material in the region reduces monotonically;
[0041] composition of the semiconductor material in the region is
selected so that energy of the conduction band edge of the
semiconductor material in the region is higher in comparison with
the energy of the conduction band edge of the semiconductor
material which makes up of the channel layer at an interface
between the region and the channel layer; and
[0042] the energy of the conduction band edge in the region
exhibits a shape convex toward a side where electronic energy is
higher, along a direction from the substrate surface to the channel
layer.
[0043] In such a case, it is preferable to select such structure
that a gate electrode is provided on the electron supply layer,
and
[0044] an aspect ratio Lg/a of an active layer thickness a, which
is defined as a total of a film thickness of the electron supply
layer and a film thickness of the channel layer under the gate
electrode, to a gate length Lg fulfills Lg/a.gtoreq.5. In
particular, in the field-effect transistor according to the present
invention,
[0045] it is preferable to have such construction that the
multilayered epitaxial film is formed out of group III nitride-type
compound semiconductors or semiconductor alloys thereof,
[0046] the channel layer is formed of GaN, InGaN, or
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0),
[0047] the electron supply layer is formed of AlGaN, InAlN, or
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0),
[0048] the buffer layer is formed of AlGaN, InAlN, or
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0), and
[0049] a composition change of semiconductor material in the region
is set such that Al composition is monotonically reduced or In
composition is monotonically increased along a direction from the
substrate surface to the channel layer.
[0050] Furthermore, it is desirable to be constructed so that the
multilayered epitaxial film comprises a barrier layer between the
channel layer and the buffer layer, wherein the barrier layer is
formed of InAlGaN, or (In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where,
1.gtoreq.v.gtoreq.0 and 1.gtoreq.w.gtoreq.0), and
[0051] energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the barrier layer
is higher than energy of a conduction band edge of the III group
nitride-type semiconductor material which forms the channel layer
in contact with the barrier layer, and higher than energy of a
conduction band edge of the group III nitride-type semiconductor
material which forms the buffer layer at an interface between the
buffer layer and the barrier layer.
[0052] For example, it is further preferable that the buffer layer
is formed of Al.sub.xGa.sub.1-XN (where, x is 1.gtoreq.X.gtoreq.0),
and its Al composition x is monotonically reduced along a direction
from the substrate surface to the channel layer, and a rate of
change: |.differential.x(z)/.differential.z| of the Al composition
x in a direction from the substrate surface to the channel layer (Z
direction) is selected within a range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
Effect of Invention
[0053] In the structure of HJFET according to the present
invention, electron injection from a channel layer to a buffer
layer is suppressed effectively, and hence, when the gate length Lg
is shortened as to be fitted to a FET adapted for submillimeter
wave or millimeter wave band, degradation of device performance
which is caused by a short channel effect is avoided. In addition,
factors leading to a break-down voltage defect and a pinch-off
defect are also excluded therein, and thus, the structure of HJFET
according to the present invention also achieves large improvement
in comparison with conventional structure regarding a gain obtained
in high frequency operation (RF gain) as well as a gain obtained in
DC operation (DC gain) in the case of high voltage operation where
bias V.sub.D which is applied between a source and a drain is set
high. Furthermore, the structure of the multilayered epitaxial film
according to the present invention is set in such a cinstruction
designed to be suitable for preparation of the above-mentioned
HJFET according to the present invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0054] FIG. 1 is a sectional view illustrating schematically an
example of structure of a multilayered epitaxial film according to
the first exemplary embodiment of the present invention;
[0055] FIG. 2 is a sectional view illustrating schematically an
example of structure of a heterojunction FET according to the
second exemplary embodiment of the present invention;
[0056] FIG. 3 is a diagram illustrating schematically a band
diagram of a conduction band edge in multilayered epitaxial
structure under a gate electrode of a heterojunction FET according
to the second exemplary embodiment of the present invention, and in
particular, an AlGaN/GaN-type HJFET. Reference symbol x illustrated
in the drawing denotes Al composition in an AlGaN buffer layer
which is given "Al composition modulation";
[0057] FIG. 4 is a sectional view illustrating schematically an
example of structure of a multilayered epitaxial film for a
conventional AlGaN/GaN-type HJFET using a GaN buffer layer;
[0058] FIG. 5 is a sectional view illustrating schematically an
example of structure of a conventional AlGaN/GaN-type HJFET using a
GaN buffer layer;
[0059] FIG. 6 is a diagram illustrating schematically a band
diagram of a conduction band edge in multilayered epitaxial
structure under a gate electrode of a conventional AlGaN/GaN-type
HJFET using a GaN buffer layer;
[0060] FIG. 7 is a graph illustrating a result of the Id-Vd
characteristic measured for a conventional AlGaN/GaN-type HJFET
using a GaN buffer layer, in particular, for the device with a gate
length Lg=0.15 .mu.m;
[0061] FIG. 8 is a graph illustrating a result of performing
forecasting calculation of a negative polarized charge density
generated in an AlGaN buffer layer which is given "Al composition
modulation" theoretically with changing variously Al composition xb
at an interface with an AlN nucleation layer of the other side on
the condition of 1 .mu.m of film thickness of the AlGaN buffer
layer, and Al composition xt=0.05 at an interface with a GaN
channel layer;
[0062] FIG. 9 is a diagram illustrating schematically a band
diagram of a conduction band edge in multilayer epitaxial structure
for an AlGaN/GaN-type HJFET according to the second exemplary
embodiment of the present invention, in which the multilayer
epitaxial structure specifically shown in the drawing is selected.
Reference symbol x illustrated in the drawing denotes Al
composition in an AlGaN buffer layer which is given "Al composition
modulation";
[0063] FIG. 10 is a graph illustrating a result of the Id-Vd
characteristic measured for an AlGaN/GaN-type HJFET according to
the second exemplary embodiment of the present invention, in
particular, for the device with a gate length Lg=0.15 .mu.m;
[0064] FIG. 11 is a sectional view illustrating schematically an
example of structure of a multilayered epitaxial film for an
AlGaN/GaN-type HJFET according to the third exemplary embodiment of
the present invention;
[0065] FIG. 12 is a sectional view illustrating schematically an
example of a structure for an AlGaN/GaN-type HJFET according to the
third exemplary embodiment of the present invention;
[0066] FIG. 13 is a diagram illustrating schematically a band
diagram of a conduction band edge in multilayered epitaxial
structure under a gate electrode of an AlGaN/GaN-type HJFET
according to the third exemplary embodiment of the present
invention. Reference symbol x illustrated in the figure denotes Al
composition in an AlGaN buffer layer which is given "Al composition
modulation"; and
[0067] FIG. 14 is a diagram illustrating schematically a band
diagram of a conduction band edge in multilayered epitaxial
structure under a gate electrode of an AlGaN/GaN-type HJFET
according to the fourth exemplary embodiment of the present
invention. In a buffer layer, very thin InAlGaN barrier layers are
inserted between respective layers of very thin AlGaN buffer layers
which are given "Al composition modulation" step-wise, whereby
periodic potential structure is formed therein. In the drawing,
.DELTA.z denotes a film thickness of the very thin AlGaN buffer
layer which is given "Al composition modulation", and, .DELTA.B
denotes a film thickness of the very thin InAlGaN barrier layer. In
addition, reference symbol x illustrated in the drawing denotes Al
composition in an AlGaN buffer layer which is given "Al composition
modulation".
BEST MODE FOR CARRYING OUT THE INVENTION
[0068] Preferable embodiments of the present invention will be
described below.
[0069] First, the multilayered epitaxial film according to the
preferable embodiment of the present invention is
[0070] a multilayered epitaxial film epitaxial grown on a
substrate, which is usable in fabrication of a field-effect
transistor, characterized in that
[0071] the multilayered epitaxial film is formed out of compound
semiconductors which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof;
[0072] the spontaneous polarization and piezo polarization effects
exhibited in the compound semiconductors or the semiconductor alloy
thereof continuously changes in magnitude with composition change
of the semiconductor material;
[0073] the multilayered epitaxial film comprises layered structure
in which a heterojunction which is made up of an electron supply
layer/a channel layer is formed on a buffer layer, and electrons
are accumulated two-dimensionally at a heterojunction interface of
the electron supply layer/channel layer;
[0074] the buffer layer is made up of semiconductor material whose
composition monotonically changes from a substrate surface along a
direction from the substrate surface to the channel layer;
[0075] in the semiconductor material whose composition
monotonically changes, which forms the buffer layer, the
composition change is set such that it changes continuously or
changes step-wise by fine film thickness steps;
[0076] in the semiconductor material whose composition
monotonically changes, which forms the buffer layer, its
composition at an interface between the buffer layer and the
channel layer is selected so that energy of a conduction band edge
of the semiconductor material having said composition is higher in
comparison with energy of a conduction band edge of the
semiconductor material which forms the channel layer;
[0077] in the semiconductor material whose composition
monotonically changes, which forms the buffer layer, its
composition change along a direction from the substrate surface to
the channel layer is selected so that energy of a conduction band
edge of the semiconductor material whose composition monotonically
changes is monotonically reduced along a direction from the
substrate surface to the channel layer;
[0078] as a result of the selected composition change along the
direction from the substrate surface to the channel layer,
polarization obtained by totaling spontaneous polarization and
piezo polarization exhibited in the semiconductor material whose
composition monotonically changes, which forms the buffer layer,
monotonically changes along a direction from the substrate surface
to the channel layer, and the resulted change of the polarization
causes negative polarized charges to be generated in the
semiconductor material whose composition monotonically changes,
which forms the buffer layer;
[0079] as a result of the generated negative polarized charges, in
the semiconductor material whose composition monotonically changes,
which forms the buffer layer, energy of a conduction band edge of
such region monotonically reduces while exhibiting a shape convex
toward a side where electronic energy is higher, along a direction
from the substrate surface to the channel layer; and
[0080] a film thickness of the channel layer is selected to be five
or less times of a de Broglie wavelength of electrons accumulated
two-dimensionally in the channel layer.
[0081] In such a case, when such a structure fit to the operation
in a depletion mode (normally on) is selected for the field-effect
transistor to be fabricated, it is preferable to adopt such a
structure in which said buffer layer is formed on a nucleation
layer that is formed on the above-mentioned substrate surface, and
in the field-effect transistor fabricated therewith, at least a
total amount of "positive" space charges, which are generated in
the electron supply layer, directly under a gate electrode is set
to be equal to or more than a total amount of "negative" space
charges which are generated in the buffer layer, at the interface
between the buffer layer and channel layer, and at an interface
between said buffer layer and the nucleation layer.
[0082] In addition, in the multilayered epitaxial film according to
the preferable embodiment of the present invention, it is desirable
to select such construction in which
[0083] residual carriers of the semiconductor material whose
composition monotonically changes, which constructs said buffer
layer, are electrons, and
[0084] density of negative polarized charges which are generated in
the semiconductor material which constructs said buffer layer is
set at such density higher than density of the ionized impurity
levels from which the residual carriers generate in the
semiconductor material whose composition monotonically changes,
which constructs said buffer layer.
[0085] One of more preferable embodiments as for the multilayered
epitaxial film according to the above-mentioned preferable
embodiment of the present invention is such an exemplary embodiment
wherein
[0086] the compound semiconductors which exhibit spontaneous
polarization and piezo polarization effects, or semiconductor
alloys thereof, which is used to form the multilayered epitaxial
film, are group III nitride-type compound semiconductors or
semiconductor alloys thereof. In the multilayered epitaxial film
according to the first mode of more preferable exemplary
embodiments of the present invention, selected is such a structure
in which
[0087] the compound semiconductors which exhibit spontaneous
polarization and piezo polarization effects, or semiconductor
alloys thereof, which are used to form the multilayered epitaxial
film, are group III nitride-type compound semiconductors or
semiconductor alloys thereof;
[0088] in the multilayered epitaxial film,
[0089] as to the heterojunction which is made up of the electron
supply layer/a channel layer,
[0090] the channel layer is formed of GaN, InGaN, or a group III
nitride-type semiconductor material expressed in
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and
[0091] the electron supply layer is made up of AlGaN, an InAlN
layer, or a group III nitride-type semiconductor material expressed
as In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and are 1.gtoreq.x+y.gtoreq.0), and is selected so that
energy of a conduction band edge of the group III nitride-type
semiconductor material which forms the electron supply layer is
higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the channel layer,
at an interface between the buffer layer and the channel layer, to
form the heterojunction which has an energy barrier resulting from
difference in the energy of the conduction band edge at the
interface;
[0092] the buffer layer is formed of AlGaN, InAlN, or a group III
nitride-type semiconductor material expressed as
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0), and,
[0093] at an interface between the buffer layer and the channel
layer, composition of the group III nitride-type semiconductor
material which forms the buffer layer is selected so that energy of
a conduction band edge of the group III nitride-type semiconductor
material of the composition is higher than energy of a conduction
band edge of the group III nitride-type semiconductor material
which forms the channel layer, to form a heterojunction which has
an energy barrier resulting from difference in the energy of the
conduction band edge at the interface; and
[0094] in the group III nitride-type semiconductor material whose
composition monotonically changes, which forms the buffer layer,
its composition change along a direction from the substrate surface
to the channel layer is provided by any of a composition change of
Al composition being monotonically reduced along the direction from
the substrate surface to the channel layer, and a composition
change of In composition being monotonically increased along the
direction from the substrate surface to the channel layer.
[0095] In such a case, in the multilayered epitaxial film according
to a first embodiment of the present invention,
[0096] it is desirable to select such construction in which
[0097] residual carriers of the semiconductor material whose
composition monotonically changes, which constructs said buffer
layer, are electrons, and
[0098] density of negative polarized charges which are generated in
the semiconductor material which constructs said buffer layer is
set at such density higher than density of the ionized impurity
levels from which the residual carriers generate in the
semiconductor material whose composition monotonically changes,
which constructs said buffer layer.
[0099] In the multilayered epitaxial film according to the first
mode of the mod of the more preferable embodiment of the present
invention, it is preferable that, for example, the group III
nitride-type semiconductor material whose composition monotonically
changes, which forms the buffer layer, is formed of a group III
nitride-type semiconductor material expressed as
Al.sub.xGa.sub.1-xN (where, x is 1.gtoreq.x.gtoreq.0);
[0100] the composition change along the direction from the
substrate surface to the channel layer exhibited in the group III
nitride-type semiconductor material, whose composition
monotonically changes, is provided by a composition change of Al
composition x being monotonically reduced along the direction from
the substrate surface to the channel layer, and
[0101] a rate of change: |.differential.x(z)/.differential.z| of
the Al composition x in a direction from the substrate surface to
the channel layer (Z direction) is selected within a range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
[0102] In addition, another one of more preferable embodiments as
for the multilayered epitaxial film according to the preferable
embodiment of the present invention is such an exemplary embodiment
wherein
[0103] the compound semiconductors which exhibit spontaneous
polarization and piezo polarization effects, or semiconductor
alloys thereof, which is used to form said multilayered epitaxial
film, are group III nitride-type compound semiconductors or
semiconductor alloys thereof. In the multilayered epitaxial film
according to the second mode of more preferable embodiments of the
present invention, selected is such a structure in which
[0104] the compound semiconductors which exhibit spontaneous
polarization and piezo polarization effects, or semiconductor
alloys thereof, which are used to form said multilayered epitaxial
film, are group III nitride-type compound semiconductors or
semiconductor alloys thereof;
[0105] the multilayered epitaxial film comprises layered structure
in which a heterojunction, which is made up of an electron supply
layer/a channel layer, is formed on the buffer layer with a barrier
layer intervening therebetween, and electrons are accumulated
two-dimensionally at the heterojunction interface of the electron
supply layer/channel layer;
[0106] in the multilayered epitaxial film,
[0107] as to the heterojunction which is made up of the electron
supply layer/channel layer,
[0108] the channel layer is formed of GaN, InGaN, or a group III
nitride-type semiconductor material expressed in
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and
[0109] the electron supply layer is made up of AlGaN, an InAlN
layer, or a group III nitride-type semiconductor material expressed
as In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and are 1.gtoreq.x+y.gtoreq.0), and is selected so that
energy of a conduction band edge of the group III nitride-type
semiconductor material which forms the electron supply layer is
higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the channel layer,
at an interface between the buffer layer and the channel layer, to
form the heterojunction which has an energy barrier resulting from
difference in the energy of the conduction band edge at the
interface;
[0110] the barrier layer intervenes between the channel layer and
buffer layer, and is formed of In AlGaN, or a group III
nitride-type semiconductor material expressed by
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and is selected so that energy of a
conduction band edge of the group III nitride-type semiconductor
material which forms the barrier layer is higher than energy of a
conduction band edge of the group III nitride-type semiconductor
material which forms the channel layer in contact with the barrier
layer, and energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the barrier layer
is higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the buffer layer at
an interface between the buffer layer and the barrier layer, to
form a heterojunction which has an energy barrier resulting from
difference in the energy of the conduction band edge at the
interface;
[0111] the buffer layer is formed of AlGaN, InAlN, or a group III
nitride-type semiconductor material expressed as
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0), and, at an interface between
the buffer layer and the channel layer, composition of the group
III nitride-type semiconductor material which forms the buffer
layer is selected so that energy of a conduction band edge of the
group III nitride-type semiconductor material of the composition is
higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the channel layer;
and
[0112] in the group III nitride-type semiconductor material whose
composition monotonically changes, which forms the buffer layer,
its composition change along a direction from the substrate surface
to the channel layer is provided by any of a composition change of
Al composition being monotonically reduced along the direction from
the substrate surface to the channel layer, and a composition
change of In composition being monotonically increased along the
direction from the substrate surface to the channel layer.
[0113] In such a case, in the multilayered epitaxial film according
to the second mode of more preferable embodiment of the present
invention,
[0114] it is desirable to select such construction in which
[0115] residual carriers of the semiconductor material whose
composition monotonically changes, which constructs said buffer
layer, are electrons, and
[0116] density of negative polarized charges which are generated in
the semiconductor material which constructs said buffer layer is
set at such density higher than density of the ionized impurity
levels from which the residual carriers generate in the
semiconductor material whose composition monotonically changes,
which constructs said buffer layer.
[0117] In the multilayered epitaxial film according to the second
embodiment of the present invention,
[0118] it is preferable that, for example, the group III
nitride-type semiconductor material whose composition monotonically
changes, which forms the buffer layer, is formed of a group III
nitride-type semiconductor material expressed as
Al.sub.xGa.sub.1-xN (where, x is 1.gtoreq.x.gtoreq.0),
[0119] the composition change along the direction from the
substrate surface to the channel layer exhibited in the group III
nitride-type semiconductor material, whose composition
monotonically changes, is provided by a composition change of Al
composition x being monotonically reduced along the direction from
the substrate surface to the channel layer, and
[0120] a rate of change: |.differential.x(z)/.differential.z| of
the Al composition x in a direction from the substrate surface to
the channel layer (Z direction) is selected within a range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
[0121] In addition, the present invention also provides an
invention of a field-effect transistor which is producible by using
the above-mentioned multilayered epitaxial film according to the
preferable embodiment of the present invention:
[0122] that is, the field-effect transistor according to the
preferable embodiment of the present invention is
[0123] a field-effect transistor fabricated using a multilayered
epitaxial film epitaxial grown on a substrate, characterized in
that
[0124] the multilayered epitaxial film is formed out of compound
semiconductors which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof,
[0125] the spontaneous polarization and piezo polarization effects
exhibited in the compound semiconductors or semiconductor alloys
thereof continuously change in magnitude with composition change of
the semiconductor material,
[0126] the multilayered epitaxial film comprises layered structure
in which a heterojunction which is made up of an electron supply
layer/a channel layer is formed on the buffer layer, and thereby
electrons are accumulated two-dimensionally at a heterojunction
interface of the electron supply layer/channel layer;
[0127] the buffer layer is made up of semiconductor material whose
composition monotonically changes from a substrate surface along a
direction from the substrate surface to the channel layer;
[0128] in the semiconductor material whose composition
monotonically changes, which forms the buffer layer, the
composition change is set such that it changes continuously or
changes step-wise by fine film thickness steps;
[0129] in the semiconductor material whose composition
monotonically changes, which forms the buffer layer, the
composition at an interface between the buffer layer and the
channel layer is selected so that energy of a conduction band edge
of the semiconductor material which comprises the composition is
higher in comparison with energy of a conduction band edge of the
semiconductor material which forms the channel layer;
[0130] in the semiconductor material whose composition
monotonically changes, which forms the buffer layer, its
composition change along a direction from the substrate surface to
the channel layer is selected so that energy of a conduction band
edge of the semiconductor material whose composition monotonically
changes is monotonically reduced along a direction from the
substrate surface to the channel layer;
[0131] as a result of the selected composition change along the
direction from the substrate surface to the channel layer,
polarization obtained by totaling spontaneous polarization and
piezo polarization exhibited in the semiconductor material, which
forms the buffer layer and whose composition monotonically changes,
monotonically changes along a direction from the substrate surface
to the channel layer, the change of the polarization causes
negative polarized charges to be generated in the semiconductor
material which forms the buffer layer and whose composition
monotonically changes;
[0132] as a result of the generated negative polarized charges, in
the semiconductor material whose composition monotonically changes,
which forms the buffer layer, energy of a conduction band edge of
such region monotonically reduces while exhibiting a shape convex
toward a side where electronic energy is higher, along a direction
from the substrate surface to the channel layer;
[0133] a gate electrode of the field-effect transistor is provided
on the electron supply layer, and an aspect ratio Lg/a of an active
layer thickness "a" which is defined as a total of a film thickness
of the electron supply layer and a film thickness of the channel
layer under the gate electrode, to a gate length Lg fulfills
Lg/a.gtoreq.5; and
[0134] a film thickness of the channel layer is selected to be five
or less times of a de Broglie wavelength of electrons accumulated
two-dimensionally in the channel layer.
[0135] In such a case, when such a structure fit to the operation
in a depletion mode (normally on) is selected for the field-effect
transistor to be fabricated,
[0136] it is preferable to adopt such a structure in which said
buffer layer is formed on a nucleation layer that is formed on the
above-mentioned substrate surface, and
[0137] in the field-effect transistor fabricated therewith, at
least a total amount of "positive" space charges, which are
generated in the electron supply layer, directly under a gate
electrode is set to be equal to or more than a total amount of
"negative" space charges which are generated in the buffer layer,
at the interface between the buffer layer and channel layer, and at
an interface between said buffer layer and the nucleation
layer.
[0138] In addition, in the field effect transistor according to the
preferable embodiment of the present invention,
[0139] it is desirable to select such construction in which
[0140] residual carriers of the semiconductor material whose
composition monotonically changes, which constructs said buffer
layer, are electrons, and
[0141] density of negative polarized charges which are generated in
the semiconductor material which constructs said buffer layer is
set at such density higher than density of the ionized impurity
levels from which the residual carriers generate in the
semiconductor material whose composition monotonically changes,
which constructs said buffer layer.
[0142] In the above-mentioned field effect transistor according to
the preferable embodiment of the present invention, one of more
preferable modes thereof is an exemplary embodiment wherein
[0143] the compound semiconductors used to form the multilayered
epitaxial film and which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof, are group
III nitride-type compound semiconductors or semiconductor alloys
thereof. In the field effect transistor according to the first mode
of more preferable embodiments of the present invention, selected
is such a structure in which
[0144] the compound semiconductors used to form the multilayered
epitaxial film and which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof, are group
III nitride-type compound semiconductors or semiconductor alloys
thereof;
[0145] in the multilayered epitaxial film,
[0146] as to the heterojunction which is made up of the electron
supply layer/channel layer,
[0147] the channel layer is formed of GaN, InGaN, or a group III
nitride-type semiconductor material expressed in
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and
[0148] the electron supply layer is made up of AlGaN, an InAlN
layer, or a group III nitride-type semiconductor material expressed
as In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and are 1.gtoreq.x+y.gtoreq.0), and is selected so that
energy of a conduction band edge of the group III nitride-type
semiconductor material which forms the electron supply layer is
higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the channel layer,
at an interface with the channel layer, to form the heterojunction
which has an energy barrier resulting from difference in the energy
of the conduction band edge at the interface;
[0149] the buffer layer is formed of AlGaN, InAlN, or a group III
nitride-type semiconductor material expressed as
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0), and, at an interface between
the buffer layer and the channel layer, composition of the group
III nitride-type semiconductor material which forms the buffer
layer is selected so that energy of a conduction band edge of the
group III nitride-type semiconductor material of the composition is
higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the channel layer,
to form a heterojunction which has an energy barrier resulting from
difference in the energy of the conduction band edge at the
interface; and
[0150] in the group III nitride-type semiconductor material whose
composition monotonically changes, which forms the buffer layer,
its composition change along a direction from the substrate surface
to the channel layer is provided by any of a composition change of
Al composition being monotonically reduced along the direction from
the substrate surface to the channel layer, and a composition
change of In composition being monotonically increased along the
direction from the substrate surface to the channel layer.
[0151] In such a case, in the field effect transistor according to
the first mode of more preferable embodiments of the present
invention,
[0152] it is desirable to select such construction in which
[0153] residual carriers of the semiconductor material whose
composition monotonically changes, which constructs said buffer
layer, are electrons, and
[0154] density of negative polarized charges which are generated in
the semiconductor material which constructs said buffer layer is
set at such density higher than density of the ionized impurity
levels from which the residual carriers generate in the
semiconductor material whose composition monotonically changes,
which constructs said buffer layer.
[0155] In the field-effect transistor according to the first
embodiment of the present invention,
[0156] it is preferable that, for example, the group III
nitride-type semiconductor material whose composition monotonically
changes, which forms the buffer layer, is formed of a group III
nitride-type semiconductor material expressed as
Al.sub.xGa.sub.1-xN (where, x is 1.gtoreq.x.gtoreq.0),
[0157] the composition change along the direction from the
substrate surface to the channel layer exhibited in the group III
nitride-type semiconductor material, whose composition
monotonically changes, is provided by a composition change of Al
composition x being monotonically reduced along the direction from
the substrate surface to the channel layer, and
[0158] a rate of change: |.differential.x(z)/.differential.z| of
the Al composition x in a direction from the substrate surface to
the channel layer (Z direction) is selected within a range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
[0159] In addition, in the above-mentioned field effect transistor
according to the preferable embodiment of the present invention,
another one of more preferable modes thereof is an exemplary
embodiment wherein
[0160] the compound semiconductors used to form the multilayered
epitaxial film and which exhibit spontaneous polarization and piezo
polarization effects, or semiconductor alloys thereof, are group
III nitride-type compound semiconductors or semiconductor alloys
thereof. In the field effect transistor according to the second
embodiment of the present invention, selected is such a structure
in which
[0161] the compound semiconductors which exhibit spontaneous
polarization and piezo polarization effects, or semiconductor
alloys thereof, which are used to form the multilayered epitaxial
film, are group III nitride-type compound semiconductors or
semiconductor alloys thereof;
[0162] the multilayered epitaxial film comprises layered structure
in which a heterojunction which is made up of the electron supply
layer/channel layer formed on the buffer layer with a barrier layer
intervening therebetween, and thereby electrons are accumulated
two-dimensionally at a heterojunction interface of the electron
supply layer/channel layer;
[0163] in the multilayered epitaxial film,
[0164] as to the heterojunction which is made up of the electron
supply layer/channel layer,
[0165] the channel layer is formed of GaN, InGaN, or a group III
nitride-type semiconductor material expressed in
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and
[0166] the electron supply layer is made up of AlGaN, an InAlN
layer, or a group III nitride-type semiconductor material expressed
as In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and are 1.gtoreq.x+y.gtoreq.0), and is selected so that
energy of a conduction band edge of the group III nitride-type
semiconductor material which forms the electron supply layer is
higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the channel layer,
at an interface with the channel layer, to form the heterojunction
which has an energy barrier resulting from difference in the energy
of the conduction band edge at the interface;
[0167] the barrier layer intervenes between the channel layer and
buffer layer, and is formed of In AlGaN, or a group III
nitride-type semiconductor material expressed by
(In.sub.vAl.sub.1-v).sub.wGa.sub.1-wN (where, 1.gtoreq.v.gtoreq.0
and 1.gtoreq.w.gtoreq.0), and is selected so that energy of a
conduction band edge of the group III nitride-type semiconductor
material which forms the barrier layer is higher than energy of a
conduction band edge of the group III nitride-type semiconductor
material which forms the channel layer in contact with the barrier
layer, and energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the barrier layer
is higher than energy of a conduction band edge of the group III
nitride-type semiconductor material which forms the buffer layer at
an interface with the barrier layer, to form a heterojunction which
has an energy barrier resulting from difference in the energy of
the conduction band edge at the interface;
[0168] the buffer layer is formed of AlGaN, InAlN, or a group III
nitride-type semiconductor material expressed as
In.sub.yAl.sub.xGa.sub.1-x-yN (where, x and y are 0 or positive
values, and 1.gtoreq.x+y.gtoreq.0), and, at an interface with the
barrier layer, composition of the group III nitride-type
semiconductor material which forms the buffer layer is selected so
that energy of a conduction band edge of the group III nitride-type
semiconductor material of the composition is higher than energy of
a conduction band edge of the group III nitride-type semiconductor
material which forms the channel layer; and
[0169] in the group III nitride-type semiconductor material whose
composition monotonically changes, which forms the buffer layer,
its composition change along a direction from the substrate surface
to the channel layer is provided by any of a composition change of
Al composition being monotonically reduced along the direction from
the substrate surface to the channel layer, and a composition
change of In composition being monotonically increased along the
direction from the substrate surface to the channel layer.
[0170] In such a case, in the field effect transistor according to
the second mode of more preferable embodiments of the present
invention,
[0171] it is desirable to select such construction in which
[0172] residual carriers of the semiconductor material whose
composition monotonically changes, which constructs said buffer
layer, are electrons, and
[0173] density of negative polarized charges which are generated in
the semiconductor material which constructs said buffer layer is
set at such density higher than density of the ionized impurity
levels from which the residual carriers generate in the
semiconductor material whose composition monotonically changes,
which constructs said buffer layer.
[0174] In the field-effect transistor according to the second mode
of more preferable embodiments of the present invention,
[0175] it is preferable that, for example, the group III
nitride-type semiconductor material whose composition monotonically
changes, which forms the buffer layer, is formed of a group III
nitride-type semiconductor material expressed as
Al.sub.xGa.sub.1-xN (where, x is 1.gtoreq.x.gtoreq.0),
[0176] the composition change along the direction from the
substrate surface to the channel layer exhibited in the group III
nitride-type semiconductor material, whose composition
monotonically changes, is provided by a composition change of Al
composition x being monotonically reduced along the direction from
the substrate surface to the channel layer, and
[0177] a rate of change: |.differential.x(z)/.differential.z| of
the Al composition x in a direction from the substrate surface to
the channel layer (Z direction) is selected within a range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
[0178] Moreover, preferable constructions in the present invention
and a guide line for selecting the preferable constructions will be
explained below.
[0179] In the present invention, multi-layered structure, including
an electron supply layer/a channel layer/a buffer layer formed on a
substrate is employed as structure of a multilayer epitaxial layer
used when preparing a heterojunction FET (HJFET); and the following
structure is used as technique for suppressing carrier injection to
the buffer layer from the channel layer to improve a confinement
effect (carrier confinement) on carriers which are
two-dimensionally accumulated at the interface between the electron
supply layer/channel layer, in which structure, compound
semiconductors which have spontaneous polarization and piezo
polarization effects caused by anisotropy in a direction of a
crystal axis, and semiconductor alloys thereof are used as
semiconductor materials which compose the electron supply
layer/channel layer/buffer layer, and in the multilayer epitaxial
layers comprising such a structure that the channel layer and
electron supply layer are stacked up on the substrate with the
above-mentioned buffer layer intervening therebetween, composition
of a semiconductor material, which forms the buffer layer, is
monotonically changed, along a growth direction from the substrate
surface to the channel layer, and as a result of the change in the
composition, polarization, which is a sum total with the
spontaneous polarization and piezo polarization, which the
semiconductor material exhibits, is also changed along the growth
direction to generates polarized charges in the buffer layer. In
such a case, residual carriers in the semiconductor material itself
which forms the buffer layer are chosen to be the same type with
that of said carriers accumulated at the interface of the electron
supply layer/channel layer, and thereby such a state that space
charges having a polarity contrary to the residual carriers are
fixed in the semiconductor material results from generation of the
residual carriers. In the situation, said polarized charges
generated in the buffer layer are set to be charges having the same
polarity as the residual carriers, and density of these polarized
charges are set higher than density of the space charges fixed in
the semiconductor material to compensate, whereby such a state that
the buffer layer contains effectually fixed charges with the same
polarity as that of the polarized charges as a whole is attained.
In such a case, it can lead to such a phenomenon in which, among
the bands of the semiconductor material which forms the buffer
layer, the edge of the band on which said carriers can be present
is varied in energy along a direction from the upper surface of the
substrate to the channel layer in such a manner that the shape of
the edge shows a convex form in a direction where energy of the
carriers rises. The present invention utilizes said phenomenon.
[0180] That is, in the process in which carriers are injected into
the buffer layer from the channel layer, it becomes necessary for
the injected carriers to climb the band edge showing the convex
form in the direction in which the energy of the carriers rises,
and thus the number of carriers which can climb this energy
gradient are reduced. In other words, an effect that carrier
injection into the buffer layer from the channel layer is
suppressed is achieved. Of course, since there is a band edge,
which shows the convex form in the direction in which the energy of
the carriers rises, in the buffer layer region, there are present
no residual carriers in the buffer layer, whereby, in the HJFET
according to the present invention, a leak current through the
buffer layer is also reduced, and thus a so-called buffer layer
break-down voltage becomes excellent level.
[0181] In the HJFET according to the present invention, as
semiconductor materiald which form the electron supply
layer/channel layer/buffer layer, compound semiconductors, which
have spontaneous polarization and piezo polarization effects caused
by anisotropy in a direction of a crystal axis, and semiconductor
alloys thereof are used. As an example of compound semiconductor
materials which conform this feature, group III nitride-type
semiconductors which have spontaneous polarization and piezo
polarization effects in connection with their structure with
hexagonal crystal system (wurtzite type structure) can be
exemplified. A part of structural constants and constants for
physical property of group III nitride-type semiconductors: AlN,
GaN, and InN which have a hexagonal crystal system are summarized
in Table 1.
TABLE-US-00001 TABLE 1 Structural constants and constants for
physical property (wurtzite type crystal) AIN GaN InN Lattice
constant a (.ANG.) 3.112 3.189 3.540 c (.ANG.) 4.982 5.185 5.760
Coefficient of linear thermal a//5.27 a//5.59 a//5.7 expansion
(10.sup.-5/K) c//4.15 c//3.17 c//3.7 Spontaneous polarization
P.sub.sp -0.081 -0.029 -0.032 [C/m.sup.2] Piezoelectric constant
e.sub.31 -0.60 -0.49 -0.57 [C/m.sup.2] Piezoelectric constant
e.sub.33 1.46 0.73 0.97 [C/m.sup.2] Elastic constant C.sub.13 [GPa]
120 70 121 Elastic constant C.sub.33 [GPa] 395 379 182
[0182] As an example of applying the present invention to an HJFET,
which constructs an electron supply layer/a channel layer/a buffer
layer, using group III nitride-type semiconductors which have the
hexagonal crystal system, and semiconductor alloys thereof, it is
possible to adopt construction of an AlGaN/GaN-type HJFET as
explained below.
[0183] Generally, as a substrate available to epitaxial growth of a
group III nitride-type semiconductor, what is shown in the
following Table 2 is known.
TABLE-US-00002 TABLE 2 Crystal structure parameter of substrate
material for epitaxial growth of group III nitride-type
semiconductor Lattice Coefficient of linear Substrate constant
thermal expansion material Crystal system (.ANG.) (K.sup.-1)
6H--SiC Hexagonal a = 3.08 a//4.2 .times. 10.sup.-6 c = 15.12
c//4.8 .times. 10.sup.-6 4H--SiC Hexagonal a = 3.09 a//4.2 .times.
10.sup.-6 c = 10.08 c//4.7 .times. 10.sup.-6 3C--SiC Cubic a = 4.36
a//4.7 .times. 10.sup.-6 .alpha.-Al.sub.2O.sub.3 Hexagonal a =
4.758 a//7.5 .times. 10.sup.-6 c = 12.991 c//8.5 .times. 10.sup.-6
Si Diamond structure a = 5.431 a//4.08 .times. 10.sup.-6 ZnO
Hexagonal a = 3.240 a//2.9 .times. 10.sup.-5 c = 5.195 c//4.75
.times. 10.sup.-5 AIN Hexagonal a = 3.112 a//2.9 .times. 10.sup.-6
c = 4.982 c//3.4 .times. 10.sup.-6
TABLE-US-00003 TABLE 3 Thermal and electrical properties of
substrate material for epitaxial growth of group Ill nitride-type
semiconductor Thermal Substrate conductivity Dielectric constants
Resistibility material (W/mK) .sub.r (.OMEGA. cm) 6H--SiC 4.9
.times. 10.sup.-2 c//10.2 Semiconductor. c.perp. 9.7 10.sup.6 Order
4H--SiC 4.9 .times. 10.sup.-2 c//10.2 Semiconductor. c.perp. 9.7
10.sup.6 Order 3C--SiC 4.9 .times. 10.sup.-2 9.72 Semiconductor.
10.sup.6 Order .alpha.-Al.sub.2O.sub.3 0.2 .times. 10.sup.-2
c//9.34 Insulator. >10.sup.14 a//11.54 Si 1.5 .times. 10.sup.-2
3.75 (100) Semiconductor. .ltoreq.2.3 .times. 10.sup.5 ZnO 0.234
.times. 10.sup.-2 8.5 Semiconductor. 10.sup.6 Order AIN 2.2 .times.
10.sup.-2 10.7 Insulator. 10.sup.10 Order
[0184] When an AlN substrate is used among the above-mentioned
substrate materials, it becomes unnecessary to prepare the
above-mentioned AlN layer on a surface of a different kind of
substrate as a nucleation layer. However, since it is not easy to
obtain a large-diameter AlN substrate up to the date, usually, such
a mode in which an AlN layer, which is given C-axis growth on a
surface of a different kind of substrate, is used as a nucleation
layer is preferable. Similarly, since it is not easy to obtain a
large-diameter substrate up to the date also regarding a ZnO
substrate, usually, a thin film layer of ZnO is formed on a surface
of a different kind of substrate, and this ZnO thin film layer can
be used as an underlying layer. In addition, under a hot ambient
atmosphere, ZnO tends to cause thermal decomposition, and since
both of metal Zn and O.sub.2 generated in such a case transpire
easily, there is a limit in utilization to an underlying layer for
high temperature growth.
[0185] Since a SiC substrate is preferable as a base substrate for
high temperature growth and a large-diameter substrate is easily
available, it is one of the most preferable substrates when
preparing a multilayered epitaxial film for the above-mentioned
AlGaN/GaN-type HJFET. Although crystalline polytypes belonging to
different crystal systems are known in the SiC, it is more
preferable to use 6H-SiC and 4H-SiC belonging to a hexagonal
crystal system among those. In the multilayered epitaxial film for
the AlGaN/GaN-type HJFET, a base substrate needs to have high
resistance and a high dielectric breakdown electric field, and, SiC
substrates including a 6H-SiC substrate and a 4H-SiC substrate
fulfill these requirements. Furthermore, the SiC itself is a
material of showing good thermal conductivity, and, for example, it
exhibits a large contribution in diffusion of heat generated in an
operating range of the AlGaN/GaN-type HJFET. In consideration of
contribution to this thermal diffusion, when preparing an
AlGaN/GaN-type HJFET aiming at a high electric power operation in
particular, it is preferable to use a 6H-SiC substrate and a 4H-SiC
substrate as its base substrate.
[0186] Although Si, GaAs, and sapphire have also advantages of
easily obtaining large-diameter substrates, in 6H-SiC and 4H-SiC,
dielectric breakdown electric fields are about 10 times of those of
Si and GaAs, and, thermal conductivity is about 3 times of that of
Si, and about 20 times of that of sapphire, and is considered to be
more preferable substrate materials in these two points. In
addition, when growing up an AlN layer as a nucleation layer on a C
surface ((0001) plane) of a 6H-SiC or 4H-SiC substrate, those
lattice constants a approximately coincide, and further, in
consideration of coefficients of thermal expansion, under a high
temperature growth condition, their difference between the lattice
constants a becomes smaller. Hence, the AlN layer is grown in the
given C axis on the C plane ((0001) plane) of the 6H-SiC or 4H-SiC
substrate, and the multilayered epitaxial film which is grown
epitaxially by using this AlN layer as a nucleation layer becomes a
film which exhibits high crystal quality.
[0187] In addition, when C axis growth of the AlN layer is
performed on a plane (111) of 3C-SiC, since the plane functions as
a plane which has an effectual lattice constant a.sub.h=3.082
(.ANG.), it becomes equal to a case of performing C axis growth of
an AlN layer on a C plane ((0001) plane) of a 6H-SiC or 4H-SiC
substrate.
[0188] In addition, it is reported that, when growing up the AlN
layer for a nucleation layer on various base surfaces, relationship
of both crystal orientations as shown in the following Table 4 is
to be obtained.
TABLE-US-00004 TABLE 4 Relationship between crystal orientations of
hexagonal AIN which is given C plane growth on various base
surfaces and substrate surface Surface orientation of Crystal
orientation of hexagonal substrate AIN//crystal orientation of
substrate SiC c(0001) (0001)[2110]//(0001)[2110]
.alpha.-Al.sub.2O.sub.3 c(0001) (0001)[1100]//(0001)[2110]
.alpha.-Al.sub.2O.sub.3 r(0112) (2110)[0001]//(0112)[0111]
.alpha.-Al.sub.2O.sub.3 a(2110) (0001)[1100]//(2110)[0001] Si
o(111) (0001)[2110]//(111)[110] Si a(100)
(0001)[2110]//(100)[011]
[0189] As shown in Table 4, it is possible to perform C axis growth
of the AlN layer for a nucleation layer on several substrate
surfaces besides the C plane ((0001) plane) of SiC.
[0190] For example, since a high-quality large-diameter Si
substrate is inexpensively available, there is a high possibility
that it will be used widely as a substrate from now on when forming
a multilayered epitaxial film of a group III nitride-type
semiconductor with a large area. A hexagonal AlN film is grown
epitaxially on a surface of a Si substrate with diamond structure,
and then each of layers including a buffer layer is grown up by
using the AlN layer, which is given C axis growth, as a nucleation
layer by applying a high temperature growth method (growth
temperature: about 1,100.degree. C.). As very slight deviation is
between these atomic placement on the substrate surface and atomic
placement of AlN, lattice spacings of the AlN layer show strain in
an early stage of growth, but this strain is relaxed gradually as
growth advances. Specifically, when a film thickness of an AlN
layer which is grown as a nucleation layer reaches at least 40 nm,
an upper face of the AlN layer has a lattice constant almost equal
to the original lattice constant (a=3.112 .ANG.) of AlN.
[0191] In addition, the above-mentioned AlN layer which is grown up
on a substrate surface has high resistance, and functions as an
insulating layer. Hence, each of layers including the buffer layer
is stacked in series on the substrate with the insulating AlN layer
intervening therebetween to form a multilayered epitaxial film.
However, it is not necessary to thicken a film thickness of the AlN
layer used excessively as a nucleation layer, but, usually, it is
preferable to select it in a range of 40 nm or more and 100 nm or
less.
[0192] As described previously, since what is given C plane ((0001)
plane) growth is used as the AlGaN electron supply layer/GaN
channel layer in the above-mentioned AlGaN/GaN-type HJFET,
generally, it is preferable to form a multilayer epitaxial film,
including an electron supply layer/channel layer/buffer layer, on a
C plane ((0001) plane) surface of a 6H-SiC substrate or a 4H-SiC
substrate. In such a case, it is preferable to grow epitaxially the
structure of an electron supply layer/channel layer/buffer layer by
setting the AlN layer as a seed after forming the AlN layer which
has a lattice constant a, which approximately coincides with the
lattice constant a on a C plane, as a nucleation layer for forming
a growth nucleus on a C plane ((0001) plane) surface of a 6H-SiC
substrate or a 4H-SiC substrate.
[0193] Usually, in the prepared AlGaN/GaN-type HJFET, backside
polishing treatment is performed for a thickness of a base
substrate to be thinned and for thermal diffusion efficiency from
the backside side to be maintained. In the case of epitaxial
growth, after performing backside polishing treatment to various
kinds of substrates used as base substrates, generally, the
AlGaN/GaN-type HJFET is operated with this substrate backside being
grounded.
[0194] Hence, there is an influence, which is caused by a base
substrate material used, to a device performance which the
AlGaN/GaN-type HJFET for a high frequency exhibits, and in
particular, to a high frequency characteristic. When resistibility
of the used base substrate is not high enough when an operating
frequency is in a higher frequency band, such as a 10-GHz or higher
microwave, a submillimeter wave band, and a millimeter wave band,
it becomes a factor of dielectric loss and results in becoming a
factor of lowering performance of RF gain or Noise Figure.
Specifically, as for Si (or GaAs), in consideration of its bandgap
E.sub.9 and state density of a conduction band edge, since its
resistibility is estimated to be a maximum of 2.3.times.10.sup.5
.OMEGA.cm in room temperature, a highly resistive substrate cannot
be obtained, and when using a Si substrate, it is not suitable for
an application where an operating frequency is 10 GHz or higher. On
the other hand, as for SiC, since its bandgap E.sub.g is farther
larger than Si (or GaAs), it is possible to use a substrate whose
resistibility arrives at an order of 10.sup.6 .OMEGA.cm in room
temperature. That is, a SiC substrate can be suitably used for an
application where an operating frequency is 10-GHz or higher. On
the other hand, when the operating frequency is a microwave
frequency band from near 1 GHz to 10 GHz, even if Si substrate is
used, the influence of the dielectric loss mentioned above becomes
in a permissible enough range. In consideration of a respect of
being able to obtain a large-diameter substrate relatively
inexpensively, a Si substrate can be used suitably similarly to a
SiC substrate for an application where an operating frequency is in
a microwave frequency band from near 1 GHz to 10 GHz.
[0195] Next, a device performance which an AlGaN/GaN-type HJFET for
a high frequency exhibits, and in particular, efficiency of thermal
diffusion through a substrate backside in the case of aiming at
high output operation has a large influence on device efficiency.
Hence, when at least aiming at the high output operation where an
output power density is not less than 5 W/mm (e.g., large output
operation for a base station of a cellular phone), it is preferable
to use a SiC substrate with high thermal conductivity. On the other
hand, in a range of an output power density being 5 W/mm or less,
even if a Si substrate in which thermal conductivity is a little
inferior is used, it is possible to fully achieve the aimed
performance. Furthermore, for an application where an output power
density is considerably lower than 5 W/mm but an operating
frequency is 10 GHz or higher, it is possible to use suitably also
a sapphire substrate whose thermal conductivity is fairly inferior
but whose resistibility arrives at an order of 10.sup.10 .OMEGA.cm.
More specifically, in an AlGaN/GaN-type HJFET for a cellular phone
terminal, since an output power density is greatly lower than 5
W/mm, it is possible to use a sapphire substrate whose thermal
conductivity is fairly inferior. In addition, since utilization of
a sapphire substrate has a low manufacturing cost and there are
also many board sizes when aiming at an AlGaN/GaN-type HJFET for a
cellular telephone, it contributes also to reduction of
manufacturing cost of a whole device.
[0196] As a buffer layer, a group III nitride-type semiconductor
with different composition from GaN of the channel layer is used.
Specifically, a group III nitride-type semiconductor alloy layer
where composition of the group III nitride-type semiconductor which
forms this buffer layer is changed monotonically from the AlN
nucleation layer to the GaN channel layer is used. In such a case,
it is preferable that a lattice constant of the group III
nitride-type semiconductor alloy where this composition
monotonically changes, that is, so-called "composition modulation"
is given is approximately equal to the lattice constant of the AlN
layer, which is a lower layer, and the lattice constant of the GaN
layer which is an upper layer, and in particular, has an
intermediate value between them. In addition, in the AlGaN/GaN-type
HJFET, since carriers two-dimensionally accumulated at an interface
of the AlGaN electron supply layer/GaN channel layer are electrons,
what becomes high energy as energy E.sub.C of a conduction band
edge of the group III nitride-type semiconductor alloy which is
given the "composition modulation" at least in comparison with the
energy E.sub.C of the conduction band edge of GaN is selected.
AlGaN can be cited as an example of the group III nitride-type
semiconductor alloy which fulfills these two conditions. In
addition, generally, what fulfills the above-mentioned two
conditions among the group III nitride-type semiconductor alloys
written as In.sub.yAl.sub.xGa.sub.1-x-yN is used suitably.
[0197] For example, when using an AlGaN buffer layer which is given
"composition modulation" as shown in FIG. 1 as the buffer layer
which is made up of a group III nitride-type semiconductor alloy
which is given the "composition modulation", it is preferable to
use a composition modulated (composition gradient) AlGaN layer
where Al composition is made gradually or step-wise low from the
substrate surface to the GaN channel layer
[0198] In the AlGaN buffer layer which is given "Al composition
modulation" as mentioned above, negative polarized charges are
generated by both of spontaneous polarization and piezo
polarization effects, and a conduction band has an upward convex
(p-like) characteristic. For this reason, it becomes hard that
electrons are injected into the "Al composition-modulated" AlGaN
buffer layer also in the case of a reverse bias application. Hence,
improvement in a buffer layer break-down voltage can be expected.
Furthermore, since an AlGaN layer has smaller electron affinity and
higher conduction band potential than those of a GaN layer, a band
barrier is formed also in a back side of a channel layer in band
structure, and improvement also in respect of a carrier confinement
effect of a channel can be achieved, and improvement in a pinch-off
characteristic and suppression of a short channel effect can be
achieved.
[0199] In addition, when a material which forms the channel layer,
for example, an InAlGaN layer which has electron affinity smaller
(conduction band potential is high) than that of GaN is inserted as
a barrier layer which contacts a back of the channel layer for
improvement in the carrier confinement effect of a channel layer,
this generates an HJFET which is prepared using a multilayered
epitaxial film with construction shown in FIG. 11 and has
construction exemplified in FIG. 12. In the structure, since a band
diagram of the electron supply layer, a channel layer, a barrier
layer, and "composition-modulated" buffer layer becomes a form
exemplified in FIG. 13, it is more effective for suppression of the
electron injection from the channel layer to the
"composition-modulated" buffer layer.
[0200] As described above, in the HJFET according to the present
invention, and in particular, an AlGaN/GaN-type HJFET, a
composition-modulated (composition gradient) AlGaN layer, where Al
composition is lowered gradually or step-wise from a substrate side
to the GaN channel layer, is used as a buffer layer, besides GaN of
the channel layer. In such AlGaN buffer layer which has "Al
composition modulation", negative polarized charges are generated
by both of spontaneous polarization and piezo polarization effects,
and thereby its conduction band has an upward convex (p-like)
feature. For this reason, it becomes hard that electrons are
injected into the buffer layer also in the case of a reverse bias
application. Hence, improvement in a buffer layer break-down
voltage can be expected. Furthermore, at an interface between the
channel layer and buffer layer which is given "composition
modulation", since the group III nitride-type semiconductor alloys
(AlGaN etc.) of the buffer layer which is given "composition
modulation", or the group III nitride-type semiconductor alloys
(InAlGaN etc.) of the barrier layer provided at this interface has
smaller electron affinity and higher conduction band potential than
those of the GaN layer, a band barrier is formed also in the back
side of the channel layer in band structure, and hence, improvement
can be achieved also in respect of the carrier confinement effect
of the channel, and improvement in a pinch-off characteristic and
suppression of a short channel effect can be achieved. Because of
the above-mentioned effects, the field-effect transistor according
to the present invention can achieve large improvement also in
respect of a DC gain or an RF gain in the case of high voltage
operation.
[0201] In this way, the present invention places extremely greatly
contributes to development of a GaN-type transistor, and in
particular, to a performance increase and reliability improvement
of an FET for a millimeter wave and a submillimeter wave band,
where a short channel effect is generated severely, in device
structure using a conventional buffer layer which has uniform
composition.
[0202] The present invention will be explained below in further
detail with citing specific examples. Although exemplary
embodiments in these specific examples are examples of exemplary
embodiments according to the present invention, the present
invention is not limited to these embodiments.
Exemplary Embodiment 1
[0203] First, a specific example is shown and described about a
method of designing construction of a multilayer epitaxial layer
according to the present invention. In addition, in the following
description, it is assumed that, in each layer which forms a
multilayer epitaxial layer, relaxation of strain stress, resulting
from difference (lattice mismatching) in the lattice constant
between the materials which form the layer, by a change of an
effectual lattice constant in an inplane direction of a whole
multilayer epitaxial layer does not occur. Specifically, in the
following examples, it is approximated that, in each layer which
forms the construction of the multilayer epitaxial layer, since the
effectual inplane lattice constant coincides with the inplane
lattice constant in AlN without strain and it is in a state that a
lattice constant in a depth direction changes because of difference
of lattice constant (lattice mismatching), there is no influence of
the distortion relaxation that strain stress is partially relaxed
because the whole multilayer epitaxial layer curves, or a
dislocation is generated internally and strain stress is relaxed
partially.
[0204] In this example, in the multilayer epitaxial layer, an AlN
layer is grown at a 100-nm thickness on its surface as a nucleation
layer using a C plane ((0001) plane) of SiC as a substrate, and a
first AlGaN layer is grown as a buffer layer. This is made into
construction that, on this buffer layer, a GaN layer is epitaxially
grown as a channel layer and a second AlGaN layer is grown as an
electron supply layer in a top layer. In addition, each of the
first AlGaN layer, GaN layer, and second AlGaN layer is grown
epitaxially so that a normal line direction of a grown plane may
become a C-axis <0001> axial direction. Finally, construction
of an HJFET is adopted, a gate electrode is provided on a surface
of the second AlGaN layer, and the gate electrode and second AlGaN
layer are made into a form in which they form a Schottky junction.
Although the C plane (0001) surface of SiC is used as the substrate
in this example, besides this, it is also possible to use a
substrate which can grow epitaxially so that a normal line
direction of a grown plane of an epitaxial growth layer, such as an
A plane of a SiC substrate, and the C plane and A plane of sapphire
substrate, may become a C axis <0001> axial direction.
[0205] A method of designing a buffer layer of a GaN-type
heterojunction FET will be specifically described below with
utilizing positively polarized charges resulting from spontaneous
polarization and piezo polarization of a group III nitride-type
semiconductor material. With facing this design, it is possible to
refer to related art disclosed in references, for example, O.
Ambacher, B. Foutz, J. Smart, J. R. Shealy, N. G. Weimann, K. Chu,
M. Murphy, A. J. Sierakowski, W. J. Schaff, and L. F. Eastman, "Two
dimensional electron gases induced by spontaneous and piezoelectric
polarization in undoped and doped AlGaN/GaN heterostructures", J.
Appl. Phys. Vol. 87, No. 1, p. 334 (2000), and the like, and to use
the results partially.
[0206] A first AlGaN layer which is a buffer layer is in a state
that strain stress resulting from lattice mismatching exists. In
addition, a group III nitride-type semiconductor material exhibits
spontaneous polarization P.sub.sp, and when strain stress resulting
from lattice mismatching exists, it exhibits piezo polarization
P.sub.pe caused by a piezoelectric effect. Hence, total
polarization P which exists in the first AlGaN layer which has
strain stress resulting from lattice mismatching is expressed by a
vector sum of the spontaneous polarization P.sub.sp and the piezo
polarization P.sub.pe.
P=P.sub.sp+P.sub.pe (C/m.sup.2)
[0207] In such a case, polarized charges .sigma.(P) are generated
because of the polarization P which exists in the first AlGaN
layer. The polarized charges .sigma.(P) generated because of the
polarization P are expressed as follows.
.sigma.(P)=-.gradient.P(.gradient.: nabra operator)
[0208] Here, since it is approximated that the first AlGaN layer
has constant composition in an inplane direction, but has a
composition change only in a depth direction, and strain stress
does not exist in an inplane direction but strain stress caused by
lattice mismatching exists only in a depth direction, the polarized
charges .sigma.(P) are expressed approximately as follows. That is,
when defining a normal line direction from a substrate to a surface
of a multilayer epitaxial layer as a Z axial direction, the
polarized charges .sigma.(P) are expressed approximately as
follows.
P sp ( x ) .apprxeq. P sp ( GaN ) - x { P sp ( GaN ) - P sp ( AIN )
} .apprxeq. - 0.029 - 0.052 x ( C / m 2 ) ##EQU00001##
[0209] Where,
.sigma.(P.sub.sp).ident.-.differential.P.sub.sp/.differential.z and
.sigma.(P.sub.pe).quadrature..ident.-.differential.P.sub.pe/.differential-
.z
[0210] As for an AlGaN mixed crystal, when setting its composition
at Al.sub.xGa.sub.1-xN (0<x<1), its spontaneous polarization
P.sub.sp is written as P.sub.sp(x), as a function of Al composition
x. Regarding this P.sub.sp(x), the following approximation is
performed as a linear approximation here.
P.sub.sp(x).apprxeq.xP.sub.sp(AlN)+(1-x)P.sub.sp(GaN)
[0211] With substituting values of spontaneous polarization of
GaN:P.sub.sp(GaN) and spontaneous polarization of AlN:P.sub.sp(AlN)
which are shown in Table 1, it is described as follows.
P sp ( x ) .apprxeq. P sp ( GaN ) - x { P sp ( GaN ) - P sp ( AIN )
} .apprxeq. - 0.029 - 0.052 x ( C / m 2 ) ##EQU00002##
[0212] When composition is made Al.sub.xGa.sub.1-xN (0<x<1)
as for the AlGaN mixed crystal, its lattice constant
a(Al.sub.xGa.sub.1-xN) is written as a.sub.0(x), as a function of
Al composition x. The following approximation is performed as a
linear approximation here regarding this a.sub.0(x).
a.sub.0(x).apprxeq.xa(AlN)+(1-x)a(GaN)
[0213] With substituting values of lattice constant of GaN: a(GaN)
and lattice constant of AlN: a(AlN) which are shown in Table 1, it
is described as follows.
a 0 ( x ) .apprxeq. a ( GaN ) - x { a ( GaN ) - a ( AIN ) }
.apprxeq. 3.189 - 0.077 x ( A .smallcircle. ) ##EQU00003##
[0214] In addition, as for an AlGaN mixed crystal, when making its
composition into Al.sub.xGa.sub.1-xN (0<x<1), piezoelectric
constants e.sub.31(Al.sub.xGa.sub.1-xN) and
e.sub.33(Al.sub.xGa.sub.1-xN), and elastic constants
C.sub.13(Al.sub.xGa.sub.1-xN), and C.sub.33 (Al.sub.xGa.sub.1-xN)
are written as e.sub.31(x), e.sub.33(x), C.sub.31(x), and
C.sub.33(x) respectively, as a function of Al composition x. The
following approximations are performed as linear approximations
here also regarding these e.sub.31(x), e.sub.33(x), C.sub.31(x),
and C.sub.33(x).
e.sub.31(x).apprxeq.xe.sub.31(AlN)+(1-x)e.sub.31(GaN)
e.sub.33(x).apprxeq.xe.sub.33(AlN)+(1-x)e.sub.33(GaN)
C.sub.31(x).apprxeq.xC.sub.31(AlN)+(1-x)C.sub.31(GaN)
C.sub.33(x).apprxeq.xC.sub.33(AlN)+(1-x)C.sub.33(GaN)
[0215] When substituting values of the piezoelectric constants
e.sub.31(GaN) and e.sub.33(GaN), and the elastic constants
C.sub.13(GaN) and C.sub.33(GaN) of GaN, and the piezoelectric
constants e.sub.31(AlN) and e.sub.33(AlN) and elastic constants
C.sub.13(AlN) and C.sub.33(AlN) of AlN which are shown in Table 1,
they are described respectively as follows.
e 31 ( x ) .apprxeq. e 31 ( GaN ) - x { e 31 ( GaN ) - e 31 ( AIN )
} .apprxeq. - 0.49 - 0.11 x ##EQU00004## e 33 ( x ) .apprxeq. e 33
( GaN ) - x { e 33 ( GaN ) - e 33 ( AIN ) } .apprxeq. 0.73 + 0.73 x
##EQU00004.2## C 31 ( x ) .apprxeq. C 31 ( GaN ) - x { C 31 ( GaN )
- C 31 ( AIN ) } .apprxeq. 70 + 50 x ##EQU00004.3## C 33 ( x )
.apprxeq. x C 33 ( AIN ) + ( 1 - x ) C 33 ( GaN ) .apprxeq. 379 +
16 x ##EQU00004.4##
[0216] When a normal line direction from a substrate to a surface
of a multilayer epitaxial layer is defined as a Z axial direction
and composition of AlGaN is made into Al.sub.xGa.sub.1-xN
(0<x<1), piezo polarization P.sub.pe in the first AlGaN layer
which has the above-mentioned strain stress can be expressed as
follows.
[0217] Here, since it is approximated that an in-plane lattice
constant coincides with a lattice constant of AlN used for a
nucleation layer, and strain resulting from lattice mismatching
(difference between lattice constants) causes only a transition of
a lattice spacing in a depth direction (Z axial direction), the
strain becomes e.sub.ZZ(Al.sub.xGa.sub.1-xN). In the
above-mentioned approximation, since the in-plane lattice constant
a(Al.sub.xGa.sub.1-xN) in a distortionless state is equal to the
lattice constant a(AlN) of AlN in a distorted state, strain:
e.sub.ZZ(Al.sub.xGa.sub.1-xN) is written as follows.
e.sub.ZZ(Al.sub.xGa.sub.1-xN)={a(AlN)-a(Al.sub.xGa.sub.1-xN)}/a(Al.sub.x-
Ga.sub.1-xN)
[0218] When strain: e.sub.ZZ(Al.sub.xGa.sub.1-xN) is written as
e.sub.ZZ(x), as a function of Al composition x, it can be described
as follows.
e.sub.ZZ(x)={a-a.sub.0(x)}/a.sub.0(x)
[0219] where a.ident.a(AlN).
[0220] When a value of the above-mentioned approximate expression
is introduced into a.sub.0(x), it is approximated as follows.
e zz ( x ) .apprxeq. { 3.112 - ( 3.189 - 0.077 x ) } / ( 3.189 -
0.077 x ) .apprxeq. ( 0.077 x - 0.077 ) / ( 3.189 - 0.077 x )
##EQU00005##
[0221] When a normal line direction from a substrate to a surface
of a multilayer epitaxial layer, is defined as a Z axial direction
and composition of AlGaN is made into Al.sub.xGa.sub.1-xN
(0<x<1), piezo polarization P.sub.pe in the first AlGaN layer
can be described as follows when P.sub.pe(Al.sub.xGa.sub.1-xN) is
written as P.sub.pe(x), as a function of Al composition x.
P.sub.pe(x)=.sup.2e.sub.ZZ(x)[e.sub.31(x)-e.sub.33(x){C.sub.31(x)/C.sub.-
33(x)}]
[0222] When the values of the above-mentioned approximate
expression are introduced into the strain: e.sub.ZZ(x),
piezoelectric constants e.sub.31(x) and e.sub.33(x), and elastic
constants C.sub.31(x) and C.sub.33(x), they are approximated as
follows, respectively.
P.sub.pe(x).apprxeq.2{(0.077x-0.077)/(3.189-0.077x)}{(-0.49-0.11x)-(0.73-
+0.73x)(70+50x)/(379+16x)}
[0223] On the other hand, in construction of a GaN channel layer/a
first AlGaN layer (buffer layer)/an AlN nucleation layer/a
substrate, composition of the first AlGaN layer;
Al.sub.xGa.sub.1-xN is written as Al composition xb at an interface
with the AlN nucleation layer, Al composition xt at an interface
with the GaN channel layer, and Al composition x(z) as a function
of a thickness (z) in a depth direction (Z axial direction) between
them. In such a case, xb>xt holds, and it is assumed that Al
composition x(z) reduces monotonically with an increase of the
thickness (z) in a range of xb.gtoreq.x(z).gtoreq.xt. That is, it
is assumed that the Al composition x(z) of Al.sub.xGa.sub.1-xN
which forms the first AlGaN layer (buffer layer) monotonically
decreases from the interface with the AlN nucleation layer toward
an interface with the GaN channel layer to an interface with the
GaN channel layer. In addition, with letting a film thickness of
the whole first AlGaN layer (buffer layer) be t.sub.buffer, the
thickness (z) becomes t.sub.buffer.gtoreq.Z.gtoreq.0.
[0224] In that case, the polarized charges .sigma.(P(z)) in a
position z among the first AlGaN layer (buffer layer) is expressed
as a sum of the spontaneous polarization charges .sigma.
(P.sub.sp(z)), and piezo polarized charges .sigma. (P.sub.pe(z)) at
the position z.
.sigma. ( P ( z ) ) = .sigma. ( P sp ( z ) ) + .sigma. ( P pe ( z )
) ( C / m 3 ) ##EQU00006## .sigma. ( P sp ( z ) ) .ident. -
.differential. { P sp ( z ) } / .differential. z = - .differential.
{ P sp ( x ( z ) ) } / .differential. z ##EQU00006.2## .sigma. ( P
pe ( z ) ) .cndot. .ident. - .differential. { P pe ( z ) } /
.differential. z = - .differential. { P pe ( x ( z ) ) } /
.differential. z ##EQU00006.3##
[0225] In a range of t.sub.buffer>z>0 in the first AlGaN
layer (buffer layer), the spontaneous polarization P.sub.sp (x (z))
at the position z can be described in the following approximate
expression:
P.sub.sp(x(z).apprxeq.-0.029-0.052x(z) (C/m.sup.2)
[0226] hence, the spontaneous polarization charges .sigma.(P.sub.sp
(z)) at the position z can be described in the following
approximate expression.
.sigma. ( P sp ( z ) ) = - .differential. { P sp ( x ( z ) ) } /
.differential. z .apprxeq. 0.052 .differential. x ( z ) /
.differential. z ( C / m 3 ) ##EQU00007##
[0227] In addition, in z=0 (interface with the AlN nucleation
layer), the spontaneous polarization P.sub.sp(AlN) in an AlN
nucleation layer side is:
P.sub.sp(AlN)=-0.081 (C/m.sup.2)
[0228] spontaneous polarization P.sub.sp(xb) of Al composition xb
of AlGaN at this interface is:
P.sub.sp(xb).apprxeq.-0.029-0.052xb (C/m.sup.2)
[0229] Although spontaneous polarization charges
.sigma.(P.sub.sp(0)) at this interface is defined in:
.sigma.(P.sub.pe(0))=-.gradient.P.sub.pe(0) (.gradient.: nabra
operator)
[0230] since P.sub.sp (z) is discontinued, it is approximated as
follows.
.sigma. ( P sp ( 0 ) ) = P sp ( AIN ) - P sp ( xb ) .apprxeq. -
0.081 - ( - 0.029 - 0.052 xb ) .apprxeq. - 0.052 + 0.052 xb ( C / m
2 ) ##EQU00008##
[0231] In addition, at z=t.sub.buffer (interface with the GaN
channel layer), the spontaneous polarization P.sub.sp (GaN) in a
GaN channel layer side is:
P.sub.sp(GaN)=-0.029 (C/m.sup.2)
[0232] Spontaneous polarization P.sub.sp(xt) of Al composition xt
of AlGaN at this interface is:
P.sub.sp(xb)=-0.029-0.052xb (C/m.sup.2)
[0233] Although spontaneous polarization charges
.sigma.(P.sub.sp(t.sub.buffer)) at this interface is defined
in:
.sigma.(P.sub.sp(t.sub.buffer))=-.gradient.P.sub.sp(t.sub.buffer)
(.gradient.: nabra operator)
[0234] since P.sub.sp (z) is discontinued, it is approximated as
follows.
.sigma. ( P sp ( t buffer ) ) = P sp ( xt ) - P sp ( GaN )
.apprxeq. ( - 0.029 - 0.052 xt ) - ( - 0.029 ) .apprxeq. - 0.052 +
xt ( C / m 2 ) ##EQU00009##
[0235] On the other hand, in t.sub.buffer>z>0 in the first
AlGaN layer (buffer layer), the piezo polarized charges
.sigma.(P.sub.pe(z)) at the position z is expressed as follows:
.sigma. ( P pe ( z ) ) .cndot. = - .differential. { P pe ( z ) } /
.differential. z = - .differential. { P pe ( x ( z ) ) }
.differential. z ##EQU00010##
[0236] Using the piezo polarization P.sub.pe (x(z)) expressed in
the above-described approximate expression, it is possible to find
its approximation value in the following form.
.sigma.(P.sub.pe(z)).apprxeq.-.differential.{P.sub.pe(x)}/.differential.-
x.differential.x(z)/.differential.z (C/m.sup.3)
[0237] In addition, since the piezo polarization P.sub.pe(AlN) in
an AlN nucleation layer side does not have lattice mismatching in
z=0 (interface with the AlN nucleation layer),
P.sub.pe(AlN)=0 (C/m.sup.2)
[0238] Although piezo polarized charges .sigma.(P.sub.pe(0)) at
this interface is defined in:
.sigma.(P.sub.pe(0))=-.gradient.P.sub.pe(0) (.gradient.: nabra
operator)
[0239] since P.sub.sp(z) is discontinued, it is approximated as
follows.
.sigma. ( P pe ( 0 ) ) = P pe ( AIN ) - P pe ( xb ) = 0 - P pe ( xb
) = - P pe ( xb ) ( C / m 3 ) ##EQU00011##
[0240] In addition, at z=t.sub.buffer (interface with the GaN
channel layer), piezo polarization P.sub.pe (GaN) in a GaN channel
layer side is:
P.sub.pe(GaN)=-0.0306 (C/m.sup.2)
[0241] Although piezo polarized charges
.sigma.(P.sub.pe(t.sub.buffer)) at this interface is defined
in:
.sigma.(P.sub.pe(t.sub.buffer))=-.gradient.P.sub.pe(t.sub.buffer)
(.gradient.: nabra operator)
[0242] since P.sub.pe (z) is discontinued, it is approximated as
follows.
.sigma. ( P pe ( t buffer ) ) .apprxeq. P pe ( xt ) - P pe ( GaN )
.apprxeq. P pe ( xt ) + 0.0306 ( C / m 3 ) ##EQU00012##
[0243] When summarizing the above results, in
t.sub.buffer>z>0 in the first AlGaN layer (buffer layer), the
polarized charges .sigma.(P(z)) at the position z is approximately
expressed as follows:
.sigma. ( P ( z ) ) = .sigma. ( P sp ( z ) ) + .sigma. ( P pe ( z )
) .apprxeq. { 0.052 .differential. x ( z ) / .differential. z } + {
- .differential. { P pe ( x ) } / .differential. x .differential. (
z ) / .differential. z } ( C / m 3 ) ##EQU00013##
[0244] In addition, in z=0 (interface with the AlN nucleation
layer), the following approximation can be applied thereto:
.sigma. ( P ( 0 ) ) = .sigma. ( P sp ( 0 ) ) + .sigma. ( P pe ( 0 )
) .apprxeq. - 0.052 + 0.052 xb - P pe ( xb ) ( C / m 2 )
##EQU00014##
[0245] In addition, in z=t.sub.buffer (interface with the GaN
channel layer), the following approximation can be applied
thereto:
.sigma. ( P ( t buffer ) ) = .sigma. ( P sp ( t buffer ) ) +
.sigma. ( P pe ( t buffer ) ) .apprxeq. - 0.052 xt + P pe ( xt ) +
0.0306 ( C / m 2 ) ##EQU00015##
[0246] Hereinafter, an example that, in the case of having
construction of a GaN channel layer/a first AlGaN layer (buffer
layer)/an AlN nucleation layer/a substrate, a thickness
t.sub.buffer of the first AlGaN layer (buffer layer) is 1 .mu.m
(1000 nm), and the Al composition x(z) of Al.sub.xGa.sub.1-xN which
forms the first AlGaN layer linearly decreases from the interface
with the AlN nucleation layer to an interface with the GaN channel
layer. That is, an example that, it is Al composition xb at the
interface with the AlN nucleation layer and Al composition xt at
the interface with the GaN channel layer, and Al composition x(z)
is expressed as follows, as a function of a thickness (z/.mu.m) in
a depth direction (Z axial direction) between them will be
considered.
x(z)=xtz+xb(1-z)
[0247] Al composition xt at an interface with the GaN channel
layer, Al composition xb at an interface with an AlN nucleation
layer is variously selected from within 0.40.gtoreq.xb.gtoreq.0.05,
thereafter, the polarized charge density .sigma.(P) induced in the
first AlGaN layer (buffer layer) is calculated (estimated) under
the above-mentioned approximation. In such a case, at the interface
with the GaN channel layer, and the interface with the AlN
nucleation layer, the spontaneous polarization P.sub.sp and piezo
polarization P.sub.pe become discontinuous, and the polarized
charges .sigma.(P) which are generated in these two hetero
interfaces are calculated on the basis of discrete variations of
the spontaneous polarization P.sub.sp and piezo polarization
P.sub.pe as mentioned above.
[0248] FIG. 8 shows the results of plotting the results of
calculating the polarized charge density .sigma. (P) induced in the
first AlGaN layer (buffer layer) on the basis of the
above-mentioned boundary conditions in a vertical axis: polarized
charge density; .sigma.(P)/e cm.sup.-3 (where, e denotes an amount
of an electronic charge (unit charge)) induced and in a horizontal
axis: Al composition xb at the interface with the AlN nucleation
layer. The polarized charge density .sigma.(P)/e induced in the
first AlGaN layer (buffer layer) is negative fixed electric
charges, and the density becomes in the order of 10.sup.16
cm.sup.-3. Generally, Al.sub.xGa.sub.1-xN (0.50.gtoreq.xb.gtoreq.0)
prepared by epitaxial growth becomes an n.sup.- layer where
residual carrier concentration is about n=10.sup.14 to 10.sup.15
cm.sup.-3 in many cases, and hence, the positive charge density
fixed as an impurity level in the semiconductor layer becomes about
10.sup.14 to 10.sup.15 cm.sup.-3.
[0249] As described above, when the Al composition x(z) of
Al.sub.xGa.sub.1-xN which forms the first AlGaN layer reduces
linearly, the polarized charges (negative fixed electric charges)
induced in the first AlGaN layer (buffer layer) "compensate" the
positive fixed electric charges derived from an ionized impurity
level corresponding to residual carrier concentration, and in
consequence, it becomes what corresponds to a state that difference
between both localizes as space charges in the first AlGaN layer
(buffer layer). That is, polarized charge density .sigma.(P)/e
induced in the first AlGaN layer (buffer layer) is a negative fixed
electric charge in the order of 10.sup.16 cm.sup.-3, and it exceeds
positive fixed electric charge density which is about 10.sup.14 to
10.sup.15 cm.sup.-3 and is derived from the ionized impurity level,
and as a result, it becomes in a state that "negative space
charges" localize effectually in the first AlGaN layer (buffer
layer). In other words, as described above, when the Al composition
x(z) of Al.sub.xGa.sub.1-xN which forms the first AlGaN layer
reduces linearly, in consideration of a band diagram of
construction of the GaN channel layer/first AlGaN layer (buffer
layer)/AlN nucleation layer/substrate, the first AlGaN layer
exhibits a function equivalent to a p layer where residual carrier
concentration is about p=10.sup.15 to 10.sup.16 cm.sup.-3. Hence,
as shown in FIG. 3, in the band diagram, an energy position of a
conduction band edge of the first AlGaN layer (buffer layer)
decreases monotonically with showing a convex form from the
interface with the AlN nucleation layer to the interface with the
GaN channel layer.
[0250] In addition, at the interface with the AlN nucleation layer,
and the interface with the GaN channel layer, polarized charges
which are generated exist in the shape of sheet charges, and their
sheet densities are to about 10.sup.12 (/cm.sup.2) respectively. In
such extent, an influence to a band form near the interfaces and
channel carrier density stored in the GaN channel layer is not so
great. It is because carriers by a two-dimensional electron gas
induced by the AlGaN/GaN heterojunction in the normal AlGaN/GaN
carrier HJFET (Al composition 0.2 etc.) have sheet charge
concentration in the order of 10.sup.13 (/cm.sup.2), which is about
one-digit larger.
[0251] Against the structure of the present invention, in a
conventional GaN buffer layer or the AlGaN buffer layer which AlGaN
where Al composition is constant forms, since the polarization P in
the buffer layer does not change in a depth direction (Z axial
direction), polarized charges are not generated in the buffer
layer. Hence, in consideration of band diagrams of the construction
of the GaN channel layer/GaN layer (buffer layer)/AlN nucleation
layer/substrate, or the construction of the GaN channel
layer/constant-composition AlGaN layer (buffer layer)/AlN
nucleation layer/substrate, the GaN layer (buffer layer) or
constant-composition AlGaN layer (buffer layer) functions as an
n.sup.- layer which has, for example, residual carrier
concentration of n=10.sup.14 to 10.sup.15 cm.sup.-3 to the extent.
Hence, as shown in FIG. 6, in the band diagram, an energy position
of a conduction band edge of the GaN layer buffer layer or AlGaN
buffer layer decreases monotonically with showing a concave form
from the interface with the AlN nucleation layer to the interface
with the GaN channel layer.
[0252] In the above, although an example that the Al composition
x(z) of Al.sub.xGa.sub.1-xN which forms the first AlGaN layer
(buffer layer) reduces linearly is described in construction of the
GaN channel layer/first AlGaN layer (buffer layer)/AlN nucleation
layer/substrate, when Al composition x(z) of Al.sub.xGa.sub.1-xN
reduces monotonically (where,
0>.differential.x(z)/.differential.z), for example, when -0.05
.mu.m.sup.-1.gtoreq.{.differential.x(z)/.differential.z} is
maintained, the polarized charge density .sigma.(P)/e induced in
the first AlGaN layer (buffer layer) becomes at least 10.sup.16
cm.sup.-3 to the extent, and the first AlGaN layer exhibits a
function equivalent to a p layer where residual carrier
concentration is about p=10.sup.15 to 10.sup.16 cm.sup.-3.
Alternatively, Al composition x(z) of Al.sub.xGa.sub.1-xN is
monotonically decreased fine-step-wise, for example, regarding a
ratio .DELTA.x(z)/.DELTA.z of a variation .DELTA.x(z) of Al
composition x(z) at each step and a width .DELTA.z of each step,
when 0.05 .mu.m.sup.-1.gtoreq.{.DELTA.x(z)/.DELTA.z} is maintained,
the polarized charge density .sigma.(P)/e induced in the first
AlGaN layer (buffer layer) becomes at least 10.sup.16 cm.sup.-3 to
the extent, and hence, it is possible to make the first AlGaN layer
exhibit a function equivalent to a p.sup.- layer where residual
carrier concentration is about p=10.sup.15 to 10.sup.16
cm.sup.-3.
[0253] So as to perform the above description, in the construction
of the GaN channel layer/first AlGaN layer (buffer layer)/AlN
nucleation layer/substrate, when the Al composition x(z) of
Al.sub.xGa.sub.1-xN which forms the first AlGaN layer (buffer
layer) is reduced monotonically, and, for example, an effective
reduction percentage .differential.x(z)/.differential.z (or
.DELTA.x(z)/.DELTA.z) is made to be maintained in -0.05
.mu.m.sup.-1.gtoreq.{.differential.x(z)/.differential.z}, the
polarized charge density .sigma.(P)/e induced in the first AlGaN
layer (buffer layer) becomes at least 10.sup.16 cm.sup.-3 to the
extent, and hence, it is possible to make the first AlGaN layer
exhibit a function equivalent to a p.sup.- layer where residual
carrier concentration is at least p=10.sup.15 to 10.sup.16
cm.sup.-3. That is, as shown in FIG. 3, in the band diagram, it is
possible to make an energy position of a conduction band edge of
the first AlGaN layer (buffer layer) decrease monotonically with
showing a convex form from the interface with the AlN nucleation
layer to the interface with the GaN channel layer. In the state, as
exemplified in FIG. 3, in addition to a barrier (step)
corresponding to discontinuity .DELTA.E.sub.c of conduction band
energy which exists at the interface between the GaN channel layer
and first AlGaN layer (buffer layer), and following it, it becomes
in a state that the energy position of the conduction band edge
also exhibits a large gradient. For this reason, when a reverse
bias is applied to a gate electrode, the electron injection from
the GaN channel layer to the first AlGaN layer (buffer layer) is
suppressed effectively. Hence, in the HJFET acquired, improvement
in a buffer layer break-down voltage is expected.
[0254] Of course, a barrier (step) corresponding to discontinuity
.DELTA.E.sub.c of the conduction band energy which exists at the
interface between the GaN channel layer and first AlGaN layer
(buffer layer) has a large contribution in improvement in the
carrier confinement effect to a two-dimensional electron gas formed
in the GaN channel layer.
[0255] Nevertheless, when a film thickness of the channel layer is
thicker than a film thickness necessary for a HEMT operation, that
is, when it is greatly thicker than the width of an existing region
of the two-dimensional electron gas accumulated at the interface
between the channel layer and electron supply layer, it become in a
state that carriers (electrons) can be localized at the interface
between the above-mentioned channel layer and buffer layer. Hence,
carriers supplied from a shallow donor level which exists in the
buffer layer become in a state of not contributing to the
two-dimensional electron gas accumulated at the interface between
the channel layer and electron supply layer. Alternatively, a part
of carriers supplied from the electron supply layer are not
accumulated at the interface between the channel layer and electron
supply layer, but they may also become in a state of localizing at
the interface between the channel layer and buffer layer. In this
state, also even when a bias voltage is applied to a gate electrode
to remove the two-dimensional electron gas accumulated at the
interface between the channel layer and electron supply layer, the
carriers (electrons) localized at the interface between the channel
layer and buffer layer may also remain. In that case, it has an
influence of parallel conduction resulting from the carriers
(electrons) which are localized at the interface between the
channel layer and buffer layer, and becomes a factor of a poor
break-down voltage and a pinch-off defect.
[0256] Hence, it is desirable to avoid a phenomenon that carriers
(electrons) are localized also at the interface between the channel
layer and buffer layer besides the two-dimensional carrier gas
(two-dimensional electron gas) which limits a film thickness of the
channel layer and is accumulated at the interface between the
channel layer and electron supply layer. A two-dimensional electron
gas accumulated at the interface between the channel layer and
electron supply layer in the case of providing a gate electrode on
a surface of the electron supply layer to form HEMT structure is
thermally distributed over a plurality of bound levels at its
operating temperature, and as for this two-dimensional electron
gas, a mean of translational energy in a thickness direction
becomes about 1/2kT (k denotes a Boltzmann's constant and T denotes
about 300K temperature). Hence, although a de Broglie wavelength A
derived from thermal movement of the two-dimensional electron gas
thermally distributed over a plurality of bound levels is dependent
on surface density of the two-dimensional electron gas accumulated
when performing forecasting calculation of a thermal distribution
on the plurality of these bound levels, it is equivalent to about
10 nm to 12 nm (about 100 to 120 .ANG.). When the film thickness of
the channel layer is selected in a range of 5 times or less of de
Broglie wavelength A of this two-dimensional electron gas, it is
possible to avoid a state that a plurality of bound levels are
formed independently respectively at the interface between the
channel layer and electron supply layer, and the interface between
the channel layer and buffer layer. That is, in the range that the
film thickness of the channel layer does not exceed 5 times of de
Broglie wavelength A of this two-dimensional electron gas, carriers
(electrons) accumulated into the channel layer become in a state of
being distributed in a plurality of unified bound levels which is
formed in a potential well where the interface between the channel
layer and electron supply layer, and the interface between the
channel layer and buffer layer are barriers. In this state, there
does not arise a phenomenon that, also even when a bias voltage is
applied to a gate electrode to remove the two-dimensional electron
gas accumulated at the interface between the channel layer and
electron supply layer thereafter, the carriers (electrons)
localized at the interface between the channel layer and buffer
layer remain. In consequence, the influence of parallel conduction
resulting from the carriers (electrons) which are localized at the
interface between the channel layer and buffer layer is avoided,
and it does not become a factor of a poor break-down voltage and a
pinch-off defect.
[0257] With making de Broglie wavelength A derived from thermal
movement of the two-dimensional electron gas accumulated at the
interface between the channel layer and electron supply layer a
standard when HEMT structure is formed, that is, the film thickness
of the channel layer is selected in the range of not exceeding 5
times of de Broglie wavelength .lamda. of electrons forming this
two-dimensional electron gas. However, since it is technically
meaningless to select the film thickness of the channel layer which
is far smaller than one half of de Broglie wavelength .lamda. of
electrons which forms the two-dimensional electron gas, it is
selected in the range of not being smaller than one half of de
Broglie wavelength .lamda.. Generally, when HEMT structure is
formed, it is preferable to select the film thickness of the
channel layer in the range of one-half to twofold inclusive of de
Broglie wavelength .lamda. of electrons which forms two-dimensional
electron gas, and it is more preferably to select it in the range
of 3/2 times or less of de Broglie wavelength .lamda. of
electrons.
[0258] In addition, when de Broglie wavelength .lamda. of
electrons, which forms two-dimensional electron gas, is set at
about 10 nm to 12 nm (about 100 to 120 A) as mentioned above, it is
desirable to select the film thickness of the channel layer at
least in the range of 5 nm to 60 nm, preferably, in the range of 5
nm to 25 nm, and more preferably, in the range of 5 nm to 15
nm.
[0259] In addition, in the case of a high-frequency field-effect
transistor (FET), its operating frequency is selected in the range
of a microwave band of about 1 GHz and a millimeter wave frequency
band even extending to a W band. In the high-frequency FET, gate
length Lg is one of device structure factors which determine a
lower limit of switching time when the FET can have an effective
gain, that is, minimum switching time .tau. of the FET. In
addition, when the FET is used as an amplifier, an upper limit
f.sub.ops of a frequency at which it can operate effectively as an
amplifier depends on the minimum switching time .tau. of the
above-mentioned FET. Generally, this upper limit f.sub.opr of a
frequency, at which it can operate effectively as an amplifier and
minimum switching time .tau. of an FET has relationship of
f.sub.opr=1/(2.pi..tau.).
[0260] On the other hand, although the minimum switching time .tau.
of the FET itself is dependent also on a circuit type and an
operational mode of the FET, it has relationship of mostly
.tau..apprxeq.1/(.pi.f.sub.T) with a current gain cut-off frequency
f.sub.T of the FET. Furthermore, the current gain cut-off
frequency: f.sub.T in the HJFET with HEMT structure is dependent on
peak drift velocity V.sub.sat of channel electrons under a high
electric field, and the gate length Lg, and can be usually
expressed as f.sub.T=V.sub.sat/(2.pi.Lg). Hence, minimum switching
time in the HJFET with HEMT structure can be expressed as
.tau..apprxeq.1/(.pi.f.sub.T)=2Lg/V.sub.sat.
[0261] When achieving upper limit: f.sub.opr of a target operating
frequency in the HJFET with HEMT structure, it is necessary to make
minimum switching timer .tau. in the FET into
tau.ltoreq.1/(2.pi.f.sub.opr), that is, it is necessary to set it
as (2Lg/V.sub.sat).ltoreq.1/(2pif.sub.opr). Hence, in the HJFET
with HEMT structure, it is necessary to select the gate length Lg
so that Lg.ltoreq.V.sub.sat/(4.pi.f.sub.opr) may be fulfilled.
[0262] For example, in an AlGaN/GaN heterojunction FET with HEMT
structure, when it is construction that the FET is made to operate
in a depletion mode (normally-on), it is possible to measure drift
velocity V.sub.sat of channel electrons under the high electric
field about the two-dimensional electron gas accumulated at the
interface between the electron supply layer and channel layer in
the actual FET on the condition of grounding the gate electrode. A
measurement result in the actual FET becomes drift velocity
V.sub.sat of the channel electrons measured in a state of including
parasitic parameters including a fringing component. For example,
in the two-dimensional electron gas with sheet carrier
concentration of 9.50.times.10.sup.12 cm.sup.-2 and mobility of
1600 cm.sup.2/Vs, the drift velocity V.sub.sat of channel electrons
under a high electric field (in this system, electric field
strength E=2.times.10.sup.5V/cm approximately) is calculated to be
V.sub.sat.apprxeq.1.1.times.10.sup.7 (cm/s) on the basis of a
measurement result. Hence, when upper limit f.sub.opr of a target
operating frequency is selected at 26.5 GHz corresponding to a Ka
band of a submillimeter wave, it is necessary that gate length Lg
in the AlGaN/GaN heterojunction FET with HEMT structure with the
construction of making it operate in the depletion mode
(normally-on) is selected in the range of Lg 0.33 .mu.m.
[0263] Furthermore, in a GaN-type FET for millimeter wave or
submillimeter wave band where the construction of making it operate
in the depletion mode (normally-on) is selected, in order to
relieve a short channel effect, it is preferable to perform
selection so that aspect ratio Lg/a of gate length Lg and an active
layer thickness a, defined as a total of a film thickness of the
electron supply layer and a film thickness of the channel layer
directly under the gate electrode may fulfill Lg/a.gtoreq.5 as
mentioned above.
[0264] Temporarily, when selecting gate length Lg at Lg=0.33 .mu.m
(330 nm) in an AlGaN/GaN heterojunction FET with HEMT structure
with the construction of making it operate in the depletion mode
(normally-on), in order to fulfill Lg/a.gtoreq.5, it is necessary
to select the active layer thickness a in the range of a.ltoreq.66
nm. Furthermore, it is desirable to select gate length Lg which is
shorter than the above-mentioned upper limit, and specifically,
when gate length Lg is selected in the range of 250 nm to 150 nm,
it is preferable to select the active layer thickness a directly
under the gate electrode in the range of 50 nm to 30 nm.
[0265] Of course, since a Schottky junction is formed at an
interface between the gate electrode and electron supply layer, a
depletion layer is formed because of barrier height .PHI..sub.B
(eV) of this Schottky junction. For example, in an AlGaN/GaN
heterojunction FET with HEMT structure with construction of making
it operate in a depletion mode (normally-on state), when barrier
height .PHI..sub.B (eV) of the Schottky junction is about 0.9 eV,
where the gate electrode is grounded (state that a gate voltage is
0 V), the electron supply layer is depleted, but it is necessary
that the channel layer is not depleted. In order to fulfill these
requirements, it is preferable to select the film thickness of the
electron supply layer directly under the gate electrode in the
range of at least not less than 20 nm, and preferably to select it
in 20 nm to 30 nm. Saying in other words, when gate length Lg is
selected in the range of 250 nm to 150 nm, so as to fulfill
Lg/a.gtoreq.5 about aspect ratio Lg/a directly under the gate
electrode, it is desirable to select the film thickness of the
electron supply layer directly under the gate electrode in the
range of 20 nm to 30 nm, and it is preferable to select a film
thickness of the film thickness of the channel layer in the range
of 5 nm to 25 nm, and more preferable to select it in the range of
5 nm to 15 nm.
[0266] In addition, in an AlGaN/GaN heterojunction FET with HEMT
structure with the construction of making it operate in the
depletion mode (normally-on state), when the film thickness of the
electron supply layer is selected in the above-mentioned range, it
is usually preferable that residual carrier concentration
(concentration of an ionized shallow donor level) of the electron
supply layer is in the range of 5.times.10.sup.15 cm.sup.-3 to
1.times.10.sup.17 cm.sup.-3. When making it operate at least in the
depletion mode (normally-on state), when the HEMT structure is
formed and a film thickness of the electron supply layer is
selected in the above-mentioned range, so as to make
two-dimensional electron gas accumulated at the interface between
the electron supply layer and channel layer, it is not desirable to
make "negative" space charges, resulting from the ionized acceptor
level, exist in the whole electron supply layer. Similarly, it is
also not desirable to give "composition modulation" in the electron
supply layer to produce a situation that "negative" polarized
charges are continuously distributed. Hence, an epitaxial film with
constant composition which is not given the "composition
modulation" is usually used for an electron supply layer.
[0267] In addition, in an AlGaN/GaN heterojunction FET with HEMT
structure with the construction of making it operate in the
depletion mode (normally-on state), so as to make sheet charge
density of two-dimensional electron gas, accumulated at the
interface between the above-mentioned electron supply layer and
channel layer, at least not less than 1.times.10.sup.12 (cm.sup.-2)
in a state that the gate electrode is grounded (state that a gate
voltage is 0 V), it is preferable to select discontinuity
.DELTA.E.sub.C of conduction band energy at the interface between
the electron supply layer and channel layer at least in the range
of .DELTA.E.sub.C.gtoreq.0.2 eV.
[0268] In addition, in an AlGaN/GaN heterojunction FET with HEMT
structure with the construction of making it operate in the
depletion mode (normally-on state), the sheet charge density of
two-dimensional electron gas accumulated at the interface between
the above-mentioned electron supply layer and channel layer is
reduced by applying a reverse voltage to the gate electrode. This
gate voltage necessary for making the sheet charge density of
two-dimensional electron gas into zero is equivalent to threshold
voltage V.sub.T (V). Specifically, in an AlGaN/GaN heterojunction
FET with the HEMT structure where AlGaN where residual carrier
concentration (concentration of the ionized shallow donor level:
N.sub.d) is constant and Al composition is constant is adopted as
the electron supply layer, the gate voltage at which a conduction
band edge of the channel layer at the interface between the
above-mentioned electron supply layer and channel layer coincides
with Fermi level Ef is equivalent to threshold voltage V.sub.T (V).
As for the state, although the electron supply layer is depleted
completely, it is possible to approximately express that the
channel layer becomes in a flat band state. That is, in the
electron supply layer, positive polarized charges (sheet charge
density: NS) which are generated at the interface between the
electron supply layer and channel layer and are equivalent to
polarization difference between both layers exist as space charges,
and positive charges resulting from ionized shallow donors
(concentration of the ionized shallow donor level: N.sub.d) exist
inside the electron supply layer. Hence, threshold voltage V.sub.T
(V) fulfills the following relational expression.
.PHI..sub.B/q-V.sub.T=.DELTA.E.sub.C/q+(q/.epsilon..sub.B).quadrature.{(-
N.sub.St.sub.B)+(N.sub.dt.sub.B.sup.2/2)}
[0269] where, q denotes unit electric charge of an electron
(1.6.times.10.sup.-19 C), .PHI..sub.B (eV) denotes a barrier height
of a Schottky junction formed between the gate electrode and
electron supply layer, .epsilon..sub.B denotes a dielectric
constant of AlGaN which forms the electron supply layer, t.sub.B
denotes a film thickness of the electron supply layer directly
under the gate electrode, and .DELTA.E.sub.C (eV) denotes
discontinuity of conduction band energy at the interface between
the electron supply layer and channel layer. In addition,
dielectric constant .epsilon..sub.B of AlGaN which forms the
electron supply layer is expressed as
.epsilon..sub.B=.epsilon..sub.r.epsilon..sub.0 by dielectric
constant .epsilon..sub.r of this AlGaN and dielectric constant
.epsilon..sub.0 (.epsilon..sub.0=8.854.times.10.sup.-12 Fm.sup.-1)
of vacuum.
[0270] For example, when AlGaN with Al composition of 0.20 is used
for the electron supply layer, .DELTA.E.sub.C(eV)=0.266 eV, and
sheet charge density: N.sub.S of positive polarized charges which
are generated at the interface between the electron supply layer
and channel layer becomes N.sub.S=1.073.times.10.sup.13 cm.sup.-2.
In such a case, when barrier height: .PHI..sub.B(eV) of the
Schottky junction is 0.9 eV, and film thickness: t.sub.B of the
electron supply layer directly under the gate electrode is 20 nm,
it is estimated respectively that threshold voltage V.sub.T (V) is
V.sub.T (V)=-2.54 V when concentration N.sub.d of the ionized
shallow donor level in the electron supply layer is
1.times.10.sup.15 cm.sup.-3, and threshold voltage V.sub.T (V) is
V.sub.T (V)=-2.57 V in the case of N.sub.d=1.times.10.sup.17
cm.sup.-3. That is, it becomes the HEMT structure having the
construction of making it operate in the depletion mode
(normally-on state) and having the above-described threshold
voltage V.sub.T (V).
[0271] On the other hand, when AlGaN with Al composition of 0.15 is
used for the electron supply layer, .DELTA.E.sub.C (eV)=0.1953 eV,
and sheet charge density: N.sub.S of positive polarized charges
which are generated at the interface between the electron supply
layer and channel layer becomes N.sub.S=7.95.times.10.sup.12
cm.sup.-2. In such a case, when barrier height: .PHI..sub.B(eV) of
the Schottky junction is 0.9 eV, and film thickness: t.sub.B of the
electron supply layer directly under the gate electrode is 5 nm, it
is estimated respectively that threshold voltage V.sub.T (V) is
V.sub.T (V)=+0.12 V when concentration N.sub.d of the ionized
shallow donor level in the electron supply layer is
1.times.10.sup.15 cm.sup.-3, and threshold voltage V.sub.T (V) is
V.sub.T (V)=+0.11 V in the case of N.sub.d=1.times.10.sup.17
cm.sup.-3. That is, it becomes the HEMT structure having the
construction of making it operate in an enhancement mode
(normally-off state) and having the above-described threshold
voltage V.sub.T (V).
[0272] As mentioned above, although threshold voltage V.sub.T (V)
becomes a reverse bias in the AlGaN/GaN heterojunction FET with
HEMT structure with the construction of making it operate in the
depletion mode (normally-on state), when the above-mentioned
reverse bias is applied to the gate electrode, it is necessary to
avoid that a tunnel current which penetrates the electron supply
layer flows into the channel layer from the gate electrode. In
order to avoid generation of this tunnel current, it is necessary
to make film thickness t.sub.B of the electron supply layer, which
functions as its barrier, directly under the gate electrode be not
less than 4 nm usually.
[0273] In addition, also in an AlGaN/GaN heterojunction FET with
HEMT structure with the construction of making it operate in the
enhancement mode (normally-off state), it is usually preferable
that residual carrier concentration (concentration of an ionized
shallow donor level) of the electron supply layer is in the range
of 5.times.10.sup.15 cm.sup.-3 to 1.times.10.sup.17 cm.sup.-3. When
making it operate at least in the enhancement mode (normally-off
state), when the HEMT structure is formed and a forward bias at 0.9
V or less is applied to the gate electrode, so as to make
two-dimensional electron gas accumulated at the interface between
the electron supply layer and channel layer, it is not desirable to
make "negative" space charges, resulting from the ionized acceptor
level, exist in the whole electron supply layer. Similarly, it is
also not desirable to give "composition modulation" in the electron
supply layer to produce a situation that "negative" polarized
charges are continuously distributed. Hence, an epitaxial film with
constant composition which is not given the "composition
modulation" is usually used for an electron supply layer.
[0274] Specifically, in the AlGaN/GaN heterojunction FET with HEMT
structure with construction of making it operate in the enhancement
mode (normally-off state), when barrier height .PHI..sub.B (eV) of
the Schottky junction is about 0.9 eV, where the gate electrode is
grounded (state that a gate voltage is 0 V), it is necessary to
produce a state that current does not flow in essence even if a
voltage is applied between a source and a drain. Hence, when
barrier height .PHI..sub.B (eV) of the Schottky junction is about
0.9 eV, where the gate electrode is grounded (state that a gate
voltage is 0 V), it is necessary that not only the electron supply
layer is depleted but also the channel layer is depleted.
[0275] In such a case, for example, when each of residual carrier
concentration (concentration of the ionized shallow donor level) of
the electron supply layer and residual carrier concentration
(concentration of the ionized shallow donor level) of the channel
layer is at least 5.times.10.sup.15 cm.sup.-3, when barrier height
.PHI..sub.B (eV) of the Schottky junction is about 0.9 eV, active
layer thickness a defined as a total of the film thickness of the
electron supply layer, and the film thickness of the channel layer
directly under the gate electrode can be selected in the range of
10 nm a 30 nm. In addition, so as to generate accumulation of
two-dimensional electron gas at the interface between the
above-described electron supply layer and channel layer when the
forward bias of 0.2V to 0.9V inclusive is applied to the gate
electrode, when residual carrier concentration (concentration of
the ionized shallow donor level) of the electron supply layer is
5.times.10.sup.15 cm.sup.-3, it is necessary to select the film
thickness of the electron supply layer directly under the gate
electrode in the range of 5 nm to 15 nm, Furthermore, when the
residual carrier concentration (concentration of the ionized
shallow donor level) of the electron supply layer is
1.times.10.sup.17 cm.sup.-3 and the residual carrier concentration
(concentration of the ionized shallow donor level) of the channel
layer is 5.times.10.sup.15 cm.sup.-3, when barrier height
.PHI..sub.B (eV) of the Schottky junction is about 0.9 eV, active
layer thickness a defined as a total of the film thickness of the
electron supply layer, and the film thickness of the channel layer
directly under the gate electrode can be selected in the range of
10 nm.ltoreq.a.ltoreq.30 nm. In addition, so as to generate
accumulation of two-dimensional electron gas at the interface
between the above-described electron supply layer and channel layer
when the forward bias of 0.2V to 0.9V inclusive is applied to the
gate electrode, when residual carrier concentration (concentration
of the ionized shallow donor level) of the electron supply layer is
1.times.10.sup.17 cm.sup.-3, it is necessary to select the film
thickness of the electron supply layer directly under the gate
electrode in the range of 5 nm to 10 nm.
[0276] In addition, also in an AlGaN/GaN heterojunction FET with
HEMT structure with the construction of making it operate in the
enhancement mode (normally-off state), so as to make sheet charge
density of two-dimensional electron gas, accumulated at the
interface between the above-mentioned electron supply layer and
channel layer, at least not less than 1.times.10.sup.12 (cm.sup.-2)
by applying a forward bias to the gate electrode as mentioned
above, it is preferable to select discontinuity .DELTA.E.sub.C of
conduction band energy at the interface between the electron supply
layer and channel layer at least in the range of
.DELTA.E.sub.C.gtoreq.0.2 eV.
[0277] When using Al.sub.xGa.sub.1-xN (x is
0.1.ltoreq.x.ltoreq.0.3) as the electron supply layer, as for
barrier height: .PHI..sub.B (eV) of the Schottky junction formed
between the gate electrode and electron supply layer, about 0.9 eV
generally becomes an upper limit. Therefore, so as to fulfill a
condition:
.PHI..sub.B/q.gtoreq..DELTA.E.sub.C/q+(q/.epsilon..sub.B){(N.sub.St.sub.B-
.sup.2/2)+(N.sub.dt.sub.B.sup.2/2)} for achieving the HEMT
structure with the construction of making it operate in the
enhancement mode (normally-off state), it is not possible to
enlarge {(N.sub.St.sub.B)+(N.sub.dt.sub.B.sup.2/2)}. On the other
hand, it is hard to make film thickness: t.sub.B of the electron
supply layer thinner than a lower limit of 4 nm, and as a result,
it becomes hard to enlarge the sheet charge density (nS) of
two-dimensional electron gas accumulated at the interface between
the electron supply layer and channel layer in an ON state of an
enhancement mode operation. In order to enlarge the sheet charge
density (nS) of two-dimensional electron gas accumulated at the
interface between the electron supply layer and channel layer in
the ON state, it is effective to make high barrier height:
.PHI..sub.B (eV) of the Schottky junction formed between the gate
electrode and electron supply layer. For example, when using
In.sub.xAl.sub.1-xN (x is 0.1.ltoreq.x.ltoreq.0.25) instead of
Al.sub.xGa.sub.1-xN (x is 0.1.ltoreq.x.ltoreq.0.3) as the electron
supply layer and using an InAlN/GaN heterojunction FET, it is
possible to make barrier height: .PHI..sub.B (eV) of the Schottky
junction higher.
[0278] In the field-effect transistor according to the present
invention, when selecting the construction of making it in the
depletion (normally-on) mode, a substrate itself is a material
which does not exhibit a polarization effect, and in a state that
both of the gate electrode and substrate are grounded, polarized
charges which exist in a semiconductor layer region are in a state
that "negative" polarized charges (Q1) are usually distributed at
the interface between the electron supply layer with constant
composition and the gate electrode (metal) on a surface, and
"positive" polarized charges (Q2) are usually distributed at the
interface between the electron supply layer with constant
composition, and the channel layer, and, when composition of an
electron supply layer is not constant", positive" or "negative"
polarized charges (.SIGMA.Q.sub.supplier) distributed in the
electron supply layer according to a local composition rate of
changes are distributed, "negative" polarized charges (Q3) are
distributed at the interface between the channel layer and a
"composition-modulated" buffer layer, "negative" polarized charges
continuously distributed over a whole internal area of the
"composition modulated" buffer layer (.SIGMA.Q.sub.buffer) are
distributed, "negative" polarized charges (Q4) are distributed at
the interface of the "composition modulated" buffer layer with an
AlN nucleation layer, and "positive" polarized charges (Q5) are
distributed at the interface of the AlN nucleation layer with a
substrate surface, respectively.
[0279] On the other hand, the electron supply layer itself is
depleted and the "positive" space charges (.SIGMA.Q.sub.SD1),
resulting from the ionized donor level, exist inside this electron
supply layer. In addition, the shallow donor level included in the
"composition modulated" buffer layer is also ionized, and the
"positive" space charges (.SIGMA.Q.sub.SD2) derived from the
ionized donor level also exist inside the "composition modulated"
buffer layer.
[0280] In addition, a surface of the electron supply layer is
covered with the gate electrode (metal) and a dielectric film as a
passivation film in both sides of the gate electrode (metal). In
many cases, in the surface of the electron supply layer which
contacts the gate electrode (metal) and the surface of the electron
supply layer which contacts the passivation film, relatively deep
surface levels (deep donor levels) exist, and these deep surface
levels (deep donor levels) are also ionized. In consequence, in the
surface of the electron supply layer which contacts the gate
electrode (metal) and the surface of the electron supply layer
which contacts the passivation film, "positive" surface charges
(Q.sub.SS) derived from the ionized deep surface levels (deep donor
levels) exist.
[0281] Electrical neutrality condition is fulfilled by "positive"
space charges (or "negative" space charge resulting from the
ionized acceptor level) resulting from these ionized donor levels
and being immobilized, "positive" surface charges localized in the
surface of the electron supply layer which contacts the gate
electrode (metal) and the surface of the electron supply layer
which contacts the passivation film, and polarized charges which
exist in the semiconductor layer region, and the carriers
(electrons) accumulated in the channel layer.
[0282] Usually, "negative" polarized charges (Q1) which are
generated at the interface between the electron supply layer and
surface gate electrode (metal) are in the state of being almost
compensated by the "positive" surface charges (Q.sub.SS) which are
localized in the surface of the electron supply layer, which
contacts the gate electrode (metal) (and the surface of the
electron supply layer which contacts the passivation film). That
is, it becomes Q1.apprxeq.Q.sub.SS.
[0283] Furthermore, with considering that the "positive" space
charges (.SIGMA.Q.sub.SD2) derived from the ionized donor level
which exists in the "composition modulated" buffer layer are few,
the "negative" polarized charges (Q3) generated at the interface
between the channel layer and "composition modulated" buffer layer,
the "negative" polarized charges continuously distributed over the
whole internal area of the "composition modulated" buffer layer
(.SIGMA.Q.sub.buffer), and the "negative" polarized charges (Q4)
generated at the interface of the "composition modulated" buffer
layer with an AlN nucleation layer are in a state of being almost
compensated by the "positive" polarized charges (Q5) which are
generated at the interface in an AlN nucleation layer side. That
is, (Q5+.SIGMA.Q.sub.SD2)=(Q3+.SIGMA.Q.sub.buffer+Q4) holds.
[0284] In addition, a total amount (.SIGMA.Q.sub.C) of the carriers
(electrons) accumulated in the channel layer becomes approximately
equal to an arithmetic sum (Q2+.SIGMA.Q.sub.SD1) of the "positive"
polarized charges (Q2) which are generated at the interface between
the electron supply layer and channel layer, and the "positive"
space charges (.SIGMA.Q.sub.SD1) (or "negative" space charge
resulting from the ionized acceptor level) resulting from ionized
donor levels inside the electron supply layer. That is,
(.SIGMA.Q.sub.C)=(Q2+.SIGMA.Q.sub.SD1) holds.
[0285] An overall electrical neutrality condition becomes
(Q5+.SIGMA.Q.sub.SD2)+(Q2+.SIGMA.Q.sub.SD1)=(Q3+.SIGMA.Q.sub.buffrt+Q4)+(-
.SIGMA.Q.sub.C). For example, when the positive polarized charges
(Q5) which are generated in an underlying layer (interface in an
AlN nucleation layer side) of the buffer layer are compensated with
electrons, such as hot carriers injected by a certain cause and Q5
reduces, so as to maintain the above-mentioned electrical
neutrality condition, the total amount (.SIGMA.Q.sub.C) of the
carriers (electrons) accumulated in the channel layer reduces. When
Q5 disappears completely temporarily, the total amount
(.SIGMA.Q.sub.C) of the carriers (electrons) accumulated in the
channel layer becomes
(.SIGMA.Q.sub.C)=(.SIGMA.Q.sub.SD2)+(Q2+.SIGMA.Q.sub.SD1)-(Q3+.SIGMA.Q.su-
b.buffer+Q4). In such a case, with considering that the "positive"
space charges (.SIGMA.Q.sub.SD2) derived from the ionized donor
level which exists in the "composition modulated" buffer layer are
few, the total amount (.SIGMA.Q.sub.C) of the carriers (electrons)
accumulated in the channel layer is lowered approximately to a
level of
(.SIGMA.Q.sub.C)=(Q2+.SIGMA.Q.sub.SD1)-(Q3+.SIGMA.Q.sub.buffer+Q4).
A sufficient condition that the total amount (.SIGMA.Q.sub.C) of
the carriers (electrons) accumulated in the channel layer is not
drained also in this phase is expressed as
(Q2+.SIGMA.Q.sub.SD1)>(Q3+.SIGMA.Q.sub.buffer+Q4). That is, as a
general condition, it becomes the sufficient condition that the sum
total (Q2+.SIGMA.Q.sub.SD1) of the "positive" charges which are
generated in the electron supply layer is more than the sum total
(Q3+.SIGMA.Q.sub.buffer+Q4) of the "negative" charges which are
generated inside the "composition modulated" buffer layer and at
the interface with the channel layer.
[0286] When a field-effect transistor is formed, when a reverse
bias is applied to a gate electrode, with following on electron
injection from a GaN channel layer to a first AlGaN layer (buffer
layer) being suppressed effectively, a pinch-off characteristic is
improved. In addition, with using together selection of such
"composition modulated" AlGaN layer (buffer layer) and a measure of
setting an aspect ratio: Lg/a of gate length Lg to active layer
thickness a (gate-to-channel distance; sum of a thickness of AlGaN
electron supply layer 5 and a thickness of GaN channel layer 4) at
5 or more, it is possible to achieve a better pinch-off
characteristic. If possible, when applying device structure of
using together a measure of setting the aspect ratio: Lg/a at 10 or
more, it is possible to achieve more secure suppression of the
short channel effect in a GaN-type FET for millimeter-wave band or
a GaN-type FET for submillimeter-wave band.
[0287] It can be explained that, because of the above-mentioned
effects, the GaN-type HJFET according to the present invention can
achieve large improvement also in respect of a DC gain or an RF
gain in the case of high voltage operation.
[0288] The above describes the principle which brings about its
effects regarding the example of the "Al composition modulated"
AlGaN layer (buffer layer) in which the C plane ((0001) plane)
growth is performed, and Al composition x(z) of Al.sub.xGa.sub.1-xN
reduces monotonically from the interface with the AlN nucleation
layer to the interface with the GaN channel layer in the
construction of the GaN channel layer/first AlGaN layer (buffer
layer)/AlN nucleation layer/substrate.
[0289] Similarly, the same effect can be achieved also when
selecting the "Al composition modulated"
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN layer (buffer layer) in which
the C plane ((0001) plane) growth is performed, and Al composition
x(z) of Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN reduces monotonically
from the interface with the AlN nucleation layer toward the
interface with the In.sub.yGa.sub.1-yN channel layer to the
interface with the In.sub.yGa.sub.1-yN channel layer using the
Al(InGa)N layer which is made up of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN as the buffer layer in the
construction (where, 1>y.gtoreq.0) of the In.sub.yGa.sub.1-yN
channel layer/buffer layer/AlN nucleation layer/substrate. Also in
this case, it is more preferable that .DELTA.E.sub.c>2 kT (k
denotes a Boltzmann's constant and T denotes temperature of about
300K) or the like is provided as a barrier (step) corresponding to
discontinuity .DELTA.E.sub.C of conduction band energy at the
interface between the Al(InGa)N layer (buffer layer) and
In.sub.yGa.sub.1-yN channel layer. Hence, it is preferable to
select Al composition x(z):xt of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN at the interface with the
In.sub.yGa.sub.1-yN channel layer so as to become in the range of
discontinuity .DELTA.E.sub.C of the above-mentioned conduction band
energy. In addition, when Al composition x(z) of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN reduces monotonically, it is
preferable to maintain, for example, its effective percentage
reduction .differential.x(z)/.differential.z (or
.delta.x(z)/.delta.z) in -0.05
.mu.m.sup.-1.gtoreq.{.differential.x(z)/.differential.z}, In such a
case, it is possible to adopt a method of performing a monotone
decrease fine step-wise as an aspect that Al composition x(z) of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN reduces effective
monotonically.
[0290] In the construction of the GaN channel layer/"Al composition
modulated" AlGaN layer/AlN nucleation layer/substrate, since
difference .DELTA.a(GaN/Al.sub.xtGa.sub.1-xtN) between a lattice
constant of GaN: a(GaN)=3.189 (A) and a lattice constant of
Al.sub.xtGa.sub.1-xtN of an upmost surface (interface with the
channel layer) of the buffer layer: a(xt).apprxeq.3.189-0.077xt
(.ANG.) is
.DELTA.a(GaN/Al.sub.xtGa.sub.1-xtN)=a(GaN)-a(xt).apprxeq.0.077xt
(.ANG.), which is a few, it is not necessary to consider an
influence of lattice mismatching at the interface between the GaN
channel layer and "Al composition modulated" AlGaN buffer
layer.
[0291] On the other hand, at the interface between the
In.sub.yGa.sub.1-yN channel layer and "Al composition modulated"
Al(InGa)N layer (buffer layer), an influence of difference between
both lattice constants may arise. That is, since the
In.sub.yGa.sub.1-yN channel layer which is an upper layer keeps
good crystallinity as lattice mismatching becomes large. An upper
limit (critical film thickness T.sub.C) of a film thickness to
which epitaxial growth is possible reduces in reverse proportion.
In other words, when lattice mismatching at the interface between
the In.sub.yGa.sub.1-yN channel layer and "Al composition
modulated" Al(InGa)N layer (buffer layer) becomes large, it may
become hard to grow epitaxially the In.sub.yGa.sub.1-yN channel
layer with a target film thickness.
[0292] For example, when a lattice constant of an upmost surface
(interface with the channel layer) of the "Al composition
modulated" Al(InGa)N layer (buffer layer) is made to coincide with
a lattice constant: a(GaN) of GaN, critical film thickness T.sub.C
in the In.sub.yGa.sub.1-yN grown up on a surface of this "Al
composition modulated" Al(InGa)N layer (buffer layer) becomes the
same value substantially as critical film thickness T.sub.C in the
In.sub.yGa.sub.1-yN grown on a surface of GaN. In addition, when
performing epitaxial growth on the surface of GaN, an In
composition range of In.sub.yGa.sub.1-yN that critical film
thickness T.sub.C becomes T.sub.C.ltoreq.10 nm (100 .ANG.) is
1.gtoreq.y.gtoreq.0.22. Hence, also in construction of the
In.sub.yGa.sub.1-yN channel layer/buffer layer/AlN nucleation
layer/substrate (where, 1>y.gtoreq.0), when a film thickness of
the In.sub.yGa.sub.1-yN channel layer is within 10 nm (100 .ANG.)
to 50 nm (500 .ANG.) inclusive, when an In composition range of
In.sub.yGa.sub.1-yN is selected at least in 0.22.gtoreq.y.gtoreq.0,
it is possible to exclude a possibility of being affected by an
influence of lattice mismatching.
[0293] Hence, as for the In composition y of the
In.sub.yGa.sub.1-yN channel layer, it is more preferable to select
the In composition y so that mismatching:
{(a(In.sub.yGa.sub.1-yN)-a (AlN))/a(AlN)} of the lattice constant
a(AlN) of AlN and the lattice constant a(In.sub.yGa.sub.1-yN) of
the In.sub.yGa.sub.1-yN is set in the following range.
[0294] In addition, also when selecting the construction of the
AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel
layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the above-mentioned "Al composition
modulated" Al(InGa)N layer (buffer layer) is adopted, regarding the
AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel layer,
"various conditions" used when selecting the construction of the
AlGaN electron supply layer/GaN channel layer/buffer layer/AlN
nucleation layer/substrate where the "Al composition modulated"
AlGaN layer (buffer layer) described previously is adopted are
completely applicable in a similar manner.
[0295] Furthermore, in construction of the In.sub.yGa.sub.1-yN
channel layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the C plane ((0001) plane) growth is
performed, it is possible to achieve the same effect also when the
"Ga composition modulated" Al(InGa)N layer (buffer layer) which
uses the Al(InGa)N layer, which is made up of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN, as the buffer layer, and in
which Al composition x of Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN is
constant from the interface with the AlN nucleation layer to the
interface with the In.sub.y0Ga.sub.1-y0N channel layer, but Ga
composition: (1-x)(1-y(z)) reduces monotonically is selected.
[0296] Also in this case, in Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN
which forms the Al(InGa)N layer (buffer layer), energy difference
.DELTA.E.sub.C of the conduction band edge to In.sub.y0Ga.sub.1-y0N
reduces monotonically toward a depth direction (Z-axis direction).
On the other hand, a lattice constant of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN increases monotonically
toward the depth direction (z-axis direction). In consequence, the
same effect is achieved. In addition, also in this case, it is more
preferable that .DELTA.E.sub.c>2 kT (k denotes a Boltzmann's
constant and T denotes temperature of about 300K) or the like is
provided as a barrier (step) corresponding to discontinuity
.DELTA.E.sub.C of conduction band energy at the interface between
the Al(InGa)N layer (buffer layer) and In.sub.yGa.sub.1-yN channel
layer.
[0297] Also in the construction of this In.sub.yGa.sub.1-yN channel
layer/"Ga composition modulated" Al(InGa)N layer (buffer layer),
when lattice mismatching at the interface between the
In.sub.y0Ga.sub.1-y0N channel layer/"Ga composition modulated"
Al(InGa)N layer (buffer layer) becomes large, it may become hard to
grow epitaxially the In.sub.yGa.sub.1-yN channel layer with a
target film thickness.
[0298] For example, when a lattice constant of an upmost surface
(interface with the channel layer) of the "Ga composition
modulated" Al(InGa)N layer (buffer layer) is made to coincide with
a lattice constant: a(GaN) of GaN, critical film thickness T.sub.C
in the In.sub.yGa.sub.1-y0N grown up on a surface of this "Ga
composition modulated" Al(InGa)N layer (buffer layer) becomes the
same value substantially as critical film thickness T.sub.C in the
In.sub.y0Ga.sub.1-y0N grown on a surface of GaN. In addition, when
performing epitaxial growth on the surface of GaN, an In
composition range of In.sub.y0Ga.sub.1-y0N that its critical film
thickness T.sub.C becomes T.sub.C.ltoreq.10 nm (100 .ANG.) is
1.gtoreq.y.sub.0.gtoreq.0.22. Hence, also in construction of the
In.sub.y0Ga.sub.1-y0N channel layer/"Ga composition modulated"
Al(InGa)N buffer layer/AlN nucleation layer/substrate (where,
1>y.sub.0.gtoreq.0), when a film thickness of the
In.sub.y0Ga.sub.1-y0N channel layer is within 10 nm (100 A) to 50
nm (500 .ANG.) inclusive, when an In composition range of
In.sub.y0Ga.sub.1-y0N is selected at least in
0.22.gtoreq.y.sub.0.gtoreq.0, it is possible to exclude a
possibility of being affected by an influence of lattice
mismatching.
[0299] Hence, as for the In composition y.sub.0 of the
In.sub.y0Ga.sub.1-y0N channel layer, it is more preferable to
select the In composition y.sub.0 so that mismatching:
{(a(In.sub.y0Ga.sub.1-y0N)-a(AlN))/a(AlN)} of the lattice constant
a(AlN) of AlN and the lattice constant a(In.sub.yGa.sub.1-yN) of
the In.sub.yGa.sub.1-yN is set in the following range.
[0300] In addition, also when selecting the construction of the
AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel
layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the above-mentioned "Ga composition
modulated" Al(InGa)N layer (buffer layer) is adopted, regarding the
AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel layer,
"various conditions" used when selecting the construction of the
AlGaN electron supply layer/GaN channel layer/buffer layer/AlN
nucleation layer/substrate where the "Al composition modulated"
AlGaN layer (buffer layer) described previously is adopted are
completely applicable in a similar manner.
[0301] Furthermore, in construction of the In.sub.y0Ga.sub.1-y0N
channel layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the C plane ((0001) plane) growth is
performed, the same effect is achievable also when, using the
Al(InGa)N layer, which is made up of
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN, as the buffer layer, Al
composition x(z) and Ga composition [(1-x)(z))(1-y(z))] are
continuously changed so that energy difference .DELTA.E.sub.C of
the conduction band edge of Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN
to the In.sub.y0Ga.sub.1-y0N may reduce monotonically in this depth
direction (z-axis direction) from the interface with the AlN
nucleation layer to the interface with the In.sub.y0Ga.sub.1-y0N
channel layer, but simultaneously, the lattice constant of the
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN may increase monotonically
toward the depth direction (z-axis direction). In addition, also in
this case, it is more preferable that .DELTA.E.sub.c>2 kT (k
denotes a Boltzmann's constant and T denotes temperature of about
300K) or the like is provided as a barrier (step) corresponding to
discontinuity .DELTA.E.sub.C of conduction band energy at the
interface between the Al(InGa)N layer (buffer layer) and
In.sub.yGa.sub.1-yN channel layer.
[0302] On the other hand, also at the interface between the
In.sub.yGa.sub.1-yN channel layer and "Al and Ga composition
modulated" Al(InGa)N layer (buffer layer), depending on selection
of its composition, large difference between both lattice constants
may arise. Because of lattice mismatching, distortion stress is
accumulated in the In.sub.yGa.sub.1-yN thin film which is grown
epitaxially on a surface of the "Al and Ga composition modulated"
Al(InGa)N layer (buffer layer). This distortion stress increases as
a film thickness of the In.sub.yGa.sub.1-yN thin film increases.
When the distortion stress accumulated exceeds a threshold, crystal
defects, such as a misfit dislocation, are rapidly introduced into
the In.sub.yGa.sub.1-yN thin film, and hence, crystallinity rapidly
decreases. A film thickness (critical film thickness T.sub.C) which
causes this rapid reduction of crystallinity reduces in reverse
proportion in size of lattice mismatching. In other words, when the
lattice mismatching at the interface between the
In.sub.y0Ga.sub.1-y0N channel layer/"composition modulated"
Al(InGa)N layer (buffer layer) becomes large, it may become hard to
grow epitaxially the In.sub.y0Ga.sub.1-y0N channel layer with a
target film thickness.
[0303] For example, when a lattice constant of an upmost surface
(interface with the channel layer) of the "composition modulated"
Al(InGa)N layer (buffer layer) is made to coincide with a lattice
constant: a(GaN) of GaN, critical film thickness T.sub.C in the
In.sub.yGa.sub.1-y0N grown up on a surface of this "composition
modulated" Al(InGa)N layer (buffer layer) becomes the same value
substantially as critical film thickness T.sub.C in the
In.sub.y0Ga.sub.1-y0N grown on a surface of GaN. In addition, when
performing epitaxial growth on the surface of GaN, an In
composition range of In.sub.y0Ga.sub.1-y0N that its critical film
thickness T.sub.C becomes T.sub.C.ltoreq.10 nm (100 A) is
1.gtoreq.y.sub.0.gtoreq.0.22. Hence, also in construction of the
In.sub.y0Ga.sub.1-y0N channel layer/"Ga composition modulated"
Al(InGa)N buffer layer/AlN nucleation layer/substrate (where,
1>y.sub.0.gtoreq.0), when a film thickness of the
In.sub.y0Ga.sub.1-y0N channel layer is within 10 nm (100 A) to 50
nm (500 .ANG.) inclusive, when In composition of the
In.sub.y0Ga.sub.1-y0N is selected at least in the range of
0.22.gtoreq.y.sub.0.gtoreq.0, it is possible to exclude a
possibility of being affected by an influence of lattice
mismatching.
[0304] Hence, as for the In composition y.sub.0 of the
In.sub.y0Ga.sub.1-y0N channel layer, it is more preferable to
select the In composition y.sub.0 so that mismatching:
{(a(In.sub.y0Ga.sub.1-y0N).a(AlN))/a(AlN)} of the lattice constant
a(AlN) of AlN and the lattice constant a(In.sub.yGa.sub.1-yN) of
the In.sub.yGa.sub.1-yN is set in the following range.
(0.154/3.112).gtoreq.{(a(In.sub.y0Ga.sub.1-y0N)-a(AlN))/a(AlN)}.gtoreq.(-
0.077/3.112)
[0305] In addition, also when selecting the construction of the
AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel
layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the above-mentioned "Al and Ga composition
modulated" Al(InGa)N layer (buffer layer) is adopted, regarding the
AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel layer,
"various conditions" used when selecting the construction of the
AlGaN electron supply layer/GaN channel layer/buffer layer/AlN
nucleation layer/substrate where the "Al composition modulated"
AlGaN layer (buffer layer) described previously is adopted are
completely applicable in a similar manner.
Exemplary Embodiment 2
[0306] FIG. 2 shows schematically sectional structure of group III
nitride semiconductor heterojunction FET prepared using actually
the construction of the second AlGaN layer/GaN layer/first AlGaN
layer/AlN nucleation layer/substrate exemplified in the
above-mentioned first exemplary embodiment so as to confirm
actually the effect of the construction of the second AlGaN
layer/GaN layer/first AlGaN layer/AlN nucleation layer/substrate
exemplified in the above-mentioned first exemplary embodiment.
[0307] The multilayer epitaxial layer which has the construction of
the second AlGaN layer/GaN layer/first AlGaN layer/AlN nucleation
layer/substrate are prepared by using the C plane ((0001) plane) of
SiC as substrate 1, and giving C plane ((0001) plane) growth of
each layer on the surface by an MOCVD growth method. First of all,
an undoped AlN layer at 200 nm of film thickness is formed on a
low-temperature growth condition on the C plane of SiC used as
substrate 1. AlN nucleation layer 2 itself which is made up of this
low-temperature growth undoped AlN film functions as an insulating
nucleation layer. Subsequently, undoped AlGaN buffer layer 3 at 1
.mu.m (1000 nm) of film thickness, undoped GaN channel layer 4 at
10 nm of film thickness, and undoped AlGaN electron supply layer 5
at 45 nm of film thickness are grown epitaxially on AlN nucleation
layer 2 under normal high temperature growth conditions
successively.
[0308] In this second exemplary embodiment, undoped AlGaN buffer
layer 3 is selected so that Al composition x(z) of the
Al.sub.xGa.sub.1-xN may reduce monotonically from an interface with
AlN nucleation layer 2 to an interface with undoped GaN channel
layer 4, that is, toward a film thickness direction (z-axis
direction). In the second exemplary embodiment, Al composition x
(z=1 .mu.m) xt of the Al.sub.xGa.sub.1-xN is selected at xt=0.05 at
an interface (z=1 .mu.m) with GaN channel layer 4, and Al
composition x (z=0 .mu.m).ident.xb of the Al.sub.xGa.sub.1-xN is
selected at xb=0.30 at an interface (z=0) with AlN nucleation layer
2, respectively. In addition, in undoped AlGaN electron supply
layer 5, Al composition x is set constant and Al0.2Ga0.8N with
x=0.2 is selected.
[0309] In a multilayered epitaxial film which is prepared and uses
the above-described linear "Al composition modulated" AlGaN buffer
layer, sheet resistance rs of the whole multilayered epitaxial film
was 605.OMEGA./.quadrature., sheet carrier concentration was
9.50.times.10.sup.12 cm.sup.-2, and mobility was 1600 cm.sup.2/Vs.
On the other hand, in a conventional multilayered epitaxial film
which uses a GaN buffer layer, sheet resistance rs was
550.OMEGA./.quadrature., sheet carrier concentration was
1.05.times.10.sup.13 cm.sup.-2, and mobility was 1600
cm.sup.2/Vs.
[0310] Source electrode 6 and drain electrode 7 which are given ohm
contact on a surface of undoped AlGaN electron supply layer 5, and
gate electrode 8 is formed between them. In addition, a surface of
AlGaN electron supply layer 5 between source electrode 6 and gate
electrodes 8, and gate electrode 8 and drain electrode 7 is covered
with dielectric film 9 by SiN, and is given surface protection. In
addition, although not clearly shown in FIG. 1, a position of gate
electrode 8 is selected so that an interval between gate electrode
8 and drain electrode 7 may become wider than an interval between
source electrode 6 and gate electrode 8.
[0311] Specifically, the SiN film which covers the surface of AlGaN
electron supply layer 5 between source electrode 6 and drain
electrode 7 is formed beforehand, and an opening for formation of
gate electrode 8 is formed in a predetermined position on this SiN
film. A surface of AlGaN electron supply layer 5 exposed in the
opening is etched, and a shallow recess section is formed. Gate
electrode 8 is prepared in this shallow recess section, and
construction which has a recess type gate is adopted.
[0312] A preparation process of the AlGaN/GaN-type HJFET of this
exemplary embodiment shown in FIG. 2 will be described simply. In
order to achieve inter-device separation between FETs after
finishing a series of epitaxial growth, mesa etching which reaches
GaN channel layer 4 is given around each device using a mask
etching method. That is, in this region, etching removal of undoped
AlGaN electron supply layer 5 is performed, and inter-device
separation mesas are formed. Subsequently, for example, metals such
as Ti/Au are evaporated, and are given patterning into a
predetermined form using a lift-off method using a photoresist mask
with matching forms of source electrode 6 and drain electrode 7
provided on the surface of AlGaN electron supply layer 5. Ohmic
contact is taken by performing annealing treatment of the metal
layers, such as Ti/Au (10 nm to 200 nm in thickness), which are
given patterning into these predetermined forms in a flow of inert
gas at 800.degree. C. for 1 to 3 minutes.
[0313] Next, for example, the SiN film at 80 nm of film thickness
is formed by applying a vapor phase depositing method, such as a
plasma CVD method, so that a whole surface may be covered. Using a
resist mask, selective etching is performed and an openings for
formation of gate electrode 8 is formed in a predetermined position
on the SiN film which covers the surface of AlGaN electron supply
layer 5 between source electrode 6 and drain electrode 7. In
addition, when forming the resist mask used for formation of the
above-mentioned opening, in order to achieve a target width of 0.15
.mu.m, an electron beam lithography method is adopted.
[0314] A surface of AlGaN electron supply layer 5 exposed in the
opening is slightly etched, and a shallow recess section is formed.
In addition, this recess depth d is selected at 25 nm in this
exemplary embodiment. Hence, directly under the recess section, a
thickness of AlGaN electron supply layer 5 becomes 20 nm after
etching.
[0315] Subsequently, gate metals, such as Ni/Au (10 nm to 200 nm in
thickness), are evaporated and lifted off on the surface of AlGaN
electron supply layer 5 which is under the above-mentioned opening
and is given recess formation using a resist mask, and are given
patterning into a predetermined form. In such a case, gate
electrode 9 patterned is used as a gate electrode which has a
T-form sectional shape, and a part of which covers an SiN film
surface adjacent to the opening (recess section). To an opening
(recess section), dimensional accuracy of alignment of this T-form
upper face shape and size is 10 nm, and an electron beam
lithography method is adopted for exposure of the resist mask used
for the lift-off.
[0316] When formation of gate electrode 8 is completed, the surface
of AlGaN electron supply layer 5 between source electrode 6 and
gate electrode 8 and between gate electrode 8 and drain electrode 7
becomes in a state of being covered with the SiN film, and this
residual SiN film is used as it is as dielectric film 9.
[0317] The prepared AlGaN/GaN-type HJFET becomes a so-called
HEMT-type FET using two-dimensional electron gas generated at the
interface between AlGaN electron supply layer 5 and GaN channel
layer 4. Its gate length Lg is equivalent to 0.15 .mu.m in width of
the recess section under the above-mentioned opening. The aspect
ratio: Lg/a of gate length Lg to active layer thickness
(gate-to-channel distance) a becomes Lg/a.apprxeq.150/30=5 since
active layer thickness a is equivalent to a sum of the thickness of
AlGaN electron supply layer 5, which is directly under the recess
section and remains after etching, and the thickness of the channel
layer, that is, 30 nm.
[0318] On the other hand, as for Al.sub.xGa.sub.1-xN
(0.30.times.0.05) which forms AlGaN buffer layer 3 of the
above-mentioned carrierp which is given "Al composition
modulation", when undoped Al.sub.xGa.sub.1-xN layer having
corresponding uniform Al composition is prepared temporarily,
residual carriers are electrons, the residual carrier concentration
n is dependent on growth conditions and Al composition, and
dispersion becomes generally in the order of 10.sup.14 to 10.sup.15
cm.sup.-3 of carriers to some extent. In addition, in this second
exemplary embodiment, it is set that Al composition x(z) of
Al.sub.xGa.sub.1-xN which forms undoped AlGaN layer 3 linearly
reduces from an interface (z=0) with AlN nucleation layer 2 to an
interface (z=1 .mu.m) with GaN channel layer 4. That is, a film
thickness t.sub.buffer of whole AlGaN buffer layer 3 is 1 .mu.m,
and Al composition x(z) is expressed as follows, as a function of a
thickness (z/.mu.m) in a depth direction (Z axial direction).
x ( z ) = xt z + xb ( 1 - z ) = 0.05 z + 0.30 ( 1 - z )
##EQU00016##
[0319] In the construction of the above-mentioned multilayered
epitaxial film, polarized charge density; .sigma.(P)/e cm.sup.-3
(where, e denotes electronic charge (unit charge) of an electron)
which is generated in undoped AlGaN buffer layer 3 which is given
this linear "Al composition modulation" is negative polarized
charges with .sigma.(P)/e.apprxeq.1.1.times.10.sup.17 cm.sup.-3 to
the extent when referring to an estimated result shown in FIG. 8.
That is, density .sigma.(P)/e.apprxeq.1.1.times.10.sup.17 cm.sup.-3
of the negative polarized charge which is induced in undoped AlGaN
buffer layer 3 which is given "Al composition modulation" exceeds
estimated residual carrier concentration n in the order of
10.sup.14 to 10.sup.15 cm.sup.-3. Hence, it is possible for this
induced negative polarized charge to compensate completely positive
space charges corresponding to the above-mentioned residual carrier
(electron) density n and resulting from an ionized impurity level
(or intentionally doped donor level with comparatively low
concentration) which exists in undoped AlGaN buffer layer 3. In
consequence, it becomes in a state that the negative space charges
in the order of 10.sup.16 cm.sup.-3 exists by the residual negative
polarized charges in undoped AlGaN buffer layer 3 which is given
"Al composition modulation". Effectually, undoped AlGaN buffer
layer 3 which is given "Al composition modulation" plays the
function equivalent to the p-layer in which negative space charges
in the order of 10.sup.16 cm.sup.-3 exist.
[0320] FIG. 9 illustrates schematically a band diagram of the
multilayered epitaxial film directly under gate electrode 9 of the
above-described AlGaN/GaN-type HJFET. Since undoped AlGaN buffer
layer 3 which is given "Al composition modulation" plays the
function equivalent to the p-layer in which negative space charges
in the order of 10.sup.16 cm.sup.-3 exist effectually, an energy
position of a conduction band edge of this region decreases with
keeping a convex shape from the interface (z=0) with AlN nucleation
layer 2 to the interface (z=1 .mu.m) with GaN channel layer 4.
Hence, at the interface (z=1 .mu.m) between undoped AlGaN buffer
layer 3 and GaN channel layer 4, because of an energy gradient of
the conduction band edge, which shows the convex shape, in addition
to a barrier (step) corresponding to discontinuity .DELTA.E.sub.C
of conduction band energy, electron injection into undoped AlGaN
buffer layer 3 over the above-mentioned barrier (step) is
suppressed.
[0321] The above-described AlGaN/GaN-type HJFET has the
construction that, in the Al.sub.xGa.sub.1-xN which forms undoped
AlGaN layer 3 which is given "Al composition modulation", Al
composition x(z) continuously reduces from the interface (z=0) with
AlN nucleation layer 2 toward the interface (z=1 jam) with InAlGaN
channel-back barrier layer 10. When construction that Al
composition x(z) stepwise reduces at a narrow thickness step
.DELTA.z instead of the above-described Al.sub.xGa.sub.1-xN whose
composition changes continuously is selected, it becomes in a state
that polarized charge .sigma.(P)={P(x(z))-P(x(z+.delta.z))} occurs
in a sheet at an interface formed every thickness step .delta.z. In
such a case, effectual polarized charge density becomes
.sigma.(P)/.delta.z={P(x (z))-P(x
(z+.delta.z))}/.delta.z=-[{P(x(z+5z))-P(x(z))}/.delta.x(z).delta.x(z)/.de-
lta.z, and when thickness step .delta.z is small enough, it becomes
substantially within difference from a value in the above-mentioned
differentiation notation.
[0322] In addition, at the interface (z=1 .mu.m) between undoped
AlGaN buffer layer 3 and GaN channel layer 4, because of difference
of polarization P between Al.sub.xGa.sub.1-xN with Al composition
x=0.05 and GaN, it is estimated that negative polarized charges are
generated in maximum sheet charge density of nearly
2.times.10.sup.12 (/cm.sup.2). In such extent, influences to a band
form near the interfaces and channel carrier density stored in the
GaN channel layer are not so great. It is because carriers by
two-dimensional electron gas induced by the AlGaN/GaN
heterojunction in the normal AlGaN/GaN heterojunction HJFET (Al
composition of 0.2 etc.) have sheet charge concentration in the
order of 10.sup.13 (/cm.sup.2), which is about one-digit larger.
Furthermore, in this exemplary embodiment, the film thickness of
GaN channel layer 4 is selected at 10 nm, and an effect that
negative polarized charges induced at the interface (z=1 .mu.m)
between such undoped AlGaN buffer layer 3 and GaN channel layer 4
reduces a total amount of two-dimensional electron gas generated at
the interface between AlGaN electron supply layer 5 and GaN channel
layer 4 is limited.
[0323] Also in the field-effect transistor according to this
exemplary embodiment, when selecting construction of making it
operate in a depletion mode (normally-on state), in a state that a
substrate itself is a material which does not exhibit a
polarization effect and both of a gate electrode and a substrate
are grounded, polarized charges which exist in a semiconductor
layer region become in a state that "negative" polarized charges
(Q1) are usually distributed at the interface between the electron
supply layer with constant composition and the gate electrode
(metal) on a surface, "positive" polarized charges (Q2) are usually
distributed at the interface between the electron supply layer with
constant composition, and the channel layer, and, when composition
of an electron supply layer is not constant, "positive" or
"negative" polarized charges (.SIGMA.Q.sub.supplier) distributed in
the electron supply layer according to a local composition rate of
changes are distributed, "negative" polarized charges (Q3) are
distributed at the interface between the channel layer and a
"composition modulated" buffer layer, "negative" polarized charges
continuously distributed over a whole internal area of the
"composition modulated" buffer layer (.SIGMA.Q.sub.buffer) are
distributed, "negative" polarized charges (Q4) are distributed at
the interface of the "composition modulated" buffer layer with the
AlN nucleation layer, and "positive" polarized charges (Q5) are
distributed at the interface of the AlN nucleation layer with a
substrate surface, respectively.
[0324] On the other hand, the electron supply layer itself is
depleted and the "positive" space charges (.SIGMA.Q.sub.SD1),
resulting from the ionized donor level, exist inside this electron
supply layer. In addition, the shallow donor level included in the
"composition modulated" buffer layer is also ionized, and the
"positive" space charges (.SIGMA.Q.sub.SD2) derived from the
ionized donor level also exist inside the "composition modulated"
buffer layer.
[0325] In addition, a surface of the electron supply layer is
covered with the gate electrode (metal) and a dielectric film as a
passivation film in both sides of the gate electrode (metal). In
many cases, in the surface of the electron supply layer which
contacts the gate electrode (metal) and the surface of the electron
supply layer which contacts the passivation film, comparatively
deep surface levels (deep donor levels) exist, and these deep
surface levels (deep donor levels) are also ionized. In
consequence, in the surface of the electron supply layer which
contacts the gate electrode (metal) and the surface of the electron
supply layer which contacts the passivation film, "positive"
surface charges (Q.sub.SS) derived from the ionized deep surface
levels (deep donor levels) exist.
[0326] Electrical neutrality condition is fulfilled by "positive"
space charges (or "negative" space charge resulting from the
ionized acceptor level) resulting from these ionized donor levels
and being immobilized, "positive" surface charges localized in the
surface of the electron supply layer which contacts the gate
electrode (metal) and the surface of the electron supply layer
which contacts the passivation film, and polarized charges which
exist in the semiconductor layer region, and the carriers
(electrons) accumulated in the channel layer.
[0327] Usually, "negative" polarized charges (Q1) which are
generated at the interface between the electron supply layer and
surface gate electrode (metal) are in the state of being almost
compensated by the "positive" surface charges (Q.sub.SS) which are
localized in the surface of the electron supply layer, which
contacts the gate electrode (metal) (and the surface of the
electron supply layer which contacts the passivation film). That
is, it becomes Q1.apprxeq.Q.sub.SS.
[0328] Furthermore, with considering that the "positive" space
charges (.SIGMA.Q.sub.SD2) derived from the ionized donor level
which exists in the "composition modulated" buffer layer are few,
the "negative" polarized charges (Q3) generated at the interface
between the channel layer and "composition modulated" buffer layer,
the "negative" polarized charges continuously distributed over the
whole internal area of the "composition modulated" buffer layer
(.SIGMA.Q.sub.buffer), and the "negative" polarized charges (Q4)
generated at the buffer interface of the "composition modulated"
buffer layer with an AlN nucleation layer are in a state of being
almost compensated by the "positive" polarized charges (Q5) which
are generated at the interface in an AlN nucleation layer side.
That is, (Q5+.SIGMA.Q.sub.SD2)=(Q3+.SIGMA.Q.sub.buffer+Q4)
holds.
[0329] In addition, a total amount (.SIGMA.Q.sub.C) of the carriers
(electrons) accumulated in the channel layer becomes approximately
equal to an arithmetic sum (Q2+.SIGMA.Q.sub.SD1) of the "positive"
polarized charges (Q2) which are generated at the interface between
the electron supply layer and channel layer, and the "positive"
space charges (.SIGMA.Q.sub.SD1) (or "negative" space charge
resulting from the ionized acceptor level) resulting from ionized
donor levels inside the electron supply layer. That is,
(.SIGMA.Q.sub.C)=(Q2+.SIGMA.Q.sub.SD1) holds.
[0330] An overall electrical neutrality condition becomes
(Q5+.SIGMA.Q.sub.SD2)+(Q2+.SIGMA.Q.sub.SD1)=(Q3+.SIGMA.Q.sub.buffrt+Q4)+(-
.SIGMA.Q.sub.C). For example, when the positive polarized charges
(Q5) which are generated in an underlying layer (interface in an
AlN nucleation layer side) of the buffer layer are compensated with
electrons, such as hot carriers injected by a certain cause and Q5
reduces, so as to maintain the above-mentioned electrical
neutrality condition, the total amount (.SIGMA.Q.sub.C) of the
carriers (electrons) accumulated in the channel layer reduces. When
Q5 disappears completely temporarily, the total amount
(.SIGMA.Q.sub.C) of the carriers (electrons) accumulated in the
channel layer becomes
(.SIGMA.Q.sub.C)=(.SIGMA.Q.sub.SD2)+(Q2+.SIGMA.Q.sub.SD1)-(Q3+.SIGMA.Q.su-
b.buffer+Q4). In such a case, with considering that the "positive"
space charges (.SIGMA.Q.sub.SD2) derived from the ionized donor
level which exists in the "composition modulated" buffer layer are
few, the total amount (.SIGMA.Q.sub.C) of the carriers (electrons)
accumulated in the channel layer is lowered approximately to a
level of
(.SIGMA.Q.sub.C)=(Q2+.SIGMA.Q.sub.SD1)-(Q3+.SIGMA.Q.sub.buffer+Q4).
A sufficient condition that the total amount (.SIGMA.Q.sub.C) of
the carriers (electrons) accumulated in the channel layer is not
drained also in this phase is expressed as
(Q2+.SIGMA.Q.sub.SD1)>(Q3+.SIGMA.Q.sub.buffer/ Q4). That is, as
a general condition, it becomes the sufficient condition that the
sum total (Q2+.SIGMA.Q.sub.SD1) of the "positive" charges which are
generated in the electron supply layer is more than the sum total
(Q3+.SIGMA.Q.sub.buffer+Q4) of the "negative" charges which are
generated inside the "composition modulated" buffer layer and at
the interface with the channel layer.
[0331] Regarding this exemplary embodiment, so as to fulfilling the
above-mentioned sufficient condition, it is suitable to adopt the
following construction.
[0332] That is, in the construction of the second AlGaN layer
(AlGaN electron supply layer)/GaN layer (GaN channel layer)/first
AlGaN layer ("Al composition modulated" AlGaN buffer layer)/AlN
nucleation layer/substrate, it is desirable that a sum total of
"negative" polarized charges continuously distributed at least in
the first AlGaN layer ("Al composition modulated" AlGaN buffer
layer) is made to be less than a sum total of "positive" polarized
charges at the interface between the AlGaN electron supply layer
and GaN channel layer. Since the "negative" polarized charges
continuously distributed in the first AlGaN layer ("Al composition
modulated" AlGaN buffer layer) depends on a rate of change:
.differential.x(z)/.differential.z of Al composition x(z) in the
"Al composition modulated" AlGaN buffer layer, it is not desirable
to enlarge the rate of change: |.differential.x(z)/.differential.z|
of Al composition x(z) excessively. As described above, the rate of
change: |.differential.x(z)/.differential.z| of Al composition x(z)
is sufficient in the range of fulfilling
|.differential.x(z)/.differential.z|0.05 .mu.m.sup.-1, and it is
not desirable to enlarge it excessively. Usually, it is preferable
to select the rate of change: |.differential.x(z)/.differential.z|
of Al composition x(z) in the range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0-
.05 .mu.m.sup.-1.
[0333] When the above-mentioned Al composition rate of change is
selected, the "Al composition modulated" AlGaN buffer layer becomes
in a p-like state because of the "negative" polarized charges
continuously distributed in it, and even if Al composition xt at
the interface between the "Al composition modulated" AlGaN buffer
layer and GaN channel layer is set at xt=0, electron injection from
the channel layer to the buffer layer can be suppressed
sufficiently, In addition, in order to provide the band barrier as
mentioned above at the interface between the "Al composition
modulated" AlGaN buffer layer and GaN channel layer, it is
preferable to make the Al composition xt of the "Al composition
modulated" AlGaN buffer layer at this interface into at least 0.05
or more. For example, when film thickness t.sub.buffer of the "Al
composition modulated" AlGaN buffer layer is made into 1 .mu.m,
when the Al composition xt of an uppermost surface of the "Al
composition modulated" AlGaN buffer layer is set at xt=0.05 and the
rate of change: |.differential.x(z)/.differential.z| of Al
composition x(z) is selected in the range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1, the Al composition xb of the lowermost surface of the
"Al composition modulated" AlGaN buffer layer is selected in the
range of 0.35.gtoreq.xb.gtoreq.0.10.
[0334] On the other hand, when the AlGaN electron supply layer is
usually formed of AlGaN with constant Al composition, as for the Al
composition, in order to provide a band barrier necessary for
accumulating carriers (electrons) at the interface between the
AlGaN electron supply layer and GaN channel layer, it is preferable
the Al composition xs of this AlGaN electron supply layer is at
least in the range of 0.15 or more, and more preferably, in the
range of 050.gtoreq.xs.gtoreq.0.20.
[0335] Temporarily, even in the case that film thickness
t.sub.buffer of the "Al composition modulated" AlGaN buffer layer
is made into 1 .mu.m, and that Al composition xt of an uppermost
surface of the "Al composition modulated" AlGaN buffer layer is set
at xt=0.00, when the rate of change:
|.differential.x(z)/.differential.z| of Al composition x(z) is
selected in the range of 0.35
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.10
.mu.m.sup.-1, an average value: x(z).sub.av. of Al composition x(z)
of the "Al composition modulated" AlGaN buffer layer becomes
x(z).sub.av..apprxeq.1/2(xt+xb), and hence, becomes in the range of
0.175.gtoreq.x(z).sub.av..gtoreq.0.05. In addition, for example,
when film thickness t.sub.buffer of the "Al composition modulated"
AlGaN buffer layer is made into 1 .mu.m, Al composition xt of the
uppermost surface of the "Al composition modulated" AlGaN buffer
layer is set at xt=0.05 or more, and the rate of change:
|.differential.x(z)/.differential.z| of Al composition x(z) is
selected in the range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1, the average value: x(z).sub.av. of Al composition
x(z) of the "Al composition modulated" AlGaN buffer layer becomes
x(z).sub.av..apprxeq.1/2(xt+xb), and hence, becomes in the range of
0.20.gtoreq.x(z).sub.av..gtoreq.0.075. Hence, on the
above-described conditions, in comparison of an average value:
xs.sub.av. of Al composition xs of the AlGaN electron supply layer
with the average value: x(z).sub.av. of Al composition x(z) of the
"Al composition modulated" AlGaN buffer layer, It is preferable to
set it as xs.sub.av..gtoreq.x(z).sub.av.
[0336] In addition, with referring to FIG. 8, in the "Al
composition modulated" AlGaN buffer layer, when the rate of change:
|.differential.x(z)/.differential.z| of Al composition x(z) is
selected in the range of 0.35
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.10
.mu.m.sup.-1, density .sigma.(P)/e of induced negative polarized
charges which is made in the "Al composition modulated" AlGaN
buffer layer becomes 1.6.times.10.sup.17
cm.sup.-3.gtoreq.|.sigma.(P)/e|.gtoreq.4.times.10.sup.16 cm.sup.-3.
In other words, by using the "Al composition modulated" AlGaN
buffer layer of the present invention in the range that residual
carrier (electron) density n in the undoped AlGaN buffer layer does
not exceed 1.6.times.10.sup.17 cm.sup.-3 described above, and at
least in the range of 1.5.times.10.sup.17
cm.sup.-3.gtoreq.n.gtoreq.1.times.10.sup.14 cm.sup.-3, and
preferably, in the range of 1.times.10.sup.17
cm.sup.-3.gtoreq.n.gtoreq.1.times.10.sup.15 cm.sup.-3. An effect of
compensation by the "negative" polarized charges induced
continuously is exerted. Hence, it is preferable that the "Al
composition modulated" AlGaN buffer layer is grown up by an
epitaxial growth method and conditions which are suitable for
making it in the range of the above-mentioned residual carrier
(electron) density n. For example, when growing the AlGaN in the
range of 0.45 or less of Al composition, and preferably, 0.35 or
less by applying a MOVPE method, it is possible to make it in the
range (e.g., 1.times.10.sup.17 cm.sup.-3.gtoreq.n) of the
above-mentioned residual carrier (electron) density n.
[0337] The above-mentioned band barrier existing at the interface
(z=1 .mu.m) between undoped AlGaN buffer layer 3 and GaN channel
layer 4 has a function of increasing a carrier (electron)
confinement effect into GaN channel layer 4, and exerts an effect
of enhancing a pinch-off characteristic of the AlGaN/GaN-type HJFET
obtained. In addition, in the AlGaN/GaN-type HJFET with the
construction illustrated in FIG. 2, the active layer thickness
(gate-to-channel distance) a is equivalent to a sum of the
thickness of AlGaN electron supply layer 5 directly under gate
electrode 8, and the thickness of GaN channel layer 4, and when the
aspect ratio: Lg/a of gate length Lg to active layer thickness
(gate-to-channel distance) a becomes small by shortening gate
length Lg, the short channel effect is easy to be caused, but an
effect of suppressing this short channel effect is also exerted
with improvement in the pinch-off characteristic.
[0338] In this embodiment mentioned above, when the film thickness
of whole undoped AlGaN buffer layer 3 is made into 1 .mu.m, Al
composition x (z=1 .mu.m).ident.xt of the Al.sub.xGa.sub.1-xN is
selected at xt=0.05 at the interface (z=1 .mu.m) with GaN channel
layer 4, and Al composition x (z=0 .mu.m).ident.xb of the
Al.sub.xGa.sub.1-xN is selected at xb=0.30 at the interface (z=0)
with AlN nucleation layer 2, respectively, and density
.sigma.(P)/e.apprxeq.1.1.times.10.sup.17 cm.sup.-3 of negative
polarized charges which are induced in this undoped AlGaN buffer
layer 3 which is given "Al composition modulation" is obtained.
When making density .sigma.(P)/e of negative polarized charges
which are induced in undoped AlGaN buffer layer 3 which is given
"Al composition modulation" into at least 1.times.10.sup.16
cm.sup.-3 or more, undoped AlGaN buffer layer 3 which is given "Al
composition modulation" exhibits a function equivalent to a p-layer
effectually. When referring to the estimated result shown in FIG.
8, when the film thickness of whole undoped AlGaN buffer layer 3 is
made into 1 .mu.m, when Al composition x (z=1 .mu.M).ident.xt of
the Al.sub.xGa.sub.1-xN is selected at xt=0.05 at the interface
(z=1 .mu.m) with GaN channel layer 4, and Al composition x (z=0
.mu.m).ident.xb of the Al.sub.xGa.sub.1-xN is selected at
xb.gtoreq.0.10 at the interface (z=0) with AlN nucleation layer 2,
the above-mentioned condition is fulfilled. That is, when the film
thickness of whole undoped AlGaN buffer layer 3 is made into 1
.mu.m, when Al composition x (z=1 .mu.m).ident.xt of the
Al.sub.xGa.sub.1-xN is selected at xt=0.05 at the interface (z=1
.mu.m) with GaN channel layer 4, and Al composition x (z=0
.mu.m).ident.xb of the Al.sub.xGa.sub.1-xN is selected at xb=0.1 to
0.2 at the interface (z=0) with AlN nucleation layer 2, it becomes
in a state that the sufficient effect is exerted.
[0339] FIG. 10 shows the IV characteristics of a case that,
regarding the AlGaN/GaN-type HJFET of this exemplary embodiment,
that is, an FET prepared by selecting Al composition x (z=1
.mu.m).ident.xt of the Al.sub.xGa.sub.1-xN at xt=0.05 at the
interface (z=1 .mu.m) with GaN channel layer 4, and Al composition
x (z=0 .mu.m).ident.xb of the Al.sub.xGa.sub.1-xN at xb=0.30 at an
interface (z=0) with AlN nucleation layer 2, respectively, when the
film thickness of whole undoped AlGaN buffer layer 3 is made into 1
.mu.m, gate length Lg is made into 0.15 .mu.m. According to a
measurement result of the Id-Vd characteristics shown in FIG. 10,
even when gate length Lg is as short as 0.15 .mu.m, good pinch-off
characteristics are achieved. In addition, when a buffer layer
leakage current was evaluated with an ohmic electrode vs a pattern
which were kept apart 8 .mu.ms as a gap space, it was enough as low
as 5.times.10.sup.-10 .ANG./mm under interior illumination in the
case of 100V application.
[0340] On the other hand, the AlGaN/GaN-type HJFET with
conventional structure which uses the undoped GaN buffer layer
shown in FIG. 5 exerted the Id-Vd characteristics shown in FIG. 7,
but pinch-off characteristics were not good. In addition, when the
buffer layer leakage current was evaluated by the ohmic electrode
versus the pattern which were kept apart 8 .mu.ms as the gap space,
it was 5.times.10.sup.-8 .ANG./mm under the interior illumination
in the case of 100-V application, which could not satisfy us in the
consideration of an application to a high voltage operation.
[0341] When comparing it with the AlGaN/GaN-type HJFET with
conventional structure using this GaN buffer layer, the
AlGaN/GaN-type HJFET of this exemplary embodiment is greatly
improved in the pinch-off characteristics. Simultaneously, buffer
break-down voltage is also improved. Hence, in comparison with the
AlGaN/GaN-type HJFET with conventional structure using the undoped
GaN buffer layer, it is possible that the AlGaN/GaN-type HJFET of
this exemplary embodiment improves largely a DC gain and an RF gain
in the case of the high voltage operation.
[0342] In addition, in this exemplary embodiment, as for the
undoped AlGaN buffer layer 3 which is given "Al composition
modulation", its Al composition x(z) is set to reduce linearly from
the interface (z=0) with AlN nucleation layer 2 to the interface
(z=1 .mu.m) with GaN channel layer 4, and energy E.sub.c of the
conduction band edge of the Al.sub.xGa.sub.1-xN itself which forms
it is also made to reduce linearly from the interface (z=0) with
AlN nucleation layer 2 to the interface (z=1 .mu.m) with GaN
channel layer 4. On the other hand, in undoped AlGaN buffer layer
3, when the percentage reduction:
{.differential.x(z)/.differential.z} of Al composition x(z) is
selected so that {.differential.x(z)/.differential.z} may reduce
from the interface (z=0) with AlN nucleation layer 2 to the
interface (z=1 .mu.m) with GaN channel layer 4, the rate of change
{.differential.E.sub.C(x(z))/.differential.z} of energy E.sub.c(x)
of the conduction band edge of the Al.sub.xGa.sub.1-xN itself
reduces from the interface (z=0) with AlN nucleation layer 2 to the
interface (z=1 .mu.m) with GaN channel layer 4 (thus, curvilinear
F(z)=.differential.E.sub.C(x(z))/.differential.z which expresses a
conduction band edge level when a polarization effect is
disregarded becomes a convex shape). In such a case, since an
effect of reduction of the rate of change {.differential.E.sub.C
(x(z))/.differential.z} of energy E.sub.C (x) of the conduction
band edge of the Al.sub.xGa.sub.1-xN itself is also added to an
action of polarized charges, a gradient of an energy position of
the conduction band edge of undoped AlGaN buffer layer 3 becomes
larger near the interface (z=1 .mu.m) with GaN channel layer 4.
Hence, the effect of suppressing the electron injection from GaN
channel layer 4 into undoped AlGaN buffer layer 3 further
increases.
[0343] In addition, although using undoped AlGaN buffer layer 3
which is given "Al composition modulation" and adopting the
condition that residual carriers are electrons in this exemplary
embodiment, when temporarily changing the epitaxial growth method
or the growth conditions and selecting a condition that residual
carriers become holes about undoped AlGaN buffer layer 3 itself,
undoped AlGaN buffer layer 3 itself becomes a p-layer, and hence, a
gradient of the conduction band edge shows a further convex shape.
Alternatively, when using a p-type AlGaN buffer layer by
intentionally making acceptors low concentration doped instead of
the undoped AlGaN buffer layer, the gradient of the conduction band
edge shows a still further convex shape.
[0344] Similarly to the type of the GaN channel layer/"Al
composition-modulated" AlGaN buffer layer described above, also in
a generalized type of an In.sub.yGa.sub.1-yN channel
layer/In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN buffer layer, when
making In composition y constant and giving "Al composition
modulation" which reduces Al composition (x(1-y)) from a substrate
side to the interface with the channel layer, it is possible to
generate "negative" polarized charges continuously distributed in
the In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN buffer layer.
[0345] In addition, in a type of a GaN channel
layer/Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer layer, when
making Al composition x constant and giving "In composition
modulation", which increases In composition (1-x)y) from the
substrate side to the interface with the channel layer, it is
possible to generate "negative" polarized charges continuously
distributed in the Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer
layer. For example, when fixing Al composition x at x=0.3 and
making the film thickness of the whole undoped
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer layer into 1 .mu.m,
"In composition modulation" which increases In composition linearly
is used by making In composition [(1-x)y] (z=0 .mu.m) into
[(1-x)y]=0 at the interface (z=0) with the nucleation layer and
making In composition [(1-x)y] (z=1 .mu.m) into [(1-x)y]=0.066 at
the interface (z=1 .mu.m) with the GaN channel layer. In such a
case, a lattice constant of x)y is almost in agreement with a
lattice constant of GaN, and "negative" polarized charges
continuously distributed in charge density of 7.18.times.10.sup.16
(cm.sup.-3) in the "In composition modulated"
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer layer are generated.
Hence, it is possible to compensate the estimated residual carrier
concentration n the order of 10.sup.15 cm.sup.-3 in the "In
composition modulated" Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer
layer.
[0346] In addition, at the interface between the GaN channel layer
and Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer layer,
discontinuity .DELTA.E.sub.C of conduction band energy becomes
.DELTA.EC=424 meV, and a barrier (step) corresponding to this value
is formed.
[0347] Furthermore, in a type of an In.sub.ycGa.sub.1-ycN channel
layer/an In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN buffer
layer, it is also possible to generate "negative" polarized charges
continuously distributed in the buffer layer using "(Al composition
and In composition) modulation" by changing In composition ybuf and
Al composition [xbuf(1-ybuf)] of the buffer layer simultaneously,
and reducing gradually Al composition [xbuf(1-ybuf)] and increasing
gradually In composition from a substrate side to the interface
with the channel layer. That is, it is possible to compensate
estimated residual carrier concentration n in the order of
10.sup.15 cm.sup.-3 in the buffer layer by performing "(Al
composition and In composition) modulation" so that lattice
constant a (In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN) of a
quaternary system of mixed crystal of
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN may increase
gradually, and, on the other hand, conduction band edge energy
E.sub.C may reduce gradually, in a direction of going from the
substrate side to the interface with the channel layer, and
generating "negative" polarized charges which are derived from a
change of spontaneous polarization and piezo polarization and are
distributed continuously. Of course, at the interface with the
In.sub.ycGa.sub.1-ycN channel layer, it is made that the lattice
constant a (In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN) of a
quaternary system of mixed crystal of
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN is almost equal
to or is very slightly smaller than the lattice constant a of an
In.sub.ycGa.sub.1-ycN ternary system of mixed crystal
In.sub.ycGa.sub.1-ycN of the channel layer. In addition, at the
interface with the In.sub.ycGa.sub.1-ycN channel layer, it can be
made that ED (In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN) of
a quaternary system of mixed crystal of
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN) is equal to EC
of an In.sub.ycGa.sub.1-ycN ternary system of mixed crystal
In.sub.ycGa.sub.1-ycN of the channel layer, or, preferably, energy
discontinuity .DELTA.E.sub.C of the conduction band edge between
both is made at least more than .DELTA.E.sub.C=200 meV, and a
barrier (step) corresponding to this value is formed.
[0348] In addition, also when selecting either of the construction
of the AlGaN electron supply layer/In.sub.yGa.sub.1-yN channel
layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the "Al composition modulated"
In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN buffer layer is adopted, the
construction of the AlGaN electron supply layer/In.sub.yGa.sub.1-yN
channel layer/buffer layer/AlN nucleation layer/substrate (where,
1>y.gtoreq.0) where the "In composition modulated"
In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN buffer layer is adopted, or
the construction of the AlGaN electron supply
layer/In.sub.ycGa.sub.1-ycN channel layer/buffer layer/AlN
nucleation layer/substrate (where, 1>yc.gtoreq.0) where the "(Al
composition and In composition) modulated"
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN buffer layer is
adopted which is described in this exemplary embodiment, regarding
the AlGaN electron supply layer/InGaN channel layer, "various
conditions" which are described in the first exemplary embodiment
and are used when selecting the construction of the AlGaN electron
supply layer/GaN channel layer/buffer layer/AlN nucleation
layer/substrate where the "Al composition modulated" AlGaN layer
(buffer layer) is adopted are completely applicable in a similar
manner.
Exemplary Embodiment 3
[0349] In contrast to the construction of the second AlGaN
layer/GaN layer/first AlGaN layer/AlN nucleation layer/substrate
which is exemplified in the above-mentioned second exemplary
embodiment, this third exemplary embodiment is a multilayered
epitaxial film embodiment used as a "barrier layer" which adds an
InAlGaN layer which has very thin film thickness to an interface
between the GaN layer and first AlGaN layer, and suppresses inflow
of carriers from the GaN layer to the first AlGaN layer. FIG. 11
shows the construction of the above-mentioned second AlGaN
layer/GaN layer/InAlGaN layer/first AlGaN layer/AlN nucleation
layer/substrate, and further, FIG. 12 shows section structure of a
group III nitride semiconductor heterojunction FET prepared using
it schematically.
[0350] The multilayer epitaxial layer which has the construction of
the second AlGaN layer/GaN layer/InAlGaN layer/first AlGaN
layer/AlN nucleation layer/substrate is prepared using C plane
((0001) plane) of SiC as substrate 1 and performing C plane ((0001)
plane) growth of each layer by an MOCVD growth method. For example,
an undoped AlN layer at 200 nm of film thickness is formed on a
low-temperature growth condition on the C plane of SiC used as
substrate 1. AlN nucleation layer 2 itself which is made up of this
low-temperature growth undoped AlN film functions as an insulating
nucleation layer. Subsequently, on AlN nucleation layer 2, undoped
AlGaN buffer layer 3 at 1 .mu.m (1000 nm) of film thickness,
undoped InAlGaN channel back barrier layer 10 at 3 nm of film
thickness, undoped GaN channel layer 4 at 10 nm of film thickness,
and undoped AlGaN electron supply layer 5 at 45 nm of film
thickness are successively epitaxially grown on normal high
temperature growth conditions, which is construction.
[0351] Also in this third exemplary embodiment, undoped AlGaN
buffer layer 3 is selected so that Al composition x(z) of the
Al.sub.xGa.sub.1-xN may reduce monotonically from an interface with
AlN nucleation layer 2 to an interface with undoped GaN channel
layer 4, that is, toward a film thickness direction (z-axis
direction). In the third exemplary embodiment, Al composition x
(z=1 .mu.m) xt of the Al.sub.xGa.sub.1-xN is selected at xt=0.05 at
an interface (z=1 .mu.m) with InAlGaN channel back barrier layer
10, and Al composition x (z=0 .mu.m)=xb of the Al.sub.xGa.sub.1-xN
is selected at xb=0.30 at an interface (z=0) with AlN nucleation
layer 2, respectively. In addition, in undoped AlGaN electron
supply layer 5, Al composition x is set constant and Al0.2Ga0.8N
with x=0.2 is selected.
[0352] On the other hand, in order to form a barrier between
undoped GaN channel layer 4 and undoped AlGaN buffer layer 3,
undoped InAlGaN channel back barrier layer 10 is selected so that
conduction band edge energy difference; .DELTA.E.sub.C
(InAlGaN/GaN) between the InAlGaN and GaN and conduction band edge
energy difference; .DELTA.EC (InAlGaN/Al.sub.0.05Ga.sub.0.95N)
between Al.sub.xGa.sub.1-xN (x=xt) in a uppermost surface side of
AlGaN buffer layer 3, that is, Al.sub.0.05Ga.sub.0.95N and the
InAlGaN may fulfill at least .DELTA.E.sub.C
(InAlGaN/GaN)>.DELTA.E.sub.C
(InAlGaN/Al.sub.0.05Ga.sub.0.95N)>0. In such a case, on the
basis of conduction band edge energy difference; .DELTA.E.sub.C
(Al.sub.0.05Ga.sub.0.95N/GaN) between Al.sub.0.05Ga.sub.0.95N and
GaN, since selection is performed so as to fulfill at least
relationship of .DELTA.E.sub.C (InAlGaN/GaN)>.DELTA.E.sub.C
(Al.sub.0.05Ga.sub.0.95N/GaN), a suppressing effect to electron
injection from undoped GaN channel layer 4 to undoped AlGaN buffer
layer 3 is improved by adding this InAlGaN channel back barrier
layer 10.
[0353] In addition, it is desirable to select composition of the
InAlGaN so that lattice constant a(InAlGaN) of InAlGaN which forms
this InAlGaN channel back barrier layer 10 may fulfill relationship
of a(GaN) a(InAlGaN) a(Al.sub.0.05Ga.sub.0.95N) to lattice constant
a (GaN) of the GaN and lattice constant a(Al.sub.0.05Ga.sub.0.95N)
of the Al.sub.0.05Ga.sub.0.95N.
[0354] Also in the AlGaN/GaN-type HJFET of this exemplary
embodiment with construction shown in FIG. 12, source electrode 6
and drain electrode 7 which are given ohm contact on a surface of
undoped AlGaN electron supply layer 5, and gate electrode 8 is
formed between them. In addition, a surface of AlGaN electron
supply layer 5 between source electrode 6 and gate electrodes 8,
and gate electrode 8 and drain electrode 7 is covered with
dielectric film 9 by SiN, and is given surface protection. In
addition, although not clearly shown in FIG. 1, a position of gate
electrode 8 is selected so that an interval between gate electrode
8 and drain electrode 7 may become wider than an interval between
source electrode 6 and gate electrode 8.
[0355] Specifically, the SiN film which covers the surface of AlGaN
electron supply layer 5 between source electrode 6 and drain
electrode 7 is formed beforehand, and an opening for formation of
gate electrode 8 is formed in a predetermined position on this SiN
film. A surface of AlGaN electron supply layer 5 exposed in the
opening is etched, and a shallow recess section is formed. Gate
electrode 8 is prepared in this shallow recess section, and
construction which has a recess type gate is adopted.
[0356] A preparation process of the AlGaN/GaN-type HJFET of this
exemplary embodiment shown in FIG. 12 will be described simply. In
order to achieve inter-device separation between FETs after
finishing a series of epitaxial growth, mesa etching which reaches
GaN channel layer 4 is given around each device using a mask
etching method. That is, in this region, etching removal of undoped
AlGaN electron supply layer 5 is performed, and inter-device
separation mesas are formed. Subsequently, for example, metals such
as Ti/Au are evaporated, and are given patterning into a
predetermined form using a lift-off method using a photoresist mask
with matching forms of source electrode 6 and drain electrode 7
provided on the surface of AlGaN electron supply layer 5. Ohmic
contact is taken by performing annealing treatment of the metal
layers, such as Ti/Au (10 nm to 200 nm in thickness), which are
given patterning into these predetermined forms in a flow of inert
gas at 800.degree. C. for 1 to 3 minutes.
[0357] Next, for example, the SiN film at 80 nm of film thickness
is formed by applying a vapor phase depositing method, such as a
plasma CVD method, so that a whole surface may be covered. Using a
resist mask, selective etching is performed and an openings for
formation of gate electrode 8 is formed in a predetermined position
on the SiN film which covers the surface of AlGaN electron supply
layer 5 between source electrode 6 and drain electrode 7. In
addition, when forming the resist mask used for formation of the
above-mentioned opening, in order to achieve a target width of 0.15
.mu.m, an electron beam lithography method is adopted.
[0358] A surface of AlGaN electron supply layer 5 exposed in the
opening is slightly etched, and a shallow recess section is formed.
In addition, this recess depth d is selected at 25 nm in this
exemplary embodiment. Hence, directly under the recess section, a
thickness of AlGaN electron supply layer 5 becomes 20 nm after
etching.
[0359] Subsequently, gate metals, such as Ni/Au (10 nm to 200 nm in
thickness), are evaporated and lifted off on the surface of AlGaN
electron supply layer 5 which is under the above-mentioned opening
and is given recess formation using a resist mask, and are given
patterning into a predetermined form. In such a case, gate
electrode 9 patterned is used as a gate electrode which has a
T-form sectional shape, and a part of which covers an SiN film
surface adjacent to the opening (recess section). To an opening
(recess section), dimensional accuracy of alignment of this T-form
upper face shape and size is 10 nm, and an electron beam
lithography method is adopted for exposure of the resist mask used
for the lift-off.
[0360] When formation of gate electrode 8 is completed, the surface
of AlGaN electron supply layer 5 between source electrode 6 and
gate electrode 8 and between gate electrode 8 and drain electrode 7
becomes in a state of being covered with the SiN film, and this
residual SiN film is used as it is as dielectric film 9.
[0361] The prepared AlGaN/GaN-type HJFET becomes a so-called
HEMT-type FET using two-dimensional electron gas generated at the
interface between AlGaN electron supply layer 5 and GaN channel
layer 4. Its gate length Lg is equivalent to 0.15 .mu.m in width of
the recess section under the above-mentioned opening. The aspect
ratio: Lg/a of gate length Lg to active layer thickness
(gate-to-channel distance) a becomes Lg/a 150/30=5 since active
layer thickness a is equivalent to a sum of the thickness of AlGaN
electron supply layer 5, which is directly under the recess section
and remains after etching, and the thickness of the channel layer,
that is, 30 nm.
[0362] On the other hand, as for Al.sub.xGa.sub.1-xN
(0.30.gtoreq.x.gtoreq.0.05) which forms AlGaN buffer layer 3 which
is given "Al composition modulation", when undoped
Al.sub.xGa.sub.1-xN layer having corresponding uniform Al
composition is prepared temporarily, residual carriers are
electrons, the residual carrier concentration n is dependent on
growth conditions and Al composition, and dispersion becomes
generally in the order of 10.sup.14 to 10.sup.15 cm.sup.-3 of
carriers to some extent. On the other hand, in this third exemplary
embodiment, it is set that the Al composition x(z) of
Al.sub.xGa.sub.1-xN which forms undoped AlGaN layer 3 linearly
reduces from an interface (z=0) with AlN nucleation layer 2 to an
interface (z=1 .mu.m) with GaN channel back barrier layer 10. That
is, a film thickness t.sub.buffer of whole AlGaN buffer layer 3 is
1 .mu.m, and Al composition x(z) is expressed as follows, as a
function of a thickness (z/.mu.m) in a depth direction (Z axial
direction).
x(z)=xtz+xb(1-z)
=0.05z+0.30(1-z)
[0363] In the construction of the above-mentioned multilayered
epitaxial film, polarized charge density; .sigma.(P)/e cm.sup.-3
(where, e denotes electronic charge (unit charge) of an electron)
which is generated in undoped AlGaN buffer layer 3 which is given
this linear "Al composition modulation" is negative polarized
charges with .sigma.(P)/e.apprxeq.1.1.times.10.sup.17 cm.sup.-3 to
the extent when referring to an estimated result shown in FIG. 8.
That is, density .sigma.(P)/e.apprxeq.1.1.times.10.sup.17 cm.sup.-3
of the negative polarized charge which is induced in undoped AlGaN
buffer layer 3 which is given "Al composition modulation" exceeds
estimated residual carrier concentration n in the order of
10.sup.14 to 10.sup.15 cm.sup.-3. Hence, it is possible for this
induced negative polarized charge to compensate completely positive
space charges corresponding to the above-mentioned residual carrier
(electron) density n and resulting from an ionized impurity level
(or intentionally doped donor level with comparatively low
concentration) which exists in undoped AlGaN buffer layer 3. In
consequence, it becomes in a state that the negative space charges
in the order of 10.sup.16 cm.sup.-3 exists by the residual negative
polarized charges in undoped AlGaN buffer layer 3 which is given
"Al composition modulation". Effectually, undoped AlGaN buffer
layer 3 which is given "Al composition modulation" plays the
function equivalent to the p-layer in which negative space charges
in the order of 10.sup.16 cm.sup.-3 exist.
[0364] FIG. 13 illustrates schematically a band diagram of the
multilayered epitaxial film directly under gate electrode 9 of the
above-described AlGaN/GaN-type HJFET. Since undoped AlGaN buffer
layer 3 which is given "Al composition modulation" plays the
function equivalent to the p-layer in which negative space charges
in the order of 10.sup.16 cm.sup.-3 exist effectually, an energy
position of a conduction band edge of this region decreases with
keeping a convex shape from the interface (z=0) with AlN nucleation
layer 2 to the interface (z=1 .mu.m) with InAlGaN channel back
barrier layer 10. In addition, InAlGaN channel back barrier layer
10 with a very thin film thickness exists between undoped AlGaN
buffer layer 3 and GaN channel layer 4, and to the electron
injection from GaN channel layer 4 to undoped AlGaN buffer layer 3,
a barrier (step) corresponding to conduction band edge energy
difference; .DELTA.E.sub.C(InAlGaN/GaN) between the InAlGaN and GaN
is formed. In the above-described second exemplary embodiment, what
opposes to the electron injection from GaN channel layer 4 to
undoped AlGaN buffer layer 3 is the barrier (step) which is
equivalent to conduction band edge energy difference;
.DELTA.E.sub.C(Al.sub.0.05Ga.sub.0.95N/GaN) between the
Al.sub.0.05Ga.sub.0.95N and GaN, and since
.DELTA.E.sub.C(InAlGaN/GaN)>.DELTA.E.sub.C(Al.sub.0.05Ga.sub.0.95N/GaN-
) holds, the electron injection from GaN channel layer 4 to undoped
AlGaN buffer layer 3 over InAlGaN channel back barrier layer 10 is
further suppressed.
[0365] In comparison with the AlGaN/GaN-type HJFET of the second
exemplary embodiment, the above-mentioned band barrier formed by
the InAlGaN channel back barrier layer 10 existing between undoped
AlGaN buffer layer 3 and GaN channel layer 4 has a function of
further increasing a carrier (electron) confinement effect into GaN
channel layer 4, and exerts an effect of enhancing a pinch-off
characteristic of the AlGaN/GaN-type HJFET obtained. In addition,
in the AlGaN/GaN-type HJFET with the construction illustrated in
FIG. 11, the active layer thickness (gate-to-channel distance) a is
equivalent to a sum of the thickness of AlGaN electron supply layer
5 directly under gate electrode 8, and the thickness of GaN channel
layer 4, and when the aspect ratio: Lg/a of gate length Lg to
active layer thickness (gate-to-channel distance) a becomes small
by shortening gate length Lg, the short channel effect is easy to
be caused, but an effect of suppressing this short channel effect
is also exerted with improvement in the pinch-off
characteristic.
[0366] Hence, in comparison with the AlGaN/GaN-type HJFET of the
second exemplary embodiment using the undoped GaN buffer layer
which is given "Al composition modulation", the AlGaN/GaN-type
HJFET of this exemplary embodiment is more excellent in improvement
of the pinch-off characteristics and in an effect of suppression of
the short channel effect, and can improve more remarkably a DC gain
and an RF gain in the case of the high voltage operation.
[0367] In addition, as for an effect caused by utilization of the
undoped AlGaN buffer layer which is given "Al composition
modulation", the AlGaN/GaN type HJFET of this third exemplary
embodiment, and the AlGaN/GaN type HJFET of the second exemplary
embodiment mentioned above are essentially equivalent. Hence, the
various allowable modification of construction, already described,
to the AlGaN/GaN type HJFET of the second exemplary embodiment
mentioned above is available to the AlGaN/GaN type HJFET of this
third exemplary embodiment, and its effect is also equivalent.
[0368] Thus, in this exemplary embodiment mentioned above, when the
film thickness of whole undoped AlGaN buffer layer 3 is made into 1
.mu.m, Al composition x (z=1 .mu.m).ident.xt of the
Al.sub.xGa.sub.1-xN is selected at xt=0.05 at the interface (z=1
.mu.m) with In AlGaN channel back barrier layer 10, and Al
composition x (z=0 .mu.m).ident.xb of the Al.sub.xGa.sub.1-xN is
selected at xb=0.30 at the interface (z=0) with AlN nucleation
layer 2, respectively, and density
.sigma.(P)/e.apprxeq.1.1.times.10.sup.17 cm.sup.-3 of negative
polarized charges which are induced in this undoped AlGaN buffer
layer 3 which is given "Al composition modulation" is obtained.
When making density .sigma.(P)/e of negative polarized charges
which are induced in undoped AlGaN buffer layer 3 which is given
"Al composition modulation" into at least 1.times.10.sup.16
cm.sup.-3 or more, undoped AlGaN buffer layer 3 which is given "Al
composition modulation" exhibits a function equivalent to a p-layer
effectually. When referring to the estimated result shown in FIG.
8, when the film thickness of whole undoped AlGaN buffer layer 3 is
made into 1 .mu.m, when Al composition x (z=1 .mu.m).ident.xt of
the Al.sub.xGa.sub.1-xN is selected at xt=0.05 at the interface
(z=1 .mu.m) with InAlGaN channel back barrier layer 10, and Al
composition x (z=0 .mu.m).ident.xb of the Al.sub.xGa.sub.1-xN is
selected at xb.gtoreq.0.10 at the interface (z=0) with AlN
nucleation layer 2, the above-mentioned condition is fulfilled.
That is, when the film thickness of whole undoped AlGaN buffer
layer 3 is made into 1 .mu.m, when Al composition x (z=1
.mu.m).ident.xt of the Al.sub.xGa.sub.1-xN is selected at xt=0.05
at the interface (z=1 .mu.m) with InAlGaN channel back barrier
layer 10, and Al composition x (z=0 .mu.m).ident.xb of the
Al.sub.xGa.sub.1-xN is selected at xb=0.1 to 0.2 at the interface
(z=0) with AlN nucleation layer 2, it becomes in a state that the
sufficient effect is exerted.
[0369] In addition, in this exemplary embodiment, as for the
undoped AlGaN buffer layer 3 which is given "Al composition
modulation", its Al composition x(z) is set to reduce linearly from
the interface (z=0) with AlN nucleation layer 2 to the interface
(z=1 .mu.m) with InAlGaN channel back barrier layer 10, and energy
E.sub.c of the conduction band edge of the Al.sub.xGa.sub.1-xN
itself which forms it is also made to reduce linearly from the
interface (z=0) with AlN nucleation layer 2 to the interface (z=1
.mu.m) with InAlGaN channel back barrier layer 10. On the other
hand, in undoped AlGaN buffer layer 3, when the percentage
reduction: {.differential.x(z)/.differential.z} of Al composition
x(z) is selected so that {.differential.x(z)/.differential.z} may
reduce from the interface (z=0) with AlN nucleation layer 2 to the
interface (z=1 .mu.m) with InAlGaN channel back barrier layer 10,
the rate of reduction {.differential.E.sub.C(x(z))/.differential.z}
of energy E.sub.c(x) of the conduction band edge of the
Al.sub.xGa.sub.1-xN itself reduces from the interface (z=0) with
AlN nucleation layer 2 to the interface (z=1 .mu.m) with InAlGaN
channel back barrier layer 10. In such a case, since an effect of
reduction of the rate of reduction {.differential.E.sub.C(x
(z))/.differential.z} of energy E.sub.C(x) of the conduction band
edge of the Al.sub.xGa.sub.1-xN itself is also added to an action
of polarized charges, a gradient of an energy position of the
conduction band edge of undoped AlGaN buffer layer 3 becomes larger
near the interface (z=1 .mu.m) with InAlGaN channel back barrier
layer 10. Hence, the effect of suppressing the electron injection
from GaN channel layer 4 into undoped AlGaN buffer layer 3 further
increases.
[0370] In addition, although using undoped AlGaN buffer layer 3
which is given "Al composition modulation" and adopting the
condition that residual carriers are electrons in this exemplary
embodiment, when temporarily changing the epitaxial growth method
or the growth conditions and selecting a condition that residual
carriers become holes about undoped AlGaN buffer layer 3 itself,
undoped AlGaN buffer layer 3 itself becomes a p-layer, and hence, a
gradient of the conduction band edge shows a further convex shape.
Alternatively, when using a p-type AlGaN buffer layer by
intentionally making acceptors low concentration doped instead of
the undoped AlGaN buffer layer, the gradient of the conduction band
edge shows a still further convex shape.
[0371] In addition, the InAlGaN channel back barrier layer 10 at a
very thin film thickness exists between undoped AlGaN buffer layer
3 and GaN channel layer 4, and in those two interfaces, polarized
charges resulting from difference of polarization P between the
Al.sub.xGa.sub.1-xN with Al composition x=0.05 and the InAlGaN, and
difference of polarization P between the InAlGaN and GaN are
generated in a sheet, respectively. In addition, when the polarized
charges generated in a sheet in these two approaching interfaces
are totaled:
{P(Al.sub.0.05Ga.sub.0.95N)-P(InAlGaN)}+{P(InAlGaN)-P(GaN)}={P(Al.sub.0.-
05Ga.sub.0.95N)-P(GaN)}
[0372] it is estimated that negative polarized charges in sheet
charge density of 2.times.10.sup.12 (/cm.sup.2) at the maximum are
generated substantially at an interface region between undoped
AlGaN buffer layer 3 and GaN channel layer 4. That is, in the
second exemplary embodiment mentioned above, it is estimated that
this is substantially the same state as a situation that negative
polarized charges are generated in the sheet charge density of
2.times.10.sup.12 (/cm.sup.2) at the maximum at the interface
between undoped AlGaN buffer layer 3 and GaN channel layer 4.
[0373] In such extent, influences to a band form near the
interfaces and channel carrier density stored in the GaN channel
layer are not so great. It is because carriers by two-dimensional
electron gas induced by the AlGaN/GaN heterojunction in the normal
AlGaN/GaN heterojunction HJFET (Al composition of 0.2 etc.) have
sheet charge concentration in the order of 10.sup.13 (/cm.sup.2),
which is about one-digit larger.
[0374] Furthermore, also in this exemplary embodiment, the film
thickness of GaN channel layer 4 is selected at 10 nm, and an
effect that negative polarized charges induced at the interface
(z=1 .mu.m) between such undoped AlGaN buffer layer 3 and GaN
channel layer 4 reduces a total amount of two-dimensional electron
gas generated at the interface between AlGaN electron supply layer
5 and GaN channel layer 4 is limited.
[0375] Furthermore, also in the HEMT structure of this exemplary
embodiment, similarly to the HEMT structure described in the
above-mentioned second exemplary embodiment, sufficient conditions
for carriers (electrons) accumulated in the GaN channel layer not
to be drained, that is, "suitable conditions" for application to
the HEMT are as follows.
[0376] That is, also in the field-effect transistor according to
this exemplary embodiment, when selecting the construction of
making it in the depletion (normally-on) mode, a substrate itself
is a material which does not exhibit a polarization effect, and in
a state that both of the gate electrode and substrate are grounded,
polarized charges which exist in a semiconductor layer region are
in a state that "negative" polarized charges (Q1) are usually
distributed at the interface between the electron supply layer with
constant composition and the gate electrode (metal) on a surface,
and "positive" polarized charges (Q2) are usually distributed at
the interface between the electron supply layer with constant
composition, and the channel layer, and, when composition of an
electron supply layer is not constant", positive" or "negative"
polarized charges (.SIGMA.Q.sub.supplier) distributed in the
electron supply layer according to a local composition rate of
changes are distributed, "negative" polarized charges (Q3') are
distributed at the interface between the channel layer and a
"composition-modulated" buffer layer contacting through the InAlGaN
channel back barrier layer, "negative" polarized charges
continuously distributed over a whole internal area of the
"composition-modulated" buffer layer (.SIGMA.Q.sub.buffer) are
distributed, "negative" polarized charges (Q4) are distributed at
the interface of the "composition-modulated" buffer layer with an
AlN nucleation layer, and "positive" polarized charges (Q5) are
distributed at the interface of the AlN nucleation layer with a
substrate surface, respectively.
[0377] On the other hand, the electron supply layer itself is
depleted and the "positive" space charges (.SIGMA.Q.sub.SD1),
resulting from the ionized donor level, exist inside this electron
supply layer. In addition, the shallow donor level included in the
"composition-modulated" buffer layer is also ionized, and the
"positive" space charges (.SIGMA.Q.sub.SD2) derived from the
ionized donor level also exist inside the "composition-modulated"
buffer layer.
[0378] In addition, a surface of the electron supply layer is
covered with the gate electrode (metal) and a dielectric film as a
passivation film in both sides of the gate electrode (metal). In
many cases, in the surface of the electron supply layer which
contacts the gate electrode (metal) and the surface of the electron
supply layer which contacts the passivation film, comparatively
deep surface levels (deep donor levels) exist, and these deep
surface levels (deep donor levels) are also ionized. In
consequence, in the surface of the electron supply layer which
contacts the gate electrode (metal) and the surface of the electron
supply layer which contacts the passivation film, "positive"
surface charges (Q.sub.SS) derived from the ionized deep surface
levels (deep donor levels) exist.
[0379] Electrical neutrality condition is fulfilled by "positive"
space charges (or "negative" space charge resulting from the
ionized acceptor level) resulting from these ionized donor levels
and being immobilized, "positive" surface charges localized in the
surface of the electron supply layer which contacts the gate
electrode (metal) and the surface of the electron supply layer
which contacts the passivation film, and polarized charges which
exist in the semiconductor layer region, and the carriers
(electrons) accumulated in the channel layer.
[0380] Usually, "negative" polarized charges (Q1) which are
generated at the interface between the electron supply layer and
surface gate electrode (metal) are in the state of being almost
compensated by the "positive" surface charges (Q.sub.SS) which are
localized in the surface of the electron supply layer, which
contacts the gate electrode (metal) (and the surface of the
electron supply layer which contacts the passivation film). That
is, it becomes Q1.apprxeq.Q.sub.SS.
[0381] Furthermore, with considering that the "positive" space
charges (.SIGMA.Q.sub.SD2) derived from the ionized donor level
which exists in the "composition modulated" buffer layer are few,
the "negative" polarized charges (Q3') generated at the interface
between the channel layer and "composition modulated" buffer layer
contacting through the InAlGaN channel back layer, "negative"
polarized charges continuously distributed over a whole internal
area of the "composition-modulated" buffer layer
(.SIGMA.Q.sub.buffer), and "negative" polarized charges (Q4)
generated at the interface of the "composition modulated" buffer
layer and AlN nucleation layer become in a state of being almost
compensated by "positive" polarized charges (Q5) generated at the
interface in an AlN nucleation layer side. That is,
(Q5+.SIGMA.Q.sub.SD2)=(Q3'+.SIGMA.Q.sub.buffer+Q4).
[0382] In addition, a total amount (.SIGMA.Q.sub.C) of the carriers
(electrons) accumulated in the channel layer becomes approximately
equal to an arithmetic sum (Q2+.SIGMA.Q.sub.SD1) of the "positive"
polarized charges (Q2) which are generated at the interface between
the electron supply layer and channel layer, and the "positive"
space charges (.SIGMA.Q.sub.SD1) (or "negative" space charge
resulting from the ionized acceptor level) resulting from ionized
donor levels inside the electron supply layer. That is,
(.SIGMA.Q.sub.C)=(Q2+.SIGMA.Q.sub.SD1) holds.
[0383] An overall electrical neutrality condition becomes
(Q5+.SIGMA.Q.sub.SD2)+(Q2+.SIGMA.Q.sub.SD1)=(Q3'+.SIGMA.Q.sub.buffer+Q4)+-
(.SIGMA.Q.sub.C). For example, when the positive polarized charges
(Q5) which are generated in an underlying layer (interface in an
AlN nucleation layer side) of the buffer layer are compensated with
electrons, such as hot carriers injected by a certain cause and Q5
reduces, so as to maintain the above-mentioned electrical
neutrality condition, the total amount (.SIGMA.Q.sub.C) of the
carriers (electrons) accumulated in the channel layer reduces.
Temporarily, when Q5 disappears completely, the total amount
(.SIGMA.Q.sub.C) of the carriers (electrons) accumulated in the
channel layer becomes
(.SIGMA.Q.sub.C)=(.SIGMA.Q.sub.SD2)+(Q2+.SIGMA.Q.sub.SD1)-(Q3'+.SIGMA.Q.s-
ub.buffer+Q4). In such a case, with considering that the "positive"
space charges (.SIGMA.Q.sub.SD2) derived from the ionized donor
level which exists in the "composition-modulated" buffer layer are
few, a total amount (.SIGMA.Q.sub.C) of the carriers (electrons)
accumulated in the channel layer decreases to a level of
(.SIGMA.Q.sub.C).apprxeq.(Q2+.SIGMA.Q.sub.SD1)-(Q3'+.SIGMA.Q.sub.buffer+Q-
4) approximately. A sufficient condition that the total amount
(.SIGMA.Q.sub.C) of the carriers (electrons) accumulated in the
channel layer is not drained also in this phase is expressed as
(Q2+.SIGMA.Q.sub.SD1)>(Q3'+.SIGMA.Q.sub.buffer+Q4). That is, as
a general condition, it becomes the sufficient condition that the
sum total (Q2+.SIGMA.Q.sub.SD1) of the "positive" charges which are
generated in the electron supply layer is more than the sum total
(Q3'+.SIGMA.Q.sub.buffer+Q4) of the "negative" charges which are
generated inside the "composition modulated" buffer layer and at
the interface with the channel layer.
[0384] Hence, in the construction of the second AlGaN layer (AlGaN
electron supply layer)/GaN layer (GaN channel layer)/InAlGaN
layer/first AlGaN layer ("Al composition modulated" AlGaN buffer
layer)/AlN nucleation layer/substrate, it is desirable that a sum
total of "negative" polarized charges continuously distributed at
least in the first AlGaN layer ("Al composition modulated" AlGaN
buffer layer) is made to be less than a sum total of "positive"
polarized charges at the interface between the AlGaN electron
supply layer and GaN channel layer. Since the "negative" polarized
charges continuously distributed in the first AlGaN layer ("Al
composition modulated" AlGaN buffer layer) depends on a rate of
change: .differential.x(z)/.differential.z of Al composition x(z)
in the "Al composition modulated" AlGaN buffer layer, it is not
desirable to enlarge it excessively. As described above, the rate
of change: |.differential.x(z)/.differential.z| of the Al
composition x(z) is sufficient in the range of fulfilling
|.differential.x(z)/.differential.z|>0.05 .mu.m.sup.-1, and it
is not desirable to enlarge it excessively. Usually, it is
preferable to select the rate of change:
|.differential.x(z)/.differential.z| of the Al composition x(z) in
the range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1.
[0385] When the above-mentioned Al composition rate of change is
selected, the "Al composition modulated" AlGaN buffer layer becomes
in a p-like state because of the "negative" polarized charges
continuously distributed in it, and since the InAlGaN channel
barrier layer is provided between the "Al composition modulated"
AlGaN buffer layer and GaN channel layer, even if Al composition xt
of the "Al composition modulated" AlGaN buffer layer at the
interface with this InAlGaN layer is set at xt=0, electron
injection from the channel layer to the buffer layer can be
suppressed sufficiently, In addition, it is preferable to make the
Al composition xt of the "Al composition modulated" AlGaN buffer
layer at this interface with the InAlGaN layer into at least 0.02
or more, and more preferably, into 0.05 usually. For example, when
film thickness t.sub.buffer of the "Al composition modulated" AlGaN
buffer layer is made into 1 .mu.m, when the Al composition xt of a
uppermost surface of the "Al composition modulated" AlGaN buffer
layer is set at xt=0.05 and the rate of change:
|.differential.x(z)/.differential.z| of the Al composition x(z) is
selected in the range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1, the Al composition xb of the lowermost surface of the
"Al composition modulated" AlGaN buffer layer is selected in the
range of 0.35.gtoreq.xb.gtoreq.0.10.
[0386] On the other hand, when the AlGaN electron supply layer is
usually formed of AlGaN with constant Al composition, as for the Al
composition, in order to provide a band barrier necessary for
accumulating carriers (electrons) at the interface between the
AlGaN electron supply layer and GaN channel layer, it is preferable
the Al composition xs of this AlGaN electron supply layer is at
least in the range of 0.15 or more, and more preferably, in the
range of 050.gtoreq.xs.gtoreq.0.20.
[0387] Temporarily, even in the case that film thickness
t.sub.buffer of the "Al composition modulated" AlGaN buffer layer
is made into 1 .mu.m, and that Al composition xt of an uppermost
surface of the "Al composition modulated" AlGaN buffer layer is set
at xt=0.00, when the rate of change:
|.differential.x(z)/.differential.z| of Al composition x(z) is
selected in the range of 0.35
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.10
.mu.m.sup.-1, an average value: x(z).sub.av. of the Al composition
x(z) of the "Al composition modulated" AlGaN buffer layer becomes
x(z).sub.av..apprxeq.1/2-(xt+xb), and hence, becomes in the range
of 0.175.gtoreq.x(z).sub.av..gtoreq.0.05. In addition, when film
thickness t.sub.buffer of the "Al composition modulated" AlGaN
buffer layer is made into 1 .mu.m, Al composition xt of the
uppermost surface of the "Al composition modulated" AlGaN buffer
layer is set at xt=0.05 or more, and the rate of change:
|.differential.x(z)/.differential.z| of Al composition x(z) is
selected in the range of 0.30
.mu.m.sup.-1.gtoreq.|.differential.x(z)/.differential.z|.gtoreq.0.05
.mu.m.sup.-1, the average value: x(z).sub.av. of Al composition
x(z) of the "Al composition modulated" AlGaN buffer layer becomes
x(z).sub.av.apprxeq.1/2-(xt+xb), and hence, becomes in the range of
0.20 x(z).sub.av..gtoreq.0.075. Hence, under the above-described
conditions, in comparison of an average value: xs.sub.av. of Al
composition xs of the AlGaN electron supply layer with the average
value: x(z).sub.av. of Al composition x(z) of the "Al composition
modulated" AlGaN buffer layer, It is preferable to set it as
xs.sub.av..gtoreq.x(z).sub.av.
[0388] The above-described AlGaN/GaN-type HJFET has the
construction that, in the Al.sub.xGa.sub.1-xN which forms undoped
AlGaN layer 3 which is given "Al composition modulation", Al
composition x(z) continuously reduces from the interface (z=0) with
AlN nucleation layer 2 to the interface (z=1 .mu.m) with InAlGaN
channel-back barrier layer 10. The polarization P of
Al.sub.xGa.sub.1-xN (x(z)) forms the situation of changing
continuously, using this Al composition gradient x(z), it is the
multilayered epitaxial film structure which induces polarized
charge density:
.sigma.(P)=-.differential.{P(x(z))}/.differential.z.apprxeq.-.di-
fferential.{P(x)}/.differential.x.differential.x(z)/.differential.z.
[0389] When construction that Al composition x(z) stepwise reduces
at a narrow thickness step .delta.z instead of the above-described
Al.sub.xGa.sub.1-xN whose composition changes continuously is
selected, it becomes in a state that polarized charge
.sigma.(P)={P(x(z))-P(x(z+.delta.z))} occurs in a sheet at an
interface formed every thickness step .delta.z. In such a case,
effectual polarized charge density becomes
.sigma.(P)/.delta.z={P(x(z))-P(x(z+.delta.z))}/.delta.z=-{P(x(z+.delta.z)-
)-P(x(z))}/.delta.x(z).delta.x(z)/.delta.z, and when thickness step
.delta.z is small enough, it becomes substantially within
difference from a value in the above-mentioned differentiation
notation.
[0390] Similarly to the type of the GaN channel layer/"Al
composition modulated" InAlGaN channel back barrier layer described
above, also in a generalized type of an In.sub.yGa.sub.1-y N
channel layer/InAlGaN channel back barrier
layer/In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN buffer layer, when
making In composition y constant and giving "Al composition
modulation" which reduces Al composition (x(1-y)) from a substrate
side to the interface with the channel layer, it is possible to
generate "negative" polarized charges continuously distributed in
the In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN buffer layer. In such a
case, when the rate of change of Al composition (x(1-y)) is
selected in the range corresponding to the above-described
embodiment, it becomes possible to compensate the n-type residual
carriers, which exist in the In.sub.y(Al.sub.xGa.sub.1-x).sub.1-yN
buffer layer by the "negative" polarized charges generated.
[0391] In addition, in a type of a GaN channel layer/InAlGaN
channel back barrier layer/Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN
buffer layer, when making Al composition x constant and giving "In
composition modulation", which increases In composition ((1-x)y)
from the substrate side to the interface with the channel layer, it
is possible to generate "negative" polarized charges continuously
distributed in the Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer
layer. For example, when fixing Al composition x at x=0.3 and
making the film thickness of the whole undoped
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer layer into 1 .mu.m,
"In composition modulation" which increases In composition linearly
is used by making In composition [(1-x)y] (z=0 .mu.m) into
[(1-x)y]=0 at the interface (z=0) with the nucleation layer and
making In composition [(1-x)y] (z=1 .mu.m) into [(1-x)y]=0.066 at
the interface (z=1 .mu.m) with the GaN channel layer. In such a
case, a lattice constant of x)y is almost in agreement with a
lattice constant of GaN, and "negative" polarized charges
continuously distributed in charge density of 7.18.times.10.sup.16
(cm.sup.-3) in the "In composition modulated"
Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer layer are generated.
Hence, it is possible to compensate the estimated residual carrier
concentration n the order of 10.sup.15 cm.sup.-3 in the "In
composition modulated" Al.sub.x(In.sub.yGa.sub.1-y).sub.1-xN buffer
layer.
[0392] Furthermore, in a type of an In.sub.ycGa.sub.1-ycN channel
layer/an InAlGaN channel back barrier layer/an
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN buffer layer, it
is also possible to generate "negative" polarized charges
continuously distributed in the buffer layer using "(Al composition
and In composition) modulation" which changes In composition
y.sub.buf and Al composition [x.sub.buf(1-y.sub.buf)] of the buffer
layer simultaneously, and in which Al composition
[x.sub.buf(1-y.sub.buf)] reduces gradually from the substrate side
to the interface with the InAlGaN channel back barrier layer, and
the In composition increases gradually. That is, it is possible to
compensate residual carrier concentration n, which is estimated to
be in the order of 10.sup.15 cm.sup.-3, in the buffer layer by
performing "(Al composition and In composition) modulation" so that
lattice constant a
(In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN) of a quaternary
system of mixed crystal of
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN may increase
gradually from the substrate side to the interface with the InAlGaN
channel back barrier layer, and, on the other hand, conduction band
edge energy E.sub.C may reduce gradually, and generating "negative"
polarized charges which are derived from a change of spontaneous
polarization and piezo polarization. Of course, at the interface
with the InAlGaN channel back barrier layer, it is made that the
lattice constant a
(In.sub.ybuf(Al.sub.xburGa.sub.1-xbur)1.sub.-ybufN) of a quaternary
system of mixed crystal of
In.sub.ybuf(Al.sub.xburGa.sub.1-xbur)1.sub.-ybufN is almost equal
to or is very slightly smaller than the lattice constant a of an
In.sub.ycGa.sub.1-ycN ternary system of mixed crystal
In.sub.ycGa.sub.1-ycN of the channel layer. In addition, at the
interface with the InAlGaN channel back barrier layer, it can be
made that E.sub.C
(In.sub.ybuf(Al.sub.xbufGa.sub.1-xbuf)1.sub.-ybufN) of a quaternary
system of mixed crystal of
In.sub.ybuf(Al.sub.xbufGa.sub.1-xbur)1.sub.-ybufN is equal to
E.sub.C of an In.sub.ycGa.sub.1-ycN ternary system of mixed crystal
In.sub.ycGa.sub.1-ycN of the channel layer, or, preferably, energy
discontinuity .DELTA.E.sub.C of the conduction band edge between
both is made at least more than .DELTA.E.sub.C=200 meV, and a
barrier (step) corresponding to this value is formed.
[0393] In addition, also when selecting the construction of the
AlGaN electron supply layer/In.sub.yGa.sub.1-y N channel
layer/InAlGaN channel back barrier layer/buffer layer/AlN
nucleation layer/substrate (where, 1>y.gtoreq.0) where the
InAlGaN channel back barrier layer described in this exemplary
embodiment is provided, regarding the AlGaN electron supply
layer/In.sub.yGa.sub.1-y N channel layer, "various conditions" used
when selecting the construction of the AlGaN electron supply
layer/GaN channel layer/buffer layer/AlN nucleation layer/substrate
where the "Al composition-modulated" AlGaN layer (buffer layer)
described previously is adopted are completely applicable in a
similar manner.
Exemplary Embodiment 4
[0394] In this fourth exemplary embodiment, instead of the
construction that Al composition x(z) reduces stepwise at the
above-mentioned narrow thickness step .delta.z, periodic potential
structure with a film thickness period Lp (=.delta.z+.delta.B)
which is given "Al composition modulation" that Al.sub.xGa.sub.1-xN
with a very thin film thickness of thickness .delta.z and an
InAlGaN barrier layer with a very thin film thickness of thickness
.delta.B are stacked by turns and Al composition of
Al.sub.xGa.sub.1-xN reduces monotonically as a whole is used.
[0395] FIG. 14 illustrates schematically a band diagram of a
multilayered epitaxial film directly under gate electrode 9 of an
AlGaN/GaN-type HJFET according to the fourth exemplary embodiment.
In construction of a second AlGaN layer/a GaN layer/an InAlGaN
layer (InAlGaN channel back barrier layer)/an "Al composition
modulated" buffer layer/an AlN nucleation layer/a substrate, the
multilayered epitaxial film adopts structure that this
Al.sub.xGa.sub.1-xN layer and the InAlGaN barrier layer are stacked
by turns as the "Al composition modulated" buffer layer.
[0396] In the structure that this Al.sub.xGa.sub.1-xN layer and the
InAlGaN barrier layer are stacked by turns, when thicknesses
.DELTA.z and .DELTA.B of respective layers are made smaller than a
de Broglie wavelength .lamda.=h/p (where, h: Planck's constant and
p: momentum of electron) of an electron, the above-mentioned
periodic potential structure becomes one similar to so-called
superstructure. That is, since the InAlGaN barrier layer provided
between each Al.sub.xGa.sub.1-xN layers is thinner than the de
Broglie wavelength .lamda. (about 10 nm) of an electron, wave
functions of electrons overlap each other between adjacent
Al.sub.xGa.sub.1-xN layers, and in consequence, it becomes a form
that a united electronic state exists in the whole stacked
structure.
[0397] When, for example, a very thin film thickness of InAlGaN
layer is used as this barrier layer, as described above, sheet-like
polarized charges are induced in interfaces of the very thin film
thickness of InAlGaN layer and Al.sub.xGa.sub.1-xN layer, that is,
two interfaces, but when the two are totaled, polarized charges are
in a sheet in a state corresponding to:
.sigma.(P)={P(x(z))-P(InAlGaN)}+{P(InAlGaN)-P(x(z+.delta.z))}={P(x(z))-P-
(x(z+.delta.z))}
[0398] In such a case, effectual polarized charge density becomes
.sigma.(P)/.delta.z={P(x(z))-P(x(z+.delta.z))}/.delta.z=-{P(x(z+.delta.z)-
)-P(x(z))}/.delta.x(z).delta.x(z)/.delta.z, and when thickness step
.DELTA.z is small enough, it becomes substantially within
difference from a value in the above-mentioned differentiation
notation.
[0399] That is, as Al.sub.xGa.sub.1-xN which forms it as the
undoped AlGaN buffer layer 3, instead of a form that Al composition
x(z) reduces continuously, for example, like
Al.sub.xGa.sub.1-xN/InAlGaN, it is also possible to use the
periodic potential structure in which conduction band edge energy
difference; .DELTA.E.sub.C(InAlGaN/Al.sub.xGa.sub.1-xN) between
both interfaces of the InAlGaN and Al.sub.xGa.sub.1-xN becomes
.DELTA.E.sub.C(InAlGaN/Al.sub.xGa.sub.1-xN)>0, and which has a
potential barrier. In such a case, suppose that interval Lp
(=.delta.z+.delta.B) of the period of the periodic potential
structure is a sufficiently narrow film thickness.
[0400] When adopting this periodic potential structure, among
InAlGaN which can grow epitaxially with an Al.sub.xGa.sub.1-xN
layer mutually, it is desirable to select a material
(M.sub.barrier) of the barrier layer combined with the
Al.sub.xGa.sub.1-xN layer so that conduction band edge energy
difference; .DELTA.E.sub.C(InAlGaN/Al.sub.xGa.sub.1-xN) between
both interfaces of the InAlGaN and Al.sub.xGa.sub.1-xN may become
.DELTA.E.sub.C(InAlGaN/Al.sub.xGa.sub.1-xN)>0 and, in addition,
is the lattice constant a of InAlGaN (InAlGaN) and lattice constant
a(InAlGaN) of the InAlGaN may become
a(AlGaN(x(z+.delta.z)))>a(InAlGaN)>a(AlGaN(x(z))) with
lattice constants a(AlGaN(x(z))) and a(AlGaN (x(z+.delta.z))) of
the Al.sub.xGa.sub.1-xN layer. That is, it is desirable that strain
caused by an increase of a lattice constant with a change of Al
composition x(z) of the Al.sub.xGa.sub.1-xN layer is made to be
substantially no difference from the form that Al composition x(z)
reduces continuously.
[0401] When the buffer structure which forms this periodic
potential structure (or superstructure) is adopted, many barrier
layers function as barriers to the electron injection from GaN
channel layer 4 to the buffer layer, and a higher suppressing
effect is obtained. In addition, an extremely high buffer layer
break-down voltage can be expected because of a strong carrier
fixing effect by many barrier layers.
[0402] In addition, also when selecting the construction of the
AlGaN electron supply layer/InyGa1-y N channel layer/InAlGaN
channel back barrier layer/buffer layer/AlN nucleation
layer/substrate (where, 1>y.gtoreq.0) which adopts the structure
where the Al.sub.xGa.sub.1-xN layer and InAlGaN channel back
barrier layer are stacked by turns as the "Al composition
modulated" buffer layer described in this exemplary embodiment,
regarding the AlGaN electron supply layer/In.sub.yGa.sub.1-yN
channel layer, "various conditions" used when selecting the
construction of the AlGaN electron supply layer/GaN channel
layer/buffer layer/AlN nucleation layer/substrate which adopts the
"Al composition modulated" AlGaN layer (buffer layer) described in
the above first exemplary embodiment are completely applicable in a
similar manner.
INDUSTRIAL APPLICABILITY
[0403] The construction of the multilayered epitaxial film and the
field effect transistor according to the present invention enables
to suppress the device performance degradation due to the short
gate effect when applied to a high frequency FET operable at a high
voltage, such as a GaN-type FET for millimeter wave or
submillimeter wave band, which requires good high frequency
performance.
* * * * *