U.S. patent application number 15/271407 was filed with the patent office on 2017-09-21 for nonvolatile semiconductor memory device and method of manufacturing the same.
This patent application is currently assigned to Kabushiki Kaisha Toshiba. The applicant listed for this patent is Kabushiki Kaisha Toshiba. Invention is credited to Keiji Ikeda, Masumi Saitoh, Kiwamu Sakuma.
Application Number | 20170271364 15/271407 |
Document ID | / |
Family ID | 59855925 |
Filed Date | 2017-09-21 |
United States Patent
Application |
20170271364 |
Kind Code |
A1 |
Sakuma; Kiwamu ; et
al. |
September 21, 2017 |
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING
THE SAME
Abstract
This nonvolatile semiconductor memory device includes: a memory
cell array including a memory cell; a wiring part connecting the
memory cell array to an external circuit; and a transistor that
connects the wiring part and the external circuit, the transistor
including: a first insulating layer including a first region, a
second region, and a third region, the second and third regions
being disposed on both sides of the first region, and a height of
an upper surface of the first region being lower than those of the
second region and the third region; a semiconductor layer disposed
along upper surfaces of the first region, the second region, and
the third region; and a gate electrode layer disposed via the
semiconductor layer and a gate insulating film, on an upper part of
the second region.
Inventors: |
Sakuma; Kiwamu; (Yokkaichi,
JP) ; Ikeda; Keiji; (Kawasaki, JP) ; Saitoh;
Masumi; (Yokkaichi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Kabushiki Kaisha Toshiba |
Minato-ku |
|
JP |
|
|
Assignee: |
Kabushiki Kaisha Toshiba
Minato-ku
JP
|
Family ID: |
59855925 |
Appl. No.: |
15/271407 |
Filed: |
September 21, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/11573 20130101;
H01L 27/11582 20130101; H01L 29/42376 20130101; H01L 29/0847
20130101; H01L 23/528 20130101; H01L 27/11568 20130101; H01L 28/00
20130101; H01L 29/40117 20190801 |
International
Class: |
H01L 27/115 20060101
H01L027/115; H01L 21/28 20060101 H01L021/28; H01L 29/08 20060101
H01L029/08; H01L 23/528 20060101 H01L023/528; H01L 29/423 20060101
H01L029/423 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 18, 2016 |
JP |
2016-054724 |
Claims
1. A nonvolatile semiconductor memory device, comprising: a memory
cell array including a memory cell; a wiring part connecting the
memory cell array to an external circuit; and a transistor that
connects the wiring part and the external circuit, the transistor
comprising: a first insulating layer including a first region, a
second region, and a third region, the second and third regions
being disposed on both sides of the first region, and a height of
an upper surface of the first region being lower than those of the
second region and the third region; a semiconductor layer disposed
along upper surfaces of the first region, the second region, and
the third region; and a gate electrode layer disposed via the
semiconductor layer and a gate insulating film, on an upper part of
the second region.
2. The memory device according to claim 1, further comprising a
second insulating layer disposed on the first region via the
semiconductor layer.
3. The memory device according to claim 1, wherein the first
insulating layer includes a plurality of the first regions whose
upper surfaces are in a lower position than that of the second
region is, on at least one side of the second region, and the third
region is disposed between a plurality of the first regions.
4. The memory device according to claim 2, wherein the first
insulating layer includes a plurality of the first regions whose
upper surfaces are in a lower position than that of the second
region is, on at least one side of the second region, and the third
region is disposed between a plurality of the first regions.
5. The memory device according to claim 1, wherein the first
insulating layer includes a plurality of the first regions whose
upper surfaces are in a lower position than that of the second
region is, on each of both sides of the second region, and the
third region is disposed between a plurality of the first
regions.
6. The memory device according to claim 2, wherein the first
insulating layer includes a plurality of the first regions whose
upper surfaces are in a lower position than that of the second
region is, on each of both sides of the second region, and the
third region is disposed between a plurality of the first
regions.
7. The memory device according to claim 3, wherein a plurality of
the first regions have an aspect ratio of a sidewall surface and
the upper surface which is larger than 1.
8. The memory device according to claim 5, wherein a plurality of
the first regions have an aspect ratio of a sidewall surface and
the upper surface which is larger than 1.
9. The memory device according to claim 1, wherein a length of the
gate electrode layer in a first direction from the second region to
the third region along the upper surface of the second region is
larger than a length in the first direction of the semiconductor
layer on the second region.
10. The memory device according to claim 2, wherein a length of the
gate electrode layer in a first direction from the second region to
the third region along the upper surface of the second region is
larger than a length in the first direction of the semiconductor
layer on the second region.
11. The memory device according to claim 3, wherein a length of the
gate electrode layer in a first direction from the second region to
the third region along the upper surface of the second region is
larger than a length in the first direction of the semiconductor
layer on the second region.
12. The memory device according to claim 1, wherein the
semiconductor layer comprises an impurity layer at both ends of the
semiconductor layer.
13. The memory device according to claim 2, wherein the
semiconductor layer comprises an impurity layer at both ends of the
semiconductor layer.
14. The memory device according to claim 3, wherein the
semiconductor layer comprises an impurity layer at both ends of the
semiconductor layer.
15. The memory device according to claim 12, wherein the
semiconductor layer has an impurity concentration between the
impurity layers which is 10 times or more less than that of the
impurity layer.
16. A method of manufacturing a nonvolatile semiconductor memory
device, comprising: forming a first insulating layer; removing part
of the first insulating layer to a certain depth from an upper
surface of the first insulating layer to define a first region;
forming a semiconductor layer along a surface of the first
insulating layer; embedding a second insulating layer above an
upper part of the first region where the semiconductor layer has
been formed; forming a gate insulating film above the semiconductor
layer, and then forming a gate electrode layer above the gate
insulating film; and introducing an impurity to form an impurity
layer in part of the semiconductor layer.
17. A method of manufacturing a nonvolatile semiconductor memory
device, comprising: forming a first insulating layer; removing part
of the first insulating layer to a certain depth from an upper
surface of the first insulating layer to define a first region;
forming a semiconductor layer along follow a surface of the first
insulating layer including the first region; forming a gate
insulating film above an upper surface of the semiconductor layer
and forming the gate insulating film above an upper part of the
first region; forming a gate electrode layer above the gate
insulating film in a second region different from the first region;
and introducing an impurity to form an impurity layer in part of
the semiconductor layer.
18. The method according to claim 16, wherein the first region has
an aspect ratio of a sidewall surface and the upper surface which
is larger than 1.
19. The method according to claim 17, wherein the first region has
an aspect ratio of a sidewall surface and the upper surface which
is larger than 1.
Description
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This application is based on and claims the benefit of
priority from prior Japanese Patent Application No. 2016-054724,
filed on Mar. 18, 2016, the entire contents of which are
incorporated herein by reference.
BACKGROUND
[0002] Field
[0003] Embodiments described below relate to a nonvolatile
semiconductor memory device.
[0004] Description of the Related Art
[0005] In recent years, a three-dimensional type nonvolatile
semiconductor memory device has been gathering attention as a
nonvolatile semiconductor memory device for achieving raising of
integration level, without being confined to a limit of resolution
of lithography technology.
[0006] Such a three-dimensional type nonvolatile semiconductor
memory device includes a wiring part for connection to an external
peripheral circuit. The wiring part is connected to the external
peripheral circuit via the likes of a contact plug and upper layer
wiring, via a switch transistor.
[0007] However, along with an increase in memory capacity, the
number of switch transistors has ended up increasing, and this is a
factor that hinders raising of the integration level.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] FIG. 1 is a block diagram showing a schematic configuration
of a NAND type flash memory according to a first embodiment.
[0009] FIG. 2 is a perspective view showing a schematic
configuration of a memory cell array MA and a stepped wiring part
SR.
[0010] FIG. 3 is a circuit diagram describing a circuit
configuration of the memory cell array MA.
[0011] FIG. 4 is a schematic perspective view of the memory cell
array MA.
[0012] FIG. 5 is a cross-sectional view of the memory cell array MA
and the stepped wiring part SR.
[0013] FIG. 6 is a cross-sectional view showing details of a
structure of a memory transistor layer 30.
[0014] FIG. 7 is a perspective view showing a structure of a
transistor SWTr included in a word line connection circuit SW
formed in an upper part of the stepped wiring part SR, of the first
embodiment.
[0015] FIG. 8 is a cross-sectional view of the transistor SWTr
formed in the upper part of the stepped wiring part SR.
[0016] FIGS. 9A to 9H show a method of manufacturing the transistor
SWTr according to the first embodiment.
[0017] FIG. 10 shows a modified example of the transistor SWTr
according to the first embodiment.
[0018] FIG. 11 shows a modified example of the transistor SWTr
according to the first embodiment.
[0019] FIG. 12 is a cross-sectional view showing a structure of a
transistor SWTr according to a second embodiment.
[0020] FIGS. 13A to 13F show a method of manufacturing the
transistor SWTr according to the second embodiment.
[0021] FIG. 14 shows a modified example of the transistor SWTr
according to the second embodiment.
DETAILED DESCRIPTION
[0022] A nonvolatile semiconductor memory device according to an
embodiment includes: a memory cell array including a memory cell; a
wiring part connecting the memory cell array to an external
circuit; and a transistor that connects the wiring part and the
external circuit, the transistor including: a first insulating
layer including a first region, a second region, and a third
region, the second and third regions being disposed on both sides
of the first region, and a height of an upper surface of the first
region being lower than those of the second region and the third
region; a semiconductor layer disposed along upper surfaces of the
first region, the second region, and the third region; and a gate
electrode layer disposed via the semiconductor layer and a gate
insulating film, on an upper part of the second region.
[0023] Next, nonvolatile semiconductor memory devices according to
embodiments will be described in detail with reference to the
drawings.
First Embodiment
[0024] First, a NAND type flash memory according to a first
embodiment will be described with reference to FIG. 1. As shown in
FIG. 1, this NAND type flash memory of the first embodiment
includes a memory cell array MA.
[0025] In addition, this NAND type flash memory includes a row
decoder RD, a word line connection circuit SW, a bit line
connection circuit BLHU, a sense amplifier circuit S/A, and a
peripheral circuit PERI, in a periphery of the memory cell array
MA.
[0026] As will be described later, the memory cell array MA has
memory cells arranged three-dimensionally therein. Moreover, this
memory cell array MA includes: a plurality of word lines WL that
extend longitudinally in an X direction of FIG. 1; and a plurality
of bit lines BL and a source line SL that extend longitudinally in
a Y direction of FIG. 1. The plurality of word lines WL are stacked
in a stacking direction (Z direction) in the memory cell array MA.
The plurality of word lines WL are each connected to different
memory cells MC arranged in the stacking direction in the memory
cell array MA.
[0027] In addition, a stepped wiring part SR for connecting the
word line WL and an external circuit is formed in the periphery of
this memory cell array MA. As shown in FIG. 2, this stepped wiring
part SR includes a lead-out wiring connected to an identical layer
to a conductive layer 31 acting as the word line WL, and this
lead-out wiring is formed in a stepped shape. The stepped wiring
part SR is formed by etching stacked conductive layers 31 and
inter-layer insulating films 32 while performing slimming
processing isotropically on a resist, by a well-known method.
Therefore, as shown in FIGS. 1 and 2, the stepped wiring part SR is
usually formed so as to surround all sides of the memory cell array
MA.
[0028] The row decoder RD selects the plurality of word lines WL
and supplies a voltage required in an operation. Moreover, the word
line connection circuit SW is a switching circuit for connecting
the word line WL and the row decoder RD, and includes many
transistors SWTr that connect the word line WL and the row decoder
RD. As will be described later, the transistor SWTr configuring
this word line connection circuit SW is disposed so as to be
superposed on the stepped wiring part SR in an XY plane, upwardly
of the stepped wiring part SR.
[0029] Furthermore, the sense amplifier circuit S/A and the bit
line connection circuit BLHU are disposed in the Y direction of the
stepped wiring part SR. The sense amplifier circuit S/A is
connected to the bit line BL via the bit line connection circuit
BLHU, and functions to provide the bit line BL with a voltage for
write and to detect and amplify a potential appearing in the bit
line BL during read. The bit line connection circuit BLHU includes
a transistor that controls connection of the bit line BL and the
sense amplifier circuit S/A. The peripheral circuit PERI includes a
circuit other than the above-described, for example, a power supply
circuit, a charge pump circuit (booster circuit), a data register,
and so on.
[0030] Next, a circuit configuration of the memory cell array MA
will be described. FIG. 3 is a circuit diagram of the memory cell
array MA. Note that this structure of the memory cell array MA
shown in FIG. 3 is merely an example. It goes without saying that a
later-described structure of the word line connection circuit SW
may be applied also to a variety of three-dimensional type memory
cell arrays other than that shown.
[0031] As shown in FIG. 3, the memory cell array MA includes a
plurality of memory blocks MB. The memory blocks MB are arranged in
the Y direction on a semiconductor substrate Ba (not shown).
[0032] The memory block MB includes a plurality of memory strings
MS, a source side select transistor SSTr, and a drain side select
transistor SDTr. The memory string MS is configured by memory
transistors (memory cells) MTr1-MTr4 connected in series. To
simplify description, the example shown describes the case where
one memory string MS includes four memory transistors MTr, but it
goes without saying that the present embodiment is not limited to
this, and one memory string MS may include more memory
transistors.
[0033] The drain side select transistor SDTr is connected to one
end of the memory string MS (the memory transistor MTr4). The
source side select transistor SSTr is connected to the other end of
the memory string MS (the memory transistor MTr1). For example, the
memory strings MS are provided in a matrix in the XY plane over a
plurality of rows and a plurality of columns, in each one of the
memory blocks MB.
[0034] In the memory block MB, control gates of the memory
transistors MTr1 arranged in a matrix are commonly connected to a
word line WL1. Similarly, control gates of the memory transistors
MTr2 are commonly connected to a word line WL2. Control gates of
the memory transistors MTr3 are commonly connected to a word line
WL3. Control gates of the memory transistors MTr4 are commonly
connected to a word line WL4.
[0035] Moreover, in the memory block MB, control gates of each of
the drain side select transistors SDTr arranged in a line in the X
direction are commonly connected to a drain side select gate line
SGD. A plurality of the drain side select gate lines SGD are
provided at a certain pitch in the Y direction in one memory block
MB. Moreover, other ends of the drain side select transistors SDTr
arranged in a line in the Y direction are commonly connected to the
bit line BL. The bit line BL is formed so as to extend in the Y
direction straddling the memory block MB. A plurality of the bit
lines BL are provided in the X direction.
[0036] In one memory block MB, control gates of all of the source
side select transistors SSTr are commonly connected to a source
side select gate line SGS. Moreover, other ends of the source side
select transistors SSTr arranged in the Y direction are commonly
connected to a source line SL.
[0037] The above-described kind of circuit configuration of the
memory cell array MA is achieved by a stacked structure shown in
FIGS. 4 and 5. FIG. 4 is a schematic perspective view of the memory
cell array MA. FIG. 5 is a cross-sectional view of the memory cell
array MA and the stepped wiring part SR.
[0038] As shown in FIGS. 4 and 5, the memory cell array MA includes
a source side select transistor layer 20, a memory transistor layer
30, a drain side select transistor layer 40, and a wiring layer 50
that are stacked sequentially on the semiconductor substrate Ba in
each of the memory blocks MB.
[0039] The source side select transistor layer 20 is a layer
functioning as the source side select transistor SSTr. The memory
transistor layer 30 is a layer functioning as the memory string MS
(memory transistors MTr1-MTr4). The drain side select transistor
layer 40 is a layer functioning as the drain side select transistor
SDTr. The wiring layer 50 is a layer functioning as various kinds
of wirings.
[0040] As shown in FIGS. 4 and 5, the source side select transistor
layer 20 includes a source side first insulating layer 21, a source
side conductive layer 22, and a source side second insulating layer
23 that are formed sequentially above the semiconductor substrate
Ba. The source side conductive layer 22 is formed so as to extend
two-dimensionally (in a plate-like shape) in the X direction and
the Y direction, over the memory block MB.
[0041] The source side first insulating layer 21 and the source
side second insulating layer 23 are configured by silicon oxide
(SiO.sub.2), for example. The source side conductive layer 22 is
configured by polysilicon (p-Si), for example. Moreover, as shown
in FIG. 5, the source side select transistor layer 20 includes a
source side hole 24 formed so as to penetrate the source side first
insulating layer 21, source side conductive layer 22, and source
side second insulating layer 23. The source side holes 24 are
formed in a matrix in the X direction and the Y direction.
[0042] Furthermore, as shown in FIG. 5, the source side select
transistor layer 20 includes a source side gate insulating layer 25
and a source side columnar semiconductor layer 26 that are formed
sequentially on a sidewall facing the source side hole 24. The
source side gate insulating layer 25 is formed with a certain
thickness on the sidewall facing the source side hole 24. The
source side columnar semiconductor layer 26 is formed so as to fill
the source side hole 24. The source side columnar semiconductor
layer 26 is formed in a column shape extending in the stacking
direction. An upper surface of the source side columnar
semiconductor layer 26 is formed so as to contact a lower surface
of a later-described columnar semiconductor layer 35. The source
side columnar semiconductor layer 26 is formed on a source
diffusion layer Ba1 on the semiconductor substrate Ba. The source
diffusion layer Ba1 functions as the source line SL.
[0043] The source side gate insulating layer 25 is configured by
silicon oxide (SiO.sub.2), for example. The source side columnar
semiconductor layer 26 is configured by polysilicon (p-Si), for
example.
[0044] In the above-described configuration of the source side
select transistor layer 20, the source side conductive layer 22
functions as the control gate of the source side select transistor
SSTr and as the source side select gate line SGS.
[0045] In addition, as shown in FIGS. 4 and 5, the memory
transistor layer 30 includes first through fourth word line
conductive layers 31a-31d and first through fourth inter-word line
insulating films 32a-32d that are stacked sequentially on the
source side select transistor layer 20. The first through fourth
word line conductive layers 31a-31d and the first through fourth
inter-word line insulating films 32a-32d are formed so as to extend
two-dimensionally (in a plate-like shape) in the X direction and
the Y direction. The first through fourth word line conductive
layers 31a-31d and the first through fourth inter-word line
insulating films 32a-32d are divided for each memory block MB.
[0046] Moreover, as shown in FIG. 5, the memory transistor layer 30
includes a memory hole 33 formed so as to penetrate the first
through fourth word line conductive layers 31a-31d and the first
through fourth inter-word line insulating films 32a-32d. The memory
holes 33 are formed in a matrix in the X direction and the Y
direction. The memory hole 33 is formed at a position aligned with
the source side hole 24.
[0047] Furthermore, as shown in FIG. 6, the memory transistor layer
30 includes a block insulating layer 34a, a charge accumulation
layer 34b, a tunnel insulating layer 34c, and the columnar
semiconductor layer 35 that are formed sequentially on a sidewall
facing the memory hole 33.
[0048] As shown in FIG. 6, the block insulating layer 34a is formed
with a certain thickness on the sidewall facing the memory hole 33.
The charge accumulation layer 34b is formed with a certain
thickness on a sidewall of the block insulating layer 34a. The
tunnel insulating layer 34c is formed with a certain thickness on a
sidewall of the charge accumulation layer 34b. The columnar
semiconductor layer 35 is formed so as to fill the memory hole 33.
The columnar semiconductor layer 35 is formed in a column shape so
as to extend in the stacking direction. The lower surface of the
columnar semiconductor layer 35 is formed so as to contact the
upper surface of the source side columnar semiconductor layer 26.
Moreover, an upper surface of the columnar semiconductor layer 35
is formed so as to contact a lower surface of a later-described
drain side columnar semiconductor layer 44. Note that the columnar
semiconductor layer 35 may also be configured having an insulating
film core at its center. Note that the block insulating layer 34a
and the tunnel insulating layer 34c are configured by silicon oxide
(SiO.sub.2), for example. The charge accumulation layer 34b is
configured by silicon nitride (SiN), for example. The columnar
semiconductor layer 35 is configured by polysilicon (p-Si), for
example.
[0049] In the above-described configuration of the memory
transistor layer 30, the first through fourth word line conductive
layers 31a-31d function as the control gates of the memory
transistors MTr1-MTr4 and as the word lines WL1-WL4.
[0050] As shown in FIGS. 4 and 5, the drain side select transistor
layer 40 includes a drain side conductive layer 41 stacked on the
memory transistor layer 30. The drain side conductive layer 41 is
formed directly above where the columnar semiconductor layer 35 is
formed. The drain side conductive layers 41 extend having
longitudinally the X direction, and are formed in stripes with a
certain pitch in the Y direction. The drain side conductive layer
41 is configured by polysilicon (p-Si), for example.
[0051] Moreover, as shown in FIG. 5, the drain side select
transistor layer 40 includes a drain side hole 42 formed so as to
penetrate the drain side conductive layer 41. The drain side holes
42 are formed in a matrix in the X direction and the Y direction.
The drain side hole 42 is formed at a position aligned with the
memory hole 33.
[0052] Furthermore, as shown in FIG. 5, the drain side select
transistor layer 40 includes a drain side gate insulating layer 43
and a drain side columnar semiconductor layer 44 that are formed
sequentially on a sidewall facing the drain side hole 42. The drain
side gate insulating layer 43 is formed with a certain thickness on
the sidewall facing the drain side hole 42. The drain side columnar
semiconductor layer 44 is formed so as to fill the drain side hole
42. The drain side columnar semiconductor layer 44 is formed in a
column shape so as to extend in the stacking direction. The lower
surface of the drain side columnar semiconductor layer 44 is formed
so as to contact the upper surface of the columnar semiconductor
layer 35. Note that the drain side gate insulating layer 43 is
configured by silicon oxide (SiO.sub.2), for example. The drain
side columnar semiconductor layer 44 is configured by polysilicon
(p-Si), for example. The drain side conductive layer 41 functions
as the control gate of the drain side select transistor SDTr and as
the drain side select gate line SGD.
[0053] As shown in FIG. 5, the wiring layer 50 includes the likes
of a first wiring layer 51 in a region including the memory cell
array MA, and includes the likes of a channel semiconductor layer
CR, a gate insulating film GI, and a gate electrode layer GE in a
region including the stepped wiring part SR.
[0054] The first wiring layer 51 is formed so as to contact an
upper surface of the drain side columnar semiconductor layer 44.
The first wiring layers 51 are formed with a certain pitch in the X
direction so as to extend in the Y direction. The first wiring
layer 51 functions as the bit line BL.
[0055] Moreover, the channel semiconductor layer CR, the gate
insulating film GI, and the gate electrode layer GE are members
configuring the previously described transistor SWTr in the word
line connection circuit SW. The channel semiconductor layer CR
functions as a channel region of these transistors SWTr. As will be
described later, the gate insulating film GI is formed on a surface
of the channel semiconductor layer CR, and the gate electrode layer
GE is formed on the surface of the channel semiconductor layer CR
via this gate insulating film GI.
[0056] The channel semiconductor layer CR may be configured by, for
example, polysilicon, monocrystalline silicon, TiO.sub.2, or a
semiconductor oxide (for example, InGaZnO, ZnO, InOx, and so
on).
[0057] The gate insulating film GI is configured from a silicon
oxide (SiO.sub.x), for example. The gate insulating film GI,
besides being configured from a silicon oxide, may also be
configured from at least one of silicon nitride (SiN), silicon
oxynitride (SiON), aluminum oxide (Al.sub.2O.sub.3), aluminum
oxynitride (AlON), hafnia (HfO.sub.2), hafnium aluminate
(HfAlO.sub.3), hafnium oxynitride (HfON), hafnium aluminate nitride
(HfAlON), hafnium silicate (HfSiO), hafnium silicate nitride
(HfSiON), lanthanum oxide (La.sub.2O.sub.3), and lanthanum
aluminate (LaAlO.sub.3).
[0058] The gate electrode layer GE may be formed from, for example,
polysilicon or polysilicon to which an impurity has been added. The
following may be included instead of polysilicon, namely a metal
compound such as tantalum nitride (TaN), tantalum carbide (TaC),
and titanium nitride (TiN), or the following that show metallic
electrical conductivity characteristics, namely Ni, V, Cr, Mn, Y,
Mo, Ru, Rh, Hf, Ta, W, Ir, Co, Ti, Er, Pt, Pd, Zr, Gd, Dy, Ho, Er,
and silicides of these.
[0059] As shown in FIG. 5, the stepped wiring part SR includes
conductive layers 31a'-31d' formed by extending the first through
fourth word line conductive layers 31a-31d. That is, the conductive
layers 31a'-31d' are formed in identical layers to, and are
electrically and physically connected to the first through fourth
word line conductive layers 31a-31d. The conductive layers
31a'-31d' and first through fourth inter-word line insulating films
32a'-32d' sandwiched between the conductive layers 31a'-31d' are
formed in a stepped shape such that positions of their ends in the
X direction differ, and configure a stepped part ST. The stepped
part ST (ST1-ST4) in FIG. 5 configures part of the stepped wiring
part SR of the kind shown in FIG. 2. The stepped part ST shown
specifically in FIG. 5 includes the stepped parts ST1-ST4 formed by
the conductive layers 31a'-31d' and the first through fourth
inter-word line insulating films 32a'-32d' the positions of whose
ends differ in the X direction.
[0060] A contact plug C1 having longitudinally the stacking
direction (Z direction) extends from each of these stepped parts
ST1-ST4, so as to penetrate the first through fourth inter-word
line insulating films 32a'-32d'.
[0061] As shown in FIG. 5, an inter-layer insulating layer 60 is
formed so as to fill a periphery of the source side select
transistor layer 20, the memory transistor layer 30, and the drain
side select transistor layer 40.
[0062] A structure of the transistor SWTr according to the present
embodiment will be described with reference to FIGS. 7 and 8.
[0063] FIG. 7 is a perspective view showing the structure of the
transistor SWTr included in the word line connection circuit SW
formed in an upper part of the stepped wiring part SR. FIG. 8 is a
cross-sectional view in a YZ plane of the transistor SWTr formed in
the upper part of the stepped wiring part SR. Note that to simplify
illustration, FIG. 7 does not show the inter-layer insulating layer
60.
[0064] As shown in FIGS. 7 and 8, the transistor SWTr included in
the word line connection circuit SW includes a base insulating
layer BI (first insulating layer), the channel semiconductor layer
CR (semiconductor layer), the gate insulating film GI, the gate
electrode layer GE, an embedded insulating layer EI (second
insulating layer), and a diffusion layer DL (impurity layer). These
channel semiconductor layer CR, gate insulating film GI, and gate
electrode layer GE form a MOS structure, and configure a thin film
transistor (TFT) structure in which a current flowing between the
diffusion layers DL is controlled by applying a voltage to the gate
electrode layer GE.
[0065] As shown in FIG. 7, the channel semiconductor layer CR is
formed along a longitudinal direction of the stepped parts ST1-ST4.
In the case of such a configuration, many channel semiconductor
layers CR can be disposed along a shape of the stepped part ST, and
it becomes easy for more transistors SWTr to be formed.
[0066] In the example shown in FIG. 7, the gate electrode layer GE
of this embodiment is commonly (continuously) connected over a
plurality of the channel semiconductor layers CR. As a result, one
gate electrode layer GE (of plate-like shape) is connected to a
plurality of the transistors SWTr, and the number of upper layer
wirings or contact plugs can be reduced. The gate electrode layer
GE is not limited to such a configuration, and may be provided
independently to each different transistor SWTr.
[0067] Moreover, as shown in FIGS. 7 and 8, an upper end of the
contact plug C1 is connected to one end (a back surface) of the
channel semiconductor layer CR where the diffusion layer DL is
formed. On the other hand, a contact plug C2 separate from the
contact plug C1 is connected to the other end (a front surface) of
the channel semiconductor layer CR. An upper layer wiring M1 (not
shown) is connected to an upper end of the contact plug C2. This
upper layer wiring M1 is connected to the row decoder RD via
another contact plug or wiring in an unshown region.
[0068] In the example shown in FIG. 8, the base insulating layer BI
includes two trenches T1 (concave parts), and the channel
semiconductor layer CR is deposited so as to cover a surface of the
base insulating layer BI. A trench T2 is formed by an upper surface
of the channel semiconductor layer CR following the trench T1. The
case where cross sections of the trenches T1 and T2 are rectangular
is shown, but another shape may also be adopted for the trenches T1
and T2. For example, the cross sections of the trenches T1 and T2
may be configured as the likes of a trapezoid, a triangle, a
polygon, a semi-ellipse, or a semi-circle. Moreover, FIG. 8 shows
the case where the two trenches T1 have a similar shape, but they
may be configured such that their depths in the stacking direction
or shapes are different.
[0069] By thus forming the trench T1 in the base insulating layer
BI and forming the channel semiconductor layer CR on the surface of
the base insulating layer BI so as to also follow the trench T1, a
channel length of the transistor SWTr can be made larger than when
the trench T1 is not formed. Note that the number or size and shape
of the trenches T1 (first regions) may be appropriately changed,
and are of course not limited to those shown.
[0070] As shown in FIG. 8, in a region (convex part) sandwiched by
the two trenches T1, the gate electrode layer GE is formed via the
channel semiconductor layer CR and the gate insulating film GI,
above the base insulating layer BI. The trench T1 formed in the
base insulating layer BI is embedded by the channel semiconductor
layer CR and the embedded insulating layer EI formed on the channel
semiconductor layer CR. Now, a region where the trench T1 is
formed, of the base insulating layer BI, is assumed to be a first
region; a region where the gate electrode layer GE is formed, of
the base insulating layer BI, is assumed to be a second region; and
a region other than the first region and the second region, of the
base insulating layer BI, is assumed to be a third region. That is,
the trench T1 is formed by the first region having a height of its
upper surface configured lower than those of the second region and
the third region. In the example shown, the upper surface of the
second region and the upper surface of the third region have the
same height. As shown, the embedded insulating layer EI is
planarized so as to attain the same height as the upper surfaces of
the channel semiconductor layer CR on the second region and the
third region.
[0071] In the example shown in FIG. 8, the gate electrode layer GE
is formed in an upper part of the second region sandwiched by inner
sidewall surfaces of the two trenches T1, and the diffusion layer
DL is formed in each of the third regions adjacent to outer
sidewall surfaces of the two trenches T1. In other words, the
diffusion layer DL is formed at both ends of the channel
semiconductor layer CR. In other words, the transistor SWTr
includes: a first insulating layer having on its surface a concave
part and a convex part adjacent to the concave part; a
semiconductor layer disposed along the surface including the
concave part and the convex part of the first insulating layer; and
a gate electrode layer disposed via the semiconductor layer and a
gate insulating film, on the convex part. By adopting such a
structure, the channel length of the transistor SWTr can be made
larger than when the trench T1 is not formed. A method of
manufacturing such a transistor structure will be described
later.
[0072] The diffusion layer DL is formed by an impurity being
implanted in part of the channel semiconductor layer CR, and
functions as a source/drain region of the transistor SWTr. A region
between the second region where the gate electrode layer GE is
formed and the diffusion layer DL, of the channel semiconductor
layer CR, that is, the channel semiconductor layer CR along a
sidewall surface and upper surface of the first region is not
implanted with an impurity, or is implanted with an impurity of a
concentration 10 times or more less compared to that of the
diffusion layer DL. This region is called an offset region of the
diffusion layer DL. For example, a large offset region is required
as a means for improving withstand voltage when a high voltage is
applied to the gate electrode layer GE or drain.
[0073] As shown in FIG. 8, the transistor SWTr of the present
embodiment is formed such that part of the offset region follows a
bottom surface and sidewall surface of the trench T1 formed in the
base insulating layer BI, and has a partly folded kind of shape.
Forming in this way makes it possible for a transistor SWTr
provided with a large offset region to be made small on a plane,
hence a reduction of chip area can be achieved. Now, when an offset
length in a plane indicated by d in FIG. 8 is small, respective
potentials interfere with each other between the gate electrode and
diffusion layers, hence an offset effect ends up weakening.
Therefore, it is desirable that an offset length d is to a certain
extent large. Specifically, the offset length d is desirably 600 nm
or more.
[0074] Moreover, in the present embodiment, the trench T1 formed in
the base insulating layer BI has an aspect ratio in cross section
whose value is close to 1.
[0075] Next, manufacturing steps of the transistor according to the
first embodiment will be described with reference to FIGS. 9A to
9H.
[0076] Upper portions of FIGS. 9A to 9E, FIG. 9F, and upper
portions of FIGS. 9G and 9H are cross-sectional views in the YZ
plane; and lower portions of FIGS. 9A to 9E, 9G, and 9H are arrow
views of the XY plane as seen from above.
[0077] First, as shown in FIG. 9A, a base insulating layer BI'
which will become the base insulating layer BI is formed by
depositing silicon oxide (SiO.sub.2), for example. Next, as shown
in FIG. 9B, the two trenches T1 are formed in part of the base
insulating layer BI' by implementing anisotropic dry etching after
patterning by photolithography, for example, whereby the base
insulating layer BI is formed. The base insulating layer BI may be
formed by silicon nitride (SiN), for example, instead of silicon
oxide.
[0078] Next, as shown in FIG. 9C, polysilicon, for example, is
deposited so as to follow a surface of the base insulating layer BI
including a bottom surface and sidewall surface of the trench T1,
and a channel semiconductor layer CR' which will become the channel
semiconductor layer CR is deposited. As a result, a trench T2'
which will become the trench T2 in a later step, is formed.
[0079] Next, as shown in FIG. 9D, in order that the channel
semiconductor layer CR' on parts of the second region and the third
region and part of the channel semiconductor layer CR' in the
trench T1 are continuous, another part of the channel semiconductor
layer CR' is removed by implementing anisotropic dry etching after
patterning by photolithography, for example, whereby the channel
semiconductor layer CR' undergoes division processing in the X
direction. As a result, an upper surface of the channel
semiconductor layer CR' divided in the trench T1 becomes the trench
T2. Moreover, division of the channel semiconductor layer CR'
results in part of the trench T1 being exposed. At this time, the
channel semiconductor layer CR', by undergoing division processing
in the X direction without being divided in the Y direction,
attains a shape extending as a whole in the Y direction so as to
follow surfaces of the second region and the third region and a
bottom surface and sidewall surface of the trench T1. Note that
channel semiconductor layers CR and CR' formed with a uniform
thickness along the trench T1 are described for reference, but the
likes of shape, size or thickness may be arbitrarily changed.
[0080] Next, as shown in FIG. 9E, the embedded insulating layer EI
(for example, silicon oxide) is deposited on the trenches T1 and
T2, and planarization processing by CMP (Chemical Mechanical
Polishing) is further implemented, whereby the trenches T1 and T2
are embedded. The embedded insulating layer EI may be formed by
silicon nitride instead of silicon oxide.
[0081] Next, as shown in FIG. 9F, for example, polysilicon and
polysilicon to which an impurity has been added are deposited in
this order, and a gate insulating film GI' which will become the
gate insulating film GI and a gate electrode layer GE' which will
become the gate electrode layer GE are formed on surfaces of the
embedded insulating layer EI and a convex part of the channel
semiconductor layer CR'.
[0082] Next, as shown in FIG. 9G, the gate electrode layer GE'
undergoes division processing in the X direction by implementing
anisotropic dry etching after patterning by photolithography, for
example. At this time, the gate insulating film GI' need not be
divided. Moreover, an end of the gate electrode GE is formed so as
to overlap in the Z direction the channel semiconductor layer CR'
formed along a sidewall surface on a gate electrode layer GE side
of the trench T1.
[0083] Next, as shown in FIG. 9H, an impurity is implanted in an
entire surface of the base insulating layer BI by ion implantation,
for example, and the diffusion layer DL is formed at both ends of
the channel semiconductor layer CR, whereby the same structure as
in FIG. 8 is formed. At this time, the gate electrode layer GE is
formed so as to overlap the channel semiconductor layer CR. That
is, a length in the X direction of the gate electrode layer GE is
formed so as to be larger than a length in the X direction of the
channel semiconductor layer CR on the second region. As a result,
due to the gate electrode layer GE or the embedded insulating layer
EI, it is difficult for the impurity to be implanted in,
respectively, the second region directly below the gate electrode
layer GE or a region where the trench T1 has been embedded (first
region). Therefore, the diffusion layer DL can be formed by
self-alignment by a method implanting the entire surface without
performing patterning by photolithography, and a low cost can be
achieved. Possible materials of the impurity of the diffusion layer
DL and the offset region when implanted with the impurity at low
concentration, are an impurity configuring an n type semiconductor,
for example, a pentavalent element such as arsenic (As) and
phosphorus (P), an impurity configuring a p type semiconductor, for
example, a trivalent element such as boron (B) and indium (In), or
a combination of these materials.
[0084] Modified examples of the transistor SWTr according to the
first embodiment are shown with reference to FIGS. 10 and 11. In
the case of FIG. 10, the gate electrode layer GE does not overlap
the channel semiconductor layer CR. Even in this case, a similar
structure is obtained by performing patterning by photolithography,
for example.
[0085] In the case of FIG. 11, only one trench T1 is formed in the
base insulating layer BI. That is, the base insulating layer BI
includes the following in its B-B cross section, sequentially from
the left side of FIG. 11, namely: the third region where the
diffusion layer DL is formed; the first region where the trench T1
is formed; the second region having the gate electrode layer GE
formed in its upper part; and the third region having the diffusion
layer DL formed at its end. Even in this case, the first region has
a height of its upper surface configured lower than those of the
second region and the third region. By making the trench T1 only on
one side of the gate electrode layer GE in this way, it is also
possible to make a different offset length and to form a transistor
SWTr in which a current is easily led out only from the diffusion
layer DL on one side configuring a short offset.
Second Embodiment
[0086] Next, a second embodiment will be described with reference
to FIGS. 12 to 14. An overall configuration of a nonvolatile
semiconductor memory device according to the second embodiment is
similar to that of the first embodiment (FIGS. 1 to 6), hence a
detailed description thereof will be omitted. In the second
embodiment, the structure of the transistor SWTr is different from
in the first embodiment.
[0087] FIG. 12 is a cross-sectional view in the YZ plane of the
transistor SWTr according to the second embodiment. Similarly to in
the first embodiment, the transistor SWTr includes the base
insulating layer BI (first insulating layer), the channel
semiconductor layer CR (semiconductor layer), the gate insulating
film GI, the gate electrode layer GE, and the diffusion layer DL.
In addition, part of the channel semiconductor layer CR is formed
so as to follow a bottom surface and sidewall surface of a trench
T3 formed in the base insulating layer BI, and has a folded kind of
shape. A trench T4 is formed by an upper surface of the channel
semiconductor layer CR along the trench T3. The case where cross
sections of the trenches T3 and T4 are trapezoids is shown, but
another shape may also be adopted for the trenches T3 and T4. The
example shown shows the case where each of the trenches T3 and T4
respectively all have similar shapes, but the present embodiment is
not limited to this, and each of the trenches T3 and T4 may also be
given different shapes. Moreover, the diffusion layer DL is formed
at both ends of the channel semiconductor layer CR. Now, similarly
to in the first embodiment, a region where the trench T3 is formed,
of the base insulating layer BI, is assumed to be a first region; a
region where the gate electrode layer GE is formed, of the base
insulating layer BI, is assumed to be a second region; and a region
other than the first region and the second region, of the base
insulating layer BI, is assumed to be a third region. Even in the
second embodiment, the first region has a height of its upper
surface configured lower than those of the second region and the
third region.
[0088] In the present embodiment, contrary to in the first
embodiment, a plurality (in FIG. 12, three each on either side, a
total of six) of the trenches T3 are formed in a region between the
second region where the gate electrode layer GE is formed and the
diffusion layer DL. That is, the base insulating layer BI includes
three first regions on both sides sandwiching the second region
where the gate electrode GE is formed, and has a structure in its
B-B cross section that includes the following, sequentially from
the left side of FIG. 12, namely: three each alternately of the
third regions and the first regions; the second region; and three
each alternately of the first regions and the third regions.
Moreover, contrary to in the first embodiment, aspect ratios in
cross section of each of the trenches T3 are formed so as to be
larger than 1. By thus forming a plurality of long-and-thin
trenches T3 respectively on both sides sandwiching the gate
electrode layer GE, it is possible that while the offset length in
the plane indicated by d in FIGS. 8 and 12 is maintained unchanged,
an effective offset length is further increased. Moreover, the
trench T3 formed in the base insulating layer BI is embedded
simultaneously to when the gate insulating film GI is formed on the
channel semiconductor layer CR. Details of this embedding will be
described in the following manufacturing steps.
[0089] Manufacturing steps of the transistor according to the
second embodiment will be described with reference to FIGS. 13A to
13F. Upper portions of FIGS. 13A to 13F are cross-sectional views
in the YZ plane; and lower portions of FIGS. 13A to 13F are arrow
views of the XY plane as seen from above.
[0090] First, as shown in FIG. 13A, the base insulating layer BI
formed by depositing silicon oxide (SiO.sub.2) has the trench T3
formed therein, by performing patterning by photolithography and
then implementing anisotropic dry etching. At this time, contrary
to in the case of FIG. 9B, patterning is performed such that a
plurality of the trenches T3 are respectively formed on both sides
of the region where the gate electrode layer GE is formed (second
region). At this time, contrary to in the first embodiment, aspect
ratios of each of the trenches T3 are formed so as to be larger
than 1. By forming the trench T3 in this way, even if a length of d
indicated in FIG. 12 is about the same as in the case where there
is one trench T3 (is about the same as a length of d indicated in
FIG. 8), a plurality of longer-and-thinner trenches T3 are formed
in the same region, whereby the effective offset length can be
further increased. Note that the number and size of the trenches
T3, and intervals between each of the trenches T3 are not limited
to those shown, and may be appropriately changed.
[0091] Next, as shown in FIG. 13B, polysilicon, for example, is
deposited so as to follow a surface of the base insulating layer BI
including a bottom surface and sidewall surface of the trench T3,
whereby a channel semiconductor layer CR' is formed. At this time,
by preventing the inside of the trench T3 from being completely
filled, a trench T4' which will become the trench T4 in a later
step, can be formed.
[0092] Next, as shown in FIG. 13C, in order that the channel
semiconductor layer CR' on parts of the second region and the third
region and part of the channel semiconductor layer CR' in the
trench T3 are continuous, another part of the channel semiconductor
layer CR' is removed by implementing anisotropic dry etching after
patterning by photolithography, whereby the channel semiconductor
layer CR' undergoes division processing in the X direction. As a
result, an upper surface of the channel semiconductor layer CR'
divided in the trench T3 becomes the trench T4. Moreover, division
of the channel semiconductor layer CR' results in part of the
trench T3 being exposed. At this time, the channel semiconductor
layer CR', by undergoing division processing in the X direction
without being divided in the Y direction, attains a shape extending
as a whole in the Y direction so as to follow upper surfaces of the
second region and the third region and a bottom surface and
sidewall surface of the trench T3.
[0093] Next, the trenches T3 and T4 are embedded by an insulating
layer similarly to in FIG. 9, but in the present embodiment, as
shown in FIG. 13D, silicon oxide (SiO.sub.2) which will become the
gate insulating film GI' can be deposited on the channel
semiconductor layer CR' so as to embed the trenches T3 and T4. By
thus adjusting a width in the Y direction of the trench T3 in the
step shown in FIG. 13A and a width in the Y direction of the trench
T3 in the step shown in FIG. 13C, embedding by the embedded
insulating layer EI and planarization processing can be omitted,
and manufacturing costs can be lowered.
[0094] Specifically, in order for embedding by the embedded
insulating layer EI to be omitted and for the trenches T3 and T4 to
be embedded simultaneously to deposition of the gate insulating
film GI', it becomes a condition that, if a width in the Y
direction of an opening of the trench T3 is assumed to be a, a
thickness of the channel semiconductor layer CR in a direction
perpendicular to a surface of the base insulating layer BI
including the trench T3 is assumed to be b, a distance between an
end in the X direction of the opening of the trench T3 and an end
in the X direction of that of the trench T4 shown in the lower
portion of FIG. 13C is assumed to be c, and a thickness in the
stacking direction of the gate insulating film GI shown in FIG. 13D
is assumed to be e, then a.ltoreq.2 (b+e) and c.ltoreq.2e are
satisfied. In the case that this condition cannot be satisfied, it
is also possible for the trench T3 to be embedded by the embedded
insulating layer EI and for planarization processing to be
performed, similarly to in the first embodiment. The example shown
in FIG. 13D shows a state where the trench T3 has been embedded
simultaneously to deposition of the gate insulating film GI.
[0095] Next, as shown in FIG. 13E, for example, polysilicon to
which an impurity has been added is deposited on the gate
insulating film GI', and the gate electrode layer GE is formed.
[0096] Implementing anisotropic dry etching after patterning by
photolithography and performing division processing in the Y
direction of the gate electrode layer GE' and the gate insulating
film GI' results in a structure in which the channel semiconductor
layer CR', the gate insulating film GI, and the gate electrode
layer GE are disposed in this order on the second region. At this
time, the gate insulating film GI' need not be divided. Moreover,
the gate electrode layer GE is formed so as to overlap the channel
semiconductor layer CR of a sidewall surface of the trench T4
adjacent to the second region. That is, a length in the X direction
of the gate electrode layer GE is formed so as to be larger than a
length in the X direction of the channel semiconductor layer CR on
the second region.
[0097] Next, as shown in FIG. 13F, after performing patterning in
advance, an impurity is implanted in entire surfaces of the base
insulating layer BI and the channel semiconductor layer CR' by the
likes of ion implantation, and the diffusion layer DL is formed at
both ends of the channel semiconductor layer CR, whereby the same
structure as in FIG. 12 is formed. At this time, in a method where
the impurity is implanted in entire surfaces, the impurity ends up
being implanted also in part of the offset region, hence the
impurity must be implanted after patterning has been performed in
advance by photolithography, for example. Possible materials of the
impurity are an impurity configuring an n type semiconductor, for
example, a pentavalent element such as arsenic (As) and phosphorus
(P), an impurity configuring a p type semiconductor, for example, a
trivalent element such as boron (B) and indium (In), or a
combination of these materials.
[0098] FIG. 14 is a cross-sectional view showing a modified example
of the transistor SWTr according to the second embodiment. In this
example, a plurality of the trenches T3 are respectively formed on
both sides sandwiching the gate electrode layer GE, but the number
of trenches T3 formed on both sides is different on the left and on
the right. By changing the number of trenches T3 in this way, it is
also possible to make a different offset length and, similarly to
in the modified example shown in FIG. 11, to form a transistor SWTr
in which a current is easily led out only from the diffusion layer
DL on one side configuring a short offset.
[0099] As described above, even in the second embodiment, part of
the channel semiconductor layer CR is formed so as to follow bottom
surfaces and sidewall surfaces of the plurality of trenches T3
formed in the base insulating layer BI, and has a partly folded
kind of shape. Forming in this way makes it possible for a
transistor SWTr provided with a large offset region to be made
small on a plane, and makes it possible to suppress an increase in
area occupied by the word line connection circuit SW and reduce
chip area as a whole.
[0100] While certain embodiments have been described, these
embodiments have been presented by way of example only, and are not
intended to limit the scope of the inventions. Indeed, the novel
methods and systems described herein may be embodied in a variety
of other forms; furthermore, various omissions, substitutions and
changes in the form of the methods and systems described herein may
be made without departing from the spirit of the inventions. The
accompanying claims and their equivalents are intended to cover
such forms or modifications as would fall within the scope and
spirit of the inventions.
[0101] For example, in the above-described embodiments, the memory
string of the NAND type flash memory adopts the semiconductor layer
35 extending linearly in the stacking direction. However, it is
also possible to adopt a configuration of the kind where the offset
region of the channel semiconductor layer CR of the transistor SWTr
is folded, like that of the above-described embodiments, in a NAND
type flash memory that has a structure in which the semiconductor
layer 35 is instead folded back in a U shape, for example.
Moreover, the configurations of the above-described embodiments are
not limited to a three-dimensional type NAND type flash memory, and
may also be applied to another three-dimensional memory, for
example, a resistance varying memory, and so on. That is, the
configurations of the above-described embodiments may be applied to
various forms of three-dimensionally disposed memories.
* * * * *