U.S. patent application number 15/231647 was filed with the patent office on 2016-12-01 for vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus.
The applicant listed for this patent is Samsung Display Co., Ltd.. Invention is credited to Myung-Soo Huh, Cheol-Min Jang, Suk-Won Jung, Sung-Hun Key, In-Kyo Kim, Jae-Hyun Kim, Jin-Kwang Kim, Sung-Chul Kim, Chang-Woo Shim.
Application Number | 20160348241 15/231647 |
Document ID | / |
Family ID | 50682093 |
Filed Date | 2016-12-01 |
United States Patent
Application |
20160348241 |
Kind Code |
A1 |
Jang; Cheol-Min ; et
al. |
December 1, 2016 |
VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC
LIGHT-EMITTING DISPLAY APPARATUS
Abstract
A vapor deposition apparatus for depositing a thin film on a
substrate, by which a deposition process is efficiently performed
and deposition film characteristics are easily improved, and a
vapor deposition apparatus including: a stage onto which a
substrate is disposed; and a supply unit disposed to face the
substrate and having a main body member and a nozzle member
disposed on one surface of the main body member facing the
substrate, to sequentially supply a plurality of gases towards the
substrate, and a method of manufacturing an organic light-emitting
display apparatus using the same.
Inventors: |
Jang; Cheol-Min; (Yongin-si,
KR) ; Huh; Myung-Soo; (Yongin-si, KR) ; Jung;
Suk-Won; (Yongin-si, KR) ; Kim; Jae-Hyun;
(Yongin-si, KR) ; Kim; Sung-Chul; (Yongin-si,
KR) ; Kim; Jin-Kwang; (Yongin-si, KR) ; Shim;
Chang-Woo; (Yongin-si, KR) ; Key; Sung-Hun;
(Yongin-si, KR) ; Kim; In-Kyo; (Yongin-si,
KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Samsung Display Co., Ltd. |
Yongin-si |
|
KR |
|
|
Family ID: |
50682093 |
Appl. No.: |
15/231647 |
Filed: |
August 8, 2016 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
14078422 |
Nov 12, 2013 |
9412961 |
|
|
15231647 |
|
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 51/50 20130101;
H01L 51/56 20130101; H01L 27/3244 20130101; C23C 16/4412 20130101;
H01L 51/0011 20130101; H01L 51/001 20130101; C23C 16/45519
20130101; C23C 16/403 20130101; C23C 16/45563 20130101; C23C
16/45544 20130101 |
International
Class: |
C23C 16/455 20060101
C23C016/455; H01L 51/00 20060101 H01L051/00; C23C 16/44 20060101
C23C016/44; H01L 51/56 20060101 H01L051/56 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 13, 2012 |
KR |
10-2012-0128370 |
Claims
1. A vapor deposition apparatus comprising: a stage onto which a
substrate is disposed; and a supply unit disposed to face the
substrate and comprising a main body member and a nozzle member
disposed on one surface of the main body member and facing the
substrate, to sequentially supply a plurality of gases towards the
substrate.
2. The vapor deposition apparatus of claim 1, wherein the nozzle
member sequentially injects a first raw material gas, a second raw
material gas, and a purge gas towards the substrate.
3. The vapor deposition apparatus of claim 1, wherein the nozzle
member has a long extending shape.
4. The vapor deposition apparatus of claim 1, wherein the nozzle
member is formed to have a length equal to or greater than a width
along one direction of the substrate so as to correspond to the
width along the one direction of the substrate.
5. The vapor deposition apparatus of claim 1, wherein the nozzle
member is disposed to correspond to the center of the
substrate.
6. The vapor deposition apparatus of claim 1, further comprising an
exhaust unit defined by separated spaces between edges of the stage
and edges of the supply unit.
7. The vapor deposition apparatus of claim 1, wherein the stage is
disposed over the supply unit for the substrate to be disposed onto
the stage such that a surface of the substrate on which a
deposition process is performed faces downward.
8. The vapor deposition apparatus of claim 1, further comprising a
curtain unit disposed to face the stage and deviate from opposite
edges of the substrate and having curtain nozzles for injecting an
purge gas.
9. The vapor deposition apparatus of claim 8, wherein the curtain
nozzles are disposed at the opposite edges of the substrate and
facing one of the opposite edges.
10. The vapor deposition apparatus of claim 8, wherein the curtain
nozzles are disposed and oriented to all edges of the
substrate.
11. The vapor deposition apparatus of claim 8, wherein the curtain
nozzles are formed in a rectangular ring shape.
12. The vapor deposition apparatus of claim 1, wherein the supply
unit comprises a plurality of supply modules, each of the plurality
of supply modules comprising a main body member and a nozzle
member.
13. The vapor deposition apparatus of claim 12, wherein a exhaust
unit is disposed between every two adjacent supply modules.
14. The vapor deposition apparatus of claim 1, wherein the nozzle
member comprises a first supply region, a second supply region, and
a partition disposed between the first supply region and the second
supply region.
15. The vapor deposition apparatus of claim 14, wherein a first raw
material gas is injected from the first supply region, and a second
raw material gas is injected from the second supply region.
16. The vapor deposition apparatus of claim 15, wherein a purge gas
is discharged from the second supply region while the first raw
material gas is being injected from the first supply region.
17. The vapor deposition apparatus of claim 15, wherein a purge gas
is discharged from the first supply region while the second raw
material gas is being injected from the second supply region.
18. The vapor deposition apparatus of claim 1, further comprising a
linear gas supply line for supplying gases to the nozzle member of
the supply unit.
19. The vapor deposition apparatus of claim 18, further comprising
a first valve, a second valve, and a third valve disposed to
control a process of respectively delivering a first raw material
gas, a second raw material gas, and a purge gas to the gas supply
line.
20. The vapor deposition apparatus of claim 19, further comprising
a first purge gas valve, a second purge gas valve, and a third
purge gas valve disposed in a direction farther from the gas supply
line than the first valve, the second valve, and the third valve to
control injection of the purge gas.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a divisional of U.S. patent application
Ser. No. 14/078,422, filed Nov. 12, 2013, which claims priority to
and the benefit of Korean Patent Application No. 10-2012-0128370,
filed Nov. 13, 2012, the entire contents of both of which are
incorporated herein by reference.
BACKGROUND
[0002] 1. Field
[0003] Embodiments of the present invention relate to a vapor
deposition apparatus and a method of manufacturing an organic
light-emitting display apparatus. Embodiments of the present
invention more particularly relate to a vapor deposition apparatus,
by which a deposition process is efficiently performed and
deposition film characteristics are easily improved, and a method
of manufacturing an organic light-emitting display apparatus.
[0004] 2. Description of the Related Art
[0005] Semiconductor devices, display apparatuses, other electronic
devices, and the like include a plurality of thin films. One of
various methods of forming the plurality of thin films is a vapor
deposition method.
[0006] The vapor deposition method uses one or more gases as raw
materials for forming a thin film. Examples of the vapor deposition
method are chemical vapor deposition (CVD), atomic layer deposition
(ALD), and the like.
[0007] During ALD, one raw material is injected and purged/pumped,
one or more molecular layers are adsorbed onto a substrate, after
which another raw material is injected and purged/pumped to thereby
form a desired single atomic layer or multiple atomic layers.
[0008] Among display apparatuses, an organic light-emitting display
apparatus has attracted attention as a next-generation display
apparatus due to high-grade characteristics, such as wide angle of
views, high contrast, and quick response speeds.
[0009] The organic light-emitting display apparatus includes an
intermediate layer having an organic emission layer between a first
electrode and a second electrode that face the first electrode and
further includes one or more thin films. A deposition process may
be used to form the one or more thin films of the organic
light-emitting display apparatus.
[0010] However, it is not easy to deposit a large-area thin film
having desired characteristics for a large-sized and
high-resolution organic light-emitting display apparatus.
SUMMARY
[0011] Aspects of embodiments of the present invention include a
vapor deposition apparatus, by which a deposition process is
efficiently performed and deposition film characteristics are
easily improved, and a method of manufacturing an organic
light-emitting display apparatus.
[0012] Additional aspects will be set forth in part in the
description which follows and, in part, will be apparent from the
description, or may be learned by practice of the presented
embodiments.
[0013] According to one or more embodiments of the present
invention, a vapor deposition apparatus includes: a stage onto
which a substrate is disposed; and a supply unit disposed to face
the substrate and having a main body member and a nozzle member
disposed on one surface of the main body member and facing the
substrate, to sequentially supply a plurality of gases towards the
substrate.
[0014] The nozzle member may sequentially inject a first raw
material gas, a second raw material gas, and a purge gas towards
the substrate.
[0015] The nozzle member may have a long extending shape.
[0016] The nozzle member may be formed to have a length that is
equal to or greater than a width of one direction of the substrate
so as to correspond to the width of the one direction of the
substrate.
[0017] The nozzle member may be disposed to correspond to the
center of the substrate.
[0018] The vapor deposition apparatus may further include an
exhaust unit defined as separated spaces between edges of the stage
and edges of the supply unit.
[0019] The stage may be disposed over the supply unit for the
substrate to be disposed on the stage such that a surface of the
substrate on which a deposition process is performed faces downward
(e.g. towards the ground).
[0020] The vapor deposition apparatus may further include a curtain
unit disposed to face the stage and deviate from opposite edges of
the substrate and having curtain nozzles for injecting a purge gas
(e.g. an inert gas).
[0021] The curtain nozzles may be disposed at the opposite edges of
the substrate and facing the opposite edges.
[0022] The curtain nozzles may be disposed and oriented to all
edges of the substrate.
[0023] The curtain nozzles may be formed in a rectangular ring
shape.
[0024] The supply unit may include a plurality of supply modules,
each supply module including a main body member and a nozzle
member.
[0025] The exhaust unit may be disposed between every two adjacent
supply modules.
[0026] The nozzle member may include a first supply region, a
second supply region, and a partition disposed between the first
supply region and the second supply region.
[0027] The first raw material gas may be injected from the first
supply region, and the second raw material gas may be injected from
the second supply region.
[0028] The purge gas may be discharged from the second supply
region while the first raw material gas is being injected from the
first supply region.
[0029] The purge gas may be discharged from the first supply region
while the second raw material gas is being injected from the second
supply region.
[0030] The vapor deposition apparatus may further include a linear
gas supply line for supplying gases to the nozzle member of the
supply unit.
[0031] The vapor deposition apparatus may further include a first
valve, a second valve, and a third valve disposed to control a
process of respectively delivering a first raw material gas, a
second raw material gas, and a purge gas to the gas supply
line.
[0032] The vapor deposition apparatus may further include a first
purge gas valve, a second purge gas valve, and a third purge gas
valve disposed in a direction farther from the gas supply line than
the first valve, the second valve, and the third valve to control
injection of the purge gas.
[0033] According to one or more embodiments of the present
invention, a method of manufacturing an organic light-emitting
display apparatus including a thin film on a substrate by using a
vapor deposition apparatus, the vapor deposition apparatus
including: a stage onto which the substrate is disposed; and a
supply unit disposed to face the substrate and having a main body
member and a nozzle member disposed on one surface of the main body
member facing the substrate, to sequentially supply a plurality of
gases towards the substrate, includes forming the thin film,
wherein the forming of the thin film is performed by sequentially
injecting different raw material gases from the nozzle member in a
state where the substrate and the vapor deposition apparatus are
fixed.
[0034] The organic light-emitting display apparatus may include a
first electrode, an intermediate layer having an organic emission
layer, a second electrode, and an encapsulating layer, and the
forming of the thin film may include forming the encapsulating
layer.
[0035] The forming of the thin film may include forming an
insulating layer.
[0036] The forming of the thin film may include forming a
conductive layer.
BRIEF DESCRIPTION OF THE DRAWINGS
[0037] Example embodiments will now be described more fully
hereinafter with reference to the accompanying drawings; however,
they may be embodied in different forms and should not be construed
as limited to the embodiments set forth herein. Rather, these
embodiments are provided so that this disclosure will be thorough
and complete, and will fully convey the scope of the example
embodiments to those skilled in the art.
[0038] In the drawing figures, dimensions may be exaggerated for
clarity of illustration. It will be understood that when an element
is referred to as being "between" two elements, it can be the only
element between the two elements, or one or more intervening
elements may also be present. Like reference numerals refer to like
elements throughout.
[0039] Embodiments of the present invention will become apparent
and more readily appreciated from the following description of the
embodiments, taken in conjunction with the accompanying drawings in
which:
[0040] FIG. 1 is a schematic cross-sectional view of a vapor
deposition apparatus according to an embodiment of the present
invention;
[0041] FIG. 2 is a top view in a direction A of FIG. 1;
[0042] FIGS. 3A to 3D are cross-sectional views illustrating a
deposition process using the vapor deposition apparatus of FIG.
1;
[0043] FIG. 4 is a schematic cross-sectional view of a vapor
deposition apparatus according to another embodiment of the present
invention;
[0044] FIG. 5 is a top view in a direction A of FIG. 4;
[0045] FIG. 6 is a schematic cross-sectional view of a vapor
deposition apparatus according to another embodiment of the present
invention;
[0046] FIG. 7 is a schematic cross-sectional view of a vapor
deposition apparatus according to another embodiment of the present
invention;
[0047] FIGS. 8A to 8D are cross-sectional views illustrating a
deposition process using the vapor deposition apparatus of FIG.
7;
[0048] FIG. 9 is a schematic cross-sectional view of a vapor
deposition apparatus according to another embodiment of the present
invention;
[0049] FIG. 10 is a schematic cross-sectional view of an organic
light-emitting display apparatus manufactured by a method of
manufacturing an organic light-emitting display apparatus according
to another embodiment of the present invention; and
[0050] FIG. 11 is a magnified view of F of FIG. 10.
DETAILED DESCRIPTION
[0051] Reference will now be made in detail to embodiments,
examples of which are illustrated in the accompanying drawings,
wherein like reference numerals refer to the like elements
throughout. In this regard, the present embodiments may have
different forms and should not be construed as being limited to the
descriptions set forth herein. Accordingly, the embodiments are
merely described below, by referring to the figures, to explain
aspects of the present description. As used herein, the term
"and/or" includes any and all combinations of one or more of the
associated listed items.
[0052] Expressions such as "at least one of," when preceding a list
of elements, modify the entire list of elements and do not modify
the individual elements of the list. Further, the use of "may" when
describing embodiments of the present invention refers to "one or
more embodiments of the present invention."
[0053] FIG. 1 is a schematic cross-sectional view of a vapor
deposition apparatus 100 according to an embodiment of the present
invention, and FIG. 2 is a top view in a direction A of FIG. 1,
[0054] Referring to FIGS. 1 and 2, the vapor deposition apparatus
100 may include a stage 105 and a supply unit 110.
[0055] A substrate 30 is disposed on the stage 105. The stage 105
is formed to stably fix the substrate 30 during a deposition
process and may further include a clamp and the like. The stage 105
is disposed on the supply unit 110 such that a surface of the
substrate 30, particularly, a surface on which the deposition
process is to be performed, i.e., a lower surface of the substrate
30, faces the ground.
[0056] As shown in FIG. 1, the stage 105 may be formed to have a
set or predetermined groove, wherein the substrate 30 is disposed
in the groove. In this case, the substrate 30 is relatively stable
on the stage 105, and an escape, vibration, and the like of the
substrate 30 is prevented during the deposition process.
[0057] However, one or more embodiments of the present invention
are not limited thereto, and the stage 105 may include no
groove.
[0058] The supply unit 110 may include a main body member 111 and a
nozzle member 112.
[0059] The main body member 111 supports the entire supply unit
110, functions as a housing, and may include therein a connection
pipe for delivering a raw material to the nozzle member 112.
[0060] The nozzle member 112 is disposed on one surface of the main
body member 111. The nozzle member 112 injects a gaseous raw
material for performing the deposition process towards the
substrate 30. For example, the nozzle member 112 injects a first
raw material gas S towards the substrate 30. However, this is only
illustrative, and the nozzle member 112 may sequentially and
repeatedly inject a plurality of gases towards the substrate 30 to
perform the deposition process on the substrate 30. A detailed
description thereof will be made below.
[0061] The nozzle member 112 is a linear nozzle member having a
long extending shape. That is, as shown in FIG. 2, the nozzle
member 112 is formed to have a length that is greater than a width
along one direction of the substrate 30. As another example, the
nozzle member 112 may have a length that is the same as the width
along the one direction of the substrate 30.
[0062] By doing this, the first raw material gas S injected from
the nozzle member 112 uniformly reacts with the entire surface of
the substrate 30, thereby uniformly performing the deposition
process. In particular, the nozzle member 112 may be disposed to
correspond to the center of the substrate 30 to thereby easily
perform the uniform deposition process.
[0063] An exhaust unit 120 is formed to discharge residual gases
after the deposition process. The exhaust unit 120 is defined by
separated spaces between edges of the stage 105 and edges of the
supply unit 110.
[0064] FIGS. 3A to 3D are cross-sectional views illustrating a
deposition process using the vapor deposition apparatus 100 of FIG.
1.
[0065] Referring to FIG. 3A, the first raw material gas S is
injected in a direction of the substrate 30 from the nozzle member
112 of the supply unit 110. The first raw material gas S may
include various suitable materials. The first raw material gas S
may be a gas including aluminum (Al), e.g., trimethyl aluminum
(TMA). In this case, when the first raw material gas S is injected
in the direction of the substrate 30, an adsorption layer including
Al is formed on the surface of the substrate 30. In more detail, a
chemical adsorption layer and a physical adsorption layer are
formed on the surface of the substrate 30.
[0066] Thereafter, referring to FIG. 3B, a purge gas P is injected
in the direction of the substrate 30 from the nozzle member 112 of
the supply unit 110. The purge gas P may include various suitable
materials. For example, the purge gas P may include an inert gas,
e.g., argon or nitrogen.
[0067] The physical adsorption layer having a weak molecular
bonding force in the adsorption layer described above which is
formed on the surface of the substrate 30 with the first raw
material gas S is separated from the substrate 30 due to the purge
gas P, and the separated gas or residual substances are removed
through the exhaust unit 120, thereby improving the purity of a
deposition film to be finally formed on the substrate 30.
[0068] Thereafter, referring to FIG. 3C, a second raw material gas
R is injected in the direction of the substrate 30 from the nozzle
member 112 of the supply unit 110. The second raw material gas R
may include various suitable materials. The second raw material gas
R may include a gas including oxygen (O), e.g., hydrogen oxide
(H.sub.2O), dioxygen (O.sub.2), and/or nitrogen oxide (N.sub.2O).
In addition, although not shown, when the second raw material gas R
is injected, the second raw material gas R may be converted into a
radical form by generating plasma and injected to the substrate
30.
[0069] When the second raw material gas R is injected in the
direction of the substrate 30, the second raw material gas R reacts
with the chemical adsorption layer formed of the first raw material
gas S, which has been already adsorbed on the substrate 30, or
displaces a portion of the chemical adsorption layer, thereby
finally forming a desired deposition film, e.g., an aluminum oxide
(Al.sub.xO.sub.y) layer. At this time, an excessive second raw
material gas R remains by forming a physical adsorption layer or is
discharged through the exhaust unit 120.
[0070] Thereafter, referring to FIG. 3D, the purge gas P is
injected in the direction of the substrate 30 from the nozzle
member 112 of the supply unit 110. The physical adsorption
remaining on the surface of the substrate 30 is separated from the
substrate 30 due to the purge gas P, and the separated gas or
residual substances are removed through the exhaust unit 120,
thereby improving the purity of a deposition film to be finally
formed on the substrate 30.
[0071] According to the current embodiment, the supply unit 110
includes the nozzle member 112, and the first and second raw
material gases S and R and the purge gas P are sequentially
injected from the nozzle member 112 towards the center of the
substrate 30. Accordingly, even during one cycle of the deposition
process including a plurality of operations, the substrate 30 and
the supply unit 110 do not have to move. In addition, the supply
unit 110 does not have to be larger than necessary, and thus, the
miniaturization of the vapor deposition apparatus 100 may be
achieved.
[0072] In particular, the first raw material gas S, the second raw
material gas R, and the purge gas P are sequentially injected by
the nozzle member 112, and thus, an ALD process in which at least
four operations form one cycle may be easily performed.
[0073] In addition, when an organic light-emitting display
apparatus is manufactured using the substrate 30 by disposing the
substrate 30 on the supply unit 110 such that a deposition surface
of the substrate 30 faces the ground, the connectivity with a
plurality of processes in which the substrate 30 faces the ground
is improved.
[0074] FIG. 4 is a schematic cross-sectional view of a vapor
deposition apparatus 200 according to another embodiment of the
present invention, and FIG. 5 is a top view in a direction A of
FIG. 4.
[0075] Referring to FIGS. 4 and 5, the vapor deposition apparatus
200 may include a stage 205, a supply unit 210, an exhaust unit
220, and curtain units 230A and 230B. For convenience, descriptions
of similar components to those described above may not be provided
again.
[0076] The substrate 30 is disposed on the stage 205. The stage 205
is disposed on the supply unit 210 such that a surface of the
substrate 30, particularly, a surface on which a deposition process
is to be performed, i.e., a lower surface of the substrate 30,
faces the ground.
[0077] The supply unit 210 may include a main body member 211 and a
nozzle member 212. The nozzle member 212 has a long extending
shape. That is, as shown in FIG. 5, the nozzle member 212 is formed
to have a length that is greater than a width of one direction of
the substrate 30. As another example, the nozzle member 212 may
have a length that is the same as the width of the one direction of
the substrate 30. The nozzle member 212 may be disposed to
correspond to the center of the substrate 30 to thereby easily
perform the uniform deposition process.
[0078] The two curtain units 230A and 230B are disposed to face the
stage 205. In addition, the curtain units 230A and 230B are
disposed to deviate from edges of the substrate 30, i.e., not to
overlap the substrate 30. The curtain units 230A and 230B include
curtain main bodies 231A and 231B and curtain nozzles 232A and
232B, respectively. The curtain nozzles 232A and 232B inject a
curtain gas towards the stage 205. The curtain main bodies 231A and
231B may include therein connection pipes for supplying the curtain
gas to the curtain nozzles 232A and 232B, respectively. The curtain
nozzles 232A and 232B may be symmetrically disposed at both ends
based on the nozzle member 212. That is, the curtain nozzles 232A
and 232B are disposed and oriented to one side of the substrate 30
and another side thereof facing the one side and not to overlap
each other, respectively. The curtain gas injected by the curtain
nozzles 232A and 232B may be an inert gas. The curtain gas prevents
the escape of the first raw material gas S injected by the nozzle
member 212 from the substrate 30 and largely from the stage 205. By
doing this, damage of the outer side surfaces of the stage 205, the
supply unit 210, and other portions of the vapor deposition
apparatus 200 due to the first raw material gas S is prevented. In
particular, the vapor deposition apparatus 200 may be disposed in a
chamber, and in this case, the curtain gas injected by the curtain
nozzles 232A and 232B functions to block the movement of the first
raw material gas S to thereby prevent contamination or damage of
the inner wall of the chamber due to the first raw material gas
S.
[0079] According to another embodiment of the present invention,
curtain nozzles may be disposed and oriented to all of four sides
of the substrate 30. That is, although the curtain nozzles 232A and
232B are shown to be disposed and oriented to the left and right
sides of the substrate 30 in FIG. 5, curtain nozzles may be further
disposed and oriented to the top and bottom sides of the substrate
30, and all of these curtain nozzles may be connected to form a
shape, such as a rectangular ring.
[0080] The curtain main bodies 231A and 231B of the curtain units
230A and 230B may have various shapes. As a more detailed example,
the curtain main bodies 231A and 231B may be formed as one body
with the main body member 211 of the supply unit 210 or formed
independently.
[0081] The exhaust unit 220 may include a first exhaust unit 221
and a second exhaust unit 222. The first exhaust unit 221 and the
second exhaust unit 222 of the exhaust unit 220 are disposed
between the nozzle member 212 and the curtain units 230A and 230B,
respectively. In addition, the exhaust unit 220 is disposed to
correspond to or deviate from edges of the substrate 30. In
addition, the exhaust unit 220 is formed to discharge gasses and
the like towards the ground.
[0082] After the deposition process, residual gases are discharged
through the exhaust unit 220, and in this case, since the residual
gases are discharged in a direction that is opposite to a direction
of injecting the first raw material gas S from the nozzle member
212, i.e., a direction of orienting to the ground, an exhaust
characteristic is improved.
[0083] The deposition process using the vapor deposition apparatus
200 according to the current embodiment is similar to the
above-described embodiment.
[0084] In the vapor deposition apparatus 200 according to the
current embodiment, the curtain gas injected from the curtain units
230A and 230B functions as a curtain for blocking the movement of
the first raw material gas S, thereby preventing contamination or
damage of the inner wall of the chamber due to the first raw
material gas S.
[0085] FIG. 6 is a schematic cross-sectional view of a vapor
deposition apparatus 300 according to another embodiment of the
present invention.
[0086] Referring to FIG. 6, the vapor deposition apparatus 300 may
include a stage 305, a supply unit 310, an exhaust unit 320, and
curtain units 330A and 330B. For convenience, descriptions of
similar components to those described above may not be provided
again.
[0087] The substrate 30 is disposed on the stage 305. The stage 305
is disposed on the supply unit 310 such that a surface of the
substrate 30, particularly, a surface on which a deposition process
is to be performed, i.e., a lower surface of the substrate 30,
faces the ground.
[0088] The supply unit 310 may include a plurality of supply
modules 310-1, 310-2, 310-3, 310-4, and 310-5. The supply module
310-1 may include a main body member 311 and a nozzle member 312.
The nozzle member 312 has a long extending shape.
[0089] That is, the nozzle member 312 is formed to have a length
that is greater than a width of one direction of the substrate 30.
As another example, the nozzle member 312 may have a length that is
the same as the width of the one direction of the substrate 30.
[0090] The other supply modules 310-2, 310-3, 310-4, and 310-5 are
the same as the supply module 310-1, and thus, a detailed
description thereof is not provided.
[0091] The plurality of supply modules 310-1, 310-2, 310-3, 310-4,
and 310-5 may have various forms, e.g., independent from each other
or in one body. As a detailed example, the plurality of supply
modules 310-1, 310-2, 310-3, 310-4, and 310-5 may have an
integrated main body member and independent nozzle members.
[0092] The two curtain units 330A and 330B are disposed to face the
stage 305. In addition, the curtain units 330A and 330B are
disposed to deviate from edges of the substrate 30, i.e., not to
overlap the substrate 30. The curtain units 330A and 330B include
curtain main bodies 331A and 331B and curtain nozzles 332A and
332B, respectively. The curtain nozzles 332A and 332B inject a
curtain gas towards the stage 305.
[0093] The curtain units 330A and 330B are the same as the curtain
units 230A and 230B described above, and thus a detailed
description thereof is not provided.
[0094] The exhaust unit 320 may include a first exhaust unit 321, a
second exhaust unit 322, and a third exhaust unit 323. The first
exhaust unit 321 and the second exhaust unit 322 of the exhaust
unit 320 are disposed between the outermost nozzle members 312 and
the curtain units 330A and 330B, respectively. That is, the first
exhaust unit 321 is disposed between the nozzle member 312 of the
supply module 310-1 and the curtain unit 330B, and the second
exhaust unit 322 is disposed between the nozzle member 312 of the
supply module 310-5 and the curtain unit 330B.
[0095] The third exhaust unit 323 is disposed between every two
adjacent supply modules among the plurality of supply modules
310-1, 310-2, 310-3, 310-4, and 310-5. That is, four exhaust units
323 may be disposed.
[0096] A detailed description of the exhaust unit 320 is the same
as the embodiment described above, and thus the detailed
description of the exhaust unit 320 is not provided.
[0097] The vapor deposition apparatus 300 according to the current
embodiment includes the supply unit 310 having the plurality of
supply modules 310-1, 310-2, 310-3, 310-4, and 310-5. By this
configuration of the supply unit 310, a uniform deposition film may
be easily formed on the entire surface of the substrate 30 even in
a state of fixing the substrate 30 and the vapor deposition
apparatus 300.
[0098] In addition, the third exhaust unit 323 is disposed between
every two adjacent supply modules in addition to the first exhaust
unit 321 and the second exhaust unit 322, thereby improving the
exhaust capability during the deposition process.
[0099] FIG. 7 is a schematic cross-sectional view of a vapor
deposition apparatus 400 according to another embodiment of the
present invention.
[0100] Referring to FIG. 7, the vapor deposition apparatus 400 may
include a stage 405, a supply unit 410, an exhaust unit 420, and
curtain units 430A and 430B. For convenience, descriptions of
similar components to those described above may not be
provided.
[0101] The substrate 30 is disposed on the stage 405. The stage 405
is disposed on the supply unit 410 such that a surface of the
substrate 30, particularly, a surface on which a deposition process
is to be performed, i.e., a lower surface of the substrate 30,
faces the ground.
[0102] The supply unit 410 may include a plurality of supply
modules 410-1, 410-2, 410-3, 410-4, and 410-5. The supply module
410-1 may include a main body member 411 and a nozzle member 412.
The nozzle member 412 has a long extending shape.
[0103] That is, the nozzle member 412 is formed to have a length
that is greater than a width of one direction of the substrate 30.
As another example, the nozzle member 412 may have a length that is
the same as the width of the one direction of the substrate 30.
[0104] The nozzle member 412 may include a first injection region
412A, a second injection region 4126, and a partition 412C. The
first injection region 412A and the second injection region 412B
are formed to inject their respective raw material gases towards
the substrate 30. The partition 412C is disposed between the first
injection region 412A and the second injection region 412B to block
mixing of the raw material gases injected by the first injection
region 412A and the second injection region 412B. A detailed
description of a deposition process using the first injection
region 412A and the second injection region 412B will be described
below.
[0105] The other supply modules 410-2, 410-3, 410-4, and 410-5 are
the same as the supply module 410-1, and thus, a detailed
description thereof is not provided.
[0106] The two curtain units 430A and 430B are disposed to face the
stage 405. The curtain units 430A and 430B are the same as the
curtain units 230A and 230B described above, and thus a detailed
description thereof is not provided.
[0107] The exhaust unit 420 may include a first exhaust unit 421, a
second exhaust unit 422, and a third exhaust unit 423. A detailed
configuration of the exhaust unit 420 is the same as that of the
exhaust unit 320 described above, and thus a detailed description
thereof is not provided.
[0108] The current embodiment includes the plurality of supply
modules 410-1, 410-2, 410-3, 410-4, and 410-5, but embodiments of
the present invention are not limited thereto. That is, the
configuration of the first injection region 412A, the second
injection region 412B, and the partition 412C may be applied to the
vapor deposition apparatuses 100 and 200 of FIGS. 1 and 4.
[0109] FIGS. 8A to 8D are cross-sectional views illustrating a
deposition process using the vapor deposition apparatus 400 of FIG.
7.
[0110] Referring to FIG. 8A, the first raw material gas S is
injected in a direction of the substrate 30 from the first
injection region 412A of the nozzle member 412. At this time, an
inert gas, e.g., the purge gas P, is discharged from the second
injection region 412B. The inert gas discharged from the second
injection region 412B prevents contamination or damage of the
second injection region 412B due to the first raw material gas S
injected from the first injection region 412A. In addition, the
partition 412C is disposed between the first injection region 412A
and the second injection region 412B to thereby effectively
distinguish the second injection region 412B from the first
injection region 412A.
[0111] A curtain gas that is an inert gas, e.g., the purge gas P,
is injected from the curtain nozzles 432A and 432B of the curtain
units 430A and 430B.
[0112] When the first raw material gas S is injected in the
direction of the substrate 30, a chemical adsorption layer and a
physical adsorption layer which include the first raw material gas
S are formed on the surface of the substrate 30. During this
operation, the exhaust unit 420 discharges residual gases and
unnecessary foreign substances therethrough.
[0113] Thereafter, referring to FIG. 8B, the purge gas P is
injected in the direction of the substrate 30 from the first
injection region 412A and the second injection region 412B of the
nozzle member 412. The purge gas P may include various materials.
For example, the purge gas P may include an inert gas.
[0114] The curtain gas that is an inert gas, e.g., the purge gas P,
is injected from the curtain nozzles 432A and 432B of the curtain
units 430A and 430B. That is, the purge gas P may be concurrently
or simultaneously injected from the first injection region 412A,
the second injection region 412B, and the curtain nozzles 432A and
432B.
[0115] The exhaust unit 420 discharges residual gases and
unnecessary foreign substances therethrough.
[0116] Thereafter, referring to FIG. 8C, the second raw material
gas R is injected in the direction of the substrate 30 from the
second injection region 4126 of the nozzle member 412. At this
time, an inert gas, e.g. the purge gas P, is discharged from the
first injection region 412A. The inert gas discharged from the
first injection region 412A prevents contamination or damage of the
first injection region 412A due to the second raw material gas R
injected from the second injection region 412B. In addition, the
partition 412C is disposed between the first injection region 412A
and the second injection region 412B to thereby effectively
distinguish the first injection region 412A from the second
injection region 412B.
[0117] The curtain gas that is an inert gas, e.g., the purge gas P,
is injected from the curtain nozzles 432A and 432B of the curtain
units 430A and 430B.
[0118] During this operation, the exhaust unit 420 discharges
residual gases and unnecessary foreign substances therethrough.
[0119] Thereafter, referring to FIG. 8D, the purge gas P is
injected in the direction of the substrate 30 from the first
injection region 412A and the second injection region 412B of the
nozzle member 412. The purge gas P may include various materials.
For example, the purge gas P may include an inert gas.
[0120] The curtain gas that is an inert gas, e.g., the purge gas P,
is injected from the curtain nozzles 432A and 432B of the curtain
units 430A and 430B. That is, the purge gas P may be concurrently
or simultaneously injected from the first injection region 412A,
the second injection region 412B, and the curtain nozzles 432A and
432B.
[0121] The exhaust unit 420 discharges residual gases and
unnecessary foreign substances therethrough.
[0122] By these operations, a deposition film including the first
raw material gas S and the second raw material gas R may be
formed.
[0123] According to the current embodiment, the first raw material
gas S and the second raw material gas Rare sequentially injected
from the nozzle member 412 towards the substrate 30. Accordingly,
the substrate 30 and the vapor deposition apparatus 400 do not have
to move.
[0124] In addition, the plurality of supply modules 410-1, 410-2,
410-3, 410-4, and 410-5 are provided to form a uniform deposition
film on the substrate 30.
[0125] In addition, the nozzle member 412 includes the first
injection region 412A and the second injection region 412B, the
first raw material gas S is injected from the first injection
region 412A, and the second raw material gas R is injected from the
second injection region 412B. In addition, the inert gas is
discharged from the second injection region 412B while the first
raw material gas S is being injected from the first injection
region 412A, and the inert gas is discharged from the first
injection region 412A while the second raw material gas R is being
injected from the second injection region 412B. By doing this,
contamination of the first injection region 412A due to the second
raw material gas R is prevented, and contamination of the second
injection region 412B due to the first raw material gas S is
prevented. In particular, this contamination prevention effect
increases by the partition 412C.
[0126] FIG. 9 is a schematic cross-sectional view of a vapor
deposition apparatus 500 according to another embodiment of the
present invention.
[0127] Referring to FIG. 9, the vapor deposition apparatus 500 may
include a stage 505, a supply unit 510, an exhaust unit 520,
curtain units 530A and 530B, and a gas supply line 570. For
convenience, descriptions of similar components to those described
above may not be provided.
[0128] The substrate 30 is disposed on the stage 505. A mask 550 is
disposed between the substrate 30 and the supply unit 510 to form a
desired deposition pattern. The mask 550 may move and be aligned by
a mask holder 551 and be disposed to be adjacent to the substrate
30. In addition, the substrate 30 may be supported and move by a
substrate driving unit 560 and be stably disposed on the stage
505.
[0129] A housing 590 is disposed to surround the supply unit 510,
the exhaust unit 520, and the curtain units 530A and 530B to
protect the supply unit 510, the exhaust unit 520, and the curtain
units 530A and 530B and to easily form a desired pressure
atmosphere, e.g., a vacuum atmosphere, in a region in which a
deposition process while the deposition process is being performed
on the substrate 30.
[0130] The supply unit 510 may include a plurality of supply
modules 510-1, 510-2, 510-3, 510-4, and 510-5. A configuration of
the supply unit 510, the exhaust unit 520, and the curtain units
530A and 530B is similar to that of the vapor deposition apparatus
300 according to the embodiment of FIG. 6 described above, and
thus, a detailed description thereof is not provided.
[0131] The gas supply line 570 supplies the first and second raw
material gases S and R and the purge gas P to the supply unit 510.
The gas supply line 570 has a linear as shown in FIG. 9. The first
raw material gas S, the second raw material gas R, and the purge
gas P are individually delivered to the gas supply line 570, in
more detail, delivered through a first valve 571, a second valve
572, and a third valve 573, respectively.
[0132] In addition, a first inert gas valve 5711, a second inert
gas valve 5721, and a third inert gas valve 5731 for controlling
injection of an inert gas I are disposed in a direction farther
from the gas supply line 570 than the first valve 571, the second
valve 572, and the third valve 573, respectively. The inert gas I
may be delivered to the first valve 571, the second valve 572, and
the third valve 573 through the first inert gas valve 5711, the
second inert gas valve 5721, and the third inert gas valve 5731. By
doing this, injection times and injection purities of the first raw
material gas S, the second raw material gas R, and the purge gas P
through the gas supply line 570 are easily controlled.
[0133] For example, when the first raw material gas S is delivered
to the gas supply line 570 through the first valve 571, the second
raw material gas R is not delivered to the supply line 570. To this
end, a method of closing the second valve 572 may be used, but when
opening and closing of the second valve 572 are repeated, the
accurate control of the flow of the second raw material gas R is
not easy. Thus, the inert gas I may be delivered through the second
valve 572 under control of the second inert gas valve 5721 by
opening the second valve 572 without closing to thereby block the
inflow of the second raw material gas R to the gas supply line 570.
That is, only a desired gas may be delivered to the gas supply line
570 by using the first inert gas valve 5711, the second inert gas
valve 5721, and the third inert gas valve 5731 without repeating
opening and closing of the first valve 571, the second valve 572,
and the third valve 573.
[0134] FIG. 10 is a schematic cross-sectional view of an organic
light-emitting display apparatus 10 manufactured by a method of
manufacturing an organic light-emitting display apparatus according
to another embodiment of the present invention, and FIG. 11 is a
magnified view of F of FIG. 10.
[0135] In more detail, FIGS. 10 and 11 show the organic
light-emitting display apparatus 10 manufactured using any one of
the vapor deposition apparatuses 100, 200, 300, 400, and 500
described above. For convenience of description, a description
below is made by using the vapor deposition apparatus 100 as an
example.
[0136] The organic light-emitting display apparatus 10 includes the
substrate 30. The substrate 30 may be formed of a glass material, a
plastic material, or a metallic material.
[0137] A buffer layer 31 including an insulating material is formed
on the substrate 30 to provide a planarization surface on the
substrate 30 and prevent permeation of moisture and foreign
substances into the substrate 30.
[0138] A thin film transistor (TFT), a capacitor 50, and an organic
light-emitting device (OLED) 60 are formed on the buffer layer 31.
The TFT largely includes an active layer 41, a gate electrode 42,
and source and drain electrodes 43. The OLED may include a first
electrode 61, a second electrode 62, and an intermediate layer 63.
The capacitor 50 may include a first capacitor electrode 51 and a
second capacitor electrode 52.
[0139] In more detail, the active layer 41 formed in a set or
predetermined pattern is disposed on the upper surface of the
buffer layer 31. The active layer 41 may include an inorganic
semiconductor material, such as silicon, an organic semiconductor
material, or an oxide semiconductor material and may be formed by
doping a p- or n-type dopant thereinto.
[0140] A gate insulating layer 32 is formed on the active layer 41.
The gate electrode 42 is formed on the gate insulating layer 32 to
correspond to the active layer 41. The first capacitor electrode 51
is formed in the same layer and of the same material as the gate
electrode 42.
[0141] An interlayer insulating layer 33 is formed to cover the
gate electrode 42, and the source and drain electrodes 43 are
formed on the interlayer insulating layer 33 to contact a set or
predetermined regions of the active layer 41. The second capacitor
electrode 52 is formed in the same layer and of the same material
as the source and drain electrodes 43.
[0142] A passivation layer 34 is formed to cover the source and
drain electrodes 43, and a separate insulating layer may be further
formed on the passivation layer 34 for planarization of the TFT
40.
[0143] The first electrode 61 is formed on the passivation layer
34. The first electrode 61 is formed to electrically connect to any
one of the source and drain electrodes 43. A pixel defining layer
35 is formed to cover the first electrode 61. A set or
predetermined opening 64 is formed in the pixel defining layer 35,
and the intermediate layer 63 having an organic emission layer is
formed in a region limited to the opening 64. The second electrode
62 is formed on the intermediate layer 63.
[0144] An encapsulating layer 70 is formed on the second electrode
62. The encapsulating layer 70 may include an organic material or
an inorganic material or may have a structure in which an organic
material and an inorganic material are alternately stacked.
[0145] The encapsulating layer 70 may be formed using one of the
vapor deposition apparatuses 100, 200, 300, 400, 500 described
above. For example, a desired layer may be formed by passing,
through the vapor deposition apparatus 100, the substrate 30 on
which the second electrode 62 is formed.
[0146] In particular, the encapsulating layer 70 may include an
inorganic layer 71 and an organic layer 72, the inorganic layer 71
may include a plurality of layers 71a, 71b, and 71c, and the
organic layer 72 may include a plurality of layers 72a, 72b, and
72c. The plurality of layers 71a, 71b, and 71c of the inorganic
layer 71 may be formed using one of the vapor deposition
apparatuses 100, 200, 300, 400, 500.
[0147] However, embodiments of the present invention are not
limited thereto. That is, the buffer layer 31, the gate insulating
layer 32, the interlayer insulating layer 33, the passivation layer
34, the pixel defining layer 35, and other insulating layers may be
formed using one of the vapor deposition apparatuses 100, 200, 300,
400, 500.
[0148] In addition, the active layer 41, the gate electrode 42, the
source and drain electrodes 43, the first electrode 61, the
intermediate layer 63, the second electrode 62, and other thin
films may also be formed using the vapor deposition apparatus
100.
[0149] As described above, when the vapor deposition apparatus 100
is used, characteristics of deposition films formed in the organic
light-emitting display apparatus 10 may be improved, resulting in
improving electrical characteristics and image-quality
characteristics of the organic light-emitting display apparatus
10.
[0150] As described above, one or more embodiments of the present
invention provide a vapor deposition apparatus and a method of
manufacturing an organic light-emitting display apparatus, wherein
a deposition process may be efficiently performed and deposition
film characteristics may be easily improved.
[0151] It should be understood that the embodiments herein are
non-limiting examples and should be considered in a descriptive
sense only. Descriptions of features or aspects within each
embodiment should be considered as available for other similar
features or aspects in other embodiments.
[0152] While embodiments of the present invention have been
described with reference to the figures, it will be understood by
those of ordinary skill in the art that various changes in form and
details may be made therein without departing from the spirit and
scope of the present invention as defined by the following claims
and equivalents thereof.
* * * * *