U.S. patent application number 15/252330 was filed with the patent office on 2016-12-22 for liquid crystal display including wire grid polarizer and manufacturing method thereof.
The applicant listed for this patent is SAMSUNG DISPLAY CO., LTD.. Invention is credited to Dae Hwan Jang, Gug Rae Jo, Kyu Young Kim, Hyang-Shik Kong, ATSUSHI TAKAKUWA.
Application Number | 20160370651 15/252330 |
Document ID | / |
Family ID | 48280325 |
Filed Date | 2016-12-22 |
United States Patent
Application |
20160370651 |
Kind Code |
A1 |
TAKAKUWA; ATSUSHI ; et
al. |
December 22, 2016 |
LIQUID CRYSTAL DISPLAY INCLUDING WIRE GRID POLARIZER AND
MANUFACTURING METHOD THEREOF
Abstract
A liquid crystal display includes a first substrate. A plurality
of fine metal lines is disposed on the first substrate. The
plurality of fine metal lines including a plurality of small
regions. A second substrate is aligned with the first substrate. A
light blocking portion is disposed on the second substrate. The
light blocking portion is disposed in a region between the small
regions of the plurality of small regions of the plurality of tine
metal lines.
Inventors: |
TAKAKUWA; ATSUSHI;
(Hwaseong-si, KR) ; Jang; Dae Hwan;
(Gwangmyeong-si, KR) ; Kong; Hyang-Shik;
(Seongnam-si, KR) ; Jo; Gug Rae; (Asan-si, KR)
; Kim; Kyu Young; (Suwon-si, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SAMSUNG DISPLAY CO., LTD. |
Yongin-si |
|
KR |
|
|
Family ID: |
48280325 |
Appl. No.: |
15/252330 |
Filed: |
August 31, 2016 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13470929 |
May 14, 2012 |
9442236 |
|
|
15252330 |
|
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
G02F 2001/133548
20130101; G02F 2001/133538 20130101; G02F 1/133512 20130101; G02B
5/3058 20130101; G02F 1/133528 20130101; G02F 1/133536 20130101;
H04N 13/337 20180501 |
International
Class: |
G02F 1/1335 20060101
G02F001/1335 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 14, 2011 |
KR |
10-2011-0118304 |
Claims
1. A method for manufacturing a liquid crystal display, the method
comprising: stacking a metal layer on a first substrate; stacking a
photosensitive film layer on the metal layer; forming a
photosensitive film pattern on the photosensitive film layer by a
nano-imprint method using a mold; repeating the forming of the
photosensitive film pattern multiple times while moving the mold
between each repetition; forming a plurality of fine metal patterns
including a plurality of small regions that correspond to the mold
by etching the metal layer using the photosensitive film pattern;
forming a light blocking portion on a second substrate; and
disposing the light blocking portion on boundary portions of the
plurality of small regions by aligning the first substrate and the
second substrate.
2. The method of claim 1, wherein; in the plurality of small
regions, each of the plurality of fine metal lines are disposed to
have predetermined width and width in a predetermined
direction.
3. The method of claim 2, wherein: a plurality of pixel areas is
disposed on the second substrate and the plurality of small regions
is disposed in the plurality of pixel areas.
4. The method of claim 3, wherein: the plurality of pixel areas
include first pixel areas and second pixel areas, in the first
pixel areas, each the plurality of fine metal lines is formed to
uniformly extend in a first direction, and in the second pixel
areas, each of the plurality of fine metal lines is formed to
uniformly extend in a second direction different from the first
direction.
5. The manufacturing method of a liquid crystal display of claim 4,
wherein: the second direction is perpendicular to the first
direction.
6. A method for manufacturing a liquid crystal display, comprising:
stacking an etch control layer on a first substrate; stacking a
first photosensitive film layer on the etch control layer; forming
a first photosensitive film pattern on the first photosensitive
film layer by a nano-imprint method using a first mold; repeating
the forming of the first photosensitive film pattern multiple times
while moving the first mold between repetitions; forming a
plurality of etch control patterns by etching the etch control
layer using the first photosensitive film pattern; stacking a first
metal layer on the etch control patterns; forming a large area
second mold including a plurality of first small regions
corresponding to the first mold by separating the metal layer from
the etch control patterns; stacking a second metal layer on a
second substrate; stacking a second photosensitive film layer on
the second metal layer; forming a second photosensitive film
pattern on the second photosensitive film layer by a nano-imprint
method using the second mold; forming a plurality of fine metal
patterns including a plurality of second small regions of the
second mold by etching the second metal layer using the second
photosensitive film pattern; forming a light blocking portion on a
third substrate; and disposing the light blocking portion at
boundary portions of the plurality of second small regions by
aligning the second substrate and the third substrate.
7. The m method of claim 6, wherein: in the plurality of second
small regions, each of the plurality of fine metal lines are
disposed to have predetermined width and interval in a
predetermined direction.
8. A method of manufacturing a liquid crystal display, comprising:
stacking an etch control layer on a first substrate; stacking a
first photosensitive film layer on the etch control layer; forming
a first photosensitive film pattern on the first photosensitive
film layer by a nano-imprint method using a first mold; repeating
the forming of the first photosensitive film pattern multiple times
while moving the first mold between repetitions; forming a
plurality of etch control patterns by etching the etch control
layer using the first photosensitive film pattern; stacking a first
metal layer on the etch control pattern; forming a large area
second mold including a plurality of first small regions
corresponding to the first mold by separating the metal layer from
the etch control patterns; stacking a second photosensitive film
layer on a second substrate; forming a second photosensitive film
pattern on the second photosensitive film layer by as nano-imprint
method using the second mold; forming a plurality of fine metal
patterns having a plurality of second small regions of the second
mold by stacking a metal layer on the second photosensitive film
pattern; forming a light blocking portion on a third substrate; and
disposing the light blocking portion on boundary portions of the
plurality of second small regions by aligning the second substrate
and the third substrate.
9. The method of claim 8, wherein: in the plurality of second small
regions, each of the plurality of fine metal lines are disposed to
have predetermined width and interval in a predetermined direction.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a Division of co-pending U.S. patent
application Ser. No. 13/470,929, filed on May 14, 2012, which
claims priority to and the benefit of Korean Patent Application
10-2011-0118304 filed in the Korean Intellectual Property Office on
Nov. 14, 2011, the entire contents of Which are incorporated herein
by reference.
TECHNICAL FIELD
[0002] The present invention relates to a liquid crystal display,
and more particularly, to a liquid crystal display including a wire
grid polarizer and a manufacturing method thereof.
DISCUSSION THE RELATED ART
[0003] The liquid crystal display (LCD) is one of the most common
types of flat panel displays currently in production. LCDs may
include two panels on which field generating electrodes such as a
pixel electrode and a common electrode are formed. A liquid crystal
layer is interposed between the two panels. The liquid crystal
display generates an electric field on a liquid crystal layer by
applying voltage to the field generating electrodes and determines
the orientation of liquid crystal molecules of the liquid crystal
layer by the generated electric field, thus controlling
polarization of incident light so as to display images.
[0004] In general, polarizing plates are attached onto external
surfaces of the panels on which the field generating electrodes are
formed to control polarization of incident light. Each polarizing
plate may be an absorption type polarizing plate which absorbs
light that does not have the desired polarization. Therefore, only
a small part of a light source supplying light to the liquid
crystal display by the polarizing plate is used for displaying an
image and as a result, light efficiency of the light source of the
liquid crystal display is lowered.
SUMMARY
[0005] Exemplary embodiments of the present invention provide a
liquid crystal display including a large area wire grid polarizer
without increasing a manufacturing cost and deteriorating a
polarization characteristic, and a manufacturing method
thereof.
[0006] An exemplary embodiment of the present invention provides a
liquid crystal display including a first substrate. A plurality of
fine metal lines is disposed on the first substrate and includes a
plurality of small regions. A second substrate is aligned with the
first substrate. A light blocking portion is disposed on the second
substrate, in which the light blocking portion is disposed, in a
region between the plurality of small regions of the plurality of
fine metal lines.
[0007] In the plurality of small regions, the plurality of fine
metal lines may be disposed to have predetermined widths at
predetermined intervals in a predetermined direction.
[0008] The widths of the plurality of fine metal lines may be
approximately 60 nm or less.
[0009] The intervals the plurality of fine metal lines may be
approximately 120 nm or less.
[0010] The entire area of the plurality of fine metal lines may be
200 mm.times.2.00 mm or more
[0011] A plurality of pixel areas may be disposed on the second
substrate and the plurality of small regions may be disposed in the
plurality of pixel areas.
[0012] The plurality of pixel areas may include first pixel areas
and second pixel areas. In the first pixel area, the plurality of
fine metal lines may be uniformly disposed in a first direction. In
the second pixel area, the plurality of fine metal lines may be
uniformly disposed in a second direction that is different from the
first direction.
[0013] The second direction may be perpendicular to the first
direction.
[0014] An exemplary embodiment of the present invention provides a
method for manufacturing a liquid crystal display including
stacking a metal layer on a first substrate. A photosensitive film
layer is stacked on the metal layer. A photosensitive film pattern
is formed on the photosensitive film layer by a nano-imprint method
using a mold. The forming of the photosensitive film pattern may be
repeated plural times while moving the mold. A plurality of fine
metal patterns including a plurality of small regions corresponding
to the molds is formed by etching the metal layer using the
photosensitive film pattern. A light blocking portion is formed on
a second substrate. The light blocking portion is disposed on
boundary portions of the plurality of small regions by aligning the
first substrate and the second substrate.
[0015] An exemplary embodiment of the present invention provides a
method for manufacturing a liquid crystal display including
stacking an etch control layer on a first substrate. A first
photosensitive film layer is stacked on the etch control layer. A
first photosensitive film pattern is formed on the first
photosensitive film layer by a nano-imprint method using a first
mold. The forming of the first photosensitive film pattern is
repeated plural times while moving the first mold. A plurality of
etch control patterns is formed by etching the etch control layer
using the first photosensitive film pattern. A first metal layer is
stacked on the etch control patterns. A large area second mold
including a plurality of first small regions corresponding to the
first molds is formed by separating the metal layer from the etch
control patterns. A second metal layer is stacked on a second
substrate. A second photosensitive film layer is stacked on the
second metal layer. A second photosensitive film pattern is formed
on the second photosensitive film layer by a nano-imprint method
using the second mold. A plurality of fine metal patterns including
a plurality of second small regions of the second mold is formed by
etching the second metal layer using the second photosensitive film
pattern. A light blocking portion is formed on a third substrate.
The light blocking portion is disposed at boundary portions of the
plurality of second small regions by aligning the second substrate
and the third substrate.
[0016] An exemplary embodiment of the present invention provides a
method of manufacturing a liquid crystal display including stacking
an etch control layer on a first substrate. A first photosensitive
film layer is stacked on the etch control layer. A first
photosensitive film pattern is formed on the first photosensitive
film layer by a nano-imprint method using a first mold. The forming
of the first photosensitive film pattern is repeated plural times
while moving the first mold. A plurality of etch control patterns
is formed by etching the etch control layer using the first
photosensitive film pattern. A first metal layer is stacked on the
etch control pattern. A large area second mold including a
plurality of first small regions corresponding to the first molds
is formed by separating the metal layer from the etch control
patterns. A second photosensitive film layer is stacked on a second
substrate. A second photosensitive film pattern is formed on the
second photosensitive film layer by a nano-imprint method using the
second mold. A plurality of fine metal patterns having a plurality
of second small regions of the second mold is formed by stacking a
metal layer on the second photosensitive film pattern. A light
blocking portion is formed on a third substrate. The light blocking
portion is disposed on boundary portions of the plurality of second
small regions by aligning the second substrate and the third
substrate.
[0017] According to exemplary embodiments of the present invention,
a large area wire grid polarizer is formed using a small area mold
in which a signal line or a light blocking member is disposed at
connection portions of the molds or connection portions between the
small area wire grid polarizers. Deterioration in a polarization
characteristic due to an arrangement difference of the connection
portions between the wire grid polarizers may thereby be reduced or
prevented. Accordingly, a liquid crystal display including a large
area wire grid polarizer may be formed without increasing a
manufacturing cost and without deteriorating the polarization
characteristic.
BRIEF DESCRIPTION THE DRAWINGS
[0018] A more complete appreciation of the present disclosure and
many of the attendant aspects thereof will be readily obtained as
the same becomes better understood by reference to the following
detailed description when considered in connection with the
accompanying drawings, wherein:
[0019] FIG. 1 is a layout view of a liquid crystal display
according to an exemplary embodiment of the present invention;
[0020] FIG. 2 is a layout view of a liquid crystal display
according to an exemplary embodiment of the present invention;
[0021] FIG. 3 is a layout view of the liquid crystal display
according to an exemplary embodiment of the present invention;
[0022] FIG. 4 is a cross-sectional view showing a method of
manufacturing the liquid crystal display according to an exemplary
embodiment of the present invention;
[0023] FIGS. 5 and 6 are cross-sectional views showing a method of
manufacturing the liquid crystal display according to an exemplary
embodiment of the present invention; and
[0024] FIG. 7 is a cross-sectional view showing a method of
manufacturing the liquid crystal display according to an exemplary
embodiment of the present invention.
DETAILED DESCRIPTION OF THE EMBODIMENTS
[0025] Exemplary embodiments of the present invention will be
described more fully hereinafter with reference to the accompanying
drawings. As those skilled in the art would realize, the described
exemplary embodiments may be modified in various different ways,
all without departing from the spirit or scope of the present
invention.
[0026] In the drawings, the thickness of layers, films, panels,
regions, etc., may be exaggerated for clarity. Like reference
numerals may designate like elements throughout the specification.
When an element such as a layer, film, region, or substrate is
referred to as being "on" another element, it can be directly on
the other element or intervening elements may also be present.
[0027] Hereinafter, a liquid crystal display and a manufacturing
method thereof according to an exemplary embodiment of the present
invention will be described with reference to the accompanying
drawings.
[0028] A liquid crystal display according to an exemplary
embodiment of the present invention will be described with
reference to FIG. 1. FIG. 1 is a layout view of a liquid crystal
display according to an exemplary embodiment of the present
invention. Referring to FIG. 1, a liquid crystal display according
an exemplary embodiment of the present invention includes a first
wire grid polarizer 30 including a plurality of small regions A1.
Line widths of fine patterns of the first wire grid polarizer 30
may be approximately 60 nm or less, Distances d between the fine
patterns of the first wire grid polarizer 30 may be approximately
120 nm or less. The entire area of the first wire grid polarizer 30
may be approximately 200 mm.times.200 mm or more.
[0029] A light blocking portion LB is disposed at boundary portions
between the small regions A1 of the first wire grid polarizer 30.
The light blocking portion LB may be a metal signal line such as a
gate line, a data line, and a storage voltage line or a black
matrix.
[0030] The first wire grid polarizer 30 may be formed by repeating
a step of forming the small region A1.
[0031] As described above, in the liquid crystal display according
to an exemplary embodiment of the present invention, the wire grid
polarizer 30 having a large area is formed to include the plurality
of small regions A1. The light blocking portion LB is disposed at
the boundary portions between the small regions A1 of the wire grid
polarizer 30 to prevent light from being transmitted. Accordingly,
deterioration in a polarization characteristic which may occur at
the boundary portions between the small regions A1 of the wire grid
polarizer 30 may be reduced or prevented. Therefore, the liquid
crystal display including the large area wire grid polarizer may be
provided without increasing a manufacturing cost or deteriorating
the polarization characteristic.
[0032] A liquid crystal display according to an exemplary
embodiment of the present invention will be described with
reference to FIG. 2. FIG. 2 is a layout view of a liquid crystal
display according to an exemplary embodiment of the present
invention.
[0033] Referring to FIG. 2, the liquid crystal display according to
an exemplary embodiment of the present invention includes a
plurality of pixel areas PX and second wire grid polarizers 30a
which are disposed at aperture regions of the pixel areas PX.
[0034] The second wire grid polarizers 30a are formed together on a
display panel on which pixel electrodes of the plurality of pixel
areas PX of the liquid crystal display are formed, and may be, for
example, disposed on the aperture regions of the pixel areas PX
through which light from a backlight is transmitted. Line widths of
fine patterns of the second wire grid polarizer 30a may be
approximately 60 nm or less, Distances between the fine patterns of
the second wire grid polarizer 30a may be approximately 120 nm or
less. The entire area of the first wire grid polarizer 30 may be
200 mm.times.200 mm or more.
[0035] The second wire grid polarizer 30a includes a plurality of
small regions which are disposed on the aperture regions of the
pixel areas PX. Boundary portions between the plurality of small
regions are covered by a light blocking member BM. Therefore, since
in the boundary portions of the plurality of small regions of the
second wire grid polarizer 30a the light is prevented from being
transmitted by the light blocking member BM, deterioration in a
polarization characteristic which may occur at the boundary
portions of the plurality of small regions of the second wire grid
polarizer 30a may be reduced or prevented. Accordingly, a liquid
crystal display including the large area wire grid polarizer may be
provided without increasing a manufacturing cost or deteriorating
the polarization characteristic.
[0036] A liquid crystal display according to an exemplary
embodiment of the present invention will be described with
reference to FIG. 3. FIG. 3 is a layout view of the liquid crystal
display according to an exemplary embodiment of the present
invention.
[0037] Referring to FIG. 3, a liquid crystal display according to
an exemplary embodiment of the present invention includes a
plurality of first pixel areas PX1 and a plurality of second pixel
areas PX2, Third wire grid polarizers 30h and 30c are disposed on
aperture regions of the first and second pixel areas PX1 and PX2,
respectively. The third wire grid polarizers 30b and 30c include
first polarization portions and second polarization portions,
respectively.
[0038] The first polarization portions including fine metal lines
arranged in a first direction are disposed in the first pixel areas
PX1 and the second polarization portions including fine metal lines
arranged in a second direction different from the first direction
are disposed in the second pixel areas PX2. The second direction
may be perpendicular to the first direction.
[0039] The third wire grid polarizers 30b and 30c are formed
together on a display panel on which pixel electrodes of the
plurality of pixel areas PX of the liquid crystal display are
formed. For example, the third wire grid polarizers 30b and 30c may
be disposed on the aperture regions of the pixel areas PX through
which light from a backlight is transmitted. Line widths of fine
patterns of the third wire grid polarizers 30b and 30c may be
approximately 60 nm or less. Distances between the fine patterns of
the third wire grid polarizers 30b and 30c may be approximately 120
nm or less. The entire area of the first wire grid polarizer 30 may
be 200 mm.times.200 mm or more.
[0040] In the liquid crystal display according to an exemplary
embodiment, the first polarization portions 30b disposed in the
first pixel areas PX1 and the second polarization portions 30c
disposed in the second pixel areas PX2 polarize light in directions
perpendicular to each other. This structure is used for a liquid
crystal display for displaying a 3D image by making polarization
directions of a left eye and a right eye different. For example,
the first pixel areas PX1 may be pixel areas which are recognized
by the left eye and the second pixel areas PX2 may be pixel areas
which are recognized by the right eye.
[0041] The third wire grid polarizers 30b and 30c include a
plurality of small regions disposed on the aperture regions of
pixel areas PX. Boundary portions of the plurality of small regions
are covered by a light blocking member BM. Therefore, since in the
boundary portions of the plurality of small regions of the third
wire grid polarizers 30b and 30c, the light is prevented from being
transmitted by the light blocking member BM, deterioration in a
polarization characteristic which may occur at the boundary
portions of the plurality of small regions of the third wire grid
polarizers 30b and 30c may be minimized or prevented. Accordingly,
it is possible to provide the liquid crystal display including the
large area wire grid polarizer without increasing a manufacturing
cost and deteriorating the polarization characteristic.
[0042] A method of manufacturing the liquid crystal display
according to an exemplary embodiment of the present invention will
be described with reference to FIG. 4. FIG. 4 is a cross-sectional
view showing a method for manufacturing the liquid crystal display
according to an exemplary embodiment of the present invention.
[0043] Referring to FIG. 4A, in a method of manufacturing a
polarizer of the liquid crystal display according to an exemplary
embodiment of the present invention, a small area first mold 301 is
manufactured. The mold may be formed of silicon, glass, nickel
(Ni), resist, and the like and may be used repeatedly. The mold is
formed by a photolithography method so as to have a width and a
distance of for example, 50 nm.
[0044] Referring to FIG. 4B, a metal layer 12 is stacked on a
substrate 11, a photosensitive film is stacked on the metal layer
12, and then a first photosensitive film pattern 13a is formed from
the photosensitive film by a nano-imprint method using a plurality
of first molds 301. A hard mask layer such as silicon oxide
(SiO.sub.2) or the like may be stacked between the metal layer 12
and the photosensitive film. When the hard mask layer is provided,
it is possible to increase a margin of an etching condition at the
time of etching as shown in FIG. 4C. The metal layer 12 may include
any one of aluminum (Al), gold (Au), silver (Ag), copper (Cu),
chromium (Cr), and iron (Fe), According to an exemplary embodiment,
the plurality of first molds 301 are used, but a single first mold
301 may also be used. Further, the first photosensitive film
pattern 13a is formed on a portion of the entire area on which the
polarizer is formed and after the mold is moved, the first
photosensitive film pattern 13a is formed again. These steps are
repetitively performed and as a result, the first photosensitive
film pattern 13a may be formed in a large area.
[0045] Thereafter, referring to FIG. 4C, after a recess portion of
the photosensitive film pattern 13a is removed, the metal layer 12
is etched using the photosensitive film pattern 13a as a mask and
the remaining photosensitive film pattern is removed by an ashing
process, thereby forming a polarizer having a desired fine first
metal pattern 12a. At this time, a second metal pattern 12b
different from the first metal pattern 12a may be formed on a
region between the plurality of first molds 301. The second metal
pattern 12b may also act as a polarizer.
[0046] The manufactured polarizer is aligned with a manufactured
display panel, and thus, the second metal pattern 12b of the
polarizer is aligned with a light blocking portion of the display
panel, thereby forming a liquid crystal display.
[0047] In a liquid crystal display according to an exemplary
embodiment of the present invention, as shown in FIG. 4D, after the
photosensitive film is stacked again on the substrate on which the
first metal pattern 12a and the second metal pattern 12b are
formed, a second photosensitive film pattern 13b is formed by
nano-imprinting a portion formed with the second metal pattern 12b
using the first molds 301. After removing a recess portion of the
second photosensitive film pattern 13b, a third metal pattern 12c
is formed by a double nano-imprint method of etching the second
metal pattern 12b using the second photosensitive film pattern 13b
as an etching mask. The third metal pattern 12c may also cover the
boundary portions. The fine metal patterns 12a and 12c may be
formed on the entire polarizer by the double nano-imprint method.
However, even though the double nano-imprint method is used,
intervals between the fine metal patterns 12a and 12c may not be
uniform at boundary portions due to an arrangement error of the
mold 301 and the boundary portions may be aligned with the light
blocking portion of the display panel.
[0048] As described above, in the liquid crystal display according
to an exemplary embodiment of the present invention, the polarizer
is formed by repeating the nano-imprint process using the mold
having a smaller area than the entire area of the polarizer. The
boundary portions between the small regions of the polarizer are
aligned with the light blocking portion of the display panel,
thereby preventing deterioration in the polarization characteristic
which may occur at the boundary portions of the plurality of small
regions of the polarizer. Accordingly, a liquid crystal display
including a large area wire grid polarizer may be provided without
increasing a manufacturing cost or deteriorating the polarization
characteristic.
[0049] A method of manufacturing a liquid crystal display according
to an exemplary embodiment of the present invention will be
described with reference to FIGS. 5 and 6. FIGS. 5 and 6 are
cross-sectional views showing a method of manufacturing the liquid
crystal display according to an exemplary embodiment of the present
invention.
[0050] A method of manufacturing a mold will be described with
reference to FIG. 5.
[0051] Referring to FIG. 5A, in a method of manufacturing a
polarizer of the liquid crystal display according to an exemplary
embodiment of the present invention, a small area first mold 301a
is manufactured. The mold may be formed of silicon, glass, nickel
(Ni), resist, and the like and may be used repeatedly. The mold is
formed by a photolithography method in order to have a width and a
distance of for example, 50 nm.
[0052] After an etch control layer 120 is stacked on a substrate 11
and a photosensitive film is stacked on the etch control layer 120,
a third photosensitive film pattern 130a is formed by a
nano-imprint method using the first mold 301a.
[0053] Thereafter, referring to FIG. 5B, after removing a recess
portion of the photosensitive film pattern 130a, the etch control
layer 120 is etched using the photosensitive film pattern 130a as a
mask and the remaining photosensitive film pattern is removed by an
asking process, thereby forming a desired fine first etch control
pattern 120a and a second etch control pattern 120b disposed at a
boundary portion of the first etch control pattern 120a.
[0054] Referring to FIG. 5C, a fourth photosensitive film pattern
130b is formed by an additional double nano-imprint method and as
shown in FIG. 5D, after removing a recess portion of the fourth
photosensitive film pattern 130b, the second etch control pattern
120b of the etch control layer 120 is etched again using the fourth
photosensitive film pattern 130b as a mask, thereby forming a third
etch control pattern 120c. Herein, the steps shown in FIG. 5C and
FIG. 5D may be optionally omitted,
[0055] Referring to FIG. 5E, a metal layer 140 is stacked on the
substrate 12 including the first etch control pattern 120a and the
third etch control pattern 120c by electroplating or the like, and
then the metal layer 140 is separated, thereby forming a large area
second mold 302 as shown in FIG. 5F. Further, the large area second
mold 302 is formed as shown in FIG. 5F by the nano-imprint
method.
[0056] Next, as shown in FIG. 6A, a second metal layer 121 is
stacked on a substrate 11, a photosensitive film is stacked on the
second metal layer 121, and then a fifth photosensitive film
pattern 131 is formed using the large area second mold 302 formed
with reference to FIG. 5.
[0057] As shown in FIG. 6B, after removing a recess portion of the
fifth photosensitive film pattern 131, the second metal layer 121
is etched using the fifth photosensitive film pattern 131 as an
etching mask, thereby forming a polarizer on which a desired fourth
metal pattern 121 a is disposed in a large area.
[0058] Thereafter, a part between small regions corresponding to
regions in Which the first molds 301a are disposed when the second
mold 302 is formed, is aligned with a light blocking portion of a
display panel. Accordingly, deterioration in a polarization
characteristic of the polarizer which may occur between the small
regions of the polarizer may be reduced or prevented. Accordingly,
it is possible to provide the liquid crystal display including the
large area wire grid polarizer without increasing a manufacturing
cost and deteriorating the polarization characteristic.
[0059] A method for manufacturing a liquid crystal display
according to an exemplary embodiment of the present invention will
be described with reference to FIG. 5 and FIG. 7.
[0060] First, as described above with reference to FIG. 5, the
large area second mold 302 is formed.
[0061] Thereafter, as shown in FIG. 7A, a photosensitive film is
stacked on a substrate 11 and a sixth photosensitive film pattern
122 is formed by a nano-imprint method using the second mold 302.
Then, as shown in FIG. 7B, a metal layer is stacked on the sixth
photosensitive film pattern 122, thereby forming a polarizer on
which a desired fifth metal pattern 122a is disposed in a large
area.
[0062] Thereafter, a part between small regions corresponding to
regions in the first molds 301a are disposed when the second 302 is
formed, is aligned with a light blocking portion of a display
panel. Accordingly, it is possible to prevent deterioration in a
polarization characteristic of the polarizer Which may occur
between the small regions of the polarizer. Accordingly, it is
possible to provide the liquid crystal display including the large
area wire grid polarizer without increasing a manufacturing cost
and without deteriorating the polarization characteristic.
[0063] While exemplary embodiments of the present invention have
been described in connection with the figures, it is to be
understood that the invention is not limited to the disclosed
embodiments, but is intended to cover various modifications and
equivalent arrangements.
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