U.S. patent application number 14/395767 was filed with the patent office on 2015-03-19 for spooling process films.
This patent application is currently assigned to Hewlett-Packard Development Company, L.P.. The applicant listed for this patent is Anthony George Bird, Richard Leonard Hall, John Christopher Rudin, Stephen Robert Spruce, Alejandro de la Fuente Vombrock, Stuart Richard Wilford. Invention is credited to Anthony George Bird, Richard Leonard Hall, John Christopher Rudin, Stephen Robert Spruce, Alejandro de la Fuente Vombrock, Stuart Richard Wilford.
Application Number | 20150076273 14/395767 |
Document ID | / |
Family ID | 49673769 |
Filed Date | 2015-03-19 |
United States Patent
Application |
20150076273 |
Kind Code |
A1 |
Rudin; John Christopher ; et
al. |
March 19, 2015 |
SPOOLING PROCESS FILMS
Abstract
Spooling apparatus. The apparatus includes an interposer film
having a spacer surface and a back surface; a first spacer carried
by the interposer film on the spacer surface adjacent a first edge
of the interposer film; a second spacer carried by the interposer
film on the spacer surface adjacent a second edge of the interposer
film, the spacers defining a process-film protective space; and a
rotatable core oriented to receive an initial end of the interposer
film and to roll up the interposer film with a process film in the
process-film protective space with a passive surface of the process
film adjacent a surface of the interposer film.
Inventors: |
Rudin; John Christopher;
(Bristol Bristol, GB) ; Vombrock; Alejandro de la
Fuente; (San Carla, CA) ; Hall; Richard Leonard;
(Kettering Northants, GB) ; Wilford; Stuart Richard;
(Kettering Northants, GB) ; Bird; Anthony George;
(Old, Northants, GB) ; Spruce; Stephen Robert;
(Hugill Close, GB) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Rudin; John Christopher
Vombrock; Alejandro de la Fuente
Hall; Richard Leonard
Wilford; Stuart Richard
Bird; Anthony George
Spruce; Stephen Robert |
Bristol Bristol
San Carla
Kettering Northants
Kettering Northants
Old, Northants
Hugill Close |
CA |
GB
US
GB
GB
GB
GB |
|
|
Assignee: |
Hewlett-Packard Development
Company, L.P.
Houston
TX
|
Family ID: |
49673769 |
Appl. No.: |
14/395767 |
Filed: |
May 31, 2012 |
PCT Filed: |
May 31, 2012 |
PCT NO: |
PCT/US2012/040269 |
371 Date: |
October 20, 2014 |
Current U.S.
Class: |
242/439.5 |
Current CPC
Class: |
B65H 18/28 20130101;
B65H 2701/1942 20130101; B65H 2601/2532 20130101; B65H 2511/162
20130101; B65H 2701/184 20130101; B65H 2801/61 20130101; B65H
2301/4193 20130101; B65H 2701/1864 20130101; B65H 18/103 20130101;
B65H 2701/1315 20130101; B65H 2701/122 20130101; B65H 2407/30
20130101 |
Class at
Publication: |
242/439.5 |
International
Class: |
B65H 18/28 20060101
B65H018/28 |
Claims
1. Spooling apparatus comprising: an interposer film having a
spacer surface and a back surface; a first spacer carried by the
interposer film on the spacer surface adjacent a first edge of the
interposer film; a second spacer carried by the interposer film on
the spacer surface adjacent a second edge of the interposer film,
the spacers defining a process-film protective space; and a
rotatable core oriented to receive an initial end of the interposer
film and to roll up the interposer film with a process film in the
process-film protective space with a passive surface of the process
film adjacent a surface of the interposer film.
2. The apparatus of claim 1 wherein the spacers are selected from
among a segmented strip, a compliant strip, and a plurality of
spacer elements.
3. The apparatus of claim 1 wherein the interposer film comprises
at least one of a surface-textured material, a mesh, an
anisotropically-compliant material, and one or more transverse
stiffening elements.
4. The apparatus of claim 1 Wherein one or more of the interposer
film, the first spacer, and the second spacer comprise
gas-permeable material.
5. The apparatus of claim 1 and further comprising a plurality of
supports carried by the interposer film and disposed to support an
active surface of the process film at points remote from any active
portions of the active surface of the process film.
6. The apparatus of claim 1 and further comprising one or more
additional spacers carried by the interposer film between the first
and second spacers, the additional spacers dividing the protective
space into protective regions each sized to accommodate a process
film.
7. The apparatus of claim 1 and further comprising: an interposer
film core on which the interposer film is rolled up and from which
the interposer film may be unrolled; and a tensioner coupled to the
interposer film core.
8. The apparatus of claim 1 and further comprising an interposer
film tension roller disposed to feed the interposer film to the
rotatable core.
9. The apparatus of claim 1 and further comprising a motor coupled
to the rotatable core.
10. The apparatus of claim 1 and further comprising: a cassette
enclosing the rotatable core, the cassette sized to accommodate a
spool of interposer film and process film rolled up on the
rotatable core, a wall of the cassette defining an opening sized to
accommodate the interposer and process films; and a removable cover
on the opening.
11. A method of processing process films, the method comprising:
providing an interposer film having a spacer surface and a back
surface, the spacer surface having a first spacer adjacent a first
edge of the interposer film and a second spacer adjacent a second
edge of the interposer film, and at least one protective space
defined between the first and second spacers; and winding a process
film and the interposer film onto a core with the process film
disposed in the protective space between the first and second
spacers and a passive surface of the process film adjacent a
surface of the interposer film.
12. The method of claim 11 wherein winding the process and
interposer films onto the core comprises: tensioning the interposer
film; and tensioning the process film at a lesser tension than the
interposer film.
13. The method of claim 11 and further comprising carrying out a
process on the process film after the film has been wound onto the
core.
14. A method of processing process films, the method comprising:
providing unprocessed process film spooled with a first interposer
film, a passive surface of the process film adjacent a surface of
the first interposer film; unwinding the films; feeding the process
film through a process station; and spooling the interposer
film.
15. The method of claim 14 and further comprising: providing a
second interposer film; and spooling the process film with the
second interposer film, a passive surface of the process film
adjacent a surface of the second interposer film.
16. The method of claim 15 and further comprising tensioning the
process film at a lesser tension than at least one of the first and
second interposer films.
Description
BACKGROUND
[0001] Process films (including substrates) find many applications
in high-technology device manufacture. A process film typically has
an active surface and a passive surface. The passive surface can be
handled and manipulated with ease, but functional devices, layered
coatings, and components may be formed or placed on the active
surface, and as a result the active surface may easily be
contaminated or damaged by any physical contact during processing.
For this reason, various kinds of cassettes and track systems have
been developed tier handling process films in ways that do not risk
contaminating their active surfaces. In the semiconductor industry,
the front-opening unified pod (FOUP) style of standardized wafer
cassette handing is widely used to hold silicon wafers; a wafer can
be removed from such a pod for processing or measurement as needed
by special tools. Similar processes are used for handling thin-film
transistor (TFT) glass substrates. In the plastic patterning
industry disposable interleaves are sometimes used for handling
such process films as touch-screen and membrane switch
constituents.
BRIEF DESCRIPTION OF THE DRAWINGS
[0002] The figures are not drawn to scale. They illustrate the
disclosure by examples.
[0003] FIG. 1A is a perspective view of an example of spooling
apparatus.
[0004] FIG. 1B is a perspective view of another example of spooling
apparatus.
[0005] FIG. 1C is a perspective view of another example of spooling
apparatus.
[0006] FIG. 2A is a sectional view of an interposer film and a
process film rolled up around a core with the process film adjacent
a back surface of the interposer film according to an example.
[0007] FIG. 2B is a sectional view of an interposer film and a
process film rolled up around a core with the process film adjacent
a spacer surface of the interposer film according to an
example.
[0008] FIG. 3 is a sectional view of an interposer film and a
process film rolled up around a core according to another
example.
[0009] FIG. 4 is a perspective view of an example of an interposer
film with spacers formed as parallelepipeds.
[0010] FIG. 5 is a perspective view of an example of an interposer
film with frusto-conical spacers.
[0011] FIG. 6 is a perspective view of an example of a
gas-permeable interposer film with gas-permeable spacers formed as
continuous strips.
[0012] FIG. 7 is a perspective view of an example of an interposer
film formed as a mesh.
[0013] FIG. 8 is a perspective view of an example of an interposer
film having a textured surface.
[0014] FIG. 9 is a perspective, partially cut away, of layers of
process film separated by layers of interposer film.
[0015] FIG. 10 is a perspective of two strips of process film
side-by-side between each layer of interposer film according to an
example.
[0016] FIG. 11A is a perspective view of an example of an
interposer film carrying a plurality of supports on a spacer
surface.
[0017] FIG. 11B is similar to FIG. 11A and with a process film on
the supports.
[0018] FIG. 12A is a perspective view of an example of an
interposer film carrying a plurality of supports on a back
surface.
[0019] FIG. 12B is similar to FIG. 12A and with a process film on
the supports.
[0020] FIG. 13A is a front-side schematic of an example of
passive-surface process film spooling apparatus showing process
film beginning to move from a full spool toward an empty spool.
[0021] FIG. 13B is a back-side schematic of the spooling apparatus
shown in FIG. 13A.
[0022] FIG. 14 is a flowchart illustrating a method of processing
process films according to an example.
[0023] FIG. 15 is a flowchart illustrating a method of processing
process films according to another example.
[0024] FIG. 16 is a flowchart illustrating a method of processing
process films according to another example.
DETAILED DESCRIPTION
[0025] Illustrative examples and details are used in the drawings
and in this description, but other configurations may exist and may
suggest themselves. Parameters such as voltages, temperatures,
dimensions, and component values are approximate. Terms of
orientation such as up, down, top, and bottom are used only for
convenience to indicate spatial relationships of components with
respect to each other, and except as otherwise indicated,
orientation with respect to external axes is not critical. For
clarity, some known methods and structures have not been described
in detail. Methods defined by the claims may comprise steps in
addition to those listed, and except as indicated in the claims
themselves the steps may be performed in another order than that
given. Accordingly, the only limitations are imposed by the claims,
not by the drawings or this description.
[0026] Roll-to-roll fabrication of active surfaces on process films
has been difficult. In complex processes there often are only
limited stages in which a film can be rolled up. This is because
rolling up the film results in the active side in one wrap of the
roll contacting the passive side in a succeeding wrap. In a process
involving coating the active surface with a sensitive or adhesive
material such as photoresist or barrier coating, the process must
continue in-line through cure and bake steps before the film can be
rolled up. In addition, even in fabrication stages where rolling up
is possible, contamination and mechanical damage introduced by
rolling and re-roiling can damage the active surface or components
on it. Even in processes where interleaves are used there is a risk
of contamination. Moreover, interleaves can introduce static
electric charges that not only can damage components on the active
surface but also can attract dust and other forms of small
particulate contamination. There has been a need for a way to roll
up a process film at various fabrication stages without inflicting
damage.
[0027] As shown in FIG. 1A, an example of spooling apparatus
includes an interposer film generally 100 having a spacer surface
102 and a back surface 104. A first spacer 106 is carried by the
interposer film 100 on its spacer surface 102 adjacent first edge
108 of the interposer film. A second spacer 110 is carried by the
interposer film 100 on the spacer surface 102 adjacent a second
edge 112 of the interposer film 100. A process-film protective
space 114 is defined between the first and second spacers. A
rotatable core 116 is oriented to roll up the interposer film as
indicated by an arrow 118 together with a process film (not shown)
in the process-film protective space 114 with a passive surface of
the process film adjacent a surface of the interposer film. In this
example the interposer film 100 wraps around the core 116 with the
spacer surface 102 facing the core, as indicated by an arrow 120
showing the core rotating about its axis 122 in an anticlockwise
direction when viewed from a near end 124 of the core 116. The
protective space 114, defined between the spacers 106 and 110,
extends from the spacer surface 102 to a back surface of an
adjacent layer (or wrap) of the interposer film when the film is
rolled up.
[0028] As shown in FIG. 1B, in some examples the interposer film
100 wraps around the core 116 with the back surface 104 facing the
core as indicated by an arrow 126.
[0029] In the example of FIG. 1A the core is shown in the form of a
solid shaft, but the core may take other forms. FIG. 1C gives an
example of spooling apparatus that is similar to that shown in FIG.
1A except that a first flanged wheel 128 adjacent the first edge
108 of the interposer film 100 and a second flanged wheel 130
adjacent the second edge 112 of the interposer film 100 are used as
a core rather than a solid shaft.
[0030] Referring now to FIG. 2A, a length of interposer film 200
with spacers on either edge is shown rolled up around a core 202. A
first portion 204 of the interposer film 200 is closest to the core
202 and carries a first portion 206 of a spacer along one edge and
a first portion 208 of a spacer along an opposite edge. The term
"portion" refers to one layer (or wrap) of film or spacer extending
all the way around the core. A first portion (layer or wrap) is
adjacent the core and successive layers or wraps are wound one on
top of the previous one as the film and spacers are wound up. The
first portions 206 and 208 of the spacers are adjacent to, and in
some examples rest on, the core 202.
[0031] A second portion 212 of the interposer film 200 carries
second portions 214 and 216 of spacers that rest on the first
portion 204 of the interposer film. A third portion 218 of the
interposer film 200 carries third portions 220 and 222 of spacers
that rest on the second portion 212 of the interposer film.
[0032] A length of process film 224 is also rolled up around the
core. A first portion 226 of the process film 224 is located in a
portion 228 of protective space formed between the spacers. As with
the interposer film, the first portion 226 of the process film may
be considered as a first layer (first wrap) around the core. A
first portion 230 of an active surface of the process film 224
carries various items such as features, coatings,
functionalisations, patterns, or components 232A, 232B, 232C, and
232D. These items are installed on, formed in, or otherwise placed
on the active surface of the process film. A first portion 234 of a
passive surface of the process film 224 is adjacent a first portion
236 of a back surface of the interposer film 200. The first portion
234 of the passive surface of the process film 224 is supported by
the first portion 236 of the back surface of the interposer film
200. As will be discussed in more detail presently, the process
film is tensioned sufficiently to maintain contact between it and
the back surface of the interposer film.
[0033] The first portion 228 of the protective space extends
between the first portion 236 of the back surface of the interposer
film and a second portion 238 of the spacer surface of the
interposer film. The spacers are sized such that the protective
space fully contains the process film without any contact between
the spacer surface of the interposer film and the active surface of
the process film.
[0034] A second portion 240 of the process film 224 is located in a
second portion 242 of the protective space between the spacers. A
second portion 24.4 of the passive surface of the process film is
adjacent a second portion 246 of the back surface of the interposer
film.
[0035] A spool thus formed may comprise fewer or more, in some
examples many more, wraps than the three wraps of interposer film
and two wraps of process film shown in FIG. 2A.
[0036] FIG. 2B is generally similar to FIG. 2A except that a
process film is shown interleaved with an interposer film around a
core with a passive surface of the process film adjacent a spacer
surface of the interposer film. More particularly, a length of
interposer film 248 with spacers on either edge is shown rolled up
around a core 250. A first portion 252 of the interposer film is
closest to the core and carries a first portion 254 of a spacer
along one edge and a first portion 256 of a spacer along an
opposite edge. A second portion 258 of the interposer film carries
second portions 260 and 262 of spacers that rest on the first
portion 252 of the interposer film. A third portion 264 of the
interposer film carries third portions 266 and 268 of spacers that
rest on the second portion 258 of the interposer film.
[0037] A length of process film 270 is also rolled up around the
core. A first portion 272 of the process film 270 is located in a
portion 274 of protective space formed between the spacers. A first
portion 276 of an active surface of the process film carries
various items such as features, coatings, functionalisations,
patterns, or components 278A, 278B, 278C, and 278D. These items are
installed on, formed in, or otherwise placed on the active surface
of the process film. A first portion 280 of a passive surface of
the process film lies adjacent a first portion 282 of a spacer
surface of the interposer film. The first portion 280 of the
passive surface of the process film is supported by the first
portion 282 of the back surface of the interposer film.
[0038] A second portion 284 of the process film is located in a
second portion 286 of the protective space between the spacers. A
second portion 288 of the passive surface of the process film is
adjacent a second portion 290 of the spacer surface of the
interposer film. Similarly, a third portion 292 of the process film
is located in a third portion 294 of the protective space between
the spacers with a third portion 296 of the passive surface of the
process film adjacent a third portion 298 of the spacer surface of
the interposer film.
[0039] FIG. 3 is generally similar to FIG. 2A except that in this
example an interposer film 300 is wound up around a core 302 with a
first portion 304 of a back surface of the interposer film adjacent
to, and in some examples supported by, the core 302. A first
portion (or wrap, or layer) 306 of the interposer film 300 carries
a first portion 308 of a first spacer and a first portion 310 of a
second spacer. A second portion 312 of the interposer film lies on
the first portions 308 and 310 of the spacers and in turn carries
second portions 314 and 316 of the spacers. A third portion 318 of
the interposer film lies on the second portions 314 and 316 of the
spacers and in turn carries third portions 320 and 322 of the
spacers.
[0040] A length of process film 324 is also rolled up around the
core 302. A first portion 326 of the process film 324 is located in
a first portion 328 of a protective space formed between the
spacers. Various features, coatings, functionatisations, patterns
or components 330A, 330B, 330C, and 330D are installed or formed on
a first portion 332 of an active surface of the process film. A
first portion 334 of a passive surface of the process film is
adjacent a first portion 336 of a spacer surface of the interposer
film. The first portion 328 of the protective space is bounded by
the first portion 336 of the spacer surface and a second portion
338 of the back surface of the interposer film. The process film is
tensioned sufficiently to hold its passive surface against the
spacer surface of the interposer film such that the active surface
of the process film does not contact the back surface of the
interposer film.
[0041] A second portion 340 of the process film 324 is located in a
portion 342 of the protective space between the spacers. A second
portion 344 of the passive surface of the process film lies on a
second portion 346 of the spacer surface of the interposer film.
Similarly, a third portion 348 of the process film 324 is located
in a third portion 350 of the protective space. A third portion 352
of the passive surface of the process film lies on a third portion
354 of the spacer surface of the interposer film. As with the other
portions of the protective space, the third portion 350 of the
protective space lies between the back and spacer surfaces of the
interposer film; in this instance, the third portion 350 of the
protective space lies between the third portion 354 of the spacer
surface of the interposer film and a portion of the back surface of
a fourth portion (not shown) of the interposer film.
[0042] Returning to the example of FIG. 1A, the first spacer 106 is
shown as a segmented strip. The second spacer 110 is also shown as
a segmented strip. The interposer film and the spacers are made of
materials that are sufficiently compliant to roll up around the
core 116. In this example the spacers 106 and 110 are adjacent to,
and in some examples are in contact with, the core as the rolling
up begins. The elements in this and the other figures are not drawn
to scale, and the core may actually be larger or smaller relative
to the spacers than as depicted in the drawings.
[0043] FIG. 4 shows an example of an interposer film 400, a
plurality of individual spacer elements 402 located at intervals
along a first edge 404 of the interposer, and a plurality of
individual spacer elements 406 located at intervals along a second
edge 408 of the interposer. in this example the spacer elements are
shaped as parallelepipeds, but the shape is not critical and spacer
elements having other shapes may be used. For example, FIG. 5 shows
an interposer 500 with frusto-conical spacers 502.
[0044] The example of FIG. 4 also includes a transverse stiffener
410 embedded in the interposer 400. This stiffener extends from the
first edge 404 to the second edge 408, but in other examples the
stiffener may not extend this far. A plurality of similar
stiffeners may be disposed at intervals along the interposer. The
stiffener 410 is shown at right angles to the edges, and therefore
it does not interfere with rolling on the interposer onto a core.
In other examples the stiffeners may be disposed across the
interposer at other angles so long as the stiffeners do not
interfere with rolling up the interposer. The interposer may also
be formed of a material with anisotropic compliance, retaining
transverse stiffness whilst capable of forming a longitudinal
roll.
[0045] FIG. 6 is an example of an interposer film 600 with first
and second spacers 602 and 604 each formed as a continuous strip of
material. The spacer material must be sufficiently compliant as to
permit rolling up onto a core. In this example the interposer film
and the spacers have been made gas-permeable by a plurality of
openings such as openings 606 in the interposer film, openings 608
in the first spacer, and openings 610 in the second spacer. Making
one or more of the interposer film and the spacers gas-permeable
facilitates escape of gases that may be emitted by a process film
adjacent the interposer film 600 and ingress and flow of reactive
gaseous materials to allow in-spool process changes to the process
film. The openings may be formed by any convenient method. In other
examples the interposer film and spacer materials may lack special
openings but may be sufficiently porous as to be gas permeable.
[0046] FIG. 7 gives an example of an interposer film 700 formed of
mesh material. As with the example of FIG. 6, the mesh facilitates
movement of gases. In this example the interposer 700 carries first
and second spacers 702 and 704 formed as segmented strips, and in
other examples a mesh interposer film may carry any other suitable
spacers.
[0047] FIG. 8 is an example of an interposer film 800 having a
textured spacer surface 802. The texturing may be in any suitable
pattern to avoid or mitigate stiction between the textured surface
and a process film that may contact the surface, or to facilitate
access of gases or reactive gaseous materials to the process film.
In other examples aback surface 804 of the interposer film 800 may
be textured. In this example the interposer film 800 carries first
and second spacers 806 and 808 formed as segmented strips, but the
spacers may take other forms, for example as described above.
[0048] FIG. 9 shows wraps of process film separated from each other
by wraps of interposer film. A first portion (layer or wrap) 900 of
an interposer film carries first spacers 902 and second spacers
904. A second portion 906 of the interposer film carries first
spacers 908 and second spacers 910 defining therebetween a
protective space 912. A third portion 914 of the interposer film
carries first spacers 916 and second spacers 918 defining
therebetween a protective space 920. A passive surface 922 of a
first portion 924 of a process film is disposed adjacent a back
surface 926 of the first portion 900 of the interposer film. An
active surface 928 of the first portion 924 of the process film
carries components, layers or features 930A and 930B. The active
surface 928 resides in the protective space 912 and makes no
contact with any other portion of the process film or any portion
of the interposer film. A passive surface 932 of a second portion
934 of the process film is disposed adjacent a back surface 936 of
the second portion 906 of the interposer film. An active surface
938 of the second portion 934 of the process film resides in the
protective space 920 and makes no contact with any other portion of
the process film or any portion of the interposer. The active
surface 938 may carry components, layers or features (not shown). A
passive surface 940 of a third portion 942 of the process film is
disposed adjacent a back surface 944 of the third portion 914 of
the interposer film.
[0049] More than one process film strip may be disposed adjacent a
single interposer film. As shown in FIG. 10, a first portion 1000
of an interposer film carries a spacer 1002 adjacent a first edge
of its spacer surface 1004, a spacer 1006 adjacent a second edge,
and a spacer 1008 in the middle. A second portion 1010 of the
interposer film, disposed beneath a back surface 1012 of the first
portion 1000 of the interposer film, carries a spacer 1014 adjacent
a first edge of its spacer surface 1016, a spacer 1018 adjacent a
second edge, and a spacer 1020 in the middle.
[0050] A first portion 1022 of a first process film 102.4 is
disposed in a protective space between the spacers 1014 and 1020. A
second portion 1026 of the first process film 1024 is disposed in a
protective space between spacers (not shown) carried by a third
portion (not shown) of the interposer film. A passive surface 1028
of the first portion 1022 of the first process film 1024 is
adjacent the back surface 1012 of the first portion 1000 of the
interposer film. A passive surface 1030 of the second portion 1026
of the first process film 1024 is adjacent a back surface 1032 of
the second portion 1010 of the interposer film.
[0051] A first portion 1034 of a second process film 1036 is
disposed in a protective space between the spacers 1018 and 1020. A
second portion 1038 of the second process film 1036 is disposed in
a protective space between spacers (not shown) carried by the third
portion (not shown) of the interposer film. A passive surface 1040
of the first portion 1034 of the second process film 1036 is
adjacent the back surface 1012 of the first portion 1000 of the
interposer film. A passive surface 1042 of the second portion 1038
of the second process film 1036 is adjacent the back surface 1032
of the second portion 1010 of the interposer film.
[0052] An active surface 1044 of the first portion 1022 of the
first process film 1024 may carry components, layers or features
(not shown) and is not touched by the interposer film or by any
other portions of process film. Similarly, an active surface 1046
of the second portion 1026 of the first process film 1024, an
active surface 1048 of the first portion 1034 of the second process
film 1036, and an active surface 1050 of the second portion 1038 of
the second process film 1036, are untouched by the interposer film
or any other portions of process film. For example a component 1052
is disposed on the active surface 1046, a component 1054 is
disposed on the active surface 1048, and a component 1056 is
disposed on the active surface 1050.
[0053] As shown in FIG. 11A, a plurality of supports 1100, 1102,
1104, and 1106 may be carried by an interposer film 1108. The
supports are carried on a spacer surface 1110 of the interposer
film 1108, as are spacers 1112 along one edge of the interposer
1108 and spacers 1114 along another edge of the interposer 1108.
FIG. 11B is similar to FIG. 11A except that a process film 1116 is
shown in a protective space between the spacers 1112 and 1114. An
active surface 1118 of the process film 1116 is in contact with the
supports and has a component 1120. The support 1100 contacts the
active surface 1118 of the process film 1116 only along a first
edge 1122 where it will not do any damage to components or other
active elements in any active region of the process film. Similarly
the support 1102 contacts the active surface 1118 only along a
second edge 1124, remote from any active region of the process
film.
[0054] In FIGS. 11A and 11B, the supports are carried on the spacer
surface of the interposer. As shown in FIGS. 12A and 12B, supports
1200 and 1202 may be carried on a back surface 1204 of an
interposer film 1206. Spacers 1208 are carried along one edge of a
spacer surface 1210 of the interposer 1206 and spacers 1212 along
another edge of the interposer 1206. A portion 1214 of a process
film 1216 is supported by the supports 1200 and 1202 in a
protective space between spacers (not shown) of another portion
(not shown) of the interposer film. As in the example of FIGS. 11A
and 11B, an active surface 1218 of the process film 1216 is
supported by the supports 1200 and 1202 along edges that are remote
from any components such as a component 1220 or any active region
of the active surface 1218 of the process film 1216.
[0055] In the foregoing two examples, the supports comprise
spaced-apart parallelepipeds, but in other examples the supports
may take the for of segmented strips, continuous strips, or other
suitable shapes as desired.
[0056] An example of passive-surface process film spooling
apparatus generally 1300 is shown in FIGS. 13A and 13B. A first
cassette 1302 contains a spool 1304 of a process film 1306 wound up
in layers on a core 1308. On the spool 1304, each layer of the
process film 1306 occupies a protected space formed by one or more
layers of a first interposer film 1310 in a manner as described
above. The process film 1306 unwinds from the spool 1304, exits the
first cassette 1302 through an opening 1312, and passes through a
process station 1314. Any suitable process may be carried out on
the process film 1306 in the process station 1314. From the process
station 1314, the process film 1306 enters a second cassette 1316
through an opening 1318. The process film 1306 is interleaved with
a second interposer film 1320 and both films are wound up on a core
1322 to forma spool 1324 with the process film 1306 occupying
protective spaces formed by layers of the second interposer film
1320 in a manner as described above. Eventually all of the process
film 1306 has been transferred from the first cassette 1302 to the
second cassette 1316. Then the second cassette 1316 can be removed
from the apparatus 1300 and used to safely store or transport the
process film 1306.
[0057] The process film 1306 may be guided from the first cassette
1302 through the process station 1314 to the second cassette 1316,
for example by a first tension roller 1326 between the first
cassette 1302 and the process station 1314 and a second tension
roller 1328 between the process station 1314 and the second
cassette 1316. The first and second tension rollers contact the
process film 1306 only on a passive side 1330. Other guides may
also be used, such as a draw roller 1332 and a nip wheel 1334
between the tension roller 1326 and the process station 1314, and a
draw roller 1336 and a nip wheel 1338 between the process station
1314 and the tension roller 1328.
[0058] As the process film unwinds from the spool 1304, the first
interposer film 1310 also unwinds and exits the first cassette
through the opening 1312. The first interposer film may be wound up
to form a spool 1340 on a core 1342. The first interposer film may
pass over one or more guides such as a tension roller 1344 as it is
unwound from the spool 1304 in the first cassette 1302 and is wound
onto the spool 1340. When the process film 1306 and the first
interposer film 1310 have been unwound from the spool 1304 and the
first interposer film 1310 has been wound onto the spool 1340, the
spool 1340 of interposer film may be removed from the apparatus
1300 and reused later, left in situ, or wound back into the
cassette without process film for storage.
[0059] The second interposer film 1320 may be obtained by unwinding
from a spool 1346 on a core 1348. The second interposer film 1320
may pass over one or more guides such as a tension roller 1350 and
enters the second cassette 1316 through the opening 1318.
[0060] In some examples the opening 1312 may be sealed with a cover
1352 except when the films are being unwound from the spool 1304.
Similarly, the opening 1318 may be sealed with a cover 1354 except
when the films are being wound up on the spool 1324.
[0061] As the process film is wound onto the spool 1324, it may be
tensioned by a servo motor 1356 that drives the core 1322. In some
examples the process film is also tensioned by one or more of the
tension roller 1328, the tension roller 1326, or any other
components. In some examples a servo motor (not shown) may be
mechanically coupled to the core 1308 and may be used to tension
the process film as it is unwound. In some examples a friction
brake 1358 applied to a drum 1360 coupled to the core 1308 may be
used to tension the process film as it is unwound. Instead of the
servo motor 1356, some other kind of motor or a hand crank may be
used to provide torque to wind the process and interposer films
onto the core 1322.
[0062] A servo motor 1362 or other suitable motive device may be
used to wind the first interposer film 1310 onto the core 1342 as
the process film 1306 and the first interposer film 1310 unwind
from the spool 1304. Another servo motor (not shown) or a friction
brake 1364 applied to a drum 1366 carried by or coupled to the core
1348 may be used to tension the second interposer film 1320 as it
unwinds from the spool 1346.
[0063] FIG. 14 gives an example of a method of processing process
films. The method. includes providing an interposer film having a
spacer surface and a back surface, the spacer surface having a
first spacer adjacent a first edge of the interposer film and a
second spacer adjacent a second edge of the interposer film, and at
least one protective space defined between the first and second
spacers (1400); and winding a process film and the interposer film
onto a core with the process film disposed in the protective space
between the first and second spacers and a passive surface of the
process film adjacent a surface of the interposer film (1402).
[0064] FIG. 15 gives another example of a method of processing
process films. As in the previous example, a first interposer film
having a spacer surface and a back surface is provided, the spacer
surface having a first spacer adjacent a first edge of the
interposer film and a second spacer adjacent a second edge of the
interposer film with least one protective space defined between the
first and second spacers (1500). The first interposer film is
tensioned (1502). In some examples a process film is tensioned at
less tension than the first interposer film (1504). The films are
wound onto a core with the process film disposed in the protective
space between the first and second spacers and with a passive
surface of the process film adjacent a surface of the interposer
film (1506). Tension in the interposer film, not tension in the
process film, forms the spool.
[0065] In some examples a process is carried out on the process
film as the film is being wound up (1508). This procedure has been
discussed previously in connection with FIGS. 13A and 13B, where
the process film is fed through a process station and then wound
up.
[0066] In other examples the process is carried out after the films
have been wound up (1510). As one example, the spooled-up film may
be placed into a process station and the process performed on the
entire spool at once. An interposer film that is porous or
perforated as described previously may be used in this
instance.
[0067] FIG. 16 gives another example of a method of processing
process films. An unprocessed process film spooled with a first
interposer film is provided with a passive surface of the process
film adjacent a surface of the interposer film (1600). The films
are unwound (1602). The process film is fed through a process
station (1604) and the first interposer film is spooled up
(1606).
[0068] In some examples the method continues with providing a
second interposer film (1608). The process film is spooled with the
second interposer film, a passive surface of the process film
adjacent a surface of the second interposer film (1610). The
process film may be tensioned at a lesser tension than at least one
of the first and second interposer films (1612).
[0069] In other examples, instead of spooling up the first
interposer film, the process film is fed back to the first
interposer film and is again spooled up with the first interposer
film (1614), and no second interposer film is needed.
[0070] A spool of process film disposed in the protective spaces
provided by the interposer film and its spacers, and with an active
surface of the process film thereby protected from any contact with
either the interposer film or other layers of the process film, may
be enclosed in a cassette. A cassette containing such a spool can
easily be transported without damaging the process film.
[0071] The interposer film may be fabricated of any thin compliant
material, such as plastic, paper, metal, glass, composite, or the
like.
[0072] During spooling, the interposer film can be tensioned to
form the spool, and very little tension need be applied to the
process film, further protecting it. The core may be rotated by a
servo motor (for example, as shown in FIG. 13B) for precise control
of speed and torque, by a hand crank (not shown) which also may
offer good control of speed and torque, or some other suitable
device.
[0073] Apparatus and methods as described make it possible to
handle process films in such a way that active surfaces of the
films are not touched during unwinding or winding up or white
spooled. Wound-up spools of process film can easily be protected
from contamination by dust and other damaging debris during
transport or any time the process film is not being processed. This
flexibility allows different processes to be run at different
rates. Some processing, for example long-term low-temperature
baking, may be done while the film is spooled up. If the spool of
film is enclosed in a cassette, the cassette can readily be
transported between facilities and processes outside of a clean
environment. Fabrication processes can be broken down into a
smaller granularity, allowing for optimization and easy process
development at pilot scale or customization at volume scale. The
same system can handle films of various widths, thicknesses, and
moduli. Films can be spooled with independent tension between the
spool formation and tension of the film, and films can be stored
with low tension applied, leading to a reduction in mechanical
deformation during storage. Cassettes can carry tracking, content,
and process data any of which can be read without reference to the
actual film, facilitating efficient process management and quality
control.
* * * * *