U.S. patent application number 15/878049 was filed with the patent office on 2018-05-31 for substrate transfer device.
This patent application is currently assigned to KAWASAKI JUKOGYO KABUSHIKI KAISHA. The applicant listed for this patent is KAWASAKI JUKOGYO KABUSHIKI KAISHA, KAWASAKI ROBOTICS (USA), INC.. Invention is credited to Avish BHARWANI, Hirohiko GOTO, Shigeki ONO, Ming ZENG.
Application Number | 20180151399 15/878049 |
Document ID | / |
Family ID | 58186849 |
Filed Date | 2018-05-31 |
United States Patent
Application |
20180151399 |
Kind Code |
A1 |
GOTO; Hirohiko ; et
al. |
May 31, 2018 |
SUBSTRATE TRANSFER DEVICE
Abstract
A substrate transfer device 1 includes a casing 8 and a
substrate conveying robot 7. A size of the casing 8 in a second
direction Y is more than a size of the casing 8 in a first
direction X. The casing 8 includes walls (81 to 85) forming a
conveying chamber 80 and at least one opening 86 or 87 provided at
least one side of the conveying chamber 80 in the first direction
X. The substrate conveying robot 7 includes a base 73, a robot arm
71, a robot hand 72, and a controller 74. When a space in the
conveying chamber 80 except for a predetermined exclusive region
80E is defined as an effective conveying chamber 80A, an entire
link length DL of a link 75 or 76 is less than a conveying chamber
size Dx, and an entire hand length Dh of the robot hand 72 is not
less than an effective conveying chamber size Dx'.
Inventors: |
GOTO; Hirohiko; (Akashi-shi,
JP) ; ZENG; Ming; (San Jose, CA) ; BHARWANI;
Avish; (Santa Clara, CA) ; ONO; Shigeki;
(Campbell, CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
KAWASAKI JUKOGYO KABUSHIKI KAISHA
KAWASAKI ROBOTICS (USA), INC. |
Kobe-shi
Wixom |
MI |
JP
US |
|
|
Assignee: |
KAWASAKI JUKOGYO KABUSHIKI
KAISHA
Kobe-shi
MI
KAWASAKI ROBOTICS (USA), INC.
Wixom
|
Family ID: |
58186849 |
Appl. No.: |
15/878049 |
Filed: |
January 23, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
14844819 |
Sep 3, 2015 |
9929034 |
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15878049 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/68707 20130101;
H01L 21/67778 20130101; H01L 21/681 20130101; H01L 21/67766
20130101 |
International
Class: |
H01L 21/677 20060101
H01L021/677; H01L 21/687 20060101 H01L021/687; H01L 21/68 20060101
H01L021/68 |
Claims
1. A substrate transfer device comprising: a casing configured such
that when a certain horizontal direction is defined as a first
direction, and another horizontal direction orthogonal to the first
direction is defined as a second direction, a size of the casing in
the second direction is more than a size of the casing in the first
direction, the casing including walls forming a conveying chamber
and at least one opening provided at at least one side of the
conveying chamber in the first direction; and a load port provided
at one of the walls, a substrate conveying robot including a base,
a robot arm provided in the conveying chamber and constituted by at
least one link supported by the base, a robot hand coupled to a
wrist portion of the robot arm and configured to hold a substrate,
and a controller configured to control operations of the robot arm
and the robot hand, wherein an entire link length of the at least
one link is less than a length between the load port provided at
one of the walls and the other wall, and an entire hand length of
the robot hand is not less than a length between the load port
provided at one of the walls and the other wall.
2. The substrate transfer device according to claim 1, wherein the
entire hand length of the robot arm is more than a size of the
conveying chamber in the first direction.
3. The substrate transfer device according to claim 1, wherein the
robot hand includes: a reference portion coupled to the wrist
portion of the robot arm; a movable portion coupled to the
reference portion so as to be displaceable relative to the
reference portion; and a movement mechanism configured to displace
the movable portion relative to the reference portion.
Description
[0001] This application is a continuation application of U.S.
application Ser. No. 14/844,819, filed on Sep. 3, 2015, the
disclosure of which is hereby incorporated by reference in its
entirety.
TECHNICAL FIELD
[0002] The present invention relates to a substrate transfer device
configured to transfer substrates, such as semiconductor substrates
or glass substrates, from a carrier to a process apparatus.
BACKGROUND ART
[0003] Conventionally known is a substrate treatment facility
configured to perform process treatments, such as formation of an
element, with respect to a semiconductor substrate (hereinafter may
be simply referred to as a "substrate") that is a semiconductor
element manufacturing material. Typically, the substrate treatment
facility is provided with a process treatment device, a substrate
transfer device provided adjacent to the process treatment device,
and the like.
[0004] For example, a substrate transfer device described in
Japanese Unexamined Patent Application Publication No. 2008-28134
(PTL 1) includes: a casing in which a conveying chamber is formed;
a plurality of load ports provided at a front wall of the casing;
and a substrate conveying robot provided in the conveying chamber.
The substrate conveying robot includes a robot arm and a robot hand
coupled to a wrist of the robot arm. For example, the substrate
conveying robot loads the substrate into the process treatment
device, unloads the substrate from the process treatment device,
takes out the substrate stored in a sealable substrate carrier for
interprocess conveyance, and stores the substrate in the substrate
carrier. Examples of the substrate transfer device include a front
end module (Equipment Front End Module; abbreviated as EFEM) and a
sorter. One example of the substrate carrier is a FOUP (Front
Opening Unified Pod).
[0005] To improve throughput of the substrate transfer device, a
plurality of substrate carriers are coupled to one conveying
chamber. Therefore, the number of load ports provided at the front
wall of the casing corresponds to the number of substrate carriers
communicating with the conveying chamber. As a result, a width of
the substrate transfer device (i.e., a width of the casing) tends
to be wide. On the other hand, to reduce the size of the substrate
transfer device, a reduction in depth of the substrate transfer
device is desired.
[0006] An entire link length of each of links constituting the
robot arm of the substrate conveying robot is limited by the depth
of the substrate transfer device. Proposed is a technology of
expanding a movable range of the robot hand based on the limited
entire link length of each of the links of the robot arm. For
example, in each of Japanese Unexamined Patent Application
Publication No. 10-6267 (PTL 2) and Japanese Unexamined Patent
Application Publication No. 2007-169007 (PTL 3), proposed is a
substrate conveying robot configured such that a robot hand or a
tip end portion of the robot hand can linearly move forward and
backward relative to a wrist portion of a robot arm while
maintaining a constant posture.
CITATION LIST
Patent Literature
[0007] [PTL 1] Japanese Unexamined Patent Application Publication
No. 2008-28134
[0008] [PTL 2] Japanese Unexamined Patent Application Publication
No. 10-6267
[0009] [PTL 3] Japanese Unexamined Patent Application Publication
No. 2007-169007
SUMMARY OF INVENTION
Technical Problem
[0010] In the conventional substrate transfer device, the substrate
carrier coupled to the casing is open in the conveying chamber in a
direction parallel to a depth direction. When the robot hand enters
into or gets out from the substrate carrier, the robot hand moves
in the conveying chamber and the substrate carrier in a direction
parallel to the depth direction. An "entire hand length" denotes a
longitudinal size of the robot hand including the substrate held by
the robot hand. Specifically, the "entire hand length" denotes a
size from a base end of the robot hand to a tip end of the
substrate held by the robot hand.
[0011] It was thought that the entire hand length of the robot hand
which operates as above was limited by the depth of the substrate
transfer device. More specifically, an exclusive region for
operations of the load ports was defined in the conveying chamber,
and it was thought that the entire hand length of the robot hand
should be less than a depth of a space in the conveying chamber
except for the exclusive region.
[0012] The present invention was made in light of these
circumstances, and an object of the present invention is to propose
a technology of easily realizing a reduction in depth of a
conveying chamber in a substrate transfer device.
Solution to Problem
[0013] A substrate transfer device according to one aspect of the
present invention includes: a casing configured such that when a
certain horizontal direction is defined as a first direction, and
another horizontal direction orthogonal to the first direction is
defined as a second direction, a size of the casing in the second
direction is more than a size of the casing in the first direction,
the casing including walls forming a conveying chamber and at least
one opening provided at at least one side of the conveying chamber
in the first direction; and a substrate conveying robot including a
base provided in the conveying chamber, a robot arm constituted by
at least one link supported by the base, a robot hand coupled to a
wrist portion of the robot arm and configured to hold a substrate,
and a controller configured to control operations of the robot arm
and the robot hand, wherein when a space in the conveying chamber
except for a predetermined exclusive region is defined as an
effective conveying chamber, an entire link length of the at least
one link is less than a size of the conveying chamber in the first
direction, and an entire hand length of the robot hand is not less
than a size of the effective conveying chamber in the first
direction.
[0014] In the substrate transfer device, the size of the conveying
chamber in the first direction is limited by not the entire hand
length of the robot hand of the substrate conveying robot but the
entire link length of each link of the robot arm. The reduction in
the entire link length of the link of the substrate conveying robot
can be realized more easily than the reduction in the entire hand
length by including a traveling shaft in the substrate conveying
robot for allowing the substrate conveying robot to travel in the
second direction Y or by increasing the number of links of the
substrate conveying robot. Therefore, the reduction in the size of
the conveying chamber in the first direction can be easily
realized.
Advantageous Effects of Invention
[0015] According to the present invention, the reduction in the
size (depth) of the conveying chamber of the substrate transfer
device in the first direction can be easily realized.
BRIEF DESCRIPTION OF DRAWINGS
[0016] FIG. 1 is a plane cross-sectional view showing a schematic
configuration of a substrate treatment facility including a
substrate transfer device according to one embodiment of the
present invention.
[0017] FIG. 2 is a side cross-sectional view showing a schematic
configuration of the substrate treatment facility shown in FIG.
1.
[0018] FIG. 3 is a block diagram showing a configuration of a
control system of a substrate conveying robot.
[0019] FIG. 4 is a side view for explaining an entire link length
and entire hand length of the substrate conveying robot.
[0020] FIG. 5 is a diagram for explaining a case where a robot hand
of the substrate conveying robot according to Embodiment 1 enters
into or gets out from a conveying chamber through a front
opening.
[0021] FIG. 6 is a plan view of the robot hand of the substrate
conveying robot according to Embodiment 2.
[0022] FIG. 7 is a side view of the robot hand shown in FIG. 6.
[0023] FIG. 8 is a bottom view of the robot hand shown in FIG.
6.
[0024] FIG. 9 is a conceptual diagram of optical signal
transmission by a lens unit.
[0025] FIG. 10 is a diagram for explaining a case where the robot
hand of the substrate conveying robot according to Embodiment 2
enters into or gets out from the conveying chamber through the
front opening.
[0026] FIG. 11 is a plan view of the robot hand of the substrate
conveying robot according to Modification Example 1 of Embodiment
2.
[0027] FIG. 12 is a side view of the robot hand shown in FIG.
11.
[0028] FIG. 13 is a bottom view of the robot hand shown in FIG.
11.
[0029] FIG. 14 is a diagram for explaining a case where the robot
hand of the substrate conveying robot according to Modification
Example 2 of Embodiment 2 enters into or gets out from the
conveying chamber through the front opening.
[0030] FIG. 15 is a diagram for explaining a case where the robot
hand of the substrate conveying robot according to Modification
Example 3 of Embodiment 2 enters into or gets out from the
conveying chamber through the front opening.
[0031] FIG. 16 is a diagram for explaining a case where the robot
hand of the substrate conveying robot according to Modification
Example 4 of Embodiment 2 enters into or gets out from the
conveying chamber through the front opening.
[0032] FIG. 17 is a side view of the robot hand of the substrate
conveying robot according to Modification Example 5 of Embodiment
2.
[0033] FIG. 18 is a bottom view of the robot hand shown in FIG.
17.
[0034] FIG. 19 is a side view of the robot hand of the substrate
conveying robot according to Modification Example 6 of Embodiment
2.
[0035] FIG. 20 is a side view of the robot hand shown in FIG.
19.
DESCRIPTION OF EMBODIMENTS
[0036] Schematic Configuration of Substrate Treatment Facility
100
[0037] First, the following will explain a schematic configuration
of a substrate treatment facility 100 including a substrate
transfer device 1 according to one embodiment of the present
invention. FIG. 1 is a plane cross-sectional view showing the
schematic configuration of the substrate treatment facility 100
including the substrate transfer device 1 according to one
embodiment of the present invention. FIG. 2 is a side
cross-sectional view showing the schematic configuration of the
substrate treatment facility 100 shown in FIG. 1. As shown in FIGS.
1 and 2, the substrate treatment facility 100 includes the
substrate transfer device 1 and a process treatment device 2. The
substrate treatment facility 100 is designed so as to conform to
rules such as SEMI (Semiconductor Equipment and Materials
International) standards.
[0038] The process treatment device 2 is a device or a group of
devices, which performs a process treatment with respect to a
substrate 24, the process treatment being at least one of a heat
treatment, an impurity introducing treatment, a thin film forming
treatment, a lithography treatment, a washing treatment, and a
flattening treatment. It should be noted that the process treatment
device 2 may perform a treatment other than the above treatments
with respect to the substrate 24.
[0039] The process treatment device 2 includes: a treatment device
main body 20 configured to perform a treatment with respect to the
substrate 24; a casing 21 accommodating the treatment device main
body 20; and an adjuster (not shown) configured to adjust an
atmospheric gas of a treatment chamber 22 formed in the casing 21.
The adjuster may be realized by, for example, a fan filter
unit.
[0040] The substrate transfer device 1 is provided adjacent to the
process treatment device 2. The substrate transfer device 1 serves
as an interface portion configured to transfer the substrate 24
between each substrate carrier 25 and the process treatment device
2. The substrate carrier 25 is a portable container capable of
storing a large number of substrates 24.
[0041] The substrate carrier 25 includes: a container main body 60
storing the substrates 24; and a container door 61 which can be
attached to and detached from the container main body 60 or can
open and close the container main body 60. The container main body
60 has a substantially box shape including an entrance which is
open toward one side, and this entrance is openably closed by the
container door 61. A large number of shelves lined up in an
upward/downward direction Z are formed in the container main body
60 such that a large number of substrates 24 are stored in the
container main body 60 so as to be lined up at regular intervals in
the upward/downward direction Z.
[0042] Substrate Transfer Device 1
[0043] Next, the substrate transfer device 1 will be explained in
detail. The substrate transfer device 1 includes: a substrate
conveying robot 7; an aligner 92 configured to align directions of
the substrates 24; an adjuster 93; a casing 8 configured to
accommodate these members; and load ports 91.
[0044] The casing 8 has a rectangular parallelepiped shape, and a
size of the rectangular parallelepiped shape in a second direction
Y is more than a size of the rectangular parallelepiped shape in a
first direction X. The "first direction X" is a certain horizontal
direction, and the "second direction Y" is another horizontal
direction orthogonal to the first direction X. The casing 8
includes: a front wall 81 and rear wall 82 opposing each other so
as to be spaced apart from each other in the first direction X; a
pair of side walls 83 opposing each other so as to be spaced apart
from each other in the second direction Y; a ceiling plate 84, and
a bottom plate 85, and a conveying chamber 80 is formed in the
casing 8 by these walls and plates. In the present description, the
word "front" denotes one side in the first direction X, the side
being a side where the front wall 81 exists when viewed from the
conveying chamber 80, and the word "rear" denotes an opposite side
in the first direction X.
[0045] The conveying chamber 80 is a closed space having high
cleanliness and is filled with a predetermined atmospheric gas. The
adjuster 93 is a device configured to perform contamination control
of the conveying chamber 80. A level of floating fine particles in
an atmosphere of the conveying chamber 80 is managed to not more
than a predetermined cleanliness level by the adjuster 93, and
according to need, environmental conditions, such as temperature,
humidity, and pressure, in the conveying chamber 80 are also
managed.
[0046] The rear wall 82 is provided with a plurality of rear
openings 87. In the present embodiment, two rear openings 87 lined
up in the second direction Y are provided. The treatment chamber 22
of the process treatment device 2 and the conveying chamber 80 of
the substrate transfer device 1 are separated from each other by
the rear wall 82 in the first direction X. The treatment chamber 22
and the conveying chamber 80 communicate with each other through
the rear openings 87.
[0047] The load ports 91 are provided at the front wall 81 of the
casing 8. In the present embodiment, four load ports 91 lined up in
the second direction Y are provided at the front wall 81. Each of
the load ports 91 has functions of: performing docking and
undocking of the substrate carrier 25 and the substrate transfer
device 1; supporting the substrate carrier 25; opening and closing
the substrate carrier 25; and the like.
[0048] The load port 91 includes an opening frame 95, a support
base 97, and an opener 98. The opening frame 95 constitutes a part
of the front wall 81 of the casing 8, and a front opening 86 of the
casing 8 is defined by the opening frame 95. The substrate carrier
25 which docked with the substrate transfer device 1 and the
conveying chamber 80 communicate with each other through the front
opening 86 formed on the front wall 81 of the casing 8.
[0049] The support base 97 is provided right in front of the front
opening 86 and has a function of supporting the substrate carrier
25 placed on the support base 97 and a function of holding the
substrate carrier 25. The substrate carrier 25 placed on and held
by the support base 97 is positioned such that: an entire periphery
of the entrance of the container main body 60 contacts the opening
frame 95; and the container door 61 overlaps the front opening 86
in the first direction X.
[0050] The opener 98 includes: an opener door 96 configured to open
and close the front opening 86; and a drive mechanism for the
opener door 96. The opener 98 causes the container door 61 of the
substrate carrier 25 and the opener door 96 to integrally move into
the conveying chamber 80 to open the front opening 86.
[0051] FIG. 3 is a block diagram showing the configuration of a
control system of the substrate conveying robot 7. As shown in
FIGS. 1 to 3, the substrate conveying robot 7 includes a robot arm
(hereinafter simply referred to as an "arm 71"), a robot hand
(hereinafter simply referred to as a "hand 72") that is one example
of an end effector coupled to a wrist portion of the arm 71; a base
73 supporting the arm 71, and a controller 74 configured to control
operations of the substrate conveying robot 7. The substrate
conveying robot 7 according to the present embodiment is a
horizontal articulated robot. The base 73 is provided at a
substantially center position in the conveying chamber 80 in the
second direction Y and at a position behind a center position in
the conveying chamber 80 in the first direction X.
[0052] The arm 71 includes a plurality of links 75 and 76
sequentially coupled to one another from a base end toward a tip
end. In the arm 71, joint axes A1 to A3 corresponding to the links
75 and 76 are defined. Horizontal drive units 77, 78, and 79 are
provided in the links 75 and 76 and cause the links 75 and 76 to be
individually and angularly displaced around the joint axes A1 to
A3. For example, regarding each joint, each of the horizontal drive
units 77, 78, and 79 includes: a servo motor configured to be
angularly displaced in accordance with a signal transmitted from
the controller 74; a power transmission mechanism configured to
transmit power of the servo motor to a link body; and a position
detector configured to detect the angular displacement of the servo
motor (which are not shown).
[0053] The arm 71 includes a lifting shaft 70. The lifting shaft 70
is provided at a base end portion of the arm 71 and is movable
relative to the base 73 in the upward/downward direction Z. The
lifting shaft 70 is caused to expand and contract by a lifting
drive unit 69 in the upward/downward direction Z relative to the
base 73. For example, the lifting drive unit 69 includes: a servo
motor configured to be angularly displaced in accordance with a
signal transmitted from the controller 74; a power transmission
mechanism configured to convert power of the servo motor into
linear force to transmit the linear force to the lifting shaft 70;
a position detector configured to detect the angular displacement
of the servo motor (which are not shown).
[0054] The hand 72 is coupled to the wrist portion that is a tip
end portion of the arm 71 configured as above. The hand 72 is
rotated and displaced relative to the arm 71 around the joint axis
A3 by the horizontal drive unit 79. The hand 72 includes: a hand
base portion 51 coupled to the wrist portion of the arm 71; and a
blade 52 coupled to the hand base portion 51. The substrate 24 is
placed on the blade 52.
[0055] The hand 72 further includes a holding structure configured
to cause the blade 52 to hold the substrate 24 placed on the blade
52. The holding of the substrate 24 includes a case where the
substrate 24 placed on the blade 52 is prevented from falling down
from the blade 52 by engagement, adsorption, sandwiching, or the
other method.
[0056] The controller 74 is a so-called calculation control device
including a computer. The controller 74 includes a calculation
processing portion and a storage portion (both not shown). Examples
of the calculation processing portion includes a microcontroller, a
CPU, a MPU, a PLC, a DSP, an ASIC, and a FPGA, and examples of the
storage portion includes a ROM and a RAM. The storage portion
stores programs executed by the calculation processing portion,
various fixed data, and the like. The storage portion further
stores: teaching point data for controlling operations of the
substrate conveying robot 7; data regarding the shapes and sizes of
the arm 71 and the hand 72; data regarding the shape and size of
the substrate 24 held by the hand 72; and the like. In the
controller 74, the calculation processing portion reads out and
executes software such as the program stored in the storage
portion. Thus, the controller 74 performs processing for
controlling the operations of the substrate conveying robot 7. It
should be noted that the controller 74 may execute each processing
by centralized control performed by a single computer or by
distributed control performed by cooperation of a plurality of
computers.
[0057] Based on a pose (position and posture) of the hand 72
corresponding to a rotational position detected by the position
detectors and the teaching point data stored in the storage
portion, the controller 74 calculates a target pose that is a pose
after a predetermined control time. The controller 74 outputs a
control command to a servo amplifier such that the pose of the hand
72 becomes the target pose after the predetermined control time.
Based on the control command, the servo amplifier supplies drive
electric power to each servo motor. With this, the hand 72 can be
caused to become a desired pose.
[0058] In the substrate transfer device 1 configured as above, the
conveying chamber 80 includes an exclusive region 80E into which
the substrate conveying robot 7 cannot enter. The exclusive region
80E is a region spreading from the front wall 81 of the casing 8 by
a predetermined size .DELTA.Ad. The exclusive region 80E is
utilized by the load port 91 (opener 98) for opening/closing
operations of the substrate carrier 25 and the front opening 86.
When the substrate carrier 25 and the front opening 86 are open,
the container door 61, the opener door 96, and the drive mechanism
for the opener door 96 exist in the exclusive region 80E.
Therefore, the substrate conveying robot 7 which may interfere with
these members should not enter into the exclusive region 80E.
[0059] A space in the conveying chamber 80 except for the exclusive
region 80E is defined as an "effective conveying chamber 80A". The
effective conveying chamber 80A is a space which can be utilized by
the substrate conveying robot 7 in the conveying chamber 80. In the
present embodiment, the exclusive region 80E is defined along the
front wall 81 in the conveying chamber 80. However, exclusive
regions may be defined along respective front and rear walls 81 and
82 in the conveying chamber 80. The opener 98 does not exist at the
rear wall 82 of the casing 8. However, by defining the exclusive
region along the rear wall 82 of the casing 8, the interference
between the rear wall 82 of the casing 8 and the hand 72 can be
more surely avoided, and the hand 72 can move smoothly.
[0060] For convenience of explanation, a size of the conveying
chamber 80 in the first direction X is referred to as a "conveying
chamber size Dx", and a size of the effective conveying chamber 80A
in the first direction X is referred to as an "effective conveying
chamber size Dx' (Dx'=Dx-.DELTA.d)". The conveying chamber size Dx
is substantially equal to a distance from the front wall 81 of the
casing 8 to the rear wall 82 of the casing 8.
[0061] In the foregoing, an entire link length DL of each of the
links 75 and 76 of the arm 71 of the substrate conveying robot 7 is
less than the conveying chamber size Dx. More preferably, the
entire link length DL is less than the effective conveying chamber
size Dx'. The entire link length DL of the link 75 and the entire
link length DL of the link 76 may be different from each other. As
shown in FIG. 4, the "entire link length DL" of the link 75 is a
maximum value of a size of the link 75 in a direction orthogonal to
two joint axes A1 and A2 defined at the link 75 (i.e., a
longitudinal size of the link 75). The "entire link length DL" of
the link 76 is a maximum value of a size of the link 76 in a
direction orthogonal to two joint axes A2 and A3 defined at the
link 76 (i.e., a longitudinal size of the link 76).
[0062] Further, an entire hand length Dh of the hand 72 of the
substrate conveying robot 7 is not less than the effective
conveying chamber size Dx'. The entire hand length Dh of the hand
72 is less than a size obtained by adding a distance (hereinafter
referred to as a "hand insertion size") to the conveying chamber
size Dx, the hand insertion size being a distance from an inner
surface of the wall 81 to a point of the hand 72 which is inserted
in the substrate carrier 25 or a point of the substrate 24 held by
the hand 72, the point being farthest from the inner surface of the
wall in the first direction X. More preferably, the entire hand
length Dh is not less than the conveying chamber size Dx and less
than the size obtained by adding the hand insertion size to the
conveying chamber size Dx. As shown in FIG. 4, the "entire hand
length Dh" of the hand 72 is a maximum value of a size of the hand
72 (including the substrate 24 held by the hand 72) in a direction
orthogonal to the joint axis A3 defined at the hand 72. To be
specific, the entire hand length Dh is a length in a hand
longitudinal direction L from a base end of the hand base portion
51 to a tip end of the substrate 24 held by the blade 52. The hand
longitudinal direction L is a direction along a straight line
connecting a base end portion and tip end portion of the hand
72.
[0063] Each of FIGS. 1 and 2 is a reduced scale view of the
substrate transfer device 1 in which a diameter of the substrate 24
is 300 mm, the conveying chamber size Dx is 650 mm, the effective
conveying chamber size Dx' is 550 mm, and the insertion size is 350
mm. The entire hand length Dh of the hand 72 of the substrate
conveying robot 7 included in the substrate transfer device 1 is
not less than 550 mm and less than 900 mm. More preferably, the
entire hand length Dh is not less than 650 mm and less than 900 mm.
The entire link length DL of each of the links 75 and 76 of the arm
71 of the substrate conveying robot 7 is less than 650 mm, and more
preferably, less than 550 mm. Each of FIGS. 1 and 2 is a reduced
scale view of the substrate conveying robot 7 in which the entire
hand length Dh of the hand 72 is 650 mm, and the entire link length
DL of each of the links 75 and 76 is 550 mm.
[0064] As explained above, the substrate transfer device 1
according to the present embodiment includes the casing 8 and the
substrate conveying robot 7 provided in the casing 8. The size of
the casing 8 in the second direction Y is more than the size of the
casing 8 in the first direction X. The casing 8 includes the walls
(the front wall 81, the rear wall 82, and the side walls 83)
forming the conveying chamber 80 and at least one opening (the
front opening 86 or the rear opening 87) provided at at least one
side of the conveying chamber 80 in the first direction X. The
substrate conveying robot 7 includes: the base 73 provided in the
conveying chamber 80; the robot arm 71 constituted by at least one
link 75 or 76 supported by the base 73; the robot hand 72 coupled
to the wrist portion of the robot arm 71 and capable of holding the
substrate 24; and the controller 74 configured to control the
operations of the robot arm 71 and the robot hand 72. When the
space in the conveying chamber 80 except for the predetermined
exclusive region 80E is defined as the effective conveying chamber
80A, the entire link length DL of at least one link 75 or 76 is
less than the size (conveying chamber size Dx) of the conveying
chamber 80 in the first direction X, and the entire hand length Dh
of the robot hand 72 is not more than the size (effective conveying
chamber size Dx') of the effective conveying chamber 80A in the
first direction X.
[0065] The substrate transfer device 1 according to the present
embodiment further includes the load ports 91 each configured to
open and close the front opening 86. The region utilized by the
load ports 91 for the opening/closing operations of the substrate
carriers 25 communicating with the conveying chamber 80 through the
load ports 91 is defined as the predetermined exclusive region
80E.
[0066] According to the substrate transfer device 1, the conveying
chamber size Dx is limited by not the entire hand length Dh but the
entire link length DL. The entire link length DL is generally
related to a required operation range of the substrate conveying
robot 7 in the second direction Y. By including a traveling shaft
in the substrate conveying robot 7 for allowing the substrate
conveying robot 7 to travel in the second direction Y or by
increasing the number of links of the substrate conveying robot 7,
the operation range of the substrate conveying robot 7 in the
second direction Y can be expanded regardless of the entire link
length DL.
[0067] On the other hand, the reduction in the entire hand length
Dh is restricted by: the diameter of the substrate 24 held by the
hand 72; a length for a mechanism for coupling the hand 72 to the
arm 71; a distance from the tip end of the arm 71 to the entrance
of the substrate carrier 25 when the tip end of the arm 71 is
closest to the front opening 86 or the rear opening 87; and the
like. As above, the entire hand length Dh of the hand 72 is
variously restricted, so that it is difficult to shorten the entire
hand length Dh of the hand 72. To be specific, the reduction in the
entire link length DL can be realized more easily than the
reduction in the entire hand length Dh. By reducing the entire link
length DL, the conveying chamber size Dx is reduced, and therefore,
the size of the casing 8 in the first direction X is reduced. Thus,
the casing 8 can be reduced in size.
[0068] When the entire hand length Dh is more than the conveying
chamber size Dx (or the effective conveying chamber size Dx'), a
posture of the hand 72 cannot become such a posture that the hand
longitudinal direction L and the first direction X are parallel to
each other in the conveying chamber 80. A side toward which the
hand 72 faces in the second direction Y cannot be changed without
becoming this posture once. The following will explain the
substrate conveying robot 7 according to each of Embodiments 1 and
2 in which: the entire hand length Dh is more than the conveying
chamber size Dx (or the effective conveying chamber size Dx'); and
the posture of the hand 72 can become such a posture that the hand
longitudinal direction L and the first direction X are parallel to
each other.
Embodiment 1
[0069] The substrate conveying robot 7 according to Embodiment 1
controls the arm 71 such that: when the entire hand 72 is
positioned in the conveying chamber 80, the hand longitudinal
direction L of the hand 72 is inclined relative to the first
direction X; and when the tip end portion of the hand 72 enters
through the opening (the front opening 86 or the rear opening 87),
the hand longitudinal direction L is parallel to the first
direction X.
[0070] FIG. 5 is a diagram for explaining a case where the robot
hand 72 of the substrate conveying robot 7 according to Embodiment
1 enters into or gets out from the conveying chamber 80 through the
front opening 86. The following will explain the operations of the
substrate conveying robot 7 while focusing on the hand 72. Although
not explained, the movement and posture change of the hand 72 are
achieved by the operation of the arm 71 controlled by the
controller 74.
[0071] As shown by a left portion in FIG. 5, when a part of the
hand 72 is positioned outside the conveying chamber 80 through the
front opening 86, the posture of the hand 72 can become such a
posture that the hand longitudinal direction L and the first
direction X are parallel to each other. The hand 72 in such a
posture that the hand longitudinal direction L and the first
direction X are parallel to each other can enter deep into the
substrate carrier 25. The substrate carrier 25 opens in a direction
parallel to the first direction X. In the substrate carrier 25, the
substrate 24 needs to be moved in the direction parallel to the
first direction X.
[0072] When causing the substrate 24 to move into the conveying
chamber 80 through the front opening 86, as shown by a middle
portion in FIG. 5, the hand 72 is rotated around a center of the
substrate 24 toward one side in the second direction Y while
causing the hand 72 to move rearward in the direction parallel to
the first direction X until the entire substrate 24 is moved into
the conveying chamber 80. The hand 72 may be moved rearward in the
direction parallel to the first direction X after the hand 72 is
rotated around the center of the substrate 24 toward one side in
the second direction Y.
[0073] By the rotation of the hand 72, an inclination .theta. of
the hand longitudinal direction L relative to the first direction X
increases. As above, in a state where a part of the hand 72 is
positioned outside the conveying chamber 80 through the front
opening 86, the posture of the hand 72 is changed such that the
hand longitudinal direction L is inclined relative to the first
direction X. Thus, the size of the hand 72 including the substrate
24 in the first direction X is made less than the conveying chamber
size Dx (more preferably, the effective conveying chamber size
Dx').
[0074] When causing the hand 72 holding the substrate 24 to move in
the conveying chamber 80, as shown by a right portion in FIG. 5,
the hand longitudinal direction L is inclined relative to the first
direction X, and the size of the hand 72 including the substrate 24
in the first direction X is less than the effective conveying
chamber size Dx'.
[0075] When causing the substrate 24 to move to an outside of the
conveying chamber 80 through the front opening 86, as shown by the
middle portion in FIG. 5, a tip of the hand 72 is moved to the
outside of the conveying chamber 80 through the front opening 86
while maintaining such a posture of the hand 72 that the hand
longitudinal direction L is inclined relative to the first
direction X. Then, while causing the substrate 24 to move forward
in the direction parallel to the first direction X, the hand 72 is
rotated around the center of the substrate 24 toward one side in
the second direction Y such that the hand longitudinal direction L
becomes parallel to the first direction X.
[0076] As explained above, according to the substrate conveying
robot 7 of Embodiment 1, when the entire hand 72 is positioned in
the conveying chamber 80, the posture of the hand 72 is set to such
a posture that the hand longitudinal direction L is inclined
relative to the first direction X. As a result, the size of the
hand 72 including the substrate 24 in the first direction X becomes
less than the effective conveying chamber size Dx'. Then, according
to the substrate conveying robot 7 of Embodiment 1, when the tip of
the hand 72 is positioned outside the conveying chamber 80 through
the front opening 86, the posture of the hand 72 can be set to such
a posture that the hand longitudinal direction L is parallel to the
first direction X. When causing the hand 72 to move again into the
conveying chamber 80 after the posture of the hand 72 is set to
such a posture that the hand longitudinal direction L is parallel
to the first direction X, a direction of the inclination .theta. of
the hand longitudinal direction L relative to the first direction X
is reversed. With this, the side toward which the hand 72 faces in
the second direction Y can be changed. The foregoing has explained
the movement of the hand 72 when the hand 72 is holding the
substrate 24. The movement of the hand 72 when the hand 72 is not
holding the substrate 24 is the same as above. Further, the
foregoing has explained a case where the tip of the hand 72 is
moved to the outside of the conveying chamber 80 through the front
opening 86. The movement of the hand 72 when the tip of the hand 72
is moved to the outside of the conveying chamber 80 through the
rear opening 87 is the same as above.
Embodiment 2
[0077] FIG. 6 is a plan view of the hand 72 of the substrate
conveying robot 7 according to Embodiment 2. FIG. 7 is a side view
of the hand 72 shown in FIG. 6. FIG. 8 is a bottom view of the hand
72 shown in FIG. 6. FIG. 9 is a conceptual diagram of optical
signal transmission by a lens unit 39. As shown in FIGS. 6 to 9,
the hand 72 of the substrate conveying robot 7 according to
Embodiment 2 includes: a reference portion 72a coupled to the wrist
portion of the arm 71; a movable portion 72b coupled to the
reference portion 72a so as to be displaceable relative to the
reference portion 72a; and a movement mechanism configured to
displace the movable portion 72b relative to the reference portion
72a. With this configuration, by the expansion and contraction of
the hand 72 in the hand longitudinal direction L, the posture of
the hand 72 can become such a posture that the hand longitudinal
direction L and the first direction X are parallel to each
other.
[0078] As shown by an upper portion in FIG. 7, according to the
hand 72 in a steady state, the reference portion 72a and the
movable portion 72b are close to each other in the hand
longitudinal direction L. A size of the steady-state hand 72
including the substrate 24 in the hand longitudinal direction L is
referred to as a "natural hand length DhN". The natural hand length
DhN is less than the conveying chamber size Dx, and preferably less
than the effective conveying chamber size Dx'.
[0079] As shown by a lower portion in FIG. 7, according to the hand
72 in an expanded state, the reference portion 72a and the movable
portion 72b are separated from each other in the hand longitudinal
direction L. A size of the expanded-state hand 72 including the
substrate 24 in the hand longitudinal direction L is referred to as
the "entire hand length Dh". The entire hand length Dh is not less
than the effective conveying chamber size Dx', and preferably more
than the conveying chamber size Dx.
[0080] According to the hand 72 of the present embodiment, the hand
base portion 51 is constituted by: a first member 511 coupled to
the wrist portion of the arm 71; and a second member 512 coupled to
the blade 52. The reference portion 72a of the hand 72 is
constituted by the first member 511 of the hand base portion 51,
and the movable portion 72b of the hand 72 is constituted by the
second member 512 of the hand base portion 51 and the blade 52.
[0081] The first member 511 and second member 512 of the hand base
portion 51 are coupled to each other by a linear movement mechanism
such that the second member 512 is displaceable relative to the
first member 511 in the hand longitudinal direction L. For example,
the linear movement mechanism is constituted by: a rail 15
extending in the hand longitudinal direction L; and a slider 16
configured to travel on the rail 15. In the present embodiment, the
rail 15 is provided at the first member 511, and the slider 16 is
provided at the second member 512. Further, an actuator 17
configured to displace the second member 512 relative to the first
member 511 is provided at the first member 511. For example, the
actuator 17 is an air cylinder provided at the first member 511,
and a cylinder rod 17a configured to be reciprocated by the air
cylinder is coupled to the second member 512. However, the actuator
17 is not limited to the air cylinder, and the other mechanical
element, such as a hydraulic cylinder, an electric motor, or a
hydraulic motor, having a function similar to a function of the air
cylinder may be used as the actuator 17.
[0082] As shown in FIG. 8, the hand 72 is provided with at least
one optical sensor 3 configured to detect the substrate 24,
obstacles, and the like. The hand 72 according to the present
embodiment includes two optical sensors 3A and 3B. When it is
unnecessary to distinguish between these two optical sensors 3A and
3B, the term "optical sensor 3 (without an alphabetical index)" is
used. The optical sensor 3A that is one of two optical sensors 3 is
a transmission optical sensor in which: a light projecting portion
31 is provided at one of two tip end portions of the blade 52 of
the hand 72; and a light receiving portion 32 is provided at the
other tip end portion of the blade 52 of the hand 72. The optical
sensor 3B that is the other of two optical sensors 3 is a
reflection optical sensor in which the light projecting portion 31
and the light receiving portion 32 are provided at one of two tip
end portions of the blade 52 of the hand 72. In the substrate
conveying robot 7 according to the present invention, the hand 72
is only required to include at least one optical sensor 3
regardless of the type of the sensor.
[0083] Components constituting the optical sensor 3A and components
constituting the optical sensor 3B are substantially the same as
each other. The optical sensor 3 according to the present
embodiment includes: the light projecting portion 31 and light
receiving portion 32 provided at the movable portion 72b of the
hand 72; an amplifier unit 33 provided at the reference portion 72a
of the hand 72; and an optical fiber 34 connecting the light
projecting portion 31 and the amplifier unit 33 and another optical
fiber 34 connecting the light receiving portion 32 and the
amplifier unit 33. The amplifier unit 33 integrally includes a
light emitting element 36, a light receiving element 37, and a
control board 38. The control board 38 includes an output circuit
and an amplifier. The amplifier unit 33 is connected to the
controller 74 through a cable (not shown) wired along the arm
71.
[0084] Each of the optical fiber 34 connecting the light projecting
portion 31 and the light emitting element 36 and the optical fiber
34 connecting the light receiving portion 32 and the light
receiving element 37 is divided at a boundary between the reference
portion 72a and movable portion 72b of the hand 72. As shown in
FIG. 9, at least one of these two optical fibers 34 includes a pair
of divided end portions that are: a first divided end portion 341
provided at the reference portion 72a; and a second divided end
portion 342 provided at the movable portion 72b and configured to
be displaced integrally with the movable portion 72b. The lens unit
39 is provided between the first divided end portion 341 and the
second divided end portion 342 so as to optically connect the first
divided end portion 341 and the second divided end portion 342.
[0085] As shown in FIG. 9, for example, the lens unit 39 includes:
a collimate lens 391 provided at a light emitting side
corresponding to one of the first divided end portion 341 and the
second divided end portion 342; and a condensing lens 392 provided
at a light receiving side corresponding to the other of the first
divided end portion 341 and the second divided end portion 342. To
be specific, light incident on the collimate lens 391 from a
light-projecting-side divided end portion (in FIG. 9, the first
divided end portion 341) of the optical fiber 34 is collimated by
the collimate lens 391 to become parallel light flux, and the
parallel light flux is incident on the condensing lens 392. The
parallel light flux incident on the condensing lens 392 is coupled
by the condensing lens 392 to a light-receiving-side divided end
portion (in FIG. 9, the second divided end portion 342) of the
optical fiber 34 provided on a focal surface of the condensing lens
392. The lens unit 39 is constituted by, for example, a combination
of lenses of at least one type among a ball lens, a semispherical
lens, a drum lens, and a half drum lens. Thus, an optical signal
from the light emitting element 36 is transmitted to the light
projecting portion 31, and the optical signal received by the light
receiving portion 32 is transmitted to the light receiving element
37.
[0086] FIG. 10 is a diagram for explaining a case where the robot
hand 72 of the substrate conveying robot 7 according to Embodiment
2 enters into or gets out from the conveying chamber 80 through the
front opening 86. The following will explain the operations of the
substrate conveying robot 7 while focusing on the hand 72. Although
not explained, the movement and posture change of the hand 72 are
achieved by the operation of the arm 71 controlled by the
controller 74, and the expansion and contraction of the hand 72 are
achieved by the operation of the actuator 17 controlled by the
controller 74.
[0087] As shown by a left portion in FIG. 10, when taking out the
substrate 24 from the substrate carrier 25, the hand 72 in the
steady state moves in the conveying chamber 80 to the front of the
front opening 86 communicating with the substrate carrier 25. At
this time, the posture of the hand 72 is such a posture that the
hand longitudinal direction L is parallel to the first direction
X.
[0088] Next, as shown by a middle portion in FIG. 10, the hand 72
is expanded in the hand longitudinal direction L to become the
expanded state. Especially in a case where the air cylinder is
adopted as the actuator 17, a displacement speed of the movable
portion 72b may change or become higher than a set speed by source
pressure. Therefore, it is desirable that the hand 72 be inserted
into the substrate carrier 25 after the hand 72 becomes the
expanded state. A part of the hand 72 in the expanded state is
positioned outside the conveying chamber 80 through the front
opening 86.
[0089] Next, as shown by a right portion in FIG. 10, the hand 72
moves forward through the front opening 86 to a pickup position of
the substrate 24 in the substrate carrier 25. The hand 72 at the
pickup position receives the substrate 24 from the substrate
carrier 25 and holds the substrate 24.
[0090] The foregoing has explained the hand 72 when the hand 72
takes out the substrate 24 from the substrate carrier 25. The
movement of the hand 72 when the hand 72 stores the substrate 24 in
the substrate carrier 25 is opposite to the above movement.
Further, the foregoing has explained a case where the tip of the
hand 72 moves to the outside of the conveying chamber 80 through
the front opening 86. The movement of the hand 72 when the tip of
the hand 72 moves to the outside of the conveying chamber 80
through the rear opening 87 is the same as the above movement.
[0091] As explained above, the hand 72 of the substrate conveying
robot 7 according to the present embodiment includes: the reference
portion 72a coupled to the wrist portion of the arm 71; the movable
portion 72b coupled to the reference portion 72a so as to be
displaceable relative to the reference portion 72a; the movement
mechanism configured to displace the movable portion 72b relative
to the reference portion 72a; and at least one optical sensor 3.
Specifically, the hand 72 includes: the hand base portion 51
coupled to the wrist portion of the arm 71; and the blade 52
coupled to the hand base portion 51 and configured to hold the
substrate 24. The reference portion 72a of the hand base portion 51
is constituted by a part of the hand base portion 51, and the
movable portion 72b is constituted by a remaining part of the hand
base portion 51 and the blade 52.
[0092] The hand 72 configured as above is controlled by the
controller 74 so as to become the steady state when the entire hand
72 is positioned in the conveying chamber 80 and become the
expanded state when the tip end portion of the hand 72 is
positioned outside the conveying chamber 80 (for example, in the
substrate carrier 25 or the treatment chamber 22). According to the
hand 72 capable of expanding and contracting as above, the entire
hand length Dh that is not less than the conveying chamber size Dx
(or the effective conveying chamber size Dx') can be easily
realized. Even if the entire hand length Dh is more than conveying
chamber size Dx, the posture of the hand 72 can become such a
posture that the hand longitudinal direction L is parallel to the
first direction X.
[0093] In the hand 72, a coupling portion between the reference
portion 72a and movable portion 72b of the hand 72 is provided at
the hand base portion 51. Therefore, an influence on the substrate
24 held by the hand 72 when the movable portion 72b is displaced
relative to the reference portion 72a is reduced.
[0094] Generally, the optical fiber 34 is lower in bending
resistance and twisting resistance than an electric cable
frequently used in industrial robots. When the optical fiber 34
repeatedly bends and extends, a bending loss of light changes. The
hand 72 of the substrate conveying robot 7 according to Embodiment
2 includes at least one optical sensor 3A or 3B including: the
light projecting portion 31 and light receiving portion 32 provided
at the movable portion 72b; the amplifier unit 33 provided at the
reference portion 72a; the optical fiber 34 connecting the light
projecting portion 31 and the amplifier unit 33 and the optical
fiber 34 connecting the light receiving portion 32 and the
amplifier unit 33; and the lens unit 39. At least one of the
optical fibers 34 includes a pair of divided end portions that are
the first divided end portion 341 provided at the reference portion
72a and the second divided end portion 342 provided at the movable
portion 72b, and the first divided end portion 341 and the second
divided end portion 342 are optically coupled to each other by the
lens unit 39.
[0095] Since the first divided end portion 341 and second divided
end portion 342 of the optical fiber 34 are coupled to each other
by the lens unit 39, the optical fiber 34 does not expand or
contract by the expansion or contraction of the hand 72. Thus, the
deterioration and bending loss of the optical fiber 34 are expected
to be suppressed, the deterioration and bending loss being caused
by repeatedly expanding, contracting, and bending the optical fiber
34.
MODIFICATION EXAMPLE 1
[0096] Next, the substrate conveying robot 7 according to
Modification Example 1 of Embodiment 2 will be explained. FIG. 11
is a plan view of the hand 72 of the substrate conveying robot 7
according to Modification Example 1 of Embodiment 2. FIG. 12 is a
side view of the hand 72 shown in FIG. 11. FIG. 13 is a bottom view
of the hand 72 shown in FIG. 11. The substrate conveying robot 7
according to Modification Example 1 of Embodiment 2 is
substantially the same in configuration as the substrate conveying
robot 7 according to Embodiment 2 except for the hand 72. In
Modification Example 1 and the drawings, the same reference signs
are used or the same or corresponding members as in Embodiment 2,
and a repetition of the same explanation is avoided in some
cases.
[0097] As shown in FIGS. 11 and 12, in the hand 72 of the substrate
conveying robot 7 according to Modification Example 1, the hand
base portion 51 is configured as the reference portion 72a, and the
blade 52 is configured as the movable portion 72b. The hand 72 is
provided with a linear movement mechanism configured to displace
the blade 52 in the hand longitudinal direction L toward and away
from the hand base portion 51. In Modification Example 1, the
linear movement mechanism is constituted by: a sliding shaft 26
extending in the hand longitudinal direction L; a bore 27 into
which the sliding shaft 26 is inserted and which extends in the
hand longitudinal direction L; and an actuator 28 configured to
displace the sliding shaft 26 relative to the bore 27. The sliding
shaft 26 is provided at the blade 52, and the bore 27 is provided
at the hand base portion 51.
[0098] As shown in FIG. 13, as with the above embodiment, at least
one optical sensor 3 is provided on a bottom surface of the hand
72. The light projecting portion 31 and light receiving portion 32
of the optical sensor 3 are provided at the blade 52, and the
amplifier unit 33 is provided at the hand base portion 51. The
light projecting portion 31 and the light emitting element 36 of
the amplifier unit 33 are coupled to each other by the optical
fiber 34, and the light receiving portion 32 and the light
receiving element 37 of the amplifier unit 33 are coupled to each
other by the different optical fiber 34. At least one of the
optical fibers 34 is divided at a position between the hand base
portion 51 and the blade 52 and includes the first divided end
portion 341 and the second divided end portion 342. The first
divided end portion 341 and the second divided end portion 342 are
optically coupled to each other by the lens unit 39.
MODIFICATION EXAMPLE 2
[0099] Next, the substrate conveying robot 7 according to
Modification Example 2 of Embodiment 2 will be explained. The
substrate conveying robot 7 according to Modification Example 2 of
Embodiment 2 is different from the substrate conveying robot 7
according to Embodiment 2 regarding control operations of the
controller 74 when the hand 72 enters into or gets out from the
conveying chamber 80 through the front opening 86 or the rear
opening 87. Since a physical configuration of the substrate
conveying robot 7 according to Modification Example 2 is
substantially the same as a physical configuration of the substrate
conveying robot 7 according to Embodiment 2, an explanation
regarding the specific configuration of the substrate conveying
robot 7 according to Modification Example 2 is omitted.
[0100] FIG. 14 is a diagram for explaining a case where the hand 72
of the substrate conveying robot 7 according to Modification
Example 2 of Embodiment 2 enters into or gets out from the
conveying chamber 80 through the front opening 86. The following
will explain the operations of the substrate conveying robot 7
while focusing on the hand 72. Although not explained, the movement
and posture change of the hand 72 are achieved by the operation of
the arm 71 controlled by the controller 74, and the expansion and
contraction of the hand 72 are achieved by the operation of the
actuator 17 controlled by the controller 74.
[0101] As shown by a left portion in FIG. 14, when taking out the
substrate 24 from the substrate carrier 25, the hand 72 in the
steady state moves in the conveying chamber 80 to the front of the
front opening 86 communicating with the substrate carrier 25
storing the substrate 24. At this time, the tip end of the hand 72
is positioned in front of the front opening 86, and the hand
longitudinal direction L is not parallel to the first direction X
but is inclined relative to the first direction X toward the
horizontal direction.
[0102] Next, as shown by a middle portion in FIG. 14, the hand 72
is expanded in the hand longitudinal direction L to become the
expanded state. A part of the hand 72 in the expanded state is
positioned outside the conveying chamber 80 through the front
opening 86.
[0103] Next, as shown in a right portion in FIG. 14, the hand 72
moves forward through the front opening 86 to the pickup position
of the substrate 24 in the substrate carrier 25 so as to draw an
arc in a plan view. The hand 72 at the pickup position receives the
substrate 24 from the substrate carrier 25 and holds the substrate
24.
[0104] As described above, the hand longitudinal direction L of the
hand 72 positioned in front of the front opening 86 is inclined
relative to the first direction X toward the horizontal direction.
Therefore, the distance of movement of the hand 72 into the
substrate carrier 25 when the hand 72 in front of the front opening
86 changes from the steady state to the expanded state can be
reduced. Thus, it is possible to reduce the possibility of the
contact of the hand 72 with the substrate 24, the contact being
caused due to vibrations or the like generated by the expansion of
the hand 72.
MODIFICATION EXAMPLE 3
[0105] Next, the substrate conveying robot 7 according to
Modification Example 3 of Embodiment 2 will be explained. Since a
physical configuration of the substrate conveying robot 7 according
to Modification Example 3 of Embodiment 2 is substantially the same
as a physical configuration of the substrate conveying robot 7
according to Embodiment 2, an explanation regarding the specific
configuration of the substrate conveying robot 7 according to
Modification Example 3 is omitted.
[0106] FIG. 15 is a diagram for explaining a case where the hand 72
of the substrate conveying robot 7 according to Modification
Example 2 of Embodiment 3 enters into or gets out from the
conveying chamber 80 through the front opening 86. As shown in FIG.
15, in the substrate transfer device 1 accommodating the substrate
conveying robot 7 according to Modification Example 3, an opening
direction of the front opening 86 is inclined relative to the first
direction X toward the horizontal direction. Therefore, a distance
from an opening portion of the container main body 60 of the
substrate carrier 25 to the front opening 86 of the front wall 81
of the casing 8 is longer than that of the substrate conveying
robot 7 according to Embodiment 2.
[0107] The following will explain the operations of the substrate
conveying robot 7 while focusing on the hand 72. Although not
explained, the operation of the hand 72 is controlled by the
controller 74. Further, the movement of the hand 72 is achieved by
the operation of the arm 71 controlled by the controller 74, and
the expansion and contraction of the hand 72 are achieved by the
operation of the actuator 17 controlled by the controller 74.
[0108] As shown by a left portion in FIG. 15, when taking out the
substrate 24 from the substrate carrier 25, the hand 72 in the
steady state moves in the conveying chamber 80 to the front of the
front opening 86 communicating with the substrate carrier 25
storing the substrate 24. At this time, the tip end of the hand 72
is positioned in front of the front opening 86, and the hand
longitudinal direction L is not substantially parallel to the first
direction X but is inclined relative to the first direction X
toward the horizontal direction.
[0109] Next, as shown by a middle portion in FIG. 15, the hand 72
is expanded in the hand longitudinal direction L to become the
expanded state. A part of the hand 72 in the expanded state is
positioned outside the conveying chamber 80 through the front
opening 86.
[0110] Next, as shown by a right portion in FIG. 15, the hand 72
moves forward through the front opening 86 to the pickup position
of the substrate 24 in the substrate carrier 25. At this time, a
movement trajectory of the hand 72 is inclined relative to the
first direction X toward the horizontal direction. The hand 72 at
the pickup position receives the substrate 24 from the substrate
carrier 25 and holds the substrate 24.
[0111] As described above, the hand longitudinal direction L of the
hand 72 positioned in front of the front opening 86 is inclined
relative to the first direction X toward the horizontal direction.
Therefore, when the hand 72 in front of the front opening 86
changes from the steady state to the expanded state, the tip end of
the hand 72 stops at a position between the opening of the
substrate carrier 25 and the front opening 86 of the casing 8, so
that the tip end of the hand 72 can be prevented from entering into
the substrate carrier 25. Thus, it is possible to reduce the
possibility of the contact of the hand 72 with the substrate 24,
the contact being caused due to vibrations or the like generated by
the expansion of the hand 72.
MODIFICATION EXAMPLE 4
[0112] Next, the substrate conveying robot 7 according to
Modification Example 4 of Embodiment 2 will be explained. The
substrate conveying robot 7 according to Modification Example 4 of
Embodiment 2 is different from the substrate conveying robot 7
according to Embodiment 2 regarding control operations of the
controller 74 when the hand 72 enters into or gets out from the
conveying chamber 80 through the front opening 86 or the rear
opening 87. Since a physical configuration of the substrate
conveying robot 7 according to Modification Example 4 is
substantially the same as a physical configuration of the substrate
conveying robot 7 according to Embodiment 2, an explanation
regarding the specific configuration of the substrate conveying
robot 7 according to Modification Example 4 is omitted.
[0113] FIG. 16 is a diagram for explaining a case where the hand 72
of the substrate conveying robot 7 according to Modification
Example 4 of Embodiment 2 enters into or gets out from the
conveying chamber 80 through the front opening 86. The following
will explain the operations of the substrate conveying robot 7
while focusing on the hand 72. Although not explained, the movement
and posture change of the hand 72 are achieved by the operation of
the arm 71 controlled by the controller 74, and the expansion and
contraction of the hand 72 are achieved by the operation of the
actuator 17 controlled by the controller 74.
[0114] As shown by a left portion in FIG. 16, when taking out the
substrate 24 from the substrate carrier 25, the hand 72 in the
steady state moves in the conveying chamber 80 to the front of the
front opening 86 communicating with the substrate carrier 25
storing the substrate 24. At this time, the tip end of the hand 72
is positioned in front of the front opening 86, and the hand
longitudinal direction L is not parallel to the first direction X
but is inclined relative to the first direction X toward the
horizontal direction.
[0115] Next, as shown by a middle portion in FIG. 16, the hand 72
is moved forward toward the substrate carrier 25, and at the same
time, the hand 72 is changed from the steady state to the expanded
state. A part of the hand 72 in the expanded state is positioned
outside the conveying chamber 80 through the front opening 86.
[0116] As above, the movement and expansion of the hand 72 are
simultaneously performed, and as shown by a right portion in FIG.
16, the hand 72 moves to the pickup position of the substrate 24 in
the substrate carrier 25. The hand 72 at the pickup position
receives the substrate 24 from the substrate carrier 25 and holds
the substrate 24.
[0117] The foregoing has explained the hand 72 when the hand 72
takes out the substrate 24 from the substrate carrier 25. The
movement of the hand 72 when the hand 72 stores the substrate 24 in
the substrate carrier 25 is opposite to the above movement.
Further, the foregoing has explained a case where the tip of the
hand 72 moves to the outside of the conveying chamber 80 through
the front opening 86. The movement of the hand 72 when the tip of
the hand 72 moves to the outside of the conveying chamber 80
through the rear opening 87 is the same as the above movement.
[0118] As above, according to the substrate conveying robot 7 of
Modification Example 4, when the hand 72 enters into or gets out
from the conveying chamber 80 through the front opening 86 or the
rear opening 87, the hand 72 moves while changing from the steady
state to the expanded state or vice versa. According to the control
of the substrate conveying robot 7 of Modification Example 4, a
cycle time of the treatment can be made shorter than that of
Embodiment 2.
[0119] The hand 72 may be controlled such that: a predetermined
expansion completion position is set in front of the pickup
position for the hand 72 and/or a drop-off position for the hand
72; and the expansion of the hand 72 is completed at or in front of
the expansion completion position. With this, it is possible to
avoid a case where the hand 72 expands at the pickup position or
the drop-off position to interfere with the substrate carrier 25 or
a component of the substrate transfer device 1.
[0120] In the substrate conveying robot 7 of the substrate
treatment facility 100 according to each of Modification Examples 1
to 3, the hand 72 may be controlled to move while changing from the
steady state to the expanded state or vice versa.
MODIFICATION EXAMPLE 5
[0121] Next, the substrate conveying robot 7 according to
Modification Example 5 of Embodiment 2 will be explained. FIG. 17
is a side view of the hand 72 of the substrate conveying robot 7
according to Modification Example 5 of Embodiment 2. FIG. 18 is a
rear view of the hand 72 shown in FIG. 17. In the present
embodiment and the drawings, the same reference signs are used for
the same or corresponding members as in the substrate conveying
robot 7 of Embodiment 2, and a repetition of the same explanation
is avoided in some cases.
[0122] As shown in FIGS. 17 and 18, the hand 72 of the substrate
conveying robot 7 according to Modification Example 5 includes: the
reference portion 72a coupled to the wrist portion of the arm 71;
the movable portion 72b coupled to the reference portion 72a so as
to be displaceable relative to the reference portion 72a; a
rotational movement mechanism configured to displace the movable
portion 72b relative to the reference portion 72a; and at least one
optical sensor 3.
[0123] The hand 72 includes: the hand base portion 51 coupled to
the wrist portion of the arm 71; and the blade 52 coupled to the
hand base portion 51. The substrate 24 is placed on the blade 52.
The hand base portion 51 is constituted by: the first member 511
coupled to the wrist portion of the arm 71; and the second member
512 coupled to the blade 52. The reference portion 72a of the hand
72 is constituted by the first member 511 of the hand base portion
51, and the movable portion 72b of the hand 72 is constituted by
the second member 512 of the hand base portion 51 and the blade
52.
[0124] The first member 511 and second member 512 of the hand base
portion 51 are coupled to each other by the rotational movement
mechanism such that the second member 512 is rotationally
displaceable relative to the first member 511 in the
upward/downward direction Z (vertical direction). For example, the
rotational movement mechanism is constituted by: a rotational
support shaft 45a extending in the horizontal direction; a bearing
45b supporting the rotational support shaft 45a; and an actuator 46
configured to cause the second member 512 to rotate relative to the
first member 511. In the present embodiment, the rotational support
shaft 45a is provided at the second member 512, and the bearing 45b
is provided at the first member 511.
[0125] The optical sensor 3 includes: the light projecting portion
31 and light receiving portion 32 provided at the movable portion
72b; the amplifier unit 33 provided at the reference portion 72a;
the optical fiber 34 connecting the light projecting portion 31 and
the amplifier unit 33 and the different optical fiber 34 connecting
the light receiving portion 32 and the amplifier unit 33; and the
lens unit 39 provided at a portion of at least one of the optical
fibers 34. At least one of the optical fibers 34 includes a pair of
divided end portions that are the first divided end portion 341
provided at the reference portion 72a and the second divided end
portion 342 provided at the movable portion 72b, and the first
divided end portion 341 and the second divided end portion 342 are
optically coupled to each other by the lens unit 39 (see FIG.
9).
[0126] In the present Modification Example, the second divided end
portion 342 of the optical fiber 34 is positioned at an end portion
of the rotational support shaft 45a, and the first divided end
portion 341 of the optical fiber 34 is positioned at a deep portion
of a hole of the bearing 45b into which the rotational support
shaft 45a is inserted. The lens unit 39 is provided between the end
portion of the rotational support shaft 45a and the deep portion of
the hole of the bearing 45b. Even when the movable portion 72b of
the hand 72 rotates relative to the reference portion 72a in the
upward/downward direction Z, a position of a center axis of the
rotational support shaft 45a is not displaced relative to the
reference portion 72a. Therefore, it is desirable that the lens
unit 39 be provided on the center axis of the rotational support
shaft 45a.
[0127] Since the movable portion 72b rotates relative to the
reference portion 72a around the rotational support shaft 45a in
the vertical direction, the hand 72 configured as above can change
between the expanded state shown by an upper portion in FIG. 17 and
the steady state shown by a lower portion in FIG. 17. The natural
hand length DhN of the hand 72 in the steady state is shorter than
the entire hand length Dh of the hand 72 in the expanded state. The
hand 72 is the steady state in the conveying chamber 80, and when
the tip of the hand 72 is positioned outside the conveying chamber
80 through the front opening 86 or the rear opening 87, the hand 72
becomes the expanded state. With this, the size of the casing 8 in
the first direction X can be reduced.
[0128] In the hand 72 configured as above, the divided end portions
of the optical fiber 34 are rotated and displaced by the rotation
and displacement of the movable portion 72b relative to the
reference portion 72a, but this does not cause the twisting,
bending, expanding, or contracting of the optical fiber 34.
Therefore, the deterioration and bending loss of the optical fiber
34 can be suppressed, the deterioration and bending loss being
caused by repeatedly expanding, contracting, and bending the
optical fiber 34.
MODIFICATION EXAMPLE 6
[0129] Next, the substrate conveying robot 7 according to
Modification Example 6 of Embodiment 2 will be explained. FIG. 19
is a side view of the hand 72 of the substrate conveying robot 7
according to Modification Example 6 of Embodiment 2. FIG. 20 is a
side view of the hand 72 shown in FIG. 19. In the present
modification example and the drawings, the same reference signs are
used for the same or corresponding members as in the substrate
conveying robot 7 of Embodiment 2, and a repetition of the same
explanation is avoided in some cases.
[0130] As shown in FIGS. 19 and 20, the hand 72 of the substrate
conveying robot 7 according to Modification Example 6 includes: the
reference portion 72a coupled to the wrist portion of the arm 71;
the movable portion 72b coupled to the reference portion 72a so as
to be displaceable relative to the reference portion 72a; a
rotational movement mechanism configured to displace the movable
portion 72b relative to the reference portion 72a; and at least one
optical sensor 3.
[0131] The hand 72 includes: the hand base portion 51 coupled to
the wrist portion of the arm 71; and the blade 52 coupled to the
hand base portion 51. The substrate 24 is placed on the blade 52.
The hand base portion 51 is constituted by: the first member 511
coupled to the wrist portion of the arm 71; and the second member
512 coupled to the blade 52. The reference portion 72a of the hand
72 is constituted by the first member 511 of the hand base portion
51, and the movable portion 72b of the hand 72 is constituted by
the second member 512 of the hand base portion 51 and the blade
52.
[0132] The first member 511 and second member 512 of the hand base
portion 51 are coupled to each other by the rotational movement
mechanism such that the second member 512 is rotationally
displaceable relative to the first member 511 in the
upward/downward direction Z. For example, the rotational movement
mechanism is constituted by: a rotational support shaft 47a
extending in the upward/downward direction Z; a bearing 47b
supporting the rotational support shaft 47a; and an actuator 48
configured to cause the second member 512 to rotate relative to the
first member 511. In the present embodiment, the rotational support
shaft 47a is integrally provided at the second member 512, and the
bearing 47b is provided at the first member 511.
[0133] The optical sensor 3 includes: the light projecting portion
31 and light receiving portion 32 provided at the movable portion
72b; the amplifier unit 33 provided at the reference portion 72a;
the optical fiber 34 connecting the light projecting portion 31 and
the amplifier unit 33 and the different optical fiber 34 connecting
the light receiving portion 32 and the amplifier unit 33; and the
lens unit 39 provided at a portion of at least one of the optical
fibers 34. At least one of the optical fibers 34 includes a pair of
divided end portions that are the first divided end portion 341
provided at the reference portion 72a and the second divided end
portion 342 provided at the movable portion 72b, and the first
divided end portion 341 and the second divided end portion 342 are
optically coupled to each other by the lens unit 39 (see FIG.
9).
[0134] In the present Modification Example, the second divided end
portion 342 of the optical fiber 34 is positioned at an end portion
of the rotational support shaft 47a, and the first divided end
portion 341 of the optical fiber 34 is positioned at a deep portion
of a hole of the bearing 47b into which the rotational support
shaft 47a is inserted. The lens unit 39 is provided between the end
portion of the rotational support shaft 47a and the deep portion of
the hole of the bearing 47b. Even when the movable portion 72b of
the hand 72 rotates relative to the reference portion 72a in the
horizontal direction, a position of a center axis of the rotational
support shaft 47a is not displaced relative to the reference
portion 72a. Therefore, it is desirable that the lens unit 39 be
provided on the center axis of the rotational support shaft
47a.
[0135] Since the movable portion 72b rotates relative to the
reference portion 72a around the rotational support shaft 47a in
the horizontal direction, the hand 72 configured as above can
change between the expanded state shown by an upper portion in FIG.
18 and the steady state shown by a lower portion in FIG. 18. The
natural hand length DhN of the hand 72 in the steady state is
shorter than the entire hand length Dh of the hand 72 in the
expanded state. The hand 72 is the steady state in the conveying
chamber 80, and when the tip of the hand 72 is positioned outside
the conveying chamber 80 through the front opening 86 or the rear
opening 87, the hand 72 becomes the expanded state. With this, the
size of the casing 8 in the first direction X can be reduced.
[0136] In the hand 72 configured as above, the divided end portions
of the optical fiber 34 are rotated and displaced by the rotation
and displacement of the movable portion 72b relative to the
reference portion 72a, but this does not cause the twisting,
bending, expanding, or contracting of the optical fiber 34.
Therefore, the deterioration and bending loss of the optical fiber
34 can be suppressed, the deterioration and bending loss being
caused by repeatedly expanding, contracting, and bending the
optical fiber 34.
[0137] The foregoing has explained a case where in the hand 72 of
the substrate conveying robot 7 according to each of Modification
Examples 6 and 7, the reference portion 72a is constituted by the
first member 511 of the hand base portion 51, and the movable
portion 72b is constituted by the second member 512 of the hand
base portion 51 and the blade 52. However, as with Modification
Example 2, the reference portion 72a may be constituted by the hand
base portion 51, and the movable portion 72b may be constituted by
the blade 52.
[0138] The foregoing has explained preferred embodiments (and
modification examples) of the present invention. From the foregoing
explanation, many modifications and other embodiments of the
present invention are obvious to one skilled in the art. Therefore,
the foregoing explanation should be interpreted only as an example
and is provided for the purpose of teaching the best mode for
carrying out the present invention to one skilled in the art. The
structures and/or functional details may be substantially modified
within the scope of the present invention.
REFERENCE SIGNS LIST
[0139] 1 substrate transfer device
[0140] 2 process treatment device
[0141] 3 optical sensor
[0142] 7 substrate conveying robot
[0143] 8 casing
[0144] 15 rail
[0145] 16 slider
[0146] 17 actuator
[0147] 20 treatment device main body
[0148] 21 casing
[0149] 22 treatment chamber
[0150] 24 substrate
[0151] 25 substrate carrier
[0152] 31 light projecting portion
[0153] 32 light receiving portion
[0154] 33 amplifier unit
[0155] 34 optical fiber
[0156] 36 light emitting element
[0157] 37 light receiving element
[0158] 38 control board
[0159] 39 lens unit
[0160] 51 hand base portion
[0161] 52 blade
[0162] 60 container main body
[0163] 61 container door
[0164] 69 lifting drive unit
[0165] 70 lifting shaft
[0166] 71 robot arm
[0167] 72 robot hand
[0168] 72a reference portion
[0169] 72b movable portion
[0170] 73 base
[0171] 74 controller
[0172] 75, 76 link
[0173] 77 to 79 horizontal drive unit
[0174] 80 conveying chamber
[0175] 81 front wall
[0176] 82 rear wall
[0177] 83 side wall
[0178] 84 ceiling plate
[0179] 85 bottom plate
[0180] 86 front opening
[0181] 87 rear opening
[0182] 91 load port
[0183] 92 aligner
[0184] 93 adjuster
[0185] 95 opening frame
[0186] 96 opener door
[0187] 97 support base
[0188] 98 opener
[0189] 100 substrate treatment facility
[0190] 341 first divided end portion
[0191] 342 second divided end portion
[0192] 391 collimate lens
[0193] 392 condensing lens
[0194] 511 first member
[0195] 512 second member
[0196] A1 to A3 joint axis
[0197] L hand longitudinal direction
* * * * *