U.S. patent application number 14/590804 was filed with the patent office on 2015-04-30 for semiconductor device.
The applicant listed for this patent is RENESAS ELECTRONICS CORPORATION. Invention is credited to Shinji BABA, Kozo HARADA, Masaki WATANABE, Satoshi YAMADA.
Application Number | 20150118801 14/590804 |
Document ID | / |
Family ID | 49548014 |
Filed Date | 2015-04-30 |
United States Patent
Application |
20150118801 |
Kind Code |
A1 |
HARADA; Kozo ; et
al. |
April 30, 2015 |
SEMICONDUCTOR DEVICE
Abstract
To provide a semiconductor device characterized in that lands
for mounting thereon solder balls placed in an inner area of a chip
mounting area have an NSMD structure. This means that lands for
mounting thereon solder balls placed in an area of the back surface
of a through-hole wiring board overlapping with a chip mounting
area in a plan view have an NSMD structure. According to the
invention, a semiconductor device to be mounted on a mounting
substrate with balls has improved reliability.
Inventors: |
HARADA; Kozo; (Kawasaki-shi,
JP) ; BABA; Shinji; (Kawasaki-shi, JP) ;
WATANABE; Masaki; (Kawasaki-shi, JP) ; YAMADA;
Satoshi; (Kawasaki-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
RENESAS ELECTRONICS CORPORATION |
Kawasaki-shi |
|
JP |
|
|
Family ID: |
49548014 |
Appl. No.: |
14/590804 |
Filed: |
January 6, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13872012 |
Apr 26, 2013 |
8963327 |
|
|
14590804 |
|
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Current U.S.
Class: |
438/126 |
Current CPC
Class: |
H01L 23/49811 20130101;
H01L 2224/14134 20130101; H01L 24/14 20130101; H01L 2924/14
20130101; H01L 23/49827 20130101; H01L 21/56 20130101; H01L 23/50
20130101; H01L 23/49838 20130101; H01L 2224/16225 20130101; H01L
24/13 20130101; H01L 2224/131 20130101; H01L 2224/16238 20130101;
H01L 2224/16237 20130101; H01L 2224/73204 20130101; H01L 2224/32225
20130101; H01L 2224/14152 20130101; H01L 24/16 20130101; H01L
21/563 20130101; H01L 23/3677 20130101; H01L 2924/15311 20130101;
H01L 2224/14154 20130101; H01L 2924/13091 20130101; H01L 2924/1306
20130101; H01L 24/81 20130101; H01L 2224/81801 20130101; H01L
2924/351 20130101; H01L 2224/13147 20130101; H01L 2224/16227
20130101; H01L 2224/13082 20130101; H01L 2224/73204 20130101; H01L
2224/16225 20130101; H01L 2224/32225 20130101; H01L 2924/00
20130101; H01L 2924/15311 20130101; H01L 2224/73204 20130101; H01L
2224/16225 20130101; H01L 2224/32225 20130101; H01L 2924/00
20130101; H01L 2224/13147 20130101; H01L 2924/00014 20130101; H01L
2224/131 20130101; H01L 2924/014 20130101; H01L 2924/13091
20130101; H01L 2924/00 20130101; H01L 2924/1306 20130101; H01L
2924/00 20130101; H01L 2924/351 20130101; H01L 2924/00
20130101 |
Class at
Publication: |
438/126 |
International
Class: |
H01L 23/00 20060101
H01L023/00; H01L 21/56 20060101 H01L021/56 |
Foreign Application Data
Date |
Code |
Application Number |
May 11, 2012 |
JP |
2012-109309 |
Claims
1. A method of manufacturing a semiconductor device comprising: (a)
preparing a semiconductor chip having a main surface over which a
plurality of protruding electrodes and a wiring board having a
first main surface over which a plurality of terminals are formed
and a second main surface over which a plurality of lands are
formed opposite the first main surface; (b) disposing a sealing
resin over the first main surface of the wiring board; and (c)
after the step (b), mounting the semiconductor chip over the first
main surface of the wiring board via the sealing resin such that
the main surface of the semiconductor chip faces to the first main
surface of the wiring board and electrically connecting the
protruding electrodes of the semiconductor chip to the terminals of
the wiring board, respectively, wherein the wiring board comprises:
(a1) an insulating film formed over the second main surface; (a2)
among the terminals, a plurality of first terminals and a plurality
of second terminals placed in a first area of the wiring board;
(a3) a plurality of first through-holes placed in a second area
inside the first area and electrically coupled to the first
terminals, respectively; (a4) among the lands, a plurality of first
lands electrically coupled to the first through-holes,
respectively, and placed so as to overlap with the second area in
plan view; (a5) a plurality of second through-holes placed in a
third area outside the first area and electrically coupled to the
second terminals, respectively; and (a6) among the lands, a
plurality of second lands electrically coupled to the second
through-holes, respectively, and placed so as to overlap with the
third area in plan view, wherein the insulating film has therein a
plurality of openings, wherein the first lands are placed so as to
overlap with the semiconductor chip in plan view, and wherein the
first lands are embraced in the openings, respectively.
2. The method according to claim 1, wherein, in the step (c), the
sealing resin is cured between the main surface of the
semiconductor chip and the first surface of the wiring board by
heating.
3. The method according to claim 2, wherein, in the step (c), each
of the protruding electrodes of the semiconductor chip are
electrically connected to each of the terminals of the wiring board
by melting a solder between each of the protruding electrodes and
the terminals.
4. The method according to claim 3, wherein each of the protruding
electrodes is a copper pillared bump electrode.
5. The method, further comprising: (d) after the step (c),
disposing a plurality of solder balls on the lands of the wiring
board and electrically connecting the solder balls to the lands,
respectively.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a Divisional Application of U.S. Ser.
No. 13/872,012 filed Apr. 26, 2013, which claims priority to
Japanese Patent Application No. 2012-109309 filed on May 11, 2012.
The subject matter of each is incorporated herein by reference in
entirety.
BACKGROUND
[0002] The present invention relates to a semiconductor device. The
invention relates to, for example, a technology effective when
applied to a technology of mounting, on a mounting substrate, a
wiring board having thereon a semiconductor chip via a ball to be
coupled to a land placed on the back surface of the wiring
board.
[0003] Japanese Patent Laid-Open No. 2007-81374 (Patent Document 1)
describes a technology in which a plurality of bonding pads formed
on a substrate are comprised of a plurality of NSMD (Non-Solder
Mask Defined) bonding pads and a plurality of SMD (Solder Mask
Defined) bonding pads alternately arranged on one surface of the
substrate.
[0004] Japanese Patent Laid-Open No. 2010-245455 (Patent Document
2) describes the following technology. Described specifically,
among two or more pads, a pad formed on a corner portion is
covered, at a first peripheral edge on the side of the corner
portion far from the center of the base material of the pad, with a
solder resist. On the other hand, a second peripheral edge on the
side closer to the center of the base material than the first
periphery is exposed from the solder resist.
[0005] According to Japanese Patent Laid-Open No. 2009-21366
(Patent Document 3), a plurality of first electrode pads is placed
in an area of the back surface of a wiring board overlapping with a
semiconductor chip in a plan view and a plurality of second
electrode pads is placed in an area not overlapping with the
semiconductor chip in a plan view. At this time, the first
electrode pads and the second electrode pads are exposed from an
opening provided in an insulating film. The first electrode pads
are covered, at the peripheral edge thereof, with an insulating
film, while the profile of the second electrode pads is smaller
than the opening portion.
[0006] Japanese Patent Laid-Open No. 2005-252074 (Patent Document
4) describes the following technology. Described specifically, a
plurality of electrode pads placed on the back surface of a wiring
board is exposed from an opening portion provided in an insulating
film. The electrode pads include a first electrode pad having a
profile smaller than the opening portion and a second electrode pad
covered at the peripheral edge thereof with an insulating film. At
this time, the second electrode pad is placed at least at a
position most distant from a semiconductor chip.
PATENT DOCUMENTS
[0007] [Patent Document 1] Japanese Patent Laid-Open No. 2007-81374
[0008] [Patent Document 2] Japanese Patent Laid-Open No.
2010-245455 [0009] [Patent Document 3] Japanese Patent Laid-Open
No. 2009-21366 [0010] [Patent Document 4] Japanese Patent Laid-Open
No. 2005-252074
SUMMARY
[0011] For example, a semiconductor device having a wiring board on
which a semiconductor chip is mounted is coupled to a mounting
substrate via a ball. This means that the wiring board has, on the
back surface thereof, a plurality of lands and a plurality of balls
is placed so as to be coupled to the lands. The wiring board is
mounted on the mounting substrate via these balls. In a reliability
test (temperature cycling test after mounting) conducted after the
semiconductor device is mounted on the mounting substrate, fracture
and separation of a ball placed in an area of the back surface of
the wiring board overlapping with a mounting area of the
semiconductor chip in a plan view have become a problem.
[0012] The other problem and novel features of the invention will
be apparent from the description herein and accompanying
drawings.
[0013] According to First Embodiment, a wiring board (through-hole
wiring board) having thereon a semiconductor chip has, on the back
surface thereof, a plurality of lands to be coupled to a plurality
of balls, respectively. A plurality of first lands, among the
lands, placed in an area overlapping with the semiconductor chip in
a plan view is embraced in a plurality of opening portions provided
in an insulating film.
[0014] First Embodiment makes it possible to improve the
reliability of a semiconductor device to be mounted on a mounting
substrate, for example, by using a ball.
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] FIG. 1 is a top view showing the configuration of the
appearance of a semiconductor chip according to a first related
technology;
[0016] FIG. 2 is a side view showing the configuration of a
semiconductor device according to the first related technology;
[0017] FIG. 3 shows a portion of the semiconductor device according
to the first related technology and also shows an internal
structure of a buildup wiring board;
[0018] FIG. 4 shows the surface structure of a semiconductor chip
according to a second related technology;
[0019] FIG. 5 is a side view showing the configuration of the
semiconductor device according to the second related
technology;
[0020] FIG. 6 shows a portion of the semiconductor device according
to the second related technology and also shows an internal
structure of a through-hole wiring board;
[0021] FIG. 7 is a plan view showing the partial configuration of
the through-hole wiring board according to the second related
technology;
[0022] FIG. 8 shows a configuration example of placing a terminal
on a through-hole;
[0023] FIG. 9 shows a configuration example when misalignment
occurs between the through-hole and a land;
[0024] FIG. 10 is a cross-sectional view showing a hemispherical
bump electrode made of a solder which has been mounted on the
through-hole wiring board after size reduction;
[0025] FIG. 11 is a partial cross-sectional view of a pillared bump
electrode mounted on the through-hole wiring board;
[0026] FIG. 12 is a cross-sectional view showing a stud bump
electrode made of gold mounted on the through-hole wiring
board;
[0027] FIG. 13 is a plan view of the through-hole wiring board
according to the second related technology when viewed from the
surface side;
[0028] FIG. 14 is a plan view of the through-hole wiring board
according to the second related technology when viewed from the
back surface;
[0029] FIG. 15 is a schematic view showing the simulation of a
temperature cycling test conducted with the through-hole wiring
board having thereon the semiconductor chip mounted on a mounting
substrate;
[0030] FIG. 16 shows the fracture and separation of a solder ball
which has coupled the through-hole wiring board and the mounting
substrate to each other;
[0031] FIG. 17 shows one example of a land having an SMD
structure;
[0032] FIG. 18 is a cross-sectional view taken along a line A-A of
FIG. 17;
[0033] FIG. 19 is a cross-sectional view showing a solder ball
mounted on the land having an SMD structure;
[0034] FIG. 20 shows one example of a land having an NSMD
structure;
[0035] FIG. 21 is a cross-sectional view taken along a line A-A of
FIG. 20;
[0036] FIG. 22 is a cross-sectional view showing a solder ball
mounted on the land having an NSMD structure;
[0037] FIG. 23 is a plan view showing the configuration of a
through-hole wiring board according to an embodiment;
[0038] FIG. 24 shows a portion of a semiconductor device according
to the embodiment and also shows an internal structure of a
through-hole wiring board;
[0039] FIG. 25 is a plan view showing the configuration of a
through-hole wiring board according to Modification Example 1;
[0040] FIG. 26 is a plan view showing the configuration of a
through-hole wiring board according to Modification Example 2;
[0041] FIG. 27 is a plan view showing the configuration of a
through-hole wiring board according to Modification Example 3;
[0042] FIG. 28 is a plan view showing the configuration of a
through-hole wiring board according to Modification Example 4;
[0043] FIG. 29 is a plan view showing the configuration of a
through-hole wiring board according to Modification Example 5;
[0044] FIG. 30 is a cross-sectional view showing a manufacturing
step of the through-hole wiring board according to the
embodiment;
[0045] FIG. 31 is a cross-sectional view showing a manufacturing
step of the through-hole wiring board following the step shown in
FIG. 30;
[0046] FIG. 32 is a cross-sectional view showing a manufacturing
step of the through-hole wiring board following the step shown in
FIG. 31;
[0047] FIG. 33 is a cross-sectional view showing a manufacturing
step of the through-hole wiring board following the step shown in
FIG. 32;
[0048] FIG. 34 is a cross-sectional view showing a manufacturing
step of the through-hole wiring board following the step shown in
FIG. 33;
[0049] FIG. 35 is a cross-sectional view showing a manufacturing
step of the through-hole wiring board following the step shown in
FIG. 34;
[0050] FIG. 36 is a schematic view showing a manufacturing step of
the semiconductor device according to the embodiment;
[0051] FIG. 37 is a schematic view showing a manufacturing step of
the semiconductor device following the step shown in FIG. 36;
[0052] FIG. 38 is a schematic view showing a manufacturing step of
the semiconductor device following the step shown in FIG. 37;
and
[0053] FIG. 39 is a schematic view showing a manufacturing step of
the semiconductor device following the step shown in FIG. 38.
DETAILED DESCRIPTION
[0054] In the following embodiment, a description will be made
after divided into a plurality of sections or embodiments if
necessary for convenience sake. They are not independent from each
other, but in a relation such that one is a modification example,
details, a complementary description, or the like of a part or
whole of the other one unless otherwise specifically indicated.
[0055] In the below-described embodiments, when a reference is made
to the number of elements (including the number, value, amount,
range, or the like), the number is not limited to a specific number
but may be greater than or less than the specific number, unless
otherwise specifically indicated or principally apparent that the
number is limited to the specific number.
[0056] Further, in the below-described embodiments, it is needless
to say that the constituent elements (including element steps or
the like) are not always essential unless otherwise specifically
indicated or principally apparent that they are essential.
[0057] Similarly, in the below-described embodiments, when a
reference is made to the shape, positional relationship, or the
like of the constituent elements, that substantially approximate or
similar to it is also embraced unless otherwise specifically
indicated or principally apparent that it is not. This also applies
to the above-described value and range.
[0058] In all the drawings for describing the below-described
embodiment, members of a like function will be identified by like
reference numerals in principle and descriptions will not be
repeated. To facilitate viewing of the drawings, some plan views
may be hatched
<Description on First Related Technology>
[0059] For example, a semiconductor device is comprised of a
semiconductor chip in which a semiconductor element such as MOSFET
(Metal Oxide Semiconductor Field Effect Transistor) and a
multilayer wiring have been formed and a package formed to cover
this semiconductor chip. The package has (1) a function of
electrically coupling the semiconductor element formed on the
semiconductor chip to an external circuit and (2) a function of
protecting the semiconductor chip from outside circumstances such
as humidity and temperature and preventing breakage due to
oscillation or impact and deterioration in the properties of the
semiconductor chip. Further, the package also has (3) a function of
facilitating handling of the semiconductor chip and (4) a function
of releasing heat upon operation of the semiconductor chip and
thereby allows the semiconductor element to exhibit its function
fully. There are various kinds of packages having such
functions.
[0060] First, the first related technology investigated by the
present inventors will be described referring to some drawings.
FIG. 1 is a top view showing the configuration of the appearance of
a semiconductor chip CHP1 investigated by the present inventors. As
shown in FIG. 1, the semiconductor chip CHP1 is rectangular and has
bump electrodes BMP, which are external coupling terminals,
throughout the surface of the semiconductor chip CHP1. A
semiconductor device according to the first related technology
investigated by the present inventors can be obtained by packaging
the semiconductor chip CHP1 having such a configuration.
[0061] FIG. 2 is a side view showing the configuration of the
semiconductor device according to the first related technology
investigated by the present inventors. As shown in FIG. 2, the
semiconductor device investigated by the present inventors has a
buildup wiring board BPWB and this buildup wiring board BPWB has,
on the back surface (lower surface) thereof, a plurality of solder
balls SB. The buildup wiring board BPWB has, on the surface (upper
surface) thereof, the semiconductor chip CHP1. Here, the
semiconductor chip CHP1 is placed on the buildup wiring board BPWB
so that a plurality of bump electrodes formed on the semiconductor
chip CHP1 are electrically coupled to terminals (not illustrated)
formed on the surface of the buildup wiring board BPWB. A space
formed between the semiconductor chip CHP1 and the buildup wiring
board BPWB is filled with an underfill UF which is a sealing resin.
This underfill UF is often made of an epoxy resin and is used for
ensuring coupling reliability between the semiconductor chip CHP1
and the buildup wiring board BPWB. The semiconductor chip CHP1 has,
on the upper surface thereof, a heat sink HS via a silicone resin
SCE. This heat sink HS is provided in order to efficiently release
the heat generated from the semiconductor chip CHP1 to the outside.
In short, the heat sink HS is provided in order to improve the heat
dissipation efficiency of the semiconductor chip CHP1.
[0062] The semiconductor device investigated by the present
inventors and having such a configuration, particularly an internal
structure of the buildup wiring board PBWB, will next be described
more specifically. FIG. 3 shows a portion of the semiconductor
device investigated by the present inventors and it shows the
internal structure of the buildup wiring board BPWB. As shown in
FIG. 3, the buildup wiring board BPWB is comprised of a core layer
CRL and a buildup layer BPL1 and a buildup layer BPL2 placed to
sandwich this core layer CRL therebetween.
[0063] More specifically, the core layer CRL has therein a
through-hole TH and the buildup layer BPL 1 has a multilayer wiring
(two layers in FIG. 3) to be coupled to this through-hole TH. The
wirings of this multilayer wiring are coupled to each other through
a via VA formed in the buildup layer BPL1. The buildup layer BPL1
has, on the surface thereof, a solder resist SR and from an opening
provided in this solder resist SR, a terminal TE configuring the
buildup layer BPL1 is exposed. The semiconductor chip CHP1 is
mounted on the buildup wiring board BPWB so as to electrically
couple this terminal TE and the bump electrode BMP to each
other.
[0064] On the other hand, the buildup layer BPL2 also has a
multilayer wiring (two layers in FIG. 3) to be coupled to the
through-hole TH formed in the core layer CRL. This buildup layer
BPL2 has, on the surface thereof, a solder resist SR and a land LND
(back surface terminal) configuring the buildup layer BPL2 is
exposed from an opening provided in this solder resist SR. A solder
ball SB is mounted on the land LND so as to be electrically coupled
to this land LND. More specifically, in the buildup wiring board
BPWB as shown in FIG. 3, the thickness of the wiring board, that
is, a total thickness of the core layer CRL (about 0.8 mm), the
buildup layer BPL1, and the buildup layer BPL2 is about 1.0 mm, the
diameter of the through-hole TH is from about 150 to 250 .mu.m, and
the diameter of the via VA is about 50 .mu.m.
[0065] The buildup wiring board BPWB having such a configuration
has an advantage that it is easy to form fine-pitch wiring,
responding to an increase in the density of bump electrodes BMP
formed on the semiconductor chip CHP1. Described specifically, the
buildup wiring board BPWB has the buildup layer BPL1 and the
buildup layer BPL2 so as to sandwich the core layer CRL
therebetween. A microvia VA is formed in the buildup layer BPL1 or
the buildup layer BPL2 and this via VA can be placed freely. In
addition, a terminal TE may be placed on this microvia VA.
[0066] The reason of it will next be described. The microvia formed
in the buildup layer BPL1 or the buildup layer BPL2 has a fine
diameter so that the microvia VA can be filled with a conductor
film easily. As a result, the upper portion of the microvia VA can
be covered with the conductor film so that even if a terminal TE is
placed on the microvia VA, secure coupling can be realized between
the microvia VA and the terminal TE. Thus, the buildup wiring board
BPWB has an advantage that since the terminal TE can be placed on
the microvia VA, there are not many restrictions on the formation
of wirings and fine-pitch wiring can be formed easily.
[0067] Further, as shown in FIG. 3, in the buildup wiring board
BPWB, a plating film is formed on the wall surface of the
through-hole TH formed in the core layer CRL, but the plating film
is not formed inside the through-hole TH because the through-hole
TH has a large diameter. As shown in FIG. 3, however, a hole
filling resin is buried in the through-hole TH and the through-hole
TH is filled with it. In the buildup wiring board BPWB shown in
FIG. 3, a microvia VA or wiring may be placed even on the
through-hole TH. From this standpoint, the number of limitations on
the formation of wirings decrease, which makes it easy to form
fine-pitch wiring.
[0068] As a result of the investigation, however, the present
inventors have found that there is a room for improvement as shown
below in the above-mentioned buildup wiring board BPWB. For
example, as the semiconductor device operates, the semiconductor
chip CHP1 generates heat. The heat thus generated transfers from
the semiconductor chip CHP1 to the buildup wiring board BPWB. The
heat thus applied to the buildup wiring board BPWB expands the
buildup wiring board BPWB. Excessive expansion of the buildup
wiring board BPWB may put a stress on a sealing resin (underfill
UF), which seals the space between the buildup wiring board BPWB
and the semiconductor chip CHP1, cause cracks at the interface
between the semiconductor chip and the sealing resin or at the
interface between the sealing resin and the buildup wiring board,
and deteriorate the reliability of a semiconductor device.
[0069] In order to reduce the thermal expansion coefficient
(.alpha.) of the buildup wiring board BPWB (in order to bring it
close to the thermal expansion coefficient of the semiconductor
chip CHP1), a core layer CRL containing a glass cloth, which is a
woven cloth made of glass fibers, is provided to reduce the thermal
expansion coefficient of the buildup wiring board BPWB. It becomes
however difficult to form a microvia VA when the buildup wiring
board BPWB is comprised only of the core layer CRL containing a
glass cloth. It is therefore the common practice to provide buildup
layers BPL1 and BPL2 so as to sandwich the core layer CRL
therebetween and form a microvia VA without incorporating the glass
cloth in the buildup layers BPL1 and BPL2. In short, since the
buildup layers BPL1 and BPL2 are free from the glass cloth, a
microvia VA can be formed. The buildup layer BPL1 (BPL2) is however
required to have a small thermal expansion coefficient so that a
glass filler (glass in the form of particles or beads) is added
thereto instead of the glass cloth.
[0070] As described above, the core layer CRL contains a glass
cloth, while the buildup layer BPL1 (BPL2) contains a glass filler
instead of the glass cloth. The thermal expansion coefficient of
the buildup layer BPL1 (BPL2) containing a glass filler does not
become as small as the thermal expansion coefficient of the core
layer CRL containing a glass cloth. For example, the thermal
expansion coefficient of the core layer is from about 17 to 20 ppm
and the thermal expansion coefficient of the buildup layer is from
about 40 to 60 ppm. As a result, there appears a difference in the
thermal expansion coefficient between the buildup layer BPL1 (BPL2)
and the core layer CRL and a thermal stress due to a difference in
the thermal expansion coefficient is inevitably applied between the
buildup layer BPL1 (BPL2) and the core layer CRL. The present
inventors have found that this thermal stress tends to electrically
disconnect the microvia VA formed in the buildup layer BPL1 (BPL2)
and the semiconductor device thus obtained may presumably have
deteriorated reliability.
[0071] In the second related technology, a measure for improving
the reliability of a semiconductor device has been devised. The
semiconductor device according to the second related technology
obtained using this measure will next be described.
<Constitution of Semiconductor Device According to Second
Related Technology>
[0072] FIG. 4 shows the surface structure of a semiconductor chip
CHP2 according to the second related technology. As shown in FIG.
4, the semiconductor chip CHP2 according to the second related
technology is rectangular and has, in a surface area of the
semiconductor chip CHP2, a pillared bump electrode (pillared
protruding electrode) PLBMP1 and a pillared bump electrode PLBMP2.
These pillared bump electrode PLBMP1 and pillared bump electrode
PLBMP2 are comprised of, for example, a pillar portion made of
copper (Cu) and a coupling portion formed on this pillar portion
and made of a solder. The pillar portion has a height of, for
example, about 30 .mu.m and the coupling portion has a height
(solder height) of about 15 .mu.m. The pillar portion is
cylindrical or cuboidal and in a plan view, the cylindrical one has
a diameter of from about 30 to 35 .mu.m and the cuboidal one has
from about 30 to 35 .mu.m on a side.
[0073] Described specifically, in the semiconductor chip CHP2
according to the second related technology, when the surface are of
the semiconductor chip CHP2 is divided into an area AR1, an area
AR2 which is present inside the area AR1, and an area AR3 which is
present inside the area AR2, a plurality of pillared bump
electrodes PLBMP1 are formed in the area AR1 and a plurality of
pillared bump electrodes PLBMP2 are formed in the area AR3. This
means that the pillared bump electrodes PLBMP1 and the pillared
bump electrodes PLBMP2 are spaced apart with the area AR2
therebetween. Here, in the area AR1, two or more rows (two rows in
FIG. 4) of pillared bump electrodes PLBMP1 are formed and in the
area AR3, two or more pillared bump electrodes PLBMP2 are formed
uniformly.
[0074] Here, the minimum pitch between the bumps of the pillared
bump electrodes PLBMP1 placed in the area AR1 is smaller than the
minimum pitch between the bumps of the pillared bump electrodes
PLBMP2 placed in the area AR3. The minimum pitch between the bumps
of the pillared bump electrodes PLBMP1 placed in the area AR1 is
from about 40 to 60 .mu.m. Even if the minimum pitch between the
bumps of the pillared bump electrodes PLBMP1 is equal to or greater
than the minimum pitch between the bumps of the pillared bump
electrodes PLBMP2, however, no particular problem occurs.
[0075] On the other hand, the area AR2 has therein neither pillared
bump electrode PLBMP1 nor pillared bump electrode PLBMP.
[0076] This means that the semiconductor chip CHP2 in the second
related technology is characterized by that the pillared bump
electrodes PLBMP1 (PLBMP2) are not formed throughout the surface of
the semiconductor chip CHP2 but the pillared bump electrodes PLBMP1
(PLBMP2) are formed only in the area AR1 and the area AR3 and no
pillared bump electrode PLBMP1 (PLBMP2) is formed in the area AR2.
For example, the semiconductor chip CHP1 of the first related
technology investigated by the present inventors and shown in FIG.
1, has bump electrodes BMP throughout the surface of the
semiconductor chip CHP1. On the other hand, in the semiconductor
chip CHP2 of the second related technology shown in FIG. 4, the
pillared bump electrodes PLBMP1 (PLBMP2) are formed only in the
area AR1 and area AR3 and no pillared bump electrode PLBMP1
(PLBMP2) is formed in the area AR2.
[0077] Next, the configuration of the semiconductor device
according to the second related technology will be described. FIG.
5 is a side view showing the configuration of the semiconductor
device according to the second related technology. As shown in FIG.
5, the semiconductor device according to the second technology has
a through-hole wiring board THWB and this through-hole wiring board
THWB has, on the back surface (lower surface) thereof, a plurality
of solder balls SB. On the other hand, the through-hole wiring
board THWB has, on the surface (upper surface) thereof, a
semiconductor chip CHP2. Here, the semiconductor chip CHP2 is
placed on the through-hole wiring board THWB so that a plurality of
pillared bump electrodes PLBMP1 and a plurality of pillared bump
electrodes PLBMP2 formed on the semiconductor chip CHP2 are
electrically coupled to terminals (not illustrated) formed on the
surface of the through-hole wiring board THWB. A space formed
between the semiconductor chip CHP2 and the through-hole wiring
board THWB is filled with an underfill UF, which is a sealing
resin. As this underfill UF, an epoxy resin is often used and the
underfill is used for ensuring coupling reliability between the
semiconductor chip CHP2 and the through-hole wiring board THWB. In
the semiconductor device according to the second related
technology, a portion of the back surface of the semiconductor chip
CHP2 which is opposite to the lower surface (bump electrode
formation surface) of the semiconductor chip and a portion of the
surface (main surface, upper surface) of the through-hole wiring
board THWB are not covered with the underfill UF which is a sealing
resin.
[0078] Next, the semiconductor device according to the second
related technology having such a configuration, in particular, the
internal structure of the through-hole wiring board THWB will be
described more specifically.
[0079] FIG. 6 shows a portion of the semiconductor device according
to the second related technology and shows an internal structure of
the through-hole wiring board THWB. As shown in FIG. 6, in the
second related technology, the through-hole wiring board THWB is
formed of a core layer CRL containing a glass cloth. This
through-hole wiring board THWB has therein through-holes TH1, TH2,
and TH3 penetrating from the surface (upper surface) to the back
surface (lower surface) of the through-hole wiring board THWB. The
through-hole wiring board THWB has, on the surface thereof, a
solder resist SR (first solder resist) and this solder resist SR
fills the through-holes TH1, TH2, and TH3 therewith. The solder
resist SR has therein an opening portion and from this opening
portion, a plurality of terminals TE1 or a plurality of terminals
TE2 is exposed.
[0080] For example, the through-hole wiring board THWB has, on the
surface thereof, a plurality of terminals TE1 and some of the
terminals TE1 are electrically coupled to the through-hole TH1 on
the surface of the through-hole wiring board THWB and the other
terminals TE1 are electrically coupled to the through-hole TH2 on
the surface of the through-hole wiring board THWB. In addition, the
through-hole wiring board THWB has, on the surface thereof, a
plurality of terminals TE2 and these terminals TE2 are electrically
coupled to the through-hole TH3 on the surface of the through-hole
wiring board THWB. At this time, the through-hole wiring board THWB
has, on the surface thereof, the semiconductor chip CHP2 and the
pillared bump electrode PLBMP1 formed on this semiconductor chip
CHP2 and the terminals TE1 formed on the surface of the
through-hole wiring board THWB are electrically coupled to each
other. Similarly, the pillared bump electrode PLBMP2 formed on the
semiconductor chip CHP2 and the terminal TE2 formed on the surface
of the through-hole wiring board THWB are electrically coupled to
each other. This means that the through-hole wiring board THWB has,
on the surface and back surface of the core layer CRL, only one
wiring layer. In other words, in the semiconductor device according
to the second technology, the pillared bump electrode is directly
and electrically coupled to the wiring layer of the device.
[0081] On the other hand, the through-hole wiring board THWB has,
on the back surface thereof, a solder resist SR (second solder
resist). The solder resist SR has therein an opening portion and
from this opening portion, a plurality of lands LND1 (back-surface
terminals) or a plurality of lands LND2. These lands LND1 are
electrically coupled to the through-holes TH1 and TH3 on the back
surface of the through-hole wiring board THWB, while the lands LND2
are electrically coupled to the through-hole TH2 on the back
surface of the through-hole wiring board THWB. The lands LND1 have
thereon a solder ball SB1 and the lands LND2 have thereon a solder
ball SB2. More specifically, in the through-hole wiring board THWB
according to the second related technology, the thickness of the
wiring board (in consideration of the wiring thickness on the
surface and back surface) attributable to the core layer CRL (about
0.4 mm) is about 0.5 mm and the through-hole diameter is about 150
.mu.m.
[0082] The second related technology is characterized by the
formation position of the through-holes TH1, TH2, and TH3 in the
through-hole wiring board THWB or the formation position of the
terminals TE1 or terminals TE2 formed on the surface of the
through-hole wiring board THWB so that their configuration will
next be outlined.
[0083] First, as shown in FIG. 6, the through-hole wiring board
THWB has thereon the semiconductor chip CHP2 and it is divided into
the following areas. As shown in FIG. 6, in an area on the
through-hole wiring board THWB, an outer area having thereon no
semiconductor chip CHP2 is defined as an area AR0. The area on the
semiconductor chip CHP2 is divided into an area AR1 on the
semiconductor chip CHP2, an area AR2 on the semiconductor chip
CHP2, and an area AR3 on the semiconductor chip CHP2 corresponding
to the area division shown in FIG. 4. Thus, the surface area of the
through-hole wiring board THWB can be divided into the
above-mentioned four areas.
[0084] Here, the area AR0 will be described. In the through-hole
wiring board THWB, the area AR0 has therein a plurality of
through-holes TH2. This means that the area AR0 of the surface area
of the through-hole wiring board THWB has a plurality of
through-holes TH2 in this area but has neither terminals TE1 nor
terminals TE2. In particular, although the through-holes TH2 are
electrically coupled to the terminals TE1, these terminals TE1 are
not formed in the area AR0 having therein the through-holes
TH2.
[0085] Next, the area AR1 will be described. In the through-hole
wiring board THWB, the area AR1 has therein a plurality of
terminals TE1. This means that the area AR1 of the surface area of
the through-hole wiring board THWB has therein a plurality of
terminals TE1 but has none of the through-holes TH1, TH2, and TH3.
In particular, some of the terminals TE1 of the plurality of
terminals TE1 are electrically coupled to the through-hole TH1,
while the other terminals TE1 of the plurality of terminals TE1 are
electrically coupled to the through-hole TH2. The area AR1 having
therein the terminals TE1 has neither the through-hole TH1 nor the
through-hole TH2. The area AR1 of the semiconductor chip CHP2 has
therein a plurality of pillared bump electrodes PLBMP1 and the
pillared bump electrodes PLBMP1 formed in the area AR1 of the
semiconductor chip CHP2 are directly coupled to the terminals TE1
formed in the area AR1 of the through-hole wiring board THWB.
[0086] An area of the back surface of the through-hole wiring board
THWB overlapping with the area AR1 in a plan view has therein none
of the lands LND1 and LND2 and the solder balls SB1 and SB2 to be
mounted on the lands LND1 and LND2. In other words, in a plan view,
the lands LND1 and LND2 are placed so as not to overlap with the
area AR1.
[0087] Next, the area AR2 will be described The area AR2 of the
through-hole wiring board THWB has therein a plurality of
through-holes TH1. This means that the area AR2 of the surface area
of the through-hole wiring board THWB has therein a plurality of
through-holes TH1 but has neither the terminals TE1 nor the
terminals TE2. In particular, the through-holes TH1 are
electrically coupled to the terminals TE1, but these terminals TE1
are not formed in the area AR2 having therein the through-holes
TH1. The area AR2 of the semiconductor chip CHP2 has therein
neither a plurality of pillared bump electrodes PLBMP1 nor pillared
bump electrode PLBMP2.
[0088] The area AR3 will next be described. The area AR3 of the
through-hole wiring board THWB has therein a plurality of
through-holes TH3 and a plurality of terminals TE2. This means that
the area AR3 of the surface area of the through-hole wiring board
THWB has therein both a plurality of through-holes TH3 and a
plurality of terminals TE2. In particular, the through-holes TH3
are electrically coupled to the terminals TE2 and these terminals
TE2 are formed in the area AR3 having therein the through-holes
TH3. The area AR3 of the semiconductor chip CHP2 has therein a
plurality of pillared bump electrodes PLBMP2 and the pillared bump
electrodes PLBMP formed in the area AR3 of the semiconductor chip
CHP2 are directly coupled to the terminals TE2 formed in the area
AR3 of the through-hole wiring board THWB.
[0089] The through-hole wiring board THWB according to the second
related technology has the configuration as described above. A
further description will be made using a plan view in order to
clarify the positional relationship of the through-holes TH1, TH2,
and TH3 and the terminals TE1 and TE2.
[0090] FIG. 7 is a plan view showing a partial configuration of the
through-hole wiring board THWB according to the second related
technology. FIG. 7 shows roughly the one fourth of the whole area
of the through-hole wiring board THWB. In addition, FIG. 7 shows
the area AR0, area AR1, area AR2, and area AR3.
[0091] It is apparent from FIGS. 6 and 7 that the area AR0 is an
area located outside the outer circumference of the semiconductor
chip CHP2 in a plan view. In other words, the area AR0 is an area
not overlapping with the semiconductor chip CHP2 in a plan view.
Moreover, the area AR1, area AR2, and area AR3 are each an area
located inside the outer circumference of the semiconductor chip
CHP2 in a plan view. In other words, the area AR1, area AR2, and
the area AR3 are areas overlapping with the semiconductor chip CHP2
in a plan view.
[0092] In FIG. 7, the area AR1 has therein a plurality of terminals
TE1. More specifically, the area AR1 has therein a plurality of
terminals TE1 in two rows. For example, the number of the terminals
TE1 placed in a row near the outside is greater than that of the
terminals TE1 placed in a row near the inside. The terminals TE1
placed in the row near the outside are electrically coupled to the
through-holes TH2 formed in the area AR0. More specifically, the
area R0 has therein a plurality of through-holes TH2 and foot
patterns FP2 are formed so as to be brought into contact with these
through-holes TH2. These foot patterns FP2 and the terminals TE1
placed in a row near the outside are coupled to each other with a
wiring WIRE2.
[0093] On the other hand, the terminals TE1 placed in a row near
the inside are electrically coupled to the through-holes TH1 formed
in the area AR2. More specifically, the area AR2 has therein a
plurality of through-holes TH1 and foot patterns FP1 are formed so
as to be brought into contact with these through-holes TH1. These
foot patterns FP1 and the terminals TE1 placed in a row near the
inside are coupled to each other with a wiring WIRE1.
[0094] Next, the area AR3 has therein a plurality of through-holes
TH3 and a plurality of terminals TE2. The terminals TE2 formed in
the area AR3 are electrically coupled to the through-holes TH3
formed also in the area AR3. More specifically, the area AR3 has
therein a plurality of through holes TH3 and foot patterns FP3 are
formed so as to be brought into contact with the through-holes TH3.
These foot patterns FP3 and the terminals TE2 are coupled to each
other with a wiring WIRE3. This means that the terminals TE1 and
the terminals TE2 are spaced apart with the area AR2
therebetween.
<Characteristics of Semiconductor Device According to Second
Related Technology>
[0095] The semiconductor device according to the second related
technology has the above-mentioned configuration. Characteristics
of it will hereinafter be described in detail. First characteristic
of the second related technology is, for example, as shown in FIG.
6, use of a through-hole wiring board THWB as a wiring board on
which the semiconductor chip CHP2 is to be mounted. This means that
in the second related technology, the through-hole wiring board
THWB as shown in FIG. 6 is used without using the buildup wiring
board BPWB as shown in FIG. 3.
[0096] For example, in the buildup wiring board BPWB as shown in
FIG. 3, due to a difference in material between the core layer CRL
containing a glass cloth and the buildup layer BPL1 (BPL2)
containing a glass filler instead of the glass cloth, there exists
a difference in thermal expansion coefficient (.alpha.) between the
core layer CRL and the buildup layer BPL1 (BPL2). When the
semiconductor chip CHP1 is heated and a thermal load is applied to
the buildup wiring board BPWB, a microvia VA formed in the buildup
layer BPL1 (BPL2) is exposed to a thermal stress due to a
difference in thermal expansion coefficient between the core layer
CRL and the buildup layer BPL1 (BPL2) and electric disconnection of
the microvia VA tends to occur. As a result, the resulting
semiconductor device inevitably has deteriorated reliability.
[0097] In the second related technology, on the other hand, not the
buildup wiring board BPWB but the through-hole wiring board THWB is
used. This through-hole wiring board THWB is comprised only of a
core layer CRL containing a glass cloth, for example, as shown in
FIG. 6 and does not have the buildup layer BPL1 (BLP2). In the
through-hole wiring board THWB, therefore, there does not occur
electrical disconnection of a microvia formed in the buildup layer
BPL1 (BPL2) which will otherwise occur due to a difference in
thermal expansion coefficient between the core layer CRL and the
buildup layer BPL1 (BPL2). In other words, since the through-hole
wiring board THWB has therein no buildup layer BPL1 (BPL2) and
therefore has no microvia formed in the buildup layer BPL1 (BPL2),
it is possible to avoid a problem such as electrical disconnection
of a microvia. Thus, in the second related technology, a
through-hole wiring board THWP comprised only of a core layer CRL
is used so that it is unnecessary to consider a difference in
thermal expansion coefficient between the buildup layer BPL1 (BPL2)
and the core layer CRL and in addition, due to absence of the
buildup layer BPL1 (BPL2), it is unnecessary to consider electrical
disconnection of a microvia VA formed in the buildup layer BPL1
(BPL2). According to the second related technology, as a result, a
semiconductor device having improved reliability can be
obtained.
[0098] Moreover, the buildup wiring board BPWB has therein the
buildup layer BPL1 (BPL2) with a large thermal expansion
coefficient so that a large thermal stress tends to be applied to a
sealing resin (underfill UF) for sealing the space between the
buildup wiring board BPWB and the semiconductor chip CHP1. There is
a high possibility of cracks appearing in the sealing resin.
[0099] In the second related technology, on the other hand, used is
a through-hole wiring board (THWB) which has therein no buildup
layer BPL1 (BPL2) with a large thermal expansion coefficient but is
comprised only of a core layer CRL with a small thermal expansion
coefficient. Not so large thermal stress is applied to a sealing
resin (underfill UF) for sealing the space between the through-hole
wiring board THWB and the semiconductor chip CHP2 compared with the
case where the buildup wiring board BPWB is used. It is therefore
possible to reduce the possibility of causing cracks in the sealing
resin. Also from this standpoint, a semiconductor device having
improved reliability can be provided according to the second
related technology.
[0100] Thus, an advantage of using the through-hole wiring board
THWB has been described, but the through-hole wiring board THWB has
a disadvantage as well as the above-mentioned advantage. This
disadvantage will hereinafter be described and a measure for
overcoming this disadvantage of the through-hole wiring board THWB
taken in the second related technology will also be described.
[0101] First, in the buildup wiring board BPWB, for example, as
shown in FIG. 3, a microvia VA is filled with a conductor film so
that a terminal TE can be formed on the microvia VA. In the buildup
wiring board BPWB, a terminal TE can be placed even on the microvia
VA and thus, limitations on the formation of wirings are not so
many. This facilitates formation of fine-pitch wiring.
[0102] On the other hand, the through-hole wiring board THWB is,
for example, as shown in FIG. 6, comprised only of a core layer CRL
and through-holes TH1, TH2, and TH3 penetrating through this core
layer CRL. In other words, the through-hole wiring board THWB
according to the second related technology has therein
through-holes TH1, TH2, and TH3 which penetrate from the surface to
the back surface but there is a limitation that neither terminal
TE1 nor terminal TE2 can be placed on these through-holes TH1, TH2,
and TH3. The following is the reason of it.
[0103] The diameter of the through-holes TH1, TH2, and TH3 formed
in the through-hole wiring board THWB is, for example, about 150
.mu.m, greater than the diameter (about 50 .mu.m) of a microvia.
Even if a plating film (conductor film) is formed in the
through-holes TH1, TH2, and TH3, the plating film is formed only on
the inside wall and the through-holes TH1, TH2, and TH3 inevitably
have a hollow inside without being filled with the plating
film.
[0104] With the through-hole TH1 as an example, among the
through-holes TH1, TH2, and TH3 having such a configuration, a
description will next be made on the placement of the terminal TE1
on the through-hole TH1. FIG. 8 shows a configuration example of
placing a terminal TE1 on a through-hole TH1. As shown in FIG. 8, a
foot pattern FP1 is formed so as to surround the upper surface of a
hollow-state through hole TH1. The foot pattern FP1 has a diameter
of about 250 .mu.m. Since the through-hole TH1 is hollow, the
plating film formed on the side surface of the through-hole TH1 and
the foot pattern FP1 are electrically coupled by forming the foot
pattern FP1 so as to surround the upper surface of the through-hole
TH1. Formation of the terminal TE1 on this foot pattern FP1 is
presumed to enable placement of the terminal TE1 on the
through-hole TH1 via the foot pattern FP1.
[0105] In practice, however, as shown in FIG. 9, misalignment
between the foot pattern FP1 and the through-hole TH1 may occur due
to poor patterning accuracy upon formation of the through-hole TH
and the foot pattern FP1. In this case, the terminal TE1 is
inevitably placed on the hollow-state through-hole TH1 without
being placed on the foot pattern FP1. Then, the through-hole TH1
becomes hollow, which prevents electrical coupling between the
terminal TE1 and the through-hole TH1. Since the through-hole TH1
formed in the through-hole wiring board THWB has a large diameter,
the through-hole becomes hollow and at the same time, misalignment
occurs between the through-hole TH1 and the foot pattern FP1 due to
poor patterning accuracy. As a result, a coupling failure may
presumably occur between the through-hole TH1 and the terminal TE1
when the terminal TE1 is placed on the through-hole TH1.
[0106] Here, as in the through-hole TH formed in the buildup wiring
board BPWB shown in FIG. 3, filling of the through-hole TH with a
hole filling resin can be considered in order to overcome the above
problem. This means that in the buildup wiring board BPWB, the
through-hole TH with a large diameter is filled with a hole filling
resin. Then, a lid plating film is formed on the through-hole TH
filled with the hole filling resin, followed by the formation of a
via VA or wiring on this lid plating film. In the buildup wiring
board BPWB, a via or wiring is placed even on the through-hole TH
with a large diameter so that the restrictions in wiring can be
reduced.
[0107] In the through-hole wiring board THWB (refer to FIG. 6)
according to the second related technology, different from the
buildup wiring board BPWB shown above in FIG. 3, the through-hole
TH with a large diameter is not filled with a hole filling resin,
because the cost of the hole filling resin itself and labor for
filling the through-hole TH with the hole filling resin inevitably
lead to an increased manufacturing cost. In the through-hole wiring
board THWB, therefore the through-holes TH1, TH2, and TH3 are
filled with a solder resist SR applied to the surface and back
surface of the wiring board. In other words, a solder resist SR
(first solder resist) applied to the surface of the through-hole
wiring board THWB and a solder resist SR (second solder resist)
applied to the back surface of the through-hole wiring board THWB
are coupled to each other with solder resists SR with which the
through-holes (TH1, TH2, and TH3) are filled.
[0108] It is to be noted that the solder resist SR (first solder
resist) formed on the surface of the through-hole wiring board
THWB, the solder resist SR (second solder resist) formed on the
back surface of the through-hole wiring board THWB, and the solder
resists SR with which the through-holes (TH1, TH2, and TH3) are
filled are all comprised of the same material. This is one of the
differences in structure between the through-hole wiring board THWB
and the buildup wiring board BPWB.
[0109] Even in the through-hole wiring board THWB according to the
second related technology, by filling the through-hole TH1 with a
hole filling resin and forming a lid plating film, it is possible
to electrically couple the through-hole TH1 and the terminal TE1
surely even when the terminal TE1 is formed on the through-hole
TH1. Such a configuration is however not employed in the
through-hole wiring board THWB according to the second related
technology because the configuration inevitably increases the cost
of the through-hole wiring board THWB. In the through-hole wiring
board THWB according to the second related technology, therefore,
there appears a problem that the terminal TE1 cannot be placed on
the through-hole TH1.
[0110] On the assumption that the terminal TE1 cannot be placed on
the through-hole TH1, however, the second related technology takes
a measure to form a wiring layout on the through-hole wiring board
THWB as efficiently as possible and at the same time, suppress a
cost increase. This measure is a second characteristic of the
second related technology. This second characteristic will
hereinafter be described referring to some drawings.
[0111] The second characteristic of the second related technology
is, as shown for example in FIG. 6, a wiring layout is devised
while separating a through-hole TH1 formation area, a through-hole
TH2 formation area, and a terminal TE1 formation area from each
other. More specifically, as shown in FIG. 6, a plurality of
through-holes TH2 is provided in the area AR0 of the through-hole
wiring board THWB and a plurality of terminals TE1 is provided in
the area AR1 of the through-hole wiring board THWB. In addition, a
plurality of through-holes TH1 is provided in the area AR2 of the
through-hole wiring board THWB. Such a configuration enables
formation of the through-holes TH1 and TH2 and the terminals TE1
in/on the through-hole TH1 and the through-hole TH2 without placing
the terminal TE1 on the through-hole TH1 and the through-hole
TH2.
[0112] Moreover, the wiring layout thus devised will be described
referring to FIG. 7. In FIG. 7, the terminals TE1 are formed in two
rows in the area AR1 of the through-hole wiring board THWB. A
plurality of through-holes TH2 is placed in the area AR0 which is
an area outside the area AR1. In the area AR2 which is an area
inside the area AR1, on the other hand, a plurality of
through-holes TH1 is placed. At this time, the terminals TE1 in the
row placed near the outside, between the two rows of terminals TE1
formed in the area AR1, are electrically coupled to the
through-holes TH2 placed in the area AR0, while the terminals TE1
in the row placed close to the inside, between the two rows of
terminals TE1 formed in the area AR1, are electrically coupled to
the through-holes TH1 placed in the area AR2. Thus, in the second
related technology, the terminals TE1 to be electrically coupled to
the through-holes TH2 formed in the area AR0 are placed on the side
near the area AR0 and the terminals TE1 to be electrically coupled
to the through-holes TH1 formed in the area AR2 are placed on the
side near the area AR2. Such a configuration makes it possible to
realize coupling between the through-hole TH1 and the terminal TE1
and coupling between the through-hole TH2 and the terminal TE2
efficiently while separating the through-hole TH1 formation area,
the through-hole TH2 formation area, and the terminal TE1 formation
area from each other.
[0113] For example, there are cases where the through-holes TH2
formed in the area AR0 are coupled to the terminals TE1 placed in
the row near the area AR2 or the through-holes TH1 formed in the
area AR2 are coupled to the terminals TE1 placed in the row near
the area AR0. In such a case, wirings formed in the area AR1 need
complex dragging, making it difficult to configure an efficient
wiring layout.
[0114] In the second related technology, as shown in FIG. 7, the
terminals TE1 to be electrically coupled to the through-holes TH2
formed in the area AR0 are placed on the side near the area AR0 and
at the same time, the terminals TE1 to be electrically coupled to
the through-holes TH1 formed in the area AR2 are placed on the side
near the area AR2.
[0115] In other words, in the area AR1, the terminals TE1
electrically coupled to the through-holes TH2 are placed so as to
be closer to the area AR0 than to the area AR2 and the terminals
TE1 electrically coupled to the through-holes TH1 are placed so as
to be closer to the area AR2 than to the area AR0. At this time,
the terminals TE1 are electrically coupled to the through-holes TH1
and TH2 via wirings WIRE1 and WIRE2, respectively. This means that
there are no wirings which cross the area AR1 to couple the area
AR0 and the area AR2 or which run between terminals TE1.
[0116] By coupling wirings in such a manner, the second related
technology makes it possible to omit the dragging of the wirings in
the area AR1 and efficiently couple the through-holes TH1 to the
terminals TE1 and efficiently couple the through-holes TH2 to the
terminals TE1 while separating the through-hole TH1 formation area,
the through-hole TH2 formation area, and the terminal TE1 formation
area from each other. The through-hole wiring board THWB has only
one wiring layer on each of the surface and back surface of the
core layer CRL so that high-density wiring cannot be conducted in
this structure compared with a structure in which a plurality of
buildup layers (a plurality of layers as BPL1 and a plurality of
layers as BPL2) is provided on each of the surface and back surface
of the core layer CRL of the buildup wiring board BPWB to form
multilayer wiring. The above-described characteristic dragging
manner is therefore important in realizing high density wiring in
the through-hole wiring board THWB comparable to that in the
buildup wiring board BPWB.
[0117] Another characteristic of the second related technology is
that as shown in FIG. 7, the through-holes TH1 and the
through-holes TH2 are formed in not one area but in both the area
AR0 which is an area outside the area A1 having therein the
terminals TE1 and the area AR2 which is an area inside the area A1.
Supposing that through-holes TH2 are formed only in the area AR0
which is an area outside the area AR1 having therein the terminals
TE1, the number of through-holes TH2 formed in the area AR0
increases because the through-holes TH2 are formed only in the area
AR0. This increases the number of wirings for electrically coupling
a plurality of through-holes TH2 formed in the area AR0 and a
plurality of terminals TE1 formed in the area AR1, respectively.
This requires fine-pitch wiring to be laid from the area AR0 to the
area AR1.
[0118] In the second related technology, however, not a buildup
wiring board suited for fine-pitch wiring but a through-hole wiring
board THWB less suited for fine-pitch wiring than the buildup
wiring board is used. This reveals that it is difficult to realize,
in the through-hole wiring board THWB, the layout configuration in
which through-holes TH2 are placed densely only in the area AR0 as
described above.
[0119] In the second related technology, therefore, there is
devised a measure of not placing the through-holes TH2 densely in
the area AR0 but placing the through-holes TH1 and TH2 in the area
AR0 and area AR2, respectively, while sandwiching therebetween the
area AR1 having therein the terminals TE1. This makes it possible
to distribute the through-holes TH1 and the through-holes TH2 in
the area AR0 and the area AR2 and therefore to disperse the wirings
WIRE1 for coupling the through-holes TH1 and the terminals TE1 and
the wirings WIRE2 for coupling the through-holes TH2 and the
terminals TE1 in different areas without increasing their density.
As a result, even if the through-hole wiring board THWB not suited
for fine-pitch wiring is used, it is possible to respond to an
increase in the number of the through-holes TH1 (TH2) and terminals
TE1 to satisfy a demand for semiconductor devices having a higher
function. It has been found also from this standpoint that an
efficient wiring layout is realized according to the second related
technology.
[0120] As shown in FIG. 7, the area of the area AR0 is larger than
that of the area AR2 so that the number of the through-holes TH2
formed in the area AR0 is larger than that of the through-holes TH1
formed in the area AR2. Accordingly, the number of the terminals
TE1 to be electrically coupled to the through-holes TH2 formed in
the area AR0 is larger than that of the terminals TE1 to be
electrically coupled to the through-holes TH1 formed in the area
AR2. This suggests that the number of the terminals TE1 placed on
the side near the area AR0, among those formed in two rows in the
area AR1, is larger than that of the terminals TE1 placed on the
side near the area AR2. Wirings for coupling the through-holes TH2
formed in the area AR0 and the terminals TE1 formed in the area AR1
include, for example, a power supply line for supplying a power
supply potential, a GND line for supplying a reference potential
(GND potential), or a signal line for transferring a signal (signal
voltage). Similarly, wirings for coupling the through-holes TH1
formed in the area AR2 and the terminals TE1 formed in the area AR1
include, for example, a power supply line for supplying a power
supply potential, a GND line for supplying a reference potential
(GND potential), or a signal line for transferring a signal (signal
voltage).
[0121] The third characteristic of the second related technology is
that as shown in FIG. 6, a plurality of through-holes TH3 and a
plurality of terminals TE2 are formed in the area AR3. Described
specifically, the principal technical concept of the second related
technology is, as described above in the description on the second
characteristic, that the through-holes TH1 and the terminals TE1
are efficiently coupled to each other and the through-holes TH2 and
the terminals TE1 are efficiently coupled to each other while
separating the through-hole TH1 formation area, the through-hole
TH2 formation area, and the terminal TE1 formation area to each
other. The second related technology however has a characteristic,
as a third one, that a plurality of through-holes TH3 and a
plurality of terminals TE2 are formed in the area AR3.
[0122] More specifically, as shown in FIG. 7, the area AR3 has
therein a plurality of through-holes TH3 and a plurality of
terminals TE2, but no terminals TE2 are placed on the through-holes
TH3. This means that as shown in FIG. 7, foot patterns FP3 are
formed so as to surround the upper portion of the through-holes
TH3, but these foot patterns FP3 have thereon no terminals TE2. The
foot patterns FP3 and the terminals TE2 are coupled to each other
with wirings WIRE3. The wirings WIRE3 formed in this area AR3 and
coupling the through-holes TH3 to the terminals TE2 are comprised
only of, for example, a power supply line for supplying a power
supply potential and a GND line for supplying a reference potential
(GND potential). This means that the wirings WIRE3 formed in the
area AR3 and coupling the through-holes TH3 to the terminals TE2 do
not include a signal line for transferring a signal (signal
voltage).
[0123] According to the second related technology, therefore, not
only a power supply potential and a reference potential can be
supplied from some of the terminals TE1 formed in the area AR1 to
the semiconductor chip CHP2 but also a power supply potential and a
reference potential can be supplied from the terminals TE2 formed
in the area AR3 to the semiconductor chip CHP2. This means that a
power supply potential and a reference potential can be supplied
through not only from the area AR1 of the semiconductor chip CHP2
but also from the area AR3 so that a power supply voltage drop (IR
drop) in the semiconductor chip CHP2 can be reduced
[0124] For example, when the through-holes TH3 and the terminals
TE2 configuring a power supply wiring and a reference wiring are
not formed in the area AR3, a power supply potential and a
reference potential can be supplied to the inside of the
semiconductor chip CHP2 only from the terminals TE1 formed in the
area AR1. In this case, in order to supply a power supply potential
and a reference potential to an integrated circuit formed in the
area AR3 of the semiconductor chip CHP2, it is necessary to drag
about an internal wiring of the semiconductor chip CHP2 from the
area AR1 to the area AR3 of the semiconductor chip CHP2. A
resistance component derived from dragging of the internal wiring
however inevitably causes a drop in power supply potential (power
supply voltage drop).
[0125] In the second related technology, through-holes TH3 and
terminals TE2 which configure the power supply wiring and reference
wiring are formed in the area AR3 of the through-hole wiring board
THWB and from these terminals TE2, a power supply potential and a
reference potential are supplied to the area AR3 of the
semiconductor chip CHP2. The second related technology makes it
possible not only to supply a power supply potential and a
reference potential from some of the terminals TE1 formed in the
area AR1 to the semiconductor chip CHP2 but also to supply the
power supply potential and reference potential from the terminals
TE2 formed in the area AR3 to the semiconductor chip CHP2. In
short, since the power supply potential and the reference potential
can be supplied not only through the area AR1 of the semiconductor
chip CHP2 but also through the area A3, a power supply voltage drop
(IR drop) in the semiconductor chip CHP2 can be reduced.
[0126] The power supply potential and the reference potential to be
supplied from some of the terminals TE1 formed in the area AR1 can
be supplied to an I/O circuit (external interface circuit) formed
on the semiconductor chip CHP2. On the other hand, the power supply
potential and the reference potential to be supplied from some of
the terminals TE2 formed in the area AR3 can be supplied to a core
circuit (internal circuit) formed on the semiconductor chip CHP2.
This means that it is desired to supply a power supply potential
and a reference potential to the I/O circuit from a plurality of
terminals TE1 formed in the area AR1 and supply a power supply
potential and a reference potential to the core circuit which is
driven at a voltage lower than that of the I/O circuit from a
plurality of terminals TE2 formed in the area AR3. In other words,
the power supply potential supplied from a plurality of terminals
TE1 formed in the area AR1 is higher than the power supply
potential supplied from a plurality of terminals TE2 formed in the
area AR3.
[0127] Since, for example, the pillared bump electrode PLBMP1 of
the semiconductor chip CHP2 to which the terminal TE1 is coupled is
a bump electrode including an input/output signal pin, when a power
supply potential and a reference potential for the I/O circuit is
supplied to the terminal TE1, the above-mentioned configuration
makes it possible to supply the power supply potential and the
reference potential for the I/O circuit efficiently with the
shortest distance. On the other hand, since the pillared bump
electrode PLBMP2 of the semiconductor chip CHP2 to which the
terminal TE2 is coupled is a bump electrode not including an
input/output signal pin, when a power potential and a reference
potential for the core circuit for driving an internal circuit
(core circuit) placed at the center portion of the semiconductor
chip CHP2, the above-mentioned configuration makes it possible to
supply the power supply potential and the reference potential for
the core circuit efficiently with the shortest distance.
[0128] Moreover, in the second related technology, with regard to
the through-holes TH3 placed in the area AR3 of the through-hole
wiring board THWB, the through-holes TH3 for supplying a power
supply potential and the through-holes TH3 for supplying a
referential potential are preferably placed alternately. In this
case, the power supply potential and the reference potential can be
supplied uniformly throughout the area AR3 of the semiconductor
chip CHP2.
[0129] More specifically, the semiconductor chip CH2 has, in the
area AR3 at the center portion of the semiconductor chip, an
internal circuit (core circuit) and it is possible to supply this
core circuit with a power supply potential and a reference
potential uniformly by alternately placing the through-holes TH3
for supplying a power supply potential and the through-holes TH3
for supplying a reference potential. Supposing that the
through-holes T3 for supplying a power supply potential and the
through-holes TH3 for supplying a reference potential are placed
not uniformly, it will be difficult to uniformly supply the core
circuit formed in the area AR3 with a power supply potential and a
reference potential. By alternately placing the through-holes TH3
for supplying a power supply potential and the through-holes TH3
for supplying a reference potential, however, it is possible to
uniformly supply the core circuit with a power supply potential and
a reference potential. As a result, the core circuit has improved
operation stability.
[0130] The through-hole wiring board THWB according to the second
related technology therefore has the above-mentioned second
characteristic and the third characteristic. As shown in FIG. 6,
the terminals TE1 are formed in the area AR1 of the through-hole
wiring board THWB and the terminals TE2 are formed in the area AR3
of the through-hole wiring board THWB. This means that according to
the second related technology, all of the area AR1, the area AR2,
and the area AR3 of the through-hole wiring board THWB on which the
semiconductor chip CHP2 is mounted do not have terminals (terminal
TE1 and TE2) so that the position of bump electrodes formed on the
semiconductor chip CHP2 to be mounted on the through-hole wiring
board THWB is also changed. More specifically, the configuration as
shown in FIG. 1 in which bump electrodes BMP are formed throughout
the surface of a rectangular semiconductor chip CHP1 is changed to
the configuration as shown in FIG. 4 in which pillared bump
electrodes PLBMP1 (PLBMP2) are formed only in the areas AR1 and AR3
of a rectangular semiconductor chip CHP2.
[0131] The characteristic of the semiconductor chip CHP2 to be
mounted on the through-hole wiring board THWB according to the
second related technology will next be described. The fourth
characteristic of the second related technology resides in the bump
structure of the semiconductor chip CHP2 to be mounted on the
through-hole wiring board THWB. More specifically, as shown in FIG.
4, the semiconductor chip CHP2 according to the second related
technology has an area AR1, an area AR2 inside this area AR1, and
an area AR3 inside this area AR2. The area AR1 has therein a
pillared bump electrode PLBMP1 and the area AR3 has therein a
pillared bump electrode PLBMP2, while the area AR2 has therein
neither a pillared bump electrode PLBMP1 nor a pillared bump
electrode PLBMP2.
[0132] FIG. 6 shows the semiconductor chip CHP2 with such a
configuration mounted on the through-hole wiring board THWB. It has
been found from FIG. 6 that the pillared bump electrode PLBMP1
formed in the area AR1 of the semiconductor chip CHP2 is directly
coupled to the terminal TE1 formed in the area AR1 of the
through-hole wiring board THWB and the pillared bump electrode
PLBMP2 formed in the area AR3 of the semiconductor chip CHP2 is
directly coupled to the terminal TE2 formed in the area AR3 of the
through-hole wiring board PLBMP2. In other words, a portion where
the pillared bump electrode PLBMP1 is coupled to the terminal TE1
and a portion where the pillared bump electrode PLBMP2 is coupled
to the terminal TE2 are placed separately with the area AR2 of the
semiconductor chip CHP2 (through-hole wiring board THWB)
therebetween.
[0133] Here, the problem which occurs in changing the bump
structure from that of the semiconductor chip CHP1 shown in FIG. 1
to that of the semiconductor chip CHP2 shown in FIG. 4 will next be
described. For example, the bump structure is changed from that of
the semiconductor chip CHP1 shown in FIG. 1 to that of the
semiconductor chip CHP2 shown in FIG. 4 without changing the number
of bump electrodes formed on the semiconductor chip CHP2 shown in
FIG. 1. In this case, the semiconductor chip CHP1 shown in FIG. 1
has bump electrodes BMP throughout the surface area thereof, while
the semiconductor chip CHP2 shown in FIG. 4 has bump electrodes
only in portions (area AR1 and area AR3) of the surface area
thereof. This suggests that an area of the semiconductor chip CHP2
shown in FIG. 4 in which bump electrodes are placed becomes smaller
than an area of the semiconductor chip CHP1 shown in FIG. 1 in
which bump electrodes BMP are placed. In order to make equal the
number of bump electrodes of the semiconductor chip CHP1 shown in
FIG. 1 and the number of bump electrodes of the semiconductor chip
CHP2 shown in FIG. 4, the size of bump electrodes of the
semiconductor chip CHP2 shown in FIG. 4 must be made smaller than
the size of bump electrodes BMP of the semiconductor chip CHP1
shown in FIG. 1.
[0134] The bump electrodes BMP formed on the semiconductor chip
CHP1 shown in FIG. 1 are hemispherical bump electrodes BMP made of,
for example, a solder. First, a decrease in the size of these bump
electrodes BMP is considered.
[0135] FIG. 10 is a cross-sectional view of the hemispherical bump
electrode BMP made of a solder mounted on the through-hole wiring
board THWB after size reduction of this bump electrode BMP. As
shown in FIG. 10, the through-hole wiring board THWB has thereon a
terminal TE1 and the bump electrode BMP is mounted on this terminal
TE1. This bump electrode BMP is formed in an opening portion OP
formed in a passivation film (surface protecting film) PAS made of,
for example, a silicon nitride film. This bump electrode BMP is
formed on a pad PD exposed from the opening portion OP. The pad PD
is formed on an interlayer insulating film IL.
[0136] If the size of this hemispherical bump electrode BMP is
reduced, the space (standoff) A1 between the semiconductor chip and
the through-hole wiring board THWB also becomes narrow. When the
space (standoff) A1 between the semiconductor chip and the
through-hole wiring board THWB is narrowed, the filling property of
the underfill with which the space is filled is deteriorated and
may form voids (air bubbles) in the underfill. When the voids are
formed in the underfill, water penetrates into the voids and the
water in the voids expands by high-temperature reflow (for example,
from about 240 to 260.degree. C.) during solder mounting on a
mounting substrate. As a result, cracks may be caused in the
underfill with the voids as a starting point. Moreover, if the
voids exist adjacent to the bump electrode, water penetrated into
the voids may cause corrosion at the coupled portion between the
bump electrodes BMP and the terminals TE1 and deteriorate the
coupling reliability between the semiconductor chip and the
through-hole wiring board THWB. This means that only a reduction in
the size of the hemispherical bump electrode BMP formed on the
semiconductor chip CHP1 shown in FIG. 1 may lead to deterioration
in the reliability of the semiconductor device because of the
narrowing of the space (standoff) A1 between the semiconductor chip
and the through-hole wiring board THWB.
[0137] As a result of investigation, the present inventors have
found that the space (standoff) A1 between the semiconductor chip
and the through-hole wiring board THWB should be about 20 .mu.m or
greater in order to secure the filling property of the underfill.
The second related technology therefore employs not the
hemispherical bump electrode BMP as shown in FIG. 10 but a pillared
bump electrode PLBMP1 as shown in FIG. 11. FIG. 11 is a partial
cross-sectional view of a pillared bump electrode PLBMP1 mounted on
the through-hole wiring board THWB. As shown in FIG. 11, the
through-hole wiring board THWB has thereon a terminal TE1 and the
pillared bump electrode PLBMP1 is mounted on this terminal TE1.
This pillared bump electrode BMP is comprised of a pillar portion
made of, for example, copper (Cu) and a coupled portion formed on
this pillar portion and made of a solder. In other words, the
pillared bump electrode PLBMP1 has a first portion made of a solder
and a second portion (copper) having a melting point higher than
that of the first portion (solder). This pillared bump electrode
PLBMP1 is formed in an opening portion OP formed in a passivation
film (surface protecting film) PAS made of, for example, a silicon
nitride film. This pillared bump electrode PLBMP1 is formed on a
pad PD exposed from the opening portion OP. The pad PD is formed on
an interlayer insulating film IL.
[0138] In the pillared bump electrode PLBMP1 having such a
configuration, even if the size of the pillared bump electrode
PLBMP1 is reduced, the pillar portion made of copper prevents the
space (standoff) A2 between the semiconductor chip and the
through-hole wiring board THWB from becoming smaller than the space
(standoff) A1 at the time when the hemispherical bump electrode BMP
as shown in FIG. 10 is used for coupling (A2>A1). Described
specifically, the pillared bump electrode BMP has a first portion
made of a solder and a second portion (copper) having a melting
point higher than that of the first portion (solder). In this case,
the semiconductor chip is mounted on the through-hole wiring board
THWB and the pillared bump electrode PLBMP1 of the semiconductor
chip and the terminal TE1 on the through-hole wiring board THWB are
electrically coupled to each other by melting the first portion
(solder) of the pillared bump electrode PLBMP1 at a high
temperature (for example, from about 240 to 260.degree. C.). During
melting, the second portion (copper) of the pillared bump electrode
PLBMP1 is not molten even at a high temperature because the melting
point of the second portion is higher than that of the first
portion (solder). Accordingly, the space (standoff) A2 between the
semiconductor chip and the through-hole wiring board THWB does not
become smaller than the height of the second portion (copper) of
the pillared bump electrode PLBMP1. As described above, the space
(standoff) A2 between the semiconductor chip and the through-hole
wiring board THWB should be about 20 .mu.m or greater in order to
secure the filling property of the underfill, but the height of the
second portion (copper) of the pillared bump electrode PLBMP1 is as
high as about 30 .mu.m so that it fully satisfies the
requirement.
[0139] When the pillared bump electrode PLBMP1 as shown in FIG. 11
is used, a sufficient standoff can be secured even if the size of
the pillared bump electrode PLBMP1 itself is reduced. This makes it
possible to suppress deterioration in the filling property of the
underfill or deterioration in the coupling reliability between the
semiconductor chip and the through-hole wiring board THWB. The
semiconductor chip CHP2 according to the second related technology
uses, for example, the pillared bump electrode PLBMP1 and the
pillared bump electrode PLBMP2 as shown in FIGS. 5 and 6.
[0140] In the above description, the second portion of the pillared
bump electrode PLBMP1 made of copper is given as an example but any
material is usable insofar as it is a (metal) material having a
melting point higher than that of the solder of the first portion.
As well as copper, gold (Au) or the like may be used as the
material of the second portion. The cost (material cost) can be
reduced by using copper as the second portion compared with using
gold. The second portion of the pillared bump electrode PLBMP1 can
be made higher easily by stacking copper by plating.
[0141] As the solder of the first portion of the pillared bump
electrode PLBMP1, a Sn--Ag-based or Sn--Ag--Cu-based lead-free
solder may be used.
[0142] The fourth characteristic of the second related technology
is therefore that for example as shown in FIG. 4, the pillared bump
electrode PLBMP1 (PLBMP2) is formed only in portions (area AR1 and
area AR3) of the surface area of the semiconductor chip CHP2. This
makes it possible to configure the semiconductor chip CHP2 suited
for the through-hole wiring board THWB having the second and third
characteristics. By mounting the semiconductor chip CHP2 having the
fourth characteristic on the through-hole wiring board THWB having
the second and third characteristics, a semiconductor device having
improved reliability can be obtained at a reduced cost.
[0143] In the second related technology, an example of configuring
the bump electrode to be formed on the semiconductor CHP2 from the
pillared bump electrode PLBMP1 (PLBMP2) has been described, but the
bump electrode to be formed on the semiconductor chip CHP2 is not
limited to it but may be configured from a stud bump electrode.
[0144] FIG. 12 is a cross-sectional view showing a stud bump
electrode SDBMP1 made of, for example, gold mounted on the
through-hole wiring board THWB. As shown in FIG. 12, the
through-hole wiring board THWB has thereon the terminal TH1 and the
stud bump electrode SDBMP1 is mounted on this terminal TE1 and at
the same time, a solder S is formed so as to cover the coupled
portion between the terminal TE1 and the stud bump electrode
SDBMP1. The stud bump electrode SDBMP1 is formed in an opening
portion OP formed in a passivation film (surface protecting film)
PAS made of, for example, a silicon nitride film and the stud bump
electrode SDBMP1 is formed on a pad PD exposed from the opening
portion OP. This pad is formed on an interlayer insulating film
IL.
[0145] In the stud bump electrode SDBMP1 having such a
configuration, even if the size of the stud bump electrode SDBMP1
is reduced, a space (standoff) A3 (>A1) between the
semiconductor chip and the through-hole wiring board THWB can be
secured. Also in this example, the stud bump electrode SDBMP1
(second portion) is made of a material having a melting point
higher than that of the solder S (first portion). When the stud
bump electrode SDBMP1 (second portion) is electrically coupled to
the terminal TE1 on the through-hole wiring board THWB by melting
at a high temperature, the stud bump electrode SDBMP1 (second
portion) is not melted at a high temperature because the melting
point of the stud bump electrode SDBMP1 (second portion) is higher
than that of the solder S (first portion). The height of the space
(standoff) A3 between the semiconductor chip and the through-hole
wiring board THWB does not become smaller than the height of the
stud bump electrode SDBMP1 (second portion, gold).
[0146] As a result, when the stud bump electrode SDBMP1 as shown in
FIG. 12 is used, a sufficient standoff can be secured even if the
size of the stud bump electrode SDBMP1 itself is reduced. This
makes it possible to suppress deterioration in the filling property
of the underfill or deterioration in the coupling reliability
between the semiconductor chip and the through-hole wiring board
THWB. Thus, the stud bump electrode SDBMP1 may be used instead of
the pillared bump electrode PLBMP1 (PLBMP2).
[0147] Here, the description has been made using, as an example,
the stud bump electrode SDBMP1 made of gold, but it may be, for
example, a copper stud bump electrode formed by using a copper
wire.
[0148] The semiconductor chip CHP2 according to the second related
technology having the fourth characteristic as described above
exhibits the following effect. Described specifically, in the
semiconductor chip CHP2 according to the second related technology,
for example as shown in FIG. 4, the area AR1 has therein the
pillared bump electrode PLBMP1 and at the same time, the area AR3
sandwiching the area AR2 with the area AR1 has the pillared bump
electrode PLBMP1. This means that the pillared bump electrode
PLBMP1 formed in the area AR1 and the pillared bump electrode
PLBMP2 formed in the area AR3 are separated from each other with a
space corresponding to the area AR2 formed between the area AR1 and
the area AR3.
[0149] Here, the pillared bump electrode PLBMP2 formed in the area
AR3 is coupled to a power source line and has a function of
supplying a power supply potential or a reference potential to an
integrated circuit formed inside the semiconductor chip CHP2. Some
of the pillared bump electrodes PLBMP1 formed in the area AR1 are
coupled to a power source line and some of them are coupled to a
signal line.
[0150] When the pillared bump electrode PLBMP1 formed in the area
AR1 is placed adjacent to the pillared bump electrode PLBMP2 formed
in the area AR3, mutual interference (cross coupling) tends to
occur between the pillared bump electrode PLBMP1 and the pillared
bump electrode PLBMP2. Then, noise tends to occur in the power
supply voltage or reference voltage to be supplied to the pillared
bump electrode PLBMP2 coupled to the power source line.
[0151] The semiconductor chip CHP2 according to the second related
technology has, between the area AR1 and the area AR3, the area AR2
having therein no bump electrodes and this area AR2 serves to
increase the distance between the pillared bump electrode PLBMP2
formed in the area AR3 and the pillared bump electrode PLBMP1 in
the area AR1. This means that in the semiconductor chip CHP2
according to the second related technology, cross coupling between
the power source line coupled to the pillared bump electrode PLBMP2
formed in the area AR3 and the signal line coupled to the pillared
bump electrode PLBMP1 formed in the area AR1 can be suppressed. As
a result, according to the second related technology, stability of
a power supply voltage or a reference voltage to be applied to a
power source line coupled to the pillared bump electrode PLBMP2
formed in the area AR3 can be enhanced and therefore, an integrated
circuit formed on the semiconductor chip CHP2 has improved
operation stability.
[0152] Next, the fifth characteristic of the second related
technology will be described. For example, as shown in FIG. 6 or
FIG. 7, in the semiconductor device according to the second related
technology, the through-hole wiring board THWB has, in the area AR2
and area AR3, a plurality of through-holes TH1 and through-holes
TH3. This means that when the semiconductor chip CHP2 is mounted on
the through-hole wiring board THWB, there are many through-holes
TH1 and through-holes TH3 in areas (area AR2 and area AR3) of the
through-hole wiring board THWB which overlaps with the
semiconductor chip CHP2 in a plan view. Since the through-holes TH1
and the through-holes TH3 have, on the inner wall thereof, a
plating film made of, for example, copper having a desirable
thermal conductivity, heat generated in the semiconductor chip CHP2
can be released efficiently from these many through-holes TH1 and
through-holes TH3 formed immediately below the semiconductor chip
CHP2. The semiconductor device according to the second related
technology therefore has improved release characteristics of heat
generated in the semiconductor chip CHP2. As a result, a heat sink
HS shown in FIG. 2 may be omitted. If the heat sink HS becomes
unnecessary, the material cost can be reduced correspondingly.
[0153] As described above, the second related technology has at
least the first to fifth characteristics. The following is the
outline of these first to fifth characteristics.
[0154] (1) The first characteristic of the second related
technology is that as a wiring board having the semiconductor chip
CHP2 thereon, the through-hole wiring board THWB as shown in FIG. 6
is used without using the buildup wiring board BPWB as shown in
FIG. 3. In the second related technology, since the through-hole
wiring board THWB comprised only of the core layer CRL is used, it
becomes unnecessary to consider the difference in thermal expansion
coefficient between the buildup layer BPL1 (BPL2) and the core
layer CRL. Moreover, the through-hole wiring board does not have
the buildup layer BPL1 (BPL2) so that it becomes unnecessary to
consider the electrical disconnection of a microvia VA formed in
the buildup layer BPL1 (BPL2). As a result, the second related
technology makes it possible to provide a semiconductor device
having improved reliability while reducing a manufacturing
cost.
[0155] (2) The second characteristic of the second related
technology is that for example as shown in FIG. 6, a wiring layout
is devised while separating the through-hole TH1 formation area,
the through-hole TH2 formation area, and the terminal TE1 formation
area from each other. More specifically, as shown in FIG. 6, a
plurality of through-holes TH2 is provided in the area AR0 of the
through-hole wiring board THWB and a plurality of terminals TE1 is
provided in the area AR1 of the through-hole wiring board THWB.
And, a plurality of through-holes TH1 is provided in the area AR2
of the through-hole wiring board THWB. In the second related
technology, as shown in FIG. 7, the terminals TE1 to be
electrically coupled to the through-holes TH2 formed in the area
AR0 is placed on the side near the AR0 and the terminals TE1 to be
electrically coupled to the through-holes TH1 formed in the area
AR2 is placed on the side near the area AR2. According to this
wiring layout of the second related technology, it becomes
unnecessary to drag wirings in the area AR1 and becomes possible to
efficiently couple the through-holes TH1 and the terminals TE1 to
each other and efficiently couple the through-holes TH2 and the
terminals TE1 to each other while separating the through-hole TH1
formation area, the through-hole TH2 formation area, and the
terminal TE1 formation area from each other.
[0156] (3) The third characteristic of the second related
technology is that as shown in FIG. 6, a plurality of through-holes
TH3 and a plurality of terminals TE2 are formed in the area AR3 and
wirings for coupling the through-holes TH3 and the terminals TE2
formed in this area AR3 are comprised only of, for example, a power
supply line for supplying a power supply potential or a GND line
for supplying a reference potential (GND potential). Such a
configuration in the second related technology makes it possible
not only to supply the semiconductor chip CHP2 with a power supply
potential and a reference potential from some of the terminals TE1
formed in the area AR1 but also to supply the semiconductor chip
CHP2 with a power supply potential and a reference potential from
the terminals TE2 formed in the area AR3. In short, a power supply
potential and a reference potential can be supplied not only from
the area AR1 of the semiconductor chip CHP2 but also from the area
AR3 so that a power supply voltage drop (IR drop) in the
semiconductor chip CHP2 can be reduced.
[0157] (4) The fourth characteristic of the second related
technology is that for example as shown in FIG. 4, the pillared
bump electrode PLBMP1 (PLBMP2) is formed only in portions (the area
AR1 and the area AR3) of the surface area of the semiconductor chip
CHP2. This makes it possible to provide a sufficient standoff even
if the size of the pillared bump electrode PLBMP1 (PLBMP2) itself
is reduced so that deterioration in the filling property of the
underfill or deterioration in the coupling reliability between the
semiconductor chip and the through-hole wiring board THWB can be
suppressed. Moreover, a semiconductor chip CHP2 suited for the
through-hole wiring board THWB equipped with the second and third
characteristics can be configured. Moreover, according to the
fourth characteristic of the second related technology, the area
AR1 and the area AR3 have therebetween the area AR2 having no bump
electrode formed therein and due to the presence of this area AR2,
the distance between the pillared bump electrode PLBMP2 formed in
the area AR3 and the pillared bump electrode PLBMP1 formed in the
area AR1 can be widened. As a result, according to the second
related technology, cross coupling between a power source line
coupled to the pillared bump electrode PLBMP2 formed in the area
AR3 and a signal line coupled to the pillared bump electrode PLBMP1
formed in the area AR1 can be suppressed.
[0158] The second related technology therefore makes it possible to
enhance the stability of a power supply voltage or a reference
voltage to be applied to a power supply line coupled to the
pillared bump electrode PLBMP2 formed in the area AR3 and therefore
to improve the operation stability of the integrated circuit formed
in the semiconductor chip CHP2.
[0159] (5) The fifth characteristic of the second related
technology is that when the semiconductor chip CHP2 is mounted on
the through-hole wiring board THWB, many through-holes TH1 and
through-holes TH3 are present in the areas (area AR2 and area AR3)
of the through-hole wiring board THWB overlapping with the
semiconductor chip CHP2 in a plan view. The semiconductor device
according to the second related technology, therefore, has improved
release characteristics of heat generated in the semiconductor chip
CHP2.
<New Problem of Second Related Technology Found by Present
Inventors>
[0160] The present inventors have found a new problem of the second
related technology to be investigated. It will next be described.
FIG. 13 is a plan view of the through-hole wiring board THWB
according to the second related technology when viewed from the
surface side (main surface side, upper surface side). As shown in
FIG. 13, the through-hole wiring board THWB according to the second
related technology is rectangular and has a plurality of
through-holes TH2 along the peripheral area of the wiring board. In
FIG. 13, a plurality of through-holes TH2 is formed in two rows and
a rectangular semiconductor chip CHP2 is mounted in a center area
present on the inner side of the peripheral area. FIG. 13 does not
show the semiconductor chip CHP2 itself and a chip mounting area in
which the semiconductor chip CHP2 is to be mounted is shown by a
broken line. It has been found from this FIG. 13 that the
through-holes TH2 formed in the peripheral area of the through-hole
wiring board THWB are placed so as not to overlap with the
semiconductor chip CHP2 in a plan view.
[0161] Next, as shown in FIG. 13, a plurality of terminals TE1 is
formed inside the chip mounting area in which the semiconductor
chip CHP2 is mounted. More specifically, as shown in FIG. 13, a
plurality of terminals TE1 is formed in two rows along a virtual
line defining the chip mounting area. A plurality of through-holes
TH1 is formed in an area inside these terminals TE1; a plurality of
through-holes TH3 is formed in an area inside the through-holes
TH1; and a plurality of terminals TE2 is formed in an area inside
the through-holes TH3.
[0162] The surface side of the through-hole wiring board THWB in
the second related technology has such a configuration as described
above. The plan configuration of the back surface side (lower
surface side) of the through-hole wiring board THWB will next be
described. FIG. 14 is a plan view of the through-hole wiring board
THWB according to the second related technology when viewed from
the back surface side. As shown in FIG. 14, a rectangular
through-hole wiring board THWB has, in an outer area therein, a
plurality of solder balls SB2. The solder balls SB2 are placed, for
example, in two rows as shown in FIG. 14 and these solder balls SB3
are electrically coupled to the through-holes TH2. The solder balls
SB2 and the through-holes TH2 are placed so as not to overlap with
each other in a plan view. These solder balls SB2 are a mixture of
solder balls to which a power supply potential, a reference
potential (GND potential), and a signal voltage are applied,
respectively. Accordingly, lands having the solder balls SB2
thereon are a mixture of lands to which a power supply potential, a
reference potential, and a signal voltage are applied,
respectively.
[0163] The area having therein the solder balls SB2 embraces, in
the area, a chip mounting area. FIG. 14 shows the chip mounting
area present on the surface side by a broken line. Moreover, in the
through-hole wiring board THWB according to the second related
technology, this chip mounting area has, inside thereof, a
plurality of solder balls SB1. These solder balls SB1 do not
include those supplied with a signal voltage but include those
supplied with a power supply potential or a reference potential.
This means that the lands having thereon the solder balls SB1
include only those supplied with a power supply potential or a
reference potential.
[0164] What is important here is that in the through-hole wiring
board THWB according to the second related technology, solder balls
SB1 should be placed so as to prevent the solder balls SB1 from
overlapping with the through-holes TH1 and the through-holes TH3 in
a plan view. Since the through-holes TH1 and the through-hole TH3
are formed densely in a narrow area overlapping with the chip
mounting area in a plan view, the number of the solder balls SB1 to
be placed in an area overlapping with the chip mounting area in a
plan view is limited.
[0165] In the through-hole wiring board THWB according to the
second related technology, it is necessary to (1) place the
through-holes TH1 and the through-holes TH3 densely in a narrow
area which overlaps with the chip mounting area in a plan view and
(2) place the solder balls SB1 while avoiding the through-holes TH1
and the through-holes TH3. The through-hole wiring board THWB
according to the second related technology is therefore
characterized by that the number of the solder balls SB1 placed in
an area overlapping with the chip mounting area in a plan view
becomes smaller. This means that the number of the solder balls
SBG1 placed in an inner area which overlaps with the chip mounting
area in a plan view is smaller than the number of the solder balls
SB2 placed in an outer area which does not overlap with the chip
mounting area in a plan view. As a result, the number of the lands
having thereon the solder balls SB1 is smaller than the number of
the lands having thereon the solder balls SB2.
[0166] The present inventors have found newly that in the
semiconductor device according to the second related technology, a
decrease in the number of the solder balls SB1 formed in the area
of the back surface of the through-hole wiring board THWB
overlapping with the chip mounting area in a plan view may lessen
the improvement in the reliability of the semiconductor device.
[0167] More specifically, the semiconductor device including the
through-hole wiring board THWB having thereon the semiconductor
chip CHP2 is coupled to a mounting substrate via the solder balls
SB1 or solder ball SB2. This means that the through-hole wiring
board THWB is mounted on the mounting substrate via a plurality of
solder balls SB1 and solder balls SB2. The reliability test
(temperature cycling test after mounting) after mounting of the
semiconductor device on the mounting substrate has revealed the
fracture and separation of the solder balls SB1 placed in an area
of the back surface of the through-hole wiring board THWB
overlapping with the mounting area of the semiconductor chip CHP2
in a plan view, which will be described hereinafter.
[0168] FIG. 15 is a schematic view showing the simulation of the
temperature cycling test while mounting the through-hole wiring
board THWB having thereon the semiconductor chip CHP2 on the
mounting substrate LS. In FIG. 15, the through-hole wiring board
THWB has thereon the semiconductor chip CHP2 and this through-hole
wiring board THWB and the mounting substrate LS are coupled to each
other via the solder balls SB1 and the solder balls SB2.
[0169] When the semiconductor device having such a configuration is
subjected to a temperature cycling test by changing the
temperature, for example, within a range of from -40.degree. C. to
125.degree. C., the semiconductor chip CHP2, the through-hole
wiring board THWB, and the mounting substrate LS are deformed as a
result of repetition of thermal expansion and thermal shrinkage
(refer to FIG. 15). In particular, a large stress occurs between
the semiconductor chip CHP2 comprised mainly of silicon and the
through-hole wiring board THWB comprised mainly of a resin due to a
difference in thermal expansion coefficient between silicon and the
resin. This means that as shown in FIG. 15, a larger stress is
applied to the vicinity of the chip mounting area of the
through-hole wiring board THWB than to another area.
[0170] In the second related technology, since the through-hole
wiring board THWB and the mounting substrate LS are coupled to each
other via the solder balls SB1 and the solder balls SB2, a stress
due to the deformation of the through-hole wiring board THWB and
the mounting substrate LS is applied to the solder balls SB1 and
the solder balls SB2.
[0171] First, with regards to the solder balls SB2, the solder
balls SB2 are formed in an area of the through-hole wiring board
THWB outside the chip mounting area in a plan view. This means that
the solder balls SB2 are placed not in the chip mounting area where
a large stress is applied but in an outer area where a stress is
relatively small. Moreover, the number of the solder balls SB2 is
large so that a stress applied to one solder ball SB2 is small. It
is therefore presumed that the fracture and separation of the
solder balls SB2 due to this stress do not become obvious.
[0172] Next, with regards to the solder balls SB1, the solder balls
SB1 are formed in an area of the through-hole wiring board THWB
overlapping with the chip mounting area in a plan view. This means
that the solder balls SB1 are placed in an area embraced in the
chip mounting area where a stress becomes large. Moreover, in the
through-hole wiring board THWB according to the second related
technology, for example as shown in FIG. 14, the number of the
solder balls SB1 formed in an area overlapping with the chip
mounting area in a plan view is limited to be small. As a result,
in the second related technology, a stress applied to one solder
ball SB1 becomes large and the fracture and separation of the
solder balls SB1 due to the stress tend to become obvious. This
means that the second related technology has the following points:
(1) a stress becomes large in an area of the through-hole wiring
board THWB overlapping with the chip mounting area in a plan view
due to a difference in thermal expansion coefficient between the
semiconductor chip CHP2 and the through-hole wiring board THWB; and
(2) the number of the solder balls SB1 placed in an area
overlapping with the chip mounting area in a plan view becomes
small. In the second related technology, therefore, fracture and
separation of the solder balls SB1 from the through-hole wiring
board THWB tend to occur. In short, in the through-hole wiring
board THWB in the second related technology, due to a decrease in
the number of the solder balls SB1 formed in an area overlapping
with the chip mounting area in a plan view, the fracture and
separation of the solder balls SB1 tend to become evident.
[0173] More specifically, FIG. 16 shows the fracture and separation
of the solder ball SB1 which couples the through-hole wiring board
THWB to the mounting substrate LS. As is apparent from FIG. 16, the
solder ball SB1 is broken and separated from the through-hole
wiring board THWB. In particular, in the second related technology,
SMD is employed as the configuration mode of the land so that
fracture and separation of the solder ball SB1 becomes obvious.
Such facture and separation of the solder ball SB1 cause a failure
of a semiconductor device. As a result, the semiconductor device
thus obtained has deteriorated reliability.
[0174] As described above, in the second related technology,
fracture and separation of the solder ball SB1 from the
through-hole wiring board THWB becomes a problem. The solder ball
SB1 is mounted on the land formed on the back surface of the
through-hole wiring board THWB and thereby the solder ball SB1 is
coupled to the through-hole wiring board THWB. The fracture and
separation of the solder ball SB1 from the through-hole wiring
board THWB occur in a boundary area between the land and the solder
ball SB1 so that it is important to improve the bond strength
between the land and the solder ball SB1. In the second related
technology, a structure called SMD (Solder Mask Defined) is
employed as the structure of the land so that particularly the
fracture and separation of the solder ball SB1 from the land become
obvious, which will hereinafter be described.
[0175] FIG. 17 shows a land LND1 having an SMD structure formed on
the back surface of the through-hole wiring board THWB. FIG. 17 is
an enlarged view of one land LND1 formed on the back surface of the
through-hole wiring board THWB and one through-hole TH1. As shown
in FIG. 17, the back surface of the through-hole wiring board is
covered with the solder resist SR and this solder resist SR has
therein an opening portion OP1. From this opening portion OP1, the
land LND1 is exposed. The land LND1 shown in FIG. 17 is greater
than the opening portion OP1 formed in the solder resist SR and the
land LND1 is covered, at the peripheral area thereof, with the
solder resist SR. Described specifically, the land LND1 and the
opening portion OP1 each have a circular shape and the diameter of
the land LND1 is greater than that of the opening portion OP1. Such
a configuration mode of the land LND1 is called "SMD" (Solder Mask
Defined). In short, in SMD, the diameter of the land LND1 is
greater than that of the opening portion OP1. Accordingly, in SMD,
the entirety of the land LND1 is not exposed from the opening
portion OP1 formed in the solder resist SR but the center area of
the land LND1 is exposed and the peripheral area of the land LND1
is covered with the solder resist SR. In other words, SMD is a
configuration mode in which the diameter of the land LND1 is
greater than the diameter of the opening portion OP1 formed in the
solder resist SR and at the same time, the opening portion OP1 is
embraced in the land LND1 and a portion of the land LND1 is
exposed.
[0176] To the land LND1, a wiring L1 is coupled and this wiring L1
is coupled to the through-hole TH1. More specifically, the
through-hole wiring board THWB has, on the back surface thereof, a
foot pattern FP1 embracing the through-hole TH1 so as to overlap
with the through-hole TH1 in a plan view and this foot pattern FP1
is coupled to the land LND1 via the wiring L1. The through-hole TH1
and the foot pattern FP1, and the wiring L1 are covered with the
solder resist SR. This means that in SMD, only a portion of the
land LND1 is exposed from the opening portion OP1 and the wiring
L1, the foot pattern FP1, and the through-hole TH1 coupled to the
land LND1 are all covered with the solder resist SR.
[0177] FIG. 18 is a cross-sectional view taken along a line A-A of
FIG. 17. As shown in FIG. 18, the through-hole wiring board THWB
has therein the through-hole TH1 and this through-hole TH1 has, on
the side surface thereof, a conductive film CF2. The foot pattern
FP1, the wiring L1, and the land LND1 are integrated with each
other so that they are electrically coupled to the through-hole TH1
having the conductive film CF2. The foot pattern FP1, entirety of
the wiring L1, and a portion (peripheral area) of the land LND1
which have been integrated with each other are covered with the
solder resist SR, while a portion (center area) of the land LND1 is
exposed from the opening portion OP1 formed in the solder resist
SR. Such a configuration mode of the land LND1 is SMD.
[0178] FIG. 19 is a cross-sectional view showing the solder ball
SB1 mounted on the land LND1 having an SMD structure. As shown in
FIG. 19, the through-hole wiring board THWB has, on the back
surface thereof, the land LND1 and this through-hole wiring board
THWB has, on the back surface including the peripheral area of this
land LND1, the solder resist SR. In other words, the center area of
the land LND1 is exposed from the opening portion OP1 provided in
the solder resist SR. The land LND1 exposed from the opening
portion OP1 provided in the solder resist SR has, on the bottom
surface thereof, the solder ball SB1.
[0179] In the second related technology, the above-mentioned SMD is
employed as a configuration mode of the land LND1 formed on the
back surface of the through-hole wiring board THWB, because in SMD,
the peripheral area of the land LND1 is covered with the solder
resist SR, the adhesion between the through-hole wiring board THWB
and the land LND1 can be improved. In other words, in SMD, easy
separation of the land LND1 from the through-hole wiring board THWB
is prevented so that it is employed as a configuration mode of the
land LND1 formed on the through-hole wiring board THWB.
[0180] SMD has however the following disadvantage. Described
specifically, in SMD, adhesive force between the land LND1 and the
solder ball SB1 decreases in spite of the improvement in the
adhesion between the through-hole wiring board THWB and the land
LND1, because in SMD, the land LND1 is in contact with the solder
ball SB1 only at the bottom surface of the land exposed from the
opening portion OP1. As a result, when SMD is employed as a
configuration mode of the land LND1 placed in an area overlapping
with the chip mounting area in a plan view, the fracture and
separation of the solder ball SB1 from the land LND1 becomes
obvious.
[0181] For example, the through-hole wiring board THWB according to
the second related technology has the following points: (1) a
stress becomes large in an area of the through-hole wiring board
THWB overlapping with the chip mounting area in a plan view due to
a difference in thermal expansion coefficient between the
semiconductor chip CHP2 and the through-hole wiring board THWB and
(2) the number of the solder balls SB1 placed in an area
overlapping with the chip mounting area in a plan view is limited
and becomes small. A stress applied to a boundary area between the
solder ball SB1 and the land LND1 placed in an area overlapping
with the chip mounting area in a plan view therefore increases. If
SMD in which adhesive force is weak between the land LND1 and the
solder ball SB1 is employed, fracture and separation of the bolder
ball SB1 from the land LND1 become obvious.
Characteristics of Semiconductor Device in Embodiment
[0182] In this embodiment, some measures are devised to prevent
fracture and separation, from the through-hole wiring board THWB,
of the solder ball SB1 placed in an area overlapping with the chip
mounting area in a plan view. A description will hereinafter be
made on these measures. In particular, in the present embodiment,
the bond strength between the solder ball SB1 and the land is
improved by paying attention to the structure of the land to be
coupled to the solder ball SB1 and devising this structure of the
land.
[0183] More specifically, in the present embodiment, not SMD but
NSMD is employed as the configuration mode of the land LND1. This
makes it possible to improve the adhesive force between the land
LND1 and the solder ball SB1, thereby preventing the fracture and
separation of the solder ball SB1 from the land LND1. A description
will hereinafter be made on NSMD.
[0184] FIG. 20 shows the land LND1 formed on the back surface of
the through-hole wiring board THWB and having an NSMD structure.
FIG. 20 is an enlarged view of one land LND1 formed on the back
surface of the through-hole wiring board THWB and one through-hole
TH1. As shown in FIG. 20, the back surface of the through-hole
wiring board THWB is covered with the solder resist SR and this
solder resist SR has therein an opening portion OP2. The land LND1
is placed so as to be embraced with this opening portion OP2. This
means that the opening portion OP2 and the land LND1 have a
circular shape but the diameter of the opening portion OP2 is
greater than the diameter of the land LND1. Such a configuration
mode of the land LND1 is called "NSMD" (Non Solder Mask
Defined).
[0185] NSMD is a configuration mode in which the diameter of the
land LND1 is smaller than that of the opening portion OP2 formed in
the solder resist SR and at the same time, the entirety of the land
LND1 is exposed while the land LND1 is embraced in the opening
portion OP2. A wiring L1 is coupled to the land LND1 exposed from
the opening portion OP2 and this wiring L1 is coupled to the
through-hole TH1. More specifically, a foot pattern FP1 embracing
therein the through-hole TH1 is formed on the back surface of the
through-hole wiring board THWB so as to overlap with the
through-hole TH1 in a plan view. This foot pattern FP1 and the land
LND1 are coupled to each other via the wiring L1. The through-hole
TH1, the foot pattern FP1, and a portion of the wiring L1 are
covered with the solder resist SR.
[0186] On the other hand, since the land LND1 is formed so as to be
embraced in the opening portion OP2 formed in the solder resist SR,
the land LND1 and a portion of the wiring L1 coupled to the land
LND1 are exposed from the opening portion OP2. The term "land LND1"
as used herein means a circular pattern as shown in FIG. 20 and it
does not include the wiring L1 coupled to the circular pattern.
Accordingly, the entirety of the land LND1 (circular pattern) is
embraced in the opening portion OP2 provided in the solder resist
SR as shown in FIG. 20, which is a characteristic of NSMD.
[0187] FIG. 21 is a cross-sectional view taken along a line A-A of
FIG. 20. As shown in FIG. 21, the through-hole wiring board THWB
has therein the through-hole TH1 and this through-hole TH1 has, on
the side surface thereof, a conductive film CF2. The foot pattern
FP1, the wiring L1, and the land LND1 are integrated with each
other so as to be electrically coupled to the upper portion of the
through-hole TH1 having the conductive film CF2. The foot pattern
FP1 and a portion of the wiring L1 integrated with each other is
covered with the solder resist SR, while a portion of the wiring L1
and the land LND1 are exposed from the opening portion OP2 formed
in the solder resist SR. Such a configuration mode of the land LND1
is NSMD.
[0188] FIG. 22 is a cross-sectional view showing a solder ball SB1
mounted on the land LND1 having an NSMD structure. As shown in FIG.
22, the through-hole wiring board THWB has, on the back surface
thereof, a land LND1 and the through-hole wiring board THWB has, on
the back surface thereof, a solder resist SR. In NSMD, the entirety
of the land LND1 is exposed while being embraced in an opening
portion OP2 provided in the solder resist SR. The solder ball SB1
is mounted so as to be brought into contact with the bottom surface
and side surface of the land LND1 exposed from the opening portion
OP1. In NSMD, the land LND1 has a bottom surface which faces the
same direction with the back surface of the through-hole wiring
board THWB, an upper surface opposite to the bottom surface, and a
side surface located between the bottom surface and the upper
surface in the thickness direction of the through-hole wiring board
THWB. In a plan view, a solder is in contact with the bottom
surface and the side surface of the land LND1 in a plan view.
[0189] Thus, there are two configuration modes of the land LND1
formed on the back surface of the through-hole wiring board THWB
and they are NSMD and SMD. From the standpoint of improving the
adhesion between the land LND1 and the solder ball SB1, NSMD is
superior to SMD, because of the following reason. In SMD, since the
opening portion OP1 is embraced in the land LND1, an area of the
land LND1 exposed from the opening portion OP1 is only the bottom
surface of the land LND1 (refer to FIG. 19).
[0190] On the other hand, in NSMD, the entirety of the land LND1 is
exposed from the opening portion OP2 so that not only the bottom
surface of the land LND1 but also its side surface is exposed from
the opening portion OP2 (refer to FIG. 22). Described specifically,
the land LND1 is made of, for example, a metal film. In SMD, only
the surface of the metal film is exposed, while in NSMD, not only
the surface of the metal film but also the side surface of the
metal film in the film thickness direction is exposed. Compared
with SMD, the exposed area of NSMD is therefore greater and the
adhesion area of the solder ball SB1 mounted on the land LND1
becomes greater.
[0191] This means that adhesion of the land with the solder ball
SB1 is better in NSMD than in SMD. In consideration of the
improvement in bond strength between the land LND1 and the solder
ball SB1, NSMD is superior to SMD.
[0192] The first characteristic of the present embodiment is that
NSMD is employed as the configuration mode of the land LND1 placed
in an area of the back surface of the through-hole wiring board
THWB overlapping with the chip mounting area in a plan view. When
NSMD is employed, the land LND1 is brought into contact with the
solder ball SB1 not only at the bottom surface of the land but also
the side surface thereof, making it possible to improve the bond
strength between the land LND1 and the solder ball SB1. As a
result, according to the present embodiment, the fracture and
separation of the solder ball SB1 from the land LND1 can
effectively be suppressed.
[0193] For example, even in the through-hole wiring board THWB of
the present embodiment, (1) a stress becomes large in an area of
the through-hole wiring board THWB overlapping with the chip
mounting area in a plan view due to a difference in thermal
expansion coefficient between the semiconductor chip CHP2 and the
through-hole wiring board THWB and (2) the number of the solder
balls SB1 placed in an area overlapping with the chip mounting area
in a plan view becomes small. This increases a stress applied to a
boundary area between the solder ball SB1 and the land LND1 placed
in an area overlapping with the chip mounting area in a plan view.
When SMD in which the adhesive force between the land LND1 and the
solder ball SB1 is weak, the fracture and separation of the solder
ball SB1 from the land LND1 tend to occur.
[0194] In this point, in the present embodiment, NSMD is employed
as a configuration mode of the land LND1 placed in an area of the
back surface of the through-hole wiring board THWB overlapping with
the chip mounting area in a plan view. Using the land LND1 having
an NSMD structure makes it possible to improve the bond strength
between the land LND1 and the solder ball SB1 so that even if the
through-hole wiring board THWB has the above-mentioned problem, the
fracture and separation of the solder ball SB1 from the land LND1
can effectively be suppressed according to the present
embodiment.
[0195] The present embodiment is characterized by using NSMD as the
configuration mode of the land LND1, but the land LND1 itself is
not covered with the solder resist SR in this NSMD. Compared with
SMD in which the peripheral area of the land LND1 is covered with
the solder resist SR, the adhesive force between the through-hole
wiring board THWB and the land LND1 is presumed to be weaker. This
means that in NSMD, the adhesive force between the land LND1 and
the solder ball SB1 can be made greater than that in SMD, while the
adhesive force between the through-hole wiring board THWB and the
land LND1 becomes smaller than that in SMD. There is a fear that
the land LND1 is separated from the through-hole wiring board THWB
in NSMD, but now it becomes less necessary to fear it, because a
technology of forming an adhesive layer called primer has recently
been established for bonding of the through-hole wiring board THWB
to the land LND1. Even in NSMD, sufficient bond strength can be
secured between the through-hole wiring board THWB and the land
LND1 so that the above-mentioned fear does not become obvious.
[0196] It is rather necessary to improve the adhesive force between
the land LND1 and the solder ball SB1. In the reliability test
(temperature cycling test after mounting) after the semiconductor
device is mounted on a mounting substrate, the solder ball SB1
placed in an area of the back surface of the through-hole wiring
board THWB overlapping with a mounting area of the semiconductor
chip CHP2 in a plan view is broken and separated from the land
LND1. It is therefore important to improve the adhesive force
between the land LND1 and the solder ball SB1.
[0197] Thus, the first characteristic of the present embodiment is
that NSMD is employed as the configuration mode of the land LND1
placed in at least an area of the back surface of the through-hole
wiring board THWB overlapping with the chip mounting area in a plan
view.
[0198] The second characteristic of the present embodiment is that
the size of the solder ball SB1 is made larger. More specifically,
the solder ball SB1 with a diameter of 0.45 mm is used when SMD is
employed. When NSMD is employed as in the present embodiment, the
solder ball SB1 with a diameter of 0.50 mm is used In this case,
since the volume of the solder ball SB1 itself becomes large, a
stress to be applied to a joint between the solder ball and the
land LND1 can be relaxed with the deformation of the solder ball
SB1 itself even if a temperature cycling test after mounting is
performed. As a result, the fracture and separation of the solder
ball SB1 from the land LND1 can be suppressed.
[0199] The third characteristic of the present embodiment is that
the thickness of the through-hole wiring board THWB is greater than
the thickness of the semiconductor chip CHP2. More specifically,
the through-hole wiring board THWB includes a core material (core
layer CRL) (refer to FIG. 6) and the thickness of the core material
is 1.2 times or more but not more than 2 times the thickness of the
semiconductor chip CHP2. This makes it possible to prevent warpage
of the through-hole wiring board THWB. When the temperature cycling
test after mounting is conducted, there occurs warpage
(deformation) of the through-hole wiring board THWB, depending on a
difference in thermal expansion coefficient, because the
through-hole wiring board THWB and the semiconductor chip CHP2
differ from each other in thermal expansion coefficient. The
warpage of the through-hole wiring board THWB leads to a stress to
a joint (boundary area) between the land LND1 and the solder ball
SB1. In particular, with an increase in the warpage of the
through-hole wiring board THWB, the stress applied to the joint
between the land LND1 and the solder ball SB1 becomes greater. In
order to suppress the stress to be added to the joint between the
land LND1 and the solder ball SB1, it is desired to reduce the
warpage of the through-hole wiring board THWB.
[0200] In the present embodiment, the rigidity of the through-hole
wiring board THWB is enhanced, for example, by making the thickness
of the through-hole wiring board THWB greater than the thickness of
the semiconductor chip CHP2 so that the thickness of the core
material configuring the through-hole wiring board THWB becomes 1.2
times or more but not more than 2 times the thickness of the
semiconductor chip CHP2. The warpage of the through-hole wiring
board THWB due to a difference in thermal expansion coefficient
between the through-hole wiring board THWB and the semiconductor
chip CHP2 can be reduced because the through-hole wiring board THWB
has high rigidity. As a result, the present embodiment makes it
possible to suppress a stress to be added to the joint between the
land LND1 and the solder ball SB1, thereby preventing the fracture
and separation of the solder ball SB1 from the land LND1.
[0201] The present embodiment has the first to third
characteristics as described above and these first to third
characteristics will next be summarized as follows.
[0202] (1) In the present embodiment, NSMD is employed as the
configuration mode of the land LND1 placed in at least an area of
the back surface of the through-hole wiring board THWB overlapping
with the chip mounting area in a plan view. In NSMD, the land LND1
is brought into contact with the solder ball SB1 not only at the
bottom surface but also at the side surface so that the bond
strength between the land LND1 and the solder ball SB1 can be
improved.
[0203] (2) In the present embodiment, the size of the solder ball
SB1 to be mounted on the land LND1 having an NSMD structure
employed in the present embodiment is made greater than the size of
the solder ball SB1 to be mounted on the land LND1 having an SMD
structure. This makes it possible to increase the volume of the
solder ball SB1 itself, thereby relaxing the stress at the joint
between the land LND1 and the solder ball SB1.
[0204] (3) In the present embodiment, the thickness of the
through-hole wiring board THWB is made greater than the thickness
of semiconductor chip CHP2 so as to make the thickness of the core
material configuring the through-hole wiring board THWB 1.2 times
or more but not more than 2 times the thickness of the
semiconductor chip CHP2. This makes it possible to enhance the
rigidity of the through-hole wiring board THWB. As a result, even
if temperature cycling is applied, warpage of the through-hole
wiring board THWB can be reduced.
[0205] In the present embodiment, due to the synergistic effect of
these first to third characteristics, the fracture and separation
of the solder ball SB1 from the land LND1 can be suppressed
effectively. The semiconductor device obtained according to the
present embodiment has therefore has improved reliability. It is to
be noted that the semiconductor device according to the present
embodiment also has characteristics described above in the second
related technology.
Specific Application Mode of Embodiment
[0206] Various application modes which have actualized the
technical concept of the present embodiment will next be described.
FIG. 23 is a plan view showing the configuration of a through-hole
wiring board THWB according to the present embodiment. FIG. 23
shows the back surface of the through-hole wiring board THWB. In
FIG. 23, the rectangular through-hole wiring board THWB has, in an
outer area thereof, a plurality of solder balls SB2. A chip
mounting area is formed so as to be embraced in the outer area
having therein a plurality of solder balls SB2. Since a
semiconductor chip CHP2 is mounted on the surface of the
through-hole wiring board THWB, it is not illustrated in the
drawing of the through-hole wiring board THWB of FIG. 23. In FIG.
23, however, an area (which will be sometimes called "chip mounting
area" herein) overlapping with the chip mounting area in a plan
view is indicated by a broken line. Next, in FIG. 23, the solder
ball SB1 is placed in an inner area of the chip mounting area. The
term "outer area" means an area outside the chip mounting area and
the term "inner area" means an area inside the chip mounting
area.
[0207] In FIG. 23, a plurality of solder balls SB1 has first
external balls EXB placed at the outermost periphery of the
plurality of solder balls SB1, while a plurality of solder balls
SB2 has second internal balls INB placed at the innermost periphery
of the plurality of solder balls SB2 and adjacent to the first
external balls EXB. The distance between the first external balls
EXB and the second internal balls INB becomes the largest among the
distances between the solder balls adjacent to each other. The
semiconductor chip is mounted on the surface (main surface, upper
surface) of the through-hole wiring board THWB so that the outer
edge portion (broken line) of the semiconductor chip is placed
between the first external balls EXB and the second internal balls
INB in a plan view.
[0208] Next, a description will be made while paying attention to a
land. The land corresponding to the solder ball SB1 is called
"first land" and the land corresponding to the solder ball SB2 is
called "second land". In this case, a plurality of first lands has
first external lands placed at the outermost periphery of the
plurality of first lands and a plurality of second lands has second
lands placed at the innermost periphery of the plurality of second
lands and adjacent to the first external lands. The distance
between the first external lands and the second internal lands is
the largest among the distances between the lands adjacent to each
other. The semiconductor chip is mounted on the surface (main
surface, upper surface) of the through-hole wiring board THWB so
that the outer peripheral portion (broken line) of the
semiconductor chip is placed between the first external land and
the second internal land in a plan view.
[0209] In FIG. 23, the characteristic of the present embodiment is
that the lands placed in the inner area of the chip mounting area
and having the solder balls SB1 thereon have an NSMD structure.
This means that in FIG. 23, the lands placed on the back surface of
the through-hole wiring board THWB so as to overlap with the chip
mounting area in a plan view and having the solder ball SB1 thereon
have an NSMD structure. More specifically, in FIG. 23, the lands
corresponding to the dotted solder ball SB1 have an NSMD structure.
Thus, according to the present embodiment, the lands placed in at
least an area of the back surface of the through-hole wiring board
THWB overlapping with the chip mounting area in a plan view uses
NSMD as its configuration mode. When NSMD is employed, the lands
are brought into contact with the solder ball SB1 not only at the
bottom surface but also the side surface of the lands, making it
possible to improve the bond strength between the lands and the
solder balls SB1.
[0210] FIG. 24 shows a portion of the semiconductor device
according to the present embodiment and it shows an internal
structure of the through-hole wiring board THWB. In the present
embodiment, as shown in FIG. 24, the through-hole wiring board THWB
is made of a core layer CRL containing a glass cloth. This
through-hole wiring board THWB has therein through-holes TH1, TH2,
and TH3 which penetrate from the surface (upper surface) to the
back surface (lower surface) of the through-hole wiring board THWB.
The through-hole wiring board THWB has, on the surface thereof, a
solder resist SR (first solder resist) and with this solder resist
SR, the through-holes TH1, TH2, and TH3 is filled. The solder
resist SR has therein an opening portion and from this opening
portion, a plurality of terminals TE1 and a plurality of terminals
TE2 are exposed.
[0211] For example, the through-hole wiring board THWB has, on the
surface thereof, a plurality of terminals TE1 and some of these
terminals TE1 are electrically coupled to the through-hole TH1 on
the surface of the through-hole wiring board THWB, while the other
terminals TE1 are electrically coupled to the through-hole TH2 on
the surface of the through-hole wiring board THWB. In addition, the
through-hole wiring board THWB has, on the surface thereof, a
plurality of terminals TE2 and these terminals TE2 are electrically
coupled to the through-hole TH3 on the surface of the through-hole
wiring board THWB. At this time, the through-hole wiring board THWB
has thereon a semiconductor chip CHP2 and a pillared bump electrode
PLBMP1 formed on the semiconductor chip CHP2 is electrically
coupled to the terminal TE1 formed on the surface of the
through-hole wiring board THWB. Similarly, a pillared bump
electrode PLBMP2 formed on the semiconductor chip CHP2 is
electrically coupled to the terminal TE2 formed on the surface of
the through-hole wiring board THWB. This means that the
through-hole wiring board THWB has only one wiring layer on each of
the surface and back surface of the core layer CRL. In the
semiconductor device according to the second related technology, a
pillared bump electrode is electrically coupled to this wiring
layer directly.
[0212] On the other hand, the through-hole wiring board THWB has,
on the back surface thereof, a solder resist SR (second solder
resist). The solder resist SR has therein an opening portion and
from this opening portion, a plurality of lands LND1 (back surface
terminals) and a plurality of lands LND2 are exposed. These lands
LND1 are electrically coupled to the through-holes TH1 and TH3 on
the back surface of the through-hole wiring board THWB and the
lands LND2 are electrically coupled to the through-hole TH2 on the
back surface of the through-hole wiring board THWB. These lands
LND1 have thereon a solder ball SB1 and the lands LND2 have thereon
a solder ball SB2. More specifically, in the through-hole wiring
board THWB according to the second related technology, the
thickness of the wiring board (in consideration of the wiring
thickness of the surface and the back surface) attributable to the
core layer CRL (about 0.4 mm) is about 0.5 mm and a through-hole
diameter is about 150 .mu.m.
[0213] In the present embodiment, as shown in FIG. 24, the lands
LND1 formed in an area of the back surface of the through-hole
wiring board THWB overlapping with the chip mounting area in a plan
view has an NSMD structure. On the other hand, the lands LND2
formed in an outer area not overlapping with the chip mounting area
in a plan view have an SMD structure. In NSMD, the lands LND1 are
brought into contact with the solder balls SB1 not only at the
bottom surface but also at the side surface of the lands, making it
possible to improve the bond strength between the lands LND1 and
the solder balls SB1. As a result, according to the present
embodiment, even if a stress due to temperature cycling is applied
to the solder balls SB1 which have coupled the through-hole wiring
board THWB and a mounting substrate to each other, fracture and
separation of the solder balls 1 from the lands LND1 can be
suppressed effectively. In particular, since NSMD which provides
great adhesion with the solder balls SB1 is employed as the
structure of the lands LND1 in an area overlapping, in a plan view,
with the chip mounting area where stress becomes large, fracture
and separation of the solder balls SB1 from the lands LND1 can be
suppressed effectively. As a result, in the present embodiment, a
semiconductor device having improved reliability can be
provided.
MODIFICATION EXAMPLE 1
[0214] FIG. 25 is a plan view showing the configuration of a
through-hole wiring board THWB according to the present
modification example 1. FIG. 25 shows the back surface of the
through-hole wiring board THWB. In the present modification example
1, as shown in FIG. 25, the number of the solder balls SB1 placed
in an inner area of the chip mounting area is greater than that
shown in FIG. 23. More specifically, in FIG. 23, the solder balls
SB1 formed in the inner area are placed in one row, while in the
present modification example 1 shown in FIG. 25, the solder balls
SB1 formed in the inner area are placed in two rows. Also in this
case, all the lands having thereon the solder balls SB1 and placed
in the inner area of the chip mounting area have an NSMD structure.
This means that in FIG. 25, the lands having thereon the solder
balls SB1 and placed in an area of the back surface of the
through-hole wiring board THWB overlapping with the chip mounting
area in a plan view have an NSMD structure. More specifically, in
FIG. 25, the lands corresponding to the dotted solder balls SB1
have an NSMD structure. Thus, according to the present modification
example 1, the lands placed in at least an area of the back surface
of the through-hole wiring board THWB overlapping with the chip
mounting area in a plan view use NSMD as its configuration mode. In
NSMD, the lands are brought into contact with the solder balls SB1
not only at the bottom surface but also at the side surface of the
lands so that the bond strength between the lands and the solder
balls SB1 can be improved.
MODIFICATION EXAMPLE 2
[0215] FIG. 26 is a plan view showing the configuration of a
through-hole wiring board THWB according to the present
modification example 2. FIG. 26 shows the back surface of the
through-hole wiring board THWB. In the present modification example
2, as shown in FIG. 26, a semiconductor chip to be mounted on the
through-hole wiring board THWB has an increased size, which
correspondingly increases the size of a chip mounting area. From
the drawing, it is apparent that the broken line corresponding to
the end portion of the chip mounting area partially overlaps with
some of the solder balls SB2 placed in an outer area of the chip
mounting area. Also in the present modification example 2 having
such a configuration, all the lands having thereon solder balls SB1
placed in an inner area of the chip mounting area have an NSMD
structure. Moreover, in the present modification example 2, the
lands having thereon the solder balls SB2 which partially overlap
with the end portion of the chip mounting area in a plan view have
an NSMD structure, because in the present modification example 2,
the solder balls SB2 partially overlapping with the end portion of
the chip mounting area in a plan view are presumed to be subjected
to a greater stress. In short, in the present modification example
2, not only the lands having thereon the solder balls SB1 placed in
the inner area of the chip mounting area but also the solder balls
SB2 partially overlapping with the end portion of the chip mounting
area in a plan view have an NSMD structure.
[0216] More specifically, in FIG. 26, the lands corresponding to
the dotted solder balls SB1 and the dotted solder balls SB2 have an
NSMD structure. Thus, in the present modification example 2, the
lands placed in at least an area of the back surface of the
through-hole wiring board THWB overlapping with the chip mounting
area in a plan view have an NSMD structure. In NSMD, the lands are
brought into contact with the solder balls SB1 or solder balls SB2
not only at the bottom surface but also the side surface of the
lands so that the bond strength between the lands and the bolder
balls SB1 or the lands and the solder balls SB2 can be
improved.
MODIFICATION EXAMPLE 3
[0217] FIG. 27 is a plan view showing the configuration of a
through-hole wiring board THWB according to the present
modification example 3. FIG. 27 shows the back surface of the
through-hole wiring board THWB. In the present modification example
3 shown in FIG. 27, a semiconductor chip to be mounted on the
through-hole wiring board THWB has a larger size, by which the size
of a chip mounting area becomes greater. From this drawing, it is
apparent that the broken line corresponding to the end portion of
the chip mounting area embraces some of the solder balls SB2 placed
in the outer area of the chip mounting area. Even in the present
modification example 3 having such a configuration, all the lands
mounting thereon the solder balls SB1 placed in the inner area of
the chip mounting area have an NSMD structure. Moreover, in the
present modification example 3, the lands mounting thereon the
solder balls SB2 overlapping with the chip mounting area in a plan
view have also an NSMD structure, because in the present
modification Example 3, the solder balls SB2 overlapping with the
chip mounting area in a plan view are presumed to be subjected to a
large stress. In short, in the present modification example 3, not
only the lands on which the solder balls SB1 placed in the inner
area of the chip mounting area are to be mounted but also the lands
on which some of the solder balls SB2 overlapping with the chip
mounting area in a plan view are to be mounted have an NSMD
structure.
[0218] More specifically, FIG. 27 shows that the lands
corresponding to the dotted solder balls SB1 and the dotted solder
balls SB2 have an NSMD structure. Thus, in the present modification
example 3, the lands placed in at least an area of the back surface
of the through-hole wiring board THWB overlapping with the chip
mounting area in a plan view employs NSMD as a configuration mode.
In NSMD, the lands are brought into contact with the solder balls
SB1 and solder balls SB2 not only at the bottom surface but also
the side surface of the lands and therefore, the bond strength
between the lands and the solder balls SB1 or the bond strength
between the lands and the solder ball SB2 can be improved.
MODIFICATION EXAMPLE 4
[0219] FIG. 28 is a plan view showing the configuration of a
through-hole wiring board THWB according to the present
modification example 4. FIG. 28 shows the back surface of the
through-hole wiring board THWB. In the present modification example
4 shown in FIG. 28, the semiconductor chip to be mounted on the
through-hole wiring board THWB has a greater size, by which the
size of the chip mounting area becomes larger. From the drawing, it
is apparent that the broken line corresponding to the end portion
of the chip mounting area embraces some of the solder balls SB2
placed in an outer area of the chip mounting area. Even in the
present modification example 4 having such a configuration, all the
lands on which the solder balls SB1 placed in the inner area of the
chip mounting area are to be mounted have an NSMD structure.
Moreover, in the present modification example 4, the lands on which
the solder balls SB2 overlapping with the chip mounting area in a
plan view are to be mounted have an NSMD structure, because in the
present modification example 4, the solder balls SB2 overlapping
with the chip mounting area in a plan view are presumed to be
subjected to large stress.
[0220] In the present modification example 4, also the lands on
which the solder balls SB2 closest to the end portion (broken line)
of the chip mounting area, among the solder balls SB2 placed in an
outer area of the chip mounting area, are to be mounted have an
NSMD structure, because, among the solder balls SB1 and solder
balls SB2 formed on the back surface of the through-hole wiring
board THWB, the solder balls subjected to a greatest stress are
solder balls placed in an area overlapping with the chip mounting
area in a plan view. A great stress is presumed to be applied also
to the solder balls closest to the chip mounting area even if they
do not overlap with the chip mounting area in a plan view. In the
present modification example 4, therefore, the lands on which the
solder balls SB2 closest to the end portion (broken line) of the
chip mounting area, among the solder balls SB2 placed in the outer
region of the chip mounting area, are to be mounted have also an
NSMD structure. This makes it possible to provide a semiconductor
device having improved reliability.
[0221] The term "the closest" as used herein means that the solder
balls are placed at a position shortest from the end portion
(broken line) of the chip mounting area and for example, this
distance is shorter than the distance between the solder balls SB2
adjacent to each other.
[0222] Thus, in the present modification example 4, not only the
lands on which the solder balls SB1 placed in the inner area of the
chip mounting area are to be mounted but also the lands on which
some of the solder balls SB2 overlapping with the chip mounting
area in a plan view are to be mounted have an NSMD structure.
Moreover, the lands which are placed in the outer area of the chip
mounting area but placed at a position closest to the chip mounting
area have also an NSMD structure.
[0223] More specifically, FIG. 28 shows that the lands
corresponding to the dotted solder balls SB1 and the dotted solder
balls SB2 have an NSMD structure. Thus, according to the present
modification example 4, not only the lands placed in at least an
area of the back surface of the through-hole wiring board THWB
overlapping with the chip mounting area in a plan view but also the
lands closest to the chip mounting employ NSMD as their
configuration mode. In NSMD, the lands are brought into contact
with the solder balls SB1 or the solder balls SB2 not only at the
bottom surface but also at the side surface of the lands and
therefore, the bond strength between the lands and the solder balls
SB1 or the lands and the solder balls SB2 can be improved.
MODIFICATION EXAMPLE 5
[0224] FIG. 29 is a plan view showing the configuration of a
through-hole wiring board THWB according to the present
modification example 5. FIG. 29 shows the back surface of the
through-hole wiring board THWB. In FIG. 29, a plurality of solder
balls SB2 is placed in an outer area of the rectangular
through-hole wiring board THWB. A chip mounting area is formed so
as to be embraced in the outer area having therein the solder balls
SB. This chip mounting area has, in the inner area thereof, a
plurality of solder balls SB1.
[0225] In FIG. 29, the present modification example 5 is
characterized by that the lands having thereon the solder balls SB1
and the lands having thereon the solder balls SB2 which are placed
on the back surface of the through-hole wiring board THWB have an
NSMD structure. In short, in FIG. 29, all the lands placed on the
back surface of the through-hole wiring board THWB have an NSMD
structure. More specifically, FIG. 29 shows that the lands
corresponding to the dotted solder balls SB1 and the dotted solder
balls SB2 have an NSMD structure. Thus, according to the present
modification example 5, all the lands placed on the back surface of
the through-hole wiring board THWB employ NSMD as a configuration
mode. In NSMD, therefore, the lands are brought into contact with
the solder balls SB1 or solder balls SB2 not only at the bottom
surface but also at the side surface of the lands so that the bond
strength between the lands and the solder balls SB1 or between the
lands and the solder balls SB2 can be improved.
[0226] It is possible to use NSMD for only the lands having thereon
the solder balls placed in an area overlapping with the chip
mounting area in a plan view because the greatest stress is put on
the solder balls placed in an area overlapping with the chip
mounting area in a plan view. In other words, it seems unnecessary
to use NSMD for the lands on which solder balls placed in an outer
area not overlapping with the chip mounting area in a plan view are
to be mounted.
[0227] In this case, the configuration mode of the lands is NSMD in
the inner area of the chip mounting area, while the configuration
mode of the lands is SMD in the outer area of the chip mounting
area. This means that lands of two configuration modes are present.
If so, the following problem may presumably occur. Described
specifically, when the solder balls mounted on the lands having an
NSMD structure and the solder balls mounted on the lands having an
SMD structure are adjusted to have the same size, solder flows
along and brought into contact with not only the bottom surface but
also the side surface of the lands. On the other hand, when the
lands have an SMD structure, solder is brought into contact with
only the bottom surface of them. As a result, in the lands having
an NSMD structure, due to the solder running along even the side
surface of the lands, the height (finish height) of the solder
balls mounted on the lands having an NSMD structure may presumably
become lower than the height (finish height) of the solder balls
mounted on the lands having an SMD structure. This means that the
height of the solder balls formed on the back surface of the
through-hole wiring board THWB varies. This may lead to a coupling
failure between the through-hole wiring board THWB and the mounting
substrate via these solder balls.
[0228] In the present modification example 5, on the other hand,
all the lands formed on the back surface of the through-hole wiring
board THWB uniformly have an NSMD structure so that variation in
the height of these solder balls due to the presence of both NSMD
and SMD does not occur. The present modification example 5
therefore gives the advantage of improving the coupling reliability
between the through-hole wiring board THWB and the mounting
substrate via solder balls. In particular, the present modification
example 5 is markedly effective for reducing the variation in the
height of the solder balls mounted on the back surface of the
through-hole wiring board THWB while improving the bond strength
between the lands and balls placed in an area which overlaps with
the chip mounting area in a plan view and tends to be subjected to
a large stress.
Advantage of Embodiments
[0229] According to the present embodiment, NSMD is employed as the
configuration mode of the lands placed in at least an area of the
back surface of the through-hole wiring board overlapping with the
chip mounting area in a plan view. In NSMD, the lands are brought
into contact with the solder balls not only at the bottom surface
but also the side surface of the lands so that bond strength
between the lands and solder balls can be improved. As a result,
the present embodiment makes it possible to effectively suppress
the fracture and separation of the solder balls from the lands,
even if a stress due to temperature cycling is put on the solder
balls which couple the through-hole wiring board to the mounting
substrate. The semiconductor device according to the present
embodiment therefore has improved reliability.
[0230] More specifically, it has been confirmed that the life of
the semiconductor device of the present embodiment mounted on a
mounting substrate becomes longer than the life of a semiconductor
device, to which the technical concept of the present embodiment
has not been applied, mounted on a mounting substrate. For example,
at a temperature cycling test at -40.degree. C. and at 125.degree.
C., when the semiconductor device, to which the technical concept
of the present embodiment has not been applied, is mounted on a
mounting substrate, fracture and separation of a solder ball from a
land occurred after 700 cycles. On the other hand, when the
semiconductor device of the present embodiment is mounted on a
mounting substrate, fracture and separation of a solder ball from a
land did not occur even after 1000 cycles. The results have
demonstrated that according to the present embodiment, a
semiconductor device having improved reliability can be provided
The usefulness of the technical concept of the present embodiment
is therefore confirmed.
Manufacturing Method of Semiconductor Device According to
Embodiment
[0231] The semiconductor device according to the present embodiment
has the above-mentioned configuration and a manufacturing method of
it will hereinafter be described referring to some drawings.
[0232] As shown in FIG. 30, a through-hole wiring board THWB having
both surfaces attached with a conductive film CF1 made of a copper
foil is provided. The through-hole wiring board THWB is made of a
base material, for example, a glass BT material or a glass
heat-resistant epoxy material. Then, as shown in FIG. 31, a
through-hole TH1 and a through-hole TH2 are formed in a
through-hole formation area. The through-hole TH1 and the
through-hole TH2 are bored using a drill and they are formed so as
to penetrate through the through-hole wiring board THWB attached,
on both surfaces thereof, with the conductive film CF1.
[0233] Next, as shown in FIG. 32, a conductive film CF2 made of a
copper plating film is formed on both surfaces of the conductive
film CF1 attached to the through-hole wiring board THWB. The
conductive film CF2 made of a copper plating film can be formed,
for example, by electroless plating or electroplating. The
conductive film CF2 made of this copper plating film is also formed
on the side surface of the through-hole TH1 and the side surface of
the through-hole TH2, each through-hole penetrating through the
through-hole wiring board THWB. It is to be noted that although the
conductive film CF2 is formed also on the conductive film CF1
formed on both surfaces of the through-hole wiring board THWB, the
conductive film CF1 and the conductive film CF2 will be described
integrally as a conductive film CF1 in the drawings of FIG. 32 and
thereafter.
[0234] Next, as shown in FIG. 33, the conductive films CF1 formed
on the surface and back surface of the through-hole wiring board
THWB are patterned successively by using photolithography and
etching.
[0235] Next, as shown in FIG. 34, a solder resist SR is applied
onto both surfaces of the through-hole wiring board THWB. In order
to apply the solder resist SR to the both surfaces of the
through-hole wiring board THWB, first, the solder resist SR is
applied to one of the surfaces of the through-hole wiring board
THWB, followed by interim drying. After completion of the interim
drying of the solder resist SR, the solder resist SR is applied
onto the other surface of the through-hole wiring board THWB,
followed by interim drying. The solder resist SR can therefore be
formed on both surfaces of the through-hole wiring board THWB. As a
result, on the surface (upper surface) and the back surface (lower
surface) of the through-hole wiring board THWB, the patterned
conductive film CF1 is covered with the solder resist SR.
[0236] Next, as shown in FIG. 35, an opening portion OP2 is formed
in the solder resist SR by using photolithography. This means that
the opening portion OP2 is formed in the back surface (lower
surface) of the through-hole wiring board THWB. This opening
portion OP2 is formed so as to expose a land LND1 formed on the
back surface (lower surface) of the through-hole wiring board THWB.
More specifically, the opening portion OP2 is formed so that it has
a diameter greater than that of the land LND1 and at the same time,
the opening portion OP2 is formed so as to embrace therein the land
LND1 in a plan view. This makes it possible to employ NSMD as a
configuration mode of the land LND1 formed on the back surface
(lower surface) of the through-hole wiring board THWB. After main
curing (main drying) of the solder resist SR, a nickel/gold plating
film is formed on the land LND1 exposed from the opening portion
OP2. In such a manner, terminals plated with a nickel/gold film can
be formed on the land LND1. Then, the resulting through-hole wiring
board THWB is washed, followed by visual inspection to complete the
through-hole wiring board THWB. In such a manner, the through-hole
wiring board THWB according to the present embodiment can be
manufactured.
[0237] Next, as shown in FIG. 36, the through-hole wiring board
THWB manufactured by the above-mentioned manufacturing steps is
provided. This through-hole wiring board THWB has a layout
configuration, for example, as shown in FIG. 7 and has terminals
TE1 and TE2, through-holes TH1, TH2, and TH3, and the like.
[0238] As shown in FIG. 37, an underfill UF is applied to a chip
mounting area on the surface of the through-hole wiring board THWB.
As the under fill UF, a quick-curing resin NCP (Non-Conductive
Paste) is recommended.
[0239] Then, as shown in FIG. 38, a semiconductor chip CHP2 is
mounted on the through-hole wiring board THWB. This semiconductor
chip CHP2 has, on the surface (main surface) thereof, a pillared
bump electrode PLBMP1 and a pillared bump electrode PLBMP2, for
example, as shown in FIG. 4. The semiconductor chip CHP2 is then
mounted on the through-hole wiring board THWB so that the pillared
bump electrode PLBMP1 (PLBMP2) formed on the semiconductor chip
CHP2 is brought into direct contact with the terminal (not shown)
formed on the through-hole wiring board THWB, followed by heating
to a high temperature. As a result, the solder of the pillared bump
electrode PLBMP1 (PLBMP2) is melted to electrically couple the
terminal TE1 (TE2) on the through-hole wiring board THWB to the
copper of the pillared bump electrode PLBMP1 (PLBMP2). At this
time, the underfill UF spreads in a wet state and fills the space
between the semiconductor chip CHP2 and the through-hole wiring
board THWB. In addition, a quick curing resin NCP is used as the
underfill UF so that the underfill UF is cured.
[0240] In the present embodiment, the pillared bump electrode
PLBMP1 (PLBMP2) whose height can be secured even if its size is
reduced is used for coupling the semiconductor chip CHP2 to the
through-hole wiring board THWB so that the spreading of the
underfill UF in a wet state is not inhibited.
[0241] Next, as shown in FIG. 39, solder balls SB are mounted on
the back surface (surface on the side opposite to the chip mounting
surface) of the through-hole wiring board THWB. In particular, in
the present embodiment, solder balls SB2 are mounted in an outer
area of the chip mounting area and solder balls SB1 are mounted in
an inner area of the chip mounting area. More specifically, the
solder balls SB1 and the solder balls SB2 are mounted on lands
formed on the through-hole wiring board THWB. In the present
embodiment, the lands formed in at least an area overlapping with
the chip mounting area in a plan view have an NSMD structure so
that the bond strength between the lands and the solder ball SB1
can be improved in this area. In the above-mentioned manner, the
semiconductor device of the present embodiment can be
manufactured.
[0242] Then, the semiconductor device of the present embodiment is
mounted on a mounting substrate via the solder balls SB1 and solder
balls SB2. With the semiconductor device mounted on the mounting
substrate, a temperature cycling test after mounting is performed.
In this reliability test (temperature cycling test after mounting),
the solder balls SB1 placed in an area overlapping with the chip
mounting area in a plan view tend to cause fracture and separation
from the lands due to a difference in thermal expansion coefficient
between the semiconductor chip CHP2 and the through-hole wiring
board THWB. In the present embodiment, however, NSMD is used as a
configuration mode of the lands placed in at least an area
overlapping with the chip mounting area in a plan view.
[0243] According to the present embodiment, the lands are brought
into contact with the solder balls not only at the bottom surface
but also the side surface of the lands so that the bond strength
between the lands and the solder balls can be improved. As a
result, according to the present embodiment, fracture and
separation of the solder balls from the lands can effectively be
suppressed even if a stress due to temperature cycling is applied
to the solder balls with for coupling the through-hole wiring board
to the mounting substrate. According to the present embodiment, a
semiconductor device having improved reliability can be
provided.
[0244] The invention made by the present inventors has so far been
described specifically based on its embodiment. It should however
be borne in mind that the invention is not limited to or by the
embodiment. Needless to say, it can be changed without departing
from the gist of the invention.
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