U.S. patent application number 15/252364 was filed with the patent office on 2017-03-02 for substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program.
This patent application is currently assigned to TOKYO ELECTRON LIMITED. The applicant listed for this patent is TOKYO ELECTRON LIMITED. Invention is credited to Go AYABE, Kouji TAKUMA.
Application Number | 20170062251 15/252364 |
Document ID | / |
Family ID | 58095826 |
Filed Date | 2017-03-02 |
United States Patent
Application |
20170062251 |
Kind Code |
A1 |
AYABE; Go ; et al. |
March 2, 2017 |
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSPORT METHOD, AND
COMPUTER-READABLE RECORDING MEDIUM WITH STORED SUBSTRATE TRANSPORT
PROGRAM
Abstract
A substrate processing apparatus includes a substrate processing
device, a substrate accommodation-status detection device, a
substrate-transport device including a first substrate-transport
sub-device which unloads substrates from a carrier and a second
substrate-transport sub-device which unloads the substrates from
the carrier, a control device including processing circuitry which
controls the first and second sub strate-transport sub-devices
based on detection result of the substrate accommodation-status
detection device. The processing circuitry of the control device
determines a selection, based on the result of the substrate
accommodation-status detection device, between a process in which
the processing circuitry of the control device simultaneously
drives the first and second substrate-transport sub-devices such
that the first and second substrate-transport sub-devices
simultaneously unload the substrates from the carrier and a process
in which the processing circuitry of the control device drives only
the second substrate-transport sub-device such that only the second
substrate-transport sub-device unloads the substrates from the
carrier.
Inventors: |
AYABE; Go; (Koshi City,
JP) ; TAKUMA; Kouji; (Koshi City, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
TOKYO ELECTRON LIMITED |
Minato-ku |
|
JP |
|
|
Assignee: |
TOKYO ELECTRON LIMITED
Minato-ku
JP
|
Family ID: |
58095826 |
Appl. No.: |
15/252364 |
Filed: |
August 31, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 21/67781 20130101;
H01L 21/67265 20130101 |
International
Class: |
H01L 21/67 20060101
H01L021/67; H01L 21/677 20060101 H01L021/677 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 1, 2015 |
JP |
2015-171747 |
Claims
1. A substrate processing apparatus, comprising: a substrate
processing device configured to process substrates unloaded from a
carrier; a substrate accommodation-status detection device
configured to detect a status of the substrates accommodated in the
carrier; a substrate-transport device comprising a first
substrate-transport sub-device configured to unload the substrates
from the carrier and a second substrate-transport sub-device
configured to unload the substrates from the carrier; a control
device comprising processing circuitry configured to control the
first substrate-transport sub-device and the second
substrate-transport sub-device based on a detection result of the
substrate accommodation-status detection device, wherein the
processing circuitry of the control device is configured to
determine a selection, based on the detection result of the
substrate accommodation-status detection device, between a process
in which the processing circuitry of the control device
simultaneously drives the first and second substrate-transport
sub-devices such that the first and second substrate-transport
sub-devices simultaneously unload the substrates from the carrier
and a process in which the processing circuitry of the control
device drives only the second substrate-transport sub-device such
that only the second substrate-transport sub-device unloads the
substrates from the carrier.
2. A substrate processing apparatus according to claim 1, wherein
the processing circuitry of the control device is configured to
determine, based on the detection result of the substrate
accommodation-status detection device, whether only the second
substrate-transport sub-device is capable of unloading the
substrates from the carrier by driving only the second
substrate-transport sub-device when the processing circuitry of the
control device determines that the first and second
substrate-transport sub-devices are not capable of simultaneously
unloading the substrates from the carrier by simultaneously driving
the first and second substrate-transport sub-devices, and drive
only the second substrate-transport sub-device such that only the
second substrate-transport sub-device unloads the substrates from
the carrier when the processing circuitry of the control device
determines that only the second substrate-transport sub-device is
capable of unloading the substrates from the carrier by driving
only the second substrate-transport sub-device.
3. A substrate processing apparatus according to claim 1, wherein
the second substrate-transport sub-device is configured to unload
one substrate at a time.
4. A substrate processing apparatus according to claim 1, wherein
the first substrate-transport sub-device is configured to unload a
plurality of substrates simultaneously.
5. A substrate processing apparatus according to claim 1, wherein
the processing circuitry of the control device is configured to
drive only the second substrate-transport sub-device such that only
the second substrate-transport sub-device loads the substrates
processed by the substrate processing device into the carrier when
only the second substrate-transport sub-device unloads the
substrates from the carrier by driving only the second
substrate-transport sub-device.
6. A substrate processing apparatus according to claim 1, wherein
the processing circuitry of the control device is configured to
determine the selection for each set of substrates divided to have
a maximum number of substrates transportable simultaneously by the
first and second substrate-transport sub-devices.
7. A substrate processing apparatus according to claim 1, wherein
the first and second substrate-transport sub-devices comprise a
plurality of folks each configured to hold one substrate, and the
processing circuitry of the control device is configured to
determine that the substrates are not capable of being unloaded by
the first and second substrate-transport sub-devices when the
substrates accommodated in the carrier do not have a space between
the substrates such that a folk is capable of being inserted into
the space.
8. A substrate processing apparatus according to claim 2, wherein
the second substrate-transport sub-device is configured to unload
one substrate at a time.
9. A substrate processing apparatus according to claim 2, wherein
the first substrate-transport sub-device is configured to unload a
plurality of substrates simultaneously.
10. A substrate processing apparatus according to claim 2, wherein
the processing circuitry of the control device is configured to
drive only the second substrate-transport sub-device such that only
the second substrate-transport sub-device loads the substrates
processed by the substrate processing device into the carrier when
only the second substrate-transport sub-device unloads the
substrates from the carrier by driving only the second
substrate-transport sub-device.
11. A substrate processing apparatus according to claim 2, wherein
the processing circuitry of the control device is configured to
determine the selection for each set of substrates divided to have
a maximum number of substrates transportable simultaneously by the
first and second substrate-transport sub-devices.
12. A substrate processing apparatus according to claim 2, wherein
the first and second substrate-transport sub-devices comprise a
plurality of folks each configured to hold one substrate, and the
processing circuitry of the control device is configured to
determine that the substrates are not capable of being unloaded by
the first and second substrate-transport sub-devices when the
substrates accommodated in the carrier do not have a space between
the substrates such that a folk is capable of being inserted into
the space.
13. A method for transporting substrates in a substrate processing
apparatus, comprising: detecting a status of substrates
accommodated in a carrier inside a substrate processing apparatus
by a substrate accommodation-status detection device in the
substrate processing apparatus; and determining, by a control
device comprising processing circuitry based on a detection result
of the substrate accommodation-status detection device, a selection
between a process in which the processing circuitry of the control
device simultaneously drives the first and second
substrate-transport sub-devices such that the first and second
substrate-transport sub-devices simultaneously unload the
substrates from the carrier and a process in which the processing
circuitry of the control device drives only the second
substrate-transport sub-device such that only the second
substrate-transport sub-device unloads the substrates from the
carrier, wherein the substrate processing apparatus comprises a
substrate-transport device comprising the first substrate-transport
sub-device configured to unload the substrates from the carrier and
the second substrate-transport sub-device configured to unload the
substrates from the carrier, and the substrate processing apparatus
includes a substrate processing device configured to process the
substrates unloaded from the carrier.
14. A method for transporting substrates substrate according to
claim 13, further comprising: driving only the second
substrate-transport sub-device such that only the second
substrate-transport sub-device unloads the substrates from the
carrier when the processing circuitry of the control device
determines that only the second substrate-transport sub-device is
capable of unloading the substrates from the carrier by driving
only the second substrate-transport sub-device, wherein the
determining comprises determining, by the processing circuitry of
the control device based on the detection result of the substrate
accommodation-status detection device, whether only the second
substrate-transport sub-device is capable of unloading the
substrates from the carrier by driving only the second
substrate-transport sub-device when the processing circuitry of the
control device determines that the first and second
substrate-transport sub-devices are not capable of simultaneously
unloading the substrates from the carrier by simultaneously driving
the first and second substrate-transport sub-devices.
15. A method for transporting substrates substrate according to
claim 13, wherein the second substrate-transport sub-device is
configured to unload one substrate at a time.
16. A method for transporting substrates substrate according to
claim 13, wherein the first substrate-transport sub-device is
configured to unload a plurality of substrates simultaneously.
17. A method for transporting substrates substrate according to
claim 13, further comprising: driving, by the processing circuitry
of the control device, only the second substrate-transport
sub-device such that only the second substrate-transport sub-device
loads the substrates processed by the substrate processing device
into the carrier when only the second substrate-transport
sub-device unloads the substrates from the carrier by driving only
the second substrate-transport sub-device.
18. A method for transporting substrates substrate according to
claim 13, wherein the determining comprises determining, by the
processing circuitry of the control device, the selection for each
set of substrates divided to have a maximum number of substrates
transportable simultaneously by the first and second
substrate-transport sub-devices.
19. A method for transporting substrates substrate according to
claim 13, wherein the first and second substrate-transport
sub-devices comprise a plurality of folks each configured to hold
one substrate, and the determining comprises determining, by the
processing circuitry of the control device, that the substrates are
not capable of being unloaded by the first and second
substrate-transport sub-devices when the substrates accommodated in
the carrier do not have a space between the substrates such that a
folk is capable of being inserted into the space.
20. A non-transitory computer-readable medium stored thereon a
program that when executed by an information processing apparatus,
causes the information processing apparatus to execute a process
for transporting substrates in the substrate processing apparatus,
comprising: detecting a status of substrates accommodated in a
carrier inside a substrate processing apparatus by a substrate
accommodation-status detection device in the substrate processing
apparatus; and determining, by a control device comprising
processing circuitry based on a detection result of the substrate
accommodation-status detection device, a selection between a
process in which the processing circuitry of the control device
simultaneously drives the first and second substrate-transport
sub-devices such that the first and second substrate-transport
sub-devices simultaneously unload the substrates from the carrier
and a process in which the processing circuitry of the control
device drives only the second substrate-transport sub-device such
that only the second substrate-transport sub-device unloads the
substrates from the carrier, wherein the substrate processing
apparatus comprises a substrate-transport device comprising the
first substrate-transport sub-device configured to unload the
substrates from the carrier and the second substrate-transport
sub-device configured to unload the substrates from the carrier,
and the substrate processing apparatus includes a substrate
processing device configured to process the substrates unloaded
from the carrier.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is based upon and claims the benefit
of priority to Japanese Patent Application No. 2015-171747, filed
Sep. 1, 2015, the entire contents of which are incorporated herein
by reference.
BACKGROUND OF THE INVENTION
[0002] Field of the Invention
[0003] The present invention relates to a substrate processing
apparatus capable of transporting substrates from/to a carrier that
accommodates multiple substrates, to a method for transporting
substrates, and to a computer readable recording medium with a
stored substrate transport program.
[0004] Description of Background Art
[0005] To manufacture semiconductor components, flat panel displays
or the like, substrate processing apparatuses are used so that
various processes such as cleaning and etching are carried out on
substrates, for example, semiconductor wafers, liquid-crystal
substrates and the like (for example, JP2014-175608A). The entire
contents of this publication are incorporated herein by
reference.
SUMMARY OF THE INVENTION
[0006] According to one aspect of the present invention, a
substrate processing apparatus includes a substrate processing
device which processes substrates unloaded from a carrier, a
substrate accommodation-status detection device which detects a
status of the substrates accommodated in the carrier, a
substrate-transport device including a first substrate-transport
sub-device which unloads the substrates from the carrier and a
second substrate-transport sub-device which unloads the substrates
from the carrier, a control device including processing circuitry
which controls the first substrate-transport sub-device and the
second substrate-transport sub-device based on a detection result
of the substrate accommodation-status detection device. The
processing circuitry of the control device determines a selection,
based on the detection result of the substrate accommodation-status
detection device, between a process in which the processing
circuitry of the control device simultaneously drives the first and
second substrate-transport sub-devices such that the first and
second substrate-transport sub-devices simultaneously unload the
substrates from the carrier and a process in which the processing
circuitry of the control device drives only the second
substrate-transport sub-device such that only the second
substrate-transport sub-device unloads the substrates from the
carrier.
[0007] According to another aspect of the present invention, a
method for transporting substrates in a substrate processing
apparatus includes detecting a status of substrates accommodated in
a carrier inside a substrate processing apparatus by a substrate
accommodation-status detection device in the substrate processing
apparatus, and determining, by a control device including
processing circuitry based on a detection result of the substrate
accommodation-status detection device, a selection between a
process in which the processing circuitry of the control device
simultaneously drives the first and second substrate-transport
sub-devices such that the first and second substrate-transport
sub-devices simultaneously unload the substrates from the carrier
and a process in which the processing circuitry of the control
device drives only the second substrate-transport sub-device such
that only the second substrate-transport sub-device unloads the
substrates from the carrier. The substrate processing apparatus
includes a substrate-transport device including the first
substrate-transport sub-device which unloads the substrates from
the carrier and the second substrate-transport sub-device which
unloads the substrates from the carrier, and the substrate
processing apparatus includes a substrate processing device which
processes the substrates unloaded from the carrier.
[0008] According to yet another aspect of the present invention, a
non-transitory computer-readable medium stored thereon a program
that when executed by an information processing apparatus, causes
the information processing apparatus to execute a process for
transporting substrates in the substrate processing apparatus. The
process includes detecting a status of substrates accommodated in a
carrier inside a substrate processing apparatus by a substrate
accommodation-status detection device in the substrate processing
apparatus, and determining, by a control device including
processing circuitry based on a detection result of the substrate
accommodation-status detection device, a selection between a
process in which the processing circuitry of the control device
simultaneously drives the first and second substrate-transport
sub-devices such that the first and second substrate-transport
sub-devices simultaneously unload the substrates from the carrier
and a process in which the processing circuitry of the control
device drives only the second substrate-transport sub-device such
that only the second substrate-transport sub-device unloads the
substrates from the carrier. The substrate processing apparatus
includes a substrate-transport device including the first
substrate-transport sub-device which unloads the substrates from
the carrier and the second substrate-transport sub-device which
unloads the substrates from the carrier, and the substrate
processing apparatus includes a substrate processing device which
processes the substrates unloaded from the carrier.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] A more complete appreciation of the invention and many of
the attendant advantages thereof will be readily obtained as the
same becomes better understood by reference to the following
detailed description when considered in connection with the
accompanying drawings, wherein:
[0010] FIG. 1 is a plan view showing a substrate processing
apparatus;
[0011] FIG. 2A is a cross-sectional plan view showing a substrate
accommodation detection device;
[0012] FIG. 2B is a cross-sectional side view showing the substrate
accommodation detection device;
[0013] FIG. 3 is a cross-sectional side view showing first and
second substrate-transport devices;
[0014] FIG. 4 is a flowchart showing a substrate transport program
(when unloading substrates); and
[0015] FIG. 5 is a flowchart showing the substrate transport
program (when loading substrates).
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0016] The embodiments will now be described with reference to the
accompanying drawings, wherein like reference numerals designate
corresponding or identical elements throughout the various
drawings.
[0017] FIG. 1 is a view schematically showing the structure of a
substrate processing system according to the present embodiment. In
the following, X, Y and Z axes intersecting each other at right
angles are specified to clarify positional relationships, and a
positive direction of the Z axis is set as the vertically upward
direction.
[0018] As shown in FIG. 1, substrate processing system 1 is
provided with loading station 2 and processing station 3. Loading
station 2 and processing station 3 are positioned to be adjacent to
each other.
[0019] Loading station 2 includes carrier mounting zone 11 and
transport zone 12. Multiple carriers (C), which horizontally
accommodate multiple substrates, namely, semiconductor wafers
(hereinafter referred to as wafers (W)) in the present embodiment,
are mounted in carrier mounting zone 11.
[0020] Transport zone 12 is positioned adjacent to carrier mounting
zone 11, and is provided with substrate-transport device 13 and
delivery table 14. Substrate-transport device 13 has a substrate
holding mechanism for holding wafers (W). Substrate-transport
device 13 is capable of moving horizontally and vertically as well
as rotating around the vertical axis, and transports wafers (W)
between a carrier (C) and delivery table 14 using the substrate
holding mechanism.
[0021] Processing station 3 is positioned adjacent to transport
zone 12. Processing station 3 includes transport zone 15 and
multiple processing units 16. Multiple processing units 16 are
aligned on each side of transport zone 15.
[0022] Substrate-transport device 17 is provided in transport zone
15. Substrate-transport device 17 includes a wafer holding
mechanism for holding wafers (W). In addition, substrate-transport
device 17 is capable of moving horizontally and vertically as well
as rotating around the vertical axis, and transports wafers (W)
between delivery table 14 and processing unit 16 using the wafer
holding mechanism.
[0023] Processing unit 16 conducts predetermined processes on
wafers (W) transported by substrate-transport device 17.
[0024] Substrate processing system 1 is provided with control
device 4. Control device 4 is a computer, for example, and includes
control unit 18 and memory unit 19. Memory unit 19 stores a program
for controlling various processes executed in substrate processing
system 1. Control unit 18 controls operations to be performed in
substrate processing system 1 by reading out and executing the
program stored in memory unit 19.
[0025] Such a program may be stored in a computer-readable
recording medium and installed from the recording medium onto
memory unit 19 of control device 4. Examples of a computer-readable
recording medium are hard disks (HD), flexible disks (FD), compact
discs (CD), magneto-optical discs (MO), memory cards and the
like.
[0026] In substrate processing system 1 structured as above, first,
substrate-transport device 13 of loading station 2 unloads a wafer
(W) from carrier (C) in carrier mounting zone 11 and mounts the
unloaded wafer (W) on delivery table 14. The wafer (W) mounted on
delivery table 14 is unloaded from delivery table 14 by
substrate-transport device 17 of processing station 3 to be loaded
into processing unit 16.
[0027] The wafer (W) loaded into processing unit 16 is processed in
processing unit 16 and is unloaded from processing unit 16 by
substrate-transport device 17 to be mounted on delivery table 14.
Then, the processed wafer (W) mounted on delivery table 14 is
returned by substrate-transport device 13 to carrier (C) in carrier
mounting zone 11.
[0028] In carrier (C), thin substrate holding members 21 are formed
in main body 20, which is a hollow box with an open back. Substrate
holding members 21 are formed at vertically equal intervals on
three interior parts--the left, right and rear sides--of main body
20. Accordingly, by supporting the edge of each wafer (W) from
below with three substrate holding members 21 aligned vertically,
carrier (C) is capable of horizontally accommodating multiple
wafers (W) with space allotted at vertical intervals.
[0029] In loading station 2, substrate accommodation-status
detection device 22 is provided to detect the status of wafers (W)
accommodated in carrier (C). As shown in FIG. 2A, arm 24 with light
emitter 23 and arm 26 with light receiver 25 are horizontally
coupled by connector 27, to which lifting mechanism 28 is attached.
Substrate accommodation-status detection device 22 raises/lowers
light emitter 23 and light receiver 25 by using lifting mechanism
28 so as to detect the status (for example, vertical positions of
wafers (W), thickness of each wafer (W), distance between
vertically aligned wafers (W), and the like) of wafers (W)
accommodated in carrier (C).
[0030] In substrate-transport device 13, first and second
substrate-transport devices (29, 30) are provided to transport
(load/unload) wafers (W) between carrier (C) and delivery table 14.
First and second transport devices (29, 30) are vertically aligned
on top of base 31. Via support member 33, base 31 is attached to
the upper portion of shuttle member 32 capable of traveling in
directions Y in transport zone 12. Lifting mechanism 34 to
raise/lower base 31 (first and second transport devices (29, 30))
and rotation mechanism 35 to rotate base 31 are connected to
support member 33.
[0031] First substrate-transport device 29 has four forks 36 for
holding wafers (W). In first substrate-transport device 29, four
forks 36 are attached to support member 37 in a horizontal position
to have vertically allotted equal intervals, and support member 37
is equipped with first retractable mechanism 38.
[0032] Second substrate-transport device 30 has only one fork 39
for holding a wafer (W). In second substrate-transport device 30,
fork 39 is attached to support member 40 in a horizontal position,
and support member 40 is equipped with second retractable mechanism
41.
[0033] Forks (36, 39) are vertically aligned with each other at
equal intervals in first and second substrate-transport devices
(29, 30) respectively. By so setting, when first and second
substrate-transport devices (29, 30) are simultaneously driven,
maximum five wafers (W) are transported simultaneously from/to
carrier (C). More specifically, when first and second retractable
mechanisms (38, 41) are simultaneously driven, four upper forks 36
and one lower fork 39 advance simultaneously into carrier (C) and
hold wafers (W) when lifting mechanism 34 is driven. Then, first
and second retractable mechanisms (38, 41) are simultaneously
driven to retrieve forks (36, 39) from inside carrier (C).
Accordingly, five wafers (W) are unloaded simultaneously from
carrier (C). Under normal operations, five wafers (W) are
simultaneously transported so that the throughput is enhanced.
However, it is an option to drive only second substrate-transport
device 30 if one wafer (W) is desired to be transported for
evaluation purposes or the like. Here, by reversing the above
unloading procedures, wafers (W) are loaded back into carrier (C).
After being processed in processing unit 16, wafers (W) will be
returned to their original slots in the carrier (C) from which they
are unloaded.
[0034] In substrate processing system 1, wafers (W) are transported
between carrier (C) and delivery table 14 in transport zone 12
according to the substrate transport program stored in memory unit
19 as shown in FIG. 4.
[0035] First, in substrate processing system 1, the status of
wafers (W) accommodated in carrier (C) is detected by substrate
accommodation-status detection device 22 (substrate
accommodation-status detection process (S1)).
[0036] In substrate accommodation-status detection process (S1),
control unit 18 drives lifting mechanism 28 to move light emitter
23 and light receiver 25 from the upper end to the lower end of a
carrier (C) while emitting light from light emitter 23 and
receiving the light at light receiver 25 so that the accommodation
status of wafers (W) is detected. Here, vertical positions of
wafers (W) accommodated in the carrier (C), thickness of each wafer
(W), and distance between vertically adjacent wafers (W) are
measured by substrate accommodation-status detection device 22, and
the obtained data are stored in memory unit 19.
[0037] Next, substrate processing system 1 determines whether
unloading of wafers (W) from carrier (C) is executable by
simultaneously using first and second substrate-transport devices
(29, 30) (first determination process (S2)).
[0038] In first determination process (S2), based on the substrate
accommodation-status data stored in memory unit 19, control unit 18
determines whether all the forks (36, 39) of first and second
substrate-transport devices (29, 30) can be inserted among wafers
(W) vertically aligned to be accommodated in carrier (C). Namely,
when all the forks (36, 39) of first and second substrate-transport
devices (29, 30) are inserted among wafers (W) vertically aligned
to be accommodated in carrier (C), if the lower surface of any of
forks (36, 39) and the upper surface of a wafer (W) are at risk of
touching each other due to narrow space, that is, unless there is
enough space to insert any of forks (36, 39) between the lower
surface of an upper fork 39 and the upper surface of a wafer (W)
without causing them to touch each other, control unit 18
determines that unloading of wafers (W) from carrier (C) is not
executable by simultaneously using first and second transport
devices (29, 30).
[0039] In first determination process (S2), when unloading of
wafers (W) from carrier (C) is determined to be executable by
simultaneously using first and second transport devices (29, 30),
five wafers (W) are simultaneously unloaded from carrier (C) by
using first and second transport devices (29, 30), and are
transported to delivery table 14 (first unloading process
(S3)).
[0040] On the other hand, when unloading of wafers (W) from carrier
(C) is determined not to be executable by simultaneously using
first and second substrate-transport devices (29, 30) in first
determination process (S2), control unit 18 further determines
whether five wafers (W) that cannot be unloaded by simultaneously
using first and second transport devices (29, 30) can be unloaded
from carrier (C) by using only second substrate-transport device 30
(second determination process (S4)).
[0041] In second determination process (S4), based on substrate
accommodation-status data stored in memory unit 19, control unit 18
determines whether fork 39 of second substrate-transport device 30
can be inserted between wafers (W) vertically aligned to be
accommodated in carrier (C). Namely, when fork 39 of second
substrate-transport device 30 is inserted between wafers (W)
vertically aligned to be accommodated in carrier (C), if the lower
surface of fork 39 and the upper surface of a wafer (W) are at risk
of touching each other due to narrow space, control unit 18
determines that unloading of a wafer (W) from carrier (C) is not
executable by using second substrate-transport device 30.
[0042] In second determination process (S4), when unloading of a
wafer (W) from carrier (C) is determined to be executable by using
second transport device 30, five wafers (W) are unloaded from
carrier (C) one at a time by using second transport device 30 and
transported to delivery table 14 (second unloading process
(S5)).
[0043] Meanwhile, when control unit 18 determines in second
determination process (S4) that unloading of wafers (W) from
carrier (C) is not executable by using second substrate-transport
device 30, control unit 18 alerts the operator by sound, light or
the like (notification process (S6)).
[0044] In notification process (S6), the unloading process of
wafers (W) is suspended until the suspension is released by the
operator.
[0045] In substrate processing system 1, above-described procedures
from first determination process (S2) through notification process
(S6) are conducted on all the wafers (W) accommodated in carrier
(C). During that time, all the wafers (W) accommodated in carrier
(C) are divided into a maximum number (five wafers, in the present
embodiment) of wafers (W) transportable by both first and second
substrate-transport devices (29, 30). Then, procedures from first
determination process (S2) through notification process (S6) are
conducted section by section. When wafers (W) in all the s have
been unloaded, the processing process is determined to be completed
(completion determination process (S7)).
[0046] As described so far, in substrate processing system 1,
wafers (W) are unloaded from carrier (C) to delivery table 14.
Meanwhile, at the time of loading (W) from delivery table 14 back
to carrier (C), substrate processing system 1 is capable of
simultaneously transporting five wafers (W) by using first and
second substrate-transport devices (29, 30) simultaneously so that
transport time is shortened to enhance throughput. However, if
substrate holding members 21 are disfigured or the like due to
external force exerted on carrier (C), wafers (W) vertically
aligned in carrier (C) are not aligned at equal intervals. Under
such conditions, forks (36, 39) positioned at equal intervals may
touch wafers (W) during the process of unloading wafers (W). When
distances are so small as to cause forks to touch wafers, first and
second transport devices (29, 30) are unable to unload five wafers
(W) simultaneously. Moreover, forks (36, 39) may also touch wafers
(W) during the loading process, making it impossible to load wafers
(W) into carrier (C). Accordingly, there is no way to
simultaneously load five wafers (W) by using first and second
transport devices (29, 30) simultaneously. Therefore, when wafers
(W) are unloaded from a carrier (C) by driving only second
substrate-transport device 30 (when second unloading process (S5)
is executed), wafers (W) are loaded back into the original slots in
the carrier (C) by driving only second substrate-transport device
30. By so doing, wafers (W) are securely loaded into carrier
(C).
[0047] More specifically, as shown in FIG. 5, memory unit 19 of
substrate processing system 1 stores information about whether
wafers (W) have been unloaded from carrier (C) by simultaneously
using first and second substrate-transport devices (29, 30) or by
using only second substrate-transport device 30. Then, at the time
of loading wafers (W) from delivery table 14 to carrier (C), the
unloading information is retrieved from memory unit 19 to determine
whether or not the five wafers (W) have been unloaded from carrier
(C) by simultaneously using first and second substrate-transport
devices (29, 30) (third determination process (S8)).
[0048] When five wafers (W) have been unloaded from carrier (C) by
simultaneously using first and second substrate-transport devices
(29, 30), the five wafers (W) are simultaneously loaded from
delivery table 14 to carrier (C) by simultaneously using first and
second substrate-transport devices (29, 30) (first loading process
(S9)). By contrast, when first and second substrate-transport
devices (29, 30) are not used simultaneously to unload five wafers
(W) at the same time (when wafers (W) were unloaded one at a time
by using only second substrate-transport device 30), a total of
five wafers (W) are loaded from delivery table 14 to carrier (C) by
using second substrate-transport device 30 (second loading process
(S10)).
[0049] The above-described third determination process (S8) to
second loading process (S10) is conducted on each section of
carrier (C), and when wafers (W) in all the sections are loaded
back, the process is determined to be completed (completion
determination process (S11)).
[0050] In the aforementioned substrate processing system 1,
depending on the detected status of wafers (W) accommodated in
carrier (C), a process is selected for simultaneously driving first
and second substrate-transport devices (29, 30) so that wafers (W)
are unloaded from carrier (C) by simultaneously using first and
second transport devices (29, 30), or a process is selected for
driving only second substrate-transport device 30 so that wafers
(W) are unloaded from carrier (C) by using only second
substrate-transport device 30. When unloading of wafers (W) from
carrier (C) is determined not to be executable by simultaneously
driving first and second substrate-transport devices (29, 30), it
is further determined whether unloading of wafers (W) from carrier
(C) is executable by driving only second substrate-transport device
30. When unloading of wafers (W) from carrier (C) is determined to
be executable by using only second substrate-transport device 30,
only second substrate-transport device 30 is driven so as to unload
wafers (W) from carrier (C). Accordingly, even under conditions
where wafers (W) are conventionally unable to be unloaded from
carrier (C), wafers (W) are continuously transported, thus
enhancing the throughput of substrate processing system 1. Here,
the respective numbers of wafers (W) transportable by first and
second substrate-transport devices (29, 30) may be set the same. In
addition, if there is no need to transport only one wafer (W), the
number of wafers (W) transportable by second substrate-transport
device 30 may be more than one. However, it is preferred to set a
smaller number of wafers (W) to be transportable by second
substrate-transport device 30 than that for first
substrate-transport device 29, because unloading of wafers (W) is
more likely to be executable in second determination process (S4).
The number of transportable wafers (W) is more preferred to be one
for substrate-transport device 30, because chances of wafers (W)
being transported are even higher.
[0051] A substrate processing apparatus may be provided with a
substrate accommodation-status detection device for detecting the
status of substrates accommodated in a carrier (for example,
distances between vertically aligned substrates). In addition, the
substrate processing apparatus may be provided with a
substrate-transport device capable of simultaneously transporting
multiple substrates (five substrates, for example) from/to a
carrier.
[0052] Before and after processing, multiple substrates (25
substrates, for example) are loaded or unloaded all at once while
being accommodated in a carrier in the substrate processing
apparatus. A carrier is structured to have holding members
vertically aligned so as to horizontally hold each substrate
separately so that multiple substrates are horizontally
accommodated with spaces allotted in a vertical direction.
[0053] At the time of unloading substrates from a carrier in the
substrate processing apparatus, the status of the substrates
accommodated in a carrier is detected by using a substrate
accommodation-status detection device. Then, based on the detected
results, it is determined whether unloading multiple substrates
simultaneously from a carrier is executable by using a
substrate-transport device. When simultaneous unloading is
determined to be executable, forks formed in the
substrate-transport device for holding substrates are inserted
among substrates accommodated in the carrier so that multiple
substrates are simultaneously unloaded from the carrier by being
held on their respective forks. On the other hand, if simultaneous
unloading of multiple substrates from a carrier is determined not
to be executable, the operator is alerted and the operation is
suspended until the operator completes resetting procedures.
[0054] In such a substrate processing apparatus, when simultaneous
unloading of multiple substrates is determined not to be executable
based on the status of the substrates accommodated in a carrier,
and thus the following process is temporarily suspended until the
operator completes resetting procedures, the throughput of the
substrate processing apparatus may be lowered.
[0055] A substrate processing apparatus according to an embodiment
of the present invention has a substrate accommodation-status
detection device to detect the status of substrates accommodated in
a carrier; a first substrate-transport device and a second
substrate-transport device to transport the substrates from/to the
carrier; and a control device which controls the first
substrate-transport device and second substrate-transport device
based on the detection result obtained by the substrate
accommodation-status detection device. Based on the detection
result obtained by the substrate accommodation-status detection
device, the control device selects a process in which the
substrates are unloaded from the carrier by simultaneously driving
the first and second substrate-transport devices, or a process in
which the substrates are unloaded from the carrier by driving only
the second substrate-transport device.
[0056] Based on the detection result obtained by the substrate
accommodation-status detection device, when the control device
determines that unloading of the substrates from the carrier is not
executable by simultaneously driving the first substrate-transport
device and second substrate-transport device, the control device
further determines whether unloading of the substrates from the
carrier is executable by driving only the second
substrate-transport device. When such an unloading option is
determined to be executable, only the second substrate-transport
device is driven to unload the substrates from the carrier.
[0057] The second substrate-transport device is structured to
transport one substrate.
[0058] The first substrate-transport device is structured to
transport multiple substrates simultaneously.
[0059] If substrates are unloaded from the carrier by driving only
the second substrate-transport device at the time of unloading,
then only the second substrate-transport device is driven by the
control device when loading the substrates back into the
carrier.
[0060] The control device determines which unloading process to be
taken for each set of substrates divided to have a maximum number
of substrates transportable simultaneously by the first and second
substrate-transport devices.
[0061] The control device determines whether or not the unloading
operation is executable by detecting if there are enough spaces
maintained between substrates accommodated in the carrier so as to
allow insertion of forks equipped in the first substrate-transport
device and second substrate-transport device for holding
substrates.
[0062] In a substrate transport method according to another
embodiment of the present invention, substrates are transported by
first and second substrate-transport devices from/to a carrier
based on the status of the substrates accommodated in the carrier.
In such a method, depending on the detection result obtained by the
substrate accommodation-status detection device, a process is
selected for unloading substrates from the carrier either by
simultaneously driving the first substrate-transport device and
second substrate-transport device or by driving only the second
transport device.
[0063] Based on the accommodation-status of the substrates, if
unloading of substrates from the carrier is not executable by
simultaneously driving the first substrate-transport device and
second substrate-transport device, then it is further determined
whether unloading of the substrates from the carrier is executable
by driving only the second substrate-transport device. When such an
option is determined to be executable, the substrates are unloaded
from the carrier by driving only the second substrate-transport
device.
[0064] According to yet another embodiment of the present
invention, a non-transitory computer-readable medium stored thereon
a program that when executed by an information processing
apparatus, causes the information processing apparatus to execute a
process for transporting substrates in the substrate processing
apparatus. The process includes detecting a status of substrates
accommodated in a carrier inside a substrate processing apparatus
by a substrate accommodation-status detection device in the
substrate processing apparatus, and determining, by a control
device including processing circuitry based on a detection result
of the substrate accommodation-status detection device, a selection
between a process in which the processing circuitry of the control
device simultaneously drives the first and second
substrate-transport sub-devices such that the first and second
substrate-transport sub-devices simultaneously unload the
substrates from the carrier and a process in which the processing
circuitry of the control device drives only the second
substrate-transport sub-device such that only the second
substrate-transport sub-device unloads the substrates from the
carrier. The substrate processing apparatus includes a
substrate-transport device including the first substrate-transport
sub-device which unloads the substrates from the carrier and the
second substrate-transport sub-device which unloads the substrates
from the carrier, and the substrate processing apparatus includes a
substrate processing device which processes the substrates unloaded
from the carrier.
[0065] According to an embodiment of the present invention, the
throughput of the substrate processing apparatus is enhanced.
[0066] Obviously, numerous modifications and variations of the
present invention are possible in light of the above teachings. It
is therefore to be understood that within the scope of the appended
claims, the invention may be practiced otherwise than as
specifically described herein.
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