U.S. patent application number 15/002623 was filed with the patent office on 2016-05-19 for storage shelf.
The applicant listed for this patent is MURATA MACHINERY, LTD.. Invention is credited to Shohei NAGAMINE.
Application Number | 20160137413 15/002623 |
Document ID | / |
Family ID | 51354105 |
Filed Date | 2016-05-19 |
United States Patent
Application |
20160137413 |
Kind Code |
A1 |
NAGAMINE; Shohei |
May 19, 2016 |
STORAGE SHELF
Abstract
A storage shelf reduces vibration while maintaining
load-carrying capacity and includes placement units on which a FOUP
is placed, and a frame unit that supports the placement units. The
placement units include frames that are arranged on the frame unit
with first elastic bodies interposed therebetween, and a shelf
plate that is arranged on the frames with second elastic bodies
interposed therebetween and is configured to place thereon the
FOUP.
Inventors: |
NAGAMINE; Shohei; (Ise-shi,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
MURATA MACHINERY, LTD. |
Kyoto-shi |
|
JP |
|
|
Family ID: |
51354105 |
Appl. No.: |
15/002623 |
Filed: |
January 21, 2016 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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14767061 |
Aug 11, 2015 |
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PCT/JP2014/053201 |
Feb 12, 2014 |
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15002623 |
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Current U.S.
Class: |
211/126.15 |
Current CPC
Class: |
B65G 1/02 20130101; H01L
21/67769 20130101; B65G 2207/28 20130101; B65G 2201/0297 20130101;
A47B 55/00 20130101; B65G 2207/20 20130101; B65G 2207/40
20130101 |
International
Class: |
B65G 1/02 20060101
B65G001/02 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 12, 2013 |
JP |
2013-024400 |
Claims
1. (canceled)
2. A storage shelf comprising a placement unit on which an object
is able to be placed; and a frame unit that supports the placement
unit and is secured to a rail of a traveling vehicle or to a
supporting member supporting the rail; wherein the placement unit
is arranged on the frame unit with an elastic body interposed
therebetween, and includes a shelf plate on which the object is
placed.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a storage shelf that stores
therein a front-opening unified pod (FOUP).
[0003] 2. Description of the Related Art
[0004] A semiconductor conveyance system is provided with a storage
shelf that temporarily stores therein FOUPs as wafer carriers.
Examples of the storage shelf include one provided along a track of
an overhead carrier and one suspended from a ceiling, such storage
shelves may be subjected to vibration transmitted when the overhead
carrier travels. Because wafers are products that require high
precision, it is desired to reduce the effect of the vibration.
[0005] As a mechanism for preventing vibration, one described in
Japanese Patent Application Laid-Open Publication No. 2012-15371,
for example, is known. In the one described in Japanese Patent
Application Laid-Open Publication No. 2012-15371, a receiving base
on which a load is placed is provided with a viscoelastic body.
[0006] In general, to reduce vibration by using a
vibration-isolating member (elastic body), the spring constant of
the vibration-isolating member needs to be set lower so that the
ratio of natural frequency of a system including an object to be
vibration-isolated and the vibration-isolating member to the
natural frequency of an input vibration becomes higher. However,
when the spring constant of the vibration-isolating member is set
lower, a problem may occur in that the object to be
vibration-isolated cannot be supported while the elasticity of the
vibration-isolating member is maintained.
SUMMARY OF THE INVENTION
[0007] Preferred embodiments of the present invention provide a
storage shelf that reduces vibration while maintaining
load-carrying capacity.
[0008] A storage shelf according to one aspect of various preferred
embodiments of the present invention is a storage shelf including a
placement unit on which an object is able to be placed and a frame
unit that supports the placement unit. The placement unit includes
a frame that is arranged on a frame unit with a first elastic body
interposed therebetween and a shelf plate that is arranged on the
frame with a second elastic body interposed therebetween and on
which the object is able to be placed.
[0009] In this storage shelf, the frame is arranged on the frame
unit with the first elastic body interposed therebetween, and the
shelf plate on which the object is placed is arranged on the frame
with the second elastic body interposed therebetween. Accordingly,
in the storage shelf, the first elastic body and the second elastic
body are provided in series. Thus, in the storage shelf, it is
possible to set a spring constant at a lower value to obtain a
vibration-isolating effect while maintaining load-carrying
capacity.
[0010] In one preferred embodiment of the present invention, the
object may be a front-opening unified pod (FOUP) configured to
accommodate therein wafers. The placement unit may include a third
elastic body arranged between the frame and the shelf plate and
having a rigidity higher than those of the first and the second
elastic bodies. The third elastic body may be arranged on a side
where a lid of the FOUP is positioned when the FOUP is placed on
the shelf plate. In general, the side near the lid is heavier than
other sides in the FOUP. This shifts the center of gravity of the
FOUP toward the side near the lid. In view of this, in the storage
shelf, the third elastic body having the rigidity higher than those
of the first and the second elastic bodies is arranged on the side
where the lid of the FOUP is positioned. This enables the storage
shelf to reduce vibration and also prevent the FOUP from
tilting.
[0011] In one preferred embodiment of the present invention, the
frame unit may include a pair of beam members facing each other.
The frame may be disposed over the pair of beam members. The frame
may include a concave portion positioned between the pair of beam
members and including a base portion extending in an opposing
direction of the pair of beam members and a pair of raised portions
that are raised from both ends of the base portion, and include
overhanging portions that overhang from ends of the raised portions
and are mounted on the beam members each with the first elastic
body interposed therebetween. The second elastic body may be
arranged on the concave portion of the frame. This arrangement
enables the storage shelf to prevent the position of the shelf
plate from becoming higher even when the first elastic body and the
second elastic body are provided in series. Thus, in the storage
shelf, space in the height direction of the placement unit is able
to be saved.
[0012] In one preferred embodiment of the present invention, the
frame unit may be secured to a rail of a traveling vehicle or to a
supporting member supporting the rail. This arrangement enables the
storage shelf to simplify the configuration without the need to
provide an additional member for supporting the storage shelf.
[0013] A storage shelf according to another aspect of various
preferred embodiments of the present invention is a storage shelf
including a placement unit on which an object is able to be placed
and a frame unit that supports the placement unit and is secured to
a rail of a traveling vehicle or to a supporting member supporting
the rail. The placement unit is arranged on the frame unit with an
elastic body interposed therebetween, and includes a shelf plate on
which the object is able to be placed.
[0014] In this storage shelf, the placement unit is arranged on the
frame unit secured to the rail or the supporting member with the
elastic body interposed therebetween. Accordingly, vibration that
occurs at the rail when the traveling vehicle travels is able to be
prevented from being transmitted from the frame unit to the
placement unit, such that the vibration of the object is
reduced.
[0015] Preferred embodiments of the present invention reduce
vibration while maintaining load-carrying capacity.
[0016] The above and other elements, features, steps,
characteristics and advantages of the present invention will become
more apparent from the following detailed description of the
preferred embodiments with reference to the attached drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
[0017] FIG. 1 is a perspective view illustrating a storage shelf
according to a preferred embodiment of the present invention.
[0018] FIG. 2 is a perspective view illustrating a placement
unit.
[0019] FIG. 3 is a side view of the storage shelf on which a FOUP
is placed.
[0020] FIG. 4 is a side view of a storage shelf according to a
modified example of the first preferred embodiment of the present
invention.
[0021] FIG. 5 is a side view of a storage shelf according to a
second preferred embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0022] Preferred embodiments of the present invention will be
described hereinafter in detail with reference to the attached
drawings. In the description of the drawings, like reference signs
are given to like or equivalent elements, and duplicated
explanation is omitted. The terms "X-direction", "Y-direction", and
"Z-direction" are based on directions depicted in the drawings and
are given for convenience.
First Preferred Embodiment
[0023] FIG. 1 is a perspective view illustrating a storage shelf
according to a preferred embodiment of the present invention. This
storage shelf 1 depicted in FIG. 1 is installed in a semiconductor
conveyance system of a semiconductor manufacturing plant, for
example. The storage shelf 1 stores therein a front-opening unified
pod (FOUP: wafer carrier) 100 (see FIG. 3) accommodating wafers.
The FOUP 100 accommodates a plurality of wafers each preferably
having a diameter of 300 millimeters or 450 millimeters, for
example.
[0024] The storage shelf 1 includes a frame unit 10 and placement
units 20a, 20b, 20c, and 20d. The frame unit 10 supports the
placement units 20a to 20d. The frame unit 10 includes suspending
members 3a, 3b, 3c, and 3d, connecting members 5a and 5b, and beam
members 7a and 7b.
[0025] The suspending members 3a to 3d are pillar members extending
in the vertical direction (Z-direction), provided in plurality (for
example, preferably four in the present preferred embodiment). The
suspending members 3a to 3d are arranged facing each other spaced
at predetermined intervals in the X-direction and the Y-direction.
The suspending members 3a to 3d are secured to any one of a rail of
an overhead carrier (traveling vehicle), a supporting member
supporting this rail, and a ceiling. On the lower-end side of the
suspending members 3a and 3b, a fence member 9a is laterally
provided extending in the Y-direction. On the lower-end side of the
suspending members 3c and 3d, a fence member 9b is laterally
provided extending in the Y-direction. The fence members 9a and 9b
prevent the FOUP 100 from falling.
[0026] The connecting member 5a is a member extending in the
X-direction, and connects the lower ends of the suspending member
3a and the suspending member 3c. The connecting member 5b is a
member extending in the X-direction, and connects the lower ends of
the suspending member 3b and the suspending member 3d.
[0027] The beam members 7a and 7b are members extending in the
Y-direction, and are disposed over the connecting members 5a and
5b. The beam members 7a and 7b face each other spaced at a
predetermined distance in the X-direction.
[0028] On the placement units 20a to 20d, the FOUP 100 is placed.
The placement units 20a to 20d are supported by the frame unit 10.
The placement units 20a to 20d are arranged in plurality (four
herein) along the Y-direction in the frame unit 10. The respective
placement units 20a to 20d preferably have the same configuration,
for example. The following describes the placement unit 20a as one
example in detail.
[0029] FIG. 2 is a diagram illustrating the placement unit. FIG. 3
is a side view of the storage shelf on which the FOUP is placed. As
depicted in FIG. 2 and FIG. 3, the placement unit 20a includes
frames 22a, 22b, and 22c and a shelf plate 24.
[0030] The frames 22a to 22c are disposed over the beam members 7a
and 7b. The frames 22a to 22c are arranged in this order spaced at
a predetermined distance in the Y-direction. In other words, the
frame 22b is arranged between the frame 22a and the frame 22c
(substantially at the center). The respective frames 22a to 22c
have the same configuration. The following describes the frame 22a
as one example in detail.
[0031] The frame 22a includes a concave portion 30 having a concave
shape and overhanging portions 31 and 32 overhanging from ends of
the concave portion 30 to both sides. The frame 22a is a
plate-shaped member, which is preferably formed integrally with a
concave portion 30 and overhanging portions 31 and 32 by
sheet-metal processing, for example.
[0032] The concave portion 30 includes a base portion 30a extending
in the X-direction (opposing direction of the pair of beam members
7a and 7b) and raised portions 30b and 30c that are raised in a
vertical or substantially vertical manner from ends in the
X-direction (longitudinal direction) of the base portion 30a. The
overhanging portions 31 and 32 respectively overhang from the upper
ends of the raised portions 30b and 30c, each extending outside in
the X-direction. The overhanging portions 31 and 32 are parallel or
substantially parallel to the base portion 30a.
[0033] The frame 22a is arranged on the beam members 7a and 7b with
the first elastic bodies 40 and 41 interposed therebetween.
Specifically, the overhanging portions 31 and 32 of the frame 22a
are arranged on the beam members 7a and 7b with the first elastic
bodies 40 and 41 interposed therebetween. The first elastic bodies
40 and 41 preferably have the same configuration, for example. The
following describes the first elastic body 40 as one example in
detail.
[0034] The first elastic body 40 preferably includes a gel member
42, a coil spring 43, and a vertical pair of screw portions 44. The
gel member 42 is arranged inside the coil spring 43. The screw
portions 44 are configured so that a screw protrudes upward or
downward from a disk-shaped base portion, and are provided so that
the gel member 42 and the coil spring 43 are sandwiched between the
vertical pair of the screw portions 44.
[0035] The frame 22a is fixed on the first elastic bodies 40 and 41
(specifically, on the base portions of the screw portions 44) with
nuts 45, with the screw portions 44 of the first elastic bodies 40
and 41 being inserted into through holes (not depicted) provided in
the overhanging portions 31 and 32. Similarly, the first elastic
bodies 40 and 41 are fixed on the beam members 7a and 7b with nuts
(not depicted). In this manner, the frame 22a is fixed on the beam
members 7a and 7b with the first elastic bodies 40 and 41
interposed therebetween.
[0036] The overhanging portion 31 of the frame 22b is arranged on
the beam member 7a with the third elastic body 50 interposed
therebetween. The third elastic body 50 includes a gel member 51
and a vertical pair of screw portions 52. The screw portions 52 are
configured so that a screw protrudes upward or downward from a
disk-shaped base portion, and are provided so that the gel member
51 is sandwiched between the vertical pair of the screw portions
52. The third elastic body 50 has a rigidity higher than those of
the first elastic bodies 40 and 41 and second elastic bodies 60 and
61 described later. In other words, the proper load of the third
elastic body 50 is higher than the proper load of the first elastic
bodies 40 and 41.
[0037] The frame 22b is fixed on the third elastic body 50
(specifically, on the base portion of the screw portions 52) with a
nut 53, with the screw portions 52 of the third elastic body 50
being inserted into a through hole (not depicted) provided in the
overhanging portion 31. The third elastic body 50 is fixed on the
beam member 7a with a nut (not depicted). In this manner, the frame
22b is fixed on the beam member 7a with the third elastic body 50
interposed therebetween. The overhanging portion 32 of the frame
22b is fixed on the beam member 7b with the first elastic body 41
interposed therebetween.
[0038] In the storage shelf 1, the placement units 20a and 20d
positioned at both ends in the Y-direction are provided with fence
members 12a and 12b. The fence member 12a is secured to the base
portion 30a of the frame 22a of the placement unit 20a. The fence
member 12b is secured to the base portion 30a of the frame 22c of
the placement unit 20d. The fence members 12a and 12b prevent the
FOUP 100 from falling.
[0039] The shelf plate 24 is a plate-shaped member having a
rectangular or substantially rectangular shape, and the FOUP 100 is
placed thereon. The shelf plate 24 includes a placement surface 24a
on which the FOUP 100 is placed. The shelf plate 24 has a width in
the X-direction smaller than the distance between the raised
portions 30b and 30c of frames 22a to 22c, and is positioned above
the concave portions 30 of the frames 22a to 22c.
[0040] The shelf plate 24 is provided with pins P1, P2, and P3. The
pins P1 to P3 protrude upward from the placement surface 24a of the
shelf plate 24. The pins P1 to P3 are arranged at positions
corresponding to locating holes (not depicted) provided in the
bottom of the FOUP 100. In the present preferred embodiment, the
FOUP 100 is placed on the shelf plate 24 in such a direction that a
lid 102 is positioned on the left in the drawing.
[0041] The shelf plate 24 is arranged on the frames 22a and 22c
with the second elastic bodies 60 and 61 interposed therebetween.
Specifically, the shelf plate 24 is arranged on the concave
portions 30 of the base portions 30a of the frames 22a and 22c with
the second elastic bodies 60 and 61 interposed therebetween. The
second elastic bodies 60 and 61 preferably have the same
configuration, for example. The following describes the second
elastic body 60 as one non-limiting example in detail.
[0042] The second elastic bodies 60 preferably have the same
configuration as that of the first elastic bodies 40 and 41, and
each include a gel member 62, a coil spring 63, and a vertical pair
of screw portions 64. The gel member 62 is arranged inside the coil
spring 63. The screw portions 64 are configured so that a screw
protrudes upward or downward from a disk-shaped base portion, and
are provided so that the gel member 62 is sandwiched between the
vertical pair of the screw portions 64. The proper load of the
second elastic bodies 60 and 61 is the same or substantially the
same as the proper load of the first elastic bodies 40 and 41.
[0043] The shelf plate 24 is fixed on the second elastic bodies 60
and 61 (specifically, on the base portions of the screw portions
64) with nuts 65, with the screw portions 64 of the second elastic
bodies 60 and 61 being inserted into through holes (not depicted)
of the shelf plate 24. The second elastic bodies 60 and 61 are
fixed on the base portions 30a of the frames 22a and 22c with nuts
66. In this manner, the shelf plate 24 is fixed on the frames 22a
and 22c with the second elastic bodies 60 and 61 interposed
therebetween.
[0044] The second elastic bodies 60 and the second elastic bodies
61 are fixed on corners of the shelf plate 24, spaced at a
predetermined distance. In the present preferred embodiment, the
mounting positions of the second elastic bodies 60 and 61 with
respect to the frames 22a and 22c are closer to the lid 102 of the
FOUP 100 when the FOUP 100 is placed on the shelf plate 24 as
depicted in FIG. 3. Specifically, the mounting positions of the
second elastic bodies 60 and 61 with respect to the frames 22a and
22c are preferably set at positions such that the distance D1
between the front end (left end in the drawing) of the shelf plate
24 and the raised portion 30b is smaller than the distance D2
between the rear end (right side in the drawing) of the shelf plate
24 and the raised portion 30c.
[0045] The shelf plate 24 is also arranged on the frame 22b with
the fourth elastic body (third elastic body) 70 interposed
therebetween. Specifically, the shelf plate 24 is arranged on the
base portion 30a of the concave portion 30 of the frame 22b with
the fourth elastic body 70 interposed therebetween. The fourth
elastic body 70 is arranged on the side near the lid 102 of the
FOUP 100 when the FOUP 100 is placed on the shelf plate 24.
[0046] The fourth elastic body 70 preferably has the same
configuration as that of the third elastic body 50, and includes a
gel member 71 and a vertical pair of screw portions 72. The screw
portions 72 are configured so that a screw protrudes upward or
downward from a disk-shaped base portion, and are provided so that
the gel member 71 is sandwiched between the vertical pair of the
screw portions 72. The fourth elastic body 70 has a rigidity higher
than those of the first elastic bodies 40 and 41 and the second
elastic bodies 60 and 61. The proper load of the fourth elastic
body 70 is the same or substantially the same as the proper load of
the third elastic body 50.
[0047] The shelf plate 24 is fixed on the fourth elastic body 70
with a nut 73, with the screw portions 72 of the fourth elastic
body 70 being inserted into a through hole (not depicted) of the
shelf plate 24. The fourth elastic body 70 is fixed on the base
portion 30a of the frame 22b with the nut 73. In this manner, the
shelf plate 24 is fixed on the frame 22b with the fourth elastic
body 70 interposed therebetween.
[0048] The height position of the shelf plate 24 is the same or
substantially the same as the height position of the overhanging
portions 31 and 32 of the frames 22a to 22c.
[0049] As described above, in the storage shelf 1 of the present
preferred embodiment, the frames 22a to 22c are disposed over the
beam members 7a and 7b with the first elastic bodies 40 and 41 and
the third elastic body 50 interposed therebetween, and the shelf
plate 24 on which the FOUP 100 is placed is arranged on the frames
22a and 22c with the second elastic bodies 60 and 61 interposed
therebetween. Accordingly, in the storage shelf 1, the first
elastic bodies 40 and 41 and the second elastic bodies 60 and 61
are provided in series. Thus, it is possible to reduce vibration by
setting the spring constant at a lower value to obtain the
vibration-isolating effect while maintaining load-carrying
capacity.
[0050] Herein, the side near the lid 102 of the FOUP 100 is
heavier, which shifts the center of gravity to the side near the
lid 102. This shifting may cause the FOUP 100 to tilt toward the
lid 102 when the FOUP 100 is placed on the shelf plate 24.
[0051] In view of this, in the present preferred embodiment, on the
side where the lid 102 of the FOUP 100 is positioned, the third
elastic body 50 and the fourth elastic body 70 preferably have
rigidities higher than those of the first elastic bodies 40 and 41
and the second elastic bodies 60 and 61. In other words, in the
placement units 20a to 20d, more elastic bodies are arranged on the
side near the lid 102 of the FOUP 100 than on the opposite side
away from the lid 102, and also the elastic bodies on the side near
the lid 102 have higher rigidities. Furthermore, in the present
preferred embodiment, on the concave portions 30 of the frames 22a
to 22c, the second elastic bodies 60 and 61 and the fourth elastic
body 70 are arranged closer to the side where the lid 102 of the
FOUP 100 is positioned. Based on these arrangements in the present
preferred embodiment, by arranging the elastic bodies in accordance
with the center of gravity of the FOUP 100, the FOUP 100 is
prevented from tilting toward the lid 102.
[0052] In the present preferred embodiment, the frames 22a to 22c
have the concave portions 30 positioned between the pair of the
beam members 7a and 7b. The shelf plate 24 is arranged above the
concave portions 30 of the frames 22a to 22c. This arrangement
allows the height position of the shelf plate 24 to be the same or
substantially the same as the height position of the overhanging
portions 31 and 32 of the frames 22a to 22c. Thus, in the storage
shelf 1, even with the configuration in which the first elastic
bodies 40 and 41 and the second elastic bodies 60 and 61 are
provided in series, space in the height direction of the placement
units 20a to 20d is saved.
[0053] FIG. 4 is a side view of a storage shelf according to a
modified example of the first preferred embodiment of the present
invention. As depicted in FIG. 4, in this storage shelf 1A, the
distance D1 between the front end (left end in the drawing) of the
shelf plate 24 and the raised portion 30b is the same or
substantially the same as the distance D2 between the rear end
(right side in the drawing) of the shelf plate 24 and the raised
portion 30c. In the storage shelf 1A, on the side near the lid 102
of the FOUP 100, it is preferable that the first elastic body 40
and the second elastic body 60 preferably have rigidities higher
than those of elastic bodies arranged on the opposite side away
from the lid 102. This arrangement enables the storage shelf 1A to
prevent the FOUP 100 from tilting.
[0054] In the above-described preferred embodiment, the first
elastic bodies 40 and 41, the second elastic bodies 60 and 61, the
third elastic body 50, and the fourth elastic body 70 are used, but
alternatively only the first elastic bodies 40 and 41 and the
second elastic bodies 60 and 61 may be used. In this case, it is
preferable that the shelf plate 24 be arranged closer to the lid
102 of the FOUP 100.
Second Preferred Embodiment
[0055] A second preferred embodiment of the present invention will
be described hereinafter. FIG. 5 is a side view of a storage shelf
according to the second preferred embodiment. As depicted in FIG.
5, this storage shelf 1B includes the frame unit 10 and the
placement unit 20a (20b, 20c, 20d (see FIG. 1)). The frame unit 10
supports the placement unit 20a (20b to 20d). The frame unit 10
includes the suspending members 3a to 3d (see FIG. 1), the
connecting members 5a and 5b, and the beam members 7a and 7b.
[0056] The placement unit 20a includes a shelf plate 24A. The shelf
plate 24A is a plate-shaped member having a rectangular or
substantially rectangular shape, and the FOUP 100 is placed
thereon. The shelf plate 24A has a width in the X-direction larger
than the distance between the beam members 7a and 7b, and is
arranged over the beam members 7a and 7b. The shelf plate 24A is
arranged on the beam members 7a and 7b with the elastic bodies 80
and 81 interposed therebetween.
[0057] The elastic bodies 80 and 81 have the same configuration as
that of the first elastic bodies 40 and 41 of the first preferred
embodiment. On the side near the lid 102 of the FOUP 100, it is
preferable that the elastic body 80 be arranged that has rigidity
higher than that of an elastic body arranged on the opposite side
away from the lid 102.
[0058] At the center in the Y-direction of the shelf plate 24A, the
third elastic body 50 depicted in FIG. 2 is provided on the side
near the lid 102 of the FOUP 100. The third elastic body 50 has a
rigidity higher than those of the elastic bodies 80 and 81. In
other words, the proper load of the third elastic body 50 is higher
than the proper loads of the elastic bodies 80 and 81. At the
center in the Y-direction of the shelf plate 24A, the elastic body
81 is provided on the other side away from the lid 102 of the FOUP
100.
[0059] As described above, in the storage shelf 1B of the present
preferred embodiment, the shelf plate 24A is disposed over the beam
members 7a and 7b with the elastic bodies 80 and 81 and the third
elastic body 50 interposed therebetween. In this manner, in the
storage shelf 1B, the placement unit 20a (shelf plate 24A) is
arranged on the frame unit 10 that is secured to the rail or the
supporting member with the elastic bodies 80 and 81 interposed
therebetween. Accordingly, vibration that occurs at the rail when
the overhead carrier (traveling vehicle) travels is prevented from
being transmitted from the frame unit 10 to the placement unit 20a,
such that vibration of the FOUP 100 is significantly reduced. Thus,
in the storage shelf 1B, it is possible to set a spring constant at
a lower value to obtain a vibration-isolating effect while
maintaining load-carrying capacity.
[0060] In the storage shelf 1B of the present preferred embodiment,
the third elastic body 50 having a rigidity higher than those of
the elastic bodies 80 and 81 is arranged on the side where the lid
102 of the FOUP 100 is positioned. In addition, the elastic body 80
has a rigidity higher than that of the elastic body 81. In other
words, in the placement units 20a to 20d, more elastic bodies are
arranged on the side near the lid 102 of the FOUP 100 than on the
opposite side away from the lid 102, and the elastic bodies on the
side near the lid 102 have higher rigidities. Based on these
arrangements in the present preferred embodiment, by arranging the
elastic bodies in accordance with the center of gravity of the FOUP
100, the FOUP 100 is prevented from tilting toward the lid 102.
[0061] In the above-described preferred embodiment, the elastic
bodies 80 and 81 and the third elastic body 50 preferably are used,
but alternatively only the elastic bodies 80 and 81 may be
used.
[0062] The present invention is not limited to the above-described
preferred embodiments. In the above-described preferred
embodiments, configurations including a plurality of frames 22a to
22c have been described as one example, but alternatively one frame
may be used.
[0063] Positions of the elastic bodies to be arranged, the number
of the elastic bodies, and the types of the elastic bodies may be
appropriately set in accordance with the weight or the center of
gravity of an object to be vibration-isolated.
[0064] In the above-described preferred embodiments, the
configurations in which the FOUP 100 is stored in the storage shelf
1 have been described as one non-limiting example, but
alternatively the object may be another type of wafer carrier such
as a front opening shipping box (FOSB) or a multiple application
carrier (MAC).
[0065] While preferred embodiments of the present invention have
been described above, it is to be understood that variations and
modifications will be apparent to those skilled in the art without
departing from the scope and spirit of the present invention. The
scope of the present invention, therefore, is to be determined
solely by the following claims.
* * * * *