U.S. patent application number 14/941100 was filed with the patent office on 2017-05-18 for plasmonic mode iii-v laser as on-chip light source.
The applicant listed for this patent is INTERNATIONAL BUSINESS MACHINES CORPORATION. Invention is credited to Ning Li, Ke Liu, Devendra K. Sadana, Volker J. Sorger.
Application Number | 20170141535 14/941100 |
Document ID | / |
Family ID | 58691645 |
Filed Date | 2017-05-18 |
United States Patent
Application |
20170141535 |
Kind Code |
A1 |
Li; Ning ; et al. |
May 18, 2017 |
PLASMONIC MODE III-V LASER AS ON-CHIP LIGHT SOURCE
Abstract
A plasmonic light source includes a substrate and a square
nano-cavity formed on the substrate. The nano-cavity includes a
quantum well structure. The quantum well structure includes III-V
materials. A plasmonic metal is formed as an electrode on the
square nano-cavity and is configured to excite surface plasmons
with the quantum well structure to generate light. Complementary
metal oxide semiconductor (CMOS) devices are formed on the
substrate.
Inventors: |
Li; Ning; (White Plains,
NY) ; Liu; Ke; (Arlington, VA) ; Sadana;
Devendra K.; (Pleasantville, NY) ; Sorger; Volker
J.; (Alexandria, VA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
Armonk |
NY |
US |
|
|
Family ID: |
58691645 |
Appl. No.: |
14/941100 |
Filed: |
November 13, 2015 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01S 5/021 20130101;
H01S 5/1042 20130101; H01S 5/3401 20130101; H01S 5/34346 20130101;
G02B 6/136 20130101; H01S 5/04252 20190801; G02B 6/12002 20130101;
G02B 6/1226 20130101; G02B 6/43 20130101; H01S 5/026 20130101; H01S
5/1046 20130101; G02B 6/12004 20130101 |
International
Class: |
H01S 5/042 20060101
H01S005/042; H01S 5/343 20060101 H01S005/343; H01S 5/026 20060101
H01S005/026; H01S 5/10 20060101 H01S005/10 |
Goverment Interests
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
[0001] This invention was made with Government support under
contract number: FA 9559-14-1-0215 awarded by U.S. Air Force. The
Government has certain rights in this invention.
Claims
1. A plasmonic light source, comprising: a substrate; a square
nano-cavity formed on the substrate, the nano-cavity including a
quantum well structure, the quantum well structure including III-V
materials; a plasmonic metal formed as an electrode on the square
nano-cavity and configured to excite surface plasmons with the
quantum well structure to generate light; and complementary metal
oxide semiconductor (CMOS) devices formed on the substrate.
2. The light source as recited in claim 1, further comprising a
waveguide disposed adjacent to and spaced apart from the square
nano-cavity and configured to couple plasmonic light from the
square nano-cavity.
3. The light source as recited in claim 1, further comprising a
waveguide and the square nano-cavity being disposed in-line within
the waveguide and configured to couple plasmonic light from the
square nano-cavity.
4. The light source as recited in claim 3, wherein the plasmonic
metal is disposed transversely to a longitudinal direction of the
waveguide and extends beyond the square nano-cavity and the
waveguide on at least one side of the nano-cavity and the
waveguide.
5. The light source as recited in claim 1, wherein the quantum well
structure is sandwiched between buffer layers.
6. The light source as recited in claim 1, wherein the plasmonic
metal is compatible with CMOS processing.
7. The light source as recited in claim 1, wherein the plasmonic
light source includes an operating temperature compatible with the
CMOS devices on a same chip.
8. The light source as recited in claim 1, wherein the plasmonic
light source includes one of a laser or a light emitting diode.
9. A plasmonic light source, comprising: a silicon substrate; a
dielectric layer formed on the silicon substrate; a square
nano-cavity bonded to the dielectric layer, the nano-cavity
including a quantum well structure, the quantum well structure
including III-V materials; a plasmonic metal formed as an electrode
on the square nano-cavity and configured to excite surface plasmons
with the quantum well structure to generate light; a waveguide
formed on the dielectric layer to couple light from the square
nano-cavity; and complementary metal oxide semiconductor (CMOS)
devices formed in the silicon substrate.
10. The light source as recited in claim 9, wherein the waveguide
is disposed adjacent to and spaced apart from the square
nano-cavity and configured to couple plasmonic light from the
square nano-cavity.
11. The light source as recited in claim 9, wherein the waveguide
and the square nano-cavity are disposed in-line and configured to
couple plasmonic light from the square nano-cavity.
12. The light source as recited in claim 11, wherein the plasmonic
metal is disposed transversely to a longitudinal direction of the
waveguide and extends beyond the square nano-cavity and the
waveguide on at least one side of the nano-cavity and the
waveguide.
13. The light source as recited in claim 9, wherein the quantum
well structure is sandwiched between buffer layers.
14. The light source as recited in claim 9, wherein the plasmonic
metal is compatible with CMOS processing.
15. The light source as recited in claim 9, wherein the plasmonic
light source includes an operating temperature compatible with the
CMOS devices on a same chip.
16. The light source as recited in claim 9, wherein the plasmonic
light source includes one of a laser or a light emitting diode.
17. A method for forming an on-chip plasmonic light source,
comprising: forming a quantum well structure on a III-V substrate
configured for surface plasmon generation; forming an oxide on the
quantum well structure; oxide wafer bonding the oxide on the
quantum well structure with an oxide formed on a silicon substrate
by oxide wafer bonding, the silicon substrate including
complementary metal oxide semiconductor (CMOS) devices formed
thereon; etching away the III-V substrate to transfer the quantum
well structure to the silicon substrate; forming a plasmonic metal
as an electrode on the quantum well structure; and patterning the
quantum well structure to form a square nano-cavity light source on
the silicon substrate.
18. The method as recited in claim 17, further comprising forming a
waveguide disposed adjacent to and spaced apart from the square
nano-cavity.
19. The method as recited in claim 17, further comprising forming a
waveguide with the square nano-cavity light source being disposed
in-line within the waveguide.
20. The method as recited in claim 19, wherein the plasmonic metal
is disposed transversely to a longitudinal direction of the
waveguide and extends beyond the square nano-cavity and the
waveguide on at least one side of the nano-cavity and the
waveguide.
Description
BACKGROUND
[0002] Technical Field
[0003] The present invention relates to plasmonic lasers, and more
particularly to nano-lasers formed on-chip to provide high speed
modulation with less energy loss and a smaller footprint for high
waveguide coupling efficiency.
[0004] Description of the Related Art
[0005] Optical devices are often formed on III-V substrates due to
their high speed performance capabilities. Laser devices may be
formed off-chip from Si substrates with field effect transistors.
These off-chip designs suffer from high cost, slow speed, high
energy consumption as well as a large foot print.
SUMMARY
[0006] A plasmonic light source includes a substrate and a square
nano-cavity formed on the substrate. The nano-cavity includes a
quantum well structure. The quantum well structure includes III-V
materials. A plasmonic metal is formed as an electrode on the
square nano-cavity and is configured to excite surface plasmons
with the quantum well structure to generate light. Complementary
metal oxide semiconductor (CMOS) devices are formed on the
substrate.
[0007] Another plasmonic light source includes a silicon substrate,
a dielectric layer formed on the silicon substrate and a square
nano-cavity bonded to the dielectric layer. The nano-cavity
includes a quantum well structure, and the quantum well structure
includes III-V materials. A plasmonic metal is formed as an
electrode on the square nano-cavity and is configured to excite
surface plasmons with the quantum well structure to generate light.
A waveguide is formed on the dielectric layer to couple light from
the square nano-cavity. Complementary metal oxide semiconductor
(CMOS) devices are formed in the silicon substrate.
[0008] A method for forming an on-chip plasmonic light source
includes forming a quantum well structure on a III-V substrate
configured for surface plasmon generation; forming an oxide on the
quantum well structure; oxide wafer bonding the oxide on the
quantum well structure with an oxide formed on a silicon substrate
by oxide wafer bonding, the silicon substrate including
complementary metal oxide semiconductor (CMOS) devices formed
thereon; etching away the III-V substrate to transfer the quantum
well structure to the silicon substrate; forming a plasmonic metal
as an electrode on the quantum well structure; and patterning the
quantum well structure to form a square nano-cavity light source on
the silicon substrate.
[0009] These and other features and advantages will become apparent
from the following detailed description of illustrative embodiments
thereof, which is to be read in connection with the accompanying
drawings.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
[0010] The disclosure will provide details in the following
description of preferred embodiments with reference to the
following figures wherein:
[0011] FIG. 1 is a perspective view of a square plasmonic light
source integrated on a substrate in accordance with the present
principles;
[0012] FIG. 2 is a perspective view of a square plasmonic light
source with an offset waveguide integrated on a substrate in
accordance with the present principles;
[0013] FIG. 3 is a perspective view of a square plasmonic light
source in-line with a waveguide in accordance with the present
principles;
[0014] FIG. 4 is a perspective view of a square plasmonic light
source in-line with a waveguide and including an extended plasmonic
metal electrode in accordance with the present principles;
[0015] FIG. 5 is a cross-sectional view of a square plasmonic light
source integrated on a silicon substrate in accordance with the
present principles;
[0016] FIG. 6 shows intensity profiles for x, y and z coordinates
(in microns) for square and in-line cavities indicating mode
confinement by total internal reflection at cavity boundaries in
accordance with the present principles;
[0017] FIG. 7 shows a perspective view of a nano-laser and two
cross-section views taken as section planes A-A and B-B showing
temperature profiles of the nano-laser in accordance with the
present principles; and
[0018] FIG. 8 is a block/flow diagram showing a method for forming
a plasmonic light source in accordance with illustrative
embodiments.
DETAILED DESCRIPTION
[0019] In accordance with the present principles, devices and
methods are provided for plasmonic lasers. In one embodiment, a
plasmonic square cavity laser is provided to enhance modulation
speed, reduce foot print, and increase light coupling efficiency
into a waveguide. An on-chip light source results in less energy
loss than for off-chip designs, e.g., 10-15 dB less energy needed
for on-chip lasers. The on-chip laser can be a direct modulated
laser with no external modulator needed. This reduces the device
footprint along with other considerations. On-chip lasers can be
very densely packed to provide lower packaging costs. With on-chip
designs, a large number of inputs/outputs (I/Os) are available to
satisfy higher bandwidth requirements. In addition, there is low
parasitic capacitance for high speed applications.
[0020] The plasmonic square cavity laser may be formed using III-V
materials and placed on IV substrates, such as Si, to enable the
formation of additional circuits using complementary metal oxide
semiconductor (CMOS) processing. In this way, the square cavity
plasmonic mode is employed with III-V active materials and employed
as an on-chip light source for optical interconnects. A
plasmonic/photonic hybrid mode is employed for enhancing light
coupling efficiency into a waveguide (also on-chip). The
plasmonic/photonic hybrid mode includes employing plasmonic surface
excitation to generate photons. The plasmonic square cavity laser
achieves high speed modulation, low energy consumption, small foot
print and high light coupling efficiency into waveguides. The
plasmonic square cavity laser is also compatible with CMOS
electronics and has suitable system architecture for on-chip
optical interconnects and high performance computers.
[0021] It is to be understood that the present invention will be
described in terms of a given illustrative architecture; however,
other architectures, structures, substrate materials and process
features and steps may be varied within the scope of the present
invention.
[0022] It will also be understood that when an element such as a
layer, region or substrate is referred to as being "on" or "over"
another element, it can be directly on the other element or
intervening elements may also be present. In contrast, when an
element is referred to as being "directly on" or "directly over"
another element, there are no intervening elements present. It will
also be understood that when an element is referred to as being
"connected" or "coupled" to another element, it can be directly
connected or coupled to the other element or intervening elements
may be present. In contrast, when an element is referred to as
being "directly connected" or "directly coupled" to another
element, there are no intervening elements present.
[0023] The present embodiments may include a design for an
integrated circuit chip, which may be created in a graphical
computer programming language, and stored in a computer storage
medium (such as a disk, tape, physical hard drive, or virtual hard
drive such as in a storage access network). If the designer does
not fabricate chips or the photolithographic masks used to
fabricate chips, the designer may transmit the resulting design by
physical means (e.g., by providing a copy of the storage medium
storing the design) or electronically (e.g., through the Internet)
to such entities, directly or indirectly. The stored design is then
converted into the appropriate format (e.g., GDSII) for the
fabrication of photolithographic masks, which typically include
multiple copies of the chip design in question that are to be
formed on a wafer. The photolithographic masks are utilized to
define areas of the wafer (and/or the layers thereon) to be etched
or otherwise processed.
[0024] Methods as described herein may be used in the fabrication
of integrated circuit chips. The resulting integrated circuit chips
can be distributed by the fabricator in raw wafer form (that is, as
a single wafer that has multiple unpackaged chips), as a bare die,
or in a packaged form. In the latter case the chip is mounted in a
single chip package (such as a plastic carrier, with leads that are
affixed to a motherboard or other higher level carrier) or in a
multichip package (such as a ceramic carrier that has either or
both surface interconnections or buried interconnections). In any
case the chip is then integrated with other chips, discrete circuit
elements, and/or other signal processing devices as part of either
(a) an intermediate product, such as a motherboard, or (b) an end
product. The end product can be any product that includes
integrated circuit chips, ranging from toys and other low-end
applications to advanced computer products having a display, a
keyboard or other input device, and a central processor.
[0025] It should also be understood that material compounds will be
described in terms of listed elements, e.g., AlGaAs. These
compounds include different proportions of the elements within the
compound, e.g., AlGaAs includes Al.sub.x,Ga.sub.1-xAs, where x is
less than or equal to 1, etc. In addition, other elements may be
included in the compound, such as, e.g., AlInGaAs, and still
function in accordance with the present principles. The compounds
with additional elements will be referred to herein as alloys.
[0026] Reference in the specification to "one embodiment" or "an
embodiment" of the present principles, as well as other variations
thereof, means that a particular feature, structure,
characteristic, and so forth described in connection with the
embodiment is included in at least one embodiment of the present
principles. Thus, the appearances of the phrase "in one embodiment"
or "in an embodiment", as well any other variations, appearing in
various places throughout the specification are not necessarily all
referring to the same embodiment.
[0027] It is to be appreciated that the use of any of the following
"/", "and/or", and "at least one of", for example, in the cases of
"A/B", "A and/or B" and "at least one of A and B", is intended to
encompass the selection of the first listed option (A) only, or the
selection of the second listed option (B) only, or the selection of
both options (A and B). As a further example, in the cases of "A,
B, and/or C" and "at least one of A, B, and C", such phrasing is
intended to encompass the selection of the first listed option (A)
only, or the selection of the second listed option (B) only, or the
selection of the third listed option (C) only, or the selection of
the first and the second listed options (A and B) only, or the
selection of the first and third listed options (A and C) only, or
the selection of the second and third listed options (B and C)
only, or the selection of all three options (A and B and C). This
may be extended, as readily apparent by one of ordinary skill in
this and related arts, for as many items listed.
[0028] Referring now to the drawings in which like numerals
represent the same or similar elements and initially to FIGS. 1-4,
integrated nano-cavity plasmonic laser light sources 100, 200, 300,
400 are shown in accordance with the present principles. The laser
light sources 100, 200, 300, 400 confine light at a sub-wavelength
scale far below Rayleigh's diffraction limit of light, by storing
some of the light energy through electron oscillations called
surface plasmon polaritons. Due to surface plasmon excitations, the
laser light sources 100, 200, 300, 400 may be referred to as
Surface Plasmon Amplification by Stimulated Emission of Radiation
or Spasers.
[0029] Referring to FIG. 1, a square cavity integrated nano-cavity
plasmonic laser light source 100 is shown in accordance with one
embodiment. The laser 100 includes a periodic quantum well (QW)
arrangement or structure 102 sandwiched between top 104 and bottom
106 buffer/contact layers. In one embodiment, the QW arrangement
102 includes GaAs QWs with alternating layers of different GaAs
materials (e.g., AlGaAs and GaAs). The alternating layers may
number between, e.g., 10 and 100 and include a relationship with
the wavelength of generated light to achieve light amplification.
In one embodiment, the QW 102 (or multiple quantum well (MQW))
active regions may include alternating layers of, e.g., 10 nm
GaAs/10 nm AlGaAs (Al.sub.0.3, Ga.sub.0.7As).
[0030] The buffer layers 104 and 106 may include a material such as
Al.sub.0.3Ga.sub.0.7As, although other compositions and materials
may be employed. Instead of or in addition to the buffer layers 104
and 106, highly doped contact layers (104, 106) may be formed. The
top contact layer 104 may be inserted between the QW 102 and a
plasmonic metal 108 serving as a top ohmic contact layer for the
electrically pumped laser/diode. The contact layer 104 may be,
e.g., 20 nm thick and may include highly doped GaAs. A second
electrode (106 or connected to layer 106) can be formed using a
bottom n+doped layer or a side contact may be employed (e.g., for
the oxide bonded device). A thin highly doped layer for contact 106
is employed for making the bottom side contact (106).
[0031] The QW arrangement 102 includes III-V gain materials (e.g.,
GaAs QWs) having a plasmonic metal 108 formed on top. The metal 108
may include, e.g., Au, although other metals may be employed (e.g.,
Cu, Ag, Al, etc.). The light generated in the QW arrangement 102
causes plasmonic activity in the plasmonic material 108 to excite
electrons in the metal 108. The source 100 generates light using
the plasmonic/photonic properties of the device to produce light
(as a laser or light emitting diode (LED)).
[0032] The metal 108 may include a thickness of between about 50 nm
to about 300 nm. The metal 108 may also provide heat sink
properties to reduce the operating temperature of the device 100.
The plasmonic metal 108 preferably includes a dielectrically-loaded
surface plasmon polariton (DLSPP) mode.
[0033] The nano-cavities of the QW arrangement 102 are formed on a
substrate 110. The laser 100 may be bonded on SiO.sub.2/Si (110) or
monolithically grown on a GaAs substrate (110). In one embodiment,
the Si substrate 110 is compatible with CMOS processing. The
substrate 110 may include field effect transistors 112 or other
devices previously formed thereon. In one embodiment, the square
cavity integrated nano-cavity plasmonic light source 100 may
include a 250 nm.times.250 nm footprint.
[0034] Referring to FIG. 2, a square cavity integrated nano-cavity
plasmonic laser light source 200 is shown in accordance with
another embodiment. The laser 200 includes a periodic quantum well
(QW) arrangement 102 sandwiched between top 104 and bottom 106
buffer/contact layers. The QW arrangement 102 includes III-V gain
materials (e.g., GaAs QWs) having a metal 108 formed on top. The
laser 200 may be bonded on SiO.sub.2/Si (110) or monolithically
grown on a GaAs substrate (110). In one embodiment, the square
cavity integrated nano-cavity plasmonic laser light source 200 may
include a 250 nm.times.250 nm footprint of cavity size. The QW
arrangement 102 includes III-V gain materials (e.g., GaAs QWs)
having the metal 108 formed on top.
[0035] In this embodiment, a bus waveguide 202 may be formed
adjacent to the square cavity laser 200. The square cavity laser
200 may be spaced apart from the waveguide 202 (by length 1) or the
square cavity laser 200 may formed in contact with the waveguide
202. The bus waveguide 202 may include any suitable propagation
material. In one embodiment, the bus waveguide 202 includes AlGaAs
(e.g., Al.sub.0.3Ga.sub.0.7As). In other embodiments, SiNx may be
employed for the bus waveguide 202.
[0036] Referring to FIG. 3, a square cavity integrated nano-cavity
plasmonic laser light source 300 is shown in accordance with
another embodiment. The laser 300 includes a periodic quantum well
(QW) arrangement 102 sandwiched between top 104 and bottom 106
buffer/contact layers. The QW arrangement 102 includes III-V gain
materials (e.g., GaAs QWs) having the metal 108 formed on top. The
laser 300 may be bonded on SiO.sub.2/Si (110) or monolithically
grown on a GaAs substrate (110). In one embodiment, the square
cavity integrated nano-cavity plasmonic laser light source 300 may
include a 250 nm.times.250 nm footprint of cavity size.
[0037] In this embodiment, the square cavity integrated nano-cavity
plasmonic laser light source 300 is placed in-line with a bus
waveguide 302 that may be formed prior to the square cavity laser
300. The square cavity laser 300 may be placed with the waveguide
302 on the substrate 110. The bus waveguide 302 may include any
suitable propagation material. In one embodiment, the bus waveguide
302 includes AlGaAs (e.g., Al.sub.0.3Ga.sub.0.7As). In other
embodiments, SiNx may be employed for the bus waveguide 302.
[0038] Referring to FIG. 4, a square cavity integrated nano-cavity
plasmonic laser light source 400 is shown in accordance with
another embodiment. The laser 400 includes a periodic quantum well
(QW) arrangement 102 sandwiched between top 104 and bottom 106
buffer/contact layers. The QW arrangement 102 includes III-V gain
materials (e.g., GaAs QWs) having a metal 408 formed on top. The
laser 400 may be bonded on SiO.sub.2/Si (110) or monolithically
grown on a GaAs substrate (110). In one embodiment, the square
cavity integrated nano-cavity plasmonic laser light source 400 may
include a 250 nm.times.250 nm footprint of cavity size.
[0039] In this embodiment, the square cavity integrated nano-cavity
plasmonic laser light source 400 is placed in-line with a bus
waveguide 402 that may be formed prior to the square cavity laser
400. The square cavity laser 400 may be placed with the waveguide
402 on the substrate 110. The bus waveguide 402 may include any
suitable propagation material. In one embodiment, the bus waveguide
402 includes AlGaAs (e.g., Al.sub.0.3Ga.sub.0.7As). In other
embodiments, SiNx may be employed for the bus waveguide 402.
[0040] The metal 408 extends transversely to the bus waveguide 402
and extends at least a dimension (e.g., 50-500 nm) on one side of
the waveguide 402. The metal 408 may extend on both sides of the
waveguide 402. The metal 408 may include, e.g., Au, although other
metals may be employed (e.g., Cu, Ag, Al, etc.). The larger size of
the metal 408 may couple additional light into the waveguide 402
and provides additional heat sink properties.
[0041] Referring to FIG. 5, the square cavity integrated
nano-cavity plasmonic laser light sources 100, 200, 300, 400 are
formed in a same process flow in accordance with illustrative
embodiments. GaAs/AlGaAs quantum wells 102 are first grown on GaAs
substrate (not shown). The quantum wells 102 are formed to a
height, H. Buffer/contact layers 104 and 106 is also formed. The
epitaxial surface of the GaAs wafer is bonded to a Si substrate (or
other substrate) 110 through oxide wafer bonding on oxide 502,
e.g., SiO.sub.2. This includes a transfer process. The original
GaAs substrate has an oxide formed thereon that interface with
oxide 502. The GaAs substrate is then removed before forming the
metal 108 on the buffer layer 104. The GaAs substrate is
selectively removed by chemical etching.
[0042] After transfer to a Si substrate 510, the device mesa may be
patterned to form a square with dimension, W. A second electrode or
contact (or side contact) may be formed. A waveguide (not shown) is
deposited and patterned (defined) on the new substrate 510. In one
embodiment, W=250 nm, although other sizes are contemplated. A
plasmonic mode in the cavity 102 converts emission into propagating
waveguide modes beyond the confinement of the cavity region, and a
mode size of the cavity is below the diffraction limit. Light leaks
into the waveguide at the edges of the cavity. A high coupling
efficiency (up to, e.g., 60%) occurs when H is about 260 nm. This
may be larger for thicker devices lasers, and other coupling
efficiencies may be achieved.
[0043] Referring to FIG. 6, mode intensity profiles 602, 604, 606
and 608 for square and in-line square plasmonic lasers are shown in
accordance with the present embodiments. Profiles 602 and 604 show
the mode intensity profile for a square. A dotted box in the
profiles 602 and 604 shows the location of the square cavity,
relative to light intensity E.sub.xy in profile 602 and light
intensity E.sub.xz in profile 604.
[0044] Profiles 606 and 608 show the mode intensity profile for a
square in-line with a waveguide. Light intensity E.sub.xy is shown
in profile 606, and light intensity E.sub.xz is shown in profile
608.
[0045] The profiles 602, 604, 606, 608 show mode confinement
through total internal reflection at the cavity boundaries.
Sub-wavelength diffraction is limited in an optical cavity mode of
.about.0.9 (.lamda./2n).sup.3, where n is the refraction index of
cavity material and .lamda. is the wavelength of light.
[0046] In accordance with the present principles, Q factor, Purcell
factor and coupling efficiency were measured with respect to cavity
thickness (H in nm). Q factor varied between 36 and 45 at
.about.850 nm. Q factor was highest for the square cavity, and
lowest for the in-line cavity with a metal extension. The thickness
of the cavity (H) was varied up to 300 nm.
[0047] Purcell factors were reasonable high to enhance light-matter
interaction. The thickness of the cavity (H) was varied between 50
nm and 350 nm. The coupling efficiency to waveguides was up to
.about.60% coupling efficiency. While the test results show a high
performance plasmonic laser structures, the results of these
measurements are not limiting.
[0048] The laser output yields high spontaneous emission factor
(beta=0.55). This indicates high photon utilization of the
plasmonic cavity. Power outputs may include 400 microWatts at
current equal to twice the threshold current but can be larger
(e.g., greater than 3 milliWatts at 10 times the threshold
current). At threshold current and 3 dB bandwidth, the operating
frequency exceeded 50 GHz, and approached 100 GHz at two times the
threshold current (at 3 dB bandwidth).
[0049] The light sources in accordance with the present principles
can operate in either the light emitting diode (LED) region or the
laser region. The light sources in accordance with the present
principles provide sufficient (tens of microwatts, e.g., 5 to 60
microwatts) output power for short-range optical links, and greater
than 80 GHz modulation speed. This significantly exceeds the
modulation speed of conventional lasers.
[0050] Referring to FIG. 7, an electrically pumped nano-laser 700
is illustratively depicted. The nano-laser 700 was modeled, and a
heat transfer analysis was conducted as depicted in sections A-A
and B-B taken at section planes A-A and B-B through nano-laser 700.
The nano-laser 700 is not to scale with sections A-A and B-B. The
nano-laser 700 includes a Si substrate 702 and a SiO.sub.2 layer
704 formed on the substrate 702. The nano-laser 700 includes an
in-line square nano-cavity 710, which includes GaAs quantum wells
as described above. A plasmonic metal 708 (metal electrode 1) is
formed on the nano-cavity 710. The nano-cavity 710 is formed
in-line with an AlGaAs waveguide 706. A second metal electrode 712
(metal electrode 2) is also coupled to the nano-cavity 710 by a
buffer/contact layer 714 or other conductive path to the
nano-cavity 710. The electrodes 708 and 712 may include Au, Cu, Al,
Ag or other suitable metals. A dielectric layer (e.g., SiO.sub.2)
720 may be employed to cover the device 710, the waveguide 706,
etc. The dielectric layer 720 in this example, may include a
thickness of about 800 nm. This larger thickness and material were
employed in the heat transfer analysis to present a worst case-like
scenario.
[0051] In accordance with the present principles, the plasmonic
metal 708 serves as a heat sink, and provides greater heat
dissipation. In accordance with the present principles, the
nano-laser 700 can operate at .about.65.degree. C. at pump
threshold (.about.2000 .mu.A). This is below CMOS temperature
budgets (e.g., less than 350 K), and is therefore compatible with
CMOS devices formed on the same chip. In addition, a temperature
scale 750 shows all temperatures below a maximum temperature of
76.degree. C.
[0052] The use of the Si substrate 702, the temperature of
operation of the nano-laser 700, the use of materials compatible
with CMOS processing (e.g., Cu), etc. permits the placement of the
lights sources (e.g., light sources 100, 200, 300, 400) on a chip
or substrate with CMOS devices. In addition to CMOS compatibility,
the integrated plasmonic square cavity laser provides enhanced
modulation speed, reduced foot print, increased light coupling
efficiency into a waveguide, among other advantages. The plasmonic
square cavity laser is fabricated with high speed III-V materials,
but is employed on a Si substrate where CMOS devices are
fabricated.
[0053] Referring to FIG. 8, a method for forming an on-chip
plasmonic light source is illustratively shown. In some alternative
implementations, the functions noted in the blocks may occur out of
the order noted in the figures. For example, two blocks shown in
succession may, in fact, be executed substantially concurrently, or
the blocks may sometimes be executed in the reverse order,
depending upon the functionality involved. It will also be noted
that each block of the block diagrams and/or flowchart
illustration, and combinations of blocks in the block diagrams
and/or flowchart illustration, can be implemented by special
purpose hardware-based systems that perform the specified functions
or acts or carry out combinations of special purpose hardware and
computer instructions.
[0054] In block 802, a quantum well (QW) structure is formed on a
III-V substrate. The quantum well structure preferably includes
III-V materials such as GaAs/AlGaAs in alternating layers. The
quantum well structure may also be sandwiched between
buffers/contact layers. The quantum well structure is employed with
a plasmonic metal atop to generate surface plasmons to produce
light. The quantum well structure is formed as a sheet at this
point in the processing.
[0055] In block 804, an oxide is grown or deposited on the quantum
well structure (e.g., on a buffer layer). The oxide may include
silicon oxide. In block 806, the oxide on the quantum well
structure is oxide wafer bonded (by flipping the quantum well
structure) to an oxide formed on a silicon substrate (or other
substrate material) by oxide wafer bonding. The silicon substrate
may include complementary metal oxide semiconductor (CMOS) devices
formed thereon.
[0056] In block 808, the III-V substrate is etched away by a
selective chemical etch process. This transfers the quantum well
structure to the silicon substrate to provide an on-chip light
source integrated with CMOS devices formed on the silicon
substrate. In block 810, the quantum well structure is patterned
(e.g., by lithographic processing) to form one or more square
nano-cavity light sources on the silicon substrate. A connection to
the bottom of the QW structure may also be performed.
[0057] In block 812, a plasmonic metal is formed as an electrode on
the square nano-cavity light source. The plasmonic metal may be
formed before transferring the quantum well structure or may be
formed after the transfer to the substrate and patterned (in block
814) along with the quantum well structure or formed and patterned
separately from the quantum well structure.
[0058] In block 814, the quantum well structure may be patterned to
extend a buffer layer so that a second electrode can be formed to
contact a bottom of the quantum well structure. A second electrode
may be formed on or with the buffer layer or may be formed on a
side of the quantum well structure.
[0059] In block 816, a waveguide is formed on the silicon
substrate. The waveguide may be disposed adjacent to and/or spaced
apart from the square nano-cavity, or the waveguide may be formed
with the square nano-cavity light source being disposed in-line
within the waveguide.
[0060] In block 818, the plasmonic metal is disposed transversely
to a longitudinal direction of the waveguide and extends beyond the
square nano-cavity and the waveguide on at least one side of the
nano-cavity and the waveguide. This may be performed by depositing
a dummy material, depositing the plasmonic metal and then removing
the dummy material. The plasmonic metal may be deposited and
patterned in many different process sequences. Processing continues
as needed.
[0061] Having described preferred embodiments plasmonic mode III-V
laser as on-chip light source (which are intended to be
illustrative and not limiting), it is noted that modifications and
variations can be made by persons skilled in the art in light of
the above teachings. It is therefore to be understood that changes
may be made in the particular embodiments disclosed which are
within the scope of the invention as outlined by the appended
claims. Having thus described aspects of the invention, with the
details and particularity required by the patent laws, what is
claimed and desired protected by Letters Patent is set forth in the
appended claims.
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