U.S. patent application number 14/815083 was filed with the patent office on 2015-11-26 for semiconductor light emitting device.
This patent application is currently assigned to Kabushiki Kaisha Toshiba. The applicant listed for this patent is Kabushiki Kaisha Toshiba. Invention is credited to Rei HASHIMOTO, Jongil HWANG, Hiroshi KATSUNO, Shinya NUNOUE, Shinji SAITO.
Application Number | 20150340348 14/815083 |
Document ID | / |
Family ID | 52114725 |
Filed Date | 2015-11-26 |
United States Patent
Application |
20150340348 |
Kind Code |
A1 |
KATSUNO; Hiroshi ; et
al. |
November 26, 2015 |
SEMICONDUCTOR LIGHT EMITTING DEVICE
Abstract
According to one embodiment, a semiconductor light emitting
device includes: a conductive layer; a first stacked body; a second
stacked body; a first light-transmissive electrode; and a first
interconnect electrode. The first stacked body includes a first
semiconductor layer and a second semiconductor layer. The second
semiconductor layer is provided between the first semiconductor
layer and the conductive layer. The first light emitting layer is
provided between the first semiconductor layer and the second
semiconductor layer. The second stacked body includes a third
semiconductor layer, a fourth semiconductor layer, and a second
light emitting layer. The fourth semiconductor layer is provided
between the third semiconductor layer and the conductive layer. The
second light emitting layer is provided between the third
semiconductor layer and the fourth semiconductor layer. The first
interconnect electrode is provided between the second semiconductor
layer and the third semiconductor layer.
Inventors: |
KATSUNO; Hiroshi;
(Ishikawa-ken, JP) ; SAITO; Shinji; (Kanagawa-ken,
JP) ; HASHIMOTO; Rei; (Tokyo, JP) ; HWANG;
Jongil; (Ishikawa-ken, JP) ; NUNOUE; Shinya;
(Chiba-ken, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Kabushiki Kaisha Toshiba |
Minato-ku |
|
JP |
|
|
Assignee: |
Kabushiki Kaisha Toshiba
Minato-ku
JP
|
Family ID: |
52114725 |
Appl. No.: |
14/815083 |
Filed: |
July 31, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
14176431 |
Feb 10, 2014 |
9136253 |
|
|
14815083 |
|
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Current U.S.
Class: |
257/89 |
Current CPC
Class: |
H01L 2224/32145
20130101; H01L 33/387 20130101; H01L 25/0756 20130101; H01L 33/382
20130101; H01L 33/62 20130101; H01L 33/42 20130101; H01L 2924/0002
20130101; H01L 2924/0002 20130101; H01L 2924/00 20130101 |
International
Class: |
H01L 25/075 20060101
H01L025/075; H01L 33/42 20060101 H01L033/42; H01L 33/38 20060101
H01L033/38; H01L 33/62 20060101 H01L033/62 |
Foreign Application Data
Date |
Code |
Application Number |
Jun 26, 2013 |
JP |
2013-134282 |
Claims
1. A semiconductor light emitting device, comprising: a conductive
layer; a first stacked body including a first semiconductor layer
provided to be separated from the conductive layer in a first
direction, a second semiconductor layer provided between the first
semiconductor layer and the conductive layer, and a first light
emitting layer provided between the first semiconductor layer and
the second semiconductor layer; a second stacked body including a
third semiconductor layer provided between the second semiconductor
layer and the conductive layer, a fourth semiconductor layer
provided between the third semiconductor layer and the conductive
layer, and a second light emitting layer provided between the third
semiconductor layer and the fourth semiconductor layer; a bonding
layer provided between the second semiconductor layer and the third
semiconductor layer to transmit light emitted by the first light
emitting layer and the second light emitting layer; a first
interconnect electrode provided between the second semiconductor
layer and the third semiconductor layer; and a light-transmissive
electrode provided between the second semiconductor layer and the
bonding layer to have an ohmic contact with the second
semiconductor layer and to be electrically connected to the first
interconnect electrode, the light-transmissive electrode being
configured to transmit the light emitted by the first light
emitting layer and the second light emitting layer.
2. The device according to claim 1, wherein the conductive layer
has an ohmic contact with the fourth semiconductor layer.
3. The device according to claim 1, further comprising a second
interconnect electrode provided between the second semiconductor
layer and the third semiconductor layer to have an ohmic contact
with the third semiconductor layer.
4. The device according to claim 3, wherein at least a portion of
the first interconnect electrode overlaps the second interconnect
electrode in the first direction.
5. The device according to claim 3, further comprising: a first
electrode electrically connected to the first semiconductor layer;
a second electrode electrically connected to the second
semiconductor layer; and a third electrode electrically connected
to the third semiconductor layer, the second interconnect electrode
having a first interconnect portion, the light-transmissive
electrode having: a first transmissive portion provided between the
second semiconductor layer and the bonding layer; and a second
transmissive portion arranged with the first transmissive portion
in a direction perpendicular to the first direction, the first
semiconductor layer being disposed between the first electrode and
the first light emitting layer, the second transmissive portion
being disposed between the second electrode and the bonding layer,
the first interconnect portion being disposed between the third
electrode and the third semiconductor layer.
6. The device according to claim 3, further comprising: a first
electrode electrically connected to the first semiconductor layer;
a second electrode electrically connected to the second
semiconductor layer; and a third electrode electrically connected
to the third semiconductor layer, the first interconnect electrode
having a second interconnect portion, the second interconnect
electrode having a third interconnect portion, the first
semiconductor layer being disposed between the first electrode and
the first light emitting layer, the second interconnect portion
being disposed between the second electrode and the bonding layer,
the third interconnect portion being disposed between the third
electrode and the third semiconductor layer.
7. The device according to claim 5, wherein the second electrode
and the third electrode are provided to be separated from the
conductive layer in the direction perpendicular to the first
direction.
8. The device according to claim 5, wherein at least a portion of
the first electrode overlaps the first interconnect electrode in
the first direction.
9. The device according to claim 1, wherein the second light
emitting layer is configured to emit light different from the light
emitted by the first light emitting layer.
10. A semiconductor light emitting device, comprising: a conductive
layer; a first stacked body including a first semiconductor layer
provided to be separated from the conductive layer in a first
direction, a second semiconductor layer provided between the first
semiconductor layer and the conductive layer, and a first light
emitting layer provided between the first semiconductor layer and
the second semiconductor layer; a second stacked body including a
third semiconductor layer provided between the second semiconductor
layer and the conductive layer, a fourth semiconductor layer
provided between the third semiconductor layer and the conductive
layer, and a second light emitting layer provided between the third
semiconductor layer and the fourth semiconductor layer; a first
light-transmissive electrode provided between the second
semiconductor layer and the third semiconductor layer to have ohmic
contacts with the second semiconductor layer and the third
semiconductor layer, the first light-transmissive electrode being
configured to transmit light emitted by the first light emitting
layer and the second light emitting layer; a first interconnect
electrode provided between the second semiconductor layer and the
third semiconductor layer to be electrically connected to the first
light-transmissive electrode; a third stacked body including a
fifth semiconductor layer provided to be separated from the first
semiconductor layer in the first direction, a sixth semiconductor
layer provided between the fifth semiconductor layer and the first
semiconductor layer, and a third light emitting layer provided
between the fifth semiconductor layer and the sixth semiconductor
layer, the fifth semiconductor layer having a fifth conductivity
type, the sixth semiconductor layer having a sixth conductivity
type different from the fifth conductivity type; a second
light-transmissive electrode provided between the first
semiconductor layer and the sixth semiconductor layer to have ohmic
contacts with the first semiconductor layer and the sixth
semiconductor layer, the second light-transmissive electrode being
configured to transmit the light emitted by the first light
emitting layer, the second light emitting layer, and the third
light emitting layer; and a second interconnect electrode provided
between the first semiconductor layer and the sixth semiconductor
layer, the second interconnect electrode being electrically
connected to the second light-transmissive electrode; a third
electrode electrically connected to the fifth semiconductor layer;
a fourth electrode electrically connected to the first
semiconductor layer and the sixth semiconductor layer; and a fifth
electrode electrically connected to the second semiconductor layer
and the third semiconductor layer, the first light-transmissive
electrode having: a first transmissive portion provided between the
second semiconductor layer and the third semiconductor layer; and a
second transmissive portion arranged with the first transmissive
portion in a direction perpendicular to the first direction, the
second light-transmissive electrode having: a third transmissive
portion provided between the first semiconductor layer and the
sixth semiconductor layer; and a fourth transmissive portion
arranged with the third transmissive portion in the direction
perpendicular to the first direction, the fifth semiconductor layer
being disposed between the third electrode and the third light
emitting layer, the fourth transmissive portion being disposed
between the fourth electrode and the first semiconductor layer, the
second transmissive portion being disposed between the fifth
electrode and the third semiconductor layer.
11. The device according to claim 10, wherein the conductive layer
has an ohmic contact with the fourth semiconductor layer.
12. The device according to claim 10, further comprising: a first
electrode electrically connected to the first semiconductor layer;
and a second electrode electrically connected to the second
semiconductor layer and the third semiconductor layer, the first
light-transmissive electrode having: a first transmissive portion
provided between the second semiconductor layer and the third
semiconductor layer; and a second transmissive portion arranged
with the first transmissive portion in a direction perpendicular to
the first direction, the first semiconductor layer being disposed
between the first electrode and the first light emitting layer, the
second transmissive portion being disposed between the second
electrode and the third semiconductor layer.
13. The device according to claim 12, wherein the second electrode
is provided to be separated from the conductive layer in the
direction perpendicular to the first direction.
14. The device according to claim 12, wherein at least a portion of
the first electrode overlaps the first interconnect electrode in
the first direction.
15. The device according to claim 10, further comprising: a first
through-electrode piercing the conductive layer, the fourth
semiconductor layer, and the second light emitting layer in the
first direction to be electrically connected to the second
semiconductor layer and the third semiconductor layer; a first
insulating layer provided between the first through-electrode and
the fourth semiconductor layer and between the first
through-electrode and the second light emitting layer; a second
through-electrode piercing the conductive layer, the second stacked
body, the first light-transmissive electrode, the second
semiconductor layer, and the first light emitting layer in the
first direction to be electrically connected to the first
semiconductor layer; and a second insulating layer provided between
the second through-electrode and the second stacked body, between
the second through-electrode and the first light-transmissive
electrode, between the second through-electrode and the second
semiconductor layer, and between the second through-electrode and
the first light emitting layer.
16. The device according to claim 10, wherein at least a portion of
the first interconnect electrode overlaps the second interconnect
electrode in the first direction.
17. The device according to claim 10, wherein the fourth electrode
and the fifth electrode are provided to be separated from the
conductive layer in the direction perpendicular to the first
direction.
18. The device according to claim 10, wherein at least a portion of
the third electrode overlaps the second interconnect electrode in
the first direction.
19. The device according to claim 10, wherein the second light
emitting layer is configured to emit light different from the light
emitted by the first light emitting layer.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a division of U.S. patent application
Ser. No. 14/176,431, filed Feb. 10, 2014, which is based upon and
claims the benefit of priority from Japanese Patent Application No.
2013-134282, filed Jun. 26, 2013, the entire contents of each of
which is incorporated herein by reference.
FIELD
[0002] Embodiments described herein relate generally to a
semiconductor light emitting device.
BACKGROUND
[0003] A multi-color LED structure in which multiple LED chips are
stacked has been proposed as a structure of semiconductor light
emitting devices such as LEDs (Light Emitting Diodes), etc. Because
multiple LED chips are stacked, there are cases where the light
extraction efficiency decreases and/or the heat dissipation
decreases due to the thicknesses of the substrates, the stacking
method, etc. There are cases where color breakup occurs because the
light emitting regions are different between the multiple LED
chips. For the semiconductor light emitting device, it is desirable
to increase the light extraction efficiency, suppress color
breakup, etc.
BRIEF DESCRIPTION OF THE DRAWINGS
[0004] FIG. 1A and FIG. 1B are schematic perspective views showing
the general concept of a semiconductor light emitting device
according to a first embodiment;
[0005] FIG. 2A to FIG. 2C are schematic views showing a
semiconductor light emitting device according to the first
embodiment;
[0006] FIG. 3A to FIG. 3C are schematic plan views showing
components of the semiconductor light emitting device according to
the first embodiment;
[0007] FIG. 4A to FIG. 4C are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment;
[0008] FIG. 5A to FIG. 5C are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment;
[0009] FIG. 6A to FIG. 6C are schematic views showing another
semiconductor light emitting device according to the first
embodiment;
[0010] FIG. 7A to FIG. 7D are schematic plan views showing
components of the semiconductor light emitting device according to
the first embodiment;
[0011] FIG. 8A to FIG. 8D are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment;
[0012] FIG. 9A to FIG. 9C are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment;
[0013] FIG. 10A to FIG. 10D are schematic views showing another
semiconductor light emitting device according to the first
embodiment;
[0014] FIG. 11A to FIG. 11C are schematic plan views showing
components of the semiconductor light emitting device according to
the first embodiment;
[0015] FIG. 12A to FIG. 12D are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment;
[0016] FIG. 13A to FIG. 13D are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment;
[0017] FIG. 14A and FIG. 14B are schematic perspective views
showing the general concept of a semiconductor light emitting
device according to a second embodiment;
[0018] FIG. 15A to FIG. 15D are schematic views showing a
semiconductor light emitting device according to the second
embodiment;
[0019] FIG. 16A to FIG. 16C are schematic plan views showing
components of the semiconductor light emitting device according to
the second embodiment;
[0020] FIG. 17A to FIG. 17D are schematic plan views showing other
components of the semiconductor light emitting device according to
the second embodiment;
[0021] FIG. 18A to FIG. 18C are schematic plan views showing other
components of the semiconductor light emitting device according to
the second embodiment;
[0022] FIG. 19A to FIG. 19C are schematic views showing another
semiconductor light emitting device according to the second
embodiment;
[0023] FIG. 20A and FIG. 20B are schematic perspective views
showing the general concept of a semiconductor light emitting
device according to a third embodiment;
[0024] FIG. 21A to FIG. 21D are schematic views showing a
semiconductor light emitting device according to the third
embodiment; and
[0025] FIG. 22A and FIG. 22B are schematic plan views showing
components of the semiconductor light emitting device according to
the third embodiment.
DETAILED DESCRIPTION
[0026] In general, according to one embodiment, a semiconductor
light emitting device includes: a conductive layer; a first stacked
body; a second stacked body; a first light-transmissive electrode;
and a first interconnect electrode. The first stacked body includes
a first semiconductor layer and a second semiconductor layer. The
first semiconductor layer is provided to be separated from the
conductive layer in a first direction. The second semiconductor
layer is provided between the first semiconductor layer and the
conductive layer. The first light emitting layer is provided
between the first semiconductor layer and the second semiconductor
layer. The second stacked body includes a third semiconductor
layer, a fourth semiconductor layer, and a second light emitting
layer. The third semiconductor layer is provided between the second
semiconductor layer and the conductive layer. The fourth
semiconductor layer is provided between the third semiconductor
layer and the conductive layer. The second light emitting layer is
provided between the third semiconductor layer and the fourth
semiconductor layer. The first light-transmissive electrode is
provided between the second semiconductor layer and the third
semiconductor layer. The first light-transmissive electrode has
ohmic contacts with the second semiconductor layer. The first
light-transmissive electrode is configured to transmit light
emitted by the first light emitting layer and the second light
emitting layer. The first interconnect electrode is provided
between the second semiconductor layer and the third semiconductor
layer. The first interconnect electrode is electrically connected
to the first light-transmissive electrode.
[0027] Embodiments will now be described with reference to the
drawings.
[0028] The drawings are schematic or conceptual; and the
relationships between the thicknesses and widths of portions, the
proportions of sizes between portions, etc., are not necessarily
the same as the actual values thereof. Further, the dimensions
and/or the proportions may be illustrated differently between the
drawings, even for identical portions.
[0029] In the drawings and the specification of the application,
components similar to those described in regard to a drawing
thereinabove are marked with like reference numerals, and a
detailed description is omitted as appropriate.
First Embodiment
[0030] FIG. 1A and FIG. 1B are schematic perspective views showing
the general concept of a semiconductor light emitting device
according to a first embodiment.
[0031] FIG. 1A is a schematic perspective view showing the general
concept of the structure of the semiconductor light emitting device
according to the first embodiment. FIG. 1B is a schematic
perspective view showing an extraction region of light emitted from
a first light emitting layer and an extraction region of light
emitted from a second light emitting layer.
[0032] The semiconductor light emitting device 110 shown in FIG. 1A
and FIG. 1B includes a first stacked body 10, a second stacked body
20, a first light-transmissive electrode 41, a first interconnect
electrode 46, and a reflecting electrode 51 (a conductive
layer).
[0033] The first stacked body 10 includes a first semiconductor
layer 11, a second semiconductor layer 13, and a first light
emitting layer 15.
[0034] The second stacked body 20 includes a third semiconductor
layer 21, a fourth semiconductor layer 23, and a second light
emitting layer 25.
[0035] The first semiconductor layer 11 has a first conductivity
type. The second semiconductor layer 13 has a second conductivity
type. The second conductivity type is different from the first
conductivity type. For example, the first conductivity type is the
n-type. For example, the second conductivity type is the p-type.
The first conductivity type may be the p-type. The second
conductivity type may be the n-type. In the following example, the
first conductivity type is the n-type. In the following example,
the second conductivity type is the p-type.
[0036] The third semiconductor layer 21 has a third conductivity
type. The fourth semiconductor layer 23 has a fourth conductivity
type. The fourth conductivity type is different from the third
conductivity type. For example, the third conductivity type is the
n-type. For example, the fourth conductivity type is the p-type.
The third conductivity type may be the p-type. The fourth
conductivity type may be the n-type. In the following example, the
third conductivity type is the n-type. In the following example,
the fourth conductivity type is the p-type.
[0037] The first semiconductor layer 11 is separated from the
reflecting electrode 51 in a first direction. The second
semiconductor layer 13 is provided between the first semiconductor
layer 11 and the reflecting electrode 51. The first light emitting
layer 15 is provided between the first semiconductor layer 11 and
the second semiconductor layer 13. For example, as shown in FIG.
1A, the first light emitting layer 15 emits a first light L1. The
first light L1 has a first peak wavelength.
[0038] A direction from the reflecting electrode 51 toward the
first semiconductor layer 11 is taken as a Z axis. One direction
orthogonal to the Z-axis direction is taken as an X-axis direction.
A direction orthogonal to the Z-axis direction and the X-axis
direction is taken as a Y-axis direction. In the example, the
Z-axis direction is aligned with the first direction.
[0039] The third semiconductor layer 21 is provided between the
second semiconductor layer 13 and the reflecting electrode 51. The
fourth semiconductor layer 23 is provided between the third
semiconductor layer 21 and the reflecting electrode 51. The second
light emitting layer 25 is provided between the third semiconductor
layer 21 and the fourth semiconductor layer 23. For example, as
shown in FIG. 1A, the second light emitting layer 25 emits a second
light L2. The second light L2 has a second peak wavelength. The
second peak wavelength of the second light L2 is different from the
first peak wavelength of the first light L1.
[0040] The first light-transmissive electrode 41 is provided
between the second semiconductor layer 13 and the third
semiconductor layer 21. The first light-transmissive electrode 41
has an ohmic contact with the second semiconductor layer 13. The
first light-transmissive electrode 41 has an ohmic contact with the
third semiconductor layer 21. The first light-transmissive
electrode 41 transmits the first light L1 emitted by the first
light emitting layer 15. The first light-transmissive electrode 41
transmits the second light L2 emitted by the second light emitting
layer 25.
[0041] The first light-transmissive electrode 41 has a
transmittance of 50% or more for the light emitted from the first
light emitting layer 15. The first light-transmissive electrode 41
has a transmittance of 50% or more for the light emitted from the
second light emitting layer 25. The first light-transmissive
electrode 41 is conductive. The first light-transmissive electrode
41 includes a material that can have an ohmic contact with at least
one selected from a p-type semiconductor layer and an n-type
semiconductor layer. For example, ITO, ITON, ZnO, etc., may be used
as the material of the first light-transmissive electrode 41. The
thickness (the length in the Z-axis direction) of the first
light-transmissive electrode 41 is, for example, not less than
about 10 nanometers (nm) and not more than about 10000 nm. The
transmittance of the light is higher when the thickness of the
first light-transmissive electrode 41 is relatively thin. The sheet
resistance of the first light-transmissive electrode 41 is lower in
the case where the thickness of the first light-transmissive
electrode 41 is relatively thick. Thereby, the spreading properties
of the current flowing through the first light-transmissive
electrode 41 improves. The first light-transmissive electrode 41
may include a relatively thin metal and/or an oxide of a relatively
thin metal.
[0042] The first interconnect electrode 46 is provided between the
second semiconductor layer 13 and the third semiconductor layer 21.
The first interconnect electrode 46 is electrically connected to
the first light-transmissive electrode 41.
[0043] The first light emitting layer 15 is positioned inside the
reflecting electrode 51 when projected onto a plane perpendicular
to the first direction. This is elaborated below. The reflecting
electrode 51 has an ohmic contact with the fourth semiconductor
layer 23. The reflecting electrode 51 includes, for example, silver
(Ag).
[0044] The first light-transmissive electrode 41 is used as both an
ohmic electrode of the second semiconductor layer 13 and an ohmic
electrode of the third semiconductor layer 21. That is, the first
light-transmissive electrode 41 is a common ohmic electrode between
the second semiconductor layer 13 and the third semiconductor layer
21.
[0045] The first interconnect electrode 46 is used as both an
interconnect electrode of the second semiconductor layer 13 and an
interconnect electrode of the third semiconductor layer 21. That
is, the first interconnect electrode 46 is a common interconnect
electrode between the second semiconductor layer 13 and the third
semiconductor layer 21.
[0046] The first interconnect electrode 46 has a non-ohmic contact
with the second semiconductor layer 13.
[0047] The first light L1 that is emitted from the first light
emitting layer 15 toward the reflecting electrode 51 is reflected
by the reflecting electrode 51 mainly in the Z-axis direction. The
second light L2 that is emitted from the second light emitting
layer 25 toward the reflecting electrode 51 is reflected by the
reflecting electrode mainly in the Z-axis direction. In the
semiconductor light emitting device 110 according to the
embodiment, the light that is emitted from the first light emitting
layer 15 is extracted mainly in the Z-axis direction. In the
semiconductor light emitting device 110 according to the
embodiment, the light that is emitted from the second light
emitting layer 25 is extracted mainly in the Z-axis direction. In
the specification of the application, being "mainly in the Z-axis
direction" includes not only directions that are strictly parallel
to the Z-axis direction but also directions that are oblique to the
Z-axis direction and have components parallel to the Z-axis
direction that are greater than the components perpendicular to the
Z-axis direction.
[0048] A non-light emitting region 17c of the first light emitting
layer 15 occurs for the first light L1 that is emitted from the
first light emitting layer 15 and extracted in the Z-axis
direction. Therefore, for example, as shown in FIG. 1B, a first
light extraction region 17 has a first extraction portion 17a and a
second extraction portion 17b. The first extraction portion 17a is
separated from the second extraction portion 17b in a plane (the XY
plane) perpendicular to the Z-axis direction.
[0049] A shadow 27c occurs due to the first interconnect electrode
46 for the second light L2 that is emitted from the second light
emitting layer 25 and extracted in the Z-axis direction. Therefore,
for example, as shown in FIG. 1B, a second light extraction region
27 has a third extraction portion 27a and a fourth extraction
portion 27b. The third extraction portion 27a is separated from the
fourth extraction portion 27b in the plane (the XY plane)
perpendicular to the Z-axis direction.
[0050] As described above, the first light-transmissive electrode
is a common ohmic electrode between the second semiconductor layer
13 and the third semiconductor layer 21. The first interconnect
electrode 46 is a common interconnect electrode between the second
semiconductor layer 13 and the third semiconductor layer 21.
[0051] According to the embodiment, the number of ohmic electrodes
disposed and the number of interconnect electrodes disposed can be
reduced. By reducing the number of ohmic electrodes disposed and
the number of interconnect electrodes disposed, the first light
extraction region 17 and the second light extraction region 27 are
widened. Thereby, the luminous efficiency of the semiconductor
light emitting device 110 can be increased.
[0052] According to the embodiment, the first light extraction
region 17 and the second light extraction region 27 can be aligned
by self-alignment. That is, the first extraction portion 17a and
the third extraction portion 27a can be aligned by self-alignment.
The second extraction portion 17b and the fourth extraction portion
27b can be aligned by self-alignment. In other words, the position
of the non-light emitting region 17c and the position of the shadow
27c can be aligned by self-alignment in the XY plane. Thereby,
color breakup can be suppressed.
[0053] FIG. 2A to FIG. 2C are schematic views showing a
semiconductor light emitting device according to the first
embodiment.
[0054] FIG. 3A to FIG. 3C are schematic plan views showing
components of the semiconductor light emitting device according to
the first embodiment.
[0055] FIG. 4A to FIG. 4C are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment.
[0056] FIG. 5A to FIG. 5C are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment.
[0057] FIG. 2A is a schematic plan view showing the semiconductor
light emitting device according to the first embodiment. FIG. 2B is
a cross-sectional view along line A1-A2 shown in FIG. 2A. FIG. 2C
is a cross-sectional view along line B1-B2 shown in FIG. 2A.
[0058] The semiconductor light emitting device 111 shown in FIG. 2A
to FIG. 2C includes the first stacked body 10, the second stacked
body 20, the first light-transmissive electrode 41, the first
interconnect electrode 46, the reflecting electrode 51, an
insulating layer 53, a support substrate 55, a back surface
electrode 57, a first electrode 61, and a second electrode 63.
[0059] The first stacked body 10 includes the first semiconductor
layer 11, the second semiconductor layer 13, and the first light
emitting layer 15.
[0060] The second stacked body 20 includes the third semiconductor
layer 21, the fourth semiconductor layer 23, and the second light
emitting layer 25.
[0061] The first semiconductor layer 11, the second semiconductor
layer 13, the first light emitting layer 15, the third
semiconductor layer 21, the fourth semiconductor layer 23, and the
second light emitting layer 25 are similar to those described above
in regard to FIG. 1A and FIG. 1B. A detailed description of these
components is omitted as appropriate.
[0062] The back surface electrode 57 is separated from the
reflecting electrode 51 in a direction (in the example, the
negative Z-axis direction) opposite to the first direction. The
support substrate 55 is provided between the back surface electrode
57 and the reflecting electrode 51. The support substrate 55 is,
for example, a silicon substrate, etc. As shown in FIG. 2B to FIG.
3B, the back surface electrode 57 is provided at a surface (a first
support substrate surface 55s) of the support substrate 55.
[0063] As shown in FIG. 3C, the insulating layer 53 is provided
around the reflecting electrode 51. The insulating layer includes,
for example, SiO.sub.2.
[0064] As shown in FIG. 4B, the first light-transmissive electrode
has a first transmissive portion 41p and a second transmissive
portion 41q. The first transmissive portion 41p is provided between
the second semiconductor layer 13 and the third semiconductor layer
21. The second transmissive portion 41q is arranged with the first
transmissive portion 41p in the plane perpendicular to the first
direction. In other words, the second transmissive portion 41q is
arranged with the first transmissive portion 41p in a direction
perpendicular to the first direction. In the first direction, the
first transmissive portion 41p may be aligned with the first light
emitting layer 15.
[0065] The first semiconductor layer 11 is disposed between the
first electrode 61 and the first light emitting layer 15. The first
electrode 61 is electrically connected to the first semiconductor
layer 11. As shown in FIG. 2A and FIG. 5C, the first electrode 61
includes a pad portion 61p, a first fine wire portion 61q, and a
second fine wire portion 61r. The first fine wire portion 61q
extends outward from the pad portion 61p with the pad portion 61p
as a base portion. The second fine wire portion 61r extends outward
from the pad portion 61p with the pad portion 61p as a base
portion.
[0066] As shown in FIG. 2C, the second transmissive portion 41q is
disposed between the second electrode 63 and the third
semiconductor layer 21. The second electrode 63 is electrically
connected to the second semiconductor layer 13. The second
electrode 63 is electrically connected to the third semiconductor
layer 21.
[0067] As shown in FIG. 3C and FIG. 5A, the outer edge (a first
light emitting layer outer edge 15b) of a first light emitting
layer region 15a that is formed by projecting the first light
emitting layer 15 onto the plane perpendicular to the first
direction (in the example, the Z-axis direction) is positioned
inside the outer edge of a reflecting electrode region 51a (a
reflecting electrode outer edge 51b) formed by projecting the
reflecting electrode 51 onto the plane perpendicular to the first
direction. In other words, in the first direction, the first light
emitting layer 15 is positioned inside the reflecting electrode 51.
In the first direction, the reflecting electrode 51 may be aligned
with the first light emitting layer 15. In the first direction, the
reflecting electrode 51 may be aligned with the first transmissive
portion 41p.
[0068] Thereby, the first light extraction region 17 (referring to
FIG. 1B) can be set to be substantially the same as the second
light extraction region 27 (referring to FIG. 1B); and uneven color
can be reduced while increasing the light extraction
efficiency.
[0069] As shown in FIG. 3C and FIG. 5B, a second electrode region
63a that is formed by projecting the second electrode 63 onto the
plane perpendicular to the first direction (in the example, the
Z-axis direction) is separated from the reflecting electrode region
51a formed by projecting the reflecting electrode 51 onto the plane
perpendicular to the first direction. In other words, the second
electrode 63 is separated from the reflecting electrode 51 in a
direction perpendicular to the first direction.
[0070] In the first direction, the light emitted at a position
overlapping the second electrode 63 is absorbed relatively easily
by the second electrode 63. In the case where the second electrode
63 is separated from the reflecting electrode in the direction
perpendicular to the first direction, the proportion of the light
that reaches the second electrode 63 and is absorbed can be
reduced; and the light extraction efficiency can be increased.
[0071] As shown in FIG. 5C, at least a portion of a first electrode
region 61a that is formed by projecting the first electrode 61 onto
the plane perpendicular to the first direction overlaps a first
interconnect region 46a formed by projecting the first interconnect
electrode 46 onto the plane perpendicular to the first direction.
In other words, in the first direction, at least a portion of the
first electrode 61 overlaps the first interconnect electrode 46.
Thereby, the first light extraction region 17 can be more
substantially the same as the second light extraction region 27;
and uneven color can be reduced while increasing the light
extraction efficiency.
[0072] An example of a method for manufacturing the semiconductor
light emitting device 111 shown in FIG. 2A to FIG. 2C will now be
described.
[0073] A second crystal layer that includes the second stacked body
20 in which the third semiconductor layer 21, the second light
emitting layer 25, and the fourth semiconductor layer 23 are
provided in this order is grown on a growth substrate (e.g., a
sapphire substrate, a silicon (Si) substrate, etc.) by MOCVD (Metal
Organic Chemical Vapor Deposition). Thereby, a second semiconductor
wafer is made. The second light emitting layer 25 emits the second
light L2 of the second peak wavelength. SiO.sub.2 (in the example
of FIG. 2B and FIG. 2C, the insulating layer 53) is formed with a
thickness of 400 nm on the second crystal layer (in the example, on
the fourth semiconductor layer 23) including the second stacked
body 20. Silver (Ag) is formed with a thickness of 200 nm on the
fourth semiconductor layer 23 from which the SiO.sub.2 is removed
by lift-off; and heat treatment is performed. For example, heat
treatment at 300.degree. C. in oxygen or heat treatment at
800.degree. C. in oxygen is performed. Thereby, the reflecting
electrode 51 is formed on the fourth semiconductor layer 23.
[0074] A barrier metal and a metal layer for solder bonding (TiW 50
nm/Pt 100 nm/TiW 50 nm/Pt 100 nm/Ti 100 nm/Au 50 nm) are formed on
substantially the entire surface (a fourth semiconductor layer
surface 23s) of the fourth semiconductor layer 23 (referring to
FIG. 2B and FIG. 2C). Thereby, the reflecting electrode 51 is
covered with the barrier metal and the metal layer for solder
bonding.
[0075] A silicon substrate on which AuSn solder is formed with a
thickness of 2000 nm is prepared separately. The silicon substrate
is bonded to the second semiconductor wafer described above at, for
example, about 280.degree. C. Liquid phase diffusion bonding that
uses a solder layer such as AuIn, NiSn, etc., may be used to bond
the silicon substrate to the second semiconductor wafer. For the
bonding temperature (not less than 200.degree. C. and not more than
250.degree. C.) in such a case, the melting point of the solder
layer is not less than 400.degree. C. and not more than
1100.degree. C. The process temperatures after the solder bonding
can be set to be not less than the bonding temperature.
[0076] The growth substrate is removed. In the case where the
growth substrate is a sapphire substrate, the growth substrate is
removed by LLO (laser lift-off). In the case where the growth
substrate is a silicon substrate, the growth substrate is removed
by dry etching, etc.
[0077] Dry etching of the second crystal layer that is exposed by
removing the growth substrate is performed. Thereby, the third
semiconductor layer 21 is exposed.
[0078] A light-transmissive electrode (e.g., ITO, etc.) is formed
with a thickness of 400 nm on the exposed third semiconductor layer
21; and heat treatment is performed. For example, the heat
treatment is performed at 700.degree. C. in nitrogen. Thereby, a
portion (a second transmissive electrode portion 41b) of the first
light-transmissive electrode 41 (referring to FIG. 2B and FIG. 2C)
is formed. The thickness (the length in the Z-axis direction) of
the second transmissive electrode portion 41b is not limited to 400
nm and may be, for example, not less than about 50 nm and not more
than about 10000 nm.
[0079] The surface (a second electrode surface 41d) of the second
transmissive electrode portion 41b is planarized by CMP (Chemical
Mechanical Polishing).
[0080] A first crystal layer that includes the first stacked body
10 in which the first semiconductor layer 11, the first light
emitting layer 15, and the second semiconductor layer 13 are
provided in this order is grown on a growth substrate (e.g., a
sapphire substrate, a silicon (Si) substrate, etc.) by MOCVD.
Thereby, a first semiconductor wafer is made. The first light
emitting layer 15 emits the first light L1 of the first peak
wavelength that is different from the second peak wavelength. The
first peak wavelength may be longer than the second peak wavelength
or shorter than the second peak wavelength. Compared to the case
where the first peak wavelength is longer than the second peak
wavelength, the first light emitting layer 15 does not easily
absorb the second light L2 emitted from the second light emitting
layer 25 when the first peak wavelength is shorter than the second
peak wavelength. Thereby, the light extraction efficiency of the
semiconductor light emitting device 111 increases.
[0081] A light-transmissive electrode (e.g., ITO, etc.) is formed
with a thickness of 400 nm on the first crystal layer (in the
example, on the second semiconductor layer 13); and heat treatment
is performed. For example, the heat treatment is performed at
700.degree. C. in nitrogen. Thereby, another portion (a first
transmissive electrode portion 41a) of the first light-transmissive
electrode 41 (referring to FIG. 2B and FIG. 2C) is formed.
[0082] Dry etching of the first transmissive electrode portion 41a
is performed. Thereby, the second semiconductor layer 13 is
exposed. Ti/Pt/Au having a thickness of 400 nm is formed by
lift-off. Thereby, the first interconnect electrode 46 is formed.
The first interconnect electrode 46 is electrically connected to
the light-transmissive electrode formed on the second semiconductor
layer 13 and is in contact with the exposed second semiconductor
layer 13. The width (a first interconnect electrode width W1) of
the first interconnect electrode 46 (referring to FIG. 4C) is, for
example, about 10 micrometers (.mu.m). The first interconnect
electrode width W1 is not limited to 10 .mu.m. Further, the method
for making the first interconnect electrode 46 is not limited to
this method. For example, only the first interconnect electrode 46
may be formed without forming the light-transmissive electrode
having the thickness of 400 nm. In such a case, the heat treatment
is performed after forming the light-transmissive electrode for the
bonding described below.
[0083] The first interconnect electrode 46 includes a material
having relatively good adhesion with each layer (in the example,
the second semiconductor layer 13). The first interconnect
electrode 46 includes a material having a relatively low
resistivity. In the case where the first interconnect electrode
width W1 is relatively narrow, the absorption region of the emitted
light is relatively small. Therefore, the light extraction region
increases. In the case where the first interconnect electrode width
W1 is relatively wide, the resistance of the first interconnect
electrode 46 is lower. Therefore, the spread of the current
improves. The luminous efficiency increases. The operating voltage
decreases. The life increases.
[0084] The first interconnect electrode 46 has a non-ohmic contact
with the second semiconductor layer 13. The contact resistance of
the first interconnect electrode 46 is higher than the contact
resistance of a light-transmissive electrode 42. It is sufficient
for the first interconnect electrode 46 to have a non-ohmic contact
with the second semiconductor layer 13, and/or the contact
resistance of the first interconnect electrode 46 to be higher than
the contact resistance of the light-transmissive electrode 42. It
is more desirable for the first interconnect electrode 46 to be
insulated from the second semiconductor layer 13.
[0085] A light-transmissive electrode for bonding is formed on
substantially the entire surface (a second semiconductor layer
surface 13s) of the second semiconductor layer 13 (referring to
FIG. 2B and FIG. 2C). Thereby, the other portion (the first
transmissive electrode portion 41a) of the first light-transmissive
electrode 41 (referring to FIG. 2B and FIG. 2C) is formed to cover
the first interconnect electrode 46. The thickness (the length in
the Z-axis direction) of the first transmissive electrode portion
41a is, for example, not less than about 50 nm and not more than
about 10000 nm.
[0086] The surface (a first electrode surface 41c) of the first
transmissive electrode portion 41a is planarized by CMP.
[0087] The first transmissive electrode portion 41a on which CMP
was performed is directly bonded to the second transmissive
electrode portion 41b on which CMP was performed. Plasma cleaning
by an oxygen atmosphere is performed in a vacuum. The first
semiconductor wafer and the second semiconductor wafer are bonded
at 100.degree. C. by applying a pressure of 1 kilonewton (kN).
Thereby, the second semiconductor layer 13 is electrically
connected to the third semiconductor layer 21. Thereby, the first
transmissive electrode portion 41a and the second transmissive
electrode portion 41b can be considered to be the same electrode
(the first light-transmissive electrode 41). The first interconnect
electrode 46 functions as a common interconnect electrode between
the second semiconductor layer 13 and the third semiconductor layer
21.
[0088] The growth substrate of the first semiconductor wafer is
removed. In the case where the growth substrate of the first
semiconductor wafer is a sapphire substrate, the growth substrate
is removed by LLO. In the case where the growth substrate of the
first semiconductor wafer is a silicon substrate, the growth
substrate is removed by dry etching, etc. Dry etching of the
exposed first crystal layer is performed. Thereby, the first
semiconductor layer 11 is exposed.
[0089] A portion of the first crystal layer that includes the
exposed first semiconductor layer 11 is removed by dry etching.
Thereby, the first light-transmissive electrode 41 is exposed.
[0090] A portion of the exposed first light-transmissive electrode
41 is removed by dry etching. Thereby, the second crystal layer (in
the example, the third semiconductor layer 21) is exposed.
[0091] A portion of the exposed second crystal layer is removed by
dry etching. Thereby, the SiO.sub.2 that is in contact with the
fourth semiconductor layer 23 is exposed.
[0092] Ti/Pt/Au is formed with a thickness of 500 nm on the exposed
first light-transmissive electrode 41 by lift-off. Thereby, the
second electrode 63 is formed.
[0093] Al/Ni/Au is formed with a thickness of 500 nm on the exposed
first semiconductor layer 11 by lift-off. Thereby, the first
electrode 61 is formed. As shown in FIG. 5C, the first electrode 61
includes the pad portion 61p, the first fine wire portion 61q, and
the second fine wire portion 61r. The width (a first fine wire
portion width W2) of the first fine wire portion 61q (referring to
FIG. 5C) is, for example, about 10 .mu.m. The width (a second fine
wire portion width W3) of the second fine wire portion 61r
(referring to FIG. 5C) is, for example, about 10 .mu.m.
[0094] The first light-transmissive electrode 41 is used as both
the light-transmissive electrode of the second semiconductor layer
13 and the light-transmissive electrode of the third semiconductor
layer 21. The first interconnect electrode 46 is used as both the
interconnect electrode of the second semiconductor layer 13 and the
interconnect electrode of the third semiconductor layer 21.
[0095] According to the embodiment, there can be one fewer
interconnect electrode. There can be one fewer light-transmissive
electrode. There can be one fewer pad. The light emitting region
can be enlarged. The manufacturing processes of the semiconductor
light emitting device 111 can be reduced. The CMP can be performed
easily for the direct bonding. Thereby, the light extraction
efficiency increases. The luminous efficiency increases. The yield
increases. The cost decreases. The operating voltage decreases.
[0096] In the embodiment, the interconnect electrode (in the
example, the first interconnect electrode 46) that causes a shadow
for the second light emitting layer 25 is the same as the
interconnect electrode (in the example, the first interconnect
electrode 46) that causes the non-light emitting region of the
first light emitting layer 15. Therefore, the light emitting region
of the first light emitting layer 15 is substantially aligned with
the light extraction region of the light emitted from the major
surface of the second light emitting layer 25 by self-alignment.
Thereby, color breakup can be suppressed.
[0097] A dielectric (e.g., SiO.sub.2, etc.) for bonding may be
provided between the first stacked body 10 and the second stacked
body 20. In the case where the bonding strength between the first
transmissive electrode portion 41a and the second transmissive
electrode portion 41b is relatively low, the dielectric for bonding
can supplement the bonding strength between the first transmissive
electrode portion 41a and the second transmissive electrode portion
41b.
[0098] In the example of the method for manufacturing the
semiconductor light emitting device 111, an uneven structure for
light extraction may be formed in the surface of the first
semiconductor layer 11 at the stage where the first semiconductor
layer 11 is exposed. An uneven structure for light extraction may
be formed in the surface of the third semiconductor layer 21 at the
stage where the third semiconductor layer 21 is exposed.
[0099] FIG. 6A to FIG. 6C are schematic views showing another
semiconductor light emitting device according to the first
embodiment.
[0100] FIG. 7A to FIG. 7D are schematic plan views showing
components of the semiconductor light emitting device according to
the first embodiment.
[0101] FIG. 8A to FIG. 8D are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment.
[0102] FIG. 9A to FIG. 9C are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment.
[0103] FIG. 6A is a schematic plan view showing the semiconductor
light emitting device according to the first embodiment. FIG. 6B is
a cross-sectional view along line C1-C2 shown in FIG. 6A. FIG. 6C
is a cross-sectional view along line D1-D2 shown in FIG. 6A.
[0104] The semiconductor light emitting device 112 shown in FIG. 6A
to FIG. 6C includes the first stacked body 10, the second stacked
body 20, the first light-transmissive electrode 41, the first
interconnect electrode 46, a second interconnect electrode 47, the
reflecting electrode 51, a first bonding layer 54, a second bonding
layer 56, the support substrate 55, the back surface electrode 57,
a first through-electrode 58a, a second through-electrode 58b, and
a third through-electrode 58c.
[0105] The first stacked body 10, the second stacked body 20, the
first light-transmissive electrode 41, the first interconnect
electrode 46, the reflecting electrode 51, and the support
substrate 55 are similar to those described above in regard to FIG.
1A to FIG. 2C. A detailed description of these components is
omitted as appropriate.
[0106] In the semiconductor light emitting device 112 according to
the embodiment as shown in FIG. 6B, FIG. 6C, and FIG. 7A, the back
surface electrode 57 includes a first back surface pad 57a, a
second back surface pad 57b, and a third back surface pad 57c. The
first back surface pad 57a is separated from the second back
surface pad 57b on the first support substrate surface 55s. The
first back surface pad 57a is separated from the third back surface
pad 57c on the first support substrate surface 55s. The second back
surface pad 57b is separated from the third back surface pad 57c on
the first support substrate surface 55s. The other disposition
methods of the back surface electrode 57 are similar to those
described above in regard to FIG. 2A to FIG. 2C.
[0107] As shown in FIG. 6C and FIG. 7C, the first bonding layer 54
includes a first bonding portion 54a, a second bonding portion 54b,
a first insulating layer 54c, a second insulating layer 54d, and a
third insulating layer 54e. The first bonding layer 54 includes,
for example, SiO.sub.2.
[0108] As shown in FIG. 6B and FIG. 6C, the second bonding layer 56
includes a third bonding portion 56a and a fourth bonding portion
56b. The first through-electrode 58a includes a first
through-electrode portion 58aa and a second through-electrode
portion 58ab. The second through-electrode 58b includes a third
through-electrode portion 58ba, a fourth through-electrode portion
58bb, and a fifth through-electrode portion 58bc. The third
through-electrode 58c includes a sixth through-electrode portion
58ca and a seventh through-electrode portion 58cb.
[0109] The first through-electrode 58a pierces the support
substrate 55, the reflecting electrode 51, the fourth semiconductor
layer 23, and the second light emitting layer 25 in the first
direction (in the example, the Z-axis direction). The first
through-electrode 58a is electrically connected to the second
semiconductor layer 13 and the third semiconductor layer 21. The
first through-electrode 58a is electrically connected to the first
back surface pad 57a.
[0110] The second through-electrode 58b pierces the support
substrate 55, the second stacked body 20 (the fourth semiconductor
layer 23, the second light emitting layer 25, and the third
semiconductor layer 21), the first light-transmissive electrode 41,
the second semiconductor layer 13, and the first light emitting
layer 15 in the first direction. The second through-electrode 58b
is electrically connected to the first semiconductor layer 11. The
second through-electrode 58b is electrically connected to the
second back surface pad 57b.
[0111] The third through-electrode 58c pierces the support
substrate 55, the first bonding portion 54a, and the second bonding
portion 54b. The third through-electrode 58c is electrically
connected to the reflecting electrode 51. The third
through-electrode 58c is electrically connected to the third back
surface pad 57c.
[0112] The first insulating layer 54c is provided between the first
through-electrode 58a and the reflecting electrode 51, between the
first through-electrode 58a and the fourth semiconductor layer 23,
and between the first through-electrode 58a and the second light
emitting layer 25. The first insulating layer 54c prevents shorts
between the third semiconductor layer 21 and the fourth
semiconductor layer 23.
[0113] The second insulating layer 54d is provided between the
second through-electrode 58b and the reflecting electrode 51,
between the second through-electrode 58b and the second stacked
body 20 (the fourth semiconductor layer 23, the second light
emitting layer 25, and the third semiconductor layer 21), between
the second through-electrode 58b and the first light-transmissive
electrode 41, between the second through-electrode 58b and the
second semiconductor layer 13, and between the second
through-electrode 58b and the first light emitting layer 15. The
second insulating layer 54d prevents shorts between the third
semiconductor layer 21 and the fourth semiconductor layer 23. The
second insulating layer 54d prevents shorts between the second
through-electrode 58b and the second stacked body 20.
[0114] As shown in FIG. 6B, FIG. 6C, FIG. 8C, and FIG. 8D, the
second bonding layer 56 is provided around the first
light-transmissive electrode 41. The second bonding layer 56
includes, for example, SiO.sub.2.
[0115] As shown in FIG. 6B and FIG. 6C, the second interconnect
electrode 47 is separated from the first interconnect electrode 46
in the first direction. The first light emitting layer 15 is
disposed between the second interconnect electrode 47 and the
second semiconductor layer 13.
[0116] As shown in FIG. 9A and FIG. 9C, at least a portion of the
first interconnect region 46a that is formed by projecting the
first interconnect electrode 46 onto the plane perpendicular to the
first direction (in the example, the Z-axis direction) overlaps a
second interconnect region 47a formed by projecting the second
interconnect electrode 47 onto the plane perpendicular to the first
direction. In other words, in the first direction, at least a
portion of the first interconnect electrode 46 overlaps the second
interconnect electrode 47.
[0117] An example of a method for manufacturing the semiconductor
light emitting device 112 shown in FIG. 6A to FIG. 6C will now be
described.
[0118] SiO.sub.2 is formed with a thickness of, for example, 1000
nm on the surface (a second support substrate surface 55t) of the
support substrate 55 of undoped silicon (Si) (referring to FIG. 6B
and FIG. 6C). The SiO.sub.2 is used to form a portion of the first
bonding portion 54a. For example, ECR sputtering or plasma CVD may
be used as the method for forming the first bonding portion 54a. In
ECR sputtering and plasma CVD, high layer quality is obtained at a
low temperature. In plasma CVD, the coverability of the material is
relatively good. Therefore, in the case where relatively large
stepped portions exist, the occurrence of voids can be
suppressed.
[0119] A second portion (the second through-electrode portion 58ab)
of the first through-electrode 58a, a third portion (the fifth
through-electrode portion 58bc) of the second through-electrode
58b, and a second portion (the seventh through-electrode portion
58cb) of the third through-electrode 58c are formed. For example,
through-silicon via (TSV) technology may be used. The second
through-electrode portion 58ab pierces the SiO.sub.2 and the
support substrate 55 in the first direction. The fifth
through-electrode portion 58bc pierces the SiO.sub.2 and the
support substrate 55 in the first direction. The seventh
through-electrode portion 58cb pierces the SiO.sub.2 and the
support substrate 55 in the first direction. An insulating film may
be formed between the support substrate 55 and the
through-electrode portions to reliably insulate the support
substrate 55 from the through-electrode portions.
[0120] Ti/Pt/Au is formed with a thickness of, for example, 800 nm
on the first support substrate surface 55s of the support substrate
55. Thereby, the first back surface pad 57a, the second back
surface pad 57b, and the third back surface pad 57c are formed. The
first back surface pad 57a is electrically connected to the second
through-electrode portion 58ab. The second back surface pad 57b is
electrically connected to the fifth through-electrode portion 58bc.
The third back surface pad 57c is electrically connected to the
seventh through-electrode portion 58cb.
[0121] For example, in the case where the size of the semiconductor
light emitting device 112 when projected onto the plane
perpendicular to the first direction is 1 mm by 1 mm, the sizes of
the first back surface pad 57a, the second back surface pad 57b,
and the third back surface pad 57c are, for example, not less than
about 100 nm by 100 nm and not more than about 400 nm by 400 nm.
When projected onto the plane perpendicular to the first direction,
the first back surface pad 57a, the second back surface pad 57b,
and the third back surface pad 57c may be, for example, rectangles,
circles, fan-like shapes, of combinations of these
configurations.
[0122] The first bonding portion 54a is planarized by CMP. At this
time, the second through-electrode portion 58ab, the fifth
through-electrode portion 58bc, and the seventh through-electrode
portion 58cb are exposed. In the case where relatively large
stepped portions exist, it is necessary for the SiO.sub.2 to be
thicker when the first bonding portion 54a is planarized by CMP.
For example, SiO.sub.2 having a thickness that is three times the
thickness of the stepped portions is necessary. Prior to the CMP,
the thickness of the SiO.sub.2 that is necessary for the
planarization can be thinner by making a pseudo-flat state by
reducing the stepped portions of the SiO.sub.2 by dry etching, etc.
Also, the planarization can be performed easily in the state in
which the metal and the SiO.sub.2 coexist by changing the slurry to
adjust the selectivity between the metal and the SiO.sub.2.
[0123] The second crystal layer that includes the second stacked
body 20 in which the third semiconductor layer 21, the second light
emitting layer 25, and the fourth semiconductor layer 23 are
provided in this order is grown on a growth substrate (e.g., a
sapphire substrate, a silicon (Si) substrate, etc.) by MOCVD.
Thereby, the second semiconductor wafer is made. The second light
emitting layer 25 emits the second light L2 of the second peak
wavelength.
[0124] SiO.sub.2 is formed with a thickness of 400 nm on the second
crystal layer (in the example, on the fourth semiconductor layer
23). The SiO.sub.2 is used to form a portion of the third
insulating layer 54e.
[0125] Silver (Ag) is formed with a thickness of 200 nm on the
fourth semiconductor layer 23 from which the SiO.sub.2 is removed
by lift-off; and heat treatment is performed. Thereby, the
reflecting electrode 51 is formed on the fourth semiconductor layer
23.
[0126] A metal layer (TiW 50 nm/Pt 100 nm/Au 1000 nm/Ti 50 nm) may
be formed on substantially the entire fourth semiconductor layer
surface 23s of the fourth semiconductor layer 23 (referring to FIG.
6B). Thereby, the reflecting electrode 51 may be covered with the
metal layer (TiW 50 nm/Pt 100 nm/Au 1000 nm/Ti 50 nm). The metal
layer (TiW 50 nm/Pt 100 nm/Au 1000 nm/Ti 50 nm) can spread the
current to a relatively wide region of the fourth semiconductor
layer 23. Thereby, the effective light emitting region increases.
The operating voltage decreases.
[0127] A portion of the reflecting electrode 51, the fourth
semiconductor layer 23, and the second light emitting layer 25 is
removed by dry etching. Thereby, a first hole is made to expose the
third semiconductor layer 21. The depth (the length in the Z-axis
direction) of the first hole is, for example, about 1000 nm. The
inner wall of the first hole may extend in a direction (the Z-axis
direction) perpendicular to the XY plane. The inner wall of the
first hole may extend in a direction that is tilted with respect to
the Z-axis direction. In other words, the inner wall of the first
hole may be formed in a tapered configuration.
[0128] In the case where the inner wall of the first hole extends
in the direction perpendicular to the XY plane, the surface area
occupied by the first hole can be minimized. Therefore, the light
emission surface area can be increased.
[0129] In the case where the inner wall of the first hole is made
in a tapered configuration, the coverage of the first insulating
layer 54c and the coverage of the second insulating layer 54d
improve.
[0130] The inner diameter of the first hole is, for example, not
less than about 1 .mu.m and not more than about 100 .mu.m. It is
favorable for the inner diameter of the first hole to be not less
than about 5 .mu.m and not more than about 20 .mu.m.
[0131] In the case where the inner diameter of the first hole is
relatively small, the surface area of the second light emitting
layer 25 can be relatively greater. The light emitting region can
be enlarged. The luminous efficiency increases. The operating
voltage decreases.
[0132] In the case where the inner diameter of the first hole is
relatively large, the first through-electrode 58a can be formed
with a relatively large diameter.
[0133] A portion of the reflecting electrode 51, the fourth
semiconductor layer 23, the second light emitting layer 25, and the
third semiconductor layer 21 is removed by dry etching. Thereby, a
second hole is made to expose the growth substrate. The depth (the
length in the Z-axis direction) of the second hole is, for example,
about 5000 nm.
[0134] A dielectric (e.g., SiO.sub.2) is formed with a thickness of
1000 nm on the entire surface of the reflecting electrode 51, the
exposed fourth semiconductor layer 23, the exposed second light
emitting layer 25, the exposed third semiconductor layer 21, and
the growth substrate. Thereby, the first insulating layer 54c and
the second insulating layer 54d are formed. The first insulating
layer 54c prevents shorts between the third semiconductor layer 21
and the fourth semiconductor layer 23. The second insulating layer
54d prevents shorts between the third semiconductor layer 21 and
the fourth semiconductor layer 23. The second insulating layer 54d
prevents shorts between the fourth through-electrode portion 58bb
and the second stacked body 20. The SiO.sub.2 that is on the fourth
semiconductor layer 23 is used to form a portion of the second
bonding portion 54b.
[0135] The third semiconductor layer 21 is exposed by removing the
SiO.sub.2 at the bottom of the first hole. Al/Ti is formed with a
thickness of 200 nm on the exposed third semiconductor layer 21.
Thereby, a first end portion electrode 58d (referring to FIG. 6C)
is formed. The thickness (the length in the Z-axis direction) of
the first end portion electrode 58d is, for example, not less than
about 10 nm and not more than about 10000 nm. It is favorable for
the thickness of the first end portion electrode 58d to be not less
than about 50 nm and not more than about 1000 nm. The material of
the first end portion electrode 58d is not limited to Al/Ti; and it
is sufficient for the material of the first end portion electrode
58d to be a material that has an ohmic contact with the third
semiconductor layer 21. The first end portion electrode 58d has a
single-layer structure. The first end portion electrode 58d may
have a structure in which different metals are stacked.
[0136] The first hole is filled with aluminum (Al). Thereby, a
first portion (the first through-electrode portion 58aa) of the
first through-electrode 58a is formed. The second hole is filled
with aluminum (Al). Thereby, a second portion (the fourth
through-electrode portion 58bb) of the second through-electrode 58b
is formed. A portion of the SiO.sub.2 that is on the reflecting
electrode 51 is removed. Thereby, the reflecting electrode 51 is
exposed. The first portion (the sixth through-electrode portion
58ca) of the third through-electrode 58c is formed on the exposed
reflecting electrode 51.
[0137] The method for forming the first through-electrode portion
58aa, the fourth through-electrode portion 58bb, and the sixth
through-electrode portion 58ca may be lift-off combined with vapor
deposition, sputtering, CVD, plating, or a combination of such
methods. For example, copper (Cu) may be formed by electroless
plating. In such a case, a layer of copper (Cu) or a layer of gold
(Au) maybe formed in the first hole and the second hole as a seed
layer. Seed layer enhancement may be performed as plating seed
layer extension technology. For example, tungsten (W) may be formed
by CVD.
[0138] The materials of the first through-electrode portion 58aa,
the fourth through-electrode portion 58bb, and the sixth
through-electrode portion 58ca may be one metal selected from the
group consisting of Cu, Ag, Ni, Ti, Au, W, and Al or an alloy
including at least one selected from the group consisting of Cu,
Ag, Ni, Ti, Au, W, and Al. The materials of the first
through-electrode portion 58aa, the fourth through-electrode
portion 58bb, and the sixth through-electrode portion 58ca may be
metals having a relatively low resistivity to allow a large current
to flow. Thereby, a relatively large current can flow in the first
through-electrode portion 58aa, the fourth through-electrode
portion 58bb, and the sixth through-electrode portion 58ca. The
materials of the first through-electrode portion 58aa, the fourth
through-electrode portion 58bb, and the sixth through-electrode
portion 58ca may be metals having a high reflectance for the
emitted light. Thereby, the light extraction efficiency
increases.
[0139] The second bonding portion 54b is formed on the reflecting
electrode 51. For example, the material of the second bonding
portion 54b is SiO.sub.2. The thickness of the second bonding
portion 54b is, for example, not less than about 100 nm and not
more than about 10000 nm. For example, ECR sputtering or plasma CVD
may be used as the method for forming the second bonding portion
54b. In ECR sputtering and plasma CVD, high layer quality is
obtained at a low temperature. In plasma CVD, the coverability of
the material is relatively good. Therefore, in the case where
relatively large stepped portions exist, the occurrence of voids
can be suppressed.
[0140] The second bonding portion 54b is planarized by CMP. At this
time, the first through-electrode portion 58aa, the fourth
through-electrode portion 58bb, and the sixth through-electrode
portion 58ca are exposed.
[0141] It is favorable to use a slurry in which the etching rate
ratio between the SiO.sub.2 and the first through-electrode portion
58aa, the fourth through-electrode portion 58bb, and the sixth
through-electrode portion 58ca is adjusted to simultaneously
planarize the SiO.sub.2 and the first through-electrode portion
58aa, the fourth through-electrode portion 58bb, and the sixth
through-electrode portion 58ca by CMP. After the planarization, the
first through-electrode portion 58aa, the fourth through-electrode
portion 58bb, and the sixth through-electrode portion 58ca can be
caused to jut slightly by gently polishing using a slurry for which
the etching rates of the materials of the first through-electrode
portion 58aa, the fourth through-electrode portion 58bb, and the
sixth through-electrode portion 58ca are slow.
[0142] Similar processing is performed for the second
through-electrode portion 58ab, the fifth through-electrode portion
58bc, and the seventh through-electrode portion 58cb on the support
substrate 55. The first through-electrode portion 58aa and the
second through-electrode portion 58ab are brought into contact and
bonded. The fourth through-electrode portion 58bb and the fifth
through-electrode portion 58bc are brought into contact and bonded.
The sixth through-electrode portion 58ca and the seventh
through-electrode portion 58cb are brought into contact and bonded.
The metal is ductile and is mashed by the compressive stress.
Thereby, the SiO.sub.2 can be bonded; and the first
through-electrode portion 58aa and the second through-electrode
portion 58ab can be electrically connected with good yield. The
fourth through-electrode portion 58bb and the fifth
through-electrode portion 58bc can be electrically connected with
good yield. The sixth through-electrode portion 58ca and the
seventh through-electrode portion 58cb can be electrically
connected with good yield.
[0143] A method for forming the electrical connections between the
first through-electrode portion 58aa and the second
through-electrode portion 58ab, between the fourth
through-electrode portion 58bb and the fifth through-electrode
portion 58bc, and between the sixth through-electrode portion 58ca
and the seventh through-electrode portion 58cb may utilize a metal
having a relatively high coefficient of thermal expansion. After
the CMP, the bonding is performed and the first through-electrode
portion 58aa, the second through-electrode portion 58ab, the fourth
through-electrode portion 58bb, the fifth through-electrode portion
58bc, the sixth through-electrode portion 58ca, and the seventh
through-electrode portion 58cb are caused to expand by performing
heat treatment at about 350.degree. C. Thereby, reliable electrical
connections are obtained.
[0144] The first bonding portion 54a on which CMP was performed is
directly bonded to the second bonding portion 54b on which CMP was
performed. Plasma cleaning by an oxygen atmosphere is performed in
a vacuum. The support substrate 55 and the second semiconductor
wafer are bonded by applying a pressure of 1 kN at 150.degree. C.
At this time, alignment between the first through-electrode portion
58aa and the second through-electrode portion 58ab, alignment
between the fourth through-electrode portion 58bb and the fifth
through-electrode portion 58bc, and alignment between the sixth
through-electrode portion 58ca and the seventh through-electrode
portion 58cb are performed. Thereby, electrical connections are
formed between the first through-electrode portion 58aa and the
second through-electrode portion 58ab, between the fourth
through-electrode portion 58bb and the fifth through-electrode
portion 58bc, and between the sixth through-electrode portion 58ca
and the seventh through-electrode portion 58cb.
[0145] The growth substrate is removed. In the case where the
growth substrate is a sapphire substrate, the growth substrate is
removed by LLO. In the case where the growth substrate is a silicon
substrate, the growth substrate is removed by dry etching, etc.
[0146] Dry etching of the exposed second crystal layer is
performed. Thereby, the third semiconductor layer 21 and the fourth
through-electrode portion 58bb are exposed.
[0147] A light-transmissive electrode (e.g., ITO, etc.) is formed
with a thickness of 500 nm on the exposed third semiconductor layer
21 and the exposed fourth through-electrode portion 58bb; and heat
treatment is performed. Thereby, an ohmic electrode for the third
semiconductor layer 21 is formed. The ohmic electrode is used to
form a portion of the second transmissive electrode portion 41b.
The ohmic electrode is patterned such that the peripheral portion
of the ohmic electrode has substantially the same shape as the
peripheral portion of the reflecting electrode 51 when projected
onto the plane perpendicular to the first direction (in the
example, the Z-axis direction). Thereby, the second transmissive
electrode portion 41b is formed. At this time, the
light-transmissive electrode that is on the fourth
through-electrode portion 58bb is removed. Thereby, the fourth
through-electrode portion 58bb is exposed.
[0148] SiO.sub.2 is formed with a thickness of 400 nm on the third
semiconductor layer 21 and on the second transmissive electrode
portion 41b. The SiO.sub.2 is used to form an insulating unit that
insulates the second transmissive electrode portion 41b from the
fourth through-electrode portion 58bb. The SiO.sub.2 that is on the
fourth through-electrode portion 58bb is removed. Thereby, the
fourth through-electrode portion 58bb is exposed. A metal is formed
on the exposed second through-electrode 58b to extend the second
through-electrode 58b in the first direction. The method for
forming the metal on the second through-electrode 58b is as
described above.
[0149] The fourth bonding portion 56b is formed on the third
semiconductor layer 21. The fourth bonding portion 56b includes,
for example, SiO.sub.2. The thickness of the fourth bonding portion
56b is, for example, not less than about 100 nm and not more than
about 10000 nm. It is favorable for the thickness of the fourth
bonding portion 56b to be, for example, about 1000 nm. The fourth
bonding portion 56b is planarized by CMP. At this time, the fourth
through-electrode portion 58bb and the second transmissive
electrode portion 41b are exposed.
[0150] The first crystal layer that includes the first stacked body
10 in which the first semiconductor layer 11, the first light
emitting layer 15, and the second semiconductor layer 13 are
provided in this order is grown on a growth substrate (e.g., a
sapphire substrate, a silicon (Si) substrate, etc.) by MOCVD.
Thereby, the first semiconductor wafer is made. The first light
emitting layer 15 emits the first light L1 of the first peak
wavelength that is different from the second peak wavelength. The
first peak wavelength may be longer than the second peak wavelength
or shorter than the second peak wavelength. Compared to the case
where the first peak wavelength is longer than the second peak
wavelength, the first light emitting layer 15 does not easily
absorb the second light L2 emitted from the second light emitting
layer 25 when the first peak wavelength is shorter than the second
peak wavelength. Thereby, the light extraction efficiency of the
semiconductor light emitting device 111 increases.
[0151] Al/Ni/Au/Ti is formed with a thickness of 500 nm on the
first crystal layer (in the example, on the second semiconductor
layer 13) by lift-off. Thereby, the first interconnect electrode 46
of the second semiconductor layer 13 is formed. The first
interconnect electrode 46 is formed to improve the current
spreading properties. The degree of the current spreading is a
result of the resistivity of the light-transmissive electrode. By
forming the first interconnect electrode 46, the current can be
spread to a relatively wide region of the second semiconductor
layer 13.
[0152] The first interconnect electrode 46 may have a non-ohmic
contact with the second semiconductor layer 13. The first
interconnect electrode width W1 (referring to FIG. 9A) is, for
example, about 10 .mu.m. In the case where the semiconductor light
emitting device 112 is small, the first interconnect electrode 46
may not be formed. The thickness (the length in the Z-axis
direction) of the first interconnect electrode 46 is, for example,
not less than about 10 nm and not more than about 10000 nm. It is
favorable for the thickness of the first interconnect electrode 46
to be not less than about 50 nm and not more than about 1000
nm.
[0153] In the case where the thickness of the first interconnect
electrode 46 is relatively thin, the stepped portions are
relatively small in the planarization of the CMP process.
Therefore, the polishing amount that is necessary is small. The
cost decreases because the thickness (the length in the Z-axis
direction) of the third bonding portion 56a is thinner and the
processing time is reduced. In the case where the thickness of the
first interconnect electrode 46 is relatively thick, the
interconnect resistance of the first interconnect electrode 46 is
relatively low. Therefore, the current spreading increases. The
effective light emitting region increases. The luminous efficiency
increases. The operating voltage decreases.
[0154] A light-transmissive electrode (e.g., ITO, etc.) is formed
with a thickness of 500 nm on substantially the entire second
semiconductor layer 13. Thereby, the first interconnect electrode
46 is covered with the light-transmissive electrode. The
light-transmissive electrode is patterned to have substantially the
same configuration as when the first transmissive electrode portion
41a is bonded to the second transmissive electrode portion 41b.
Heat treatment is performed; and the first transmissive electrode
portion 41a is formed.
[0155] A portion of the first transmissive electrode portion 41a,
the second semiconductor layer 13, and the first light emitting
layer 15 is removed by dry etching. Thereby, a third hole is made
to expose the first semiconductor layer 11. The depth (the length
in the Z-axis direction) of the third hole is, for example, about
1000 nm. The inner wall of the third hole may extend in a direction
(the Z-axis direction) perpendicular to the XY plane. The inner
wall of the third hole may extend in a direction tilted with
respect to the Z-axis direction. In other words, the inner wall of
the third hole may be formed in a tapered configuration.
[0156] In the case where the inner wall of the third hole extends
in the direction perpendicular to the XY plane, the surface area
occupied by the third hole can be minimized. Therefore, the light
emission surface area can be increased.
[0157] In the case where the inner wall of the third hole is made
in a tapered configuration, the coverage of the second insulating
layer 54d improves.
[0158] The inner diameter of the third hole is, for example, not
less than about 1 .mu.m and not more than about 100 .mu.m. It is
favorable for the inner diameter of the third hole to be not less
than about 5 .mu.m and not more than about 20 .mu.m.
[0159] In the case where the inner diameter of the third hole is
relatively small, the surface area of the first light emitting
layer 15 can be relatively greater. The light emitting region can
be enlarged. The luminous efficiency increases. The operating
voltage decreases.
[0160] In the case where the inner diameter of the third hole is
relatively large, the second through-electrode 58b can be formed
with a relatively large diameter.
[0161] A dielectric (e.g., SiO.sub.2) is formed with a thickness of
1000 nm on the entire surface of the first transmissive electrode
portion 41a, the exposed second semiconductor layer 13, the exposed
first light emitting layer 15, and the exposed first semiconductor
layer 11. Thereby, the third bonding portion 56a and the second
insulating layer 54d are formed. The second insulating layer 54d
prevents shorts between the first semiconductor layer 11 and the
second semiconductor layer 13. The SiO.sub.2 that is on the second
semiconductor layer 13 is used to form a portion of the third
bonding portion 56a.
[0162] The first semiconductor layer 11 is exposed by removing the
SiO.sub.2 at the bottom of the third hole. Al/Ti is formed with a
thickness of 200 nm on the exposed first semiconductor layer 11.
Thereby, a second end portion electrode 58e (referring to FIG. 6C)
is formed. The thickness (the length in the Z-axis direction) of
the second end portion electrode 58e is, for example, not less than
about 10 nm and not more than about 10000 nm. It is favorable for
the thickness of the second end portion electrode 58e to be not
less than about 50 nm and not more than about 1000 nm. The material
of the second end portion electrode 58e is not limited to Al/Ti;
and it is sufficient for the material of the second end portion
electrode 58e to be a material that has an ohmic contact with the
first semiconductor layer 11. The second end portion electrode 58e
has a single-layer structure. The second end portion electrode 58e
may have a structure in which different metals are stacked.
[0163] The third hole is filled with aluminum (Al). Thereby, a
first portion (the third through-electrode portion 58ba) of the
second through-electrode 58b is formed. The method for forming the
third through-electrode portion 58ba is as described above in
regard to the first through-electrode portion 58aa, the fourth
through-electrode portion 58bb, and the sixth through-electrode
portion 58ca.
[0164] The third bonding portion 56a is planarized by CMP. At this
time, the third through-electrode portion 58ba and the first
transmissive electrode portion 41a are exposed.
[0165] The third bonding portion 56a on which CMP was performed is
directly bonded to the fourth bonding portion 56b on which CMP was
performed. Simultaneously, the first transmissive electrode portion
41a on which CMP was performed is directly bonded to the second
transmissive electrode portion 41b on which CMP was performed.
Plasma cleaning by an oxygen atmosphere is performed in a vacuum.
The first semiconductor wafer and the second semiconductor wafer
are bonded by applying a pressure of 1 kN at 150.degree. C. At this
time, alignment between the third through-electrode portion 58ba
and the fourth through-electrode portion 58bb is performed.
Thereby, an electrical connection is formed between the third
through-electrode portion 58ba and the fourth through-electrode
portion 58bb.
[0166] The growth substrate is removed. In the case where the
growth substrate is a sapphire substrate, the growth substrate is
removed by LLO. In the case where the growth substrate is a silicon
substrate, the growth substrate is removed by dry etching, etc.
[0167] Dry etching of the exposed first crystal layer is performed.
Thereby, the first semiconductor layer 11 is exposed.
[0168] Al/Ni/Au is formed with a thickness of 1000 nm on the
exposed first semiconductor layer 11 by lift-off. Thereby, the
second interconnect electrode 47 is formed. The thickness (the
length in the Z-axis direction) of the second interconnect
electrode 47 is, for example, not less than about 100 nm and not
more than about 10000 nm. In the case where the thickness of the
second interconnect electrode 47 is relatively thick, the
interconnect resistance of the second interconnect electrode 47 is
relatively lower. Therefore, the current can be spread better.
[0169] At least a portion of the first interconnect electrode 46
overlaps the second interconnect electrode 47 when projected onto
the plane perpendicular to the first direction (in the example, the
Z-axis direction). A portion of the second light that is emitted
from the second light emitting layer 25 is blocked by the first
interconnect electrode 46 and is not extracted easily directly
above the first interconnect electrode 46. Conversely, according to
the embodiment, the second light that is emitted from the second
light emitting layer 25 is not easily blocked by the second
interconnect electrode 47 because, in the first direction, at least
a portion of the first interconnect electrode 46 overlaps the
second interconnect electrode 47. Therefore, the light extraction
efficiency increases. Uneven color can be reduced.
[0170] The semiconductor light emitting device 112 is formed by
singulation by dicing, etc.
[0171] In the first direction, the first through-electrode 58a may
overlap the first interconnect electrode 46. In the first
direction, the first through-electrode 58a may overlap the second
interconnect electrode 47. In the first direction, the second
through-electrode 58b may overlap the first interconnect electrode
46. In the first direction, the second through-electrode 58b may
overlap the second interconnect electrode 47. Thereby, the
reduction of the light emitting region that occurs when a new
through-electrode is provided can be suppressed. The light
extraction efficiency increases. Color breakup can be reduced.
[0172] Multiple through-electrodes may be connected to the
semiconductor layers (e.g., the first semiconductor layer 11,
etc.). The spread of the current can be improved by providing
current paths in multiple locations of the surface. The light
output increases. The operating voltage can be reduced. The
through-electrodes in the multiple locations may be electrically
connected inside the support substrate 55 or inside the bonding
layer (e.g., the first bonding layer 54). The assembly process can
be simplified by combining the back surface pads (in the example,
the first back surface pad 57a, the second back surface pad 57b,
and the third back surface pad 57c) into one pad. The yield
increases.
[0173] The first through-electrode 58a may contact the first
light-transmissive electrode 41 instead of the third semiconductor
layer 21. The first through-electrode 58a may be formed outside
(around) the semiconductor light emitting device 112. The second
through-electrode 58b may be formed outside (around) the
semiconductor light emitting device 112. The third
through-electrode 58c may be formed outside (around) the
semiconductor light emitting device 112.
[0174] FIG. 10A to FIG. 10D are schematic views showing another
semiconductor light emitting device according to the first
embodiment.
[0175] FIG. 11A to FIG. 11C are schematic plan views showing
components of the semiconductor light emitting device according to
the first embodiment.
[0176] FIG. 12A to FIG. 12D are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment.
[0177] FIG. 13A to FIG. 13D are schematic plan views showing other
components of the semiconductor light emitting device according to
the first embodiment.
[0178] FIG. 10A is a schematic plan view showing the semiconductor
light emitting device according to the first embodiment. FIG. 10B
is a cross-sectional view along line E1-E2 of FIG. 10A. FIG. 10C is
a cross-sectional view along line F1-F2 of FIG. 10A. FIG. 10D is a
cross-sectional view along line G1-G2 of FIG. 10A.
[0179] The semiconductor light emitting device 113 shown in FIG.
10A to FIG. 10D includes the semiconductor light emitting device
111 shown in FIG. 2A to FIG. 2C and further includes a third
stacked body 30, a second light-transmissive electrode 43, and the
second interconnect electrode 47. Instead of the first electrode 61
(e.g., referring to FIG. 2A) and the second electrode 63 (e.g.,
referring to FIG. 2A), the semiconductor light emitting device 113
includes a third electrode 65, a fourth electrode 67, and a fifth
electrode 69.
[0180] The first stacked body 10, the second stacked body 20, the
reflecting electrode 51, and the support substrate 55 are similar
to those described above in regard to FIG. 1A to FIG. 2C. A
detailed description of these components is omitted as
appropriate.
[0181] The third stacked body 30 includes a fifth semiconductor
layer 31, a sixth semiconductor layer 33, and a third light
emitting layer 35. The fifth semiconductor layer 31 has a fifth
conductivity type. The sixth semiconductor layer 33 has a sixth
conductivity type. The sixth conductivity type is different from
the fifth conductivity type. For example, the fifth conductivity
type is the n-type. For example, the sixth conductivity type is the
p-type. The fifth conductivity type may be the p-type. The sixth
conductivity type may be the n-type. In the following example, the
fifth conductivity type is the n-type. In the following example,
the sixth conductivity type is the p-type.
[0182] The fifth semiconductor layer 31 is separated from the first
semiconductor layer 11 in the first direction (in the example, the
Z-axis direction). The sixth semiconductor layer 33 is provided
between the fifth semiconductor layer 31 and the first
semiconductor layer 11. The third light emitting layer 35 is
provided between the fifth semiconductor layer 31 and the sixth
semiconductor layer 33. For example, as shown in FIG. 10B to FIG.
10D, the third light emitting layer 35 emits a third light L3. The
third light has a third peak wavelength. The third peak wavelength
is different from the first peak wavelength. The third peak
wavelength is different from the second peak wavelength.
[0183] The second light-transmissive electrode 43 is provided
between the first semiconductor layer 11 and the sixth
semiconductor layer 33. As shown in FIG. 12D, the second
light-transmissive electrode 43 has a third transmissive portion
43p and a fourth transmissive portion 43q. The third transmissive
portion 43p is provided between the first semiconductor layer 11
and the sixth semiconductor layer 33. The fourth transmissive
portion 43q is arranged with the third transmissive portion 43p in
the plane perpendicular to the first direction. In other words, the
fourth transmissive portion 43q is arranged with the third
transmissive portion 43p in a direction perpendicular to the first
direction.
[0184] The second light-transmissive electrode 43 has an ohmic
contact with the first semiconductor layer 11. The second
light-transmissive electrode 43 has an ohmic contact with the sixth
semiconductor layer 33. The second light-transmissive electrode 43
transmits the first light L1 emitted by the first light emitting
layer 15. The second light-transmissive electrode 43 transmits the
second light L2 emitted by the second light emitting layer 25. The
second light-transmissive electrode 43 transmits the third light L3
emitted by the third light emitting layer 35.
[0185] As shown in FIG. 12A, the first interconnect electrode 46
includes a first interconnect electrode portion 46s and a second
interconnect electrode portion 46t.
[0186] The second interconnect electrode 47 is provided between the
first semiconductor layer 11 and the sixth semiconductor layer 33.
The second interconnect electrode 47 is electrically connected to
the second light-transmissive electrode 43. As shown in FIG. 13A,
the second interconnect electrode 47 includes a third interconnect
electrode portion 47s and a fourth interconnect electrode portion
47t.
[0187] As shown in FIG. 13A, at least a portion of the first
interconnect region 46a that is formed by projecting the first
interconnect electrode 46 onto the plane perpendicular to the first
direction (in the example, the Z-axis direction) overlaps the
second interconnect region 47a formed by projecting the second
interconnect electrode 47 onto the plane perpendicular to the first
direction. In other words, in the first direction, at least a
portion of the first interconnect electrode 46 overlaps the second
interconnect electrode 47. Thereby, uneven color can be reduced
while increasing the light extraction efficiency.
[0188] The fifth semiconductor layer 31 is disposed between the
third electrode 65 and the third light emitting layer 35. The third
electrode 65 is electrically connected to the fifth semiconductor
layer 31. As shown in FIG. 10A and FIG. 13D, the third electrode 65
has a pad portion 65p, a first fine wire portion 65q, and a second
fine wire portion 65r. The first fine wire portion 65q extends
outward from the pad portion 65p with the pad portion 65p as a base
portion. The second fine wire portion 65r extends outward from the
pad portion 65p with the pad portion 65p as a base portion.
[0189] The fourth transmissive portion 43q is disposed between the
fourth electrode 67 and the first semiconductor layer 11. The
fourth electrode 67 is electrically connected to the first
semiconductor layer 11. The fourth electrode 67 is electrically
connected to the sixth semiconductor layer 33.
[0190] The second transmissive portion 41q (referring to FIG. 11C)
is disposed between the fifth electrode 69 and the third
semiconductor layer 21. The fifth electrode 69 is electrically
connected to the second semiconductor layer 13. The fifth electrode
69 is electrically connected to the third semiconductor layer
21.
[0191] As shown in FIG. 11A and FIG. 13C, the outer edge (the first
light emitting layer outer edge 15b) of the first light emitting
layer region 15a that is formed by projecting the first light
emitting layer 15 onto the plane perpendicular to the first
direction (in the example, the Z-axis direction) is positioned
inside the outer edge (the reflecting electrode outer edge 51b) of
the reflecting electrode region 51a formed by projecting the
reflecting electrode 51 onto the plane perpendicular to the first
direction. In other words, in the first direction, the first light
emitting layer 15 is positioned inside the reflecting electrode 51.
In the first direction, the first light emitting layer 15 may be
aligned with the reflecting electrode 51.
[0192] Thereby, the light extraction region (the first light
extraction region 17 (referring to FIG. 1B)) of the first light
emitting layer 15, the light extraction region (the second light
extraction region 27 (referring to FIG. 1B)) of the second light
emitting layer, and the light extraction region of the third light
emitting layer 35 can be set to be substantially the same; and
uneven color can be reduced while increasing the light extraction
efficiency.
[0193] As shown in FIG. 11A and FIG. 13B, a fourth electrode region
67a that is formed by projecting the fourth electrode 67 onto the
plane perpendicular to the first direction (in the example, the
Z-axis direction) is separated from the reflecting electrode region
51a formed by projecting the reflecting electrode 51 onto the plane
perpendicular to the first direction. In other words, the fourth
electrode 67 is separated from the reflecting electrode 51 in a
direction perpendicular to the first direction.
[0194] Thereby, the proportion of the light absorbed by the fourth
electrode 67 can be reduced; and the light extraction efficiency
can be increased.
[0195] As shown in FIG. 11A and FIG. 12B, a fifth electrode region
69a that is formed by projecting the fifth electrode 69 onto the
plane perpendicular to the first direction (in the example, the
Z-axis direction) is separated from the reflecting electrode region
51a formed by projecting the reflecting electrode 51 onto the plane
perpendicular to the first direction. In other words, the fifth
electrode 69 is separated from the reflecting electrode 51 in the
direction perpendicular to the first direction.
[0196] Thereby, the proportion of the light absorbed by the fifth
electrode 69 can be reduced; and the light extraction efficiency
can be increased.
[0197] As shown in FIG. 13D, at least a portion of a third
electrode region 65a that is formed by projecting the third
electrode 65 onto the plane perpendicular to the first direction
overlaps the second interconnect region 47a formed by projecting
the second interconnect electrode 47 onto the plane perpendicular
to the first direction. In other words, in the first direction, at
least a portion of the third electrode 65 overlaps the second
interconnect electrode 47.
[0198] An example of a method for manufacturing the semiconductor
light emitting device 113 shown in FIG. 10A to FIG. 10D will now be
described.
[0199] The method for manufacturing the second crystal layer that
includes the second stacked body 20 in which the third
semiconductor layer 21, the second light emitting layer 25, and the
fourth semiconductor layer 23 are provided in this order is similar
to that described above in regard to the method for manufacturing
the semiconductor light emitting device 111. Thereby, the second
semiconductor wafer is made.
[0200] The method for forming the reflecting electrode 51, the
method for forming the insulating layer 53, and the method for
forming the second transmissive electrode portion 41b are similar
to those described above in regard to the method for manufacturing
the semiconductor light emitting device 111.
[0201] The method for manufacturing the first crystal layer that
includes the first stacked body 10 in which the first semiconductor
layer 11, the first light emitting layer 15, and the second
semiconductor layer 13 are provided in this order is similar to
that described above in regard to the method for manufacturing the
semiconductor light emitting device 111. Thereby, the first
semiconductor wafer is made.
[0202] The method for forming the first transmissive electrode
portion 41a is similar to that described above in regard to the
method for manufacturing the semiconductor light emitting device
111. The method for forming a third transmissive electrode portion
43a (referring to FIG. 10B to FIG. 10D) is similar to the method
for forming the first transmissive electrode portion 41a. The
method for forming the fifth electrode 69 is similar to the method
for forming the second electrode 63.
[0203] The method for manufacturing a third crystal layer that
includes the third stacked body 30 in which the fifth semiconductor
layer 31, the third light emitting layer 35, and the sixth
semiconductor layer 33 are provided in this order is similar to the
method for manufacturing the first crystal layer. Thereby, a third
semiconductor wafer is made.
[0204] The method for forming a fourth transmissive electrode
portion 43b (referring to FIG. 10B to FIG. 10D) is similar to the
method for forming the first transmissive electrode portion 41a.
The method for forming the fourth electrode 67 is similar to the
method for forming the second electrode 63. The method for forming
the third electrode 65 is similar to the method for forming the
first electrode 61.
[0205] A detailed description of the methods that are similar to
those described above is omitted as appropriate.
[0206] The first transmissive electrode portion 41a on which CMP
was performed is directly bonded to the second transmissive
electrode portion 41b on which CMP was performed. Plasma cleaning
by an oxygen atmosphere is performed in a vacuum. The first
semiconductor wafer and the second semiconductor wafer are bonded
by applying a pressure of 1 kilonewton (kN) at 100.degree. C.
Thereby, the first transmissive electrode portion 41a is
electrically connected to the second transmissive electrode portion
41b. The first transmissive electrode portion 41a and the second
transmissive electrode portion 41b can be considered to be the same
electrode (the first light-transmissive electrode 41). The first
interconnect electrode 46 functions as a common interconnect
electrode between the second semiconductor layer 13 and the third
semiconductor layer 21.
[0207] The growth substrate of the first semiconductor wafer is
removed. In the case where the growth substrate of the first
semiconductor wafer is a sapphire substrate, the growth substrate
is removed by LLO.
[0208] Dry etching of the exposed first crystal layer is performed.
Thereby, the first semiconductor layer 11 is exposed.
[0209] A portion (the third transmissive electrode portion 43a) of
the second light-transmissive electrode 43 is formed on the exposed
first semiconductor layer 11. The thickness of the third
transmissive electrode portion 43a is, for example, not less than
about 50 nm and not more than about 10000 nm.
[0210] The surface (a third electrode surface 43c) of the third
transmissive electrode portion 43a is planarized by CMP.
[0211] The third transmissive electrode portion 43a on which CMP
was performed is directly bonded to the fourth transmissive
electrode portion 43b on which CMP was performed. Plasma cleaning
by an oxygen atmosphere is performed in a vacuum. The first
semiconductor wafer and the third semiconductor wafer are bonded by
applying a pressure of 1 kilonewton (kN) at 100.degree. C. Thereby,
the third transmissive electrode portion 43a is electrically
connected to the fourth transmissive electrode portion 43b. The
third transmissive electrode portion 43a and the fourth
transmissive electrode portion 43b can be considered to be the same
electrode (the second light-transmissive electrode 43). The second
interconnect electrode 47 functions as a common interconnect
electrode between the first semiconductor layer 11 and the sixth
semiconductor layer 33.
[0212] The growth substrate of the third semiconductor wafer is
removed. In the case where the growth substrate of the third
semiconductor wafer is a sapphire substrate, the growth substrate
is removed by LLO.
[0213] Dry etching of the exposed third crystal layer is performed.
Thereby, the fifth semiconductor layer 31 is exposed.
[0214] Al/Ni/Au is formed on the exposed fifth semiconductor layer
31 by lift-off. Thereby, the third electrode 65 is formed.
[0215] According to the embodiment, any number of light emitting
layers can be stacked by repeating the same processes.
[0216] For example, a white LED can be realized by setting the
light emission wavelengths of the light emitting layers (in the
example, the first light emitting layer 15, the second light
emitting layer 25, and the third light emitting layer 35) to be
red, green, and blue. Conversely, when a fluorescer is used, a
Stokes shift loss occurs due to the wavelength conversion.
Therefore, there is room for improvement to increase the
efficiency. In the case where all of the colors are created by
LEDs, the wavelength conversion is unnecessary. Therefore, the
efficiency can be increased.
Second Embodiment
[0217] FIG. 14A and FIG. 14B are schematic perspective views
showing the general concept of a semiconductor light emitting
device according to a second embodiment.
[0218] FIG. 14A is a schematic perspective view showing the general
concept of the structure of the semiconductor light emitting device
according to the second embodiment. FIG. 14B is a schematic
perspective view showing the extraction region of the light emitted
from the first light emitting layer and the extraction region of
the light emitted from the second light emitting layer.
[0219] The semiconductor light emitting device 120 shown in FIG.
14A and FIG. 14B includes the first stacked body 10, the second
stacked body 20, the light-transmissive electrode 42, the first
interconnect electrode 46, the second interconnect electrode 47,
the reflecting electrode 51, and a bonding layer 52.
[0220] The first stacked body 10 includes the first semiconductor
layer 11, the second semiconductor layer 13, and the first light
emitting layer 15.
[0221] The second stacked body 20 includes the third semiconductor
layer 21, the fourth semiconductor layer 23, and the second light
emitting layer 25.
[0222] The first semiconductor layer 11, the second semiconductor
layer 13, the first light emitting layer 15, the third
semiconductor layer 21, the fourth semiconductor layer 23, and the
second light emitting layer 25 are similar to those described above
in regard to FIG. 1A and FIG. 1B. A detailed description of these
components is omitted as appropriate.
[0223] The bonding layer 52 is provided between the second
semiconductor layer 13 and the third semiconductor layer 21. The
bonding layer 52 transmits the first light L1 emitted by the first
light emitting layer 15. The bonding layer 52 transmits the second
light L2 emitted by the second light emitting layer 25.
[0224] The first interconnect electrode 46 is provided between the
second semiconductor layer 13 and the third semiconductor layer
21.
[0225] The light-transmissive electrode 42 is provided between the
second semiconductor layer 13 and the bonding layer 52. The
light-transmissive electrode 42 has an ohmic contact with the
second semiconductor layer 13. The light-transmissive electrode 42
is electrically connected to the first interconnect electrode 46.
The light-transmissive electrode 42 transmits the first light L1
emitted by the first light emitting layer 15. The
light-transmissive electrode 42 transmits the second light L2
emitted by the second light emitting layer 25.
[0226] The light-transmissive electrode 42 has a transmittance of
50% or more for the light emitted from the first light emitting
layer 15. The light-transmissive electrode 42 has a transmittance
of 50% or more for the light emitted from the second light emitting
layer 25. The light-transmissive electrode 42 is conductive. The
light-transmissive electrode 42 includes a material that can have
an ohmic contact with at least one selected from a p-type
semiconductor layer and an n-type semiconductor layer. For example,
the material of the light-transmissive electrode 42 may be ITO,
ITON, ZnO, etc. The thickness (the length in the Z-axis direction)
of the light-transmissive electrode 42 is, for example, not less
than about 10 nm and not more than about 10000 nm. The
transmittance of the light is higher when the thickness of the
light-transmissive electrode 42 is relatively thin. In the case
where the thickness of the light-transmissive electrode 42 is
relatively thick, the sheet resistance of the light-transmissive
electrode 42 is lower. Thereby, the spreading properties of the
current flowing through the light-transmissive electrode 42
improve. The light-transmissive electrode 42 may include a
relatively thin metal, an oxide of a relatively thin metal, or
graphene.
[0227] The second interconnect electrode 47 is provided between the
second semiconductor layer 13 and the third semiconductor layer 21.
The second interconnect electrode 47 has an ohmic contact with the
third semiconductor layer 21.
[0228] The first light emitting layer 15 is positioned inside the
reflecting electrode 51 when projected onto the plane perpendicular
to the first direction. This is elaborated below. The reflecting
electrode 51 has an ohmic contact with the fourth semiconductor
layer 23. The reflecting electrode 51 includes, for example, silver
(Ag).
[0229] Similarly to the semiconductor light emitting device 110
described above in regard to FIG. 1A and FIG. 1B, in the
semiconductor light emitting device 120 shown in FIG. 14A and FIG.
14B, the light emitted from the first light emitting layer 15 is
extracted mainly in the Z-axis direction. The light emitted from
the second light emitting layer 25 is extracted mainly in the
Z-axis direction.
[0230] A shadow does not occur for the first light L1 that is
emitted from the first light emitting layer 15 and extracted in the
Z-axis direction. A non-light emitting region of the first light
emitting layer 15 does not occur. Therefore, for example, as shown
in FIG. 14B, the first light extraction region 17 exists for the
first light L1.
[0231] The shadow 27c due to the first interconnect electrode 46
and the second interconnect electrode 47 occurs for the second
light L2 that is emitted from the second light emitting layer 25
and extracted in the Z-axis direction. Therefore, for example, as
shown in FIG. 14B, the second light extraction region 27 has the
third extraction portion 27a and the fourth extraction portion 27b.
The third extraction portion 27a is separated from the fourth
extraction portion 27b in the plane (the XY plane) perpendicular to
the Z-axis direction.
[0232] In the embodiment, in the first direction, the first
interconnect electrode 46 overlaps the second interconnect
electrode 47. Thereby, the occurrence of the shadow 27c due to the
first interconnect electrode 46 for the second light L2 emitted
from the second light emitting layer 25 can be suppressed. The
surface area of the second light extraction region 27 can be
increased further. Therefore, the luminous efficiency of the
semiconductor light emitting device 120 can be increased. The
surface area of the portion where the second light extraction
region 27 overlaps the first light extraction region 17 can be
increased further. Therefore, color breakup can be suppressed.
[0233] FIG. 15A to FIG. 15D are schematic views showing a
semiconductor light emitting device according to the second
embodiment.
[0234] FIG. 16A to FIG. 16C are schematic plan views showing
components of the semiconductor light emitting device according to
the second embodiment.
[0235] FIG. 17A to FIG. 17D are schematic plan views showing other
components of the semiconductor light emitting device according to
the second embodiment.
[0236] FIG. 18A to FIG. 18C are schematic plan views showing other
components of the semiconductor light emitting device according to
the second embodiment.
[0237] FIG. 15A is a schematic plan view showing the semiconductor
light emitting device according to the second embodiment. FIG. 15B
is a cross-sectional view along line H1-H2 shown in FIG. 15A. FIG.
15C is a cross-sectional view along line I1-I2 shown in FIG. 15A.
FIG. 15D is a cross-sectional view along line J1-J2 shown in FIG.
15A.
[0238] The semiconductor light emitting device 121 shown in FIG.
15A to FIG. 15D includes the first stacked body 10, the second
stacked body 20, the light-transmissive electrode 42, the first
interconnect electrode 46, the second interconnect electrode 47,
the bonding layer 52, the reflecting electrode 51, the insulating
layer 53, the support substrate 55, the back surface electrode 57,
a first electrode 71, a second electrode 73, and a third electrode
75.
[0239] The first stacked body 10 includes the first semiconductor
layer 11, the second semiconductor layer 13, and the first light
emitting layer 15.
[0240] The second stacked body 20 includes the third semiconductor
layer 21, the fourth semiconductor layer 23, and the second light
emitting layer 25.
[0241] The first semiconductor layer 11, the second semiconductor
layer 13, the first light emitting layer 15, the third
semiconductor layer 21, the fourth semiconductor layer 23, the
second light emitting layer 25, the reflecting electrode 51, the
insulating layer 53, the support substrate 55, and the back surface
electrode 57 are similar to those described above in regard to FIG.
1A and FIG. 1B. A detailed description of these components is
omitted as appropriate.
[0242] As shown in FIG. 17D, the light-transmissive electrode 42
has a first transmissive portion 42p and a second transmissive
portion 42q. The first transmissive portion 42p is provided between
the second semiconductor layer 13 and the bonding layer 52. The
second transmissive portion 42q is arranged with the first
transmissive portion 42p in the plane perpendicular to the first
direction. In other words, the second transmissive portion 42q is
arranged with the first transmissive portion 42p in a direction
perpendicular to the first direction.
[0243] The first semiconductor layer 11 is disposed between the
first electrode 71 and the first light emitting layer 15. The first
electrode 71 is electrically connected to the first semiconductor
layer 11. As shown in FIG. 15A and FIG. 18C, the first electrode 71
has a pad portion 71p, a first fine wire portion 71q, and a second
fine wire portion 71r. The first fine wire portion 71q extends
outward from the pad portion 71p with the pad portion 71p as a base
portion. The second fine wire portion 71r extends outward from the
pad portion 71p with the pad portion 71p as a base portion.
[0244] As shown in FIG. 15C and FIG. 15D, the second transmissive
portion 42q is disposed between the second electrode 73 and the
bonding layer 52. The second electrode 73 is electrically connected
to the second semiconductor layer 13.
[0245] As shown in FIG. 17A, the second interconnect electrode 47
has a first interconnect portion 47p, a first fine wire portion
47q, and a second fine wire portion 47r. The first fine wire
portion 47q extends outward from the first interconnect portion 47p
with the first interconnect portion 47p as a base portion. The
second fine wire portion 47r extends outward from the first
interconnect portion 47p with the first interconnect portion 47p as
a base portion.
[0246] As shown in FIG. 15A, FIG. 15B, and FIG. 15D, the first
interconnect portion 47p is disposed between the third electrode 75
and the third semiconductor layer 21. The third electrode 75 is
electrically connected to the third semiconductor layer 21.
[0247] As shown in FIG. 16A and FIG. 18A, the outer edge (the first
light emitting layer outer edge 15b) of the first light emitting
layer region 15a that is formed by projecting the first light
emitting layer 15 onto the plane perpendicular to the first
direction (in the example, the Z-axis direction) is positioned
inside the outer edge (the reflecting electrode outer edge 51b) of
the reflecting electrode region 51a formed by projecting the
reflecting electrode 51 onto the plane perpendicular to the first
direction. In other words, in the first direction, the first light
emitting layer 15 is positioned inside the reflecting electrode 51.
In the first direction, the first light emitting layer 15 may be
aligned with the reflecting electrode 51.
[0248] Thereby, uneven color can be reduced while increasing the
light extraction efficiency.
[0249] As shown in FIG. 17A, at least a portion of the first
interconnect region 46a that is formed by projecting the first
interconnect electrode 46 onto the plane perpendicular to the first
direction (in the example, the Z-axis direction) overlaps the
second interconnect region 47a formed by projecting the second
interconnect electrode 47 onto the plane perpendicular to the first
direction. In other words, in the first direction, at least a
portion of the first interconnect electrode 46 overlaps the second
interconnect electrode 47. Thereby, uneven color can be reduced
while increasing the light extraction efficiency.
[0250] As shown in FIG. 16A and FIG. 18B, a second electrode region
73a that is formed by projecting the second electrode 73 onto the
plane perpendicular to the first direction (in the example, the
Z-axis direction) is separated from the reflecting electrode region
51a formed by projecting the reflecting electrode 51 onto the plane
perpendicular to the first direction. In other words, the second
electrode 73 is separated from the reflecting electrode 51 in a
direction perpendicular to the first direction.
[0251] In the first direction, the light that is emitted at the
position overlapping the second electrode 73 is absorbed relatively
easily by the second electrode 73. In the case where the second
electrode 73 is separated from the reflecting electrode 51 in the
direction perpendicular to the first direction, the proportion of
the light absorbed by the second electrode 73 can be reduced; and
the light extraction efficiency can be increased.
[0252] As shown in FIG. 16A and FIG. 17C, a third electrode region
75a that is formed by projecting the third electrode 75 onto the
plane perpendicular to the first direction (in the example, the
Z-axis direction) is separated from the reflecting electrode region
51a formed by projecting the reflecting electrode 51 onto the plane
perpendicular to the first direction. In other words, the third
electrode 75 is separated from the reflecting electrode 51 in a
direction perpendicular to the first direction.
[0253] In the first direction, the light emitted at the position
overlapping the third electrode 75 is absorbed relatively easily by
the third electrode 75. In the case where the third electrode 75 is
separated from the reflecting electrode 51 in a direction
perpendicular to the first direction, the proportion of the light
absorbed by the third electrode 75 can be reduced; and the light
extraction efficiency can be increased.
[0254] As shown in FIG. 18C, at least a portion of a first
electrode region 71a that is formed by projecting the first
electrode 71 onto the plane perpendicular to the first direction
overlaps the first interconnect region 46a formed by projecting the
first interconnect electrode 46 onto the plane perpendicular to the
first direction. In other words, in the first direction, at least a
portion of the first electrode 71 overlaps the first interconnect
electrode 46. Thereby, uneven color can be reduced while increasing
the light extraction efficiency.
[0255] An example of a method for manufacturing the semiconductor
light emitting device 121 shown in FIG. 15A to FIG. 15D will now be
described.
[0256] From the process of growing the second crystal layer to the
process of exposing the third semiconductor layer 21, the
manufacturing method is similar to that described above in regard
to the example of the method for manufacturing the semiconductor
light emitting device 111 shown in FIG. 2A to FIG. 2C. A detailed
description of these components is omitted as appropriate.
[0257] Al/Ni/Au is formed with a thickness of 500 nm on the exposed
third semiconductor layer 21 by lift-off. Thereby, the second
interconnect electrode 47 is formed. The second interconnect
electrode 47 has the first interconnect portion 47p, the first fine
wire portion 47q, and the second fine wire portion 47r. The width
(the first fine wire portion width W2) of the first fine wire
portion 47q (referring to FIG. 17A) is, for example, about 10
.mu.m. The width (the second fine wire portion width W3) of the
second fine wire portion 47r (referring to FIG. 17A) is, for
example, about 10 .mu.m.
[0258] SiO.sub.2 is formed on the third semiconductor layer 21.
Thereby, a portion (a second bonding portion 52b) of the bonding
layer 52 is formed. The second bonding portion 52b covers the
second interconnect electrode 47. The thickness (the length in the
Z-axis direction) of the second bonding portion 52b is, for
example, not less than about 500 nm and not more than about 10000
nm. The surface (a second bonding surface 52d) of the second
bonding portion 52b is planarized by CMP.
[0259] From the process of growing the first crystal layer to the
process of forming the light-transmissive electrode 42 (in the
semiconductor light emitting device 111, the first
light-transmissive electrode 41), the manufacturing method is
similar to that described above in regard to the example of the
method for manufacturing the semiconductor light emitting device
111 shown in FIG. 2A to FIG. 2C. A detailed description of these
components is omitted as appropriate.
[0260] Ti/Pt/Au is formed with a thickness of 500 nm on the
light-transmissive electrode 42 by lift-off. Thereby, the first
interconnect electrode 46 is formed. The resistivity of the
light-transmissive electrode 42 is relatively high. The first
interconnect electrode 46 is formed to improve the current
spreading properties. The degree of the current spreading is a
result of the resistivity of the light-transmissive electrode 42.
By forming the first interconnect electrode 46, the current can be
spread to a relatively wide region of the second semiconductor
layer 13. The width (the first interconnect electrode width W1) of
the first interconnect electrode 46 (referring to FIG. 17B) is, for
example, about 10 .mu.m.
[0261] SiO.sub.2 is formed on substantially the entire
light-transmissive electrode 42. Thereby, another portion (a first
bonding portion 52a) of the bonding layer 52 is formed. The first
bonding portion 52a covers the first interconnect electrode 46. The
thickness (the length in the Z-axis direction) of the first bonding
portion 52a is, for example, not less than about 500 nm and not
more than about 10000 nm. The surface (a first bonding surface 52c)
of the first bonding portion 52a is planarized by CMP.
[0262] The first bonding portion 52a on which CMP was performed is
directly bonded to the second bonding portion 52b on which CMP was
performed. Plasma cleaning by an oxygen atmosphere is performed in
a vacuum. The first semiconductor wafer and the second
semiconductor wafer are bonded by applying a pressure of 1 kN at
100.degree. C.
[0263] The growth substrate of the first semiconductor wafer is
removed. In the case where the growth substrate of the first
semiconductor wafer is a sapphire substrate, the growth substrate
is removed by LLO.
[0264] Dry etching of the exposed first crystal layer is performed.
Thereby, the first semiconductor layer 11 is exposed.
[0265] A portion of the first crystal layer is removed by dry
etching. Thereby, the light-transmissive electrode 42 is
exposed.
[0266] A portion of the exposed light-transmissive electrode 42 is
removed by dry etching. Thereby, the second crystal layer (in the
example, the third semiconductor layer 21) and the first
interconnect portion 47p of the second interconnect electrode 47
are exposed.
[0267] A portion of the exposed second crystal layer is removed by
dry etching. Thereby, the insulating layer 53 is exposed.
[0268] Ti/Pt/Au is formed with a thickness of 500 nm on the exposed
light-transmissive electrode 42 by lift-off. Thereby, the second
electrode 73 is formed. Ti/Pt/Au is formed with a thickness of 500
nm on the exposed first interconnect portion 47p by lift-off.
Thereby, the third electrode 75 is formed.
[0269] Al/Ni/Au is formed with a thickness of 500 nm on the exposed
first semiconductor layer 11 by lift-off. The first electrode 71
has the pad portion 71p, the first fine wire portion 71q, and the
second fine wire portion 71r. The first fine wire portion 71q and
the second fine wire portion 71r function to spread the current.
The width (a first fine wire portion width W4) of the first fine
wire portion 71q (referring to FIG. 18C) is, for example, about 10
.mu.m. The width (a second fine wire portion width W5) of the
second fine wire portion 71r (referring to FIG. 18C) is, for
example, about 10 .mu.m.
[0270] At least a portion of the first interconnect electrode 46
overlaps the second interconnect electrode 47 in the first
direction (in the example, the Z-axis direction). A portion of the
second light emitted from the second light emitting layer 25 is
blocked by the first interconnect electrode 46 and is not extracted
easily directly above the first interconnect electrode 46.
Conversely, according to the embodiment, the second light emitted
from the second light emitting layer 25 is not easily blocked by
the second interconnect electrode 47 because, in the first
direction, at least a portion of the first interconnect electrode
46 overlaps the second interconnect electrode 47. Therefore, the
light extraction efficiency increases. Uneven color can be
reduced.
[0271] A dichromic mirror may be provided between the first crystal
layer and the second crystal layer. In such a case, the dichromic
mirror transmits the second light L2 emitted from the second light
emitting layer 25 and reflects the first light L1 emitted from the
first light emitting layer 15. An effect that is similar to that of
the dichromic mirror may be realized by adjusting the thickness
(the length in the Z-axis direction) of the light-transmissive
electrode 42, the thickness (the length in the Z-axis direction) of
the first bonding portion 52a, and the thickness (the length in the
Z-axis direction) of the second bonding portion 52b. The dichromic
mirror may be provided in the interior of the first bonding portion
52a or the interior of the second bonding portion 52b.
[0272] The material of the bonding layer 52 is not limited to
SiO.sub.2 and may be another dielectric. It is sufficient for the
bonding layer 52 to include a material that is insulative, can
ensure the bonding strength, and is transmissive to the first light
L1 emitted from the first light emitting layer 15 and the second
light L2 emitted from the second light emitting layer 25. In the
case where the material of the bonding layer 52 is SiO.sub.2 and
the thickness (the length in the Z-axis direction) of the SiO.sub.2
is relatively thin, the heat dissipation from the first stacked
body 10 is relatively good.
[0273] FIG. 19A to FIG. 19C are schematic views showing another
semiconductor light emitting device according to the second
embodiment.
[0274] FIG. 19A corresponds to the cross-sectional view along line
11-12 of FIG. 15A.
[0275] As shown in FIG. 19B, the first interconnect electrode 46
has a second interconnect portion 46p. The semiconductor light
emitting device 122 shown in FIG. 19A includes the semiconductor
light emitting device 121 shown in FIG. 15A to FIG. 15D in which
the second interconnect portion 46p of the first interconnect
electrode 46 is disposed between the second electrode 73 and the
bonding layer 52. In other words, the second transmissive portion
42q (referring to FIG. 17D) is not disposed between the second
electrode 73 and the bonding layer 52. As shown in FIG. 19C, the
light-transmissive electrode 42 does not have the second
transmissive portion 42q.
[0276] The second interconnect electrode 47 is similar to that
described above in regard to FIG. 17A. As shown in FIG. 17A, the
second interconnect electrode 47 has a third interconnect portion
47u. The first interconnect portion 47p of the semiconductor light
emitting device 121 described above in regard to FIG. 15A to FIG.
15D corresponds to the third interconnect portion 47u of the
semiconductor light emitting device 122 shown in FIG. 19A.
[0277] According to the embodiment, the light-transmissive
electrode 42 can be used as an etching stop layer in the dry
etching of the first crystal layer. According to the embodiment,
the first bonding portion 52a can be directly bonded to the second
bonding portion 52b without patterning the light-transmissive
electrode 42. The contact resistance between the second electrode
73 and the second interconnect portion 46p is relatively low. The
adhesion between the second electrode 73 and the second
interconnect portion 46p is relatively high.
Third Embodiment
[0278] FIG. 20A and FIG. 20B are schematic perspective views
showing the general concept of a semiconductor light emitting
device according to a third embodiment.
[0279] FIG. 20A is a schematic perspective view showing the general
concept of the structure of the semiconductor light emitting device
according to the third embodiment. FIG. 20B is a schematic
perspective view showing the extraction region of the light emitted
from the first light emitting layer and the extraction region of
the light emitted from the second light emitting layer.
[0280] The semiconductor light emitting device 130 shown in FIG.
20A and FIG. 20B includes the first stacked body 10, the second
stacked body 20, the light-transmissive electrode 42, the first
interconnect electrode 46, the second interconnect electrode 47,
the reflecting electrode 51, and the bonding layer 52.
[0281] The first stacked body 10 includes the first semiconductor
layer 11, the second semiconductor layer 13, and the first light
emitting layer 15.
[0282] The second stacked body 20 includes the third semiconductor
layer 21, the fourth semiconductor layer 23, and the second light
emitting layer 25.
[0283] The first semiconductor layer 11, the second semiconductor
layer 13, the first light emitting layer 15, the third
semiconductor layer 21, the fourth semiconductor layer 23, and the
second light emitting layer 25 are similar to those described above
in regard to FIG. 1A and FIG. 1B. A detailed description of these
components is omitted as appropriate.
[0284] The first interconnect electrode 46 is provided between the
second semiconductor layer 13 and the third semiconductor layer 21.
The first interconnect electrode 46 is electrically connected to
the light-transmissive electrode 42. The first interconnect
electrode 46 has a non-ohmic contact with the second semiconductor
layer 13. Otherwise, the structure is similar to the structure of
the semiconductor light emitting device 120 described above in
regard to FIG. 14A and FIG. 14B.
[0285] The non-light emitting region 17c of the first light
emitting layer 15 occurs for the first light L1 that is emitted
from the first light emitting layer 15 and extracted in the Z-axis
direction. Therefore, for example, as shown in FIG. 20B, the first
light extraction region 17 has the first extraction portion 17a and
the second extraction portion 17b. The first extraction portion 17a
is separated from the second extraction portion 17b in the plane
(the XY plane) perpendicular to the Z-axis direction.
[0286] The shadow 27c that is due to the first interconnect
electrode 46 occurs for the second light L2 that is emitted from
the second light emitting layer 25 and extracted in the Z-axis
direction. Therefore, for example, as shown in FIG. 20B, the second
light extraction region 27 has the third extraction portion 27a and
the fourth extraction portion 27b. The third extraction portion 27a
is separated from the fourth extraction portion 27b in the plane
(the XY plane) perpendicular to the Z-axis direction.
[0287] According to the embodiment, because the non-light emitting
region 17c occurs, the first light extraction region 17 and the
second light extraction region 27 can be aligned. Thereby, color
breakup can be suppressed further while increasing the light
extraction efficiency. In the case where a shift D1 between the
first interconnect electrode 46 and the second interconnect
electrode 47 when projected onto the plane perpendicular to the
first direction (in the example, the Z-axis direction) is
relatively small, color breakup is relatively suppressed.
[0288] FIG. 21A to FIG. 21D are schematic views showing a
semiconductor light emitting device according to the third
embodiment.
[0289] FIG. 22A and FIG. 22B are schematic plan views showing
components of the semiconductor light emitting device according to
the third embodiment.
[0290] FIG. 21A is a schematic plan view showing the semiconductor
light emitting device according to the third embodiment. FIG. 21B
is a cross-sectional view along line K1-K2 of FIG. 21A. FIG. 21C is
a cross-sectional view along line M1-M2 of FIG. 21A. FIG. 21D is a
cross-sectional view along line N1-N2 of FIG. 21A.
[0291] The semiconductor light emitting device 131 shown in FIG.
21A to FIG. 21D includes the first stacked body 10, the second
stacked body 20, the light-transmissive electrode 42, the first
interconnect electrode 46, the second interconnect electrode 47,
the bonding layer 52, the reflecting electrode 51, the insulating
layer 53, the support substrate 55, the back surface electrode 57,
the first electrode 71, the second electrode 73, and the third
electrode 75.
[0292] The first stacked body 10 includes the first semiconductor
layer 11, the second semiconductor layer 13, and the first light
emitting layer 15.
[0293] The second stacked body 20 includes the third semiconductor
layer 21, the fourth semiconductor layer 23, and the second light
emitting layer 25.
[0294] The first semiconductor layer 11, the second semiconductor
layer 13, the first light emitting layer 15, the third
semiconductor layer 21, the fourth semiconductor layer 23, the
second light emitting layer 25, the reflecting electrode 51, the
insulating layer 53, the support substrate 55, and the back surface
electrode 57 are similar to those described above in regard to FIG.
1A and FIG. 1B. A detailed description of these components is
omitted as appropriate.
[0295] As shown in FIG. 22A, the light-transmissive electrode 42
has the first transmissive portion 42p and the second transmissive
portion 42q. The second transmissive portion 42q is arranged with
the first transmissive portion 42p in the plane perpendicular to
the first direction. In other words, the second transmissive
portion 42q is arranged with the first transmissive portion 42p in
a direction perpendicular to the first direction. As shown in FIG.
21C and FIG. 21D, the second transmissive portion 42q is disposed
between the second electrode 73 and the bonding layer 52. The
second electrode 73 is electrically connected to the second
semiconductor layer 13.
[0296] As shown in FIG. 22B, the first interconnect electrode 46
has the first interconnect electrode portion 46s and the second
interconnect electrode portion 46t. The first interconnect
electrode 46 is provided between the second semiconductor layer 13
and the third semiconductor layer 21. The first interconnect
electrode 46 is electrically connected to the light-transmissive
electrode 42. The first interconnect electrode 46 has a non-ohmic
contact with the second semiconductor layer 13. Otherwise, the
structure is similar to the structure of the semiconductor light
emitting device 121 described above in regard to FIG. 15A to FIG.
15D.
[0297] An example of a method for manufacturing the semiconductor
light emitting device 131 shown in FIG. 21A to FIG. 21D will now be
described.
[0298] In the method for manufacturing the semiconductor light
emitting device 131 shown in FIG. 21A to FIG. 21D, the method for
forming the first interconnect electrode 46 differs from the method
for forming the first interconnect electrode 46 of the
semiconductor light emitting device 121 described above in regard
to FIG. 15A to FIG. 15D. Otherwise, the manufacturing method is
similar to the method for manufacturing the semiconductor light
emitting device 121 described above in regard to FIG. 15A to FIG.
15D.
[0299] After growing the first crystal layer, dry etching of the
second semiconductor layer 13 is performed. Thereby, the second
semiconductor layer 13 is exposed. Ti/Pt/Au is formed with a
thickness of 400 nm by lift-off. Thereby, the first interconnect
electrode 46 is formed. The first interconnect electrode 46 is
electrically connected to the light-transmissive electrode 42. The
first interconnect electrode 46 contacts the exposed second
semiconductor layer 13. The width (the first interconnect electrode
width W1) of the first interconnect electrode 46 (referring to FIG.
22B) is, for example, about 10 .mu.m.
[0300] The first interconnect electrode 46 has a non-ohmic contact
with the second semiconductor layer 13. The contact resistance of
the first interconnect electrode 46 is higher than the contact
resistance of the light-transmissive electrode 42. It is sufficient
for the first interconnect electrode 46 to have a non-ohmic contact
with the second semiconductor layer 13, and/or the contact
resistance of the first interconnect electrode to be higher than
the contact resistance of the light-transmissive electrode 42. It
is more desirable for the first interconnect electrode 46 to be
insulated from the second semiconductor layer 13.
[0301] In the first direction (in the example, the Z-axis
direction), the first interconnect electrode 46 substantially
overlaps the second interconnect electrode 47. Thereby, the first
light extraction region 17 is substantially aligned with the second
light extraction region 27. Therefore, color breakup can be
suppressed while increasing the light extraction efficiency.
[0302] In the specification of the application, "perpendicular" and
"parallel" refer to not only strictly perpendicular and strictly
parallel but also include, for example, the fluctuation due to
manufacturing processes, etc. It is sufficient to be substantially
perpendicular and substantially parallel.
[0303] Hereinabove, embodiments of the invention are described with
reference to specific examples. However, the embodiments of the
invention are not limited to these specific examples. For example,
one skilled in the art may similarly practice the invention by
appropriately selecting specific configurations of components
included in the semiconductor light emitting device such as the
semiconductor layer, the light emitting layer, the electrode, the
bonding layer, the support substrate, the reflecting electrode, the
back surface electrode, the insulating layer, the stacked body,
etc., from known art; and such practice is within the scope of the
invention to the extent that similar effects are obtained.
[0304] Further, any two or more components of the specific examples
may be combined within the extent of technical feasibility and are
included in the scope of the embodiments to the extent that the
spirit of the embodiments is included.
[0305] Moreover, all semiconductor light emitting devices and
methods for manufacturing the semiconductor light emitting device
practicable by an appropriate design modification by one skilled in
the art based on the semiconductor light emitting devices and the
methods for manufacturing the semiconductor light emitting device
described above as embodiments of the invention also are within the
scope of the invention to the extent that the purport of the
embodiments of the invention is included.
[0306] Various other variations and modifications can be conceived
by those skilled in the art within the spirit of the invention, and
it is understood that such variations and modifications are also
encompassed within the scope of the invention.
[0307] While certain embodiments have been described, these
embodiments have been presented by way of example only, and are not
intended to limit the scope of the inventions. Indeed, the novel
embodiments described herein may be embodied in a variety of other
forms; furthermore, various omissions, substitutions and changes in
the form of the embodiments described herein may be made without
departing from the spirit of the inventions. The accompanying
claims and their equivalents are intended to cover such forms or
modifications as would fall within the scope and spirit of the
inventions.
* * * * *