U.S. patent application number 15/831480 was filed with the patent office on 2018-04-12 for integrated circuit device and method of fabricating the same.
The applicant listed for this patent is SAMSUNG ELECTRONICS CO., LTD.. Invention is credited to YONGKUK JEONG, GI-GWAN PARK.
Application Number | 20180102293 15/831480 |
Document ID | / |
Family ID | 60659661 |
Filed Date | 2018-04-12 |
United States Patent
Application |
20180102293 |
Kind Code |
A1 |
JEONG; YONGKUK ; et
al. |
April 12, 2018 |
INTEGRATED CIRCUIT DEVICE AND METHOD OF FABRICATING THE SAME
Abstract
An integrated circuit device includes: a first fin-type active
region in a first area of a substrate, the first fin-type active
region having a first recess filled with a first source/drain
region; a first device isolation layer covering both lower
sidewalls of the first fin-type active region; a second fin-type
active region in a second area of the substrate, the second
fin-type active region having a second recess filled with a second
source/drain region; a second device isolation layer covering both
lower sidewalls of the second fin-type active region; and a fin
insulating spacer on the first device isolation layer, the fin
insulating spacer covering a sidewall of the first fin-type active
region under the first source/drain region.
Inventors: |
JEONG; YONGKUK; (YONGIN-SI,
KR) ; PARK; GI-GWAN; (HWASEONG-SI, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SAMSUNG ELECTRONICS CO., LTD. |
Suwon-si |
|
KR |
|
|
Family ID: |
60659661 |
Appl. No.: |
15/831480 |
Filed: |
December 5, 2017 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
15356821 |
Nov 21, 2016 |
9875938 |
|
|
15831480 |
|
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/823821 20130101;
H01L 21/845 20130101; H01L 27/0924 20130101; H01L 27/1104 20130101;
H01L 21/823878 20130101; H01L 27/1211 20130101; H01L 21/31111
20130101; H01L 21/823418 20130101; H01L 27/0886 20130101; H01L
29/785 20130101; H01L 21/31116 20130101; H01L 21/31155 20130101;
H01L 21/823814 20130101; H01L 21/823431 20130101; H01L 21/823481
20130101 |
International
Class: |
H01L 21/8234 20060101
H01L021/8234; H01L 27/11 20060101 H01L027/11; H01L 27/088 20060101
H01L027/088; H01L 21/311 20060101 H01L021/311 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 20, 2016 |
KR |
10-2016-0076615 |
Claims
1. A method of fabricating an integrated circuit device, the method
comprising: forming a first fin-type active region in a first
region of a substrate and a second fin-type active region in a
second region of the substrate; forming a spacer layer on the
substrate, the spacer layer covering the first fin-type active
region and the second fin-type active region; and etching the
spacer layer, the first fin-type active region and the second
fin-type active region to simultaneously form a first recess on the
first fin-type active region, a second recess on the second
fin-type active region, and a first fin insulating spacer, the
first fin insulating spacer being a first residual portion of the
spacer layer, which covers a sidewall of the first fin-type active
region under the first recess.
2. The method of claim 1, wherein, in the etching, a sidewall of
the second fin-type active region under the second recess is
exposed during the formation of the first fin insulating
spacer.
3. The method of claim 1, wherein, in the etching, a second fin
insulating spacer is further formed during the formation of the
first fin insulating spacer, the second fin insulating spacer
covering a sidewall of the second fin-type active region under the
second recess.
4. The method of claim 3, wherein a height of the second fin
insulating spacer is smaller than a height of the first fin
insulating spacer.
5. The method of claim 1, wherein a depth of the first recess is
smaller than a depth of the second recess.
6. The method of claim 1, wherein the etching comprises dry etching
and wet cleaning, the dry etching and the wet cleaning being
performed in this stated order.
7. The method of claim 6, wherein the etching further comprises
pre-treatment for damaging at least a portion of the spacer layer,
after the dry etching, before the wet cleaning.
8. The method of claim 6, wherein the etching further comprises
applying plasma to at least a portion of the spacer layer, after
the dry etching, before the wet cleaning, the plasma being obtained
from a gas comprising CF.sub.4, O.sub.2, He, HBr, NF.sub.3, Ar,
Cl.sub.2, N.sub.2, CH.sub.3F, CH.sub.4, or combinations
thereof.
9. The method of claim 6, wherein the etching further comprises
implanting ions into at least a portion of the spacer layer, after
the dry etching, before the wet cleaning, the ions being obtained
from a gas comprising Ge, BF.sub.2, As, or combinations
thereof.
10. The method of claim 1, wherein the spacer layer comprises
SiOCN, SiCN, or combinations thereof.
11. A method of fabricating an integrated circuit device, the
method comprising: forming a first fin-type active region and a
first device isolation layer in a first area of a substrate and a
second fin-type active region and a second device isolation layer
in a second area of the substrate, the first device isolation layer
covering both lower sidewalls of the first fin-type active region,
and the second device isolation layer covering both lower sidewalls
of the second fin-type active region; forming a first dummy gate
structure on the first device isolation layer and a second dummy
gate structure on the second device isolation layer, the first
dummy gate structure covering the first fin-type active region, and
the second dummy gate structure covering second fin-type active
region; forming a spacer layer, the spacer layer covering the first
fin-type active region, the second fin-type active region, the
first dummy gate structure, and the second dummy gate structure;
and etching the spacer layer, the first fin-type active region and
the second fin-type active region to simultaneously form a first
gate insulating spacer, a second gate insulating spacer, a first
recess on the first fin-type active region, a second recess on the
second fin-type active region, and a first fin insulating spacer,
the first gate insulating spacer comprising a first portion of the
spacer layer and covering both sidewalls of the first dummy gate
structure, the second gate insulating spacer comprising a second
portion of the spacer layer and covering both sidewalls of the
second dummy gate structure, and the first fin insulating spacer
comprising a third portion of the spacer layer and covering a
sidewall of the first fin-type active region between the first
device isolation layer and the first recess.
12. The method of claim 11, wherein, in the etching, a portion of
the spacer layer covering a sidewall of the second fin-type active
region is removed, whereby the sidewall of the second fin-type
active region between the second device isolation layer and the
second recess is exposed after the formation of the first fin
insulating spacer.
13. The method of claim 11, wherein, in the etching, a second fin
insulating spacer is further formed during the formation of the
first fin insulating spacer, the second fin insulating spacer
comprising a fourth portion of the spacer layer and covering a
sidewall of the second fin-type active region between the second
device isolation layer and the second recess.
14. The method of claim 13, wherein a height of the second fin
insulating spacer is smaller than a height of the first fin
insulating spacer.
15. The method of claim 11, wherein, in the etching, a depth of the
first recess is smaller than a depth of the second recess.
16. The method of claim 11, wherein the etching comprises dry
etching and wet cleaning, the dry etching and the wet cleaning
being performed in this stated order, wherein the dry etching
comprises: forming a preliminary gate insulating spacer by removing
a portion of the spacer layer, the preliminary gate insulating
spacer covering both sidewalls of each of the first and second
dummy gate structures; forming a first preliminary recess by
removing a portion of the first fin-type active region; forming a
second preliminary recess by removing a portion of the second
fin-type active region; and forming a preliminary fin insulating
spacer, which is a residual portion of the spacer layer remaining
on a sidewall of the first fin-type active region between the first
device isolation layer and the first preliminary recess and a
sidewall of the second fin-type active region between the second
device isolation layer and the second preliminary recess, and the
wet cleaning comprises: removing a portion of the preliminary gate
insulating spacer; further removing a portion of the first fin-type
active region via the first preliminary recess; and further
removing a portion of the second fin-type active region via the
second preliminary recess.
17. The method of claim 16, wherein the etching further comprises a
pre-treatment for damaging at least a portion of the preliminary
fin insulating spacer, after the dry etching, before the wet
cleaning.
18. The method of claim 11, wherein the etching comprises dry
etching and wet cleaning, the dry etching and the wet cleaning
being performed in this stated order, the etching further comprises
a pre-treatment, after the dry etching, before the wet cleaning,
and the pre-treatment comprises modifying at least a portion of the
spacer layer by using plasma, ion implantation, or combinations
thereof.
19. The method of claim 18, wherein the pre-treatment comprises
implanting ions into at least a portion of the spacer layer, the
ions being obtained from a gas comprising Ge, BF.sub.2, As, or
combinations thereof.
20. The method of claim 11, wherein, in the etching, the first fin
insulating spacer is integrally connected to the first gate
insulating spacer.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a continuation of U.S. application Ser.
No. 15/356,821 filed on Nov. 21, 2016, which claims priority under
35 U.S.C. .sctn. 119 of Korean Patent Application No.
10-2016-0076615, filed on Jun. 20, 2016, in the Korean Intellectual
Property Office, the disclosure of which is incorporated by
reference herein in its entirety.
TECHNICAL FIELD
[0002] The inventive concept relates to an integrated circuit
device and a method of fabricating the same, and more particularly,
to an integrated circuit device including a field effect
transistor, and a method of fabricating the same.
DISCUSSION OF RELATED ART
[0003] Recently, due to the rapid development of the electronic
technology, down-scaling of semiconductor devices has been
continuously performed at a fast speed. However, due to the
miniaturization of the semiconductor devices, various defects, such
as short circuits, may occur in the dense and/or irregular
structure areas of the devices, and the resulting defects may
degrade the reliability of the semiconductor devices and may reduce
their operation accuracy. Since semiconductor devices require fast
operation speeds as well as operation accuracy, various studies for
optimizing structures of transistors included in the semiconductor
devices are being carried out.
SUMMARY
[0004] The inventive concept provides an integrated circuit device
having a structure enabling unit devices in the integrated circuit
device to secure different electrical properties that are required
depending upon the kinds and structures of the unit devices,
thereby enhancing the reliability of the integrated circuit device.
The inventive concept also provides a method of fabricating the
integrated circuit device, and the method may include a low-cost
simplified process.
[0005] According to an aspect of the inventive concept, there is
provided an integrated circuit device including: a substrate having
a first area and a second area; a first fin-type active region in
the first area, the first fin-type active region including a first
fin portion having a first recess filled with a first source/drain
region; a first device isolation layer covering both lower
sidewalls of the first fin-type active region; a second fin-type
active region in the second area, the second fin-type active region
including a second fin portion having a second recess filled with a
second source/drain region; a second device isolation layer
covering both lower sidewalls of the second fin-type active region;
and a fin insulating spacer covering at least one of a first
sidewall of the first fin-type active region and a second sidewall
of the second fin-type active region, the first sidewall of the
first fin-type active region being between the first device
isolation layer and the first recess, and the second sidewall of
the second fin-type active region being between the second device
isolation layer and the second recess.
[0006] According to another aspect of the inventive concept, there
is provided an integrated circuit device including: a first
fin-type active region in a first area of a substrate, the first
fin-type active region protruding from the substrate and having a
first channel region and a first recess; a first device isolation
layer in the first area, the first device isolation layer covering
both lower sidewalls of the first fin-type active region; a first
gate line on the first device isolation layer, the first gate line
covering the first channel region; a first source/drain region in
the first recess; a second fin-type active region in a second area
of the substrate, the second fin-type active region protruding from
the substrate and having a second channel region and a second
recess, the second area of the substrate being spaced apart from
the first area of the substrate; a second device isolation layer in
the second area, the second device isolation layer covering both
lower sidewalls of the second fin-type active region; a second gate
line on the second device isolation layer, the second gate line
covering the second channel region; a second source/drain region in
the second recess; a fin insulating spacer only in the first area
out of the first area and the second area, the fin insulating
spacer covering both sidewalls of the first fin-type active region
between the first device isolation layer and the first source/drain
region.
[0007] According to a further aspect of the inventive concept,
there is provided an integrated circuit device including: a first
fin-type active region in a first area of a substrate, the first
fin-type active region protruding from the substrate and having a
first channel region and a first recess; a first device isolation
layer in the first area, the first device isolation layer covering
both lower sidewalls of the first fin-type active region; a first
gate line on the first device isolation layer, the first gate line
covering the first channel region; a first source/drain region in
the first recess; a second fin-type active region in a second area
of the substrate, the second fin-type active region protruding from
the substrate and having a second recess and a second channel
region, the second area of the substrate being spaced apart from
the first area of the substrate; a second device isolation layer in
the second area, the second device isolation layer covering both
lower sidewalls of the second fin-type active region; a second gate
line on the second device isolation layer, the second gate line
covering the second channel region; a second source/drain region in
the second recess; a first fin insulating spacer covering a
sidewall of the first fin-type active region between the first
device isolation layer and the first source/drain region, and
having a first height; and a second fin insulating spacer covering
a sidewall of the second fin-type active region between the second
device isolation layer and the second source/drain region, and
having a second height that is smaller than the first height.
[0008] According to yet another aspect of the inventive concept,
there is provided a method of an integrated circuit device, the
method including: forming a first fin-type active region in a first
area of a substrate and forming a second fin-type active region in
a second area of the substrate; forming a spacer layer on the
substrate, the spacer layer covering the first fin-type active
region and the second fin-type active region; and etching the
spacer layer, the first fin-type active region and the second
fin-type active region to simultaneously form a first recess on the
first fin-type active region, a second recess on the second
fin-type active region, and a first fin insulating spacer, the
first fin insulating spacer being a first residual portion of the
spacer layer, which covers a sidewall of the first fin-type active
region under the first recess.
[0009] According to yet another aspect of the inventive concept,
there is provided a method of an integrated circuit device, the
method including: forming a first fin-type active region and a
first device isolation layer in a first area of a substrate and a
second fin-type active region and a second device isolation layer
in a second area of the substrate, the first device isolation layer
covering both lower sidewalls of the first fin-type active region,
and the second device isolation layer covering both lower sidewalls
of the second fin-type active region; forming a first dummy gate
structure on the first device isolation layer and a second dummy
gate structure on the second device isolation layer, the first
dummy gate structure covering the first fin-type active region, and
the second dummy gate structure covering the second fin-type active
region; forming a spacer layer, which covers the first fin-type
active region, the second fin-type active region, the first dummy
gate structure, and the second dummy gate structure; and etching
the spacer layer, the first fin-type active region and the second
fin-type active region to simultaneously form a first gate
insulating spacer, a second gate insulating spacer, a first recess
on the first fin-type active region, a second recess on the second
fin-type active region, and a first fin insulating spacer, the
first gate insulating spacer including a first portion of the
spacer layer and covering both sidewalls of the first dummy gate
structure, the second gate insulating spacer including a second
portion of the spacer layer and covering both sidewalls of the
second dummy gate structure, and the first fin insulating spacer
including a third portion of the spacer layer and covering a
sidewall of the first fin-type active region between the first
device isolation layer and the first recess.
[0010] According to yet another aspect of the inventive concept,
there is provided an integrated circuit device including: a memory
area, and a logic area connected to or spaced apart from the memory
area; a first transistor including a first source/drain region
filled in a first recessed portion of a first fin-type active
region in the memory area; a first device isolation layer covering
both lower sidewalls of the first fin-type active region in the
memory area; a second transistor including a second source/drain
region filled in a second recessed portion of a second fin-type
active region in the logic area; a second device isolation layer
covering both lower sidewalls of the second fin-type active region
in the logic area; a first fin insulating spacer covering a first
sidewall of the first fin-type active region between the first
source/drain region and the first device isolation layer, the first
fin insulating spacer having a first height; and a second fin
insulating spacer covering a second sidewall of the second fin-type
active region between the second source/drain region and the second
device isolation layer, the second fin insulating spacer having a
second height smaller than the first height, or no second fin
insulating spacer covering the second sidewall of the second
fin-type active region between the second source/drain region and
the second device isolation layer.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Exemplary embodiments of the inventive concept will be more
clearly understood from the following detailed description taken in
conjunction with the accompanying drawings in which:
[0012] FIG. 1 is a planar layout diagram showing a main
configuration of an integrated circuit device according to an
exemplary embodiment of the inventive concept;
[0013] FIG. 2A shows perspective views of main components included
in a dashed line area indicated by "IA" in FIG. 1 and a dashed line
area indicated by "IIA" in FIG. 1, FIG. 2B shows cross-sectional
views respectively taken along line B1-B1' and line B2-B2' of FIG.
2A, FIG. 2C shows cross-sectional views respectively taken along
line C1-C1' and line C2-C2' of FIG. 2A, and FIG. 2D shows
cross-sectional views respectively taken along line D1-D1' and line
D2-D2' of FIG. 2A;
[0014] FIGS. 3A and 3B are cross-sectional views of an integrated
circuit device according to an exemplary embodiment of the
inventive concept;
[0015] FIG. 4A shows perspective views of an integrated circuit
device according to an exemplary embodiment of the inventive
concept, and FIG. 4B shows cross-sectional views taken along line
B1-B1' and line B2-B2' of FIG. 4A;
[0016] FIG. 5 shows cross-sectional views of an integrated circuit
device according to an exemplary embodiment of the inventive
concept;
[0017] FIG. 6 is a block diagram of an integrated circuit device
according to an exemplary embodiment of the inventive concept;
[0018] FIG. 7A is a circuit diagram of an exemplary memory device,
which may be included in an integrated circuit device according to
an exemplary embodiment of the inventive concept, and FIG. 7B is a
plan view showing a main configuration of the memory device shown
in FIG. 7A;
[0019] FIG. 8 is a plan view showing a main configuration of an
exemplary logic device, which may be included in an integrated
circuit device according to an exemplary embodiment of the
inventive concept;
[0020] FIGS. 9A to 17B are cross-sectional views showing a method
of fabricating an integrated circuit device according to a process
order, according to an exemplary embodiment of the inventive
concept, FIGS. 9A, 10A, . . . , and 17A are cross-sectional views
showing main configurations of the integrated circuit device, which
correspond to cross-sections taken along line B1-B1' and line
B2-B2' of FIG. 2A, according to a process order, and FIGS. 9B, 10B,
. . . , and 17B are cross-sectional views showing main
configurations of the integrated circuit device, which correspond
to cross-sections taken along line C1-C1' and line C2-C2' of FIG.
2A, according to a process order; and
[0021] FIG. 18 is a block diagram of an electronic system including
an integrated circuit device according to an exemplary embodiment
of the inventive concept.
[0022] Since the drawings in FIGS. 1-18 are intended for
illustrative purposes, the elements in the drawings are not
necessarily drawn to scale. For example, some of the elements may
be enlarged or exaggerated for clarity purpose.
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0023] Hereinafter, exemplary embodiments of the inventive concept
will be described with reference to the accompanying drawings. Like
components will be denoted by like reference numerals throughout
the specification, and repeated descriptions thereof will be
omitted.
[0024] FIG. 1 is a planar layout diagram showing a main
configuration of an integrated circuit device 100 according to an
exemplary embodiment of the inventive concept.
[0025] Referring to FIG. 1, the integrated circuit device 100
includes a first area I and a second area II.
[0026] The first area I and the second area II may be connected to
each other or spaced apart from each other. In an exemplary
embodiment of the inventive concept, the first area I and the
second area II may perform functions different from each other. In
an exemplary embodiment of the inventive concept, the first area I
and the second area II may perform the same function. In an
exemplary embodiment of the inventive concept, the first area I may
be one area selected from a memory area and a non-memory area, and
the second area II may be the other area selected from the memory
area and the non-memory area. For example, the memory area may
include a static random access memory (SRAM) area, a dynamic RAM
(DRAM) area, a magnetoresistive RAM (MRAM) area, a resistive RAM
(RRAM) area, or a phase-change RAM (PRAM) area, and the non-memory
area may include a logic area, without being limited thereto. In
one example, the first area I may be a partial area constituting an
SRAM area, and the second area II may be a partial area
constituting a logic area. In another example, the first area I may
be a partial area constituting an SRAM area, and the second area II
may be another partial area constituting the SRAM area. In a
further example, both of the first area I and the second area II
are partial areas constituting an SRAM area, the first area I is an
NMOS transistor area, and the second area II is a PMOS transistor
area.
[0027] The first area I of the integrated circuit device 100 may
include a plurality of first fin-type active regions F1 extending
parallel to each other in a first direction (X direction), and a
plurality of first gate lines GL1 on the plurality of first
fin-type active regions F1, in which the plurality of first gate
lines GL1 may extend in a second direction (Y direction)
intersecting with the plurality of first fin-type active regions
F1.
[0028] The plurality of first fin-type active regions F1 may have
variable pitches, and thus, a separation distance between two
adjacent first fin-type active regions F1 may vary depending upon
positions thereof.
[0029] A first transistor TR1 may be formed at each of points at
which the plurality of first fin-type active regions F1 intersect
with the plurality of first gate lines GL1.
[0030] The second area II of the integrated circuit device 100 may
include a plurality of second fin-type active regions F2 extending
parallel to each other at regular pitches, and a plurality of
second gate lines GL2 on the plurality of second fin-type active
regions F2, in which the plurality of second gate lines GL2 may
extend in a direction intersecting with the plurality of second
fin-type active regions F2. Although FIG. 1 shows an example, in
which the plurality of second fin-type active regions F2 extend in
the first direction (X direction) and the plurality of second gate
lines GL2 extend in the second direction (Y direction), according
to an exemplary embodiment of the inventive concept, the extension
direction of the plurality of second fin-type active regions F2 and
the extension direction of the plurality of second gate lines GL2
are different from those shown in FIG. 1 and may be variously
selected. A second transistor TR2 may be formed at each of points
at which the plurality of second fin-type active regions F2
intersect with the plurality of second gate lines GL2.
[0031] Although FIG. 1 shows an example, in which the plurality of
first fin-type active regions F1 are in the first area I and the
plurality of second fin-type active regions F2 are in the second
area II, the inventive concept is not limited thereto. For example,
one or more fin-type active regions may be in each of the first
area I and the second area II, and the number thereof is not
particularly limited.
[0032] In an exemplary embodiment of the inventive concept, a
density of structures including a combination of the plurality of
first fin-type active regions F1 and the plurality of first gate
lines GL1 in the first area I may be greater than a density of
structures including a combination of the plurality of second
fin-type active regions F2 and the plurality of second gate lines
GL2 in the second area II.
[0033] FIG. 2A shows perspective views of main components included
in a dashed line area indicated by "IA" in FIG. 1 and a dashed line
area indicated by "IIA" in FIG. 1. FIG. 2B shows cross-sectional
views respectively taken along line B1-B1' and line B2-B2' of FIG.
2A. FIG. 2C shows cross-sectional views respectively taken along
line C1-C1' and line C2-C2' of FIG. 2A. FIG. 2D shows
cross-sectional views respectively taken along line D1-D1' and line
D2-D2' of FIG. 2A.
[0034] Referring to FIGS. 2A to 2D, the integrated circuit device
100 includes a first fm-type active region F1 in a first area I of
a substrate 110 and a second fin-type active region F2 in a second
area II of the substrate 110, in which the first fin-type active
region F1 may protrude from the substrate 110 and may extend in a
first direction (X direction), and the second fin-type active
region F2 may protrude from the substrate 110 and may extend in the
first direction (X direction). In FIG. 2C, the lowermost levels of
the first and second fin-type active regions F1 and F2 are
respectively marked by dashed lines BL1 and BL2.
[0035] In an exemplary embodiment of the inventive concept, the
substrate 110 may include a semiconductor such as, for example,
silicon (Si) or germanium (Ge), or a compound semiconductor such
as, for example, silicon germanium (SiGe), silicon carbide (SiC),
gallium arsenide (GaAs), gallium phosphide (GaP), gallium
antimonide (GaSb), indium antimonide (InSb), indium arsenide
(InAs), or indium phosphide (InP). In an exemplary embodiment of
the inventive concept, the substrate 110 may include at least one
of a Group III-V material and a Group IV material. The Group III-V
material may be a binary, ternary, or quaternary compound including
at least one Group III element and at least one Group V element.
The Group III-V material may be a compound including at least one
element of indium (In), gallium (Ga), and aluminum (Al) as a Group
III element and including at least one element of arsenic (As),
phosphorus (P), and antimony (Sb) as a Group V element. For
example, the Group III-V material may be selected from among InP,
In.sub.zGa.sub.1-zAs (0.ltoreq.z.ltoreq.1), and
Al.sub.zGa.sub.1-zAs (0.ltoreq.z.ltoreq.1). The binary compound may
be, for example, one of GaP, InP, GaAs, InAs, InSb, and GaSb. The
ternary compound may be, for example, one of InGaP, InGaAs, AlInAs,
InGaSb, GaAsSb, AlGaAs, AlInSb, AlGaP, InAsSb, and GaAsP. The Group
IV material may be Si or Ge. However, the Group III-V material and
the Group IV material, which may be used for the integrated circuit
device according to the inventive concept, are not limited to the
examples set forth above. The Group III-V material and the Group IV
material such as Ge may be used as a channel material allowing a
low-power high-speed transistor to be made. A high-performance CMOS
may be formed by using a semiconductor substrate including a Group
III-V material, for example, GaAs, which has a higher electron
mobility than Si, and using a semiconductor substrate including a
semiconductor material, for example, Ge, which has a higher hole
mobility than Si. In an exemplary embodiment of the inventive
concept, when an NMOS transistor is formed on the substrate 110,
the substrate 110 may include one of the exemplary Group III-V
materials set forth above. In an exemplary embodiment of the
inventive concept, when a PMOS transistor is formed on the
substrate 110, at least a portion of the substrate 110 may include
Ge. In an exemplary embodiment of the inventive concept, the
substrate 110 may have a silicon-on-insulator (SOI) structure, or a
germanium-on-insulator (GOI) substrate. The substrate 110 may
include a conductive region, for example, an impurity-doped well,
or an impurity-doped structure.
[0036] In an exemplary embodiment of the inventive concept, a first
channel region CH1 of the first fin-type active region F1 and a
second channel region CH2 of the second fin-type active region F2
may include a single material. For example, all regions of the
first and second fin-type active regions F1 and F2, including the
first and second channel regions CH1 and CH2, may include Si. In an
exemplary embodiment of the inventive concept, some portions of the
first and second fin-type active regions F1 and F2 may include Ge,
and other portions of the first and second fin-type active regions
F and F2 may include Si.
[0037] In the first area I, both lower sidewalls of the first
fin-type active region F1 are covered with a first device isolation
layer 112A on the substrate 110, and the first channel region CH1
of the first fin-type active region F1 protrudes in a fin shape
upwards from the first device isolation layer 112A along a
direction (Z direction) perpendicular to a main plane (X-Y plane)
of the substrate 110.
[0038] The first channel region CH1 of the first fin-type active
region F1 is covered with a first interfacial layer 116A. A first
gate insulating layer 118A and a first gate line GL1 extend over
the first interfacial layer 116A and the first fin-type active
region F1 in a second direction (Y direction) intersecting with the
first direction (X direction) while covering the first channel
region CH1. The first gate insulating layer 118A and the first gate
line GL1 may extend while covering a top surface and both sidewalls
of the first fin-type active region F1 and a top surface of the
first device isolation layer 112A, in which the top surface and
both sidewalls of the first fin-type active region F1 are covered
with a first interfacial layer 116A. A first transistor TR1 may be
formed at a point at which the first fin-type active region F1
intersects with the first gate line GL1. The first transistor TR1
may include the first gate line GL1, the first channel region CH1,
and a first source/drain region on both sides of the first gate
line GL.
[0039] In the second area II, both lower sidewalls of the second
fin-type active region F2 are covered with a second device
isolation layer 112B on the substrate 110, and the second channel
region CH2 of the second fin-type active region F2 protrudes in a
fin shape upwards from the second device isolation layer 112B along
the direction (Z direction) perpendicular to the main plane (X-Y
plane) of the substrate 110.
[0040] The second channel region CH2 of the second fin-type active
region F2 is covered with a second interfacial layer 116B. A second
gate insulating layer 118B and a second gate line GL2 extend over
the second interfacial layer 116B and the second fin-type active
region F2 in the second direction (Y direction) intersecting with
the first direction (X direction) while covering the second channel
region CH2. The second gate insulating layer 118B and the second
gate line GL2 may extend while covering a top surface and both
sidewalls of the second fin-type active region F2 and a top surface
of the second device isolation layer 112B, in which the top surface
and both sidewalls of the second fin-type active region F2 are
covered with a second interfacial layer 116B. A second transistor
TR2 may be formed at a point at which the second fin-type active
region F2 intersects with the second gate line GL2. The second
transistor TR2 may include the second gate line GL2, the second
channel region CH2, and a second source/drain region on both sides
of the second gate line GL2.
[0041] The first and second interfacial layers 116A and 116B may be
respectively obtained by oxidizing exposed surfaces of the first
and second fin-type active regions F1 and F2, and may respectively
prevent interfacial defects between the first and second fin-type
active regions F1 and F2 and the first and second gate insulating
layers 118A and 118B. In an exemplary embodiment of the inventive
concept, each of the first and second interfacial layers 116A and
116B may include a low-K dielectric material layer having a
dielectric constant of about 9 or less, for example, a silicon
oxide layer, a silicon oxynitride layer, or combinations thereof.
The low-K dielectric material may also have a dielectric constant
smaller than the dielectric constant of silicon oxide, and may
include, for example, fluorine doped silicon oxide, or carbon doped
silicon oxide. In an exemplary embodiment of the inventive concept,
each of the first and second interfacial layers 116A and 116B may
include a silicate, or combinations of a silicate and the exemplary
materials set forth above.
[0042] Each of the first and second gate insulating layers 118A and
118B may include a silicon oxide layer, a high-K dielectric layer,
or combinations thereof. The high-K dielectric layer may include a
material having a dielectric constant greater than that of silicon
oxide. For example, each of the first and second gate insulating
layers 118A and 118B may have a dielectric constant of about 10 to
about 25. The high-K dielectric layer may include a material
selected from among hafnium oxide (HfO.sub.2), hafnium oxynitride
(HfON), hafnium silicon oxide (HfSiO), hafnium aluminum oxide
(HfAlO), lanthanum oxide (La.sub.2O.sub.3), lanthanum aluminum
oxide (LaAlO.sub.3), zirconium oxide (ZrO.sub.2), zirconium silicon
oxide (ZrSiO.sub.4), tantalum oxide (Ta.sub.2O.sub.5), titanium
oxide (TiO.sub.2), barium strontium titanium oxide
(BaSrTi.sub.2O.sub.6), barium titanium oxide (BaTiO.sub.3),
strontium titanium oxide (SrTiO.sub.3), yttrium oxide
(Y.sub.2O.sub.3), aluminum oxide (Al.sub.2O.sub.3), lead scandium
tantalum oxide (Pb(Sc,Ta)O.sub.3), lead zinc niobate
(Pb(Zn.sub.1/3Nb.sub.2/3)O.sub.3), and combinations thereof, but a
material constituting the high-K dielectric layer is not limited to
the exemplary materials set forth above.
[0043] In an exemplary embodiment of the inventive concept, each of
the first and second gate lines GL1 and GL2 may include a first
metal-containing layer MGA and a second metal-containing layer
MGB.
[0044] The first metal-containing layer MGA may adjust a work
function of each of the first and second gate lines GL1 and GL2.
The second metal-containing layer MGB may fill a space formed above
the first metal-containing layer MGA. In an exemplary embodiment of
the inventive concept, the first metal-containing layer MGA may
include a metal including, for example, Ti, Ta, Al, or combinations
thereof. In an exemplary embodiment of the inventive concept, the
first metal-containing layer MGA may include, for example, a Ti
layer, a TiN layer, a TiON layer, a TiO layer, a Ta layer, a TaN
layer, a TaON layer, an oxygen-doped TiAlN (referred to as TiAlN(O)
hereinafter) layer, an oxygen-doped TaAlN (referred to as TaAlN(O)
hereinafter) layer, or combinations thereof. In an exemplary
embodiment of the inventive concept, the first metal-containing
layer MGA may include, for example, a TiON layer, a TiO layer, a
TaON layer, a TiAlN(O) layer, a TaAlN(O) layer, or combinations
thereof. In an exemplary embodiment of the inventive concept, the
first metal-containing layer MGA may include a single layer or
multiple layers.
[0045] The second metal-containing layer MGB may include an upper
work-function-adjusting layer, a conductive barrier layer, a
gap-fill metal layer, or combinations thereof. The upper
work-function-adjusting layer may include, for example, TiAl,
TiAlC, TiAlN, TiC, TaC, HfSi, or combinations thereof, without
being limited thereto. The conductive barrier layer may include a
metal nitride, for example, TiN, TaN, or combinations thereof,
without being limited thereto. The gap-fill metal layer may fill a
gate space remaining on the conductive barrier layer. The gap-fill
metal layer may include tungsten (W). Each of the upper
work-function-adjusting layer, the conductive barrier layer, and
the gap-fill metal layer may be formed by, for example, an atomic
layer deposition (ALD), a chemical vapor deposition (CVD), or a
physical vapor deposition (PVD) process. In an exemplary embodiment
of the inventive concept, at least one of the upper
work-function-adjusting layer, the conductive barrier layer, and
the gap-fill metal layer may be omitted.
[0046] In an exemplary embodiment of the inventive concept, each of
the first and second gate lines GL1 and GL2 may include a stacked
structure of TiAlC/TiN/W, a stacked structure of
TiN/TaN/TiAlC/TiN/W, or a stacked structure of
TiN/TaN/TiN/TiAlC/TiN/W. In the stacked structures set forth above,
a TiAlC layer or a TiN layer may serve as a metal-containing layer
for adjusting work functions.
[0047] The first transistor TR1 may include a
3-dimensional-structured MOS transistor in which a channel is
formed on the top surface and both sidewalls of the first fin-type
active region F1, and the second transistor TR2 may include a
3-dimensional-structured MOS transistor in which a channel is
formed on the top surface and both sidewalls of the second fin-type
active region F2.
[0048] In the first area I, both sidewalls of each of the first
interfacial layer 116A, the first gate insulating layer 118A, and
the first gate line GL1 are covered with a first gate insulating
spacer 124A.
[0049] In the second area II, both sidewalls of each of the second
interfacial layer 116B, the second gate insulating layer 118B, and
the second gate line GL2 are covered with a second gate insulating
spacer 124B.
[0050] Each of the first and second gate insulating spacers 124A
and 124B may include, for example, silicon nitride (SiN),
carbon-containing silicon oxynitride (SiOCN), Silicon carbon
nitride (SiCN), or combinations thereof. In an exemplary embodiment
of the inventive concept, the first gate insulating spacer 124A may
include a SiN layer contacting a sidewall of the first gate line
GL1, and a SiOCN layer covering the sidewall of the first gate line
GL1, with the SiN layer between the sidewall of the first gate line
GL1 and the SiOCN layer, and the second gate insulating spacer 124B
may include a SiN layer contacting a sidewall of the second gate
line GL2, and a SiOCN layer covering the sidewall of the second
gate line GL2, with the SiN layer between the sidewall of the
second gate line GL2 and the SiOCN layer.
[0051] In the first area I, a first recess R1 is formed on a first
fin portion of the first fin-type active region F1 on both sides of
the first gate line GL, and a first source/drain region 130A fills
the first recess R1. The first source/drain region 130A and the
first gate line GL1 may be insulated from each other by the first
gate insulating spacer 124A therebetween. The first source/drain
region 130A may include a semiconductor layer that is epitaxially
grown on the first fin-type active region F1 exposed at an inner
wall of the first recess R1. The first source/drain region 130A may
have a raised source/drain (RSD) structure having a top surface T1
that is at a level higher than that of a top surface FT1 of the
first fin-type active region F1.
[0052] In the second area II, a second recess R2 is formed on a
second fin portion of the second fin-type active region F2 on both
sides of the second gate line GL2, and a second source/drain region
130B fills the second recess R2. The second source/drain region
130B and the second gate line GL2 may be insulated from each other
by the second gate insulating spacer 124B therebetween. The second
source/drain region 130B may include a semiconductor layer that is
epitaxially grown on the second fin-type active region F2 exposed
at an inner wall of the second recess R2. The second source/drain
region 130B may have an RSD structure having a top surface T2 that
is at a level higher than that of a top surface FT2 of the second
fin-type active region F2.
[0053] In an exemplary embodiment of the inventive concept, each of
the first and second source/drain regions 130A and 130B may have an
embedded SiGe structure including a plurality of epitaxially grown
SiGe layers. The plurality of SiGe layers may have different Ge
contents. In an exemplary embodiment of the inventive concept, each
of the first and second source/drain regions 130A and 130B may
include an epitaxially grown Si layer or an epitaxially grown SiC
layer. Although each of the first and second source/drain regions
130A and 130B is shown as having a specific cross-sectional shape
in FIGS. 2A to 2C, the inventive concept is not limited thereto.
For example, each of the first and second source/drain regions 130A
and 130B may have various cross-sectional shapes such as, for
example, circles, ellipses, or polygons including quadrangles,
pentagons, hexagons and the like.
[0054] In an exemplary embodiment of the inventive concept, the
size of the first source/drain region 130A in the first area I may
be smaller than the size of the second source/drain region 130B in
the second area II. For example, the width of the first
source/drain region 130A in the second direction (Y direction) may
be smaller than the width of the second source/drain region 130B in
the second direction (Y direction). In addition, the height of the
first source/drain region 130A may be smaller than the height of
the second source/drain region 130B.
[0055] In the first area I and the second area II, an inter-gate
dielectric 132 (see FIGS. 2B and 2C) is formed between the
plurality of first and second gate lines GL1 and GL2 shown in FIG.
1. The inter-gate dielectric 132 may cover the first and second
source/drain regions 130A and 130B between the plurality of first
and second gate lines GL1 and GL2. The inter-gate dielectric 132
may include a silicon oxide layer, without being limited
thereto.
[0056] In the first area I, both sidewalls of a portion of the
first fin-type active region F1 under the first recess R1 are
covered with a fin insulating spacer 128. Therefore, in the first
area I, both sidewalls of the portion of the first fin-type active
region F1 under the first recess R1 may be spaced apart from the
inter-gate dielectric 132, with the fin insulating spacer 128
therebetween.
[0057] In the first area I, the fin insulating spacer 128 may cover
both sidewalls of the first fin-type active region F1 under the
first recess R1 and between the first device isolation layer 112A
and the first source/drain region 130A.
[0058] In the first area I, the fin insulating spacer 128 may
include a material the same as that of the first gate insulating
spacer 124A. For example, the fin insulating spacer 128 may include
SiOCN, SiCN, or combinations thereof.
[0059] In an exemplary embodiment of the inventive concept, the fin
insulating spacer 128 and the first gate insulating spacer 124A may
be integrally connected to each other. For example, the fin
insulating spacer 128 and the first gate insulating spacer 124A may
be integrally connected to each other at a reentrant corner CN1
(see FIG. 2A) between the first gate line GL1 and the first
fin-type active region F1.
[0060] In the second area II, an insulating spacer corresponding to
the fin insulating spacer 128 may not be formed on both sidewalls
of a portion of the second fm-type active region F2 under the
second recess R2. The height of the fin insulating spacer 128 on
the second device isolation layer 112B may be substantially 0.
Thus, as shown in FIG. 2B, in the second area II, both sidewalls of
the portion of the second fin-type active region F2 under the
second recess R2 may be covered with the second source/drain region
130B. In the second area II, both sidewalls of the portion of the
second fin-type active region F2 under the second recess R2 may be
spaced apart from the inter-gate dielectric 132, with portions of
the second source/drain region 130B therebetween.
[0061] In the first area I and the second area II, a blocking
insulating layer 134 is formed on the plurality of first and second
gate lines GL1 and GL2 and the inter-gate dielectric 132. The
blocking insulating layer 134 may prevent undesired foreign
substances such as oxygen from penetrating into the plurality of
first and second gate lines GL1 and GL2, thereby preventing
undesired changes in threshold voltage in the transistors including
the plurality of first and second gate lines GL1 and GL2. For
example, as shown by dashed lines in FIG. 2B, first and second
source/drain contact plugs 140A and 140B may be formed on and
electrically connected to the first and second source/drain regions
130A and 130B, respectively. In this case, the blocking insulating
layer 134 may contribute to preventing short circuits which may
occur between the first gate line GL1 and the first source/drain
contact plug 140A and between the second gate line GL2 and the
second source/drain contact plug 140B. In an exemplary embodiment
of the inventive concept, the blocking insulating layer 134 may
include a layer including silicon and nitrogen. For example, the
blocking insulating layer 134 may include a silicon nitride (SiN)
layer, a silicon oxynitride (SiON) layer, a carbon-containing
silicon oxynitride (SiOCN) layer, or combinations thereof. In an
exemplary embodiment of the inventive concept, the blocking
insulating layer 134 may have a thickness of about 20 .ANG. to
about 50 .ANG..
[0062] An interlayer dielectric 136 is formed on the blocking
insulating layer 134. The interlayer dielectric 136 may include a
silicon oxide layer, without being limited thereto.
[0063] In the integrated circuit device 100 shown in FIGS. 1 to 2D,
in the first area I, both sidewalls of the portion of the first
fin-type active region F1 under the first recess R1 are covered
with the fin insulating spacer 128, thereby having better
insulation properties between the first fin-type active region F1
and other conductive regions. The plurality of first fin-type
active regions F1 may have variable pitches, and the plurality of
second fin-type active regions F2 may have regular pitches. Also,
the density of structures in the first area I may be greater than
the density of structures in the second area II. Thus, the first
fin-type active region F1 in the first area I may be more
susceptible to short circuits with other conductive regions than
the second fin-type active region F2 in the second area II may.
Thus, only in the first area I out of the first area I and the
second area II, the fin insulating spacer 128 is selectively formed
on both sidewalls of the portion of the first fin-type active
region F1 under the first recess R1, thereby eliminating the
possibility of undesired short circuits in the first area I. As
such, the integrated circuit device 100 includes devices having
different structures to secure different electrical properties that
are required depending upon the kinds and structures of the
devices, thereby enhancing the performance and reliability of the
integrated circuit device 100.
[0064] FIGS. 3A and 3B are cross-sectional views of an integrated
circuit device according to an exemplary embodiment of the
inventive concept. More specifically, FIG. 3A shows cross-sectional
views showing configurations corresponding to cross-sections
respectively taken along line 3A1-3A1' and line 3A2-3A2' of FIG. 1,
and FIG. 3B shows cross-sectional views showing configurations
corresponding to cross-sections respectively taken along line
3B1-3B1' and line 3B2-3B2' of FIG. 1. In FIGS. 3A and 3B, the same
reference numerals as in FIGS. 1 to 2D denote the same members, and
descriptions thereof will be omitted.
[0065] An integrated circuit device 200 shown in FIGS. 3A and 3B
has a configuration mostly the same as that of the integrated
circuit device 100 shown in FIGS. 2A to 2D. However, in the
integrated circuit device 200 shown in FIGS. 3A and 3B, a depth D21
of a first recess R21 on the first fin-type active region F1 on
both sides of the first gate line GL1, in the first area I, is
smaller than a depth D22 of a second recess R22 on the second
fin-type active region F2 on both sides of the second gate line
GL2, in the second area II. As used herein, the term "depth" refers
to lengths along a direction (Z direction) perpendicular to the
main plane (X-Y plane) of the substrate 110.
[0066] In the first area I, a fin insulating spacer 228 is formed
between the first device isolation layer 112A and a first
source/drain region 230A in the first recess R21 and covers both
sidewalls of the first fin-type active region F1. A vertical (Z
direction) length L21 of the first fin-type active region F1, which
is under the first recess R21 and protrudes upwards from the first
device isolation layer 112A, in the first area I, may be greater
than a vertical (Z direction) length L22 of the second fin-type
active region F2, which is under the second recess R22 and
protrudes upwards from the second device isolation layer 112B, in
the second area II. The vertical length L21 is the length of the
first fin-type active region F1 from the point that it protrudes
out of the first device isolation layer 112A to the point that it
reaches the bottom of the first recess R21. Similarly, the vertical
length L22 is the length of the second fin-type active region F2
from the point that it protrudes out of the second device isolation
layer 112B to the point that it reaches the bottom of the second
recess R22.
[0067] More details of the fin insulating spacer 228 and the first
and second source/drain regions 230A and 230B are mostly the same
as the details of the fin insulating spacer 128 and the first and
second source/drain regions 130A and 130B, which have been
described with reference to FIGS. 2A to 2D. However, in the
integrated circuit device 200, the size of the first source/drain
region 230A in the first area I may be smaller than the size of the
second source/drain region 230B in the second area II.
[0068] In the integrated circuit device 200 shown in FIGS. 3A and
3B, both sidewalls of a portion of the first fin-type active region
F1 under the first recess R21, in the first area I, are covered
with the fin insulating spacer 228, thereby having better
insulation properties between the first fin-type active region F1
and other conductive regions that are adjacent thereto. The density
of structures in the first area I may be greater than the density
of structures in the second area II. Thus, the first fin-type
active region F1 in the first area I may be more susceptible to
short circuits with other conductive regions than the second
fin-type active region F2 in the second area II may be. As such,
only in the first area I out of the first area I and the second
area II, the fin insulating spacer 228 is selectively formed on
both sidewalls of the portion of the first fin-type active region
F1 under the first recess R21, thereby eliminating the possibility
of undesired short circuits in the first area I.
[0069] FIGS. 4A and 4B are diagrams for explaining an integrated
circuit device according to an exemplary embodiment of the
inventive concept, FIG. 4A shows perspective views of main
components of an integrated circuit device 300, and FIG. 4B shows
cross-sectional views respectively taken along line B1-B1' and line
B2-B2'.
[0070] In FIGS. 4A and 4B, the same reference numerals as in FIGS.
1 to 2D denote the same members, and descriptions thereof will be
omitted.
[0071] The integrated circuit device 300 shown in FIGS. 4A and 4B
has a configuration mostly the same as that of the integrated
circuit device 100 shown in FIGS. 2A to 2D. However, in the
integrated circuit device 300 shown in FIGS. 4A and 4B, both
sidewalls of the portions of the first and second fin-type active
regions F1 and F2 under the first and second recesses R1 and R2, in
the first and second areas I and II, are covered with a first fin
insulating spacer 328A and a second fin insulating spacer 328B,
respectively.
[0072] In the first area I, the first fin insulating spacer 328A is
between the first device isolation layer 112A and the first
source/drain region 130A and covers both sidewalls of the portion
of the first fin-type active region F1 under the first recess R1.
In the second area II, the second fin insulating spacer 328B is
between the second device isolation layer 112B and the second
source/drain region 130B and covers both sidewalls of the portion
of the second fin-type active region F2 under the second recess R2.
However, a height H31 of the first fin insulating spacer 328A is
greater than a height H32 of the second fin insulating spacer 328B.
As used herein, the term "height" refers to lengths along the
direction (Z direction) perpendicular to the main plane (X-Y plane)
of the substrate 110. In an exemplary embodiment of the inventive
concept, although a difference in height between the first fin
insulating spacer 328A and the second fin insulating spacer 328B
may range from about 1 nm to about 15 nm, the inventive concept is
not limited thereto.
[0073] In the first area I, the first fin-type active region F1
between the first device isolation layer 112A and the first
source/drain region 130A may be spaced apart from the inter-gate
dielectric 132, with the first fin insulating spacer 328A between
the first fin-type active region F1 and the inter-gate dielectric
132. In the second area II, the second fin-type active region F2
between the second device isolation layer 112B and the second
source/drain region 130B may be spaced apart from the inter-gate
dielectric 132, with the second fin insulating spacer 328B between
the second fin-type active region F2 and the inter-gate dielectric
132.
[0074] In the first area I, the first fin insulating spacer 328A
may be integrally connected to the first gate insulating spacer
124A. For example, at a reentrant corner CN31 (see FIG. 4A) between
the first gate line GL1 and the first fin-type active region F1,
the first fin insulating spacer 328A may be integrally connected to
the first gate insulating spacer 124A.
[0075] In the second area II, the second fin insulating spacer 328B
may be integrally connected to the second gate insulating spacer
124B. For example, at a reentrant corner CN32 (see FIG. 4A) between
the second gate line GL2 and the second fin-type active region F2,
the second fin insulating spacer 328B may be integrally connected
to the second gate insulating spacer 124B.
[0076] The first fin insulating spacer 328A and the second fin
insulating spacer 328B may include the same material. More details
of the first fin insulating spacer 328A and the second fin
insulating spacer 328B are mostly the same as the details of the
fin insulating spacer 128, which have been described with reference
to FIGS. 2A to 2D.
[0077] In the integrated circuit device 300 shown in FIGS. 4A and
4B, in the first area I, both sidewalls of the portion of the first
fin-type active region F1 under the first recess R1 are covered
with the first fin insulating spacer 328A having a relatively great
height, and in the second area II, both sidewalls of the portion of
the second fin-type active region F2 under the second recess R2 are
covered with the second fin insulating spacer 328B having a
relatively small height. As such, the first and second fin
insulating spacers 328A and 328B having different sizes from each
other are formed to allow devices to secure different electrical
properties that are required depending upon the kinds and
structures of the devices, thereby enhancing the reliability of the
integrated circuit device 300. For example, the integrated circuit
device 300 is configured such that the first fin insulating spacer
328A having a relatively great height is included in an area
relatively more prone to having short circuits between conductive
regions, like in the first area I, and such that the second fin
insulating spacer 328B having a relatively small height is included
in an area relatively less prone to having short circuits between
conductive regions, like in the second area II, thereby enhancing
the reliability of the integrated circuit device 300. In the above
example, the plurality of first fin-type active regions F1 may have
variable pitches, and the plurality of second fin-type active
regions F2 may have regular pitches. Also, the density of
structures in the first area I may be greater than the density of
structures in the second area II. Thus, the first fin-type active
region F1 in the first area I may be more susceptible to short
circuits with other conductive regions, and the second fin-type
active region F2 in the second area II may be less susceptible to
short circuits with other conductive regions.
[0078] FIG. 5 shows diagrams for explaining an integrated circuit
device according to an exemplary embodiment of the inventive
concept, and shows cross-sectional views showing configurations
corresponding to cross-sections respectively taken along line
3A1-3A1' and line 3A2-3A2' of FIG. 1. In FIG. 5, the same reference
numerals as in FIGS. 1 to 4D denote the same members, and
descriptions thereof will be omitted.
[0079] An integrated circuit device 400 shown in FIG. 5 has a
configuration mostly the same as that of the integrated circuit
device 200 shown in FIGS. 3A to 3B. However, in the integrated
circuit device 400 shown in FIG. 5, both sidewalls of the portions
of the first and second fin-type active regions F1 and F2 under the
first and second recesses R21 and R22, in the first and second
areas I and II, are covered with a first fin insulating spacer 428A
and a second fin insulating spacer 428B, respectively.
[0080] In the first area I, the first fin insulating spacer 428A is
between the first device isolation layer 112A and the first
source/drain region 230A, and covers both sidewalls of the portion
of the first fin-type active region F1 under the first recess R21.
In the second area II, the second fin insulating spacer 428B is
between the second device isolation layer 112B and the second
source/drain region 230B, and covers both sidewalls of the portion
of the second fin-type active region F2 under the second recess
R22. However, a height H41 of the first fin insulating spacer 428A
is greater than a height H42 of the second fin insulating spacer
428B. As shown in FIG. 5, the upper portions of both sidewalls of
the second fin-type active region F2 under the second recess R22
may also be covered by portions of the second source/drain region
230B.
[0081] In the first area I, the first fin-type active region F1
between the first device isolation layer 112A and the first
source/drain region 230A may be spaced apart from the inter-gate
dielectric 132, with the first fin insulating spacer 428A between
the first fin-type active region F1 and the inter-gate dielectric
132. In the second area II, the second fin-type active region F2
between the second device isolation layer I 12B and the second
source/drain region 230B may be spaced apart from the inter-gate
dielectric 132, with the second fin insulating spacer 428B between
the second fin-type active region F2 and the inter-gate dielectric
132.
[0082] In the first area I, the first fin insulating spacer 428A
may be integrally connected to the first gate insulating spacer
124A (see FIG. 3B). In the second area II, the second fin
insulating spacer 428B may be integrally connected to the second
gate insulating spacer 124B (see FIG. 3B).
[0083] The first fin insulating spacer 428A and the second fin
insulating spacer 428B may include the same material. More details
of the first fin insulating spacer 428A and the second fin
insulating spacer 428B are mostly the same as the details of the
fin insulating spacer 128, which have been described with reference
to FIGS. 2A to 2D.
[0084] In the integrated circuit device 400 shown in FIG. 5, in the
first area I, both sidewalls of the portion of the first fin-type
active region F1 under the first recess R21 are covered with the
first fin insulating spacer 428A having a relatively great height,
and in the second area II, both sidewalls of the portion of the
second fin-type active region F2 under the second recess R22 are
covered with the second fin insulating spacer 428B having a
relatively small height. The upper portions of both sidewalls of
the second fin-type active region F2 under the second recess R22
may also be covered by portions of the second source/drain region
230B. As such, the first and second fin insulating spacers 428A and
428B having different sizes from each other are formed to allow
devices to secure different electrical properties required
depending upon the kinds and structures of the devices, thereby
enhancing the reliability of the integrated circuit device 400.
[0085] FIG. 6 is a block diagram of an integrated circuit device
500 according to an exemplary embodiment of the inventive
concept.
[0086] Referring to FIG. 6, the integrated circuit device 500
includes a memory area 510 and a logic area 520.
[0087] The memory area 510 may include at least one of the
configurations described as to the first area I with reference to
FIGS. 1 to 5. The memory area 510 may include at least one of SRAM,
DRAM, MRAM, RRAM, and PRAM.
[0088] The logic area 520 may include at least one of the
configurations described as to the second area II with reference to
FIGS. 1 to 5. The logic area 520 may include various logic cells
including a plurality of circuit elements, such as, for example, a
transistor, a register, and the like, as standard cells performing
desired logic functions, such as, for example, a counter, a buffer,
and the like. The logic cells may constitute, for example, AND,
NAND, OR, NOR, exclusive OR (XOR), exclusive NOR (XNOR), inverter
(INV), adder (ADD), buffer (BUF), delay (DLY), filter (FIL),
multiplexer (MXT/MXIT), OR/AND/INVERTER (OAI), AND/OR (AO),
AND/OR/INVERTER (AOI), D flip-flop, reset flip-flop, master-slave
flip-flop, latch, or the like. However, the cells set forth above
are merely examples, and the inventive concept is not limited
thereto.
[0089] FIG. 7A is a circuit diagram of an exemplary memory device
500A, which may be included in the memory area 510 of the
integrated circuit device 500 shown in FIG. 6. FIG. 7B is a plan
view showing a main configuration of the memory device 500A shown
in FIG. 7A.
[0090] FIG. 7A shows a circuit diagram of a 6T SRAM cell including
six transistors. The structure of a 6T SRAM cell may store one bit
of information. In FIGS. 7A and 7B, the same reference numerals as
in FIGS. 1 to 6 denote the same members, and descriptions thereof
will be omitted.
[0091] Referring to FIG. 7A, the memory device 500A may include a
first inverter INV1 and a second inverter INV2, which are connected
in parallel, between a power node Vcc and a ground node Vss, and a
first pass transistor PS1 and a second pass transistor PS2, which
are respectively connected to output nodes of the first and second
inverters INV1 and INV2. The first pass transistor PS1 and the
second pass transistor PS2 may be respectively connected to a bit
line BL and a complementary bit line/BL. Each of the first pass
transistor PS1 and the second pass transistor PS2 may be connected
to a word line WL.
[0092] The first inverter INV1 includes a first pull-up transistor
PU1 and a first pull-down transistor PD1, which are connected in
series, and the second inverter INV2 includes a second pull-up
transistor PU2 and a second pull-down transistor PD2, which are
connected in series. The first pull-up transistor PU1 and the
second pull-up transistor PU2 may include PMOS transistors, and the
first pull-down transistor PD1 and the second pull-down transistor
PD2 may include NMOS transistors. The first pass transistor PS1 and
the second pass transistor PS2 may also include NMOS
transistors.
[0093] To configure one latch circuit by the first inverter INV1
and the second inverter INV2, an input node of the first inverter
INV1 is connected to an output node of the second inverter INV2,
and an input node of the second inverter INV2 is connected to an
output node of the first inverter INV1. Data may be stored in the
cross-coupled first and second inverters INV1 and INV2.
[0094] Referring to FIG. 7B, the memory device 500A includes an
SRAM array including a plurality of SRAM cells 510A, 510B, 510C,
and 510D arranged in rows and columns on a substrate. FIG. 7B shows
four SRAM cells 510A, 510B, 510C, and 510D, each of which includes
six FinFETs.
[0095] Each of the plurality of SRAM cells 510A, 510B, 510C, and
510D may have the circuit configuration shown in FIG. 7A.
[0096] Each of the plurality of SRAM cells 510A, 510B, 510C, and
510D includes the plurality of first fin-type active regions F1
protruding from the substrate 110 (see FIGS. 2A to 5) and extending
parallel to each other along the first direction (X direction).
[0097] In the plurality of SRAM cells 510A, 510B, 510C, and 510D, a
plurality of first gate lines GL1 extend, on the plurality of first
fin-type active regions F1, in the second direction (Y direction)
intersecting with the plurality of first fin-type active regions F
I.
[0098] The first pull-up transistor PU1, the first pull-down
transistor PD1, the first pass transistor PS1, the second pull-up
transistor PU2, the second pull-down transistor PD2, and the second
pass transistor PS2, which constitute each of the plurality of SRAM
cells 510A, 510B, 510C, and 510D, may be respectively realized by a
plurality of FinFET devices, which are formed at points at which
the plurality of first gate lines GL1 intersect with the plurality
of first fin-type active regions F1.
[0099] In the SRAM cell 510A, transistors may be respectively
formed at six intersection points between the plurality of first
fin-type active regions F1 and the plurality of first gate lines
GL1, and the transistors may include the first pass transistor PS1,
the second pass transistor PS2, the first pull-down transistor PD1,
the second pull-down transistor PD2, the first pull-up transistor
PU1, and the second pull-up transistor PU2.
[0100] Each of the first pull-up transistor PU1 and the second
pull-up transistor PU2 may include a PMOS transistor, and each of
the first pull-down transistor PD1, the second pull-down transistor
PD2, the first pass transistor PS1, and the second pass transistor
PS2 may include an NMOS transistor.
[0101] The memory device 500A may include at least one of the fin
insulating spacers 128 and 228 and the first fin insulating spacers
328A and 428A in the first areas I of the integrated circuit
devices 100, 200, 300, and 400, which have been described with
reference to FIGS. 1 to 5.
[0102] FIG. 8 is a plan view showing a main configuration of an
exemplary logic device 500B, which may be included in the logic
area 520 of the integrated circuit device 500 shown in FIG. 6. In
FIG. 8, the same reference numerals as in FIGS. 1 to 6 denote the
same members, and descriptions thereof will be omitted.
[0103] Referring to FIG. 8, the logic device 500B may have a cell
LC on the substrate 110 (see FIGS. 2A to 5), in which the cell LC
may have a cell boundary 560 and may include at least one logic
function circuit.
[0104] The cell LC includes a first device area 562 and a second
device area 564. In the first device area 562 and the second device
area 564, the plurality of fin-type active regions F2 extend in the
first direction (X direction).
[0105] In the first device area 562 and the second device area 564,
the plurality of second fin-type active regions F2 may have regular
pitches.
[0106] In the cell LC, the plurality of second gate lines GL2
extend in the second direction (Y direction) and intersect with the
plurality of second fin-type active regions F2. Transistors may be
respectively formed at intersection points at which the plurality
of second gate lines GL2 intersect with the plurality of second
fin-type active regions F2. Each of the plurality of second gate
lines GL2 may be shared by a plurality of FinFET devices on the
substrate 110.
[0107] The density of patterns including the plurality of first
fin-type active regions F1 and the plurality of first gate lines
GL1 in the memory device 500A may be greater than the density of
patterns including the plurality of second fin-type active regions
F2 and the plurality of second gate lines GL2 in the logic device
500B.
[0108] In an exemplary embodiment of the inventive concept, an
insulating spacer corresponding to the fin insulating spacers 128
and 228 (see FIGS. 2A, 2B, and 3A) in the first areas I may not be
formed on both sidewalls of each second fin-type active regions F2
in the logic device 500B, like in the second areas II of the
integrated circuit devices 100 and 200 described with reference to
FIGS. 1 to 3B.
[0109] In an exemplary embodiment of the inventive concept, like
the second areas II of the integrated circuit devices 300 and 400
described with reference to FIGS. 4A to 5, the logic device 500B
may include at least one of the second fin insulating spacers 328B
and 428B, which respectively have heights smaller than those of the
first fin insulating spacers 328A and 428A in the first areas
I.
[0110] As described with reference to FIGS. 1 to 8, in the first
area I of each of the integrated circuit devices 100, 200, 300,
400, and 500, both sidewalls of the portion of the first fin-type
active region F1 under the first recess R1 or R21 are covered with
at least one of the fin insulating spacers 128 and 228 and the
first fin insulating spacers 328A and 428A, thereby having better
insulation properties between the first fin-type active region F1
and other conductive regions that are adjacent thereto. The first
fin-type active region F1 in the first area I may be more prone to
having short circuits with surrounding conductive regions than the
second fin-type active region F2 in the second area II. Thus, in
the first area I, the fin insulating spacer 128 or 228 or the first
fin insulating spacer 328A or 428A covering both sidewalls of the
portion of the first fin-type active region F1 under the first
recess R1 or R21 is formed, and in the second area II, a separate
fin insulating spacer covering both sidewalls of the portion of the
second fin-type active region F2 under the second recess R2 or R22
is not formed, or the second fin insulating spacer 328B or 428B
respectively having a size smaller than that of the first fin
insulating spacer 328A or 428A in the first area I is formed,
thereby eliminating the possibility of undesired short circuits in
the first area I. Therefore, unit devices constituting the
integrated circuit device have different structures to secure
different electrical properties that are required depending upon
the kinds and structures of the unit devices, thereby enhancing the
reliability of the integrated circuit device.
[0111] FIGS. 9A to 17B are cross-sectional views showing a method
of fabricating an integrated circuit device according to a process
order, according to an exemplary embodiment of the inventive
concept. Among FIGS. 9A to 17B, FIGS. 9A, 10A, . . . , and 17A are
cross-sectional views showing main configurations of the integrated
circuit device, which correspond to cross-sections taken along line
B1-B1' and line B2-B2' of FIG. 2A, according to a process order,
and FIGS. 9B, 10B, . . . , and 17B are cross-sectional views
showing main configurations of the integrated circuit device, which
correspond to cross-sections taken along line C1-C1' and line
C2-C2' of FIG. 2A, according to a process order. A method of
fabricating the integrated circuit device 100 shown in FIGS. 1 to
2D will be described with reference to FIGS. 9A to 17B. In FIGS. 9A
to 17B, the same reference numerals as in FIGS. 1 to 2D denote the
same members, and descriptions thereof will be omitted.
[0112] Referring to FIGS. 9A and 9B, a substrate 110 having a first
area I and a second area II is prepared.
[0113] In the first area I and the second area II, the substrate
110 may have a MOS area. For example, each of the first area I and
the second area II of the substrate 110 may be one of a PMOS
transistor area and an NMOS transistor area. More details of the
first area I and the second area II are the same as those described
with reference to FIG. 1.
[0114] First and second fin-type active regions F1 and F2 are
respectively formed in the first area I and the second area II by
etching portions of the substrate 110, in which the first and
second fm-type active regions F1 and F2 protrude upwards (Z
direction) from a main plane (X-Y plane) of the substrate 110 and
extend in a first direction (X direction). The first and second
fin-type active regions F1 and F2 may include P-type or N-type
impurity-doped regions depending upon channel types of MOS
transistors that are desired to be formed in the first and second
fin-type active regions F1 and F2.
[0115] After forming the first and second fin-type active regions
F1 and F2, an insulating layer is formed on the substrate 110 and
covers the first and second fin-type active regions F1 and F2,
followed by performing etch back of the insulating layer, thereby
forming first and second device isolation layers 112A and 112B. The
first and second fin-type active regions F1 and F2 respectively
protrude upwards from the first and second device isolation layers
112A and 112B and are exposed.
[0116] The first and second device isolation layers 112A and 112B
may include, for example, a silicon oxide layer, a silicon nitride
layer, a silicon oxynitride layer, or combinations thereof. The
first and second device isolation layers 112A and 112B may include
an insulating liner including a thermal oxide layer, and a gap-fill
insulating layer on the insulating liner. In FIG. 9B, the lowermost
levels of the first and second fin-type active regions F1 and F2
are respectively marked by dashed lines BL1 and BL2.
[0117] Referring to FIGS. 10A and 10B, a dummy gate structure DGS
is formed on each of the first and second fin-type active regions
F1 and F2 in the first area I and the second area II, in which the
dummy gate structure DGS extends in a second direction (Y
direction) to intersect with each of the first and second fin-type
active regions F1 and F2.
[0118] The dummy gate structure DGS may include a dummy gate
insulating layer D114, a dummy gate line D116, and a dummy gate
capping layer D118, which are stacked on each of the first and
second fin-type active regions F1 and F2 in this stated order. In
an exemplary embodiment of the inventive concept, the dummy gate
insulating layer D114 may include silicon oxide. The dummy gate
line D116 may include polysilicon. The dummy gate capping layer
D118 may include at least one of silicon oxide, silicon nitride,
and silicon oxynitride.
[0119] Referring to FIGS. 11A and 11B, an inner gate insulating
spacer 722 is formed in each of the first area I and the second
area II and covers both sidewalls of the dummy gate structure DGS,
and then, a spacer layer 724 is formed and covers the first and
second fin-type active regions F1 and F2, the dummy gate structure
DGS, and the inner gate insulating spacer 722.
[0120] The inner gate insulating spacer 722 may include SiN. The
spacer layer 724 may include, for example, SiOCN, SiCN, or
combinations thereof. In an exemplary embodiment of the inventive
concept, the spacer layer 724 may include a single layer including
a SiOCN layer. In an exemplary embodiment of the inventive concept,
the spacer layer 724 may include a SiOCN layer covering the inner
gate insulating spacer 722, and an oxide layer covering the SiOCN
layer. The spacer layer 724 may be formed by an ALD, a CVD, or a
PVD process. For the CVD method, a plurality of gases containing a
plurality of elements constituting the spacer layer 724 to be
formed may be supplied together at the same time to the reaction
chamber. For the ALD method, a plurality of gases containing a
plurality of elements constituting the spacer layer 724 to be
formed may be alternately supplied. For example, to form a SiOCN
layer as the spacer layer 724, the plurality of gases may contain,
hexachlorodisilane (Si.sub.2Cl.sub.6) gas as a silicon-containing
gas, propylene (C.sub.3H.sub.6) gas a carbon containing gas,
NH.sub.3 gas as a nitrogen-containing gas, and O.sub.2 gas as an
oxygen-containing gas.
[0121] Referring to FIGS. 12A and 12B, an outer gate insulating
spacer 724G is formed by performing etch-back of the spacer layer
724, in which the outer gate insulating spacer 724G covers the
inner gate insulating spacer 722 on both sidewalls of the dummy
gate structure DGS.
[0122] In the first area I, the inner gate insulating spacer 722
and the outer gate insulating spacer 724G may constitute a first
gate insulating spacer 124A. In the second area II, the inner gate
insulating spacer 722 and the outer gate insulating spacer 724G may
constitute a second gate insulating spacer 124B.
[0123] During the formation of the outer gate insulating spacer
724G, as the etch-back of the spacer layer 724 is performed, the
first and second fin-type active regions F1 and F2 may be exposed.
The exposed first and second fin-type active regions F1 and F2 are
also subjected to etch-back together with the spacer layer 724,
thereby forming a first recess R1 on the first fin-type active
region F1 in the first area I and forming a second recess R2 on the
second fin-type active region F2 in the second area II. While the
etch-back of the first and second fin-type active regions F1 and F2
are performed to form the first recess R1 and the second recess R2,
since a certain thickness of the dummy gate capping layer D118 of
the dummy gate structure DGS may be removed from a top surface
thereof, the thickness of the dummy gate capping layer D118 may be
reduced.
[0124] During the formation of the outer gate insulating spacer
724G and the first and second fin-type active regions F1 and F2, a
fin insulating spacer 128, which is a portion of the spacer layer
724, remains on both sidewalls of a portion of the first fin-type
active region F1 under the first recess R1, in the first area I. On
the other hand, in the second area II, an insulating spacer
corresponding to the fin insulating spacer 128 may not be formed on
both sidewalls of a portion of the second fin-type active region F2
under the second recess R2.
[0125] In an exemplary embodiment of the inventive concept, to form
the outer gate insulating spacer 724G, the first and second
recesses R1 and R2, and the fin insulating spacer 128, the spacer
layer 724 and the first and second fin-type active regions F1 and
F2 may be sequentially subjected to a dry etching process and a wet
cleaning process in this stated order.
[0126] A portion of the spacer layer 724 and portions of the first
and second fin-type active regions F1 and F2 may be removed by the
dry etching process, thereby forming a preliminary outer gate
insulating spacer, a first preliminary recess on the first fin-type
active region F1, and a second preliminary recess on the second
fin-type active region F2, in which the preliminary outer gate
insulating spacer may cover the inner gate insulating spacer 722 on
both sidewalls of the dummy gate structure DGS. In addition,
simultaneously with the formation of the first and second
preliminary recesses, a preliminary fin insulating spacer may be
formed between the first device isolation layer 112A the first
preliminary recess and cover both sidewalls of the first fin-type
active region F1, and may also be formed between the second device
isolation layer 112B and the second preliminary recess and cover
both sidewalls of the second fin-type active region F2.
[0127] During the wet cleaning process, a portion of the first
fin-type active region F1 and a portion of the second fin-type
active region F2, which are exposed to a wet cleaning solution, may
be further removed. As a result, in the first area I, the first
recess R1 extending up to a lower portion of the first gate
insulating spacer 124A may be obtained from the first preliminary
recess, and in the second area II, the second recess R2 extending
up to a lower portion of the second gate insulating spacer 124B may
be obtained from the second preliminary recess. In addition, during
the wet cleaning process, a portion of the preliminary outer gate
insulating spacer, which is exposed to the wet cleaning solution,
may also be removed, thereby obtaining the outer gate insulating
spacer 724G shown in FIG. 12B. Further, during the formation of the
first and second recesses R1 and R2, the preliminary fin insulating
spacer may also be exposed to the wet cleaning solution used in the
wet cleaning process, whereby, in the first area I, the fin
insulating spacer 128 shown in FIG. 12A may remain by removing only
a portion of the preliminary fin insulating spacer, and in the
second area II, an insulating spacer corresponding to the fin
insulating spacer 128 may not be formed on both sidewalls of the
portion of the second fin-type active region F2 under the second
recess R2 by removing all of the preliminary fin insulating
spacer.
[0128] In an exemplary embodiment of the inventive concept, in the
formation process of the spacer layer 724, which has been described
with reference to FIGS. 11A and 11B, the spacer layer 724 may
include a SiOCN layer and an oxide layer covering the SiOCN layer.
In this case, during the wet cleaning process, the oxide layer may
be exposed to the wet cleaning solution and removed. As a result,
after the first and second recesses R1 and R2 are obtained, the
outer gate insulating spacer 724G remaining on the sidewalls of the
dummy gate structure DGS, and the fin insulating spacer 128
remaining on both sidewalls of the portion of the first fin-type
active region F1 under the first recess R1 may not include the
oxide layer and may include only the SiOCN layer.
[0129] In an example of performing the dry etching process, a
plasma etching process using NH.sub.3, CF.sub.4, or combinations
thereof as an etching gas may be performed. In an example of
performing the wet cleaning process, an HF cleaning solution may be
used. However, the inventive concept is not limited to the examples
set forth above and may be variously changed and modified.
[0130] The preliminary fin insulating spacer obtained immediately
after the dry etching process is subjected to the wet cleaning
process and then remains as the fin insulating spacer 128 in the
first area I, and the size of the preliminary fin insulating spacer
may be greater than the size of the fin insulating spacer 128 shown
in FIG. 12A.
[0131] In the second area II, immediately after the dry etching
process, before the wet cleaning process, the preliminary fin
insulating spacer, which is a residual portion of the spacer layer
724, may remain on both sidewalls of the portion of the second
fin-type active region F2 under the second recess R2. However, as
the preliminary fin insulating spacer remaining in the second area
II is subjected to the wet cleaning process, all of the preliminary
fin insulating spacer may be removed together with a portion of the
second fin-type active region F2 by the wet cleaning solution,
whereby after the second recess R2 is formed on the second fin-type
active region F2, an insulating spacer corresponding to the fin
insulating spacer 128 may not remain on both sidewalls of the
portion of the second fin-type active region F2 under the second
recess R2.
[0132] In an exemplary embodiment of the inventive concept, during
the dry etching process and the wet cleaning process, in the
substrate 110, the density of patterns including the first fin-type
active region F1 and the dummy gate structure DGS in the first area
I may be greater than the density of patterns including the second
fin-type active region F2 and the dummy gate structure DGS in the
second area II. Due to the difference in pattern density between
the first area I and the second area II, after the dry etching
process and the wet cleaning process, the fin insulating spacer 128
may remain only in the first area I out of the first area I and the
second area II, as shown in FIGS. 12A and 12B.
[0133] In an exemplary embodiment of the inventive concept, for the
fin insulating spacer 128 to remain only in the first area I out of
the first area I and the second area II, the preliminary fin
insulating spacer in at least one of the first area I and the
second area II may be subjected to a pre-treatment process, in
which the preliminary fin insulating spacer is the residual portion
of the spacer layer 724.
[0134] In an exemplary embodiment of the inventive concept, after
the dry etching process, before the wet cleaning process, the
pre-treatment process may be performed on the preliminary fin
insulating spacer remaining in at least one of the first area I and
the second area II in the substrate 110.
[0135] In an exemplary embodiment of the inventive concept, the
pre-treatment process may be a plasma application process.
[0136] To perform the plasma application process, immediately after
the dry etching process, plasma may be applied to the preliminary
fin insulating spacer to damage the preliminary fin insulating
spacer, which is the residual portion of the spacer layer 724 in
the substrate 100. Although a gas used to form the plasma for
damaging the preliminary fin insulating spacer may be selected from
among CF.sub.4, O.sub.2, He, HBr, NF.sub.3, Ar, Cl.sub.2, N.sub.2,
CH.sub.3F, CH.sub.4, and combinations thereof, the inventive
concept is not limited thereto. By performing the plasma
application process, at least a portion of the preliminary fin
insulating spacer may be damaged by the plasma. Upon the subsequent
wet cleaning process, the removal rate and/or removal amount of a
plasma-damaged portion of the preliminary fin insulating spacer by
the wet cleaning solution may be greater than the removal rate
and/or removal amount of a non-plasma-damaged portion of the
preliminary fin insulating spacer by the wet cleaning solution.
Thus, after the dry etching process, before the wet cleaning
process, the plasma application process may be further performed on
the preliminary fin insulating spacer in the first area I and/or
the second area II, as needed, thereby increasing the consumption
of the preliminary fin insulating spacer by the wet cleaning
solution.
[0137] In an exemplary embodiment of the inventive concept, to
control the size of the fin insulating spacer 128 in the first area
I, the plasma application process may be selectively performed on
the preliminary fin insulating spacer only in the first area I out
of the first area I and the second area II, in which the
preliminary fin insulating spacer is the residual portion of the
spacer layer 724.
[0138] In an exemplary embodiment of the inventive concept, for an
insulating spacer corresponding to the fin insulating spacer 128
not to remain on both sidewalls of the second fin-type active
region F2 in the second area II, the plasma application process may
be selectively performed on the preliminary fin insulating spacer
only in the second area II out of the first area I and the second
area II, in which the preliminary fin insulating spacer is the
residual portion of the spacer layer 724. In this case, during the
subsequent wet cleaning process, all of the preliminary fin
insulating spacer, which is the residual portion of the spacer
layer 724, in the second area II may be removed, and the fin
insulating spacer 128 may remain only in the first area I.
[0139] In an exemplary embodiment of the inventive concept, the
pre-treatment process may be an ion implantation process.
[0140] To perform the ion implantation process, immediately after
the dry etching process, before the wet cleaning process, the ion
implantation process may be performed on the preliminary fin
insulating spacer to damage the preliminary fin insulating spacer,
which is the residual portion of the spacer layer 724 in the
substrate 100. Although ions used in the ion implantation process
for damaging the preliminary fin insulating spacer may be obtained
from a gas including Ge, BF.sub.2, As, or combinations thereof, the
inventive concept is not limited thereto. By performing the ion
implantation process, at least a portion of the preliminary fin
insulating spacer may be damaged by ions implanted into an inside
thereof. Upon the subsequent wet cleaning process, the removal rate
and/or removal amount of an ion-implantation-damaged portion of the
preliminary fin insulating spacer by the wet cleaning solution may
be greater than the removal rate and/or removal amount of a
non-ion-implantation-damaged portion of the preliminary fin
insulating spacer by the wet cleaning solution. Thus, after the dry
etching process, before the wet cleaning process, the ion
implantation process may be further performed on the preliminary
fin insulating spacer, as needed, thereby increasing the
consumption of the preliminary fin insulating spacer by the wet
cleaning solution.
[0141] In an exemplary embodiment of the inventive concept, to
control the size of the fin insulating spacer 128 in the first area
I, the ion implantation process may be selectively performed on the
residual portion of the spacer layer 724 only in the first area I
out of the first area I and the second area II. In an exemplary
embodiment of the inventive concept, for an insulating spacer
corresponding to the fin insulating spacer 128 not to remain on
both sidewalls of the second fin-type active region F2 in the
second area II, the ion implantation process may be selectively
performed on the residual portion of the spacer layer 724 only in
the second area II out of the first area I and the second area II.
In this case, during the subsequent wet cleaning process, all of
the preliminary fin insulating spacer, which is the residual
portion of the spacer layer 724, in the second area II may be
removed, and the fin insulating spacer 128 may remain only in the
first area I.
[0142] In an exemplary embodiment of the inventive concept, the
pre-treatment process may be a combination of the plasma
application process and the ion implantation process as described
above.
[0143] Referring to FIGS. 13A and 13B, in the first area I and the
second area II, semiconductor layers are formed in the first and
second recesses R1 and R2 on both sides of the dummy gate
structures DGS by performing an epitaxial growth process on exposed
surfaces of the first and second fin-type active regions F1 and F2,
thereby forming first and second source/drain regions 130A and
130B. The epitaxial growth process may be a selective epitaxial
growth process. In the selective epitaxial growth process, the
substrate containing the first and second fin-type active regions
F1 and F2 is placed in a reaction chamber, then a source gas is
supplied into the reaction chamber. The source gas for depositing
silicon may include, for example, SiCl.sub.4, SiF.sub.4,
SiH.sub.2Cl.sub.2, SiHCl.sub.3, SiH.sub.4 or Si.sub.2H.sub.6. For
depositing germanium, silicon germanium, or other semiconductor,
other source gas may be used. The source gas for depositing silicon
supplied inside the reaction chamber is absorbed on the surface of
the exposed surfaces of the first and second fin-type active
regions F1 and F2, and the silicon epitaxial layer is then
selectively formed on the exposed surfaces of the first and second
fin-type active regions F1 and F2. Since only a top surface (a
bottom surface of the first recess R1) of the first fin-type active
region F1 is exposed (see FIG. 12A, the first area I), the first
source/drain region 130A may only be formed on the top surface of
the first fin-type active region F1 with the fin insulating spacer
128 covering both sidewalls of the first fin-type active region F
under the first recess R1 and between the first device isolation
layer 112A and the first source/drain region 130A (see FIG. 13A,
the first area I). Since a top surface (a bottom surface of the
second recess R2) and both upper sidewalls of the second fin-type
active region F2 are exposed (see FIG. 12A, the second area II),
the second source/drain region 130B may be formed to cover the top
surface and both upper sidewalls of the second fin-type active
region F2 with the second device isolation layer 112B and the
second source/drain region 130B covering both sidewalls of the
second fin-type active region F2 without a fin insulating spacer
therebetween (see FIG. 13A, the second area II).
[0144] Cross-section shapes of the first and second source/drain
regions 130A and 130B shown in FIGS. 13A and 13B are merely
examples and may be variously changed and modified without
departing from the spirit and scope of the inventive concept. For
example, the cross-sectional shapes of the first and second
source/drain regions 130A and 130B, which are cut along a Y-Z
plane, may be circular shapes, elliptical shapes, or polygonal
shapes such as quadrangles, pentagons, and hexagons.
[0145] Each of the first and second source/drain regions 130A and
130B may include an impurity-doped semiconductor layer. In an
exemplary embodiment of the inventive concept, each of the first
and second source/drain regions 130A and 130B may include
impurity-doped Si, SiGe, or SiC.
[0146] In the first area I and the second area II, an inter-gate
dielectric 132 is formed and covers the first and second
source/drain regions 130A and 130B, the dummy gate structures DGS,
and the first and second gate insulating spacers 124A and 124B.
[0147] In an example of forming the inter-gate dielectric 132, an
insulating layer may be formed to a sufficient thickness and covers
the first and second source/drain regions 130A and 130B, the dummy
gate structures DGS, and the first and second gate insulating
spacers 124A and 124B. Next, the result product including the
insulating layer may be planarized with a planarization process
(e.g., chemical mechanical polishing (CMP)) such that the plurality
of dummy gate structures DGS are exposed, thereby forming the
inter-gate dielectric 132 having a planarized top surface.
[0148] Referring to FIGS. 14A and 14B, in the first area I and the
second area II, the plurality of dummy gate structures DGS exposed
by the inter-gate dielectric 132 are removed, thereby forming a
first gate space GH1 in the first area I and forming a second gate
space GH2 in the second area II.
[0149] The first gate insulating spacer 124A and the first fin-type
active region F1 may be exposed by the first gate space GH1, and
the second gate insulating spacer 124B and the second fin-type
active region F2 may be exposed by the second gate space GH2.
[0150] Referring to FIGS. 15A and 15B, in the first area I and the
second area II, a first interfacial layer 116A, a first gate
insulating layer 118A, and a gate line GL are formed in the first
gate space GH1 (see FIG. 14B) in this stated order, and a second
interfacial layer 116B, a second gate insulating layer 118B, and
the gate line GL are formed in the second gate space GH2 (see FIG.
14B) in this stated order.
[0151] A process of forming the first and second interfacial layers
116A and 116B may include a process of oxidizing exposed portions
of the first and second fin-type active regions F1 and F2 in the
first and second gate spaces GH1 and GH2 (see FIG. 14B). In an
exemplary embodiment of the inventive concept, the first and second
interfacial layers 116A and 116B may include, for example, a
silicon oxide layer, a silicon oxynitride layer, a silicate layer,
or combinations thereof.
[0152] The first and second gate insulating layers 118A and 118B
and the gate line GL may cover a top surface of the inter-gate
dielectric 132 while filling insides of the first and second gate
spaces GH1 and GH2 (see FIG. 14B). The first and second gate
insulating layers 118A and 118B may be formed by an ALD, a CVD, or
a PVD process.
[0153] The gate line GL may have a sufficient thickness to fill the
first and second gate spaces GH1 and GH2. The gate line GL may
include a first metal-containing layer MGA and a second
metal-containing layer MGB. Details of the first metal-containing
layer MGA and the second metal-containing layer MGB are as
described with reference to FIGS. 2A to 2D. To form the gate line
GL, an ALD, a CVD, or a PVD process may be used.
[0154] Referring to FIGS. 16A and 16B, unnecessary portions in the
first area I and the second area II are removed from the result
product of FIGS. 15A and 15B by a planarization process (e.g., a
CMP process), whereby the gate line GL is separated into first and
second gate lines GL1 and GL2, which respectively remain in the
first and second gate spaces GH1 and GH2, and the first and second
gate insulating layers 118A and 118B respectively remain only in
the first and second gate spaces GH1 and GH2.
[0155] As a result of the planarization process, the first and
second gate insulating spacers 124A and 124B and the inter-gate
dielectric 132 are consumed from respective top surfaces thereof so
as to reduce a certain thickness from each, that is, vertical
thicknesses (Z-directional thicknesses) thereof may be reduced, and
top surfaces of the first and second gate insulating layers 118A
and 118B, the top surfaces of the first and second gate insulating
spacers 124A and 124B, and the top surface of the inter-gate
dielectric 132 may be exposed around top surfaces of the first and
second gate lines GL1 and GL2.
[0156] Referring to FIGS. 17A and 17B, in the first area I and the
second area II, a blocking insulating layer 134 and an interlayer
dielectric 136 are formed in this stated order and cover the top
surfaces of the first and second gate lines GL and GL2, the top
surfaces of the first and second gate insulating layers 118A and
118B, the top surfaces of the first and second gate insulating
spacers 124A and 124B, and the top surface of the inter-gate
dielectric 132.
[0157] The interlayer dielectric 136 may have a planarized top
surface. Although the interlayer dielectric 136 is shown as having
a flat layer shape, the interlayer dielectric 136 may have various
shapes without departing from the spirit and scope of the inventive
concept.
[0158] After forming the blocking insulating layer 134 and the
interlayer dielectric 136, a mask pattern may be formed (e.g.,
through a lithographic process) on the interlayer dielectric 136,
followed by etching the interlayer dielectric 136, the blocking
insulating layer 134, and the inter-gate dielectric 132 in this
stated order by using the mask pattern as an etch mask, thereby
forming contact holes penetrating the interlayer dielectric 136,
the blocking insulating layer 134, and the inter-gate dielectric
132, as needed. Next, a conductive material may fill the contact
holes, thereby forming first and second source/drain contact plugs
140A and 140B shown by the dashed lines in FIG. 2B, the first and
second source/drain contact plugs 140A and 140B being respectively
electrically connected to the first and second source/drain regions
130A and 130B.
[0159] According to the method of fabricating the integrated
circuit device 100, which includes the processes described with
reference to FIGS. 9A to 17B, the integrated circuit device
including unit devices may be fabricated by a low-cost simplified
process, in which the unit devices may have different structures to
secure different electrical properties that are required depending
upon the kinds and structures of the unit devices. Therefore, the
realization of the integrated circuit device providing optimum
reliability and performance may be facilitated.
[0160] Heretofore, although the method of fabricating the
integrated circuit device 100 shown in FIGS. 1 to 2D has been
described with reference to FIGS. 9A to 17B, it will be understood
by those skilled in the art that the integrated circuit device 200
shown in FIGS. 3A and 3B, the integrated circuit device 300 shown
in FIGS. 4A and 4B, the integrated circuit device 400 shown in FIG.
5, or integrated circuit devices having various structures changed
and modified therefrom may be fabricated by changes and
modifications of the method described with reference to FIGS. 9A to
17B without departing from the spirit and scope of the inventive
concept.
[0161] In an exemplary embodiment of the inventive concept, to
fabricate the integrated circuit device 200 shown in FIGS. 3A and
3B, instead of respectively forming the first recess R1 and the
second recess R2 in the first area I and the second area II in the
process described with reference to FIGS. 12A and 12B, the first
recess R21 and the second recess R22 having different depths may be
respectively formed in the first area I and the second area II by
controlling an etching amount of the first fin-type active region
F1 and an etching amount of the second fin-type active region F2.
Next, similar processes to the processes described with reference
to FIGS. 13A to 17B are performed, thereby fabricating the
integrated circuit device 200.
[0162] In an exemplary embodiment of the inventive concept, to
fabricate the integrated circuit device 300 shown in FIGS. 4A and
4B, process conditions during the dry etching process and/or the
wet cleaning process described with reference to FIGS. 12A and 12B
are controlled, or the pre-treatment process set forth above is
added and process conditions during the plasma application process
and/or the ion implantation process as the pre-treatment process
are controlled, whereby the sizes of the first fin insulating
spacer 328A and the second fin insulating spacer 328B respectively
remaining in the first area I and the second area II may be
controlled.
[0163] In an exemplary embodiment of the inventive concept, to
fabricate the integrated circuit device 400 shown in FIG. 5,
instead of respectively forming the first recess R1 and the second
recess R2 in the first area I and the second area II in the process
described with reference to FIGS. 12A and 12B, the first recess R21
and the second recess R22 having different depths are respectively
formed in the first area I and the second area II by controlling
the etching amount of the first fin-type active region F and the
etching amount of the second fin-type active region F2, followed by
controlling the process conditions during the dry etching process
and/or the wet cleaning process described with reference to FIGS.
12A and 12B or controlling the process conditions during the plasma
application process and/or the ion implantation process as the
pre-treatment process, whereby the sizes of the first fin
insulating spacer 428A and the second fin insulating spacer 428B
respectively remaining in the first area I and the second area II
may be controlled.
[0164] Although the integrated circuit devices including FinFETs
having 3-dimensional-structured channels and the fabrication
methods thereof have been described with reference to FIGS. 1 to
17B, the inventive concept is not limited thereto. For example, it
will be understood by those skilled in the art that integrated
circuit devices including planar MOSFETs having the features
according to the inventive concept and fabrication methods thereof
may be provided by various modifications and changes of the
inventive concept without departing from the spirit and scope of
the inventive concept.
[0165] FIG. 18 is a block diagram of an electronic system 2000
including an integrated circuit device according to an exemplary
embodiment of the inventive concept.
[0166] The electronic system 2000 includes a controller 2010, an
input/output (I/O) device 2020, a memory 2030, and an interface
2040, and these components are connected to each other through a
bus 2050.
[0167] The controller 2010 may include at least one of a
microprocessor, a digital signal processor, and processors similar
thereto. The input/output device 2020 may include at least one of a
keypad, a keyboard, and a display. The memory 2030 may be used for
storing a command executed by the controller 2010. For example, the
memory 2030 may be used for storing user data.
[0168] The electronic system 2000 may constitute a wireless
communication device, or a device capable of transmitting and/or
receiving information in a wireless environment. In the electronic
system 2000, to transmit/receive data through a wireless
communication network, the interface 2040 may be configured as a
wireless interface. The interface 2040 may include an antenna
and/or a wireless transceiver. In an exemplary embodiment of the
inventive concept, the electronic system 2000 may be used for a
communication interface protocol of a 3rd-generation communication
system, such as, for example, code division multiple access (CDMA),
global system for mobile communications (GSM), north American
digital cellular (NADC), extended-time division multiple access
(E-TDMA), and/or wide band code division multiple access (WCDMA).
The electronic system 2000 may include at least one of the
integrated circuit devices 100, 200, 300, 400, and 500 shown in
FIGS. 1 to 8 and integrated circuit devices having various
structures changed and modified therefrom without departing from
the spirit and scope of the inventive concept.
[0169] While the inventive concept has been particularly shown and
described with reference to specific exemplary embodiments thereof,
it will be understood that various changes in form and details may
be made therein without departing from the spirit and scope of the
following claims.
* * * * *