U.S. patent application number 15/536501 was filed with the patent office on 2017-11-16 for door for closing a chamber opening in a chamber wall of a vacuum chamber.
This patent application is currently assigned to VAT Holding AG. The applicant listed for this patent is VAT Holding AG. Invention is credited to Thomas Blecha.
Application Number | 20170328125 15/536501 |
Document ID | / |
Family ID | 54780336 |
Filed Date | 2017-11-16 |
United States Patent
Application |
20170328125 |
Kind Code |
A1 |
Blecha; Thomas |
November 16, 2017 |
DOOR FOR CLOSING A CHAMBER OPENING IN A CHAMBER WALL OF A VACUUM
CHAMBER
Abstract
A door for closing a chamber opening (4) in a chamber wall of a
vacuum chamber (3) in relation to a surrounding space, in which the
vacuum chamber is located, includes a door housing arranged in a
surrounding space, a closing member (5) arranged in the surrounding
space, and a rod (10), to which the closing member (5) is
connected, wherein a first movement of the rod (10), through which
the closing member (5) is displaced from an open position into an
intermediate position, occurring in the form of a displacement of
the rod (10) in the direction of the longitudinal axis thereof,
wherein a second movement of the rod (10) subsequent thereto occurs
in the form of a displacement of the rod (10) in a direction at an
angle to the longitudinal axis thereof and/or in the form of a
pivoting of the rod (10) about a pivot axis which is perpendicular
to the longitudinal axis thereof, wherein the closing member is
displaced from the intermediate position into a closed position via
said second movement of the rod. The rod (10) is mounted in a
moveable manner via the bearing elements, via the first movement
thereof and via the second movement thereof in relation to the door
housing, wherein the bearing elements are arranged in an inner
space (30) of the door housing, which inner space is sealed with
respect to the surrounding space or is connected to the surrounding
space via a passage (41) extending through a housing wall (40) of
the door housing, in which passage a particle filter is arranged.
The rod (10) is guided out of the inner space (30) of the door
housing into the surrounding space in a sealed manner.
Inventors: |
Blecha; Thomas; (Feldkirch,
AT) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
VAT Holding AG |
Haag |
|
CH |
|
|
Assignee: |
VAT Holding AG
Haag
CH
|
Family ID: |
54780336 |
Appl. No.: |
15/536501 |
Filed: |
December 4, 2015 |
PCT Filed: |
December 4, 2015 |
PCT NO: |
PCT/EP2015/078616 |
371 Date: |
June 15, 2017 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
E05D 15/58 20130101;
F16K 3/18 20130101; E05Y 2900/132 20130101; E06B 7/22 20130101;
E06B 7/28 20130101; E05F 15/50 20150115; E05D 15/0604 20130101;
F16K 51/02 20130101; E06B 5/10 20130101; H01L 21/67126
20130101 |
International
Class: |
E06B 5/10 20060101
E06B005/10; E06B 7/28 20060101 E06B007/28; E05F 15/50 20060101
E05F015/50; E05D 15/58 20060101 E05D015/58; E05D 15/06 20060101
E05D015/06; E06B 7/22 20060101 E06B007/22 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 19, 2014 |
AT |
A 920/2014 |
Claims
1. A door for closing a chamber opening in a chamber wall of a
vacuum chamber in relation to a surrounding space, in which the
vacuum chamber is located, comprising a door housing arranged in
the surrounding space, a closure member which is arranged in the
surrounding space and is adjustable over an adjustment path from an
open position for opening up the chamber opening into a closed
position for closing the chamber opening, and a rod which has a
longitudinal axis and to which the closure member is connected,
wherein the closure member is adjusted over the adjustment path by
a first movement of the rod and a subsequent second movement of the
rod, and the first movement of the rod, by which the closure member
is adjusted from the open position into an intermediate position,
is a displacement of the rod in a direction of the longitudinal
axis, and the subsequent second movement of the rod, by which the
closure member is adjusted from the intermediate position into the
closed position, is at least one of a displacement of the rod in a
direction at an angle to the longitudinal axis or a pivoting of the
rod about a pivot axis which is at a right angle to the
longitudinal axis, the rod is mounted movably over the first
movement and over the second movement in relation to the door
housing by bearing elements, said bearing elements, by which the
rod is mounted movably over the first movement and over the second
movement in relation to the door housing, are arranged in an
interior space of the door housing, said interior space is sealed
in relation to the surrounding space or is connected to the
surrounding space via a passage which passes through a housing wall
of the door housing and in which a particle filter is arranged, and
the rod is guided out of the interior space of the door housing
into the surrounding space in a sealed manner.
2. The door as claimed in claim 1, wherein at least one pneumatic
piston-cylinder unit which has a piston with a piston rod attached
thereto is completely arranged in the interior space of the door
housing.
3. The door as claimed in claim 2, wherein there are at least two
of the pneumatic piston-cylinder units and both the first movement
of the rod and the second movement of the rod are drivable by the
pneumatic piston-cylinder units which have pistons and piston rods
attached to the pistons, and all of the piston-cylinder units
moving the rod are completely arranged in the interior space of the
door housing.
4. The door as claimed in claim 1, wherein the interior space of
the door housing, in which the bearing elements are arranged, is
completely closed, and an expansion vessel with an inner expansion
space, a volume of which is changeable, is arranged in the interior
space of the door housing.
5. The door as claimed in claim 1, wherein, arranged in the
surrounding space, in which the door housing is located, is an
expansion vessel with an inner expansion space, a volume of which
is changeable and which is connected to the interior space of the
door housing via a passage passing through the housing wall of the
door housing.
6. The door as claimed in claim 1, wherein the interior space of
the door housing is evacuated via a passage passing through the
housing wall of the door housing.
7. The door as claimed in claim 1, wherein the interior space of
the door housing is connected via a passage passing through the
housing wall of the door housing to an exterior space which is
separate from the surrounding space in which the door housing is
arranged.
8. The door as claimed in claim 1, wherein a circumferentially
closed seal is arranged on the closure member, said seal, in the
closed position of the closure member, is pressed against a sealing
face surrounding the chamber opening, or a circumferentially closed
sealing face is arranged on the closure member, said sealing face,
in the closed position of the closure member, is pressed against a
seal which is arranged on the chamber wall and surrounds the
chamber opening.
9. The door as claimed in claim 1, further comprising bellows, and
the rod is led out of the interior space of the door housing in a
manner sealed by the bellows.
10. The door as claimed in claim 1, wherein, in a region in which
the door housing is fastenable to the chamber wall via fastening
screws, the door housing has elevations for abutment against the
chamber wall and, in a region located by contrast further away from
the fastening screws, is of recessed design in relation to the
elevations in order to form a gap between the door housing and the
chamber wall.
Description
BACKGROUND
[0001] The invention relates to a door for closing a chamber
opening in a chamber wall of a vacuum chamber in relation to a
surrounding space, in which the vacuum chamber is located,
comprising a door housing arranged in the surrounding space, a
closure member which is arranged in the surrounding space and is
adjustable over an adjustment path from an open position for
opening up the chamber opening into a closed position for closing
the chamber opening, and a rod which has a longitudinal axis and to
which the closure member is connected, wherein the closure member
is adjusted over the adjustment path by a first movement of the rod
and a subsequent second movement of the rod, and the first movement
of the rod, by which the closure member is adjusted from the open
position into an intermediate position, is a displacement of the
rod in the direction of its longitudinal axis, and the subsequent
second movement of the rod, by which the closure member is adjusted
from the intermediate position into the closed position, is a
displacement of the rod in a direction at an angle to its
longitudinal axis and/or a pivoting of the rod about a pivot axis
which is at a right angle to its longitudinal axis.
[0002] Doors of vacuum chambers serve, in the closed state of the
door, to seal a chamber opening in the chamber wall of a vacuum
chamber in relation to the surrounding atmosphere in order to
maintain a vacuum in the vacuum chamber. In the open state of the
door, it is possible, for example, for substrates to be processed
to be introduced into the vacuum chamber through the opening.
[0003] In the case of important regions of use, in which processes
are carried out under vacuum conditions, for example in
semiconductor technology or coating technology, for example for
producing screens, clean room conditions have to prevail in the
space surrounding the vacuum chamber. The substrates to be
processed are thereby protected against accumulations of harmful
dirt particles.
[0004] Particles which are formed during the operation of the door
and are released into the surroundings may be a problem here. Of a
particularly critical nature is the release of particles here
specifically in the region through which the substrates are
introduced into the vacuum chamber.
[0005] Vacuum doors of the type mentioned at the beginning with a
substantially L-shaped adjustment path of the closure member during
the closing of the door are known from DE 19 633 798 A1, WO
2011/091455 A1 and U.S. Pat. No. 7,611,122 B2. The closing of the
door from its open position takes place here by the fact that the
rod to which the closure member is attached is initially displaced
axially (=first movement of the rod) and, as a result, pivoting of
the rod about a pivot axis which is at right angles to its
longitudinal axis takes place (=second movement of the rod). For
the first movement of the rod, the latter is mounted displaceably
in relation to a basic body of the door. For the second movement of
the rod, the basic body is pivotable about the pivot axis in
relation to the chamber wall of the vacuum chamber. For pivoting
the basic body about the longitudinal axis, piston-cylinder units
are provided in the document mentioned first, the pistons of which
are supported on the chamber wall on both sides of the pivot axis.
In the document mentioned second, tubular, inflatable elements are
arranged as actuators on both sides of the pivot axis. Simply
designed and cost-effective doors can be provided in this manner;
however, a large amount of particles are generated during the
operation.
[0006] U.S. Pat. No. 6,056,266 discloses a door in which the door
housing is attached rigidly to the chamber wall. A rod is
displaceable axially by a piston-cylinder unit. A support unit
which forms a cylinder space of a transverse piston-cylinder unit
is attached to the rod. The closure member is attached to the
piston rod of said transverse piston-cylinder unit. Overall, an
L-shaped movement of the closure member is therefore again carried
out. By actuation of the piston-cylinder units, of which the
transverse piston-cylinder units also lie directly in front of the
chamber opening, a high particle loading also occurs in the case of
this door. A similar door is also known from U.S. Pat. No.
6,899,316 B2.
[0007] A door in which a reduced particle loading for substrates
introduced through the chamber opening of a sluice chamber is
intended to be achieved is revealed in U.S. Pat. No. 6,916,009 B2.
The closure member is moved from its open position via an L-shaped
adjustment path into its closed position in which it seals the
opening in the chamber wall. To adjust the closure member from its
open position into an intermediate position, first and second
longitudinal piston-cylinder units are provided which are each
attached to a housing part and displace rods to which the closure
member is connected. In order to adjust the closure member from its
intermediate position into the closed position, the housing parts
are adjusted in relation to the chamber wall of the sluice chamber
by transverse piston-cylinder units. The closure member is
connected to the rods via connecting pieces which are at right
angles to the rods and protrude through elongated holes in a cover
plate. A filtered airflow is guided past the cover plate. Although
an improvement in the particle loading in comparison to previously
known designs of doors is achieved by this design, this particle
loading may still be too high for sensitive uses.
[0008] L-shaped movements of closure members are known in different
ways in the case of valves which serve for providing a seal between
two vacuum chambers or a vacuum chamber and a pipe. The closure
members are in each case arranged here in the interior of a valve
housing and, in their closed position, seal a valve opening of the
valve housing. The interior space of the valve housing in which the
closure member is arranged constitutes a vacuum region here and, in
the open state of the vacuum valve, forms a passageway through the
vacuum valve. Examples of L valves, in which, during the closing of
the vacuum valve, first of all an axial displacement of the valve
rod takes place and, as a consequence, a displacement which is at
right angles thereto takes place, are found in US 2014/0131603 A1
and US 2011/0175011 A1. Vacuum valves with at least substantially
L-shaped movements of the closure member, in which, subsequent to
an axial displacement of the valve rod, tilting of the valve rod
about an axis which is at right angles to the longitudinal axis of
the valve rod takes place, are revealed, for example, in U.S. Pat.
No. 6,431,518 B1 and U.S. Pat. No. 6,237,892 B1.
SUMMARY
[0009] It is the object of the invention to provide an advantageous
door of the type mentioned at the beginning which is distinguished
by a very low production of released particles by the opening and
closing of the door. This is achieved by a door with one or more
features of the invention.
[0010] In the case of the door according to the invention, the rod
is mounted movably over its first movement and over its second
movement in relation to a door housing by means of bearing
elements. Said bearing elements are arranged in the interior space
of the door housing. The interior space of the door housing is
sealed here in relation to a surrounding space, in which the door
housing is located, or is connected to the surrounding space via a
passage which passes through a housing wall of the door housing and
in which a particle filter is arranged. The rod is guided in a
sealed manner out of the interior space of the door housing into
the surrounding space in which the closure member is located.
[0011] For the case in which the interior space of the door housing
is sealed in relation to the surrounding space in which the door
housing is located, it can be provided, in a possible embodiment,
that the interior space of the door housing is completely sealed,
and an expansion vessel with an inner expansion space, the volume
of which is changeable, is arranged in the interior space of the
door housing. In this connection, by a change in the volume of the
expansion space, changes in the volume of the free region of the
interior space of the door housing, which changes occur during the
adjustment of the closure member between the open position and the
closed position, can be compensated for, and therefore the internal
pressure in the interior space of the door housing does not change
too greatly, preferably by less than 20%, during the adjustment of
the closure member between the open position and the closed
position.
[0012] In another possible embodiment, the expansion vessel could
also be arranged in the surrounding space in which the door housing
is located, wherein the expansion space of the expansion vessel,
the volume of which is changeable, communicates with the interior
space of the door housing via a passage passing through a housing
wall of the door housing.
[0013] A further possible embodiment provides that the interior
space of the door housing is sealed in relation to the surrounding
space and is evacuated here via a passage passing through a housing
wall of the door housing. For the evacuation, use can be made of a
backup pump which is present in any case in a vacuum
installation.
[0014] According to a further design possibility, the interior
space of the door housing could also be connected via a passage
passing through a housing wall of the door housing to an exterior
space which is separate from the surrounding space in which the
door housing is located. The exterior space therefore
advantageously lies outside the clean room in which the vacuum
chamber, to which the door is attached, is located. Also as a
result, the interior space of the door housing can be sealed in
relation to the surrounding space (which is formed by the clean
room) surrounding the door housing.
[0015] An advantageous embodiment of a door according to the
invention provides that at least one pneumatic piston-cylinder unit
together with a piston rod of the piston-cylinder unit, the piston
rod projecting out of the cylinder, is completely arranged in the
interior space of the door housing, i.e. the piston rod is located
over its entire length in the interior of the door housing and is
not guided out of said door housing by an opening thereof, for
example. This at least one pneumatic piston-cylinder unit serves
here for moving the rod, to which the closure member is connected,
in order to move the closure member at least over a portion of its
adjustment path. All of the pneumatic piston-cylinder units which
serve for moving the closure member over the adjustment path are
preferably arranged together with their piston rods completely in
the interior space of the door housing.
[0016] For the sealed guiding of the rod out of the interior space
of the door housing into the surrounding space, a bellows,
preferably an expansion bellows, in particular in the form of a
diaphragm bellows, or a corrugated bellows, is preferably
provided.
[0017] By use of the invention, a door having very low particle
production can be provided, the door meeting even very stringent
requirements of clean room conditions. A door according to the
invention can also be formed here in a relatively simple
manner.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Further advantages and features of the invention are
explained below with reference to the attached drawing, in
which:
[0019] FIG. 1 shows a perspective view of a door which is attached
to a chamber wall of a vacuum chamber and is in the open state,
according to a first exemplary embodiment of the invention;
[0020] FIG. 2 shows a perspective view of the door attached to the
chamber wall, from a viewing angle which is changed in relation to
FIG. 1;
[0021] FIG. 3 shows a view of the door attached to the chamber
wall;
[0022] FIGS. 4 and 5 show sections along the lines AA and BB of
FIG. 3;
[0023] FIG. 6 shows a view analogously to FIG. 3, but in an
intermediate position of the closure member;
[0024] FIGS. 7 and 8 show sections along the line of CC and DD of
FIG. 6;
[0025] FIG. 9 shows a view analogously to FIG. 3, but in the closed
state of the door;
[0026] FIGS. 10, 11 and 12 show sections along the lines EE, FF and
GG;
[0027] FIGS. 13 and 14 show exploded illustrations of the door from
various viewing directions;
[0028] FIGS. 15A and 15B show perspective views of a housing part
of the door housing from various viewing directions;
[0029] FIG. 16 shows a view of a door attached to a chamber wall,
according to a second exemplary embodiment of the invention;
[0030] FIGS. 17 to 22 show sections along the lines HH, II, JJ, KK,
LL and MM from FIG. 16;
[0031] FIGS. 23 to 26 show sections analogously to FIGS. 19 to 22,
but in the intermediate position of the closure member;
[0032] FIGS. 27 to 30 show sections analogously to FIGS. 19 to 22,
but in the closed state of the door;
[0033] FIG. 31 shows a perspective view of the door according to
the second exemplary embodiment, with a housing part having been
removed;
[0034] FIGS. 32 to 35 show schematic illustrations of further
variant embodiments.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0035] A first exemplary embodiment of a door according to the
invention is illustrated in FIGS. 1 to 15. The door 1 which may
also be referred to as a vacuum door, is attached to a chamber wall
2, of which only a portion is illustrated, of a vacuum chamber 3.
The chamber wall 2 has a chamber opening 4 which, in the closed
state of the door 1, is closed in a vacuum-tight manner by the
closure member 5 of the door. In the opened state of the door 1,
the chamber opening 4 is opened up, i.e. the closure member 5 does
not cover the chamber opening 4, as seen in the direction of the
longitudinal center axis 6 of the chamber opening 4.
[0036] The door 1 is attached to the outside of the vacuum chamber
3, i.e. the door 1 is located in the surrounding space 45
surrounding the vacuum chamber 3. Atmospheric pressure prevails in
said surrounding space.
[0037] In the opened state of the door 1, the closure member 5
arranged outside the vacuum chamber 3 takes up its open position,
cf. FIGS. 1-8. In the closed state of the door 1, the closure
member 5 takes up its closed position, cf. FIGS. 9-12, in which
said closure member is pressed against the outer side of the
chamber wall 2. In the closed position of the closure member 5, a
circumferentially closed elastic seal 7, which is attached to the
closure member 5, is pressed against a sealing face 8 of the
chamber wall 2. The sealing face 8 surrounds the chamber opening 4.
The seal 7 and the sealing face 8 are therefore of ring-shaped
design, but not of circular-ring-shaped design in the exemplary
embodiment. However, circular-ring-shaped designs are conceivable
and possible in particular in the case of circular contours of the
chamber opening 4 and of the closure member 5. The sealing face 8
is located on the outer side of the chamber wall 2, which outer
side is adjacent to the surrounding space 45. In a modified design,
the seal 7 could also be attached to the chamber wall 2 and could
surround the chamber opening 4 and abut against a sealing face of
the closure member 5 in the closed state of the door 1. The seal
would therefore be attached here to the outer side of the chamber
wall 2, which outer side is adjacent to the surrounding space
45.
[0038] The door 1 is fastened to the chamber wall 2 by fastening of
the door housing 25 to the chamber wall 2.
[0039] The closure member 5 is adjusted from the open position into
the closed position and back in each case via an intermediate
position which is illustrated in FIGS. 6-8. In the intermediate
position, the closure member 5 covers the chamber opening 4, as
seen in the direction of the longitudinal center axis 6 of the
chamber opening 4, but the seal 7 is still spaced apart from the
sealing face 8.
[0040] The closure member 5 is attached to a rod 10 via a
connecting piece 9. The closure member 5 is adjusted between the
open position and closed position by a movement of the rod 10. For
the adjustment of the closure member between its open position and
its intermediate position, the rod 10 is displaced here linearly
axially, i.e. in the direction of its longitudinal axis 11
(=displaced rectilinearly in parallel). For the adjustment of the
closure member 5 between the intermediate position and the closed
position, the rod 10 in this exemplary embodiment is displaced
linearly at right angles to its longitudinal axis 11 (=displaced
rectilinearly in parallel) in order to guide the closure member 5
in the direction of the longitudinal center axis 6 of the chamber
opening 4 up to the chamber wall 2 having the chamber opening 4
until the seal 7 is pressed against the sealing face 8. Thus,
overall, an L movement of the closure member 5 is carried out.
[0041] Although a displacement at right angles to the longitudinal
axis 11 of the rod 10 is advantageous in order to displace the
closure member 5 from the intermediate position into the closed
position, angles 90.degree. are also conceivable and possible, with
the deviation from 90.degree. preferably being less than
45.degree.. The direction of the displacement therefore deviates by
a corresponding angle from the parallel position to the
longitudinal center axis 6 of the chamber opening 4. The direction
of the parallel displacement can also change here over the
adjustment path of the closure member 5 between the intermediate
position and the closed position. Such movements of the closure
member 5, in which the adjustment between the intermediate position
and the closed position takes place at an angle deviating from
90.degree., are also referred to as a "J movement" of the closure
member. According to a further possible design, the adjustment of
the closure member between the intermediate and the closed position
can also take place by pivoting of the rod 10 about a pivot axis
which is at right angles to the longitudinal axis 11 of the rod 10
and is at right angles to the longitudinal center axis 6 of the
chamber opening 4, as is explained more precisely further below in
conjunction with a second exemplary embodiment of the invention. A
combination of a parallel displacement of the rod 10 at an angle to
its longitudinal axis 11 and pivoting of the rod 10 about a pivot
axis which is at right angles to its longitudinal axis 11 is also
conceivable and possible. An at least substantially L-shaped
movement of the closure element 5 can also be achieved as a
result.
[0042] The closure member is therefore adjusted from the open
position to the closed position by a first movement of the rod 10,
in which the rod 10 is displaced axially, and a subsequent second
movement of the rod 10, in which the rod is displaced in a
direction at an angle, for example right angle, to its longitudinal
axis 11 and/or is pivoted about a pivot axis which is at a right
angle to its longitudinal axis. During the adjustment of the
closure member from the closed position into the open position, the
two movements of the rod 10 take place in the reverse sequence and
in the reverse direction.
[0043] For the axial displacement of the rod 10, in order to carry
out the first movement of the rod 10 (and therefore the
displacement of the closure member between the open position and
the intermediate position), pneumatically acting piston-cylinder
units, which are referred to below as longitudinal piston-cylinder
units 12, serve as drives. The longitudinal piston-cylinder units
12 each have a cylinder 13 with a cylinder space and a piston
arranged in the cylinder space.
[0044] The piston rods 16 of the longitudinal piston-cylinder units
12 are connected movably to a transmission piece 17, which is
connected rigidly in all directions to the rod 10, in a
non-displaceable manner with respect to the direction of the
longitudinal axis 11 of the rod 10 (i.e. rigidly with respect to
this direction) and at an angle, at a right angle in the exemplary
embodiment, with respect to that direction to the longitudinal axis
11 of the rod 10 in which the second movement of the rod 10 takes
place. For this purpose, the piston rods 16 are attached to
connecting parts 18 which are displaceable in the manner of slides
in the direction of the second movement of the rod 10 in relation
to the transmission piece 17.
[0045] The transmission piece 17 has recesses 19 in which guide
rods 20 are arranged. In the exemplary embodiment, the recesses 19
are of partially cylindrical design and are open toward the edge of
the transmission piece 17 and surround the cross-sectionally
circular guide rods 20, which are arranged in said recesses, over
more than 180.degree. of the circumference of the guide rods 20. As
a result, the transmission piece 17 is held in a displaceable
manner in relation to the guide rods 20 in the direction of the
longitudinal axis 11 of the rod 10, but is held in a
non-displaceable manner in relation to the guide rods 20 with
respect to the direction of the second movement of the rod 10.
Instead of the recesses 19 which are shown, dovetail-like recesses,
for example, could also be provided, in which guide rod strips of
undercut design are arranged.
[0046] The cylinders 13 are rigidly connected to a housing part 22
of the door housing 25, which is described more precisely further
below.
[0047] A different connection than the movable connection shown,
between the piston rods 16 and the rod 10, is also conceivable and
possible. A reverse arrangement, in which the cylinders 13 are
connected to the piston rod 16 and the pistons are connected to the
door housing 25, is also conceivable and possible. Instead of two
longitudinal piston-cylinder units 12, basically only one
longitudinal piston-cylinder unit 12 could be provided, whereas
more than two longitudinal piston-cylinder units 12 could be
provided.
[0048] For the displacement of the rod 10 in a direction at an
angle, preferably at a right angle, to its longitudinal axis 11 in
order to carry out the second movement of the rod 10 and therefore
the adjustment of the closure member 5 between the intermediate
position and the closed position, pneumatically acting
piston-cylinder units 21, which are consequently referred to as
transverse piston-cylinder units, serve as drives. The cylinder
spaces of the transverse piston-cylinder units 21 are integrated in
the door housing 25. For this purpose, the housing part 22 of the
door housing 25 has corresponding recesses 23 which form cylinder
spaces and are closed by cover parts 24. Pistons 26 of the
transverse piston-cylinder units 21 are accommodated in said
cylinder spaces. The piston rods 27 of said transverse
piston-cylinder units pass through bores 28 in an intermediate wall
of the housing part 22 in a sealed manner (by elastic seals) and
are rigidly connected to the piston rods 20. The pistons and the
piston rods 27 are mounted here so as to be displaceable from the
walls of the cylinder spaces and from the intermediate wall of the
housing part 22 in the direction of the second movement of the rod
20.
[0049] A different design and/or arrangement of the transverse
piston-cylinder units 21 is conceivable and possible, wherein the
cylinders of the transverse piston-cylinder units 21 could also be
parts which are separate from the door housing 25. Only one
transverse piston-cylinder unit 21 or more than two transverse
piston-cylinder units 21 could also be provided.
[0050] In order to close the door from its open state, first of all
the rod 10 is displaced axially by the longitudinal piston-cylinder
units 12, wherein the transmission piece 17 is guided in a linearly
displaceable manner by the guide rods 20 in the direction of the
longitudinal axis 11 of the rod 10. When the closure member 5 has
reached the intermediate position, the transmission piece 17 and
therefore the rod 10 are displaced at an angle, preferably at a
right angle to the longitudinal axis 11 by actuation of the
transverse piston-cylinder units 21, in order to carry out the
second movement of the rod, as a result of which the closure member
5 is adjusted from the intermediate position into the closed
position.
[0051] The transmission piece 17 and the guide rods 20 therefore
form bearing elements, by which the rod 10 is mounted movably over
its first movement in relation to the door housing 25. The walls of
the cylinder spaces, the bores 28 in the intermediate wall of the
housing part 22, the pistons 26 and the piston rods 27 of the
transverse piston-cylinder units 21 form bearing elements, by means
of which the rod 10 is mounted movably over its second movement in
relation to the door housing 25.
[0052] On the side opposite the recesses 23 in the housing part 22,
the housing part 22 is of shell-shaped design and is closed by a
plate-like housing part 29.
[0053] The housing part 22 has a through opening 34 which extends
in the longitudinal direction of the rod 10 and is closed by a
further plate-like housing part 35. This through opening 34
accommodates that end of the rod 10 which is remote from the
closure member 5. In the closed state of the door, lateral
continuations 36 of the rod 10 are supported on edges of extensions
34a on the side which is directed toward the chamber wall 2 and has
the through opening 34 laterally.
[0054] A portion of the rod 10 adjoining that end of the rod 10 at
which the rod 10 is connected to the closure member 5 extends
through a further through opening 32 in the housing part 22, said
through opening extending in the longitudinal direction of the rod
10.
[0055] The housing parts 22, 24, 29, 35 are sealed off from one
another by seals located in between.
[0056] A door housing 25 which encloses an interior space 30 is
formed by the outer walls of the housing part 22 and the housing
parts 24, 29 and 35. The bearing elements, by which the rod is
mounted movably over its first movement and over its second
movement in relation to the door housing 25, are located in said
interior space 30.
[0057] The rod 10 is guided, in a manner sealed against an escape
of particles, out of the interior space 30 of the door housing 25
into the surrounding space 45 surrounding the door housing 25. For
this purpose, use is made of a bellows 31 (not illustrated in
detail over its entire length in the figures) which is designed,
for example, in the form of an expansion bellows, especially a
diaphragm bellows. Use of bellows designed in another manner, for
example corrugated bellows, is conceivable and possible. The
bellows 31 is connected at the one end to the rod 10 and at the
other end to the housing part 22, specifically in the region of the
through opening 32 for the rod 10. The interior space of the door
housing 25 therefore continues through the intermediate space,
which is located between the bellows 31 and the rod 10, as far as
the connecting region between the bellows 31 and the rod 10.
[0058] The longitudinal piston-cylinder units 12 including their
piston rods 16 are located over their entire extent, and the
transverse piston-cylinder units 21 including their piston rods 27
are located over their entire extent, in the interior space 30 of
the door housing 25.
[0059] Compressed air is supplied to the piston-cylinder units 12,
21 through ports 37, 38. Passages which lead to the corresponding
cylinder spaces can be formed by bores, for example in the housing
part 22 and/or by a hose line and/or by pipes. For the sake of
clarity, these means of supplying compressed air to the
piston-cylinder units 12, 21 are not illustrated in the figures,
any more than control valves and position indicators which ensure
the correct sequence of operation of the piston-cylinder units 12,
21. Corresponding sequence control units are known.
[0060] In addition, there is a port 39 which leads to a passage 41
which passes through a housing wall 40 and therefore communicates
with the interior space 30 of the door housing 25. In the operating
state of the door, a line 42 which is connected to a vacuum pump 44
is connected to said port. The line 42 and the vacuum pump 44 are
only shown schematically in FIGS. 3 and 12. The interior space 30
of the door housing 25 is therefore evacuated by the passage 41 and
the passage 43 leading through the line 42.
[0061] The interior space 30 of the door housing 25 is sealed in
relation to the surrounding space 45 which surrounds the door
housing 25. Changes to the free volume in the interior space 30 of
the door housing 25, which changes arise through positional changes
of the parts during the opening and closing of the door, in
particular by the bellows 31 being pulled apart and pressed
together, are possible without the formation of a positive pressure
in relation to atmospheric pressure, since the interior space 30 is
under vacuum.
[0062] The door housing 25 has an abutment region in which it abuts
against the chamber wall 2 in the state fastened thereto. This
abutment region is located in the vicinity of fastening screws 14
and is formed by elevations 15 of the housing part 22. In the
region of said elevations, the housing part 29 can have cutouts. In
a region positioned further away from the fastening screws 14 in
relation to the abutment region, the door housing 25 is spaced
apart from the chamber wall 2 by a gap 64. Small positional changes
in relation to the chamber wall 2 brought about by deformations of
the door housing, said positional changes occurring primarily in a
region remote from the fastening screws 14, thereby lead to a lower
production of particles than in a design in which the door housing
25 abuts continuously against the chamber wall 2.
[0063] A second exemplary embodiment of the invention is
illustrated in FIGS. 16 to 31. Apart from the differences described
below, the design of the second exemplary embodiment corresponds to
that of the first exemplary embodiment, and the description of the
first exemplary embodiment and the possible modifications is also
applicable to this extent to the second exemplary embodiment.
[0064] The substantial difference of the second exemplary
embodiment over the first exemplary embodiment consists in that the
second movement of the rod 10 consists in pivoting of the rod 10
about a pivot axis 46 which is at a right angle to the rod 10. The
longitudinal piston-cylinder units 12 act here on both sides of the
rod 10 on a yoke 47 which is mounted on the rod 10 so as to be
displaceable in the direction of the longitudinal axis 11 of the
rod 10. The yoke 47 has laterally protruding pins 48 which are
guided in slotted guide tracks 49 which are arranged on the inner
sides of the housing walls 50, 51.
[0065] Secured on the rod 10 is a guide piece 52 which has pins 53
which protrude on both sides and engage in guide tracks 54 in
intermediate walls 55, 56 in the interior of the door housing 25. A
helical spring 57 surrounding the rod 10 is located between the
guide piece 52 and the yoke 47.
[0066] In order to adjust the closure member from the open position
(FIGS. 16-22) via the intermediate position (FIGS. 23-26) into the
closed position (FIGS. 27-30), use is made of the longitudinal
piston-cylinder units 12 arranged in the interior space 30 of the
door housing 25. This longitudinal piston-cylinder units displace
the yoke 47, with the movement of the yoke 47 being transmitted to
the guide piece 52 via the helical spring 57. In the process, the
pins 53 of the guide piece 52 move along the rectilinearly running
guide tracks 54, and the pins 48 of the yoke 47 move along
rectilinearly running portions of the slotted guide tracks 49 until
the closure member 5 reaches the intermediate position. When the
intermediate position of the closure member 5 is reached, the pins
53 reach the ends of the guide tracks 54, and therefore a further
movement of the guide piece 52 is blocked. The yoke 47 is moved
further in the same direction by the longitudinal piston-cylinder
units 12, the yoke being displaced in relation to the rod 10 by
compression of the helical spring 57. The pins 48 of the yoke 47
move here along portions of the slotted guide tracks 49 which have
a curved profile and can be seen in particular from FIGS. 21 and
25, and the rod 10 is thus pivoted about the pivot axis 46 until
the closure member 5 reaches the closed position.
[0067] In this exemplary embodiment, the pins 48, the slotted guide
tracks 49, the pins 53 and the guide tracks 54 form the bearing
elements, by which the rod 10 is mounted movably over its first
movement and over its second movement in relation to the door
housing 25.
[0068] The yoke 47 could also be fastened rigidly to the rod 10 and
the helical spring 57 could therefore be omitted. The curved
profile of the slotted guide tracks 49 would then start even before
the pins 30 reach the ends of the guide tracks 54. As a result, a
J-shaped movement of the closure member could be formed.
[0069] The J-shaped movement of the closure member could also be
achieved without pivoting of the rod 10 in that both the slotted
guide track 49 and the guide track 54 have end portions running
obliquely in the direction of the chamber wall 2. The movement
between the yoke 42 and the piston rods of the longitudinal
piston-cylinder units 12 with respect to the direction parallel to
the longitudinal center axis 6 of the chamber opening 4 would then
have to be made possible, for example in an analogous manner as
described in the first exemplary embodiment.
[0070] Other mechanisms for forming L- or J-shaped movements of the
closure member 5 are conceivable and possible. Such mechanisms are
known from vacuum valves having L- or J-shaped movements of closure
members arranged in valve housings.
[0071] Instead of evacuating the interior space 30 of the door
housing 25, a passage 41 passing through the housing wall could
also be connected via the inner passage 43 of a pipe or hose line
to an exterior space 58 which is separated from the surrounding
space 45 surrounding the door housing 25, as is illustrated
schematically in FIG. 32. The interior space 30 of the door housing
25 is in turn sealed here in relation to the surrounding space
45.
[0072] According to a further possible variant embodiment which is
illustrated schematically in FIG. 33, although the interior space
30 is not sealed in relation to the surrounding space 45, it is
connected to the surrounding space 45 only via a passage 41 which
passes through a housing wall 40 of the door housing 25 and in
which a particle filter 59 is arranged. If the door 1 is opened
from its closed state, the changing volume of the interior space
30, in particular because of the compression of the bellows 31,
causes air to be displaced out of the interior space 30 through the
passage 41. The particle loading of the air is at least
substantially reduced here by the particle filter 59. In addition,
remaining particles are released in a region located further away
from the chamber opening 4.
[0073] A further variant embodiment is illustrated schematically in
FIG. 34. In this exemplary embodiment, the interior space 30 of the
door housing 25 is completely closed (encapsulated). In order to be
able to accommodate changes in volume during the opening and
closing of the door, such that the pressure in the interior space
30 does not change too severely, an expansion vessel 60 is arranged
in the interior space of the door housing 25 in this exemplary
embodiment. This expansion vessel has an expansion space 61, the
volume of which can change. For this purpose, in the exemplary
embodiment, the expansion vessel 60 is designed in the manner of an
expandable balloon. The expansion space 61 is connected to the
surrounding space 45 via a passage 62. The expansion vessel could
also have, for example, a rigid movable wall.
[0074] The expansion vessel 60 could also be arranged outside the
door housing 25 and could be connected to the interior space 30 of
the door housing 25 via a passage 63, cf. schematic FIG. 35.
Otherwise, the interior space 30 of the door housing 25 is
completely closed.
KEY TO THE REFERENCE NUMBERS
[0075] 1 Door
[0076] 2 Chamber wall
[0077] 3 Vacuum chamber
[0078] 4 Chamber opening
[0079] 5 Closure member
[0080] 6 Longitudinal center axis
[0081] 7 Seal
[0082] 8 Sealing face
[0083] 9 Connecting piece
[0084] 10 Rod
[0085] 11 Longitudinal axis
[0086] 12 Longitudinal piston-cylinder unit
[0087] 13 Cylinder
[0088] 14 Fastening screw
[0089] 15 Elevation
[0090] 16 Piston rod
[0091] 17 Transmission piece
[0092] 18 Connecting part
[0093] 19 Recess
[0094] 20 Guide rod
[0095] 21 Transverse piston-cylinder unit
[0096] 22 Housing part
[0097] 23 Recess
[0098] 24 Housing part
[0099] 25 Door housing
[0100] 26 Piston
[0101] 27 Piston rod
[0102] 28 Bore
[0103] 29 Housing part
[0104] 30 Interior space
[0105] 31 Bellows
[0106] 32 Through opening
[0107] 33 Block
[0108] 34 Through opening
[0109] 34a Extension
[0110] 35 Housing part
[0111] 36 Continuation
[0112] 37 Port
[0113] 38 Port
[0114] 39 Port
[0115] 40 Housing wall
[0116] 41 Passage
[0117] 42 Line
[0118] 43 Passage
[0119] 44 Vacuum pump
[0120] 45 Surrounding space
[0121] 46 Pivot axis
[0122] 47 Yoke
[0123] 48 Pin
[0124] 49 Slotted guide track
[0125] 50 Housing wall
[0126] 51 Housing wall
[0127] 52 Guide piece
[0128] 53 Pin
[0129] 54 Guide track
[0130] 55 Intermediate wall
[0131] 56 Intermediate wall
[0132] 57 Helical spring
[0133] 58 Exterior space
[0134] 59 Particle filter
[0135] 60 Expansion vessel
[0136] 61 Expansion space
[0137] 62 Passage
[0138] 63 Passage
[0139] 64 Gap
* * * * *