U.S. patent application number 15/378763 was filed with the patent office on 2018-01-11 for device and method for patterning substrate, and method of manufacturing organic light-emitting device.
The applicant listed for this patent is Samsung Electronics Co., Ltd.. Invention is credited to Sunghwan CHO, Nobuo HAMAMOTO, Makoto ODAWARA.
Application Number | 20180013063 15/378763 |
Document ID | / |
Family ID | 60629148 |
Filed Date | 2018-01-11 |
United States Patent
Application |
20180013063 |
Kind Code |
A1 |
HAMAMOTO; Nobuo ; et
al. |
January 11, 2018 |
DEVICE AND METHOD FOR PATTERNING SUBSTRATE, AND METHOD OF
MANUFACTURING ORGANIC LIGHT-EMITTING DEVICE
Abstract
A method of patterning a substrate includes applying a first
potential to a spray nozzle, applying a second potential to at
least one first cell electrode among a plurality of cell electrodes
on a first surface of the substrate, applying a third potential to
at least one second cell electrode excluding the at least one first
cell electrode among the cell electrodes, and applying a fourth
potential to a second surface that is opposite to the first surface
of the substrate.
Inventors: |
HAMAMOTO; Nobuo; (Suwon-si,
KR) ; ODAWARA; Makoto; (Hwaseong-si, KR) ;
CHO; Sunghwan; (Hwaseong-si, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Samsung Electronics Co., Ltd. |
Suwon-si |
|
KR |
|
|
Family ID: |
60629148 |
Appl. No.: |
15/378763 |
Filed: |
December 14, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/6715 20130101;
H01L 27/3211 20130101; H01L 51/0014 20130101; H01L 51/0003
20130101 |
International
Class: |
H01L 51/00 20060101
H01L051/00; H01L 27/32 20060101 H01L027/32; H01L 21/67 20060101
H01L021/67 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 5, 2016 |
KR |
10-2016-0085068 |
Claims
1. A method of patterning a substrate using a patterning solution,
the method comprises: applying a first potential to a spray nozzle;
applying a second potential to at least one first cell electrode
among a plurality of cell electrodes on a first surface of the
substrate; applying a third potential to at least one second cell
electrode excluding the at least one first cell electrode among the
plurality of cell electrodes; applying a fourth potential to a back
electrode disposed on a second surface which is opposite to the
first surface of the substrate; and selectively depositing the
patterning solution on the at least one first cell electrode by
spraying the patterning solution from the spray nozzle to the first
surface of the substrate, wherein the second potential is different
from each of the first potential, the third potential, and the
fourth potential.
2. The method of claim 1, wherein the first to fourth potentials
are adjusted in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1, .delta. [ RF ] 0 [ SF ] - 4.75 .times. [ CF ] [ SF ]
+ 38 [ Numerical inequation 1 ] ##EQU00023## and the first to third
parameters [SF], [CF], and [RF] are defined as described below: [
SF ] .ident. V 1 - V 2 d 1 , [ CF ] .ident. V 3 - V 2 d 2 , [ RF ]
.ident. V 4 - V 2 d 3 ##EQU00024## wherein, .di-elect cons..sub.S
denotes a dielectric constant of the substrate, .di-elect
cons..sub.0 denotes a dielectric constant of air, V1 denotes the
first potential, V2 denotes the second potential, V3 denotes the
third potential, V4 denotes the fourth potential, d1 denotes the
distance between the spray nozzle and the first cell electrode, d2
denotes the distance between the first cell electrode and the
second cell electrode, and d3 denotes the thickness of the
substrate.
3. The method of claim 1, wherein the spray nozzle has a needle
shape with a sharp end, a ring electrode having a ring shape is
provided between the spray nozzle and the substrate, and the method
further comprises: applying a fifth potential which is different
from the first to fourth potentials to the ring electrode.
4. The method of claim 3, wherein the second to fifth potentials
are adjusted in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1, .delta. [ RF ] 0 [ SF ] - 4.75 .times. CF SF + 38 [
Numerical inequation 1 ] ##EQU00025## and the first to third
parameters [SF], [CF], and [RF] are defined as described below: [
SF ] .ident. V 5 - V 2 h 1 , [ CF ] .ident. V 3 - V 2 h 2 , [ RF ]
.ident. V 4 - V 2 h 3 ##EQU00026## wherein, .di-elect cons..sub.S
denotes a dielectric constant of the substrate, .di-elect
cons..sub.0 denotes a dielectric constant of air, V2 denotes the
second potential, V3 denotes the third potential, V4 denotes the
fourth potential, V5 denotes the fifth potential, h1 denotes a
distance between the ring electrode and the first cell electrode,
h2 denotes a distance between the first cell electrode and the
second cell electrode, and h3 denotes a thickness of the
substrate.
5. The method of claim 1, wherein an intermediate electrode layer
in which a plurality of through holes is defined is provided
between the spray nozzle and the substrate, and the method further
comprises: applying a fifth potential which is different from the
first to fourth potentials to the intermediate electrode layer.
6. The method of claim 5, wherein the second to fifth potentials
are adjusted in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1, .delta. [ RF ] 0 [ SF ] - 4.75 .times. [ CF ] [ SF ]
+ 38 [ Numerical inequation 1 ] ##EQU00027## and the first to third
parameters [SF], [CF], and [RF] are defined as described below: [
SF ] .ident. V 5 - V 2 h 4 , [ CF ] .ident. V 3 - V 2 h 2 , [ RF ]
.ident. V 4 - V 2 h 3 ##EQU00028## wherein, .di-elect cons..sub.S
denotes a dielectric constant of the substrate, .di-elect
cons..sub.0 denotes a dielectric constant of air, V2 denotes the
second potential, V3 denotes the third potential, V4 denotes the
fourth potential, V5 denotes the fifth potential, h4 denotes a
distance between the intermediate electrode layer and the first
cell electrode, h2 denotes a distance between the first cell
electrode and the second cell electrode, and h3 denotes a thickness
of the substrate.
7. The method of claim 5, wherein the intermediate electrode layer
is a punched metal.
8. The method of claim 5, wherein the plurality of through holes
having a grid pattern is defined in the intermediate electrode
layer.
9. The method of claim 1, wherein each of the first potential,
third potential, and fourth potential has a positive potential
value, and the second potential has a negative potential value.
10. A device for patterning a substrate using a patterning
solution, the device comprising: a spray nozzle which sprays the
patterning solution toward a first surface of the substrate; a back
electrode disposed on a second surface which is opposite to the
first surface of the substrate; and a plurality of cell electrodes
disposed on the first surface of the substrate, and a voltage
driving unit which adjusts potentials of the spray nozzle and the
back electrode, wherein the voltage driving unit applies a first
potential to the spray nozzle, applies a second potential to at
least one first cell electrode among the plurality of cell
electrodes, applies a third potential to at least one second cell
electrode excluding the at least one first cell electrode among the
plurality of cell electrodes, and applies a fourth potential to the
back electrode, and the second potential is different from each of
the first potential, the third potential, and the fourth potential,
wherein the voltage driving unit adjusts the first to fourth
potentials in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1, .delta. [ RF ] 0 [ SF ] - 4.75 .times. CF SF + 38 [
Numerical inequation 1 ] ##EQU00029## and the first to third
parameters [SF], [CF], and [RF] are defined as described below: [
SF ] .ident. V 1 - V 2 d 1 , [ CF ] .ident. V 3 - V 2 d 2 , [ RF ]
.ident. V 4 - V 2 d 3 ##EQU00030## wherein, .di-elect cons..sub.S
denotes a dielectric constant of the substrate, .di-elect
cons..sub.0 denotes a dielectric constant of air, V1 denotes a
first potential, V2 denotes a second potential, V3 denotes a third
potential, V4 denotes a fourth potential, d1 denotes a distance
between the spray nozzle and the first cell electrode, d2 denotes a
distance between the first cell electrode and the second cell
electrode, and d3 denotes a thickness of the substrate.
11. (canceled)
12. The device of claim 10, wherein the spray nozzle has a needle
shape with a sharp end, and further comprising: a ring electrode
having a ring shape between the spray nozzle and the substrate, the
voltage driving unit applies a fifth potential to the ring
electrode, and the fifth potential is different from the first to
fourth potentials.
13. The device of claim 12, wherein the voltage driving unit
adjusts the second to fifth potentials in a manner where a first
parameter [SF], a second parameter [CF], and a third parameter [RF]
satisfy Numerical inequation 1, .delta. [ RF ] 0 [ SF ] - 4.75
.times. CF SF + 38 [ Numerical inequation 1 ] ##EQU00031## and the
first to third parameters [SF], [CF], and [RF] are defined as
described below: [ SF ] .ident. V 5 - V 2 h 4 , [ CF ] .ident. V 3
- V 2 h 2 , [ RF ] .ident. V 4 - V 2 h 3 ##EQU00032## wherein,
.di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V2 denotes a second potential, V3 denotes a third potential,
V4 denotes a fourth potential, V5 denotes a fifth potential, h1
denotes a distance between the ring electrode and the first cell
electrode, h2 denotes a distance between the first cell electrode
and the second cell electrode, and h3 denotes a thickness of the
substrate.
14. The device of claim 10, further comprising: an intermediate
electrode layer which is disposed between the spray nozzle and the
substrate and in which a plurality of through holes is defined, the
voltage driving unit applies a fifth potential to the intermediate
electrode layer, and the fifth potential is different from the
first to fourth potentials.
15. The device of claim 14, wherein the voltage driving unit
adjusts the second to fifth potentials in a manner where a first
parameter [SF], a second parameter [CF], and a third parameter [RF]
satisfy Numerical inequation 1, .delta. [ RF ] 0 [ SF ] - 4.75
.times. CF SF + 38 [ Numerical inequation 1 ] ##EQU00033## and the
first to third parameters [SF], [CF], and [RF] are defined as
described below: [ SF ] .ident. V 5 - V 2 h 4 , [ CF ] .ident. V 3
- V 2 h 2 , [ RF ] .ident. V 4 - V 2 h 3 ##EQU00034## wherein,
.di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V2 denotes the second potential, V3 denotes the third
potential, V4 denotes the fourth potential, V5 denotes the fifth
potential, h4 denotes a distance between the intermediate electrode
layer and the first cell electrode, h2 denotes a distance between
the first cell electrode and the second cell electrode, and h3
denotes a thickness of the substrate.
16. The device of claim 14, wherein the intermediate electrode
layer is a punched metal.
17. The device of claim 14, wherein the plurality of through holes
having a grid pattern is defined in the intermediate electrode
layer.
18-20. (canceled)
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims priority to Korean Patent
Application No. 10-2016-0085068, filed on Jul. 5, 2016, and all the
benefits accruing therefrom under 35 U.S.C. .sctn.119, the content
of which in its entirety is herein incorporated by reference.
BACKGROUND
1. Field
[0002] Embodiments of the present disclosure relate to devices and
methods of patterning a substrate, and methods of manufacturing an
organic light-emitting device using the methods of patterning a
substrate, and more particularly, to devices and methods of
patterning a substrate which deposit a patterning solution on a
predetermined area of the substrate.
2. Description of the Related Art
[0003] An organic light-emitting device is an active emission
display device and has various advantages such as wide viewing
angles, high contrast ratios, and short response times. Thus, the
organic light-emitting device is considered as a next-generation
display device.
[0004] The organic light-emitting device generally includes an
anode prepared by forming a predetermined pattern on a transparent
insulating substrate including glass or another material, and an
organic material and a cathode sequentially stacked on the anode in
the stated order. When a voltage is applied to the prepared anode
and cathode of the organic light-emitting device, holes provided
from the anode may move toward an emission layer through a hole
transport layer, and electrons provided from the cathode may move
toward the emission layer through an electron transport layer. The
holes and the electrons are recombined in the emission layer to
produce excitons. These excitons change from an excited state to a
ground state, thereby displaying an image as organic molecules in
the emission layer emit light.
[0005] In order to manufacture an organic light-emitting device
which produces a full-color image, for example, red (R), green (G),
and blue (B) sub-pixels are generally formed on a substrate using a
mask in which an opening of a predetermined pattern is defined.
SUMMARY
[0006] Provided are devices and methods of patterning a substrate,
and methods of manufacturing an organic light-emitting device using
the methods of patterning a substrate.
[0007] Additional embodiments will be set forth in part in the
description which follows and, in part, will be apparent from the
description, or may be learned by practice of the presented
embodiments.
[0008] According to an embodiment, a method of patterning a
substrate using a patterning solution includes applying a first
potential to a spray nozzle, applying a second potential to at
least one first cell electrode among a plurality of cell electrodes
on a first surface of the substrate, applying a third potential to
at least one second cell electrode excluding the at least one first
cell electrode among the plurality of cell electrodes, applying a
fourth potential to a second surface that is opposite to the first
surface of the substrate, and selectively depositing the patterning
solution on the at least one first cell electrode by spraying the
patterning solution from the spray nozzle to the first surface of
the substrate, where the second potential may be different from
each of the first potential, the third potential, and the fourth
potential.
[0009] In an embodiment, the first to fourth potentials may be
adjusted in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1,
s * [ RF ] 0 * [ SF ] - 4.75 .times. [ CF ] [ SF ] + 38 [ Numerical
inequation 1 ] ##EQU00001##
and the first to third parameters [SF], [CF], and [RF] may be
defined as described below:
[ SF ] .ident. V 1 - V 2 d 1 , [ CF ] .ident. V 3 - V 2 d 2 , [ RF
] .ident. V 4 - V 2 d 3 ##EQU00002##
where .di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V1 denotes the first potential, V2 denotes the second
potential, V3 denotes the third potential, V4 denotes the fourth
potential, d1 denotes a distance between the spray nozzle and the
first cell electrode, d2 denotes a distance between the first cell
electrode and the second cell electrode, and d3 denotes a thickness
of the substrate.
[0010] In an embodiment, the spray nozzle may have a needle shape
with a sharp end, and a ring electrode having a ring shape may be
provided between the spray nozzle and the substrate, and the method
of patterning a substrate using a patterning solution may further
include applying a fifth potential to the ring electrode, where the
fifth potential may be different from the first to fourth
potentials.
[0011] In an embodiment, the second to fifth potentials may be
adjusted in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1,
s * [ RF ] 0 * [ SF ] - 4.75 .times. [ CF ] [ SF ] + 38 [ Numerical
inequation 1 ] ##EQU00003##
and the first to third parameters [SF], [CF], and [RF] may be
defined as described below:
[ SF ] .ident. V 5 - V 2 h 1 , [ CF ] .ident. V 3 - V 2 h 2 , [ RF
] .ident. V 4 - V 2 h 3 ##EQU00004##
where .di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V2 denotes the second potential, V3 denotes the third
potential, V4 denotes the fourth potential, V5 denotes the fifth
potential, h1 denotes a distance between the ring electrode and the
first cell electrode, h2 denotes a distance between the first cell
electrode and the second cell electrode, and h3 denotes a thickness
of the substrate.
[0012] In an embodiment, an intermediate electrode layer in which a
plurality of through holes is defined may be provided between the
spray nozzle and the substrate, and the method of patterning a
substrate using a patterning solution may further include applying
a fifth potential that is different from the first to fourth
potentials to the intermediate electrode layer.
[0013] In an embodiment, the second to fifth potentials may be
adjusted in a manner where a first parameter [SF], a second
parameter [CF], and a third parameter [RF] satisfy Numerical
inequation 1,
s [ RF ] 0 [ SF ] - 4.75 .times. [ CF ] [ SF ] + 38 [ Numerical
inequation 1 ] ##EQU00005##
and the first to third parameters [SF], [CF], and [RF] may be
defined as described below:
[ SF ] .ident. V 5 - V 2 h 4 , [ CF ] .ident. V 3 - V 2 h 2 , [ RF
] .ident. V 4 - V 2 h 3 ##EQU00006##
where .di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V2 denotes the second potential, V3 denotes the third
potential, V4 denotes the fourth potential, V5 denotes the fifth
potential, h4 denotes a distance between the intermediate electrode
layer and the first cell electrode, h2 denotes a distance between
the first cell electrode and the second cell electrode, and h3
denotes a thickness of the substrate.
[0014] In an embodiment, the intermediate electrode layer may be a
punched metal.
[0015] In an embodiment, the plurality of through holes having a
grid pattern may be defined in the intermediate electrode
layer.
[0016] In an embodiment, each of the first potential, third
potential, and fourth potential may have a positive potential
value, and the second potential has a negative potential value.
[0017] According to an embodiment of another embodiment, a device
for patterning a substrate using a patterning solution includes a
spray nozzle spraying the patterning solution toward a first
surface of the substrate, a back electrode disposed on a second
surface that is opposite to the first surface of the substrate, and
a plurality of cell electrodes disposed on the first surface of the
substrate, and a voltage driving unit adjusting potentials of the
spray nozzle and the back electrode, where the voltage driving unit
applies a first potential to the spray nozzle, applies a second
potential to at least one first cell electrode among the plurality
of cell electrodes, applies a third potential to at least one
second cell electrode excluding the at least one first cell
electrode among the cell electrodes, and applies a fourth potential
to the back electrode, and the second potential is different from
each of the first potential, the third potential, and the fourth
potential.
[0018] In an embodiment, the voltage driving unit may adjust the
first to fourth potentials in a manner where a first parameter
[SF], a second parameter [CF], and a third parameter [RF] satisfy
Numerical inequation 1,
s [ RF ] 0 [ SF ] - 4.75 .times. CF SF + 38 [ Numerical inequation
1 ] ##EQU00007##
and the first to third parameters [SF], [CF], and [RF] may be
defined as described below:
[ SF ] .ident. V 1 - V 2 d 1 , [ CF ] .ident. V 3 - V 2 d 2 , [ RF
] .ident. V 4 - V 2 d 3 ##EQU00008##
where .di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V1 denotes the first potential, V2 denotes the second
potential, V3 denotes the third potential, V4 denotes the fourth
potential, d1 denotes a distance between the spray nozzle and the
first cell electrode, d2 denotes a distance between the first cell
electrode and the second cell electrode, and d3 denotes a thickness
of the substrate.
[0019] In an embodiment, the spray nozzle may have a needle shape
with a sharp end, and the device for patterning a substrate using a
patterning solution may further includes a ring electrode having a
ring shape between the spray nozzle and the substrate, where the
voltage driving unit may apply a fifth potential to the ring
electrode, and the fifth potential may be different from the first
to fourth potentials.
[0020] In an embodiment, the voltage driving unit may adjust the
second to fifth potentials in a manner where a first parameter
[SF], a second parameter [CF], and a third parameter [RF] satisfy
Numerical inequation 1,
s [ RF ] 0 [ SF ] - 4.75 .times. CF SF + 38 [ Numerical inequation
1 ] ##EQU00009##
and the first to third parameters [SF], [CF], and [RF] may be
defined as described below:
[ SF ] .ident. V 5 - V 2 h 1 , [ CF ] .ident. V 3 - V 2 h 2 , [ RF
] .ident. V 4 - V 2 h 3 ##EQU00010##
where .di-elect cons..sub.S denotes the dielectric constant of the
substrate, .di-elect cons..sub.0 denotes the dielectric constant of
air, V2 denotes the second potential, V3 denotes the third
potential, V4 denotes the fourth potential, V5 denotes the fifth
potential, h1 denotes a distance between the ring electrode and the
first cell electrode, h2 denotes a distance between the first cell
electrode and the second cell electrode, and h3 denotes a thickness
of the substrate.
[0021] In an embodiment, the device for patterning a substrate
using a patterning solution may further include an intermediate
electrode layer between the spray nozzle and the substrate and
having a plurality of through holes, where the voltage driving unit
may apply a fifth potential to the intermediate electrode layer,
and the fifth potential may be different from the first to fourth
potentials.
[0022] In an embodiment, the voltage driving unit may adjust the
second to fifth potentials in a manner where a first parameter
[SF], a second parameter [CF], and a third parameter [RF] satisfy
Numerical inequation 1,
s [ RF ] 0 [ SF ] - 4.75 .times. CF SF + 38 [ Numerical inequation
1 ] ##EQU00011##
and the first to third parameters [SF], [CF], and [RF] may be
defined as described below:
[ SF ] .ident. V 5 - V 2 h 4 , [ CF ] .ident. V 3 - V 2 h 2 , [ RF
] .ident. V 4 - V 2 h 3 ##EQU00012##
where .di-elect cons..sub.S denotes a dielectric constant of the
substrate, .di-elect cons..sub.0 denotes a dielectric constant of
air, V2 denotes the second potential, V3 denotes the third
potential, V4 denotes the fourth potential, V5 denotes the fifth
potential, h4 denotes a distance between the intermediate electrode
layer and the first cell electrode, h2 denotes a distance between
the first cell electrode and the second cell electrode, and h3
denotes a thickness of the substrate.
[0023] In an embodiment, the intermediate electrode layer may be a
punched metal.
[0024] In an embodiment, the plurality of through holes having a
grid pattern may be defined in the intermediate electrode
layer.
[0025] According to another embodiment, a method of manufacturing
an organic light-emitting device includes a plurality of sub-pixel
areas having a plurality of pixels of different colors using an
organic-solution spray nozzle includes forming the plurality of
sub-pixel areas on a first surface of the substrate, applying a
first potential to the organic-solution spray nozzle, applying a
second potential to a first sub-pixel area included in the
plurality of sub-pixel areas, applying a third potential to
remaining sub-pixel areas excluding the first sub-pixel area among
the plurality of sub-pixel areas, applying a fourth potential to a
second surface that is opposite to the first surface of the
substrate, and selectively depositing a first organic solution on
the first sub-pixel area by spraying the first organic solution
from the organic-solution spray nozzle to the first surface of the
substrate, where the second potential may be different from each of
the first potential, the third potential, and the fourth
potential.
[0026] In an embodiment, the plurality of sub-pixel areas may
include the first sub-pixel area, and second and third sub-pixel
areas, and the method of manufacturing an organic light-emitting
device may further include applying the second potential to the
second sub-pixel area, and the third potential to the first and
third sub-pixel areas, selectively depositing a second organic
solution on the second sub-pixel area by spraying the second
organic solution from the organic-solution spray nozzle to the
first surface of the substrate, applying the second potential to
the third sub-pixel area, and the third potential to the first and
third sub-pixel areas, and selectively depositing a third organic
solution on the third sub-pixel area by spraying the third organic
solution from the organic-solution spray nozzle to the first
surface of the substrate.
[0027] In an embodiment, each of the first to third
organic-solutions may emit at least one of red, green, and blue
colors.
BRIEF DESCRIPTION OF THE DRAWINGS
[0028] These and/or other embodiments will become apparent and more
readily appreciated from the following description of the
embodiments, taken in conjunction with the accompanying drawings in
which:
[0029] FIG. 1 is a schematic view of patterning a substrate using a
substrate patterning device according to an embodiment;
[0030] FIG. 2 is a schematic view of an electric field generated on
a first surface of the substrate of FIG. 1;
[0031] FIG. 3 is a schematic view of a third electric field
generated by a potential difference between a first cell electrode
and a second cell electrode, and a fourth electric field generated
by a potential difference between a back electrode and the first
cell electrode;
[0032] FIG. 4 is a schematic view of an electric field generated on
a substrate when first to third parameters do not satisfy Numerical
inequation 8;
[0033] FIG. 5 is a view of a variation of the embodiment
illustrated in FIG. 1;
[0034] FIG. 6 is a view of a variation of the substrate illustrated
in FIGS. 1 to 5;
[0035] FIG. 7 is a view illustrating another example of a spray
nozzle illustrated in FIGS. 1 to 5;
[0036] FIG. 8 is a view of a patterning process using a substrate
patterning device including the spray nozzle and a ring electrode
illustrated in FIG. 7;
[0037] FIG. 9 is a schematic view of patterning a substrate using a
substrate patterning device according to another embodiment;
[0038] FIG. 10 is a schematic view of patterning a substrate using
a substrate patterning device according to another embodiment;
[0039] FIGS. 11 and 12 are exemplary perspective views of an
intermediate electrode layer illustrated in FIGS. 9 and 10;
[0040] FIG. 13 is a graph illustrating a result of a patterning
process according to a change in the parameters described
above;
[0041] FIG. 14 is a schematic plan view of an organic
light-emitting device;
[0042] FIG. 15 is a cross-sectional view taken along a line I-I' of
FIG. 14;
[0043] FIG. 16 is a schematic view of providing sub-pixel areas
SP1, SP2, and SP3 on a substrate;
[0044] FIG. 17 is a schematic view of spraying an organic solution
from a spray nozzle of an organic-solution spray device according
to an embodiment;
[0045] FIG. 18 is a view of a resultant according to a deposition
process of droplets of a first organic solution illustrated in FIG.
17;
[0046] FIG. 19 is a schematic view of selectively depositing
droplets of a second organic solution including a light-emitting
material of a second color on a second sub-pixel area;
[0047] FIG. 20 is a view of a resultant according to the deposition
process of the droplets of the second organic solution illustrated
in FIG. 19;
[0048] FIG. 21 is a schematic view of selectively depositing
droplets of a third organic solution including a light-emitting
material of a third color on a third sub-pixel area;
[0049] FIG. 22 is a view of a resultant according to the deposition
process of the droplets of the third organic solution illustrated
in FIG. 21;
[0050] FIGS. 23 to 25 are schematic views of examples generating a
mask effect during a patterning process by adjusting first to
fourth potentials;
[0051] FIG. 26 is a view of an example of a mask effect generated
during a patterning process, in which a value of the mask effect is
less than a reference value; and
[0052] FIG. 27 is a view illustrating a result of selectively
patterning a green patterning solution and a red patterning
solution in a state of adjusting first to fourth potentials to
satisfy Numerical inequations 7 and 8.
DETAILED DESCRIPTION
[0053] Reference will now be made in detail to embodiments,
examples of which are illustrated in the accompanying drawings,
where like reference numerals refer to like elements throughout. In
this regard, the embodiments may have different forms and should
not be construed as being limited to the descriptions set forth
herein. Accordingly, the embodiments are merely described below, by
referring to the figures, to explain embodiments. Expressions such
as "at least one of," when preceding a list of elements, modify the
entire list of elements and do not modify the individual elements
of the list.
[0054] Since the inventive concept may have diverse modified
embodiments, preferred embodiments are illustrated in the drawings
and are described in the detailed description. However, this does
not limit the inventive concept within specific embodiments and it
should be understood that the inventive concept covers all the
modifications, equivalents, and replacements within the idea and
technical scope of the inventive concept. In the description of the
present disclosure, certain detailed explanations of the related
art are omitted when it is deemed that they may unnecessarily
obscure the essence of the inventive concept.
[0055] It will be understood that, although the terms first,
second, etc. may be used herein to describe various elements, these
elements should not be limited by these terms. These terms are only
used to distinguish one element from another.
[0056] The terms used in this application, only certain embodiments
have been used to describe, is not intended to limit the
embodiments. As used herein, the singular forms "a", "an", and
"the" are intended to include the plural forms as well, unless the
context clearly indicates otherwise. It will be further understood
that the terms "comprises" and/or "comprising" when used in this
specification, specify the presence of stated features, integers,
steps, operations, elements, and/or components, but do not preclude
the presence or addition of one or more other features, integers,
steps, operations, elements, components, and/or groups thereof.
[0057] Furthermore, relative terms, such as "lower" or "bottom" and
"upper" or "top," may be used herein to describe one element's
relationship to another element as illustrated in the Figures. It
will be understood that relative terms are intended to encompass
different orientations of the device in addition to the orientation
depicted in the Figures. In an embodiment, when the device in one
of the figures is turned over, elements described as being on the
"lower" side of other elements would then be oriented on "upper"
sides of the other elements. The exemplary term "lower," can
therefore, encompasses both an orientation of "lower" and "upper,"
depending on the particular orientation of the figure. Similarly,
when the device in one of the figures is turned over, elements
described as "below" or "beneath" other elements would then be
oriented "above" the other elements. The exemplary terms "below" or
"beneath" can, therefore, encompass both an orientation of above
and below.
[0058] "About" or "approximately" as used herein is inclusive of
the stated value and means within an acceptable range of deviation
for the particular value as determined by one of ordinary skill in
the art, considering the measurement in question and the error
associated with measurement of the particular quantity (i.e., the
limitations of the measurement system). For example, "about" can
mean within one or more standard deviations, or within .+-.30%,
20%, 10%, 5% of the stated value.
[0059] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
invention belongs. It will be further understood that terms, such
as those defined in commonly used dictionaries, should be
interpreted as having a meaning that is consistent with their
meaning in the context of the relevant art and the invention, and
will not be interpreted in an idealized or overly formal sense
unless expressly so defined herein.
[0060] Embodiments are described herein with reference to cross
section illustrations that are schematic illustrations of idealized
embodiments. As such, variations from the shapes of the
illustrations as a result, for example, of manufacturing techniques
and/or tolerances, are to be expected. Thus, embodiments described
herein should not be construed as limited to the particular shapes
of regions as illustrated herein but are to include deviations in
shapes that result, for example, from manufacturing. In an
embodiment, a region illustrated or described as flat may,
typically, have rough and/or nonlinear features. Moreover, sharp
angles that are illustrated may be rounded. Thus, the regions
illustrated in the figures are schematic in nature and their shapes
are not intended to illustrate the precise shape of a region and
are not intended to limit the scope of the claims.
[0061] FIG. 1 is a schematic view of patterning a substrate SU
using a substrate patterning device according to an embodiment.
[0062] Referring to FIG. 1, the substrate patterning device
according to an embodiment may include a spray nozzle No spraying a
patterning solution toward a first surface S1 of the substrate SU,
a back electrode BE disposed on a second surface S2 that is
opposite to the first surface S1 of the substrate SU, a plurality
of cell electrodes, for example, first and second cell electrodes
C.sub.d and C.sub.n disposed on the first surface S1 of the
substrate SU, and voltage driving units VS1, VS2, VS3, and VS4
adjusting potentials of the spray nozzle No and the back electrode
BE.
[0063] The spray nozzle No may spray a patterning solution. A
potential of the spray nozzle No may be adjusted by the first
voltage driving unit VS1 of the voltage driving units VS1, VS2,
VS3, and VS4. As the potential of the spray nozzle No is adjusted,
a droplet 5 of the patterning solution sprayed from the spray
nozzle No may be charged with a prescribed polarity. In an
embodiment, when the spray nozzle No has a positive potential, the
droplet 5 of the patterning solution may also be positively
charged, for example. A shape of the droplet 5 of the patterning
solution sprayed from the spray nozzle No may be determined by a
surface tension of the droplet 5 and an electromagnetic force
between charges included in the droplet 5.
[0064] The first surface S1 of the substrate SU may include a
plurality of the first and second cell electrodes C.sub.d and
C.sub.n. A surface of the substrate SU may be patterned by
depositing the droplet 5 of the patterning solution on at least
some of the first and second cell electrodes C.sub.d and C.sub.n.
In an embodiment, a droplet of the patterning solution may be
deposited on at least one of the first cell electrode C.sub.d among
the plurality of the first and second cell electrodes C.sub.d and
C.sub.n, and the patterning solution may not be deposited on the
second cell electrodes C.sub.n excluding the first cell electrodes
C.sub.d among the first and second cell electrodes C.sub.d and
C.sub.n, for example. The first and second cell electrodes C.sub.d
and C.sub.n may include conductive materials.
[0065] The back electrode BE may be provided on the second surface
S2 of the substrate SU. A potential of the second surface S2 of the
substrate may be changed by the back electrode BE. The back
electrode BE may include conductive materials.
[0066] The voltage driving units VS1, VS2, VS3, and VS4 may apply
different potentials to the spray nozzle No, the first cell
electrode C.sub.d, the second cell electrode C.sub.n, and the back
electrode BE, respectively. In an embodiment the voltage driving
units VS1, VS2, VS3, and VS4 may include a first voltage driving
unit VS1 adjusting the potential of the spray nozzle No, a second
voltage driving unit VS2 adjusting a potential of the first cell
electrode C.sub.d, the third voltage driving unit VS3 adjusting a
potential of the second cell electrode C.sub.n, and a fourth
voltage driving unit VS4 adjusting a potential of the back
electrode BE, for example.
[0067] FIG. 1 illustrates the first to fourth voltage driving units
VS1, VS2, VS3, and VS4 that are separated from each other, but an
embodiment is not limited thereto. In another embodiment, the first
to fourth voltage driving units VS1, VS2, VS3, and VS4 may be
included in a single circuit, for example.
[0068] The first voltage driving unit VS1 may apply a first
potential V1 to the spray nozzle No. In an embodiment the first
potential V1 may have a positive potential value, for example. The
droplet 5 sprayed from the spray nozzle No may be positively
charged.
[0069] The second voltage driving unit VS2 may apply a second
potential V2 to the first cell electrode C.sub.d. The second
potential V2 may have a ground potential or a negative potential
that is less than the ground potential. The droplet 5 sprayed from
the spray nozzle No may progress to the first cell electrode
C.sub.d by Coulomb attraction.
[0070] The third voltage driving unit VS3 may apply a third
potential V3 to the second cell electrode C.sub.n. The third
potential V3 may have a positive potential value. The droplet 5
sprayed from the spray nozzle No may receive Coulomb repulsion from
the second cell electrode C.sub.n.
[0071] Although the droplet 5 receives repulsion from the second
cell electrode C.sub.n, some of droplets 5 may be deposited on the
second cell electrode C.sub.n or between the first cell electrode
C.sub.d and the second cell electrode C.sub.n due to repulsion
generated among the plurality of droplets 5. To avoid this, the
fourth voltage driving unit VS4 may apply a fourth potential V4 of
the back electrode BE to the second surface S2 of the substrate
SU.
[0072] The fourth potential V4 may have a positive potential value.
As the fourth potential V4 is applied to the second surface S2 of
the substrate SU, electric field strength pushing the droplets 5
away from the second cell electrode C.sub.n or between the first
and second cell electrodes C.sub.d and C.sub.n may be greater.
Therefore, the droplets 5 of the patterning solution may be
selectively deposited on the first cell electrode C.sub.d. In the
specification, an effect of selectively patterning the patterning
solution on a predetermined area is referred to as a mask effect.
According to the embodiment illustrated in FIG. 1, the second
potential V2 may be different from each of the first potential V1,
the third potential V3, and the fourth potential V4. In an
embodiment, as illustrated in FIG. 1, the mask effect may be
improved during a patterning process as each of the first potential
V1, third potential V3, and fourth potential V4 has a potential
value with a polarity that is different from that of the second
potential V2, for example.
[0073] The embodiment described above illustratively shows that
each of the first potential V1, third potential V3, and fourth
potential V4 has a positive potential value, and the second
potential V2 has a negative potential value. However, an embodiment
is not limited thereto. In another embodiment, each of the first
potential V1, third potential V3, and fourth potential V4 may have
a negative potential value, and the second potential V2 may have a
positive potential value, for example. In another embodiment, at
least one of the first potential V1, third potential V3, and fourth
potential may also have a ground potential.
[0074] FIG. 2 is a schematic view of an electric field generated on
the first surface S1 of the substrate SU of FIG. 1.
[0075] Referring to FIG. 2, due to a potential difference between
the first cell electrode C.sub.d and the spray nozzle No, a first
electric field E1 (referring to FIG. 4) leading the plurality of
droplets 5 to the first cell electrode C.sub.d may be generated on
the first surface S1 of the substrate SU. Furthermore, due to a
potential difference between the back electrode BE and the first
cell electrode C.sub.d and a potential difference between the first
and second cell electrodes C.sub.d and C.sub.n, a second electric
field E2 pushing the plurality of droplets 5 away from the second
cell electrode C.sub.n may be generated on the first surface S1 of
the substrate SU.
[0076] The mask effect described above may be improved as the
strength of the first and second electric fields E1 and E2
increases. Furthermore, the mask effect may further be improved as
the strength of the second electric field E2 increases to be
greater than that of the first electric field E1.
[0077] The first electric field E1 may be affected by an electric
field E.sub.NC (refer to FIG. 3) generated by the potential
difference between the first cell electrode C.sub.d and the spray
nozzle No. A first parameter indicating the first electric field E1
may be defined by Numerical equation 1.
[ SF ] .ident. V 1 - V 2 d 1 [ Numerical equation 1 ]
##EQU00013##
[0078] In Numerical equation 1, [SF] is a first parameter
indicating the strength of the first electric field E1 generated
between the first cell electrode C.sub.d and the spray nozzle No
due to the potential difference between the first cell electrode
C.sub.d and the spray nozzle No. Furthermore, d1 indicates a
distance between the first cell electrode C.sub.d and the spray
nozzle No, V1 indicates a first potential, and V2 indicates a
second potential. The first parameter [SF], which is a value
obtained by dividing the potential difference between the first
cell electrode C.sub.d and the spray nozzle No by the distance d1
between the first cell electrode C.sub.d and the spray nozzle No,
may indicate the strength of the first electric field E1 generated
between the first cell electrode C.sub.d and the spray nozzle
No.
[0079] The second electric field E2 illustrated in FIG. 2 may
depend on the electric field generated by the potential difference
between the back electrode BE and the first cell electrode C.sub.d,
and the electric field generated by the potential difference
between the first cell electrode C.sub.d and the second cell
electrode C.sub.n.
[0080] FIG. 3 is a schematic view of a third electric field E.sub.C
generated by the potential difference between the first and second
cell electrodes C.sub.d and C.sub.n, and a fourth electric field
E.sub.B generated by the potential difference between the back
electrode BE and the first cell electrode C.sub.d.
[0081] Referring to FIG. 3, the third electric field E.sub.C
generated by the potential difference between the first and second
cell electrodes C.sub.d and C.sub.n, and the fourth electric field
E.sub.B generated by the potential difference between the back
electrode BE and the first cell electrode C.sub.d may be generated
in a direction pushing the plurality of droplets 5 away from an
unpatterned area. The second electric field E2 illustrated in FIG.
2 may depend on a sum of the third electric field E.sub.C and the
fourth electric field E.sub.B.
[0082] A second parameter indicating the third electric field
E.sub.C may be defined by Numerical equation 2.
[ CF ] .ident. V 3 - V 2 d 2 [ Numerical equation 2 ]
##EQU00014##
[0083] In Numerical equation 2, [CF] is a second parameter
indicating the strength of the third electric field E.sub.C
generated between the first and second cell electrodes C.sub.d and
C.sub.n due to the potential difference between the first and
second cell electrodes C.sub.d and C.sub.n. Furthermore, d2
indicates a distance between the first and second cell electrodes
C.sub.d and C.sub.n, V2 indicates a second potential, and V3
indicates a third potential. The second parameter [CF], which is a
value obtained by dividing the potential difference between the
first and second cell electrodes C.sub.d and C.sub.n by the
distance d2 between the first and second cell electrodes C.sub.d
and C.sub.n, may indicate the strength of the third electric field
E.sub.C.
[0084] The fourth electric field E.sub.B illustrated in FIG. 3 may
be different from an electric field E.sub.B' in the substrate SU
because a dielectric constant of the substrate SU is different from
the dielectric constant of air outside the substrate SU.
[0085] A third parameter [RF] indicating the electric field
E.sub.B' generated in the substrate SU due to the potential
difference between the back electrode BE and the first cell
electrode C.sub.d may be defined by Numerical equation 3.
[ RF ] .ident. V 4 - V 2 d 3 [ Numerical equation 3 ]
##EQU00015##
[0086] In Numerical equation 3, [RF] is a third parameter
indicating the electric field E.sub.B' generated between the back
electrode BE in the substrate SU and the first cell electrode
C.sub.d due to the potential difference between the back electrode
BE and the first cell electrode C.sub.d. Furthermore, d3 indicates
a thickness of the substrate SU, V4 indicates a fourth potential,
and V2 indicates a second potential. The third parameter [RF],
which is a value obtained by dividing the potential difference
between the back electrode BE and the first cell electrode C.sub.d
by the thickness d3 of the substrate SU, may indicate the strength
of the electric field E.sub.B' in the substrate SU.
[0087] The strength of the fourth electric field E.sub.B of the
substrate SU, which is illustrated in FIG. 3, may be determined
from the third parameter [RF] indicating the strength of the
electric field E.sub.B' in the substrate SU. In an embodiment, the
strength of the fourth electric field E.sub.B may be defined by
Numerical equation 4, for example.
E B .apprxeq. [ RF ] .times. s 0 [ Numerical equation 4 ]
##EQU00016##
[0088] In Numerical equation 4, .di-elect cons..sub.S indicates a
dielectric constant of the substrate SU, and .di-elect cons..sub.0
indicates the dielectric constant of air.
[0089] To obtain a higher mask effect, the second parameter [CF]
may be relatively greater than the first parameter [SF].
Furthermore, approximate strength
[ RF ] .times. s 0 ##EQU00017##
of the fourth electric field E.sub.B derived from the third
parameter [RF] may be relatively greater than the first parameter
[SF].
[0090] Considering the above, a fourth parameter [Cell Ratio]
indicating a ratio between the second parameter [CF] and the first
parameter [SF] may be defined by Numerical equation 5.
[CellRatio].ident.[CF]/[SF] [Numerical equation 5]
[0091] Furthermore, a fifth parameter [Rear Ratio] indicating a
ratio between the approximate strength
[ RF ] .times. s 0 ##EQU00018##
of the fourth electric field E.sub.B and the first parameter [SF]
may be defined by Numerical equation 6.
[ Rear Ratio ] .ident. [ RF ] s [ SF ] 0 [ Numerical equation 6 ]
##EQU00019##
[0092] A mask effect of a patterning process may be improved as the
fourth parameter [Cell Ratio] and the fifth parameter [Rear Ratio]
are greater. According to an embodiment, the voltage driving units
VS1, VS2, VS3, and VS4 may adjust the first to fourth potentials V1
to V4 to have the fourth parameter [Cell Ratio] and the fifth
parameter [Rear Ratio] satisfy Numerical inequation 7.
[Rear Ratio]>-4.75.times.[Cell Ratio]+38 [Numerical inequation
7]
[0093] Numerical inequation 7 may be the same as Numerical
inequation 8 by being represented by the first to third
parameters.
.delta. [ RF ] 0 [ SF ] - 4.75 .times. [ CF ] [ SF ] + 38 [
Numerical inequation 8 ] ##EQU00020##
[0094] If the first to third parameters satisfy Numerical
inequation 8, the droplets 5 of the patterning solution may be
selectively patterned on the first cell electrode C.sub.d as the
second electric field E2 is strongly generated as illustrated in
FIG. 2.
[0095] The voltage driving units VS1, VS2, VS3, and VS4 adjust the
first to fourth potentials V1 to V4, and thus, the first to third
parameters may satisfy Numerical inequation 8. When the first to
third parameters satisfy Numerical inequation 8, process quality
may be higher as the mask effect of the patterning process is
improved.
[0096] FIG. 4 is a schematic view of an electric field generated on
the substrate SU when the first to third parameters do not satisfy
Numerical inequation 8.
[0097] Referring to FIG. 4, the strength of the second electric
field E2 on the substrate SU may be reduced when the first to third
parameters do not satisfy Numerical inequation 8. As the strength
of the second electric field E2 is reduced, some of the droplets 5
of the patterning solution may be deposited on the second cell
electrode C.sub.n. Quality of the patterning process may be
lowered.
[0098] FIGS. 1 to 3 illustrate that the first cell electrode
C.sub.d is arranged in an odd-numbered row, and the second cell
electrode C.sub.n is arranged in an even-numbered row, but an
embodiment is not limited thereto.
[0099] FIG. 5 is a view of a variation of the embodiment
illustrated in FIG. 1.
[0100] In an embodiment of FIG. 5, like reference numerals in FIGS.
1 to 4 denote like elements, and repeated descriptions thereof will
be omitted. Referring to FIG. 5, the first cell electrode C.sub.d
may be arranged in a 3n+1 (n=0, 1, 2 . . . ) row, and the second
cell electrode C.sub.n may be arranged in a 3n, 3n+2 (n=0, 1, 2 . .
. ) row. However, the embodiment of FIG. 5 is an only example, and
thus, a ratio of an arrangement order and the number of the
arrangement of the first and second cell electrodes C.sub.d and
C.sub.n may vary.
[0101] FIGS. 1 to 5 illustrate examples of the first and second
cell electrodes C.sub.d and C.sub.n disposed on the upper surface
of the substrate SU. However, an embodiment is not limited
thereto.
[0102] FIG. 6 is a view of a variation of the substrate SU
illustrated in FIGS. 1 to 5.
[0103] Referring to FIG. 6, the first and second cell electrodes
C.sub.d and C.sub.n may be disposed under the upper surface of the
substrate SU. Therefore, the surface of the substrate SU may be
flat. As another example, the first and second cell electrodes
C.sub.d and C.sub.n may be provided in a groove defined in the
surface of the substrate SU.
[0104] FIG. 7 is a view illustrating another example of the spray
nozzle No illustrated in FIGS. 1 to 5.
[0105] Referring to FIG. 7, the spray nozzle No may have a needle
shape with a sharp end. Furthermore, the first voltage driving unit
VS1 may apply the first potential V1 to the needle-shaped spray
nozzle No. When the spray nozzle No is needle-shaped, a size of the
droplet 5 sprayed from the spray nozzle No may be smaller due to an
electrospraying phenomenon.
[0106] The substrate patterning device may further include a ring
electrode RE between the spray nozzle No and the substrate SU. The
ring electrode RE may be ring-shaped. FIG. 7 illustrates that the
ring electrode RE has a circular ring-shape, but an embodiment is
not limited thereto. In other embodiments, the ring electrode RE
may be square ring-shaped or oval ring-shaped, for example.
[0107] The voltage driving unit may further include a fifth voltage
driving unit VS1-1 applying a fifth potential V1-1 to the ring
electrode RE. The fifth potential V1-1 applied by the fifth voltage
driving unit VS1-1 may have a potential value with the same
polarity as that of the first potential V1. Therefore, the ring
electrode RE may prevent the ring electrode RE from being deposited
by a patterning solution with Coulomb force.
[0108] Furthermore, the fifth potential V1-1 may be different from
the first potential V1. The plurality of droplets 5, which are
sprayed from the spray nozzle No by the potential difference
between the ring electrode RE and the spray nozzle No, may be
leaded to pass through the ring electrode RE. The ring electrode RE
may uniformly and widely spray the droplets 5.
[0109] FIG. 8 is a view of a patterning process using the substrate
patterning device including spray nozzles No1, No2, and No3 and
ring electrodes RE1, RE2, and RE3 illustrated in FIG. 7.
[0110] In an embodiment of FIG. 8, like reference numerals in FIGS.
1 to 5 denote like elements, and repeated descriptions thereof will
be omitted. Furthermore, FIG. 8 illustrates that the spray nozzles
No1, No2, and No3 and the ring electrodes RE1, RE2, and RE3 are
plural, but an embodiment is not limited thereto. In an embodiment,
the number of each of spray nozzles and ring electrodes may be less
or greater than those illustrated in FIG. 8, for example.
[0111] Referring to FIG. 8, an electric field may be generated
between the ring electrodes RE1, RE2, and RE3 and the first cell
electrodes C.sub.d due to a potential difference between the ring
electrodes RE1, RE2, and RE3 and the first cell electrodes C.sub.d.
Furthermore, droplets of the patterning solution may be leaded to
the first cell electrodes C.sub.d by the electric field between the
ring electrodes RE1, RE2, and RE3 and the first cell electrodes
C.sub.d.
[0112] In other words, the first electric field E1 illustrated in
FIG. 2 may depend on the electric field between the ring electrodes
RE1, RE2, and RE3 and the first cell electrodes C.sub.d. Therefore,
the embodiment illustrated in FIG. 8 is desired to separately
define the first parameter [SF] when applying Numerical inequations
7 and 8. In an embodiment, the first parameter [SF] may be defined
by Numerical equation 9, for example.
[ SF ] .ident. V 5 - V 2 h 1 [ Numerical equation 9 ]
##EQU00021##
[0113] In Numerical equation 9, V5 indicates a fifth potential
applied to the ring electrode RE, and V2 indicates a second
potential applied to the first cell electrode C.sub.d. Furthermore,
h1 indicates a distance between the first cell electrode C.sub.d
and the ring electrode RE. The first parameter [SF], which is a
value obtained by dividing the potential difference between the
first cell electrode C.sub.d and the ring electrode RE by the
distance h1 between the first cell electrode C.sub.d and the ring
electrode RE, may indicate strength of the first electric field E1
generated between the first cell electrode C.sub.d and the ring
electrode RE.
[0114] As illustrated in FIG. 8, when the ring electrode RE is
provided when Numerical inequations 7 and 8 are applied, the first
parameter [SF] may be defined by Numerical equation 9.
[0115] FIG. 9 is a schematic view of patterning the substrate SU
using the substrate patterning device according to another
embodiment.
[0116] Referring to FIG. 9, the substrate patterning device may
further include an intermediate electrode layer GE between the
spray nozzles No1, No2 and No3 and the substrate SU. A plurality of
through holes gh may be defined in the intermediate electrode layer
GE. Droplets sprayed from the spray nozzle No may progress to the
substrate SU after passing through the through holes gh.
[0117] The voltage driving unit may include a fifth voltage driving
unit VS5 applying a fifth potential V5 to the intermediate
electrode layer GE. Polarity of the fifth potential V5 applied by
the fifth voltage driving unit VS5 may be the same as that of the
first potential V1 applied to the spray nozzle No. Therefore, the
droplets of the patterning solution may be prevented from being
deposited on the intermediate electrode layer GE.
[0118] The fifth potential V5 applied to the intermediate electrode
layer GE may be different from the first potential V1. Furthermore,
the droplets of the patterning solution, which are sprayed from the
spray nozzle No by the potential difference between the spray
nozzle No and the intermediate electrode layer GE, may progress to
the intermediate electrode layer GE. A size of each of the droplets
may be reduced when the droplet of the patterning solution passes
through a through hole gh defined in the intermediate electrode
layer GE.
[0119] An electric field may be generated between the intermediate
electrode layer GE and the first cell electrode C.sub.d due to a
potential difference therebetween. Furthermore, the droplets of the
patterning solution may be leaded to the first cell electrodes
C.sub.d by the electric field between the intermediate electrode
layer GE and the first cell electrode C.sub.d.
[0120] In other words, the first electric field E1 illustrated in
FIG. 2 may depend on the electric field between the intermediate
electrode layer GE and the first cell electrode C.sub.d in the
embodiment illustrated in FIG. 9. Therefore, the embodiment
illustrated in FIG. 9 is desired to separately define the first
parameter [SF] when applying Numerical inequations 7 and 8. In an
embodiment, the first parameter [SF] may be defined by Numerical
equation 10, for example.
[ SF ] .ident. V 5 - V 2 h 4 [ Numerical equation 10 ]
##EQU00022##
[0121] In Numerical equation 10, V5 indicates a fifth potential
applied to the intermediate electrode layer GE, and V2 indicates a
second potential applied to the first cell electrode C.sub.d.
Furthermore, h4 indicates a distance between the first cell
electrode C.sub.d and the intermediate electrode layer GE. The
first parameter [SF], which is a value obtained by dividing the
potential difference between the first cell electrode C.sub.d and
the intermediate electrode layer GE by the distance h4 between the
first cell electrode C.sub.d and the intermediate electrode layer
GE, may indicate strength of the first electric field E1 generated
between the first cell electrode C.sub.d and the intermediate
electrode layer GE.
[0122] As illustrated in FIG. 9, when the ring electrode RE is
provided when Numerical inequations 7 and 8 are applied, the first
parameter [SF] may be defined by Numerical equation 10.
[0123] FIG. 10 is a schematic view of patterning a substrate using
a substrate patterning device according to another embodiment.
[0124] Referring to FIG. 10, the substrate patterning device may
include the intermediate electrode layer GE between the spray
nozzles No1, No2 and No3 and the substrate SU, and the ring
electrodes RE1, RE2, and RE3 between the intermediate electrode
layer GE and the spray nozzles No1, No2 and No3. In the embodiment
illustrated in FIG. 10, the first parameter [SF] may be defined by
Numerical equation 10.
[0125] FIGS. 11 and 12 are exemplary perspective views of the
intermediate electrode layer GE illustrated in FIGS. 9 and 10.
[0126] Referring to FIG. 11, the intermediate electrode layer GE
may be a punched metal that is a metal plate in which a plurality
of through holes gh is defined. Furthermore, referring to FIG. 12,
a plurality of through holes gh having a grid pattern may be
defined in the intermediate electrode layer GE. A shape of each of
the intermediate electrode layers GE in FIGS. 11 and 12 is only an
example, and an embodiment is not limited thereto. In other
embodiments, shapes of the through holes gh in the intermediate
electrode layer GE and arrangement of the through holes gh may
vary, for example.
[0127] FIG. 13 is a graph illustrating a result of a patterning
process according to a change in the parameters described
above.
[0128] In FIG. 13, a horizontal axis indicates a value of the
fourth parameter [Cell Ratio] defined in Numerical equation 5, and
a vertical axis indicates a value of the fifth parameter [Rear
Ratio] defined in Numerical equation 6. Furthermore, dots in the
graph of FIG. 13 indicate the fourth and fifth parameter values in
a condition which enables the patterning process. A dot P indicates
that the patterning process is performed in a condition where [Cell
Ratio] has a value of about 5, and [Rear Ratio] has a value of
about 34, for example. In FIG. 13, ` ` indicates a case having the
mask effect superior than a prescribed reference during the
patterning process. Furthermore, `x` indicates a case having the
mask effect lower than a prescribed reference during the patterning
process.
[0129] Referring to FIG. 13, as [Cell Ratio] and [Rear Ratio] are
greater, the mask effect may be improved during the patterning
process. In an embodiment, the mask effect of the patterning
process may be remarkable in an area where [Cell Ratio] and [Rear
Ratio] satisfy Numerical inequation 7 (refer to line L1 in FIG.
13), but the mask effect of the patterning process may be below a
reference level in an area where [Cell Ratio] and [Rear Ratio] do
not satisfy Numerical inequation 7, for example.
[0130] The devices and methods of patterning a substrate according
to the embodiments are described above with reference to FIGS. 1
through 13. According to the embodiments described above, the mask
effect of the patterning process may be improved by adjusting a
plurality of cell electrodes disposed on the first surface S1 of
the substrate SU, and the potentials V1 to V4 applied to the spray
nozzle No and the second surface S2 of the substrate SU, using
voltage driving units.
[0131] Hereinafter, a method of manufacturing an organic
light-emitting device using the method of patterning a substrate
will be described.
[0132] FIG. 14 is a schematic plan view of an organic
light-emitting device 100.
[0133] Referring to FIG. 14, the organic light-emitting device 100
may include at least one of pixels 111 in a surface thereof. Each
of the pixels 111 may include a plurality of sub-pixels 111r, 111g,
and 111b. The sub-pixels 111r, 111g, and 111b may include organic
layers that are different from one another. In an embodiment, the
pixel 111 may include first to third sub-pixels 111r, 111g, and
111b, for example. The first sub-pixel 111r may include an organic
layer emitting red R, the second sub-pixel 111g may include an
organic layer emitting green G, and the third sub-pixel 111b may
include an organic layer emitting blue B. However, the number of
sub-pixels and colors emitted by the sub-pixels are not limited
thereto and may vary. In an embodiment, the first to third
sub-pixels 111r, 111g, and 111b may emit yellow Y, magenta M, and
cyan C, respectively, for example. Furthermore, the pixel 111 may
include sub pixels that are more than or less than three. In an
embodiment, the pixel 111 may include six sub-pixels, for example.
The sub-pixels may include organic layers emitting R, G, B, Y, M,
and C, respectively.
[0134] FIG. 15 is a cross-sectional view taken along a line I-I' of
FIG. 14.
[0135] Referring to FIG. 15, the organic light-emitting device 100
may include the substrate SU, and lower electrodes 115r, 115g, and
115b on the substrate SU. The lower electrodes 115r, 115g, and 115b
may be provided in the sub-pixels 111r, 111g, and 111b,
respectively. In an embodiment, the first sub-pixel 111r may
include the first lower electrode 115r, the second sub-pixel 111g
may include the second lower electrode 115g, and the third
sub-pixel 111b may include the third lower electrode 115b, for
example. However, it is only an example, and an embodiment is not
limited thereto. In another embodiment, the lower electrodes 115r,
115g, and 115b may be realized as common electrodes corresponding
to the sub-pixels 111r, 111g, and 111b, for example.
[0136] The organic light-emitting device 100, which is provided on
the substrate SU, may include a pixel-defining layer 120
surrounding the lower electrodes 115r, 115g, and 115b. The
pixel-defining layer 120 may define a sub-pixel area provided later
below by forming an opening in an area including the sub-pixels
111r, 111g, and 111b. Spaces in which the organic layers 130r,
130g, and 130b are stacked may be provided by forming slopes on the
lower electrodes 115r, 115g, and 115b by the pixel-defining layer
120. Although FIG. 15 illustrates the pixel-defining layer 120, the
organic light-emitting device 100 manufactured according to an
embodiment may not include the pixel-defining layer 120. In other
words, the organic layers 130r, 130g, and 130b may be stacked on
the lower electrodes 115r, 115g, and 115b without the slopes of the
pixel-defining layer 120. The sub-pixel area provided later below
may be defined as areas of the organic layers 130r, 130g, and 130b
stacked on the lower electrodes 115r, 115g, and 115b.
[0137] The organic light-emitting device 100 may include the
organic layers 130r, 130g, and 130b stacked on the lower electrodes
115r, 115g, and 115b, and an upper electrode 117 disposed on the
organic layers 130r, 130g, and 130b. The organic layers 130r, 130g,
and 130b may be provided in the sub-pixels 111r, 111g, and 111b,
respectively. In an embodiment, each of the organic layers 130r,
130g, and 130b may be a first organic layer 130r deposited on the
first sub-pixel 111r, a second organic layer 130g deposited on the
second sub-pixel 111g, and a third organic layer 130b deposited on
the third sub-pixel 111b, for example. The first organic layer 130r
may include a first emission layer emitting a first color.
Similarly, the second organic layer 130g may include a second
emission layer emitting a second color, and the third organic layer
130b may include a third emission layer emitting a third color. The
first emission layer may include an organic material emitting the
first color. Similarly, the second and third emission layers may
include organic materials emitting the second and third colors,
respectively. Therefore, when a proper potential is applied to the
upper electrode 117 and the lower electrodes 115r, 115g, and 115b,
the first to third sub-pixels 111r, 111g, and 111b may emit the
first to third colors, respectively.
[0138] FIG. 16 is a schematic view of providing the sub-pixel areas
SP1, SP2, and SP3 on the substrate SU.
[0139] Referring to FIG. 16, the substrate SU may include the lower
electrodes 115r, 115g, and 115b in locations corresponding to the
sub-pixels 111r, 111g, and 111b. Furthermore, the pixel-defining
layer 120 may be disposed on the substrate SU. Openings exposing
the lower electrodes 115r, 115g, and 115b may be defined in the
pixel-defining film 120. The pixel-defining film 120 may define the
sub-pixel areas SP1, SP2, and SP3 by defining the openings in the
substrate SU. The sub-pixel areas SP1, SP2, and SP3 may include the
lower electrodes 115r, 115g, and 115b, respectively. The lower
electrodes 115r, 115g, and 115b may be provided in the sub-pixel
areas SP1, SP2, and SP3, respectively. In an embodiment, a first
sub-pixel area SP1 may include the first lower electrode 115r, a
second sub-pixel area SP2 may include the second lower electrode
115g, and a third sub-pixel area SP3 may include the third lower
electrode 115b, for example. The sub-pixel areas SP1, SP2, and SP3
may include the lower electrodes 115r, 115g, and 115b and areas of
the pixel-defining film 120 surrounding the lower electrodes 115r,
115g, and 115b, respectively.
[0140] The pixel-defining film 120 may be an insulating layer, but
is not limited thereto. In an embodiment, the pixel-defining film
120 may include an organic or inorganic material. In an embodiment,
the pixel-defining film 120 may include organic materials such as
polyimide, polyamide, benzocyclobutene, an acrylic resin, or a
phenolic resin, or inorganic materials such as SiNx, for example.
Furthermore, the pixel-defining layer 120 may have various
structures like a single-layer structure or a multilayer structure
having two or more layers.
[0141] Although FIG. 16 illustrates a space in which an organic
solution is stacked by the pixel-defining film 120, an embodiment
is not limited thereto. In an embodiment, the pixel-defining film
120 may not be provided when the sub-pixel areas SP1, SP2, and SP3
are provided, for example. The sub-pixel areas SP1, SP2, and SP3
may include the lower electrodes 115r, 115g, and 115b and an area
of an organic solution being deposited on the lower electrodes
115r, 115g, and 115b.
[0142] FIG. 17 is a schematic view of spraying droplets 5a of an
organic solution from the spray nozzle No of an organic-solution
spray device according to an embodiment.
[0143] Referring to FIG. 17, the method of manufacturing the
organic light-emitting device according to an embodiment may
include an operation of depositing the droplets 5a of a first
organic solution to the first sub-pixel area SP1 using the spray
nozzle No of the organic-solution spray device. Here, the first
potential V1 may be applied to the spray nozzle No. Furthermore,
the second potential V2 may be applied to the first sub-pixel area
SP1 and the third potential V3 may be applied to the second and
third sub-pixel areas SP2 and SP3. Furthermore, the fourth
potential V4 may be applied to the back electrode BE. The second
potential V2 may be different from each of the first potential V1,
the third potential V3, and the fourth potential V4.
[0144] FIG. 18 is a view of a resultant according to a deposition
process of the droplets 5a of the first organic solution
illustrated in FIG. 17.
[0145] Referring to FIG. 18, the droplets 5a of the first organic
solution may be selectively deposited on the first sub-pixel area
SP1. Accordingly, the first organic layer 130r may be provided in
the first sub-pixel area SP1. The first organic layer 130r may
include an organic material emitting a first color. Therefore, when
a prescribed potential is applied to the first organic layer 130r
through the upper electrode 117 and the first lower electrode 115r
illustrated in FIG. 15, the first organic layer 130r may emit the
first color.
[0146] FIG. 19 is a schematic view of selectively depositing
droplets 5b of a second organic solution including a light-emitting
material of a second color on the second sub-pixel area SP2.
[0147] Referring to FIG. 19, the method of manufacturing the
organic light-emitting device according to an embodiment may
include an operation of depositing the droplets 5b of the second
organic solution to the second sub-pixel area SP2 using the spray
nozzle No of the organic-solution spray device. Here, the first
potential V1 may be applied to the spray nozzle No. Furthermore,
the second potential V2 may be applied to the second sub-pixel area
SP2 and the third potential V3 may be applied to the first and
third sub-pixel areas SP1 and SP3. Furthermore, the fourth
potential V4 may be applied to the back electrode BE. The second
potential V2 may be different from each of the first potential V1,
the third potential V3, and the fourth potential V4. In an
embodiment, polarity of the second potential V2 may be different
from that of each of the first potential V1, the third potential
V3, and the fourth potential V4, for example.
[0148] FIG. 20 is a view of a resultant according to the deposition
process of the droplets 5b of the second organic solution
illustrated in FIG. 19.
[0149] Referring to FIG. 20, the droplets 5b of the second organic
solution may be selectively deposited on the second sub-pixel area
SP2. Accordingly, the second organic layer 130g may be provided in
the second sub-pixel area SP2. The second organic layer 130g may
include an organic material emitting a second color. Therefore,
when a prescribed potential is applied to the second organic layer
130g through the upper electrode 117 and the second lower electrode
115g illustrated in FIG. 15, the second organic layer 130g may emit
the second color.
[0150] FIG. 21 is a schematic view of selectively depositing
droplets 5c of a third organic solution including a light-emitting
material of a third color on the third sub-pixel area SP3.
[0151] Referring to FIG. 21, the method of manufacturing the
organic light-emitting device according to an embodiment may
include an operation of depositing the droplets 5c of the third
organic solution to the third sub-pixel area SP3 using the spray
nozzle No of the organic-solution spray device. Here, the first
potential V1 may be applied to the spray nozzle No. Furthermore,
the third potential V3 may be applied to the third sub-pixel area
SP3 and the third potential V3 may be applied to the first and
second sub-pixel areas SP1 and SP2. Furthermore, the fourth
potential V4 may be applied to the back electrode BE. Polarity of
the second potential V2 may be different from that of each of the
first potential V1, the third potential V3, and the fourth
potential V4.
[0152] FIG. 22 is a view of a resultant according to the deposition
process of the droplets 5c of the third organic solution
illustrated in FIG. 21.
[0153] Referring to FIG. 22, the droplets 5c of the third organic
solution may be selectively deposited on the third sub-pixel area
SP3. Accordingly, the third organic layer 130b may be provided in
the third sub-pixel area SP3. The third organic layer 130b may
include an organic material emitting a third color. Therefore, when
a prescribed potential is applied to the third organic layer 130b
through the upper electrode 117 and the third lower electrode 115b
illustrated in FIG. 15, the third organic layer 130b may emit the
third color.
[0154] FIGS. 23 to 25 are schematic views of examples generating a
mask effect during a patterning process by adjusting the first to
fourth potentials V1 to V4.
[0155] FIG. 26 is a view of an example of a mask effect generated
during a patterning process, in which a value of the mask effect is
less than a reference value.
[0156] Equipotential lines illustrated in FIGS. 23 to 26 are
two-dimensionally calculated by Laplace's equation using a finite
elements method ("FEM"). Furthermore, electric lines of force
illustrated in FIGS. 23 to 27 are derived from the equipotential
lines.
[0157] In FIGS. 23 to 27, the substrate SU may use a glass at a
thickness of 500 micrometers (.mu.m). A dielectric constant
.di-elect cons..sub.S of the substrate SU may be approximately 5.4
times greater than the dielectric constant .di-elect cons..sub.0 of
air.
[0158] In FIG. 23, a distance between the first cell electrode
C.sub.d and a second cell electrode C.sub.n is 1 millimeter (mm).
Furthermore, the second potential V2 applied to the first cell
electrode C.sub.d is -500 volts (V), and the third potential V3
applied to the second cell electrode C.sub.n is 2800 V. Therefore,
the second parameter [CF]=[2.8 kilovolts (kV)-(-0.5 kV)]/(1 mm)=33
kilovolts per centimeter (kV/cm) from Numerical equation 1.
[0159] Furthermore, a distance between the first cell electrode
C.sub.d and the spray nozzle No is 60 mm, and the first potential
V1 applied to the spray nozzle No is 2.8 kV. Therefore, first
parameter [SF]=[2.8 kV-(-0.5 kV)]/(60 mm)=0.55 kV/cm from Numerical
equation 1.
[0160] Furthermore, a thickness of the substrate SU is 0.5 mm, and
the fourth potential V4 applied to a rear surface of the substrate
SU is 0 V. Therefore, the third parameter [RF]=[0 V-(-0.5 kV)]/(0.5
mm)=10 kV/cm from Numerical equation 3.
[0161] When the values of the first to third parameters are
substituted into Numerical inequation 8, an inequality of Numerical
inequation 8 may be satisfied as a left side value of the
inequality is approximately 98 and a right side value of the
inequality is approximately -247. Therefore, in the embodiment
illustrated in FIG. 23, a patterning solution may be selectively
deposited on the first cell electrode C.sub.d as a mask effect is
stronger due to an electric field.
[0162] FIG. 24 sets [SF] as 1 kV/cm. Furthermore, the second
potential V2 applied to the first cell electrode C.sub.d is -30 V,
and the third potential V3 applied to the second cell electrode
C.sub.n is +30 V. Moreover, a distance between the first cell
electrode C.sub.d and the second cell electrode C.sub.n is 30
.mu.m, the fourth potential V4 applied to the rear surface of the
substrate SU is 0 V, and a thickness of the substrate SU is 0.5
mm.
[0163] Here, [RF]=[0 V-(-0.03 kV)]/(0.5 mm)=0.6 kV/cm.
[0164] Furthermore, [CF]=[30 V-(-30 V)]/(30 .mu.m)=20 kV/cm.
[0165] When the values of the first to third parameters are
substituted into Numerical inequation 8, an inequality of Numerical
inequation 8 may be satisfied as a left side value of the
inequality is approximately 3.24 and a right side value of the
inequality is approximately -57. Therefore, in the embodiment
illustrated in FIG. 24, a patterning solution may be selectively
deposited on the first cell electrode C.sub.d as a mask effect is
stronger due to an electric field.
[0166] FIG. 25 sets [SF] as 0.38 kV/cm. Furthermore, the second
potential V2 applied to the first cell electrode C.sub.d is -10 V,
and the third potential V3 applied to the second cell electrode
C.sub.n is +10 V. Moreover, a distance between the first cell
electrode C.sub.d and the second cell electrode C.sub.n is 80
.mu.m, the fourth potential V4 applied to the rear surface of the
substrate SU is 28 V, and a thickness of the substrate SU is 0.5
mm.
[0167] Here, [RF]=[28 V-(-10 V)]/(0.5 mm)=0.76 kV/cm.
[0168] Furthermore, [CF]=[10 V-(-10 V)]/(30 .mu.m)=6.7 kV/cm.
[0169] When the values of the first to third parameters are
substituted into Numerical inequation 8, an inequality of Numerical
inequation 8 may be satisfied as a left side value of the
inequality is approximately 10.8 and a right side value of the
inequality is approximately -45.3. Therefore, in the embodiment
illustrated in FIG. 25, a patterning solution may be selectively
deposited on the first cell electrode C.sub.d as a mask effect is
stronger due to an electric field.
[0170] FIG. 26 sets [SF] as 1 kV/cm. Furthermore, the second
potential V2 applied to the first cell electrode C.sub.d is -10 V,
and the third potential V3 applied to the second cell electrode
C.sub.n is +10 V. Moreover, a distance between the first cell
electrode C.sub.d and the second cell electrode C.sub.n is 30
.mu.m, the fourth potential V4 applied to the rear surface of the
substrate SU is 0 V, and a thickness of the substrate SU is 0.5
mm.
[0171] Here, [RF]=[0 V-(-10 V)]/(0.5 mm)=0.2 kV/cm.
[0172] Furthermore, [CF]=[10 V-(-10 V)]/(30 .mu.m)=6.7 kV/cm.
[0173] When the values of the first to third parameters are
substituted into Numerical inequation 8, an inequality of Numerical
inequation 8 may not be satisfied as a left side value of the
inequality is approximately 1.08 and a right side value of the
inequality is approximately 6.33. Accordingly, a mask effect due to
an electric field may be reduced, and a patterning solution may be
deposited not only on the first cell electrode C.sub.d but also on
the second cell electrode C.sub.n.
[0174] FIG. 27 is a view illustrating a result of selectively
patterning a green patterning solution and a red patterning
solution in a state of adjusting first to fourth potentials V1 to
V4 to satisfy Numerical inequations 7 and 8.
[0175] When spraying a green patterning solution, the second
potential V2 may be applied to a green light-emitting cell Gcell,
and the third potential V3 may be applied to a red light-emitting
cell Rcell. Whereas, when spraying a red patterning solution, the
third potential V3 may be applied to the green light-emitting cell
Gcell, and the second potential V2 may be applied to the red
light-emitting cell Rcell.
[0176] Referring to FIG. 27, the red patterning solution may be
selectively deposited on the red light-emitting cells Rcell in an
odd-numbered low only. Furthermore, the green patterning solution
may be selectively deposited on the green light-emitting cells
Gcell in an even-numbered low only. In an embodiment, a mask effect
of a patterning process may be improved by applying first to fourth
potentials to a spray nozzle, a first cell electrode on which a
solution is deposited, a second cell electrode on which a solution
is not deposited, and the rear surface of a substrate, and by
appropriately adjusting values of the first to fourth potentials,
for example.
[0177] It should be understood that embodiments described herein
should be considered in a descriptive sense only and not for
purposes of limitation. Descriptions of features or embodiments
within each embodiment should typically be considered as available
for other similar features or embodiments in other embodiments.
[0178] While one or more embodiments have been described with
reference to the figures, it will be understood by those of
ordinary skill in the art that various changes in form and details
may be made therein without departing from the spirit and scope as
defined by the following claims.
* * * * *