U.S. patent application number 14/945431 was filed with the patent office on 2016-05-26 for three-dimensional laser processing apparatus and positioning error correction method.
The applicant listed for this patent is Industrial Technology Research Institute. Invention is credited to Min-Kai Lee, Yu-Chung Lin, Shao-Chuan Lu, Jie-Ting Tseng.
Application Number | 20160147214 14/945431 |
Document ID | / |
Family ID | 54557240 |
Filed Date | 2016-05-26 |
United States Patent
Application |
20160147214 |
Kind Code |
A1 |
Lu; Shao-Chuan ; et
al. |
May 26, 2016 |
THREE-DIMENSIONAL LASER PROCESSING APPARATUS AND POSITIONING ERROR
CORRECTION METHOD
Abstract
A three-dimension laser processing apparatus including a laser
source, a zoom lens set, a scanning mirror module, a visual module
unit and a control unit is provided. The laser source provides a
laser beam. The zoom lens set and the scanning mirror module are
both located on the transmitting path of the laser beam. The visual
module unit has a visible area. The control unit is electrically
connected with and adjusts the zoom lens set and the scanning
mirror module to make the laser beam focused on a plurality of
reference surfaces in a three-dimension working space and make a
plurality of positions of an image in the three-dimension working
space focused on a center of the visible area correspondingly
through the zoom lens set and an image lens set of the visual
module unit. Besides, a positioning error correction method is
provided.
Inventors: |
Lu; Shao-Chuan; (Changhua
County, TW) ; Lin; Yu-Chung; (Tainan City, TW)
; Tseng; Jie-Ting; (Tainan City, TW) ; Lee;
Min-Kai; (Tainan City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Industrial Technology Research Institute |
Hsinchu |
|
TW |
|
|
Family ID: |
54557240 |
Appl. No.: |
14/945431 |
Filed: |
November 19, 2015 |
Current U.S.
Class: |
700/166 |
Current CPC
Class: |
B23K 26/04 20130101;
G05B 2219/37304 20130101; G02B 26/101 20130101; B23K 26/082
20151001; G02B 26/0816 20130101; G05B 19/19 20130101; G02B 7/102
20130101; B23K 26/042 20151001 |
International
Class: |
G05B 19/19 20060101
G05B019/19; B23K 26/042 20060101 B23K026/042 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 20, 2014 |
TW |
103140242 |
Claims
1. A positioning error correction method, suitable for correcting a
positioning error of a three-dimensional laser processing
apparatus, the method comprising: (a) making a laser beam focused
on a three-dimensional working area through a zoom lens set and a
scanning mirror module sequentially, wherein the three-dimensional
working area has a plurality of reference planes, and the reference
planes are perpendicular to a first direction; (b) adjusting a
first parameter of the zoom lens set, such that the laser beam is
correspondingly focused on one of the reference planes; (c)
recording the first parameter to create a laser offset compensation
table; (d) providing a correction test piece and moving the
correction test piece to one of the reference planes, wherein the
correction test piece has a correction pattern; (e) loading the
laser offset compensation table and correspondingly adjusting a
plurality of second parameters of the scanning mirror module, such
that a plurality of correction points of the correction pattern are
separately and correspondingly focused and imaged on a center of a
visible area of an image detector through the zoom lens set and an
imaging lens set; (f) recording the second parameters to create a
visual distortion compensation table; (g) providing a processing
test piece and disposing the processing test piece on one of the
reference planes; (h) loading the laser offset compensation table
and reading the first parameter corresponding to the reference
plane, so as to process and form an alignment pattern; (i) loading
the visual distortion compensation table and correspondingly
adjusting a plurality of third parameters of the scanning mirror
module, such that a plurality of alignment points of the alignment
pattern are separately and correspondingly focused and imaged on
the center of the visible area of the image detector through the
zoom lens set and the imaging lens set; and (j) recording the third
parameters to create a laser distortion compensation table.
2. The positioning error correction method as claimed in claim 1,
wherein performing the step (e) further comprises: making one of
the correction points of the correction pattern focused and imaged
in the visible area; determining whether the correction point of
the correction pattern is imaged on the center of the visible area,
if not, adjusting the scanning mirror module, and if yes, recording
the second parameter of the scanning mirror module corresponding to
the correction point.
3. The positioning error correction method as claimed in claim 1,
wherein performing the step (i) further comprises: making one of
the alignment points of the alignment pattern focused and imaged in
the visible area; detemiining whether the alignment point of the
alignment pattern is imaged on the center of the visible area, if
not, adjusting the scanning mirror module, if yes, recording the
third parameter of the lens scanning module corresponding to the
alignment point.
4. The positioning error correction method as claimed in claim 1,
wherein performing the step (c) further comprises: repetitively
performing the step (b) a plurality of times, wherein the reference
planes in the repetitively performed step (b) are different, so as
to record the first parameters respectively corresponding to the
reference planes and collect the first parameters to the laser
offset compensation table.
5. The positioning error correction method as claimed in claim 1,
wherein performing the step (f) further comprises: repetitively
performing step (e) a plurality of times, wherein the reference
planes in the repetitively performed step (e) are different from
each other, so as to record the second parameters respectively
corresponding to the reference planes and collect the second
parameters to the visual distortion compensation table.
6. The positioning error correction method as claimed in claim 1,
wherein performing the step (j) further comprises: repetitively
performing the steps (g), (h), and (i) a plurality of times, and
the reference planes in the repetitively performed step (g) are
different from each other, so as to record the third parameters
respectively corresponding to the reference planes and collect the
third parameters to the laser distortion compensation table.
7. The positioning error correction method as claimed in claim 1,
further comprising: providing a movable platform, wherein the
movable platform is located in the three-dimensional working area,
and a surface of the movable platform is movable along the first
direction.
8. The positioning error correction method as claimed in claim 1,
further comprising: sequentially providing a plurality of platforms
having different standard heights, wherein the platfomis are
located in the three-dimensional working area, and surfaces of the
platforms respectively correspond to positions of the reference
planes.
9. The positioning error correction method as claimed in claim 1,
wherein the correction pattern is cross-shaped, circular, or
polygonal.
10. The positioning error correction method as claimed in claim 1,
wherein the alignment pattern is cross-shaped, circular, or
polygonal.
11. The positioning error correction method as claimed in claim 1,
wherein the zoom lens set comprises at least two lenses, a focal
length of one of the lenses is positive, and a focal length of the
other of the lenses is negative.
12. The positioning error correction method as claimed in claim 11,
wherein the zoom lens set has a lens distance, and a length of the
lens distance is a sum of the focal lengths of the at least two
lenses.
13. The positioning error correction method as claimed in claim 11,
wherein the zoom lens set meets 0.1.ltoreq.|f2/f1|.ltoreq.10,
wherein f1 is the focal length of one of the lenses, and f2 is the
focal length of the other of the lenses.
14. The positioning error correction method as claimed in claim 1,
wherein the first parameter of the zoom lens set is a focal length
parameter of the zoom lens set.
15. The positioning error correction method as claimed in claim 1,
wherein the scanning mirror module comprises a focusing object lens
set and two reflective mirrors, and the second parameters and the
third parameters of the scanning mirror module are angle parameters
or position parameters of the reflective mirrors.
16. A three-dimensional laser processing apparatus, comprising: a
laser source, providing a laser beam; a zoom lens set, located on a
transmitting path of the laser beam; a scanning mirror module,
located on the transmitting path of the laser beam, wherein the
laser beam is focused on a three-dimensional working area through
the zoom lens set and the scanning mirror module, the
three-dimensional working area has a plurality of reference planes,
and the reference planes are perpendicular to a first direction; a
visual module unit, comprising an imaging lens set and an image
detector, wherein the imaging lens set is located between the
three-dimensional working area and the image detector, and the
image detector has a visible area; and a control unit, electrically
connected to the zoom lens set and the scanning mirror module,
wherein the control unit adjusts the zoom lens set and the scanning
mirror module, such that the laser beam is correspondingly focused
on the reference planes, and a plurality of positions of an image
in the three-dimensional working area are correspondingly focused
and imaged on a center of the visible area through the zoom lens
set and the imaging lens set.
17. The three-dimensional laser processing apparatus as claimed in
claim 16, wherein the zoom lens set comprises at least two lenses,
a focal length of one of the lenses is positive, and a focal length
of the other of the lenses is negative.
18. The three-dimensional laser processing apparatus as claimed in
claim 17, wherein the zoom lens set has a lens distance, and a
length of the lens distance is a sum of the focal lengths of the at
least two lenses.
19. The three-dimensional laser processing apparatus as claimed in
claim 17, wherein the zoom lens set meets
0.1.ltoreq.|f2/f1|.ltoreq.10, wherein f1 is the focal length of one
of the lenses, and f2 is the focal length of the other of the
lenses.
20. The three-dimensional laser processing apparatus as claimed in
claim 16, further comprising a movable platfoim located in the
three-dimensional working area, wherein a surface of the movable
platform is movable along the first direction, such that the
surface is moved to positions of the reference planes.
21. The three-dimensional laser processing apparatus as claimed in
claim 16, wherein the control unit adjusts the zoom lens set by
adjusting a focal length parameter of the zoom lens set.
22. The three-dimensional laser processing apparatus as claimed in
claim 16, wherein the scanning mirror module comprises: a focusing
object lens set; and two reflective mirrors, wherein the control
unit adjusts the scanning mirror module by adjusting angles or
positions of the reflective mirrors.
23. The three-dimensional laser processing apparatus as claimed in
claim 16, further comprising: a light dividing unit, located on the
transmitting path of the laser beam, wherein the laser beam is
transmitted to the zoom lens set by the light dividing unit.
24. The three-dimensional laser processing apparatus as claimed in
claim 16, wherein the zoom lens set and the visual module unit are
in a serially connected structure.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims the priority benefit of Taiwan
application serial no. 103140242, filed on Nov. 20, 2014. The
entirety of the above-mentioned patent application is hereby
incorporated by reference herein and made a part of this
specification.
TECHNICAL FIELD
[0002] The technical field relates to a three-dimensional laser
processing apparatus and a positioning error correction method.
BACKGROUND
[0003] In many processes of processing fine materials, the
conventional processing technologies can no longer satisfy the
needs. Thus, the laser micro-processing technologies need to be
adopted to cope with the needs of the processes. In the fine
processing processes, processing with visual positioning may yield
a highly precise product of processing.
[0004] In general, a laser processing system with a scanning mirror
is controlled by using a reflective mirror to change an incident
angle of a laser beam, so as to control the laser beam to a
predetermined processing position of a workpiece. Thus, if a mirror
system is adopted to process a workpiece having a three-dimensional
surface, a two-dimensional mirror processing distortion and a
three-dimensional zooming offset may arise, making laser processing
defocused and the processing dimensions imprecise.
[0005] Besides, when the coaxial visual technology is adopted, an
object being processed may be imaged in a charge-coupled device
(CCD) for visual positioning. However, since the laser beam and
visible light have different bands, making the optical axes of the
laser beam and the visible light different, thus resulting in an
error in the optical path length or other potential errors. These
errors may cause a visual error of the image in the charge-coupled
device and make the positioning less precise.
[0006] Thus, how to use laser to precisely process on a
three-dimensional surface and correct the positioning error of a
laser visual module are certainly issues that researchers should
work on.
SUMMARY
[0007] A three-dimensional laser processing apparatus according to
an embodiment of the disclosure includes a laser source, a zoom
lens set, a scanning mirror module, a visual module unit, and a
control unit. The laser source provides a laser beam. The zoom lens
set is located on a transmitting path of the laser beam. The
scanning mirror module is located on the transmitting path of the
laser beam. The laser beam is focused on a three-dimensional
working area through the zoom lens set and the scanning mirror
module. The three-dimensional working area has a plurality of
reference planes, and the reference planes are perpendicular to a
first direction. The visual module unit includes an imaging lens
set and an image detector. The imaging lens set is located between
the three-dimensional working area and the image detector, and the
image detector has a visible area. The control unit is electrically
connected to the zoom lens set and the scanning mirror module. The
control unit adjusts the zoom lens set and the scanning mirror
module, such that the laser beam is correspondingly focused on the
reference planes, and a plurality of positions of an image in the
three-dimensional working area are correspondingly focused and
imaged on a center of the visible area through the zoom lens set
and the imaging lens set.
[0008] A positioning error correction method according to an
embodiment of the disclosure is suitable for correcting a plurality
of positioning errors of a three-dimensional laser processing
apparatus. The method includes following steps. (a) A laser beam is
made focused on a three-dimensional working area through a zoom
lens set and a scanning mirror module sequentially. The
three-dimensional working area has a plurality of reference planes,
and the reference planes are perpendicular to a first direction.
(b) A first parameter of the zoom lens set is adjusted, such that
the laser beam is correspondingly focused on one of the reference
planes. (c) The first parameter is recorded to create a laser
offset compensation table. (d) A correction test piece is provided.
In addition, the correction test piece is moved to one of the
reference planes, and the correction test piece has a correction
pattern. (e) The laser offset compensation table is loaded and a
plurality of second parameters of the scanning mirror module are
correspondingly adjusted, such that a plurality of correction
points of the correction pattern are separately and correspondingly
focused and imaged on a center of a visible area of an image
detector through the zoom lens set and an imaging lens set. (f) The
second parameters are recorded to create a visual distortion
compensation table. (g) A processing test piece is provided. The
processing test piece is disposed on one of the reference planes.
(h) The laser offset compensation table is loaded and the first
parameter corresponding to the reference plane is read, so as to
process and form an alignment pattern. (i) The visual distortion
compensation table is loaded and a plurality of third parameters of
the scanning mirror module are correspondingly adjusted, such that
a plurality of alignment points of the alignment pattern are
separately and correspondingly focused and imaged on the center of
the visible area of the image detector through the zoom lens set
and the imaging lens set; and (j) The third parameters are recorded
to create a laser distortion compensation table.
[0009] Several exemplary embodiments accompanied with figures are
described in detail below to further describe the disclosure in
details.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] The accompanying drawings are included to provide further
understanding, and are incorporated in and constitute a part of
this specification. The drawings illustrate exemplary embodiments
and, together with the description, serve to explain the principles
of the disclosure.
[0011] FIG. 1 is a schematic view illustrating a framework of a
three-dimensional laser processing apparatus according to an
embodiment of the disclosure.
[0012] FIG. 2 is a schematic view illustrating the scanning mirror
module of FIG. 1.
[0013] FIG. 3 is a flowchart illustrating a positioning error
correction method according to an embodiment of the disclosure.
[0014] FIG. 4 is a schematic side view illustrating the
three-dimensional working area of FIG. 1.
[0015] FIG. 5 is a flowchart illustrating a part of the positioning
error correction method of FIG. 2.
[0016] FIG. 6A is a schematic front view illustrating the
correction test piece of FIG. 5.
[0017] FIG. 6B is a schematic front view illustrating an image of
the sub-correction pattern of FIG. 6A in a visible area.
[0018] FIG. 6C is a schematic view illustrating a relative movement
path of the correction pattern of FIG. 6A between the working area
and the visible area.
[0019] FIGS. 6D and 6E are schematic front views illustrating the
image of the sub-correction pattern of FIG. 6A in the visible
area.
[0020] FIG. 7 is a flowchart illustrating a part of the positioning
error correction method of FIG. 2.
[0021] FIG. 8 is a schematic front view illustrating the alignment
pattern of FIG. 7.
[0022] FIGS. 9A to 9C are schematic side view illustrating another
three-dimensional working area of FIG. 1.
DETAILED DESCRIPTION OF DISCLOSED EMBODIMENTS
[0023] FIG. 1 is a schematic view illustrating a framework of a
three-dimensional laser processing apparatus according to an
embodiment of the disclosure. Referring to FIG. 1, a
three-dimensional laser processing apparatus 100 of this embodiment
includes a laser source 110, a light dividing unit 120, a zoom lens
set 130, a scanning mirror module 140, a visual module unit 150,
and a control unit 160. Specifically, the laser source 110 is
configured to provide a laser beam 60. The light dividing unit 120
is located on a transmitting path of the laser beam 60, and the
laser beam 60 may be transmitted to the zoom lens set 130 by the
light dividing unit 120.
[0024] Specifically, as shown in FIG. 1, in this embodiment, the
zoom lens set 130 includes at least two lenses 131 and 133. A focal
length of the lens 131 is positive, while a focal length of the
lens 133 is negative. Alternatively, the focal length of the lens
133 is positive, and the focal length of the lens 131 is negative.
More specifically, in this embodiment, the zoom lens set 130 has a
lens distance D, and a length of the lens distance D is a sum of
the focal lengths of the at least two lenses 131 and 133.
Furthermore, in this embodiment, the zoom lens set 130 meets
0.1.ltoreq.|f2/f1|.ltoreq.10, wherein f1 is the focal length of the
lens 131, and f2 is the focal length of the lens 133. Accordingly,
the zoom lens set 130 may adjust an effective focal length of the
zoom lens set 130 by changing the distance between the lenses 131
and 133, so as to provide a zooming effect.
[0025] FIG. 2 is a schematic view illustrating the scanning mirror
module of FIG. 1. As shown in FIG. 2, in this embodiment, the
scanning minor module 140 has a focusing lens set 141 and two
reflective minors 143 and 145. More specifically, as shown in FIG.
2, the reflective mirrors 143 and 145 of the scanning mirror module
140 are respectively connected to two rotary mechanisms 142 and
144. The rotary mechanisms 142 and 144 may rotate the reflective
mirrors 143 and 145, so as to reflect the laser beam 60. For
example, the rotary mechanisms 142 and 144 are galvanometer motors.
However, the disclosure is not limited thereto. Specifically, as
shown in FIGS. 1 and 2, the zoom lens set 130 and the scanning
mirror module 140 are located on the transmitting path of the laser
beam 60. When the laser beam 60 is transmitted to the scanning
minor module 140 through the zoom lens set 130, the laser beam 60
may be reflected by the reflective minors 143 and 145 of the
scanning mirror module 140 and then be deflected to be focused on a
three-dimensional working area WA.
[0026] More specifically, as shown in FIGS. 1 and 2, in this
embodiment, the three-dimensional working area WA has a plurality
of reference planes RF1, RF2, and RF3. In addition, the reference
planes RF1, RF2, and RF3 are perpendicular to a first direction D1.
Besides, in this embodiment, pitches H between the reference planes
RF1, RF2, and RF3 are equal to each other. More specifically, in
this embodiment, since the focal length of the zoom lens set 130 is
variable, the laser beam 60 may be focused on different positions
of different reference planes RF1, RF2, and RF3 in the
three-dimensional working area WA through the zoom lens set 130 and
the scanning mirror module 140, so as to perform a
three-dimensional surface processing to a workpiece. In this
embodiment, even though the positions and the number of the
reference planes RF1, RF2, and RF3 are described as the reference
planes RF1, RF2, and RF3 having the same pitch H, for example, the
disclosure does not intend to limit the number of the reference
planes RF1, RF2, and RF3, nor the length of the pitch H between the
reference planes RF1, RF2, and RF3. Namely, in other viable
embodiments, the number of the reference planes may be different,
and the pitches between the respective reference planes may be
identical to or different from each other. The disclosure is not
limited thereto.
[0027] Besides, in this embodiment, the visual module unit 150
includes an imaging lens set 151 and an image detector 153. In
addition, the imaging lens set 151 is located between the
three-dimensional working area WA and the image detector 153, and
the image detector 153 has a visible area AA. Specifically, as
shown in FIG. 1, visible light at at least a portion of a waveband
of an image in the three-dimensional working area WA is transmitted
to an image sensing unit through the zoom lens set 130, and the
image is formed in the visible area AA of the image sensing unit.
In this way, since an observation optical axis and a laser optical
axis are coaxial, the center of the image shown in the image
sensing unit is a focal point of the laser beam 60.
[0028] More specifically, as shown in FIG. 1, the control unit 160
is electrically connected to the zoom lens set 130 and the scanning
mirror module 140, and may adjust the zoom lens set 130 and the
scanning mirror module 140. More specifically, the control unit 160
may adjust a parameter of the zoom lens set 130 and a parameter of
the scanning mirror module 140. Here, the parameter of the zoom
lens set 130 is a focal length parameter of the zoom lens set 130,
and the parameter of the scanning mirror module 140 is an angle
parameter or a position parameter of the reflective mirrors 143 and
145. Furthermore, in this embodiment, since the zoom lens set 130
and the visual module unit 150 are in a serially connected
structure, when the parameter of the zoom lens set 130 is adjusted,
the focal point of the laser beam 60 on the reference planes RF1,
RF2, and RF3 and an imaging focal point in the visible area AA are
adjusted as well. Accordingly, the laser beam 60 is correspondingly
focused on the reference planes RF1, RF2, and RF3 through the zoom
lens set 130 and the scanning mirror module 140. Moreover, a
plurality of positions of an image in the three-dimensional working
area WA may also be correspondingly focused and imaged on the
center of the visible area AA through the zoom lens set 130 and the
imaging lens set 151. Accordingly, the three-dimensional laser
processing apparatus 100 is capable of providing an effect of "what
you see is what you hit" and effectively reducing a positioning
error and an image calculation error.
[0029] In the following, a positioning error correction method is
described in detail with reference to FIG. 3.
[0030] FIG. 3 is a flowchart illustrating a positioning error
correction method according to an embodiment of the disclosure.
Referring to FIG. 3, in this embodiment, the positioning error
correction method may be performed by the three-dimensional laser
processing apparatus 100 shown in FIG. 1. However, the disclosure
is not limited thereto. Besides, the positioning error correction
method may also be performed by a computer program product
(including programming commands for performing the positioning
error correction method) loaded into the three-dimensional laser
processing apparatus 100 and relevant hardware. However, the
disclosure is not limited to, either. The positioning error
correction method of this embodiment may correct a plurality of
positioning errors of the three-dimensional laser processing
apparatus 100. In the following, a method including Steps S110,
S120, and S130 is described in detail with reference to FIG. 4.
[0031] FIG. 4 is a schematic side view illustrating the
three-dimensional working area of FIG. 1. First of all, referring
to FIGS. 1 to 4, Step S110 is performed to focus the laser beam 60
on the three-dimensional working area WA through the zoom lens set
130 and the scanning mirror module 140 sequentially. For example,
as shown in FIG. 4, making the laser beam 60 correspondingly
focused on the three-dimensional working area WA in this embodiment
may include providing a moving platform 170 located in the
three-dimensional working area WA. A surface S of the movable
platform 170 is movable to a position of the reference plane RF1
along the first direction D1. Then, Step S120 is performed to
adjust a first parameter of the zoom lens set 130, such that the
laser beam 60 is correspondingly focused on the reference plane
RF1, i.e., focused on the surface S of the movable platform 170.
However, the disclosure is not limited thereto.
[0032] Then, Step S130 is performed to record the first parameters
when the laser beam 60 is correspondingly focused on the reference
planes RF1, RF2, and RF3, so as to create a laser offset
compensation table. Besides, in this embodiment, Step S120 may be
repetitively performed a plurality of times, and the reference
planes RF1, RF2, and RF3 in the repetitively performed Step S120
are different from each other, so as to record the respective first
parameters corresponding to the respective reference planes RF1,
RF2, and RF3 and collect the first parameters in the laser offset
compensation table for further references.
[0033] In the following, a method including Steps S210, S220, and
S230 is described in detail with reference to FIGS. 5 to 6E.
[0034] FIG. 5 is a flowchart illustrating a part of the positioning
error correction method of FIG. 2. FIG. 6A is a schematic front
view illustrating the correction test piece of FIG. 5. Referring to
FIGS. 2 and 5, after Steps S110, S120, and S130 are performed to
obtain the laser offset compensation table of the three-dimensional
working area WA, Step S210 may be performed to provide a correction
test piece AS. More specifically, in this embodiment, the
correction test piece AS may be manufactured by using an optical
glass, for example.
[0035] Also, as shown in FIG. 6A, the correction test piece AS has
an accurate correction pattern AP, and the correction pattern AP
has a plurality of correction points A0, A1, A2, A3, A4, A5, A6,
A7, and A8. Specifically, in this embodiment, the correction points
A0, A1, A2, A3, A4, A5, A6, A7, and A8 are respectively located in
a plurality of sub-correction patterns AP0, AP1, AP2, AP3, AP4,
AP5, AP6, AP7, and AP8 of the correction pattern AP. The
sub-correction patterns AP0, AP1, AP2, AP3, AP4, AP5, AP6, AP7, and
AP8 are symmetrically distributed on the correction test piece AS.
In this embodiment, the correction points A0, Al, A2, A3, A4, A5,
A6, A7, and A8 are respectively at centers of the sub-correction
patterns AP0, AP1, AP2, AP3, AP4, AP5, AP6, AP7, and AP8. However,
the disclosure is not limited thereto. People having ordinary
skills in the art may design the correction points A0, A1, A2, A3,
A4, A5, A6, A7, and A8 based on practical needs, and thus no
further details in this regard is described in the following.
[0036] Besides, in this embodiment, the sub-correction patterns
AP0, AP1, AP2, AP3, AP4, AP5, AP6, AP7, and AP8 are cross-shaped.
However, the disclosure is not limited thereto. In other
embodiments, the sub-correction patterns AP0, AP1, AP2, AP3, AP4,
AP5, AP6, AP7, and AP8 may also be circular, polygonal, or other
shapes that are easy to identify, and the sub-correction patterns
AP0, AP1, AP2, AP3, AP4, AP5, AP6, AP7, and AP8 may be the same or
different. Thus, the disclosure is not limited to the above.
[0037] Besides, Step S210 further includes moving the correction
test piece AS to the reference plane RF1. For example, in this
embodiment, moving the correction test piece AS to the reference
plane RF1 may include disposing the correction test piece AS on the
surface S of the movable platform 170, such that the correction
test piece AS becomes movable to the positions of the reference
planes RF1, RF2, and RF3. More specifically, as shown in FIG. 6A,
in this embodiment, moving the correction test piece AS to the
reference plane RF means that a center C of the correction pattern
AP is located at a position 00 of the reference plane RF1 of the
three-dimensional working area WA. Also, the correction test piece
AS is adjusted, so that at least one correction points, such as the
correction point A0, A1, A2, A3, A4, A5, A6, A7, or A8, coincides
with at least one position O1, O2, O3, O4, O5, O6, O7, or O8 of the
reference plane RF1. In this embodiment, the correction points A0,
A1, A2, A3, A4, A5, A6, A7, and A8 respectively coincide with the
positions O1, O2, O3, O4, O5, O6, O7, and O8 of the reference plane
RF1. However, the disclosure is not limited thereto.
[0038] Then, Step S220 is performed to load the laser offset
compensation table, read the first parameter when the laser beam 60
is correspondingly focused on the reference plane RF1, and
correspondingly adjust a plurality of second parameters of the
scanning mirror module 140, so that the correction points of the
correction pattern AP are separately and correspondingly focused
and imaged on the center of the visible area AA of the image
detector 153 through the zoom lens set 130 and the imaging lens set
151. More specifically, as shown in FIG. 5, Step S220 further
includes a plurality of Sub-steps S221, S222, S223, S224, and S225.
In the following, a method including Sub-steps S221, S222, S223,
S224, and S225 of Step S220 is described in detail with reference
to FIGS. 6B to 6E.
[0039] FIG. 6B is a schematic front view illustrating an image of
the sub-correction pattern of FIG. 6A in a visible area. First of
all, Sub-step S221 is performed to make the center of the
correction pattern AP focused in the visible area AA. More
specifically, as shown in FIG. 6B, the center C of the correction
pattern AP may be correspondingly focused through the zoom lens set
130 and the imaging lens set 151 to form an image point CI on the
visible area AA of the image detector 153. Then, Sub-step S222 is
performed to determine whether the center of the correction pattern
AP is imaged on a center AO of the visible area AA. Namely, whether
the image point CI formed at the center C of the correction pattern
AP is located at the center AO of the visible area AA is
determined. If not, the second parameters of the scanning mirror
module 140 are adjusted.
[0040] Specifically, in this embodiment, the second parameters of
the scanning mirror module 140 are the angle parameters or position
parameters of the reflective mirrors 143 and 145. In theory, there
is a corresponding relation between the parameters of the scanning
mirror module 140 and a position coordinate of the reference plane
PF1 in the three-dimensional working area WA. Thus, images of
different areas of the reference plane RF1 may be moved in the
visible area AA by adjusting the parameters of the scanning mirror
module 140. If it is determined that the image point CI formed by
the center of the correction pattern AP is located at the center AO
of the visible area AA, the current corresponding second parameters
of the scanning mirror module 140 are recorded to manufacture a
visual distortion compensation table.
[0041] FIG. 6C is a schematic view illustrating a relative movement
path of the correction pattern of FIG. 6A between the working area
and the visible area. FIGS. 6D and 6E are schematic front views
illustrating the image of the sub-correction pattern of FIG. 6A in
the visible area. Then, referring to FIG. 6C, Step S223 is
performed to adjust the second parameters of the scanning mirror
module 140, such that a correction image point AI1 of the
correction point A1 at the position O1 is formed in the visible
area AA. Then, referring to FIG. 6D, Step S224 is performed to
determine whether the position O1 of the correction pattern AP is
imaged in the center AO of the visible area AA. Namely, whether the
correction image point AI1 of the correction point A1 of the
correction pattern AP located at the position O1 formed in the
visible area AA is located at the center of the visible area AA is
determined. If not, the scanning mirror module 140 is adjusted. If
yes, the second parameters of the scanning mirror module 140
corresponding to the position O1 (i.e., the correction point A1)
are recorded and collected in the visual distortion compensation
table.
[0042] Then, in this embodiment, Step S223 and Step S224 may be
repetitively performed a plurality of times, and the correction
points A0, A1, A2, A3, A4, A5, A6, A7, and A8 in the repetitively
performed Step S223 are different from each other, so as to
respectively correct the positioning error of areas WA0, WA1, WA2,
WA3, WA4, WA5, WA6, WA7, and WA8 of the reference plane RF1. After
the correction of an area as required by practical needs, Step S225
may be performed to record the second parameters of the scanning
mirror module 140 corresponding to the reference plane RF1 and
collect the second parameters to the visual distortion compensation
table for further references.
[0043] Then, in this embodiment, Steps S210 and S220 (i.e.,
Sub-steps S221, S222, S223, and S224) may be repetitively performed
a plurality of times, and the reference planes RF1, RF2, and RF3 in
the repetitively performed Step S210 are different, so as to
perform Step S230 to record the second parameters respectively
corresponding to the reference planes RF1, RF2, and RF3 and collect
the second parameters to the visual distortion compensation table
for further references.
[0044] In the following, a method including Steps S310, S320, S330,
and S340 is described in detail with reference to FIGS. 7 to 8.
[0045] FIG. 7 is a flowchart illustrating a part of the positioning
error correction method of FIG. 2. Referring to FIGS. 2, 4, and 7,
after Step S230 is performed to obtain the visual distortion
compensation table of the three-dimensional working area WA, Step
S310 may be performed to provide a processing test piece WS and
locate the processing test piece WS on the reference plane RF1. For
example, in this embodiment, moving the processing test piece WS to
the reference plane RF1 includes moving the processing test piece
WS to the surface of the movable platform 170, such that the
processing test piece WS is movable to the position of the
reference plane RF1.
[0046] Then, Step S320 is performed to load the laser offset
compensation table and read the corresponding first parameter when
the laser beam 60 is focused on the reference plane RF1, so as to
process and form an alignment pattern WP. Specifically, in this
embodiment, forming the alignment pattern WP includes applying the
laser beam 60 emitted by the laser source 110 of the
three-dimensional laser processing apparatus 100 shown in FIG. 1 to
the processing test piece WS for processing, for example.
Furthermore, in this embodiment, the step of forming the alignment
pattern WP may be performed by using the scanning mirror module 140
of FIG. 2, for example. More specifically, in this embodiment,
after being reflected by the reflective mirrors 143 and 145 of the
minor scanning module 140, the laser beam 60 may be focused on the
reference plane RF1 in the three-dimensional working area WA by the
focusing lens set 141, so as to process the processing test piece
WS to form the alignment pattern WP.
[0047] FIG. 8 is a schematic front view illustrating the alignment
pattern of FIG. 7. As shown in FIG. 8, in this embodiment, the
alignment pattern WP includes a plurality of alignment points W0,
W1, W2, W3, W4, W5, W6, W7, and W8. Specifically, in this
embodiment, the alignment points W0, W1, W2, W3, W4, W5, W6, W7,
and W8 are respectively located on a plurality of sub-alignment
patterns WP0, WP1, WP2, WP3, WP4, WP5, WP6, WP7, and WP8 of the
alignment pattern WP. The sub-alignment patterns WP0, WP1, WP2,
WP3, WP4, WP5, WP6, WP7, and WP8 are symmetrically distributed on
the processing test piece WS. In this embodiment, the alignment
points W0, W1, W2, W3, W4, W5, W6, W7, and W8 are respectively at
centers of the sub-alignment patterns WP0, WP1, WP2, AP3, WP4, WP5,
WP6, WP7, and WP8. However, the disclosure is not limited thereto.
People having ordinary skills in the art may design the alignment
points W0, W1, W2, W3, W4, W5, W6, W7, and W8 based on practical
needs, and thus no further details in this regard is described in
the following.
[0048] Besides, it should be noted that, in this embodiment, the
sub-alignment patterns WP0, WP1, WP2, WP3, WP4, WP5, WP6, WP7, and
WP8 are cross-shaped. However, the disclosure is not limited
thereto. In other embodiments, the sub-alignment patterns WP0, WP1,
WP2, WP3, WP4, WP5, WP6, WP7, and WP8 may also be circular,
polygonal, or other shapes that are easy to identify, and the
sub-alignment patterns WP0, WP1, WP2, WP3, WP4, WP5, WP6, WP7, and
WP8 may be the same or different. Thus, the disclosure is not
limited to the above.
[0049] Then, Step S330 is performed to load the visual distortion
compensation table and correspondingly adjust a plurality of third
parameters of the scanning mirror module 140. Specifically, in this
embodiment, the third parameters of the scanning mirror module 140
are also the angle parameters or position parameters of the
reflective mirrors 143 and 145. By adjusting the third parameters
of the scanning mirror module 140, the alignment points of the
alignment pattern WP are separately and correspondingly focused and
imaged on the center of the visible area AA of the image detector
153 through the zoom lens set 130 and the imaging lens set 151.
Also, the third parameters are recorded to create a laser
distortion compensation table. Here, values recorded in the laser
distortion compensation table include the corresponding first
parameter of the zoom lens set 130 when the laser beam 60 is
focused on the reference plane RF1 and the corresponding third
parameters of the scanning mirror module 140 when the alignment
points of the alignment pattern WP are correspondingly focused and
imaged on the center of the visible area AA of the image detector
153.
[0050] More specifically, as shown in FIG. 7, Step S330 further
includes Sub-step S331 (i.e., making the center of the alignment
pattern WP focused and imaged on the center of the visible area
AA), Sub-step S332 (i.e., determining whether the center of the
alignment pattern WP is imaged on the center of the visible area
AA, if not, adjusting the scanning mirror module 140, and if yes,
recording the third parameters of the scanning mirror module 140
corresponding to the center of the alignment pattern WP), Sub-step
S333 (i.e., making one of the alignment point of the alignment
pattern WP focused and imaged in the visible area AA), and Sub-step
S334 (i.e., determining whether the alignment point of the
alignment pattern WP is imaged on the center of the visible area
AA, if not, adjusting the scanning mirror module 140, and if yes,
recording the third parameters of the scanning mirror module 140
corresponding to the alignment point).
[0051] Specifically, in this embodiment, performing Step S330 is
similar to performing Step S220. Namely, making the alignment point
of the alignment pattern WP focused image in the visible area AA
and determining and recording the third parameters in Sub-steps
S331, S332, S333, and S334 of Step S330 are similar to making the
correction point of the correction pattern AP focused in the
visible area AA and determining and recording the second parameters
in Sub-steps S221, S222, S223, and S224 in Step S220. Details in
these respect are already described in the foregoing, and thus not
repeated in the following.
[0052] Then, in this embodiment, Step S333 and Step S334 may be
repetitively performed a plurality of times, and the alignment
points W0, W1, W2, W3, W4, W5, W6, W7, and W8 in the repetitively
performed Step S333 are different from each other, so as to
respectively correct the positioning error in the areas WA0, WA1,
WA2, WA3, WA4, WAS, WA6, WA7, and WA8 of the reference plane RF1.
After the error in an area as required by practical needs is
corrected, Step S335 may be performed to record the third
parameters of the scanning mirror module 140 corresponding to the
reference planes RF, RF2, and RF3 and collect the third parameters
to the laser distortion compensation table for further
references.
[0053] Then, in this embodiment, Steps S310, S320, and S330 (i.e.,
Sub-steps S331, S332, S333, and S334) may be repetitively performed
a plurality of times, and the reference planes RF1, RF2, and RF3 in
the repetitively performed Step S310 are different, so as to
perform Step S340 to record the third parameters respectively
corresponding to the reference planes RF1, RF2, and RF3 and collect
the third parameters to the laser distortion compensation table for
further references.
[0054] In this way, when the user operates the three-dimensional
laser processing apparatus 100 to process a workpiece, relevant
parameter and position settings of the three-dimensional laser
processing apparatus 100 may be set by using the parameter values
of the zoom lens set 130 and the parameter values of the scanning
mirror module 140 recorded in the laser distortion compensation
table before processing the workpiece. In this way, by using a
workpiece image observed from the visible area AA, the laser beam
60 may be controlled to process at a desired position of the
workpiece, thereby allowing the three-dimensional laser processing
apparatus 100 to achieve "what you see is what you hit" and
effectively reducing a visual positioning error and an image
computation error to form a three-dimensional laser pattern as
desired in the three-dimensional working area WA.
[0055] Besides, it should also be noted that, even though the
embodiment is described, as an example, to provide the movable
platform 170 to make the laser beam 60 correspondingly focused on
the respective reference planes RF1, RF2, and RF3 in the
three-dimensional working area WA, the disclosure is not limited
thereto. Further details are described in the following with
reference to FIG. 9A to FIG. 9C.
[0056] FIGS. 9A to 9C are schematic side view illustrating another
three-dimensional working area of FIG. 1. For example, as shown in
FIGS. 9A to 9C, in this embodiment, Step S120, i.e, making the
laser beam 60 correspondingly focused on the three-dimensional
working area WA, in the positioning error correction method shown
in FIG. 2 may also be performed by sequentially providing a
plurality of platforms PL1, PL2, and PL3 having different standard
heights H1, H2, and H3. In addition, the platforms PL1, PL2, and
PL3 are located in the three-dimensional working area WA, and
surfaces S1, S2, and S3 of the respective platforms PL1, PL2, and
PL3 respectively correspond to the positions of the reference
planes RF1, RF2, and RF3. Thus, the laser beam 60 may be
sequentially and correspondingly focused on the platform PL1 in the
three-dimensional working area WA. Besides, in this embodiment,
Steps S210 and S310 in the positioning error correction method
shown in FIG. 2 may be performed by changing the platforms PL1,
PL2, and PL3 having different standard heights H1, H2, and H3 and
disposing the correction test piece AS in Step S210 or the
processing test piece WS in Step S310 on the surface of one of the
platforms PL1, PL2, and PL3, such that the correction test piece AS
in Step S210 or the processing test piece WS in Step S310 is
movable to the position of one of the reference planes RF1, RF2,
and RF3. Furthermore, when the correction test piece AS of Step
S210 or the processing test piece WS of Step S310 is disposed in
one of the platforms PL1, PL2, and PL3, the three-dimensional laser
processing apparatus 100 may still be used to perform other steps,
such as Steps S110, S130, S220, S230, S320, S330, and S340 and
create the laser distortion compensation table. Other details are
already described above. Thus, relevant details may be referred to
above and will not repeated in the following. Accordingly, by
performing the positioning error correction method according to
this embodiment, the laser distortion compensation table
corresponding to the three-dimensional working area may be
obtained, and the positioning error may be corrected by adopting
relevant parameter or position settings of the three-dimensional
laser processing apparatus 100. Thus, the positioning error
correction method also exhibits the same features of the previously
described visual error correction method. Details in this respect
are thus not repeated in the following.
[0057] In view of the foregoing, by disposing the zoom lens set and
the visual module, the three-dimensional laser processing apparatus
according to the embodiments of the disclosure may simultaneously
adjust the focal point of the laser beam on the reference plane and
the imaging focal point in the visible area when adjusting the
parameters of the zoom lens set. Accordingly, the laser beam is
correspondingly focused on the reference planes through the zoom
lens set and the scanning mirror module. Moreover, a plurality of
positions of an image in the three-dimensional working area may
also be correspondingly focused and imaged on the center of the
visible area through the zoom lens set and the imaging lens set.
Besides, when the user operates the three-dimensional laser
processing apparatus to process a workpiece, the relevant parameter
and position settings of the three-dimensional laser processing
apparatus may be set by using value data recorded in the laser
distortion compensation table obtained by adopting the positioning
error correction method according to the embodiments of the
disclosure before processing the workpiece. Accordingly, the
three-dimensional laser processing apparatus is capable of
providing the effect of "what you see is what you hit" and
effectively reducing the positioning error and the image
calculation error.
[0058] It will be apparent to those skilled in the art that various
modifications and variations can be made to the structure of the
disclosed embodiments without departing from the scope or spirit of
the disclosure. In view of the foregoing, it is intended that the
disclosure cover modifications and variations of this disclosure
provided they fall within the scope of the following claims and
their equivalents.
* * * * *