U.S. patent application number 14/979004 was filed with the patent office on 2016-04-21 for robot, robot control device, and robot system.
The applicant listed for this patent is Seiko Epson Corporation. Invention is credited to Akio NIU.
Application Number | 20160107311 14/979004 |
Document ID | / |
Family ID | 50391050 |
Filed Date | 2016-04-21 |
United States Patent
Application |
20160107311 |
Kind Code |
A1 |
NIU; Akio |
April 21, 2016 |
ROBOT, ROBOT CONTROL DEVICE, AND ROBOT SYSTEM
Abstract
A robot includes a base, a first arm rotatably connected to the
base around a first rotating axis, a second arm rotatably connected
to the first arm around a second rotating axis orthogonal to the
first rotating axis, a third arm rotatably connected to the second
arm around a third rotating axis parallel to the second rotating
axis, a first angular velocity sensor provided in the first arm and
having an angular velocity detection axis parallel to the first
rotating axis, and a second angular velocity sensor provided in the
second arm and having an angular velocity detection axis parallel
to the third rotating axis.
Inventors: |
NIU; Akio; (Matsumoto,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Seiko Epson Corporation |
Tokyo |
|
JP |
|
|
Family ID: |
50391050 |
Appl. No.: |
14/979004 |
Filed: |
December 22, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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14195937 |
Mar 4, 2014 |
|
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|
14979004 |
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Current U.S.
Class: |
700/254 ;
901/9 |
Current CPC
Class: |
B25J 9/04 20130101; B25J
9/1694 20130101; B25J 9/1638 20130101; B25J 13/088 20130101; Y10S
901/09 20130101; B25J 9/1651 20130101; B25J 9/046 20130101 |
International
Class: |
B25J 9/16 20060101
B25J009/16; B25J 9/04 20060101 B25J009/04 |
Foreign Application Data
Date |
Code |
Application Number |
Apr 10, 2013 |
JP |
2013-082275 |
Claims
1. A robot comprising: a base; an arm that includes a first arm
that is rotated around a first rotation axis and a second arm that
is rotated around a second rotation axis in a direction different
from the first rotation axis; and a first inertia sensor that is
installed at the first arm; wherein the first arm is coupled to the
base and is controlled based on an output from the first inertia
sensor, and a vibration of the arm is suppressed based on the
output from the first inertia sensor.
2. The robot according to claim 1, wherein a vibration of the first
arm is suppressed by a control of the first arm based on the output
from the first inertia sensor.
3. The robot according to claim 1, wherein the first rotation axis
coincides with a normal of an installation surface of the base.
4. The robot according to claim 2, wherein the first rotation axis
coincides with a normal of an installation surface of the base.
5. The robot according to claim 1, wherein the direction of the
second rotation axis is perpendicular to the direction of the first
rotation axis.
6. The robot according to claim 2, wherein the direction of the
second rotation axis is perpendicular to the direction of the first
rotation axis.
7. The robot according to claim 3, wherein the direction of the
second rotation axis is perpendicular to the direction of the first
rotation axis.
8. The robot according to claim 4, wherein the direction of the
second rotation axis is perpendicular to the direction of the first
rotation axis.
9. The robot according to claim 1, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
10. The robot according to claim 2, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
11. The robot according to claim 3, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
12. The robot according to claim 4, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
13. The robot according to claim 5, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
14. The robot according to claim 6, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
15. The robot according to claim 7, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
16. The robot according to claim 8, comprising: a second inertia
sensor that is installed between the second arm and a front end of
the arm; wherein the second arm is coupled to the first arm, and a
vibration of the arm is suppressed based on an output from the
second inertia sensor.
17. The robot according to claim 16, wherein: a vibration of the
second arm is suppressed by a control of the second arm based on
the output from the second inertia sensor.
18. The robot according to claim 1, wherein the first inertia
sensor is an angular velocity sensor.
19. The robot according to claim 17, wherein: the first inertia
sensor is an angular velocity sensor, and the second inertia sensor
is an angular velocity sensor.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This is a continuation patent application of U.S.
application Ser. No. 14/195,937 filed Mar. 4, 2014 which claims
priority to Japanese Patent Application No. 2013-082275 filed Apr.
10, 2013 both of which are expressly incorporated by reference
herein in their entireties.
BACKGROUND
[0002] 1. Technical Field
[0003] The present invention relates to a robot, a robot control
device, and a robot system.
[0004] 2. Related Art
[0005] In a robot described in JP-A-2011-136395, a six-axis sensor
which detects acceleration in the directions of an X axis, a Y
axis, and a Z axis orthogonal to each other and acceleration around
the X axis, the Y axis, and the Z axis is provided in a front end
portion, that is, a sixth link on a front-most end side. A
vibrational component of angular velocity around an intended axis
is obtained for each link on the basis of the detection result of
the six-axis sensor. As such, control for suppressing vibration is
performed. The vibrational component of the angular velocity of the
link is called "torsional angular velocity", "vibrational angular
velocity", or the like.
[0006] In the robot described in JP-A-2011-136395, since the
posture of the six-axis sensor changes with the motion of the
robot, it is necessary to perform coordinate axis transformation or
the like, called Jacobi's transformation, from the detection result
of the six-axis sensor, and to obtain the vibrational component of
the angular velocity of each link. Moreover, it is necessary to
perform computation in conformity with the rotation angle of a
motor which changes every moment.
[0007] Since complicated and enormous computation processing is
required, there is a problem in that a control device which has a
high-performance and an expensive CPU (Central Processing Unit) or
the like is required. This causes an increase in cost.
[0008] Also, since the complicated and enormous computation
processing is required, there is a problem in that a computation
error is likely to occur. If such an error occurs, it is not
possible to sufficiently suppress vibration due to the computation
error.
SUMMARY
[0009] An advantage of some aspects of the invention is that it
provides a robot, a robot control device, and a robot system
capable of suppressing vibration easily and reliably.
[0010] An aspect of the invention is directed to a robot including
a base, a first arm which is connected to the base rotatably around
a first rotating axis as a rotation center, a second arm which is
connected to the first arm rotatably around a second rotating axis,
which is an axis orthogonal to the first rotating axis or an axis
parallel to the axis orthogonal to the first rotating axis, as a
rotation center, a third arm which is connected to the second arm
rotatably around a third rotating axis, which is an axis parallel
to the second rotating axis, as a rotation center, a first angular
velocity sensor which is provided in the first arm and in which an
angular velocity detection axis is parallel to the first rotating
axis, and a second angular velocity sensor which is provided in the
second arm and in which an angular velocity detection axis is
parallel to the third rotating axis.
[0011] Accordingly, it is possible to suppress vibration easily and
reliably.
[0012] That is, first, the angular velocity of the first arm can be
detected by the first angular velocity sensor. The angular velocity
of the second arm including the vibrational component of the third
arm can be detected by the second angular velocity sensor. Then, it
is possible to suppress vibration on the basis of these detection
results.
[0013] Even if the posture of the robot changes, the detection axis
of the angular velocity of the first angular velocity sensor is
constant. For this reason, it is not necessary to correct the
angular velocity of the first arm detected by the first angular
velocity sensor with the direction of the first angular velocity
sensor.
[0014] Since the third rotating axis and the second rotating axis
are orthogonal to the first rotating axis or are parallel to the
axis orthogonal to the first rotating axis, even if the posture of
the robot changes, for example, even if the first arm rotates or
the second arm rotates, the detection axis of the angular velocity
of the second angular velocity sensor is constant. For this reason,
it is not necessary to correct the angular velocity of the second
arm detected by the second angular velocity sensor with the
direction of the second angular velocity sensor.
[0015] Accordingly, complicated and enormous computation is not
required. Therefore, a computation error is less likely to occur,
and it is possible to reliably suppress vibration and to increase a
response speed in the control of the robot.
[0016] Since the angular velocity of the second arm including the
vibrational component of the third arm is detected by the second
angular velocity sensor, it is possible to suppress vibration more
reliably.
[0017] It is thus possible to reduce the number of angular velocity
sensors, to reduce cost, and to simplify the configuration compared
to a case where the angular velocity sensor is provided in the
third arm.
[0018] In the robot according to the aspect of the invention, it is
preferable that a speed reducer which is located on the third
rotating axis is arranged in at least one of the second arm and the
third arm.
[0019] Accordingly, it is possible to perform the rotation of the
third arm with respect to the second arm with high precision. In
this way, if the second arm and the third arm are connected
together through the speed reducer, even if an angular velocity
sensor is provided in the third arm, there may be a case where it
is not possible to secure enough space to arrange the angular
velocity sensor in the third arm. Even if an angular velocity
sensor can be arranged in the third arm, it is desirable to extract
a wiring from the angular velocity sensor to the second arm through
the speed reducer. For this reason, it is desirable to secure a
space for the wiring in the speed reducer, and there is concern
that the speed reducer increases in size and rigidity is
degraded.
[0020] In the robot according to the aspect of the invention, it is
preferable that the robot further includes a first angular velocity
sensor unit having a first housing, and the first angular velocity
sensor and a circuit unit which are provided in the first housing,
the circuit unit AD converting and transmitting a signal output
from the first angular velocity sensor, and a second angular
velocity sensor unit having a second housing, and the second
angular velocity sensor and a circuit unit which are provided in
the second housing, the circuit unit AD converting and transmitting
a signal output from the second angular velocity sensor, in which
the first angular velocity sensor unit is provided in the first
arm, and the second angular velocity sensor unit is provided in the
second arm.
[0021] Accordingly, it is possible to simplify the configuration
compared to a case where the circuit unit is provided
separately.
[0022] In the robot according to the aspect of the invention, it is
preferable that the distance between the third rotating axis and
the second angular velocity sensor unit is shorter than the
distance between the second rotating axis and the second angular
velocity sensor unit.
[0023] Accordingly, it is possible to detect the vibrational
component of the third arm widely.
[0024] In the robot according to the aspect of the invention, it is
preferable that each appearance of the first housing and the second
housing is a rectangular parallelepiped, the detection axis of the
angular velocity of the first angular velocity sensor matches (is
aligned with) the normal to the largest surface of the rectangular
parallelepiped of the first housing, and the detection axis of the
angular velocity of the second angular velocity sensor matches (is
aligned with) the normal to the largest surface of the rectangular
parallelepiped of the second housing.
[0025] Accordingly, it is possible to recognize the directions of
the detection axis of the angular velocity of the first angular
velocity sensor and the detection axis of the angular velocity of
the second angular velocity sensor easily and reliably, and to
allow the first angular velocity sensor and the second angular
velocity sensor to take an appropriate posture easily.
[0026] In the robot according to the aspect of the invention, it is
preferable that each of the first angular velocity sensor and the
second angular velocity sensor has a gyro element, when two
orthogonal axes are set as a first axis and a second axis, the gyro
element has a base portion, a pair of detection vibrating arms
which extend from the base portion in parallel with the first axis
and in opposite directions, a pair of connecting arms which extend
from the base portion in parallel with the second axis and in
opposite directions, and a pair of driving vibrating arms which
extend from the front end portions or the middle of the respective
connecting arms in parallel with the first axis and in opposite
directions.
[0027] Accordingly, the first and second angular velocity sensors
are compact and have high detection precision. In this gyro
element, since the detection axis matches (is aligned with) the
normal to the plate surface (the surface including the first axis
and the second axis), as described above, it becomes easy to cause
the detection axis to match the normal to the largest surface of
the rectangular parallelepiped.
[0028] In the robot according to the aspect of the invention, it is
preferable that the first housing has an attachment portion to be
attached to the first arm in a corner portion of the first housing,
and the second housing has an attachment portion to be attached to
the second arm in a corner portion of the second housing.
[0029] Accordingly, it is possible to reliably attach the first
angular velocity sensor unit to the first arm and to reliably
attach the second angular velocity sensor unit to the second
arm.
[0030] In the robot according to the aspect of the invention, it is
preferable that the robot further includes a fixing member which is
conductive and fixes the attachment portion of the first housing to
the first arm, the circuit unit of the first angular velocity
sensor unit being grounded to the first arm by the fixing member,
and a fixing member which is conductive and fixes the attachment
portion of the second housing to the second arm, the circuit unit
of the second angular velocity sensor unit being grounded to the
second arm by the fixing member.
[0031] Accordingly, it is possible to reduce the number of
components and to simplify the configuration.
[0032] In the robot according to the aspect of the invention, it is
preferable that the first arm has a housing and an arm-side
attachment portion formed integrally with the housing, and the
first angular velocity sensor unit is attached directly to the
arm-side attachment portion.
[0033] Accordingly, it is possible to allow the first angular
velocity sensor unit to rotate integrally with the first arm
reliably.
[0034] In the robot according to the aspect of the invention, it is
preferable that the second arm has a housing and an arm-side
attachment portion formed integrally with the housing, and the
second angular velocity sensor unit is attached directly to the
arm-side attachment portion.
[0035] Accordingly, it is possible to allow the second angular
velocity sensor unit to rotate integrally with the second arm
reliably.
[0036] In the robot according to the aspect of the invention, it is
preferable that the robot further includes a cable which is
provided in the first arm and supplies power to the robot, in which
the first angular velocity sensor is arranged in an end portion of
the first arm opposite to the cable.
[0037] Accordingly, it is possible to prevent the first angular
velocity sensor from being affected by noise from the cable, and to
prevent a circuit or a wiring on the first angular velocity sensor
side from being short-circuited by the cable.
[0038] In the robot according to the aspect of the invention, it is
preferable that the robot further includes a cable which is
provided in the second arm and supplies power to the robot, in
which the second angular velocity sensor is arranged in an end
portion of the second arm opposite to the cable.
[0039] Accordingly, it is possible to prevent the second angular
velocity sensor from being affected by noise from the cable, and to
prevent a circuit or a wiring on the second angular velocity sensor
side from being short-circuited by the cable.
[0040] In the robot according to the aspect of the invention, it is
preferable that the robot further includes a fourth arm which is
connected to the third arm rotatably around a fourth rotating axis,
which is an axis orthogonal to the third rotating axis or an axis
parallel to the axis orthogonal to the third rotating axis, as a
rotation center, a fifth arm which is connected to the fourth arm
rotatably around a fifth rotating axis, which is an axis orthogonal
to the fourth rotating axis or an axis parallel to the axis
orthogonal to the fourth rotating axis, as a rotation center, and a
sixth arm which is connected to the fifth arm rotatably around a
sixth rotating axis, which is an axis orthogonal to the fifth
rotating axis or an axis parallel to the axis orthogonal to the
fifth rotating axis, as a rotation center.
[0041] Accordingly, a more complicated motion can be easily
performed.
[0042] In the robot according to the aspect of the invention, it is
preferable that the first rotating axis matches (is aligned with)
the normal to an installation surface of the base.
[0043] Accordingly, it is possible to easily control the robot.
[0044] Another aspect of the invention is directed to a robot
control device which controls the actuation of a robot, in which
the robot includes a base, a first arm which is connected to the
base rotatably around a first rotating axis as a rotation center, a
second arm which is connected to the first arm rotatably around a
second rotating axis, which is an axis orthogonal to the first
rotating axis or an axis parallel to the axis orthogonal to the
first rotating axis, as a rotation center, and a third arm which is
connected to the second arm rotatably around a third rotating axis,
which is an axis parallel to the second rotating axis, as a
rotation center, and the robot control device includes a receiving
unit which receives a first signal output from a first angular
velocity sensor provided in the first arm with an angular velocity
detection axis parallel to the first rotating axis and a second
signal output from a second angular velocity sensor provided in the
second arm with an angular velocity detection axis parallel to the
third rotating axis, a calculation unit which obtains a vibrational
component of the angular velocity of the first arm and a
vibrational component of the angular velocity of the second arm on
the basis of the first signal and the second signal received by the
receiving unit, and a control unit which controls the actuation of
the robot on the basis of the vibrational component of the angular
velocity of the first arm and the vibrational component of the
angular velocity of the second arm obtained by the calculation
unit.
[0045] Accordingly, it is possible to suppress vibration easily and
reliably.
[0046] That is, first, the vibrational component of the angular
velocity of the first arm can be obtained by the calculation unit
on the basis of the angular velocity of the first arm detected by
the first angular velocity sensor. The vibrational component of the
angular velocity of the second arm can be obtained by the
calculation unit on the basis of the angular velocity of the second
arm including the vibrational component of the angular velocity of
the third arm detected by the second angular velocity sensor. Then,
it is possible to suppress vibration on the basis of the
vibrational component of the angular velocity of the first arm and
the vibrational component of the angular velocity of the second
arm.
[0047] Even if the posture of the robot changes, the detection axis
of the angular velocity of the first angular velocity sensor is
constant. For this reason, it is not necessary to correct the
angular velocity of the first arm detected by the first angular
velocity sensor with the direction of the first angular velocity
sensor.
[0048] Even if the posture of the robot changes, for example, even
if the first arm rotates or the second arm rotates, the detection
axis of the angular velocity of the second angular velocity sensor
is constant. For this reason, it is not necessary to correct the
angular velocity of the second arm detected by the second angular
velocity sensor with the direction of the second angular velocity
sensor.
[0049] Accordingly, complicated and enormous computation is not
required. Therefore, a computation error is less likely to occur,
and it is possible to reliably suppress vibration and to increase a
response speed in the control of the robot.
[0050] Since the angular velocity of the second arm including the
vibrational component of the angular velocity of the third arm is
detected by the second angular velocity sensor, instead of the
angular velocity of the second arm, it is possible to more reliably
suppress vibration.
[0051] Still another aspect of the invention is directed to a robot
system including the robot according to the aspect of the
invention, and a robot control device which controls the actuation
of the robot.
[0052] Accordingly, it is possible to suppress vibration easily and
reliably.
[0053] That is, first, the angular velocity of the first arm can be
detected by the first angular velocity sensor. The angular velocity
of the second arm including the vibrational component of the
angular velocity of the third arm can be detected by the second
angular velocity sensor. Then, it is possible to suppress vibration
on the basis of these detection results.
[0054] Even if the posture of the robot changes, the detection axis
of the angular velocity of the first angular velocity sensor is
constant. For this reason, it is not necessary to correct the
angular velocity of the first arm detected by the first angular
velocity sensor with the direction of the first angular velocity
sensor.
[0055] Even if the posture of the robot changes, for example, even
if the first arm rotates or the second arm rotates, the detection
axis of the angular velocity of the second angular velocity sensor
is constant. For this reason, it is not necessary to correct the
angular velocity of the second arm detected by the second angular
velocity sensor with the direction of the second angular velocity
sensor.
[0056] Accordingly, complicated and enormous computation is not
required. Therefore, a computation error is less likely to occur,
and it is possible to reliably suppress vibration and to increase a
response speed in the control of the robot.
[0057] Since the angular velocity of the second arm including the
vibrational component of the angular velocity of the third arm is
detected by the second angular velocity sensor, instead of the
angular velocity of the second arm, it is possible to more reliably
suppress vibration.
[0058] Thus, it is possible to reduce the number of angular
velocity sensors, to reduce cost, and to simplify the configuration
compared to a case where the angular velocity sensor is provided in
the third arm.
BRIEF DESCRIPTION OF THE DRAWINGS
[0059] Embodiments of the invention will be described with
reference to the accompanying drawings, wherein like numbers
reference like elements.
[0060] FIG. 1 is a perspective view when a robot according to an
embodiment of the invention is viewed from a front side.
[0061] FIG. 2 is a perspective view when the robot shown in FIG. 1
is viewed from a rear side.
[0062] FIG. 3 is a schematic view of the robot shown in FIG. 1.
[0063] FIG. 4 is a block diagram of a part of a robot system having
the robot shown in FIG. 1.
[0064] FIG. 5 is a front view of the robot shown in FIG. 1.
[0065] FIG. 6 is a diagram showing the vicinity of a first angular
velocity sensor in a first arm of the robot shown in FIG. 1.
[0066] FIG. 7 is a diagram showing the vicinity of a speed reducer
in a third arm of the robot shown in FIG. 1.
[0067] FIG. 8 is a diagram showing the vicinity of a second angular
velocity sensor in a second arm of the robot shown in FIG. 1.
[0068] FIG. 9 is a sectional view of a first angular velocity
sensor unit of the robot shown in FIG. 1.
[0069] FIG. 10 is a plan view of a gyro element in an angular
velocity sensor.
[0070] FIGS. 11A and 11B are diagrams showing the actuation of the
gyro element shown in FIG. 10.
[0071] FIG. 12 is a block diagram of a part of the robot shown in
FIG. 1.
[0072] FIG. 13 is a block diagram of a part of the robot shown in
FIG. 1.
[0073] FIG. 14 is a block diagram of a part of the robot shown in
FIG. 1.
[0074] FIG. 15 is a block diagram of a part of the robot shown in
FIG. 1.
[0075] FIG. 16 is a block diagram of a part of the robot shown in
FIG. 1.
[0076] FIG. 17 is a block diagram of a part of the robot shown in
FIG. 1.
DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0077] Hereinafter, a robot, a robot control device, and a robot
system according to the invention will be described in detail on
the basis of a preferred embodiment shown in the accompanying
drawings.
[0078] FIG. 1 is a perspective view when a robot according to an
embodiment of the invention is viewed from a front side. FIG. 2 is
a perspective view when the robot shown in FIG. 1 is viewed from a
rear side. FIG. 3 is a schematic view of the robot shown in FIG. 1.
FIG. 4 is a block diagram of a part of a robot system having the
robot shown in FIG. 1. FIG. 5 is a front view of the robot shown in
FIG. 1. FIG. 6 is a diagram showing the vicinity of a first angular
velocity sensor in a first arm of the robot shown in FIG. 1. FIG. 7
is a diagram showing the vicinity of a speed reducer in a third arm
of the robot shown in FIG. 1. FIG. 8 is a diagram showing the
vicinity of a second angular velocity sensor in a second arm of the
robot shown in FIG. 1. FIG. 9 is a sectional view of a first
angular velocity sensor unit of the robot shown in FIG. 1. FIG. 10
is a plan view of a gyro element in an angular velocity sensor.
FIGS. 11A and 11B are diagrams showing the actuation of the gyro
element shown in FIG. 10. FIGS. 12 to 17 are block diagrams showing
a part of the robot shown in FIG. 1.
[0079] Hereinafter, for convenience of description, the upper side
in FIGS. 1 to 3 and 5 to 9 is referred to as "up" or "upward", and
the lower side is referred to as "down" or "downward". The base
side in FIGS. 1 to 3 and 5 to 8 is referred to as "base end", and
the opposite side is referred to as "front end". In FIG. 9,
reference numerals of the respective units of a second angular
velocity sensor unit are written in parentheses corresponding to a
first angular velocity sensor unit, and a diagram of the second
angular velocity sensor unit is omitted.
[0080] A robot system (industrial robot system) 10 shown in FIGS. 1
to 4 can be used in, for example, a manufacturing process for
manufacturing precision equipment, such as a wristwatch, and has a
robot (industrial robot) 1, and a robot control device (control
unit) 20 (see FIG. 4) which controls the actuation of the robot 1.
The robot 1 and the robot control device 20 are electrically
connected together. The robot control device 20 can be constituted
by, for example, a personal computer (PC) embedded with a CPU
(Central Processing Unit) or the like. The robot control device 20
will be described below in detail.
[0081] The robot 1 includes a base 11, four arms (links) 12, 13,
14, and 15, a wrist (link) 16, and six driving sources 401, 402,
403, 404, 405, and 406. The robot 1 is a vertical articulated
(six-axis) robot (robot body) in which the base 11, the arms 12,
13, 14, and 15, and the wrist 16 are connected in this order from
the base end to the front end. In the vertical articulated robot,
the base 11, the arms 12 to 15, and the wrist 16 may be
collectively referred to as "arm", the arm 12 may be referred to as
a "first arm", the arm 13 may be referred to as a "second arm", the
arm 14 may be referred to as a "third arm", the arm 15 may be
referred to as a "fourth arm", and the wrist 16 may be referred to
as "fifth arm and sixth arm", separately. In this embodiment, the
wrist 16 has the fifth arm and the sixth arm. An end effector or
the like can be attached to the wrist 16.
[0082] The arms 12 to 15 and the wrist 16 are supported to be
separately displaceable with respect to the base 11. Although the
length of each of the arms 12 to 15 and the wrist 16 is not
particularly limited, and in the illustrated configuration, the
length of each of the first arm 12, the second arm 13, and the
fourth arm 15 is set to be longer than the third arm 14 and the
wrist 16.
[0083] The base 11 and the first arm 12 are connected together
through a joint 171. The first arm 12 has a first rotating axis O1
parallel to a vertical direction as a rotation center with respect
to the base 11, and is rotatable around the first rotating axis O1.
The first rotating axis O1 matches (is aligned with) the normal to
atop surface of a floor 101 which is an installation surface of the
base 11. The rotation around the first rotating axis O1 is
performed by driving of the first driving source 401 having a motor
401M. The first driving source 401 is driven by the motor 401M and
a cable (not shown), and the motor 401M is controlled by the robot
control device 20 through a motor driver 301 electrically connected
to the motor 401M (see FIG. 4). Although the first driving source
401 may be configured to transmit a driving force from the motor
401M by a speed reducer (not shown) provided along with the motor
401M or a speed reducer may be omitted, in this embodiment, the
first driving source 401 has a speed reducer.
[0084] The first arm 12 and the second arm 13 are connected
together through a joint 172. The second arm 13 is rotatable around
a second rotating axis O2 parallel to a horizontal direction as an
axial center with respect to the first arm 12. The second rotating
axis O2 is orthogonal to the first rotating axis O1. The rotation
around the second rotating axis O2 is performed by driving of the
second driving source 402 having a motor 402M. The second driving
source 402 is driven by the motor 402M and a cable (not shown), and
the motor 402M is controlled by the robot control device 20 through
a motor driver 302 electrically connected to the motor 402M (see
FIG. 4). Although the second driving source 402 may be configured
to transmit a driving force from the motor 402M by a speed reducer
45 (see FIG. 5) provided along with the motor 402M or a speed
reducer may be omitted, in this embodiment, the second driving
source 402 has the speed reducer 45. The second rotating axis O2
may be parallel to an axis orthogonal to the first rotating axis
O1.
[0085] The second arm 13 and the third arm 14 are connected
together through a joint 173. The third arm 14 has a third rotating
axis O3 parallel to the horizontal direction as a rotation center
with respect to the second arm 13, and is rotatable around the
third rotating axis O3. The third rotating axis O3 is parallel to
the second rotating axis O2. The rotation around the third rotating
axis O3 is performed by driving of the third driving source 403.
The third driving source 403 is driven by a motor 403M and a cable
(not shown), and the motor 403M is controlled by the robot control
device 20 through a motor driver 303 electrically connected to the
motor 403M (see FIG. 4). Although the third driving source 403 may
be configured to transmit a driving force from the motor 403M by a
speed reducer 45 (see FIG. 7) provided along with the motor 403M or
a speed reducer may be omitted, in this embodiment, the third
driving source 403 has the speed reducer 45.
[0086] The third arm 14 and the fourth arm 15 are connected
together through a joint 174. The fourth arm 15 has a fourth
rotating axis O4 parallel to a center axis direction of the third
arm 14 as a rotation center with respect to the third arm 14 (base
11), and is rotatable around the fourth rotating axis O4. The
fourth rotating axis O4 is orthogonal to the third rotating axis
O3. The rotation around the fourth rotating axis O4 is performed by
driving of the fourth driving source 404. The fourth driving source
404 is driven by a motor 404M and a cable (not shown), and the
motor 404M is controlled by the robot control device 20 through a
motor driver 304 electrically connected to the motor 404M (see FIG.
4). Although the fourth driving source 404 may be configured to
transmit a driving force from the motor 404M by a speed reducer
(not shown) provided along with the motor 404M or a speed reducer
may be omitted, in this embodiment, the fourth driving source 404
has a speed reducer. The fourth rotating axis O4 may be parallel to
an axis orthogonal to the third rotating axis O3.
[0087] The fourth arm 15 and the wrist 16 are connected together
through a joint 175. The wrist 16 has a fifth rotating axis O5
parallel to the horizontal direction as a rotation center with
respect to the fourth arm 15, and is rotatable around the fifth
rotating axis O5. The fifth rotating axis O5 is orthogonal to the
fourth rotating axis O4. The rotation around the fifth rotating
axis O5 is performed by driving of the fifth driving source 405.
The fifth driving source 405 is driven by a motor 405M and a cable
(not shown), and the motor 405M is controlled by the robot control
device 20 through a motor driver 305 electrically connected to the
motor 405M (see FIG. 4). Although the fifth driving source 405 may
be configured to transmit a driving force from the motor 405M by a
speed reducer (not shown) provided along with the motor 405M or a
speed reducer may be omitted, in this embodiment, the fifth driving
source 405 has a speed reducer. The wrist 16 has a sixth rotating
axis O6 perpendicular to the fifth rotating axis O5 as a rotation
center through a joint 176, and is rotatable around the sixth
rotating axis O6. The sixth rotating axis O6 is orthogonal to the
fifth rotating axis O5. The rotation around the sixth rotating axis
O6 is performed by driving of the sixth driving source 406. The
sixth driving source 406 is driven by a motor 406M and a cable (not
shown), and the motor 406M is controlled by the robot control
device 20 through a motor driver 306 electrically connected to the
motor 406M (see FIG. 4). Although the sixth driving source 406 may
be configured to transmit a driving force from the motor 406M by a
speed reducer (not shown) provided along with the motor 406M or a
speed reducer may be omitted, in this embodiment, the sixth driving
source 406 has a speed reducer. The fifth rotating axis O5 may be
parallel to an axis orthogonal to the fourth rotating axis O4, and
the sixth rotating axis O6 may be parallel to an axis orthogonal to
the fifth rotating axis O5.
[0088] As shown in FIG. 6, the first arm 12 is provided with a
first angular velocity sensor 31, that is, a first angular velocity
sensor unit 71 having the first angular velocity sensor 31. The
angular velocity around the first rotating axis O1 of the first arm
12 is detected by the first angular velocity sensor 31.
[0089] As shown in FIG. 8, the second arm 13 is provided with a
second angular velocity sensor 32, that is, a second angular
velocity sensor unit 72 having the second angular velocity sensor
32. The angular velocity around the second rotating axis O2 of the
second arm 13 is detected by the second angular velocity sensor
32.
[0090] In the robot 1, vibration of the first arm 12, the second
arm 13, and the third arm 14 is suppressed, thereby suppressing
vibration of the entire robot 1. However, in order to suppress
vibration of the first arm 12, the second arm 13, and the third arm
14, instead of providing the angular velocity sensor in each of the
first arm 12, the second arm 13, and the third arm 14, as described
above, the first angular velocity sensor 31 and the second angular
velocity sensor 32 are respectively provided only in the first arm
12 and the second arm 13, and the actuation of the driving sources
401 and 402 is controlled by the detection results of the first
angular velocity sensor 31 and the second angular velocity sensor
32. Accordingly, it is possible to reduce the number of angular
velocity sensors, to reduce cost, and to simplify the circuit
configuration compared to a case where the angular velocity sensor
is provided in each of the first arm 12, the second arm 13, and the
third arm 14. Since the angular velocity of the second arm 13
including the vibrational component of the angular velocity of the
third arm 14 is detected by the second angular velocity sensor 32,
it is possible to more reliably suppress vibration. The actuation
of the second driving source 402 which rotates the second arm 13 on
the base end side from the third arm 14 is controlled, whereby it
is possible to increase the effect of suppressing vibration of the
robot 1.
[0091] In the driving sources 401 to 406, a first position sensor
411, a second position sensor 412, a third position sensor 413, a
fourth position sensor 414, a fifth position sensor 415, and a
sixth position sensor 416 are respectively provided in the motors
or the speed reducers. These position sensors are not particularly
limited, and for example, an encoder, a rotary encoder, a resolver,
a potentiometer, or the like may be used. The rotation angles of
the shaft portions of the motors or the speed reducers of the
driving sources 401 to 406 are detected by the position sensors 411
to 416. The motors of the driving sources 401 to 406 are not
particularly limited, and for example, a servomotor, such as an AC
servomotor or a DC servomotor, is preferably used. The respective
cables may be inserted into the robot 1.
[0092] As shown in FIG. 4, the robot 1 is electrically connected to
the robot control device 20. That is, the driving sources 401 to
406, the position sensors 411 to 416, and the angular velocity
sensors 31 and 32 are electrically connected to the robot control
device 20.
[0093] The robot control device 20 can actuate the arms 12 to 15
and the wrist 16 separately, that is, can control the driving
sources 401 to 406 through the motor drivers 301 to 306 separately.
In this case, the robot control device 20 performs detection by the
position sensors 411 to 416, the first angular velocity sensor 31,
and the second angular velocity sensor 32, and controls the driving
of the driving sources 401 to 406, for example, the angular
velocity, the rotation angle, or the like on the basis of the
detection results. A control program is stored in a recording
medium embedded in the robot control device 20 in advance.
[0094] As shown in FIGS. 1 and 2, if the robot 1 is a vertical
articulated robot, the base 11 is a portion which is located on the
lowermost side of the vertical articulated robot and is fixed to
the floor 101 of the installation space. A fixing method is not
particularly limited, and for example, in this embodiment shown in
FIGS. 1 and 2, a fixing method by a plurality of bolts 111 is used.
A fixing location of the base 11 in the installation space may be a
wall or a ceiling of the installation space, instead of the
floor.
[0095] The base 11 has a hollow base body (housing) 112. The base
body 112 can be divided into a cylindrical portion 113 having a
cylindrical shape, and a boxlike portion 114 having a boxlike shape
which is formed integrally in the outer circumferential portion of
the cylindrical portion 113. In the base body 112, for example, the
motor 401M or the motor drivers 301 to 306 are stored.
[0096] Each of the arms 12 to 15 has a hollow arm body (housing) 2,
a driving mechanism 3, and a sealing unit 4. Hereinafter, for
convenience of description, the arm body 2, the driving mechanism
3, and the sealing unit 4 of the first arm 12 are respectively
referred to as "arm body 2a", "driving mechanism 3a", and "sealing
unit 4a", the arm body 2, the driving mechanism 3, and the sealing
unit 4 of the second arm 13 are respectively referred to as "arm
body 2b", "driving mechanism 3b", and "sealing unit 4b", the arm
body 2, the driving mechanism 3, and the sealing unit 4 of the
third arm 14 are respectively referred to as "arm body 2c",
"driving mechanism 3c", and "sealing unit 4c", and the arm body 2,
the driving mechanism 3, and the sealing unit 4 of the fourth arm
15 are respectively referred to as "arm body 2d", "driving
mechanism 3d", and "sealing unit 4d".
[0097] Each of the joints 171 to 176 has a rotation support
mechanism (not shown). The rotation support mechanism is a
mechanism which rotatably supports one of two arms connected
together with respect to the other arm, a mechanism which rotatably
supports one of the base 11 and the first arm 12 connected together
with respect to the other, or a mechanism which rotatably supports
one of the fourth arm 15 and the wrist 16 connected together with
respect to the other. In an example of the fourth arm 15 and the
wrist 16 connected together, the rotation support mechanism can
rotate the wrist 16 with respect to the fourth arm 15. Each
rotation support mechanism has a speed reducer (not shown) which
reduces the rotation speed of the corresponding motor at a
predetermined reduction ratio, and transmits the driving force to
the corresponding arm, a wrist body 161 of the wrist 16, and a
support ring 162. As described above, in this embodiment, the speed
reducer and the motor are referred to as a driving source.
[0098] The first arm 12 is connected to the upper end portion
(front end portion) of the base 11 in a posture inclined with
respect to the horizontal direction. In the first arm 12, the
driving mechanism 3a has the motor 402M and is stored in the arm
body 2a. The arm body 2a is sealed airtight by the sealing unit 4a.
The arm body 2a has a pair of tongue piece portions 241a and 241b
on the front end side, and a root portion 251 on the base end side.
The tongue piece portion 241a and the tongue piece portion 241b are
separated from each other and opposite to each other. The tongue
piece portions 241a and 241b are inclined with respect to the root
portion 251, and thus, the first arm 12 is inclined with respect to
the horizontal direction. A base end portion of the second arm 13
is arranged between the tongue piece portion 241a and the tongue
piece portion 241b.
[0099] The installation position of the first angular velocity
sensor 31 in the first arm 12 is not particularly limited, and in
this embodiment, as shown in FIG. 6, the first angular velocity
sensor 31, that is, the first angular velocity sensor unit 71 is
provided in an end portion of the root portion 251 of the arm body
2a of the first arm 12 on an opposite side to an internal cable 85.
The cable 85 is a cable which supplies power to the motors 401M to
406M of the robot 1. Accordingly, it is possible to prevent the
first angular velocity sensor 31 from being affected by noise from
the cable 85, and to prevent a below-described circuit unit 713, a
wiring, and the first angular velocity sensor 31 of the first
angular velocity sensor unit 71 from being short-circuited by the
cable 85.
[0100] Here, for the driving mechanism 3 and the speed reducer,
representatively, the driving mechanism 3 which is provided in the
arm body 2a of the first arm 12 and rotates the second arm 13 will
be described.
[0101] As shown in FIG. 5, the driving mechanism 3 has a first
pulley 91 which is connected to the shaft portion of the motor
402M, a second pulley 92 which is arranged to be separated from the
first pulley 91, and a belt (timing belt) 93 which is stretched
between the first pulley 91 and the second pulley 92. The second
pulley 92 and the shaft portion of the second arm 13 are connected
together by the speed reducer 45.
[0102] The speed reducer 45 is not particularly limited, and for
example, a so-called "planetary gear-type" speed reducer having a
plurality of gears, a harmonic drive ("harmonic drive" is a
registered trademark), or the like may be used.
[0103] A main cause for vibration of the arms 12 to 15 and the
wrist 16 of the robot 1 is, for example, distortion or deflection
of the speed reducer 45, expansion and contraction of the belt 93,
deflection of the arms 12 to 15 and the wrist 16, or the like.
Here, as described above, the configuration of the speed reducer 45
is not particularly limited, and of various configurations, a
"planetary gear-type" speed reducer is preferably used. In general,
the speed reducer having this configuration can secure high
rigidity compared to speed reducers having other configurations,
such as a harmonic drive. Accordingly, it is possible to reduce
distortion or deflection of the speed reducer 45 and to suppress
vibration of the arms 12 to 15 and the wrist 16 of the robot 1 by
the same amount. Hereinafter, a case where a "planetary gear-type"
speed reducer is used as the speed reducer 45 will be
described.
[0104] The second arm 13 is connected to a front end portion of the
first arm 12. In the second arm 13, the driving mechanism 3b has
the motor 403M and is stored in the arm body 2b. The arm body 2a is
sealed airtight by the sealing unit 4b. The arm body 2b has a pair
of tongue piece portions 242a and 242b on the front end side, and a
root portion 252 on the base end side. The tongue piece portion
242a and the tongue piece portion 242b are separated from each
other and opposite to each other. A base end portion of the third
arm 14 is arranged between the tongue piece portion 242a and the
tongue piece portion 242b.
[0105] The installation position of the second angular velocity
sensor 32 in the second arm 13 is not particularly limited, and in
this embodiment, as shown in FIG. 8, the second angular velocity
sensor 32 is provided in an end portion of the arm body 2c of the
second arm 13 on an opposite side to the internal cable 85. In
other words, the second angular velocity sensor unit 72 is arranged
in the tongue piece portion 242a separated from the tongue piece
portion 242b, through which the cable 85 passes. Accordingly, it is
possible to prevent the second angular velocity sensor 32 from
being affected by noise from the cable 85, and to prevent a circuit
unit 723, a wiring, and the second angular velocity sensor 32 of
the second angular velocity sensor unit 72 from being
short-circuited by the cable 85.
[0106] It is preferable that the second angular velocity sensor 32
is located on the front end side of the second arm 13. In other
words, it is preferable that the second angular velocity sensor 32
(second angular velocity sensor unit 72) is arranged such that the
distance from the third rotating axis O3 is shorter than the
distance from the second rotating axis O2. With this, the second
angular velocity sensor 32 can be arranged at a position close to
the third arm 14. For this reason, as described below, the
vibrational component of the third arm 14 transmitted to the second
arm 13 through the speed reducer 45 can be detected by the second
angular velocity sensor 32 more efficiently (before attenuation
increases). Accordingly, it is possible to increase the effect of
suppressing vibration of the robot 1.
[0107] The third arm 14 is connected to a front end portion of the
second arm 13. In the third arm 14, the driving mechanism 3c has
the motor 404M and is stored in the arm body 2c. The arm body 2c is
sealed airtight by the sealing unit 4c. The arm body 2c is
constituted by a member corresponding to the root portion 251 of
the arm body 2a and the root portion 252 of the arm body 2b.
[0108] The above-described speed reducer 45 is provided on the
third rotating axis O3 in the third arm 14, and the third arm 14 is
connected to the second arm 13 through the speed reducer 45. Since
a "planetary gear-type" speed reducer having high rigidity is used
as the speed reducer 45, the vibrational component (the vibrational
component of the angular velocity around the third rotating axis
O3; the same applies to the following description) of the third arm
14 is easily transmitted to the second arm 13 through the speed
reducer 45. For this reason, the angular velocity of the second arm
13 including the vibrational component of the third arm 14 can be
detected by the second angular velocity sensor 32 provided in the
second arm 13, and to increase the effect of suppressing vibration
of the robot 1.
[0109] Here, in order to detect the angular velocity of the third
arm 14, it is considered that the same angular velocity sensor unit
(angular velocity sensor) as the first and second angular velocity
sensor units 71 and 72 is provided in the third arm 14. However, in
this case, it is desirable to secure a space for arranging the
angular velocity sensor unit in the third arm 14, causing an
increase in size (increase in weight) of the third arm 14 by the
same amount. Since the third arm 14 is located on the front end
side of the robot 1, the ratio of an increase in vibration with
respect to the increase in weight is larger than other portions
(first and second arms 12 and 13). Accordingly, if an angular
velocity sensor unit is also arranged in the third arm 14,
vibration increases in the robot 1.
[0110] If an angular velocity sensor unit is arranged in the third
arm 14, for example, it is desirable to extract a cable, which is
connected to the angular velocity sensor unit, to the second arm 13
through the speed reducer 45. If a cavity through which the cable
passes is formed in the speed reducer 45, rigidity of the speed
reducer 45 is degraded by the same amount, and in order to prevent
degradation of rigidity, an increase in size (increase in weight)
of the speed reducer 45 occurs. If rigidity of the speed reducer 45
is degraded, vibration of the robot 1 increases, and vibration of
the third arm 14 is less likely to be transmitted to the second arm
13. If the speed reducer 45 increases in weight, vibration
increases in the robot 1.
[0111] In this way, if an angular velocity sensor unit is arranged
in the third arm 14, vibration of the robot excessively increases,
making it difficult to perform control for suppressing vibration.
Accordingly, in the robot 1, an angular velocity sensor unit is not
arranged in the third arm 14, and alternatively, the vibrational
component of the third arm 14 is detected by the second angular
velocity sensor unit 72 arranged in the second arm 13. With this,
an increase in vibration of the robot 1 due to degradation of
rigidity of the speed reducer 45 or an increase in weight of the
third arm 14 is prevented, and vibration of the third arm 14 is
easily transmitted to the second arm 13 through the speed reducer
45. For this reason, it is possible to effectively suppress
vibration of the robot 1 under control described below.
[0112] The fourth arm 15 is connected to a front end portion of the
third arm 14 in parallel with the center axis direction. In the
fourth arm 15, the driving mechanism 3d has the motors 405M and
406M and is stored in the arm body 2d. The arm body 2d is sealed
airtight by the sealing unit 4d. The arm body 2d has a pair of
tongue piece portions 244a and 244b on the front end side, and a
root portion 254 on the base end side. The tongue piece portion
244a and the tongue piece portion 244b are separated from each
other and opposite to each other. The support ring 162 of the wrist
16 is arranged between the tongue piece portion 244a and the tongue
piece portion 244b.
[0113] The wrist 16 is connected to a front end portion (an end
portion on an opposite side to the base 11) of the fourth arm 15.
In the wrist 16, for example, a manipulator (not shown) which holds
precision equipment, such as a wristwatch, is detachably mounted as
a functional unit (end effector) in the front end portion (the end
portion on an opposite side to the fourth arm 15). The manipulator
is not particularly limited, and for example, a configuration in
which a plurality of finger portions are provided may be used. The
robot 1 controls the operations of the arms 12 to 15, the wrist 16,
and the like while holding the precision equipment with the
manipulator, thereby conveying the precision equipment.
[0114] The wrist 16 has a cylindrical wrist body (sixth arm) 161,
and a ring-shaped support ring (fifth arm) 162 which is constituted
separately from the wrist body 161 and is provided in the base end
portion of the wrist body 161.
[0115] A front end surface 163 of the wrist body 161 is a flat
surface, and becomes amounting surface on which the manipulator is
mounted. The wrist body 161 is connected to the driving mechanism
3d of the fourth arm 15 through the joint 176, and rotates around
the sixth rotating axis O6 by driving of the motor 406M of the
driving mechanism 3d.
[0116] The support ring 162 is connected to the driving mechanism
3d of the fourth arm 15 through the joint 175, and rotates around
the fifth rotating axis O5 along with the wrist body 161 by driving
of the motor 405M of the driving mechanism 3d.
[0117] A constituent material of the arm body 2 is not particularly
limited, and for example, various metal materials may be used and
of these, aluminum or an aluminum alloy is particularly preferably
used. If the arm body 2 is a casting which is molded using a mold,
aluminum or an aluminum alloy is used as the constituent material
of the arm body 2, whereby it is possible to easily perform
metallic molding.
[0118] A constituent material of each of the base body 112 of the
base 11, the wrist body 161 of the wrist 16, and the support ring
162 is not particularly limited, and for example, the same material
as the constituent material of the arm body 2 may be used. As a
constituent material of the wrist body 161 of the wrist 16,
stainless steel is preferably used.
[0119] A constituent material of the sealing unit 4 is not
particularly limited, and for example, various resin materials and
various metal materials may be used. A resin material is used as
the constituent material of the sealing unit 4, whereby it is
possible to achieve reduction in weight.
[0120] Next, the first angular velocity sensor unit 71 and the
second angular velocity sensor unit 72 will be described.
[0121] As shown in FIG. 9, the first angular velocity sensor unit
71 has a first housing 711, and a circuit board 712 having a wiring
and a first angular velocity sensor 31 and a circuit unit 713
electrically connected onto the circuit board 712, which are
provided in the first housing 711. In this embodiment, the first
housing 711 is made of a sealing material, and the first angular
velocity sensor 31, the circuit unit 713, and the circuit board 712
are collectively sealed by the sealing material.
[0122] Similarly, the second angular velocity sensor unit 72 has a
second housing 721, and a circuit board 722 having a wiring and a
second angular velocity sensor 32 and a circuit unit 723
electrically connected onto the circuit board 722, which are
provided in the second housing 721. In this embodiment, the second
housing 721 is made of a sealing material, and the second angular
velocity sensor 32, the circuit unit 723, and the circuit board 722
are collectively sealed by the sealing material.
[0123] In this way, the first angular velocity sensor 31, the
circuit unit 713, the second angular velocity sensor 32, and the
circuit unit 723 are packaged, thereby simplifying the
configuration. Since the first angular velocity sensor unit 71 and
the second angular velocity sensor unit 72 have the same
configuration, hereinafter, the first angular velocity sensor unit
71 will be representatively described, and description of the
second angular velocity sensor unit 72 will be omitted.
[0124] The first angular velocity sensor 31 has a gyro element 33
which includes one detection axis. The configuration of the gyro
element 33 is not particularly limited, and for example, the
following gyro element may be used. Hereinafter, as shown in FIGS.
10, 11A, and 11B, the axes orthogonal to each other are defined as
an X axis (second axis), a Y axis (first axis), and a Z axis.
[0125] As shown in FIG. 10, the gyro element 33 has a quartz
substrate having a base portion 331, a pair of detection vibrating
arms 332a and 332b which extend from both sides of the base portion
331 in the Y-axis direction and in opposite directions, a pair of
connecting arms 333a and 333b which extend from both sides of the
base portion 331 in the X-axis direction and in opposite
directions, a pair of driving vibrating arms 334a and 334b which
extend from both sides of a front end portion of the connecting arm
333a in the Y-axis direction and in opposite directions, and a pair
of driving vibrating arms 334c and 334d which extend from both
sides of a front end portion of the connecting arm 333b in the
Y-axis direction and in opposite directions, detection electrodes
(not shown) which are provided in the respective detection
vibrating arms 332a and 332b, and driving electrodes (not shown)
which are provided in the respective driving vibrating arms 334a,
334b, 334c, and 334d.
[0126] The gyro element 33 is actuated as follows. In FIGS. 11A and
11B, the respective vibrating arms are represented by lines so as
to easily express a vibration form.
[0127] First, as shown in FIG. 11A, in a state where the angular
velocity is not applied to the gyro element 33, a voltage is
applied to the driving electrodes to cause bending vibration of the
respective driving vibrating arms 334a, 334b, 334c, and 334d in a
direction indicated by arrow E. In the bending vibration, a
vibration mode indicated by a solid line and a vibration mode
indicated by a two-dot-chain line are repeated at a predetermined
frequency. At this time, the driving vibrating arms 334a and 334b
and the driving vibrating arms 334c and 334d vibrate
line-symmetrically with respect to the Y axis passing through the
center of gravity G.
[0128] As shown in FIG. 11B, in a state where the vibration is
performed, if an angular velocity w around the Z axis (detection
axis) is applied to the gyro element 33, a coriolis force in a
direction of arrow B acts on the driving vibrating arms 334a, 334b,
334c, and 334d and the connecting arms 333a and 333b, and renewed
vibration is excited in these arms. Simultaneously, vibration in a
direction of arrow C in response to vibration indicated by arrow B
is excited in the detection vibrating arms 332a and 332b. A signal
(voltage) according to strain of the detection vibrating arms 332a
and 332b caused by vibration of the detection vibrating arms 332a
and 332b is output from the detection electrodes.
[0129] In the above, the gyro element 33 has been simply
described.
[0130] The circuit unit 713 has an AD conversion unit which
performs AD conversion on the signal output from the first angular
velocity sensor 31, that is, converts an analog signal to a digital
signal, and a transmitting unit which transmits the converted
signal to the robot control device 20.
[0131] The appearance of the first housing 711 is a cube. The
detection axis of the first angular velocity sensor 31 matches (is
aligned with) the normal to the largest surface of the rectangular
parallelepiped of the first housing 711. With this, it is possible
to recognize the directions of the detection axis of the first
angular velocity sensor 31 and the detection axis of the second
angular velocity sensor 32 easily and reliably, and to allow the
first angular velocity sensor 31 and the second angular velocity
sensor 32 to take an appropriate posture easily. In particular, as
described above, since the gyro element 33 has a flat shape, and
the normal to the plate surface is defined as the detection axis,
it becomes easy to allow the detection axis of the first angular
velocity sensor 31 to match the normal to the largest surface of
the rectangular parallelepiped of the first housing 711. As shown
in FIG. 6, the first angular velocity sensor unit 71 is provided
such that a detection axis 31a of the first angular velocity sensor
31 is parallel to the first rotating axis O1. As shown in FIG. 8,
the second angular velocity sensor unit 72 is provided such that a
detection axis 32a of the second angular velocity sensor 32 is
parallel to the second rotating axis O2 and the third rotating axis
O3.
[0132] As shown in FIGS. 6 and 9, the first housing 711 has
attachment portions 7111 to be attached to the first arm 12 in four
corner portions. In each attachment portion 7111, a hole 7112 into
which a screw (fixing member) 81 is inserted is formed.
[0133] The first arm 12 has three arm-side attachment portions 121
which are formed integrally with the arm body 2a and to which the
first angular velocity sensor unit 71 (first housing 711) is
attached. Each arm-side attachment portion 121 is constituted by a
fulcrum which is formed to protrude toward the arm body 2a. The
respective arm-side attachment portions 121 are arranged at
positions corresponding to the attachment portions 7111 of the
first housing 711. In the front end portion of each arm-side
attachment portion 121, a threaded bore 122 into which the screw 81
is threaded is formed.
[0134] The term "integrally" in the arm-side attachment portions
121 formed integrally with the arm body 2a refers to a case where
the arm body 2a and the arm-side attachment portions 121 are formed
simultaneously by, for example, die-casting or the like, instead of
forming members separately and bonding the members. The same
applies to the term "integrally" in below-described arm-side
attachment portions 131 formed integrally with the arm body 2b.
[0135] When attaching (providing) the first angular velocity sensor
unit 71 to the first arm 12, three screws 81 are inserted into the
holes 7112 of the first housing 711 and threaded into the threaded
bores 122 in the front end portions of the arm-side attachment
portions 121 of the first arm 12. With this, the three attachment
portions 7111 of the first housing 711 are fixed to the arm-side
attachment portions 121 of the first arm 12 by the screws 81. That
is, the first angular velocity sensor unit 71 is attached to the
arm-side attachment portions 121 of the first arm 12. In this case,
there is nothing between the arm-side attachment portions 121 and
the first angular velocity sensor unit 71, that is, the first
angular velocity sensor unit 71 is directly attached to the
arm-side attachment portions 121. With this, it is possible to
attach the first angular velocity sensor unit 71 to the first arm
12 reliably, and to allow the first angular velocity sensor unit 71
to rotate integrally with the first arm 12 reliably.
[0136] The term "directly" when the first angular velocity sensor
unit 71 is directly attached to the arm-side attachment portions
121 refers to a case excluding a case where the first angular
velocity sensor unit 71 is attached to an intermediate, such as a
separate substrate, and the intermediate is attached to the
arm-side attachment portions 121. That is, the term "directly"
refers to a case where there is nothing, excluding an adhesive or
the like, between the arm-side attachment portions 121 and the
first angular velocity sensor unit 71. The same applies to the term
"directly" when the below-described second angular velocity sensor
unit 72 is directly attached to arm-side attachment portions
131.
[0137] The screws 81 are conductive and are formed of, for example,
various metal materials. If the screws 81 are inserted into the
holes 7112 of the first housing 711 and are threaded into the
threaded bores 122 in the front end portions of the arm-side
attachment portions 121, the screws 81 are electrically connected
to the wiring of the circuit board 712 electrically connected to a
ground terminal of the circuit unit 713, and the front end portions
of the screws 81 are electrically connected to the arm-side
attachment portions 121. With this, the ground terminal of the
circuit unit 713 is electrically connected to the arm body 2a of
the first arm 12 through the wiring and the screws 81 and grounded.
Accordingly, it is possible to reduce the number of components for
grounding and to simplify the configuration.
[0138] As shown in FIGS. 8 and 9, the second housing 721 has
attachment portions 7211 to be attached to the second arm 13 in
four corner portions. In each attachment portion 7211, a hole 7212
into which the screw 81 is inserted is formed.
[0139] As shown in FIG. 8, the second arm 13 has the arm-side
attachment portions 131 which are formed integrally with the arm
body 2b and to which the second angular velocity sensor unit 72
(second housing 721) is attached. The arm-side attachment portions
131 are formed integrally with the arm body 2b. In each of the
corner portions of the arm-side attachment portions 131, a threaded
bore into which the screw 81 is threaded is formed.
[0140] When attaching the second angular velocity sensor unit 72 to
the second arm 13, the four screws 81 are inserted into the holes
7212 of the second housing 721 and threaded into the threaded bores
in the front end portions of the arm-side attachment portions 131
of the second arm 13. With this, the four attachment portions 7211
of the second housing 721 are fixed to the arm-side attachment
portions 131 of the second arm 13 by the screws 81. That is, the
second angular velocity sensor unit 72 is attached to the arm-side
attachment portions 131 of the second arm 13. In this case, there
is nothing between the arm-side attachment portions 131 and the
second angular velocity sensor unit 72, that is, the second angular
velocity sensor unit 72 is directly attached to the arm-side
attachment portions 131. Accordingly, it is possible to attach the
second angular velocity sensor unit 72 to the second arm 13
reliably, and to allow the second angular velocity sensor unit 72
to rotate integrally with the second arm 13 reliably.
[0141] If the screws 81 are inserted into the holes 7212 of the
second housing 721 and threaded into the threaded bores of the
arm-side attachment portions 131, the screws 81 are electrically
connected to a wiring of the circuit board 722 electrically
connected to a ground terminal of the circuit unit 723, and the
front end portions of the screws 81 are electrically connected to
the arm-side attachment portions 131. With this, the ground
terminal of the circuit unit 723 is electrically connected to the
arm body 2b of the second arm 13 through the wiring and the screws
81 and grounded. Accordingly, it is possible to reduce the number
of components for grounding and to simplify the configuration.
[0142] Next, the configuration of the robot control device 20 will
be described referring to FIGS. 4 and 12 to 17.
[0143] The robot control device 20 has a receiving unit which
receives a first signal output from the first angular velocity
sensor 31, a second signal output from the second angular velocity
sensor 32, and respective signals output from the position sensors
411 to 416, a calculation unit which obtains a vibrational
component of the angular velocity of the first arm 12 and a
vibrational component of the angular velocity of the second arm 13
on the basis of the first signal and the second signal received by
the receiving unit, and a control unit which controls the actuation
of the robot 1 on the basis of the vibrational component of the
angular velocity of the first arm 12 and the vibrational component
of the angular velocity of the second arm 13 obtained by the
calculation unit.
[0144] Specifically, as shown in FIGS. 4 and 12 to 17, the robot
control device 20 has the receiving unit, a first driving source
control unit 201 which controls the actuation of the first driving
source 401, a second driving source control unit 202 which controls
the actuation of the second driving source 402, a third driving
source control unit 203 which controls the actuation of the third
driving source 403, a fourth driving source control unit 204 which
controls the actuation of the fourth driving source 404, a fifth
driving source control unit 205 which controls the actuation of the
fifth driving source 405, and a sixth driving source control unit
206 which controls the actuation of the sixth driving source
406.
[0145] The calculation unit is constituted by a below-described
angular velocity calculation unit 561 of the first driving source
control unit 201, a subtracter 571, and a below-described angular
velocity calculation unit 562 of the second driving source control
unit 202.
[0146] As shown in FIG. 12, the first driving source control unit
201 has a subtracter 511, a position control unit 521, a subtracter
531, an angular velocity control unit 541, a rotation angle
calculation unit 551, an angular velocity calculation unit 561, a
subtracter 571, a conversion unit 581, a correction value
calculation unit 591, and an adder 601.
[0147] As shown in FIG. 13, the second driving source control unit
202 has a subtracter 512, a position control unit 522, a subtracter
532, an angular velocity control unit 542, a rotation angle
calculation unit 552, an angular velocity calculation unit 562, a
subtracter 572, a conversion unit 582, a correction value
calculation unit 592, and an adder 602.
[0148] As shown in FIG. 14, the third driving source control unit
203 has a subtracter 513, a position control unit 523, a subtracter
533, an angular velocity control unit 543, a rotation angle
calculation unit 553, and an angular velocity calculation unit
563.
[0149] As shown in FIG. 15, the fourth driving source control unit
204 has a subtracter 514, a position control unit 524, a subtracter
534, an angular velocity control unit 544, a rotation angle
calculation unit 554, and an angular velocity calculation unit
564.
[0150] As shown in FIG. 16, the fifth driving source control unit
205 has a subtracter 515, a position control unit 525, a subtracter
535, an angular velocity control unit 545, a rotation angle
calculation unit 555, and an angular velocity calculation unit
565.
[0151] As shown in FIG. 17, the sixth driving source control unit
206 has a subtracter 516, a position control unit 526, a subtracter
536, an angular velocity control unit 546, a rotation angle
calculation unit 556, and an angular velocity calculation unit
566.
[0152] Here, the robot control device 20 calculates a target
position of the wrist 16 on the basis of the content of processing
performed by the robot 1, and produces a track for moving the wrist
16 to the target position. The robot control device 20 measures the
rotation angle of each of the driving sources 401 to 406 at every
predetermined control period such that the wrist 16 moves along the
produced track, and outputs values calculated on the basis of the
measurement results to the driving source control units 201 to 206
as a position command Pc of each of the driving sources 401 to 406
(see FIGS. 12 to 17). In the above and following description, the
description "the values are input and output" or the like means
that "signals corresponding to the values are input and
output".
[0153] As shown in FIG. 12, in addition to the position command Pc
of the first driving source 401, the detection signals from the
first position sensor 411 and the first angular velocity sensor 31
are input to the first driving source control unit 201. The first
driving source control unit 201 drives the first driving source 401
by feedback control using the respective detection signals such
that the rotation angle (position feedback value Pfb) of the first
driving source calculated from the detection signal of the first
position sensor 411 becomes the position command Pc and a
below-described angular velocity feedback value .omega.fb becomes a
below-described angular velocity command .omega.c.
[0154] That is, the position command Pc and a below-described
position feedback value Pfb from the rotation angle calculation
unit 551 are input to the subtracter 511 of the first driving
source control unit 201. In the rotation angle calculation unit
551, the number of pulses input from the first position sensor 411
is counted, and the rotation angle of the first driving source 401
according to the count value is output to the subtracter 511 as the
position feedback value Pfb. The subtracter 511 outputs the
deviation (the value obtained by subtracting the position feedback
value Pfb from a target value of the rotation angle of the first
driving source 401) between the position command Pc and the
position feedback value Pfb to the position control unit 521.
[0155] The position control unit 521 performs predetermined
calculation processing using the deviation input from the
subtracter 511, and a proportional gain or the like as a preset
coefficient, and calculates a target value of the angular velocity
of the first driving source 401 according to the deviation. The
position control unit 521 outputs a signal representing the target
value (command value) of the angular velocity of the first driving
source 401 to the subtracter 531 as the angular velocity command
.omega.c. Here, in this embodiment, although proportional control
(P control) is performed as feedback control, the invention is not
limited thereto.
[0156] The angular velocity command .omega.c and a below-described
angular velocity feedback value .omega.fb are input to the
subtracter 531. The subtracter 531 outputs the deviation (the value
obtained by subtracting the angular velocity feedback value
.omega.fb from the target value of the angular velocity of the
first driving source 401) between the angular velocity command
.omega.c and the angular velocity feedback value .omega.fb to the
angular velocity control unit 541.
[0157] The angular velocity control unit 541 performs predetermined
calculation processing including integration using the deviation
input from the subtracter 531, and a proportional gain, an integral
gain, and the like as preset coefficients, produces a driving
signal (driving current) of the first driving source 401 according
to the deviation, and supplies the driving signal to the motor 401M
through the motor driver 301. Here, in this embodiment, although PI
control is performed as feedback control, the invention is not
limited thereto.
[0158] In this way, the feedback control is performed such that the
position feedback value Pfb becomes equal to the position command
Pc as much as possible and the angular velocity feedback value
.omega.fb becomes equal to the angular velocity command .omega.c as
much as possible, and the driving current of the first driving
source 401 is controlled.
[0159] Next, the angular velocity feedback value .omega.fb in the
first driving source control unit 201 will be described.
[0160] In the angular velocity calculation unit 561, an angular
velocity .omega.m1 of the first driving source 401 is calculated on
the basis of the frequency of a pulse signal input from the first
position sensor 411, and the angular velocity .omega.m1 is output
to the adder 601.
[0161] In the angular velocity calculation unit 561, an angular
velocity (.omega.A1m around the first rotating axis O1 of the first
arm 12 is calculated on the basis of the frequency of the pulse
signal input from the first position sensor 411, and the angular
velocity (.omega.A1m is output to the subtracter 571. The angular
velocity (.omega.A1m is a value obtained by dividing the angular
velocity .omega.m1 by a reduction ratio between the motor 401M of
the first driving source 401 and the first arm 12, that is, in the
joint 171.
[0162] The angular velocity around the first rotating axis O1 of
the first arm 12 is detected by the first angular velocity sensor
31. The detection signal of the first angular velocity sensor 31,
that is, the angular velocity .omega.A1 around the first rotating
axis O1 of the first arm 12 detected by the first angular velocity
sensor 31 is output to the subtracter 571.
[0163] The angular velocity .omega.A1 and the angular velocity
.omega.A1m are input to the subtracter 571, and the subtracter 571
outputs a value .omega.A1s (=.omega.A1-(.omega.1m) obtained by
subtracting the angular velocity .omega.A1m from the angular
velocity .omega.A1 to the conversion unit 581. The value .omega.A1s
corresponds to a vibrational component (vibrational angular
velocity) of the angular velocity around the first rotating axis O1
of the first arm 12. Hereinafter, .omega.A1s is referred to as a
vibrational angular velocity. In this embodiment, feedback control
is performed to return a below-described gain Ka multiple of the
vibrational angular velocity .omega.A1s (in detail, an angular
velocity .omega.m1s in the motor 401M which is a value produced on
the basis of the vibrational angular velocity .omega.A1s) to the
input side of the first driving source 401. Specifically, the
feedback control is performed on the first driving source 401 such
that the vibrational angular velocity .omega.A1s becomes 0 as much
as possible. Accordingly, it is possible to suppress vibration of
the robot 1. In the feedback control, the angular velocity of the
first driving source 401 is controlled.
[0164] The conversion unit 581 converts the vibrational angular
velocity .omega.A1s to the angular velocity .omega.m1s in the first
driving source 401, and outputs the angular velocity .omega.m1s to
the correction value calculation unit 591. The conversion can be
performed by multiplying the vibrational angular velocity
.omega.A1s by a reduction ratio between the motor 401M of the first
driving source 401 and the first arm 12, that is, in the joint
171.
[0165] The correction value calculation unit 591 multiplies the
angular velocity .omega.m1s by the gain (feedback gain) Ka as a
preset coefficient, obtains a correction value Ka.omega.m1s, and
outputs the correction value Ka.omega.m1s to the adder 601.
[0166] The angular velocity .omega.m1 and the correction value
Ka.omega.m1s are input to the adder 601. The adder 601 outputs the
sum of the angular velocity .omega.m1 and the correction value
Ka.omega.m1s to the subtracter 531 as the angular velocity feedback
value .omega.fb. A subsequent operation is as described above.
[0167] As shown in FIG. 13, in addition to the position command Pc
of the second driving source 402, the detection signals from the
second position sensor 412 and the second angular velocity sensor
32 are input to the second driving source control unit 202. The
second driving source control unit 202 drives the second driving
source 402 by feedback control using the respective detection
signals such that the rotation angle (position feedback value Pfb)
of the second driving source calculated from the detection signal
of the second position sensor 412 becomes the position command Pc
and a below-described angular velocity feedback value .omega.fb
becomes a below-described angular velocity command .omega.c.
[0168] That is, the position command Pc and a below-described
position feedback value Pfb from the rotation angle calculation
unit 552 are input to the subtracter 512 of the second driving
source control unit 202. In the rotation angle calculation unit
552, the number of pulses input from the second position sensor 412
is counted, and the rotation angle of the second driving source 402
according to the count value is output to the subtracter 512 as the
position feedback value Pfb. The subtracter 512 outputs the
deviation (the value obtained by subtracting the position feedback
value Pfb from a target value of the rotation angle of the second
driving source 402) between the position command Pc and the
position feedback value Pfb to the position control unit 522.
[0169] The position control unit 522 performs predetermined
calculation processing using the deviation input from the
subtracter 512, and a proportional gain or the like as a preset
coefficient, and calculates the target value of the angular
velocity of the second driving source 402 according to the
deviation. The position control unit 522 outputs a signal
representing the target value (command value) of the angular
velocity of the second driving source 402 to the subtracter 532 as
the angular velocity command .omega.c. Here, in this embodiment,
although proportional control (P control) is performed as feedback
control, the invention is not limited thereto.
[0170] The angular velocity command .omega.c and a below-described
angular velocity feedback value .omega.fb are input to the
subtracter 532. The subtracter 532 outputs the deviation (the value
obtained by subtracting the angular velocity feedback value
.omega.fb from the target value of the angular velocity of the
second driving source 402) between the angular velocity command
.omega.c and the angular velocity feedback value .omega.fb to the
angular velocity control unit 542.
[0171] The angular velocity control unit 542 performs predetermined
calculation processing including integration using the deviation
input from the subtracter 532, and a proportional gain, an integral
gain, and the like as preset coefficients, produces a driving
signal (driving current) of the second driving source 402 according
to the deviation, and supplies the driving signal to the motor 402M
through the motor driver 302. Here, in this embodiment, although PI
control is performed as feedback control, the invention is not
limited thereto.
[0172] In this way, the feedback control is performed such that the
position feedback value Pfb becomes equal to the position command
Pc as much as possible and the angular velocity feedback value
.omega.fb becomes equal to the angular velocity command .omega.c as
much as possible, and the driving current of the second driving
source 402 is controlled.
[0173] Next, the angular velocity feedback value .omega.fb in the
second driving source control unit 202 will be described.
[0174] In the angular velocity calculation unit 562, an angular
velocity .omega.m2 of the second driving source 402 is calculated
on the basis of the frequency of a pulse signal input from the
second position sensor 412, and the angular velocity .omega.m2 is
output to the adder 602.
[0175] In the angular velocity calculation unit 562, an angular
velocity .omega.A2m around the second rotating axis O2 of the
second arm 13 is calculated on the basis of the frequency of the
pulse signal input from the second position sensor 412, and the
angular velocity .omega.A2m is output to the subtracter 572. The
angular velocity .omega.A2m is a value obtained by dividing the
angular velocity .omega.m2 by a reduction ratio between the motor
402M of the second driving source 402 and the second arm 13, that
is, in the joint 172.
[0176] The angular velocity around the second rotating axis O2 of
the second arm 13 is detected by the second angular velocity sensor
32. The detection signal of the second angular velocity sensor 32,
that is, the angular velocity .omega.A2 around the second rotating
axis O2 of the second arm 13 detected by the second angular
velocity sensor 32 is output to the subtracter 572. Since the
second rotating axis O2 is orthogonal to the first rotating axis
O1, it is possible to obtain the angular velocity around the second
rotating axis O2 of the second arm 13 easily and reliably without
being affected by operation or vibration of the first arm 12.
[0177] The angular velocity (0A2 and the angular velocity
.omega.A2m are input to the subtracter 572, and the subtracter 572
outputs a value .omega.A2s (=.omega.A2-.omega.A2m) obtained by
subtracting the angular velocity .omega.A2m from the angular
velocity .omega.A2 to the conversion unit 582. As described above,
since the second angular velocity sensor 32 also detects the
vibrational component of the angular velocity of the third arm 14,
the value .omega.A2s corresponds to the total of the vibrational
component (vibrational angular velocity) of the angular velocity
around the second rotating axis of the second arm 13 and the
vibrational component (vibrational angular velocity) of the angular
velocity around the third rotating axis O3 of the third arm 14.
Hereinafter, .omega.A2s is referred to as a vibrational angular
velocity. In this embodiment, feedback control is performed to
return a below-described gain Ka multiple of the vibrational
angular velocity .omega.A2s (in detail, an angular velocity
.omega.m2s in the motor 402M which is a value produced on the basis
of the vibrational angular velocity .omega.A2s) to the input side
of the second driving source 402. Specifically, the feedback
control is performed on the second driving source 402 such that the
vibrational angular velocity .omega.A2s becomes close to 0 as much
as possible. Accordingly, it is possible to suppress vibration of
the robot 1. In the feedback control, the angular velocity of the
second driving source 402 is controlled.
[0178] The conversion unit 582 converts the vibrational angular
velocity .omega.A2s to the angular velocity .omega.m2s in the
second driving source 402, and outputs the angular velocity
.omega.m2s to the correction value calculation unit 592. The
conversion can be performed by multiplying the vibrational angular
velocity .omega.A2s by a reduction ratio between the motor 402M of
the second driving source 402 and the second arm 13, that is, in
the joint 172.
[0179] The correction value calculation unit 592 multiplies the
angular velocity .phi.m2s by the gain (feedback gain) Ka as a
preset coefficient, obtains a correction value Ka.omega.m2s, and
outputs the correction value Ka.phi.m2s to the adder 602.
[0180] The angular velocity .omega.m2 and the correction value
Ka.phi.m2s are input to the adder 602. The adder 602 outputs the
sum of the angular velocity .omega.m2 and the correction value
Ka.phi.m2s to the subtracter 532 as the angular velocity feedback
value .omega.fb. A subsequent operation is as described above.
[0181] As shown in FIG. 14, in addition to the position command Pc
of the third driving source 403, the detection signal from the
third position sensor 413 is input to the third driving source
control unit 203. The third driving source control unit 203 drives
the third driving source 403 by feedback control using the
respective detection signals such that the rotation angle (position
feedback value Pfb) of the third driving source 403 calculated from
the detection signal of the third position sensor 413 becomes the
position command Pc and a below-described angular velocity feedback
value .omega.fb becomes a below-described angular velocity command
.omega.c.
[0182] That is, the position command Pc and a below-described
position feedback value Pfb from the rotation angle calculation
unit 553 are input to the subtracter 513 of the third driving
source control unit 203. In the rotation angle calculation unit
553, the number of pulses input from the third position sensor 413
is counted, and the rotation angle of the third driving source 403
according to the count value is output to the subtracter 513 as the
position feedback value Pfb. The subtracter 513 outputs the
deviation (the value obtained by subtracting the position feedback
value Pfb from a target value of the rotation angle of the third
driving source 403) between the position command Pc and the
position feedback value Pfb to the position control unit 523.
[0183] The position control unit 523 performs predetermined
calculation processing using the deviation input from the
subtracter 513, and a proportional gain or the like as a preset
coefficient, and calculates a target value of the angular velocity
of the third driving source 403 according to the deviation. The
position control unit 523 outputs a signal representing the target
value (command value) of the angular velocity of the third driving
source 403 to the subtracter 533 as the angular velocity command
.omega.c. Here, in this embodiment, although proportional control
(P control) is performed as feedback control, the invention is not
limited thereto.
[0184] In the angular velocity calculation unit 563, the angular
velocity of the third driving source 403 is calculated on the basis
of the frequency of a pulse signal input from the third position
sensor 413, and the angular velocity is output to the subtracter
533 as the angular velocity feedback value .omega.fb.
[0185] The angular velocity command .omega.c and the angular
velocity feedback value .omega.fb are input to the subtracter 533.
The subtracter 533 outputs the deviation (the value obtained by
subtracting the angular velocity feedback value .omega.fb from the
target value of the angular velocity of the third driving source
403) between the angular velocity command .omega.c and the angular
velocity feedback value .omega.fb to the angular velocity control
unit 543.
[0186] The angular velocity control unit 543 performs predetermined
calculation processing including integration using the deviation
input from the subtracter 533, and a proportional gain, an integral
gain, and the like as preset coefficients, produces a driving
signal (driving current) of the third driving source 403 according
to the deviation, and supplies the driving signal to the motor 403M
through the motor driver 303. Here, in this embodiment, although PI
control is performed as feedback control, the invention is not
limited thereto.
[0187] In this way, the feedback control is performed such that the
position feedback value Pfb becomes equal to the position command
Pc as much as possible and the angular velocity feedback value
.omega.fb becomes equal to the angular velocity command .omega.c as
much as possible, and the driving current of the third driving
source 403 is controlled.
[0188] The driving source control units 204 to 206 are the same as
the third driving source control unit 203, and thus, description
thereof will not be repeated.
[0189] As described above, in the robot 1 and the robot system 10,
the angular velocity of the first arm 12 can be detected by the
first angular velocity sensor 31, and since the third rotating axis
O3 is parallel to the second rotating axis O2, the angular velocity
of the second arm 13 including the vibrational component of the
angular velocity of the third arm 14 can be detected by the second
angular velocity sensor 32. Then, it is possible to suppress
vibration on the basis of these detection results.
[0190] Even if the posture of the robot 1 changes, the detection
axis of the first angular velocity sensor 31 is constant. For this
reason, it is not necessary to correct the angular velocity of the
first arm 12 detected by the first angular velocity sensor 31 with
the direction of the first angular velocity sensor 31.
[0191] Since the second rotating axis O2 is orthogonal to the first
rotating axis O1 and is parallel to an axis orthogonal to the first
rotating axis O1, even if the posture of the robot 1 changes, for
example, even if the first arm 12 rotates, the detection axis of
the second angular velocity sensor 32 is constant. For this reason,
it is not necessary to correct the angular velocity of the second
arm 13 detected by the second angular velocity sensor 32 with the
direction of the second angular velocity sensor 32.
[0192] Accordingly, complicated and enormous computation is not
required. Therefore, a computation error is less likely to occur,
and it is possible to reliably suppress vibration and to increase a
response speed in the control of the robot 1.
[0193] Since the angular velocity of the second arm 13 including
the vibrational component of the angular velocity of the third arm
14 is detected by the second angular velocity sensor 32, instead of
the angular velocity of the second arm 13, it is possible to more
reliably suppress vibration.
[0194] It is possible to reduce the number of angular velocity
sensors, to reduce cost, and to simplify the configuration compared
to a case where the angular velocity sensor is provided in the
third arm 14.
[0195] The actuation of the second driving source 402 which rotates
the second arm 13 on the base end side from the third arm 14 is
controlled, whereby it is possible to increase the effect of
suppressing vibration of the robot 1.
[0196] Although the robot, the robot control device, and the robot
system of the invention have been described on the basis of the
illustrated embodiment, the invention is not limited to the
embodiment, and the configuration of each unit can be substituted
with an arbitrary configuration having the same function. Other
arbitrary constituent components may be added to the present
invention.
[0197] As the motor of each driving source, in addition to the
servomotor, for example, a stepping motor or the like may be used.
If a stepping motor is used as the motor, as a position sensor, for
example, a position sensor which measures the number of driving
pulses input to the stepping motor so as to detect the rotation
angle of the motor may be used.
[0198] The type of each position sensor or each angular velocity
sensor is not particularly limited, and for example, an optical
type, a magnetic type, an electromagnetic type, an electrical type,
or the like may be used.
[0199] In the foregoing embodiment, although the actuation of the
second driving source rotating the second arm is controlled on the
basis of the detection result of the second angular velocity
sensor, the invention is not limited thereto, and for example, the
actuation of the third driving source rotating the third arm may be
controlled on the basis of the detection result of the second
angular velocity sensor.
[0200] In the foregoing embodiment, although the number of rotating
axes of the robot is six, the invention is not limited thereto, and
the number of rotating axes of the robot may be three, four, five,
or seven or more.
[0201] That is, in the foregoing embodiment, although, since the
wrist has two arms, the number of arms of the robot is six, the
invention is not limited thereto, and the number of arms of the
robot may be three, four, five, or seven or more.
[0202] In the foregoing embodiment, although the robot is a
single-arm robot which has an arm connector with a plurality of
arms rotatably connected together, the invention is not limited
thereto, and for example, the robot may be a robot having a
plurality of arm connectors, for example, a double-arm robot which
has two arm connectors with a plurality of arms rotatably connected
together, or the like.
* * * * *