U.S. patent application number 14/744202 was filed with the patent office on 2015-10-08 for fluid storage and dispensing systems and processes.
The applicant listed for this patent is Advanced Technology Materials. Inc. Invention is credited to Kevin T. O'DOUGHERTY, Glenn M. TOM.
Application Number | 20150284236 14/744202 |
Document ID | / |
Family ID | 37498968 |
Filed Date | 2015-10-08 |
United States Patent
Application |
20150284236 |
Kind Code |
A1 |
O'DOUGHERTY; Kevin T. ; et
al. |
October 8, 2015 |
FLUID STORAGE AND DISPENSING SYSTEMS AND PROCESSES
Abstract
Fluid storage and dispensing systems and processes involving
various structures methods for fluid storage and dispensing,
including, pre-connect verification couplings that are usefully
employed with fluid storage and dispensing packages to ensure
proper coupling and avoid fluid contamination issues, empty detect
systems (e.g., monitoring pressure of dispensed liquid medium to
detect pressure droop conditions) useable with fluid storage and
dispensing packages incorporating liners that are
pressure-compressed in the fluid dispensing operation,
ergonomically enhanced structures for facilitating removal of a
dispense connector from a capped vessel, cap integrity assurance
systems for preventing misuse of vessel caps, and keycoding systems
for ensuring coupling of proper dispense assemblies and vessels.
Fluid storage and dispensing systems achieve zero or near-zero
headspace character, and prevent or ameliorate solubilization
effects in liquid dispensing from liners in overpack vessels.
Inventors: |
O'DOUGHERTY; Kevin T.;
(Arden Hills, MN) ; TOM; Glenn M.; (Bloomington,
MN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Advanced Technology Materials. Inc |
Billerica |
MA |
US |
|
|
Family ID: |
37498968 |
Appl. No.: |
14/744202 |
Filed: |
June 19, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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13149844 |
May 31, 2011 |
9079758 |
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14744202 |
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11915996 |
Jan 6, 2010 |
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PCT/US06/21622 |
Jun 5, 2006 |
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13149844 |
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60687896 |
Jun 6, 2005 |
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Current U.S.
Class: |
222/1 ;
222/40 |
Current CPC
Class: |
F16K 35/00 20130101;
B67D 7/34 20130101; B67D 7/0261 20130101; B67D 7/344 20130101; Y10T
29/49826 20150115; F16K 35/025 20130101; B67D 7/3227 20130101; B67D
7/3281 20130101; Y10T 29/53 20150115; B67D 7/0288 20130101; F16L
37/08 20130101; B67D 7/32 20130101 |
International
Class: |
B67D 7/02 20060101
B67D007/02; B67D 7/32 20060101 B67D007/32; B67D 7/34 20060101
B67D007/34 |
Claims
1. A fluid supply system comprising: a fluid storage and dispensing
system including a liner adapted to contain a liquid medium; a
pressurized fluid source adapted to exteriorly exert on the liner a
fluid pressure for pressure-mediated dispensing of the liquid
medium from the liner; a transducer arranged downstream of the
liner to monitor the liquid medium dispensed from the liner and to
produce transducer output signals indicative of pressure drop of
the dispensed liquid medium to indicate onset of exhaustion of the
liquid medium from the liner; and a processor operatively coupled
to the transducer to receive the transducer output signals, to
process the transducer output signals, and to determine, before the
liner is exhausted of liquid medium, onset of exhaustion of the
liquid medium from the liner based on the transducer output
signals.
2. The fluid supply system according to claim 1, wherein the liner
is adapted to contain the liquid medium in a zero or near-zero
headspace condition; further wherein the transducer is arranged to
monitor the liquid medium dispensed from the liner in a zero or
near-zero headspace condition.
3. The fluid supply system according to claim 1, wherein the
transducer is a pressure transducer arranged to monitor pressure of
the liquid medium dispensed from the liner.
4. The fluid supply system according to claim 1, wherein the
processor is arranged to control dispensing of the liquid medium
from the liner and utilization of the liquid medium dispensed from
the liner.
5. The fluid supply system according to claim 1, wherein the
processor is adapted to control the pressurized fluid source to
exert the fluid pressure on the liner.
6. The fluid supply system according to claim 5, wherein the
processor is adapted to modulate the fluid pressure exerted on the
liner.
7. The fluid supply system according to claim 1, wherein the
processor is adapted to monitor the fluid pressure exerted on the
liner.
8. The fluid supply system according to claim 1, wherein the
pressurized fluid source is a pressurized gas source to exteriorly
exert directly on all sides of the liner a gas pressure for
pressure-mediated dispensing of the liquid medium from the
liner.
9. The fluid supply system according to claim 1, further comprising
a control system operably coupled with the processor to output an
alarm indicative of said pressure drop, before the liner is
exhausted of liquid medium, to initiate a liner change-out
operation for continuation of dispensing from a replacement
liner.
10. The fluid supply system according to claim 1, wherein the
processor determines that said pressure drop exists only after
dispensed liquid medium pressure begins to decrease, at a lower
rate of dispensed liquid medium pressure change vs. time, and only
before dispensed liquid medium pressure continues to decrease, at a
higher rate of dispensed liquid medium pressure change vs. time
relative to the lower rate, to provide an early indication that the
liner is approaching exhaustion of liquid medium.
11. The fluid supply system according to claim 1, wherein the liner
contains a liquid medium selected from the group consisting of
photoresist liquid compositions and chemical mechanical polishing
slurries.
12. The fluid supply system according to claim 1, further
comprising a filter arranged for filtering of liquid medium
dispensed from the liner, wherein the transducer is downstream of
the liner and upstream of the filter.
13. The fluid supply system according to claim 1, wherein the
pressurized fluid source is set to provide fluid pressure on the
liner that will enable dispensing of liquid medium from the liner
from an initial full state of the liner, through the pressure drop,
to an empty or near-empty state of the liner.
14. The fluid supply system according to claim 1, in combination
with a semiconductor manufacturing tool receiving fluid from the
fluid supply system.
15. A fluid supply system comprising: a fluid storage and
dispensing system including a liner adapted to contain a liquid
medium; a pressurized fluid source adapted to exteriorly exert on
the liner a fluid pressure for pressure-mediated dispensing of the
liquid medium from the liner; a transducer arranged downstream of
the liner to monitor the liquid medium dispensed from the liner and
to produce transducer output indicative of pressure drop of the
dispensed liquid medium; and a processor operatively coupled to the
transducer to receive the transducer output, to process the
transducer output, and to adjust, based on the transducer output,
fluid pressure exerted on the liner to control dispensing of the
liquid medium from the liner.
16. The fluid supply system of claim 15, wherein the transducer is
a pressure transducer arranged to sense pressure of the liquid
medium dispensed from the liner.
17. The fluid supply system of claim 15, wherein the processor is
adapted to adjust fluid pressure exerted on the liner so as to
control pressure of the liquid medium dispensed from the liner.
18. The fluid supply system of claim 17, wherein the processor is
adapted to determine, before the liner is exhausted of liquid
medium, onset of exhaustion of the liquid medium from the liner
based on the transducer output.
19. The fluid supply system of claim 18, wherein the processor is
adapted to determine rate of change of pressure of the dispensed
fluid based on the transducer output and to determine that onset of
exhaustion of the liquid medium from the liner exists upon an
increased rate of change of pressure of the dispensed fluid.
20. A method of supplying fluid to a location of use from a fluid
dispenser including a collapsible container holding the fluid, the
method comprising: applying exterior pressure to the collapsible
container to progressively collapse the collapsible container and
dispense fluid therefrom; monitoring the dispensed fluid during
dispensing operation to generate an output signal indicative of a
pressure drop in the dispensed fluid to indicate onset of
exhaustion of fluid from the collapsible container; processing the
output signal indicative of the pressure drop and determining,
before the collapsible container is exhausted of fluid, that the
pressure drop exists, to indicate onset of exhaustion of fluid from
the collapsible container; and supplying the fluid dispensed from
the collapsible container to the location of use.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application is a continuation of U.S. patent
application Ser. No. 13/149,844, filed on May 31, 2011, which is a
continuation of U.S. patent application Ser. No. 11/915,996 filed
on Jan. 6, 2010, which is a 371 of PCT/US2006/021622, filed Jun. 5,
2006 which claims the benefit of U.S. Provisional Patent
Application No. 60/687,896 filed on Jun. 6, 2005, all of which are
incorporated herein in their entireties by reference.
FIELD OF THE DISCLOSURE
[0002] The present invention relates to fluid storage and
dispensing systems and processes. Aspects of the invention,
hereinafter disclosed, relate to various devices, structures and
arrangements, as well as processes and methods, for fluid storage
and dispensing, and include, without limitation, pre-connect
verification couplings that are usefully employed in application to
fluid storage and dispensing packages, to ensure proper coupling
and avoid fluid contamination issues, empty detect systems that are
usefully employed for fluid storage and dispensing packages
incorporating liners that are pressure-compressed in the fluid
dispensing operation, ergonomically enhanced structures for
facilitating removal of a dispense connector from a capped vessel,
cap integrity assurance systems for preventing misuse of vessel
caps, and keycoding systems for ensuring coupling of proper
dispense assemblies and vessels.
BACKGROUND OF THE DISCLOSURE
[0003] In the use of fluid storage and dispensing packages, the
package may contain a fluid such as a high-purity reagent for use
and semiconductor manufacturing. The fluid in such application in
many instances is costly in character, and/or deleterious in effect
if mis-dispensed. For such reason, it is desired that the reagent
be conserved against any losses due to wastage, e.g., such as may
occur through mis-dispensing of the fluid. Mis-dispensing of the
fluid additionally may impair, or even render useless, a
semiconductor device that is being manufactured. Further, many
chemical reagents used in semiconductor manufacturing are very
hazardous in character, e.g., being toxic, pyrophoric, corrosive or
otherwise harmful in exposure to persons or processing
equipment.
[0004] For these reasons, it is important for the fluid storage and
dispensing package to be coupled with dispensing apparatus in a
correct and reliable manner. This is particularly the case in many
semiconductor manufacturing operations, where numerous chemical
reagent packages are utilized in the course of wafer processing and
semiconductor device fabrication, and each such fluid package is
coupled to flow circuitry interconnecting the package with the
semiconductor tool or other fluid-utilizing apparatus.
[0005] One type of package that has been widely utilized in the
semiconductor manufacturing field is a liner-based fluid storage
and dispensing package, in which a high-purity chemical reagent is
contained in a flexible, polymeric liner, and the liner is disposed
inside a rigid outer vessel commonly termed an "overpack." In use,
a dispensing assembly including a dispense head is coupled with the
liner, and pressurizing gas is flowed into the overpack. The
pressurizing gas exerts compressive force on the liner and
progressively collapses the liner under the applied gas pressure,
to effect dispensing of fluid from the liner. The dispense head in
various embodiments is configured with a dip tube that extends
downwardly into liquid in the liner when the dispensing assembly is
coupled to the package and connected to suitable flow circuitry for
the dispensing operation. The liner after being filled with fluid
is typically sealed against atmospheric or ambient contamination by
a membrane seal at the mouth of the liner.
[0006] An illustrative package of the above-described type is
commercially available from ATMI, Inc. (Danbury, Conn.) under the
trademark NOWPAK.RTM..
[0007] In the coupling of a dispensing assembly with a liner
package, it is critical that a dispensing assembly and associated
flow circuitry be interconnected with a proper fluid storage and
dispensing package, for the reasons discussed hereinabove. An
intrinsic problem with such coupling of supply vessel and
dispensing assembly is that an incorrect coupling, i.e., connection
of a wrong dispensing assembly to a supply vessel, results in
contamination when the sealing membrane on the package is punctured
by the dip tube of the dispense head, and it then is discovered
that a wrong dispensing assembly has been utilized. This can occur
even if the mis-connection is immediately discovered, e.g., by
inability to engage the dispensing assembly with any complementary
connection structure on the fluid package. Although package systems
have been developed in which mis-coupling of the dispensing
assembly and the cap on a fluid storage and dispensing vessel is
electronically effected, e.g., in vessels of the type commercially
available from ATMI, Inc. (Danbury, Conn., USA) under the trademark
NOWTRAK.RTM., it is desirable to prevent such mis-connections of
fluid delivery components in a simple, mechanical manner in
applications in which electronic monitoring and control is
excessively costly, impractical or otherwise infeasible.
[0008] It would therefore be a significant advance in the art to
provide a coupling that provides a pre-connect verification of the
correctness of a connection, which is applicable to fluid storage
and dispensing packages of the foregoing type, to avoid
circumstances in which dispensing equipment is contaminated with
fluid from an incorrectly selected package.
[0009] Another issue of significance in the use of liner-based
fluid storage and dispensing packages of the above-describe type,
is the need to dispense as much of the fluid contents of the liner
as possible, so that the fluid, which as discussed above may be
costly in character, is efficiently utilized, without significant
amounts of fluid being left in the liner at the conclusion of the
dispensing operation.
[0010] In the original filling of liner packages, fluid
conventionally is charged to the liner in a manner producing a
nominal headspace that may for example be on the order of 5% of the
interior volume of the liner, to accommodate expansion of the fluid
during the subsequent storage and transport of the package. The
headspace thereby provides a small volume of extraneous gas, e.g.,
air or other ambient gas, above the fluid in the liner. Although
small in volume, this headspace gas is deleterious to the contained
fluid.
[0011] A primary disadvantage of the headspace gas is that when the
liner is subjected to external pressure in the dispensing
operation, the resultingly compressed headspace gas solubilizes in
the contained fluid to produce dissolved gas therein, in accordance
with Henry's Law. The dissolved gas subsequently comes out of
solution as the dispense pressure drops along the dispense train in
the dispensing operation. This liberation of dissolved gas causes
irregular and variable dispense profiles of the chemical reagent,
e.g., a photoresist that is being flowed to a semiconductor
manufacturing tool in a semiconductor manufacturing operation,
resulting in the formation of potentially severe wafer defects,
bubble formation on surfaces and subsequent popping of such
bubbles, etc. Thus, the presence of significant headspace in the
liner entails significant adverse consequences along the entire
extent of the fluid delivery path including the final use of the
fluid in the process system.
[0012] Despite this disadvantageous effect, headspace gas
nonetheless has continued to be employed due to its utility as a
"measuring fluid" in determining the approach to exhaustion of the
fluid inventory in the liner during the latter stages of the
dispensing operation. In the dispensing of liquid from a
liner-based package containing headspace gas, the exhaustion of
fluid from the liner causes headspace gas to be drawn into the
suction train of the dispensing flow circuitry, and this
entrainment of headspace gas results in the appearance of bubbles
in the downstream liquid flow. Initial bubble appearance of the
headspace gas is detected in the liquid flow and provides a useful
indication that the liquid in the liner is approaching
depletion.
[0013] The foregoing phenomenon has been usefully exploited in the
provision of "first bubble" detectors for dispensing systems
utilizing liner-based packages, in conjunction with the use of
buffering reservoirs, to provide for continuity of fluid supply to
the downstream tool or other location of use.
[0014] In such systems, the "first bubble" empty detector, upon
sensing of the initial bubble, triggers the flow of a transitional
supply of fluid from the buffering reservoir, so that the
fluid-utilizing process is not interrupted, and can progress to
completion. The reservoir may for example provide a volume on the
order of 50 mL up to 200 mL or even more, of a photoresist
material, so that when the liner-based package of photoresist
material approaches depletion, as indicated by the appearance of
the initial bubble in the downstream liquid, the supplemental
volume of the buffering reservoir is tapped to provide sufficient
fluid to finish a boat of wafers to which photoresist is being
applied.
[0015] The "first bubble" sensing method of empty detection has
proven reliable, but is associated with the inherent disadvantages
of headspace gas becoming solubilized in the liquid in the liner
and subsequently being released from the liquid during the
dispensing operation, since such efflux of gas may give a premature
indication of exhaustion of liquid from the liner, thereby
preventing maximum utilization of liquid from the liner from being
achieved, as well as interfering with the operation of downstream
process equipment.
[0016] Accordingly, it would be a significant advance in the art to
provide an empty detect system suitable for application to
liner-based fluid storage and dispensing packages, which avoids the
need for headspace gas, and concurrently provides an efficient and
reliable detection of an approaching empty state of the liner
package, with sufficiently early warning of such impending empty
condition to accommodate switch-in of a fresh package of fluid for
continued dispensing, without the requirement of an oversized
buffering reservoir for providing continuity of fluid supply to the
downstream fluid-utilizing location or facility.
[0017] Apart from the foregoing fluid inventory management issues,
liner-based fluid storage and dispensing packages of the so-called
"bag-in-drum" (BID), "bag-in-can" (BIC) and "bag-in-bottle" (BIB)
types are in use, which engage with a dispensing assembly. An
illustrative dispensing assembly for such purpose is the
SMARTPROBE.RTM. connector commercially available from ATMI, Inc.,
Danbury, Conn., USA, and), which includes a dispense head
(connector body) from which downwardly depends a dip tube that is
inserted through a sealing membrane, termed a breakseal, in a
fitment associated with the cap port of the liner package. After
penetrating the membrane, the dip tube thereafter is in contact
with the liquid in the liner, to effect dispensing when a pump is
coupled with the dispense head. After breaking the membrane seal,
pivot clamps associated with the dispense head are locked into
place in order to securely position the dispense head on the liner
overpack.
[0018] In order to subsequently remove the SMARTPROBE.RTM. from the
fluid package, the user must press in the pivot clamps and exert
upward force on the connector body, while concurrently holding the
fluid package in place. Users having small hands generally
experience difficulty in this disassembly procedure, particularly
in pressing in the pivot clamps. Additionally, it is very difficult
to break the static seal of the O-rings. Even after the static seal
has been broken, the O-rings not infrequently catch on the
breakseal. These factors, taken together, adversely impact the ease
of use of such liner-based fluid storage and dispensing
packages.
[0019] It would therefore be a significant advance to provide a
SMARTPROBE.RTM.-type dispense assembly that is ergonomically
enhanced in design, to obviate the foregoing difficulties.
[0020] Further, considering the shortcomings involved in prior use
of liner-based fluid storage and dispensing packages, various
problems are encountered with so-called breakseal or membrane
elements that are pierced by the probe of the dispensing assembly
when the connector is brought into engagement with the cap of the
vessel.
[0021] First, breaking through the currently employed breakseal
with the dispense probe produces particles that are carried into
the contained chemical by the probe, thereby compromising the
purity of the contained fluid. Second, the currently employed
breakseal does not allow for material changes to match the needs of
the chemical in the liner. Third, the currently employed breakseal
does not allow vessels to be easily resealed for disposal. Fourth,
the currently employed breakseal requires high force to insert the
probe connector assembly, since the probe must pierce the membrane
seal, which may entail resistance to the engagement of the
connector with the vessel. Fifth, the seal integrity of the
currently employed breakseal can be compromised by plastic creep
induced relaxation of the seal clamping force.
[0022] For these reasons, a breakseal structure that would overcome
such deficiencies would be a substantial advance in the use and
reliability of breakseal-equipped vessels for fluid storage and
dispensing.
[0023] In the use of liner-based fluid storage and dispensing
packages, the dispense probe is inserted into a fluid in the liner,
through a closure cap. In such packages, it is intended that the
user not open the container, by removal of the cap. In some
instances, due to inadequate training or accident, caps are
unscrewed from containers with the probe still installed. This
creates difficulties in removing the cap from the probe body and
exposes the probe to contaminants, as well as providing the
potential for subsequent mis-connection if the probe body and
attached cap are then coupled with another container.
[0024] In various specific embodiments of the cap and probe, the
cap and probe are key coded with respect to one another, to prevent
insertion of a probe into an incorrect fluid storage and dispensing
vessel. In certain instances, the cap and probe have been twisted
off the vessel at the same time, rather than depressing pivot
clamps at the side of the connector to permit the connector to be
pulled upwardly and removed from the cap, and thereafter unscrewing
the cap from the vessel.
[0025] It therefore would be a significant improvement to provide a
closure cap for a liner-based fluid storage and dispensing package,
in which the cap cannot be unscrewed from the vessel when the
dispense probe has been inserted.
[0026] A further deficiency associated with the cap utilized in
current liner-based fluid storage and dispensing packages relates
to the pressurization opening in the cap, through which
pressurizing gas is introduced into the vessel containing the
liner, to exert pressure on the exterior surface of the liner, and
thereby achieve pressure-mediated dispensing of fluid contained in
the liner. Such pressurization opening in the cap is sealed by a
tear tab, and removal of the tear tab to expose the opening for gas
introduction frequently produces rough edges at the pressurization
opening, due to the tear tab removal process. These rough edges in
turn cause leaks to the O-ring seal of the dispense nozzle of the
dispensing assembly.
[0027] In some instances of use of keycoded caps and probes in
liner-based fluid storage and dispensing systems, users have been
known to switch caps in order to defeat the keycode system, and
occurrence that could lead to damage or destruction of products
manufactured using fluid from such systems. As a result, it is
desirable for caps of such systems to have a locking feature to
prevent such switching, but which will still allow removal of the
cap and replacement of same with a new cap when absolutely
necessary. Such necessity may result from an incorrect keycoding of
a fluid reagent by a chemical supplier, or performance of specialty
chemical and process trials in which keycodes are not assigned, or
accidental damage to a cap requiring its replacement.
[0028] In addition, the widespread commercial acceptance of the
liner-based fluid storage and dispensing packages for high purity
chemical reagents has resulted in a proliferation of such packages
of varying types. Such multiplication of varieties of fluid
packages also makes it necessary to provide packaging that prevents
the mis-connection of caps to fluid storage and dispensing vessels
that are inappropriate for such caps.
SUMMARY OF THE DISCLOSURE
[0029] The present invention relates to fluid dispensing systems
and processes.
[0030] The invention relates in one aspect to a pre-connect
verification coupling, comprising a first coupling body, a ring
including a first keycode structure and interlock, and a second
coupling body including a second keycode structure, the ring being
cooperative with the first coupling body to allow translational
movement of the body against the ring in a post-verification
coupling with the second coupling body, with the interlock
preventing such translational movement prior to verification
coupling of the first keycode structure with the second keycode
structure.
[0031] In another aspect, the invention relates to a fluid storage
and dispensing package, comprising a fluid storage and dispensing
vessel and a fluid dispensing assembly adapted for connection to
flow circuitry, said fluid storage and dispensing package
comprising a pre-connect verification coupling as described above,
in which the fluid dispensing assembly includes the first coupling
body and the ring, and the fluid storage and dispensing vessel has
a cap thereon, wherein the cap includes the second coupling
body.
[0032] Yet another aspect of the invention relates to a pre-connect
verification coupling including a first coupling body and a ring
cooperative therewith to allow a translational movement of the body
against the ring in a post-verification coupling with a second
coupling body including second keycode structure, wherein the ring
includes a first keycode structure and an interlock preventing such
translational movement prior to verification coupling of the first
keycode structure with the second keycode structure.
[0033] A further aspect of the invention relates to a fluid supply
system including a liner-based fluid storage and dispensing package
coupled with flow circuitry for delivery of fluid from a liner in
said package to a location of use, wherein the liner-based fluid
storage and dispensing package is coupled with a source of
pressurizing gas for delivery of pressurizing gas into the package
to exert pressure on the liner for pressure-mediated dispensing of
fluid from the liner into said flow circuitry, a pressure
transducer adapted to sense pressure of fluid dispensed from the
liner into said flow circuitry and produce a transducer output
indicative of the said pressure, and a processor adapted to receive
said transducer output and determine rate of change of pressure of
said fluid and provide a processor output indicative of an
increased rate of change correlative to onset of exhaustion of
fluid in the liner.
[0034] In another aspect, the invention relates to a fluid supply
system comprising a liner-based fluid storage and dispensing
package including a liner adapted to contain a liquid medium, a
pressurized gas source adapted to exteriorly exert on the liner a
gas pressure for pressure-mediated dispensing of liquid medium from
the liner, and a monitor adapted to monitor pressure of liquid
medium dispensed from the liner and adapted to output a monitor
output signal indicative of a pressure droop condition indicating
onset of exhaustion of liquid medium from the liner.
[0035] Yet another aspect of the invention relates to a method of
achieving a zero or near-zero headspace condition in a liner of a
fluid storage and dispensing package in which dispensing is carried
out with imposition of pressure on the liner for progressive
compaction thereof to discharge fluid from an interior volume of
the liner through a discharge passage of a probe coupled with the
liner, in which the probe is a stubby probe having a terminus
including an opening to the discharge passage, and the terminus of
the stubby probe is disposed in an upper portion of the interior
volume of the liner for removal of headspace gas prior to discharge
of fluid from the liner.
[0036] A still further aspect of the invention relates to a method
of supplying fluid to a location of use from a liner-based fluid
storage and dispensing package including a liner holding said
fluid, the method comprising applying exterior pressure to the
liner to progressively collapse the liner and dispense fluid
therefrom, and monitoring pressure of the dispensed fluid during
operation to generate an output signal indicative of a pressure
droop condition indicating onset of exhaustion of fluid from the
liner.
[0037] In a further aspect, the invention relates to a method of
supplying a fluid from a collapsible liner subjected to pressure to
effect dispensing of the fluid, such method including monitoring
pressure of the dispensed fluid as a function of time, and
determining slope droop of the pressure-time function as indicative
of a predetermined approach to exhaustion of fluid from the
liner.
[0038] In a further embodiment, the invention relates to a fluid
storage and dispensing system, including a fluid storage and
dispensing vessel adapted for holding fluid in an interior volume
thereof, said vessel having a port opening, a cap engaged with said
port opening for sealing thereof, and a dispense assembly including
a connector engageable with the cap, to access fluid in the vessel
for dispensing thereof through the dispense assembly, such
connector including at least one engagement member engageable with
the cap to lockingly retain the connector in position for
dispensing, and a manually graspable member coupled with at least
one engagement member and manually translatable between a first
biased position (down position) at which such at least one
engagement member lockingly retains the connector in position for
dispensing, and a second release position (up position) at which
such at least one engagement member is disengaged from the cap to
prevent removal of the connector from the cap.
[0039] Another aspect of the invention relates to a method of
storing and dispensing fluid, comprising use of a fluid storage and
dispensing system of the invention.
[0040] A further aspect of the invention relates to a fitment seal,
comprising a main disk-shaped body and a cylindrical sealing wall
depending downwardly therefrom at a radius less than radius of the
main disk-shaped body, whereby the main disk-shaped body forms a
peripheral flange, the main disk-shaped body having a main top
surface and an annular boss extending upwardly from said main top
surface and forming a corresponding well in a center portion of
said main disk-shaped body.
[0041] In another aspect, the invention relates to a cap adapted
for locking engagement with a container having an array of
circumferentially spaced-apart locking cavities on a neck of the
container, said cap comprising a main cap body including a
cylindrical sidewall, and a circular top wall joined to said
cylindrical sidewall at an upper end thereof, said cylindrical
sidewall having a series of circumferentially spaced-apart cut-outs
at a lower portion of said sidewall, each cut-out having joined
thereto at an upper end of the cut-out a downwardly depending
anti-rotation finger element, each said finger element comprising
an elongate strip joined at an upper end thereof to the upper end
of the cut-out, and joined at a lower end thereof to a radially
inwardly directed lug adapted to engage with one of said locking
cavities when over-fit by a connector adapted for engagement with
said cap.
[0042] Yet another aspect of the invention relates to a fluid
storage and dispensing package, comprising a container adapted to
hold fluid, said container having an array of circumferentially
spaced-apart locking cavities on the neck of the container, and a
cap adapted for locking engagement with said container, said
comprising a main cap body including a cylindrical sidewall, and a
circular top wall joined to said cylindrical sidewall at an upper
end thereof, said cylindrical sidewall having a series of
circumferentially spaced-apart cut-outs at a lower portion of said
sidewall, each cut-out having joined thereto at an upper end of the
cut-out a downwardly depending anti-rotation finger element, each
said finger element comprising an elongate strip joined at an upper
end thereof to the upper end of the cut-out, and joined at a lower
end thereof to a radially inwardly directed lug adapted to engage
with one of said locking cavities when over-fit by a connector
adapted for engagement with said cap.
[0043] A further aspect of the invention relates to a method of
preventing removal of a cap, along with a connector, from a
container of a fluid storage and dispensing package, including said
container, said cap and said connector, said method comprising
providing said container with locking cavities at a neck region of
the container, and providing said cap has comprising a main cap
body including a cylindrical sidewall, and a circular top wall
joined to said cylindrical sidewall at an upper end thereof, said
cylindrical sidewall having a series of circumferentially
spaced-apart cut-outs at a lower portion of said sidewall, each
cut-out having joined thereto at an upper end of the cut-out a
downwardly depending anti-rotation finger element, each said finger
element comprising an elongate strip joined at an upper end thereof
to the upper end of the cut-out, and joined at a lower end thereof
to a radially inwardly directed lug adapted to engage with one of
said locking cavities when over-fit by the connector.
[0044] In another aspect, the invention relates to a cap adapted
for engagement with a fluid storage and dispensing container, and
for engagement with a dispensing assembly including a dispense
connector adapted to cooperatively overfit the cap, said cap having
an outward protrusion element at a lower portion thereof engageable
with locking structure on the fluid storage and dispensing
container.
[0045] Another aspect of the invention relates to a fluid storage
and dispensing package, comprising a container adapted for holding
fluid, said container including a port and locking structure on a
surface of the container, and a cap adapted for engagement with
said port, wherein said cap is adapted for engagement with a
dispensing assembly including a dispense connector adapted to
cooperatively overfit the cap, said cap having an outward
protrusion element at a lower portion thereof engageable with said
locking structure when said dispense connector overfits said
cap.
[0046] In a further aspect, the invention relates to a fluid
storage and dispensing package, comprising a container adapted for
holding fluid, said container including a port and a first locking
structure on a surface of the container, and a cap adapted for
engagement with said port, wherein said cap is adapted for
engagement with a dispensing assembly including a dispense
connector adapted to cooperatively overfit the cap, said cap having
a second locking structure at a lower portion thereof engageable
with said locking structure when said dispense connector overfits
said cap, and wherein said second locking structure is
non-engageable with the first locking structure when said dispense
connector does not overfit said cap.
[0047] A further aspect of the invention relates to a fluid storage
and dispensing package, comprising a container adapted for holding
fluid, said container including a port, and a cap adapted for
engagement with said port, wherein said cap is adapted for
engagement with a dispensing assembly including a dispense
connector adapted to cooperatively overfit the cap, said cap having
a locking structure that is operative when said dispense connector
overfits said cap, and that is de-actuatable when said dispense
connector does not overfit said cap.
[0048] Still another aspect of the invention relates to a fluid
storage and dispensing package, comprising a container including a
port, a liner in said container adapted for holding fluid, a
fitment including an opening for fluid egress, coupled to said
liner and to said port, and a cap adapted for engagement with said
port, wherein said cap is additionally adapted for engagement with
a dispensing assembly including a dispense connector adapted to
cooperatively overfit the cap for withdrawal of fluid from the
liner when pressure is exteriorly exerted on said liner, said
dispense connector being adapted for connection to pressurizing gas
for flow of the pressurizing gas into the container for exterior
exertion of pressure on liner, a gas seal element positioned
between the cap and the fitment to seal against the pressurizing
gas in the container, and a plug seal to prevent fluid escape from
the liner at the fitment.
[0049] In another aspect, the invention relates to a fluid storage
and dispensing package, comprising a container adapted for holding
fluid, said container including a first engagement structure, a cap
adapted for engagement with said container, a code ring engageable
with said cap to form a cap/code ring assembly, wherein said
cap/code ring assembly is adapted for engagement with a dispensing
assembly including a dispense connector adapted to cooperatively
overfit the cap/code ring assembly for withdrawal of fluid from the
container, wherein the cap/code ring assembly includes second
engagement structure engageable with said first engagement
structure, to fixedly position the cap/code ring assembly on the
container and oppose removal thereof.
[0050] A still further aspect the invention relates to a cap
including threading for connection thereof to a container having a
complementary threading, said cap including non-reuse structure
rendering the cap non-reusable subsequent to initial engagement of
the cap with the container, said non-reuse structure adapted to
deform, destroy or remove said threading upon attempted or effected
removal of the cap from the container subsequent to said initial
engagement, wherein said non-reuse structure is selected from the
group consisting of: toothed locks that cut or tear the area above
the threading; arrangements in which attempted removal of the cap
results in ripping or destruction of threads; two-piece caps that
thread on the neck of the vessel with a detent stop, whereby the
threads peel off under high torque when the cap is removed;
screw-on caps with anti-rotation features that prevent the cap from
being unscrewed; arrangements in which the cap has a tear area
above the thread that is activated by unscrewing, in which the
remaining threaded area is removed by pulling a vertical tear tab;
two-piece threading; tear-off threading; helical threadings that
unscrew themselves; and threading on the cap which is additionally
formed over large features on the container neck, whereby the cap
threading is destroyed when the cap is removed from the
container.
[0051] Another aspect of the invention relates to a cap including
threading for connection thereof to a container having a
complementary threading, said cap including a cap modification to
prevent removal and/or reuse of the cap, wherein said cap
modification is selected from the group consisting of: provision of
caps with clips that require a tool to press them into position,
wherein the cap when the clip is pressed into position is able to
be installed or removed in a ready manner; provision of pins
holding the cap in place, with a removal tool being adapted to
withdraw the pins out of the position securing the cap; provision
of a screw-on cap with pressed-in pins to prevent unscrewing of the
cap, wherein the pins can only be removed with a special tool in
order to unscrew the cap; provision of a screw-on cap with
anti-rotation lock, wherein the code ring must be removed to unlock
the cap, and wherein the lock includes pins that must be pulled up
or tabs that must be squeezed together to release the lock;
provision of a screw-on cap with an anti-rotation lock, in which
the code ring must be removed to unlock the cap, wherein the
anti-rotation lock is a ratchet type, with teeth on the cap and
teeth on the vessel, whereby high torque is required to remove the
cap, using a special tool; use of a code ring torque tool having
grab features are torque on only; provision of a second ring on the
cap to attach the cap to the vessel, wherein the ring breaks off
when the cap is removed; provision of a snap-on cap with a tear tab
to remove the cap, wherein the cap will not lock on once the tear
tab is removed; provision of a tear ring that snaps over, wherein
the snap is at the tear ring; provision of a snap-on cap that
requires a special tool to cut it off the vessel; provision of a
shrink cap or wrap, which is heat activated or wet-to-dry
activated; provision of a non-threaded cap that is formed over
features on the vessel neck, wherein interference between the
vessel features and the cap retains the cap in position, so that
the cap is removable only with a tool or otherwise by prying it
off, and removal of the cap rips off the formed areas of the cap,
so that part of the cap remains on the vessel and can be removed
with a special tool or vertical tear tab; provision of a cap
constructed and arranged so that cap removal alters the code ring
so that the cap will not work with the dispense probe again;
provision of a code ring that is cut by the installation of the
dispense probe, so that the code ring falls off when the dispense
probe is removed; provision of a magnetic structure that is broken
off when the dispense probe is removed; fabrication of the vessel
with a feature that mates with the recess in the cap, so that when
the cap is removed, the vessel feature breaks off and becomes
lodged in the cap recess, and the cap then cannot be used with a
new vessel; fabrication of a cap with break-off tabs that hold the
cap in position on the vessel and slide down complementary grooves
in the vessel when installed, and break off when the cap is
removed; fabrication of a cap with a built-in dye release mechanism
operating to release dye when the cap is removed; fabrication of
the cap with a security-type tag that breaks upon removal of the
cap, so that empty vessels bearing broken tags will evidence
misuse; and provision of radio-frequency identification (RFID)
integrated circuit chips on caps or other components of an
associated package, e.g., an overpack, liner, etc., in conjunction
with monitoring software that prevents an operator from switching
caps.
[0052] A further aspect of the invention relates to a fluid storage
and dispensing system adapted for coupling with a fluid-utilizing
tool by flow circuitry therebetween, said system including a
liner-based fluid storage and dispensing package adapted for
pressure-mediated dispensing of fluid from a liner in the package,
and said flow circuitry containing a filter, a pump, and a pressure
transducer arrange to monitor pressure of dispense fluid, and to
actuate a controller adapted to modulate dispensing operation,
wherein said pressure transducer is positioned in said flow
circuitry at a fluid inlet to the fluid-utilizing tool.
[0053] In respect of various apparatus, assemblies and systems of
the invention, as hereinafter more fully described, it will be
appreciated that the invention farther encompasses various
components, parts, subassemblies and sub-systems, within the scope
of inventive aspects of such apparatus, assemblies and systems.
[0054] Further, it will be appreciated that although various
embodiment in aspects of the invention are hereafter described in
application to liner-based fluid storage and dispensing packages,
such aspects are not limited in utility, but are variously
susceptible to being implemented in containers, vessels and
packages of other types, e.g., glass bottles, metal cans,
wax-coated cellulosic containers, dewars, ampoules, film-sealed
packages, etc.
[0055] Yet another aspect of the invention relates to a method of
supplying a fluid from a collapsible liner subjected to pressure to
effect dispensing of the fluid, said method including monitoring
pressure of the dispensed fluid as a function of time, and
determining pressure slope droop of the pressure-time function as
indicative of a predetermined approach to exhaustion of fluid from
the liner, and at said predetermined approach to exhaustion of
fluid from the liner, imposing a pressure spike on the liner to
effect further dispensing of fluid from the liner.
[0056] In a further aspect, the invention relates to a dispensing
assembly for coupling with a cap of a fluid storage and dispensing
vessel, comprising a connector body, a handle mounted on the
connector body for pivotable movement thereon from a first position
at which the connector body is in a locked position on said cap, to
a second position at which the connector body is releasable by
upward pull of the handle, clamps mounted on the connector body and
adapted for movement between a first position at which the clamps
lockingly engage the cap, and a second position at which the clamps
release the cap, said handle at ends thereof being coupled with
cams engageable with the clamps in the first position of the handle
and the first position of the clamps, and disengaged from the
clamps in the second position of the handle and the second position
of the clamps.
[0057] The invention in another aspect relates to a connector for a
material storage and dispensing package, comprising a main body
portion, including a handle mounted on the main body portion and
pivotally translatable thereon, between an up position, and a down
position, wherein the connector is adapted to be coupled with a
material storage and dispensing vessel for closure thereof, and the
connector includes a dispensing assembly for dispensing material
from the vessel, and a pressure relief device operatively coupled
with the handle and adapted when the handle is in the down position
to prevent removal of the connector from the material storage and
dispensing vessel, and a stop element operatively coupled with the
pressure relief device to maintain the handle in the down position
when the handle is pivotally translated to such down position, the
stop element being selectively disengageable to cause the pressure
relief device to vent the vessel to an ambient pressure, and to
allow the handle to be pivotally translated upwardly, and with the
connector thereafter being disengageable from the vessel when the
handle is in the up position, whereby disengagement of the
connector from the vessel is enabled to occur at said ambient
pressure.
[0058] A further aspect of the invention relates to a material
storage and dispensing package, comprising a material storage and
dispensing vessel, and a connector as described in the preceding
paragraph, coupled with the vessel for closure thereof.
[0059] A still further aspect of the invention relates to a method
of storage and dispensing of material, in which the material is
disposed in a vessel, and a connector is coupled with the vessel,
to form a containment package, wherein the connector includes a
handle that is translatable between a first locking position in
which pressure in the vessel is contained, and a second position in
which the connector is removable from the vessel without difference
in pressure between the vessel and an ambient environment of the
package, such method including selectively depressurizing the
vessel while the handle is in the first position, to enable the
handle to be translated from the first locking position to the
second position.
[0060] Other aspects, features and embodiments of the invention
will be more fully apparent from the ensuing disclosure and
appended claims.
BRIEF DESCRIPTION OF THE DRAWINGS
[0061] FIG. 1 is a perspective view of an illustrative liner-based
fluid storage and dispensing package to which the pre-connect
verification coupling of the invention is applicable.
[0062] FIG. 2 is a perspective schematic view of a pre-connect
verification coupling, according to one embodiment of the present
invention.
[0063] FIG. 3 is a schematic representation of a process
installation, including a liner-based fluid storage and dispensing
package interconnected by flow circuitry with a semiconductor
manufacturing tool, and an empty detect system according to one
embodiment of the present invention.
[0064] FIG. 4 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for a liner-based fluid storage and dispensing package,
during a dispensing operation involving the last 250 mL of liquid
in the vessel.
[0065] FIG. 5 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for a liner-based fluid storage and dispensing package,
during a dispensing operation involving the last 550 mL of liquid
in the vessel.
[0066] FIG. 6 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for a liner-based fluid storage and dispensing package
from which liquid is dispensed in a series of successive "shots" by
the action of a cyclic suction pump, during a dispensing operation
involving the last 50 mL of liquid in the vessel.
[0067] FIG. 7 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for a liner-based fluid storage and dispensing package
from which liquid is dispensed in a series of successive "shots" by
the action of a cyclic suction pump, showing the data for the last
seven dispense shots from the fluid storage and dispensing package,
as well as the linear equation fitting the data.
[0068] FIG. 8 is a graph of package pressure, in psig, and dispense
fluid pressure, psig, as a function of time, in seconds, for a
liner-based fluid storage and dispensing package from which liquid
is dispensed in a series of successive "shots" by the action of a
cyclic suction pump, showing the data for the last four dispense
shots from the fluid storage and dispensing package, as well as the
linear equation fitting the data.
[0069] FIG. 9 is a front elevation view of an ergonomic connector
engaged with a bag in bottle (BIB) fluid storage and dispensing
package.
[0070] FIGS. 10-17 show various views of the connector shown in
FIG. 9 and its component parts.
[0071] FIG. 18 is a perspective view of a fitment seal according to
one embodiment of the invention, showing the details of the upper
portion thereof.
[0072] FIG. 19 is a perspective view of the fitment seal of FIG.
18, showing the details of the bottom portion thereof.
[0073] FIG. 20 is a top plan view of the fitment seal of FIGS.
18-19.
[0074] FIG. 21 is a cross-sectional view of the fitment seal of
FIG. 20, taken along line A-A thereof.
[0075] FIG. 22 is an enlarged view of the outer edge portion of the
fitment seal as shown in FIG. 21.
[0076] FIG. 23 is a bottom plan view of the fitment seal of FIGS.
18-19.
[0077] FIG. 24 is a partial cross-sectional elevation view of a
fluid storage and dispensing vessel including the fitment of FIGS.
18-19 as positioned to seal a fitment of the vessel.
[0078] FIG. 25 is a schematic perspective view of a cap for a fluid
storage and dispensing package, featuring anti-rotation structure
on the side wall of the cap.
[0079] FIG. 26 is a schematic view of a fluid storage and
dispensing vessel and associated cap structure matably engageable
therewith.
[0080] FIG. 27 is a schematic view of a fluid storage and
dispensing vessel and associated cap structure and connector body
structure, showing the cooperative character thereof.
[0081] FIG. 28 is a perspective view of a fluid storage and
dispensing package, featuring anti-rotation locking structure on
the neck region of the vessel, with an associated cap and a
connector.
[0082] FIG. 29 is a perspective view of the fluid storage and
dispensing vessel and associated cap and connector structure of
FIG. 28, showing the details thereof.
[0083] FIG. 30 is a perspective view of a cap of the fluid storage
and dispensing vessel of FIG. 28.
[0084] FIG. 31 is a top plan view of the cap of FIG. 30.
[0085] FIG. 32 is a perspective close-up view of the fluid storage
and dispensing vessel of FIG. 28, showing the details of the
anti-rotation locking structure on the neck region of the
vessel.
[0086] FIG. 33 is a perspective view of a fluid storage and
dispensing vessel, featuring anti-rotation locking structure on the
neck region of the vessel.
[0087] FIG. 34 is a perspective view of a cap engageable with the
anti-rotation locking structure on the neck region of the vessel of
FIG. 33.
[0088] FIG. 35 is a perspective view of the cap of FIG. 34, as
engaged with the locking structure on the neck region of the fluid
storage and dispensing vessel of FIG. 33.
[0089] FIG. 36 is an elevation view of the cap of FIG. 34, as
engaged with the locking structure on the neck region of the fluid
storage and dispensing vessel of FIG. 33.
[0090] FIG. 37 is a perspective view of a fluid storage and
dispensing vessel, featuring anti-rotation locking structure on the
neck region of the vessel.
[0091] FIG. 38 is a perspective view of a cap engaged with the
anti-rotation locking structure on the neck region of the vessel of
FIG. 37, with the cap being overfitted by a connector.
[0092] FIG. 39 is a perspective view of the cap of FIG. 38, showing
the details of the locking structure of the cap.
[0093] FIGS. 40-43 are views of various arrangements of liner-based
fluid storage and dispensing packages having connectors attached
thereto, and arranged with connector handles that are manually
operable to effect disengagement of the connectors from the fluid
storage and dispensing package.
[0094] FIG. 44 is an exploded perspective view of a fluid storage
and dispensing package featuring keycode structure and a
mis-connection interference structure to prevent engagement of the
fluid storage and dispensing package with an incorrect cap.
[0095] FIG. 45 is a perspective view of the cap and code ring
assembly of the fluid storage and dispensing package shown in FIG.
44.
[0096] FIG. 46 is a bottom plan view of the cap and code ring
assembly of the fluid storage and dispensing package shown and FIG.
44.
[0097] FIG. 47 is a perspective view of a connector of a dispensing
assembly, according to another embodiment of the invention.
[0098] FIG. 48 is another perspective view of the connector of FIG.
47.
[0099] FIG. 49 is a front elevation view of a connector of a
dispensing assembly, according to yet another embodiment of the
invention.
[0100] FIG. 50 is a perspective view of the connector of FIG.
49.
[0101] FIG. 51 is a side elevation view of a connector of a
dispensing assembly, according to yet another embodiment of the
invention, in a first position of the handle.
[0102] FIG. 52 is a side elevation view of the connector of FIG.
51, in a second position of the handle.
[0103] FIG. 53 is a side elevation view of the connector of FIG.
51, in a third position of the handle.
[0104] FIG. 54 is a simplified spatial view of a portion of a
dispense connector according to a further embodiment of the
invention.
[0105] FIG. 55 is an exploded view of a connector of a dispensing
assembly according to yet a further embodiment of the
invention.
[0106] FIG. 56 is an assembled perspective view of the connector of
FIG. 55.
[0107] FIG. 57 is a graph of pressure, in psig, as a function of
time (time of day), showing the pressure of the dispensed liquid
(curve A), the pressure of the pressurizing gas (curve B), the
inlet downstream dispenser pressure (curve C) and weight, in grams,
of cumulative dispensed liquid measured at the scale (curve D), for
representative Run 1 at viscosity of 25 centipoise/28 centipoise,
during a time period of 13:12:00 to 18:00:00 for dispensing of an
aqueous solution of propylene glycol from a 4 L liner under
pressure dispensing conditions.
[0108] FIG. 58 is a graph of pressure, in psig, as a function of
time (time of day), showing the pressure of the dispensed liquid
(curve A), the pressure of the pressurizing gas (curve B), the
inlet downstream dispenser pressure (curve C) and weight, in grams,
of cumulative dispensed liquid measured at the scale (curve D), and
the linear (scale) curve (curve E), for representative Run 1 at
viscosity of 25 centipoise/28 centipoise, during a time period of
17:02:24 to 17:45:36 for dispensing of an aqueous solution of
propylene glycol from a 4 L liner under pressure dispensing
conditions.
[0109] FIG. 59 is a perspective view of a connector according to a
further embodiment of the invention.
[0110] FIG. 60 is a side elevation view of the connector shown in
FIG. 59.
[0111] FIG. 61 is a prospective view of the connector of FIGS. 59
and 60, showing details of construction of such connector.
[0112] FIG. 62 is a perspective view of a connector according to
another embodiment of the invention.
[0113] FIG. 63 is a perspective schematic representation of the
connector of FIG. 62, showing the action of the release lever
handle.
[0114] FIG. 64 is a top perspective view of a connector according
to yet another embodiment of the invention, featuring two distinct
handle locking mechanisms.
[0115] FIG. 65 is a side elevation view of the connector of FIG.
64.
[0116] FIG. 66 is a top perspective view of the connector of FIGS.
65-65.
[0117] FIG. 67 is a perspective view of a connector utilizing one
of the locking mechanisms illustrated in FIGS. 64 and 65.
DETAILED DESCRIPTION OF THE FIGURES
[0118] The disclosures of the following patents and pending
applications are hereby incorporated by reference, in their
entirety, for all purposes:
[0119] U.S. Patent Application Publication No. 2009/0212071
published Aug. 27, 2009 in the name of Glenn M. Tom, et al. for
"Material Storage and Dispensing Packages and Methods;" U.S. Patent
Application Publication No. 2009/0314798 published Dec. 24, 2009 in
the name of Minna Hovina, et al. for "Liner-Based Liquid Storage
and Dispensing Systems with Empty Detection Capability;"
[0120] U.S. Provisional Patent Application No. 60/674,577 filed
Apr. 25, 2005 in the name of Weihua Wang, et al. for "Apparatus and
Process for Storage and Dispensing of Chemical Reagents and
Compositions;"
[0121] International Patent Application Publication No. WO
2006/116428 published Nov. 2, 2006 in the name of Weihua Wang, et
al. for "Apparatus and Process for Storage and Dispensing of
Chemical Reagents and Compositions;" and
[0122] U.S. Pat. No. 6,879,876 issued Apr. 12, 2005 in the names of
Kevin O'Dougherty, et al. for "Liquid Handling System with
Electronic Information Storage."
[0123] The present invention relates to fluid dispensing systems
and processes. In various aspects, the invention relates to a
pre-connect verification coupling that is usefully employed in
fluid storage and dispensing packages, to ensure proper coupling
and avoid fluid contamination issues, as well as to an empty detect
system that is usefully employed for liner-based fluid storage and
dispensing packages that are pressure-compressed in the fluid
dispensing operation.
[0124] Referring now to the drawings, FIG. 1 is a perspective view
of one illustrative liner-based fluid storage and dispensing
container 10 to which the pre-connect verification coupling of the
invention is applicable.
[0125] The container 10 includes a flexible, resilient liner 12
capable of holding liquid, e.g., a high purity liquid (having a
purity of >99.99% by weight) in a generally rigid housing 14.
The liner 12 may have any suitable conformation, and can be formed
with an open head or a closed head structure, and can be provided
as a 2-dimensional liner structure or alternatively as a
3-dimensional liner structure.
[0126] The liner 12 may for example be formed as a 3-dimensional,
closed head liner. The term "3-dimensional" in reference to the
liner means that the liner is formed from tubular stock material,
as opposed to a 2-dimensional liner formed by heat-sealing
superimposed flat sheet stock pieces at superimposed edges thereof
to form the liner structure. In the use of a tubular stock that is
retained in tubular form and not slit or cut, e.g., a blown tubular
polymeric film material retained in tubular form, heat seals and
welded seams along the sides of the liner are avoided. The absence
of side welded seams may be preferred in some instances to enable
the liner to better withstand forces and pressures that may tend to
stress the liner and cause failure of seams in 2-dimensional
liners. A closed-head liner is a liner that has a sealed or
otherwise closed head portion, as opposed to an open head liner
that is formed with a neck opening or a port opening on the head
portion of the liner.
[0127] It will be appreciated that the minor may be formed by any
of a variety of suitable forming techniques. For example, as
mentioned, a blown film can be retained in tubular form to form the
liner. Alternatively, the blown film can be cut to yield
constituent sheet or web-form panels or liner precursor structures.
As a still further alternative, sheets of a film material may be
fabricated to form 3-dimensional liner structures using gussets and
other techniques to form fit the resulting liner article to the
overpack. Thus, various form-fitting conformations of the liner may
be employed, which are adapted to the shape and size of the
overpack or other containment vessel in which the liner is
disposed.
[0128] The liner in a specific embodiment may be a single-use, thin
membrane, 3-dimensional, closed head liner, whereby the liner 12
can be removed after each use (e.g., when the container is depleted
of the liquid contained therein) and replaced with a new, clean
liner to enable the reuse of the overall container 10.
[0129] The liner film preferably is free of components such as
plasticizers, antioxidants, fillers, etc. that may be or become a
source of contaminants, e.g., by leaching into the liquid contained
in the liner, or by decomposing to yield degradation products that
have greater diffusivity in the liner film and that migrate to the
surface and solubilize or otherwise become contaminants of the
liquid in the liner.
[0130] The liner may be formed of any suitable material of
construction, and preferably is formed of a polymeric film. In high
purity fluid containment applications, the liner may be formed of a
suitable fluoropolymer material, such as for example
polytetrafluoroethylene (PTFE), fluorinated ethylene propylene
(FEP), or perfluoroalkoxy (PFA). Alternatively, the liner may be
formed of an olefinic polymer. As a still further alternative, the
liner may be formed of a copolymer including any suitable monomeric
constituents. The liner film may be a single-ply film, or may be
formed as a multi-layer laminate or a composite film material,
e.g., being coextruded, calendared, or otherwise fabricated with
multiple layers or components, e.g., as a multi-layer laminate
including one or more intermediate adhesive layers, etc.
[0131] Preferably, a substantially pure film is utilized for the
liner, such as virgin (additive-free) polyethylene film, virgin
polytetrafluoroethylene (PTFE) film, or other suitable virgin
polymeric material such as polypropylene, polyurethane,
polyvinylidene chloride, polyvinylchloride, polyacetal,
polystyrene, polyacrylonitrile, polybutylene, etc. The thickness of
the liner film material can be any suitable thickness, e.g., in a
range of from about 1.5 mils (0.0015 inch; 0.0381 mm) to about 30
mils (0.030 inch; 0.762 mm). In one embodiment, the liner has a
thickness of 20 mils (0.020 inch; 0.508 mm).
[0132] A 3-dimensional, closed head liner can be formed in any
suitable manner, but preferably is manufactured using tubular blow
molding of the liner with formation of an integral fill opening at
an upper end of the vessel, which may, as shown in FIG. 1, be
joined to a port or cap structure 28. The liner thus may have an
opening for coupling of the liner to a suitable connector for fill
or dispense operations involving respective introduction or
discharge of fluid. The cap joined to the liner port may be
manually removable and may be variously configured, as regards the
specific structure of the liner port and cap. The cap also may be
arranged to couple with a dip tube for introduction or dispensing
of fluid.
[0133] The liner 12 includes 2 ports in the top portion thereof, as
shown in FIG. 1. The liner is disposed in a substantially rigid
housing or overpack 14, which can be of a generally rectangular
parallelepiped shape as illustrated, including a lower receptacle
portion 16 for containing the liner 12 therein, and an upper
stacking and transport handling section 18. The stacking and
transport handling section 18 includes opposedly facing front and
rear walls 20A and 20C, respectively, and opposedly facing side
walls 20B and 20D. The opposedly facing side walls 20B and 20D have
manual handling openings 22 and 24, respectively, to enable the
container to be manually grasped, and physically lifted or
otherwise transported in use of the container. Alternatively, the
overpack can be of a cylindrical form, or of any other suitable
shape or conformation.
[0134] The lower receptacle portion 16 of the housing 14 is as
shown slightly tapered. All of the four walls of the lower
receptacle portion 16 are downwardly inwardly tapered, to enable
the stacking of the containers for storage and transport, when a
multiplicity of such containers are stored and transported. In one
embodiment, the lower portion 16 of housing 14 may have tapered
walls whose taper angle is less than 15.degree., e.g., an angle
between about 2.degree. and 12.degree..
[0135] The generally rigid housing 14 also includes an overpack lid
26, which is leak-tightly joined to the walls of the housing 14, to
bound an interior space in the housing 14 containing the liner 12,
as shown.
[0136] The liner has two rigid ports, including a main top port
coupling to the cap 28 and arranged to accommodate passage
therethrough of the dip tube 36 for dispensing of liquid. The dip
tube 36 is part of the dispensing assembly including the dip tube,
dispensing head 34, coupling 38 and liquid dispensing tube 40. The
dispensing assembly also includes a gas fill tube 44 joined to
dispensing head 34 by coupling 42 and communicating with a passage
43 in the dispensing head. Passage 43 in turn is adapted to be
leak-tightly coupled to the interior volume port 30 in the overpack
lid 26, to accommodate introduction of a gas for exerting pressure
against liner 12 in the dispensing operation, so that liquid
contained in liner 12 is forced from the liner through the interior
passage of the hollow dip tube 36 and through the dispensing
assembly to the liquid dispensing tube 40.
[0137] The liner 12 advantageously is formed of a film material of
appropriate thickness to be flexible and collapsible in character.
In one embodiment, the liner is compressible to about 10% or less
of the rated fill volume, i.e., the volume of liquid able to be
contained in the liner when same is fully filled in the housing 14.
The liner should also possess suitable barrier properties for the
specific application in which it is utilized, to prevent gas from
permeating into the fluid in the liner from the ambient
environment, e.g., the gas volume within the overpack that is
exterior to the liner. Preferred liner materials are sufficiently
pliable to allow for folding or compressing of the liner during
shipment as a replacement unit. The liner preferably is of a
composition and character that is resistant to particle and
microbubble formation when liquid is contained in the liner, and
that is effective to maintain purity for the specific end use
application in which the liquid is to be employed, e.g., in
semiconductor manufacturing or other high purity-critical liquid
supply application.
[0138] For semiconductor manufacturing applications, the liquid
contained in the liner 12 of the container 10 should have less than
75 particles/milliliter of particles having a diameter of 0.25
microns, at the point of fill of the liner, and the liner should
have less than 30 parts per billion total organic components (TOC)
in the liquid, with less than 10 parts per trillion metal
extractable levels of critical elements, such as calcium, cobalt,
copper, chromium, iron, molybdenum, manganese, sodium, nickel, and
tungsten, and with less than 150 parts per trillion iron and copper
extractable levels per element for liner containment of hydrogen
fluoride, hydrogen peroxide and ammonium hydroxide, consistent with
the specifications set out in the Semiconductor Industry
Association, International Technology Roadmap for Semiconductors
(SIA, ITRS) 1999 Edition.
[0139] The liner 12 of the FIG. 1 container contains in its
interior space a pellet 45, as illustrated, to aid in non-invasive
magnetic stirring of the liquid contents, as an optional feature.
The pellet may be formed of a metal or other material that is
non-deleterious in interaction with the fluid in the liner, or of a
material that is coated with an inert film or coating to render the
pellet compatible with the fluid. The magnetic stirring pellet 45
may be of a conventional type as used in laboratory operations, and
can be utilized with an appropriate magnetic field-exerting table,
so that the container is able, when reposed on the table with the
liner filled with liquid, to be stirred, to render the liquid
homogeneous and resistant to settling. Such magnetic stirring
capability may be employed to resolubilize components of the liquid
subsequent to transit of the liquid under conditions promoting
precipitation or phase separation of the liquid contents. The
stirring element being remotely actuatable in such manner has the
advantage that no invasive introduction of a mixer to the interior
of the sealed liner is necessary.
[0140] The port 30 in deck 26 of the housing 14 can be coupled with
a rigid port on the liner, so that the liner is fabricated with two
ports, or alternatively the liner can be fabricated so that it is
ventable using a single port configuration.
[0141] Deck 26 of the housing 14 may be formed of a same generally
rigid material as the remaining structural components of the
housing, such as polyethylene, polytetrafluoroethylene,
polypropylene, polyurethane, polyvinylidene chloride,
polyvinylchloride, polyacetal, polystyrene, polyacrylonitrile, or
polybutylene.
[0142] As a further optional modification of the container 10, a
radio frequency identification (RFID) tag 32 may be provided on the
liner, for the purpose of providing information relating to the
contained liquid and/or its intended usage. The radio frequency
identification tag can be arranged to provide information via a
radio frequency transponder and receiver to a user or technician
who thereby can ascertain the condition of the liquid in the
container, its identity, source, age, intended use location and
process, etc. In lieu of an RFID device, other information storage
may be employed which is readable, and/or transmittable, by remote
sensor, such as a hand-held scanner, computer equipped with a
receiver, etc.
[0143] In the FIG. 1 container the liner 12 allows the liquid to
expand and contract due to temperature changes.
[0144] In the dispensing operation involving the container 10 shown
in FIG. 1, air or other gas (nitrogen, argon, etc.) may be
introduced into tube 44 and through port 30 of lid 26, to exert
pressure on the exterior surface of the liner, causing it to
contract and thereby forcing liquid through the dip tube 36 and
dispensing assembly to the liquid dispensing tube 40.
[0145] Correspondingly, air may be displaced from the interior
volume of housing 14 through port 30, for flow through the passage
43 in dispensing head 34 to tube 44 during the filling operation,
so that air is displaced as the liner expands during liquid filling
thereof.
[0146] In one embodiment of the invention, a zero or near zero
headspace is maintained in the liner of a fluid storage and
dispensing package in which dispensing is carried out with
imposition of pressure on the liner for progressive compaction
thereof to discharge fluid from an interior volume of the liner
through a discharge passage of a probe coupled with the liner. The
storage and dispensing system including such package and employees
a stubby probe having a terminus including an opening to the
discharge passage. For such purpose, the terminus of the stubby
probe is disposed in an upper portion of the interior volume of the
liner for removal of headspace gas prior to discharge of fluid from
the liner.
[0147] As used herein, the term "zero head space" in reference to
fluid in a liner means that the liner is totally filled with liquid
medium, and that there is no volume of gas overlying liquid medium
in the liner.
[0148] Correspondingly, the term "near zero head space" as used
herein in reference to fluid in a liner means that the liner is
substantially completely filled with liquid medium except for a
very small volume of gas overlying liquid medium in the liner,
e.g., the volume of gas is less than 5% of the total volume of
fluid in the liner, preferably being less than 3% of the total
volume of fluid, more preferably less than 2% of the total volume
of fluid and most preferably, being less than 1% of the total
volume of fluid (or, expressed another way, the volume of liquid in
the liner is greater than 95% of the total volume of the liner,
preferably being more than 97% of such total volume, more
preferably more than 98% of such total volume, and most preferably
more than 99% of such total volume).
[0149] The greater the volume of the head space, the greater the
likelihood that the overlying gas will become entrained and/or
solubilized in the liquid medium, since the liquid medium will be
subjected to sloshing, splashing and translation in the liner, as
well as impact of the liner against the rigid surrounding container
during transportation of the package. This circumstance will in
turn result in the formation of bubbles, microbubbles, and
particulates in the liquid medium, which degrade the liquid medium,
and render it potentially unsuitable for its intended purpose. For
this reason, head space is desired to be minimized and preferably
eliminated (i.e., in a zero or near-zero head space conformation)
with complete filling of the interior volume of the liner with
liquid medium.
[0150] FIG. 2 is a perspective schematic view of a pre-connect
verification coupling, according to one embodiment of the present
invention. As shown in FIG. 2, the coupling is implemented in a
fluid storage and dispensing package 100, including a liner 112
disposed in the rigid overpack 114. The liner 112 has a port 160
extending upwardly from the top cylindrical surface of the overpack
114, through an opening in such top cylindrical surface. The port
160 includes a sealing membrane 162 in the opening of the port. The
membrane 162 may be formed of any suitable material, such as a
rubber, cellulosic or polymeric material, which effectively seals
the liner and maintains its contents isolated from contamination by
the atmosphere or ambient environment.
[0151] The port 160 is circumscribed by a cap 128 of cylindrical
form defining a central opening 165. The top annular surface 166 of
the cap 128 features keying elements, including keycode notches 168
and 170, and keycode pin 172. It will be appreciated that any
keying elements may be employed that provide a suitable keycode
structure, and that such elements may include other permutations of
a notches and pins, or alternatively any other types of matably
engageable structural elements that cooperatively interfit with one
another to define a correctly engaged cap and dispenser. Examples
of other matably engageable structural elements include channel and
protrusion elements, interdigitating ribs of circumferentially
varied transverse dimensions, tongue and groove elements, and the
like.
[0152] In the FIG. 2 package 100, the dispenser 134 is shown
schematically, as including an upper cylindrical dispenser body 138
and a lower, larger-diameter cylindrical dispenser ring 140. The
upper cylindrical dispenser body 138 and the lower cylindrical
dispenser ring are interconnected with one another, such that the
upper dispenser body is biased to a retracted position by suitable
biasing structure such as a biasing spring 177. After the ring has
been engaged and fixedly positioned on the cap 128, as hereafter
described, the dispenser body 138 is downwardly translatable to an
extended position, by application of manual downward force on the
dispenser body 138, so that the dispenser body 138 is translated
downwardly through the circumferential dispenser ring 140, with
accompanying compression of the biasing spring.
[0153] The circumferential dispenser ring 140 features keycode
elements that are complementary to the keying elements of the cap
128. The keycode elements on the dispenser ring 140 include a first
pin 180 that is matably engageable with keycode notch 168 of the
cap, a second pin 182 that is matably engageable with keycode notch
170 of the cap, and channel 189 in the dispenser interlock 176 that
is matably engageable with the pin 172 of the cap.
[0154] The dispenser interlock 176 prevents the ring 140 from
moving against the dispenser body 138 until the interlock mechanism
is activated by pin 172 entering channel 189 and fully engaging
therewith along the length of the pin. The interlock 176 may be of
any suitable type, as for example an electronic interlock
mechanism, an electromechanical interlock mechanism, a mechanical
interlock mechanism, or the like. In one embodiment, the interlock
mechanism includes spring-biased tumblers that respond to
engagement with the keycode structures of the cap, so as to retract
and allow such downward translation movement of the dispenser body
against the dispenser ring.
[0155] Once the interlock 176 is engaged by the pin, the dispenser
body 138 is freely translatable against the dispenser ring 140, in
a downward direction by application of manual pressure exerted
downwardly on the dispenser body 138, or upwardly by release of
such manual pressure, as indicated by bidirectional arrow A.
[0156] The dispenser body 138 is schematically illustrated as
having a fluid output B associated therewith. The fluid output B is
in fluid flow communication with the probe 136, to enable delivery
of fluid from the liner through the probe and fluid output B to an
external location of use, e.g., by flow circuitry joining the fluid
output B to such external location. The external location may for
example include a fluid-utilizing facility such as a semiconductor
manufacturing tool, or other installation in which the dispensed
fluid is treated, used as a treatment agent, or otherwise employed
to facilitate a process or operation.
[0157] As shown in FIG. 3, the probe 136 has a short length, in
relation to the overall height of the package with which the
dispensing assembly, including the probe, is associated. The probe
thus is configured as a "stubby probe," taken here as denoting that
the probe has a longitudinal dimension that places the bottom inlet
opening thereof at a position in the upper end portion of the
liner, when the dispensing assembly is fully engaged with the cap
and associated vessel. For example, the probe may have a
longitudinal dimension that is on the order of the height dimension
of the connector body, or it may even be less than such height
dimension of the connector body. By such arrangement, headspace gas
that may be present at an upper portion of the liner, overlying the
liquid therein, may readily be vented from the liner prior to
active liquid dispensing, so that gas efflux from the vessel is
minimized or eliminated during active gas dispensing, and so that
downstream gas desolubilization is likewise minimized or
eliminated. For this purpose, the liner preferably is constructed
as shown, with a top port facilitating headspace gas removal.
[0158] Thus, the stubby probe allows the headspace gas to be
removed prior to flow of the chemistry from the liner through the
dispense network. Further, the ability to remove headspace gas
prior to dispensing facilitates achievement of minimal headspace
throughout the downstream flow circuitry and at the end-use
facility, e.g., semiconductor manufacturing tool, thereby
minimizing or avoiding the problems incident to the presence of
headspace gas in the source vessel, as well as lines, downstream
tanks and reservoirs, feed channels, and the like. By eliminating
headspace gas, the use of the stubby probe and the provision of an
upper end venting of the liner produces optimal conditions for
pressure-dispensing of fluid from the liner, without the occurrence
of gross gas voids in the liquid or effervescence of dissolved gas
from the liquid as the liquid is subjected to progressively lower
pressure in pressure drop segments of the flow circuitry and
downstream process network.
[0159] Additionally, the stubby probe facilitates early detection
of misconnection, without contamination of the probe, since
attempted engagement of the probe with the cap of the vessel will
result in the breaking of the breakseal membrane, but since the
probe is initially in contact with the headspace volume and not the
underlying liquid, there is no contamination of the probe, a
distinct advantage over prior use of long-length probes in which
the open lower end of the probe is disposed in the lower portion of
the liner.
[0160] In one embodiment, the fluid output B is constituted by a
fluid discharge conduit equipped with connection structure to
facilitate the interconnection of the fluid discharge conduit with
downstream flow circuitry.
[0161] The minimization of head space in the liner and downstream
network and flow circuitry is a significant advance in the art,
since chemical reagent liners have heretofore typically been filled
with chemical reagent under air-fill conditions, with about 5%
headspace gas being introduced into the liner to accommodate
expansion of the liquid in the liner during storage and transport,
when temperature of the fluid in the liner may change
significantly. When the headspace gas is pressurized during
imposition of pressure on the external surface of the liner for
fluid dispensing, such pressurized headspace gas goes into solution
and thereafter holds the potential for effluxing from the liquid,
and introducing headspace gas throughout the downstream system, in
addition to headspace gas being entrained in the dispensed liquid,
and resulting in slugs of gas that can interfere with pumps, mass
flow controllers, and other components of the downstream process
system.
[0162] By providing porting for headspace gas venting at the
highest possible elevation on the liquid-containing package, the
complete or near-complete venting of headspace gas can be effected,
so that the top port can thereby serve in initial removal of
headspace gas as well as subsequent discharge of liquid from the
package.
[0163] Such highest possible port elevation has a number of
advantages: (i) it can be implemented in any size package, so that
a stubby probe can be utilized across a broad range of sizes of
package volumes, (ii) this connection between the probe and the cap
is readily detected before crossing-contamination occurs and (iii)
manufacturing costs can be minimized with a one-size-fits-all
approach to probe and port designs.
[0164] In the dispense operation of the FIG. 2 system, a
pressurizing gas is introduced into the interior volume of the
overpack outside the liner therein, so that the pressurizing gas
exerts a compressive force on the liner, causing it to
progressively contract, to pressure-dispense the fluid from the
liner. Thus, the fluid in the liner, e.g., a photoresist, is forced
upwardly through the probe 136 and passage (not shown) in the
dispenser body 138 to the fluid output B, from which it passes into
the downstream flow circuitry.
[0165] By the arrangement shown in FIG. 2, the dispenser ring 140
initially is engaged with the cap so that the keying elements mate
with one another. If the respective keying elements on the ring and
the cap do not engage with one another, due to a mis-connection in
which a wrong dispenser is attempted to be coupled with the fluid
storage and dispensing package 100, the probe 136 is prevented from
engaging and puncturing the sealing membrane 162. Accordingly, the
attempted connection of the incorrect elements is immediately
detected, without the occurrence of contamination of the contained
fluid or of the dispenser, such as would otherwise occur in the
absence of the keycode structure of the dispenser and cap.
[0166] If a proper dispenser has been selected for engagement with
the fluid storage and dispensing package 100, then the engagement
of the ring 140 with the cap 28 de-actuates the dispenser interlock
176, and allows the dispenser body 138 to be vertically translated
downwardly against the ring 140, by application manual pressure on
the dispenser body. The dispenser body 138 thereupon is downwardly
translated so that the probe 136 engages and punctures the membrane
162, thereby placing the dispenser 134 in condition for dispensing
operation involving discharge of fluid from the liner 112 in
overpack 114.
[0167] Once the dispenser body is downwardly translated to its
dispensing position, the dispenser body may be locked in place, by
suitable lock structure (not shown in FIG. 2), such as a bayonet
locking structure, or a dimple-and-ball detent structure, or other
structural arrangement, by which the dispenser body is locked in an
extended lower position for dispensing of fluid from the package
100.
[0168] The fluid storage and dispensing system shown in FIG. 2 thus
employs a dispenser 134 and package 100 incorporating the
pre-connect verification coupling of the invention, as including a
first coupling body and a ring cooperative therewith to allow a
translational movement of the body against the ring in a
post-verification coupling with a second coupling body including
second keycode structure, wherein the ring includes a first keycode
structure and an interlock preventing such translational movement
prior to verification coupling of the first keycode structure with
the second keycode structure. The term "verification coupling"
refers to the first and second keycode structures being
sufficiently, and preferably fully, engaged with one another so as
to indicate that the first and second keycode structures are
complementary and properly fit one another.
[0169] Although described with reference to the fluid storage and
dispensing system of FIG. 2 as an illustrative implementation, it
will be recognized that the application of the pre-connect
verification coupling of the invention is not thus limited, but
rather extends to and encompasses other implementations in which
coupling members are desirably verified as to their proper match,
before the coupling is assembled by complete engagement of the
first and second coupling bodies. The first and second coupling
bodies thus may be of any suitable type, e.g., embodied as
connectors, matable fittings, engageable lock structures, etc.
[0170] FIG. 3 is a schematic representation of a process
arrangement 250, including a liner-based fluid storage and
dispensing package 200 interconnected by flow circuitry with a
semiconductor manufacturing tool 238, and an empty detect system
according to one embodiment of the present invention.
[0171] The liner-based fluid storage and dispensing package 200
includes a liner 206 that is disposed in the interior volume 204 of
a rigid overpack 202. The interior volume 204 of the overpack 202
is in fluid communication with a source 212 of a suitable
pressurizing gas, by means of the pressurizing gas feed line 210.
The pressurizing gas can be of any suitable type, such as for
example, argon, helium, nitrogen, air, etc., as may be necessary or
desirable in a given application of the liner-based fluid storage
and dispensing package.
[0172] The liner 206 contains a fluid, such as a photoresist liquid
composition, a chemical mechanical polishing slurry, or other
suitable fluid composition. The liner is coupled in fluid
dispensing relationship to the downstream fluid-utilizing
semiconductor manufacturing tool 238, by flow circuitry including
dispense line 208. The dispense line 208 optionally contains a
fluid processing, monitoring or control unit 218, as may be
necessary or desirable in a specific implementation of the process
installation. Such unit 218 may be provided with a vent line 219,
as necessary or desired in a specific application.
[0173] The liner 206 in such embodiment can be formed of a barrier
film that is permeation-resistant to gases in the exterior ambient
environment of the liner. For example, the liner may be formed of a
polytetrafluoroethylene (PTFE) film, to prevent ingress of air or
other ambient environment gas species from the gas in contact with
the exterior surface of the liner. More generally, multilayer
laminates and barrier films of the character disclosed in U.S.
Patent Application Publication No. 2009/0212071 published Aug. 27,
2009 for "Material Storage and Dispensing Packages and Methods,"
may be employed to good advantage in specific embodiments of the
invention.
[0174] The dispensing operation is carried out with flow of
pressurizing gas from the source 212 through line 210 into the
interior volume 204 of the liner-based package. In the interior
volume, the pressurizing gas exerts pressure on the exterior
surface of the liner 206, thereby serving to compress and collapse
the liner so that fluid is forced into dispense line 208.
[0175] From the dispense line 208, the fluid enters filter 220,
which serves to de-gas the fluid, remove fine particles from the
liquid, or otherwise improve the character or quality of the liquid
for subsequent use. The filter 220 includes a vent line 222
containing flow control valve 224 therein, for venting gas and/or
liquid from the filter, as desired. The vented stream in line 222
may, for example, be a retentate stream produced by the filtration
operation in filter 220.
[0176] The filtrate produced by the filtering in filter 220 is
discharged into fluid feed line 226 containing flow control valves
228 and 234 therein, upstream and downstream, respectively, of the
dispensing pump 232. Flow control valve 228 has associated
therewith an automatic valve actuator 230, and flow control valve
234 has associated therewith an automatic valve actuator 236.
[0177] The dispensing pump 232 may be of any suitable type,
including diaphragm pumps, piston pumps, peristaltic pumps,
injector-type pumps, metered-dose pumps, etc. The choice of a
specific pump will depend on the character the fluid being
dispensed, the requirements of the downstream fluid-utilizing
location or facility, the pressure drop in the flow circuitry with
which the pump is associated, etc.
[0178] From the fluid feed line 226, the dispensed fluid is
delivered to the tool 238 for utilization therein. The tool may be
of any suitable type, including coating, etching, polishing,
masking, deposition, volatilization, pyrolysis, packaging, mixing,
abatement or other type tools.
[0179] The fluid dispensing and utilization operations may be
carried out in a controlled manner in the process installation
illustratively shown in FIG. 3, using the control system including
central processor unit (CPU) 240. The CPU may be of any suitable
type, such as a general-purpose programmable computer, a
microprocessor, microcontroller, programmable logic controller, or
the like.
[0180] In the illustrative process facility illustratively shown in
FIG. 3, the CPU is operatively coupled with a pressure transducer
216, connected by a pressure sensing line 214 to the fluid dispense
line 208. The pressure transducer may be of any suitable type,
effective to detect the pressure of dispensed fluid in dispense
line 208, and to responsively generate a signal corresponding to
the sensed pressure. Such a response signal is transmitted from the
transducer 216 in signal transmission line 248 to the CPU.
[0181] The CPU 240 in response to such sensed pressure signal from
the transducer 216, may be arranged to responsively adjust
components of the process facility, including: pressurized gas
source 212, by means of a control signal transmitted in signal
transmission line 246 to the source 212; fluid processing,
monitoring or control unit 218, by means of a control signal
transmitted in signal transmission line 260; valve actuator 230, by
means of a control signal transmitted in signal transmission line
252; valve actuator 236, by means of a control signal transmitted
in signal transmission line 256; and/or pump 232, by means of a
control signal transmitted in signal transmission line 254. In such
manner, the various controlled system components may be modulated
in response to the dispense pressure sensed by transducer 216.
[0182] The CPU 240 in the FIG. 3 embodiment is arranged to
communicate with an output device 244, which may for example
include a display monitor 244, linked to the CPU by signal
transmission line 242, or other output device or output capability
or subsystem.
[0183] The CPU in one embodiment of the invention is configured and
arranged to monitor the pressure of the dispensed fluid, as well as
the pressure of the pressurizing gas. For monitoring the pressure
of the pressurizing gas, the source 212 may have associated
therewith a pressure transducer operatively coupled to signal
transmission line 246, and arranged to transmit a signal to the CPU
correlative of the pressure of the pressurizing gas in the source
212. It will therefore be appreciated that the signal transmission
line 246 may be a bidirectional signal transmission line or a
multi-line cable, capable of transmitting signals both to and from
the CPU and the source 212.
[0184] The above-described embodiment of the invention reflects the
discovery that when dispensing fluid from a flexible liner by
imposition of pressure thereon, the progressive collapse of the
liner at the approach to the fully collapsed position (at which
fluid is exhausted from the liner) involves a frictional change of
the liner in response to applied pressure. Specifically, it has
been observed that as the liner is collapsed, near the
end-of-dispense at the approach to a fully collapsed position, the
liner friction increases for each incremental amount of additional
liner collapse. As the friction increases, more energy from the
pressurizing gas is consumed to collapse the liner, and the
dispensed fluid pressure begins to fall off, initially at a lower
rate of change, and then more steeply (rapidly) at the end of the
dispensing operation, as the empty state of the liner is finally
reached.
[0185] The fall-off of the dispensed fluid pressure at the
aforementioned relatively lower rate of change, marks a transition
that is readily discernible in a plot of pressure as a function of
time for the dispensed fluid. The "slope droop" of the pressure
curve thus provides an early indication that the vessel is
approaching exhaustion, and such slope droop is followed by a steep
slope, as the vessel progresses to an exhausted (empty or
substantially empty) state.
[0186] Based on such pressure dispensing characteristic, the pump
or other motive fluid driver that is coupled with the liner-based
package for effecting flow of dispensed fluid through the flow
circuitry, can be selected or otherwise set to provide a drive
pressure that will enable dispensing throughout the full extent of
the dispensing operation, i.e., from an initial full state of the
liner, progressing to early slope droop pressure behavior, and
finally to steep slope decline to an empty or near-empty state.
[0187] As an illustrative example, in a system of the general type
shown in FIG. 3, delivering photoresist from a liner-based package
to a semiconductor manufacturing tool, the pressure setpoint for
the motive fluid driver may be 7 psig, and the motive fluid driver
may be a metered dose pump arranged to pump the fluid in a
succession of a discrete small volumes, or "shots," as part of a
pumping cycle in which a suction step precedes each shot. As the
end-of-dispense state approaches, the slope of pressure versus time
for the dispensed shots begins to fall softly. At a pressure of 6
psig, there is greater than 50 mL of photoresist remaining in the
liner. The decline from the (setpoint) pressure of 7 psig to 6 psig
provides an early warning indication of the approach to empty. The
pressure then rapidly declines to about 1.5 psig at the empty state
at which no more pumping of liquid is possible. At such empty
state, an extremely small amount of photoresist, well less than 10
mL in volume, e.g., 5 mL of photoresist, remains in the package,
representing an overall utilization level of greater than 99.75% of
the photoresist originally supplied in the package.
[0188] The empty detect system and methodology based on this
end-of-dispense transition in dispensed fluid pressure thus
provides sufficient indication of the onset of exhaustion of the
fluid in the liner as to minimize, or, in some instances, to even
eliminate the requirement of an external reservoir for transitional
feed of supplemental fluid to the fluid-utilizing process. As a
result, the hold-up inventory of supplemental fluid is
correspondingly minimized or even eliminated, and the overall
economics of the process are correspondingly improved.
[0189] FIGS. 4-8 are pressure-time graphs that illustrate the
dispensing system behavior during fluid dispensing operation, for a
liner-type package of the type described in connection with FIG. 3,
in which the motive fluid driver was a shot-dispensing pump
operating with alternating suction and positive fluid displacement
steps in a repetitive cycle. Pressure profile, dispense shot
variability, and final residual liquid were determined in four runs
of the system, using deionized water as the test liquid. The
dispense rate of the liquid was 5 mL dispensed over six seconds
with a shot every 60 seconds (i.e., one 5 mL shot per minute). The
tests were carried out to capture the profile of the liner-based
package pressure decay near the empty state, and to log the
dispense shot profile as well as to measure the residual chemical
at final empty state. The pressurizing gas was clean dry air at a
pressure of 7 psig.
[0190] FIG. 4 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for the aforementioned liner-based fluid storage and
dispensing package, showing the pressure behavior of the system
during a dispensing operation involving the last 250 mL of liquid
in the vessel. In this graph, curve A is the package pressure, and
curve B is the cumulative weight, in grams, of the dispensed fluid,
as determined by weighing of such dispensed fluid. As shown by the
graph, an early warning of approach to exhaustion occurred in the
vicinity of 2400 seconds, when about 40 mL of water remained for
dispensing. The empty state was reached at about 2850 seconds, with
9 mL of residual liquid in the liner.
[0191] FIG. 5 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for the aforementioned liner-based fluid storage and
dispensing package, showing the pressure behavior of the system
during dispensing operation involving the last 550 mL of liquid in
the vessel. In this graph, curve A is the package pressure, and
curve B is the cumulative weight, in grams, of the dispensed fluid,
as determined by weighing of such dispensed fluid. As shown in such
graph, the slope droop indicative of the onset of exhaustion
occurred in the vicinity of 6600 seconds of dispensing time.
Complete exhaustion of the liner occurred at about 7250 seconds of
dispensing time.
[0192] FIG. 6 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for a liner-based fluid storage and dispensing package
from which the liquid is dispensed in a series of successive
"shots" by the action of the cyclic suction pump, showing the
pressure behavior of the system during a dispensing operation,
involving the last 50 mL of liquid. In this graph, curve A is the
package pressure, and curve B is the cumulative weight, in grams,
of the dispensed fluid, as determined by weighing of such dispensed
fluid. The stepped profile of curve B is readily apparent, and the
identity of the step size along the curve reflects the constant
volume portions of fluid dispensed in the successive
shot-dispensing segments of the pump cycle. The profile of curve A
reflects pressure drop during the suction cycle, and relaxation
after the suction stroke.
[0193] FIG. 7 is a graph of package pressure, in psig (curve A),
and dispensed fluid weight, in grams (curve B), as a function of
time, in seconds, for the liner-based fluid storage and dispensing
package from which the liquid is dispensed in a series of
successive "shots," each containing 1.42 g of the liquid, by the
action of the cyclic suction pump. The graph shows the data for the
last seven dispense shots from the fluid storage and dispensing
package during the dispensing operation, as well as the linear
equation fitting the data. Curve C is the line fitted to the data
of curve B, of the equation y=0.0237 x+145.67.
[0194] FIG. 8 is a graph of package pressure, in psig, and
dispensed fluid weight, in grams, as a function of time, in
seconds, for the liner-based fluid storage and dispensing package
from which the liquid is dispensed in a series of successive
"shots" by the action of the cyclic suction pump, showing the data
for the last four dispense shots from the fluid storage and
dispensing package during dispensing operation, as well as the
linear equation fitting the data. In this graph, curve A is the
package pressure, and curve B is the cumulative weight, in grams,
of the dispensed fluid, as determined by weighing of such dispensed
fluid. Curve C is the line fitted to the data of curve B, of the
equation y=0.0286 x+16.746. The graph shows the dispense profile
droop of the package pressure curve during the last four shots of
liquid dispensing, reflecting and onset of the depletion of the
liquid inventory of the liner, at about 4200 seconds of dispensing
time.
[0195] It will be apparent from the foregoing that the pressure
slope droop that is evidenced by the pressure curve as a function
of dispensing time for the fluid being dispensed, as the rate of
change of pressure as a function of time begins to significantly
increase, provides an empty detect capability of sufficiently early
character to permit switch-in of a fresh package of fluid for
subsequent dispensing, or otherwise of providing a transitional
source of fluid between deployment of successive packages that is
considerably smaller than would be required utilizing the "first
bubble" empty detect methodology of the prior art.
[0196] In one embodiment of the invention, the liner-based package
may be arranged in the manner shown in FIG. 3, with a pressure
monitor such as a transducer arranged to detect the pressure of
fluid in the liner, operatively coupled with a control system
configured to initiate appropriate action. For example, the control
system may be arranged to output to an alarm indicative of the
onset of exhaustion of the dispensed fluid, so that change-out of
the fluid supply package can be affected in a timely manner,
ensuring continuity of operations. Alternatively, the control
system may be arranged to begin initial preparation for switching
the fluid dispensing from a first package to a second, fresh
package, so that a "sharp" switch-over can thereafter take place
when the first fluid supply package is exhausted. As a still
further alternative, the control system may be constructed and
arranged to terminate the fluid-utilizing process in a manner
closely coordinated with the available inventory of remaining fluid
in the liner-based package.
[0197] It will be apparent that the empty detect system of the
invention may be implemented in a wide variety of specific forms,
and with variation of the specific actions taken in response to the
detection of the onset of liner exhaustion.
[0198] It is further apparent that the invention may be practiced
in variant forms utilizing the pre-connect verification coupling,
as well as the empty detect system, in connection with a
liner-based fluid storage and dispensing system that is connected
to a downstream fluid-utilizing process in the dispensing operation
of the contained fluid.
[0199] In another aspect, the invention contemplates a method of
supplying a fluid from a collapsible liner subjected to pressure to
effect dispensing of the fluid, such method including monitoring
pressure of the dispensed fluid as a function of time, and
determining pressure slope droop of the pressure-time function as
indicative of a predetermined approach to exhaustion of fluid from
the liner, and at the predetermined approach to exhaustion of fluid
from the liner, imposing a pressure spike on the liner to effect
further dispensing of fluid from the liner.
[0200] In a further variation such methodology, fluid dispensed
from the liner subsequent to imposition of the pressure spike
thereon is flowed to a reservoir for transitional supply of fluid
during exhaustion of fluid from the liner, to ensure continuity of
dispensing of fluid to the downstream fluid-utilizing apparatus or
other location of end use.
[0201] Another aspect of the invention relates to a dispense head
connector of a type that is used to couple with a cap of a fluid
storage and dispensing vessel. In accordance with the invention,
the connector is of an ergonomically enhanced character,
facilitating its use without the difficulties encountered in the
use of the prior art connector. The invention relates to an
ergonomic handle with "push off" features by means of which the
connector is readily installed on and removed from a liner-based
fluid storage and dispensing package.
[0202] The ergonomic connector is shown in FIGS. 9-17 in an
illustrative embodiment thereof.
[0203] Referring now to FIG. 9, there is shown the connector 300 as
engaged with a bag in bottle (BIB) vessel 302 including a thin film
liner disposed in the interior of the rigid overpack and adapted
for holding liquid, e.g., a high purity liquid for semiconductor
manufacturing applications. The connector 300 includes a main body
portion 301 having mounted thereon a pivot clamp assembly including
pivot clamps 306 and 308, which lockingly engage the cap 304 on the
vessel. The pivot clamp cams 314 and 316 are coupled with the pivot
clamps to allow engagement and disengagement of the clamps
depending on the position of the handle 318, which is connected to
the pivot clamp cams 314 and 316 as illustrated.
[0204] The pivot clamp cams 314 and 316 each are mounted on
associated axles on which also are mounted the push off cams 310
and 312, respectively.
[0205] The ergonomic handle and push off features include several
key parts. The handle 318 is a finger grooved handle that is easily
grasped by a user to secure a firm grip on the connector when it is
removed. The pivot clamp cams are a primary feature and are used as
a rotary cam assembly, which activate the pivot clamps when the
pivot clamp cams are rotated upwardly by corresponding movement of
the handle. The pivot clamp cams during such rotation ramp up and
press the pivot clamps inwardly, which creates a moment about the
pivot clamp axis, causing the pivot clamps to be opened/unlocked
from the cap 304.
[0206] Another primary feature of the pivot clamp cams is a torque
spring (not shown in FIG. 9), which ensures that the handle will
fall down, and allow the pivot clamps to lock before pressurization
of the interior volume of vessel 302 to apply exterior pressure on
the liner therein. By biasing the handle to a down position, the
locking of the pivot clamps is assured, with corresponding
assurance of the leak-tightness of the vessel assembly for
subsequent dispensing operation.
[0207] The pivot clamp cams 314 and 316 as discussed above are
coupled with the push off cams 310 and 312, such arrangement
allowing the push off cams to push off the top of the cap 304 when
the handle 318 is rotated to an up position. A gradual change in
the cam profile enables a smooth disengagement of the connector 301
from the package. The torque spring also ensures that the push off
cam is not in an open position. When the push off cam is in a
closed position, the connector cannot be placed on the vessel 302,
because the push off cam would interfere with the cap 304.
[0208] The axle at each side of the connector passes through both
the pivot clamp cam and the push off cam at such side of the
connector, and act as a bearing on which both cams can rotate.
[0209] The connector body features protrusions on its side
surfaces, which act as stops to stop the handle in a vertical
position, and prevent it from interfering with any fittings. The
connector body also houses the torque spring.
[0210] FIG. 10 shows the connector 300 in a front elevation view,
with the handle 318 in a down position. FIG. 11 shows the connector
300 in a corresponding rear elevation view. FIG. 12 shows a front
perspective view of the connector 300 with the handle 318 in an
up/unlocked position. FIG. 13 is a bottom perspective view of the
connector 300 showing the push off cam 310 coupled with pivot clamp
cam 314. As illustrated, push off cam 310 has a groove therein to
facilitate coupling of the connector with the cap of the vessel.
FIG. 14 shows another bottom perspective view with the handle 318
in the down position, from which position the push off cam is able
to rotate upwardly. FIG. 15 is a side perspective view of the
connector 300 showing the handle stop 320 on the exterior surface
of the connector body 301, which limits the travel of the handle
318 to a vertical position. FIG. 16 is a perspective view of a
portion of the connector showing the details of the pivot clamp 308
and the associated torque spring cut out 322. FIG. 17 is a
perspective view of the pivot clamp cam 316, showing the details of
its structure as including a main disk-shaped body 332, a ramp
surface 324 thereon, a cylindrical collar 328 with an inner surface
330 configured to interlock with the push off cam, and a torque
spring cut out 326.
[0211] By the structure of the connector as shown in FIGS. 9-17,
there is provided an easily installable and removable connector for
engagement with the liner-based fluid storage and dispensing vessel
302.
[0212] A further aspect of the invention relates to a fitment seal
and a liner-based fluid storage and dispensing package utilizing
same.
[0213] The fitment seal article is shown in FIGS. 18-23 in an
illustrative embodiment thereof, with FIGS. 18-23 showing the
fitment seal article and FIG. 23 showing such article as installed
on the fitment of a liner in a liner-based fluid storage and
dispensing package.
[0214] FIG. 18 is a perspective view of a fitment seal 350
according to one embodiment of the invention, showing the details
of the upper portion thereof. The fitment seal 350 has a main
disk-shaped body 351, from which downwardly depends a cylindrical
sealing wall 355. The main disk-shaped body 351 includes an annular
boss 356 upwardly extending from the main body top surface.
[0215] FIG. 19 is a perspective view of the fitment seal 350 of
FIG. 18, showing the details of the bottom portion thereof. The
fitment seal 350 includes the disk-shaped main body 351 and
cylindrical sealing wall 355. A central floor portion 359 of the
fitment seal is integrally formed with the main body 351 and forms
a central well structure on the top surface of the seal as shown in
FIG. 18 and a corresponding protrusion on the bottom surface of the
seal as shown in FIG. 19.
[0216] FIG. 20 is a top plan view of the fitment seal of FIGS.
18-19. As illustrated, the seal includes disk-shaped main body 351
and annular boss 356 circumscribing a central well 360.
[0217] FIG. 21 is a cross-sectional view of the fitment seal of
FIG. 20, taken along line A-A thereof. The fitment seal 350 as
shown includes the disk-shaped main body 351 terminating at an
outer peripheral edge portion that is tapered, as shown in the
detailed enlarged view of FIG. 22.
[0218] The main body 351 has a main top surface 352 and a main
bottom surface 354. The cylindrical sealing wall 355 at its lower
end portion has an inwardly tapered outer surface 357. The main
body 351 includes a central well 360 that is circumscribed by the
annular boss 356 protruding upwardly from the main top surface of
the body. A central floor member 359 has a main top surface 362 in
the well, and a corresponding main bottom surface 364 defining a
protrusion on the bottom portion of the fitment surrounded by an
annular groove 358.
[0219] FIG. 22 is an enlarged view of the outer edge portion of the
fitment seal as shown in FIG. 21. The outer edge portion as shown
includes a downwardly tapered edge profile of the top surface of
the main body 351 and the cylindrical sealing wall 355 as
illustrated is integrally formed with and downwardly depends from
the main body 351.
[0220] FIG. 23 is a bottom plan view of the fitment seal 350 of
FIGS. 18-19, showing the outer peripheral edge portion 353 of the
main body and the downwardly depending cylindrical sealing wall
355, the central floor member 359, the main bottom surface 354 of
the fitment seal, and the annular groove 358.
[0221] FIG. 24 is a partial cross-sectional elevation view of a
fluid storage and dispensing vessel including the fitment seal of
FIGS. 18-19 as positioned to seal a fitment of the vessel.
[0222] The fitment seal E is shown in FIG. 24 as reposed in the
port opening of a fitment H, which in turn is coupled to a liner
(not shown in FIG. 24), and a cap G is shown as engaged with an
upper portion of the rigid overpack of the vessel, at complementary
threadings of the respective structures.
[0223] The fitment seal arrangement of FIG. 24 provides an
effective sealing of the fluid in the liner associated with the
fitment H, to protect such fluid against contamination from the
ambient environment of the fluid storage and dispensing package.
The various seals in the illustrated structure include a secondary
gas seal A between the rigid overpack and the cap G, and a
secondary gas seal B between the fitment (opening to the liner) and
the cap.
[0224] A tear tab grip handle C is present as illustrated, and the
fitment seal E is constructed to provide a snap fit connection
generally represented at D between the fitment seal and the tear
tab. The fitment seal E provides a circular flange F at its outer
peripheral portion for sealing of the fitment H. A retainer ring I
holds and positions the fitment H with relation to the neck J of
the rigid overpack vessel.
[0225] The fitment seal of the invention is formed of any suitable
material of construction, such as a rubber, polymeric or other
flexible resilient material, and is attached with the downwardly
depending cylindrical wall of the seal being interiorly positioned
in the fitment port opening to effectively seal the fluid contents
of the liner when the cap is installed on the vessel. The outer
vertically extending surface of the downwardly depending
cylindrical wall of the seal make an interference fit with the
internal surface of the fitment positioned in the neck of the
vessel, providing an extended cylindrical region of sealing of the
fitment.
[0226] The bottom portion of the downwardly extending cylindrical
wall is tapered to ensure a ready insertion of the fitment seal
into the fitment. The well structure of the central portion of the
fitment seal allows the seal to bow or dome when the seal makes
contact with the neck of the fitment, and to provide a strong
sealing action on the fitment.
[0227] The outer peripheral flange portion of the fitment seal
provides a wiper-like function to stop any particles that are
produced above it from entering the fluid below, and also assists
in supporting the outer edge of the seal to keep it from "rolling
in" and losing seal integrity.
[0228] The cap as shown in FIG. 24 has interior protrusions that
engage with the radially outwardly projecting flange at the mouth
of the fitment H, and serve to support the outside edge of the
fitment to keep it from enlarging and relieving sealing pressure on
the fitment seal. The cap as mentioned has a tear tab feature
directly above the fitment seal. The fitment seal advantageously is
connected to this tear tab structure, so that when the tear tab is
torn free, the fitment seal is pulled out of the fitment and
remains associated with the tear tab.
[0229] The fitment seal shown in FIG. 24 has the following
advantages over currently employed membrane seals: (i) the fitment
seal is not punctured or broken, but rather is removed by being
lifted out of the fitment in which it is reposed, so that the
number of particles produced in removing the fitment seal is far
smaller than is generated in puncturing of a breakseal membrane;
(ii) the fitment seal has wiper-like structure projecting outwardly
at the edge region of the seal and extending to the cap, to
shieldingly protect the contained fluid from any particles produced
by any action above the seal; (iii) since the seal is completely
removed from the fitment, unlike the currently employed breakseal
membrane that drags along the entire length of the probe as the
probe is installed, the probe in the seal arrangement of the
present invention can be installed without making contact with any
surface and without pick-up of particles and carryover of same into
the contained fluid; (iv) the fitment seal of the present invention
is a separate and discrete part and the material of construction
thereof can be varied to suit the specific fluid that is being
contained in the fluid storage and dispensing package; (v) the
fitment seal as attached to a tear tab can be easily reinserted to
seal an empty or partially used fluid storage and dispensing
package; (vi) the force required to insert the probe into the fluid
in the vessel is very small, since the fitment seal of the
invention is completely removed; (vii) the fitment seal of the
invention can move up and down with respect to the fitment without
affecting the sealing action of the fitment seal, i.e., the seal
integrity is not affected by a relaxation of the vertical clamping
force, in consequence of the extended vertical engagement of the
seal's downwardly extending cylindrical wall with the inside
surface of the fitment.
[0230] Another aspect of the invention relates to a cap adapted for
engagement with a liner-based fluid storage and dispensing package,
as a closure for the package.
[0231] FIG. 25 is a schematic perspective view of a cap 370 for a
fluid storage and dispensing package, featuring anti-rotation
structure on the side wall of the cap. The cap 370 as shown
includes a main cap body 372 including a side wall 374 of
cylindrical form, and a circular top wall 376. The side wall 374
features circumferentially spaced-apart cut-outs 380 extending
upwardly from the bottom edge of the side wall 374 to an
intermediate portion 378 of the side wall. These cut-outs in the
embodiment shown are of generally rectangular shape, and at an
upper end thereof are connected to generally downwardly depending
anti-rotation finger elements 382. Each finger element 382 has an
elongate strip portion 384 that is biased in the absence of force
thereon to an outwardly flared position, and terminates at a lower
end thereof in a radially inwardly extending lug element 386. The
finger elements 382 may be formed integrally with the body of the
cap, or they may be formed a separate elements that are
subsequently secured to the body of the cap, in the cut-outs
380.
[0232] The cap 370 may be part of any suitable material of
construction. In specific embodiments, the cap is suitably formed
of a polymeric material, such as polyethylene, polypropylene,
polytetrafluoroethylene, or other suitable material of
construction.
[0233] FIG. 26 is a schematic view of a fluid storage and
dispensing vessel 390 and associated cap structure matably
engageable therewith. The vessel 390 as shown has a neck 392 in
which has been formed a circumferentially extending band of the
spaced-apart locking cavities 394. In this illustrated embodiment,
the locking cavities 394 are of square shape, to cooperatively made
with lugs 386. As shown, the cap body 372 is fabricated so that the
finger elements 382 are biased outwardly, with the elongate strip
portion 384 depending downwardly away from the cap body, out of
engagement with the locking cavities 394.
[0234] FIG. 27 is a schematic view of a fluid storage and
dispensing vessel and associated cap structure and connector body
structure, showing the cooperative character thereof.
[0235] The fluid storage and dispensing vessel 390 as previously
described is fabricated with a series of locking cavities 394 on
the outer surface of its neck portion. The cap 372 is overfitted by
the connector body 396, with the cylindrical wall of the connector
body bearing on the finger elements of the cap, so that the lug 386
of each finger element lockingly engages a corresponding locking
cavities 394 on the neck of the fluid storage and dispensing vessel
390.
[0236] Thus, when the dispense connector is engaged with the cap,
the cylindrical side wall of the connector slides downwardly over
the cap, and forces the finger elements 382 radially inwardly so
that the lugs 36 cooperatively made with the locking cavities in
the outer surface of the neck region of the vessel 390. By this
arrangement, the cap is prevented from being unscrewed from the
neck of the vessel, while the connector is engaged with the
cap.
[0237] Another anti-rotation structure for a cap adapted for
engagement with a liner-based fluid storage and dispensing package,
as a closure for the package, is shown in FIG. 28.
[0238] FIG. 28 is a perspective view of a fluid storage and
dispensing package, featuring anti-rotation locking structure 404
on the neck region 402 of the vessel 400, with an associated cap
406 and a connector 408. As shown, the vessel neck region 402
features threading thereon, with which complementary threading on
cap 406 is threadably engageable. On its exterior surface, the cap
406 has an outwardly extending tab 407, which is locked by the
connector 408 when the connector is engaged with the cap. The
connector body in such engagement functions to bend the tabs
inwardly, to thereby activate the locking structure. After such
activation, when the cap is rotated after the connector has been
engaged therewith, the tabs will be blocked by a tooth of the
ratchet structure 404, thereby preventing the cap from being
removed from the vessel.
[0239] When the connector is removed from the cap, the tab
element(s) on the cap will spring back to their outwardly biased
position, out of position for engagement with the ratchet structure
404.
[0240] The tabs 407 on the cap thus are fabricated so that they are
normally biased to an outwardly extended position, out of
engagement with the ratchet structure 404. It is only when the tabs
are compressed to a radially inward position that they become
available for locking engagement with the ratchet structure
404.
[0241] FIG. 29 is a perspective view of the fluid storage and
dispensing vessel and associated cap and connector structure of
FIG. 28, showing the details thereof. The various parts and
features in FIG. 29 are correspondingly numbered to those of FIG.
28. In the position shown in FIG. 29, the tab 407 on the cap 406
has been translated by connector 408 to a position at which
rotation of the cap is blocked by the ratchet structure 404.
[0242] FIG. 30 is a perspective view of a cap 406 of the fluid
storage and dispensing vessel of FIG. 28, showing the tab 407 in
its normal outwardly biased position.
[0243] FIG. 31 is a top plan view of the cap 406 of FIG. 30,
showing the tab 407 in its normal outwardly biased position.
[0244] FIG. 32 is a perspective close-up view of the fluid storage
and dispensing vessel 400 of FIG. 28, showing the details of the
anti-rotation locking structure 404 on the neck region 402 of the
vessel. The neck region 402 may be provided as shown with threading
that is complementary to the threading on an inner surface of the
cap, whereby the cap may be engaged with the neck of the
vessel.
[0245] By the structure shown in FIGS. 28-32, a simple arrangement
is provided for preventing the cap from being removed from the
vessel, while the connector is attached to the cap.
[0246] Another anti-rotation structure for a cap adapted for
engagement with a liner-based fluid storage and dispensing package,
as a closure for the package, is shown in FIGS. 33-36. In this
embodiment, they locking structure includes a projection on the
vessel neck region that fits into a cut-out on the lower part of
the cap when the cap is screwed into final position on the vessel.
The locking structure in this embodiment is independent of whether
the connector is installed on the cap or not. The cap can be
unlocked in either by squeezing the cap on opposite sides thereof,
90.degree. from the locking structure, to deform the
cross-sectional shape of the cap to an oval or ovoid form, or by
using a suitable removal tool.
[0247] As another variation, the locking structure may be designed
such that it can be torn off by pulling on a tab. The tab would be
covered when the connector is installed, thereby requiring removal
of the connector from the cap, before the cap itself can be
removed.
[0248] FIG. 33 is a perspective view of a fluid storage and
dispensing vessel 414, featuring anti-rotation locking structure
418 on the neck region 416 of the vessel. The vessel 414 itself may
be formed of any suitable material of construction, and then a
preferred embodiment, the vessel is formed of a polymer such as
polyethylene, polypropylene, or polytetrafluoroethylene. The
anti-rotation locking structure 418 is constituted by a vertically
upstanding post provided on the shoulder of the vessel 414, at the
neck region of the vessel. The neck of the vessel may, as
previously described, be provided with suitable threading or other
matable engagement structure, to accommodate coupling with the cap,
in use of the vessel.
[0249] FIG. 34 is a perspective view of a cap 420 engageable with
the anti-rotation locking structure on the neck region of the
vessel of FIG. 33. The cap features a lower end portion having a
lesser wall thickness than the side wall portion of the cap above
such lower end portion, between circumferentially spaced-apart full
thickness spar elements 424, thereby defining a series of the
circumferentially spaced-apart channels 422.
[0250] FIG. 35 is a perspective view of the cap 420 of FIG. 34, as
engaged with the locking structure 418 on the neck region of the
fluid storage and dispensing vessel 414 of FIG. 33. As shown, the
spar element 424 blocks the rotational movement of the cap 422 to
the presence of the post locking structure 418 in the channel 422
of the cap.
[0251] FIG. 36 is an elevation view of the cap 420 of FIG. 34, as
engaged with the post locking structure 418 on the neck region of
the fluid storage and dispensing vessel of FIG. 33.
[0252] By such arrangement, the cap 420 is readily engaged with the
neck of the vessel 414, and secured in a locked position, as a
safeguard against removal thereof from the vessel.
[0253] Another anti-rotation structure for a cap adapted for
engagement with a liner-based fluid storage and dispensing package,
as a closure for the package, is shown in FIGS. 37-39. In this
embodiment, the locking structure includes vertical tab projections
on the vessel neck region that block protrusions on the lower part
of the cap when the cap is screwed into final position on the
vessel.
[0254] FIG. 37 is a perspective view of a fluid storage and
dispensing vessel 430, featuring anti-rotation locking tabs 434 and
436 on the neck region 432 of the vessel. The neck in 431 of the
vessel may be provided with threading or other engagement structure
for a coupling of the cap thereto. The tabs 434 and 436 extend
upwardly from the vessel surface, as shown.
[0255] FIG. 38 is a perspective view of a cap 440 coupled to the
neck of vessel 430, with protrusion 442 of the cap being engaged
with the anti-rotation locking tab 434 on the neck region of the
vessel. The cap in this embodiment is overlaid by the connector
444.
[0256] FIG. 39 is a perspective view of the cap 440 of FIG. 38,
showing the locking protrusions 442 circumferentially spaced-apart
from one another at the lower edge portion of the cap.
[0257] In another aspect of the invention, the currently employed
breakseal is replaced by two seals, i.e., a non-wetted gas seal and
a readily removable liquid seal. The gas seal is constituted by a
circular ring that is positioned between the cap and the top of the
fitment of the liner. This seal maintains pressure, as applied
between the rigid overpack and the liner, from seeping into the
center area of the cap where it otherwise could escape by egress
from the connector probe entry opening. Gas pressure is required to
squeeze the liner in order to effectuate compression of the liner
to force the contained fluid out through the probe dispensing
assembly.
[0258] The liquid seal is a simple plug that keeps the liquid from
escaping the liner at the fitment. This plug is readily removed by
either one of the following techniques.
[0259] In a first structural arrangement, the liquid seal is
attached to the bottom of a tear tab on the cap. The liquid seal is
removed when a weakened circular area in the top center of the cap
is pulled and torn free. The probe assembly then can be installed
directly into the vessel without removing the cap and without
breaking through a seal. A separate plug with an O-ring seal is
provided to close the pressurization hole in the cap. This plug
preferably is attached to the tear tab, by means of a small strap
or other connection structure, such the plug is readily removed
when the tear tab is removed. This provision of a plug to seal the
pressurization hole enables the pressurization hole to be
completely molded with good sealing surfaces.
[0260] In a second arrangement, the liquid seal is attached to the
bottom of a small plug located in the center of the cap. The liquid
seal is removed when the plug is unscrewed from the cap. The probe
assembly can then be installed. Additionally, removal of the plug
uncovers the hole for access by the probe. Since the pressurization
hole is covered and gasketed by the unscrewable center plug, the
pressurization hole can be molded completely with good sealing
surfaces.
[0261] By these arrangements, the probe of the dispensing assembly
may be installed without breakage or tearing of a seal. This
illuminates the requirement of high puncture forces required in
current practice to puncture the breakseal, and avoids the creation
of particles that could otherwise enter the high purity fluid in
the liner. Additionally, the pressurization holes in the cap in
both of the foregoing arrangements are able to be molded smoothly
and resultantly to be effectively sealed without leaking.
[0262] In a further embodiment, the cap is formed of polyethylene
coated with a coating of polytetrafluoroethylene to achieve the
liquid seal. In another modification, an additional flat gasket is
pinched between the inside bottom surface of the cap and the top of
the gas seal gasket to effect the liquid seal.
[0263] Additional sealing arrangements in specific embodiments
include the use of the plug with two O-rings to seal the inside
diameter of the fitment of the liner, to create the liquid seal. A
separate plug may be utilized in this arrangement, to seal the
pressurization hole. As another alternative, a center plug formed
of polytetrafluoroethylene is provided, which is screwed into the
main cap. The plug creates a face seal on the top of the fitment of
the liner, to create the liquid seal. A separate plug may be
provided to seal the pressurization hole. As yet another variation,
a solid polytetrafluoroethylene center plug may be provided, with
an additional wedging mechanism to force the center plug against
the top of the fitment to hold it in place. The
polytetrafluoroethylene plug effects a face seal with the top of
the fitment of the liner to create the liquid seal. As in the other
arrangements, a separate plug may be provided to seal the
pressurization hole.
[0264] Additional embodiments of the invention are shown in FIGS.
40-43, showing various handle-actuated connector removal
arrangements of liner-based fluid storage and dispensing packages
having connectors attached thereto, wherein the connector handles
are manually operable to effect disengagement of the connectors
from the respective fluid storage and dispensing packages.
[0265] FIG. 40 is a perspective view of a portion of a fluid
storage and dispensing system 450 including a fluid storage and
dispensing vessel 452 to which is secured a dispense connector 454.
The dispense connector 454 utilizes a single post 460, 461 at each
of the respective sides of the connector. Handle 455 is secured to
the housing of the connector, and is coupled at its respective ends
to radial cams 456, 457. As the handle 455 is rotated, the radial
cams 406, 407 push the pivot clamps 458 inwardly (pivot clamp 458
being shown, and the system being symmetrically constructed with an
additional pivot clamp on the side of the connector 454 opposite
the sign shown in FIG. 40). With continued rotation of the handle,
the radial cam at each end of the handle pushes on a respective
post 460, 461. Each of such posts is spring-loaded, with spring 462
on post 460 and a spring 463 on post 461. The spring-loading of
each post ensures that the handle moves back into position after
use. The posts serve to transfer torque from the handle to exert a
downward force on the fluid storage and dispensing vessel 452. The
springs on the respective posts, together with torque springs,
ensure that the handle is returned to its original orientation.
[0266] FIG. 41 is a perspective view of another fluid storage and
dispensing system in which a connector 474 is coupled to a fluid
storage and dispensing vessel 472. This embodiment utilizes two
posts on each side of the connector. The two posts 478, 479 are
shown at the left side of the system as depicted in FIG. 41, with
one of the posts (post 481) being shown on the right side of the
system as depicted in the drawing.
[0267] The handle 476 is secured to the housing of the connector,
with respective ends being coupled to cams 484 that are used to
transfer the torque of the handle into a vertical force. As the
double post piece part moves downwardly under the action of the
cams 484, a profile on the inner side of such part ramps up to
press on the pivot clamps 483 in a linear motion. Linear springs on
each post, together with torque springs, return the handle to its
original orientation subsequent to manual translation thereof.
[0268] FIG. 42 is an elevation view of a fluid storage and
dispensing system 490 according to another embodiment, in which a
linkage arrangement is employed to convert the torque up the handle
496 into a vertical force. The linkage centers the force on the
double post part 487, 488 associated with posts 485, 486, and allow
a single torque spring to be used to return the handle and double
post part to a closed position. This arrangement also utilizes a
linear cam to open the respective pivot clamps 491, 493, and a
double post to "push off" the fluid storage and dispensing vessel
492.
[0269] FIG. 43 is an elevation view of a fluid storage and
dispensing system according to another embodiment of the invention.
The system 500 includes a fluid storage and dispensing vessel 502,
to which is coupled a connector 504 having on each of opposite
sides thereof a side platform 505 associated with a corresponding
pivot clamp 508. The side platform in each instance includes a
double post 506, 507 (the side platform opposite that shown on the
right hand side of FIG. 43 being symmetrically constructed and
arranged).
[0270] To release the connector 504 from the fluid storage and
dispensing vessel 502, a user would secure both hands on respective
sides of the connector body, with the palms in contact with the
respective side platforms 505, and gripping the connector body for
support. The user that applies pressure to the respective side
platforms 505 in a squeezing action. The respective posts activate
the pivot clamps 508 with a linear cam, and the four posts then
push off the vessel 502.
[0271] The invention also contemplates in another aspect a cap/code
ring assembly with locking tabs and a fluid storage and dispensing
vessel matably engageable with such assembly, where in the vessel
features locking teeth and a mis-connection interference
feature.
[0272] FIG. 44 is an exploded perspective view of such a fluid
storage and dispensing package, featuring keycode structure and a
mis-connection interference structure to prevent engagement of the
fluid storage and dispensing package with an incorrect dispensing
connector.
[0273] As shown in FIG. 44, a fluid storage and dispensing a vessel
510 is provided with a neck 512 having threading F on the exterior
surface thereof, for cooperative engagement with threading on an
interior surface of the cap D. The vessel 510 features an array of
locking teeth G on its upper surface in the vicinity of the neck
512, and an interference feature H on such upper surface in the
vicinity of the neck 512 for preventing mis-connection of a
dispensing connector to the vessel.
[0274] The cap D features locking tabs E on a lower portion of the
cap. The cap is provided with two or more horizontal locking tabs,
circumferentially spaced apart from one another. These locking tabs
slip over the locking teeth on the vessel neck when the cap is
being screwed on, but grab or "bite" into the locking teeth when
attempt is made to unscrew the cap. The cap preferably is made of a
flexible material of construction, such as for example
polyethylene, polypropylene, polytetrafluoroethylene, or the
like.
[0275] The locking tabs on the cap are pushed in or activated by a
ring extension C of the upper code ring A. In consequence of the
flexible nature of the plastic cap/code ring assembly, the cap's
locking structure can be forced over the threads and locking teeth
of the vessel 510 when the cap is screwed on the neck of the
vessel. When the cap subsequently is unscrewed, the locking tabs
and teeth on the vessel begin to one another due to the angles of
their respective mating faces. The interference of these two
features locks the cap to the vessel.
[0276] The cap can be removed when necessary by first removing the
code ring and its attached lower tab activation ring, code ring
extension C. An instrument such as a screwdriver can be inserted
into slots B in the code ring A, and the code ring then can be
prided off. Once the code ring is removed, the locking tabs can be
moved away from the locking teeth on the vessel, following which
the cap is easily unscrewed. Since the code ring then is no longer
attached to the cap, it cannot be reused on another vessel.
[0277] The mis-connection interference feature H is located on the
top surface of the vessel 510 and projects upwardly from such
surface. This interference feature is located so that a smart probe
assembly will not be contacted when the probe assembly is
installed, but the interference feature will otherwise interfere
with an incorrect connector during attempted installation
thereof.
[0278] The features of the fluid storage and dispensing assembly of
FIG. 44 permit the cap and vessel to the assembled in a ready
manner, but prevents them from being disassembled by normal means.
The illustrated arrangement permits removal of the cap by a common
tool, viz., a flat blade screwdriver, and the process of removal
renders the cap unsuitable for further use. The vessel connector
interference feature prevents an incorrect connector from being
installed on the vessel.
[0279] FIG. 45 is a perspective view of the cap and code ring
assembly 515 of the fluid storage and dispensing package shown in
FIG. 44. The assembly includes the code ring A coupled with the cap
D, and with the code ring extension C circumscribing the cap D.
[0280] FIG. 46 is a bottom plan view of the cap and code ring
assembly 515 of the fluid storage and dispensing package shown and
FIG. 44. This view shows the locking tabs being pushed in by the
code ring extension C, with the cap D positioned in the cap/code
ring assembly. By the arrangement shown in FIGS. 44-46, the cap is
removable from the vessel when necessary, while avoiding the
possibility of deleterious reuse of the cap and the keycoding
structure ensures that coupling of a correct dispensing connector
is achieved and that mis-connection of an inappropriate dispensing
connector is avoided.
[0281] Other aspects of the invention relating to deformation,
destruction or removal of threads, for the purpose of preventing
reuse of caps, or their removal from a fluid vessel variously
involve: screw-on caps with toothed locks that cut or tear the area
above the threads, as well as arrangements in which attempted
removal of the cap results in ripping or destruction of threads;
two-piece caps that thread on the neck of the vessel with a detent
stop, whereby the threads peel off under high torque when the cap
is removed; screw-on caps with anti-rotation features that prevent
the cap from being unscrewed, such as arrangements in which the cap
has a tear area above the thread that is activated by unscrewing,
in which the remaining threaded area can be removed by pulling a
vertical tear tab; two-piece threading; tear-off threading; helical
threadings that unscrew themselves; formed threading that undergoes
deformation when the cap is removed; and threading on the cap which
is additionally formed over large features on the vessel neck at a
chemical supplier facility, whereby the cap threading is destroyed
when the cap is removed from the vessel.
[0282] Additional aspects of the invention relating to cap
modification to prevent removal and/or reuse of the cap include the
following: provision of caps with clips that require a tool to
press them into position, wherein the cap when the clip is pressed
into position is able to be installed or removed in a ready manner;
provision of pins holding the cap in place, with a removal tool
being adapted to which the pins out of the position securing the
cap; provision of a screw-on cap with pressed-in pins to prevent
unscrewing of the cap, wherein the pins can only be removed with a
special tool in order to unscrew the cap; provision of a screw-on
cap with anti-rotation lock, wherein the code ring must be removed
to unlock the cap, and wherein the like includes pins that must be
pulled up or tabs that must be squeezed together to release the
lock; provision of a screw-on cap with an anti-rotation lock, in
which the code ring must be removed to unlock the cap, wherein the
anti-rotation lock is a ratchet type, with teeth on the cap and
teeth on the vessel, whereby high torque is required to remove the
cap, using a special tool; use of a code ring torque tool having
grab features are "torque on" only, i.e., the tool grab features
will not grab when attempting to unscrew the cap, so that a code
ring must be removed to remove the cap; provision of a second ring
on the cap to attach the cap to the vessel, wherein the ring breaks
off when the cap is removed; provision of a snap-on cap with a tear
tab to remove the cap, wherein the cap will not lock on once the
tear tab is removed; provision of a tear ring that snaps over,
wherein the snap is at the tear ring; provision of a snap-on cap
that requires a special tool to cut it off the vessel; provision of
a shrink cap or wrap, which is heat activated or went-to-dry
activated; provision of a non-threaded cap that is formed over
features on the vessel neck at the chemical supplier facility,
wherein interference between the vessel features and the cap
retains the cap in position, so that the cap is removable only with
a tool or otherwise by prying it off, and removal of the cap rips
off the formed areas of the cap, so that part of the cap remains on
the vessel and can be removed with a special tool or vertical tear
tab; provision of a cap constructed and arranged so that cap
removal alters the code ring so that the cap will not work with the
dispense probe again; provision of a code ring that is cut by the
installation of the dispense probe, so that the code ring falls off
when the dispense probe is removed; provision of a magnetic
structure that is broken off when the dispense probe is removed;
fabrication of the vessel with a feature that mates with the recess
in the cap, so that when the cap is removed, the vessel feature
breaks off and becomes lodged in the cap recess, and the cap then
cannot be used with a new vessel; fabrication of a cap with
break-off tabs that hold the cap in position on the vessel and
slide down complementary grooves in the vessel when installed, and
break off when the cap is removed; fabrication of a cap with a
built-in dye release mechanism operating to release dye when the
cap is removed; fabrication of the cap with a security-type tag
that breaks upon removal of the cap, so that empty vessels during
broken tags will evidence misuse; and provision of radio-frequency
identification (RFID) integrated circuit chips in both the vessel
and the cap, in conjunction with monitoring software that prevents
an operator from switching caps.
[0283] FIGS. 47-56 show additional dispensing assembly probe
connector embodiments of the invention, having an improved
ergonomic character to facilitate removal of the probe connector
from the fluid storage and dispensing package. Currently employed
probe assemblies can require the application of 20-30+ pounds of
force to effect removal of the probe assembly from the container.
The ergonomics of the removal operation are uncomfortable and
awkward for the operator, requiring the container to be held in one
hand while simultaneously the other hand must pinch together the
locking clamps and lift the probe assembly from the container. The
unlatching of the clamps is made more difficult by the fact that
the locks do not disengage until the locking clamps have been fully
depressed. An operator can often struggle unsuccessfully to remove
a probe assembly only to find that the locking clamps have not been
fully depressed. The probe assemblies of FIGS. 47-56 are designed
to minimize such difficulties, and provide an ergonomically
improved probe assembly removal.
[0284] FIG. 47 is a perspective view of a connector 550 of a
dispensing assembly, according to another embodiment of the
invention. The connector 550 includes a connector body 552 to which
is coupled an ergonomically shaped handle 556 interconnected with
cams 558 and 560. The cams 558 and 560 in turn coat with pivot
clamps 562 and 564, to open the pivot clamps for removal of the
connector from the cap 554 when the handle is in a vertically
upright position, and to maintain the pivot clamps in a closed
condition when the handle is in its down position, such as is shown
in FIG. 47.
[0285] In this embodiment, the handle is biased by a return spring
(not shown) in the connector body, to a handle down position. The
handle serves two functions, holding the latches open when the
handle is in the up position, and providing an ergonomically
enhanced handle for manual gripping and application of force to
separate the connector from the package with which it is
associated.
[0286] The handle has two attached cam surfaces close to its pivot
axis. As the handle is rotated from its starting position, angled
downwardly adjacent to the housing of the connector, to a vertical
position, the cams deactivate the pivot clamps that hold the
connector to the cap of the package. As long as the handle is in a
vertical position, the pivot clamps are held open. When the handle
is in a vertical position, it can be manually pulled upwardly to
separate the connector from the cap and associated container. When
the handle, in the vertical position, is released, torsional
springs attached to the cams return the handle to its starting
position and reactivate the pivot clamps. By this arrangement, the
operator is allowed to concentrate fully on separating the
connector from the package, without wasting effort on opening the
pivot clamps while exerting pulling action on the connector to
separate it from the package.
[0287] Each of the cams in this embodiment has a cam profile with a
rotation center at the handle pivot, in which the contact surface
profile of the pivot clamp is matched to that of the handle. A
torsional spring interconnects the housing of the connector and the
handle, and may be of any suitable type that effectively biases the
handle to the desired down position. In this embodiment, the handle
cams and pivot clamps are always in contact with one another.
[0288] FIG. 48 is another perspective view of the connector of FIG.
47, wherein the same parts are correspondingly numbered with
respect to those of FIG. 47, showing the features and details of
the handle, connector and pivot clamp elements.
[0289] In a modification of the dispensing assembly connector shown
in FIGS. 47 and 48, a small wheel or ball may be provided between
the cams and pivot clamps to reduce friction, such as by providing
complementary tracks in the cams and pivot clamps, containing ball
bearings in the tracks to minimize friction. Alternatively,
wear-reducing coatings may be applied to the cams and pivot clamps,
at their bearing surfaces, for the same purpose. Such provisions
system in ensuring that the return spring effectively returns the
handle to its starting position.
[0290] FIG. 49 is a front elevation view of a connector 568 of a
dispensing assembly, according to yet another embodiment of the
invention. In this embodiment, an ergonomically enhanced handle 569
is mounted on a connector body 570 so that the handle is pivotally
movable in relation to the connector body. The handle is connected
with linkages 572 and 574 to the pivot clamps 576 and 578. The
connector body 570 is mounted on cap 582 coupled in turn to vessel
580.
[0291] The handle in the FIG. 49 arrangement is associated with a
return spring (not shown) and push off features. The handle in this
arrangement serves the functions of opening the latches, providing
an ergonomically enhanced member for manual gripping and
application of force to separate the connector from the container,
and a riding the linkages that activate the connector push off
features. As the handle is pivotally translated up or delay, the
linkages drive the pivot clamps to an open position as well as
transmitting force and movement to the push off features.
[0292] Thus, as the handle is rotated from a horizontal starting
position to a vertically upstanding position, the linkages attached
to the handle rotate the vertical latch linkages to release the
pivot clamps. Push off features in the top of the latch linkages
make contact with the cap 582. As the vertical latch linkages
continue to rotate, they push the cap, with the container attached,
out of the connector body.
[0293] This arrangement reduces the force of separation by breaking
the static friction of the O-ring seals, moving the connector
upward and reducing the distance it must be pulled before it is
free of O-ring drag. The pivot clamp unlocking feature of this
arrangement allows the operator to concentrate fully on separating
the connector assembly from the container, without effort in
opening the pivot clamps. The handle facilitates the ready
application of the necessary separation force. When released, the
handle will rotate through an arc of 40-60.degree. to a "locked on"
position, by action of a torsional spring.
[0294] FIG. 50 is a perspective view of the connector of FIG. 49,
wherein all parts elements are correspondingly numbered.
[0295] FIG. 51 is a side elevation view of a connector 600 of a
dispensing assembly, according to yet another embodiment of the
invention, in a first position of the handle 606. The handle 606 is
mounted on connector body 602 and coupled with large secondary cams
608 that are interconnected with clamp activated cams of the type
shown in FIGS. 47 and 48. The secondary cams make contact with the
top of the container and assist in separating the connector
assembly from the container as the handle is rotated to a vertical
position.
[0296] The addition of the large secondary push off the cams in
this embodiment reduce the force of separation by breaking the
static friction of the O-ring seals between the connector and the
cap, and translating the connector upwardly, thereby reducing the
distance that it must be pulled before it is free of O-ring drag.
The connector is the unlocked from the cap when the handle is
rotated to the vertical position, and a torsional spring in the
handle returns the handle to the lowered starting position when the
handle is released. The large secondary push off cams thus provide
a push off action against the container 604, and asked to push the
container out of the connector.
[0297] FIG. 52 is a side elevation view of the connector 600 of
FIG. 51, in a second, vertical position of the handle. In this
position, the push off cam 608 bears against the top surface of the
container 604, to provide the push off action for disengagement of
the connector from the cap and associated container.
[0298] FIG. 53 is a side elevation view of the connector 600 of
FIG. 51, in a third position of the handle 606. In this position,
the pivot clamp 610 is shown. Thus, movement of the handle upwardly
to a vertical position effects disengagement of the pivot clamps
from the cap, by action of the primary cams, while the secondary
cams engage the surface of the container and provide the push
off/disengagement action.
[0299] FIG. 54 is an exploded view of a portion of a dispense
connector according to a further embodiment of the invention. The
dispense connector in this embodiment includes a handle A that is
mounted on connector housing B and is attached to cam F by fastener
C. The handle is biased to a down engaged position by "handle
return" torsion spring D. Pivot bolt E interconnects the handle A
and the cam F. The pivot clamps G are provided at each of the sides
of the connector housing B, and serve to latch and unlatch the
connector from the cap on the fluid storage and dispensing
container.
[0300] FIG. 55 is a simplified spatial view of a connector 700 of a
dispensing assembly according to yet a further embodiment of the
invention. The connector 700 includes a handle A too which is
coupled a "handle return" torsional spring B and a main drive
linkage C. Each main drive linkage C is connected to a push off
feature D by means of vertical latch linkage E. The push off
feature D and vertical latch linkage E are connected to the lock
arms G, which engaged the cap F having a coding ring H secured
thereto.
[0301] FIG. 56 is an assembled perspective view of the connector of
FIG. 55, with a connector body I (not shown in FIG. 55) being
illustrated, and with all other parts and components of FIG. 56
being numbered correspondingly with respect to the same features of
the connector of FIG. 55.
[0302] The features and advantages of the present invention are
more fully shown by reference to the following non-limiting
examples.
Example 1
[0303] A test was run to determine the efficacy of a pressure
transducer for empty detect monitoring in pressure-mediated
dispensing of fluid from a liner-based fluid storage and dispensing
system of a general type as described in connection with FIG. 3
hereof, to determine the suitability of a specific liner-based
fluid storage and dispensing package for dispensing photoresist as
part of a dispense train including a downstream dispenser having a
process filter upstream thereof. As used in such context, the term
"downstream dispenser" refers to process equipment that is
associated with a fluid-utilizing tool to supply fluid to the tool
in a predetermined amount or at a predetermined rate. The
downstream dispenser made for example include a final dispense
pump, e.g., a compressible tube pump, or a flow-metering device,
injector, ejector, compressor, the lower, spray head, nozzle,
etc.
[0304] The dispensing operation in this application must supply the
required photoresist flow through the process filter and into the
downstream dispenser, while maintaining a positive downstream
dispenser suction pressure and a consistent dispense profile at
end-of-dispense (EOD), and chemical utilization desirably on the
order of 99.75%. The liner utilized in the fluid storage and
dispensing system was 4 L in volume, and the greater than 99.75%
utilization of chemical required a residual amount of chemical in
the liner that is less than 10 mL.
[0305] A Mykrolis Impact PCM filter (0.02 .mu.m) was utilized in
the test. The dispense recipe was: 1 mL dispense over 1.5 seconds,
15 second dispense pump suction stroke duration, and a dispense
shot cycle recipe sequence repeated once per minute. The drive
pressure exerted on the liner to effect pressure dispensing was for
example about 7 psig.
[0306] The test viscosities selected for the test were 1, 3, 10, 20
and 30 centipoise, with two repetitions of each viscosity being
tested. Propylene glycol was blended to the required viscosities,
as the test liquid. During the last 500 mL of the dispense, three
system pressures, along with the dispense profile mass or recorded.
The dispensing pressure was set at 10 psig, as mentioned, with the
test being terminated when the dispense to liquid pressure was 1.3
psig. Such dispensing pressure and termination pressure can be
varied, and the dispensing operation could for example employ a
dispense pressure of 10 psig and a termination pressure of 4.3
psig.
[0307] After each test, the residual chemical was measured by a
liner removal and liquid squeeze out and measurement. The test was
designed to go to a pressure below that which would be used in a
coating tool, such that decay in the dispense profile mass can be
identified, and actual utilization prior to the onset of dispense
profile decay determined.
[0308] It was also an objective of this test to allow sufficient
drive pressure to prevent negative downstream dispenser suction
pressure, which was expected to lead to dissolved gas liberation
and micro-bubbling, with dispense profile decay. Based on the
photoresist viscosity, filter selection and flow circuitry in the
dispense train, it was expected that the drive pressure and empty
detect pressure would be selected for optimum dispense profile and
utilization. By mapping three system pressures, it was expected
that the optimum location for the empty detect pressure transducer
would be identified.
[0309] The test apparatus, in addition to the 4 L liner-based
package, included dispensing flow circuitry discharging to a 1500 g
scale. In the flow circuitry were disposed an Entegris PFA petcock,
an Entegris model 4210 0-30 psig Pdcr, a 200 mL reservoir 45 mm in
diameter, coupled with a vent/drain line containing an SMC
LVH20L-S07 manual PFA valve, the aforementioned Mykrolis Impact PCM
filter (0.02 .mu.m), an Iwaki Tube-Phragm PDS-105HB-EPW2 5 mL
dispense pump, an Omega PX 303-050A5V 0-50 psia Pdcr, a Nupro 0.25
inch stainless steel AOV valve, and a CKD 0.25 inch PFA AOV valve,
in series. The dispense line was a 0.25 inch PFA tube dispense
tube, with a 0.125 inch PFA tube being deployed between the final
valve and 1500 g scale.
[0310] After mixing to the test condition viscosity, the viscosity
was measured before pouring the test liquid into the liner and
after the test as dispense effluent. The testing began at the 30
centipoise nominal viscosity, the most taxing on the system, and
after two test repetitions the procedure was continued with the
other viscosities after reblending. The procedure was the same in
all runs, as including the following steps set out for the first
repetition at 30 centipoise.
[0311] Using a propylene glycol viscosity graph, it was determined
that a 90% propylene glycol and 10% water solution will provide a
viscosity of about 32 centipoise. 3600 mL of Sierra brand propylene
glycol antifreeze was mixed with 400 mL of water, and the viscosity
was measured by a Cole-Parmer spinning disk viscosimeter. The
viscosity was measured at recorded at 23.degree. C. as 25
centipoise. 400 mL of the solution were introduced by funnel to a 4
L liner. A smart cap was coupled with the liner and the liner then
was connected to a dispense probe on the test apparatus.
Pressurizing air at 10 psig was connected to the dispense probe for
pressurizing of the liner. 3500 mL of liquid was simultaneously
dispensed through the reservoir separator (which enabled separation
and venting of gas from the liquid being dispensed, to achieve a
zero or near-zero headspace condition), and the filter vent by the
SMC LVH 20L-S07 manual PFA valves, and the system control board was
started. The last 500 mL of the dispense was logged. The test was
terminated when the Entegris model 4210 pressure transducer reached
1.3 psig. The PFA petcock then was closed and the liner taken off
line. The liner was removed and the contents were measured after
the latter was cut and the remaining propylene glycol was removed,
being weighed before and after squeegee removal. The 500 mL
dispense effluent was measured for viscosity and recorded (28
centipoise at 23.degree. C. was determined for the first run). A
new liner then was filled with test fluid and the process was
repeated.
[0312] FIG. 57 is a graph of pressure, in psig, as a function of
time (time of day), showing the pressure of the dispensed liquid
(curve A), the pressure of the pressurizing gas (curve B), the
inlet downstream dispenser pressure (curve C) and weight, in grams,
of cumulative dispensed liquid measured at the scale (curve D), for
representative Run 1 at viscosity of 25 centipoise/28 centipoise,
during a time period of 13:12:00 to 18:00:00.
[0313] FIG. 58 is a graph of pressure, in psig, as a function of
time (time of day), showing the pressure of the dispensed liquid
(curve A), the pressure of the pressurizing gas (curve B), the
inlet downstream dispenser pressure (curve C) and weight, in grams,
of cumulative dispensed liquid measured at the scale (curve D), and
the linear (scale) curve (curve E), for representative Run 1 at
viscosity of 25 centipoise/28 centipoise, during a time period of
17:02:24 to 17:45:36.
[0314] Clear evidence of dispense profile decay occurs a good 20
minutes before the 1.3 psig end-of-dispense (EOD). This amounts to
20 mL of photoresist and 20 300 mm wafers that would be affected as
a result of dispense profile decay. The EOD zoom graph (FIG. 58)
shows the downstream dispenser in pressure goes below atmospheric
pressure during this EOD portion. The downstream dispenser in
pressure decays to -4 psig at final empty. This is a clear
indication that when dispensing 30 centipoise photoresist with this
0.02 .mu.m Mykrolis filter with this downstream dispenser recipe,
the drive pressure desirably is at least on the order of about 15
psig for optimum operation.
[0315] The downstream dispenser in pressure is much lower and
susceptible to spikes as a result of the pressure decay across the
filter, suggesting that the primary pressure transducer be
positioned downstream of the filter, e.g., in the downstream
dispenser itself.
[0316] The invention in another aspect relates to a connector for a
material storage and dispensing package, such as a liner-based
package, in which the connector has a safety locking device
associated therewith.
[0317] If a material storage and dispensing vessel having a
connector secured thereto is disassembled while the vessel contains
a material at super-atmospheric pressure, the resulting release of
pressure can result in pressure-mediated dispersion of vessel
contents to the ambient environment of the vessel. For example, in
the case of a liquid chemical reagent stored in a liner-based
package at a pressure of 30 pounds per square inch (psi), the
disassembly of the connector from an associated vessel can result
in the chemical reagent being sprayed in all directions, posing a
major hazard when the chemical reagent is toxic or otherwise
deleterious in character.
[0318] The invention addresses this safety issue in one embodiment
of the invention, by the provision of a connector having a
safety-locking feature to prevent a user from disconnecting the
connector from the associated vessel while the vessel is under
pressure. A lock and/or pressure relief action therefore is
provided to ensure that the connector is not blown off from a
pressurized package by inadvertent opening or otherwise.
[0319] The invention in one embodiment provides a connector for a
material storage and dispensing package. The connector includes a
main body portion, including a handle mounted on the main body
portion and pivotally translatable thereon, between an up position,
and a down position. The connector is adapted to be coupled with a
material storage and dispensing vessel for closure thereof, and
includes a dispensing assembly for dispensing material from the
vessel, and a pressure relief device operatively coupled with the
handle and adapted when the handle is in the down position to
prevent removal of the connector from the material storage and
dispensing vessel. A stop element is operatively coupled with the
pressure relief device to maintain the handle in the down position
when the handle is pivotally translated to such down position. The
stop element is selectively disengageable to cause the pressure
relief device to vent the vessel to an ambient pressure, and to
allow the handle to be pivotally translated upwardly, with the
connector thereafter being disengageable from the vessel when the
handle is in the up position, whereby disengagement of the
connector from the vessel is enabled to occur at the ambient
pressure.
[0320] In one embodiment of such connector, a pressure relief
device is operatively coupled with the handle at each of opposite
ends thereof. The handle at its opposite ends comprises axle
portions coupled with the main body portion of the connector.
[0321] In another embodiment, the connector includes two stop
elements, and each of the axle portions includes a cam surface
engageable with a corresponding one of the stop elements. Each of
the stop elements comprises a button that is spring-biased to a
locking position preventing movement of the handle, and that is
manually depressible to disengage the button from its locking
position, and thereupon to enable movement of the handle.
[0322] The connector may take any of various suitable forms,
including a connector featuring a pressurizing gas inlet assembly
adapted for flow of pressurizing gas into a vessel when coupled
with the connector. The pressure relief device can include a
three-way valve, or other pressure relief device that is actuatable
to vent the vessel associated with the connector in use, to
thereupon allow the handle of the connector to be lifted to
disengage the connector from the vessel.
[0323] The stop element in one embodiment includes a slide member
that is manually translatable between a locking position engaged
with the handle, and a release position. The stop element
alternatively can include a cylinder that is selectively actuatable
to cause extension of a protrusion element for engagement with the
handle, and is de-actuatable to cause retraction of the protrusion
element disengaging same from the handle. The protrusion element
may be constructed and arranged to engage an axle portion of the
handle, and the protrusion element may be translated by action of a
biasing spring coupled with the protrusion element.
[0324] A further aspect of the invention relates to a material
storage and dispensing package, comprising a material storage and
dispensing vessel, and a connector as described above, coupled with
the vessel for closure thereof.
[0325] The material storage and dispensing package may be of any
appropriate type adapted to the end use for which it is to be
employed. For example, the package may be of a bag-in-drum (BID),
bag-in-bottle (BIB), or otherwise employ a liner for holding the
material that is ultimately to be dispensed. The liner may hold,
for example, a chemical regent such as a photoresist material, or
other material that is adapted to be employed for manufacturing
microelectronic device products. In such adaptation, the material
storage and dispensing package can be coupled to a semiconductor
manufacturing tool or facility, or other end-use equipment or
process system that is consistent with the specific material
dispensed from the package.
[0326] The package including the vessel and the connector may
include a liner in the vessel, with the connector having a dispense
port for coupling to flow circuitry or other transport structure
for delivery of the dispensed material to a locus of use of same.
The connector may also include a pressure-assist port for coupling
to a source of pressurized gas, to exert pressure on the liner in
the vessel for compaction thereof, so that the material-containing
liner progressively is made smaller in volume as the liquid or
other contained material is correspondingly dispensed from the
package.
[0327] The invention therefore contemplates a method of storage and
dispensing of material, in which the material is disposed in a
vessel, and a connector is coupled with the vessel, to form a
containment package, wherein the connector is of a type as
described hereinabove, with a handle that is translatable between a
first locking position in which pressure in the vessel is
contained, and a second position in which the connector is
removable from the vessel without difference in pressure between
the vessel and ambient environment of the package. The method
includes selectively depressurizing the vessel while the handle is
in the first position, to enable the handle to be translated from
the first locking position to the second position.
[0328] It will be apparent from the foregoing that the connector
and the associated vessel can assume a variety of structures and
forms.
[0329] In a specific embodiment, the connector includes a three-way
valve that is connected to the interior volume of the vessel, as
well as to a pressure source and a vent to the ambient environment
of the package, e.g., the atmosphere. Such three-way valve is
normally in an open state, to allow the vessel to be pressurized,
for pressure-dispensing of material from the vessel. For example,
such pressure-dispensing operation may include the imposition of
pressure on the exterior surface of a liner in the vessel, to
progressively compact the liner to force the contents thereof
through the dispensing nozzle, with the dispensing nozzle being
joined to external flow circuitry connected to a downstream
facility adapted to utilize the dispensed material.
[0330] In such embodiment, the connector employs a button, which
may for example be in the form of a switch, lever, or other
manually actuatable element, or alternatively an automatically
actuatable element, that is able to be pressed to shut the pressure
off and vent the vessel to the atmosphere or other ambient
environment of the vessel.
[0331] Such three-way valve safety feature may be integrated into a
connector through the release lever, e.g., a translatable handle of
the connector. The three-way valve can be located on the connector
body, e.g., on a peripheral portion thereof. A notch can be
provided in the release lever to allow the device to open when the
release lever is in a down position. A user then would have to push
the button in to actuate the vessel venting, in order to remove the
connector from the vessel. The button functions to prevent pivotal
rotation of the release lever, so that the connector cannot be
removed from the vessel when the vessel is pressurized, except when
the button is depressed.
[0332] In another embodiment, a three-way pressure relief device is
employed to lock the release lever, by action of a slide member
that engages the release lever in a locked position when the
connector is engaged with a vessel and the release lever is
translated to a down position. The slide then must be translated
upwardly to disengage the slide from the release lever, so that the
release lever can be pivotally rotated to permit disengagement of
the connector from the vessel. The upward translation of the slide
member then will actuate the pressure relief valve to vent the
container and permit safe disengagement of the connector from the
vessel.
[0333] In a further embodiment, a cylinder or linear actuator can
be employed as a locking device for the connector. In one
embodiment, the cylinder would be actuated to extend when a
pressurized condition is present, and the cylinder would retract by
spring biasing action, when the vessel is depressurized or at
ambient pressure.
[0334] Such cylinder device can be integrated into the connector
structure in a horizontal or alternatively in a vertical
orientation. The cylinder device can be fabricated with a cylinder
rod that is extensible, to extend horizontally into the side of the
release lever or pivot clamp cam. The cylinder rod also can be
positioned on the back portion of the connector, and arranged to
extend so as to impart a downward force on the release lever, to
hold it in position during pressurized conditions in the vessel. By
such approach, the release lever can be locked in a closed position
during a pressurized condition in the vessel, thereby preventing
disengagement of the connector until pressure is discontinued and
the vessel drops to a low pressure that will accommodate
disengagement of the connector from the vessel without adverse
occurrence.
[0335] Such safety-locking mechanisms are more fully described
below with reference to FIGS. 59-67.
[0336] FIG. 59 is a perspective view of a connector 800 according
to one embodiment of the present invention. The connector 800
includes a main housing portion 802 having a top main surface 804
on which is disposed a dispensing fitting 805 defining an open end
806 as a dispensing port, to which can be coupled tubing or other
flow circuitry, for conveyance of dispensed material to a
downstream locus of use.
[0337] Also disposed on the top surface 804 of the connector is a
pressurization conduit 806 having a pressurizing medium inlet port
808, for use in introducing pressurizing gas into the vessel when
the connector 800 is coupled with a vessel containing material to
be dispensed. The vessel may for example be of a bag-in-bottle
(BIB) type, in which a pressurizing gas is introduced into the
interior volume of the vessel, flowing into the region of the
interior volume between the interior vessel wall and the exterior
surface of the liner therein. By such action, the pressurizing gas
exerts a compressive force on the liner, progressively compacting
the liner so that the material therein is dispensed from the vessel
under the applied pressure.
[0338] The connector 800 includes a release lever in the form of
handle 810 which has respective axle portions 812 and 814 that are
pivotally secured to the housing 802. This arrangement allows
pivotal rotational movement of the handle 810 from the fully down
position shown in the drawing, to a fully up position in which the
handle is vertically oriented, extending upwardly above the main
body portion 802.
[0339] In this embodiment, two three-way pressure relief devices
816 and 820 are mounted on the top surface 804 of the connector.
The three-way pressure relief device 816 has associated therewith a
depressible button 818, which when depressed permits venting of the
container overpressure to the ambient environment of the
container.
[0340] In like manner, the three-way pressure relief device 820 is
operably coupled to depressible button 822, which when depressed
permits venting of overpressure from the vessel in the same manner
as described for three-way pressure relief device 816.
[0341] FIG. 60 is a side elevation view of the connector 800 of
FIG. 59, wherein all parts and features are correspondingly
numbered.
[0342] FIG. 61 is a corresponding perspective view, also labeled
correspondingly with respect to the reference numbers shown in
FIGS. 59 and 60.
[0343] As shown in FIGS. 59-61, when the handle 810 is in a down
position, the depressible button 818 and depressible button 822 are
biased to an outward position, which as shown in FIG. 60 prevents
rotational movement of the handle 810, by virtue of the cam surface
of the cam element 830 on the axle at each side of the handle.
[0344] Thus, when the connector is coupled to a material storage
and dispensing vessel, and the handle is rotated to a down
position, the spring-biased depressible buttons "pop out" from
their associated housing and lock the handle in the down
position.
[0345] Subsequently, when it is desired to depressurize the
pressurized vessel and to disengage the connector from the vessel,
the depressible buttons 818 and 822 are depressed, thereby
actuating the pressure relief devices 816 and 820 to vent the
overpressure to the ambient environment of the package. In another
alternative to the arrangement shown, only one, rather than both of
such buttons, is employed to actuate the pressure relief action.
When the overpressure has been vented from the vessel, the
mechanical locks 832 on the sides of the housing can be disengaged
from the vessel by moving the handle upwardly to automatically open
the locks. Referring to FIG. 60 it is seen that the locking of the
handle 810, by the "pop-out" action of the depressible button on
the pressure relief device, prevents the mechanical locks 832 from
being actuated, since they are overlaid by the flanged portion of
the axle of the handle.
[0346] As a result, there is provided a safe package configuration
that avoids the hazard of inadvertently dispersing pressurized
contents of a vessel when the connector is disengaged.
[0347] FIG. 62 is a perspective view of a connector 840 according
to another embodiment of the invention.
[0348] The connector 840 includes a main body portion 842 on which
is mounted a release lever in the form of handle 844. The connector
in this embodiment is provided with a three-way pressure release
device 845 including a slide member 847 coupled to a main body 846
of the device. When the handle 844 is lowered, the handle slides
past the slide member 847 of the pressure relief device 845 and the
slide member thereupon locks the handle in position, as shown in
the perspective schematic view of FIG. 63, so that the handle 844
thereafter cannot be lifted or upwardly rotated, being secured by
the slide member 847.
[0349] Subsequently, when it is desired to disengage the connector,
the slide member 847 is manually translated in an upward direction,
so that the slide member is lifted above the handle 844. The handle
844 thereupon is permitted to freely pivotally rotate upwardly,
since the upward translation of the slide member 847 actuates the
pressure relief device 845 to exhaust the overpressure from the
vessel through the main body 846 of the device. In this manner, a
hazardous overpressure condition is avoided, when the connector is
disengaged from the associated vessel.
[0350] FIG. 64 is a perspective view of a connector 850 according
to another embodiment of the invention, wherein two different types
of locking mechanisms are illustratively employed.
[0351] The connector 850 shown in FIG. 64 includes a housing 852
having a top surface including a dispense fitting 856 defining a
dispense port 857, and a pressurizing fitting 858 through which a
pressurized gas may be directed to facilitate egress of material
from a vessel associated with the connector.
[0352] The connector 850 features a handle 854, which may be locked
into position by action of the cylinder 862 or alternatively, or
additionally, by the action of the cylinder 860.
[0353] The cylinder 862 thus can be actuated to translate the
cylinder or a projection member thereof downwardly against handle
854, to lock the handle in position against further movement.
[0354] The handle also, or alternatively, can be immobilized by
translation outwardly of a portion of the cylinder 860, so that the
cylinder or a projection therefrom engages the axle of the handle
and prevents rotational movement of the handle about the axis
defined by the axle portions of the handle.
[0355] Referring to FIG. 65, wherein all parts and features are
correspondingly numbered with respect to FIG. 64, the handle 854 is
shown as having been locked by cylinder 862 as a result of a
projection element being extended from cylinder 862 to bear against
handle 854 and thereby lock it in position.
[0356] In the locked position, the axle portions of the handle 854
cover the mechanical locks 861, so that the mechanical locks cannot
be depressed to remove the connector from the vessel.
[0357] FIG. 66 is a perspective view of the connector shown in
FIGS. 64 and 65, wherein all part and elements are correspondingly
numbered. In this embodiment, the cylinder 860 on the top surface
of the connector has a protruding portion that is translatable to
effect engagement with the axle of the handle 854, so as to lock
same in position. For this purpose, the axle of the handle may have
an opening or cavity therein, which is engaged by the projection
portion of cylinder 860, to restrain the handle 854 against
movement.
[0358] FIG. 67 is perspective view of a connector 850 of a general
type as shown in FIG. 64, but with only a single locking element,
in the form of cylinder 862. From this cylinder is extended a
locking projection element 868 that bears against the handle 854
and engages a receiving cavity 870 in the handle surface.
[0359] It will be recognized from the foregoing that a variety of
handle immobilization elements and overpressure relief arrangements
can be provided, whereby overpressure conditions existing in a
vessel can be safely accommodated, so that the connector is not
disengaged from the vessel with consequent occurrence of dispersion
or spraying of contents of the vessel to the ambient environs.
[0360] While the invention has been has been described herein in
reference to specific aspects, features and illustrative
embodiments of the invention, it will be appreciated that the
utility of the invention is not thus limited, but rather extends to
and encompasses numerous other variations, modifications and
alternative embodiments, as will suggest themselves to those of
ordinary skill in the field of the present invention, based on the
disclosure herein. Correspondingly, the invention as hereinafter
claimed is intended to be broadly construed and interpreted, as
including all such variations, modifications and alternative
embodiments, within its spirit and scope.
* * * * *