U.S. patent application number 15/032046 was filed with the patent office on 2018-02-15 for vacuum deposition heating device.
The applicant listed for this patent is Shenzhen China Star Optoelectronics Technology Co., Ltd.. Invention is credited to Yang Liu, Yawei Liu.
Application Number | 20180044776 15/032046 |
Document ID | / |
Family ID | 55983699 |
Filed Date | 2018-02-15 |
United States Patent
Application |
20180044776 |
Kind Code |
A1 |
Liu; Yang ; et al. |
February 15, 2018 |
VACUUM DEPOSITION HEATING DEVICE
Abstract
The present invention provides a vacuum deposition heating
device, which includes a heating device outer wall (3), a crucible
(1) disposed inside the heating device outer wall (3), and a
crucible cover (2) positioned on the crucible (1). A primary
heating coil (11) is arranged between the crucible (1) and the
heating device outer wall (3) and corresponds to outer
circumferences of the crucible (1) and the crucible cover (2). The
crucible cover (2) has a center in which a jet opening (20) that
extends through top and bottom surfaces of the crucible cover (2)
is formed. The crucible cover (2) is provided thereon with a
secondary heating coil (21) corresponding to an outer circumference
of the jet opening (20). The primary heating coil (11) and the
secondary heating coil (21) are electrically connected to a power
supply and can be controlled individually and independently for
heating, so as to effectively reduce a temperature difference in
the crucible in a horizontal radial direction to prevent opening
jamming and allow for expansion of diameter to thereby increase the
amount of material applied, reduce the times of chamber opening,
increase manufacturing efficiency. In addition, the structure is
simple and the manufacture thereof is easy.
Inventors: |
Liu; Yang; (Shenzhen City,
CN) ; Liu; Yawei; (Shenzhen City, CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Shenzhen China Star Optoelectronics Technology Co., Ltd. |
Shenzhen City |
|
CN |
|
|
Family ID: |
55983699 |
Appl. No.: |
15/032046 |
Filed: |
February 26, 2016 |
PCT Filed: |
February 26, 2016 |
PCT NO: |
PCT/CN2016/074612 |
371 Date: |
April 25, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 51/001 20130101;
C23C 14/12 20130101; C23C 14/243 20130101; C23C 14/54 20130101;
H01L 51/56 20130101; C23C 14/26 20130101 |
International
Class: |
C23C 14/26 20060101
C23C014/26; C23C 14/54 20060101 C23C014/54; C23C 14/24 20060101
C23C014/24 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 29, 2016 |
CN |
201610064564.0 |
Claims
1. A vacuum deposition heating device, comprising a heating device
outer wall, a crucible disposed inside the heating device outer
wall, and a crucible cover positioned on the crucible; a primary
heating coil being arranged between the crucible and the heating
device outer wall and corresponding to outer circumferences of the
crucible and the crucible cover; the crucible cover having a center
in which a jet opening that extends through top and bottom surfaces
of the crucible cover is formed, the crucible cover being provided
thereon with a secondary heating coil corresponding to an outer
circumference of the jet opening; the primary heating coil and the
secondary heating coil being electrically connected to a power
supply and being independently controllable for heating.
2. The vacuum deposition heating device as claimed in claim 1,
wherein the secondary heating coil is of a helical form, comprising
a tailing end located at a terminal of an innermost turn and an
electrode end located at a terminal of an outermost turn; the
tailing end is positioned on the crucible cover; and the electrode
end projects outside the crucible cover and partially extends
downward in a vertical direction.
3. The vacuum deposition heating device as claimed in claim 2,
wherein an electrical connector is arranged between the crucible
and the heating device outer wall at a location corresponding to a
lower tip of the electrode end; the electrode end is inserted into
the electrical connector; and the electrical connector is
electrically connected to a heating circuit.
4. The vacuum deposition heating device as claimed in claim 1,
wherein the primary heating coil has a coil distribution density
arranged in an upper portion of the crucible and greater than a
coil distribution density arranged in a lower portion of the
crucible.
5. The vacuum deposition heating device as claimed in claim 1,
wherein in a vacuum deposition process, application of electricity
to the primary heating coil and the secondary heating coil is
controlled individually so as to have a temperature of the crucible
cover higher than a temperature of the crucible.
6. The vacuum deposition heating device as claimed in claim 1,
wherein the secondary heating coil is provided with a protective
cover.
7. The vacuum deposition heating device as claimed in claim 6,
wherein the protective cover is made of a metal.
8. The vacuum deposition heating device as claimed in claim 7,
wherein the protective cover and the secondary heating coil are
welded together; or alternatively, the protective cover is provided
with a retention slot and the secondary heating coil is fit into
and retained in the retention slot.
9. The vacuum deposition heating device as claimed in claim 1,
wherein the crucible cover is provided with a first thermal couple
at a location corresponding to an outer edge of the secondary
heating coil to monitor a temperature of the crucible cover; and
the crucible is provided with a second thermal couple at a location
adjacent to a bottom thereof to monitor a temperature of the
crucible.
10. A vacuum deposition heating device, comprising a heating device
outer wall, a crucible disposed inside the heating device outer
wall, and a crucible cover positioned on the crucible; a primary
heating coil being arranged between the crucible and the heating
device outer wall and corresponding to outer circumferences of the
crucible and the crucible cover; the crucible cover having a center
in which a jet opening that extends through top and bottom surfaces
of the crucible cover is formed, the crucible cover being provided
thereon with a secondary heating coil corresponding to an outer
circumference of the jet opening; the primary heating coil and the
secondary heating coil being electrically connected to a power
supply and being independently controllable for heating; wherein
the secondary heating coil is of a helical form, comprising a
tailing end located at a terminal of an innermost turn and an
electrode end located at a terminal of an outermost turn; the
tailing end is positioned on the crucible cover; and the electrode
end projects outside the crucible cover and partially extends
downward in a vertical direction; wherein the primary heating coil
has a coil distribution density arranged in an upper portion of the
crucible and greater than a coil distribution density arranged in a
lower portion of the crucible; wherein in a vacuum deposition
process, application of electricity to the primary heating coil and
the secondary heating coil is controlled individually so as to have
a temperature of the crucible cover higher than a temperature of
the crucible.
11. The vacuum deposition heating device as claimed in claim 10,
wherein an electrical connector is arranged between the crucible
and the heating device outer wall at a location corresponding to a
lower tip of the electrode end; the electrode end is inserted into
the electrical connector; and the electrical connector is
electrically connected to a heating circuit.
12. The vacuum deposition heating device as claimed in claim 10,
wherein the secondary heating coil is provided with a protective
cover.
13. The vacuum deposition heating device as claimed in claim 12,
wherein the protective cover is made of a metal.
14. The vacuum deposition heating device as claimed in claim 13,
wherein the protective cover and the secondary heating coil are
welded together; or alternatively, the protective cover is provided
with a retention slot and the secondary heating coil is fit into
and retained in the retention slot.
15. The vacuum deposition heating device as claimed in claim 10,
wherein the crucible cover is provided with a first thermal couple
at a location corresponding to an outer edge of the secondary
heating coil to monitor a temperature of the crucible cover; and
the crucible is provided with a second thermal couple at a location
adjacent to a bottom thereof to monitor a temperature of the
crucible.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
[0001] The present invention relates to the field of display
technology, and in particular to a vacuum deposition heating
device.
2. The Related Arts
[0002] Organic light-emitting diode (OLED) is regarded as the next
generation of display technology and possesses excellent display
performance, particularly being self-luminous, simple structure,
ultrathin and ultra-light, fast response speed, wide view angle,
low power consumption, and being capable of flexible displaying.
Mass production techniques of OLED generally involve vacuum
deposition for formation of films of OLED materials.
[0003] In a vacuum deposition process conducted in a vacuum
deposition chamber, a material is placed in a crucible and the
crucible is placed in a heating device to be heated to an
evaporation temperature so as to vaporize the material such that
the vaporized material molecule jets out of a jet opening of a
crucible cover to get deposited on a substrate for formation of a
solid state film. Improper control of temperature would cause a
relatively low temperature in the crucible cover and vaporized
material molecules would deposit on the crucible cover and gets
expanded to eventually block (jam) the jet opening of the crucible.
Partial jamming of the jet opening will cause inaccuracy of film
thickness and thus affecting film quality and the performance of a
final product. Full jamming of the jet opening would cause no
formation of film and overheating of the material left in the
crucible. For the OLED organic materials, overheating would make
decomposition of the material, making it useless. Further,
preventing opening jamming is the essential requirement for a
vacuum deposition process and is also an essential condition for
providing high quality films.
[0004] To prevent opening jamming and ensure stable vacuum
deposition conditions, temperature distribution in two directions,
including a vertical axial direction and a horizontal radial
direction, of a crucible must be realized. They must meet the
following to conditions:
[0005] (1) Vertical axial direction: temperature of an upper
portion of the crucible must be higher than the temperature of a
lower portion, meaning a temperature gradient from top to bottom
must be present.
[0006] (2) Horizontal radial direction: a temperature difference
between a peripheral portion and a central portion of the crucible
must be as smaller as possible, meaning the temperature of the
crucible must be as consistent as possible in a horizontal
direction.
[0007] Referring to FIG. 1, a schematic cross-sectional view is
given to illustrate a conventional vacuum deposition heating
device, which comprises a heating device outer wall 300, a crucible
100 disposed inside the heating device outer wall 300, and a
crucible cover 200 positioned on the crucible 100. The crucible
cover 200 has a center in which a jet opening 201 is formed and
extending through upper and lower surfaces of the crucible cover
200. A heating coil 110 is arranged between the crucible 100 and
the heating device outer wall 300 to correspond to outer
circumferences of the crucible 100 and the crucible cover 200,
wherein the heating coil 110 has a portion that corresponds to an
upper portion of the crucible 100 and has a relatively large
distribution density than a distribution density of a portion of
the heating coil 110 that corresponds to a lower portion of the
crucible 100 so that the upper portion of the crucible is provided
with a temperature that is greater than that provided to the lower
portion of the crucible. This can effectively overcome the issue
that the crucible must show a temperature difference in the
vertical direction. However, since the heating coil 110 is arranged
to surround the circumference of the crucible 100, there is also a
temperature gradient from outer side to inner side in the
horizontal direction. In other words, the temperature in the
peripheral portion of the crucible 100 in a radial direction is
greater than the temperature in the central portion. The
temperature difference in the horizontal radial direction also
result in the temperature around the jet opening 201 of the
crucible cover being lower than the temperature around a crucible
wall 120, and this would impose a great influence on OLED materials
having poor thermal conductivity. Further, vaporized material
molecules jet out of the jet opening 201 of the crucible cover is
also a process of heat dissipation, and would result in a heat loss
rate in the area of opening being greater than that of other
portions of the crucible. Heretofore, no technical solution is
dedicated to handle the issue of temperature difference in the
horizontal radial direction and due to constraints imposed by the
temperature difference in the horizontal radial direction,
crucibles are prevented from expanding the diameters thereof for
the larger the crucible diameter is, the greater the temperature
difference would be in the radial direction, making the opening
jammed more easily. This condition limits the amount of material
that can be received in a crucible and is adverse in reducing the
frequency of opening the chamber to change material and maintenance
of the machine and thus opposite to the increase of manufacturing
efficiency.
SUMMARY OF THE INVENTION
[0008] An object of the present invention is to provide a vacuum
deposition heating device, which effectively reduces temperature
difference in a horizontal radial direction of a crucible, prevents
opening from being jammed by material, and allows for expansion of
diameter to increase the amount of material applied, reduce the
times of opening chamber, and increase the manufacturing
efficiency.
[0009] To achieve the above object, the present invention provides
a vacuum deposition heating device, which comprises heating device
outer wall, a crucible disposed inside the heating device outer
wall, and a crucible cover positioned on the crucible;
[0010] a primary heating coil being arranged between the crucible
and the heating device outer wall and corresponding to outer
circumferences of the crucible and the crucible cover; the crucible
cover having a center in which a jet opening that extends through
top and bottom surfaces of the crucible cover is formed, the
crucible cover being provided thereon with a secondary heating coil
corresponding to an outer circumference of the jet opening; the
primary heating coil and the secondary heating coil being
electrically connected to a power supply and being independently
controllable for heating.
[0011] The secondary heating coil is of a helical form, comprising
a tailing end located at a terminal of an innermost turn and an
electrode end located at a terminal of an outermost turn; the
tailing end is positioned on the crucible cover; and the electrode
end projects outside the crucible cover and partially extends
downward in a vertical direction.
[0012] An electrical connector is arranged between the crucible and
the heating device outer wall at a location corresponding to a
lower tip of the electrode end; the electrode end is inserted into
the electrical connector; and the electrical connector is
electrically connected to a heating circuit.
[0013] The primary heating coil has a coil distribution density
arranged in an upper portion of the crucible and greater than a
coil distribution density arranged in a lower portion of the
crucible.
[0014] In a vacuum deposition process, application of electricity
to the primary heating coil and the secondary heating coil is
controlled individually so as to have a temperature of the crucible
cover higher than a temperature of the crucible.
[0015] The secondary heating coil is provided with a protective
cover.
[0016] The protective cover is made of a metal.
[0017] The protective cover and the secondary heating coil are
welded together; or alternatively, the protective cover is provided
with a retention slot and the secondary heating coil is fit into
and retained in the retention slot.
[0018] The crucible cover is provided with a first thermal couple
at a location corresponding to an outer edge of the secondary
heating coil to monitor a temperature of the crucible cover; and
the crucible is provided with a second thermal couple at a location
adjacent to a bottom thereof to monitor a temperature of the
crucible.
[0019] The present invention also provides a vacuum deposition
heating device, which comprises a heating device outer wall, a
crucible disposed inside the heating device outer wall, and a
crucible cover positioned on the crucible;
[0020] a primary heating coil being arranged between the crucible
and the heating device outer wall and corresponding to outer
circumferences of the crucible and the crucible cover; the crucible
cover having a center in which a jet opening that extends through
top and bottom surfaces of the crucible cover is formed, the
crucible cover being provided thereon with a secondary heating coil
corresponding to an outer circumference of the jet opening; the
primary heating coil and the secondary heating coil being
electrically connected to a power supply and being independently
controllable for heating;
[0021] wherein the secondary heating coil is of a helical form,
comprising a tailing end located at a terminal of an innermost turn
and an electrode end located at a terminal of an outermost turn;
the tailing end is positioned on the crucible cover; and the
electrode end projects outside the crucible cover and partially
extends downward in a vertical direction;
[0022] wherein the primary heating coil has a coil distribution
density arranged in an upper portion of the crucible and greater
than a coil distribution density arranged in a lower portion of the
crucible;
[0023] wherein in a vacuum deposition process, application of
electricity to the primary heating coil and the secondary heating
coil is controlled individually so as to have a temperature of the
crucible cover higher than a temperature of the crucible.
[0024] The efficacy of the present invention is that the present
invention provides a vacuum deposition heating device, which
comprises a primary heating coil arranged around circumferences of
a crucible and a crucible cover and a secondary heating coil
arranged on the crucible cover, wherein the primary heating coil
and the secondary heating coil are controllable independently for
heating so as to ensure a temperature from top to bottom present in
the crucible and at the same time effectively reducing a
temperature difference in the crucible in a horizontal radial
direction to prevent opening jamming and allow for expansion of
diameter to thereby increase the amount of material applied, reduce
the times of chamber opening, increase manufacturing efficiency. In
addition, the structure is simple and the manufacture thereof is
easy.
BRIEF DESCRIPTION OF THE DRAWINGS
[0025] For better understanding of the features and technical
contents of the present invention, reference will be made to the
following detailed description of the present invention and the
attached drawings. However, the drawings are provided for the
purposes of reference and illustration and are not intended to
impose limitations to the present invention.
[0026] In the drawings:
[0027] FIG. 1 is a schematic cross-sectional view illustrating a
conventional vacuum deposition heating device;
[0028] FIG. 2 is a schematic cross-sectional view illustrating a
vacuum deposition heating device according to the present
invention;
[0029] FIG. 3 is a schematic top plan view illustrating a secondary
heating coil of the vacuum deposition heating device according to
the present invention; and
[0030] FIG. 4 is a schematic top plan view illustrating a
protective cover of the secondary heating coil of the vacuum
deposition heating device according to the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0031] To further expound the technical solution adopted in the
present invention and the advantages thereof, a detailed
description is given to a preferred embodiment of the present
invention and the attached drawings.
[0032] Referring to FIGS. 2-4, the present invention provides a
vacuum deposition heating device, which comprises a heating device
outer wall 3, a crucible 1 disposed inside the heating device outer
wall 3, and a crucible cover 2 positioned on the crucible 1.
[0033] Specifically, a primary heating coil 11 is arranged between
the crucible 1 and the heating device outer wall 3 and corresponds
to outer circumferences of the crucible 1 and the crucible cover 2.
The crucible cover 2 has a center in which a jet opening 20 that
extends through top and bottom surfaces of the crucible cover 2 is
formed to allow, in a vacuum deposition process, vaporized
deposition material molecules to jet out of jet opening 20 and get
deposited on a substrate to form a solid state film. The crucible
cover 2 is provided thereon with a secondary heating coil 21
corresponding to an outer circumference of the jet opening 20. The
primary heating coil 11 and the secondary heating coil 21 are
electrically connected to a power supply and can be controlled
individually and independently for heating so that control of
temperature distribution of the crucible 2 in both a vertical axial
direction and a horizontal radial direction can be achieved
simultaneously, whereby a temperature difference in the horizontal
radial direction of the crucible can be effectively reduce, while a
temperature gradient is maintained from top to bottom of the
crucible to effectively prevent opening jamming.
[0034] Specifically, the secondary heating coil 21 is of a helical
form, comprising a tailing end 211 located at a terminal of an
innermost turn and an electrode end 212 located at a terminal of an
outermost turn. The tailing end 211 is positioned on the crucible
cover 2 and the electrode end 212 projects outside the crucible
cover 2 and partially extends downward in a vertical direction.
[0035] Specifically, an electrical connector 22 is arranged between
the crucible 1 and the heating device outer wall 3 at a location
corresponding to a lower tip of the electrode end 212. The
electrode end 212 is partly inserted into the electrical connector
22. The electrical connector 22 is electrically connected to a
heating circuit 23. The electrical connector 22 can be in the form
of a socket for easy insertion and withdrawal, whereby during a
vacuum deposition process, the secondary heating coil 21 can be
conveniently removed for changing the material disposed in the
crucible. Once the crucible is re-installed, the secondary heating
coil 21 can be conveniently re-mounted.
[0036] Specifically, a heating device base 24 is arranged under the
crucible 1.
[0037] Specifically, the primary heating coil 11 has a coil
distribution density that is arranged in an upper portion of the
crucible 1 and is greater than a coil distribution density thereof
arranged in a lower portion of the crucible 1 so that the upper
portion of the crucible 2 is provided with a temperature that is
slightly higher than that of the lower portion. This effectively
handles the issue that the crucible 2 needs to have a temperature
difference in the vertical axial direction and a temperature
gradient from top to bottom is present in the crucible 2 thereby
effectively preventing opening jamming and maintaining stable
deposition conditions.
[0038] Specifically, in a vacuum deposition process, application of
electricity to the primary heating coil 11 and the secondary
heating coil 21 can be controlled individually such that the
temperature of the crucible cover 2 is higher than the temperature
of the crucible 1 thereby effectively reducing a temperature
difference of the crucible 2 in the horizontal radial direction to
further prevent opening jamming and better maintain stable
deposition conditions.
[0039] As shown in FIG. 4, the secondary heating coil 21 is
provided with a protective cover 30 to provide protection to the
secondary heating coil 21 and prevent deformation thereof. The
protective cover 30 has a shape and a size respectively
corresponding to a shape and a size of the secondary heating coil
21 in order to house and receive the secondary heating coil 21
therein. Further, the protective cover 30 has a center in which a
hole 31 is formed and corresponds to the jet opening 20. The hole
31 has a size substantially equal to or greater than a size of the
jet opening 20.
[0040] Specifically, the protective cover 30 is made of metal, such
as titanium, aluminum, and stainless steel.
[0041] Specifically, the protective cover 30 can be fixed, through
welding, to the secondary heating coil 21; or alternatively, the
protective cover 30 is provided with a retention slot and the
secondary heating coil 21 is fit into and retained in the retention
slot.
[0042] Specifically, the crucible cover 2 is provided with a first
thermal couple 25 at a location corresponding to an outer edge of
the secondary heating coil 21 to monitor the temperature of the
crucible cover 2; and the crucible 1 is provided with a second
thermal couple 26 at a location adjacent to a bottom thereof to
monitor the temperature of the crucible 1 so as to ensure that the
temperature of the crucible cover 2 is slightly higher than the
temperature of the crucible 1 and also lower than a decomposition
temperature of the material.
[0043] In summary, the present invention provides a vacuum
deposition heating device, which comprises a primary heating coil
arranged around circumferences of a crucible and a crucible cover
and a secondary heating coil arranged on the crucible cover,
wherein the primary heating coil and the secondary heating coil are
controllable independently for heating so as to ensure a
temperature from top to bottom present in the crucible and at the
same time effectively reducing a temperature difference in the
crucible in a horizontal radial direction to prevent opening
jamming and allow for expansion of diameter to thereby increase the
amount of material applied, reduce the times of chamber opening,
increase manufacturing efficiency. In addition, the structure is
simple and the manufacture thereof is easy.
[0044] Based on the description given above, those having ordinary
skills of the art may easily contemplate various changes and
modifications of the technical solution and technical ideas of the
present invention and all these changes and modifications are
considered within the protection scope of right for the present
invention.
* * * * *