U.S. patent application number 15/852704 was filed with the patent office on 2018-05-17 for compact light emitting diode chip and light emitting device including the same.
The applicant listed for this patent is Seoul Viosys Co., Ltd.. Invention is credited to Ji Hye Kim, Kyoung Wan Kim, Ye Seul Kim, Sang Won Woo.
Application Number | 20180135809 15/852704 |
Document ID | / |
Family ID | 58523746 |
Filed Date | 2018-05-17 |
United States Patent
Application |
20180135809 |
Kind Code |
A1 |
Kim; Ye Seul ; et
al. |
May 17, 2018 |
COMPACT LIGHT EMITTING DIODE CHIP AND LIGHT EMITTING DEVICE
INCLUDING THE SAME
Abstract
A light emitting diode chip includes: a first conductive type
semiconductor layer disposed on a substrate; a mesa disposed on the
first conductive type semiconductor layer and including an active
layer and a second conductive type semiconductor layer; at least
one groove disposed on a side surface of the mesa forming a concave
region; an extension electrode forming ohmic contact with the first
conductive type semiconductor layer in the concave region; an
insulation layer covering the extension electrode, the first
conductive type semiconductor layer, and the mesa, and including at
least one first opening exposing the extension electrode and a
second opening; a first pad electrode disposed on the insulation
layer and electrically connected to the first conductive type
semiconductor layer through the first opening; and a second pad
electrode disposed on the insulation layer and electrically
connected to the second conductive type semiconductor layer through
the second opening.
Inventors: |
Kim; Ye Seul; (Ansan-si,
KR) ; Kim; Kyoung Wan; (Ansan-si, KR) ; Woo;
Sang Won; (Ansan-si, KR) ; Kim; Ji Hye;
(Ansan-si, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Seoul Viosys Co., Ltd. |
Ansan-si |
|
KR |
|
|
Family ID: |
58523746 |
Appl. No.: |
15/852704 |
Filed: |
December 22, 2017 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
15348192 |
Nov 10, 2016 |
9851056 |
|
|
15852704 |
|
|
|
|
15279549 |
Sep 29, 2016 |
|
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15348192 |
|
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|
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 33/42 20130101;
H01L 33/46 20130101; G06F 1/1662 20130101; F21K 9/232 20160801;
H01L 2224/73204 20130101; H05K 2201/10106 20130101; H01L 33/0095
20130101; H01L 33/22 20130101; H01L 33/32 20130101; H05K 2201/0108
20130101; H01L 33/38 20130101; H01L 2933/0025 20130101; H01L 33/62
20130101; H01L 33/0033 20130101; H05K 1/189 20130101; H01L
2933/0016 20130101; F21Y 2107/70 20160801; H01L 33/06 20130101;
H01L 25/0753 20130101; H01L 33/382 20130101 |
International
Class: |
F21K 9/232 20060101
F21K009/232; G06F 1/16 20060101 G06F001/16; H01L 25/075 20060101
H01L025/075; H01L 33/00 20060101 H01L033/00; H01L 33/06 20060101
H01L033/06; H01L 33/32 20060101 H01L033/32; H01L 33/42 20060101
H01L033/42; H01L 33/46 20060101 H01L033/46; H01L 33/62 20060101
H01L033/62; H05K 1/18 20060101 H05K001/18 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 16, 2015 |
KR |
10-2015-0144997 |
Dec 17, 2015 |
KR |
10-2015-0181128 |
Aug 24, 2016 |
KR |
10-2016-0107578 |
Claims
1. A light emitting diode chip comprising: a substrate; a first
conductive type semiconductor layer disposed on the substrate; a
mesa disposed on the first conductive type semiconductor layer and
comprising an active layer and a second conductive type
semiconductor layer; at least one groove disposed on a side surface
of the mesa forming a concave region; an extension electrode
forming ohmic contact with the first conductive type semiconductor
layer in the concave region; an insulation layer covering the
extension electrode, the first conductive type semiconductor layer,
and the mesa, the insulation layer comprising at least one first
opening exposing the extension electrode and a second opening; a
first pad electrode disposed on the insulation layer and
electrically connected to the first conductive type semiconductor
layer through the at least one first opening; and a second pad
electrode disposed on the insulation layer and electrically
connected to the second conductive type semiconductor layer through
the second opening.
2. The light emitting diode chip according to claim 1, wherein the
insulation layer comprises a plurality of first openings and two of
the first openings are disposed at opposite side surfaces of the
mesa, respectively.
3. The light emitting diode chip according to claim 2, wherein
another one of the first openings is disposed between the two first
openings disposed at opposite side surfaces of the mesa.
4. The light emitting diode chip according to claim 3, wherein the
another one of the first openings is disposed at another side
surface the mesa.
5. The light emitting diode chip according to claim 4, wherein the
another side surface is disposed between the opposite side surfaces
of the mesa.
6. The light emitting diode chip according to claim 2, wherein an
area of the first openings extends beyond the concave regions.
7. The light emitting diode chip according to claim 1, wherein the
extension electrode comprises a portion that extends outside of the
concave region and is disposed parallel to the side surface of the
mesa.
8. The light emitting diode chip according to claim 1, wherein the
first pad directly contacts the extension electrode and the first
conductive type semiconductor layer.
9. The light emitting diode chip according to claim 1, further
comprising a contact electrode disposed on the mesa, the contact
electrode comprising a third opening exposing the and the second
opening that exposes an upper surface of the second conductive type
semiconductor layer.
10. The light emitting diode chip according to claim 9, wherein a
size of the second opening is larger than a size of the third
opening of the contact electrode.
11. The light emitting diode chip according to claim 10, wherein a
size of the at least one first opening is smaller than the size of
third opening of the contact electrode.
12. The light emitting diode chip according to claim 1, wherein a
distance between the first pad electrode and the second pad
electrode is about 3 .mu.m to about 100 .mu.m.
13. The light emitting diode chip according to claim 12, wherein
the distance between the first pad electrode and second pad
electrode is about 80 .mu.m.
14. A light emitting device comprising the light emitting diode
chip according to claim 1, comprising: a second substrate; the
light emitting diode chip disposed on the second substrate; and a
first bonding portion and a second bonding portion interposed
between the light emitting diode chip and the second substrate.
15. The light emitting device according to claim 14, wherein a
shortest distance between the first and second bonding portions is
greater than a shortest distance between the first and second pad
electrodes.
16. The light emitting device according to claim 14, wherein at
least one of the first and second bonding portions at least
partially covers the insulation layer covering the side surface of
the first conductive type semiconductor layer and the mesa.
17. The light emitting device according to claim 16, wherein at
least one of the first and second bonding portions at least
partially covers a lower surface of the substrate of the light
emitting diode chip around the first conductive type semiconductor
layer.
18. The light emitting device according to claim 17, wherein at
least one of the first and second bonding portions at least
partially covers a side surface of the substrate of the light
emitting diode chip.
19. The light emitting device according to claim 14, wherein the
first and second bonding portions consist essentially of solder.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. application Ser.
No. 15/348,192, filed on Nov. 10, 2016, which is a
continuation-in-part of U.S. application Ser. No. 15/279,549, filed
Sep. 29, 2016, and claims priority to and the benefit of Korean
Patent Application No. 10-2015-0144997, filed on Oct. 16, 2015,
Korean Patent Application No. 10-2015-0181128, filed on Dec. 17,
2015, and Korean Patent Application No. 10-2016-0107578, filed on
Aug. 24, 2016, all of which are hereby incorporated by reference
for all purposes as if fully set forth herein.
BACKGROUND
Field
[0002] Exemplary embodiments of the present disclosure relate to a
compact light emitting diode chip, and a light emitting device
including the same.
Discussion of the Background
[0003] Light emitting diodes are used in various products such as
large back light units (BLUs), general lighting, electric products,
small home appliances, and interior products.
[0004] Light emitting diodes can be used not only as a light
source, but also for various purposes including conveying of
information, aesthetic applications, and the like. Therefore,
products including the light emitting diodes are required to have
freedom of design. For example, the light emitting diodes are
mounted on a flexible printed circuit board (FPCB) in order to
allow free deformation of a product. Particularly, there is a need
for products allowing free deformation of the products by
consumers.
[0005] However, since the light emitting diode is produced using,
for example, gallium nitride-based single crystal semiconductors,
the shape of the light emitting diode cannot be changed. However,
if a small light emitting diode is mounted on a flexible circuit
board and the like, a product allowing free deformation thereof can
be produced. Accordingly, there is a need for miniaturization of a
light emitting diode in order to produce a deformable product.
[0006] Generally, most light emitting diodes are mounted on leads
via solder. When the light emitting diodes are mounted on the leads
using the solder, there can be a problem of tilting of the light
emitting diodes due to flowability of the solder. In order to
prevent the light emitting diodes from tilting due to the solder,
grooves may be formed on the leads. However, it is difficult to
form the grooves on the leads on a flexible substrate such as an
FPCB, and when the leads include the grooves thereon, disconnection
is likely to occur upon deformation of a product, thereby causing
deterioration in reliability of the product. Moreover, when small
light emitting diodes are arranged at narrow intervals, the grooves
are formed in many regions on the leads, thereby further
deteriorating product reliability.
[0007] Therefore, there is a need for development of a light
emitting diode chip and a light emitting device, which can secure
high production yield, freedom of design, and suitable durability
for various designs while preventing generation of tilting.
SUMMARY
[0008] Exemplary embodiments of the present disclosure provide a
light emitting diode chip configured to have a minimized area and
thickness while securing high luminous efficacy and high production
yields.
[0009] Exemplary embodiments of the present disclosure provide a
flip-chip type light emitting diode chip configured to prevent
short circuit while reducing electrical characteristic deviation
between produced chips.
[0010] Exemplary embodiments of the present disclosure provide a
light emitting device that includes a compact and slim light
emitting diode chip mounted on a substrate via a bonding layer
having a minimum thickness, thereby realizing a slim structure
while securing good durability.
[0011] Exemplary embodiments of the present disclosure provide a
light emitting diode chip and light emitting device, which can
prevent tilting upon mounting while securing product
durability.
[0012] Exemplary embodiments of the present disclosure provide an
application that includes a compact and slim light emitting diode
chip and/or a light emitting device including the same.
[0013] Additional aspects will be set forth in the detailed
description which follows, and, in part, will be apparent from the
disclosure, or may be learned by practice of the inventive
concept.
[0014] In accordance with one aspect of the present disclosure, a
light emitting diode chip includes: a substrate including
protrusions disposed on an upper surface thereof; a light emitting
structure disposed on the substrate and including a first
conductive type semiconductor layer, a second conductive type
semiconductor layer disposed on the first conductive type
semiconductor layer, and an active layer disposed between the first
and second conductive type semiconductor layers, the light emitting
structure having at least one hole through the second conductive
type semiconductor layer and the active layer and exposing a
portion of the first conductive type semiconductor layer; a contact
electrode disposed on at least part of the second conductive type
semiconductor layer and in ohmic contact with the second conductive
type semiconductor layer and including an optically transparent
conductive oxide; a light reflective insulation layer covering a
side surface and an upper surface of the light emitting structure,
and including a first opening exposing the first conductive type
semiconductor layer exposed through the hole and a second opening
partially exposing the contact electrode, the light reflective
insulation layer including a distributed Bragg reflector (DBR); a
first pad electrode disposed on the light reflective insulation
layer and electrically connected to the first conductive type
semiconductor layer through the first opening; and a second pad
electrode disposed on the light reflective insulation layer and
electrically connected to the contact electrode through the second
opening, wherein a portion of an upper surface of the substrate is
exposed around the light emitting structure, the light reflective
insulation layer adjoins the upper surface of the substrate exposed
through the light emitting structure, and an upper edge of the
substrate is spaced apart from the light reflective insulation
layer.
[0015] In accordance with another aspect of the present disclosure,
a light emitting device includes: a second substrate; a light
emitting diode chip disposed on the second substrate; and a first
substrate including a first bonding portion and a second bonding
portion disposed between the light emitting diode chip and the
second substrate, wherein the light emitting diode chip includes: a
first substrate including protrusions disposed on a lower surface
thereof; a light emitting structure disposed under the first
substrate, and including a second conductive type semiconductor
layer, a first conductive type semiconductor layer disposed above
the second conductive type semiconductor layer and an active layer
disposed between the first and second conductive type semiconductor
layers, the light emitting structure including at least one hole
through the second conductive type semiconductor layer and the
active layer and partially exposing the first conductive type
semiconductor layer; a contact electrode at least partially
disposed under the second conductive type semiconductor layer and
in ohmic contact with the second conductive type semiconductor
layer; a light reflective insulation layer covering a side surface
and a lower surface of the light emitting structure, and including
a first opening exposing the first conductive type semiconductor
layer exposed through the hole and a second opening partially
exposing the contact electrode, the light reflective insulation
layer including a distributed Bragg reflector; a first pad
electrode disposed under the light reflective insulation layer and
electrically connected to the first conductive type semiconductor
layer through the first opening; and a second pad electrode
disposed under the light reflective insulation layer and
electrically connected to the contact electrode through the second
opening, wherein a portion of the lower surface of the first
substrate is exposed around the light emitting structure, the light
reflective insulation layer adjoins the portion of the lower
surface of the first substrate exposed around the light emitting
structure, a lower edge of the first substrate is spaced apart from
the light reflective insulation layer, and the first and second
bonding portions are electrically connected to the first and second
pad electrodes, respectively.
[0016] In accordance with a further aspect of the present
disclosure, a light emitting diode chip includes: a substrate; a
first conductive type semiconductor layer disposed on the
substrate; a mesa disposed on the first conductive type
semiconductor layer and including an active layer and a second
conductive type semiconductor layer; an insulation layer covering
the first conductive type semiconductor layer and the mesa, the
insulation layer including at least one first opening exposing the
first conductive type semiconductor layer and a second opening
disposed on the mesa; a first pad electrode disposed on the
insulation layer and electrically connected to the first conductive
type semiconductor layer through the first opening; and a second
pad electrode disposed on the insulation layer and electrically
connected to the second conductive type semiconductor layer through
the second opening, wherein the first opening of the insulation
layer includes a first region covered by the first pad electrode
and a second region exposed outside the first pad electrode.
[0017] In accordance with yet another aspect of the present
disclosure, a light emitting device includes: a base; conductive
interconnections disposed on the base; the light emitting diode
chip disposed on the base; and first and second bonding materials
bonding the light emitting diode chip to the conductive
interconnections.
[0018] The foregoing general description and the following detailed
description are exemplary and explanatory and are intended to
provide further explanation of the claimed subject matter.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] The accompanying drawings, which are included to provide a
further understanding of the inventive concept, and are
incorporated in and constitute a part of this specification,
illustrate exemplary embodiments of the inventive concept, and,
together with the description, serve to explain principles of the
inventive concept.
[0020] FIG. 1, FIG. 2, and FIG. 3 are plan views and a
cross-sectional view of a light emitting diode chip according to an
exemplary embodiment of the present disclosure.
[0021] FIG. 4 is a cross-sectional view of a light emitting device
according to an exemplary embodiment of the present disclosure.
[0022] FIG. 5A, FIG. 5B, FIG. 6A, FIG. 6B, FIG. 7A, FIG. 7B, FIG.
8A, FIG. 8B, FIG. 9A, FIG. 9B, FIG. 10A, and FIG. 10B are plan
views and cross-sectional views illustrating a method of
fabricating a light emitting diode chip according to exemplary
embodiments of the present disclosure.
[0023] FIG. 11, FIG. 12, and FIG. 13 are plan views of a light
emitting diode chip 100 according to an exemplary embodiment of the
present disclosure.
[0024] FIG. 14 and FIG. 15 are cross-sectional views of a light
emitting diode chip 100 according to an exemplary embodiment of the
present disclosure.
[0025] FIG. 16 is a plan view illustrating a current path of a
light emitting diode chip 100 according to exemplary embodiments of
the present disclosure.
[0026] FIG. 17, FIG. 18, FIG. 19, FIG. 20A, FIG. 20B, FIG. 21A, and
FIG. 21B are plan views and cross-sectional views of a light
emitting diode chip 200 according to another exemplary embodiment
of the present disclosure.
[0027] FIG. 22, FIG. 23, FIG. 24, FIG. 25, and FIG. 26 are plan
views and cross-sectional views of a light emitting diode chip 300
according to a further exemplary embodiment of the present
disclosure.
[0028] FIG. 27, FIG. 28, FIG. 29, FIG. 30, and FIG. 31 are plan
views and cross-sectional views of a light emitting diode chip 400
according to yet another exemplary embodiment of the present
disclosure.
[0029] FIG. 32A, FIG. 32B, FIG. 33A, FIG. 33B, FIG. 34A, FIG. 34B,
FIG. 35A, FIG. 35B, FIG. 36A, FIG. 36B, FIG. 37A, and FIG. 37B are
plan views and cross-sectional views illustrating a method of
fabricating a light emitting diode chip 100 according to another
exemplary embodiment of the present disclosure.
[0030] FIG. 38 is a schematic cross-sectional view of a light
emitting diode chip 100 including a wavelength conversion part
according to an exemplary embodiment of the present disclosure.
[0031] FIG. 39 is a schematic cross-sectional view of a light
emitting diode chip 100 including a wavelength conversion part
according to an exemplary embodiment of the present disclosure.
[0032] FIG. 40 is a schematic perspective view of the light
emitting diode chip of FIG. 39.
[0033] FIG. 41 is a schematic cross-sectional view of a light
emitting device according to an exemplary embodiment of the present
disclosure.
[0034] FIG. 42 is a schematic cross-sectional view of a light
emitting device according to another exemplary embodiment of the
present disclosure.
[0035] FIG. 43 is partially perspective views of applications (a)
and (b) to which a light emitting diode chip according to exemplary
embodiments of the present disclosure is applied.
[0036] FIG. 44 is a schematic view of a light strap according to an
exemplary embodiment of the present disclosure.
[0037] FIG. 45 is a schematic sectional view of an LED lamp
according to an exemplary embodiment of the present disclosure.
[0038] FIG. 46A, FIG. 46B, FIG. 47, and FIG. 48 are a perspective
view, a plan view, a cross-sectional view, and a circuit diagram of
an electronic device according to an exemplary embodiment of the
present disclosure.
[0039] FIG. 49 is a plan view of a flexible keyboard according to
an exemplary embodiment of the present disclosure.
[0040] FIG. 50 is a partially cross-sectional view of the flexible
keyboard of FIG. 49.
DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS
[0041] In the following description, for the purposes of
explanation, numerous specific details are set forth in order to
provide a thorough understanding of various exemplary embodiments.
It is apparent, however, that various exemplary embodiments may be
practiced without these specific details or with one or more
equivalent arrangements. In other instances, well-known structures
and devices are shown in block diagram form in order to avoid
unnecessarily obscuring various exemplary embodiments.
[0042] In the accompanying figures, the size and relative sizes of
layers, films, panels, regions, etc., may be exaggerated for
clarity and descriptive purposes. Also, like reference numerals
denote like elements.
[0043] When an element or layer is referred to as being "on,"
"connected to," or "coupled to" another element or layer, it may be
directly on, connected to, or coupled to the other element or layer
or intervening elements or layers may be present. When, however, an
element or layer is referred to as being "directly on," "directly
connected to," or "directly coupled to" another element or layer,
there are no intervening elements or layers present. For the
purposes of this disclosure, "at least one of X, Y, and Z" and "at
least one selected from the group consisting of X, Y, and Z" may be
construed as X only, Y only, Z only, or any combination of two or
more of X, Y, and Z, such as, for instance, XYZ, XYY, YZ, and ZZ.
Like numbers refer to like elements throughout. As used herein, the
term "and/or" includes any and all combinations of one or more of
the associated listed items.
[0044] Although the terms first, second, etc. may be used herein to
describe various elements, components, regions, layers, and/or
sections, these elements, components, regions, layers, and/or
sections should not be limited by these terms. These terms are used
to distinguish one element, component, region, layer, and/or
section from another element, component, region, layer, and/or
section. Thus, a first element, component, region, layer, and/or
section discussed below could be termed a second element,
component, region, layer, and/or section without departing from the
teachings of the present disclosure.
[0045] Spatially relative terms, such as "beneath," "below,"
"lower," "above," "upper," and the like, may be used herein for
descriptive purposes, and, thereby, to describe one element or
feature's relationship to another element(s) or feature(s) as
illustrated in the drawings. Spatially relative terms are intended
to encompass different orientations of an apparatus in use,
operation, and/or manufacture in addition to the orientation
depicted in the drawings. For example, if the apparatus in the
drawings is turned over, elements described as "below" or "beneath"
other elements or features would then be oriented "above" the other
elements or features. Thus, the exemplary term "below" can
encompass both an orientation of above and below. Furthermore, the
apparatus may be otherwise oriented (e.g., rotated 90 degrees or at
other orientations), and, as such, the spatially relative
descriptors used herein interpreted accordingly.
[0046] The terminology used herein is for the purpose of describing
particular embodiments and is not intended to be limiting. As used
herein, the singular forms, "a," "an," and "the" are intended to
include the plural forms as well, unless the context clearly
indicates otherwise. Moreover, the terms "comprises," "comprising,"
"includes," and/or "including," when used in this specification,
specify the presence of stated features, integers, steps,
operations, elements, components, and/or groups thereof, but do not
preclude the presence or addition of one or more other features,
integers, steps, operations, elements, components, and/or groups
thereof.
[0047] Hereinafter, a light emitting diode chip, a light emitting
device, and various applications thereof will be described. Herein,
the term "light emitting diode chip" means a die separated from a
wafer through an singulation process. Further, the light emitting
diode chip may be provided with a wavelength conversion part before
or after singulation. A structure wherein the wavelength conversion
part is disposed on the light emitting diode chip can be referred
to as the light emitting diode chip or a light emitting device, and
will be classified as the light emitting diode chip in this
specification. On the other hand, the term "light emitting device"
means a structure wherein the light emitting diode chip is mounted
on a secondary substrate or a base. A certain device including a
certain application can be referred to as the light emitting device
so long as the device includes the light emitting diode chip
mounted on the base. Although a device including a single light
emitting diode chip mounted on the base is generally referred to as
the light emitting device in the detailed description, it should be
understood that the light emitting device according to exemplary
embodiments of the present disclosure is not restricted to such
narrow meanings, and can also refer to a light paper, a light
strap, and a keyboard described below.
[0048] Various exemplary embodiments are described herein with
reference to sectional illustrations that are schematic
illustrations of idealized exemplary embodiments and/or
intermediate structures. As such, variations from the shapes of the
illustrations as a result, for example, of manufacturing techniques
and/or tolerances, are to be expected. Thus, exemplary embodiments
disclosed herein should not be construed as limited to the
particular illustrated shapes of regions, but are to include
deviations in shapes that result from, for instance, manufacturing.
For example, an implanted region illustrated as a rectangle will,
typically, have rounded or curved features and/or a gradient of
implant concentration at its edges rather than a binary change from
implanted to non-implanted region. Likewise, a buried region formed
by implantation may result in some implantation in the region
between the buried region and the surface through which the
implantation takes place. Thus, the regions illustrated in the
drawings are schematic in nature and their shapes are not intended
to illustrate the actual shape of a region of a device and are not
intended to be limiting.
[0049] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
disclosure is a part. Terms, such as those defined in commonly used
dictionaries, should be interpreted as having a meaning that is
consistent with their meaning in the context of the relevant art
and will not be interpreted in an idealized or overly formal sense,
unless expressly so defined herein.
[0050] A light emitting diode chip, a light emitting device, and an
electronic apparatus according to exemplary embodiments of the
present disclosure may be realized in various ways.
[0051] According to various exemplary embodiments, a light emitting
diode chip includes: a substrate including protrusions disposed on
an upper surface thereof; a light emitting structure disposed on
the substrate and including a first conductive type semiconductor
layer, a second conductive type semiconductor layer disposed on the
first conductive type semiconductor layer, and an active layer
disposed between the first and second conductive type semiconductor
layers, the light emitting structure having at least one hole
through the second conductive type semiconductor layer and the
active layer and exposing a portion of the first conductive type
semiconductor layer; a contact electrode disposed on at least part
of the second conductive type semiconductor layer, in ohmic contact
with the second conductive type semiconductor layer, and including
an optically transparent conductive oxide; a light reflective
insulation layer covering a side surface and an upper surface of
the light emitting structure, and including a first opening
exposing the first conductive type semiconductor layer exposed
through the hole and a second opening partially exposing the
contact electrode, the light reflective insulation layer including
a distributed Bragg reflector; a first pad electrode disposed on
the light reflective insulation layer and electrically connected to
the first conductive type semiconductor layer through the first
opening; and a second pad electrode disposed on the light
reflective insulation layer and electrically connected to the
contact electrode through the second opening, wherein a portion of
an upper surface of the substrate is exposed around the light
emitting structure, the light reflective insulation layer adjoins
the upper surface of the substrate exposed through the light
emitting structure, and an upper edge of the substrate is spaced
apart from the light reflective insulation layer.
[0052] The light emitting diode chip may have a thickness of 40
.mu.m to 90 .mu.m.
[0053] The light emitting diode chip may have a horizontal
cross-sectional area of 30,000 .mu.m.sup.2 to 65,000
.mu.m.sup.2.
[0054] Drive current for operation of the light emitting diode chip
may be configured to have a current density of 7 mA/mm.sup.2 to 250
mA/mm.sup.2.
[0055] A total area of the first pad electrode and the second pad
electrode may range from 80% to 95% of a horizontal cross-sectional
area of the light emitting diode chip.
[0056] A shortest distance between the first pad electrode and the
second pad electrode may range from 3 .mu.m to 20 .mu.m.
[0057] Some of the protrusions disposed on the upper surface of the
substrate may be covered by the light reflective insulation
layer.
[0058] The other protrusions disposed on the upper surface of the
substrate may be exposed.
[0059] The contact electrode may cover an upper surface of the
second conductive type semiconductor layer, and may include a third
opening exposing the hole of the light emitting structure and at
least one fourth opening partially exposing the second conductive
type semiconductor layer.
[0060] The fourth opening may have a smaller width than the second
opening and an upper surface of the contact electrode may partially
adjoin the second pad electrode.
[0061] The substrate may include a patterned sapphire
substrate.
[0062] The first pad electrode may include a depression on an upper
surface thereof and disposed at a location corresponding to the
first opening, and the second pad electrode may include a
depression on an upper surface thereof and disposed at a location
corresponding to the second opening.
[0063] According to various exemplary embodiments of the present
disclosure, a light emitting device includes: a second substrate; a
light emitting diode chip disposed on the second substrate; and a
first substrate including a first bonding portion and a second
bonding portion disposed between the light emitting diode chip and
the second substrate, wherein the light emitting diode chip
includes: a first substrate including protrusions disposed on a
lower surface thereof; a light emitting structure disposed under
the first substrate, and including a second conductive type
semiconductor layer, a first conductive type semiconductor layer
disposed above the second conductive type semiconductor layer and
an active layer disposed between the first and second conductive
type semiconductor layers, the light emitting structure including
at least one hole through the second conductive type semiconductor
layer and the active layer and partially exposing the first
conductive type semiconductor layer; a contact electrode at least
partially disposed under the second conductive type semiconductor
layer and in ohmic contact with the second conductive type
semiconductor layer; a light reflective insulation layer covering a
side surface and a lower surface of the light emitting structure,
and including a first opening exposing the first conductive type
semiconductor layer exposed through the hole and a second opening
partially exposing the contact electrode, the light reflective
insulation layer including a distributed Bragg reflector; a first
pad electrode disposed under the light reflective insulation layer
and electrically connected to the first conductive type
semiconductor layer through the first opening; and a second pad
electrode disposed under the light reflective insulation layer and
electrically connected to the contact electrode through the second
opening, wherein a portion of the lower surface of the first
substrate is exposed around the light emitting structure, the light
reflective insulation layer adjoins the portion of the lower
surface of the first substrate exposed around the light emitting
structure, a lower edge of the first substrate is spaced apart from
the light reflective insulation layer, and the first and second
bonding portions are electrically connected to the first and second
pad electrodes, respectively.
[0064] A shortest distance between the first and second bonding
portions may be greater than a shortest distance between the first
and second pad electrodes.
[0065] At least one of the first and second bonding portions may at
least partially cover the light reflective insulation layer
covering the side surface of the light emitting structure.
[0066] At least one of the first and second bonding portions may at
least partially cover the lower surface of the first substrate
exposed around the light emitting structure.
[0067] At least one of the first and second bonding portions may at
least partially cover a side surface of the first substrate.
[0068] The first and second bonding portions may include
solder.
[0069] According to various exemplary embodiments of the present
disclosure, an electronic apparatus including an input device
further includes at least one of light emitting diode chips and
light emitting devices according to exemplary embodiments of the
present disclosure.
[0070] The input device may include a keyboard with a plurality of
keys. The plurality of keys may include a luminous region disposed
on upper surfaces thereof and light discharged through the luminous
region may be emitted from the light emitting diode chip or the
light emitting device.
[0071] The input device may include a keyboard with a plurality of
keys. The plurality of keys may include a luminous region disposed
on upper surfaces thereof, the light emitting diode chip may be
disposed under at least some of the plurality of keys, and light
emitted from the light emitting diode chip or the light emitting
device may be discharged through the luminous region.
[0072] According to various exemplary embodiments of the present
disclosure, a light emitting diode chip includes: a substrate; a
first conductive type semiconductor layer disposed on the
substrate; a mesa disposed on the first conductive type
semiconductor layer and including an active layer and a second
conductive type semiconductor layer; an insulation layer covering
the first conductive type semiconductor layer and the mesa, the
insulation layer including at least one first opening exposing the
first conductive type semiconductor layer and a second opening
disposed on the mesa; a first pad electrode disposed on the
insulation layer and electrically connected to the first conductive
type semiconductor layer through the first opening; and a second
pad electrode disposed on the insulation layer and electrically
connected to the second conductive type semiconductor layer through
the second opening, wherein the first opening of the insulation
layer includes a first region covered by the first pad electrode
and a second region exposed outside the first pad electrode.
[0073] Through addition of the second region, the first opening can
be formed in a relatively large size, thereby stabilizing a process
of forming the first opening in a limited design range. As a
result, it is possible to facilitate manufacture of the light
emitting diode chip. Furthermore, since the second region is placed
outside the first pad electrode, the second region does not affect
a contact area of the first pad electrode. Accordingly, even in the
case where the size of the first opening is changed due to
tolerance in the manufacturing process, change in the contact area
of the first pad electrode can be relieved, thereby reducing
deviation in electrical characteristics such as forward voltage
between light emitting diode chips.
[0074] The insulation layer may include a plurality of first
openings, and among the first openings, two first openings may be
disposed at opposite side surfaces of the mesa, respectively. In
addition, one of the first openings may be disposed at one side
surface of the mesa between the opposite side surfaces thereof.
With the first openings disposed at the side surfaces of the mesa,
the light emitting diode chip can prevent reduction in area of the
mesa while achieving uniform current spreading in the mesa.
[0075] The mesa may include a plurality of grooves depressed from
side surfaces thereof, and the plurality of first openings may
partially expose the first conductive type semiconductor layer
exposed through the plurality of grooves, respectively.
[0076] In some exemplary embodiments, the mesa may further include
a through-hole that exposes the first conductive type semiconductor
layer, and the insulation layer may further include an opening
exposing the first conductive type semiconductor layer in the
through-hole. The first pad electrode may be electrically connected
to the first conductive type semiconductor layer through the
through-hole. The structure wherein the through-hole is formed in
the mesa can aid current spreading in the mesa.
[0077] The through-hole may be disposed between the grooves
disposed at the opposite side surfaces of the mesa. However, it
should be understood that other implementations are also possible
and the location of the through-hole can be changed.
[0078] The second region of the first opening may partially expose
a side surface of the first conductive type semiconductor layer.
Accordingly, the first opening may be formed in a relatively large
size.
[0079] The light emitting diode chip may further include a contact
electrode disposed between the mesa and the insulation layer to
contact the second conductive type semiconductor layer, and the
second pad electrode may be connected to the contact electrode.
[0080] The contact electrode may include a third opening, which may
be placed inside the second opening. Accordingly, part of the
contact electrode is exposed to the second opening and the second
pad electrode may be connected to the contact electrode and the
second conductive type semiconductor layer in the second
opening.
[0081] In some exemplary embodiments, the contact electrode may be
a transparent electrode through which light generated in the active
layer passes. Furthermore, light generated in the active layer may
be discharged through the substrate and through a region between
the first and second pad electrodes. Accordingly, a light emitting
diode chip capable of emitting light in opposite directions can be
provided.
[0082] The light emitting diode chip may further include an
extension electrode disposed on the first conductive type
semiconductor layer, the first opening of the insulation layer may
partially expose the extension electrode, and the first pad
electrode may be connected to the extension electrode through the
first opening.
[0083] In some exemplary embodiments, the light emitting diode chip
may further include a wavelength conversion part disposed on the
substrate. The wavelength conversion part may cover an upper
surface and a side surface of the substrate.
[0084] According to various exemplary embodiments of the present
disclosure, a light emitting device includes: a base; conductive
interconnections disposed on the base; the light emitting diode
chip disposed on the base; and first and second bonding materials
bonding the light emitting diode chip to the conductive
interconnections, wherein the first and second bonding materials
bond the first and second pad electrodes of the light emitting
diode chip to the conductive interconnections, respectively.
[0085] The first bonding material may contact the first conductive
type semiconductor layer exposed to the second region. Although the
first bonding material contacts the first conductive type
semiconductor layer, there is no problem of short circuit.
Furthermore, the first bonding material may form Schottky contact
with the first conductive type semiconductor layer, whereby the
light emitting diode chip does not suffer from change in forward
voltage even in the structure wherein the first bonding material
contacts the first conductive type semiconductor layer.
[0086] A distance between the conductive interconnections may be
greater than the distance between the first and second pad
electrodes.
[0087] The first bonding material and the second bonding material
may partially cover side surfaces of the conductive
interconnections.
[0088] The base may be a flexible film, for example, a flexible
transparent film. The base may have a variety of shapes, for
example, a paper shape having a wide area or an elongated strap
shape. With this structure, the light emitting device may be
provided in the form of a light paper, a light strap or band, a
keyboard, and the like.
[0089] According to various exemplary embodiments of the present
disclosure, various applications to which the light emitting diode
chip is applied are provided.
[0090] Hereinafter, exemplary embodiments of the present disclosure
will be described in detail with reference to the accompanying
drawings. The following embodiments are provided by way of example
so as to fully convey the spirit of the present disclosure to those
skilled in the art to which the present disclosure pertains.
Accordingly, the present disclosure is not limited to the
embodiments disclosed herein and can also be implemented in
different forms. In the drawings, widths, lengths, thicknesses, and
the like of elements can be exaggerated for clarity and descriptive
purposes. When an element or layer is referred to as being
"disposed above" or "disposed on" another element or layer, it can
be directly "disposed above" or "disposed on" the other element or
layer or intervening elements or layers can be present. Throughout
the specification, like reference numerals denote like elements
having the same or similar functions.
[0091] FIG. 1, FIG. 2, and FIG. 3 are plan views and a
cross-sectional view of a light emitting diode chip according to
one exemplary embodiment of the present disclosure. Specifically,
FIG. 1 is a plan view of a light emitting diode chip 50 and FIG. 2
is a plan view of a mesa 120m and a contact electrode 130, in which
first and second pad electrodes 151, 153 and a light reflective
insulation layer 140 are omitted for convenience of description.
FIG. 3 is a cross-sectional view taken along line A-A' of FIG. 1
and FIG. 2.
[0092] Referring to FIG. 1 to FIG. 3, the light emitting diode chip
50 includes a substrate 110, a light emitting structure 120, a
contact electrode 130, a light reflective insulation layer 140, a
first pad electrode 151, and a second pad electrode 153.
[0093] The light emitting diode chip 50 may be a compact light
emitting diode chip having a relatively small horizontal area. The
light emitting diode chip 50 may have a horizontal cross-sectional
area of about 65,000 .mu.m.sup.2 or less, specifically about 30,000
.mu.m.sup.2 to about 65,000 .mu.m.sup.2. For example, the light
emitting diode chip 50 may have a size of 230 .mu.m.times.180 .mu.m
or 250 .mu.m.times.200 .mu.m. It should be understood that the size
of the light emitting diode chip 50 according to exemplary
embodiments is not limited thereto. In some exemplary embodiments,
the light emitting diode chip 50 may be a compact light emitting
diode chip having a relatively slim thickness. The light emitting
diode chip 50 may have a thickness T1 of about 90 .mu.m or less,
specifically a thickness T1 of about 40 .mu.m to 90 .mu.m. Drive
current for operation of the light emitting diode chip 50 may have
a current density of 7 mA/mm.sup.2 to 250 mA/mm.sup.2. With the
horizontal cross-sectional area and thickness as described above,
the light emitting diode chip 50 according to the exemplary
embodiments can be easily applied to various electronic apparatuses
that require compact and/or slim light emitting devices.
[0094] The substrate 110 may be an insulating or conductive
substrate. The substrate 110 may be a growth substrate for growth
of the light emitting structure 120, and may include a sapphire
substrate, a silicon carbide (SiC) substrate, a silicon (Si)
substrate, a gallium nitride (GaN) substrate, an aluminum nitride
(AlN) substrate, and the like. The substrate 110 may include a
plurality of protrusions 110p disposed on some region of an upper
surface thereof. On the substrate 110, the plurality of protrusions
110p may be disposed in a regular and/or irregular pattern. For
example, the substrate 110 may include a patterned sapphire
substrate (PSS) having a plurality of protrusions 110p disposed on
an upper surface thereof.
[0095] Furthermore, the substrate 110 may include at least one
modification region 111 having a band shape and extending from at
least one side surface of the substrate 110 in the horizontal
direction. The modification region 111 may be disposed during
division of the substrate 110 for diode isolation. For example, the
modification region 111 may be formed through internal machining of
the substrate 110 using internal machining equipment (for example,
a stealth dicing machine). A scribing plane may be formed inside
the substrate 110 using an internal machining laser. In this
exemplary embodiment, a distance from the modification region 111
to a lower surface of the substrate 110 may be smaller than a
distance from the modification region 111 to an upper surface of
the substrate 110. In consideration of light emitted through a side
surface of the light emitting diode chip 50, laser machining is
performed relatively near the lower surface of the substrate 110
such that the modification region 111 is disposed relatively near
the lower surface of the substrate 110, thereby improving
extraction of light from the light emitting structure 120. Further,
the structure wherein the modification region 111 is disposed near
the light emitting structure 120 can have problems with electrical
characteristics due to damage to the nitride-based semiconductors
upon laser machining. Accordingly, with the structure wherein the
modification region 111 is disposed near the lower surface of the
substrate 110, it is possible to prevent deterioration in
reliability and luminous efficacy of the light emitting diode chip
50 due to damage to the light emitting structure 120.
[0096] The light emitting structure 120 is disposed on the
substrate 110. A lower surface of the light emitting structure 120
may have a smaller area than the upper surface of the substrate
110, whereby the upper surface of the substrate 110 can be exposed
in at least some region around the light emitting structure 120.
Some of the plurality of protrusions 110p may be disposed between
the light emitting structure 120 and the substrate 110, and the
other protrusions 110p may be exposed around the light emitting
structure 120.
[0097] With the structure wherein the upper surface of the
substrate 110 is partially exposed around the light emitting
structure 120, the light emitting diode chip 50 can prevent damage
to the light emitting structure 120 by suppressing wafer bowing
during fabrication thereof, thereby improving production yield. In
addition, the light emitting diode chip can reduce stress applied
to the light emitting structure 120 by suppressing wafer bowing,
thereby allowing the substrate 110 to be machined to a slimmer
thickness. As a result, the light emitting diode chip 50 can have a
slim structure having a thickness of about 90 .mu.m or less. This
structure will be described in more detail in the following
exemplary embodiments.
[0098] The light emitting structure 120 may include at least one
hole 120h through the active layer 123 and the second conductive
type semiconductor layer 125 and at least partially exposing the
first conductive type semiconductor layer 121. The hole 120h
exposes at least part of the first conductive type semiconductor
layer 121 and a side surface of the hole 120h may be surrounded by
the active layer 123 and the second conductive type semiconductor
layer 125. In addition, the light emitting structure 120 may
include a mesa 120m that includes the active layer 123 and the
second conductive type semiconductor layer 125. The mesa 120m is
disposed on the first conductive type semiconductor layer 121. The
hole 120h may be formed through the mesa 120m so as to be
surrounded by the mesa 120m. It should be understood that the light
emitting diode chip 50 according to this exemplary embodiment may
have any structure wherein the first conductive type semiconductor
layer 121 is exposed through the hole 120h, and can omit the mesa
120m.
[0099] The contact electrode 130 is disposed on the second
conductive type semiconductor layer 125. The contact electrode 130
may be in ohmic contact with the second conductive type
semiconductor layer 125. The contact electrode 130 may include a
transparent electrode. The transparent electrode may include at
least one of, for example, optically transparent conductive oxides
such as indium tin oxide (ITO), zinc oxide (ZnO), zinc indium tin
oxide (ZITO), zinc indium oxide (ZIO), zinc tin oxide (ZTO),
gallium indium tin oxide (GITO), gallium indium oxide (GIO),
gallium zinc oxide (GZO), aluminum doped zinc oxide (AZO), fluorine
tin oxide (FTO), and optically transparent metals such as Ni/Au.
The conductive oxides may further include various dopants.
[0100] Particularly, the contact electrode 130 including the
optically transparent conductive oxide has high efficiency in
formation of an ohmic contact with the second conductive type
semiconductor layer 125. That is, since contact resistance between
a conductive oxide such as ITO or ZnO and the second conductive
type semiconductor layer 125 is lower than contact resistance
between a metallic electrode and the second conductive type
semiconductor layer 125, the contact electrode 130 including the
conductive oxide can reduce forward voltage V.sub.f of the light
emitting diode chip 50, thereby improving luminous efficacy.
Particularly, in a compact light emitting diode chip driven by
relatively low current density like the light emitting diode chip
50 according to this exemplary embodiment, the contact resistance
between the contact electrode 130 and the second conductive type
semiconductor layer 125 is reduced so as to improve ohmic contact
characteristics, thereby more effectively improving luminous
efficacy. Further, since the conductive oxide has a lower
probability of peeling off of the nitride-based semiconductor layer
than the metallic electrode, the light emitting diode chip 50
having the contact electrode 130 including the conductive oxide has
high reliability. On the other hand, although the conductive oxide
has lower lateral current spreading efficiency than the metallic
electrode, the light emitting diode chip 50 according to this
exemplary embodiment has a horizontal cross-sectional area of about
65,000 .mu.m or less and thus suffers from insignificant or no
deterioration in luminous efficacy caused by deterioration in
current spreading efficiency. In this way, the contact electrode
130 including the conductive oxide is applied to the light emitting
diode chip 50, thereby improving electrical characteristics and
luminous efficacy.
[0101] The contact electrode 130 may have a thickness of about
2,000 .ANG. to 3,000 .ANG., without being limited thereto. For
example, the contact electrode 130 including ITO may have a
thickness of about 2,400 .ANG.. Within this thickness range of the
contact electrode 130, the light emitting diode chip 50 can exhibit
improved electrical characteristics by efficiently spreading
electric current in the lateral direction.
[0102] In addition, the contact electrode 130 includes a first
opening 130a exposing the at least one hole 120h. The first opening
130a may be disposed such that a side surface of the first opening
130a is separated from the at least one hole 120h while being
surrounded by the at least one hole 120h. In this exemplary
embodiment, the first opening 130a may have a greater size than the
hole 120h. The contact electrode 130 may be disposed to cover
substantially the entirety of an upper surface of the second
conductive type semiconductor layer 125, thereby improving current
spreading efficiency upon operation of the light emitting diode
chip 50. Furthermore, the contact electrode 130 may further include
at least one second opening 130b that partially exposes the second
conductive type semiconductor layer 125. A structure wherein the
second pad electrode 153 described below is disposed to fill at
least part of the second opening 130b can increase a contact area
of the second pad electrode 153. With this structure, the light
emitting diode chip can effectively prevent the second pad
electrode 153 from peeling off of the contact electrode 130 or the
light emitting structure 120. This structure will be described in
more detail below.
[0103] The light reflective insulation layer 140 covers an upper
surface and a side surface of the light emitting structure 120 and
also covers the contact electrode 130. In addition, the light
reflective insulation layer 140 may extend to the exposed portion
of the upper surface of the substrate 110 around the light emitting
structure 120. In this structure, the light reflective insulation
layer 140 may adjoin the upper surface of the substrate 110 and
thus can be more stably disposed while covering the side surface of
the light emitting structure 120. Here, the light reflective
insulation layer 140 does not extend to an upper edge of the
substrate 110 such that the upper surface of the substrate 110 near
the upper edge of the substrate 110 is exposed. Further, the light
reflective insulation layer 140 may include a third opening 140a
that partially exposes the first conductive type semiconductor
layer 121 exposed through the at least one hole 120h, and a fourth
opening 140b that partially exposes the contact electrode 130.
[0104] The third opening 140a of the light reflective insulation
layer 140 partially exposes the first conductive type semiconductor
layer 121 exposed through the at least one hole 120h. In this
structure, the side surface of the hole 120h is covered by the
light reflective insulation layer 140 so as to prevent short
circuit. The third opening 140a may be used as a passage for
electrical connection between the first conductive type
semiconductor layer 121 and the first pad electrode 151. The fourth
opening 140b of the light reflective insulation layer 140 partially
exposes the contact electrode 130. The fourth opening 140b may be
used as a passage for electrical connection between the contact
electrode 130 and the second pad electrode 153. In some exemplary
embodiments, the fourth opening 140b is positioned at a location
corresponding to the second opening 130b of the contact electrode
130. The fourth opening 140b has a greater size than the second
opening 130b such that an upper surface of the contact electrode
130 is partially exposed through the fourth opening 140b.
[0105] The light reflective insulation layer 140 may include a
distributed Bragg reflector (DBR). The distributed Bragg reflector
may be formed by repeatedly stacking dielectric layers having
different indices of refraction and including, for example,
TiO.sub.2, SiO.sub.2, HfO.sub.2, ZrO.sub.2, Nb.sub.2O.sub.5,
MgF.sub.2, and the like. In some exemplary embodiments, the light
reflective insulation layer 140 may have an alternating structure
of TiO.sub.2/SiO.sub.2 layers. The distributed Bragg reflector may
be composed of 4 to 20 pairs of layers each having an optical
thickness equal to one-quarter of a particular wavelength. An
uppermost layer of the light reflective insulation layer 140 may be
formed of SiN.sub.X. The layer of SiN.sub.X has good moisture
resistance to protect the light emitting diode chip from
moisture.
[0106] In the structure wherein the light reflective insulation
layer 140 includes the distributed Bragg reflector, a lowermost
layer of the light reflective insulation layer 140 can act as a
base layer or an interface layer capable of improving film quality
of the distributed Bragg reflector. As shown in an enlarged view of
FIG. 3, the light reflective insulation layer 140 may include an
interface layer 141 having a relatively thick thickness and a stack
structure 143 of dielectric layers stacked on the interface layer
141 and having different indices of refraction. For example, the
light reflective insulation layer 140 may include an interface
layer 141 having a thickness of about 0.2 .mu.m to about 1.0 .mu.m
and formed of SiO.sub.2 and a stack structure 143 in which
TiO.sub.2/SiO.sub.2 layers are repeatedly stacked in a
predetermined cycle on the interface layer 141.
[0107] The distributed Bragg reflector may have a relatively high
reflectivity with respect to visible light. The distributed Bragg
reflector may be configured to have a reflectivity of 90% or higher
with respect to light having an angle of incidence of 0.degree. to
60.degree. at a wavelength of 400 nm to 700 nm. The distributed
Bragg reflector having this reflectivity can be provided by
controlling the kinds, thickness and stacking cycle of the
dielectric layers constituting the distributed Bragg reflector. As
a result, it is possible to form a distributed Bragg reflector
having high reflectivity with respect to light having relatively
long wavelengths (for example, 550 nm to 700 nm) and light having
relatively short wavelengths (for example, 400 nm to 550 nm).
[0108] In this way, the distributed Bragg reflector may include a
multilayer structure so as to have high reflectivity with respect
to light in a broad wavelength band. That is, the distributed Bragg
reflector may include a first stack structure in which dielectric
layers having a first thickness are stacked one above another and a
second stack structure in which dielectric layers having a second
thickness are stacked one above another. For example, the
distributed Bragg reflector may include a first stack structure in
which dielectric layers having a smaller thickness than an optical
thickness equal to one-quarter of a central wavelength (about 550
nm) of visible light are stacked one above another and a second
stack structure in which dielectric layers having a greater
thickness than the optical thickness equal to one-quarter of the
central wavelength (about 550 nm) of visible light are stacked one
above another. In some exemplary embodiments, the distributed Bragg
reflector may further include a third stack structure in which a
dielectric layer having a greater thickness than the optical
thickness equal to one-quarter of the central wavelength (about 550
nm) of visible light and a dielectric layer having a smaller
thickness than the optical thickness equal to one-quarter of the
central wavelength (about 550 nm) of visible light are repeatedly
stacked one above another.
[0109] The light reflective insulation layer 140 may partially
cover the exposed portion of the upper surface of the substrate
110. In this exemplary embodiment, the light reflective insulation
layer 140 may partially cover the protrusions 110p on the exposed
portion of the upper surface of the substrate 110. As shown in the
enlarged view of FIG. 3, the light reflective insulation layer 140
may cover some of the exposed protrusions 110p. A surface of the
light reflective insulation layer 140 covering the upper surface of
the substrate 110 may generally have a similar profile to that of
the surface of the substrate 110. The light reflective insulation
layer 140 is disposed to cover the exposed protrusions 110p of the
substrate 110, thereby improving luminous efficacy of the light
emitting diode chip 50 by reflecting light scattered by the exposed
protrusions 110p.
[0110] Luminous efficacy of the light emitting diode chip 50 can be
improved through reflection of light by the distributed Bragg
reflector of the light reflective insulation layer 140 covering
substantially the entirety of the upper surface and the side
surface of the light emitting structure 120. Particularly, light
having passed through the contact electrode 130, which includes the
conductive oxide capable of improving electrical characteristics of
the light emitting diode chip 50, can be discharged through the
lower surface of the substrate 110 through reflection by the light
reflective insulation layer 140. Further, since the light
reflective insulation layer 140 also covers the side surface of the
light emitting structure 120, light traveling towards the side
surface of the light emitting structure 120 is also reflected by
the light reflective insulation layer 140 to be discharged through
the lower surface of the substrate 110. Furthermore, since the
upper surface of the substrate 110 around the light emitting
structure 120 is exposed, the light reflective insulation layer 140
adjoins the upper surface of the substrate 110 such that the side
surface of the light emitting structure 120 can be more stably
covered by the light reflective insulation layer 140, thereby
minimizing light loss through the side surface of the light
emitting structure 120.
[0111] In the structure wherein the light reflective insulation
layer 140 adjoins the upper surface of the substrate 110, the upper
surface of the substrate 110 near the upper edge thereof is
exposed. That is, the upper edge of the substrate 110 is separated
from the light reflective insulation layer 140. Accordingly, it is
possible to prevent damage (for example, peeling, breakage, and the
like) to the light reflective insulation layer 140 by a laser beam
upon division of the substrate 110 (for example, through internal
dicing, scribing and/or breaking) in the course of dividing a wafer
to form a plurality of light emitting diode chips 100.
Particularly, in the structure wherein the light reflective
insulation layer 140 includes the distributed Bragg reflector,
damage to the light reflective insulation layer 140 can cause
deterioration in light reflectivity. According to this exemplary
embodiment, it is possible to prevent deterioration in light
reflectivity due to such damage to the light reflective insulation
layer 140. This will be described in more detail below in the
following exemplary embodiments.
[0112] The first pad electrode 151 and the second pad electrode 153
are disposed on the light reflective insulation layer 140. The
first pad electrode 151 may be in ohmic contact with the first
conductive type semiconductor layer 121 through the third opening
140a and the second pad electrode 153 may be electrically connected
to the contact electrode 130 through the fourth opening 140b. In
the structure wherein the contact electrode 130 includes the second
opening 130b, the second pad electrode 153 may contact the second
conductive type semiconductor layer 125. In this structure,
however, since contact resistance between the second pad electrode
153 and the second conductive type semiconductor layer 125 is
higher than contact resistance between the second pad electrode 153
and the contact electrode 130, electric current flowing through the
second pad electrode 153 is highly likely to flow to the contact
electrode 130. For example, the second pad electrode 153 and the
second conductive type semiconductor layer 125 can form a Schottky
contact. Accordingly, current crowding caused by contact between
the second pad electrode 153 and the second conductive type
semiconductor layer 125 can be minimized.
[0113] Each of the first pad electrode 151 and the second pad
electrode 153 may have an upper surface profile corresponding to a
lower surface profile thereof. Accordingly, the first pad electrode
151 may include a depression 151a disposed above the third opening
140a and the second pad electrode 153 may include a depression 153a
disposed above the fourth opening 140b. In this way, since the
lower surface of each of the first and second pad electrodes 151,
153 has a step, each of the first and second pad electrodes 151,
153 has an increased contact area and the step is disposed at a
contact portion of each of the first and second pad electrodes 151,
153, thereby preventing peeling of the first and second pad
electrodes 151, 153. Particularly, in the structure wherein the
contact electrode 130 includes the second opening 130b, the
depression 153a of the second pad electrode 153 has a step, thereby
more effectively preventing peeling of the second pad electrode
153.
[0114] A shortest distance D1 between the first pad electrode 151
and the second pad electrode 153 may be a very small value, for
example, about 3 .mu.m to about 20 .mu.m. Since the light
reflective insulation layer 140 covering the side surface of the
light emitting structure 120 can be stably formed, the light
emitting diode chip 50 may be disposed so as to allow bonding
portions 211, 213 bonded to a second substrate 300 to cover the
side surface of the light emitting diode chip 50, as described in
the following exemplary embodiments. In this structure, since there
is no need for process margin through the shortest distance D1
between the first pad electrode 151 and the second pad electrode
153, the shortest distance D1 between the first pad electrode 151
and the second pad electrode 153 can be reduced as much as
possible. In addition, since the compact light emitting diode chip
50 according to this exemplary embodiment can be operated by
relatively low current density, the shortest distance between the
first pad electrode 151 and the second pad electrode 153 can be
further reduced. Within the above range of the shortest distance D1
between the first pad electrode 151 and the second pad electrode
153, the light emitting diode chip 50 can have further improved
heat dissipation efficiency. In this exemplary embodiment, a total
area of the first pad electrode 151 and the second pad electrode
153 may range from about 80% to 95% of a horizontal cross-sectional
area of the light emitting diode chip 50.
[0115] FIG. 4 is a cross-sectional view of a light emitting device
according to one exemplary embodiment of the present
disclosure.
[0116] Referring to FIG. 4, the light emitting device according to
an exemplary embodiment may include a second substrate 300, a light
emitting diode chip 50 disposed on the second substrate 300, a
first bonding portion 211, and a second bonding portion 213.
[0117] The second substrate 300 may provide a region on which the
light emitting diode chip 50 will be mounted, and may include, for
example, a substrate of a light emitting diode package or a
substrate of a light emitting module. The second substrate 300 may
include a base 310 and first and second conductive patterns 321,
323 disposed on the base 310. The second substrate 300 may include
a conductive substrate, an insulating substrate, or a printed
circuit board (PCB). For example, as shown in FIG. 4, the second
substrate 300 may include an insulating base 310 and first and
second conductive patterns 321, 323 disposed on the base 310 and
separated from each other to be electrically isolated from each
other. For example, the first and second conductive patterns 321,
323 may be separated from each other by a distance D3 to be
electrically isolated from each other. In this exemplary
embodiment, the first and second conductive patterns 321, 323 may
be electrically connected to the first pad electrode 151 and the
second pad electrode 153 of the light emitting diode chip 50,
respectively. It should be understood that other implementations
are also possible. For example, the second substrate 300 may have
any structure so long as the second substrate can provide a region
on which the light emitting diode chip 50 will be mounted, and can
form electrical connection to the light emitting diode chip 50.
[0118] The light emitting diode chip 50 is disposed on the second
substrate 300 and electrically connected to the second substrate
300. The light emitting diode chip 50 may be the light emitting
diode chip 50 according to the exemplary embodiments described with
reference to FIG. 1 to FIG. 3.
[0119] The first bonding portion 211 and the second bonding portion
213 are interposed between the light emitting diode chip 50 and the
second substrate 300 so as to bond and electrically connect the
light emitting diode chip 50 to the second substrate 300. The first
bonding portion 211 may contact the first pad electrode 151 of the
light emitting diode chip 50 and the first conductive pattern 321
of the second substrate 300. Likewise, the second bonding portion
213 may contact the second pad electrode 153 of the light emitting
diode chip 50 and the second conductive pattern 321 of the second
substrate 300. The first and second bonding portions 211, 213 may
be formed of any material so long as the material can electrically
connect the light emitting diode chip 50 to the second substrate
300 while bonding the same, and may include, for example,
solder.
[0120] In addition, at least one of the first bonding portion 211
and the second bonding portion 213 may contact at least part of the
side surface of the light emitting diode chip 50. In this exemplary
embodiment, at least one of the first bonding portion 211 and the
second bonding portion 213 may cover at least part of the side
surface of the light reflective insulation layer 140 covering the
side surface of the light emitting structure 120, may further cover
at least part of the lower surface of the substrate 110 exposed
around the light emitting structure 120, and may further cover at
least part of the side surface of the substrate 110.
[0121] As such, since at least one of the first bonding portion 211
and the second bonding portion 213 is configured to contact at
least part of the side surface of the light emitting diode chip 50,
a shortest distance D2 between the first bonding portion 211 and
the second bonding portion 213 may be shorter than the shortest
distance D1 between the first pad electrode 151 and the second pad
electrode 153. Thus, even in the case where D1 has a relatively
small value (for example, about 3 .mu.m to 20 .mu.m), D2 can be set
to a greater value than D1 so as to prevent short circuit upon
mounting of the light emitting diode chip 50. Particularly, since
the light reflective insulation layer 140 of the light emitting
diode chip 50 stably covers the side surface of the light emitting
structure 120, no electrical problem occurs even in the structure
wherein the first bonding portion 211 and/or the second bonding
portion 213 contact the side surface of the light emitting diode
chip 50. Particularly, since the light reflective insulation layer
140 extends to the exposed portion of the upper surface of the
substrate 110, the light reflective insulation layer 140 can more
stably insulate the side surface of the light emitting structure
120, thereby preventing short circuit through the bonding portions
211, 213 and the side surface of the light emitting structure 120.
In addition, since the contact areas between the bonding portions
211, 213 and the light emitting diode chip 50 increase, the light
emitting diode chip 50 can be more stably mounted on the substrate,
thereby improving mechanical stability of the light emitting
device. Furthermore, the thickness of each of the bonding portions
211, 213 interposed between the light emitting diode chip 50 and
the second substrate 300 (i.e, the separation distance between the
light emitting diode chip 50 and the second substrate 300) can be
reduced, thereby realizing a more compact and slimmer light
emitting device.
[0122] FIG. 5A to FIG. 10B are plan views and cross-sectional views
illustrating a method of fabricating a light emitting diode chip
according to an exemplary embodiment of the present disclosure.
[0123] Detailed description of substantially the same components as
those of the above exemplary embodiments will be omitted. Although
the drawings of the following exemplary embodiment show a method of
fabricating two light emitting diode chips 100, it should be
understood that other implementations are also possible. The method
of fabricating the light emitting diode chip 50 according to the
exemplary embodiment may also be applied to fabrication of a single
light emitting diode chip 50 and to fabrication of three or more
light emitting diode chips 100 on a large wafer. In each of the
drawings, line L1 is defined as a boundary line between unit diode
regions UD1. That is, light emitting structures 120 at both sides
with reference to the line L1 are divided to provide two light
emitting diode chips 100. In addition, each of the cross-sectional
views is taken along line B-B' of the corresponding plan view. For
example, a cross-section taken along line B-B' of FIG. 5A is shown
in FIG. 5B.
[0124] Referring to FIG. 5A and FIG. 5B, a light emitting structure
120 is disposed on a substrate 110. The light emitting structure
120 may be formed by various methods known in the art, for example,
metal organic chemical vapor deposition (MOCVD), molecular beam
epitaxy (MBE) or hydride vapor phase epitaxy (HVPE).
[0125] Referring to FIG. 6A to FIG. 7B, at least one hole 120h and
a contact electrode 130 are disposed on the light emitting
structure 120. Further, the light emitting structure 120 is
partially removed to form an isolation trench 120i that exposes an
upper surface of the substrate 110.
[0126] Specifically, first, referring to FIG. 6A and FIG. 6B, the
contact electrode 130 is disposed on the light emitting structure
120.
[0127] The contact electrode 130 is disposed on a second conductive
type semiconductor layer 125 of the light emitting structure 120
and may be in ohmic contact with the second conductive type
semiconductor layer 125. The contact electrode 130 may include an
optically transparent conductive oxide and/or an optically
transparent metal. For example, formation of the contact electrode
130 may include depositing indium tin oxide (ITO) on the second
conductive type semiconductor layer 125 through sputtering and/or
e-beam evaporation. However, it should be understood that other
implementations are also possible. Alternatively, the contact
electrode 130 may include various kinds of optically transparent
conductive oxides such as ZnO and may be formed by various
processes depending upon the kind of conductive oxide.
[0128] Next, referring to FIG. 7A and FIG. 7B, at least one hole
120h is disposed through the second conductive type semiconductor
layer 125 and the active layer 123 by patterning the light emitting
structure 120. Further, an isolation trench 120i is formed through
the second conductive type semiconductor layer 125, the active
layer 123 and the first conductive type semiconductor layer 121 so
as to expose an upper surface of the substrate 110 by patterning
the light emitting structure 120. Patterning of the light emitting
structure 120 may be performed by, for example, dry etching and/or
wet etching.
[0129] The light emitting structure 120 is divided by the isolation
trench 120i into a plurality of light emitting structures 120
respectively disposed on a plurality of unit diode regions UD1.
Accordingly, the isolation trench 120i may be disposed along line
L1. In this way, the light emitting structure 120 is divided into
the plurality of light emitting structures 120 respectively
disposed on the plurality of unit diode regions UD1 by forming the
isolation trench 120i, thereby relieving stress caused by
difference in coefficient of thermal expansion between the
substrate 110 and the light emitting structure 120. As a result, it
is possible to suppress wafer bowing during fabrication of the
light emitting diode chips 100.
[0130] The contact electrode 130 may be subjected to patterning and
patterning of the contact electrode 130 may include forming first
openings 130a that expose the at least one hole 120h. In addition,
patterning of the contact electrode 130 may further include forming
second openings 130b that partially expose the second conductive
type semiconductor layer 125. Patterning of the contact electrode
130 may be performed by dry etching and/or wet etching.
[0131] Although the contact electrode 130 is illustrated as being
formed prior to patterning of the light emitting structure 120 in
the above exemplary embodiment, it should be understood that other
implementations are also possible. In various exemplary
embodiments, the contact electrode 130 may be formed on the second
conductive type semiconductor layer 125 after patterning the light
emitting structure 120.
[0132] Next, referring to FIG. 8A and FIG. 8B, a light reflective
insulation layer 140 including third openings 140a and fourth
openings 140b is disposed so as to cover an upper surface and a
side surface of the light emitting structure 120.
[0133] Formation of the light reflective insulation layer 140 may
include forming a distributed Bragg reflector (DBR) in which
material layers having different indices of refraction are
alternately stacked one above another. For example, formation of
the light reflective insulation layer 140 may include alternately
stacking a SiO.sub.2 layer and a TiO.sub.2 layer using a well-known
method such as sputtering. In addition, formation of the light
reflective insulation layer 140 may include forming the distributed
Bragg reflector so as to cover the upper and side surfaces of the
light emitting structure 120 and the isolation trench 120i, and
patterning the distributed Bragg reflector so as to form the third
openings 140a and the fourth openings 140b while exposing the upper
surface of the substrate 110 in the isolation trench 120i.
Accordingly, the light reflective insulation layer 140 covering the
light emitting structure 120 in one unit diode region UD1 is
separated from the light reflective insulation layer 140 covering
the light emitting structure 120 in another unit diode region
UD1.
[0134] Next, referring to FIG. 9A and FIG. 9B, a first pad
electrode 151 and a second pad electrode 153 may be disposed on the
light reflective insulation layer 140.
[0135] The first pad electrode 151 may be in ohmic contact with the
first conductive type semiconductor layer 121 through the third
openings 140a of the light reflective insulation layer 140.
Likewise, the second pad electrode 153 may contact and be
electrically connected to the contact electrode 130 through the
fourth openings 140b of the light reflective insulation layer 140.
The first and second pad electrodes 151, 153 may be formed by the
same processes, for example, through deposition and/or plating,
followed by patterning through photolithography/etching technology
or lift-off technology.
[0136] Next, referring to FIG. 10A and FIG. 10B, a portion 110a of
the substrate 110 may be removed so as to reduce the thickness of
the substrate 110. As a result, the thickness of each of the unit
diode regions UD1 may be reduced by T1. Then, the substrate 110 may
be divided along line L1, thereby providing a plurality of light
emitting diode chips 100, as shown in FIG. 1 to FIG. 3.
[0137] Removal of the portion 110a of the substrate 110 may include
partially removing the substrate 110 through physical and/or
chemical methods. For example, the substrate 110 may be partially
removed by lapping, grinding, and the like. Reduction in thickness
of the substrate 110 can cause increase in stress while the
substrate 110 supports a wafer in a bowed state due to difference
in coefficient of thermal expansion. As a result, stress applied to
the light emitting structure 120 increases, thereby causing a high
probability of damage to the light emitting structure 120. However,
according to this exemplary embodiment, the isolation trench 120i
dividing the light emitting structure 120 into the plurality of
light emitting structure 120 is formed before decreasing the
thickness of the substrate 110, thereby preventing damage to the
light emitting structure 120 caused by reduction in thickness of
the substrate 110 by relieving wafer bowing and stress.
Particularly, since stress can be further relieved due to the
relatively small unit diode regions UD1, the thickness of each of
the unit diode regions UD1 can be reduced to about 90 .mu.m or
less.
[0138] Division of the substrate 110 along line L1 may include
dividing the substrate 110 through scribing and breaking. In some
exemplary embodiments, scribing may include internal machining of
the substrate 110 using an internal machining laser (for example,
stealth laser). With the internal machining laser, at least one
modification region 111 having a band shape extending in the
horizontal direction may be formed on at least one side surface of
the substrate 110.
[0139] According to this exemplary embodiment, the isolation trench
120i is disposed along line L1 and the light reflective insulation
layer 140 is divided so as to expose the isolation trench 120i.
Accordingly, the light reflective insulation layer 140 is not
affected or damaged by a laser beam in the course of dividing the
substrate 110, thereby preventing damage to the light reflective
insulation layer 140 (for example, peeling, breakage, and the
like). Particularly, in the structure wherein the light reflective
insulation layer 140 includes the distributed Bragg reflector,
damage to the light reflective insulation layer 140 can cause
deterioration in reflectivity. The fabrication method according to
this exemplary embodiment can prevent deterioration in luminous
efficacy of the light emitting diode chip 50 caused by damage to
the light reflective insulation layer 140.
[0140] In the light emitting diode chip 50 and the light emitting
device according to the above exemplary embodiments, the upper
surface of the substrate 110 includes an exposed portion, thereby
suppressing wafer bowing during fabrication of the light emitting
diode chip 50. As a result, since the degree of wafer bowing is
relatively small, the thickness of the substrate 110 can be reduced
while improving production yield of the light emitting diode chip
50, as described above. Thus, the light emitting diode chip 50 and
the light emitting device have a compact and slim structure and
high reliability. Further, since the light reflective insulation
layer 140 extends to cover the side surface of the light emitting
structure 120 and the exposed portion of the upper surface of the
substrate 110, particularly, the protrusions 110p of the substrate
110, the light emitting diode chip 50 can have further improved
luminous efficacy. Furthermore, with such a structure of the light
reflective insulation layer 140, the bonding portions 211, 213 can
cover the side surface of the light emitting diode chip 50, thereby
achieving compactness of the light emitting device while improving
mechanical stability thereof.
[0141] As such, with good properties in terms of mechanical
stability and luminous efficacy and the compact and slim structure,
the light emitting device according to the exemplary embodiments
can be advantageously applied to portable electronic apparatuses.
By way of example, the light emitting device or the light emitting
diode chip 50 may be applied to a paper writing board that requires
a slim thickness. In another example, the light emitting device may
be applied to an input device such as a keyboard, in which the
light emitting device is disposed under each key to allow light to
be emitted through the keys. In such an input device, the keys are
subjected to repeated external stress (for example, pressure
applied for data input). In addition, a portable input device
requires a slim thickness and a small size. The light emitting
device according to the exemplary embodiments having such a compact
and slim structure may be suitably applied to a portable input
device having a slim structure while securing mechanical stability,
thereby preventing failure of the light emitting device caused by
operation of the keyboard (for example, pressure applied to the
key).
[0142] FIG. 11 to FIG. 13 are plan views of a light emitting diode
chip according to another exemplary embodiment of the present
disclosure. Specifically, FIG. 11 is a plan view of a light
emitting diode chip 100, FIG. 12 is a plan view of the light
emitting diode chip 100, in which first and second pad electrodes
151, 153 of the light emitting diode chip 100 are omitted for
convenience of description, and FIG. 13 is a plan view of the light
emitting diode chip 100 in which the first and second pad
electrodes 151, 153, and an insulation layer 140 are omitted for
convenience of description. Detailed description of components
similar to or substantially the same as the components of the above
exemplary embodiments will be omitted.
[0143] FIG. 14 and FIG. 15 are cross-sectional views of the light
emitting diode chip according to the exemplary embodiment of the
present disclosure. Specifically, FIG. 14 is a cross-sectional view
taken along line A-A' of FIG. 11 to FIG. 13 and FIG. 15 is a
cross-sectional view taken along line B-B' of FIG. 11 to FIG.
13.
[0144] FIG. 16 is a plan view illustrating a current path of a
light emitting diode chip according to exemplary embodiments of the
present disclosure.
[0145] Referring to FIG. 11 to FIG. 15, the light emitting diode
chip 100 according to exemplary embodiments includes a substrate
110, a light emitting structure 120, an insulation layer 140, a
first pad electrode 151, and a second pad electrode 153. The light
emitting diode chip 100 may further include a contact electrode
130.
[0146] The light emitting diode chip 100 may be a compact light
emitting diode chip having a relatively small horizontal area. The
light emitting diode chip 100 may have a horizontal cross-sectional
area of about 70,000 .mu.m.sup.2 or less, specifically about 30,000
.mu.m.sup.2 to about 70,000 .mu.m.sup.2. For example, the light
emitting diode chip 100 may have a size of 310 .mu.m.times.180
.mu.m or 330 .mu.m.times.200 .mu.m. It should be understood that
the size of the light emitting diode chip 50 according to exemplary
embodiments is not limited thereto. In some exemplary embodiments,
the light emitting diode chip 50 may be a compact light emitting
diode chip having a relative slim thickness. The light emitting
diode chip 100 may have a thickness T1 of about 90 .mu.m or less,
specifically a thickness T1 of about 40 .mu.m to 90 .mu.m, for
example, a thickness T1 of about 80 .mu.m. With the horizontal
cross-sectional area and thickness as described above, the light
emitting diode chip 50 according to the exemplary embodiments can
be easily applied to various electronic apparatuses that require
compact and/or slim light emitting devices. Drive current for
operation of the light emitting diode chip 50 may have a current
density of 5 mA/mm.sup.2 to 400 mA/mm.sup.2. By operation of the
light emitting diode chip 100 with such a current density, the
light emitting diode chip 50 according to the exemplary embodiments
can be suitably applied to various electronic apparatuses that
require compact and/or slim light emitting devices.
[0147] The substrate 110 may be an insulating or conductive
substrate. The substrate 110 may be a growth substrate for growth
of the light emitting structure 120, and may include a sapphire
substrate, a silicon carbide substrate, a silicon substrate, a
gallium nitride substrate, an aluminum nitride substrate, and the
like. The substrate 110 may include a plurality of protrusions 110p
disposed on some region of an upper surface thereof.
[0148] Furthermore, the substrate 110 may include at least one
modification region 111 having a band shape and extending from at
least one side surface of the substrate 110 in the horizontal
direction. The modification region 111 may be formed during
division of the substrate 110 for diode singulation. For example,
the modification region 111 may be formed through internal
machining of the substrate 110. A scribing plane may be formed
inside the substrate 110 using an internal machining laser, such as
a stealth laser. Although the modification region 111 is
illustrated as being disposed inside the substrate 110 in the
cross-sectional views of FIG. 14 and FIG. 15 for convenience of
description, the modification region 111 may be disposed on at
least one side surface of the substrate 110.
[0149] In this exemplary embodiment, a distance T2 from the
modification region 111 to an upper surface of the substrate 110
may be smaller than a distance T4 from the modification region 111
to a lower surface of the substrate 110. Further, thickness T3 of
the modification region 111 may be greater than T4. For example,
the distance T2 may range from about 30 .mu.m to about 35 .mu.m,
the thickness T3 may range from about 15 .mu.m to about 20 .mu.m,
and the distance T4 may range from about 20 .mu.m to about 25
.mu.m.
[0150] In consideration of light emitted through a side surface of
the light emitting diode chip 100, laser machining is performed
relatively near the lower surface of the substrate 110 such that
the modification region 111 is disposed relatively near the lower
surface of the substrate 110, thereby improving extraction of light
from the light emitting structure 120.
[0151] On the other hand, the structure wherein the modification
region 111 is disposed near the light emitting structure 120 can
cause a problem in electrical characteristics due to damage to
nitride-based semiconductors upon laser machining. Particularly,
when laser machining is performed on a portion within a distance of
40 .mu.m from the nitride-based semiconductor layer, semiconductor
layers disposed on the portion subjected to laser machining can be
damaged. Conversely, for the light emitting diode chip 100
according to this exemplary embodiment, the upper surface of the
substrate 110 may be exposed through isolation of the light
emitting structure 120 before division of the substrate 110 and
laser machining may be performed under the exposed portion of the
upper surface of the substrate 110. Thus, it is possible to prevent
damage to the nitride-based semiconductor layers, that is, the
light emitting structure 120, during laser internal machining.
Accordingly, the distance T2 from the modification region 111 to
the upper surface of the substrate 110 can be set to a relatively
small thickness in the above range of about 30 .mu.m to 35 .mu.m.
In this way, since the distance T2 can be decreased, the
modification region 111 can be disposed relatively near the upper
surface of the substrate 110 and thus the thickness of the
substrate 110 can be further decreased, whereby the light emitting
diode chip 100 can have a slimmer structure.
[0152] A lower surface of the light emitting structure 120 may have
a smaller area than the upper surface of the substrate 110, whereby
the upper surface of the substrate 110 can be exposed in at least
some region around the light emitting structure 120. The exposed
regions around the light emitting structure 120 are referred to as
isolation regions. Some of the plurality of protrusions 110p on the
substrate 110 may be disposed between the light emitting structure
120 and the substrate 110, and the other protrusions 110p not
covered by the light emitting structure 120 may be exposed around
the light emitting structure 120.
[0153] With the structure wherein the upper surface of the
substrate 110 is partially exposed at the isolation region around
the light emitting structure 120, the light emitting diode chip 100
can prevent damage to the light emitting structure 120 by
suppressing wafer bowing during fabrication thereof, thereby
improving production yield. In addition, the light emitting diode
chip 100 can reduce stress applied to the light emitting structure
120 by suppressing wafer bowing, thereby allowing the substrate 110
to be machined to a slimmer thickness. As a result, the light
emitting diode chip 100 can have a slim structure having a
thickness of about 90 .mu.m or less. This structure will be
described in more detail in the following exemplary
embodiments.
[0154] The light emitting structure 120 includes a first conductive
type semiconductor layer 121, a second conductive type
semiconductor layer 125 disposed on the first conductive type
semiconductor layer 121, and an active layer 123 interposed between
the first conductive type semiconductor layer 121 and the second
conductive type semiconductor layer 125. The first conductive type
semiconductor layer 121, the active layer 123 and the second
conductive type semiconductor layer 125 may include a III-V
nitride-based semiconductor, for example, a nitride-based
semiconductor such as (Al, Ga, In)N. The first conductive type
semiconductor layer 121 may include an n-type dopant (for example,
Si, Ge, Sn) and the second conductive type semiconductor layer 125
may include a p-type dopant (for example, Mg, Sr, Ba), or vice
versa. The active layer 123 may include a multi-quantum well (MQW)
structure and the composition ratio of the nitride-based
semiconductors may be adjusted to emit light having a desired
wavelength. Particularly, in this exemplary embodiment, the second
conductive type semiconductor layer 125 may be a p-type
semiconductor layer.
[0155] The first conductive type semiconductor layer 121 may have a
perpendicular side surface or an inclined side surface, as shown in
FIG. 14. Furthermore, inclination of the inclined side surface may
be gentler than the inclination of the inclined side surface shown
in FIG. 14. For example, the inclined side surface may be inclined
at an angle of about 40.degree. with respect to a bottom surface of
the substrate 110. With the structure wherein the side surface of
the first conductive type semiconductor layer 121 has a gentle
inclination, the light emitting diode chip can prevent an
insulation layer 140, which covers the light emitting structure 120
and the substrate 110, from suffering defects such as cracks.
[0156] The light emitting structure 120 includes a mesa 120m. The
mesa 120m may be disposed in some region of the first conductive
type semiconductor layer 121 and includes the active layer 123 and
the second conductive type semiconductor layer 125. In this
structure, the first conductive type semiconductor layer 121 may be
partially exposed around the mesa 120m. In addition, the mesa 120m
may have side surfaces generally disposed along side surfaces of
the light emitting diode chip 100, and thus has a similar shape to
the shape of the light emitting diode chip 100 in plan view. For
example, the mesa 120m may have a rectangular shape in plan view.
It should be understood that other implementations are also
possible. Further, the mesa 120m may include a first side surface
120a, a third side surface 120c disposed opposite the first side
surface 120a, a second side surface 120b, and a fourth side surface
120d opposite the second side surface 120b.
[0157] The mesa 120m may include a first portion 120m.sub.1 and a
second portion 120m.sub.2. The first portion 120m.sub.1 of the mesa
120m includes at least one groove 120g disposed on the side surface
of the mesa 120m. In this exemplary embodiment, the mesa 120m may
include a plurality of grooves 120g, which may be disposed on at
least three side surfaces of the first portion 120m1. As shown in
the drawings, the plurality of grooves 120g may be disposed on the
second side surface 120b, the third side surface 120c and the
fourth side surface 120d, respectively. The grooves 120g can
provide a region in which the first pad electrode 151 and the first
conductive type semiconductor layer 121 form electrical contact and
ohmic contact with each other.
[0158] In addition, the grooves 120g may have a width gradually
decreasing from one side of the mesa 120m to the center of the mesa
120m. Accordingly, when the first pad electrode 151 is disposed to
cover the side surfaces of the grooves 120g, the first pad
electrode 151 can be more stably formed and can be prevented from
being separated from the insulation layer 140. Obviously, the
grooves 120g are not limited to the above structure and may include
planar and/or curved side surfaces. In one exemplary embodiment,
the grooves 120g may be regularly arranged. For example, the
grooves 120g may be arranged such that one groove 120g is disposed
substantially at the center of the third side surface 120c and
grooves disposed on the second side surface 120b and the fourth
side surface 120d are collinear with each other (for example, such
that the centers of the grooves 120g are disposed along line B-B').
Accordingly, the grooves 120g are arranged in symmetry with respect
to a linear line (imaginary line) extending from the first side
surface 120a of the mesa 120m to the third side surface 120c. In
this exemplary embodiment, the grooves 120g may be arranged in
symmetry with respect to line A-A' and the mesa 120m may have a
symmetrical shape with respect to line A-A' in plan view, as shown
in the drawings.
[0159] In the structure wherein the mesa 120m includes the grooves
120g arranged as described above, the grooves 120g provide contact
regions between the first conductive type semiconductor layer 121
and the first pad electrode 151, thereby minimizing decrease in
luminous area while improving current spreading efficiency. These
effects will be described in more detail below with reference to
FIG. 16.
[0160] The contact electrode 130 is disposed on the second
conductive type semiconductor layer 125. The contact electrode 130
may be in ohmic contact with the second conductive type
semiconductor layer 125. The contact electrode 130 may include a
transparent electrode. The transparent electrode may include at
least one of, for example, optically transparent conductive oxides
such as indium tin oxide (ITO), zinc oxide (ZnO), zinc indium tin
oxide (ZITO), zinc indium oxide (ZIO), zinc tin oxide (ZTO),
gallium indium tin oxide (GITO), gallium indium oxide (GIO),
gallium zinc oxide (GZO), aluminum doped zinc oxide (AZO), fluorine
tin oxide (FTO), and optically transparent metals such as Ni/Au.
The conductive oxides may further include various dopants.
[0161] Particularly, the contact electrode 130 including an
optically transparent conductive oxide has high efficiency in
formation of an ohmic contact with the second conductive type
semiconductor layer 125. That is, since contact resistance between
a conductive oxide such as ITO or ZnO and the second conductive
type semiconductor layer 125 is lower than contact resistance
between a metallic electrode and the second conductive type
semiconductor layer 125, the contact electrode 130 including the
conductive oxide can reduce forward voltage V.sub.f of the light
emitting diode chip 100, thereby improving luminous efficacy.
Particularly, in a compact light emitting diode chip driven by
relatively low current density like the light emitting diode chip
100 according to this exemplary embodiment, the contact resistance
between the contact electrode 130 and the second conductive type
semiconductor layer 125 is reduced so as to improve ohmic contact
characteristics, thereby more effectively improving luminous
efficacy. Further, since the conductive oxide has a lower
probability of peeling off of the nitride-based semiconductor layer
than the metallic electrode, the light emitting diode chip 50
having the contact electrode 130 including the conductive oxide has
high reliability. On the other hand, although the conductive oxide
has lower lateral current spreading efficiency than the metallic
electrode, the light emitting diode chip 100 according to this
exemplary embodiment has a horizontal cross-sectional area of about
70,000 .mu.m or less and, thus, suffers from insignificant or no
deterioration in luminous efficacy caused by deterioration in
current spreading efficiency. In this way, the contact electrode
130 including the conductive oxide is applied to the light emitting
diode chip 100, thereby improving electrical characteristics and
luminous efficacy.
[0162] The contact electrode 130 may have a thickness of about
2,000 .ANG. to 3,000 .ANG., without being limited thereto. For
example, the contact electrode 130 including ITO may have a
thickness of about 2,400 .ANG.. Within this thickness range of the
contact electrode 130, the light emitting diode chip 100 can
exhibit improved electrical characteristics by efficiently
spreading electric current in the lateral direction.
[0163] The contact electrode 130 may be disposed to cover
substantially the entirety of an upper surface of the second
conductive type semiconductor layer 125, thereby improving current
spreading efficiency upon operation of the light emitting diode
chip 100. For example, the side surfaces of the contact electrode
130 may be disposed along the side surfaces of the mesa 120m. In
addition, the contact electrode 130 includes an opening 130b that
partially exposes the second conductive type semiconductor layer
125. In a structure wherein the opening 130b is at least partially
filled with a second pad electrode 153 described below, the second
pad electrode 153 can have an increased contact area. Accordingly,
the second pad electrode 153 can be effectively prevented from
being separated from the contact electrode 130 or the light
emitting structure 120.
[0164] The insulation layer 140 covers an upper surface and a side
surface of the light emitting structure 120 and also covers the
contact electrode 130. In addition, the insulation layer 140 may
extend to the exposed portion of the upper surface of the substrate
110 around the light emitting structure 120. In this structure, the
insulation layer 140 may adjoin the upper surface of the substrate
110 and thus can be more stably disposed while covering the side
surface of the light emitting structure 120. Further, the
insulation layer 140 may extend to an upper edge of the substrate
110. The insulation layer 140 covering the exposed portion of the
upper surface of the substrate 110 may be disposed along the
protrusions 110p of the substrate 110. Thus, as shown in an
enlarged view of FIG. 14, depressions and protrusions may be
disposed on a surface of the insulation layer 140 covering the
upper surface of the substrate 110. The insulation layer 140 may
include a first opening 140a that at least partially exposes the
first conductive type semiconductor layer 121 and a second opening
140b disposed over the mesa 120m. It should be understood that
other implementations are also possible. For example, the
insulation layer 140 may partially cover the upper surface of the
substrate 110 such that the upper surface of the substrate 110 is
partially exposed.
[0165] The first opening 140a of the insulation layer 140 may at
least partially expose the first conductive type semiconductor
layer 121 exposed through the groove 120g. In this exemplary
embodiment, the side surface of the groove 120g is covered by the
insulation layer 140, thereby prevent short circuit caused by
contact between the first pad electrode 151 and the side surface of
the light emitting structure 120. The first opening 140a may be
used as a passage for electrical connection between the first
conductive type semiconductor layer 121 and the first pad electrode
151. Here, the first opening 140a has a first region 140a1 covered
by the first pad electrode 151 and a second region 140a2 exposed
outside the first pad electrode 151. In this structure, at least
part of an exposed region of the first opening 140a may include a
first contact region 151c, in which the first pad electrode 151 and
the first conductive type semiconductor layer 121 are electrically
connected to each other or be in ohmic contact with each other. The
first opening 140a may generally have a similar shape to the groove
120g.
[0166] The second opening 140b of the insulation layer 140 is
placed on the mesa 120m. The second opening 140b of the insulation
layer 140 partially exposes the contact electrode 130. The second
opening 140b may be used as a passage for electrical connection
between the contact electrode 130 and the second pad electrode 153.
In some exemplary embodiments, the second opening 140b is
positioned corresponding to a location of the opening 130b of the
contact electrode 130. The second opening 140b has a greater size
than the opening 130b of the contact electrode 130, whereby the
upper surface of the contact electrode 130 is partially exposed to
the second opening 140b. At least part of the region of the contact
electrode 130 exposed through second opening 140b may be
electrically connected to the second pad electrode 153.
Accordingly, the contact electrode 130 may include a second contact
region 153c in which the contact electrode 130 and the second pad
electrode 153 are electrically connected to each other.
[0167] The insulation layer 140 may include an optically
transparent insulation material, for example, SiO.sub.2, SiN.sub.X,
MgF.sub.2, and the like. The insulation layer 140 may have a
greater thickness than the contact electrode 130. With this
structure, the insulation layer 140 can provide a sufficient
thickness to allow light passing through the insulation layer 140
to be reflected by the first and second pad electrodes 151, 153. In
this exemplary embodiment, the insulation layer 140 may include
SiO.sub.2 and has a thickness of, for example, about 540 nm.
[0168] In some exemplary embodiments, the insulation layer 140 may
include a distributed Bragg reflector. The distributed Bragg
reflector may be formed by repeatedly stacking dielectric layers
having different indices of refraction and including, for example,
TiO.sub.2, SiO.sub.2, HfO.sub.2, ZrO.sub.2, Nb.sub.2O.sub.5,
MgF.sub.2, and the like. For example, the insulation layer 140 may
have an alternating structure of TiO.sub.2/SiO.sub.2 layers. The
distributed Bragg reflector may be composed of 4 to 20 pairs of
layers each having an optical thickness equal to one-quarter of a
particular wavelength. An uppermost layer of the insulation layer
140 may be formed of SiN.sub.X. The layer of SiN.sub.X has good
moisture resistance to protect the light emitting diode chip from
moisture.
[0169] In the structure wherein the insulation layer 140 includes
the distributed Bragg reflector, the insulation layer 140 may
include an interface layer having a thickness of about 0.2 .mu.m to
about 1.0 .mu.m and formed of SiO.sub.2 and a stack structure in
which TiO.sub.2/SiO.sub.2 layers are repeatedly stacked in a
predetermined cycle on the interface layer. The distributed Bragg
reflector may have a relatively high reflectivity with respect to
visible light. The distributed Bragg reflector may be configured to
have a reflectivity of 90% or higher with respect to light having
an angle of incidence of 0.degree. to 60.degree. at a wavelength of
400 nm to 700 nm. The distributed Bragg reflector having this
reflectivity can be provided by controlling the kinds, thickness
and stacking cycle of the dielectric layers constituting the
distributed Bragg reflector. As a result, it is possible to form a
distributed Bragg reflector having high reflectivity with respect
to light having relatively long wavelengths (for example, 550 nm to
700 nm) and light having relatively short wavelengths (for example,
400 nm to 550 nm).
[0170] In this way, the distributed Bragg reflector may include a
multilayer structure so as to have high reflectivity with respect
to light in a broad wavelength band. That is, the distributed Bragg
reflector may include a first stack structure in which dielectric
layers having a first thickness are stacked one above another and a
second stack structure in which dielectric layers having a second
thickness are stacked one above another. For example, the
distributed Bragg reflector may include a first stack structure in
which dielectric layers having a smaller thickness than an optical
thickness equal to one-quarter of a central wavelength (about 550
nm) of visible light are stacked one above another and a second
stack structure in which dielectric layers having a greater
thickness than the optical thickness equal to one-quarter of the
central wavelength (about 550 nm) of visible light are stacked one
above another. In some exemplary embodiments, the distributed Bragg
reflector may further include a third stack structure in which a
dielectric layer having a greater thickness than the optical
thickness equal to one-quarter of the central wavelength (about 550
nm) of visible light and a dielectric layer having a smaller
thickness than the optical thickness equal to one-quarter of the
central wavelength (about 550 nm) of visible light are repeatedly
stacked one above another
[0171] The first pad electrode 151 and the second pad electrode 153
are disposed on the insulation layer 140 to be disposed on the
first portion 120m.sub.1 and the second portion 120m.sub.2 of the
mesa 120m, respectively. Furthermore, the first pad electrode 151
and the second pad electrode 153 may be disposed near the first
side surface 120a and the third side surface 120c of the mesa 120m.
At least part of each of the first and second pad electrodes 151,
153 is disposed on the mesa 120m. Particularly, the first pad
electrode 151 may be insulated from the upper and side surfaces of
the mesa 120m via the insulation layer 140. Further, the first pad
electrode 151 covers the first region 140a1 of the first opening
140a while being separated from the second region 140a2 thereof.
The first pad electrode 151 may be separated from part of the side
surface of the first opening 140a such that a separation space is
formed between the side surface of the first opening 140a and the
first pad electrode 151. Accordingly, the second region 140a2 of
the first opening 140a is placed outside the first pad electrode
151 and a region of the first conductive type semiconductor layer
121 exposed by the second region 140a2 is also placed outside the
first pad electrode 151. The region of the first conductive type
semiconductor layer 121 exposed by second region 140a2 may be
covered by a bonding material upon flip-chip bonding of the light
emitting diode chip, as will be described below.
[0172] With the structure wherein the first pad electrode 151
covers part of the first opening 140a, the first opening 140a can
be formed in a relatively large size in a restricted design range
of a small light emitting diode chip. If the size of the opening is
too small, the insulation layer can remain due to difficulty of
etching, and over-etching is generally carried out, thereby causing
significant change in the size of the opening. In a structure
wherein the first pad electrode 151 completely covers the first
opening 140a, there can be significant change in contact resistance
due to change in the size of the first opening 140a. In the
exemplary embodiments, the first opening 140a includes the second
region 140a2, whereby the first opening 140a can have an increased
size and, when there is change in the size of the first opening
140a, change in contact area of the first pad electrode 151 is less
than change in the size of the first opening 140a. Accordingly,
light emitting diode chips having less change in contact area of
the first pad electrode 151 to allow less change in electrical
characteristics, for example, forward voltage, between the light
emitting diode chips can be produced at high yield.
[0173] The first pad electrode 151 disposed on the first portion
120m.sub.1 may be electrically connected to the first conductive
type semiconductor layer 121 through the first opening 140a while
being in ohmic contact therewith. Particularly, the first pad
electrode 151 may be disposed to cover the side surface of the mesa
120m such that the side surface of the mesa 120m and the first pad
electrode 151 are insulated from each other via the insulation
layer 140. Accordingly, a contact portion between the first pad
electrode 151 and the first conductive type semiconductor layer 121
exposed through the groove 120g is formed as a first contact region
151c. In this exemplary embodiment, the second region 140a2 of the
first opening 140a may have the same area as the first contact
region 151c, but is not limited thereto, as described below in the
following exemplary embodiments.
[0174] On the other hand, the first conductive type semiconductor
layer 121 can be partially exposed through the second region 140a2
of the first opening 140a, and process margin can be secured by the
second region 140a2, thereby improving production yield of the
light emitting diode chip 100.
[0175] The second pad electrode 153 disposed on the second portion
120m.sub.2 may be electrically connected to the contact electrode
130 through the second opening 140b. In this exemplary embodiment,
at least part of a contact region between the second pad electrode
153 and the contact electrode 130 may be disposed as a second
contact region 153c. In the structure wherein the contact electrode
130 includes the opening 130b, the second pad electrode 153 may
contact the second conductive type semiconductor layer 125. In this
structure, however, since contact resistance between the second pad
electrode 153 and the second conductive type semiconductor layer
125 is higher than contact resistance between the second pad
electrode 153 and the contact electrode 130, electric current
flowing through the second pad electrode 153 is highly likely to
flow to the contact electrode 130. For example, the second pad
electrode 153 and the second conductive type semiconductor layer
125 can form a Schottky contact. Accordingly, current crowding
caused by contact between the second pad electrode 153 and the
second conductive type semiconductor layer 125 can be
minimized.
[0176] Referring to FIG. 16, upon operation of the light emitting
diode chip 100, electric current can flow through the first contact
region 151c from the second contact region 153c. In the structure
wherein the grooves 120g are disposed on at least three side
surfaces of the mesa 120m, the first contact region 151c is
disposed on the surface of the first conductive type semiconductor
layer 121 exposed through the grooves 120g, whereby electric
current can be efficiently supplied to a side surface the first
portion 120m1 of the mesa 120m. Accordingly, electric current can
be evenly spread over a luminous region (the active layer 123 of
the mesa 120m).
[0177] Particularly, in the structure wherein the first conductive
type semiconductor layer 121 is an n-type semiconductor layer,
electrons spread from the first contact region 151c towards the
second contact region 153c upon operation of the light emitting
diode chip 100. Here, since electrons have higher mobility than
holes, electrons can be evenly spread to a region between the
second contact region 153c and the first side surface 120a, whereas
holes are not likely to spread to a rear side of the first contact
region 151c. According to this exemplary embodiment, the first
contact region 151c is disposed at the location of the grooves 120g
so as to allow electric current to be evenly spread to edge regions
(regions near the side surfaces) of the first portion 120m1,
thereby enabling uniform generation of light substantially through
the entire region of the mesa 120m. Accordingly, it is possible to
improve luminous efficacy of the compact light emitting diode chip
100 having a relatively small luminous area.
[0178] In addition, since the grooves 120g are disposed on at least
three side surfaces of the mesa 120m, it is possible to minimize a
portion of the luminous region to be removed for electrical
connection to the first conductive type semiconductor layer 121.
Accordingly, the light emitting diode chip 100 having a relatively
small luminous area according to the exemplary embodiments can have
improved luminous power by minimizing the decrease in luminous
area.
[0179] A shortest distance D2 from a first contact region 151c
disposed farthest away from the second contact region 153c to the
second contact region 153c among the first contact regions 151c may
be 200 .mu.m or less. That is, as shown in FIG. 16, the shortest
distance D2 from the second contact region 153c to the first
contact region 151c near the third side surface 120c may be 200
.mu.m or less. For example, if D2 exceeds 200 .mu.m, uneven current
spreading occurs near the first contact region 151c disposed
farthest away from the second contact region 153c, thereby causing
deterioration in luminous efficacy. Particularly, if the contact
electrode 130 is formed of a conducive oxide including ITO, current
spreading efficiency can be further improved by setting D2 to 200
.mu.m or less due to limitation in current spreading through the
contact electrode 130. It should be understood that other
implementations are also possible.
[0180] Each of the first pad electrode 151 and the second pad
electrode 153 may have an upper surface profile corresponding to a
lower surface profile thereof. Accordingly, the first pad electrode
151 may include an inclined side surface disposed above the first
opening 140a and the second pad electrode 153 may include a
depression 153a disposed above the second opening 140b. In this
way, since the lower surface of each of the first and second pad
electrodes 151, 153 has a step, each of the first and second pad
electrodes 151, 153 has an increased contact area and the step is
disposed at a contact portion of each of the first and second pad
electrodes 151, 153, thereby preventing peeling of the first and
second pad electrodes 151, 153. Particularly, in the structure
wherein the contact electrode 130 includes the opening 130b, the
depression 153a of the second pad electrode 153 has a step, thereby
more effectively preventing peeling of the second pad electrode
153. In addition, a step is disposed on the surface of each of the
first and second pad electrodes 151, 153, whereby the light
emitting diode chip 100 can be more stably bonded to the second
substrate 300.
[0181] A shortest distance D1 between the first pad electrode 151
and the second pad electrode 153 may be a very small value, for
example, about 3 .mu.m to about 100 .mu.m, specifically about 80
.mu.m. Since the insulation layer 140 covering the side surface of
the light emitting structure 120 can be stably formed, the light
emitting diode chip 100 may be configured so as to allow bonding
portions 211, 213 bonded to a second substrate 300 to cover the
side surface of the light emitting diode chip 100, as described in
the following exemplary embodiments. In this structure, since there
is no need for process margin through the shortest distance D1
between the first pad electrode 151 and the second pad electrode
153, the shortest distance D1 between the first pad electrode 151
and the second pad electrode 153 can be reduced as much as
possible. In this structure, since there is no need for process
margin through the shortest distance D1 between the first pad
electrode 151 and the second pad electrode 153, the shortest
distance D1 between the first pad electrode 151 and the second pad
electrode 153 can be reduced as much as possible. In addition,
since the compact light emitting diode chip 100 according to this
exemplary embodiment can be operated by relatively low current
density, the shortest distance between the first pad electrode 151
and the second pad electrode 153 can be further reduced. Within the
above range of the shortest distance D1 between the first pad
electrode 151 and the second pad electrode 153, the light emitting
diode chip 100 can have further improved heat dissipation
efficiency. In this exemplary embodiment, a total area of the first
pad electrode 151 and the second pad electrode 153 may range from
about 50% to 95% of a horizontal cross-sectional area of the light
emitting diode chip 100. Within this range of the total area ratio
of the first and second pad electrodes 151, 153, the light emitting
diode chip 100 can have improved luminous efficacy by improving
reflection of light through the first and second pad electrodes
151, 153.
[0182] As needed, light can be emitted not only towards the
substrate 110 but also towards the first and second pad electrodes
151, 153. For example, in a structure wherein the contact electrode
130 and the insulation layer 140 are formed of a light transmitting
material, some of the light emitted from the active layer 123 can
be discharged to a region between the first pad electrode 151 and
the second pad electrode 153. Accordingly, the light emitting diode
chip can emit light in the opposite directions, whereby the sizes
of the first pad electrode 151 and the second pad electrode 153 can
be further reduced.
[0183] FIG. 17 to FIG. 19 are plan views of a light emitting diode
chip according to another exemplary embodiment of the present
disclosure, and FIG. 20 and FIG. 21 are cross-sectional views of
the light emitting diode chip according to the exemplary embodiment
of the present disclosure. FIG. 17 to FIG. 21 correspond to FIG. 11
to FIG. 15, respectively.
[0184] Referring to FIG. 17 to FIG. 21, the light emitting diode
chip according to this exemplary embodiment of the present
disclosure is generally similar to the light emitting diode chip
according to the above exemplary embodiment of the present
disclosure except for the location and/or the size of the first
opening 140a of the insulation layer 140. In the above exemplary
embodiment, the first opening 140a of the light emitting diode chip
is restrictively formed at an upper portion of the upper surface of
the first conductive type semiconductor layer 121 to expose the
upper surface of the first conductive type semiconductor layer 121.
Conversely, in the light emitting diode chip according to this
exemplary embodiment, the first opening 140a extends from an upper
portion of the upper surface of the first conductive type
semiconductor layer 121 to an upper portion of a side surface of
the first conductive type semiconductor layer 121 and to an upper
surface of the substrate 110. That is, the first opening 140a can
expose not only the upper surface of the first conductive type
semiconductor layer 121 exposed through a groove 120g, but also the
side surface of the first conductive type semiconductor layer 121,
while exposing the upper surface of the substrate 110. FIG. 20A and
FIG. 21B show that one end of the first opening 140a is placed on
the side surface of the first conductive type semiconductor layer
121, and FIG. 20B and FIG. 21B show that one end of the first
opening 140a is placed on the upper surface of the substrate
110.
[0185] As in the above exemplary embodiment, the first opening 140a
has a first region 140a1 and a second region 140a2. The first
region 140a1 according to this exemplary embodiment is the same as
the first region 140a1 according to the above exemplary embodiment,
and the second region 140a2 according to this exemplary embodiment
may have a larger size than the second region 140a2 according to
the above exemplary embodiment.
[0186] The second region 140a2 is a region not covered by the first
pad electrode 151 and thus is exposed outside the first pad
electrode 151. The second region 140a is covered by a bonding
material when the light emitting diode chip 100 is bonded to a
circuit board. The first opening 140a is formed so as to expose the
side surface of the first conductive type semiconductor layer 121
and the upper surface of the substrate 110, whereby the small light
emitting diode chip 100 can include the first opening 140a having a
large size, thereby stabilizing the manufacturing process while
reducing deviation in physical and electrical characteristics
between light emitting diode chips.
[0187] In addition, since the second region 140a is filled with the
bonding material, the light emitting diode chip 100 can be
prevented from being tilted or deviated from a bonding location
upon bonding of the light emitting diode chip 100.
[0188] FIG. 22 to FIG. 26 are plan views and cross-sectional views
of a light emitting diode chip according to a further exemplary
embodiment of the present disclosure, which correspond to FIG. 11
to FIG. 15, respectively.
[0189] Referring to FIG. 22 to FIG. 26, a light emitting diode chip
300 according to this exemplary embodiment is generally similar to
the light emitting diode chips according to the above exemplary
embodiments described in FIG. 11 to FIG. 15 or FIG. 17 to FIG. 21
except that a mesa 120m of the light emitting diode chip 300
further includes a through-hole 120h, which exposes the first
conductive type semiconductor layer 121. In the light emitting
diode chip 300, the active layer 123 and the second conductive type
semiconductor layer 125 are exposed to a sidewall of the
through-hole 120h.
[0190] The through-hole 120h is separated from grooves 120g. The
through-hole 120h may be disposed between the grooves 120g formed
between a second side surface 120b and a fourth side surface 120d,
without being limited thereto. The center of the through-hole 120h
may be placed at the middle between the grooves 120g formed between
the second side surface 120b and the fourth side surface 120d,
without being limited thereto. Alternatively, the through-hole 120h
may be placed closer to or farther from a groove 120g formed on a
third side surface 120c in order to aid current spreading.
[0191] A contact electrode 130 surrounds the through-hole 120h. In
order to prevent short circuit, the contact electrode 130 is
separated from the first conductive type semiconductor layer 121
and the active layer 123 exposed through the through-hole 120h.
[0192] On the other hand, an insulation layer 140 covers the active
layer 123 and the second conductive type semiconductor layer 125
exposed to the sidewall of the through-hole 120h. The insulation
layer 140 includes first openings 140a and an opening 140c, which
exposes the first conductive type semiconductor layer 121 in the
through-hole 120h. Some region of the first opening 140a, that is,
a first region 140a1, is covered by a first pad electrode 151 and a
second region 140a2 thereof is exposed outside the first pad
electrode 151, whereas the opening 140c is completely covered by
the first pad electrode 151.
[0193] The first pad electrode 151 is connected to the first
conductive type semiconductor layer 121 through the through-hole
120h, thereby further improving current spreading.
[0194] All of the technical features of the light emitting diode
chips described above with reference to FIG. 11 to FIG. 15 or FIG.
17 to FIG. 21 may be applied to the light emitting diode chip 300
according to this exemplary embodiment. Thus, each of the first
openings 140a may include the first region 140a1 and the second
region 140a2. Further, the second region 140a2 may be formed only
on the upper surface of the first conductive type semiconductor
layer 121, or may be formed on the upper surface of the first
conductive type semiconductor layer 121 and extend to the side
surface of the first conductive type semiconductor layer 121 and to
the upper surface of the substrate 110.
[0195] FIG. 27 to FIG. 31 are plan views and cross-sectional views
of a light emitting diode chip according to yet another exemplary
embodiment of the present disclosure, which correspond to FIG. 11
to FIG. 15, respectively.
[0196] Referring to FIG. 27 to FIG. 31, a light emitting diode chip
400 according to this exemplary embodiment is generally similar to
the light emitting diode chips according to the above exemplary
embodiments 100, 200, 300 described in FIG. 11 to FIG. 15, FIG. 17
to FIG. 21, or FIG. 22 to FIG. 26 except that the light emitting
diode chip 400 further includes an extension electrode 135.
[0197] The extension electrode 135 may form ohmic contact with the
first conductive type semiconductor layer 121. The extension
electrode 135 may be formed along a second side surface 120b and a
fourth side surface 120d of a mesa 120m. The extension electrode
135 may be formed not only on the second side surface 120b and the
fourth side surface 120d of the mesa 120m, but also on a third side
surface 120c thereof. Grooves 120g may be formed in order to form
the extension electrode 135, but are not necessary.
[0198] A first opening 140a of an insulation layer 140 exposes the
extension electrode 135 while exposing the first conductive type
semiconductor layer 121. As in the above exemplary embodiments, the
first opening 140a of the insulation layer 140 includes a first
region 140a1 covered by the first pad electrode 151 and a second
region 140a2 exposed to the outside of a first pad electrode 151.
The first region 140a1 may be placed only on an upper surface of
the extension electrode 135, but is not limited thereto. Thus, the
first pad electrode 151 may contact the first conductive type
semiconductor layer 121.
[0199] The first pad electrode 151 may be electrically connected to
the first conductive type semiconductor layer 121 through the
extension electrode 135. Since the extension electrode 135 forms
ohmic contact with the first conductive type semiconductor layer
121, the first pad electrode 151 may be formed of a material that
does not form ohmic contact with the first conductive type
semiconductor layer 121. Accordingly, a material selection range
for the first pad electrode 151 and the second pad electrode 153
can be widened.
[0200] The light emitting diode chip 400 according to this
exemplary embodiment includes the extension electrode 135, thereby
further improving current spreading in the light emitting diode
chip 400.
[0201] FIG. 32A to FIG. 37B are plan views and cross-sectional
views illustrating a method of fabricating a light emitting diode
chip 100 according to another exemplary embodiment of the present
disclosure.
[0202] Detailed description of substantially the same components as
those of the above exemplary embodiments will be omitted. Although
the drawings of the following exemplary embodiment show a method of
fabricating two light emitting diode chips 101, it should be
understood that other implementations are also possible. The method
of fabricating the light emitting diode chip 100 according to the
exemplary embodiment may also be applied to fabrication of a single
light emitting diode chip 100 and to fabrication of three or more
light emitting diode chips 101 on a large wafer. Further, although
the following description will focus on the method of manufacturing
the light emitting diode chip 100, it should be understood by those
skilled in the art that this method can also be similarly applied
to methods of manufacturing the light emitting diode chips 200,
300, 400.
[0203] In each of the drawings, line L1 is defined as a boundary
line between unit diode regions UD2. That is, light emitting
structures 120 at both sides with reference to the line L1 are
divided to provide two light emitting diode chips 101. In addition,
each of the cross-sectional views is taken from the corresponding
plan view. For example, a cross-section of the plan view of FIG.
32A is shown in FIG. 32B.
[0204] Referring to FIG. 32A and FIG. 32B, a light emitting
structure 120 is disposed on a substrate 110. The light emitting
structure 120 may be formed by various methods known in the art,
for example, metal organic chemical vapor deposition (MOCVD),
molecular beam epitaxy (MBE) or hydride vapor phase epitaxy
(HVPE).
[0205] Next, referring to FIG. 33A, FIG. 33B, FIG. 34A, and FIG.
34B, mesas 120m including grooves 120g and a contact electrode 130
are formed. In addition, the light emitting structure 120 is
partially removed to form an isolation trench 120i that exposes an
upper surface of the substrate 110.
[0206] Specifically, referring to FIG. 33A and FIG. 33B, the
contact electrode 130 is disposed on the light emitting structure
120.
[0207] The contact electrode 130 is disposed on a second conductive
type semiconductor layer 125 of the light emitting structure 120
and may be in ohmic contact with the second conductive type
semiconductor layer 125. The contact electrode 130 may include an
optically transparent conductive oxide and/or an optically
transparent metal. For example, formation of the contact electrode
130 may include depositing indium tin oxide (ITO) on the second
conductive type semiconductor layer 125 through sputtering and/or
e-beam evaporation. However, it should be understood that other
implementations are also possible. Alternatively, the contact
electrode 130 may include various kinds of optically transparent
conductive oxides such as ZnO and may be formed by various
processes depending upon the kind of conductive oxide.
[0208] Next, referring to FIG. 34A and FIG. 34B, the mesas 120m
each including the second conductive type semiconductor layer 125
and the active layer 123 are disposed so as to include a plurality
of grooves 120g disposed on side surfaces thereof by patterning the
light emitting structure 120. In addition, an isolation trench 120i
is formed so as to expose the upper surface of the substrate 110
through the second conductive type semiconductor layer 125, the
active layer 123 and the first conductive type semiconductor layer
121 by patterning the light emitting structure 120. Patterning of
the light emitting structure 120 may be performed by, for example,
dry etching and/or wet etching.
[0209] By the isolation trench 120i, the light emitting structure
120 is divided into a plurality of light emitting structures 120
respectively disposed on a plurality of unit diode regions UD2.
Accordingly, the isolation trench 120i may be disposed along line
L1. In this way, the light emitting structure 120 is divided into
the plurality of light emitting structures 120 respectively
disposed on the plurality of unit diode regions UD2 by forming the
isolation trench 120i, thereby relieving stress caused by
difference in coefficient of thermal expansion between the
substrate 110 and the light emitting structure 120. As a result, it
is possible to suppress wafer bowing during fabrication of the
light emitting diode chips 101.
[0210] The contact electrode 130 may be subjected to patterning and
patterning of the contact electrode 130 may include forming
openings 130b that partially expose an upper surface of the second
conductive type semiconductor layer 125. Patterning of the contact
electrode 130 may be performed by dry etching and/or wet
etching.
[0211] Although the contact electrode 130 is illustrated as being
formed prior to patterning of the light emitting structure 120 in
the above exemplary embodiment, it should be understood that other
implementations are also possible. In various exemplary
embodiments, the contact electrode 130 may be disposed on the
second conductive type semiconductor layer 125 after patterning the
light emitting structure 120.
[0212] Next, referring to FIG. 35A and FIG. 35B, an insulation
layer 140 including first openings 140a and second openings 140b is
disposed so as to cover upper and side surfaces of the light
emitting structure.
[0213] Formation of the insulation layer 140 may include forming a
SiO.sub.2 layer through a typical deposition method known to those
skilled in the art, followed by patterning the SiO.sub.2 layer.
Patterning may be performed by an etching or lift-off process. In
this exemplary embodiment, the insulation layer 140 may be disposed
to cover the upper surface of the substrate 110 exposed through the
isolation trench 120i.
[0214] In addition, formation of the insulation layer 140 may
include forming a distributed Bragg reflector in which material
layers having different indices of refraction are alternately
stacked one above another. For example, formation of the insulation
layer 140 may include alternately stacking a SiO.sub.2 layer and a
TiO.sub.2 layer using a well-known method such as sputtering.
[0215] Next, referring to FIG. 36A and FIG. 36B, a first pad
electrode 151 and a second pad electrode 153 may be disposed on the
insulation layer 140.
[0216] The first pad electrode 151 may be in ohmic contact with the
first conductive type semiconductor layer 121 through the first
openings 140a of the insulation layer 140. Likewise, the second pad
electrode 153 may contact and be electrically connected to the
contact electrode 130 through the second openings 140b of the
insulation layer 140. The first and second pad electrodes 151, 153
may be formed by the same processes, for example, through
deposition and/or plating, followed by patterning through
photolithography/etching technology or lift-off technology.
[0217] Next, referring to FIG. 37A and FIG. 37B, a portion 110a of
the substrate 110 may be removed so as to reduce the thickness of
the substrate 110. As a result, the thickness of each of the unit
diode regions UD2 may be reduced by T1. Then, the substrate 110 may
be divided along line L1, thereby providing a plurality of light
emitting diode chips 101 as shown in FIG. 11 to FIG. 16.
[0218] Removal of the portion 110a of the substrate 110 may include
partially removing the substrate 110 through physical and/or
chemical methods. For example, the substrate 110 may be partially
removed by lapping, grinding, and the like. Reduction in thickness
of the substrate 110 can cause increase in stress while the
substrate 110 supports a wafer in a bowed state due to difference
in coefficient of thermal expansion. As a result, stress applied to
the light emitting structure 120 increases, thereby causing a high
probability of damage to the light emitting structure 120. However,
according to this exemplary embodiment, the isolation trench 120i
dividing the light emitting structure 120 into the plurality of
light emitting structure 120 is formed before decreasing the
thickness of the substrate 110, thereby preventing damage to the
light emitting structure 120 caused by reduction in thickness of
the substrate 110 by relieving wafer bowing and stress.
Particularly, since stress can be further relieved due to the
relatively small unit diode regions UD2, the thickness of each of
the unit diode regions UD2 can be reduced to about 90 .mu.m or
less.
[0219] Division of the substrate 110 along line L1 may include
dividing the substrate 110 through scribing and breaking. In some
exemplary embodiments, scribing may include internal machining of
the substrate 110 using an internal machining laser. With the
internal machining laser, at least one modification region 111
having a band shape extending in the horizontal direction may be
disposed on at least one side surface of the substrate 110. In this
exemplary embodiment, the modification region 111 may be separated
from the upper surface of the substrate 110 by a depth of 30 .mu.m
to 35 .mu.m. Since such a modification region 111 is disposed below
the isolation trench 120i, there is no probability of damage to the
light emitting structure 120 during internal machining.
Accordingly, the modification region 111 can be disposed relatively
near the upper surface of the substrate 110 and thus the separation
distance between the modification region 111 and the substrate 110
may be in the above range. In this way, the modification region 111
can be disposed relatively near the upper surface of the substrate
110, thereby realizing a slimmer light emitting diode chip 100.
[0220] In the light emitting diode chip 100 and the light emitting
device according to the above exemplary embodiments, the upper
surface of the substrate 110 includes an exposed portion, thereby
suppressing wafer bowing during fabrication of the light emitting
diode chip 100. As a result, since the degree of wafer bowing is
relatively small, the thickness of the substrate 110 can be reduced
while improving production yield of the light emitting diode chip
100, as described above. Thus, the light emitting diode chip 100
and the light emitting device have a compact and slim structure and
high reliability. Further, since the insulation layer 140 extends
to cover the side surface of the light emitting structure 120 and
the exposed portion of the upper surface of the substrate 110,
particularly, the protrusions 110p of the substrate 110, the light
emitting diode chip 100 can have further improved luminous
efficacy. Furthermore, with such a structure of the insulation
layer 140, the bonding portions 211, 213 can cover the side surface
of the light emitting diode chip 100, thereby achieving compactness
of the light emitting device while improving mechanical stability
thereof.
[0221] As such, with good properties in terms of mechanical
stability and luminous efficacy and the compact and slim structure,
the light emitting device according to the exemplary embodiments
can be advantageously applied to portable electronic apparatuses.
By way of example, the light emitting device or the light emitting
diode chip 100 may be applied to a paper writing board that
requires a slim thickness. In another example, the light emitting
device may be applied to an input device such as a keyboard, in
which the light emitting device is disposed under each key to allow
light to be emitted through the keys. In such an input device, the
keys are subjected to repeated external stress (for example,
pressure applied for data input). In addition, a portable input
device requires a slim thickness and a small size. The light
emitting device according to the exemplary embodiments having such
a compact and slim structure may be suitably applied to a portable
input device having a slim structure while securing mechanical
stability, thereby preventing failure of the light emitting device
caused by operation of the keyboard (for example, pressure applied
to the key).
[0222] FIG. 38 is a schematic cross-sectional view of the light
emitting diode chip 100 including a wavelength conversion part
according to an exemplary embodiment of the present disclosure.
Here, since the light emitting diode chip 100 is the same as the
light emitting diode chip 100 described with reference to FIG. 11
to FIG. 16, some repeated reference numerals are omitted. In
addition, although the light emitting diode chip 100 is illustrated
by way of example, the light emitting diode chip 200, 300 or 400
according to the other exemplary embodiments may also be used
instead of the light emitting diode chip 100.
[0223] Referring to FIG. 38, a wavelength conversion part 500 may
be disposed on one surface of the substrate 110 through which light
is emitted. The wavelength conversion part 500 may include a
transparent resin 510 and phosphor particles 530 dispersed in the
transparent resin. The phosphor particles 530 may be uniformly
dispersed in the transparent resin 510. Alternatively, the phosphor
particles 530 may be concentrated in a region under the wavelength
conversion part 500, that is, near the substrate, as shown in FIG.
38. The wavelength conversion part 500 may directly contact the
substrate 110 and may be formed by, for example, screen printing or
spraying.
[0224] The wavelength conversion part 500 is disposed on the
surface of the substrate 110 through which light is emitted, and
can convert wavelengths of at least some of light emitted from the
active layer 123, thereby realizing a mixture of colors such as
white light.
[0225] For example, the light emitting diode chip 100 may be
configured to emit blue light and the wavelength conversion part
500 may include the phosphor particles 530, which convert blue
light into yellow light or green light and red light. As a result,
mixed light of blue light and wavelength-converted light emitted
from the phosphor particles 530 can be realized.
[0226] The light emitting diode chip 100 can emit UV light or green
light according to the material of the active layer 123, as well as
the blue light.
[0227] FIG. 39 is a schematic cross-sectional view of the light
emitting diode chip 100 including a wavelength conversion part
according to an exemplary embodiment of the present disclosure, and
FIG. 40 is a schematic perspective view of the light emitting diode
chip of FIG. 39.
[0228] Referring to FIG. 39 and FIG. 40, the wavelength conversion
part 500 according to the above exemplary embodiment is disposed on
the upper surface of the substrate 110 to cover the upper surface
of the substrate 110, whereas the wavelength conversion part 500
according to this exemplary embodiment covers not only the upper
surface of the substrate 110 but also a side surface thereof.
[0229] As in the above exemplary embodiments, the wavelength
conversion part 500 may be directly disposed on the light emitting
diode chip 100 and may be packaged or modularized together with the
light emitting diode chip 100. However, it should be understood
that other implementations are also possible. After the light
emitting diode chip 100 is mounted in a package level or a module
level, the wavelength conversion part 500 may be mounted on the
light emitting diode chip 100. This exemplary embodiment will be
described below in more detail.
[0230] FIG. 41 is a schematic cross-sectional view of a light
emitting device according to an exemplary embodiment of the present
disclosure.
[0231] Referring to FIG. 41, the light emitting device includes a
second substrate 1000, a light emitting diode chip 100 disposed on
the second substrate 1000, a first bonding portion 211, and a
second bonding portion 213.
[0232] The second substrate 1000 can provide a region on which the
light emitting diode chip 100 will be mounted, and may be, for
example, a substrate of a light emitting diode or a substrate of a
light emitting module. The second substrate 1000 may include a base
310 and a conductive pattern 320 formed on the base 310. The
conductive pattern 320 includes first and second conductive pads
321, 323. The second substrate 1000 may include a conductive
substrate, an insulating substrate, or a printed circuit board
(PCB). The second substrate 1000 may be a hard substrate or a
flexible transparent substrate, without being limited thereto.
Although the light emitting diode chip 100 is non-flexible, since
the light emitting diode chip 100 according to the exemplary
embodiment can be provided in the form of a slim small chip, it is
possible to provide a flexible light paper or a very thin light
strap by arranging a plurality of such chips.
[0233] The first and second conductive pads 321, 323 are
electrically separated from each other. For example, the first and
second conductive pads 321, 323 may be separated from each other by
a distance D4 to be electrically insulated from each other. Here,
the first and second conductive pads 321, 323 may be electrically
connected to the first pad electrode 151 and the second pad
electrode 153 of the light emitting diode chip 100, respectively.
However, it should be understood that other implementations are
possible so long as the second substrate 1000 provides a region on
which the light emitting diode chip 100 will be mounted and has a
structure for electrical connection to the light emitting diode
chip 100.
[0234] The light emitting diode chip 100 is placed on the second
substrate 1000 and is electrically connected to the second
substrate 1000. Here, although the light emitting diode chip 100
are the same as the light emitting diode chip 100 described with
reference to FIG. 11 to FIG. 16, it should be understood that other
implementations are also possible. That is, the light emitting
diode chip 200, 300 or 400 described with reference to FIG. 17 to
FIG. 21, FIG. 22 to FIG. 26, or FIG. 27 to FIG. 31 may be used
instead of the light emitting diode chip 100.
[0235] The first bonding portion 211 and the second bonding portion
213 are placed between the light emitting diode chip 100 and the
second substrate 1000 and bond the light emitting diode chip 100 to
the second substrate 1000 while electrically connecting the light
emitting diode chip 100 thereto. The first bonding portion 211 may
contact the first pad electrode 151 of the light emitting diode
chip 100 and the first conductive pad 321 of the second substrate
1000. Similarly, the second bonding portion 213 may contact the
second pad electrode 153 of the light emitting diode chip 100 and
the second conductive pad 323 of the second substrate 1000. The
first and second bonding portions 211, 213 may be formed of any
material capable of bonding the light emitting diode chip 100 to
the second substrate 1000 while electrically connecting the light
emitting diode chip 100 thereto. The first and second bonding
portions 211, 213 may include, for example, solder, or may be
conductive plastics, for example, a conductive bonding agent.
[0236] In addition, at least one of the first bonding portion 211
and the second bonding portion 213 may contact at least part of the
side surface of the light emitting diode chip 100. In this
exemplary embodiment, at least one of the first bonding portion 211
and the second bonding portion 213 may cover at least part of the
insulation layer 140 at the side surface of the light emitting
structure 120. Furthermore, the first bonding portion 211 may cover
at least part of the lower surface of the substrate 110 exposed
around the light emitting structure 120, and may further cover at
least part of the side surface of the substrate 110.
[0237] As such, since at least one of the first bonding portion 211
and the second bonding portion 213 is configured to contact at
least part of the side surface of the light emitting diode chip
100, a shortest distance D3 between the first bonding portion 211
and the second bonding portion 213 may be greater than the shortest
distance D1 between the first pad electrode 151 and the second pad
electrode 153. Thus, even in the case where D1 has a relatively
small value (for example, about 3 .mu.m to 20 .mu.m), D3 can be set
to a greater value than D1, thereby preventing short circuit upon
mounting of the light emitting diode chip 100. Particularly, since
the insulation layer 140 of the light emitting diode chip 100
stably covers the side surface of the light emitting structure 120,
no electrical problem occurs even in the structure wherein the
first bonding portion 211 and/or the second bonding portion 213
contact the side surface of the light emitting diode chip 100.
Particularly, since the insulation layer 140 extends to an exposed
portion of an upper surface of the substrate 110, the insulation
layer 140 can more stably insulate the side surface of the light
emitting structure 120, thereby preventing short circuit through
the bonding portions 211, 213 and the side surface of the light
emitting structure 120.
[0238] In addition, since the contact areas between the bonding
portions 211, 213 and the light emitting diode chip 100 is
increased, the light emitting diode chip 100 can be more stably
mounted on the substrate, thereby improving mechanical stability of
the light emitting device. Furthermore, the thickness of each of
the bonding portions 211, 213 interposed between the light emitting
diode chip 100 and the second substrate 1000 (i.e. the distance
between the light emitting diode chip 100 and the second substrate
1000) can be reduced, thereby realizing a more compact and slimmer
light emitting device.
[0239] On the other hand, the first bonding portion 211 may contact
the first conductive type semiconductor layer 121 or the substrate
110 through the second region 140a2 of the first opening 140a of
the insulation layer 140. The first bonding portion 211 may be
formed of a material capable of forming Schottky contact with the
first conductive type semiconductor layer 121. Accordingly, even in
the case where the first bonding portion 211 contacts the first
conductive type semiconductor layer 121, there is no influence on
forward voltage of the light emitting diode chip 100. Accordingly,
the area of second region 140a2 is increased, thereby further
stabilizing the manufacturing process without influencing
electrical characteristics of the light emitting diode chip.
[0240] Although the light emitting diode chip 100 is illustrated as
being mounted on the substrate 1000 in this exemplary embodiment,
the light emitting diode chip 100 including the wavelength
conversion part 500 may also be mounted on the substrate 1000, as
described with reference to FIG. 38 and FIG. 39.
[0241] FIG. 42 is a schematic cross-sectional view of a light
emitting device according to another exemplary embodiment of the
present disclosure.
[0242] Referring to FIG. 42, the light emitting device according to
this exemplary embodiment is generally similar to the light
emitting device described with reference to FIG. 41 except that a
distance D4 between first and second conductive pads 321, 323
provided to the substrate 1000 is greater than the distance D1
between the first pad electrode 151 and the second pad electrode
153. A first bonding material 211 and a second bonding material 213
are placed between the first and second conductive pads 321, 323
and cover side surfaces of the first and second conductive pads
321, 323, respectively.
[0243] As shown in FIG. 42, a distance D3 between the first bonding
material 211 and the second bonding material 213 may be greater
than the distance D1 between the first pad electrode 151 and the
second pad electrode 153 and may be smaller than the distance D4
between the first and second conductive pads 321, 323. However, it
should be understood that other implementations are also possible.
Alternatively, the first bonding material 211 and the second
bonding material 213 may be placed between the first pad electrode
151 and the second pad electrode 153 to cover the side surfaces of
the first pad electrode 151 and the second pad electrode 153,
respectively, and thus, the distance D3 between the first and
second bonding materials 211, 213 may be smaller than the distance
D1 between the first and second pad electrodes 151, 153.
[0244] The structure wherein the distance D4 between the first and
second conductive pads 321, 323 has a relatively large value can
easily prevent short circuit therebetween. Furthermore, when the
light emitting diode chip 100 is mounted on the surface of the
substrate using the first and second bonding materials 211, 213,
the location or orientation of the light emitting diode chip 100
can be changed during heating or curing of the first and second
bonding materials 211, 213. However, as in this exemplary
embodiment, the first and second conductive pads 321, 323 are
arranged to have a relatively large distance D4 therebetween and
the first and second bonding materials 211, 213 are provided to a
region between the first and second conductive pads 321, 323,
thereby preventing the location and orientation of the light
emitting diode chip 100 from being changed. Furthermore, since the
first bonding material 211 fills the second region 140a2 of the
first opening 140a in the insulation layer 140, the light emitting
diode chip 100 can be further prevented from being changed.
[0245] FIG. 43 is partially perspective views of applications to
which a light emitting diode chip according to exemplary
embodiments of the present disclosure is applied.
[0246] The applications may be, for example, a light paper or a
light strap (or a light band), and may have flexibility. It should
be understood that the applications can also be referred to as
light emitting devices.
[0247] Referring to FIG. 43A, conductive interconnections 2321,
2323 may be disposed on a base 2000, and light emitting diode chips
100 may be bonded to the conductive interconnections 2321,
2323.
[0248] The base 2000 may be a flexible film, and may be a
transparent flexible film. The base 2000 may have an elongated band
shape or a wide paper shape.
[0249] The conductive interconnections 2321, 2323 have a thin
thickness so as to allow bending of the base 2000. The conductive
interconnections 2321, 2323 may have a greater width than the light
emitting diode chip 100 and may be arranged parallel to each
other.
[0250] The light emitting diode chips 100 may be bonded to the
conductive interconnections 2321, 2323 via the first and second
bonding materials 211, 213 described above.
[0251] The light emitting diode chips 100 emit light through the
substrates 110, as described in FIG. 11 to FIG. 16. Furthermore, in
a structure wherein the contact electrode 130 is a transparent
electrode and the insulation layer 140 is a light transmitting
layer, some of light generated in the active layer 123 can be
emitted through a region between the first and second pad
electrodes 151, 153. The light emitted through the region between
the first and second pad electrodes 151, 153 will be emitted
downwards through the base 2000.
[0252] Accordingly, the application according to this exemplary
embodiment can emit light in opposite directions thereof.
[0253] Although the application according to this exemplary
embodiment is illustrated as including the plurality of light
emitting diode chips 100, the light emitting diode chips 200, 300,
400 according to the other exemplary embodiments may also be
arranged therein.
[0254] Referring to FIG. 43B, an application according to another
exemplary embodiment is generally similar to the application
described with reference FIG. 43A except that a wavelength
conversion part 500 is formed on the light emitting diode chip 100.
The light emitting diode chip 100 including the wavelength
conversion part 500 is the same as the light emitting diode chip
described with reference to FIG. 38 or FIG. 39, and a detailed
description thereof will be omitted.
[0255] In the structure wherein the wavelength conversion part 500
is formed on the light emitting diode chip 100, at least part of
light emitted through the substrate 110 is subjected to wavelength
conversion. Conversely, light emitted to the region between the
first and second pad electrodes 151, 153 can be emitted to the
outside without wavelength conversion. Accordingly, it is possible
to provide an application emitting different colors in opposite
directions thereof.
[0256] FIG. 44 is a schematic view of a light strap according to an
exemplary embodiment of the present disclosure.
[0257] Referring to FIG. 44, the light strap according to this
exemplary embodiment includes a base 2000, conductive
interconnections (not shown), and an array of light emitting diode
chips 100, as described with reference to FIG. 43. The base 2000
has an elongated shape and may be a flexible transparent film.
[0258] Since the base 2000 is a flexible film and includes the
array of small light emitting diode chips 100 thereon, the light
strap can be easily deformed into a desired shape. Thus,
advantageously, such a light strap can be easily installed in a
narrow space, is suitable for ornamental or portable purposes, can
be used as internal or external ornamentation lamps for vehicles or
as various logo displays, and can also be attached to clothes.
[0259] It should be understood that the array of light emitting
diode chips 100 is illustrated by way of example in this exemplary
embodiment and the light emitting diode chips 200, 300, 400 may
also be used instead of the light emitting diode chips 100.
Furthermore, the light emitting diode chips 100, 200, 300, 400
including the wavelength conversion part 500 may also be used.
[0260] FIG. 45 is a schematic sectional view of an LED lamp
according to an exemplary embodiment of the present disclosure.
[0261] Referring to FIG. 45, the LED lamp includes a bulb base
3000, a central column 3100, an LED filament 3200, and a light
transmitting bulb 3300.
[0262] The bulb base 3000 has the same electrode structure as a
typical light bulb. In addition, the bulb base 3000 may receive
passive or active elements such as an AC/DC converter and the like
therein.
[0263] Since the bulb base 3000 has the same electrode structure as
that of the typical light bulb, the LED lamp according to the
exemplary embodiments may employ a typical socket and thus can
reduce installation costs for supplementary facilities in use of
the LED lamp.
[0264] The central column 3100 is secured to the bulb base 3000 and
is placed at the center of the LED lamp. The central column 3100
may include a support section, a column section, and an upper end.
The central column 3100 serves to support the LED filament 3200 and
may be formed of, for example, glass.
[0265] The LED filament 3200 is a light strap as described with
reference to FIG. 44 and includes a base, conductive
interconnections, and light emitting diode chips, and descriptions
of these components will be omitted. Since the LED filament 3200 is
formed as a flexible light strap, the LED filament 3200 can be
deformed into various shapes, such as a spiral shape.
[0266] The LED filament 3200 may be electrically connected to an
electrode of the bulb base 3000 through lead wires (not shown).
[0267] The light transmitting bulb 3300 surrounds the LED filament
3200 so as to separate the LED filament 3200 from an external
environment. The light transmitting bulb 3300 may be formed of
glass or plastic materials. The light transmitting bulb 3300 may
have a variety of shapes and may have the same shape as a typical
light bulb.
[0268] FIG. 46A to FIG. 48 are a perspective view, a plan view, a
sectional view and a circuit diagram of an application (i.e. an
electronic apparatus) according to other exemplary embodiments of
the present disclosure. FIG. 47 is a sectional view of each of unit
keys 440u of keys 440 and FIG. 48 is a circuit diagram of the unit
key 440u in operation of a light emitting unit 460.
[0269] Referring to FIG. 46A, an electronic apparatus 10 includes
an input device 400. For example, the electronic apparatus 10 may
be a notebook computer as shown in FIG. 46A and the input device
400 may be a keyboard. The electronic apparatus 10 may include a
housing 12 constituting a frame, a display 11, and the input device
400. In this exemplary embodiment, the input device 400 may be
integrally formed with the electronic apparatus 10. In other
exemplary embodiments, the input device 400 may be provided as a
separate device. As shown in FIG. 46B, the input device 400 may
individually constitute the electronic apparatus. It should be
understood that the electronic apparatus 10 according to this
exemplary embodiment is provided for illustration only and the
light emitting diode chip and/or the light emitting device
according to exemplary embodiments may be applied to any electronic
apparatus so long as the electronic apparatus includes the input
device 400. For example, various electronic apparatuses including
the input device 400, such as desktop computers, detectors, and
communication devices, fall within the scope of the present
disclosure.
[0270] As shown in FIG. 46A and FIG. 46B, the input device 400
includes keys 440 and a light emitting unit 460, and may further
include a housing 12 or 410, an input structure 420, and a
backlight unit 430.
[0271] The housing 12 or 410 may constitute an outer frame of the
input device 400 and serve to support the input structure 420, the
backlight 430 and the keys 440. The input structure 420 may serve
to receive and send various input signals in response to user
control through the keys 440. The input structure 420 may be
disposed under the keys 440 and may have various structures known
in the art. The backlight 430 can illuminate the keys 440 in an
upward direction in order to improve visibility of the input device
400 such as a keyboard and/or to provide additional functionality
to the input device 400. The backlight 430 may include the light
emitting diode chip and/or the light emitting device according to
the above exemplary embodiments. The backlight 430 may be disposed
to surround the key 440 or may be disposed below the keys 440. In
other exemplary embodiments, the backlight 430 can be omitted.
[0272] In this exemplary embodiment, the light emitting unit 460
may be disposed under at least one key 440 among the plural keys
440. In this exemplary embodiment, the key 440 may include a
luminous region disposed on a surface thereof such that light
emitted from the light emitting unit 460 can be discharged through
the luminous region of the key 440. Referring to FIG. 47, the key
440 is disposed above a circuit board 411 and is supported by a
supporter 450. In this exemplary embodiment, the circuit board 411
and the supporter 450 may be included in the input structure 420,
and when a user inputs a signal through the key 440 (for example,
signal input through pressure or touch), the signal can be input
through the supporter 450 and the circuit board 411. The light
emitting unit 460 is disposed on the circuit board 411 to be
positioned below the key 440. ON/OFF of the light emitting unit 460
may be controlled in response to an input signal through the key
440. For example, as shown in FIG. 48, a switch can be turned on or
off in response to an input signal through the key 440 such that a
resistor R.sub.key of a circuit is connected or disconnected in
order to control electric current applied to the light emitting
unit 460. When a user inputs a signal to the input structure by
pressing the keys 440 through such operation, the light emitting
unit 460 is turned on to emit light such that the light can be
discharged through the luminous regions of the corresponding keys
440. However, it should be understood that other implementations
are also possible. In other exemplary embodiments, the light
emitting unit 460 may be maintained in an ON state and may be
turned off in response to a user signal input through the keys 440
by pressing the keys 440 such that the luminous regions of the keys
440 become dark regions. In other exemplary embodiments, when a
user inputs a signal to the input structure by pressing the keys
440, the light emitting units 460 are operated to emit is light
having variable intensity, the intensity of the luminous regions of
the corresponding keys 440 varies.
[0273] The light emitting unit 460 disposed below such a key 440
may include the light emitting diode chip and/or the light emitting
device according to the above exemplary embodiments. For slimness
and compactness of electronic devices, the input device 400 is
required to have a very slim thickness and thus a compact light
emitting diode chip and/or a compact light emitting device can be
applied thereto. Particularly, the compact light emitting diode
chip and/or the compact light emitting device according to the
exemplary embodiments of the present disclosure are applied to an
input device such as a portable keyboard or to an input device of
an electronic apparatus such as a lightweight notebook computer in
order to prevent increase in volume of the electronic apparatus due
to increase in size of the light emitting unit 460, thereby
improving portability of the electronic apparatus. In addition, the
light emitting unit 460 disposed below each of the keys 440 is
subjected to continuous stress upon continuous operation of the key
440, and such stress is transferred to the light emitting device or
the light emitting diode chip 100 of the light emitting unit 460,
thereby causing failure of the light emitting unit 460. However,
the input device 400 includes the light emitting diode chip 100 or
the light emitting device according to the exemplary embodiments,
thereby preventing failure of the light emitting unit 460 caused by
continuous operation of the key 440.
[0274] In the above exemplary embodiments, the light emitting diode
chips and/or light emitting devices according to various exemplary
embodiments of the present disclosure are applied to the input
device of the electronic apparatus. However, it should be
understood that other implementations are also possible. The light
emitting diode chip and/or light emitting device may also be
applied to various electronic apparatuses, for example, a lighting
apparatus, a display device, and the like, which require a compact
light emitting unit.
[0275] FIG. 49 is a plan view of a flexible keyboard according to
an exemplary embodiment of the present disclosure, and FIG. 50 is a
partially cross-sectional view of the flexible keyboard of FIG.
49.
[0276] Referring to FIG. 49 and FIG. 50, the keyboard according to
this exemplary embodiment includes a flexible base 5000, conductive
interconnections 5321, 5323, a cover layer 5400, and light emitting
diode chips 100, and may further include a wavelength conversion
part 500.
[0277] The flexible base 5000 is similar to the base 2000 described
above and may be a transparent or opaque film. A circuit line 5320
is formed on the flexible base 5000 and conductive pads 5300 are
placed corresponding to keypads thereon. The conductive pads 5300
are connected to a connector of the keyboard.
[0278] The conductive interconnections 5321, 5323 are formed
together with the circuit line 5320 on the base 5000. The
conductive interconnections 5321, 5323 are formed in order to
supply power to the light emitting diode chips 100.
[0279] The cover layer 5400 may be formed on or attached to the
flexible base 5000. The cover layer 5400 covers the circuit line
5320 and the conductive interconnections 5321, 5323, and exposes
portions for electrical connection. The cover layer 5400 may be
formed of any material having flexibility, for example, silicone or
epoxy resins.
[0280] The light emitting diode chip 100 is disposed near each of
the conductive pads 5300. A plurality of light emitting diode chips
100 may be disposed around each of the conductive pads 5300 and may
be bonded to the conductive interconnections 5321, 5323. The light
emitting diode chips 100 are the same as the light emitting diode
chip described with reference to FIG. 11 to FIG. 16 and detailed
descriptions thereof will be omitted. Further, the light emitting
diode chips 200, 300, 400 according to the other exemplary
embodiments described above may also be used in addition to the
light emitting diode chips 100.
[0281] The wavelength conversion part 500 covers the light emitting
diode chip 100. The wavelength conversion part 500 may fill an
opening formed in cover layer 5400 to cover the light emitting
diode chip 100. The wavelength conversion part 500 may include a
transparent resin and phosphor particles dispersed therein. With
this structure, it is possible to realize a mixture of colors, such
as white light.
[0282] Although the wavelength conversion part 500 is illustrated
as covering the light emitting diode chip 100 in this exemplary
embodiment, an encapsulation material formed of a transparent resin
may cover the light emitting diode chip 100. In this exemplary
embodiment, light generated in the light emitting diode chip 100 is
discharged, thereby providing monochromatic light such as blue
light or green light.
[0283] This exemplary embodiment can provide a flexible keyboard
including the light emitting diode chips 100 disposed around each
of the keypads. The flexible keyboard may be used as an input
device for portable electronic apparatuses.
[0284] Although certain exemplary embodiments and implementations
have been described herein, other embodiments and modifications
will be apparent from this description. Accordingly, the inventive
concept is not limited to such embodiments, but rather to the
broader scope of the presented claims and various obvious
modifications and equivalent arrangements.
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