U.S. patent application number 14/222078 was filed with the patent office on 2015-07-16 for micropump.
This patent application is currently assigned to SAMSUNG ELECTRO-MECHANICS CO., LTD.. The applicant listed for this patent is SAMSUNG ELECTRO-MECHANICS CO., LTD.. Invention is credited to Sang Jin Kim, Bo Sung Ku.
Application Number | 20150198151 14/222078 |
Document ID | / |
Family ID | 53520960 |
Filed Date | 2015-07-16 |
United States Patent
Application |
20150198151 |
Kind Code |
A1 |
Kim; Sang Jin ; et
al. |
July 16, 2015 |
MICROPUMP
Abstract
There is provided a micropump, including: a substrate; a
pressure chamber formed in the substrate; and a connecting flow
channel connected to the pressure chamber and extended in a
vertical direction with respect to a radial direction of the
pressure chamber.
Inventors: |
Kim; Sang Jin; (Suwon-Si,
KR) ; Ku; Bo Sung; (Suwon-Si, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
Suwon-Si |
|
KR |
|
|
Assignee: |
SAMSUNG ELECTRO-MECHANICS CO.,
LTD.
Suwon-Si
KR
|
Family ID: |
53520960 |
Appl. No.: |
14/222078 |
Filed: |
March 21, 2014 |
Current U.S.
Class: |
417/413.2 ;
417/437 |
Current CPC
Class: |
F04B 43/046 20130101;
F04B 19/006 20130101 |
International
Class: |
F04B 43/04 20060101
F04B043/04; F04B 19/00 20060101 F04B019/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jan 16, 2014 |
KR |
10-2014-0005457 |
Claims
1. A micropump, comprising: a substrate; a pressure chamber formed
in the substrate; and a connecting flow channel connected to the
pressure chamber and extended in a vertical direction with respect
to a radial direction of the pressure chamber.
2. The micropump of claim 1, wherein the pressure chamber has a
circular shape, an oval shape, or a shape formed by curves having
one or more radii of curvature.
3. The micropump of claim 1, wherein the connecting flow channel
includes one or more expansion parts.
4. The micropump of claim 3, wherein the connecting flow channel is
connected to the pressure chamber in the expansion parts.
5. The micropump of claim 1, further comprising an upper substrate
disposed on the substrate and having an inlet and an outlet
connected to the connecting flow channel.
6. The micropump of claim 1, further comprising a piezoelectric
actuator disposed on the substrate.
7. A micropump, comprising: a substrate; a pressure chamber formed
in the substrate; and a connecting flow channel connected to the
pressure chamber and having a curved shape.
8. The micropump of claim 7, wherein the pressure chamber has a
circular shape, an oval shape, or a shape formed by curves having
one or more radii of curvature.
9. The micropump of claim 7, wherein the connecting flow channel is
formed by a curve circumscribed with the pressure chamber.
10. The micropump of claim 7, wherein the connecting flow channel
is formed by a curve inscribed in the pressure chamber.
11. The micropump of claim 7, wherein the connecting flow channel
includes one or more expansion parts.
12. The micropump of claim 11, wherein the connecting flow channel
is connected to the pressure chamber in the expansion parts.
13. The micropump of claim 7, further comprising an upper substrate
disposed on the substrate and having an inlet and an outlet
connected to the connecting flow channel.
14. The micropump of claim 7, further comprising a piezoelectric
actuator disposed on the substrate.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims the benefit of Korean Patent
Application No. 10-2014-0005457 filed on Jan. 16, 2014, with the
Korean Intellectual Property Office, the disclosure of which is
incorporated herein in its entirety by reference.
BACKGROUND
[0002] The present disclosure relates to a micropump allowing for a
micro flow rate.
[0003] In order to develop new medicines and experimentally
determine the stability of new medicines, it is necessary to
observe reactions between new medicines (that is, drugs) and cells.
Generally, experiments involving reactions between drugs and the
cells are performed using a culture dish, or the like.
[0004] However, since reactions between drugs and cells made in the
culture dish may be very different from reactions between drugs and
cells occurring within the human body, it may be difficult to
accurately observe or inspect reactions between drugs and cells
through only a result of experiments using a culture dish.
Therefore, there is a need to develop a new device capable of
observing reactions between drugs and cells in an environment
similar to that inside a human body.
[0005] To this end, the inventor has developed technology allowing
for the circulation of a culture medium. In order to smoothly
culture the cell, however, since a small amount of culture medium
needs to be constantly supplied, the development of a micropump
capable of constantly supplying a small amount of fluid has been
demanded.
SUMMARY
[0006] Some embodiments of the present invention may provide a
micropump capable of constantly supplying a small amount of
fluid.
[0007] According to some embodiments of the present disclosure, a
micropump may include: a substrate; a pressure chamber formed in
the substrate; and a connecting flow channel connected to the
pressure chamber and extended in a vertical direction with respect
to a radial direction of the pressure chamber.
[0008] The pressure chamber may have a circular shape, an oval
shape, or a shape formed by curves having one or more radii of
curvature.
[0009] The connecting flow channel may include one or more
expansion parts.
[0010] The connecting flow channel may be connected to the pressure
chamber in the expansion parts.
[0011] The micropump may further include an upper substrate
disposed on the substrate and having an inlet and an outlet
connected to the connecting flow channel.
[0012] The micropump may further include a piezoelectric actuator
disposed on the substrate.
[0013] According to some embodiments of the present disclosure, a
micropump may include: a substrate; a pressure chamber formed in
the substrate; and a connecting flow channel connected to the
pressure chamber and having a curved shape.
[0014] The pressure chamber may have a circular shape, an oval
shape, or a shape formed by curves having one or more radii of
curvature.
[0015] The connecting flow channel may be formed by a curve
circumscribed with the pressure chamber.
[0016] The connecting flow channel may be formed by a curve
inscribed in the pressure chamber.
[0017] The connecting flow channel may include one or more
expansion parts.
[0018] The connecting flow channel may be connected to the pressure
chamber in the expansion parts.
[0019] The micropump may further include an upper substrate
disposed on the substrate and having an inlet and an outlet
connected to the connecting flow channel.
[0020] The micropump may further include a piezoelectric actuator
disposed on the substrate.
BRIEF DESCRIPTION OF THE DRAWINGS
[0021] The above and other aspects, features and other advantages
of the present disclosure will be more clearly understood from the
following detailed description taken in conjunction with the
accompanying drawings, in which:
[0022] FIG. 1 is an exploded perspective view of a micropump
according to an exemplary embodiment of the present disclosure;
[0023] FIG. 2 is a bottom view of a substrate of FIG. 1;
[0024] FIG. 3 is an assembled perspective view of the micropump of
FIG. 1;
[0025] FIG. 4 is a cross-sectional view of the micropump of FIG.
3;
[0026] FIG. 5 is an enlarged view of portion A of FIG. 4;
[0027] FIG. 6 is a plan view of a valve of FIG. 5;
[0028] FIG. 7 is an enlarged view of portion B of FIG. 4;
[0029] FIG. 8 is a plan view of a valve of FIG. 7;
[0030] FIG. 9 is an exploded perspective view of a micropump
according to another exemplary embodiment of the present
disclosure;
[0031] FIG. 10 is a bottom view of a substrate of FIG. 9; and
[0032] FIG. 11 is a bottom view of another example of the substrate
of FIG. 9.
DETAILED DESCRIPTION
[0033] Hereinafter, embodiments of the present disclosure will be
described in detail with reference to the accompanying
drawings.
[0034] The disclosure may, however, be embodied in many different
forms and should not be construed as being limited to the
embodiments set forth herein. Rather, these embodiments are
provided so that this disclosure will be thorough and complete, and
will fully convey the scope of the disclosure to those skilled in
the art.
[0035] In the drawings, the shapes and dimensions of elements maybe
exaggerated for clarity, and the same reference numerals will be
used throughout to designate the same or like elements.
[0036] FIG. 1 is an exploded perspective view of a micropump
according to an exemplary embodiment of the present disclosure,
FIG. 2 is a bottom view of a substrate of FIG. 1, FIG. 3 is an
assembled perspective view of the micropump of FIG. 1, FIG. 4 is a
cross-sectional view of the micropump of FIG. 3, FIG. 5 is an
enlarged view of portion A of FIG. 4, FIG. 6 is a plan view of a
valve of FIG. 5, FIG. 7 is an enlarged view of portion B of FIG. 4,
FIG. 8 is a plan view of a valve of FIG. 7, FIG. 9 is an exploded
perspective view of a micropump according to another exemplary
embodiment of the present disclosure, FIG. 10 is a bottom view of a
substrate of FIG. 9, and FIG. 11 is a bottom view of another
example of the substrate of FIG. 9.
[0037] A micropump 100 according to an exemplary embodiment of the
present disclosure will be described with reference to FIGS. 1
through 3.
[0038] The micropump 100 according to an exemplary embodiment of
the present disclosure may include a bottom substrate 110, a flow
channel forming substrate 120, and a valve substrate 140. In
addition, the micropump 100 may further include an actuator 150, if
necessary. Here, the bottom substrate 110, the flow channel forming
substrate 120, and the valve substrate 140 may be sequentially
stacked.
[0039] The bottom substrate 110 may form a base part of the
micropump 100. The bottom substrate 110 may be formed of a single
crystal silicon substrate or a silicon on insulator (SOI)
substrate. In this case, the bottom substrate 110 may be a stacked
structure in which a silicon substrate and a plurality of
insulating members are stacked.
[0040] The flow channel forming substrate 120 may be a substrate in
which a flow channel through which a fluid (e.g., a culture medium
or drugs) is conveyed is formed. To this end, a first surface (an
upper surface based on FIG. 1) of the flow channel forming
substrate 120 may be provided with a first connecting opening 132
and a second connecting opening 134, and a second surface (a lower
surface based on FIG. 1) of the flow channel forming substrate 120
may be provided with a pressure chamber 122 and a connecting flow
channel 124.
[0041] The pressure chamber 122 may have a volume capable of
receiving a predetermined amount of fluid. For example, the
pressure chamber 122 may have volume capable of generating a first
magnitude of pressure. Further, the pressure chamber 122 may be
designed to have a changeable volume, if necessary. For example,
the volume of the pressure chamber 122 may be expanded or reduced
by the piezoelectric actuator 150. To this end, the piezoelectric
actuator 150 may be formed on one surface of the pressure chamber
122. The pressure chamber 122 may have a circular shape as shown in
FIG. 2. However, the cross-sectional shape of the pressure chamber
122 is not limited to the circular shape. For example, the
cross-sectional shape of the pressure chamber 122 may include an
oval shape, a regular shape, or an irregular shape.
[0042] The connecting flow channel 124 may connect the first
connecting opening 132 and the second connecting opening 134 to
each other. For example, the connecting flow channel 124 may have a
linear form connecting the first connecting opening 132 and the
second connecting opening 134 to each other. As an example, the
connecting flow channel 124 may have the linear form extended in a
tangential direction for the circular pressure chamber 122. That
is, a vertical line V extended from the center of the pressure
chamber 122 to a straight line N may be substantially equal to a
radius R of the pressure chamber 122.
[0043] The connecting flow channel 124 may have one or more
expansion parts. For example, the connecting flow channel 124 may
be provided with two expansion parts 126 and 128. Here, a first
expansion part 126 may be formed in a section connecting the first
connecting opening 132 and the pressure chamber 122 to each other,
and a second expansion part 128 may be formed in a section
connecting the pressure chamber 122 and the second connecting
opening 134 to each other. However, the number and the position of
expansion parts 126 and 128 are not limited to the above-described
configuration. For example, the number of expansion parts may be
increased or decreased, and the position thereof may also be
changed.
[0044] The first expansion part 126 may have a cross-sectional area
gradually increased from the first connecting opening 132 toward
the pressure chamber 122. For example, the first expansion part 126
may have a triangular shape in which it is widened in a direction
from the first connecting opening 132 toward the pressure chamber
122.
[0045] The second expansion part 128 may have a cross-sectional
area gradually increased from the pressure chamber 122 toward the
second connecting opening 134. For example, the second expansion
part 128 may have a triangular shape in which it is widened from
the pressure chamber 122 toward the second connecting opening
134.
[0046] The above-described shape of the connecting flow channel 124
may significantly reduce or prevent a phenomenon in which the fluid
flows backwards from the second connecting opening 134 to the first
connecting opening 132. For reference, the connecting flow channel
124 maybe changed to have another shape as long as it may
significantly reduce or prevent the back flow of the fluid.
[0047] Similar to the bottom substrate 110, the flow channel
forming substrate 120 may be formed of a single crystal silicon
substrate or a silicon on insulator (SOI) substrate. The flow
channel forming substrate 120 maybe integrally formed with the
bottom substrate 110 through a sintering process.
[0048] The valve substrate 140 may be formed on one surface of the
flow channel forming substrate 120 and may control a movement of
the fluid flowing in the flow channel forming substrate 120. To
this end, the valve substrate 140 may include one or more valves
210 and 220.
[0049] The valve substrate 140 may be provided with a first opening
142 and a second opening 144. Here, the first opening 142 maybe
connected to the first connecting opening 132 of the flow channel
forming substrate 120, and the second opening 144 may be connected
to the second connecting opening 134 of the flow channel forming
substrate 120.
[0050] The valves 210 and 220 may be installed in the first opening
142 and the second opening 144, respectively. More specifically,
the first valve 210 maybe installed in the first opening 142 and
the second valve 220 may be installed in the second opening 144.
Meanwhile, although the valves in the present embodiment are
installed in both of the first opening 142 and the second opening
144 by way of example, a single valve may only be installed in a
corresponding opening, if necessary.
[0051] The valve substrate 140 may be formed of plastic or a
synthetic resin material. In this case, the valve substrate 140 and
the valves 210 and 220 may be easily processed, resulting in a
reduction of production costs. However, if necessary, the valve
substrate 140 may be formed of a silicon substrate, and only the
valves 210 and 220 may be formed of plastic or a synthetic resin
material.
[0052] The piezoelectric actuator 150 may be formed on the flow
channel forming substrate 120. More specifically, the piezoelectric
actuator 150 may be formed on one surface (the upper surface based
on FIG. 1) of the flow channel forming substrate 120. The
piezoelectric actuator 150 may include a lower electrode, a
piezoelectric element, and an upper electrode. More specifically,
the lower electrode may be formed on the upper surface of the flow
channel forming substrate 120, and the piezoelectric element may be
formed on an upper surface of the lower electrode, and the upper
electrode may be formed on an upper surface of the piezoelectric
element. The piezoelectric actuator 150 may generate driving force
by deforming the piezoelectric element through a current signal
supplied through the upper electrode and the lower electrode. Here,
the driving force of the piezoelectric actuator 150 may be
transferred to the pressure chamber 122 of the flow channel forming
substrate 120 to thereby cause a fluid flow.
[0053] The micropump 100 may allow a fluid to be moved only in one
direction through the valves 210 and 220, and details thereof will
be provided with reference to FIGS. 4 through 8.
[0054] An inlet side (a portion indicated by B in FIG. 4) of the
micropump 100 may be configured as shown in FIG. 5. For example,
the first connecting opening 132 of the flow channel forming
substrate 120 may have a first diameter D1. Further, the first
opening 142 of the valve substrate 140 may have a second diameter
D2. Here, the first diameter D1 may be larger than the second
diameter D2. Further, a first space 146 capable of receiving the
first valve 210 may be formed below the lower surface of the valve
substrate 140.
[0055] The first valve 210 maybe installed in the first space 146.
The first valve 210 may be vertically moved in a height direction
(based on FIG. 5) of the first space 146 and may close the first
opening 142. To this end, the first valve 210 may be provided with
a plurality of discharging openings 212 as shown in FIG. 6. Here, a
diameter D6 of a circle which is inscribed in the plurality of
discharging openings 212 may be larger than the second diameter D2
of the first opening 142. Further, a diameter D5 of a circle which
is circumscribed with the plurality of discharging openings 212 may
be larger than the second diameter D2 of the first opening 142, but
may be smaller than the first diameter D1 of the first connecting
opening 132.
[0056] The fluid may be introduced into the micropump 100 through
the following method:
[0057] When the fluid is moved from the first opening 142 to the
first connecting opening 132, the discharging openings 212 are open
as the first valve 210 is moved downwardly, thereby allowing the
fluid to be moved. On the other hand, when the fluid is moved from
the first connecting opening 132 to the first opening 142, the
first opening 142 is closed as the first valve 210 is moved
upwardly, thereby blocking the fluid from being moved.
[0058] An outlet side (a portion indicated by C in FIG. 4) of the
micropump 100 may be configured as shown in FIG. 7. For example,
the second connecting opening 134 of the flow channel forming
substrate 120 may have a third diameter D3. Further, the second
opening 144 of the valve substrate 140 may have a fourth diameter
D4. Here, the third diameter D3 maybe smaller than the fourth
diameter D4. Further, a second space 148 capable of receiving the
second valve 220 may be formed below the lower surface of the valve
substrate 140.
[0059] The second valve 220 maybe installed in the second space
148. The second valve 220 may be vertically moved in a height
direction (based on FIG. 7) of the second space 148 and may close
the second opening 134. To this end, the second valve 220 may be
provided with a plurality of discharging openings 222 as shown in
FIG. 8. Here, a diameter D8 of a circle which is inscribed in the
plurality of discharging openings 222 may be larger than the third
diameter D3 of the second connecting opening 134, and a diameter D7
of a circle which is circumscribed with the plurality of
discharging openings 222 may be smaller than the fourth diameter D4
of the second opening 144.
[0060] The fluid may be discharged from the micropump 100 through
the following method:
[0061] When the fluid is moved from the second connecting opening
134 to the second opening 144, the discharging openings 222 are
open as the second valve 220 is moved upwardly, thereby allowing
the fluid to be moved. On the other hand, when the fluid is moved
from the second opening 144 to the second connecting opening 134,
the discharging openings 222 are closed as the second valve 220 is
moved downwardly, thereby blocking the fluid from being moved.
[0062] In the above-described configuration of the micropump 100,
the flow of the fluid from the first connecting opening 132 to the
second connecting opening 134 is not interrupted by the pressure
chamber 122, the fluid may be smoothly moved. Further, since
internal pressure may be easily decreased in the pressure chamber
122 by the fluid flowing through the connecting flow channel 124,
the micropump 100 may easily perform a purging process in the
pressure chamber 122.
[0063] Further, the micropump 100 may effectively block the back
flow of the fluid by the above-described valve configuration.
Further, since the micropump 100 controls the direction of movement
of the fluid by the valves 210 and 220, it may constantly move a
small amount of fluid. Further, the valve substrate 140 provided
with the valves 210 and 220 may be separately manufactured, whereby
a process of manufacturing the micropump 100 may be simplified and
production costs of the micropump 100 may be reduced.
[0064] Next, the micropump 100 according to another exemplary
embodiment of the present disclosure will be described with
reference to FIGS. 9 through 11. For reference, in the following
exemplary embodiment, the same element as those in the
above-described exemplary embodiment will be denoted by the same
reference numerals and a detailed description thereof will be
omitted.
[0065] The micropump 100 according to this exemplary embodiment of
the present disclosure may be different from that according to the
above-described exemplary embodiment in terms of positions of the
pressure chamber 122 and the connecting flow channel 124. For
example, according to this exemplary embodiment of the present
disclosure, the pressure chamber 122 and the connecting flow
channel 124 may be formed in an upper surface of the flow channel
forming substrate 120 as shown in FIG. 9.
[0066] In this case, the bottom substrate 110 may be removed from
the micropump 100, whereby the process of manufacturing the
micropump 100 may be simplified and production costs thereof may be
reduced.
[0067] Further, the micropump 100 according to this exemplary
embodiment of the present disclosure may be different from that
according to the above-described exemplary embodiment in terms of
the shape of the connecting flow channel 124. For example, in the
micropump 100 according to this exemplary embodiment of the present
disclosure, as shown in FIGS. 10 and 11, the connecting flow
channel 124 may be formed in shapes of curves R1 and R2 which are
substantially circumscribed with or inscribed in the circular
pressure chamber 122.
[0068] The micropump 100 having the above-mentioned configuration
may extend a length of the connecting flow channel 124 without
changing change the size of the substrate. Particularly, since the
pressure chamber 122 and the connecting flow channel 124 may be
concentrated in a limited region, whereby the miniaturization of
the micropump 100 may be facilitated.
[0069] While exemplary embodiments have been shown and described
above, it will be apparent to those skilled in the art that
modifications and variations could be made without departing from
the spirit and scope of the present disclosure as defined by the
appended claims.
* * * * *