U.S. patent application number 14/585392 was filed with the patent office on 2015-08-20 for thermal isolation clamp.
The applicant listed for this patent is Yarbrough Solutions Worldwide. Invention is credited to Michael L. Fisher.
Application Number | 20150233520 14/585392 |
Document ID | / |
Family ID | 53797747 |
Filed Date | 2015-08-20 |
United States Patent
Application |
20150233520 |
Kind Code |
A1 |
Fisher; Michael L. |
August 20, 2015 |
Thermal Isolation Clamp
Abstract
In combination with a pipe (213), a clamp (201) is provided
which supports the pipe in a fixed position with respect to a
substrate. The clamp includes first (203) and second (205) bands,
wherein each of the first and second bands has an arcuate portion
(209) and first and second terminal portions (211), and wherein the
arcuate portions of the first and second bands are disposed in
opposing relation around the surface of the pipe. A first fastener
(207) extends through the first terminal portions of the first and
second bands, and a second fastener extends through the second
terminal portions of the first and second bands. A thermal
insulator (233) is disposed between the first fastener and the
first terminal portions of the first and second bands, and between
the second fastener and the second terminal portions of the first
and second bands.
Inventors: |
Fisher; Michael L.;
(Leander, TX) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Yarbrough Solutions Worldwide |
Austin |
TX |
US |
|
|
Family ID: |
53797747 |
Appl. No.: |
14/585392 |
Filed: |
December 30, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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61940528 |
Feb 17, 2014 |
|
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Current U.S.
Class: |
219/201 ;
248/67.5; 29/428 |
Current CPC
Class: |
Y10T 29/49826 20150115;
F16B 2/12 20130101; F16L 59/135 20130101; H05B 3/06 20130101; F16L
59/16 20130101; F16B 43/001 20130101; F16B 9/023 20130101 |
International
Class: |
F16L 59/14 20060101
F16L059/14; H05B 3/06 20060101 H05B003/06; F16L 3/10 20060101
F16L003/10 |
Claims
1. In combination with a pipe, a clamp which supports said pipe in
a fixed position with respect to a substrate, said clamp
comprising: first and second bands, wherein each of said first and
second bands has an arcuate portion and first and second terminal
portions, and wherein the arcuate portions of said first and second
bands are disposed in opposing relation around the surface of said
pipe; a first fastener which extends through the first terminal
portions of said first and second bands; a second fastener which
extends through the second terminal portions of said first and
second bands; and a thermal insulator disposed between said first
fastener and said first terminal portions of said first and second
bands, and further disposed between said second fastener and said
second terminal portions of said first and second bands.
2. The combination of claim 1, wherein said thermal insulator is
disposed between said substrate and said first terminal portion of
said first band.
3. The combination of claim 2, wherein said thermal insulator is
disposed between said substrate and said second terminal portion of
said first band.
4. The combination of claim 1, wherein each of said first and
second fasteners is equipped with a head, and wherein said thermal
insulator is disposed between said head of said first fastener and
said first terminal portion of said second band.
5. The combination of claim 4, wherein said thermal insulator is
disposed between said head of said second fastener and said second
terminal portion of said second band.
6. The combination of claim 1, wherein each of said first and
second fasteners comprises a shaft, and wherein a first cylindrical
portion of said insulator is disposed around the shaft of said
first fastener and between the substrate and the first terminal
portion of said first band.
7. The combination of claim 6, wherein a second cylindrical portion
of said insulator is disposed around the shaft of said second
fastener and between the substrate and the second terminal portion
of said first band.
8. The combination of claim 1, wherein each of said first and
second fasteners comprises a head, and wherein a third cylindrical
portion of said insulator is disposed around the shaft of said
first fastener and between the head of said first fastener and the
first terminal portion of said second band.
9. The combination of claim 8, wherein a fourth cylindrical portion
of said insulator is disposed around the shaft of said second
fastener and between the head of said second fastener and the
second terminal portion of said second band.
10. The combination of claim 1, wherein said first ends of said
first and second bands are disposed in an opposing, spaced apart
relation to each other, and wherein said second ends of said first
and second bands are disposed in an opposing, spaced apart relation
to each other.
11. The combination of claim 10, wherein said first fastener is
equipped with a shaft which extends through apertures in each of
said first ends of said first and second bands, wherein said second
fastener is equipped with a shaft which extends through apertures
in each of said second ends of said first and second bands, wherein
a first cylindrical portion of said insulator is disposed around
the shaft of said first fastener and between the substrate and the
first terminal portion of said first band, and wherein a second
cylindrical portion of said insulator is disposed around the shaft
of said second fastener and between the substrate and the second
terminal portion of said first band, wherein the first cylindrical
portion of said insulator extends through the aperture of the first
terminal portion of said first band, and wherein the second
cylindrical portion of said insulator extends through the aperture
of the second terminal portion of said first band.
12. The combination of claim 11, wherein each of said first and
second fasteners is equipped with a head, wherein a third
cylindrical portion of said insulator is disposed around the shaft
of said first fastener and between the head of said first fastener
and the first terminal portion of said second band, wherein a
fourth cylindrical portion of said insulator is disposed around the
shaft of said second fastener and between the head of said second
fastener and the second terminal portion of said second band,
wherein the third cylindrical portion of said insulator extends
through the aperture in the first terminal portion of said second
band, and wherein the fourth cylindrical portion of said insulator
extends through the aperture in the second terminal portion of said
second band.
13. The combination of claim 12, further comprising a first washer
disposed about the shaft of said first fastener and a second washer
disposed about the shaft of said second fastener, wherein the third
cylindrical portion of said insulator is disposed around the shaft
of said first fastener and between the first washer and the first
terminal portion of said second band, and wherein the fourth
cylindrical portion of said insulator is disposed around the shaft
of said second fastener and between the second washer and the
second terminal portion of said second band.
14. The combination of claim 13, further comprising a third washer
disposed about the shaft of said first fastener and a fourth washer
disposed about the shaft of said second fastener, wherein said
first cylindrical portion of said insulator is disposed between the
third washer and the first terminal portion of said first band, and
wherein said second cylindrical portion of said insulator is
disposed between the fourth washer and the second terminal portion
of said first band.
15. The combination of claim 1, wherein said arcuate portions of
said first and second bands are complimentary in shape to the
exterior surface of said pipe.
16. The combination of claim 1, wherein said thermal insulator
comprises polytetrafluoroethylene (PTFE).
17. The combination of claim 1, wherein said thermal insulator is
not disposed on the external surface of said pipe.
18. The combination of claim 1, wherein said first and second bands
comprise a thermally conductive material.
19. The combination of claim 1, wherein said first and second bands
comprise a metal.
20. The combination of claim 1, wherein said clamp supports said
pipe in a fixed, spaced apart relation to said substrate.
21. The combination of claim 1, wherein said pipe is equipped with
a heating strip which heats the surface of said pipe.
22. The combination of claim 1, wherein said heating strip is
helically wound about the surface of said pipe.
23. The combination of claim 1, wherein said first and second
fasteners are selected from the group consisting of bolts and
screws.
24. A method for thermally insulating a pipe from a substrate to
which the pipe is mounted, comprising: providing first and second
bands, wherein each of said first and second bands has an arcuate
portion and first and second terminal portions; providing first and
second portions of a thermal insulator; disposing the arcuate
portions of said first and second bands in opposing relation around
the surface of said pipe; extending a first fastener through the
first terminal portions of the first and second bands and through
said first portion of said thermal insulator, and into the
substrate; and extending a second fastener through the second
terminal portions of the first and second bands and through said
second portion of said thermal insulator, and into the
substrate.
25. The method of claim 24, wherein said first and second portions
of said thermally insulating material are cylindrical in shape and
have a central hole extending along the axis of said cylinder.
26. The method of claim 25, wherein the height of the cylinder is
greater than the radius of the pipe.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims the benefit of priority from U.S.
provisional application No. 61/940,528, filed Feb. 17, 2014, having
the same inventor, and the same title, and which is incorporated
herein by reference in its entirety.
TECHNICAL FIELD OF THE INVENTION
[0002] The present invention pertains generally to pipe clamps, and
more particularly to pipe clamps which thermally isolate a pipe
from the substrate it is clamped to.
BACKGROUND OF THE INVENTION
[0003] Many semiconductor processes, such as chemical vapor
deposition (CVD) processes, are implemented in processing chambers
that are equipped with various conduits for the inlet and egress of
gaseous materials. In such a process, a series of inlet conduits
are typically provided for the delivery of a mixture of gases
(which may include reactants, precursors and/or the components of
the desired atmosphere within the chamber) to the chamber.
Similarly, one or more outlet conduits are typically provided to
allow reaction byproducts and outflow gases to be exhausted from
the chamber.
[0004] Each outlet conduit is typically in fluidic communication
with a pump, which creates a flow of gas out of the reaction
chamber and to an exhaust line for exhaust abatement. The exhaust
from a processing chamber is frequently at elevated temperatures,
most commonly within the range of 50-180.degree. C. Consequently,
large diameter galvanized steel piping is often the material of
choice for the exhaust conduit. Redundant exhaust conduit is often
provided to allow for routine maintenance on the line without
necessitating process shutdown.
[0005] Many of the gaseous materials utilized in semiconductor
processing, such as tetraethyl orthosilicate (TEOS), boron
trichloride (BCl.sub.3), aluminum chloride (AlCl.sub.3), chlorine
trifluoride (ClF.sub.3) and dichlorosilane (DCS), are capable of
undergoing phase changes between room temperature and the
processing temperatures commonly utilized in processing chambers.
Consequently, in order to prevent these materials from condensing
or liquefying in the foreline (the segment of the outlet conduit
between the reaction chamber and the pump), it is important to
maintain this portion of the outlet conduit at a temperature
similar to that of the processing chamber. This is frequently
accomplished by thermally insulating the foreline and/or equipping
it with one or more heater elements. For example, Watlow (League
City, Tex.) provides a line of heater jackets which consist of an
insulating material and a heating element, and which may be
utilized for this purpose.
[0006] It is typically necessary or desirable to mount the outlet
conduit in a semiconductor fabrication plant to a ceiling, wall,
floor, or other substrate. Due to the significant weight of the
conduit, a mounting rail is commonly used for this purpose, and the
conduit is attached to the mounting plate with a series of rigid
clamps. Various clamps have been developed in the art for this
purpose.
[0007] One clamp known to the art is depicted in FIG. 1. The clamp
101 depicted therein, which is available commercially from Tyco
Products (Wayne, Mich.) under the trade name UNISTRUT.RTM.,
comprises a split body 103 with an aperture 105 defined therein
through which a pipe (not shown) extends. The body 103 of the clamp
101 includes opposing flanges 107 and a bolt 109 that extends
through a threaded aperture provided in each flange 107. As the
bolt is tightened, the split body 103 tightens about the pipe, thus
holding the clamp rigidly in place. The clamp 101 is further
equipped with opposing arms 111 which extend from the base of the
clamp 101, and which allow the clamp to be supported from a series
of rails or struts that may be affixed to a ceiling, wall, floor,
or other suitable substrate.
SUMMARY OF THE INVENTION
[0008] In one aspect, and in combination with a pipe, a clamp is
provided which supports the pipe in a fixed position with respect
to a substrate. The clamp comprises (a) first and second bands,
wherein each of said first and second bands has an arcuate portion
and first and second terminal portions, and wherein the arcuate
portions of said first and second bands are disposed in opposing
relation around the surface of said pipe; (b) a first fastener
which extends through the first terminal portions of said first and
second bands; (c) a second fastener which extends through the
second terminal portions of said first and second bands; and (d) a
thermal insulator which is disposed between said first fastener and
said first terminal portions of said first and second bands, and
which is further disposed between said second fastener and said
second terminal portions of said first and second bands.
[0009] In another aspect, a method is provided for thermally
insulating a pipe from a substrate to which the pipe is mounted.
The method comprises (a) providing first and second bands, wherein
each of said first and second bands has an arcuate portion and
first and second terminal portions; (b) providing first and second
portions of a thermal insulator; (c) disposing the arcuate portions
of said first and second bands in opposing relation around the
surface of said pipe; (d) extending a first fastener through the
first terminal portions of the first and second bands and through
said first portion of said thermal insulator, and into the
substrate; and (e) extending a second fastener through the second
terminal portions of the first and second bands and through said
second portion of said thermal insulator, and into the
substrate.
[0010] One skilled in the art will appreciate that the various
aspects of the present disclosure may be used in various
combinations and sub-combinations, and each of those combinations
and sub-combinations is to be treated as if specifically set forth
herein.
BRIEF DESCRIPTION OF THE DRAWINGS
[0011] For a more complete understanding of the present invention
and the advantages thereof, reference is now made to the following
description taken in conjunction with the accompanying drawings in
which like reference numerals indicate like features and
wherein:
[0012] FIG. 1 is an illustration showing a perspective view of a
prior art pipe clamp.
[0013] FIG. 2 is a front view of the pipe clamp of FIG. 1.
[0014] FIG. 3 is a front view of a pipe clamp in accordance with
the teachings herein.
[0015] FIG. 4 is a perspective view of the pipe clamp of FIG.
3.
[0016] FIG. 5 is a perspective view of the pipe clamp of FIG. 3
shown attached to a pipe.
[0017] FIG. 6 is a cross-sectional view taken along LINE 5-5 of
FIG. 5.
DETAILED DESCRIPTION OF THE INVENTION
[0018] Despite the provision of thermal insulators and heater
elements in forelines of semiconductor processing plants, a
significant amount of condensation nonetheless occurs in these
conduits. Such condensation may require frequent and expensive
maintenance, may result in downtime, and may adversely affect
product yields.
[0019] It has now been found that the foregoing problem may be
attributed, at least in part, to the clamps used to mount the
forelines to the mounting rail. In particular, it has been found
that the clamps and constituent bolts commonly used for this
purpose may act as heat sinks, and may cause the localized
precipitation, condensation or undesirable cooling of reactants or
reaction byproducts in the pipelines they support.
[0020] It has also been found that the foregoing problem may be
addressed through the selective use of thermally insulating
materials to thermally isolate such clamps and their constituent
bolts from the substrate or mounting rail to which they are
attached. As a result, the tendency of these clamps (and their
constituent bolts) to act as heat sinks is mitigated.
[0021] FIGS. 3-6 depict a first particular, non-limiting embodiment
of a pipe clamp in accordance with the teachings herein. The pipe
clamp 201 depicted therein comprises first 203 and second 205 bands
which are arranged in an opposing, spaced apart orientation with
respect to each other along the longitudinal axes of first and
second fasteners 207. Each of the first 203 and second 205 bands
comprises an arcuate portion 209 and first and second terminal
portions 211.
[0022] As seen in FIGS. 5-6, the arcuate portions 209 of the first
203 and second 205 bands extend around the surface of a pipe 213 in
opposing directions, and the terminal portions 211 are equipped
with apertures through which the first and second fasteners 207
extend. With fasteners 207 of the proper length, the clamp 201
allows a pipe 213 to be supported in a fixed position on a ceiling,
wall, floor, or other suitable substrate (typically by way of a
mounting rail). In the particular embodiment depicted, a rail 215
is provided which may be attached to a substrate. The rail 215
includes a longitudinal slot 217 to which the fasteners 207 may be
releasably secured by way of a nut 219 and washer 221 combination
which engage the opposing lips 223 (see FIG. 5) of the rail
215.
[0023] Referring now to FIGS. 3-4, the fasteners 207 are equipped
with a (preferably hexagonal) head 229 on a first end thereof, and
a threaded portion on the second opposing end thereof which
rotatingly engages a nut 219. A first washer 225 is disposed
adjacent to the head 219 of the fastener 207. A second washer 221
is disposed adjacent to the substrate 215 (which, in the embodiment
depicted, is a mounting rail) such that the substrate 215 is
disposed between the second washer 221 and the nut 219. In some
embodiments, a spring 224 may be provided to provide a compressive
force against the nut 219 so that the fastener 207 may be tightened
or loosened by rotating the head 229 with a socket wrench or other
suitable tool.
[0024] Still referring to FIGS. 3-4, the clamp 201 is also equipped
with first 231, second 233 and third 235 portions of a thermally
insulating material which are disposed about each fastener 207.
Preferably, the thermally insulating material comprises PTFE
(polytetrafluoroethylene), due to the excellent heat resistance and
thermally insulating properties PTFE possesses. However, other
thermally insulating materials may also be utilized including, but
not limited, various ceramics, glasses, heat resistant plastics or
polymers (including, for example, polystyrene, polyurethane,
polyethylene, polybutylene, nitrile rubbers (NBR),
ethylene-propylene-diene rubbers (EPDM), and isocyanatepolyol
mixtures), and various foams (including both open-cell and
closed-cell), mineral wool, glass wool, cellular glass, aerogels,
and coatings and fibrous masses constructed from any of the
foregoing materials. Some embodiments may incorporate a combination
of these materials. For example, in some embodiments, the fasteners
and/or clamps may be coated with a PTFE coating and then coated
with, or wrapped in, a foamed insulator. In some cases, the
insulating material may be mixed with fillers or disposed on a
rigid substrate to impart sufficient stiffness to the material so
as to create a load-bearing construct.
[0025] As best seen in FIGS. 3-4, the first portion 231 of
thermally insulating material is disposed between the first washer
225 and the terminal portion 211 of the first band. The second
portion 233 of thermally insulating material (which is omitted in
FIGS. 5-6 for illustrative purposes) is disposed between the
terminal portions 211 of the first 203 and second 205 bands. The
third portion 235 of thermally insulating material is disposed
between the terminal portion 211 of the second band 205 and the
second washer 221. Preferably, the thermally insulating material
extends through the apertures in the terminal portions 211 of the
first 203 and second 205 bands, thus thermally isolating the
fastener from the first 203 and second 205 bands. Consequently,
heat dissipation through the fasteners 207 is reduced or minimized,
and the clamp 201 will heat up with the pipe 213 (see FIGS. 5-6) in
a relatively uniform manner so that no cold spots are created along
the surface of the pipe 213.
[0026] As seen in FIG. 5, in the particular embodiment depicted, a
thermally conductive strip 241 is wound helically about the
exterior surface of the pipe 213. The thermally conductive strip
241 may be utilized to maintain the wall of the pipe 213 at an even
temperature. Preferably, the thermally conductive strip 241 is a
resistive heater which maintains the pipe 213 at a desired
temperature. This helps to prevent condensation within the pipe
213, and also may be useful in maintaining gases or liquids within
the pipe within a desired temperature range.
[0027] All references, including publications, patent applications,
and patents, cited herein are hereby incorporated by reference to
the same extent as if each reference were individually and
specifically indicated to be incorporated by reference and were set
forth in its entirety herein.
[0028] The use of the terms "a" and "an" and "the" and similar
referents in the context of describing the invention (especially in
the context of the following claims) are to be construed to cover
both the singular and the plural, unless otherwise indicated herein
or clearly contradicted by context. The terms "comprising,"
"having," "including," and "containing" are to be construed as
open-ended terms (i.e., meaning "including, but not limited to,")
unless otherwise noted. Recitation of ranges of values herein are
merely intended to serve as a shorthand method of referring
individually to each separate value falling within the range,
unless otherwise indicated herein, and each separate value is
incorporated into the specification as if it were individually
recited herein. All methods described herein can be performed in
any suitable order unless otherwise indicated herein or otherwise
clearly contradicted by context. The use of any and all examples,
or exemplary language (e.g., "such as") provided herein, is
intended merely to better illuminate the invention and does not
pose a limitation on the scope of the invention unless otherwise
claimed. No language in the specification should be construed as
indicating any non-claimed element as essential to the practice of
the invention.
[0029] Preferred embodiments of this invention are described
herein, including the best mode known to the inventors for carrying
out the invention. Variations of those preferred embodiments may
become apparent to those of ordinary skill in the art upon reading
the foregoing description. The inventors expect skilled artisans to
employ such variations as appropriate, and the inventors intend for
the invention to be practiced otherwise than as specifically
described herein. Accordingly, this invention includes all
modifications and equivalents of the subject matter recited in the
claims appended hereto as permitted by applicable law. Moreover,
any combination of the above-described elements in all possible
variations thereof is encompassed by the invention unless otherwise
indicated herein or otherwise clearly contradicted by context.
* * * * *