U.S. patent application number 15/356976 was filed with the patent office on 2017-03-09 for semiconductor device and manufacturing method thereof.
The applicant listed for this patent is Semiconductor Energy Laboratory Co., Ltd.. Invention is credited to Satoshi SHINOHARA, Shunpei YAMAZAKI.
Application Number | 20170069765 15/356976 |
Document ID | / |
Family ID | 47438121 |
Filed Date | 2017-03-09 |
United States Patent
Application |
20170069765 |
Kind Code |
A1 |
YAMAZAKI; Shunpei ; et
al. |
March 9, 2017 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Abstract
Provided are a transistor which has electrical characteristics
requisite for its purpose and uses an oxide semiconductor layer and
a semiconductor device including the transistor. In the bottom-gate
transistor in which at least a gate electrode layer, a gate
insulating film, and the semiconductor layer are stacked in this
order, an oxide semiconductor stacked layer including at least two
oxide semiconductor layers whose energy gaps are different from
each other is used as the semiconductor layer. Oxygen and/or a
dopant may be added to the oxide semiconductor stacked layer.
Inventors: |
YAMAZAKI; Shunpei;
(Setagaya, JP) ; SHINOHARA; Satoshi; (Fujisawa,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Semiconductor Energy Laboratory Co., Ltd. |
Atsugi-shi |
|
JP |
|
|
Family ID: |
47438121 |
Appl. No.: |
15/356976 |
Filed: |
November 21, 2016 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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14933392 |
Nov 5, 2015 |
9530897 |
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15356976 |
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14590133 |
Jan 6, 2015 |
9196745 |
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14933392 |
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13527882 |
Jun 20, 2012 |
8952377 |
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14590133 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 29/78693 20130101;
H01L 29/786 20130101; H01L 29/78696 20130101; H01L 29/24 20130101;
H01L 29/7869 20130101; H01L 29/045 20130101 |
International
Class: |
H01L 29/786 20060101
H01L029/786; H01L 29/24 20060101 H01L029/24; H01L 29/04 20060101
H01L029/04 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 8, 2011 |
JP |
2011-152099 |
Claims
1. (canceled)
2. A semiconductor device comprising: an oxide stacked layer
comprising a first oxide layer, a second oxide layer over the first
oxide layer, and a third oxide layer over the second oxide layer; a
source electrode over the oxide stacked layer, the source electrode
being in contact with at least a side surface of the second oxide
layer; and a drain electrode over the oxide stacked layer, the
drain electrode being in contact with at least a side surface of
the second oxide layer, wherein energy at a bottom of a conduction
band of the second oxide layer is lower than energy at a bottom of
a conduction band of the first oxide layer and energy at a bottom
of a conduction band of the third oxide layer, wherein the second
oxide layer comprises indium, and wherein each of the first oxide
layer and the third oxide layer comprises gallium.
3. The semiconductor device according to claim 2, wherein the
source electrode is in contact with a side surface of the first
oxide layer, wherein the drain electrode is in contact with a side
surface of the first oxide layer, wherein the source electrode is
in contact with a side surface of the third oxide layer, and
wherein the drain electrode is in contact with a side surface of
the third oxide layer.
4. The semiconductor device according to claim 2, wherein the
second oxide layer comprises zinc.
5. The semiconductor device according to claim 2, wherein each of
the first oxide layer and the third oxide layer comprises indium
and zinc.
6. The semiconductor device according to claim 2, wherein the
second oxide layer comprises zinc, and wherein each of the first
oxide layer and the third oxide layer comprises indium and
zinc.
7. The semiconductor device according to claim 2, wherein the
second oxide layer comprises a crystal.
8. The semiconductor device according to claim 7, wherein the
second oxide layer is a non-single-crystal semiconductor layer.
9. A semiconductor device comprising: an oxide stacked layer
comprising a first oxide layer, a second oxide layer over the first
oxide layer, and a third oxide layer over the second oxide layer; a
source electrode over the oxide stacked layer, the source electrode
being in contact with a side surface of the oxide stacked layer;
and a drain electrode over the oxide stacked layer, the drain
electrode being in contact with a side surface of the oxide stacked
layer, wherein energy at a bottom of a conduction band of the
second oxide layer is lower than energy at a bottom of a conduction
band of the first oxide layer and energy at a bottom of a
conduction band of the third oxide layer, wherein the second oxide
layer comprises indium, and wherein each of the first oxide layer
and the third oxide layer comprises gallium.
10. The semiconductor device according to claim 9, wherein the
second oxide layer comprises zinc.
11. The semiconductor device according to claim 9, wherein each of
the first oxide layer and the third oxide layer comprises indium
and zinc.
12. The semiconductor device according to claim 9, wherein the
second oxide layer comprises zinc, and wherein each of the first
oxide layer and the third oxide layer comprises indium and
zinc.
13. The semiconductor device according to claim 9, wherein the
second oxide layer comprises a crystal.
14. The semiconductor device according to claim 13, wherein the
second oxide layer is a non-single-crystal semiconductor layer.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a semiconductor device and
a method for manufacturing the semiconductor device.
[0003] In this specification, the semiconductor device generally
means any device which can function by utilizing semiconductor
characteristics, and an electrooptic device, a semiconductor
circuit, and electronic equipment are all included in the category
of the semiconductor device.
[0004] 2. Description of the Related Art
[0005] Attention has been focused on a technique for forming a
transistor with use of a semiconductor thin film formed over a
substrate having an insulating surface (the transistor also
referred to as a thin film transistor (TFT)). The transistor has
been applied to a wide range of electronic devices such as an
integrated circuit (IC) or an image display device (display
device). A silicon semiconductor material is widely known as a
material for a semiconductor thin film applicable to a transistor.
As another material, an oxide semiconductor has attracted
attention.
[0006] For example, a transistor whose active layer includes an
amorphous oxide containing indium (In), gallium (Ga), and zinc (Zn)
is disclosed (see Patent Document 1).
REFERENCE
[0007] Patent Document 1: Japanese Published Patent Application No.
2006-165528
SUMMARY OF THE INVENTION
[0008] An improvement in the on-state characteristics (e.g.,
on-state current and field-effect mobility) of a transistor leads
to high-speed response to an input signal and high-speed operation
of a semiconductor device; thus, a semiconductor device with higher
performance can be achieved. Meanwhile it is necessary that the
off-state current of the transistor be sufficiently small for low
power consumption of the semiconductor device. As described above,
the electrical characteristics requisite for a transistor vary
depending on its purpose or object, and it is useful to adjust the
electrical characteristics with high accuracy.
[0009] It is one object of one embodiment of the present invention
to provide a transistor structure and a manufacturing method
thereof, in which the threshold voltage, which is one of electrical
characteristics, of a transistor using an oxide semiconductor for
its channel formation region can take a positive value, providing a
switching element of so-called normally-off type.
[0010] It is preferable that a channel be formed at a threshold
voltage at which the gate voltage is a positive threshold voltage
as close to 0 V as possible in a transistor. If the threshold
voltage of the transistor is negative, the transistor tends to be
so-called normally-on type, in which current flows between the
source electrode and the drain electrode even at a gate voltage of
0 V. Electrical characteristics of a transistor included in a
circuit are important in an LSI, a CPU, or a memory, and govern
power consumption of a semiconductor device. In particular, of the
electrical properties of the transistor, the threshold voltage
(V.sub.th) is important. If the threshold voltage value is negative
even while the field-effect mobility is high, it is difficult to
control the circuit. Such a transistor in which a channel is formed
even at a negative voltage so that a drain current flows is not
suitable as a transistor used in an integrated circuit of a
semiconductor device.
[0011] Further, it is important that the characteristics of a
transistor be close to the normally-off characteristics even when
the transistor is not a normally-off transistor depending on its
material or manufacturing condition. It is an object of one
embodiment of the present invention to provide a structure and a
manufacturing method thereof, in which the threshold voltage of a
transistor is close to zero even when the threshold voltage is
negative, that is, even when the transistor is a so-called
normally-on transistor.
[0012] Further, it is an object of one embodiment of the present
invention to provide a structure and a manufacturing method
thereof, in which on-state characteristics (e.g., on-state current
and field-effect mobility) of a transistor are increased, leading
to high-speed response and high-speed operation of a semiconductor
device for a higher performance semiconductor device.
[0013] It is an object of one embodiment of the present invention
to provide a transistor which has electrical characteristics
requisite for its purpose and uses an oxide semiconductor layer,
and to provide a semiconductor device including the transistor.
[0014] It is an object of one embodiment of the present invention
to achieve at least one of the above-described objects.
[0015] In a bottom-gate transistor in which at least a gate
electrode layer, a gate insulating film, and a semiconductor layer
are stacked in this order, an oxide semiconductor stacked layer
including at least two oxide semiconductor layers whose energy gaps
are different from each other is used as the semiconductor
layer.
[0016] The oxide semiconductor stacked layer may have a stacked
structure consisting of a first oxide semiconductor layer and a
second oxide semiconductor layer, in the case of which the stack
order of them is not limited as long as their energy gaps are
different from each other: either one whose energy gap is larger or
the other whose energy gap is smaller is provided as the oxide
semiconductor layer which is in contact with the gate insulating
film.
[0017] Specifically, the energy gap of one oxide semiconductor
layer in the oxide semiconductor stacked layer is larger than or
equal to 3 eV and that of the other oxide semiconductor layer is
smaller than 3 eV. The term "energy gap" is synonymous with "band
gap" or "forbidden band width" in this specification.
[0018] The oxide semiconductor stacked layer may have a stacked
structure consisting of three or more oxide semiconductor layers,
in the case of which either the energy gaps of all the oxide
semiconductor layers are different from each other, or the energy
gaps of a plurality of oxide semiconductor layers among the three
or more oxide semiconductor layers are substantially the same as
each other.
[0019] For example, the oxide semiconductor stacked layer has a
stacked structure consisting of a first oxide semiconductor layer,
a second oxide semiconductor layer, and a third oxide semiconductor
layer, in which the energy gap of the second oxide semiconductor
layer is smaller than those of the first oxide semiconductor layer
and the third oxide semiconductor layer, or the electron affinity
of the second oxide semiconductor layer is larger than those of the
first oxide semiconductor layer and the third oxide semiconductor
layer. In that case, the energy gap and the electron affinity can
be equal to each other between the first oxide semiconductor layer
and the third oxide semiconductor layer. The stacked structure in
which the second oxide semiconductor layer whose energy gap is
smaller is sandwiched by the first oxide semiconductor layer and
the third oxide semiconductor layer whose energy gaps are larger
enables the off-state current (leakage current) of the transistor
to be reduced. The electron affinity means an energy difference
between the vacuum level and the conduction band of the oxide
semiconductor.
[0020] Electrical properties of a transistor using an oxide
semiconductor layer are affected by the energy gap of the oxide
semiconductor layer. For example, the on-state characteristics
(e.g., on-state current and field-effect mobility) of the
transistor using an oxide semiconductor layer can increase as the
energy gap of the oxide semiconductor layer gets smaller, whereas
the off-state current of the transistor can decrease as the energy
gap of the oxide semiconductor layer gets larger.
[0021] It is difficult to provide a transistor with appropriate
electrical characteristics by a single oxide semiconductor layer
because the electrical characteristics of the transistor are mostly
determined by the energy gap of the oxide semiconductor layer.
[0022] By using the oxide semiconductor stacked layer using a
plurality of oxide semiconductor layers having different energy
gaps, the electrical characteristics of the transistor can be
adjusted with higher accuracy, providing the transistor with
appropriate electrical characteristics.
[0023] Accordingly, semiconductor devices for a variety of purposes
such as high functionality, high reliability, and low power
consumption can be provided.
[0024] One embodiment of the present invention disclosed in this
specification is a semiconductor device including a gate insulating
film over a gate electrode layer, an oxide semiconductor stacked
layer including a first oxide semiconductor layer and a second
oxide semiconductor layer whose energy gaps are different from each
other over the gate insulating film to overlap with the gate
electrode layer, and a source and drain electrode layers over the
oxide semiconductor stacked layer.
[0025] One embodiment of the present invention disclosed in this
specification is a semiconductor device including a gate insulating
film over a gate electrode layer, an oxide semiconductor stacked
layer including a first oxide semiconductor layer, a second oxide
semiconductor layer, and a third oxide semiconductor layer, which
are stacked in this order, over the gate insulating film to overlap
with the gate electrode layer, and a source and drain electrode
layers over the oxide semiconductor stacked layer. The energy gap
of the second oxide semiconductor layer is smaller than those of
the first oxide semiconductor layer and the third oxide
semiconductor layer.
[0026] One embodiment of the present invention disclosed in this
specification is a semiconductor device including a gate insulating
film over a gate electrode layer, a source and drain electrode
layers over the gate insulating film, and an oxide semiconductor
stacked layer including a first oxide semiconductor layer and a
second oxide semiconductor layer whose energy gaps are different
from each other over the gate insulating film and the source and
drain electrode layers to overlap with the gate electrode
layer.
[0027] One embodiment of the present invention disclosed in this
specification is a semiconductor device including a gate insulating
film over a gate electrode layer, a source and drain electrode
layers over the gate insulating film, and an oxide semiconductor
stacked layer including a first oxide semiconductor layer, a second
oxide semiconductor layer, and a third oxide semiconductor layer,
which are stacked in this order, over the gate insulating film and
the source and drain electrode layers to overlap with the gate
electrode layer. The energy gap of the second oxide semiconductor
layer is smaller than those of the first oxide semiconductor layer
and the third oxide semiconductor layer.
[0028] In the oxide semiconductor stacked layer, the upper oxide
semiconductor layer may cover a top and side surfaces of the lower
oxide semiconductor layer. For example, in the above-described
structure, the second oxide semiconductor layer may cover a top and
side surfaces of the first oxide semiconductor layer, and/or the
third oxide semiconductor layer may cover a top surface of the
second oxide semiconductor layer and a side surface of the second
oxide semiconductor layer (or respective side surfaces of the first
oxide semiconductor layer and the second oxide semiconductor
layer).
[0029] In the oxide semiconductor stacked layer, the concentration
of oxygen in a region which overlaps with neither the source
electrode layer nor the drain electrode layer may be higher than
that in a region which overlaps with either the source electrode
layer or the drain electrode layer.
[0030] In the oxide semiconductor stacked layer, a region which
does not overlap with the gate electrode layer may include a dopant
to form a low-resistance region.
[0031] One embodiment of the present invention disclosed in this
specification is a method for manufacturing a semiconductor device,
in which a gate insulating film is formed over a gate electrode
layer, an oxide semiconductor stacked layer including a first oxide
semiconductor layer and a second oxide semiconductor layer whose
energy gaps are different from each other is formed over the gate
insulating film to overlap with the gate electrode layer, and a
source and drain electrode layers is formed over the oxide
semiconductor stacked layer.
[0032] One embodiment of the present invention disclosed in this
specification is a method for manufacturing a semiconductor device,
in which a gate insulating film is formed over a gate electrode
layer, an oxide semiconductor stacked layer is formed by forming a
first oxide semiconductor layer over the gate insulating film to
overlap with the gate electrode layer, forming a second oxide
semiconductor layer whose energy gap is smaller than that of the
first oxide semiconductor layer over the first oxide semiconductor
layer, and forming a third oxide semiconductor layer whose energy
gap is larger than that of the second oxide semiconductor layer,
and a source and drain electrode layers is formed over the oxide
semiconductor stacked layer.
[0033] One embodiment of the present invention disclosed in this
specification is a method for manufacturing a semiconductor device,
in which a gate insulating film is formed over a gate electrode
layer, a source and drain electrode layers is formed over the gate
insulating film, and an oxide semiconductor stacked layer including
a first oxide semiconductor layer and a second oxide semiconductor
layer whose energy gaps are different from each other is formed
over the gate insulating film and the source and drain electrode
layers to overlap with the gate electrode layer.
[0034] One embodiment of the present invention disclosed in this
specification is a method for manufacturing a semiconductor device,
in which a gate insulating film is formed over a gate electrode
layer, a source and drain electrode layers is formed over the gate
insulating film, and an oxide semiconductor stacked layer is formed
by forming a first oxide semiconductor layer over the gate
insulating film and the source and drain electrode layers to
overlap with the gate electrode layer, forming a second oxide
semiconductor layer whose energy gap is smaller than that of the
first oxide semiconductor layer over the first oxide semiconductor
layer, and forming a third oxide semiconductor layer whose energy
gap is larger than that of the second oxide semiconductor
layer.
[0035] A dopant may be selectively added to the oxide semiconductor
stacked layer to form low-resistance regions whose resistances are
lower than that of a channel formation region and which include the
dopant, with the channel formation region provided therebetween in
the oxide semiconductor stacked layer. The dopant is an impurity by
which the electrical conductivity of the oxide semiconductor
stacked layer is changed. As the method for addition of the dopant,
an ion implantation method, an ion doping method, a plasma
immersion ion implantation method, or the like can be used.
[0036] With the oxide semiconductor stacked layer including the
low-resistance regions between which the channel formation region
is provided in the channel length direction, on-state
characteristics (e.g., on-state current and field-effect mobility)
of the transistor are increased, which enables high-speed operation
and high-speed response.
[0037] Further, heat treatment (dehydration or dehydrogenation
treatment) by which hydrogen or water is eliminated may be
performed on the oxide semiconductor layer. The dehydration or
dehydrogenation treatment can serve as heat treatment for forming a
mixed region. Further, in the case where a crystalline oxide
semiconductor layer is used as the oxide semiconductor layer, the
heat treatment for forming a mixed region can serve as heat
treatment for crystallization.
[0038] The dehydration or dehydrogenation treatment may accompany
elimination of oxygen which is a main constituent material of an
oxide semiconductor to lead to a reduction in oxygen. An oxygen
vacancy exists in a portion where oxygen is eliminated in an oxide
semiconductor film, which gives rise to a donor level which causes
a change in the electrical characteristics of a transistor.
[0039] Thus, oxygen is preferably supplied to the oxide
semiconductor layer after being subjected to the dehydration or
dehydrogenation treatment. By supply of oxygen to the oxide
semiconductor layer, oxygen vacancies in the film can be
repaired.
[0040] For example, an oxide insulating film including much
(excessive) oxygen, which serves as a supply source of oxygen, may
be provided so as to be in contact with the oxide semiconductor
layer, whereby oxygen can be supplied from the oxide insulating
film to the oxide semiconductor layer. In the above structure, heat
treatment may be performed in the state where the oxide
semiconductor layer after being subjected to the heat treatment and
the oxide insulating film are at least partly in contact with each
other to supply oxygen to the oxide semiconductor layer.
[0041] Further or alternatively, oxygen (which includes at least
one of an oxygen radical, an oxygen atom, and an oxygen ion) may be
added to the oxide semiconductor layer after being subjected to the
dehydration or dehydrogenation treatment to supply oxygen to the
oxide semiconductor layer. As the method for addition of oxygen, an
ion implantation method, an ion doping method, a plasma immersion
ion implantation method, plasma treatment, or the like can be
used.
[0042] Further, it is preferable that the oxide semiconductor layer
in the transistor include a region where the oxygen content is
higher than that in the stoichiometric composition ratio of the
oxide semiconductor in a crystalline state. In that case, the
oxygen content is higher than that in the stoichiometric
composition ratio of the oxide semiconductor. Alternatively, the
oxygen content is higher than that of the oxide semiconductor in a
single crystal state. In some cases, oxygen exists between lattices
of the oxide semiconductor.
[0043] By removing hydrogen or water from the oxide semiconductor
to highly purify the oxide semiconductor so as not to contain
impurities as much as possible, and supplying oxygen to repair
oxygen vacancies therein, the oxide semiconductor can be turned
into an i-type (intrinsic) oxide semiconductor or a substantially
i-type (intrinsic) oxide semiconductor. Accordingly, the Fermi
level (Ef) of the oxide semiconductor can be changed to the same
level as the intrinsic Fermi level (Ei). Thus, by using the oxide
semiconductor layer for a transistor, variation in the threshold
voltage V.sub.th of the transistor and a shift of the threshold
voltage A V.sub.th due to an oxygen vacancy can be reduced.
[0044] One embodiment of the present invention relates to a
semiconductor device including a transistor or a semiconductor
device including a circuit including a transistor. For example, one
embodiment of the present invention relates to a semiconductor
device including a transistor whose channel formation region is
formed of an oxide semiconductor or a semiconductor device
including a circuit including the transistor. For example, one
embodiment of the present invention relates to electronic equipment
which includes, as a component, an LSI; a CPU; a power device
mounted in a power circuit; a semiconductor integrated circuit
including a memory, a thyristor, a converter, an image sensor, or
the like; an electro-optical device typified by a liquid crystal
display panel; or a light-emitting display device including a
light-emitting element.
[0045] By using the oxide semiconductor stacked layer using a
plurality of oxide semiconductor layers whose energy gaps are
different from each other, the electrical characteristics of the
transistor can be adjusted with higher accuracy, providing the
transistor with appropriate electrical characteristics.
[0046] Accordingly, semiconductor devices for a variety of purposes
such as high functionality, high reliability, and low power
consumption can be provided.
BRIEF DESCRIPTION OF THE DRAWINGS
[0047] In the accompanying drawings:
[0048] FIGS. 1A and 1B each illustrate one embodiment of a
semiconductor device;
[0049] FIGS. 2A to 2E illustrate one embodiment of a semiconductor
device and a manufacturing method of the semiconductor device;
[0050] FIGS. 3A to 3C each illustrate one embodiment of a
semiconductor device;
[0051] FIGS. 4A to 4C illustrate one embodiment of a semiconductor
device;
[0052] FIGS. 5A to 5D illustrate one embodiment of a semiconductor
device and a manufacturing method of the semiconductor device;
[0053] FIGS. 6A to 6C illustrate one embodiment of a semiconductor
device and a manufacturing method of the semiconductor device;
[0054] FIGS. 7A to 7D each illustrate one embodiment of a
semiconductor device;
[0055] FIGS. 8A to 8D each illustrate one embodiment of a
semiconductor device;
[0056] FIGS. 9A to 9C each illustrate one embodiment of a
semiconductor device;
[0057] FIGS. 10A to 10C each illustrate one embodiment of a
semiconductor device;
[0058] FIGS. 11A and 11B each illustrate one embodiment of a
semiconductor device;
[0059] FIGS. 12A to 12C each illustrate one embodiment of a
semiconductor device;
[0060] FIGS. 13A and 13B each illustrate one embodiment of a
semiconductor device;
[0061] FIGS. 14A and 14B illustrate one embodiment of a
semiconductor device;
[0062] FIGS. 15A to 15C illustrate one embodiment of a
semiconductor device;
[0063] FIGS. 16A to 16D each illustrate electronic equipment;
[0064] FIG. 17A is a schematic diagram and FIGS. 17B and 17C are
TEM images of Samples in Example 1;
[0065] FIG. 18A is a schematic diagram and FIS. 18B and 18C are TEM
images of Samples in Example 1;
[0066] FIG. 19 is a graph showing an ionization potential;
[0067] FIG. 20 is a graph showing an energy band diagram;
[0068] FIG. 21 is a graph showing an ionization potential;
[0069] FIG. 22 is a graph showing an energy band diagram;
[0070] FIGS. 23A and 23B are graphs showing off-state current of
transistors;
[0071] FIG. 24 is a graph showing field-effect mobility of the
transistors;
[0072] FIGS. 25A and 25B are graphs showing off-state current of
transistors;
[0073] FIG. 26 is a graph showing field-effect mobility of the
transistors.
DETAILED DESCRIPTION OF THE INVENTION
[0074] Hereinafter, embodiments of the present invention disclosed
in this specification are described with reference to the
accompanying drawings. The present invention disclosed in this
specification is not limited to the following description, and it
will be easily understood by those skilled in the art that modes
and details can be variously changed without departing from the
spirit and the scope of the present invention. Therefore, the
present invention disclosed in this specification is not construed
as being limited to the description of the following embodiments.
The ordinal numbers such as "first" and "second" in this
specification are used for convenience and infer neither the order
of manufacturing steps nor the stack order of layers. The ordinal
numbers in this specification do not constitute particular names
which specify the present invention, either.
Embodiment 1
[0075] In this embodiment, an embodiment of a semiconductor device
and a method for manufacturing the semiconductor device is
described with reference to FIGS. 1A and 1B and FIGS. 3A to 3C. In
this embodiment, a transistor including an oxide semiconductor film
is described as an example of the semiconductor device.
[0076] The transistor may have a single-gate structure in which one
channel formation region is formed, a double-gate structure in
which two channel formation regions are formed, or a triple-gate
structure in which three channel formation regions are formed.
Alternatively, the transistor may have a dual-gate structure
including two gate electrode layers positioned over and under a
channel formation region with a gate insulating film provided
therebetween.
[0077] A transistor 440a shown in FIG. 1A and a transistor 440b
shown in FIG. 1B are examples of an inverted staggered, bottom-gate
transistor.
[0078] As shown in FIGS. 1A and 1B, each of the transistors 440a
and 440b include a gate electrode layer 401, a gate insulating film
402, an oxide semiconductor stacked layer 403 including a first
oxide semiconductor layer 101 and a second oxide semiconductor
layer 102 whose energy gaps are different from each other, a source
electrode layer 405a, and a drain electrode layer 405b, which are
provided in this order over a substrate 400 having an insulating
surface. An insulating film 407 is formed over each of the
transistors 440a and 440b.
[0079] In FIGS. 1A and 1B, the interface between the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 is shown by a dotted line, by which the oxide semiconductor
stacked layer 403 is illustrated schematically. The interface
between the first oxide semiconductor layer 101 and the second
oxide semiconductor layer 102 is not always clear, which depends on
their materials, formation conditions, and heat treatment. In the
case where the interface is not clear, a mixed region or a mixed
layer of a plurality of oxide semiconductor layers may be formed.
This applies to the other drawings of this specification.
[0080] For example, a transistor 449 which includes a mixed region
105 between the first oxide semiconductor layer 101 and the second
oxide semiconductor layer 102 is shown in FIG. 3C.
[0081] In the oxide semiconductor stacked layer 403 in the
transistor 449, the interface between the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102 is unclear,
and the mixed region 105 is formed between the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102. The interface which is "unclear" means, for example, an
interface where a clear continuous boundary cannot be observed
between the stacked oxide semiconductor layers in cross-sectional
observation (TEM image) of the oxide semiconductor stack 403, with
a high resolution transmission electron microscope.
[0082] The mixed region 105 is a region where elements contained in
the first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102 that are stacked are mixed, and at least
the composition of constituent elements in the mixed region 105 is
different from either of respective those of constituent elements
in the first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102. For example, when a stacked-layer
structure of a first oxide semiconductor layer including indium,
tin, and zinc and a second oxide semiconductor layer including
indium, gallium, and zinc is used as the oxide semiconductor stack
403, the mixed region 105 formed between the first oxide
semiconductor layer and the second oxide semiconductor layer
contains indium, tin, gallium, and zinc. In addition, even in the
case where elements contained in the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102 are the same
as each other, the mixed region 105 can have a different
composition (composition ratio) from that of each of the first
oxide semiconductor layer 101 and the second oxide semiconductor
layer 102. Thus, the energy gap of the mixed region 105 is also
different from that of the first oxide semiconductor layer 101 and
that of the second oxide semiconductor layer 102, and the energy
gap of the mixed region 105 is a value between the energy gap of
the first oxide semiconductor layer 101 and the energy gap of the
second oxide semiconductor layer 102.
[0083] Thus, the mixed region 105 enables a continuous bond to be
formed in the energy band diagram of the oxide semiconductor
stacked layer 403, suppressing scattering in the interface between
the first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102. Since the interface scattering can be
suppressed, the transistor 449 using the oxide semiconductor
stacked layer 403 provided with the mixed region 105 can have
higher field-effect mobility.
[0084] The mixed region 105 can form a gradient between the first
oxide semiconductor layer 101 and the second oxide semiconductor
layer 102 in the energy band diagram. The shape of the gradient may
have a plurality of steps.
[0085] The interfaces between the first oxide semiconductor layer
101 and the mixed region 105 and between the second oxide
semiconductor layer 102 and the mixed region 105 are shown by
dotted lines, by which unclear (indistinct) interfaces in the oxide
semiconductor stacked layer 403 are illustrated schematically.
[0086] The mixed region 105 can be formed by performing heat
treatment on the oxide semiconductor stacked layer 403 including
the plurality of oxide semiconductor layers. The heat treatment is
performed at a temperature at which elements in the oxide
semiconductor stacked layer can be dispersed by heat under such a
condition that the stacked oxide semiconductor layers are not
turned into a mixed region whose composition (composition ratio) is
uniform entirely over the oxide semiconductor stacked layer.
[0087] The stack order of the first oxide semiconductor layer 101
and the second oxide semiconductor layer 102 in the oxide
semiconductor stacked layer 403 is not limited as long as their
energy gaps are different from each other.
[0088] Specifically, the energy gap of one oxide semiconductor
layer in the oxide semiconductor stacked layer 403 is larger than
or equal to 3 eV and that of the other oxide semiconductor layer is
smaller than 3 eV.
[0089] The transistor 440a shown in FIG. 1A is an example in which
the energy gap of the second oxide semiconductor layer 102 is
larger than that of the first oxide semiconductor layer 101. In
this embodiment, an In--Sn--Zn-based oxide film (with an energy gap
of 2.6 eV to 2.9 eV, or 2.8 eV as a typical example) and an
In--Ga--Zn-based oxide film (with an energy gap of 3.0 eV to 3.4
eV, or 3.2 eV as a typical example) are used as the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 in the transistor 440a, respectively.
[0090] On the other hand, the transistor 440b shown in FIG. 1B is
an example in which the energy gap of the second oxide
semiconductor layer 102 is smaller than that of the first oxide
semiconductor layer 101. In this embodiment, an In--Ga--Zn-based
oxide film (with an energy gap of 3.2 eV) and an In--Sn--Zn-based
oxide film (with an energy gap of 2.8 eV) are used as the first
oxide semiconductor layer 101 and the second oxide semiconductor
layer 102 in the transistor 440b, respectively.
[0091] In this manner, either one whose energy gap is larger or the
other whose energy gap is smaller is provided as the oxide
semiconductor layer which is in contact with the gate insulating
film 402, as either the first oxide semiconductor layer 101 or the
second oxide semiconductor layer 102 in the oxide semiconductor
stacked layer 403.
[0092] FIG. 4A illustrates a transistor 480 in which a stacked
layer consisting of the first oxide semiconductor layer 101, the
second oxide semiconductor layer 102, and a third oxide
semiconductor layer 103 is used to form the oxide semiconductor
stacked layer 403.
[0093] The transistor 480 includes the gate electrode layer 401,
the gate insulating film 402, the oxide semiconductor stacked layer
403 including the first oxide semiconductor layer 101, the second
oxide semiconductor layer 102, and the third oxide semiconductor
layer 103, the source electrode layer 405a, and the drain electrode
layer 405b, which are provided in this order over the substrate 400
having an insulating surface. The insulating film 407 is formed
over the transistor 480.
[0094] Respective energy gaps of the first oxide semiconductor
layer 101, the second oxide semiconductor layer 102, and the third
oxide semiconductor layer 103 in the oxide semiconductor stacked
layer 403 of the transistor 480 are not the same as each other but
take at least two different values.
[0095] In the case where the oxide semiconductor stacked layer 403
has a stacked structure consisting of three or more oxide
semiconductor layers, either respective energy gaps of all the
oxide semiconductor layers are different from each other, or the
energy gaps of a plurality of oxide semiconductor layers among the
three or more oxide semiconductor layers are substantially the same
as each other.
[0096] Further, a transistor 410 is shown in FIG. 9A as another
embodiment of a semiconductor device. The transistor 410 is one of
bottom-gate transistors referred to as a channel-protective type
(also referred to as a channel-stop type) and is also referred to
as an inverted staggered transistor.
[0097] As shown in FIG. 9A, the transistor 410 includes the gate
electrode layer 401, the gate insulating film 402, the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 whose energy gaps are different from each other, an insulating
film 427, the source electrode layer 405a, and the drain electrode
layer 405b, which are provided in this order over the substrate 400
having an insulating surface. An insulating film 409 is formed over
the transistor 410.
[0098] The insulating film 427 is provided over the oxide
semiconductor stacked layer 403 to overlap with the gate electrode
layer 401, and functions as a channel protective film.
[0099] The insulating film 427 may be formed using a material and a
method similar to those of the insulating film 407; as a typical
example, a single layer or a stacked layer using one or more of
inorganic insulating films such as a silicon oxide film, a silicon
oxynitride film, an aluminum oxide film, an aluminum oxynitride
film, a hafnium oxide film, a gallium oxide film, a silicon nitride
film, an aluminum nitride film, a silicon nitride oxide film, an
aluminum nitride oxide film, and an aluminum oxide film can be
used.
[0100] When the insulating film 427 in contact with the oxide
semiconductor stacked layer 403 (or a film in a stacked-layer
structure of the insulating film 427, which is in contact with the
oxide semiconductor stacked layer 403) contains much oxygen, the
insulating film 427 (or the film in contact with the oxide
semiconductor stacked layer 403) can favorably function as a supply
source which supplies oxygen to the oxide semiconductor stacked
layer 403.
[0101] The insulating film 409 may be formed using a material and a
method similar to those of the insulating film 407.
[0102] Further, a bottom-gate transistor 430 is shown in FIG. 10A
as another embodiment of a semiconductor device.
[0103] As shown in FIG. 10A, the transistor 430 includes the gate
electrode layer 401, the gate insulating film 402, the source
electrode layer 405a, the drain electrode layer 405b, and the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 whose energy gaps are different from each other, which are
provided in this order over the substrate 400 having an insulating
surface. The insulating film 407 is formed over the transistor
430.
[0104] In the transistor 430, the oxide semiconductor stacked layer
403 including the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102 whose energy gaps are
different from each other is provided over the source electrode
layer 405a and the drain electrode layer 405b.
[0105] It is preferable that indium (In) or zinc (Zn) be contained
in an oxide semiconductor used for the oxide semiconductor stacked
layer 403 (the first oxide semiconductor layer 101, the second
oxide semiconductor layer 102, the third oxide semiconductor layer
103). In particular, In and Zn are preferably contained. In
addition, as a stabilizer for reducing the variation in electrical
characteristics of a transistor using the oxide, the oxide
semiconductor preferably contains gallium (Ga) in addition to In
and Zn. Tin (Sn) is preferably contained as a stabilizer. Hafnium
(Hf) is preferably contained as a stabilizer. Aluminum (Al) is
preferably contained as a stabilizer. Zirconium (Zr) is preferably
contained as a stabilizer.
[0106] As another stabilizer, one or plural kinds of lanthanoid
selected from lanthanum (La), cerium (Ce), praseodymium (Pr),
neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd),
terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium
(Tm), ytterbium (Yb), and lutetium (Lu) may be contained.
[0107] As the oxide semiconductor, for example, any of the
following can be used: indium oxide; tin oxide; zinc oxide; a
two-component metal oxide such as an In--Zn-based oxide, a
Sn--Zn-based oxide, an Al--Zn-based oxide, a Zn--Mg-based oxide, a
Sn--Mg-based oxide, an In--Mg-based oxide, or an In--Ga-based
oxide; a three-component metal oxide such as an In--Ga--Zn-based
oxide, an In--Al--Zn-based oxide, an In--Sn--Zn-based oxide, a
Sn--Ga--Zn-based oxide, an Al--Ga--Zn-based oxide, a
Sn--Al--Zn-based oxide, an In--Hf--Zn-based oxide, an
In--La--Zn-based oxide, an In--Ce--Zn-based oxide, an
In--Pr--Zn-based oxide, an In--Nd--Zn-based oxide, an
In--Sm--Zn-based oxide, an In--Eu--Zn-based oxide, an
In--Gd--Zn-based oxide, an In--Tb--Zn-based oxide, an
In--Dy--Zn-based oxide, an In--Ho--Zn-based oxide, an
In--Er--Zn-based oxide, an In--Tm--Zn-based oxide, an
In--Yb--Zn-based oxide, or an In--Lu--Zn-based oxide; and a
four-component metal oxide such as an In--Sn--Ga--Zn-based oxide,
an In--Hf--Ga--Zn-based oxide, an In--Al--Ga--Zn-based oxide, an
In--Sn--Al--Zn-based oxide, an In--Sn--Hf--Zn-based oxide, or an
In--Hf--Al--Zn-based oxide.
[0108] For example, the In--Ga--Zn-based oxide means an oxide
containing In, Ga, and Zn as its main components and there is no
limitation on the ratio of In:Ga:Zn. The In--Ga--Zn-based oxide may
further include a metal element other than In, Ga, and Zn.
[0109] Alternatively, a material represented by
InMo.sub.3(ZnO).sub.m (m>0, in is not an integer) may be used as
the oxide semiconductor. Here, M represents one or more metal
elements selected from Ga, Fe, Mn, and Co. Alternatively, as the
oxide semiconductor, a material represented by
In.sub.2SnO.sub.5(ZnO).sub.n (n>0, n is an integer) may be
used.
[0110] For example, an In--Ga--Zn-based oxide with an atomic ratio
of In:Ga:Zn=1:1:1 (=1/3:1/3:1/3) or 2:2:1 (=2/5:2/5:1/5), or any of
oxides whose composition is in the neighborhood of the above
compositions can be used. Alternatively, an In--Sn--Zn-based oxide
with an atomic ratio of In:Sn:Zn=1:1:1 (=1/3:1/3:1/3), 2:1:3
(=1/3:1/6:1/2), or 2:1:5 (=1/4:1/8:5/8), or any of oxides whose
composition is in the neighborhood of the above compositions can be
used.
[0111] However, without limitation to the materials given above,
any material with an appropriate composition may be used depending
on requisite semiconductor characteristics (e.g., mobility,
threshold voltage, and variation). To realize requisite
semiconductor characteristics, it is preferable that the carrier
density, the impurity concentration, the defect density, the atomic
ratio between a metal element and oxygen, the interatomic distance,
the density, and the like be set to appropriate values.
[0112] For example, high mobility can be obtained relatively easily
with an In--Sn--Zn-based oxide. However, mobility can be increased
by reducing the defect density in the bulk also with an
In--Ga--Zn-based oxide.
[0113] For example, in the case where the composition of an oxide
containing In, Ga, and Zn at the atomic ratio, In:Ga:Zn=a:b:c
(a+b+c=1), is in the neighborhood of the composition of an oxide
containing In, Ga, and Zn at the atomic ratio, In:Ga:Zn=A:B:C
(A+B+C=1), a, b, and c satisfy the following relation:
(a-A).sup.2+(b-B).sup.2+(c-C).sup.2.ltoreq.r.sup.2, and r may be
0.05, for example. The same applies to other oxides.
[0114] The oxide semiconductor may be either single crystal or
non-single-crystal. In the latter case, the oxide semiconductor may
be either amorphous or polycrystal. Further, the oxide
semiconductor may have either an amorphous structure including a
portion having crystallinity or a non-amorphous structure.
[0115] In an oxide semiconductor in an amorphous state, a flat
surface can be obtained with relative ease; thus, interface
scattering of a transistor including the amorphous oxide
semiconductor can be reduced, so that relatively high mobility can
be obtained with relative ease.
[0116] In an oxide semiconductor having crystallinity, defects in
the bulk can be more reduced, and mobility higher than that of the
amorphous oxide semiconductor can be obtained by improving the
surface flatness. To improve the surface flatness, the oxide
semiconductor is preferably formed on a flat surface. Specifically,
the oxide semiconductor may be formed on a surface with an average
surface roughness (Ra) of less than or equal to 1 nm, preferably
less than or equal to 0.3 nm, further preferably less than or equal
to 0.1 nm.
[0117] The average surface roughness Ra is obtained by
three-dimension expansion of the center line average roughness that
is deflated by JIS B 0601 so as to be applied to a plane, and can
be expressed as an "average value of the absolute values of
deviations from a reference surface to a specific surface" and is
defined by the formula below.
Ra = 1 S 0 .intg. y 1 y 2 .intg. x 1 x 2 f ( x , y ) - Z 0 x y [
Formula 1 ] ##EQU00001##
[0118] In the above formula, S.sub.0 represents the area of a
measurement surface (a quadrangle region which is defined by four
points represented by (x.sub.1, y.sub.1), (x.sub.1, y.sub.2),
(x.sub.2, y.sub.1), and (z.sub.2, y.sub.2)), and Z.sub.0 represents
the average height of the measurement surface. The average surface
roughness Ra can be measured with an atomic force microscope
(AFM).
[0119] As the oxide semiconductor stacked layer 403 (the first
oxide semiconductor layer 101, the second oxide semiconductor layer
102, the third oxide semiconductor layer 103), an oxide
semiconductor layer including a crystal and having crystallinity
(crystalline oxide semiconductor layer) can be used. In the crystal
state in the crystalline oxide semiconductor stacked layer, crystal
axes are arranged either chaotically or with orientation.
[0120] For example, an oxide semiconductor layer including a
crystal having a c-axis which is substantially perpendicular to a
surface of the oxide semiconductor layer can be used as the
crystalline oxide semiconductor layer.
[0121] The oxide semiconductor layer including a crystal having a
c-axis which is substantially perpendicular to the surface of the
oxide semiconductor layer has neither a single crystal structure
nor an amorphous structure, but is a film of a crystalline oxide
semiconductor with c-axis alignment (also referred to as a c-axis
aligned crystalline oxide semiconductor (CAAC)).
[0122] The CAAC-OS film is neither a complete single crystal nor
complete amorphous. The CAAC-OS film is an oxide semiconductor film
with a crystal-amorphous mixed phase structure where crystal parts
are included in an amorphous phase. In most cases, the crystal part
fits inside a cube whose one side is less than 100 nm. From an
observation image with a transmission electron microscope (TEM),
the boundary between an amorphous part and a crystal part in the
CAAC-OS film is not clear. Further, with the TEM, a grain boundary
in the CAAC-OS film is not found, either. Thus, in the CAAC-OS
film, a reduction in electron mobility, due to the grain boundary,
is suppressed.
[0123] In each of the crystal parts included in the CAAC-OS film, a
c-axis is aligned in a direction parallel to a normal vector of a
surface where the CAAC-OS film is formed or a normal vector of a
surface of the CAAC-OS film, triangular or hexagonal atomic
arrangement which is seen from the direction perpendicular to the
a-b plane is formed, and metal atoms are arranged in a layered
manner or metal atoms and oxygen atoms are arranged in a layered
manner when seen from the direction perpendicular to the c-axis.
Among crystal parts, the directions of the a-axis and the b-axis of
one crystal part may be different from those of another crystal
part. In this specification, the term "perpendicular" encompasses a
range from 85.degree. to 95.degree. both inclusive. In addition,
the term "parallel" encompasses a range from -5.degree. to
5.degree. both inclusive.
[0124] In the CAAC-OS film, distribution of crystal parts is not
necessarily uniform. For example, in the formation process of the
CAAC-OS film, in the case where crystal growth occurs from the top
surface side of the oxide semiconductor film, the proportion of
crystal parts in the vicinity of the top surface of the oxide
semiconductor film is higher than that in the vicinity of the
surface where the oxide semiconductor film is formed, in some
cases. Further, when an impurity is added to the CAAC-OS film, the
crystal part in a region to which the impurity is added is turned
into amorphous in some cases.
[0125] Since the c-axes of the crystal parts included in the
CAAC-OS film are aligned in the direction parallel to a normal
vector of a surface where the CAAC-OS film is formed or a normal
vector of a top surface of the CAAC-OS film, the directions of the
c-axes may be different from each other depending on the shape of
the CAAC-OS film (the cross-sectional shape of the surface where
the CAAC-OS film is formed or the cross-sectional shape of the top
surface of the CAAC-OS film). The direction of c-axis of the
crystal part is parallel to a normal vector of the surface where
the CAAC-OS film is formed or a normal vector of the surface of the
CAAC-OS film upon deposition. The crystal part is formed by
deposition or by performing crystallization treatment such as heat
treatment after film deposition.
[0126] With use of the CAAC-OS film in a transistor, change in
electrical characteristics of the transistor due to irradiation
with visible light or ultraviolet light can be reduced. Thus, the
transistor has high reliability.
[0127] There are three methods for obtaining a crystalline oxide
semiconductor layer having c-axis alignment. The first is a method
in which an oxide semiconductor layer is deposited at a
temperature(s) higher than or equal to 200.degree. C. and lower
than or equal to 500.degree. C. such that the c-axis is
substantially perpendicular to its top surface. The second is a
method in which an oxide semiconductor film is deposited thin, and
is subjected to heat treatment at a temperature(s) higher than or
equal to 200.degree. C. and lower than or equal to 700.degree. C.,
so that the c-axis is substantially perpendicular to its top
surface. The third is a method in which a first-layer oxide
semiconductor film is deposited thin, and is subjected to heat
treatment at a temperature(s) higher than or equal to 200.degree.
C. and lower than or equal to 700.degree. C., and a second-layer
oxide semiconductor film is deposited thereover, so that the c-axis
is substantially perpendicular to its top surface.
[0128] The first oxide semiconductor layer 101, the second oxide
semiconductor layer 102, and the third oxide semiconductor layer
103 have thicknesses greater than or equal to 1 nm and less than or
equal to 10 nm (preferably greater than or equal to 5 nm and less
than or equal to 30 nm) and can be formed by a sputtering method, a
molecular beam epitaxy (MBE) method, a CVD method, a pulse laser
deposition method, an atomic layer deposition (ALD) method, or the
like as appropriate. The first oxide semiconductor layer 101, the
second oxide semiconductor layer 102, and the third oxide
semiconductor layer 103 may be formed using a sputtering apparatus
which performs film formation with top surfaces of a plurality of
substrates set substantially perpendicular to a top surface of a
sputtering target.
[0129] Electrical properties of a transistor using an oxide
semiconductor layer are affected by the energy gap of the oxide
semiconductor layer. For example, the on-state properties (e.g.,
on-state current and field-effect mobility) of the transistor using
an oxide semiconductor layer can increase as the energy gap of the
oxide semiconductor layer gets small, whereas the off-state current
of the transistor can decrease as the energy gap of the oxide
semiconductor layer gets large.
[0130] By using the oxide semiconductor stacked layer 403 using a
plurality of oxide semiconductor layers whose energy gaps are
different from each other, the electrical characteristics of the
transistor 440a, 440b, 480 can be adjusted with higher accuracy,
providing the transistor 440a, 440b, 480 with appropriate
electrical characteristics.
[0131] For example, in the oxide semiconductor stacked layer 403 of
the transistor 480 shown in FIG. 4A, the energy gap of the second
oxide semiconductor layer 102 is smaller than those of the first
oxide semiconductor layer 101 and the third oxide semiconductor
layer 103. In that case, the energy gaps of the first oxide
semiconductor layer 101 and the third oxide semiconductor layer 103
can be substantially the same as each other.
[0132] An energy band diagram of FIG. 4A in the thickness direction
(E1-E2 direction) is shown in FIG. 4C. It is preferable in the
transistor 480 that respective materials of the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103 be selected so as to be
compatible with the energy band diagram shown in FIG. 4C. However,
a sufficient effect can be provided by forming a buried channel in
the conduction band; thus, the energy band diagram is not limited
to the energy band diagram having steps on its conduction band side
and its valence band side as shown in FIG. 4C, and may be an energy
band diagram having a step only on its conduction band side, for
example.
[0133] For example, an In--Ga--Zn-based oxide film (with an energy
gap of 3.2 eV), an In--Sn--Zn-based oxide film (with an energy gap
of 2.8 eV), and an In--Ga--Zn-based oxide film (with an energy gap
of 3.2 eV) are used as the first oxide semiconductor layer 101, the
second oxide semiconductor layer 102, and the third oxide
semiconductor layer 103 in the transistor 480, respectively.
[0134] Further, as the oxide semiconductor stacked layer 403
consisting of three stacked layers as in the transistor 480, a
stack of an In--Ga--Zn-based oxide film serving as the first oxide
semiconductor layer 101, an In--Zn-based oxide film serving as the
second oxide semiconductor layer 102, and an In--Ga--Zn-based oxide
film serving as the third oxide semiconductor layer 103; a stack of
a Ga--Zn-based oxide film serving as the first oxide semiconductor
layer 101, an In--Sn--Zn-based oxide film serving as the second
oxide semiconductor layer 102, and a Ga--Zn-based oxide film
serving as the third oxide semiconductor layer 103; a stack of a
Ga--Zn-based oxide film serving as the first oxide semiconductor
layer 101, an In--Zn-based oxide film serving as the second oxide
semiconductor layer 102, and a Ga--Zn-based oxide film serving as
the third oxide semiconductor layer 103; a stack of an In--Ga-based
oxide film serving as the first oxide semiconductor layer 101, an
In--Ga--Zn-based oxide film serving as the second oxide
semiconductor layer 102, and an In--Ga-based oxide film serving as
the third oxide semiconductor layer 103; or a stack of an
In--Ga--Zn-based oxide film serving as the first oxide
semiconductor layer 101, an indium oxide (In-based oxide) film
serving as the second oxide semiconductor layer 102, and an
In--Ga--Zn-based oxide film serving as the third oxide
semiconductor layer 103 can be used, for example.
[0135] The stacked structure in which the second oxide
semiconductor layer 102 whose energy gap is smaller is sandwiched
by the first oxide semiconductor layer 101 and the third oxide
semiconductor layer 103 whose energy gaps are larger enables the
off-state current (leakage current) of the transistor 480 to be
reduced.
[0136] FIGS. 2A to 2E illustrate an example of a method for
manufacturing the transistor 440a.
[0137] First, a conductive film is formed over the substrate 400
having an insulating surface, and then, the gate electrode layer
401 is formed by a first photolithography process. A resist mask
may be formed by an inkjet method. Formation of the resist mask by
an inkjet method involves no photomask; thus, manufacturing cost
can be reduced.
[0138] There is no particular limitation on a substrate that can be
used as the substrate 400 having an insulating surface as long as
it has heat resistance enough to withstand heat treatment performed
later. For example, a glass substrate of barium borosilicate glass,
aluminoborosilicate glass, or the like, a ceramic substrate, a
quartz substrate, or a sapphire substrate can be used. A single
crystal semiconductor substrate or a polycrystalline semiconductor
substrate of silicon, silicon carbide, or the like; a compound
semiconductor substrate of silicon germanium or the like; an SOI
substrate; or the like can be used as the substrate 400, or such a
substrate with a semiconductor element provided thereover can be
used as the substrate 400.
[0139] The semiconductor device may be manufactured using a
flexible substrate as the substrate 400. To manufacture a flexible
semiconductor device, the transistor 440a including the oxide
semiconductor stacked layer 403 may be directly formed over a
flexible substrate; or the transistor 440a including the oxide
semiconductor stacked layer 403 may be formed over a substrate, and
then separated and transferred to a flexible substrate. To separate
the transistor 440a from the substrate and transfer to the flexible
substrate, a separation layer may be provided between the substrate
and the transistor 440a including the oxide semiconductor film.
[0140] An insulating film serving as a base film may be provided
between the substrate 400 and the gate electrode layer 401. The
base film has a function of preventing diffusion of an impurity
element from the substrate 400, and can be formed of a single-layer
structure or a stacked-layer structure using one or more of a
silicon nitride film, a silicon oxide film, a silicon nitride oxide
film, and a silicon oxynitride film. The base film can be formed by
using aluminum oxide, aluminum oxynitride, hafnium oxide, gallium
oxide, or a mixed material thereof. The base film can be formed by
a plasma-enhanced CVD method, a sputtering method, or the like.
[0141] The gate electrode layer 401 can be formed of a single-layer
structure or a stacked-layer structure using a metal material such
as molybdenum, titanium, tantalum, tungsten, aluminum, copper,
neodymium, or scandium, and/or an alloy material which contains any
of these materials as a main component by a plasma-enhanced CVD
method, a sputtering method, or the like. Alternatively, a
semiconductor film typified by a polycrystalline silicon film doped
with an impurity element such as phosphorus, or a silicide film
such as a nickel silicide film may be used as the gate electrode
layer 401. The gate electrode layer 401 has either a single-layer
structure or a stacked-layer structure.
[0142] The gate electrode layer 401 can also be formed using a
conductive material such as indium tin oxide, indium oxide
containing tungsten oxide, indium zinc oxide containing tungsten
oxide, indium oxide containing titanium oxide, indium tin oxide
containing titanium oxide, indium zinc oxide, or indium tin oxide
to which silicon oxide is added. It is also possible that the gate
electrode layer 401 has a stacked-layer structure of the above
conductive material and the above metal material.
[0143] The gate electrode layer 401 may have a stacked-layer
structure one layer of which is formed using an In--Sn-based metal
oxide, an In--Sn--Zn-based metal oxide, an In--Al--Zn-based metal
oxide, a Sn--Ga--Zn-based metal oxide, an Al--Ga--Zn-based metal
oxide, a Sn--Al--Zn-based metal oxide, an In--Zn-based metal oxide,
a Sn--Zn-based metal oxide, an Al--Zn-based metal oxide, an
In-based metal oxide, a Sn-based metal oxide, or a Zn-based metal
oxide.
[0144] As one layer of the gate electrode layer 401 which is in
contact with the gate insulating film 402, a metal oxide containing
nitrogen, specifically, an In--Ga--Zn--O film containing nitrogen,
an In--Sn--O film containing nitrogen, an In--Ga--O film containing
nitrogen, an In--Zn--O film containing nitrogen, a Sn--O film
containing nitrogen, an In--O film containing nitrogen, or a metal
nitride (InN, SnN, or the like) film can be used. These films each
have a work function of 5 eV or higher, preferably 5.5 eV or
higher, which enables the threshold voltage of the transistor to
take a positive value when used as the gate electrode layer, so
that a switching element of co-called normally-off type can be
realized.
[0145] For example, it is preferable that the gate electrode layer
401 have a stacked-layer structure and, as one layer in the
stacked-layer structure, an oxynitride film containing indium,
gallium, and zinc which are materials having a high work function
be used. The oxynitride film containing indium, gallium, and zinc
is formed in a mixed gas atmosphere containing argon and
nitrogen.
[0146] For example, the gate electrode layer 401 can have a
stacked-layer structure in which a copper film, a tungsten film,
and an oxynitride film containing indium, gallium, and zinc are
stacked in this order from the substrate 400 side or a
stacked-layer structure in which a tungsten film, a tungsten
nitride film, a copper film, and a titanium film are stacked in
this order from the substrate 400 side.
[0147] Next, the gate insulating film 402 is formed over the gate
electrode layer 401 (see FIG. 2A). It is preferable that the gate
insulating film 402 be formed in consideration of the size of the
transistor and the step coverage with the gate insulating film
402.
[0148] The gate insulating film 402 can have a thickness greater
than or equal to 1 nm and less than or equal to 20 nm and can be
formed by a sputtering method, an MBE method, a CVD method, a pulse
laser deposition method, an ALD method, or the like as appropriate.
The gate insulating film 402 may be formed using a sputtering
apparatus which performs film deposition with top surfaces of a
plurality of substrates set substantially perpendicular to a top
surface of a sputtering target.
[0149] The gate insulating film 402 can be formed using a silicon
oxide film, a gallium oxide film, an aluminum oxide film, a silicon
nitride film, a silicon oxynitride film, an aluminum oxynitride
film, or a silicon nitride oxide film.
[0150] The gate insulating film 402 can also be formed using a
high-k material such as hafnium oxide, yttrium oxide, hafnium
silicate (HfSi.sub.xO.sub.y (x>0, y>0)), hafnium silicate to
which nitrogen is added (HfSiO.sub.xN.sub.y (x>0, y>0)),
hafnium aluminate (HfAl.sub.xO.sub.y (x>0, y>0)), or
lanthanum oxide, whereby gate leakage current can be reduced.
[0151] The gate insulating film 402 has either a single-layer
structure or a stacked-layer structure; however, an oxide
insulating film is preferably used as the film to be in contact
with the oxide semiconductor stacked layer 403. In this embodiment,
a silicon oxide film is used as the gate insulating film 402.
[0152] In the case where the gate insulating film 402 has a
stacked-layer structure, for example, a silicon oxide film, an
In--Hf--Zn-based oxide film, and the oxide semiconductor stacked
layer 403 may be sequentially stacked over the gate electrode layer
401; a silicon oxide film, an In--Zr--Zn-based oxide film having an
atomic ratio of In:Zr:Zn=1:1:1, and the oxide semiconductor stacked
layer 403 may be sequentially stacked over the gate electrode layer
401; or a silicon oxide film, an In--Gd--Zn-based oxide film having
an atomic ratio of In:Gd:Zn=1:1:1, and the oxide semiconductor
stacked layer 403 may be sequentially stacked over the gate
electrode layer 401.
[0153] Next, a stacked layer 493 of oxide semiconductor films
including a first oxide semiconductor film 191 and a second oxide
semiconductor film 192 is formed over the gate insulating film 402
(see FIG. 2B).
[0154] The gate insulating film 402, which is in contact with the
stacked layer 493 of the oxide semiconductor films (the oxide
semiconductor stacked layer 403), preferably contains oxygen which
exceeds at least the stoichiometric composition ratio in the film
(the bulk). For example, in the case where a silicon oxide film is
used as the gate insulating film 402, the composition formula is
SiO.sub.2-.alpha. (.alpha.>0). With such a film as the gate
insulating film 402, oxygen can be supplied to the stacked layer
493 of the oxide semiconductor films (the oxide semiconductor
stacked layer 403), leading to favorable characteristics. By supply
of oxygen to the stacked layer 493 of the oxide semiconductor films
(the oxide semiconductor stacked layer 403), oxygen vacancies in
the film can be compensated.
[0155] For example, an insulating film containing a large amount of
(an excess of) oxygen, which is a supply source of oxygen, may be
provided as the gate insulating film 402 so as to be in contact
with the stacked layer 493 of the oxide semiconductor films (the
oxide semiconductor stacked layer 403), whereby oxygen can be
supplied from the gate insulating film 402 to the stacked layer 493
of the oxide semiconductor films (the oxide semiconductor stacked
layer 403). Heat treatment may be performed in the state where the
stacked layer 493 of the oxide semiconductor films (the oxide
semiconductor stacked layer 403) and the gate insulating film 402
are at least partly in contact with each other to supply oxygen to
the stacked layer 493 of the oxide semiconductor films (the oxide
semiconductor stacked layer 403).
[0156] In order that hydrogen or water will be not contained in the
stacked layer 493 of the oxide semiconductor films (the first oxide
semiconductor film 191 and the second oxide semiconductor film 192)
as much as possible in the formation step of the stacked layer 493
of the oxide semiconductor films (the first oxide semiconductor
film 191 and the second oxide semiconductor film 192), it is
preferable to heat the substrate provided with the gate insulating
film 402 in a preheating chamber in a sputtering apparatus as a
pretreatment for formation of the stacked layer 493 of the oxide
semiconductor films (the first oxide semiconductor film 191 and the
second oxide semiconductor film 192) so that impurities such as
hydrogen and water adsorbed to the substrate and/or the gate
insulating film 402 are eliminated and evacuated. As an exhaustion
unit provided in the preheating chamber, a cryopump is
preferable.
[0157] Planarizing treatment may be performed on the region of the
gate insulating film 402 which is in contact with the stacked layer
493 of the oxide semiconductor films (the oxide semiconductor
stacked layer 403). As the planarizing treatment, polishing
treatment (e.g., chemical mechanical polishing (CMP)), dry-etching
treatment, or plasma treatment can be used, though there is no
particular limitation on the planarizing treatment.
[0158] As the plasma treatment, a reverse sputtering in which an
argon gas is introduced and plasma is produced can be performed,
for example. The reverse sputtering is a method in which voltage is
applied to a substrate side with use of an RF power source in an
argon atmosphere and plasma is generated in the vicinity of the
substrate so that a substrate surface is modified. Instead of the
argon atmosphere, a nitrogen atmosphere, a helium atmosphere, an
oxygen atmosphere, or the like may be used. The reverse sputtering
can remove particle substances (also referred to as particles or
dust) attached to the top surface of the gate insulating film
402.
[0159] As the planarizing treatment, polishing treatment,
dry-etching treatment, or plasma treatment may be performed plural
times and/or in combination. Further, the order of process steps of
such a combination is not particularly limited and may be set as
appropriate in accordance with roughness of the top surface of the
gate insulating film 402.
[0160] The first oxide semiconductor film 191 and the second oxide
semiconductor film 192 each are preferably deposited under a
condition such that much oxygen is contained (for example, by a
sputtering method in an atmosphere of 100% oxygen) so as to be a
film containing much oxygen (preferably having a region containing
an excess of oxygen as compared to the stoichiometric composition
ratio of the oxide semiconductor in a crystalline state).
[0161] As a target used for forming the first oxide semiconductor
film 191 by a sputtering method in this embodiment, for example, an
oxide target having a composition ratio of In:Sn:Zn=1:2:2, 2:1:3,
1:1:1, or 20:45:35 [molar ratio] is used to form an In--Sn--Zn--O
film.
[0162] Further, in this embodiment, as a target used for forming
the second oxide semiconductor film 192 by a sputtering method, for
example, an oxide target having a composition ratio of
In.sub.2O.sub.3:Ga.sub.2O.sub.3:ZnO=1:1:2 [molar ratio] is used to
form an In--Ga--Zn-based oxide film. Without limitation to the
materials and the composition described above, for example, a metal
oxide target having a composition ratio of
In.sub.2O.sub.3:Ga.sub.2O.sub.3:ZnO=1:1:1 [molar ratio] may be
used.
[0163] The filling factor of the metal oxide target is greater than
or equal to 90% and less than or equal to 100%, preferably greater
than or equal to 95% and less than or equal to 99.9%. Such a metal
oxide target with high filling factor enables deposition of a dense
oxide semiconductor film.
[0164] It is preferable that a high-purity gas from which an
impurity such as hydrogen, water, a hydroxyl group, or hydride is
removed be used as a sputtering gas for the deposition of each of
the first oxide semiconductor film 191 and the second oxide
semiconductor film 192.
[0165] The substrate is held in a deposition chamber kept under
reduced pressure. Then, a sputtering gas in which hydrogen and
water are removed is introduced into the deposition chamber from
which remaining water is being removed, so that the stacked layer
493 of the oxide semiconductor films (the first oxide semiconductor
film 191 and the second oxide semiconductor film 192) is formed
over the substrate 400 with the use of the target. To remove water
remaining in the deposition chamber, an entrapment vacuum pump such
as a cryopump, an ion pump, or a titanium sublimation pump is
preferably used. As an exhaustion unit, a turbo molecular pump to
which a cold trap is added may be used. In the deposition chamber
which is evacuated with the cryopump, for example, a hydrogen atom,
a compound containing a hydrogen atom, such as water (H.sub.2O),
(further preferably, also a compound containing a carbon atom), and
the like are removed, whereby the concentration of impurities in
the stacked layer 493 of the oxide semiconductor films (the first
oxide semiconductor film 191 and the second oxide semiconductor
film 192) can be reduced.
[0166] The gate insulating film 402 and the stacked layer 493 of
the oxide semiconductor films (the first oxide semiconductor film
191 and the second oxide semiconductor film 192) are preferably
formed in succession without exposure to the air. According to
successive formation of the gate insulating film 402 and the
stacked layer 493 of the oxide semiconductor films (the first oxide
semiconductor film 191 and the second oxide semiconductor film 192)
without exposure to the air, impurities such as hydrogen and water
can be prevented from being adsorbed onto a top surface of the gate
insulating film 402.
[0167] For example, the CAAC-OS film is formed by a sputtering
method with a polycrystalline oxide semiconductor sputtering
target. When ions collide with the sputtering target, a crystal
region included in the sputtering target may be separated from the
target along an a-b plane; in other words, a sputtered particle
having a plane parallel to an a-b plane (flat-plate-like sputtered
particle or pellet-like sputtered particle) may flake off from the
sputtering target. In that case, the flat-plate-like sputtered
particle reaches a substrate while maintaining their crystal state,
whereby the CAAC-OS film can be formed.
[0168] For the deposition of the CAAC-OS film, the following
conditions are preferably used.
[0169] By reducing the amount of impurities entering the CAAC-OS
film during the deposition, the crystal state can be prevented from
being broken by the impurities. For example, the concentration of
impurities (e.g., hydrogen, water, carbon dioxide, or nitrogen)
which exist in the deposition chamber may be reduced. Furthermore,
the concentration of impurities in a deposition gas may be reduced.
Specifically, a deposition gas whose dew point is -80.degree. C. or
lower, preferably -100.degree. C. or lower is used.
[0170] By increasing the substrate heating temperature during the
deposition, migration of a sputtered particle is likely to occur
after the sputtered particle reaches a substrate surface.
Specifically, the substrate heating temperature during the
deposition is higher than or equal to 100.degree. C. and lower than
or equal to 740.degree. C., preferably higher than or equal to
200.degree. C. and lower than or equal to 500.degree. C. By
increasing the substrate heating temperature during the deposition,
when the flat-plate-like sputtered particle reaches the substrate,
migration occurs on the substrate surface, so that a flat plane of
the flat-plate-like sputtered particle is attached to the
substrate.
[0171] Furthermore, it is preferable that the proportion of oxygen
in the deposition gas be increased and the power be optimized in
order to reduce plasma damage at the deposition. The proportion of
oxygen in the deposition gas is 30 vol % or higher, preferably 100
vol %.
[0172] As an example of the sputtering target, an In--Ga--Zn--O
compound target is described below.
[0173] The In--Ga--Zn--O compound target, which is polycrystalline,
is made by mixing InO.sub.X powder, GaO.sub.Y powder, and ZnO.sub.Z
powder in a predetermined molar ratio, applying pressure, and
performing heat treatment at a temperature higher than or equal to
1000.degree. C. and lower than or equal to 1500.degree. C. Note
that X, Y and Z are given positive numbers. Here, the predetermined
molar ratio of InO.sub.X powder to GaO.sub.Y powder and ZnO.sub.Z
powder is, for example, 2:2:1, 8:4:3, 3:1:1, 1:1:1, 4:2:3, or
3:1:2. The kinds of powder and the molar ratio for mixing powder
may be determined as appropriate depending on the desired
sputtering target.
[0174] The stacked layer 493 of the oxide semiconductor films (the
first oxide semiconductor film 191 and the second oxide
semiconductor film 192) is processed into the island-shaped oxide
semiconductor stacked layer 403 (the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102) by a
photolithography process (see FIG. 2C).
[0175] A resist mask used for forming the island-shaped oxide
semiconductor stacked layer 403 may be formed by an inkjet method.
Formation of the resist mask by an inkjet method involves no
photomask; thus, manufacturing cost can be reduced.
[0176] The etching of the oxide semiconductor film may be dry
etching, wet etching, or both dry etching and wet etching. As an
etchant used for wet etching of the oxide semiconductor film, for
example, a mixed solution of phosphoric acid, acetic acid, and
nitric acid, or the like can be used. Further, ITO07N (produced by
KANTO CHEMICAL CO., INC.) may be used as well.
[0177] In this embodiment, the first oxide semiconductor film 191
and the second oxide semiconductor film 192 are etched with the
same mask, whereby the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102 are formed such that
respective edges of their side surfaces are aligned with each
other. The side surfaces (edges) of the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102 are exposed
in the oxide semiconductor stacked layer 403.
[0178] In any embodiment of the present invention, the oxide
semiconductor stacked layer is either processed or not processed
into an island shape.
[0179] In the case where a contact hole(s) is/are formed in the
gate insulating film 402, the step of forming the contact hole(s)
can be performed in processing the first oxide semiconductor film
191 and the second oxide semiconductor film 192.
[0180] As shown in the transistor 449 shown in FIG. 3C, heat
treatment may be performed on the oxide semiconductor stacked layer
403, so that the mixed region 105 may be formed between the first
oxide semiconductor layer 101 and the second oxide semiconductor
layer 102. The heat treatment may performed at a temperature at
which the elements in the first oxide semiconductor layer 101 and
the second oxide semiconductor layer 102 can be dispersed by heat
under such a condition that the first oxide semiconductor layer 101
and the second oxide semiconductor layer 102 do not form a mixed
region whose composition is uniform all over the entire region of
the oxide semiconductor stack 403.
[0181] The heat treatment can be performed under reduced pressure,
a nitrogen atmosphere, an oxygen atmosphere, the air (ultra-dry
air), a rare gas atmosphere, or the like. The heat treatment may be
performed plural times at different conditions (temperatures,
atmospheres, times, or the like). For example, the heat treatment
may be performed at 650.degree. C. under a nitrogen atmosphere for
1 hour and then under an oxygen atmosphere for 1 hour.
[0182] The step of performing the heat treatment for forming the
mixed region 105 is not particularly limited as long as it is after
the formation of the first oxide semiconductor film 191 and the
second oxide semiconductor film 192; it may be performed on the
first oxide semiconductor film 191 and the second oxide
semiconductor film 192 in their film state or on the island-shaped
first oxide semiconductor layer 101 and second oxide semiconductor
layer 102 as in this embodiment. In addition, the heat treatment
can also serve as other heat treatment performed in the
manufacturing process of the transistor, for example, heat
treatment for dehydration or dehydrogenation or heat treatment for
crystallization.
[0183] Further, heat treatment may be performed on the oxide
semiconductor stacked layer 403 (the stacked layer 493 of the oxide
semiconductor films) in order to remove excess hydrogen (including
water and a hydroxyl group) (to perform dehydration or
dehydrogenation treatment). The temperature of the heat treatment
is higher than or equal to 300.degree. C. and lower than or equal
to 700.degree. C., or lower than the strain point of a substrate.
The heat treatment can be performed under reduced pressure, a
nitrogen atmosphere, or the like. For example, the substrate is put
in an electric furnace which is a kind of heat treatment apparatus,
and the oxide semiconductor stacked layer 403 (the stacked layer
493 of the oxide semiconductor films) is subjected to heat
treatment at 450.degree. C. for one hour in a nitrogen
atmosphere.
[0184] Further, the heat treatment apparatus is not limited to the
electric furnace, and any device for heating an object by heat
conduction or heat radiation from a heating element such as a
resistance heating element may also be used. For example, an RTA
(rapid thermal anneal) apparatus such as a GRTA (gas rapid thermal
anneal) apparatus or an LRTA (lamp rapid thermal anneal) apparatus
can be used. The LRTA apparatus is an apparatus for heating an
object by radiation of light (an electromagnetic wave) emitted from
a lamp such as a halogen lamp, a metal halide lamp, a xenon arc
lamp, a carbon arc lamp, a high pressure sodium lamp, or a high
pressure mercury lamp. The GRTA apparatus is an apparatus for heat
treatment with a high-temperature gas. As the high-temperature gas,
an inert gas which does not react with an object by heat treatment,
such as nitrogen or a rare gas like argon, is used.
[0185] For example, as the heat treatment, GRTA may be performed as
follows: the substrate is put in an inert gas heated to high
temperature of 650.degree. C. to 700.degree. C., heated for several
minutes, and taken out of the inert gas.
[0186] In the heat treatment, it is preferable that water,
hydrogen, and the like be not contained in nitrogen or a rare gas
such as helium, neon, or argon. The purity of nitrogen or the rare
gas such as helium, neon, or argon which is introduced into the
heat treatment apparatus is preferably 6N (99.9999%) or more,
further preferably 7N (99.99999%) or more (that is, the impurity
concentration is preferably 1 ppm or less, further preferably 0.1
ppm or less).
[0187] In addition, after the oxide semiconductor stacked layer 403
(the stacked layer 493 of the oxide semiconductor films) is heated
by the heat treatment, a high-purity oxygen gas, a high-purity
N.sub.2O gas, or ultra dry air (the water amount is less than or
equal to 20 ppm (-55.degree. C. by conversion into a dew point),
preferably less than or equal to 1 ppm, further preferably less
than or equal to 10 ppb according to the measurement with a dew
point meter of a cavity ring down laser spectroscopy (CRDS) system)
may be introduced into the same furnace. It is preferable that
water, hydrogen, or the like be not included in the oxygen gas or
the N.sub.2O gas. The purity of the oxygen gas or the N.sub.2O gas
which is introduced into the heat treatment apparatus is preferably
6N or more, further preferably 7N or more (i.e., the impurity
concentration in the oxygen gas or the N.sub.2O gas is preferably 1
ppm or less, further preferably 0.1 ppm or less). The oxygen gas or
the N.sub.2O gas acts to supply oxygen that is a main constituent
material of the oxide semiconductor and that is reduced by the step
for removing an impurity for dehydration or dehydrogenation, so
that the oxide semiconductor stacked layer 403 (the stacked layer
493 of the oxide semiconductor films) can be a high-purified,
i-type (intrinsic) oxide semiconductor stacked layer.
[0188] The heat treatment for dehydration or dehydrogenation can be
performed anytime in the manufacturing process of the transistor
440a after formation of the stacked layer 493 of the oxide
semiconductor films (the first oxide semiconductor film 191 and the
second oxide semiconductor film 192) before formation of the
insulating film 407. For example, the heat treatment can be
performed after formation of the stacked layer 493 of the oxide
semiconductor films (the first oxide semiconductor film 191 and the
second oxide semiconductor film 192) or after formation of the
island-shaped oxide semiconductor stacked layer 403 (the first
oxide semiconductor layer 101 and the second oxide semiconductor
layer 102).
[0189] The heat treatment for dehydration or dehydrogenation may be
performed plural times, and may also serve as another heat
treatment. For example, the heat treatment may be performed twice;
after formation of the first oxide semiconductor film 191 and after
formation of the second oxide semiconductor film 192.
[0190] The heat treatment for dehydration or dehydrogenation is
preferably performed before the oxide semiconductor stacked layer
is processed into an island shape to be the oxide semiconductor
stacked layer 403 (the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102) while the stacked layer 493
of the oxide semiconductor films (the first oxide semiconductor
film 191 and the second oxide semiconductor film 192) covers the
gate insulating film 402 because oxygen included in the gate
insulating film 402 can be prevented from being released by the
heat treatment.
[0191] Next, a conductive film for forming a source electrode layer
and a drain electrode layer (including a wiring formed of the same
layer as the source electrode layer and the drain electrode layer)
is formed over the gate insulating film 402 and the oxide
semiconductor stacked layer 403. The conductive film is formed of a
material that can withstand heat treatment performed later. As the
conductive film used for the source electrode layer and the drain
electrode layer, for example, a metal film containing an element
selected from Al, Cr, Cu, Ta, Ti, Mo, and W, a metal nitride film
containing any of the above elements as its component (a titanium
nitride film, a molybdenum nitride film, or a tungsten nitride
film), or the like can be used. A metal film having a high melting
point made of Ti, Mo, W, or the like or a metal nitride film made
of any of these elements (a titanium nitride film, a molybdenum
nitride film, or a tungsten nitride film) may be stacked on one of
or both of a lower side and an upper side of a metal film made of
Al, Cu, or the like. Alternatively, the conductive film used for
the source electrode layer and the drain electrode layer may be
formed of a conductive metal oxide. As the conductive metal oxide,
indium oxide (In.sub.2O.sub.3), tin oxide (SnO.sub.2), zinc oxide
(ZnO), indium oxide-tin oxide (In.sub.2O.sub.3--SnO.sub.2), indium
oxide-zinc oxide (In.sub.2O.sub.3--ZnO), or any of these metal
oxide materials in which silicon oxide is contained can be
used.
[0192] A resist mask is formed over the conductive film by a
photolithography process, and is selectively etched, so that the
source electrode layer 405a and the drain electrode layer 405b are
formed. Then, the resist mask is removed.
[0193] Since the side surfaces (edges) of the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 are exposed in the oxide semiconductor stacked layer 403, the
source electrode layer 405a and the drain electrode layer 405b are
formed in contact with respective parts of the side surfaces of the
first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102.
[0194] In order to reduce the number of photomasks used in a
photolithography process and reduce the number of photolithography
processes, an etching step may be performed with the use of a
multi-tone mask which is a light-exposure mask through which light
is transmitted to have a plurality of intensities. A resist mask
formed with the use of a multi-tone mask has a plurality of
thicknesses and further can be changed in shape by etching;
therefore, the resist mask can be used in a plurality of etching
steps for processing into different patterns. Therefore, one
multi-tone mask enables formation of a resist mask corresponding to
at least two kinds of different patterns. Thus, the number of
light-exposure masks can be reduced and the number of
photolithography processes can be reduced accordingly, leading to
simplification of a manufacturing process.
[0195] It is desired that the etching conditions of the conductive
film be optimized so as not to etch and cut the oxide semiconductor
stacked layer 403. However, it is difficult to obtain etching
conditions in which only the conductive film is etched and the
oxide semiconductor stacked layer 403 is not etched at all; in some
cases, part of the oxide semiconductor stacked layer 403 is etched
off through the etching of the conductive film, so that a groove
(depressed portion) is formed in the oxide semiconductor stacked
layer 403.
[0196] In this embodiment, a Ti film is used as the conductive film
and an In--Ga--Zn-based oxide semiconductor is used for the oxide
semiconductor stacked layer 403, an ammonium hydrogen peroxide
mixture (a mixture of ammonia, water, and hydrogen peroxide) is
used as the etchant.
[0197] Through the above-described process, the transistor 440a of
this embodiment can be manufactured (see FIG. 2D). By using the
oxide semiconductor stacked layer 403 using the plurality of oxide
semiconductor layers whose energy gaps are different from each
other (the first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102), electrical characteristics of the
transistor 440a, 440b can be adjusted with high accuracy, providing
the transistor 440a, 440b with appropriate electrical
characteristics.
[0198] Next, the insulating film 407 is formed in contact with part
of the oxide semiconductor stacked layer 403 (see FIG. 2E).
[0199] The insulating film 407 can be formed by a plasma-enhanced
CVD method, a sputtering method, an evaporation method, or the
like. As the insulating film 407, an inorganic insulating film such
as a silicon oxide film, a silicon oxynitride film, an aluminum
oxynitride film, or a gallium oxide film can be used as a typical
example.
[0200] Alternatively, as the insulating film 407, an aluminum oxide
film, a hafnium oxide film, a magnesium oxide film, a zirconium
oxide film, a lanthanum oxide film, a barium oxide film, or a metal
nitride film (e.g., an aluminum nitride film) can be used.
[0201] The insulating film 407 has either a single-layer structure
or a stacked-layer structure; for example, a stacked layer of a
silicon oxide film and an aluminum oxide film can be used.
[0202] The aluminum oxide film which can be used as the insulating
film 407 provided over the oxide semiconductor stacked layer 403
has a high blocking effect by which both of oxygen and impurities
such as hydrogen or water is prevented from being passed through
the film.
[0203] Therefore, in and after the manufacturing process, the
aluminum oxide film functions as a protective film for preventing
entry of an impurity such as hydrogen or water, which causes a
change, into the oxide semiconductor stacked layer 403 and release
of oxygen, which is a main constituent material of the oxide
semiconductor, from the oxide semiconductor stacked layer 403.
[0204] The insulating film 407 is preferably formed by a method
such as a sputtering method, in which an impurity such as water or
hydrogen does not enter the insulating film 407. It is preferable
that an insulating film in the insulating film 407 which is in
contact with the oxide semiconductor stacked layer 403 include an
excess of oxygen because it serves as a supply source of oxygen to
the oxide semiconductor stacked layer 403.
[0205] In this embodiment, a silicon oxide film with a thickness of
100 nm is formed as the insulating film 407 by a sputtering method.
The silicon oxide film can be formed by a sputtering method under a
rare gas (a typical example thereof is argon) atmosphere, an oxygen
atmosphere, or a mixed atmosphere of a rare gas and oxygen.
[0206] Alternatively, in the case where the insulating film 407 has
a stacked-layer structure, for example, an In--Hf--Zn-based oxide
film and a silicon oxide film may be stacked in this order over the
oxide semiconductor stacked layer 403; an In--Zr--Zn-based oxide
film whose atomic ratio is In:Zr:Zn=1:1:1 and a silicon oxide film
may be stacked in this order over the oxide semiconductor stacked
layer 403; or an In--Gd--Zn-based oxide film whose atomic ratio is
In:Gd:Zn=1:1:1 and a silicon oxide film may be stacked in this
order over the oxide semiconductor stacked layer 403.
[0207] Similarly to the formation of the oxide semiconductor film,
to remove residual water from the deposition chamber for the
insulating film 407, an entrapment vacuum pump (such as a cryopump)
is preferably used. By depositing the insulating film 407 in the
deposition chamber evacuated using a cryopump, the impurity
concentration of the insulating film 407 can be reduced. As the
evacuation unit for removing water remaining in the deposition
chamber for the insulating film 407, a turbo molecular pump
provided with a cold trap may be used as well.
[0208] A high-purity gas from which impurities such as hydrogen,
water, a hydroxyl group, and hydride are removed is preferably used
as a sputtering gas for the formation of the insulating film
407.
[0209] Further, as shown in FIGS. 3A and 3B, a planarization
insulating film 416 may be formed over a transistor 440c, 440d in
order to reduce surface roughness due to the transistor. As the
planarization insulating film 416, an organic material such as
polyimide, an acrylic resin, or a benzocyclobutene-based resin can
be used. Other than such organic materials, it is also possible to
use a low-dielectric constant material (a low-k material) or the
like. The planarization insulating film 416 may be formed by
stacking a plurality of insulating films formed using these
materials.
[0210] Further, respective openings reaching the source electrode
layer 405a and the drain electrode layer 405b may be formed in the
insulating film 407 and the planarization insulating film 416, and
a wiring layer electrically connected to the source electrode layer
405a and/or the drain electrode layer 405b may be formed in the
opening(s). The wiring layer enables connection to another
transistor, whereby a variety of circuits can be configured.
[0211] Parts of the source electrode layer 405a and the drain
electrode layer 405b may be over-etched at the etching step for
forming the openings reaching the source electrode layer 405a and
the drain electrode layer 405b. The source electrode layer 405a and
the drain electrode layer 405b may have a stacked-layer structure
in which a conductive film also functioning as an etching stopper
in forming the openings is included.
[0212] As shown in FIG. 3A, the transistor 440c is an example in
which a source electrode layer and a drain electrode layer have a
stacked-layer structure, in which a source electrode layer 404a and
a source electrode layer 405a are stacked as the source electrode
layer and a drain electrode layer 404b and a drain electrode layer
405b are stacked as the drain electrode layer. As shown in the
transistor 440c, respective openings reaching the source electrode
layer 404a and the drain electrode layer 404b may be formed in the
insulating film 416, the insulating film 407, and the source
electrode layer 405a or the drain electrode layer 405b, and a
wiring layer 465a and a wiring layer 465b electrically connecting
the source electrode layer 404a and the drain electrode layer 404b,
respectively, may be formed in their respective openings.
[0213] In the transistor 440c, the source electrode layer 404a and
drain electrode layer 404b each also function as an etching stopper
in forming the openings. A tungsten film, a tantalum nitride film,
or the like can be used as any of the source electrode layer 404a
and the drain electrode layer 404b, and a copper film, an aluminum
film, or the like can be used as any of the source electrode layer
405a and the drain electrode layer 405b.
[0214] As shown in the transistor 440d in FIG. 3B, the source
electrode layer 405a and the drain electrode layer 405b may be
provided only directly above the oxide semiconductor stacked layer
403 so as not to be in contact with the side surface of the oxide
semiconductor stacked layer 403. An etching step with a resist mask
formed using a multi-tone mask enables the structure shown in the
transistor 440d to be formed. Such a structure leads to further
reduction in leakage current (parasitic channel) of the source
electrode layer 405a and the drain electrode layer 405b of the
transistor 440d.
[0215] The wiring layer 465a and the wiring layer 465b each can be
formed using a material(s) and a method similar to those of the
gate electrode layer 401, the source electrode layer 405a, or the
drain electrode layer 405b. For example, as any of the wiring
layers 465a and 465b, a stacked layer of a tantalum nitride film
and a copper film, a stacked layer of a tantalum nitride film and a
tungsten film, or the like can be used.
[0216] In the oxide semiconductor stacked layer 403 which is highly
purified and whose oxygen vacancies are repaired, impurities such
as hydrogen and water are sufficiently removed; the hydrogen
concentration in the oxide semiconductor stacked layer 403 is less
than or equal to 5.times.10.sup.19 atoms/cm.sup.3, preferably less
than or equal to 5.times.10.sup.18 atoms/cm.sup.3. The hydrogen
concentration in the oxide semiconductor stacked layer 403 is
measured by secondary ion mass spectrometry (SIMS).
[0217] The current value in the off state (off-state current value)
of the transistor 440a using the highly purified oxide
semiconductor stacked layer 403 containing an excess of oxygen that
repairs an oxygen vacancy according to this embodiment is less than
or equal to 100 zA per micrometer of channel width at room
temperature (1 zA (zeptoampere)=1.times.10.sup.-21 A), preferably
less than or equal to 10 zA/.mu.m, further preferably less than or
equal to 1 zA/.mu.m, still further preferably less than or equal to
100 yA/.mu.m.
[0218] Accordingly, semiconductor devices for a variety of purposes
such as high functionality, high reliability, and low power
consumption can be provided.
Embodiment 2
[0219] In this embodiment, another embodiment of a semiconductor
device and a method for manufacturing the semiconductor device is
described with reference to FIGS. 7A to 7D, FIGS. 8A to 8D, and
FIGS. 11A and 11B. The above embodiment can be applied to the same
portion as, a portion having a function similar to, or a step
similar to that in the above embodiment; thus, repetitive
description is omitted. In addition, detailed description of the
same portions is also omitted.
[0220] Described in this embodiment is an example in which an upper
oxide semiconductor layer covers the side surface of a lower oxide
semiconductor layer in the oxide semiconductor stacked layer.
[0221] A transistor 340 shown in FIGS. 7A to 7C is an example of an
inverted staggered, bottom-gate transistor. FIG. 7A is a plane
view; FIG. 7B is a cross-sectional diagram along dashed line X-Y in
FIG. 7A; FIG. 7C is a cross-sectional diagram along dashed line V-W
in FIG. 7A.
[0222] As shown in FIG. 7B, which is the cross-sectional diagram in
the channel length direction, the transistor 340 includes the gate
electrode layer 401, the gate insulating film 402, the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 whose energy gaps are different from each other, the source
electrode layer 405a, and the drain electrode layer 405b, which are
provided in this order over the substrate 400 having an insulating
surface. The insulating film 407 is formed over the transistor
340.
[0223] The first oxide semiconductor layer 101 is provided on and
in contact with the gate insulating film 402. The second oxide
semiconductor layer 102 covers a top and side surfaces of the first
oxide semiconductor layer 101, and the peripheral edge of the
second oxide semiconductor layer 102 is in contact with the gate
insulating film 402. The structure in which the first oxide
semiconductor layer 101 is in contact with neither the source
electrode layer 405a nor the drain electrode layer 405b leads to
reduction in occurrence of leakage current (parasitic channel) of
the source electrode layer 405a and the drain electrode layer 405b
of the transistor 340.
[0224] FIG. 7C is the cross-sectional diagram in the channel width
direction, in which like FIG. 7B, the peripheral edge (side
surface) of the first oxide semiconductor layer 101 is covered with
the peripheral edge of the second oxide semiconductor layer 102 and
the first oxide semiconductor layer 101 is not in contact with the
insulating film 407.
[0225] Respective energy gaps of the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102 are
different from each other. In the example described in this
embodiment, respective compositions of the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 are different from each other and the energy gap of the second
oxide semiconductor layer 102 is larger than that of the first
oxide semiconductor layer 101.
[0226] FIGS. 8A to 8C illustrates a transistor 380a in which a
stacked layer consisting of the first oxide semiconductor layer
101, the second oxide semiconductor layer 102, and the third oxide
semiconductor layer 103 is used to form the oxide semiconductor
stacked layer 403.
[0227] The transistor 380a shown in FIGS. 8A to 8C is an example of
an inverted staggered, bottom-gate transistor. FIG. 8A is a plane
view; FIG. 8B is a cross-sectional diagram along dashed line X-Y in
FIG. 8A; FIG. 8C is a cross-sectional diagram along dashed line V-W
in FIG. 8A.
[0228] As shown in FIG. 8B, which is the cross-sectional diagram in
the channel length direction, the transistor 380a includes the gate
electrode layer 401, the gate insulating film 402, the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103, the source electrode
layer 405a, and the drain electrode layer 405b, which are provided
in this order over the substrate 400 having an insulating surface.
The insulating film 407 is formed over the transistor 380a.
[0229] The first oxide semiconductor layer 101 is provided on and
in contact with the gate insulating film 402. The second oxide
semiconductor layer 102 is stacked over the first oxide
semiconductor layer 101. The third oxide semiconductor layer 103
covers the side surface of the first oxide semiconductor layer 101
and a top and side surfaces of the second oxide semiconductor layer
102, and the peripheral edge of the third oxide semiconductor layer
103 is in contact with the gate insulating film 402. The structure
in which each of the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102 is in contact with neither the
source electrode layer 405a nor the drain electrode layer 405b
leads to reduction in occurrence of leakage current (parasitic
channel) of the source electrode layer 405a and the drain electrode
layer 405b of the transistor 380a.
[0230] FIG. 8C is the cross-sectional diagram in the channel width
direction, in which like FIG. 8B, the peripheral edges (side
surfaces) of the first oxide semiconductor layer 101 and the second
oxide semiconductor layer 102 are covered with the peripheral edge
of the third oxide semiconductor layer 103 and neither the first
oxide semiconductor layer 101 nor the second oxide semiconductor
layer 102 is in contact with the insulating film 407.
[0231] Respective energy gaps of the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102 are
different from each other. In the example described in this
embodiment, the energy gap of the second oxide semiconductor layer
102 is smaller than that of the first oxide semiconductor layer
101.
[0232] Respective energy gaps of the second oxide semiconductor
layer 102 and the third oxide semiconductor layer 103 are different
from each other. In the example described in this embodiment, the
energy gap of the third oxide semiconductor layer 103 is larger
than that of the second oxide semiconductor layer 102.
[0233] In this embodiment, the energy gap of the third oxide
semiconductor layer 103 is substantially the same as that of the
first oxide semiconductor layer 101.
[0234] For example, an In--Ga--Zn-based oxide film (with an energy
gap of 3.2 eV), an In--Sn--Zn-based oxide film (with an energy gap
of 2.8 eV), and an In--Ga--Zn-based oxide film (with an energy gap
of 3.2 eV) are used as the first oxide semiconductor layer 101, the
second oxide semiconductor layer 102, and the third oxide
semiconductor layer 103 in the transistor 380a, respectively.
[0235] Further, as the oxide semiconductor stacked layer 403
consisting of three stacked layers as in the transistor 380a, a
stack of an In--Ga--Zn-based oxide film serving as the first oxide
semiconductor layer 101, an In--Zn-based oxide film serving as the
second oxide semiconductor layer 102, and an In--Ga--Zn-based oxide
film serving as the third oxide semiconductor layer 103; a stack of
a Ga--Zn-based oxide film serving as the first oxide semiconductor
layer 101, an In--Sn--Zn-based oxide film serving as the second
oxide semiconductor layer 102, and a Ga--Zn-based oxide film
serving as the third oxide semiconductor layer 103; a stack of a
Ga--Zn-based oxide film serving as the first oxide semiconductor
layer 101, an In--Zn-based oxide film serving as the second oxide
semiconductor layer 102, and a Ga--Zn-based oxide film serving as
the third oxide semiconductor layer 103; a stack of an In--Ga-based
oxide film serving as the first oxide semiconductor layer 101, an
In--Ga--Zn-based oxide film serving as the second oxide
semiconductor layer 102, and an In--Ga-based oxide film serving as
the third oxide semiconductor layer 103; or a stack of an
In--Ga--Zn-based oxide film serving as the first oxide
semiconductor layer 101, an indium oxide (In-based oxide) film
serving as the second oxide semiconductor layer 102, and an
In--Ga--Zn-based oxide film serving as the third oxide
semiconductor layer 103 can be used, for example.
[0236] Further, the periphery of the second oxide semiconductor
layer 102 may be covered with the first oxide semiconductor layer
101 and the third oxide semiconductor layer 103, whereby an
increase in oxygen vacancies in the second oxide semiconductor
layer 102 can be suppressed, resulting in a structure of the
transistor 380a in which the threshold voltage is close to zero.
Also in that case, since the second oxide semiconductor layer 102
functions as a buried channel, the channel formation region can be
distanced from the interface of any insulating film, whereby
interface scattering of carriers is reduced, leading to a high
field-effect mobility.
[0237] In the transistor 380b shown in FIG. 11A, part of the gate
insulating film 402 is etched to be thin with the same mask as a
mask used for processing the first oxide semiconductor layer 101
and the second oxide semiconductor layer 102 into an island shape
(or with the first oxide semiconductor layer 101 and the second
oxide semiconductor layer 102 after being processed into an island
shape, as a mask). In the transistor 380b, the gate insulating film
402 is thicker in its region which overlaps with either the
island-shaped first oxide semiconductor layer 101 or the
island-shaped second oxide semiconductor layer 102 than in its
other region (region which overlaps with neither of them). Through
the etching of part of the gate insulating film 402 in processing
the first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102 into the island shape, an etching residue
such as a residue of the first oxide semiconductor layer 101 can be
removed, reducing occurrence of leakage current.
[0238] In a transistor 380c shown in FIG. 11B, the oxide
semiconductor stacked layer 403 is formed using 3 photolithography
processes. The oxide semiconductor stacked layer 403 included in
the transistor 380c is formed as follows: a first oxide
semiconductor film is deposited and processed using a first mask to
form the island-shaped first oxide semiconductor layer 101; a
second oxide semiconductor film is deposited over the island-shaped
first oxide semiconductor layer 101 and processed using a second
mask to form the island-shaped second oxide semiconductor layer
102; and a third oxide semiconductor film is deposited over the
island-shaped first oxide semiconductor layer 101 and the
island-shaped second oxide semiconductor layer 102 and processed
using a third mask to form the island-shaped third oxide
semiconductor layer 103.
[0239] The transistor 380c has a structure in which the side
surface of the first oxide semiconductor layer 101 is protruded
beyond the side surface of the second oxide semiconductor layer 102
and is an example in which the third oxide semiconductor layer 103
is in contact with part of the top surface of the first oxide
semiconductor layer 101.
[0240] Further, a transistor 418 which has a bottom-gate structure
of a channel-protective type is shown in FIG. 9B as another
embodiment of a semiconductor device.
[0241] As shown in FIG. 9B, which is a cross-sectional diagram in
the channel length direction, the transistor 418 includes the gate
electrode layer 401, the gate insulating film 402, the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103, the insulating film
427 functioning as a channel protective film, the source electrode
layer 405a, and the drain electrode layer 405b, which are provided
in this order over the substrate 400 having an insulating surface.
The insulating film 409 is formed over the transistor 418.
[0242] The first oxide semiconductor layer 101 is provided on and
in contact with the gate insulating film 402. The second oxide
semiconductor layer 102 is stacked over the first oxide
semiconductor layer 101. The third oxide semiconductor layer 103
covers the side surface of the first oxide semiconductor layer 101
and the top and side surfaces of the second oxide semiconductor
layer 102, and the peripheral edge of the third oxide semiconductor
layer 103 is in contact with the gate insulating film 402. The
structure in which each of the first oxide semiconductor layer 101
and the second oxide semiconductor layer 102 is in contact with
neither the source electrode layer 405a nor the drain electrode
layer 405b leads to reduction in occurrence of leakage current
(parasitic channel) of the source electrode layer 405a and the
drain electrode layer 405b of the transistor 418.
[0243] Further, a transistor 438 which has a bottom-gate structure
is shown in FIG. 10B as another embodiment of a semiconductor
device.
[0244] As shown in FIG. 10B, the transistor 438 includes the gate
electrode layer 401, the gate insulating film 402, the source
electrode layer 405a, the drain electrode layer 405b, and the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103, which are provided in
this order over the substrate 400 having an insulating surface. The
insulating film 407 is formed over the transistor 438.
[0245] The transistor 438 has the structure in which the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103 is provided over the
source electrode layer 405a and the drain electrode layer 405b. At
least one of their respective energy gaps of the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103 is different from the
other.
[0246] The first oxide semiconductor layer 101 is provided on and
in contact with the source electrode layer 405a and the drain
electrode layer 405b. The second oxide semiconductor layer 102 is
stacked over the first oxide semiconductor layer 101. The third
oxide semiconductor layer 103 covers the side surface of the first
oxide semiconductor layer 101 and the top and side surfaces of the
second oxide semiconductor layer 102, and the peripheral edge of
the third oxide semiconductor layer 103 is in contact with the
source electrode layer 405a and the drain electrode layer 405b.
[0247] As described above, the shape of each stacked oxide
semiconductor layer may differ depending on the oxide semiconductor
layer, and the oxide semiconductor stacked layer can have a variety
of shapes and a variety of structures.
[0248] Accordingly, semiconductor devices for a variety of purposes
such as high functionality, high reliability, and low power
consumption can be provided.
[0249] This embodiment can be implemented combining with another
embodiment as appropriate.
Embodiment 3
[0250] In this embodiment, another embodiment of a semiconductor
device and a method for manufacturing the semiconductor device is
described with reference to FIGS. 5A to 5D. The above embodiment
can be applied to the same portion as, a portion having a function
similar to, or a step similar to that in the above embodiment;
thus, repetitive description is omitted. In addition, detailed
description of the same portions is also omitted.
[0251] Described in this embodiment is an example in which in a
method for manufacturing a semiconductor device according to one
embodiment of the present invention, oxygen (which includes at
least one of an oxygen radical, an oxygen atom, and an oxygen ion)
is added to the oxide semiconductor stacked layer to supply oxygen
to the film after the oxide semiconductor stacked layer is
dehydrated or dehydrogenated.
[0252] The dehydration or dehydrogenation treatment may accompany
elimination of oxygen which is a main constituent material of an
oxide semiconductor to lead to a reduction in oxygen. An oxygen
vacancy exists in a portion where oxygen is eliminated in the oxide
semiconductor stacked layer, and a donor level which leads to a
change in the electric characteristics of a transistor is formed
owing to the oxygen vacancy.
[0253] Thus, oxygen is preferably supplied to the oxide
semiconductor stacked layer after being subjected to the
dehydration or dehydrogenation treatment. By supply of oxygen to
the oxide semiconductor stacked layer, oxygen vacancies in the film
can be repaired. Accordingly, the use of the oxide semiconductor
stacked layer for the transistor can lead to a reduction in a
variation in the threshold voltage V.sub.th of the transistor and a
shift of the threshold voltage .DELTA.V.sub.th due to an oxygen
vacancy. Further, the threshold voltage of the transistor can be
shifted in the positive direction to make the transistor a
normally-off transistor.
[0254] FIG. 5A corresponds to FIG. 2C, in which the gate electrode
layer 401, the gate insulating film 402, and the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 whose energy gaps are different from each other are formed over
the substrate 400 having an insulating surface.
[0255] Next, oxygen 431 (which includes at least one of an oxygen
radical, an oxygen atom, and an oxygen ion) is added to the oxide
semiconductor stacked layer 403 to supply oxygen, whereby an oxygen
excess region 111, 112 is formed in the oxide semiconductor stacked
layer 403 including the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102 (see FIG. 5B).
[0256] The oxygen excess region 111, 112 includes at least partly a
region where the oxygen content is higher than that in the
stoichiometric composition ratio of the oxide semiconductor in a
crystalline state. The oxygen 431 supplied to the oxygen excess
region 111, 112 can repair an oxygen vacancy in the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102.
[0257] The source electrode layer 405a and the drain electrode
layer 405b are formed over the gate insulating film 402 and the
oxide semiconductor stacked layer 403 including the oxygen excess
regions 111 and 112. In this manner, a transistor 443a is
manufactured (see FIG. 5C).
[0258] The addition of the oxygen 431 can be performed as well
after the source electrode layer 405a and the drain electrode layer
405b are formed. FIG. 5D illustrates a transistor 443b as an
example in which oxygen is added to the oxide semiconductor stacked
layer 403 including the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102 after formation of the source
electrode layer 405a and the drain electrode layer 405b.
[0259] As shown in FIG. 5D, the oxygen 431 is selectively added to
a channel formation region in the oxide semiconductor stacked layer
403 including the first oxide semiconductor layer 101 and the
second oxide semiconductor layer 102 with the source electrode
layer 405a and the drain electrode layer 405b functioned as a mask.
In the oxide semiconductor stacked layer 403 of the transistor
443b, a region which overlaps with neither the source electrode
layer 405a nor the drain electrode layer 405b has a higher oxygen
concentration than a region which overlaps with either the source
electrode layer 405a or the drain electrode layer 405b.
[0260] Further, a transistor 483 which has a bottom-gate structure
in which oxygen is added to the oxide semiconductor stacked layer
403 is shown in FIG. 4B as another embodiment of a semiconductor
device. FIG. 4A illustrates the transistor 480 in which a stacked
layer consisting of the first oxide semiconductor layer 101, the
second oxide semiconductor layer 102, and the third oxide
semiconductor layer 103 is used to form the oxide semiconductor
stacked layer 403.
[0261] The transistor 483 includes the gate electrode layer 401,
the gate insulating film 402, the oxide semiconductor stacked layer
403 including the first oxide semiconductor layer 101 including the
oxygen excess region 111, the second oxide semiconductor layer 102
including the oxygen excess region 112, and the third oxide
semiconductor layer 103 including an oxygen excess region 113, the
source electrode layer 405a, and the drain electrode layer 405b,
which are provided in this order over the substrate 400 having an
insulating surface. The insulating film 407 is formed over the
transistor 483.
[0262] Respective energy gaps of the first oxide semiconductor
layer 101, the second oxide semiconductor layer 102, and the third
oxide semiconductor layer 103 in the oxide semiconductor stacked
layer 403 of the transistor 483 are not the same as each other but
take at least two different values.
[0263] The transistor 483 is an example in which oxygen is added to
all over the oxide semiconductor stacked layer 403; the oxygen
excess region 111, the oxygen excess region 112, and the oxygen
excess region 113 are formed in all over the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103, respectively.
[0264] Further, a transistor 413 which has a bottom-gate structure
of a channel-protective type is shown in FIG. 9C as another
embodiment of a semiconductor device.
[0265] The transistor 413 includes the gate electrode layer 401,
the gate insulating film 402, the oxide semiconductor stacked layer
403 including the first oxide semiconductor layer 101 including the
oxygen excess region 111, the second oxide semiconductor layer 102
including the oxygen excess region 112, and the third oxide
semiconductor layer 103 including the oxygen excess region 113, the
insulating film 427 functioning as a channel protective film, the
source electrode layer 405a, and the drain electrode layer 405b,
which are provided in this order over the substrate 400 having an
insulating surface. The insulating film 409 is formed over the
transistor 413.
[0266] At least one of their respective energy gaps of the first
oxide semiconductor layer 101, the second oxide semiconductor layer
102, and the third oxide semiconductor layer 103 is different from
the other. In the example described as the transistor 413, the
energy gap of the second oxide semiconductor layer 102 is smaller
than those of the first oxide semiconductor layer 101 and the third
oxide semiconductor layer 103.
[0267] The transistor 413 is an example in which oxygen is added to
all over the oxide semiconductor stacked layer 403; the oxygen
excess region 111, the oxygen excess region 112, and the oxygen
excess region 113 are formed in all over the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103, respectively.
[0268] In the transistor 413, the first oxide semiconductor layer
101 is provided on and in contact with the gate insulating film
402. The second oxide semiconductor layer 102 is stacked over the
first oxide semiconductor layer 101. The third oxide semiconductor
layer 103 covers the side surface of the first oxide semiconductor
layer 101 and the top and side surfaces of the second oxide
semiconductor layer 102, and the peripheral edge of the third oxide
semiconductor layer 103 is in contact with the gate insulating film
402. The structure in which each of the first oxide semiconductor
layer 101 and the second oxide semiconductor layer 102 is in
contact with neither the source electrode layer 405a nor the drain
electrode layer 405b leads to reduction in occurrence of leakage
current (parasitic channel) of the source electrode layer 405a and
the drain electrode layer 405b of the transistor 413.
[0269] Further, a transistor 433 which has a bottom-gate structure
in which oxygen is added to the oxide semiconductor stacked layer
403 is shown in FIG. 10C as another embodiment of a semiconductor
device.
[0270] As shown in FIG. 10C, the transistor 433 includes the gate
electrode layer 401, the gate insulating film 402, the source
electrode layer 405a, the drain electrode layer 405b, and the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 including the oxygen excess region 111, the
second oxide semiconductor layer 102 including the oxygen excess
region 112, and the third oxide semiconductor layer 103 including
the oxygen excess region 113, which are provided in this order over
the substrate 400 having an insulating surface. The insulating film
407 is formed over the transistor 433.
[0271] The transistor 433 has the structure in which the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103 is provided over the
source electrode layer 405a and the drain electrode layer 405b. At
least one of their respective energy gaps of the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103 is different from the
other. In the example described as the transistor 433, the energy
gap of the second oxide semiconductor layer 102 is smaller than
those of the first oxide semiconductor layer 101 and the third
oxide semiconductor layer 103.
[0272] The transistor 433 is an example in which oxygen is added to
all over the oxide semiconductor stacked layer 403; the oxygen
excess region 111, the oxygen excess region 112, and the oxygen
excess region 113 are formed in all over the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103, respectively.
[0273] The oxygen is added either directly to the oxide
semiconductor stacked layer 403 in the state where the oxide
semiconductor stacked layer 403 is exposed or added through the
insulating film 407 in the transistor 433.
[0274] Examples in which oxygen is added to the oxide semiconductor
stacked layer 403 in the transistor 340, 380a described in
Embodiment 2, in which an upper oxide semiconductor layer covers
the side surface of a lower oxide semiconductor layer, so that an
oxygen excess region is formed are shown in FIGS. 7D and 8D.
[0275] A transistor 343 shown in FIG. 7D includes the gate
electrode layer 401, the gate insulating film 402, the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102 whose energy gaps are different from each other, the source
electrode layer 405a, and the drain electrode layer 405b, which are
provided in this order over the substrate 400 having an insulating
surface. The insulating film 407 is formed over the transistor 343.
The oxide semiconductor stacked layer 403 includes the first oxide
semiconductor layer 101 including the oxygen excess region 111 and
the second oxide semiconductor layer 102 including the oxygen
excess region 112 in the transistor 343.
[0276] A transistor 383 shown in FIG. 8D includes the gate
electrode layer 401, the gate insulating film 402, the oxide
semiconductor stacked layer 403 including the first oxide
semiconductor layer 101, the second oxide semiconductor layer 102,
and the third oxide semiconductor layer 103 whose energy gaps are
different from each other, the source electrode layer 405a, and the
drain electrode layer 405b, which are provided in this order over
the substrate 400 having an insulating surface. The insulating film
407 is formed over the transistor 383. The oxide semiconductor
stacked layer 403 includes the first oxide semiconductor layer 101
including the oxygen excess region 111, the second oxide
semiconductor layer 102 including the oxygen excess region 112, and
the third oxide semiconductor layer 103 including the oxygen excess
region 113 in the transistor 383.
[0277] The structure as shown in the transistors 343 and 383 in
which the upper oxide semiconductor layer, which has an energy gap
larger than that of the lower oxide semiconductor layer, covers the
side surface of the lower oxide semiconductor layer in the oxide
semiconductor stacked layer leads to reduction in occurrence of
leakage current (parasitic channel) of the source electrode layer
and the drain electrode layer of the transistor.
[0278] Oxygen which is added to the dehydrated or dehydrogenated
oxide semiconductor stacked layer 403 to supply oxygen to the film
can highly purify the oxide semiconductor stacked layer 403 and
make the film an electrically i-type (intrinsic). Change in the
electric characteristics of the transistor 443a, 443b, 413, 433,
343, 383 including the highly purified, electrically i-type
(intrinsic) oxide semiconductor stacked layer 403 is suppressed and
the transistor is thus electrically stable.
[0279] As the method for addition of oxygen, an ion implantation
method, an ion doping method, a plasma immersion ion implantation
method, plasma treatment, or the like can be used.
[0280] In the step of addition of oxygen, oxygen may be directly
added to the oxide semiconductor stacked layer 403 or added to the
oxide semiconductor stacked layer 403 through another film such as
the insulating film 407. An ion implantation method, an ion doping
method, a plasma immersion ion implantation method, or the like may
be employed for the addition of oxygen through another film,
whereas plasma treatment or the like can also be employed for the
addition of oxygen directly to the oxide semiconductor stacked
layer 403 in the state where the oxide semiconductor stacked layer
403 is exposed.
[0281] The addition of oxygen to the oxide semiconductor stacked
layer 403 can be performed anytime after dehydration or
dehydrogenation treatment is performed thereon. Further, oxygen may
be added plural times to the dehydrated or dehydrogenated oxide
semiconductor stacked layer 403.
[0282] For example, in Embodiment 1, the addition of oxygen to the
oxide semiconductor stacked layer 403 can be performed on the
exposed oxide semiconductor stacked layer 493 or the oxide
semiconductor stacked layer 403 after formation of the source
electrode layer 405a and the drain electrode layer 405b, after
formation of the gate insulating film 402, after formation of the
gate electrode layer 401, or after formation of the insulating film
407.
[0283] Further, it is preferable that the concentration of oxygen,
which is added by the step of oxygen addition, in the oxygen excess
region 111, 112 in the oxide semiconductor stacked layer 403 be
greater than or equal to 1.times.10.sup.18 atoms/cm.sup.3 and less
than or equal to 5.times.10.sup.21 atoms/cm.sup.3.
[0284] In the oxide semiconductor, oxygen is one of its main
constituent materials. Thus, it is difficult to accurately estimate
the oxygen concentration in the oxide semiconductor stacked layer
403 by a method such as secondary ion mass spectrometry (SIMS). In
other words, it can be said that it is difficult to determine
whether oxygen is intentionally added to the oxide semiconductor
stacked layer 403.
[0285] It is known that there exist isotopes of oxygen, such as
.sup.17O and .sup.18O, and .sup.17O and .sup.18O account for about
0.037% and about 0.204% of all of the oxygen atoms in nature,
respectively. That is to say, it is possible to measure the
concentrations of these isotopes which are intentionally added to
the oxide semiconductor stacked layer 403 by a method such as SIMS;
therefore, the oxygen concentration in the oxide semiconductor
stacked layer 403 can be estimated more accurately in some cases by
measuring the concentrations of these isotopes. Thus, the
concentrations of these isotopes may be measured to determine
whether oxygen is intentionally added to the oxide semiconductor
stacked layer 403.
[0286] Heat treatment is preferably performed after oxygen is added
to the oxide semiconductor film.
[0287] In the case where oxygen is directly added to the oxide
semiconductor stacked layer 403 as in the transistors 443a and 443b
in this embodiment, the gate insulating film 402 and the insulating
film 407 which are in contact with the oxide semiconductor stacked
layer 403 do not necessarily contain much oxygen. It is preferable
that a film having a high shielding effect (blocking effect)
against oxygen and impurities such as hydrogen and water be
provided as the insulating film 407 so that oxygen added to the
oxide semiconductor stacked layer 403 is not eliminated from the
oxide semiconductor stacked layer 403 and impurities such as
hydrogen and water do not enter the oxide semiconductor stacked
layer 403. For example, an aluminum oxide film or the like having a
high shielding effect (blocking effect) against both of oxygen and
impurities such as hydrogen and water may be used.
[0288] Needless to say, oxygen may be supplied by a plurality of
methods: for example, oxygen may be supplied both from a film
containing much oxygen provided as the gate insulating film 402 or
the insulating film 407 in contact with the oxide semiconductor
film, and by direct addition of oxygen to the oxide semiconductor
stacked layer 403.
[0289] Although an example in which oxygen is added to the oxide
semiconductor stacked layer 403 is described in this embodiment,
oxygen may be added to the gate insulating film 402, the insulating
film 407, or the like which is in contact with the oxide
semiconductor stacked layer 403. The addition of oxygen to the gate
insulating film 402 or the insulating film 407 which is in contact
with the oxide semiconductor stacked layer 403 to make the film an
oxygen excess film enables oxygen to be supplied to the oxide
semiconductor stacked layer 403.
[0290] In this manner, a semiconductor device using an oxide
semiconductor stacked layer whose electric characteristics are
stable can be provided. Accordingly, a highly reliable
semiconductor device can be provided.
[0291] This embodiment can be implemented combining with another
embodiment as appropriate.
Embodiment 4
[0292] In this embodiment, another embodiment of a semiconductor
device and a method for manufacturing the semiconductor device is
described with reference to FIGS. 6A to 6C. The above embodiment
can be applied to the same portion as, a portion having a function
similar to, or a step similar to that in the above embodiment;
thus, repetitive description is omitted. In addition, detailed
description of the same portions is also omitted.
[0293] Described in this embodiment is an example in which in a
method for manufacturing a semiconductor device according to one
embodiment of the present invention, a low-resistance region is
formed in the oxide semiconductor stacked layer. The low-resistance
region can be formed by adding an impurity (also called dopant) for
changing the electrical conductivity to the oxide semiconductor
stacked layer.
[0294] In this embodiment, a transistor 420 which has a bottom-gate
structure of a channel-protective type is described as an example.
FIGS. 6A to 6C illustrates an example of a method for manufacturing
the transistor 420.
[0295] First, the gate electrode layer 401 is formed over the
substrate 400 having an insulating surface. The gate insulating
film 402 is formed over the gate electrode layer 401.
[0296] Then, the oxide semiconductor stacked layer 403 including
the first oxide semiconductor layer 101 and the second oxide
semiconductor layer 102 whose energy gaps are different from each
other is formed over the gate insulating film 402.
[0297] Oxygen may be added to the oxide semiconductor stacked layer
403 as described in Embodiment 2, so that the oxide semiconductor
stacked layer 403 includes an oxygen excess region. The oxide
semiconductor stacked layer 403 may have a three-layer structure
and have a structure in which an upper oxide semiconductor layer
covers the side surface of a lower oxide semiconductor layer.
[0298] The insulating film 427 functioning as a channel protective
film is formed over the oxide semiconductor stacked layer 403 to
overlap with the gate electrode layer 401 (see FIG. 6A).
[0299] Next, a dopant 421 is selectively added to the oxide
semiconductor stacked layer 403 with the insulating film 427 as a
mask, so that low-resistance regions 121a, 121b, 122a, and 122b are
formed (see FIG. 6B).
[0300] Although the insulating film 427 functioning as the channel
protective film is used as a mask for the addition of the dopant
421 in this embodiment, a resist mask may be formed for selective
addition of the dopant 421. Also in the transistor 440a, 430, or
the like, in which a channel protective film is not provided, a
resist mask may be formed for selective addition of a dopant.
[0301] Depending on addition conditions of the dopant 421, the
dopant 421 may be added only either the first oxide semiconductor
layer 101 or the second oxide semiconductor layer 102, so that a
low-resistance region is formed, in the case of which the dopant
concentration may be ununiformly distributed in the first oxide
semiconductor layer 101 and the second oxide semiconductor layer
102.
[0302] The dopant 421 is an impurity by which the electrical
conductivity of the oxide semiconductor stacked layer 403 is
changed. One or more selected from the following can be used as the
dopant 421: Group 15 elements (typical examples thereof are
phosphorus (P), arsenic (As), and antimony (Sb)), boron (B),
aluminum (Al), nitrogen (N), argon (Ar), helium (He), neon (Ne),
indium (In), fluorine (F), chlorine (Cl), titanium (Ti), and zinc
(Zn).
[0303] The dopant 421 is added to the oxide semiconductor stacked
layer 403 by an implantation method. As the method for adding the
dopant 421, an ion implantation method, an ion doping method, a
plasma immersion ion implantation method, or the like can be used.
In that case, it is preferable to use a single ion of the dopant
421 or a hydride ion, a fluoride ion, or a chloride ion
thereof.
[0304] The addition of the dopant 421 may be controlled by setting
the addition conditions such as the accelerated voltage and the
dosage, or the thickness of the insulating film 427 serving as a
mask as appropriate. In this embodiment, boron is used as the
dopant 421, whose ion is added by an ion implantation method. The
dosage of the dopant 421 is preferably set to be greater than or
equal to 1.times.10.sup.13 ions/cm.sup.2 and less than or equal to
5.times.10.sup.16 ions/cm.sup.2.
[0305] The concentration of the dopant 421 in the low-resistance
region is preferably greater than or equal to 5.times.10.sup.18
atoms/cm.sup.3 and less than or equal to 1.times.10.sup.22
atoms/cm.sup.3.
[0306] The substrate 400 may be heated in adding the dopant
421.
[0307] The addition of the dopant 421 to the oxide semiconductor
stacked layer 403 may be performed plural times, and the number of
kinds of dopant may be plural.
[0308] Further, heat treatment may be performed thereon after the
addition of the dopant 421. The heat treatment is preferably
performed at a temperature(s) higher than or equal to 300.degree.
C. and lower than or equal to 700.degree. C. (further preferably
higher than or equal to 300.degree. C. and lower than or equal to
450.degree. C.) for one hour under an oxygen atmosphere. The heat
treatment may be performed under a nitrogen atmosphere, reduced
pressure, or the air (ultra-dry air).
[0309] In the case where the oxide semiconductor stacked layer 403
is a crystalline oxide semiconductor film, the oxide semiconductor
stacked layer 403 may be partly amorphized by the addition of the
dopant 421. In that case, the crystallinity of the oxide
semiconductor stacked layer 403 can be recovered by performing heat
treatment thereon after the addition of the dopant 421.
[0310] In this manner, in the oxide semiconductor stacked layer
403, the first oxide semiconductor layer 101 in which the
low-resistance regions 121a and 121b are provided to sandwich a
channel formation region 121c and the second oxide semiconductor
layer 102 in which the low-resistance regions 122a and 122b are
provided to sandwich a channel formation region 122c are
formed.
[0311] Next, the source electrode layer 405a and the drain
electrode layer 405b are formed in contact with the low-resistance
regions 121a, 121b, 122a, and 122b.
[0312] Through the above process, the transistor 420 of this
embodiment is manufactured (see FIG. 6C).
[0313] With the oxide semiconductor stacked layer 403 including the
first oxide semiconductor layer 101 in which the low-resistance
regions 121a and 121b are provided to sandwich the channel
formation region 121c in the channel length direction and the
second oxide semiconductor layer 102 in which the low-resistance
regions 122a and 122b are provided to sandwich the channel
formation region 122c in the channel length direction, on-state
characteristics (e.g., on-state current and field-effect mobility)
of the transistor 420 are increased, which enables high-speed
operation and high-speed response of the transistor.
[0314] The low-resistance regions 121a, 121b, 122a, and 122b each
can be functioned as a source region or a drain region in the
transistor 420. With the low-resistance regions 121a and 121b, 122a
and 122b, the electrical field applied to the channel formation
region 121c, 122c formed between the low-resistance regions 121a
and 121b, 122a and 122b can be relaxed. Further, electrical
connection between the oxide semiconductor stacked layer 403 and
each of the source electrode layer 405a and the drain electrode
layer 405b in the low-resistance regions 121a, 121b, 122a, and 122b
can reduce the contact resistance between the oxide semiconductor
stacked layer 403 and each of the source electrode layer 405a and
the drain electrode layer 405b. Consequently, the electrical
characteristics of the transistor can be increased.
[0315] This embodiment can be implemented combining with another
embodiment as appropriate.
Embodiment 5
[0316] A semiconductor device (also referred to as a display
device) having a display function can be manufactured using the
transistor an example of which is described in any of Embodiments 1
to 4. Moreover, part or all of the driver circuitry which includes
the transistor can be formed over a substrate where a pixel portion
is formed, whereby a system-on-panel can be formed.
[0317] In FIG. 12A, a sealant 4005 is provided so as to surround a
pixel portion 4002 provided over a first substrate 4001, and the
pixel portion 4002 is sealed with a second substrate 4006. In FIG.
12A, a scan line driver circuit 4004 and a signal line driver
circuit 4003 which are each formed using a single crystal
semiconductor film or a polycrystalline semiconductor film over a
substrate separately prepared are mounted in a region that is
different from the region surrounded by the sealant 4005 over the
first substrate 4001. A variety of signals and potentials are
supplied to the signal line driver circuit 4003, the scan line
driver circuit 4004, and the pixel portion 4002 from flexible
printed circuits (FPCs) 4018a and 4018b.
[0318] In FIGS. 12B and 12C, the sealant 4005 is provided so as to
surround the pixel portion 4002 and the scan line driver circuit
4004 which are provided over the first substrate 4001. The second
substrate 4006 is provided over the pixel portion 4002 and the scan
line driver circuit 4004. Consequently, the pixel portion 4002 and
the scan line driver circuit 4004 are sealed together with a
display element by the first substrate 4001, the sealant 4005, and
the second substrate 4006. In FIGS. 12B and 12C, the signal line
driver circuit 4003 which is formed using a single crystal
semiconductor film or a polycrystalline semiconductor film over a
substrate separately prepared is mounted in a region that is
different from the region surrounded by the sealant 4005 over the
first substrate 4001. In FIGS. 12B and 12C, a variety of signals
and potentials are supplied to the signal line driver circuit 4003,
the scan line driver circuit 4004, and the pixel portion 4002 from
an FPC 4018.
[0319] Although FIGS. 12B and 12C each illustrate an example in
which the signal line driver circuit 4003 is formed separately and
mounted over the first substrate 4001, embodiments of the present
invention are not limited to this structure. The scan line driver
circuit may be formed separately and then mounted, or only part of
the signal line driver circuit or only part of the scan line driver
circuit may be formed separately and then mounted.
[0320] The connection method of such a separately formed driver
circuit is not particularly limited; for example, a chip on glass
(COG) method, a wire bonding method, or a tape automated bonding
(TAB) method can be used. FIG. 12A illustrates an example in which
the signal line driver circuit 4003 and the scan line driver
circuit 4004 are mounted by a COG method; FIG. 12B illustrates an
example in which the signal line driver circuit 4003 is mounted by
a COG method; and FIG. 12C illustrates an example in which the
signal line driver circuit 4003 is mounted by a TAB method.
[0321] The display device includes in its category a panel in which
a display element is sealed, and a module in which an IC such as a
controller or the like is mounted on the panel.
[0322] The display device in this specification means an image
display device, a display device, or a light source (including a
lighting device). Furthermore, the display device also includes the
following modules in its category: a module to which a connector
such as an FPC, a TAB tape, or a TCP is attached; a module having a
TAB tape or a TCP at the tip of which a printed wiring board is
provided; and a module in which an integrated circuit (IC) is
directly mounted on a display element by a COG method.
[0323] The pixel portion and the scan line driver circuit provided
over the first substrate include a plurality of transistors, to
which any of the transistors which are described in Embodiments 1
to 4 can be applied.
[0324] As the display element provided in the display device, a
liquid crystal element (also referred to as a liquid crystal
display element) or a light-emitting element (also referred to as a
light-emitting display element) can be used. The light-emitting
element includes in its category an element whose luminance is
controlled by a current or a voltage, and specifically includes an
inorganic electroluminescent (EL) element, an organic EL element,
and the like. A display medium whose contrast is changed by an
electric effect, such as electronic ink, can also be used.
[0325] An embodiment of a semiconductor device is described with
reference to FIGS. 12A to 12C and FIGS. 13A and 13B. FIGS. 13A and
13B are cross-sectional diagrams along line M-N of FIG. 12B.
[0326] As shown in FIGS. 13A and 13B, the semiconductor device
includes a connection terminal electrode 4015 and a terminal
electrode 4016, and the connection terminal electrode 4015 and the
terminal electrode 4016 are electrically connected to a terminal
included in the FPC 4018 through an anisotropic conductive film
4019.
[0327] The connection terminal electrode 4015 is formed using the
same conductive film as a first electrode layer 4030, and the
terminal electrode 4016 is formed using the same conductive film as
source and drain electrode layers of transistors 4010 and 4011.
[0328] The pixel portion 4002 and the scan line driver circuit 4004
which are provided over the first substrate 4001 each include a
plurality of transistors. In FIGS. 13A and 13B, the transistor 4010
included in the pixel portion 4002 and the transistor 4011 included
in the scan line driver circuit 4004 are illustrated as an example.
An insulating film 4020 is provided over the transistors 4010 and
4011 in FIG. 13A, and an insulating film 4021 is further provided
in FIG. 13B. An insulating film 4023 is an insulating film serving
as a base film.
[0329] Any of the transistors described in Embodiments 1 to 4 can
be applied to the transistors 4010 and 4011. In this embodiment, an
example in which a transistor having a structure similar to that of
the transistor 440a described in Embodiment 1 is used is
described.
[0330] The transistors 4010 and 4011 each include an oxide
semiconductor stacked layer including at least two oxide
semiconductor layers whose energy gaps are different from each
other. By using the oxide semiconductor stacked layer using a
plurality of oxide semiconductor layers whose energy gaps are
different from each other, the electrical characteristics of the
transistor can be adjusted with higher accuracy, providing the
transistor 4010, 4011 with appropriate electrical
characteristics.
[0331] Accordingly, semiconductor devices for a variety of purposes
such as high functionality, high reliability, and low power
consumption can be provided as the semiconductor device of this
embodiment shown in FIGS. 12A to 12C and FIGS. 13A and 13C.
[0332] The transistor 4010 included in the pixel portion 4002 is
electrically connected to a display element to constitute a part of
a display panel. There is no particular limitation on the kind of
the display element as long as display can be performed; various
kinds of display elements can be used.
[0333] An example of a liquid crystal display device using a liquid
crystal element as a display element is illustrated in FIG. 13A. In
FIG. 13A, a liquid crystal element 4013 which is a display element
includes a first electrode layer 4030, a second electrode layer
4031, and a liquid crystal layer 4008. Insulating films 4032 and
4033 serving as orientation films are provided so that the liquid
crystal layer 4008 is provided therebetween. The second electrode
layer 4031 is provided on the second substrate 4006 side, and the
first electrode layer 4030 and the second electrode layer 4031 are
stacked with the liquid crystal layer 4008 provided
therebetween.
[0334] A columnar spacer denoted by reference numeral 4035 is
obtained by selective etching of an insulating film and is provided
in order to control the thickness of the liquid crystal layer 4008
(cell gap). Alternatively, a spherical spacer may be used.
[0335] In the case where a liquid crystal element is used as the
display element, a thermotropic liquid crystal, a low-molecular
liquid crystal, a high-molecular liquid crystal, a polymer
dispersed liquid crystal, a ferroelectric liquid crystal, an
anti-ferroelectric liquid crystal, or the like can be used. Such a
liquid crystal material (liquid crystal composition) exhibits a
cholesteric phase, a smectic phase, a cubic phase, a chiral nematic
phase, an isotropic phase, or the like depending on conditions.
[0336] Alternatively, a liquid crystal composition exhibiting a
blue phase for which an alignment film is not involved may be used
for the liquid crystal layer 4008. The blue phase is one of liquid
crystal phases, which is generated just before a cholesteric phase
changes into an isotropic phase while temperature of a cholesteric
liquid crystal is increased. The blue phase can be exhibited using
a liquid crystal composition which is a mixture of a liquid crystal
and a chiral agent. To increase the temperature range where the
blue phase is exhibited, a liquid crystal layer may be formed by
adding a polymerizable monomer, a polymerization initiator, and the
like to a liquid crystal composition exhibiting a blue phase and by
performing polymer stabilization treatment. The liquid crystal
composition exhibiting a blue phase has a short response time, and
has optical isotropy, so that the alignment process is not
requisite and the viewing angle dependence is small. In addition,
since an alignment film does not need to be provided and thus
rubbing treatment is not requisite, electrostatic discharge damage
caused by the rubbing treatment can be prevented and defects and
damage of the liquid crystal display device in the manufacturing
process can be reduced. Thus, productivity of the liquid crystal
display device can be improved. A transistor using an oxide
semiconductor film has a possibility that the electric
characteristics of the transistor may fluctuate significantly by
the influence of static electricity and deviate from the designed
range. Therefore, it is more effective to use a liquid crystal
composition exhibiting a blue phase for the liquid crystal display
device including the transistor using an oxide semiconductor
film.
[0337] The specific resistivity of the liquid crystal material is
greater than or equal to 1.times.10.sup.9 .OMEGA.cm, preferably
greater than or equal to 1.times.10.sup.11 .OMEGA.cm, further
preferably greater than or equal to 1.times.10.sup.12 .OMEGA.cm.
The specific resistivity in this specification is measured at
20.degree. C.
[0338] The magnitude of a storage capacitor in the liquid crystal
display device is set considering the leakage current of the
transistor in the pixel portion or the like so that charge can be
held for a predetermined period. The magnitude of the storage
capacitor may be set considering the off-state current of the
transistor or the like. By using the/a transistor including an
oxide semiconductor film disclosed in this specification, a
capacitance that is 1/3 or less, preferably 1/5 or less of liquid
crystal capacitance of each pixel is enough as the magnitude of the
storage capacitor.
[0339] In the transistor using an oxide semiconductor film
disclosed in this specification, the current in an off state
(off-state current) can be suppressed to be small. Accordingly, an
electric signal such as an image signal can be held for a longer
period, and a writing interval can be set longer in an on state.
The frequency of refresh operation can be accordingly reduced,
which leads to an effect of suppressing power consumption.
[0340] Further, the transistor using an oxide semiconductor film
disclosed in this specification can exhibit a high field-effect
mobility and thus can operate at high speed. For example, with such
a transistor which can operate at high speed used for a liquid
crystal display device, a switching transistor in a pixel portion
and a driver transistor in a driver circuit portion can be formed
over one substrate. That is, a semiconductor device formed using a
silicon wafer or the like is not additionally needed as a driver
circuit, by which the number of components of the semiconductor
device can be reduced. In addition, the transistor which can
operate at high speed can be used also in the pixel portion,
whereby a high-quality image can be provided. Accordingly,
reliability of the semiconductor device can also be improved.
[0341] For the liquid crystal display device, a twisted nematic
(TN) mode, an in-plane-switching (IPS) mode, a fringe field
switching (FFS) mode, an axially symmetric aligned micro-cell (ASM)
mode, an optical compensated birefringence (OCB) mode, a
ferroelectric liquid crystal (FLC) mode, an anti-ferroelectric
liquid crystal (AFLC) mode, or the like can be used.
[0342] A normally black liquid crystal display device such as a
transmissive liquid crystal display device utilizing a vertical
alignment (VA) mode may be used. Some examples are given as the
vertical alignment mode; for example, a multi-domain vertical
alignment (MVA) mode, a patterned vertical alignment (PVA) mode, or
an advanced super view (ASV) mode can be used. Furthermore, this
embodiment can be applied to a VA liquid crystal display device.
The VA liquid crystal display device has a kind of form in which
alignment of liquid crystal molecules of a liquid crystal display
panel is controlled. In the VA liquid crystal display device,
liquid crystal molecules are aligned in a vertical direction with
respect to a panel surface when no voltage is applied. Moreover, it
is possible to use a method called domain multiplication or
multi-domain design, in which a pixel is divided into some regions
(subpixels) and molecules are aligned in different directions in
their respective regions.
[0343] In the display device, a black matrix (light-blocking
layer), an optical member (optical substrate) such as a polarizing
member, a retardation member, or an anti-reflection member, and the
like are provided as appropriate. For example, circular
polarization may be provided by a polarizing substrate and a
retardation substrate. In addition, a backlight, a side light, or
the like may be used as a light source.
[0344] As a display method in the pixel portion, a progressive
method, an interlace method, or the like can be employed. Further,
color elements controlled in a pixel at the time of color display
are not limited to three colors: R, G, and B (R, G, and B
correspond to red, green, and blue, respectively). For example, R,
G, B, and W (W corresponds to white); R, G, B, and one or more of
yellow, cyan, magenta, and the like; or the like can be used.
Further, the sizes of display regions may be different between
respective dots of color elements. Embodiments of the disclosed
invention are not limited to a display device for color display;
the disclosed invention can also be applied to a display device for
monochrome display.
[0345] Alternatively, as the display element included in the
display device, a light-emitting element utilizing
electroluminescence can be used. Light-emitting elements utilizing
electroluminescence are classified according to whether the
light-emitting material is an organic compound or an inorganic
compound. In general, the former is referred to as an organic EL
element, and the latter is referred to as an inorganic EL
element.
[0346] In the organic EL element, by application of voltage to the
light-emitting element, electrons and holes are separately injected
from a pair of electrodes into a layer containing a light-emitting
organic compound, and current flows. The carriers (electrons and
holes) are recombined, and thus, the light-emitting organic
compound is excited. The light-emitting organic compound returns to
the ground state from the excited state, thereby emitting light.
This light-emitting element is called a current-excitation
light-emitting element after such a mechanism.
[0347] The inorganic EL elements are classified according to their
element structures into a dispersion-type inorganic EL element and
a thin-film inorganic EL element. The dispersion-type inorganic EL
element has a light-emitting layer where particles of a
light-emitting material are dispersed in a binder, and its light
emission mechanism is donor-acceptor recombination type light
emission that utilizes a donor level and an acceptor level. The
thin-film inorganic EL element has a structure where a
light-emitting layer is sandwiched between dielectric layers, which
are further sandwiched between electrodes, and its light emission
mechanism is localized type light emission that utilizes
inner-shell electron transition of metal ions. An organic EL
element is used as the light-emitting element for description
here.
[0348] To extract light emitted from the light-emitting element, it
is necessary that at least one of the pair of electrodes has a
light-transmitting property. A transistor and the light-emitting
element are formed over a substrate. The light-emitting element can
have a top emission structure in which light emission is extracted
through a surface opposite to the substrate; a bottom emission
structure in which light emission is extracted through a surface on
the substrate side; or a dual emission structure in which light
emission is extracted through the surface opposite to the substrate
and the surface on the substrate side; a light-emitting element
having any of these emission structures can be used.
[0349] An example of a light-emitting device in which a
light-emitting element is used as a display element is illustrated
in FIG. 13B. A light-emitting element 4513 which is the display
element is electrically connected to the transistor 4010 provided
in the pixel portion 4002. A structure of the light-emitting
element 4513 is not limited to the shown stacked-layer structure,
which is the stacked-layer structure including the first electrode
layer 4030, an electroluminescent layer 4511, and the second
electrode layer 4031. The structure of the light-emitting element
4513 can be changed as appropriate depending on a direction in
which light is extracted from the light-emitting element 4513, or
the like.
[0350] A partition wall 4510 is formed using an organic insulating
material or an inorganic insulating material. It is preferable that
the partition wall 4510 be formed using a photosensitive resin
material and have an opening over the first electrode layer 4030 so
that a sidewall of the opening is formed as a tilted surface with
continuous curvature.
[0351] The electroluminescent layer 4511 consists of either a
single layer or a plurality of layers stacked.
[0352] A protective film may be formed over the second electrode
layer 4031 and the partition wall 4510 in order to prevent entry of
oxygen, hydrogen, water, carbon dioxide, or the like into the
light-emitting element 4513. As the protective film, a silicon
nitride film, a silicon nitride oxide film, a DLC film, or the like
can be formed. In addition, in a space which is formed with the
first substrate 4001, the second substrate 4006, and the sealant
4005, a filler 4514 is provided for sealing. It is preferable that
a panel be packaged (sealed) with a protective film (such as a
laminate film or an ultraviolet curable resin film) or a cover
material with high air-tightness and little degasification so that
the panel is not exposed to the outside air, in this manner.
[0353] As the filler 4514, an ultraviolet curable resin or a
thermosetting resin can be used as well as an inert gas such as
nitrogen or argon. For example, polyvinyl chloride (PVC), an
acrylic resin, polyimide, an epoxy resin, a silicone resin,
polyvinyl butyral (PVB), or ethylene vinyl acetate (EVA) can be
used. For example, nitrogen is used as the filler.
[0354] In addition, as needed, an optical film such as a polarizing
plate, a circularly polarizing plate (including an elliptically
polarizing plate), a retardation plate (a quarter-wave plate or a
half-wave plate), or a color filter may be provided as appropriate
on a light-emitting surface of the light-emitting element. Further,
the polarizing plate or the circularly polarizing plate may be
provided with an anti-reflection film. For example, anti-glare
treatment by which reflected light can be diffused by projections
and/or depressions on the surface so as to reduce the glare can be
performed.
[0355] Further, electronic paper in which electronic ink is driven
can be provided as the display device. The electronic paper is also
called electrophoretic display device (electrophoretic display) and
is advantageous in that it exhibits the same level of readability
as plain paper, it has lower power consumption than other display
devices, and it can be made thin and lightweight.
[0356] Although the electrophoretic display device can have various
modes, the electrophoretic display device contains a plurality of
microcapsules dispersed in a solvent or a solute, each microcapsule
containing first particles which are positively charged and second
particles which are negatively charged. By applying an electric
field to the microcapsules, the particles in the microcapsules move
in opposite directions to each other and only the color of the
particles gathering on one side is displayed. The first particles
and the second particles each contain a pigment and do not move
without an electric field. Moreover, the first particles and the
second particles have different colors (which may be
colorless).
[0357] Thus, an electrophoretic display device is a display device
that utilizes a so-called dielectrophoretic effect by which a
substance having a high dielectric constant moves to a
high-electric field region.
[0358] A solution in which the above microcapsules are dispersed in
a solvent is referred to as electronic ink This electronic ink can
be printed on a surface of glass, plastic, cloth, paper, or the
like. Further, with a color filter or particles that have a
pigment, color display can also be performed.
[0359] The first particles and the second particles in the
microcapsules may each be formed of a single material selected from
a conductive material, an insulating material, a semiconductor
material, a magnetic material, a liquid crystal material, a
ferroelectric material, an electroluminescent material, an
electrochromic material, and a magnetophoretic material, or formed
of a composite material of any of these.
[0360] As the electronic paper, a display device using a twisting
ball display system can be used. The twisting ball display system
refers to a method in which spherical particles each colored in
black and white are arranged between a first electrode layer and a
second electrode layer which are electrode layers used for a
display element, and a potential difference is generated between
the first electrode layer and the second electrode layer to control
orientation of the spherical particles, so that display is
performed.
[0361] In FIGS. 12A to 12C and FIGS. 13A and 13B, a flexible
substrate as well as a glass substrate can be used as any of the
first substrate 4001 and the second substrate 4006. For example, a
plastic substrate having a light-transmitting property or the like
can be used. As plastic, a fiberglass-reinforced plastics (FRP)
plate, a polyvinyl fluoride (PVF) film, a polyester film, or an
acrylic resin film can be used. In the case where the
light-transmitting property is not requisite, a metal substrate
(metal film) of aluminum, stainless steel, or the like may be used.
For example, a sheet with a structure in which an aluminum foil is
interposed between PVF films or polyester films can be used.
[0362] In this embodiment, an aluminum oxide film is used as the
insulating film 4020.
[0363] The aluminum oxide film which is provided as the insulating
film 4020 over the oxide semiconductor film has a high blocking
effect by which both of oxygen and impurities such as hydrogen or
water is prevented from being passed through the film.
[0364] Therefore, in and after the manufacturing process, the
aluminum oxide film functions as a protective film for preventing
entry of an impurity such as hydrogen or water, which causes a
change, into the oxide semiconductor film and release of oxygen,
which is a main constituent material of the oxide semiconductor,
from the oxide semiconductor film.
[0365] The insulating film 4021 serving as a planarization
insulating film can be formed using an organic material having heat
resistance, such as an acrylic resin, polyimide,
benzocyclobutene-based resin, polyamide, or epoxy. Other than such
organic materials, it is also possible to use a low-dielectric
constant material (low-k material), a siloxane-based resin,
phosphosilicate glass (PSG), borophosphosilicate glass (BPSG), or
the like. The insulating film may be formed by stacking a plurality
of insulating films formed of these materials.
[0366] There is no particular limitation on the method of forming
the insulating film 4021, and the following method or tool
(equipment) can be used depending on the material: a sputtering
method, an SOG method, spin coating, dipping, spray coating, a
droplet discharge method (such as an inkjet method), a printing
method (such as screen printing or offset printing), a doctor
knife, a roll coater, a curtain coater, a knife coater, or the
like.
[0367] The display device displays an image by transmitting light
from the light source or the display element. Therefore, the
substrate and the thin films such as the insulating film and the
conductive film provided for the pixel portion where light is
transmitted have light-transmitting properties with respect to
light in the visible light wavelength range.
[0368] The first electrode layer and the second electrode layer
(also called pixel electrode layer, common electrode layer, counter
electrode layer, or the like) for applying voltage to the display
element have either light-transmitting properties or
light-reflecting properties, which depends on the direction in
which light is extracted, the position where the electrode layer is
provided, the pattern structure of the electrode layer, and the
like.
[0369] The first electrode layer 4030 and the second electrode
layer 4031 can be formed using a light-transmitting conductive
material such as indium oxide containing tungsten oxide, indium
zinc oxide containing tungsten oxide, indium oxide containing
titanium oxide, indium tin oxide containing titanium oxide, indium
tin oxide, indium zinc oxide, indium tin oxide to which silicon
oxide is added, or graphene.
[0370] The first electrode layer 4030 and the second electrode
layer 4031 can be formed using one or plural kinds selected from a
metal such as tungsten (W), molybdenum (Mo), zirconium (Zr),
hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium
(Cr), cobalt (Co), nickel (Ni), titanium (Ti), platinum (Pt),
aluminum (Al), copper (Cu), or silver (Ag); an alloy thereof; and a
nitride thereof.
[0371] A conductive composition containing a conductive high
molecule (also called conductive polymer) can be used for the first
electrode layer 4030 and the second electrode layer 4031. As the
conductive high molecule, a so-called .pi.-electron conjugated
conductive polymer can be used. For example, polyaniline or a
derivative thereof, polypyrrole or a derivative thereof,
polythiophene or a derivative thereof, a copolymer of two or more
of aniline, pyrrole, and thiophene or a derivative thereof can be
given.
[0372] Since the transistor is likely to be broken by static
electricity or the like, a protection circuit for protecting the
driver circuit is preferably provided. The protection circuit is
preferably formed using a nonlinear element.
[0373] Any of the transistors described in Embodiments 1 to 4
enables semiconductor devices having a variety of functions to be
provided as described above.
Embodiment 6
[0374] Any of the transistors described in Embodiments 1 to 4
enables a semiconductor device having an image sensor function of
reading data on an object to be manufactured.
[0375] FIG. 14A illustrates an example of a semiconductor device
having an image sensor function. FIG. 14A is an equivalent circuit
diagram of a photosensor, and FIG. 14B is a cross-sectional diagram
of part of the photosensor.
[0376] One electrode of a photodiode 602 is electrically connected
to a photodiode reset signal line 658, and the other electrode of
the photodiode 602 is electrically connected to a gate of a
transistor 640. One of a source and a drain of the transistor 640
is electrically connected to a photosensor reference signal line
672, and the other of the source and the drain of the transistor
640 is electrically connected to one of a source and a drain of a
transistor 656. A gate of the transistor 656 is electrically
connected to a gate signal line 659, and the other of the source
and the drain thereof is electrically connected to a photosensor
output signal line 671.
[0377] In the circuit diagrams in this specification, symbol "OS"
is written under the mark of a transistor using an oxide
semiconductor film so that it can be clearly identified as a
transistor using an oxide semiconductor film. In FIG. 14A, the
transistor 640 and the transistor 656 are transistors each using an
oxide semiconductor layer, to which any of the transistors
described in Embodiments 1 to 4 can be applied. Described in this
embodiment is an example in which a transistor having a structure
similar to that of the transistor 440a described in Embodiment 1 is
used.
[0378] FIG. 14B is a cross-sectional diagram of the photodiode 602
and the transistor 640 in the photosensor. The photodiode 602
functioning as a sensor and the transistor 640 are provided over a
substrate 601 (TFT substrate) having an insulating surface. A
substrate 613 is provided over the photodiode 602 and the
transistor 640 with the use of an adhesive layer 608.
[0379] An insulating film 631, an insulating film 362, an
interlayer insulating film 633, and an interlayer insulating film
634 are provided over the transistor 640. The photodiode 602 is
provided over the interlayer insulating film 633. In the photodiode
602, a first semiconductor film 606a, a second semiconductor film
606b, and a third semiconductor film 606c are sequentially stacked
from the interlayer insulating film 633 side, between an electrode
layer 641 formed over the interlayer insulating film 633 and an
electrode layer 642 formed over the interlayer insulating film
634.
[0380] The electrode layer 641 is electrically connected to a
conductive layer 643 formed over the interlayer insulating film
634, and the electrode layer 642 is electrically connected to a
conductive layer 645 through the electrode layer 641. The
conductive layer 645 is electrically connected to a gate electrode
layer of the transistor 640, and the photodiode 602 is electrically
connected to the transistor 640.
[0381] Here, a pin photodiode in which a semiconductor film having
p-type conductivity as the first semiconductor film 606a, a
high-resistance semiconductor film (i-type semiconductor film) as
the second semiconductor film 606b, and a semiconductor film having
n-type conductivity as the third semiconductor film 606c are
stacked is illustrated as an example.
[0382] The first semiconductor film 606a is a p-type semiconductor
film and can be formed using an amorphous silicon film containing
an impurity element imparting p-type conductivity. The first
semiconductor film 606a is formed by a plasma-enhanced CVD method
with the use of a semiconductor source gas containing an impurity
element belonging to Group 13 (e.g., boron (B)) in the periodic
table. As the semiconductor source gas, silane (SiH.sub.4) may be
used. Alternatively, Si.sub.2H.sub.6, SiH.sub.2Cl.sub.2,
SiHCl.sub.3, SiCl.sub.4, SiF.sub.4, or the like may be used.
Further alternatively, an amorphous silicon film which does not
contain an impurity element may be formed, and then an impurity
element may be added to the amorphous silicon film by a diffusion
method or an ion implantation method. Heating or the like may be
performed after the impurity element is added by an ion
implantation method or the like to diffuse the impurity element. In
that case, as a method of forming the amorphous silicon film, an
LPCVD method, a vapor deposition method, a sputtering method, or
the like may be used. The first semiconductor film 606a is
preferably formed to have a thickness greater than or equal to 10
nm and less than or equal to 50 nm.
[0383] The second semiconductor film 606b is an i-type
semiconductor film (intrinsic semiconductor film) and is formed
using an amorphous silicon film. As for formation of the second
semiconductor film 606b, an amorphous silicon film is formed by a
plasma-enhanced CVD method with the use of a semiconductor source
gas. As the semiconductor source gas, silane (SiH.sub.4) may be
used. Alternatively, Si.sub.2H.sub.6, SiH.sub.2Cl.sub.2,
SiHCl.sub.3, SiCl.sub.4, SiF.sub.4, or the like may be used. The
second semiconductor film 606b may be formed by an LPCVD method, a
vapor deposition method, a sputtering method, or the like. The
second semiconductor film 606b is preferably formed to have a
thickness greater than or equal to 200 nm and less than or equal to
1000 nm.
[0384] The third semiconductor film 606c is an n-type semiconductor
film and is formed using an amorphous silicon film containing an
impurity element imparting n-type conductivity. The third
semiconductor film 606c is formed by a plasma-enhanced CVD method
with the use of a semiconductor source gas containing an impurity
element belonging to Group 15 (e.g., phosphorus (P)). As the
semiconductor source gas, silane (SiH.sub.4) may be used.
Alternatively, Si.sub.2H.sub.6, SiH.sub.2Cl.sub.2, SiHCl.sub.3,
SiCl.sub.4, SiF.sub.4, or the like may be used. Further
alternatively, an amorphous silicon film which does not contain an
impurity element may be formed, and then an impurity element may be
added to the amorphous silicon film by a diffusion method or an ion
implantation method. Heating or the like may be performed after the
impurity element is added by an ion implantation method or the like
to diffuse the impurity element. In that case, as the method of
forming the amorphous silicon film, an LPCVD method, a chemical
vapor deposition method, a sputtering method, or the like may be
used. The third semiconductor film 606c is preferably formed to
have a thickness greater than or equal to 20 nm and less than or
equal to 200 nm.
[0385] The first semiconductor film 606a, the second semiconductor
film 606b, and the third semiconductor film 606c are not
necessarily formed using an amorphous semiconductor, and may be
formed using a polycrystalline semiconductor or a microcrystalline
semiconductor (semi-amorphous semiconductor: SAS).
[0386] Considering Gibbs free energy, the microcrystalline
semiconductor is in a metastable state that is intermediate between
an amorphous state and a single crystal state. That is, the
microcrystalline semiconductor is a semiconductor having a third
state which is stable in terms of free energy and has a short range
order and lattice distortion. Columnar-like or needle-like crystals
grow in a normal direction with respect to a substrate surface. The
Raman spectrum of microcrystalline silicon, which is a typical
example of a microcrystalline semiconductor, is located in lower
wave numbers than 520 cm.sup.-1, which represents a peak of the
Raman spectrum of single crystal silicon. That is, the peak of the
Raman spectrum of the microcrystalline silicon exists between 520
cm.sup.-1 which represents single crystal silicon and 480 cm.sup.-1
which represents amorphous silicon. In addition, microcrystalline
silicon contains hydrogen or halogen of at least 1 at. % in order
to terminate a dangling bond. Moreover, microcrystalline silicon
contains a rare gas element such as helium, argon, krypton, or neon
to further promote lattice distortion, so that the stability is
increased and thus a favorable microcrystalline semiconductor film
can be obtained.
[0387] This microcrystalline semiconductor film can be formed by a
radio-frequency plasma-enhanced CVD method with a frequency of
greater than or equal to several tens of megahertz and less than or
equal to several hundreds of megahertz, or a microwave
plasma-enhanced CVD apparatus with a frequency of greater than or
equal to 1 GHz. As a typical example, the microcrystalline
semiconductor can be formed using a compound containing silicon
such as SiH.sub.4, Si.sub.2H.sub.6, SiH.sub.2Cl.sub.2, SiHCl.sub.3,
SiCl.sub.4, or SiF.sub.4, which is diluted with hydrogen. The
microcrystalline semiconductor film can also be formed with
dilution with one or plural kinds of rare gas elements selected
from helium, argon, krypton, and neon in addition to the compound
containing silicon (e.g., silicon hydride) and hydrogen. In those
cases, the flow ratio of hydrogen to the compound containing
silicon (e.g., silicon hydride) is 5:1 to 200:1, preferably 50:1 to
150:1, further preferably 100:1. Further, a carbide gas such as
CH.sub.4 or C.sub.2H.sub.6, a germanium gas such as GeH.sub.4 or
GeF.sub.4, F.sub.2, or the like may be mixed into the gas
containing silicon.
[0388] The mobility of holes generated by the photoelectric effect
is lower than the mobility of electrons. Therefore, a pin
photodiode has better characteristics when a surface on the p-type
semiconductor film side is used as a light-receiving plane. Here,
an example in which light received by the photodiode 602 from a
surface of the substrate 601, over which the pin photodiode is
formed, is converted into electric signals is described. Further,
light from the semiconductor film having the conductivity type
opposite to that of the semiconductor film on the light-receiving
plane is disturbance light; therefore, the electrode layer is
preferably formed using a light-blocking conductive film. A surface
on the n-type semiconductor film side can alternatively be used as
the light-receiving plane.
[0389] With the use of an insulating material, the insulating film
632, the interlayer insulating film 633 and the interlayer
insulating film 634 can be formed, depending on the material, by a
method or a tool (equipment) such as a sputtering method, a
plasma-enhanced CVD method, an SOG method, spin coating, dipping,
spray coating, a droplet discharge method (such as an inkjet
method), a printing method (such as screen printing or offset
printing), a doctor knife, a roll coater, a curtain coater, or a
knife coater.
[0390] In this embodiment, an aluminum oxide film is used as the
insulating film 631. The insulating film 631 can be formed by a
sputtering method or a plasma-enhanced CVD method.
[0391] The aluminum oxide film which is provided as the insulating
film 631 over the oxide semiconductor film has a high blocking
effect by which both of oxygen and impurities such as hydrogen or
water is prevented from being passed through the film.
[0392] Therefore, in and after the manufacturing process, the
aluminum oxide film functions as a protective film for preventing
entry of an impurity such as hydrogen or water, which causes a
change, into the oxide semiconductor film and release of oxygen,
which is a main constituent material of the oxide semiconductor,
from the oxide semiconductor film.
[0393] The insulating film 632 can be formed using an inorganic
insulating material to have a single-layer structure or a
stacked-layer structure including any of oxide insulating films
such as a silicon oxide layer, a silicon oxynitride layer, an
aluminum oxide layer, and an aluminum oxynitride layer; and nitride
insulating films such as a silicon nitride layer, a silicon nitride
oxide layer, an aluminum nitride layer, and an aluminum nitride
oxide layer.
[0394] To reduce surface roughness, an insulating film functioning
as a planarization insulating film is preferably used as each of
the interlayer insulating films 633 and 634. For the interlayer
insulating films 633 and 634, for example, an organic insulating
material having heat resistance, such as polyimide, an acrylic
resin, a benzocyclobutene-based resin, polyamide, or an epoxy
resin, can be used. Other than such organic insulating materials,
it is possible to use a single layer or stacked layers of a
low-dielectric constant material (low-k material), a siloxane-based
resin, phosphosilicate glass (PSG), borophosphosilicate glass
(BPSG), or the like.
[0395] With detection of light that enters the photodiode 602, data
on an object to be detected can be read. A light source such as a
backlight can be used at the time of reading data on the
object.
[0396] By using as a semiconductor layer the oxide semiconductor
stacked layer including a plurality of oxide semiconductor layers
having different energy gaps as described above, the electrical
characteristics of the transistor can be adjusted with higher
accuracy, providing the transistor with appropriate electrical
characteristics. Accordingly, the transistor enables semiconductor
devices for a variety of purposes such as high functionality, high
reliability, and low power consumption to be provided.
[0397] This embodiment can be implemented combining with another
embodiment as appropriate.
Embodiment 7
[0398] The transistor an example of which is described in any of
Embodiments 1 to 4 can be favorably used for a semiconductor device
including an integrated circuit in which a plurality of transistors
is stacked. In this embodiment, as an example of the semiconductor
device, a memory medium (memory element) is described.
[0399] Manufactured in this embodiment is a semiconductor device
which includes a transistor 140 which is a first transistor formed
using a single crystal semiconductor substrate and a transistor 162
which is a second transistor formed using a semiconductor film and
provided above the transistor 140 with an insulating film provided
therebetween. The transistor an example of which is described in
any of Embodiments 1 to 3 can be favorably used as the transistor
162. Described in this embodiment is an example in which a
transistor having a structure similar to that of the transistor
440a described in Embodiment 1 is used as the transistor 162.
[0400] Semiconductor materials and structures of the transistor 140
and the transistor 162, which are stacked, may be the same as or
different from each other. In this embodiment, an example is
described in which materials and structures which are appropriate
for the circuit of the memory medium (memory element) are employed
for the transistors.
[0401] In FIGS. 15A to 15C, an example of the structure of the
semiconductor device is illustrated. FIG. 15A illustrates a cross
section of the semiconductor device, and FIG. 15B is a plane view
of the semiconductor device. Here, FIG. 15A corresponds to a cross
section along line C1-C2 and line D1-D2 in FIG. 15B. In addition,
FIG. 15C is an example of a diagram of a circuit using the
semiconductor device as a memory element. The semiconductor device
illustrated in FIGS. 15A and 15B includes the transistor 140 using
a first semiconductor material in its lower portion, and the
transistor 162 using a second semiconductor material in its upper
portion. In this embodiment, the first semiconductor material is a
semiconductor material other than an oxide semiconductor, and the
second semiconductor material is an oxide semiconductor. As the
semiconductor material other than an oxide semiconductor, for
example, silicon, germanium, silicon germanium, silicon carbide, or
gallium arsenide can be used; a single crystal semiconductor is
preferably used. Alternatively, an organic semiconductor material
or the like may be used. A transistor using such a semiconductor
material can operate at high speed easily. On the other hand, a
transistor using an oxide semiconductor enables charge to be held
for a long time owing to its characteristics.
[0402] The semiconductor device shown in FIGS. 15A to 15C is
described with reference to FIGS. 15A to 15C.
[0403] The transistor 140 includes a channel formation region 116
provided in a substrate 185 containing a semiconductor material
(e.g., silicon), impurity regions 120 provided so that the channel
formation region 116 is positioned therebetween, metal compound
regions 124 in contact with the impurity regions 120, a gate
insulating film 108 provided over the channel formation region 116,
and a gate electrode 110 provided over the gate insulating film
108.
[0404] As the substrate 185 containing a semiconductor material, a
single crystal semiconductor substrate or a polycrystalline
semiconductor substrate of silicon, silicon carbide, or the like; a
compound semiconductor substrate of silicon germanium or the like;
an SOI substrate; or the like can be used. Although the "SOI
substrate" generally means a substrate in which a silicon
semiconductor film is provided on an insulating surface, the "SOI
substrate" in this specification and the like also includes in its
category a substrate in which a semiconductor film formed using a
material other than silicon is provided on an insulating surface.
That is, a semiconductor film included in the "SOI substrate" is
not limited to a silicon semiconductor film. Moreover, the SOI
substrate can have a structure in which a semiconductor film is
provided over an insulating substrate such as a glass substrate
with an insulating film provided therebetween.
[0405] As a method of forming the SOI substrate, any of the
following methods can be used: a method in which oxygen ions are
added to a mirror-polished wafer and then heating is performed
thereon at a high temperature, whereby an oxide layer is formed at
a certain depth from a top surface of the wafer and a defect caused
in the surface layer is eliminated; a method in which a
semiconductor substrate is separated by utilizing growth of
microvoids formed by hydrogen ion irradiation, by heat treatment; a
method in which a single crystal semiconductor film is formed over
an insulating surface by crystal growth; and the like.
[0406] For example, ions are added through one surface of a single
crystal semiconductor substrate, so that an embrittlement layer is
formed at a certain depth from a surface of the single crystal
semiconductor substrate, and an insulating film is formed over one
of the surface of the single crystal semiconductor substrate and an
element substrate. Heat treatment is performed in a state where the
single crystal semiconductor substrate and the element substrate
are bonded to each other with the insulating film provided
therebetween, so that a crack is generated in the embrittlement
layer and the single crystal semiconductor substrate is separated
along the embrittlement layer. Accordingly, a single crystal
semiconductor layer, which is separated from the single crystal
semiconductor substrate, is formed as a semiconductor layer over
the element substrate. An SOI substrate formed by the above method
can also be favorably used.
[0407] An element isolation insulating layer 106 is provided over
the substrate 185 so as to surround the transistor 140. For high
integration, it is preferable that, as in FIGS. 15A to 15C, the
transistor 140 do not have a sidewall insulating layer. On the
other hand, in the case where the characteristics of the transistor
140 have priority, a sidewall insulating layer may be provided on a
side surface of the gate electrode 110, and the impurity region 120
including a region having a different impurity concentration may be
provided.
[0408] The transistor 140 formed using a single crystal
semiconductor substrate can operate at high speed. Thus, the use of
the transistor as a reading transistor enables data to be read at
high speed. Two insulating films are formed so as to cover the
transistor 140. As treatment prior to formation of the transistor
162 and a capacitor 164, CMP treatment is performed on the two
insulating films, so that an insulating film 128 and an insulating
film 130 are formed to be planarized and an upper surface of the
gate electrode 110 is exposed.
[0409] As each of the insulating film 128 and the insulating film
130, as a typical example, it is possible to use an inorganic
insulating film such as a silicon oxide film, a silicon oxynitride
film, an aluminum oxide film, an aluminum oxynitride film, a
silicon nitride film, an aluminum nitride film, a silicon nitride
oxide film, or an aluminum nitride oxide film. The insulating film
128 and the insulating film 130 can be formed by a plasma-enhanced
CVD method, a sputtering method, or the like.
[0410] Alternatively, an organic material such as a polyimide, an
acrylic resin, or benzocyclobutene-based resin can be used. Other
than such organic materials, it is also possible to use a low
dielectric constant material (low-k material) or the like. In the
case of using an organic material, the insulating film 128 and the
insulating film 130 may be formed by a wet method such as a spin
coating method or a printing method.
[0411] In the insulating film 130, a silicon oxide film is used as
the film to be in contact with the semiconductor film.
[0412] In this embodiment, a 50-nm-thick silicon oxynitride film is
formed as the insulating film 128 by a sputtering method, and a
550-nm-thick silicon oxide film is formed as the insulating film
130 by a sputtering method.
[0413] A gate electrode layer 148 is formed over the insulating
film 130 which is sufficiently planarized by the CMP. The gate
electrode layer 148 can be formed by forming a conductive layer and
selectively etching the conductive layer.
[0414] A gate insulating film 146 is formed over the gate electrode
layer 148.
[0415] For the gate insulating film 146, a silicon oxide film, a
silicon nitride film, a silicon oxynitride film, a silicon nitride
oxide film, an aluminum oxide film, an aluminum nitride film, an
aluminum oxynitride film, an aluminum nitride oxide film, a hafnium
oxide film, or a gallium oxide film can be formed by a
plasma-enhanced CVD method, a sputtering method, or the like.
[0416] Oxide semiconductor films whose energy gaps are different
from each other are stacked over the gate insulating film 146. In
this embodiment, an In--Sn--Zn-based oxide layer and an
In--Ga--Zn-based oxide layer are stacked in this order over the
gate insulating film 146.
[0417] Next, the stacked layer of the oxide semiconductor films is
selectively etched to form an island-shaped oxide semiconductor
stacked layer 144.
[0418] Over the oxide semiconductor film stacked layer 144, a
source and drain electrodes 142a and 142b are formed.
[0419] The conductive layers which can be used for the gate
electrode layer 148 and the source and drain electrodes 142a and
142b can be formed by a PVD method such as a sputtering method or a
CVD method such as a plasma-enhanced CVD method. Further, as a
material of the conductive layers, an element selected from Al, Cr,
Cu, Ta, Ti, Mo, and W, an alloy containing any of the above
elements as a component, or the like can be used. Any of Mn, Mg,
Zr, Be, Nd, and Sc, or a material containing any of these in
combination may be used.
[0420] The conductive layer has either a single-layer structure or
a stacked-layer structure of two or more layers. For example, the
conductive layer can have a single-layer structure of a titanium
film or a titanium nitride film, a single-layer structure of an
aluminum film containing silicon, a two-layer structure in which a
titanium film is stacked over an aluminum film, a two-layer
structure in which a titanium film is stacked over a titanium
nitride film, or a three-layer structure in which a titanium film,
an aluminum film, and a titanium film are stacked in this order. A
conductive layer having a single-layer structure of a titanium film
or a titanium nitride film has an advantage in that it can be
easily processed into the source and drain electrodes 142a and 142b
having a tapered shape.
[0421] Next, an insulating film 150 is formed over the gate
electrode layer 148, the gate insulating film 146, and the oxide
semiconductor film stacked layer 144. An aluminum oxide film is
formed as the insulating film 150 in this embodiment.
[0422] The aluminum oxide film which is provided as the film 150
over the oxide semiconductor stacked layer 144 has a high blocking
effect by which both of oxygen and impurities such as hydrogen or
water is prevented from being passed through the film.
[0423] Therefore, in and after the manufacturing process, the
aluminum oxide film functions as a protective film for preventing
entry of an impurity such as hydrogen or water, which causes a
change, into the oxide semiconductor stacked layer 144 and release
of oxygen, which is a main constituent material of the oxide
semiconductor, from the oxide semiconductor stacked layer 144.
[0424] An insulating film may be further stacked over the
insulating film 150.
[0425] As the insulating film, a silicon oxide film, a silicon
nitride film, a silicon oxynitride film, a silicon nitride oxide
film, an aluminum nitride film, an aluminum oxide film, an aluminum
oxynitride film, an aluminum nitride oxide film, a hafnium oxide
film, and a gallium oxide film formed by a plasma-enhanced CVD
method, a sputtering method, or the like.
[0426] Over the insulating film 150, an electrode layer 153 is
formed in a region which overlaps with the source or drain
electrode 142a.
[0427] Next, an insulating film 152 is formed over the transistor
162 and the electrode layer 153. The insulating film 152 can be
formed by a sputtering method, a CVD method, or the like. The
insulating film 152 can be formed using a material including an
inorganic insulating material such as silicon oxide, silicon
oxynitride, silicon nitride, hafnium oxide, or aluminum oxide.
Alternatively, an organic material such as polyimide, an acrylic
resin, or a benzocyclobutene-based resin can be used, to which a
wet process such as a coating method, a printing method, or an
ink-jet method can be applied.
[0428] Next, an opening reaching the source or drain electrode 142b
is formed in the gate insulating film 146, the insulating film 150,
and the insulating film 152. The opening is formed by selective
etching with the use of a mask or the like.
[0429] After that, a wiring 156 is formed in the opening to be in
contact with the source or drain electrode 142b. A connection point
of the source or drain electrode 142b and the wiring 156 is not
illustrated in FIGS. 15A to 15C.
[0430] The wiring 156 is formed in such a manner that a conductive
layer is formed by a PVD method such as a sputtering method or a
CVD method such as a plasma-enhanced CVD method and then the
conductive layer is etched. Further, as the material of the
conductive layer, an element selected from Al, Cr, Cu, Ta, Ti, Mo,
and W, an alloy including the above element as its component, or
the like can be used. Any of Mn, Mg, Zr, Be, Nd, and Sc, or a
material including any of these in combination may be used. The
details are the same as the details of the source electrode or
drain electrode 142a.
[0431] Through the above process, the transistor 162 and the
capacitor 164 are completed. In this embodiment, the transistor 162
includes the oxide semiconductor stacked layer 144 including at
least two oxide semiconductor layers whose energy gaps are
different from each other. By using the oxide semiconductor stacked
layer 144 using the plurality of oxide semiconductor layers whose
energy gaps are different from each other, electrical
characteristics of the transistor 162 can be adjusted with high
accuracy, providing the transistor 162 with appropriate electrical
characteristics. Further, in this embodiment, the oxide
semiconductor stacked layer 144 is highly purified and contains
excess oxygen that repairs an oxygen vacancy. Therefore, the
transistor 162 has less off-state current and less change in
electric characteristics and is thus electrically stable. The
capacitor 164 includes the source or drain electrode 142a, the
insulating film 150, and the electrode layer 153.
[0432] Further alternatively, the capacitor 164 may be omitted in
the case where a capacitor is not requisite.
[0433] FIG. 15C is an example of a diagram of a circuit using the
semiconductor device as a memory element. In FIG. 15C, one of a
source electrode and a drain electrode of the transistor 162, one
electrode of the capacitor 164, and a gate electrode of the
transistor 140 are electrically connected to one another. A first
wiring (1st Line, also referred to as a source line) is
electrically connected to a source electrode of the transistor 140.
A second wiring (2nd Line, also referred to as a bit line) is
electrically connected to a drain electrode of the transistor 140.
A third wiring (3rd Line, also referred to as a first signal line)
is electrically connected to the other of the source electrode and
the drain electrode of the transistor 162. A fourth wiring (4th
Line, also referred to as a second signal line) is electrically
connected to a gate electrode of the transistor 162. A fifth wiring
(5th Line, also referred to as a word line) and the other electrode
of the capacitor 164 are electrically connected to each other.
[0434] The transistor 162 using an oxide semiconductor has
extremely small off-state current; therefore, by turning the
transistor 162 off, the potential of a node (hereinafter, a node
FG) where the one of the source electrode and the drain electrode
of the transistor 162, the one electrode of the capacitor 164, and
the gate electrode of the transistor 140 are electrically connected
to one another can be held for an extremely long time. The
capacitor 164 facilitates holding of charge given to the node FG
and reading of the held data.
[0435] To store data in the semiconductor device (in writing of
data), the potential of the fourth wiring is set to a potential at
which the transistor 162 is turned on, whereby the transistor 162
is turned on. Thus, the potential of the third wiring is supplied
to the node FG, so that a predetermined amount of charge is
accumulated in the node FG. Here, charge for supplying either of
two different potential levels (hereinafter referred to as
low-level charge and high-level charge) is given to the node FG.
After that, the potential of the fourth wiring is set to a
potential at which the transistor 162 is turned off, whereby the
transistor 162 is turned off. This makes the node FG floating and
the predetermined amount of charge is kept being held in the node
FG. The predetermined amount of charge is thus accumulated and held
in the node FG, whereby the memory cell can store data.
[0436] Since the off-state current of the transistor 162 is
extremely small, the charge supplied to the node FG is kept being
held for a long period. Thus, the refresh operation is not
requisite or the frequency of the refresh operation can be
extremely reduced, which leads to a sufficient reduction in power
consumption. Further, stored data can be kept being held for a long
time even while power is not supplied.
[0437] To read out stored data (in reading of data), while a
predetermined potential (a fixed potential) is supplied to the
first wiring, an appropriate potential (a read-out potential) is
supplied to the fifth wiring, whereby the transistor 140 changes
its state depending on the amount of charge held in the node FG.
This is because in general, when the transistor 140 is an n-channel
transistor, a threshold value V.sub.th.sub._.sub.H of the
transistor 140 in the case where the high-level charge is held in
the node FG is smaller than a threshold value V.sub.th.sub._.sub.L
of the transistor 140 in the case where the low-level charge is
held in the node FG. Here, each threshold voltage refers to the
potential of the fifth wiring, which is requisite to turn on the
transistor 140. Thus, by setting the potential of the fifth wiring
to a potential V.sub.0 which is between V.sub.th.sub._.sub.H and
V.sub.th.sub._.sub.L, charge held in the node FG can be determined.
For example, in the case where the high-level electric charge is
given in data writing, when the potential of the fifth wiring is
V.sub.0 (>V.sub.th.sub._.sub.H), the transistor 140 is turned
on. In the case where the low-level electric charge is given in
writing, even when the potential of the fifth wiring is V.sub.0
(<V.sub.th.sub._.sub.L), the transistor 140 remains in its off
state. Therefore, by controlling the potential of the fifth wiring
and determining whether the transistor 140 is in an on state or off
state (reading out the potential of the second wiring), stored data
can be read out.
[0438] Further, in order to rewrite stored data, the next potential
is supplied to the node FG that is holding the predetermined amount
of charge given in the above data writing, so that the charge of
the next data is held in the node FG. Specifically, the potential
of the fourth wiring is set to a potential at which the transistor
162 is turned on, whereby the transistor 162 is turned on. The
potential of the third wiring (potential of the next data) is
supplied to the node FG, and the predetermined amount of charge is
accumulated in the node FG. After that, the potential of the fourth
wiring is set to a potential at which the transistor 162 is turned
off, whereby the transistor 162 is turned off, whereby the charge
of the next data is kept being held in the node FG. In other words,
while the predetermined amount of charge given in the first writing
is kept being held in the node FG, an operation (second writing) is
performed in the same manner as the first writing, whereby data can
be overwritten to be stored.
[0439] The off-state current of the transistor 162 described in
this embodiment can be sufficiently reduced by using the oxide
semiconductor stacked layer including at least two oxide
semiconductor layers whose energy gaps are different from each
other. Thus, by using such a transistor, a semiconductor device in
which stored data can be kept being held for an extremely long time
can be provided.
[0440] As described above, by using the oxide semiconductor stacked
layer including a plurality of oxide semiconductor layers having
different energy gaps, the electrical characteristics of the
transistor can be adjusted with higher accuracy, providing the
transistor with appropriate electrical characteristics.
Accordingly, semiconductor devices for a variety of purposes such
as high functionality, high reliability, and low power consumption
can be provided.
[0441] The structures, methods, and the like described in this
embodiment can be combined as appropriate with any of the
structures, methods, and the like described in the other
embodiments.
Embodiment 8
[0442] Any semiconductor device disclosed in this specification can
be applied to a variety of electronic equipment (including game
machines). Examples of electronic equipment are a television set
(also referred to as a television or a television receiver), a
monitor of a computer or the like, a camera such as a digital
camera or a digital video camera, a digital photo frame, a mobile
phone handset (also referred to as a mobile phone or a mobile phone
device), a portable game machine, a portable information terminal,
an audio reproducing device, a large-sized game machine such as a
pachinko machine, and the like. Examples of electronic equipment
each including the semiconductor device described in the above
embodiment are described. The semiconductor device described above
enables electronic equipment with quality for a variety of purposes
such as high functionality, high reliability, and low power
consumption to be provided.
[0443] FIG. 16A illustrates a table 9000 having a display portion.
In the table 9000, a display portion 9003 is incorporated into a
housing 9001. The semiconductor device manufactured according to
one embodiment of the present invention can be used for the display
portion 9003, and an image can be displayed on the display portion
9003. The housing 9001 is supported by 4 leg portions 9002 here.
Further, a power cord 9005 for supplying power is provided for the
housing 9001.
[0444] The display portion 9003 has a touch input function, so that
users can operate the screen or input data by touching a display
button 9004 displayed on the display portion 9003 of the table 9000
with their fingers or the like; this enables communication with or
control of another home appliance, whereby the display portion 9003
can serves as a control device for controlling another home
appliance by screen operation. For example, the display portion
9003 can be provided with a touch input function by using the
semiconductor device having an image sensor function described in
Embodiment 6.
[0445] Further, the screen of the display portion 9003 can be
placed perpendicular to a floor with a hinge provided for the
housing 9001; thus, the table 9000 can also be used as a television
device. A television device having a large screen reduces an open
space in a small room; by contrast, a display portion incorporated
in a table leads to efficient use of the room space.
[0446] FIG. 16B illustrates a television set 9100. In the
television set 9100, a display portion 9103 is incorporated in a
housing 9101. The semiconductor device manufactured according to
one embodiment of the present invention can be used in the display
portion 9103, so that an image can be displayed on the display
portion 9103. The housing 9101 is supported by a stand 9105
here.
[0447] The television set 9100 can be operated with an operation
switch of the housing 9101 or a separate remote controller 9110.
Channels and volume can be controlled with an operation key 9109 of
the remote controller 9110 so that an image displayed on the
display portion 9103 can be controlled. Furthermore, the remote
controller 9110 may be provided with a display portion 9107 for
displaying data output from the remote controller 9110.
[0448] The television set 9100 illustrated in FIG. 16B is provided
with a receiver, a modem, and the like. With the receiver, the
television set 9100 can receive a general television broadcast.
Further, the television set 9100 can be connected to a
communication network by wired or wireless connection via the
modem, so that one-way (from sender to receiver) or two-way
(between sender and receiver or between receivers) data
communication can be performed.
[0449] The semiconductor device described in any of Embodiments 1
to 7 can be applied to the display portion 9103, whereby a
higher-performance, highly reliable television set can be
provided.
[0450] FIG. 16C illustrates a computer which includes a main body
9201, a housing 9202, a display portion 9203, a keyboard 9204, an
external connection port 9205, a pointing device 9206, and the
like. The computer is manufactured using the semiconductor device
manufactured according to one embodiment of the present invention
for the display portion 9203.
[0451] The semiconductor device described in any of Embodiments 1
to 7 can be applied to the display portion 9203, whereby a
higher-performance, highly reliable computer can be provided.
[0452] FIG. 16D illustrates an example of a mobile phone. A mobile
phone 9500 is provided with a display portion 9502 incorporated in
a housing 9501, an operation button 9503, an external connection
port 9504, a speaker 9505, a microphone 9506, and the like. The
semiconductor device described in any of Embodiments 1 to 7 can be
applied to the display portion 9502, whereby a higher-performance,
highly reliable mobile phone can be provided.
[0453] Users can input data, make a call, or text a message by
touching the display portion 9502 of the mobile phone 9500
illustrated in FIG. 16D with their fingers or the like.
[0454] There are mainly three screen modes for the display portion
9502. The first mode is a display mode mainly for displaying
images. The second mode is an input mode mainly for inputting data
such as text. The third mode is a display-and-input mode in which
two modes of the display mode and the input mode are combined.
[0455] For example, in the case of making a call or text messaging,
a text input mode mainly for inputting text is selected for the
display portion 9502 so that characters displayed on a screen can
be input. In this case, it is preferable to display a keyboard or
number buttons on almost the entire screen of the display portion
9502.
[0456] By providing a detection device which includes a sensor for
detecting inclination, such as a gyroscope or an acceleration
sensor, inside the mobile phone 9500, the direction of the mobile
phone 9500 (whether the mobile phone 9500 is placed horizontally or
vertically for a landscape mode or a portrait mode) is determined
so that display on the screen of the display portion 9502 can be
automatically switched.
[0457] In addition, the screen mode is switched by touching the
display portion 9502 or operating the operation buttons 9503 of the
housing 9501. Alternatively, the screen modes can be switched
depending on kinds of images displayed on the display portion 9502.
For example, when a signal of an image displayed on the display
portion is a signal of moving image data, the screen mode is
switched to the display mode; when the signal is a signal of text
data, the screen mode is switched to the input mode.
[0458] Moreover, in the input mode, a signal detected by an optical
sensor in the display portion 9502 may be detected, so that the
screen mode may be controlled so as to be switched from the input
mode to the display mode when input by touching the display portion
9502 is not performed within a specified period of time.
[0459] The display portion 9502 can also function as an image
sensor. For example, an image of a palm print, a fingerprint, or
the like is taken by touching the display portion 9502 with the
palm or the finger, whereby personal authentication can be
performed. Further, a backlight or a sensing light source which
emits a near-infrared light may be provided for the display
portion, by which an image of a finger vein, a palm vein, or the
like can be taken.
[0460] The structures, methods, and the like described in this
embodiment can be combined as appropriate with any of the
structures, methods, and the like described in the other
embodiments.
EXAMPLE 1
[0461] In this example, Samples (Sample 1A, Sample 1B, Sample 2A,
and Sample 2B) were manufactured in which a second oxide
semiconductor layer whose energy gap is smaller than that of a
first oxide semiconductor layer is formed over the first oxide
semiconductor layer and a third oxide semiconductor layer is formed
over the second oxide semiconductor layer, and cross-sectional
structures of Sample 1A, Sample 1B, Sample 2A, and Sample 2B were
observed. Further, ionization potentials of Samples 1A and 2A were
measured, based on which the energy band diagrams were obtained by
calculation. In this specification, the ionization potential is the
sum of a band gap and an electron affinity, and the band gap is
measured by ellipsometry on a single film formed of its
material.
[0462] A 5-nm-thick In--Ga--Zn-based oxide film, a 5-nm-thick
In--Sn--Zn-based oxide film, and a 5-nm-thick In--Ga--Zn-based
oxide film were stacked over a quartz substrate, which is a
substrate 1000, as a first oxide semiconductor layer 1001, a second
oxide semiconductor layer 1002, and a third oxide semiconductor
layer 1003, respectively, to form Sample 1A. Each layer was
deposited by a sputtering method at a substrate temperature of
300.degree. C. under an oxygen atmosphere (100% oxygen). An oxide
target of In:Ga:Zn=1:1:1 (atomic ratio) was used for deposition of
each In--Ga--Zn-based oxide film; an oxide target of In:Sn:Zn=2:1:3
(atomic ratio) was used for deposition of the In--Sn--Zn-based
oxide film.
[0463] An oxide semiconductor stacked layer formed in a manner
similar to that of Sample 1A was subjected to heat treatment, so
that an oxide semiconductor stacked layer including a mixed region
was formed to form Sample 1B. The heat treatment was performed at
650.degree. C. under nitrogen atmosphere for one hour, and then
performed at 650.degree. C. under oxygen atmosphere for one
hour.
[0464] A 5-nm-thick In--Ga--Zn-based oxide film, a 5-nm-thick
In--Zn-based oxide film, and a 5-nm-thick In--Ga--Zn-based oxide
film were stacked over a quartz substrate, which is a substrate
1000, as a first oxide semiconductor layer 1001, a second oxide
semiconductor layer 1002, and a third oxide semiconductor layer
1003, respectively, to form Sample 2A. Each layer was deposited by
a sputtering method at a substrate temperature of 300.degree. C.
under an oxygen atmosphere (100% oxygen). An oxide target of
In:Ga:Zn=1:1:1 (atomic ratio) was used for deposition of each
In--Ga--Zn-based oxide film; an oxide target of In:Zn=2:1 (atomic
ratio) was used for deposition of the In--Zn-based oxide film.
[0465] An oxide semiconductor stacked layer formed in a manner
similar to that of Sample 2A was subjected to heat treatment, so
that an oxide semiconductor stacked layer including a mixed region
was formed to form Sample 2B. The heat treatment was performed at
650.degree. C. under nitrogen atmosphere for one hour, and then
performed at 650.degree. C. under oxygen atmosphere for one
hour.
[0466] Respective edge sections were cut out of Samples 1A, 1B, 2A,
and 2B, and cross sections thereof were observed with a
high-resolution transmission electron microscopy ("H9000-NAR": TEM
manufactured by Hitachi High-Technologies Corporation) at an
accelerating voltage of 300 kV. FIG. 17B is a TEM image of Sample
1A; FIG. 17C is a TEM image of Sample 1B; FIG. 18B is a TEM image
of Sample 2A; FIG. 18C is a TEM image of Sample 2B. A schematic
diagram of Sample 1A and a schematic diagram of Sample 2A are FIG.
17A and FIG. 18A, respectively. Each interface between stacked
oxide semiconductor layers is shown by a dotted line in FIGS. 17A
and 18A, which is illustrated schematically.
[0467] The TEM images of Samples 1A and 1B in FIGS. 17B and 17C are
of the oxide semiconductor stacked layer in which the first
5-nm-thick In--Ga--Zn-based oxide film, the 5-nm-thick
In--Sn--Zn-based oxide film, and the second 5-nm-thick
In--Ga--Zn-based oxide film were stacked over the substrate 1000 as
the first oxide semiconductor layer 1001, the second oxide
semiconductor layer 1002, and the third oxide semiconductor layer
1003, respectively. Each interface between the stacked oxide
semiconductor layers can be recognized in the TEM image of Sample
1A in FIG. 17B. On the other hand, in the TEM image of Sample 1B in
which the heat treatment was performed on the oxide semiconductor
stacked layer, a clear interface is not recognized between the
stacked oxide semiconductor layers as shown in FIG. 17C, and a
mixed region is formed.
[0468] The TEM images of Samples 2A and 2B in FIGS. 18B and 18C are
of the oxide semiconductor stacked layer in which the first
5-nm-thick In--Ga--Zn-based oxide film, the 5-nm-thick In--Zn-based
oxide film, and the second 5-nm-thick In--Ga--Zn-based oxide film
were stacked over the substrate 1000 as the first oxide
semiconductor layer 1001, the second oxide semiconductor layer
1002, and the third oxide semiconductor layer 1003, respectively.
Each interface between the stacked oxide semiconductor layers can
be recognized in the TEM image of Sample 2A in FIG. 18B. On the
other hand, in the TEM image of Sample 2B in which the heat
treatment was performed on the oxide semiconductor stacked layer, a
clear interface is not recognized between the stacked oxide
semiconductor layers as shown in FIG. 18C, and a mixed region is
formed.
[0469] As shown in FIGS. 17B, 17C, 18B, and 18C, it can be
recognized that in Samples 1A, 1B, 2A, and 2B, the first
In--Ga--Zn-based oxide film which is the first oxide semiconductor
layer 1001, the In--Sn--Zn-based oxide film and the In--Zn-based
oxide film each of which is the second oxide semiconductor layer
1002, and the second In--Ga--Zn-based oxide film which is the third
oxide semiconductor layer 1003 each include a crystal and are a
crystalline oxide semiconductor (CAAC-OS) film having c-axis
alignment. The first In--Ga--Zn-based oxide film which is the first
oxide semiconductor layer 1001 also includes an amorphous
structure.
[0470] The crystal state of each oxide semiconductor layer in the
oxide semiconductor stacked layer is not particularly limited; each
and every oxide semiconductor layer may have a crystal structure or
may have an amorphous structure, or both an oxide semiconductor
layer having a crystal structure and an oxide semiconductor layer
having an amorphous structure may be included in the oxide
semiconductor stacked layer.
[0471] Respective stacked layers were formed under deposition
conditions which are the same as respective those of Sample 1A and
Sample 2A except a single crystal silicon substrate being used as a
substrate, and ionization potentials thereof were measured by
ultraviolet photoelectron spectroscopy (UPS) while sputtering top
surfaces thereof, results of which are shown in FIGS. 19 and
21.
[0472] In FIGS. 19 and 21, the horizontal axis indicates the
sputtering time taken from the top surface of the sample, and the
vertical axis indicates the ionization potential. Each interface is
indicated on the assumption that the sputtering rate is equal to
each other between the In--Ga--Zn-based oxide film and the
In--Sn--Zn-based oxide film and the sputtering rate is equal to
each other between the In--Ga--Zn-based oxide film and the
In--Zn-based oxide film.
[0473] It can be seen from FIG. 19 that the ionization potential
lowers in the In--Sn--Zn-based oxide film provided between the
In--Ga--Zn-based oxide films. The ionization potential means the
energy difference from the vacuum level to the valence band.
[0474] The band gap according to the ellipsometry measurement was
subtracted from the ionization potential, so that the energy of the
conduction band was obtained, drawing a band structure of the
stacked layer. The band gap of the In--Ga--Zn-based oxide film and
the band gap of the In--Sn--Zn-based oxide film were set at 3.2 eV
and 2.8 eV, respectively. In this manner, FIG. 20 is obtained. It
is found that a buried channel is formed in FIG. 20 as shown in an
energy band diagram shown in FIG. 4C.
[0475] It can be seen from FIG. 21 that the ionization potential
lowers in the In--Zn-based oxide film provided between the
In--Ga--Zn-based oxide films. The ionization potential means the
energy difference from the vacuum level to the valence band.
[0476] The band gap according to the ellipsometry measurement was
subtracted from the ionization potential, so that the energy of the
conduction band was obtained, drawing a band structure of the
stacked layer. The band gap of the In--Ga--Zn-based oxide film and
the band gap of the In--Zn-based oxide film were set at 3.2 eV and
2.6 eV, respectively. In this manner, FIG. 22 is obtained. It is
found that a buried channel is formed in FIG. 22 as shown in the
energy band diagram shown in FIG. 4C.
[0477] In this example, the stacked layer in which the
In--Ga--Zn-based oxide film was used as each of the first oxide
semiconductor layer and the third oxide semiconductor layer and the
In--Sn--Zn-based oxide film or the In--Zn-based oxide film was used
as the second oxide semiconductor layer whose ionization potential
and energy gap are smaller than those of any of the first oxide
semiconductor layer and the third oxide semiconductor layer was
surely described by FIG. 20, FIG. 22, or the energy band diagram
shown in FIG. 4C. The combination of materials of the first oxide
semiconductor layer, the second oxide semiconductor layer, and the
third oxide semiconductor layer is not particularly limited;
materials may be used as appropriate to FIG. 20, FIG. 22, or the
energy band diagram shown in FIG. 4C, considering their energy
gaps.
EXAMPLE 2
[0478] In this example, characteristics of transistors (Example
Transistors 1 to 4 and Comparison Transistors 1 to 4) each
including an oxide semiconductor stacked layer which consists of a
stack of a first oxide semiconductor layer and a second oxide
semiconductor layer, which are described as the transistors 440a,
440b, and 430 in Embodiment 1, were calculated.
[0479] For the calculation in this example, simulation software
Technology Computer-Aided Design (TCAD) manufactured by Synopsys,
Inc. was used.
[0480] As Example Transistors 1 and 2 and Comparison Transistors 1
and 2, bottom-gate (channel-etched type) transistors were used in
each of which an oxide semiconductor stacked layer in which a first
oxide semiconductor layer and a second oxide semiconductor layer
are stacked in this order is provided over a 100-nm-thick gate
insulating film provided over a gate electrode layer, and a source
and drain electrode layers are provided over the oxide
semiconductor stacked layer as described for the transistors 440a
and 440b in Embodiment 1.
[0481] As Example Transistors 3 and 4 and Comparison Transistors 3
and 4, bottom-gate transistors were used in each of which a source
and drain electrode layers are provided over a 100-nm-thick gate
insulating film provided over a gate electrode layer, and an oxide
semiconductor stacked layer in which a first oxide semiconductor
layer and a second oxide semiconductor layer are stacked in this
order is provided over the source and drain electrode layers as
described for the transistor 430 in Embodiment 1.
[0482] The calculation was performed by setting both of the channel
length (L) and the channel width (W) at 10 .mu.m and setting the
drain voltage (Vd) at 1 V in Example Transistors 1 to 4 and
Comparison Transistors 1 to 4.
[0483] Each oxide semiconductor stacked layer of Example
Transistors 1 to 4 includes the first oxide semiconductor layer and
the second oxide semiconductor layer which have different energy
gaps from each other. A 5-nm-thick In--Sn--Zn-based oxide film and
a 5-nm-thick In--Ga--Zn-based oxide film were included as the first
oxide semiconductor layer and the second oxide semiconductor layer,
respectively, in Example Transistors 1 and 3; a 5-nm-thick
In--Ga--Zn-based oxide film and a 5-nm-thick In--Sn--Zn-based oxide
film were included as the first oxide semiconductor layer and the
second oxide semiconductor layer, respectively, in Example
Transistors 2 and 4.
[0484] On the other hand, each oxide semiconductor stacked layer of
Comparison Transistors 1 to 4, which are comparison examples,
includes the first oxide semiconductor layer and the second oxide
semiconductor layer which have the same energy gap. A 5-nm-thick
In--Ga--Zn-based oxide film and a 5-nm-thick In--Ga--Zn-based oxide
film were included as the first oxide semiconductor layer and the
second oxide semiconductor layer, respectively, (i.e., the oxide
semiconductor stacked layer consists of In--Ga--Zn-based oxide
films) in Comparison Transistors 1 and 3; a 5-nm-thick
In--Sn--Zn-based oxide film and a 5-nm-thick In--Sn--Zn-based oxide
film were included as the first oxide semiconductor layer and the
second oxide semiconductor layer, respectively, (i.e., the oxide
semiconductor stacked layer consists of ITGO films) in Comparison
Transistors 2 and 4.
[0485] For the calculation, in Example Transistors 1 to 4 and
Comparison Transistors 1 to 4, the band gap, carrier life time,
bulk mobility, and electron affinity of the In--Ga--Zn-based oxide
film were set at 3.15 eV, 1 nsec, 10 cm.sup.2/Vs, and 4.6 eV,
respectively; the band gap, carrier life time, bulk mobility, and
electron affinity of the In--Sn--Zn-based oxide film were set at
2.8 eV, 1 nsec, 35 cm.sup.2/Vs, and 4.6 eV, respectively.
[0486] The off-state currents obtained through the calculation of
Example Transistors 1 and 2 and Comparison Transistors 1 and 2 are
shown in FIGS. 23A and 23B; those obtained through the calculation
of Example Transistors 3 and 4 and Comparison Transistors 3 and 4
are shown in FIGS. 25A and 25B. FIGS. 23B and 25B are enlarged
graphs at drain currents ranging from 1.0.times.10.sup.-35 A to
1.0.times.10.sup.-25 A in FIGS. 23A and 25A, respectively. In FIGS.
23A and 23B, and FIGS. 25A and 25B, the vertical axis indicates the
drain current (A) and the horizontal axis indicates the gate
voltage (V).
[0487] The filed-effect mobilities obtained through the calculation
of Example Transistors 1 and 2 and Comparison Transistors 1 and 2
are shown in FIG. 24; those obtained through the calculation of
Example Transistors 3 and 4 and Comparison Transistors 3 and 4 are
shown in FIG. 26. In FIGS. 24 and 26, the vertical axis indicates
the filed-effect mobility (cm.sup.2/Vs) and the horizontal axis
indicates the gate voltage (V).
[0488] In Example Transistors 1 and 2 and Comparison Transistors 1
and 2, which have the same structure, the off-state current was
different as shown in FIGS. 23A and 23B, and the field-effect
mobility was also different as shown in FIG. 24.
[0489] Likewise in Example Transistors 3 and 4 and Comparison
Transistors 3 and 4, which have the same structure, the off-state
current was different as shown in FIGS. 25A and 25B, and the
field-effect mobility was also different as shown in FIG. 26.
[0490] In this example, particularly, the difference in the
field-effect mobility shown in FIGS. 24 and 26 became remarkable
depending on the oxide semiconductor materials and the stack order
of layers of the oxide semiconductor stacked layer.
[0491] The foregoing results prove that electrical characteristics
(the field-effect mobility and the off-state current in this
example) of a transistor can be changed variously by a stacked
layer of oxide semiconductor layers whose band gaps are different
from each other without changing the structure of the
transistor.
[0492] Thus, by using an oxide semiconductor stacked layer,
electrical characteristics of a transistor can be adjusted with
high accuracy, providing the transistor with appropriate electrical
characteristics.
[0493] This application is based on Japanese Patent Application
serial no. 2011-152099 filed with Japan Patent Office on Jul. 8,
2011, the entire contents of which are hereby incorporated by
reference.
* * * * *