U.S. patent application number 15/035495 was filed with the patent office on 2016-11-03 for driving and control device for a vacuum pump, vacuum pump, and method for producing a control circuit board for a vacuum pump.
The applicant listed for this patent is OERLIKON LEYBOLD VACUUM GMBH. Invention is credited to Ioannis Anastassiadis, Rainer Hoelzer, Markus Liessmann, Robert Stolle.
Application Number | 20160319823 15/035495 |
Document ID | / |
Family ID | 51871049 |
Filed Date | 2016-11-03 |
United States Patent
Application |
20160319823 |
Kind Code |
A1 |
Liessmann; Markus ; et
al. |
November 3, 2016 |
DRIVING AND CONTROL DEVICE FOR A VACUUM PUMP, VACUUM PUMP, AND
METHOD FOR PRODUCING A CONTROL CIRCUIT BOARD FOR A VACUUM PUMP
Abstract
In a separating wall, which separates a vacuum region from a
region under atmospheric pressure, pins are provided as a current
lead-through. The pins are cast in, for example, glass. A plug-in
contact is arranged on a separate carrier plate in order to prevent
force or stresses, which can occur in particular because of
tolerances, from being introduced into the glass. The carrier plate
is connected to the control device by a flexible cable.
Inventors: |
Liessmann; Markus;
(Dormagen, DE) ; Hoelzer; Rainer; (Huerth, DE)
; Stolle; Robert; (Kaarst, DE) ; Anastassiadis;
Ioannis; (Aachen, DE) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
OERLIKON LEYBOLD VACUUM GMBH |
Koln |
|
DE |
|
|
Family ID: |
51871049 |
Appl. No.: |
15/035495 |
Filed: |
November 10, 2014 |
PCT Filed: |
November 10, 2014 |
PCT NO: |
PCT/EP2014/074201 |
371 Date: |
July 21, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
F04D 19/04 20130101;
F04D 29/644 20130101; F04D 25/0693 20130101; F04D 29/522 20130101;
F04C 2240/808 20130101; F04C 2240/803 20130101; F04D 29/083
20130101; F04D 25/068 20130101; F04C 23/008 20130101; F04C 25/02
20130101 |
International
Class: |
F04D 25/06 20060101
F04D025/06; F04D 29/52 20060101 F04D029/52; F04D 29/08 20060101
F04D029/08; F04D 29/64 20060101 F04D029/64 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 11, 2013 |
DE |
10 2013 222 905.4 |
Claims
1. Driving and control device for a vacuum pump having an electric
device arranged in a vacuum region of a vacuum pump, a control
device arranged outside the vacuum region of the vacuum pump, a
separating wall for delimiting the vacuum region and a current
lead-through arranged in the separating wall in a vacuum-tight
manner and connected to the electric device via first current
conductors and to the control device via second current conductors,
wherein the second current conductor has a plug contact directly
connected to the current lead-through, the plug contact, prior to
assembly, being connected to the control device via at least one
connecting web.
2. Driving and control device of claim 1, wherein the control
device has a control circuit board connected to the separating
wall.
3. Driving and control device of claim 2, wherein the plug contact
is fastened on the separating wall.
4. Driving and control device of claim 1, wherein the control
device is fastened to a base plate which preferably is fastened on
the separating wall.
5. Driving and control device of claim 4, wherein the plug contact
is fastened on the base plate.
6. Driving and control device of claim 2, wherein the plug contact
is connected to the control circuit board via a flexible
conductor.
7. Driving and control device of claim 2, wherein the at least one
connecting web of the plug connector is connected to the control
circuit board.
8. Driving and control device of claim 7, wherein the plug contact
is arranged on a carrier plate and the connecting webs are
connected to the carrier plate.
9. Driving and control device of claim 7, wherein the connecting
webs are severed for a tolerance-compensating assembly.
10. Vacuum pump comprising a rotor shaft arranged in a pump
chamber, the shaft carrying at least one rotor element, at least
one stator element arranged in the pump housing and cooperating
with the at least one rotor element, an electric device arranged in
a vacuum region of the vacuum pump, a control device arranged
outside the vacuum region of the vacuum pump, a separating wall for
delimiting the vacuum region, and a current lead-through arranged
in the separating wall in a vacuum-tight manner and connected to
the electric device via first current conductors and to the control
device via second current conductors, wherein the second current
conductor has a plug contact directly connected to the current
lead-through, the plug contact, prior to assembly, being connected
to the control device via at least one connecting web.
11. Method for manufacturing and mounting a control circuit board
for a vacuum pump, the method comprising the following steps:
manufacturing a circuit board carrier having a main carrier and a
carrier plate connected to the main carrier via at least one
connecting web, equipping the main carrier with electronic
components, arranging a plug contact on the carrier plate, and
severing the at least one connecting web for or during
assembly.
12. Method of claim 11, wherein the main carrier and/or the carrier
plate is assembled to a separating wall or a base plate of a
driving and control device for a vacuum pump comprising: an
electric device arranged in a vacuum region of a vacuum pump; a
control device arranged outside the vacuum region of the vacuum
pump; a separating wall for delimiting the vacuum region; and a
current lead-through arranged in the separating wall in a
vacuum-tight manner and connected to the electric device via first
current conductors and to the control device via second current
conductors, wherein the second current conductor has a plug contact
directly connected to the current lead-through, the plug contact,
prior to assembly, being connected to the control device via at
least one connecting web, the plug contact being connected directly
to the current lead-through.
13. Method of claim 11, wherein the plug contact is fastened to the
base plate from an outer side after having been plugged onto the
current lead-through.
Description
BACKGROUND
[0001] 1. Field of the Disclosure The disclosure relates to a
driving and control device for a vacuum pump, a vacuum pump, and a
method for providing a control circuit board for a vacuum pump.
[0002] 2. Discussion of the Back round Art
[0003] Vacuum pumps have at least one rotor element in a pump
housing. With a turbomolecular pump, for example, this is a rotor
with a plurality of rotor blades formed in rotor discs. For
example, the rotor element may also be a substantially hollow
cylindrical rotor of a Holweck stage. The at least one rotor
element is carried by a rotor shaft rotatably supported in the pump
housing. Further, at least one stator element is arranged in the
pump housing, which cooperates with the at least one rotor element.
With a turbomolecular pump, the stator element is formed by a
plurality of disc-shaped stator discs with blades, which are
arranged between adjacent rotor discs. With a Holweck stage, the
stator element is a stationary helical groove. Further, a vacuum
pump has a driving device which typically is an electric motor. In
this respect the motor rotor is conventionally arranged directly on
the rotor shaft. In particular for the realization of compact pump
structures, the motor stator is arranged in a region of the vacuum
pump in which vacuum prevails. As a consequence, a power supply has
to be guided into the vacuum region for example through a
separating wall of the pump housing. For a vacuum-tight current
lead-through it is known to pass posts or pins through the
separating wall for conducting electricity so that an electric
conductor can be connected to the pin on both sides. For a
vacuum-tight sealing, the pin is cast in glass or another suitable
encapsulation mass. With such an encapsulation sufficient tightness
can be ensured even when pressure differences exist between the two
sides of the separating wall.
[0004] The connection of the pin to a control means located outside
the vacuum region is made by a flexible line. In this case,
providing a flexible line is necessary, since the glass
encapsulation of the pin is extremely susceptible to mechanical
tensions. Such tensions may for example occur due to tolerances in
particular between pins and connectors. This would result to
damages to the glass encapsulation upon assembly, if no flexible
line were provided. However, providing such a flexible line means a
substantial effort with respect to manufacture and in particular
with respect to assembly. Plugging a corresponding plug contact
with a flexible line onto the pins of the current lead-through must
be made by hand. Here, great care has to be taken in particular
that the glass encapsulation is not damaged by excessive forces.
Therefore, manufacture and assembly are costly. Further, a rather
large space is required.
[0005] It is an object of the present disclosure to simplify the
connection to a current lead-through.
SUMMARY
[0006] The driving and control device for a vacuum pump of the
present disclosure has a separating wall or a base wall. In
particular, the same is a part of the vacuum pump housing or a part
adapted to be connected to the vacuum pump housing. The separating
wall provides a separation of a vacuum region in the vacuum pump,
in which the driving device such as the electric motor sensors and
other electric components are arranged, and another region. This
region may be a region outside the vacuum pump or another region
situated in the vacuum pump, in which, however, a lower vacuum and
in particular atmospheric pressure prevails. On one side of the
separating wall the electric device is arranged in the vacuum
region, while a control device is arranged on the other side of the
separating wall, i.e. outside the vacuum region, where the control
device may either be a control device arranged directly in a
chamber of the vacuum pump, or an external control device.
[0007] The separating wall has a vacuum-tight current lead-through.
Typically, this is formed by one or a plurality of pins or posts
arranged in the separating wall in a vacuum-tight manner. This may
in particular be effected by casting the pins in the separating
wall, preferably by glass encapsulation. The current lead-through
is connected to the electric device by a first current conductor.
Typically, this is a flexible conductor, where the connecting wires
are usually soldered to the pins. The connection between the
current lead-through and the control device is made via a second
current conductor. According to the disclosure the second current
conductor is configured as a plug contact directly connected to the
current lead-through. Thereby, an exact, low-cost connection can be
made in a simple manner. According to the disclosure the plug
contact is connected to the control device via at least one
connecting web.
[0008] In a development of the disclosure at least a part of the
control device is configured as a control circuit board which may
be connected to the separating wall. For example, the control
circuit board is screwed or otherwise fastened directly on the side
of the separating wall averted from the vacuum region in the vacuum
pump.
[0009] In a particularly preferred embodiment of the disclosure a
base plate or a base element is further provided. The same is
preferably fastened to the separating wall, either directly or
indirectly. In a particularly preferred embodiment the base plate
or the base element serves to fasten the control circuit board.
Further, in another preferred embodiment the plug contact may be
fastened to the base plate or the base element.
[0010] In this preferred embodiment it is preferred for purposes of
assembling that the control circuit board is first fixed to the
base plate or base element in particular by screws. The plug
contact or an element carrying the plug contact is then retained on
the base plate or base element, preferably also by screws, but is
not fixed yet so that the plug contact is still movable. In a next
step the base plate or base element is connected to the separating
wall, with the plug contact being plugged on the current
lead-through. Due to the still loose connection between the plug
connector and the base plate or base element, an induction of
forces or moments into the current lead-through is avoided.
Thereafter, the base plate or base element is fixed to the
separating wall or another part of the pump or the pump housing.
Only after this fixation and thus after the definition of the
position of the control circuit board is the plug contact fixed on
the base plate or base element I particular by tightening the
corresponding screws. Thereby, it is ensured that possible existing
tolerances are compensated before the plug contact is fixed. The
plug contact is fixed only after the tolerances are
compensated.
[0011] In both above embodiments in which the control circuit board
is fixed either on the separating wall or the base plate, it is
preferred that the plug contact is connected to the control circuit
board via a flexible cable that is a part of the second current
conductor. Further, it s preferred, in particular under aspects of
simplifying assembly, that the plug contact is connected to the
control circuit board via at least one connecting web. In
particular this is advantageous in that the positioning of the plug
contact as well as of the other electronic components arranged on
the circuit board can also be made automatically.
[0012] The at least one connecting web is directly connected to the
plug contact or a carrier plate is provided in addition. The
carrier plate is connected to the control circuit board via at
least one connecting web, with the carrier plate carrying the plug
contact. The carrier plate may be a part of a plate-shaped main
carrier of the circuit board. Here, the carrier plate may for
example be made by a corresponding recesses in the circuit board so
that only the at least one connecting web is left. In this
particularly preferred embodiment the carrier plate can be made in
a particularly simple manner and the plug contact may be positioned
in the carrier plate in a simple manner, in particular
automatically.
[0013] In a preferred embodiment, the at least one connecting web
has a certain flexibility. This may be achieved by a relatively
thin design of the at least one connecting web. It is particularly
preferred that the at least one connecting web can be severed. It
is thus possible to cut the at least one connecting web in
particular before the assembly of the control circuit board on the
base plat or the separating wall. Thereby, it becomes possible to
securely fasten the carrier plate that carries the plug contact on
the base plate or the separating wall, e.g. by a screw fastening.
This is also possible for the control circuit board.
[0014] For compensation of tolerances, it is preferred when
assembling the control circuit board on the separating wall that
the control circuit board first rests on the separating wall, while
simultaneously plugging the plug contact on the pins of the current
lead-through. In the next step the plug contact, in particular the
carrier plate of the plug contact, can be fixedly connected to the
separating wall e.g. by the screw connection, with the at least one
connecting web possibly being severed before this connection. In
the next step the control circuit board may be securely fixed to
the separating wall, in particular also by means of a screw
connection.
[0015] For compensation of the tolerances, when mounting the
control circuit board on the base plate, the control circuit board
is first fastened on the base plate. Then the plug contact or the
carrier plate is loosely fastened on the base plate, without a
final fixation. The, the base plate is fixedly connected to the
separating wall, either directly or indirectly, in particular by
screw connections, with the plug contact loosely connected to the
base plate being plugged on before. Here, a severing of the at
least one connecting web is done in particular prior to this step.
Thereafter, the base plate or the base element is fastened on the
separating wall and finally the plug contact or the carrier plate
of the plug contact is fixed on the base plate.
[0016] In both above described variants of fastening the control
circuit board, no forces and tensions are induced into the current
lead-through via the plug contact, provided the connecting webs are
flexible or severed. Occurring tolerances that could lead to
tensions are compensated by the present disclosure design of the
plug contact arranged in particular on the carrier plate, in
combination with severable or flexible connecting webs.
[0017] Further, the disclosure relates to a vacuum pump with a
rotor shaft arranged in a pump housing and in particular supported
in rotatable manner. The shaft carries at least one rotor element.
Further, at least one stator element is arranged in the pump
housing, cooperating with the rotor element. Further, according to
the disclosure and corresponding to the driving and control device,
a separating wall is provided for defining a vacuum region. The
separating wall also comprises a current lead-through with e.g.
pins or the like. The drive device and/or other electric devices
are arranged on one side of the separating wall which in particular
is a part of the pump housing, while the control device is arranged
on the other side. Here, the electric device is arranged in a
vacuum region of the pump, while the control device is arranged in
a region with a lower vacuum, in particular atmospheric pressure.
According to the disclosure, as described above with reference to
the driving and control device, a first current conductor is
connected to the driving device and a second current conductor is
connected to the control device, the second current conductor
having a plug contact directly connected to the current
lead-through. The vacuum pump if the present disclosure is
preferably developed as described above with reference to the
different embodiments of the driving and control device. The
individual above described features of the driving and control
device thus also represent preferred features of the vacuum pump of
the disclosure.
[0018] The disclosure further relates to a method for manufacturing
and mounting a control circuit board for a vacuum pump.
[0019] First, a circuit board carrier with a main carrier and a
carrier plate is made. The main carrier of the circuit board
carrier serves to receive electronic components and the like. The
carrier plate serves to receive plug contacts and, according to the
disclosure, is connected to the main carrier by at least one
connecting web.
[0020] After manufacture of the circuit board carrier, the main
carrier is equipped with electronic components, which is done, in a
preferred embodiment, in an automatic or automated manner.
Thereafter, a plug contact is arranged on the carrier plate which
may preferably also be done in an automatic or automated manner.
According to the disclosure the at least one connecting web is
severed for or during assembly. Thereby, the tolerance compensation
described above with reference to the driving and control device of
the present disclosure and to the vacuum pump of the present
disclosure can be achieved in a simple manner.
[0021] For the manufacture of the circuit board carrier it is
preferred for example to make the same from an integral flat
carrier material that is generally used for electronic circuit
boards, where the carrier plate receiving the plug contact is
manufactured such that recesses are formed. Here, the recesses are
formed such that at least one connecting web is left to hold the
carrier plate. The recesses may be made by milling, cutting or the
like.
[0022] The control circuit board, i.e. the main carrier and/or the
carrier plate, is preferably mounted as described above on the
separating wall that delimits a vacuum region or on the base plate.
Here, as described above with reference to the vacuum pump, the
plug contact is preferably plugged directly onto the current
lead-through or the corresponding pins.
[0023] The method is developed in an advantageous manner as
described above with reference to the different embodiments of the
driving and control device, as well as to the vacuum pump.
[0024] The disclosure will be described in detail with reference to
preferred embodiments and to the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0025] In the Figures:
[0026] FIG. 1 is a schematic sectional view of a driving and
control device mounted on a base plate,
[0027] FIG. 2 is a schematic top plan view of a control circuit
board and a plug contact,
[0028] FIG. 3 is a schematic sectional view of a driving and
control device mounted on a separating wall,
[0029] FIG. 4 is a schematic sectional view of a further embodiment
of a control circuit board and a plug contact,
[0030] FIG. 5 is a schematic sectional view of the control circuit
board and the plug contact illustrated in FIG. 4, and
[0031] FIG. 6 is a schematic sectional view of the control circuit
board illustrated in FIG. 5, with the plug contact in place.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT
[0032] In the first embodiment illustrated (FIGS. 1 and 2), a
control device has a plurality of only schematically illustrated
electronic components 10 arranged on a circuit board 12. The
circuit board 12 is connected for example to a frequency converter,
an additional control device or the like. A schematically
illustrated driving device 14, such as an electric motor, is
provided to drive the vacuum pump. Here, the electric motor is
typically connected directly to the rotor shaft of the vacuum pump
to be driven. Instead of the electric motor, this may be a
temperature sensor, rotational speed sensor and/or another
electronic device. With respect to a separating wall 16 of the
vacuum pump, the electronic device is arranged in a region 18 in
which a vacuum prevails. The separating wall separates the vacuum
region 18 in particular tightly from a region 20 in which a lower
vacuum or in particular atmospheric pressure prevails. The device
14 is connected to pins 24 via current conductors 22. The pins 24
penetrate the separating wall and thus represent a current
lead-through. For sealing purposes, the pins 24 are cast for
example in glass 26.
[0033] In the region 20 where in particular atmospheric pressure
prevails, the pins 24 are connected to a plug contact 28. The plug
contact is arranged on a carrier plate 30, for example glued
thereon. For an electric connection, the carrier plate 30 is
connected to the control circuit board 12 via a flexible cable
which in the embodiment illustrated is a ribbon cable 32. In the
embodiment illustrated, the carrier plate 30 is fixed to a base
plate 25 by means of a screw 34. Since, after assembly, the
connection to the control circuit board 12 is effected only via the
flexible ribbon cable 32 in the embodiment illustrated, the control
circuit board 12 induces no forces into the carrier plate 30 and
thus no forces are induced to the pins 24. It is thereby ensured
that the encapsulation 26 is not damaged by corresponding forces or
tensions. The base plate 35 is connected to the separating wall 16
by screws 37.
[0034] In this preferred embodiment of the disclosure, for
mounting, the control circuit board 12 is first fixed on the base
plate 35 using the screws 38. Thereafter, the screw 34 is slightly
screwed into the plug contact 28, while the plug contact 28 is not
fixed yet so that it is still movable. In the next assembly step,
the base plate 35 is set or plugged on the separating wall 16,
where, for example, centering protrusions, centering pins or the
like may be provided. Here, the plug contact 28 is plugged onto the
pins 24. Since the plug contact 28 is not fixed yet, plugging may
be made without corresponding forces or tensions being induced into
the encapsulation 26, which might damage the encapsulation. With
this fixation, it is still possible to slightly displace the plug
contact 28. After fixation of the base plate 35, the plug contact
28 may also be fixed using the screw 34.
[0035] For manufacturing the control circuit board 12, the same has
a circuit board carrier 42 (FIG. 2). The electronic components 10,
as well as conductor paths etc. are arranged thereon. For being
equipped, the carrier plate 30 of the embodiment illustrated is
connected to the circuit board carrier 42 via four connecting webs
44. Thereby, it is possible to also position the plug 28 in an
automatic or automated manner. Before or during assembly on the
base plate 35, the connecting webs 44 are severed.
[0036] In another preferred embodiment (FIG. 3) similar or
identical components are identified by the same reference
numerals.
[0037] The essential difference of this embodiment is that the
control circuit board 12 and the plug contact 18 are not arranged
on a base plate 35 (FIG. 1) but on the separating wall 16. The
control circuit plate 12 is connected to the carrier plate 30 via
webs 44, as illustrated in FIG. 2. Further, a ribbon cable 32 is
provided for electric contacting purposes. For assembly, the webs
44 are severed in order to prevent the transmission of forces from
the carrier plate 30 and thus into the encapsulation mass 26.
[0038] For assembly, the control device 12 is first fixed on the
separating wall 16 by means of screws 33. At the same time, the
plug contact 28 is plugged onto the pins 24 without being fixed
yet. The plug contact 28 is fixed only after the control circuit
board 12 is fixed on the separating wall 16 by means of the screws
33. Then, the plug contact 28 is fixed by means of screws 29.
[0039] FIGS. 4-6 illustrate another preferred embodiment of a
control circuit board, as well as of a plug contact. This is an
independent disclosure which, as discussed above with reference to
the two embodiments, may possibly be connected to a separating wall
16 or a base plate 35. The control circuit board 46 illustrated in
FIGS. 4-6 is also equipped with a plurality of electronic
components 10. A carrier plate 48 is arranged outside the control
circuit board 46. Possible, connecting webs 52 may be provided for
equipping a circuit board carrier 50, as well as the carrier plate
48, the webs then being severed for assembly. However, these
connecting webs 52 may also be omitted. Conductors 54 which may
also be designed as ribbon cables connect the control circuit board
46 to the carrier plate 48 or a plug contact 28 arranged on the
carrier plate 48. Possibly, the carrier plate or the circuit board
48 may be omitted. In this embodiment, the conductors 54 or a
corresponding ribbon cable is directly connected to the plug
contact 28.
[0040] In particular, if connecting webs 52 are provided, an
automatic equipping of the circuit board 46, as well as of the
carrier plate 48 can be performed. For assembly, the webs 52, if
present, are severed and the carrier plate 48, together with the
plug contact 28, is moved from the position illustrated in FIG. 5
into the position illustrated in FIG. 6. For this purpose, the
circuit board carrier 50 is provided with passage bores 56.
Substantially cylindrical projections 58 of the plug contact 54 are
inserted through the bores 56 for assembly, the diameter of the
bores 56 being larger than that of the cylindrical protrusions 58.
For assembly, the plug contact 28 may then be fixed on a separating
wall 16 or a base plate 35 by means of screws, as described for the
above embodiments. This may be done with two screws 60. Upon
assembly, the plug contact 28 is again plugged onto the pins 24,
where an induction of forces or tensions into the encapsulation 26
is avoided due to the mechanical separation of the plug contact 28
and the control circuit board 46.
* * * * *