U.S. patent application number 14/218872 was filed with the patent office on 2014-10-30 for microfabricated elastomeric valve and pump systems.
This patent application is currently assigned to California Institute of Technology. The applicant listed for this patent is California Institute of Technology. Invention is credited to Hou-Pu Chou, Stephen R. Quake, Axel Scherer, Todd A. Thorsen, Marc A. Unger.
Application Number | 20140322489 14/218872 |
Document ID | / |
Family ID | 27385668 |
Filed Date | 2014-10-30 |
United States Patent
Application |
20140322489 |
Kind Code |
A1 |
Unger; Marc A. ; et
al. |
October 30, 2014 |
MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
Abstract
A method of fabricating an elastomeric structure, comprising:
forming a first elastomeric layer on top of a first micromachined
mold, the first micromachined mold having a first raised protrusion
which forms a first recess extending along a bottom surface of the
first elastomeric layer; forming a second elastomeric layer on top
of a second micromachined mold, the second micromachined mold
having a second raised protrusion which forms a second recess
extending along a bottom surface of the second elastomeric layer;
bonding the bottom surface of the second elastomeric layer onto a
top surface of the first elastomeric layer such that a control
channel forms in the second recess between the first and second
elastomeric layers; and positioning the first elastomeric layer on
top of a planar substrate such that a flow channel forms in the
first recess between the first elastomeric layer and the planar
substrate.
Inventors: |
Unger; Marc A.; (San Mateo,
CA) ; Chou; Hou-Pu; (Sunnyvale, CA) ; Thorsen;
Todd A.; (Pasadena, CA) ; Scherer; Axel;
(Laguna Beach, CA) ; Quake; Stephen R.; (Stanford,
CA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
California Institute of Technology |
Pasadena |
CA |
US |
|
|
Assignee: |
California Institute of
Technology
Pasadena
CA
|
Family ID: |
27385668 |
Appl. No.: |
14/218872 |
Filed: |
March 18, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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13360261 |
Jan 27, 2012 |
8695640 |
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14218872 |
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|
|
12540994 |
Aug 13, 2009 |
8104515 |
|
|
13360261 |
|
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|
09724967 |
Nov 28, 2000 |
|
|
|
12540994 |
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|
09605520 |
Jun 27, 2000 |
7601270 |
|
|
09724967 |
|
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60186856 |
Mar 3, 2000 |
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60147199 |
Aug 3, 1999 |
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60141503 |
Jun 28, 1999 |
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Current U.S.
Class: |
428/156 |
Current CPC
Class: |
B01L 2400/046 20130101;
F16K 11/20 20130101; Y10T 156/10 20150115; B01L 3/502738 20130101;
F04B 43/14 20130101; F16K 13/00 20130101; F16K 99/0048 20130101;
F16K 99/0051 20130101; F16K 99/0059 20130101; B01L 2400/0481
20130101; B81C 1/00119 20130101; F16K 99/0046 20130101; B81B
2201/036 20130101; F16K 2099/008 20130101; B01L 2400/0655 20130101;
F04B 43/043 20130101; B01L 3/50273 20130101; F16K 31/126 20130101;
F16K 99/0015 20130101; Y10T 137/87981 20150401; B01L 2300/123
20130101; F16K 1/20 20130101; Y10T 428/24744 20150115; F16K 99/0001
20130101; Y10T 137/0497 20150401; B01L 3/502707 20130101; Y10T
137/2224 20150401; B81C 2201/019 20130101; F16K 2099/0076 20130101;
F16K 2099/0078 20130101; B01L 2300/0887 20130101; F16K 2099/0074
20130101; Y10T 428/24479 20150115; F15C 1/06 20130101; F16K
2099/0094 20130101; B01L 2300/0861 20130101; B29C 51/00 20130101;
B81C 2201/034 20130101; Y10T 137/87249 20150401; C12Q 1/6874
20130101; F15C 5/00 20130101; B81B 5/00 20130101; B33Y 80/00
20141201; B81B 2201/054 20130101; Y10T 137/0491 20150401; C12Q
1/6874 20130101; C12Q 2535/125 20130101 |
Class at
Publication: |
428/156 |
International
Class: |
F16K 13/00 20060101
F16K013/00 |
Goverment Interests
STATEMENT AS TO RIGHTS TO INVENTIONS MADE UNDER FEDERALLY SPONSORED
RESEARCH AND DEVELOPMENT
[0002] This invention was made with government support under Grant
No. HG 01642-02 awarded by the National Institutes of Health. The
government has certain rights in the invention.
Claims
1. A microfabricated elastomeric structure, comprising: an
elastomeric block formed with microfabricated recesses therein, a
portion of the elastomeric block deflectable when the portion is
actuated.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. application Ser.
No. 13/360,261, filed Jan. 27, 2012, which is a continuation of
U.S. application Ser. No. 12/540,994, filed Aug. 13, 2009, now U.S.
Pat. No. 8,104,515, which is a continuation of U.S. application
Ser. No. 09/724,967, filed Nov. 28, 2000, which is a
continuation-in-part of U.S. application Ser. No. 09/605,520, filed
Jun. 27, 2000, now U.S. Pat. No. 7,601,270, which claims the
benefit of the following: U.S. Provisional Application No.
60/141,503, filed Jun. 28, 1999, U.S. Provisional Application No.
60/147,199, filed Aug. 3, 1999, and U.S. Provisional Application
No. 60/186,856, filed Mar. 3, 2000. The entire content of each of
the above-referenced applications is incorporated herein by
reference.
TECHNICAL FIELD
[0003] The present invention relates to microfabricated structures
and methods for producing microfabricated structures, and to
microfabricated systems for regulating fluid-flow.
BACKGROUND OF THE INVENTION
[0004] Various approaches to designing micro-fluidic pumps and
valves have been attempted. Unfortunately, each of these approaches
suffers from its own limitations.
[0005] The two most common methods of producing
microelectromechanical (MEMS) structures such as pumps and valves
are silicon-based bulk micro-machining (which is a subtractive
fabrication method whereby single crystal silicon is
lithographically patterned and then etched to form
three-dimensional structures), and surface micro-machining (which
is an additive method where layers of semiconductor-type materials
such as polysilicon, silicon nitride, silicon dioxide, and various
metals are sequentially added and patterned to make
three-dimensional structures).
[0006] A limitation of the first approach of silicon-based
micro-machining is that the stiffness of the semiconductor
materials used necessitates high actuation forces, which in turn
result in large and complex designs. In fact, both bulk and surface
micro-machining methods are limited by the stiffness of the
materials used. In addition, adhesion between various layers of the
fabricated device is also a problem. For example, in bulk
micro-machining, wafer bonding techniques must be employed to
create multilayer structures. On the other hand, when surface
micro-machining, thermal stresses between the various layers of the
device limits the total device thickness, often to approximately 20
microns. Using either of the above methods, clean room fabrication
and careful quality control are required.
SUMMARY OF THE INVENTION
[0007] The present invention sets forth systems for fabricating and
operating microfabricated structures such as on/off valves,
switching valves, and pumps e.g. made out of various layers of
elastomer bonded together. The present structures and methods are
ideally suited for controlling and channeling fluid movement, but
are not so limited.
[0008] In a preferred aspect, the present invention uses a
multilayer soft lithography process to build integrated (i.e.:
monolithic) microfabricated elastomeric structures.
[0009] Advantages of fabricating the present structures by binding
together layers of soft elastomeric materials include the fact that
the resulting devices are reduced by more than two orders of
magnitude in size as compared to silicon-based devices. Further
advantages of rapid prototyping, ease of fabrication, and
biocompatability are also achieved.
[0010] In preferred aspects of the invention, separate elastomeric
layers are fabricated on top of micromachined molds such that
recesses are formed in each of the various elastomeric layers. By
bonding these various elastomeric layers together, the recesses
extending along the various elastomeric layers form flow channels
and control lines through the resulting monolithic, integral
elastomeric structure. In various aspects of the invention, these
flow channels and control lines which are formed in the elastomeric
structure can be actuated to function as micro-pumps and
micro-valves, as will be explained.
[0011] In further optional aspects of the invention, the monolithic
elastomeric structure is sealed onto the top of a planar substrate,
with flow channels being formed between the surface of the planar
substrate and the recesses which extend along the bottom surface of
the elastomeric structure.
[0012] In one preferred aspect, the present monolithic elastomeric
structures are constructed by bonding together two separate layers
of elastomer with each layer first being separately cast from a
micromachined mold. Preferably, the elastomer used is a
two-component addition cure material in which the bottom
elastomeric layer has an excess of one component, while the top
elastomeric layer has an excess of another component. In an
exemplary embodiment, the elastomer used is silicone rubber. Two
layers of elastomer are cured separately. Each layer is separately
cured before the top layer is positioned on the bottom layer. The
two layers are then bonded together. Each layer preferably has an
excess of one of the two components, such that reactive molecules
remain at the interface between the layers. The top layer is
assembled on top of the bottom layer and heated. The two layers
bond irreversibly such that the strength of the interface
approaches or equals the strength of the bulk elastomer. This
creates a monolithic three-dimensional patterned structure composed
entirely of two layers of bonded together elastomer. Additional
layers may be added by simply repeating the process, wherein new
layers, each having a layer of opposite "polarity" are cured, and
thereby bonded together.
[0013] In a second preferred aspect, a first photoresist layer is
deposited on top of a first elastomeric layer. The first
photoresist layer is then patterned to leave a line or pattern of
lines of photoresist on the top surface of the first elastomeric
layer. Another layer of elastomer is then added and cured,
encapsulating the line or pattern of lines of photoresist. A second
photoresist layer is added and patterned, and another layer of
elastomer added and cured, leaving line and patterns of lines of
photoresist encapsulated in a monolithic elastomer structure. This
process may be repeated to add more encapsulated patterns and
elastomer layers. Thereafter, the photoresist is removed leaving
flow channel(s) and control line(s) in the spaces which had been
occupied by the photoresist. This process may be repeated to create
elastomer structures having a multitude of layers.
[0014] An advantage of patterning moderate sized features (>1=10
microns) using a photoresist method is that a high resolution
transparency film can be used as a contact mask. This allows a
single researcher to design, print, pattern the mold, and create a
new set of cast elastomer devices, typically all within 24
hours.
[0015] A further advantage of either above embodiment of the
present invention is that due to its monolithic or integral nature,
(i.e., all the layers are composed of the same material) is that
interlayer adhesion failures and thermal stress problems are
completely avoided.
[0016] Further advantages of the present invention's preferred use
of a silicone rubber or elastomer such as RTV 615 manufactured by
General Electric, is that it is transparent to visible light,
making a multilayer optical trains possible, thereby allowing
optical interrogation of various channels or chambers in the
microfluidic device. As appropriately shaped elastomer layers can
serve as lenses and optical elements, bonding of layers allows the
creation of multilayer optical trains. In addition, GE RTV 615
elastomer is biocompatible. Being soft, closed valves form a good
seal even if there are small particulates in the flow channel.
Silicone rubber is also bio-compatible and inexpensive, especially
when compared with a single crystal silicon.
[0017] Monolithic elastomeric valves and pumps also avoid many of
the practical problems affecting flow systems based on
electro-osmotic flow. Typically, electro-osmotic flow systems
suffer from bubble formation around the electrodes and the flow is
strongly dependent on the composition of the flow medium. Bubble
formation seriously restricts the use of electro-osmotic flow in
microfluidic devices, making it difficult to construct functioning
integrated devices. The magnitude of flow and even its direction
typically depends in a complex fashion on ionic strength and type,
the presence of surfactants and the charge on the walls of the flow
channel. Moreover, since electrolysis is taking place continuously,
the eventual capacity of buffer to resist pH changes may also be
reached. Furthermore, electro-osmotic flow always occurs in
competition with electrophoresis. As different molecules may have
different electrophoretic mobilities, unwanted electrophoretic
separation may occur in the electro-osmotic flow. Finally,
electro-osmotic flow can-not easily be used to stop flow, halt
diffusion, or to balance pressure differences.
[0018] A further advantage of the present monolithic elastomeric
valve and pump structures are that they can be actuated at very
high speeds. For example, the present inventors have achieved a
response time for a valve with aqueous solution therein on the
order of one millisecond, such that the valve opens and closes at
speeds approaching or exceeding 100 Hz. In particular, a
non-exclusive list of ranges of cycling speeds for the opening and
closing of the valve structure include between about 0.001 and
10000 ms, between about 0.01 and 1000 ms, between about 0.1 and 100
ms, and between about 1 and 10 ms. The cycling speeds depend upon
the composition and structure of a valve used for a particular
application and the method of actuation, and thus cycling speeds
outside of the listed ranges would fall within the scope of the
present invention.
[0019] Further advantages of the present pumps and valves are that
their small size makes them fast and their softness contributes to
making them durable. Moreover, as they close linearly with
differential applied pressure, this linear relationship allows
fluid metering and valve closing in spite of high back
pressures.
[0020] In various aspects of the invention, a plurality of flow
channels pass through the elastomeric structure with a second flow
channel extending across and above a first flow channel. In this
aspect of the invention, a thin membrane of elastomer separates the
first and second flow channels. As will be explained, downward
movement of this membrane (due to the second flow channel being
pressurized or the membrane being otherwise actuated) will cut off
flow passing through the lower flow channel.
[0021] In optional preferred aspects of the present systems, a
plurality of individually addressable valves are formed connected
together in an elastomeric structure and are then activated in
sequence such that peristaltic pumping is achieved. More complex
systems including networked or multiplexed control systems,
selectably addressable valves disposed in a grid of valves,
networked or multiplexed reaction chamber systems and biopolymer
synthesis systems are also described.
[0022] One embodiment of a microfabricated elastomeric structure in
accordance with the present invention comprises an elastomeric
block formed with first and second microfabricated recesses
therein, a portion of the elastomeric block deflectable when the
portion is actuated.
[0023] One embodiment of a method of microfabricating an
elastomeric structure comprises the steps of microfabricating a
first elastomeric layer, microfabricating a second elastomeric
layer; positioning the second elastomeric layer on top of the first
elastomeric layer, and bonding a bottom surface of the second
elastomeric layer onto a top surface of the first elastomeric
layer.
[0024] A first alternative embodiment of a method of
microfabricating an elastomeric structure comprises the steps of
forming a first elastomeric layer on top of a first micromachined
mold, the first micromachined mold having at least one first raised
protrusion which forms at least one first channel in the bottom
surface of the first elastomeric layer. A second elastomeric layer
is formed on top of a second micromachined mold, the second
micromachined mold having at least one second raised protrusion
which forms at least one second channel in the bottom surface of
the second elastomeric layer. The bottom surface of the second
elastomeric layer is bonded onto a top surface of the first
elastomeric layer such that the at least one second channel is
enclosed between the first and second elastomeric layers.
[0025] A second alternative embodiment of a method of
microfabricating an elastomeric structure in accordance with the
present invention comprises the steps of forming a first
elastomeric layer on top of a substrate, curing the first
elastomeric layer, and depositing a first sacrificial layer on the
top surface of the first elastomeric layer. A portion of the first
sacrificial layer is removed such that a first pattern of
sacrificial material remains on the top surface of the first
elastomeric layer. A second elastomeric layer is formed over the
first elastomeric layer thereby encapsulating the first pattern of
sacrificial material between the first and second elastomeric
layers. The second elastomeric layer is cured and then sacrificial
material is removed thereby forming at least one first recess
between the first and second layers of elastomer.
[0026] An embodiment of a method of actuating an elastomeric
structure in accordance with the present invention comprises
providing an elastomeric block formed with first and second
microfabricated recesses therein, the first and second
microfabricated recesses being separated by a portion of the
structure which is deflectable into either of the first or second
recesses when the other of the first and second recesses. One of
the recesses is pressurized such that the portion of the
elastomeric structure separating the second recess from the first
recess is deflected into the other of the two recesses.
[0027] In other optional preferred aspects, magnetic or conductive
materials can be added to make layers of the elastomer magnetic or
electrically conducting, thus enabling the creation of all
elastomer electromagnetic devices.
BRIEF DESCRIPTION OF THE DRAWINGS
[0028] Part I--FIGS. 1 to 7A illustrate successive steps of a first
method of fabricating the present invention, as follows:
[0029] FIG. 1 is an illustration of a first elastomeric layer
formed on top of a micromachined mold.
[0030] FIG. 2 is an illustration of a second elastomeric layer
formed on top of a micromachined mold.
[0031] FIG. 3 is an illustration of the elastomeric layer of FIG. 2
removed from the micromachined mold and positioned over the top of
the elastomeric layer of FIG. 1.
[0032] FIG. 4 is an illustration corresponding to FIG. 3, but
showing the second elastomeric layer positioned on top of the first
elastomeric layer.
[0033] FIG. 5 is an illustration corresponding to FIG. 4, but
showing the first and second elastomeric layers bonded
together.
[0034] FIG. 6 is an illustration corresponding to FIG. 5, but
showing the first micromachine mold removed and a planar substrate
positioned in its place.
[0035] FIG. 7A is an illustration corresponding to FIG. 6, but
showing the elastomeric structure sealed onto the planar
substrate.
[0036] FIG. 7B is a front sectional view corresponding to FIG. 7A,
showing an open flow channel.
[0037] FIGS. 7C-7G are illustrations showing steps of a method for
forming an elastomeric structure having a membrane formed from a
separate elastomeric layer.
[0038] Part II--FIG. 7H show the closing of a first flow channel by
pressurizing a second flow channel, as follows:
[0039] FIG. 7H corresponds to FIG. 7A, but shows a first flow
channel closed by pressurization in second flow channel.
[0040] Part III--FIGS. 8 to 18 illustrate successive steps of a
second method of fabricating the present invention, as follows:
[0041] FIG. 8 is an illustration of a first elastomeric layer
deposited on a planar substrate.
[0042] FIG. 9 is an illustration showing a first photoresist layer
deposited on top of the first elastomeric layer of FIG. 8.
[0043] FIG. 10 is an illustration showing the system of FIG. 9, but
with a portion of the first photoresist layer removed, leaving only
a first line of photoresist.
[0044] FIG. 11 is an illustration showing a second elastomeric
layer applied on top of the first elastomeric layer over the first
line of photoresist of FIG. 10, thereby encasing the photoresist
between the first and second elastomeric layers.
[0045] FIG. 12 corresponds to FIG. 11, but shows the integrated
monolithic structure produced after the first and second elastomer
layers have been bonded together.
[0046] FIG. 13 is an illustration showing a second photoresist
layer deposited on top of the integral elastomeric structure of
FIG. 12.
[0047] FIG. 14 is an illustration showing the system of FIG. 13,
but with a portion of the second photoresist layer removed, leaving
only a second line of photoresist.
[0048] FIG. 15 is an illustration showing a third elastomer layer
applied on top of the second elastomeric layer and over the second
line of photoresist of FIG. 14, thereby encapsulating the second
line of photoresist between the elastomeric structure of FIG. 12
and the third elastomeric layer.
[0049] FIG. 16 corresponds to FIG. 15, but shows the third
elastomeric layer cured so as to be bonded to the monolithic
structure composed of the previously bonded first and second
elastomer layers.
[0050] FIG. 17 corresponds to FIG. 16, but shows the first and
second lines of photoresist removed so as to provide two
perpendicular overlapping, but not intersecting, flow channels
passing through the integrated elastomeric structure.
[0051] FIG. 18 is an illustration showing the system of FIG. 17,
but with the planar substrate thereunder removed.
[0052] Part IV--FIGS. 19 and 20 show further details of different
flow channel cross-sections, as follows:
[0053] FIG. 19 shows a rectangular cross-section of a first flow
channel.
[0054] FIG. 20 shows the flow channel cross section having a curved
upper surface.
[0055] Part V--FIGS. 21 to 24 show experimental results achieved by
preferred embodiments of the present microfabricated valve:
[0056] FIG. 21 illustrates valve opening vs. applied pressure for
various flow channels.
[0057] FIG. 22 illustrates time response of a 100 .mu.m.times.100
.mu.m.times.10 .mu.m RTV microvalve.
[0058] Part VI--FIGS. 23A to 33 show various microfabricated
structures, networked together according to aspects of the present
invention:
[0059] FIG. 23A is a top schematic view of an on/off valve.
[0060] FIG. 23B is a sectional elevation view along line 23B-23B in
FIG. 23A.
[0061] FIG. 24A is a top schematic view of a peristaltic pumping
system.
[0062] FIG. 24B is a sectional elevation view along line 24B-24B in
FIG. 24A.
[0063] FIG. 25 is a graph showing experimentally achieved pumping
rates vs. frequency for an embodiment of the peristaltic pumping
system of FIG. 24A.
[0064] FIG. 26A is a top schematic view of one control line
actuating multiple flow lines simultaneously.
[0065] FIG. 26B is a sectional elevation view along line 26B-26B in
FIG. 26A.
[0066] FIG. 27 is a schematic illustration of a multiplexed system
adapted to permit flow through various channels.
[0067] FIG. 28A is a plan view of a flow layer of an addressable
reaction chamber structure.
[0068] FIG. 28B is a bottom plan view of a control channel layer of
an addressable reaction chamber structure.
[0069] FIG. 28C is an exploded perspective view of the addressable
reaction chamber structure formed by bonding the control channel
layer of FIG. 28B to the top of the flow layer of FIG. 28A.
[0070] FIG. 28D is a sectional elevation view corresponding to FIG.
28C, taken along line 28D-28D in FIG. 28C.
[0071] FIG. 29 is a schematic of a system adapted to selectively
direct fluid flow into any of an array of reaction wells.
[0072] FIG. 30 is a schematic of a system adapted for selectable
lateral flow between parallel flow channels.
[0073] FIG. 31A is a bottom plan view of first layer (i.e.: the
flow channel layer) of elastomer of a switchable flow array.
[0074] FIG. 31B is a bottom plan view of a control channel layer of
a switchable flow array.
[0075] FIG. 31C shows the alignment of the first layer of elastomer
of FIG. 31A with one set of control channels in the second layer of
elastomer of FIG. 31B.
[0076] FIG. 31D also shows the alignment of the first layer of
elastomer of FIG. 31A with the other set of control channels in the
second layer of elastomer of FIG. 31B.
[0077] FIG. 32 is a schematic of an integrated system for
biopolymer synthesis.
[0078] FIG. 33 is a schematic of a further integrated system for
biopolymer synthesis.
[0079] FIG. 34 is an optical micrograph of a section of a test
structure having seven layers of elastomer bonded together.
[0080] FIGS. 35A-35D show the steps of one embodiment of a method
for fabricating an elastomer layer having a vertical via formed
therein.
[0081] FIG. 36 shows one embodiment of a sorting apparatus in
accordance with the present invention.
[0082] FIG. 37 shows an embodiment of an apparatus for flowing
process gases over a semiconductor wafer in accordance with the
present invention.
[0083] FIG. 38 shows an exploded view of one embodiment of a
micro-mirror array structure in accordance with the present
invention.
[0084] FIG. 39 shows a perspective view of a first embodiment of a
refractive device in accordance with the present invention.
[0085] FIG. 40 shows a perspective view of a second embodiment of a
refractive device in accordance with the present invention.
[0086] FIG. 41 shows a perspective view of a third embodiment of a
refractive device in accordance with the present invention.
[0087] FIGS. 42A-42J show views of one embodiment of a
normally-closed valve structure in accordance with the present
invention.
[0088] FIG. 43 shows a plan view of one embodiment of a device for
performing separations in accordance with the present
invention.
[0089] FIGS. 44A-44D show plan views illustrating operation of one
embodiment of a cell pen structure in accordance with the present
invention.
[0090] FIGS. 45A-45B show plan and cross-sectional views
illustrating operation of one embodiment of a cell cage structure
in accordance with the present invention.
[0091] FIGS. 46A-46B show cross-sectional views illustrating
operation of one embodiment of a cell grinder structure in
accordance with the present invention.
[0092] FIG. 47 shows a plan view of one embodiment of a pressure
oscillator structure in accordance with the present invention.
[0093] FIGS. 48A and 48B show plan views illustrating operation of
one embodiment of a side-actuated valve structure in accordance
with the present invention.
[0094] FIG. 49 plots Young's modulus versus percentage dilution of
GE RTV 615 elastomer with GE SF96-50 silicone fluid.
[0095] FIG. 50 shows a cross-sectional view of a structure in which
channel-bearing faces are placed into contact to form a
larger-sized channel.
[0096] FIG. 51 shows a cross-sectional view of a structure in which
non-channel bearing faces are placed into contact and then
sandwiched between two substrates.
[0097] FIGS. 52A-52C show cross-sectional views of the steps for
constructing a bridging structure. FIG. 52D shows a plan view of
the bridging structure.
[0098] FIG. 53 shows a cross-sectional view of one embodiment of a
composite structure in accordance with the present invention.
[0099] FIG. 54 shows a cross-sectional view of one embodiment of a
composite structure in accordance with the present invention.
[0100] FIG. 55 shows a cross-sectional view of one embodiment of a
composite structure in accordance with the present invention.
DETAILED DESCRIPTION OF THE PRESENT INVENTION
[0101] The present invention comprises a variety of microfabricated
elastomeric structures which may be used as pumps or valves.
Methods of fabricating the preferred elastomeric structures are
also set forth.
[0102] Methods of Fabricating the Present Invention:
[0103] Two exemplary methods of fabricating the present invention
are provided herein. It is to be understood that the present
invention is not limited to fabrication by one or the other of
these methods. Rather, other suitable methods of fabricating the
present microstructures, including modifying the present methods,
are also contemplated.
[0104] FIGS. 1 to 7B illustrate sequential steps of a first
preferred method of fabricating the present microstructure, (which
may be used as a pump or valve). FIGS. 8 to 18 illustrate
sequential steps of a second preferred method of fabricating the
present microstructure, (which also may be used as a pump or
valve).
[0105] As will be explained, the preferred method of FIGS. 1 to 7B
involves using pre-cured elastomer layers which are assembled and
bonded. Conversely, the preferred method of FIGS. 8 to 18 involves
curing each layer of elastomer "in place." In the following
description "channel" refers to a recess in the elastomeric
structure which can contain a flow of fluid or gas.
The First Exemplary Method:
[0106] Referring to FIG. 1, a first micro-machined mold 10 is
provided. Micro-machined mold 10 may be fabricated by a number of
conventional silicon processing methods, including but not limited
to photolithography, ion-milling, and electron beam
lithography.
[0107] As can be seen, micro-machined mold 10 has a raised line or
protrusion 11 extending therealong. A first elastomeric layer 20 is
cast on top of mold 10 such that a first recess 21 will be formed
in the bottom surface of elastomeric layer 20, (recess 21
corresponding in dimension to protrusion 11), as shown.
[0108] As can be seen in FIG. 2, a second micro-machined mold 12
having a raised protrusion 13 extending therealong is also
provided. A second elastomeric layer 22 is cast on top of mold 12,
as shown, such that a recess 23 will be formed in its bottom
surface corresponding to the dimensions of protrusion 13.
[0109] As can be seen in the sequential steps illustrated in FIGS.
3 and 4, second elastomeric layer 22 is then removed from mold 12
and placed on top of first elastomeric layer 20. As can be seen,
recess 23 extending along the bottom surface of second elastomeric
layer 22 will form a flow channel 32.
[0110] Referring to FIG. 5, the separate first and second
elastomeric layers 20 and 22 FIG. 4 are then bonded together to
form an integrated (i.e.: monolithic) elastomeric structure 24.
[0111] As can been seen in the sequential step of FIGS. 6 and 7A,
elastomeric structure 24 is then removed from mold 10 and
positioned on top of a planar substrate 14. As can be seen in FIGS.
7A and 7B, when elastomeric structure 24 has been sealed at its
bottom surface to planar substrate 14, recess 21 will form a flow
channel 30.
[0112] The present elastomeric structures form a reversible
hermetic seal with nearly any smooth planar substrate. An advantage
to forming a seal this way is that the elastomeric structures may
be peeled up, washed, and re-used. In preferred aspects, planar
substrate 14 is glass. A further advantage of using glass is that
glass is transparent, allowing optical interrogation of elastomer
channels and reservoirs. Alternatively, the elastomeric structure
may be bonded onto a flat elastomer layer by the same method as
described above, forming a permanent and high-strength bond. This
may prove advantageous when higher back pressures are used.
[0113] As can be seen in FIGS. 7A and 7B, flow channels 30 and 32
are preferably disposed at an angle to one another with a small
membrane 25 of substrate 24 separating the top of flow channel 30
from the bottom of flow channel 32.
[0114] In preferred aspects, planar substrate 14 is glass. An
advantage of using glass is that the present elastomeric structures
may be peeled up, washed and reused. A further advantage of using
glass is that optical sensing may be employed. Alternatively,
planar substrate 14 may be an elastomer itself, which may prove
advantageous when higher back pressures are used.
[0115] The method of fabrication just described may be varied to
form a structure having a membrane composed of an elastomeric
material different than that forming the walls of the channels of
the device. This variant fabrication method is illustrated in FIGS.
7C-7G.
[0116] Referring to FIG. 7C, a first micro-machined mold 10 is
provided. Micro-machined mold 10 has a raised line or protrusion 11
extending therealong. In FIG. 7D, first elastomeric layer 20 is
cast on top of first micro-machined mold 10 such that the top of
the first elastomeric layer 20 is flush with the top of raised line
or protrusion 11. This may be accomplished by carefully controlling
the volume of elastomeric material spun onto mold 10 relative to
the known height of raised line 11. Alternatively, the desired
shape could be formed by injection molding.
[0117] In FIG. 7E, second micro-machined mold 12 having a raised
protrusion 13 extending therealong is also provided. Second
elastomeric layer 22 is cast on top of second mold 12 as shown,
such that recess 23 is formed in its bottom surface corresponding
to the dimensions of protrusion 13.
[0118] In FIG. 7F, second elastomeric layer 22 is removed from mold
12 and placed on top of third elastomeric layer 222. Second
elastomeric layer 22 is bonded to third elastomeric layer 20 to
form integral elastomeric block 224 using techniques described in
detail below. At this point in the process, recess 23 formerly
occupied by raised line 13 will form flow channel 23.
[0119] In FIG. 7G, elastomeric block 224 is placed on top of first
micro-machined mold 10 and first elastomeric layer 20. Elastomeric
block and first elastomeric layer 20 are then bonded together to
form an integrated (i.e.: monolithic) elastomeric structure 24
having a membrane composed of a separate elastomeric layer 222.
[0120] When elastomeric structure 24 has been sealed at its bottom
surface to a planar substrate in the manner described above in
connection with FIG. 7A, the recess formerly occupied by raised
line 11 will form flow channel 30.
[0121] The variant fabrication method illustrated above in
conjunction with FIGS. 7C-7G offers the advantage of permitting the
membrane portion to be composed of a separate material than the
elastomeric material of the remainder of the structure. This is
important because the thickness and elastic properties of the
membrane play a key role in operation of the device. Moreover, this
method allows the separate elastomer layer to readily be subjected
to conditioning prior to incorporation into the elastomer
structure. As discussed in detail below, examples of potentially
desirable condition include the introduction of magnetic or
electrically conducting species to permit actuation of the
membrane, and/or the introduction of dopant into the membrane in
order to alter its elasticity.
[0122] While the above method is illustrated in connection with
forming various shaped elastomeric layers formed by replication
molding on top of a micromachined mold, the present invention is
not limited to this technique. Other techniques could be employed
to form the individual layers of shaped elastomeric material that
are to be bonded together. For example, a shaped layer of
elastomeric material could be formed by laser cutting or injection
molding, or by methods utilizing chemical etching and/or
sacrificial materials as discussed below in conjunction with the
second exemplary method.
The Second Exemplary Method:
[0123] A second exemplary method of fabricating an elastomeric
structure which may be used as a pump or valve is set forth in the
sequential steps shown in FIGS. 8-18.
[0124] In this aspect of the invention, flow and control channels
are defined by first patterning photoresist on the surface of an
elastomeric layer (or other substrate, which may include glass)
leaving a raised line photoresist where a channel is desired. Next,
a second layer of elastomer is added thereover and a second
photoresist is patterned on the second layer of elastomer leaving a
raised line photoresist where a channel is desired. A third layer
of elastomer is deposited thereover. Finally, the photoresist is
removed by dissolving it out of the elastomer with an appropriate
solvent, with the voids formed by removal of the photoresist
becoming the flow channels passing through the substrate.
[0125] Referring first to FIG. 8, a planar substrate 40 is
provided. A first elastomeric layer 42 is then deposited and cured
on top of planar substrate 40. Referring to FIG. 9, a first
photoresist layer 44A is then deposited over the top of elastomeric
layer 42. Referring to FIG. 10, a portion of photoresist layer 44A
is removed such that only a first line of photoresist 44B remains
as shown. Referring to FIG. 11, a second elastomeric layer 46 is
then deposited over the top of first elastomeric layer 42 and over
the first line of photoresist 44B as shown, thereby encasing first
line of photoresist 44B between first elastomeric layer 42 and
second elastomeric layer 46. Referring to FIG. 12, elastomeric
layers 46 is then cured on layer 42 to bond the layers together to
form a monolithic elastomeric substrate 45.
[0126] Referring to FIG. 13, a second photoresist layer 48A is then
deposited over elastomeric structure 45. Referring to FIG. 14, a
portion of second photoresist layer 48A is removed, leaving only a
second photoresist line 48B on top of elastomeric structure 45 as
shown. Referring to FIG. 15, a third elastomeric layer 50 is then
deposited over the top of elastomeric structure 45 (comprised of
second elastomeric layer 42 and first line of photoresist 44B) and
second photoresist line 48B as shown, thereby encasing the second
line of photoresist 48B between elastomeric structure 45 and third
elastomeric layer 50.
[0127] Referring to FIG. 16, third elastomeric layer 50 and
elastomeric structure 45 (comprising first elastomeric layer 42 and
second elastomeric layer 46 bonded together) is then bonded
together forming a monolithic elastomeric structure 47 having
photoresist lines 44B and 48B passing therethrough as shown.
Referring to FIG. 17, photoresist lines 44B, 48B are then removed
(for example, by an solvent) such that a first flow channel 60 and
a second flow channel 62 are provided in their place, passing
through elastomeric structure 47 as shown. Lastly, referring to
FIG. 18, planar substrate 40 can be removed from the bottom of the
integrated monolithic structure.
[0128] The method described in FIGS. 8-18 fabricates a patterned
elastomer structure utilizing development of photoresist
encapsulated within elastomer material. However, the methods in
accordance with the present invention are not limited to utilizing
photoresist. Other materials such as metals could also serve as
sacrificial materials to be removed selective to the surrounding
elastomer material, and the method would remain within the scope of
the present invention. For example, as described in detail below in
connection with FIGS. 35A-35D, gold metal may be etched selective
to RTV 615 [trade] elastomer utilizing the appropriate chemical
mixture.
Preferred Layer and Channel Dimensions:
[0129] Microfabricated refers to the size of features of an
elastomeric structure fabricated in accordance with an embodiment
of the present invention. In general, variation in at least one
dimension of microfabricated structures is controlled to the micron
level, with at least one dimension being microscopic (i.e. below
1000 .mu.m). Microfabrication typically involves semiconductor or
MEMS fabrication techniques such as photolithography and
spincoating that are designed for to produce feature dimensions on
the microscopic level, with at least some of the dimension of the
microfabricated structure requiring a microscope to reasonably
resolve/image the structure.
[0130] In preferred aspects, flow channels 30, 32, 60 and 62
preferably have width-to-depth ratios of about 10:1. A
non-exclusive list of other ranges of width-to-depth ratios in
accordance with embodiments of the present invention is 0.1:1 to
100:1, more preferably 1:1 to 50:1, more preferably 2:1 to 20:1,
and most preferably 3:1 to 15:1. In an exemplary aspect, flow
channels 30, 32, 60 and 62 have widths of about 1 to 1000 microns.
A non-exclusive list of other ranges of widths of flow channels in
accordance with embodiments of the present invention is 0.01 to
1000 microns, more preferably 0.05 to 1000 microns, more preferably
0.2 to 500 microns, more preferably 1 to 250 microns, and most
preferably 10 to 200 microns. Exemplary channel widths include 0.1
.mu.m, 1 .mu.m, 2 .mu.m, 5 .mu.m, 10 .mu.m, 20 .mu.m, 30 .mu.m, 40
.mu.m, 50 .mu.m, 60 .mu.m, 70 .mu.m, 80 .mu.m, 90 .mu.m, 100 .mu.m,
110 .mu.m, 120 .mu.m, 130 .mu.m, 140 .mu.m, 150 .mu.m, 160 .mu.m,
170 .mu.m, 180 .mu.m, 190 .mu.m, 200 .mu.m, 210 .mu.m, 220 .mu.m,
230 .mu.m, 240 .mu.m, and 250 .mu.m.
[0131] Flow channels 30, 32, 60, and 62 have depths of about 1 to
100 microns. A non-exclusive list of other ranges of depths of flow
channels in accordance with embodiments of the present invention is
0.01 to 1000 microns, more preferably 0.05 to 500 microns, more
preferably 0.2 to 250 microns, and more preferably 1 to 100
microns, more preferably 2 to 20 microns, and most preferably 5 to
10 microns. Exemplary channel depths include including 0.01 .mu.m,
0.02 .mu.m, 0.05 .mu.m, 0.1 .mu.m, 0.2 .mu.m, 0.5 .mu.m, 1 .mu.m, 2
.mu.m, 3 .mu.m, 4 .mu.m, 5 .mu.m, 7.5 .mu.m, 10 .mu.m, 12.5 .mu.m,
15 .mu.m, 17.5 .mu.m, 20 .mu.m, 22.5 .mu.m, 25 .mu.m, 30 .mu.m, 40
.mu.m, 50 .mu.m, 75 .mu.m, 100 .mu.m, 150 .mu.m, 200 .mu.m, and 250
.mu.m.
[0132] The flow channels are not limited to these specific
dimension ranges and examples given above, and may vary in width in
order to affect the magnitude of force required to deflect the
membrane as discussed at length below in conjunction with FIG. 27.
For example, extremely narrow flow channels having a width on the
order of 0.01 .mu.m may be useful in optical and other
applications, as discussed in detail below. Elastomeric structures
which include portions having channels of even greater width than
described above are also contemplated by the present invention, and
examples of applications of utilizing such wider flow channels
include fluid reservoir and mixing channel structures.
[0133] Elastomeric layer 22 may be cast thick for mechanical
stability. In an exemplary embodiment, layer 22 is 50 microns to
several centimeters thick, and more preferably approximately 4 mm
thick. A non-exclusive list of ranges of thickness of the elastomer
layer in accordance with other embodiments of the present invention
is between about 0.1 micron to 10 cm, 1 micron to 5 cm, 10 microns
to 2 cm, 100 microns to 10 mm.
[0134] Accordingly, membrane 25 of FIG. 7B separating flow channels
30 and 32 has a typical thickness of between about 0.01 and 1000
microns, more preferably 0.05 to 500 microns, more preferably 0.2
to 250, more preferably 1 to 100 microns, more preferably 2 to 50
microns, and most preferably 5 to 40 microns. As such, the
thickness of elastomeric layer 22 is about 100 times the thickness
of elastomeric layer 20. Exemplary membrane thicknesses include
0.01 .mu.m, 0.02 .mu.m, 0.03 .mu.m, 0.05 .mu.m, 0.1 .mu.m, 0.2
.mu.m, 0.3 .mu.m, 0.5 .mu.m, 1 .mu.m, 2 .mu.m, 3 .mu.m, 5 .mu.m,
7.5 .mu.m, 10 .mu.m, 12.5 .mu.m, 15 .mu.m, 17.5 .mu.m, 20 .mu.m,
22.5 .mu.m, 25 .mu.m, 30 .mu.m, 40 .mu.m, 50 .mu.m, 75 .mu.m, 100
.mu.m, 150 .mu.m, 200 .mu.m, 250 .mu.m, 300 .mu.m, 400 .mu.m, 500
.mu.m, 750 .mu.m, and 1000 .mu.m
[0135] Similarly, first elastomeric layer 42 may have a preferred
thickness about equal to that of elastomeric layer 20 or 22; second
elastomeric layer 46 may have a preferred thickness about equal to
that of elastomeric layer 20; and third elastomeric layer 50 may
have a preferred thickness about equal to that of elastomeric layer
22.
Multilayer Soft Lithography Construction Techniques and
Materials:
Soft Lithographic Bonding:
[0136] Preferably, elastomeric layers 20 and 22 (or elastomeric
layers 42, 46 and 50) are bonded together chemically, using
chemistry that is intrinsic to the polymers comprising the
patterned elastomer layers. Most preferably, the bonding comprises
two component "addition cure" bonding.
[0137] In a preferred aspect, the various layers of elastomer are
bound together in a heterogenous bonding in which the layers have a
different chemistry. Alternatively, a homogenous bonding may be
used in which all layers would be of the same chemistry. Thirdly,
the respective elastomer layers may optionally be glued together by
an adhesive instead. In a fourth aspect, the elastomeric layers may
be thermoset elastomers bonded together by heating.
[0138] In one aspect of homogeneous bonding, the elastomeric layers
are composed of the same elastomer material, with the same chemical
entity in one layer reacting with the same chemical entity in the
other layer to bond the layers together. In one embodiment, bonding
between polymer chains of like elastomer layers may result from
activation of a crosslinking agent due to light, heat, or chemical
reaction with a separate chemical species.
[0139] Alternatively in a heterogeneous aspect, the elastomeric
layers are composed of different elastomeric materials, with a
first chemical entity in one layer reacting with a second chemical
entity in another layer. In one exemplary heterogeneous aspect, the
bonding process used to bind respective elastomeric layers together
may comprise bonding together two layers of RTV 615 [trade]
silicone. RTV 615 [trade] silicone is a two-part addition-cure
silicone rubber. Part A contains vinyl groups and catalyst; part B
contains silicon hydride (Si--H) groups. The conventional ratio for
RTV 615 [trade] is 10A:1B. For bonding, one layer may be made with
30A:1B (i.e. excess vinyl groups) and the other with 3A:1B (i.e.
excess Si--H groups). Each layer is cured separately. When the two
layers are brought into contact and heated at elevated temperature,
they bond irreversibly forming a monolithic elastomeric
substrate.
[0140] In an exemplary aspect of the present invention, elastomeric
structures are formed utilizing Sylgard[.RTM.] 182, 184 or 186, or
aliphatic urethane diacrylates such as (but not limited to) Ebecryl
270[.RTM.] or Irr 245[.RTM.] from UCB Chemical[.RTM.].
[0141] In one embodiment in accordance with the present invention,
two-layer elastomeric structures were fabricated from pure
acrylated Urethane Ebe 270[.RTM.]. A thin bottom layer was spin
coated at 8000 rpm for 15 seconds at 170.degree. C. The top and
bottom layers were initially cured under ultraviolet light for 10
minutes under nitrogen utilizing a Model ELC 500 [trade] device
manufactured by ELECTROLITE [trade] corporation. The assembled
layers were then cured for an additional 30 minutes. Reaction was
catalyzed by a 0.5% vol/vol mixture of Irgacure[.RTM.] 500
manufactured by CIBA-GEIGY[.RTM.] Chemicals. The resulting
elastomeric material exhibited moderate elasticity and adhesion to
glass.
[0142] In another embodiment in accordance with the present
invention, two-layer elastomeric structures were fabricated from a
combination of 25% Ebe 270/50% Irr245/25% isopropyl alcohol for a
thin bottom layer, and pure acrylated URETHANE EBE 270 as a top
layer. The thin bottom layer was initially cured for 5 min, and the
top layer initially cured for 10 minutes, under ultraviolet light
under nitrogen utilizing a Model ELC 500 device manufactured by
ELECTROLITE [TRADE] corporation. The assembled layers were then
cured for an additional 30 minutes. Reaction was catalyzed by a
0.5% vol/vol mixture of Irgacure 500 manufactured by CIBA-GIEGY
Chemicals. The resulting elastomeric material exhibited moderate
elasticity and adhered to glass.
[0143] Alternatively, other bonding methods may be used, including
activating the elastomer surface, for example by plasma exposure,
so that the elastomer layers/substrate will bond when placed in
contact. For example, one possible approach to bonding together
elastomer layers composed of the same material is set forth by
Duffy et al, "Rapid Prototyping of Microfluidic Systems in Poly
(dimethylsiloxane)," Analytical Chemistry (1998), 70, 4974-4984,
incorporated herein by reference. This paper discusses that
exposing polydimethylsiloxane (PDMS) layers to oxygen plasma causes
oxidation of the surface, with irreversible bonding occurring when
the two oxidized layers are placed into contact.
[0144] Yet another approach to bonding together successive layers
of elastomer is to utilize the adhesive properties of uncured
elastomer. Specifically, a thin layer of uncured elastomer such as
RTV 615 [TRADE] is applied on top of a first cured elastomeric
layer. Next, a second cured elastomeric layer is placed on top of
the uncured elastomeric layer. The thin middle layer of uncured
elastomer is then cured to produce a monolithic elastomeric
structure. Alternatively, uncured elastomer can be applied to the
bottom of a first cured elastomer layer, with the first cured
elastomer layer placed on top of a second cured elastomer layer.
Curing the middle thin elastomer layer again results in formation
of a monolithic elastomeric structure.
[0145] Where encapsulation of sacrificial layers is employed to
fabricate the elastomer structure as described above in FIGS. 8-18,
bonding of successive elastomeric layers may be accomplished by
pouring uncured elastomer over a previously cured elastomeric layer
and any sacrificial material patterned thereupon. Bonding between
elastomer layers occurs due to interpenetration and reaction of the
polymer chains of an uncured elastomer layer with the polymer
chains of a cured elastomer layer. Subsequent curing of the
elastomeric layer will create a bond between the elastomeric layers
and create a monolithic elastomeric structure.
[0146] Referring to the first method of FIGS. 1 to 7B, first
elastomeric layer 20 may be created by spin-coating an RTV mixture
on microfabricated mold 12 at 2000 rpm's for 30 seconds yielding a
thickness of approximately 40 microns. Second elastomeric layer 22
may be created by spin-coating an RTV mixture on microfabricated
mold 11. Both layers 20 and 22 may be separately baked or cured at
about 80.degree. C. for 1.5 hours. The second elastomeric layer 22
may be bonded onto first elastomeric layer 20 at about 80.degree.
C. for about 1.5 hours.
[0147] Micromachined molds 10 and 12 may be patterned photoresist
on silicon wafers. In an exemplary aspect, a SHIPLEY[.RTM.]-SJR
5740 [trade] photoresist was spun at 2000 rpm patterned with a high
resolution transparency film as a mask and then developed yielding
an inverse channel of approximately 10 microns in height. When
baked at approximately 200.degree. C. for about 30 minutes, the
photoresist reflows and the inverse channels become rounded. In
preferred aspects, the molds may be treated with
trimethylchlorosilane (TMCS) vapor for about a minute before each
use in order to prevent adhesion of silicone rubber.
[0148] Using the various multilayer soft lithography construction
techniques and materials set forth herein, the present inventors
have experimentally succeeded in creating channel networks
comprises of up to seven separate elastomeric layers thick, with
each layer being about 40 .mu.m thick. It is foreseeable that
devices comprising more than seven separate elastomeric layers
bonded together could be developed.
Suitable Elastomeric Materials:
[0149] Allcock et al, Contemporary Polymer Chemistry, 2.sup.nd Ed.
describes elastomers in general as polymers existing at a
temperature between their glass transition temperature and
liquefaction temperature. Elastomeric materials exhibit elastic
properties because the polymer chains readily undergo torsional
motion to permit uncoiling of the backbone chains in response to a
force, with the backbone chains recoiling to assume the prior shape
in the absence of the force. In general, elastomers deform when
force is applied, but then return to their original shape when the
force is removed. The elasticity exhibited by elastomeric materials
may be characterized by a Young's modulus. Elastomeric materials
having a Young's modulus of between about 1 Pa-1 TPa, more
preferably between about 10 Pa-100 GPa, more preferably between
about 20 Pa-1 GPa, more preferably between about 50 Pa-10 MPa, and
more preferably between about 100 Pa-1 MPa are useful in accordance
with the present invention, although elastomeric materials having a
Young's modulus outside of these ranges could also be utilized
depending upon the needs of a particular application.
[0150] The systems of the present invention may be fabricated from
a wide variety of elastomers. In an exemplary aspect, elastomeric
layers 20, 22, 42, 46 and 50 may preferably be fabricated from
silicone rubber. However, other suitable elastomers may also be
used.
[0151] In an exemplary aspect of the present invention, the present
systems are fabricated from an elastomeric polymer such as
GE[.RTM.] RTV 15615 [trade] (formulation), a vinyl-silane
crosslinked (type) silicone elastomer (family). However, the
present systems are not limited to this one formulation, type or
even this family of polymer; rather, nearly any elastomeric polymer
is suitable. An important requirement for the preferred method of
fabrication of the present microvalves is the ability to bond
multiple layers of elastomers together. In the case of multilayer
soft lithography, layers of elastomer are cured separately and then
bonded together. This scheme requires that cured layers possess
sufficient reactivity to bond together. Either the layers may be of
the same type, and are capable of bonding to themselves, or they
may be of two different types, and are capable of bonding to each
other. Other possibilities include the use an adhesive between
layers and the use of thermoset elastomers.
[0152] Given the tremendous diversity of polymer chemistries,
precursors, synthetic methods, reaction conditions, and potential
additives, there are a huge number of possible elastomer systems
that could be used to make monolithic elastomeric microvalves and
pumps. Variations in the materials used will most likely be driven
by the need for particular material properties, i.e. solvent
resistance, stiffness, gas permeability, or temperature
stability.
[0153] There are many, many types of elastomeric polymers. A brief
description of the most common classes of elastomers is presented
here, with the intent of showing that even with relatively
"standard" polymers, many possibilities for bonding exist. Common
elastomeric polymers include polyisoprene, polybutadiene,
polychloroprene, polyisobutylene, poly(styrene-butadiene-styrene),
the polyurethanes, and silicones.
Polyisoprene, Polybutadiene, Polychloroprene:
[0154] Polyisoprene, polybutadiene, and polychloroprene are all
polymerized from diene monomers, and therefore have one double bond
per monomer when polymerized. This double bond allows the polymers
to be converted to elastomers by vulcanization (essentially, sulfur
is used to form crosslinks between the double bonds by heating).
This would easily allow homogeneous multilayer soft lithography by
incomplete vulcanization of the layers to be bonded; photoresist
encapsulation would be possible by a similar mechanism.
Polyisobutylene:
[0154] [0155] Pure polyisobutylene has no double bonds, but is
crosslinked to use as an elastomer by including a small amount
(.about.1%) of isoprene in the polymerization. The isoprene
monomers give pendant double bonds on the polyisobutylene backbone,
which may then be vulcanized as above.
Poly(Styrene-Butadiene-Styrene):
[0155] [0156] Poly(styrene-butadiene-styrene) is produced by living
anionic polymerization (that is, there is no natural
chain-terminating step in the reaction), so "live" polymer ends can
exist in the cured polymer. This makes it a natural candidate for
the present photoresist encapsulation system (where there will be
plenty of unreacted monomer in the liquid layer poured on top of
the cured layer). Incomplete curing would allow homogeneous
multilayer soft lithography (A to A bonding). The chemistry also
facilitates making one layer with extra butadiene ("A") and
coupling agent and the other layer ("B") with a butadiene deficit
(for heterogeneous multilayer soft lithography). SBS is a
"thermoset elastomer," meaning that above a certain temperature it
melts and becomes plastic (as opposed to elastic); reducing the
temperature yields the elastomer again. Thus, layers can be bonded
together by heating.
Polyurethanes:
[0156] [0157] Polyurethanes are produced from di-isocyanates (A-A)
and di-alcohols or di-amines (B-B); since there are a large variety
of di-isocyanates and di-alcohols/amines, the number of different
types of polyurethanes is huge. The A vs. B nature of the polymers,
however, would make them useful for heterogeneous multilayer soft
lithography just as RTV 615 [trade] is: by using excess A-A in one
layer and excess B-B in the other layer.
Silicones:
[0157] [0158] Silicone polymers probably have the greatest
structural variety, and almost certainly have the greatest number
of commercially available formulations. The vinyl-to-(Si--H)
crosslinking of RTV 615 [trade] (which allows both heterogeneous
multilayer soft lithography and photoresist encapsulation) has
already been discussed, but this is only one of several
crosslinking methods used in silicone polymer chemistry.
Cross Linking Agents:
[0159] In addition to the use of the simple "pure" polymers
discussed above, crosslinking agents may be added. Some agents
(like the monomers bearing pendant double bonds for vulcanization)
are suitable for allowing homogeneous (A to A) multilayer soft
lithography or photoresist encapsulation; in such an approach the
same agent is incorporated into both elastomer layers.
Complementary agents (i.e. one monomer bearing a pendant double
bond, and another bearing a pendant Si--H group) are suitable for
heterogeneous (A to B) multilayer soft lithography. In this
approach complementary agents are added to adjacent layers.
Other Materials:
[0160] In addition, polymers incorporating materials such as
chlorosilanes or methyl-, ethyl-, and phenylsilanes, and
polydimethylsiloxane (PDMS) such as DOW CHEMICAL[.RTM.] Corp.
SYLGARD[.RTM.] 182, 184 or 186, or aliphatic urethane diacrylates
such as (but not limited to) EbecrylEBECRYL[.RTM.] 270 or IRR245
from UCB CHEMICAL [trade] may also be used.
[0161] The following is a non-exclusive list of elastomeric
materials which may be utilized in connection with the present
invention: polyisoprene, polybutadiene, polychloroprene,
polyisobutylene, poly(styrene-butadiene-styrene), the
polyurethanes, and silicone polymers; or
poly(bis(fluoroalkoxy)phosphazene) (PNF, Eypel-F),
poly(carborane-siloxanes) (Dexsil), poly(acrylonitrile-butadiene)
(nitrile rubber), poly(l-butene),
poly(chlorotrifluoroethylene-vinylidene fluoride) copolymers
(Kel-F), poly(ethyl vinyl ether), poly(vinylidene fluoride),
poly(vinylidene fluoride--hexafluoropropylene) copolymer (Viton),
elastomeric compositions of polyvinylchloride (PVC), polysulfone,
polycarbonate, polymethylmethacrylate (PMMA), and
polytertrafluoroethylene (Teflon).
Doping and Dilution:
[0162] Elastomers may also be "doped" with uncrosslinkable polymer
chains of the same class. For instance RTV 615 [trade] may be
diluted with GE[.RTM.] SF96-50[.RTM.] silicone fluid. This serves
to reduce the viscosity of the uncured elastomer and reduces the
Young's modulus of the cured elastomer. Essentially, the
crosslink-capable polymer chains are spread further apart by the
addition of "inert" polymer chains, so this is called "dilution."
RTV 615 [trade] cures at up to 90% dilution, with a dramatic
reduction in Young's modulus.
[0163] FIG. 49 plots Young's modulus versus percentage dilution
with GE SF96-50 diluent of GE RTV 615 [trade] elastomer having a
ratio of 30:1 A:B. FIG. 49 shows that the flexibility of the
elastomer material, and hence the responsiveness of the valve
membrane to an applied actuation force, can be controlled during
fabrication of the device.
[0164] Other examples of doping of elastomer material may include
the introduction of electrically conducting or magnetic species, as
described in detail below in conjunction with alternative methods
of actuating the membrane of the device. Should it be desired,
doping with fine particles of material having an index of
refraction different than the elastomeric material (i.e. silica,
diamond, sapphire) is also contemplated as a system for altering
the refractive index of the material. Strongly absorbing or opaque
particles may be added to render the elastomer colored or opaque to
incident radiation. This may conceivably be beneficial in an
optically addressable system.
[0165] Finally, by doping the elastomer with specific chemical
species, these doped chemical species may be presented at the
elastomer surface, thus serving as anchors or starting points for
further chemical derivitization.
Pre-Treatment and Surface Coating
[0166] Once the elastomeric material has been molded or etched into
the appropriate shape, it may be necessary to pre-treat the
material in order to facilitate operation in connection with a
particular application.
[0167] For example, one possible application for an elastomeric
device in accordance with the present invention is to sort
biological entities such as cells or DNA. In such an application,
the hydrophobic nature of the biological entity may cause it to
adhere to the hydrophobic elastomer of the walls of the channel.
Therefore, it may be useful to pre-treat the elastomeric structure
order to impart a hydrophilic character to the channel walls. In an
embodiment of the present invention utilizing the GENERAL ELECTRIC
RTV 615 [trade] elastomer, this can be accomplished by boiling the
shaped elastomer in acid (e.g. 0.01% HCl in water, pH 2.7, at
60.degree. C. for 40 min).
[0168] Other types of pre-treatment of elastomer material are also
contemplated by the present application. For example, certain
portions of elastomer may be pre-treated to create anchors for
surface chemistry reactions (for example in the formation of
peptide chains), or binding sites for antibodies, as would be
advantageous in a given application. Other examples of
pre-treatment of elastomer material may include the introduction of
reflective material on the elastomer surface, as described in
detail below in conjunction with the micro-mirror array
application.
Methods of Operating the Present Invention:
[0169] FIGS. 7B and 7H together show the closing of a first flow
channel by pressurizing a second flow channel, with FIG. 7B (a
front sectional view cutting through flow channel 32 in
corresponding FIG. 7A), showing an open first flow channel 30; with
FIG. 7H showing first flow channel 30 closed by pressurization of
the second flow channel 32.
[0170] Referring to FIG. 7B, first flow channel 30 and second flow
channel 32 are shown. Membrane 25 separates the flow channels,
forming the top of first flow channel 30 and the bottom of second
flow channel 32. As can be seen, flow channel 30 is "open."
[0171] As can be seen in FIG. 7H, pressurization of flow channel 32
(either by gas or liquid introduced therein) causes membrane 25 to
deflect downward, thereby pinching off flow F passing through flow
channel 30. Accordingly, by varying the pressure in channel 32, a
linearly actuable valving system is provided such that flow channel
30 can be opened or closed by moving membrane 25 as desired. (For
illustration purposes only, channel 30 in FIG. 7G is shown in a
"mostly closed" position, rather than a "fully closed"
position).
[0172] It is to be understood that exactly the same valve opening
and closing methods can be achieved with flow channels 60 and
62.
Since such valves are actuated by moving the roof of the channels
themselves (i.e.: moving membrane 25) valves and pumps produced by
this technique have a truly zero dead volume, and switching valves
made by this technique have a dead volume approximately equal to
the active volume of the valve, for example about
100.times.100.times.10 .mu.m=100 pL. Such dead volumes and areas
consumed by the moving membrane are approximately two orders of
magnitude smaller than known conventional microvalves. Smaller and
larger valves and switching valves are contemplated in the present
invention, and a non-exclusive list of ranges of dead volume
includes 1 aL to 1 uL, 100 aL to 100 nL, 1 fL to 10 nL, 100 fL to 1
nL, and 1 pL to 100 pL.
[0173] The extremely small volumes capable of being delivered by
pumps and valves in accordance with the present invention represent
a substantial advantage. Specifically, the smallest known volumes
of fluid capable of being manually metered is around 0.1 .mu.l. The
smallest known volumes capable of being metered by automated
systems is about ten-times larger (1 .mu.l). Utilizing pumps and
valves in accordance with the present invention, volumes of liquid
of 10 nl or smaller can routinely be metered and dispensed. The
accurate metering of extremely small volumes of fluid enabled by
the present invention would be extremely valuable in a large number
of biological applications, including diagnostic tests and
assays.
[0174] Equation 1 represents a highly simplified mathematical model
of deflection of a rectangular, linear, elastic, isotropic plate of
uniform thickness by an applied pressure:
w=(BPb.sup.4)/(Eh.sup.3), where: (1) [0175] w=deflection of plate;
[0176] B=shape coefficient (dependent upon length vs. width and
support of edges of plate); [0177] P=applied pressure; [0178]
b=plate width [0179] E=Young's modulus; and [0180] h=plate
thickness Thus even in this extremely simplified expression,
deflection of an elastomeric membrane in response to a pressure
will be a function of: the length, width, and thickness of the
membrane, the flexibility of the membrane (Young's modulus), and
the applied actuation force. Because each of these parameters will
vary widely depending upon the actual dimensions and physical
composition of a particular elastomeric device in accordance with
the present invention, a wide range of membrane thicknesses and
elasticities, channel widths, and actuation forces are contemplated
by the present invention.
[0181] It should be understood that the formula just presented is
only an approximation, since in general the membrane does not have
uniform thickness, the membrane thickness is not necessarily small
compared to the length and width, and the deflection is not
necessarily small compared to length, width, or thickness of the
membrane. Nevertheless, the equation serves as a useful guide for
adjusting variable parameters to achieve a desired response of
deflection versus applied force.
[0182] FIGS. 21a and 21b illustrate valve opening vs. applied
pressure for a 100 .mu.m wide first flow channel 30 and a 50 .mu.m
wide second flow channel 32. The membrane of this device was formed
by a layer of GENERAL ELECTRIC[.RTM.] SILICONES RTV 615 [trade]
having a thickness of approximately 30 .mu.m and a Young's modulus
of approximately 750 kPa. FIGS. 21a and 21b show the extent of
opening of the valve to be substantially linear over most of the
range of applied pressures. While the present invention does not
require this linear actuation behavior, embodiments of the
invention.
[0183] Air pressure was applied to actuate the membrane of the
device through a 10 cm long piece of plastic tubing having an outer
diameter of 0.025'' connected to a 25 mm piece of stainless steel
hypodermic tubing with an outer diameter of 0.025'' and an inner
diameter of 0.013.'' This tubing was placed into contact with the
control channel by insertion into the elastomeric block in a
direction normal to the control channel. Air pressure was applied
to the hypodermic tubing from an external LHDA miniature solenoid
valve manufactured by Lee Co.
[0184] Connection of conventional microfluidic devices to an
external fluid flow poses a number of problems avoided by the
external configuration just described. One such problem is the
fragility of their connections with the external environment.
Specifically, conventional microfluidic devices are composed of
hard, inflexible materials (such as silicon), to which pipes or
tubing allowing connection to external elements must be joined. The
rigidity of the conventional material creates significant physical
stress at points of contact with small and delicate external
tubing, rendering conventional microfluidic devices prone to
fracture and leakage at these contact points.
[0185] By contrast, the elastomer of the present invention is
flexible and can be easily penetrated for external connection by a
tube composed a hard material. For example, in an elastomer
structure fabricated utilizing the method shown in FIGS. 1-7B, a
hole extending from the exterior surface of the structure into the
control channel can be made by penetrating the elastomer with metal
hypodermic tubing after the upper elastomer piece has been removed
from the mold (as shown in FIG. 3) and before this piece has been
bonded to the lower elastomer piece (as shown in FIG. 4). Between
these steps, the roof of the control channel is exposed to the
user's view and is accessible to insertion and proper positioning
of the hole. Following completion of fabrication of the device, the
metal hypodermic tubing is inserted into the hole to complete the
fluid connection.
[0186] Moreover, the elastomer of the present invention will flex
in response to physical strain at the point of contact with an
external connection, rendering the external physical connection
more robust. This flexibility substantially reduces the chance of
leakage or fracture of the present device.
[0187] Another disadvantage of conventional microfluidic devices is
the difficulty in establishing an effective seal between the device
and its external links. Because of the extremely narrow diameter of
the channels of these devices, even moderate rates of fluid flow
can require extremely high pressures. Unwanted leakage at the
junction between the device and external connections may result.
However, the flexibility of the elastomer of the present device
also aids in overcoming leakage relating to pressure. In
particular, the flexible elastomeric material flexes to conform
around inserted tubing in order to form a pressure resistant
seal.
[0188] While control of the flow of material through the device has
so far been described utilizing applied gas pressure, other fluids
could be used. For example, air is compressible, and thus
experiences some finite delay between the time of application of
pressure by the external solenoid valve and the time that this
pressure is experienced by the membrane. In an alternative
embodiment of the present invention, pressure could be applied from
an external source to a noncompressible fluid such as water or
hydraulic oils, resulting in a near-instantaneous transfer of
applied pressure to the membrane. However, if the displaced volume
of the valve is large or the control channel is narrow, higher
viscosity of a control fluid may contribute to delay in actuation.
The optimal medium for transferring pressure will therefore depend
upon the particular application and device configuration, and both
gaseous and liquid media are contemplated by the invention.
[0189] While external applied pressure as described above has been
applied by a pump/tank system through a pressure regulator and
external miniature valve, other methods of applying external
pressure are also contemplated in the present invention, including
gas tanks, compressors, piston systems, and columns of liquid. Also
contemplated is the use of naturally occurring pressure sources
such as may be found inside living organisms, such as blood
pressure, gastric pressure, the pressure present in the
cerebro-spinal fluid, pressure present in the intra-ocular space,
and the pressure exerted by muscles during normal flexure. Other
methods of regulating external pressure are also contemplated, such
as miniature valves, pumps, macroscopic peristaltic pumps, pinch
valves, and other types of fluid regulating equipment such as is
known in the art.
[0190] As can be seen, the response of valves in accordance with
embodiments of the present invention have been experimentally shown
to be almost perfectly linear over a large portion of its range of
travel, with minimal hysteresis. Accordingly, the present valves
are ideally suited for microfluidic metering and fluid control. The
linearity of the valve response demonstrates that the individual
valves are well modeled as Hooke's Law springs. Furthermore, high
pressures in the flow channel (i.e.: back pressure) can be
countered simply by increasing the actuation pressure.
Experimentally, the present inventors have achieved valve closure
at back pressures of 70 kPa, but higher pressures are also
contemplated. The following is a nonexclusive list of pressure
ranges encompassed by the present invention: 10 Pa-25 MPa; 100
Pa-10 MPa, 1 kPa-11 MPa, 1 kPa-1 MPa, 1 kPa-300 kPa, 5 kPa-200 kPa,
and 15 kPa-100 kPa.
[0191] While valves and pumps do not require linear actuation to
open and close, linear response does allow valves to more easily be
used as metering devices. In one embodiment of the invention, the
opening of the valve is used to control flow rate by being
partially actuated to a known degree of closure. Linear valve
actuation makes it easier to determine the amount of actuation
force required to close the valve to a desired degree of closure.
Another benefit of linear actuation is that the force required for
valve actuation may be easily determined from the pressure in the
flow channel. If actuation is linear, increased pressure in the
flow channel may be countered by adding the same pressure (force
per unit area) to the actuated portion of the valve.
[0192] Linearity of a valve depends on the structure, composition,
and method of actuation of the valve structure. Furthermore,
whether linearity is a desirable characteristic in a valve depends
on the application. Therefore, both linearly and non-linearly
actuatable valves are contemplated in the present invention, and
the pressure ranges over which a valve is linearly actuatable will
vary with the specific embodiment.
[0193] FIG. 22 illustrates time response (i.e.: closure of valve as
a function of time in response to a change in applied pressure) of
a 100 .mu.m.times.100 .mu.m.times.10 .mu.m RTV microvalve with
10-cm-long air tubing connected from the chip to a pneumatic valve
as described above.
[0194] Two periods of digital control signal, actual air pressure
at the end of the tubing and valve opening are shown in FIG. 22.
The pressure applied on the control line is 100 kPa, which is
substantially higher than the .about.40 kPa required to close the
valve. Thus, when closing, the valve is pushed closed with a
pressure 60 kPa greater than required. When opening, however, the
valve is driven back to its rest position only by its own spring
force 40 kPa). Thus, .tau..sub.close is expected to be smaller than
.tau..sub.open. There is also a lag between the control signal and
control pressure response, due to the limitations of the miniature
valve used to control the pressure. Calling such lags t and the 1/e
time constants .tau., the values are: .tau..sub.open=3.63 ms,
.tau..sub.open=1.88 ms, .tau..sub.close=2.15 ms,
.tau..sub.close=0.51 ms. If 3T each are allowed for opening and
closing, the valve runs comfortably at 75 Hz when filled with
aqueous solution.
[0195] If one used another actuation method which did not suffer
from opening and closing lag, this valve would run at .about.375
Hz. Note also that the spring constant can be adjusted by changing
the membrane thickness; this allows optimization for either fast
opening or fast closing. The spring constant could also be adjusted
by changing the elasticity (Young's modulus) of the membrane, as is
possible by introducing dopant into the membrane or by utilizing a
different elastomeric material to serve as the membrane (described
above in conjunction with FIGS. 7C-7H.)
[0196] When experimentally measuring the valve properties as
illustrated in FIGS. 21 and 22, the valve opening was measured by
fluorescence. In these experiments, the flow channel was filled
with a solution of fluorescein isothiocyanate (FITC) in buffer
(pH.gtoreq.8) and the fluorescence of a square area occupying the
center .about.1/3rd of the channel is monitored on an
epi-fluorescence microscope with a photomultiplier tube with a 10
kHz bandwidth. The pressure was monitored with a Wheatstone-bridge
pressure sensor (SENSYM[.RTM.] SCC15GD2 [trade]) pressurized
simultaneously with the control line through nearly identical
pneumatic connections.
Flow Channel Cross Sections:
[0197] The flow channels of the present invention may optionally be
designed with different cross sectional sizes and shapes, offering
different advantages, depending upon their desired application. For
example, the cross sectional shape of the lower flow channel may
have a curved upper surface, either along its entire length or in
the region disposed under an upper cross channel). Such a curved
upper surface facilitates valve sealing, as follows.
[0198] Referring to FIG. 19, a cross sectional view (similar to
that of FIG. 7B) through flow channels 30 and 32 is shown. As can
be seen, flow channel 30 is rectangular in cross sectional shape.
In an alternate preferred aspect of the invention, as shown in FIG.
20, the cross-section of a flow channel 30 instead has an upper
curved surface.
[0199] Referring first to FIG. 19, when flow channel 32 is
pressurized, the membrane portion 25 of elastomeric block 24
separating flow channels 30 and 32 will move downwardly to the
successive positions shown by the dotted lines 25A, 25B, 25C, 25D,
and 25E. As can be seen, incomplete sealing may possibly result at
the edges of flow channel 30 adjacent planar substrate 14.
[0200] In the alternate preferred embodiment of FIG. 20, flow
channel 30a has a curved upper wall 25A. When flow channel 32 is
pressurized, membrane portion 25 will move downwardly to the
successive positions shown by dotted lines 25A2, 25A3, 25A4 and
25A5, with edge portions of the membrane moving first into the flow
channel, followed by top membrane portions. An advantage of having
such a curved upper surface at membrane 25A is that a more complete
seal will be provided when flow channel 32 is pressurized.
Specifically, the upper wall of the flow channel 30 will provide a
continuous contacting edge against planar substrate 14, thereby
avoiding the "island" of contact seen between wall 25 and the
bottom of flow channel 30 in FIG. 19.
[0201] Another advantage of having a curved upper flow channel
surface at membrane 25A is that the membrane can more readily
conform to the shape and volume of the flow channel in response to
actuation. Specifically, where a rectangular flow channel is
employed, the entire perimeter (2.times. flow channel height, plus
the flow channel width) must be forced into the flow channel.
However where an arched flow channel is used, a smaller perimeter
of material (only the semi-circular arched portion) must be forced
into the channel. In this manner, the membrane requires less change
in perimeter for actuation and is therefore more responsive to an
applied actuation force to block the flow channel
[0202] In an alternate aspect, (not illustrated), the bottom of
flow channel 30 is rounded such that its curved surface mates with
the curved upper wall 25A as seen in FIG. 20 described above.
[0203] In summary, the actual conformational change experienced by
the membrane upon actuation will depend upon the configuration of
the particular elastomeric structure. Specifically, the
conformational change will depend upon the length, width, and
thickness profile of the membrane, its attachment to the remainder
of the structure, and the height, width, and shape of the flow and
control channels and the material properties of the elastomer used.
The conformational change may also depend upon the method of
actuation, as actuation of the membrane in response to an applied
pressure will vary somewhat from actuation in response to a
magnetic or electrostatic force.
[0204] Moreover, the desired conformational change in the membrane
will also vary depending upon the particular application for the
elastomeric structure. In the simplest embodiments described above,
the valve may either be open or closed, with metering to control
the degree of closure of the valve. In other embodiments however,
it may be desirable to alter the shape of the membrane and/or the
flow channel in order to achieve more complex flow regulation. For
instance, the flow channel could be provided with raised
protrusions beneath the membrane portion, such that upon actuation
the membrane shuts off only a percentage of the flow through the
flow channel, with the percentage of flow blocked insensitive to
the applied actuation force.
[0205] Many membrane thickness profiles and flow channel
cross-sections are contemplated by the present invention, including
rectangular, trapezoidal, circular, ellipsoidal, parabolic,
hyperbolic, and polygonal, as well as sections of the above shapes.
More complex cross-sectional shapes, such as the embodiment with
protrusions discussed immediately above or an embodiment having
concavities in the flow channel, are also contemplated by the
present invention.
[0206] In addition, while the invention is described primarily
above in conjunction with an embodiment wherein the walls and
ceiling of the flow channel are formed from elastomer, and the
floor of the channel is formed from an underlying substrate, the
present invention is not limited to this particular orientation.
Walls and floors of channels could also be formed in the underlying
substrate, with only the ceiling of the flow channel constructed
from elastomer. This elastomer flow channel ceiling would project
downward into the channel in response to an applied actuation
force, thereby controlling the flow of material through the flow
channel. In general, monolithic elastomer structures as described
elsewhere in the instant application are preferred for microfluidic
applications. However, it may be useful to employ channels formed
in the substrate where such an arrangement provides advantages. For
instance, a substrate including optical waveguides could be
constructed so that the optical waveguides direct light
specifically to the side of a microfluidic channel.
Alternate Valve Actuation Techniques:
[0207] In addition to pressure based actuation systems described
above, optional electrostatic and magnetic actuation systems are
also contemplated, as follows.
[0208] Electrostatic actuation can be accomplished by forming
oppositely charged electrodes (which will tend to attract one
another when a voltage differential is applied to them) directly
into the monolithic elastomeric structure. For example, referring
to FIG. 7B, an optional first electrode 70 (shown in phantom) can
be positioned on (or in) membrane 25 and an optional second
electrode 72 (also shown in phantom) can be positioned on (or in)
planar substrate 14. When electrodes 70 and 72 are charged with
opposite polarities, an attractive force between the two electrodes
will cause membrane 25 to deflect downwardly, thereby closing the
"valve" (i.e.: closing flow channel 30).
[0209] For the membrane electrode to be sufficiently conductive to
support electrostatic actuation, but not so mechanically stiff so
as to impede the valve's motion, a sufficiently flexible electrode
must be provided in or over membrane 25. Such an electrode may be
provided by a thin metallization layer, doping the polymer with
conductive material, or making the surface layer out of a
conductive material.
[0210] In an exemplary aspect, the electrode present at the
deflecting membrane can be provided by a thin metallization layer
which can be provided, for example, by sputtering a thin layer of
metal such as 20 nm of gold. In addition to the formation of a
metallized membrane by sputtering, other metallization approaches
such as chemical epitaxy, evaporation, electroplating, and
electroless plating are also available. Physical transfer of a
metal layer to the surface of the elastomer is also available, for
example by evaporating a metal onto a flat substrate to which it
adheres poorly, and then placing the elastomer onto the metal and
peeling the metal off of the substrate.
[0211] A conductive electrode 70 may also be formed by depositing
carbon black (i.e. CABOT VULCAN XC72R) [trade] on the elastomer
surface, either by wiping on the dry powder or by exposing the
elastomer to a suspension of carbon black in a solvent which causes
swelling of the elastomer, (such as a chlorinated solvent in the
case of PDMS). Alternatively, the electrode 70 may be formed by
constructing the entire layer 20 out of elastomer doped with
conductive material (i.e. carbon black or finely divided metal
particles). Yet further alternatively, the electrode may be formed
by electrostatic deposition, or by a chemical reaction that
produces carbon. In experiments conducted by the present inventors,
conductivity was shown to increase with carbon black concentration
from 5.6.times.10.sup.-16 to about 5.times.10.sup.-3
(.OMEGA.-cm).sup.-1. The lower electrode 72, which is not required
to move, may be either a compliant electrode as described above, or
a conventional electrode such as evaporated gold, a metal plate, or
a doped semiconductor electrode.
[0212] Alternatively, magnetic actuation of the flow channels can
be achieved by fabricating the membrane separating the flow
channels with a magnetically polarizable material such as iron, or
a permanently magnetized material such as polarized NdFeB. In
experiments conducted by the present inventors, magnetic silicone
was created by the addition of iron powder (about 1 .mu.m particle
size), up to 20% iron by weight.
[0213] Where the membrane is fabricated with a magnetically
polarizable material, the membrane can be actuated by attraction in
response to an applied magnetic field. Where the membrane is
fabricated with a material capable of maintaining permanent
magnetization, the material can first be magnetized by exposure to
a sufficiently high magnetic field, and then actuated either by
attraction or repulsion in response to the polarity of an applied
inhomogeneous magnetic field.
[0214] The magnetic field causing actuation of the membrane can be
generated in a variety of ways. In one embodiment, the magnetic
field is generated by an extremely small inductive coil formed in
or proximate to the elastomer membrane. The actuation effect of
such a magnetic coil would be localized, allowing actuation of
individual pump and/or valve structures. Alternatively, the
magnetic field could be generated by a larger, more powerful
source, in which case actuation would be global and would actuate
multiple pump and/or valve structures at one time.
[0215] It is further possible to combine pressure actuation with
electrostatic or magnetic actuation. Specifically, a bellows
structure in fluid communication with a recess could be
electrostatically or magnetically actuated to change the pressure
in the recess and thereby actuate a membrane structure adjacent to
the recess.
[0216] In addition to electrical or magnetic actuation as described
above, optional electrolytic and electrokinetic actuation systems
are also contemplated by the present invention. For example,
actuation pressure on the membrane could arise from an electrolytic
reaction in a recess overlying the membrane. In such an embodiment,
electrodes present in the recess would apply a voltage across an
electrolyte in the recess. This potential difference would cause
electrochemical reaction at the electrodes and result in the
generation of gas species, giving rise to a pressure differential
in the recess.
[0217] Alternatively, actuation pressure on the membrane could
arise from an electrokinetic fluid flow in the control channel. In
such an embodiment, electrodes present at opposite ends of the
control channel would apply a potential difference across an
electrolyte present in the control channel. Migration of charged
species in the electrolyte to the respective electrodes could give
rise to a pressure differential.
[0218] Finally, it is also possible to actuate the device by
causing a fluid flow in the control channel based upon the
application of thermal energy, either by thermal expansion or by
production of gas from liquid. Similarly, chemical reactions
generating gaseous products may produce an increase in pressure
sufficient for membrane actuation.
Networked Systems:
[0219] FIGS. 23A and 23B show a views of a single on/off valve,
identical to the systems set forth above, (for example in FIG. 7A).
FIGS. 24A and 24B shows a peristaltic pumping system comprised of a
plurality of the single addressable on/off valves as seen in FIG.
23, but networked together. FIG. 25 is a graph showing
experimentally achieved pumping rates vs. frequency for the
peristaltic pumping system of FIG. 24. FIGS. 26A and 26B show a
schematic view of a plurality of flow channels which are
controllable by a single control line. This system is also
comprised of a plurality of the single addressable on/off valves of
FIG. 23, multiplexed together, but in a different arrangement than
that of FIG. 23. FIG. 27 is a schematic illustration of a
multiplexing system adapted to permit fluid flow through selected
channels, comprised of a plurality of the single on/off valves of
FIG. 23, joined or networked together.
[0220] Referring first to FIGS. 23A and 23B, a schematic of flow
channels 30 and 32 is shown. Flow channel 30 preferably has a fluid
(or gas) flow F passing therethrough. Flow channel 32, (which
crosses over flow channel 30, as was already explained herein), is
pressurized such that membrane 25 separating the flow channels may
be depressed into the path of flow channel 30, shutting off the
passage of flow F therethrough, --as has been explained. As such,
"flow channel" 32 can also be referred to as a "control line" which
actuates a single valve in flow channel 30. In FIGS. 23 to 26, a
plurality of such addressable valves are joined or networked
together in various arrangements to produce pumps, capable of
peristaltic pumping, and other fluidic logic applications.
[0221] Referring to FIGS. 24A and 24B, a system for peristaltic
pumping is provided, as follows. A flow channel 30 has a plurality
of generally parallel flow channels (i.e.: control lines) 32A, 32B
and 32C passing thereover. By pressurizing control line 32A, flow F
through flow channel 30 is shut off under membrane 25A at the
intersection of control line 32A and flow channel 30. Similarly,
(but not shown), by pressurizing control line 32B, flow F through
flow channel 30 is shut off under membrane 25B at the intersection
of control line 32B and flow channel 30, etc.
[0222] Each of control lines 32A, 32B, and 32C is separately
addressable. Therefore, peristalsis may be actuated by the pattern
of actuating 32A and 32C together, followed by 32A, followed by 32A
and 32B together, followed by 32B, followed by 32B and C together,
etc. This corresponds to a successive "101, 100, 110, 010, 011,
001" pattern, where "0" indicates "valve open" and "1" indicates
"valve closed." This peristaltic pattern is also known as a
120.degree. pattern (referring to the phase angle of actuation
between three valves). Other peristaltic patterns are equally
possible, including 60.degree. and 90.degree. patterns.
[0223] In experiments performed by the inventors, a pumping rate of
2.35 nL/s was measured by measuring the distance traveled by a
column of water in thin (0.5 mm i.d.) tubing; with
100.times.100.times.10 .mu.m valves under an actuation pressure of
40 kPa. The pumping rate increased with actuation frequency until
approximately 75 Hz, and then was nearly constant until above 200
Hz. The valves and pumps are also quite durable and the elastomer
membrane, control channels, or bond have never been observed to
fail. In experiments performed by the inventors, none of the valves
in the peristaltic pump described herein show any sign of wear or
fatigue after more than 4 million actuations. In addition to their
durability, they are also gentle. A solution of E. coli pumped
through a channel and tested for viability showed a 94% survival
rate.
[0224] FIG. 25 is a graph showing experimentally achieved pumping
rates vs. frequency for the peristaltic pumping system of FIG.
24.
[0225] FIGS. 26A and 26B illustrates another way of assembling a
plurality of the addressable valves of FIG. 21. Specifically, a
plurality of parallel flow channels 30A, 30B, and 30C are provided.
Flow channel (i.e.: control line) 32 passes thereover across flow
channels 30A, 30B, and 30C. Pressurization of control line 32
simultaneously shuts off flows F1, F2 and F3 by depressing
membranes 25A, 25B, and 25C located at the intersections of control
line 32 and flow channels 30A, 30B, and 30C.
[0226] FIG. 27 is a schematic illustration of a multiplexing system
adapted to selectively permit fluid to flow through selected
channels, as follows. The downward deflection of membranes
separating the respective flow channels from a control line passing
thereabove (for example, membranes 25A, 25B, and 25C in FIGS. 26A
and 26B) depends strongly upon the membrane dimensions.
Accordingly, by varying the widths of flow channel control line 32
in FIGS. 26A and 26B, it is possible to have a control line pass
over multiple flow channels, yet only actuate (i.e.: seal) desired
flow channels. FIG. 27 illustrates a schematic of such a system, as
follows.
[0227] A plurality of parallel flow channels 30A, 30B, 30C, 30D,
30E and 30F are positioned under a plurality of parallel control
lines 32A, 32B, 32C, 32D, 32E and 32F. Control channels 32A, 32B,
32C, 32D, 32E and 32F are adapted to shut off fluid flows F1, F2,
F3, F4, F5 and F6 passing through parallel flow channels 30A, 30B,
30C, 30D, 30E and 30F using any of the valving systems described
above, with the following modification.
[0228] Each of control lines 32A, 32B, 32C, 32D, 32E and 32F have
both wide and narrow portions. For example, control line 32A is
wide in locations disposed over flow channels 30A, 30C and 30E.
Similarly, control line 32B is wide in locations disposed over flow
channels 30B, 30D and 30F, and control line 32C is wide in
locations disposed over flow channels 30A, 30B, 30E and 30F.
[0229] At the locations where the respective control line is wide,
its pressurization will cause the membrane (25) separating the flow
channel and the control line to depress significantly into the flow
channel, thereby blocking the flow passage therethrough.
Conversely, in the locations where the respective control line is
narrow, membrane (25) will also be narrow. Accordingly, the same
degree of pressurization will not result in membrane (25) becoming
depressed into the flow channel (30). Therefore, fluid passage
thereunder will not be blocked.
[0230] For example, when control line 32A is pressurized, it will
block flows F1, F3 and F5 in flow channels 30A, 30C and 30E.
Similarly, when control line 32C is pressurized, it will block
flows F1, F2, F5 and F6 in flow channels 30A, 30B, 30E and 30F. As
can be appreciated, more than one control line can be actuated at
the same time. For example, control lines 32A and 32C can be
pressurized simultaneously to block all fluid flow except F4 (with
32A blocking F1, F3 and F5; and 32C blocking F1, F2, F5 and
F6).
[0231] By selectively pressurizing different control lines (32)
both together and in various sequences, a great degree of fluid
flow control can be achieved. Moreover, by extending the present
system to more than six parallel flow channels (30) and more than
four parallel control lines (32), and by varying the positioning of
the wide and narrow regions of the control lines, very complex
fluid flow control systems may be fabricated. A property of such
systems is that it is possible to turn on any one flow channel out
of n flow channels with only 2(log.sub.2n) control lines.
[0232] The inventors have succeeded in fabricating microfluidic
structures with densities of 30 devices/mm.sup.2, but greater
densities are achievable.
Selectively Addressable Reaction Chambers Along Flow Lines:
[0233] In a further embodiment of the invention, illustrated in
FIGS. 28A, 28B, 28C and 28D, a system for selectively directing
fluid flow into one more of a plurality of reaction chambers
disposed along a flow line is provided.
[0234] FIG. 28A shows a top view of a flow channel 30 having a
plurality of reaction chambers 80A and 80B disposed therealong.
Preferably flow channel 30 and reaction chambers 80A and 80B are
formed together as recesses into the bottom surface of a first
layer 100 of elastomer.
[0235] FIG. 28B shows a bottom plan view of another elastomeric
layer 110 with two control lines 32A and 32B each being generally
narrow, but having wide extending portions 33A and 33B formed as
recesses therein.
[0236] As seen in the exploded view of FIG. 28C, and assembled view
of FIG. 28D, elastomeric layer 110 is placed over elastomeric layer
100. Layers 100 and 110 are then bonded together, and the
integrated system operates to selectively direct fluid flow F
(through flow channel 30) into either or both of reaction chambers
80A and 80B, as follows. Pressurization of control line 32A will
cause the membrane 25 (i.e., the thin portion of elastomer layer
100 located below extending portion 33A and over regions 82A of
reaction chamber 80A) to become depressed, thereby shutting off
fluid flow passage in regions 82A, effectively sealing reaction
chamber 80 from flow channel 30. As can also be seen, extending
portion 33A is wider than the remainder of control line 32A. As
such, pressurization of control line 32A will not result in control
line 32A sealing flow channel 30.
[0237] As can be appreciated, either or both of control lines 32A
and 32B can be actuated at once. When both control lines 32A and
32B are pressurized together, sample flow in flow channel 30 will
enter neither of reaction chambers 80A or 80B.
[0238] The concept of selectably controlling fluid introduction
into various addressable reaction chambers disposed along a flow
line (FIG. 28) can be combined with concept of selectably
controlling fluid flow through one or more of a plurality of
parallel flow lines (FIG. 27) to yield a system in which a fluid
sample or samples can be can be sent to any particular reaction
chamber in an array of reaction chambers. An example of such a
system is provided in FIG. 29, in which parallel control channels
32A, 32B and 32C with extending portions 34 (all shown in phantom)
selectively direct fluid flows F1 and F2 into any of the array of
reaction wells 80A, 80B, 80C or 80D as explained above; while
pressurization of control lines 32C and 32D selectively shuts off
flows F2 and F1, respectively.
[0239] In yet another novel embodiment, fluid passage between
parallel flow channels is possible. Referring to FIG. 30, either or
both of control lines 32A or 32D can be depressurized such that
fluid flow through lateral passageways 35 (between parallel flow
channels 30A and 30B) is permitted. In this aspect of the
invention, pressurization of control lines 32C and 32D would shut
flow channel 30A between 35A and 35B, and would also shut lateral
passageways 35B. As such, flow entering as flow F1 would
sequentially travel through 30A, 35A and leave 30B as flow F4.
Switchable Flow Arrays
[0240] In yet another novel embodiment, fluid passage can be
selectively directed to flow in either of two perpendicular
directions. An example of such a "switchable flow array" system is
provided in FIGS. 31A to 31D. FIG. 31A shows a bottom view of a
first layer of elastomer 90, (or any other suitable substrate),
having a bottom surface with a pattern of recesses forming a flow
channel grid defined by an array of solid posts 92, each having
flow channels passing therearound.
[0241] In preferred aspects, an additional layer of elastomer is
bound to the top surface of layer 90 such that fluid flow can be
selectively directed to move either in direction F1, or
perpendicular direction F2. FIG. 31 is a bottom view of the bottom
surface of the second layer of elastomer 95 showing recesses formed
in the shape of alternating "vertical" control lines 96 and
"horizontal" control lines 94. "Vertical" control lines 96 have the
same width therealong, whereas "horizontal" control lines 94 have
alternating wide and narrow portions, as shown.
[0242] Elastomeric layer 95 is positioned over top of elastomeric
layer 90 such that "vertical" control lines 96 are positioned over
posts 92 as shown in FIG. 31C and "horizontal" control lines 94 are
positioned with their wide portions between posts 92, as shown in
FIG. 31D.
[0243] As can be seen in FIG. 31C, when "vertical" control lines 96
are pressurized, the membrane of the integrated structure formed by
the elastomeric layer initially positioned between layers 90 and 95
in regions 98 will be deflected downwardly over the array of flow
channels such that flow in only able to pass in flow direction F2
(i.e.: vertically), as shown.
[0244] As can be seen in FIG. 31D, when "horizontal" control lines
94 are pressurized, the membrane of the integrated structure formed
by the elastomeric layer initially positioned between layers 90 and
95 in regions 99 will be deflected downwardly over the array of
flow channels, (but only in the regions where they are widest),
such that flow in only able to pass in flow direction F1 (i.e.:
horizontally), as shown.
[0245] The design illustrated in FIG. 31 allows a switchable flow
array to be constructed from only two elastomeric layers, with no
vertical vias passing between control lines in different
elastomeric layers required. If all vertical flow control lines 94
are connected, they may be pressurized from one input. The same is
true for all horizontal flow control lines 96.
Biopolymer Synthesis
[0246] The present elastomeric valving structures can also be used
in biopolymer synthesis, for example, in synthesizing
oligonucleotides, proteins, peptides, DNA, etc. In a preferred
aspect, such biopolymer synthesis systems may comprise an
integrated system comprising an array of reservoirs, fluidic logic
(according to the present invention) for selecting flow from a
particular reservoir, an array of channels or reservoirs in which
synthesis is performed, and fluidic logic (also according to the
present invention) for determining into which channels the selected
reagent flows. An example of such a system 200 is illustrated in
FIG. 32, as follows.
[0247] Four reservoirs 150A, 150B, 150C and 150D have bases A, C, T
and G respectively disposed therein, as shown. Four flow channels
30A, 30B, 30C and 30D are connected to reservoirs 150A, 150B, 150C
and 150D. Four control lines 32A, 32B, 32C and 32D (shown
in--phantom) are disposed thereacross with control line 32A
permitting flow only through flow channel 30A (i.e.: sealing flow
channels 30B, 30C and 30D), when control line 32A is pressurized.
Similarly, control line 32B permits flow only through flow channel
30B when pressurized. As such, the selective pressurization of
control lines 32A, 32B, 32C and 32D sequentially selects a desired
base A, C, T and G from a desired reservoir 150A, 150B, 150C or
150D. The fluid then passes through flow channel 120 into a
multiplexed channel flow controller 125, (including, for example,
any system as shown in FIGS. 26A to 31D) which in turn directs
fluid flow into one or more of a plurality of synthesis channels or
chambers 122A, 122B, 122C, 122D or 122E in which solid phase
synthesis may be carried out.
[0248] FIG. 33 shows a further extension of this system on which a
plurality of reservoirs R1 to R13 (which may contain bases A, T, C
and G, or any other reactants, such as would be used in
combinatorial chemistry), are connected to systems 200 as set forth
in FIG. 32. Systems 200 are connected to a multiplexed channel flow
controller 125, (including, for example, any system as shown in
FIGS. 26A to 31D) which is in turn connected to a switchable flow
array (for example as shown in FIG. 31). An advantage of this
system is that both of multiplexed channel flow controllers 125 and
fluid selection systems 200 can be controlled by the same pressure
inputs 170 and 172, provided a "close horizontal" and a "close
vertical" control lines (160 and 162, in phantom) are also
provided.
[0249] In further alternate aspects of the invention, a plurality
of multiplexed channel flow controllers (such as 125)--may be used,
with each flow controller initially positioned stacked above one
another on a different elastomeric layer, with vertical vias or
interconnects between the elastomer layers (which may be created by
lithographically patterning an etch resistant layer on top of a
elastomer layer, then etching the elastomer and finally removing
the etch resist before adding the last layer of elastomer).
[0250] For example, a vertical via in an elastomer layer can be
created by etching a hole down onto a raised line on a
micromachined mold, and bonding the next layer such that a channel
passes over that hole. In this aspect of the invention, multiple
synthesis with a plurality of multiplexed channel flow controllers
125 is possible.
[0251] The bonding of successive layers of molded elastomer to form
a multi-layer structure is shown in FIG. 34, which is an optical
micrograph of a section of a test structure composed of seven
layers of elastomer. The scale bar of FIG. 34 is 200 .mu.m.
[0252] One method for fabricating an elastomer layer having the
vertical via feature utilized in a multi-layer structure is shown
in FIGS. 35A-35D. FIG. 35A shows formation of elastomer layer 3500
over micromachined mold 3502 including raised line 3502a.
[0253] FIG. 35B shows formation of metal etch blocking layer 3504
over elastomer layer 3500, followed by the patterning of
photoresist mask 3506 over etch blocking layer 3504 to cover masked
regions 3508 and leave exposed unmasked regions 3510. FIG. 35C
shows the exposure to solvent which removes etch blocking layer
3504 in unmasked regions 3510.
[0254] FIG. 35D shows removal of the patterned photoresist,
followed by subsequent etching of underlying elastomer 3500 in
unmasked regions 3510 to form vertical via 3512. Subsequent
exposure to solvent removes remaining etch blocking layer 3504 in
masked regions 3508 selective to the surrounding elastomer 3500 and
mold 3502. This elastomer layer may then be incorporated into an
elastomer structure by multilayer soft lithography.
[0255] This series of steps can be repeated as necessary to form a
multi-layered structure having the desired number and orientation
of vertical vias between channels of successive elastomer
layers.
[0256] The inventors of the present invention have succeeded in
etching vias through GE [.RTM.] RTV 615 [trade] layers using a
solution of Tetrabutylammonium fluoride in organic solvent. Gold
serves as the etch blocking material, with gold removed selective
to GE[.RTM.] RTV 615 [trade] utilizing a KI/I.sub.2/H.sub.2O
mixture.
[0257] Alternatively, vertical vias between channels in successive
elastomer layers could be formed utilizing a negative mask
technique. In this approach, a negative mask of a metal foil is
patterned, and subsequent formation of an etch blocking layer is
inhibited where the metal foil is present. Once the etch blocking
material is patterned, the negative metal foil mask is removed,
permitting selective etching of the elastomer as described
above.
[0258] In yet another approach, vertical vias could be formed in an
elastomer layer using ablation of elastomer material through
application of radiation from an applied laser beam.
[0259] While the above approach is described in connection with the
synthesis of biopolymers, the invention is not limited to this
application. The present invention could also function in a wide
variety of combinatorial chemical synthesis approaches.
Other Applications:
[0260] Advantageous applications of the present monolithic
microfabricated elastomeric valves and pumps are numerous.
Accordingly, the present invention is not limited to any particular
application or use thereof. In preferred aspects, the following
uses and applications for the present invention are
contemplated.
[0261] 1. Cell/DNA Sorting
[0262] The present microfluidic pumps and valves can also be used
in flow cytometers for cell sorting and DNA sizing. Sorting of
objects based upon size is extremely useful in many technical
fields.
[0263] For example, many assays in biology require determination of
the size of molecular-sized entities. Of particular importance is
the measurement of length distribution of DNA molecules in a
heterogeneous solution. This is commonly done using gel
electrophoresis, in which the molecules are separated by their
differing mobility in a gel matrix in an applied electric field,
and their positions detected by absorption or emission of
radiation. The lengths of the DNA molecules are then inferred from
their mobility.
[0264] While powerful, electrophoretic methods pose disadvantages.
For medium to large DNA molecules, resolution, i.e. the minimum
length difference at which different molecular lengths may be
distinguished, is limited to approximately 10% of the total length.
For extremely large DNA molecules, the conventional sorting
procedure is not workable. Moreover, gel electrophoresis is a
relatively lengthy procedure, and may require on the order of hours
or days to perform.
[0265] The sorting of cellular-sized entities is also an important
task. Conventional flow cell sorters are designed to have a flow
chamber with a nozzle and are based on the principle of
hydrodynamic focusing with sheath flow. Most conventional cell
sorters combine the technology of piezo-electric drop generation
and electrostatic deflection to achieve droplet generation and high
sorting rates. However, this approach offers some important
disadvantages. One disadvantage is that the complexity, size, and
expense of the sorting device requires that it be reusable in order
to be cost-effective. Reuse can in turn lead to problems with
residual materials causing contamination of samples and turbulent
fluid flow.
[0266] Therefore, there is a need in the art for a simple,
inexpensive, and easily fabricated sorting device which relies upon
the mechanical control of fluid flow rather than upon electrical
interactions between the particle and the solute.
[0267] FIG. 36 shows one embodiment of a sorting device in
accordance with the present invention. Sorting device 3600 is
formed from a switching valve structure created from channels
present in an elastomeric block. Specifically, flow channel 3602 is
T-shaped, with stem 3602a of flow channel 3602 in fluid
communication with sample reservoir 3604 containing sortable
entities 3606 of different types denoted by shape (square, circle,
triangle, etc.). Left branch 3602b of flow channel 3602 is in fluid
communication with waste reservoir 3608. Right branch 3602c of flow
channel 3602 is in communication with collection reservoir
3610.
[0268] Control channels 3612a, 3612b, and 3612c overlie and are
separated from stem 3602a of flow channel 3602 by elastomeric
membrane portions 3614a, 3614b, and 3614c respectively. Together,
stem 3602a of flow channel 3602 and control channels 3612a, 3612b,
and 3612c form first peristaltic pump structure 3616 similar to
that described at length above in connection with FIG. 24a.
[0269] Control channel 3612d overlies and is separated from right
branch 3602c of flow channel 3602 by elastomeric membrane portion
3614d. Together, right branch 3602c of flow channel 3602 and
control channels 3612d forms first valve structure 3618a. Control
channel 3612e overlies and is separated from left branch 3602c of
flow channel 3602 by elastomeric membrane portion 3614e. Together,
left branch 3602c of flow channel 3602 and control channel 3612e
forms second valve structure 3618b.
[0270] As shown in FIG. 36, stem 3602a of flow channel 3602 narrows
considerably as it approaches detection widow 3620 adjacent to the
junction of stem 3602a, right branch 3602b, and left branch 3602c.
Detection window 3620 is of sufficient width to allow for uniform
illumination of this region. In one embodiment, the width of the
stem narrows from 100 .mu.m to 5 .mu.m at the detection window. The
width of the stem at the detection window can be precisely formed
using the soft lithography or photoresist encapsulation fabrication
techniques described extensively above, and will be depend upon the
nature and size of the entity to be sorted.
[0271] Operation of sorting device in accordance with one
embodiment of the present invention is as follows.
[0272] The sample is diluted to a level such that only a single
sortable entity would be expected to be present in the detection
window at any time. Peristaltic pump 3616 is activated by flowing a
fluid through control channels 3612a-c as described extensively
above. In addition, second valve structure 3618b is closed by
flowing fluid through control channel 3612e. As a result of the
pumping action of peristaltic pump 3616 and the blocking action of
second valve 3618b, fluid flows from sample reservoir 3604 through
detection window 3620 into waste reservoir 3608. Because of the
narrowing of stem 3604, sortable entities present in sample
reservoir 3604 are carried by this regular fluid flow, one at a
time, through detection window 3620.
[0273] Radiation 3640 from source 3642 is introduced into detection
window 3620. This is possible due to the transmissive property of
the elastomeric material. Absorption or emission of radiation 3640
by sortable entity 3606 is then detected by detector 3644.
[0274] If sortable entity 3606a within detection window 3620 is
intended to be segregated and collected by sorting device 3600,
first valve 3618a is activated and second valve 3618b is
deactivated. This has the effect of drawing sortable entity 3606a
into collection reservoir 3610, and at the same time transferring
second sortable entity 3606b into detection window 3620. If second
sortable entity 3602b is also identified for collection,
peristaltic pump 3616 continues to flow fluid through right branch
3602c of flow channel 3602 into collection reservoir 3610. However,
if second entity 3606b is not to be collected, first valve 3618a
opens and second valve 3618b closes, and first peristaltic pump
3616 resumes pumping liquid through left branch 3602b of flow
channel 3602 into waste reservoir 3608.
[0275] While one specific embodiment of a sorting device and a
method for operation thereof is described in connection with FIG.
36, the present invention is not limited to this embodiment. For
example, fluid need not be flowed through the flow channels using
the peristaltic pump structure, but could instead be flowed under
pressure with the elastomeric valves merely controlling the
directionality of flow. In yet another embodiment, a plurality of
sorting structures could be assembled in series in order to perform
successive sorting operations, with the waste reservoir of FIG. 36
simply replaced by the stem of the next sorting structure.
[0276] Moreover, a high throughput method of sorting could be
employed, wherein a continuous flow of fluid from the sample
reservoir through the window and junction into the waste reservoir
is maintained until an entity intended for collection is detected
in the window. Upon detection of an entity to be collected, the
direction of fluid flow by the pump structure is temporarily
reversed in order to transport the desired particle back through
the junction into the collection reservoir. In this manner, the
sorting device could utilize a higher flow rate, with the ability
to backtrack when a desired entity is detected. Such an alternative
high throughput sorting technique could be used when the entity to
be collected is rare, and the need to backtrack infrequent.
[0277] Sorting in accordance with the present invention would avoid
the disadvantages of sorting utilizing conventional electrokinetic
flow, such as bubble formation, a strong dependence of flow
magnitude and direction on the composition of the solution and
surface chemistry effects, a differential mobility of different
chemical species, and decreased viability of living organisms in
the mobile medium.
[0278] 2. Semiconductor Processing
[0279] Systems for semiconductor gas flow control, (particularly
for epitaxial applications in which small quantities of gases are
accurately metered), are also contemplated by the present
invention. For example, during fabrication of semiconductor devices
solid material is deposited on top of a semiconductor substrate
utilizing chemical vapor deposition (CVD). This is accomplished by
exposing the substrate to a mixture of gas precursor materials,
such that these gases react and the resulting product crystallizes
on top of the substrate.
[0280] During such CVD processes, conditions must be carefully
controlled to ensure uniform deposition of material free of defects
that could degrade the operation of the electrical device. One
possible source of nonuniformity is variation in the flow rate of
reactant gases to the region over the substrate. Poor control of
the gas flow rate can also lead to variations in the layer
thicknesses from run to run, which is another source of error.
Unfortunately, there has been a significant problem in controlling
the amount of gas flowed into the processing chamber, and
maintaining stable flow rates in conventional gas delivery
systems.
[0281] Accordingly, FIG. 37A shows one embodiment of the present
invention adapted to convey, at precisely-controllable flow rates,
processing gas over the surface of a semiconductor wafer during a
CVD process. Specifically, semiconductor wafer 3700 is positioned
upon wafer support 3702 located within a CVD chamber. Elastomeric
structure 3704 containing a large number of evenly distributed
orifices 3706 is positioned just above the surface of wafer
3700.
[0282] A variety of process gases are flowed at carefully
controlled rates from reservoirs 3708a and 3708b, through flow
channels in elastomeric block 3704, and out of orifices 3706. As a
result of the precisely controlled flow of process gases above
wafer 3700, solid material 3710 having an extremely uniform
structure is deposited.
[0283] Precise metering of reactant gas flow rates utilizing valve
and/or pump structures of the present invention is possible for
several reasons. First, gases can be flowed through valves that
respond in a linear fashion to an applied actuation pressure, as is
discussed above in connection with FIGS. 21A and 21B. Alternatively
or in addition to metering of gas flow using valves, the
predictable behavior of pump structures in accordance with the
present invention can be used to precisely meter process gas
flow.
[0284] In addition to the chemical vapor deposition processes
described above, the present technique is also useful to control
gas flow in techniques such as molecular beam epitaxy and reactive
ion etching.
[0285] 3. Micro Mirror Arrays
[0286] While the embodiments of the present invention described
thus far relate to operation of a structure composed entirely of
elastomeric material, the present invention is not limited to this
type of structure. Specifically, it is within the scope of the
present invention to combine an elastomeric structure with a
conventional, silicon-based semiconductor structure.
[0287] For example, further contemplated uses of the present
microfabricated pumps and valves are in optical displays in which
the membrane in an elastomeric structure reflects light either as a
flat planar or as a curved surface depending upon whether the
membrane is activated. As such, the membrane acts as a switchable
pixel. An array of such switchable pixels, with appropriate control
circuitry, could be employed as a digital or analog micro mirror
array.
[0288] Accordingly, FIG. 38 shows an exploded view of a portion of
one embodiment of a micro mirror array in accordance with the
present invention.
[0289] Micro mirror array 3800 includes first elastomer layer 3802
overlying and separated from and underlying semiconductor structure
3804 by second elastomer layer 3806. Surface 3804a of semiconductor
structure 3804 bears a plurality of electrodes 3810. Electrodes
3810 are individually addressable through conducting row and column
lines, as would be known to one of ordinary skill in the art.
[0290] First elastomeric layer 3802 includes a plurality of
intersecting channels 3822 underlying an electrically conducting,
reflecting elastomeric membrane portion 3802a. First elastomeric
layer 3802 is aligned over second elastomeric layer 3806 and
underlying semiconductor device 3804 such that points of
intersection of channels 3822 overlie electrodes 3810.
[0291] In one embodiment of a method of fabrication in accordance
with the present invention, first elastomeric layer 3822 may be
formed by spincoating elastomeric material onto a mold featuring
intersecting channels, curing the elastomer, removing the shaped
elastomer from the mold, and introducing electrically conducting
dopant into surface region of the shaped elastomer. Alternatively
as described in connection with FIGS. 7C-7G above, first
elastomeric layer 3822 may be formed from two layers of elastomer
by inserting elastomeric material into a mold containing
intersecting channels such that the elastomeric material is flush
with the height of the channel walls, and then bonding a separate
doped elastomer layer to the existing elastomeric material to form
a membrane on the top surface.
[0292] Alternatively, the first elastomeric layer 3802 may be
produced from electrically conductive elastomer, where the
electrical conductivity is due either to doping or to the intrinsic
properties of the elastomer material.
[0293] During operation of reflecting structure 3800, electrical
signals are communicated along a selected row line and column line
to electrode 3810a. Application of voltage to electrode 3810a
generates an attractive force between electrode 3810a and overlying
membrane 3802a. This attractive force actuates a portion of
membrane 3802a, causing this membrane portion to flex downward into
the cavity resulting from intersection of the channels 3822. As a
result of distortion of membrane 3802a from planar to concave,
light is reflected differently at this point in the surface of
elastomer structure 3802 than from the surrounding planar membrane
surface. A pixel image is thereby created.
[0294] The appearance of this pixel image is variable, and may be
controlled by altering the magnitude of voltage applied to the
electrode. A higher voltage applied to the electrode will increase
the attractive force on the membrane portion, causing further
distortion in its shape. A lower voltage applied to the electrode
will decrease the attractive force on the membrane, reducing
distortion in its shape from the planar. Either of these changes
will affect the appearance of the resulting pixel image.
[0295] A variable micro mirror array structure as described could
be used in a variety of applications, including the display of
images. Another application for a variable micro mirror array
structure in accordance with an embodiment of the present invention
would be as a high capacity switch for a fiber optics
communications system, with each pixel capable of affecting the
reflection and transfer of a component of an incident light
signal.
[0296] While the above embodiment describes a composite,
elastomer/semiconductor structure that is utilized as a micromirror
array, the present invention is not limited to this particular
embodiment.
[0297] 4. Refracting Structures
[0298] The micro-mirror array structure just described controls
reflection of incident light. However, the present invention is not
limited to controlling reflection. Yet another embodiment of the
present invention enables the exercise of precise control over
refraction of incident light in order to create lens and filter
structures.
[0299] FIG. 39 shows one embodiment of a refractive structure in
accordance with the present invention. Refractive structure 3900
includes first elastomeric layer 3902 and second elastomeric layer
3904 composed of elastomeric material capable of transmitting
incident light 3906.
[0300] First elastomeric layer 3902 has convex portion 3902a which
may be created by curing elastomeric material formed over a
micromachined mold having a concave portion. Second elastomeric
layer 3904 has a flow channel 3905 and may be created from a
micromachined mold having a raised line as discussed extensively
above.
[0301] First elastomer layer 3902 is bonded to second elastomer
layer 3904 such that convex portion 3902a is positioned above flow
channel 3905. This structure can serve a variety of purposes.
[0302] For example, light incident to elastomeric structure 3900
would be focused into the underlying flow channel, allowing the
possible conduction of light through the flow channel.
Alternatively, in one embodiment of an elastomeric device in
accordance with the present invention, fluorescent or
phosphorescent liquid could be flowed through the flow channel,
with the resulting light from the fluid refracted by the curved
surface to form a display.
[0303] FIG. 40 shows another embodiment of a refractive structure
in accordance with the present invention. Refractive structure 4000
is a multilayer optical train based upon a Fresnel lens design.
Specifically, refractive structure 4000 is composed of four
successive elastomer layers 4002, 4004, 4006, and 4008, bonded
together. The upper surfaces of each of first, second, and third
elastomer layers 4002, 4004, and 4006 bear uniform serrations 4010
regularly spaced by a distance X that is much larger than the
wavelength of the incident light. Serrations 4010 serve to focus
the incident light, and may be formed through use of a
micromachined mold as described extensively above. First, second,
and third elastomer layers 4002, 4004, and 4006 function as Fresnel
lenses as would be understood of one of ordinary skill in the
art.
[0304] Fourth elastomeric layer 4008 bears uniform serrations 4012
having a much smaller size than the serrations of the overlying
elastomeric layers. Serrations 4012 are also spaced apart by a much
smaller distance Y than the serrations of the overlying elastomeric
layers, with Y on the order of the wavelength of incident light.
such that elastomeric layer 4008 functions as a diffraction
grating.
[0305] FIG. 41 illustrates an embodiment of a refractive structure
in accordance with the present invention which utilizes difference
in material refractive index to primarily accomplish diffraction.
Refractive structure 4100 includes lower elastomeric portion 4102
covered by upper elastomeric portion 4104. Both lower elastomeric
portion 4102 and upper elastomeric portion 4104 are composed of
material transmitting incident light 4106. Lower elastomeric
portion 4102 includes a plurality of serpentine flow channels 4108
separated by elastomeric lands 4110. Flow channels 4108 include
fluid 4112 having a different refractive index than the elastomeric
material making up lands 4110. Fluid 4112 is pumped through
serpentine flow channels 4108 by the operation of pump structure
4114 made up of parallel control channels 4116a and 4116b overlying
and separated from inlet portion 4108a of flow channel 4108 by
moveable membrane 4118.
[0306] Light 4106 incident to refractive structure 4100 encounters
a series of uniformly-spaced fluid-filled flow channels 4108
separated by elastomeric lands 4110. As a result of the differing
optical properties of material present in these respective
fluid/elastomer regions, portions of the incident light are not
uniformly refracted and interact to form an interference pattern. A
stack of refractive structures of the manner just described can
accomplish even more complex and specialized refraction of incident
light.
[0307] The refractive elastomeric structures just described can
fulfill a variety of purposes. For example, the elastomeric
structure could act as a filter or optical switch to block selected
wavelengths of incident light. Moreover, the refractive properties
of the structure could be readily adjusted depending upon the needs
of a particular application.
[0308] For example, the composition (and hence refractive index) of
fluid flowed through the flow channels could be changed to affect
diffraction. Alternatively, or in conjunction with changing the
identity of the fluid flowed, the distance separating adjacent flow
channels can be precisely controlled during fabrication of the
structure in order to generate an optical interference pattern
having the desired characteristics.
[0309] 5. Normally-Closed Valve Structure
[0310] FIGS. 7B and 7H above depict a valve structure in which the
elastomeric membrane is moveable from a first relaxed position to a
second actuated position in which the flow channel is blocked.
However, the present invention is not limited to this particular
valve configuration.
[0311] FIGS. 42A-42J show a variety of views of a normally-closed
valve structure in which the elastomeric membrane is moveable from
a first relaxed position blocking a flow channel, to a second
actuated position in which the flow channel is open, utilizing a
negative control pressure.
[0312] FIG. 42A shows a plan view, and FIG. 42B shows a cross
sectional view along line 42B-42B', of normally-closed valve 4200
in an unactuated state. Flow channel 4202 and control channel 4204
are formed in elastomeric block 4206 overlying substrate 4205. Flow
channel 4202 includes a first portion 4202a and a second portion
4202b separated by separating portion 4208. Control channel 4204
overlies separating portion 4208. As shown in FIG. 42B, in its
relaxed, unactuated position, separating portion 4008 remains
positioned between flow channel portions 4202a and 4202b,
interrupting flow channel 4202.
[0313] FIG. 42C shows a cross-sectional view of valve 4200 wherein
separating portion 4208 is in an actuated position. When the
pressure within control channel 4204 is reduced to below the
pressure in the flow channel (for example by vacuum pump),
separating portion 4208 experiences an actuating force drawing it
into control channel 4204. As a result of this actuation force
membrane 4208 projects into control channel 4204, thereby removing
the obstacle to a flow of material through flow channel 4202 and
creating a passageway 4203. Upon elevation of pressure within
control channel 4204, separating portion 4208 will assume its
natural position, relaxing back into and obstructing flow channel
4202.
[0314] The behavior of the membrane in response to an actuation
force may be changed by varying the width of the overlying control
channel. Accordingly, FIGS. 42D-42H show plan and cross-sectional
views of an alternative embodiment of a normally-closed valve 4201
in which control channel 4207 is substantially wider than
separating portion 4208. As shown in cross-sectional views FIG.
42E-F along line 42E-42E' of FIG. 42D, because a larger area of
elastomeric material is required to be moved during actuation, the
actuation force necessary to be applied is reduced.
[0315] FIGS. 42G and H show a cross-sectional views along line
40G-40G' of FIG. 40D. In comparison with the unactuated valve
configuration shown in FIG. 42G, FIG. 42H shows that reduced
pressure within wider control channel 4207 may under certain
circumstances have the unwanted effect of pulling underlying
elastomer 4206 away from substrate 4205, thereby creating
undesirable void 4212.
[0316] Accordingly, FIG. 42I shows a plan view, and 42J a
cross-sectional view along line 42J-42J' of FIG. 42I, of valve
structure 4220 which avoids this problem by featuring control line
4204 with a minimum width except in segment 4204a overlapping
separating portion 4208. As shown in FIG. 42J, even under actuated
conditions the narrower cross-section of control channel 4204
reduces the attractive force on the underlying elastomer material
4206, thereby preventing this elastomer material from being drawn
away from substrate 4205 and creating an undesirable void.
[0317] While a normally-closed valve structure actuated in response
to pressure is shown in FIGS. 42A-42J, a normally-closed valve in
accordance with the present invention is not limited to this
configuration. For example, the separating portion obstructing the
flow channel could alternatively be manipulated by electric or
magnetic fields, as described extensively above.
[0318] 6. Separation of Materials
[0319] In a further application of the present invention, an
elastomeric structure can be utilized to perform separation of
materials. FIG. 43 shows one embodiment of such a device.
[0320] Separation device 4300 features an elastomeric block 4301
including fluid reservoir 4302 in communication with flow channel
4304. Fluid is pumped from fluid reservoir 4306 through flow
channel 4308 by peristaltic pump structure 4310 formed by control
channels 4312 overlying flow channel 4304, as has been previously
described at length. Alternatively, where a peristaltic pump
structure in accordance with the present invention is unable to
provide sufficient back pressure, fluid from a reservoir positioned
outside the elastomeric structure may be pumped into the
elastomeric device utilizing an external pump.
[0321] Flow channel 4304 leads to separation column 4314 in the
form of a channel packed with separation matrix 4316 behind porous
frit 4318. As is well known in the art of chromatography, the
composition of the separation matrix 4316 depends upon the nature
of the materials to be separated and the particular chromatography
technique employed. The elastomeric separation structure is
suitable for use with a variety of chromatographic techniques,
including but not limited to gel exclusion, gel permeation, ion
exchange, reverse phase, hydrophobic interaction, affinity
chromatography, fast protein liquid chromatography (FPLC) and all
formats of high pressure liquid chromatography (HPLC). The high
pressures utilized for HPLC may require the use of urethane,
dicyclopentadiene or other elastomer combinations.
[0322] Samples are introduced into the flow of fluid into
separation column 4314 utilizing load channel 4319. Load channel
4319 receives fluid pumped from sample reservoir 4320 through pump
4321. Upon opening of valve 4322 and operation of pump 4321, sample
is flowed from load channel 4319 into flow channel 4304. The sample
is then flowed through separation column 4314 by the action of pump
structure 4312. As a result of differential mobility of the various
sample components in separation matrix 4316, these sample
components become separated and are eluted from column 4314 at
different times.
[0323] Upon elution from separation column 4314, the various sample
components pass into detection region 4324. As is well known in the
art of chromatography, the identity of materials eluted into
detection region 4324 can be determined utilizing a variety of
techniques, including but not limited to fluorescence,
UV/visible/IR spectroscopy, radioactive labeling, amperometric
detection, mass spectroscopy, and nuclear magnetic resonance
(NMR).
[0324] A separation device in accordance with the present invention
offers the advantage of extremely small size, such that only small
volumes of fluid and sample are consumed during the separation. In
addition, the device offers the advantage of increased sensitivity.
In conventional separation devices, the size of the sample loop
will prolong the injection of the sample onto the column, causing
width of the eluted peaks to potentially overlap with one another.
The extremely small size and capacity of the load channel in
general prevents this peak diffusion behavior from becoming a
problem.
[0325] The separation structure shown in FIG. 43 represents only
one embodiment of such a device, and other structures are
contemplated by the present invention. For example, while the
separation device of FIG. 43 features a flow channel, load loop,
and separation column oriented in a single plane, this is not
required by the present invention. One or more of the fluid
reservoir, the sample reservoir, the flow channel, the load loop,
and the separation column could be oriented perpendicular to one
another and/or to the plane of the elastomeric material utilizing
via structures whose formation is described at length above in
connection with FIG. 35A-D.
[0326] 7. Cell Pen/Cell Cage/Cell Grinder
[0327] In yet a further application of the present invention, an
elastomeric structure can be utilized to manipulate organisms or
other biological material. FIGS. 44A-44D show plan views of one
embodiment of a cell pen structure in accordance with the present
invention.
[0328] Cell pen array 4400 features an array of
orthogonally-oriented flow channels 4402, with an enlarged "pen"
structure 4404 at the intersection of alternating flow channels.
Valve 4406 is positioned at the entrance and exit of each pen
structure 4404. Peristaltic pump structures 4408 are positioned on
each horizontal flow channel and on the vertical flow channels
lacking a cell pen structure.
[0329] Cell pen array 4400 of FIG. 44A has been loaded with cells
A-H that have been previously sorted, perhaps by a sorting
structure as described above in conjunction with FIG. 36. FIGS.
44B-44C show the accessing and removal of individually stored cell
C by 1) opening valves 4406 on either side of adjacent pens 4404a
and 4404b, 2) pumping horizontal flow channel 4402a to displace
cells C and G, and then 3) pumping vertical flow channel 4402b to
remove cell C. FIG. 44D shows that second cell G is moved back into
its prior position in cell pen array 4400 by reversing the
direction of liquid flow through horizontal flow channel 4402a.
[0330] The cell pen array 4404 described above is capable of
storing materials within a selected, addressable position for ready
access. However, living organisms such as cells may require a
continuous intake of foods and expulsion of wastes in order to
remain viable. Accordingly, FIGS. 45A and 45B show plan and
cross-sectional views (along line 45B-45B') respectively, of one
embodiment of a cell cage structure in accordance with the present
invention.
[0331] Cell cage 4500 is formed as an enlarged portion 4500a of a
flow channel 4501 in an elastomeric block 4503 in contact with
substrate 4505. Cell cage 4500 is similar to an individual cell pen
as described above in FIGS. 44A-44D, except that ends 4500b and
4500c of cell cage 4500 do not completely enclose interior region
4500a. Rather, ends 4500a and 4500b of cage 4500 are formed by a
plurality of retractable pillars 4502. Pillars 4502 may be part of
a membrane structure of a normally-closed valve structure as
described extensively above in connection with FIGS. 42A-42J.
[0332] Specifically, control channel 4504 overlies pillars 4502.
When the pressure in control channel 4504 is reduced, elastomeric
pillars 4502 are drawn upward into control channel 4504, thereby
opening end 4500b of cell cage 4500 and permitting a cell to enter.
Upon elevation of pressure in control channel 4504, pillars 4502
relax downward against substrate 4505 and prevent a cell from
exiting cage 4500.
[0333] Elastomeric pillars 4502 are of a sufficient size and number
to prevent movement of a cell out of cage 4500, but also include
gaps 4508 which allow the flow of nutrients into cage interior
4500a in order to sustain cell(s) stored therein. Pillars 4502 on
opposite end 4500c are similarly configured beneath second control
channel 4506 to permit opening of the cage and removal of the cell
as desired.
[0334] Under certain circumstances, it may be desirable to
grind/disrupt cells or other biological materials in order to
access component pieces.
[0335] Accordingly, FIGS. 46A and 46B show plan and cross sectional
views (along line 46B-46B') respectively, of one embodiment of cell
grinder structure 4600 in accordance with the present invention.
Cell grinder 4600 includes a system of interdigitated posts 4602
within flow channel 4604 which close together upon actuation of
integral membrane 4606 by overlying control channel 4608. By
closing together, posts 4602 crush material present between
them.
[0336] Posts 4602 may be spaced at intervals appropriate to disrupt
entities (cells) of a given size. For disruption of cellular
material, spacing of posts 4602 at an interval of about 2 .mu.m is
appropriate. In alternative embodiments of a cell grinding
structure in accordance with the present invention, posts 4602 may
be located entirely on the above-lying membrane, or entirely on the
floor of the control channel.
[0337] 8. Pressure Oscillator
[0338] In yet a further application of the present invention, an
elastomeric structure can be utilized to create a pressure
oscillator structure analogous to oscillator circuits frequently
employed in the field of electronics. FIG. 47 shows a plan view of
one embodiment of such a pressure oscillator structure.
[0339] Pressure oscillator 4700 comprises an elastomeric block 4702
featuring flow channel 4704 formed therein. Flow channel 4704
includes an initial portion 4704a proximate to pressure source
4706, and a serpentine portion 4704b distal from pressure source
4706. Initial portion 4704a is in contact with via 4708 in fluid
communication with control channel 4710 formed in elastomeric block
4702 above the level of flow channel 4704. At a location more
distal from pressure source 4706 than via 4708, control channel
4710 overlies and is separated from flow channel 4704 by an
elastomeric membrane, thereby forming valve 4712 as previously
described.
[0340] Pressure oscillator structure 4700 operates as follows.
Initially, pressure source 4706 provides pressure along flow
channel 4704 and control channel 4710 through via 4708. Because of
the serpentine shape of flow channel 4704b, pressure is lower in
region 4704b as compared with flow channel 4710. At valve 4712, the
pressure difference between serpentine flow channel portion 4704b
and overlying control channel 4710 eventually causes the membrane
of valve 4712 to project downward into serpentine flow channel
portion 4704b, closing valve 4712. Owing to the continued operation
of pressure source 4706 however, pressure begins to build up in
serpentine flow channel portion 4704b behind closed valve 4712.
Eventually the pressure equalizes between control channel 4710 and
serpentine flow channel portion 4704b, and valve 4712 opens.
[0341] Given the continuous operation of the pressure source, the
above-described build up and release of pressure will continue
indefinitely, resulting in a regular oscillation of pressure. Such
a pressure oscillation device may perform any number of possible
functions, including but not limited to timing.
[0342] 9. Side-Actuated Valve
[0343] While the above description has focused upon microfabricated
elastomeric valve structures in which a control channel is
positioned above and separated by an intervening elastomeric
membrane from an underlying flow channel, the present invention is
not limited to this configuration. FIGS. 48A and 48B show plan
views of one embodiment of a side-actuated valve structure in
accordance with one embodiment of the present invention.
[0344] FIG. 48A shows side-actuated valve structure 4800 in an
unactuated position. Flow channel 4802 is formed in elastomeric
layer 4804. Control channel 4806 abutting flow channel 4802 is also
formed in elastomeric layer 4804. Control channel 4806 is separated
from flow channel 4802 by elastomeric membrane portion 4808. A
second elastomeric layer (not shown) is bonded over bottom
elastomeric layer 4804 to enclose flow channel 4802 and control
channel 4806.
[0345] FIG. 48B shows side-actuated valve structure 4800 in an
actuated position. In response to a build up of pressure within
control channel 4806, membrane 4808 deforms into flow channel 4802,
blocking flow channel 4802. Upon release of pressure within control
channel 4806, membrane 4808 would relax back into control channel
4806 and open flow channel 4802.
[0346] While a side-actuated valve structure actuated in response
to pressure is shown in FIGS. 48A and 48B, a side-actuated valve in
accordance with the present invention is not limited to this
configuration. For example, the elastomeric membrane portion
located between the abutting flow and control channels could
alternatively be manipulated by electric or magnetic fields, as
described extensively above.
[0347] 10. Additional Applications
[0348] The following represent further aspects of the present
invention: present valves and pumps can be used for drug delivery
(for example, in an implantable drug delivery device); and for
sampling of biological fluids (for example, by storing samples
sequentially in a column with plugs of spacer fluid therebetween,
wherein the samples can be shunted into different storage
reservoirs, or passed directly to appropriate sensor(s). Such a
fluid sampling device could also be implanted in the patient's
body.
[0349] The present systems can also be used for devices which
relieve over-pressure in vivo using a micro-valve or pump. For
example, an implantable bio-compatible micro-valve can be used to
relieve over-pressures in the eye which result from glaucoma. Other
contemplated uses of the present switchable micro-valves include
implantation in the spermatic duct or fallopian tube allowing
reversible long-term or short-term birth control without the use of
drugs.
[0350] Further uses of the present invention include DNA sequencing
whereby the DNA to be sequenced is provided with a polymerase and a
primer, and is then exposed to one type of DNA base (A, C, T, or G)
at a time in order to rapidly assay for base incorporation. In such
a system, the bases must be flowed into the system and excess bases
washed away rapidly. Pressure driven flow, gated by elastomeric
micro-valves in accordance with the present invention would be
ideally suited to allow for such rapid flow and washing of
reagents.
[0351] Other contemplated uses of the present micro-valve and
micro-pump systems include uses with DNA chips. For example, a
sample can be flowed into a looped channel and pumped around the
loop with a peristaltic action such that the sample can make many
passes over the probes of the DNA array. Such a device would give
the sample that would normally be wasted sitting over the
non-complimentary probes the chance to bind to a complimentary
probe instead. An advantage of such a looped-flow system is that it
would reduce the necessary sample volume, and thereby increase
assay sensitivity.
[0352] Further applications exist in high throughput screening in
which applications could benefit by the dispensing of small volumes
of liquid, or by bead-based assays wherein ultrasensitive detection
would substantially improve assay sensitivity.
[0353] Another contemplated application is the deposition of array
of various chemicals, especially oligonucleotides, which may or may
not have been chemically fabricated in a previous action of the
device before deposition in a pattern or array on a substrate via
contact printing through fluid channel outlets in the elastomeric
device in close proximity to a desired substrate, or by a process
analogous to ink jet printing.
[0354] The present microfabricated elastomeric valves and pumps
could also be used to construct systems for reagent dispensing,
mixing and reaction for synthesis of oligonucleotides, peptides or
other biopolymers.
[0355] Further applications for the present invention include ink
jet printer heads, in which small apertures are used to generate a
pressure pulse sufficient to expel a droplet. An appropriately
actuated micro-valve in accordance with the present invention can
create such a pressure pulse. The present micro-valves and pumps
can also be used to digitally dispense ink or pigment, in amounts
not necessarily as small as single droplets. The droplet would be
brought into contact with the medium being printed on rather than
be required to be fired through the air.
[0356] Yet other uses of the present systems are in fluidic logic
circuits which offer the advantages of being useable in radiation
resistant applications. A further advantage of such fluidic logic
circuits is that, being non-electronic, such fluidic logic
circuitry may not be probed by electro magnetic sensors, thus
offering a security benefit.
[0357] Yet further uses of the present invention would take
advantage of the ready removal and reattachment of the structure
from an underlying substrate such as glass, utilizing a glass
substrate patterned with a binding or other material. This allows
separate construction of a patterned substrate and elastomer
structure. For instance, a glass substrate could be patterned with
a DNA microarray, and an elastomer valve and pump structure sealed
over the array in a subsequent step.
[0358] 11. Additional Aspects of the Invention
[0359] The following represent further aspects of the present
invention: the use of a deflectable membrane to control flow of a
fluid in a microfabricated channel of an elastomeric structure; the
use of elastomeric layers to make a microfabricated elastomeric
device containing a microfabricated movable portion; and the use of
an elastomeric material to make a microfabricated valve or
pump.
[0360] A microfabricated elastomeric structure in accordance with
one embodiment of the present invention comprises an elastomeric
block formed with microfabricated recesses therein, a portion of
the elastomeric block deflectable when the portion is actuated. The
recesses comprise a first microfabricated channel and a first
microfabricated recess, and the portion comprises an elastomeric
membrane deflectable into the first microfabricated channel when
the membrane is actuated. The recesses have a width in the range of
10 .mu.m to 200 .mu.m and the portion has a thickness of between
about 2 .mu.m and 50 .mu.m. The microfabricated elastomeric
structure may be actuated at a speed of 100 Hz or greater and
contains substantially no dead volume when the portion is
actuated.
[0361] A method of actuating an elastomeric structure comprises
providing an elastomeric block formed with first and second
microfabricated recesses therein, the first and second
microfabricated recesses separated by a membrane portion of the
elastomeric block deflectable into one of the first and second
recesses in response to an actuation force, and applying an
actuation force to the membrane portion such that the membrane
portion is deflected into one of the first and the second
recesses.
[0362] A method of microfabricating an elastomeric structure in
accordance with one embodiment of the present invention comprises
forming a first elastomeric layer on a substrate, curing the first
elastomeric layer, and patterning a first sacrificial layer over
the first elastomeric layer. A second elastomeric layer is formed
over the first elastomeric layer, thereby encapsulating the first
patterned sacrificial layer between the first and second
elastomeric layers, the second elastomeric layer is cured, and the
first patterned sacrificial layer is removed selective to the first
elastomeric layer and the second elastomeric layer, thereby forming
at least one first recess between the first and second layers of
elastomer.
[0363] An alternative embodiment of a method of fabricating further
comprises patterning a second sacrificial layer over the substrate
prior to forming the first elastomeric layer, such that the second
patterned sacrificial layer is removed during removal of the first
patterned sacrificial layer to form at least one recess along a
bottom of the first elastomeric layer.
[0364] A microfabricated elastomeric structure in accordance with
one embodiment of the present invention comprises an elastomeric
block, a first channel and a second channel separated by a
separating portion of the elastomeric structure, and a
microfabricated recess in the elastomeric block adjacent to the
separating portion such that the separating portion may be actuated
to deflect into the microfabricated recess. 66. Deflection of the
separating portion opens a passageway between the first and second
channels.
[0365] A method of controlling fluid or gas flow through an
elastomeric structure comprises providing an elastomeric block, the
elastomeric block having first, second, and third microfabricated
recesses, and the elastomeric block having a first microfabricated
channel passing therethrough, the first, second and third
microfabricated recesses separated from the first channel by
respective first, second and third membranes deflectable into the
first channel, and deflecting the first, second and third membranes
into the first channel in a repeating sequence to peristaltically
pump a flow of fluid through the first channel.
[0366] A method of microfabricating an elastomeric structure
comprises microfabricating a first elastomeric layer,
microfabricating a second elastomeric layer; positioning the second
elastomeric layer on top of the first elastomeric layer; and
bonding a bottom surface of the second elastomeric layer onto a top
surface of the first elastomeric layer.
[0367] 12. Alternative Device Fabrication Methods
[0368] FIGS. 1-7A and 8-18 above show embodiments of multilayer
soft lithography and encapsulation methods, respectively, for
fabricating elastomer structures in accordance with the present
invention. However, these fabrication methods are merely exemplary,
and variations on these techniques may be employed to create
elastomer structures.
[0369] For example, FIGS. 3 and 4 show fabrication of an elastomer
structure utilizing multilayer soft lithography techniques, wherein
the recess-bearing face of the upper elastomer layer is placed on
top of the non-recess-bearing face of the lower elastomer layer.
However, the present invention is not limited to this
configuration.
[0370] FIG. 50 shows elastomeric structure 5410 featuring an
alternative orientation of elastomeric layers, wherein
recess-bearing faces 5400 and 5402 of first and second elastomer
layers 5404 and 5406 are respectively placed into contact to create
a larger-sized channel 5408. Alternatively, FIG. 51 shows an
orientation of elastomeric layers wherein non-recess bearing faces
5500 and 5502 are placed into contact, such that recesses are
present on opposite sides of the structure. Such an elastomer
structure 5512 could be sandwiched between substrates 5508 and 5510
to produce channels 5504 and 5506 that cross-over each other.
[0371] FIGS. 52A-52D show various views of steps for constructing a
fluid channel bridging structure utilizing encapsulation methods.
Specifically, FIG. 52A shows a cross-sectional view of the
formation of lower elastomeric portion 5600 of bridging structure
5602. FIG. 52B shows a cross-sectional view of the formation of
upper elastomeric portion 5604 of the bridging structure. FIG. 52C
shows assembly of upper and lower elastomeric portions 5604 and
5600 to form bridging structure 5602, wherein fluid flowing in
channel 5606 bridges over cross-channel 5608 through vias 5610 and
5612 and bridge portion 5614 as shown by the arrows. FIG. 52D shows
a plan view of bridging structure 5602, with bridge portion 5614 of
the upper elastomeric is shown in solid, and the features in the
underlying lower elastomer layer are shown in outline. This
structure requires the formation of vias in the lower layer, but
allows multiple liquid streams to flow in a single layer and cross
over one another without mixing.
[0372] 13. Composite Structures
[0373] As discussed above in conjunction with the micromirror array
structure of FIG. 38, the fabricated elastomeric structures of the
present invention may be combined with nonelastomeric materials to
create composite structures. Fabrication of such composite
structures is now discussed in further detail.
[0374] FIG. 53 shows a cross-sectional view of one embodiment of a
composite structure in accordance with the present invention. FIG.
53 shows composite valve structure 5700 including first, thin
elastomer layer 5702 overlying semiconductor-type substrate 5704
having channel 5706 formed therein. Second, thicker elastomer layer
5708 overlies first elastomer layer 5702. Actuation of first
elastomer layer 5702 to drive it into channel 5706, will cause
composite structure 5700 to operate as a valve.
[0375] FIG. 54 shows a cross-sectional view of a variation on this
theme, wherein thin elastomer layer 5802 is sandwiched between two
hard, semiconductor substrates 5804 and 5806, with lower substrate
5804 featuring channel 5808. Again, actuation of thin elastomer
layer 5802 to drive it into channel 5808 will cause composite
structure 5810 to operate as a valve.
[0376] The structures shown in FIG. 53 or 54 may be fabricated
utilizing either the multilayer soft lithography or encapsulation
techniques described above. In the multilayer soft lithography
method, the elastomer layer(s) would be formed and then placed over
the semiconductor substrate bearing the channel. In the
encapsulation method, the channel would be first formed in the
semiconductor substrate, and then the channel would be filled with
a sacrificial material such as photoresist. The elastomer would
then be formed in place over the substrate, with removal of the
sacrificial material producing the channel overlaid by the
elastomer membrane. As is discussed in detail below in connection
with bonding of elastomer to other types of materials, the
encapsulation approach may result in a stronger seal between the
elastomer membrane component and the underlying nonelastomer
substrate component.
[0377] As shown in FIGS. 53 and 54, a composite structure in
accordance with embodiments of the present invention may include a
hard substrate that bears a passive feature such as a channels.
However, the present invention is not limited to this approach, and
the underlying hard substrate may bear active features that
interact with an elastomer component bearing a recess. This is
shown in FIG. 55, wherein composite structure 5900 includes
elastomer component 5902 containing recess 5904 having walls 5906
and ceiling 5908. Ceiling 5908 forms flexible membrane portion
5909. Elastomer component 5902 is sealed against substantially
planar nonelastomeric component 5910 that includes active device
5912. Active device 5912 may interact with material present in
recess 5904 and/or flexible membrane portion 5909.
[0378] In the micromirror array embodiment previously described in
conjunction with FIG. 38, the underlying substrate contained active
structures in the form of an electrode array. However, many other
types of active structures may be present in the nonelastomer
substrate. Active structures that could be present in an underlying
hard substrate include, but are not limited to, resistors,
capacitors, photodiodes, transistors, chemical field effect
transistors (chem FET's), amperometric/coulometric electrochemical
sensors, fiber optics, fiber optic interconnects, light emitting
diodes, laser diodes, vertical cavity surface emitting lasers
(VCSEL's), micromirrors, accelerometers, pressure sensors, flow
sensors, CMOS imaging arrays, CCD cameras, electronic logic,
microprocessors, thermistors, Peltier coolers, waveguides,
resistive heaters, chemical sensors, strain gauges, inductors,
actuators (including electrostatic, magnetic, electromagnetic,
bimetallic, piezoelectric, shape-memory-alloy based, and others),
coils, magnets, electromagnets, magnetic sensors (such as those
used in hard drives, superconducting quantum interference devices
(SQUIDS) and other types), radio frequency sources and receivers,
microwave frequency sources and receivers, sources and receivers
for other regions of the electromagnetic spectrum, radioactive
particle counters, and electrometers.
[0379] As is well known in the art, a vast variety of technologies
can be utilized to fabricate active features in semiconductor and
other types of hard substrates, including but not limited printed
circuit board (PCB) technology, CMOS, surface micromachining, bulk
micromachining, printable polymer electronics, and TFT and other
amorphous/polycrystalline techniques as are employed to fabricate
laptop and flat screen displays.
[0380] A composite structure in accordance with one embodiment of
the present invention comprises a nonelastomer substrate having a
surface bearing a first recess, a flexible elastomer membrane
overlying the non-elastomer substrate, the membrane able to be
actuated into the first recess, and a layer overlying the flexible
elastomer membrane.
[0381] An embodiment of a method of forming a composite structure
comprises forming a recess in a first nonelastomer substrate,
filling the recess with a sacrificial material, forming a thin coat
of elastomer material over the nonelastomer substrate and the
filled recess, curing the elastomer to form a thin membrane, and
removing the sacrifical material.
[0382] A composite structure in accordance with an alternative
embodiment of the present invention comprises an elastomer
component defining a recess having walls and a ceiling, the ceiling
of the recess forming a flexible membrane portion, and a
substantially planar nonelastomer component sealed against the
elastomer component, the nonelastomer component including an active
device interacting with at least one of the membrane portion and a
material present in the recess.
[0383] A method of fabricating a composite structure comprising
forming a recess in an elastomer component, the recess including
walls and a ceiling, the ceiling forming a flexible membrane
portion, positioning a material within the recess, forming a
substantially planar nonelastomer component including an active
device, and sealing the elastomer component against the
nonelastomer component, such that the active device may interact
with at least one of the membrane portion and the material.
[0384] A variety of approaches can be employed to seal the
elastomeric structure against the nonelastomeric substrate, ranging
from the creation of a Van der Waals bond between the elastomeric
and nonelastomeric components, to creation of covalent or ionic
bonds between the elastomeric and nonelastomeric components of the
composite structure. Example approaches to sealing the components
together are discussed below, approximately in order of increasing
strength.
[0385] A first approach is to rely upon the simple hermetic seal
resulting from Van der Waals bonds formed when a substantially
planar elastomer layer is placed into contact with a substantially
planar layer of a harder, non-elastomer material. In one
embodiment, bonding of RTV elastomer to a glass substrate created a
composite structure capable of withstanding up to about 3-4 psi of
pressure. This may be sufficient for many potential
applications.
[0386] A second approach is to utilize a liquid layer to assist in
bonding. One example of this involves bonding elastomer to a hard
glass substrate, wherein a weakly acidic solution (5 .mu.l HCl in
H.sub.2O, pH 2) was applied to a glass substrate. The elastomer
component was then placed into contact with the glass substrate,
and the composite structure baked at 37.degree. C. to remove the
water. This resulted in a bond between elastomer and non-elastomer
able to withstand a pressure of about 20 psi. In this case, the
acid may neutralize silanol groups present on the glass surface,
permitting the elastomer and non-elastomer to enter into good Van
der Waals contact with each other.
[0387] A third approach is to create a covalent chemical bond
between the elastomer component and functional groups introduced
onto the surface of a nonelastomer component. Examples of
derivitization of a nonelastomer substrate surface to produce such
functional groups include exposing a glass substrate to agents such
as vinyl silane or aminopropyltriethoxy silane (APTES), which may
be useful to allow bonding of the glass to silicone elastomer and
polyurethane elastomer materials, respectively.
[0388] A fourth approach is to create a covalent chemical bond
between the elastomer component and a functional group native to
the surface of the nonelastomer component. For example, RTV
elastomer can be created with an excess of vinyl groups on its
surface. These vinyl groups can be caused to react with
corresponding functional groups present on the exterior of a hard
substrate material, for example the Si--H bonds prevalent on the
surface of a single crystal silicon substrate after removal of
native oxide by etching. In this example, the strength of the bond
created between the elastomer component and the nonelastomer
component has been observed to exceed the materials strength of the
elastomer components.
[0389] While the present invention has been described herein with
reference to particular embodiments thereof, a latitude of
modification, various changes and substitutions are intended in the
foregoing disclosure, and it will be appreciated that in some
instances some features of the invention will be employed without a
corresponding use of other features without departing from the
scope of the invention as set forth. Therefore, many modifications
may be made to adapt a particular situation or material to the
teachings of the invention without departing from the essential
scope and spirit of the present invention. It is intended that the
invention not be limited to the particular embodiment disclosed as
the best mode contemplated for carrying out this invention, but
that the invention will include all embodiments and equivalents
falling within the scope of the claims.
[0390] The following pending patent applications contain subject
matter related to the instant application and are hereby
incorporated by reference: U.S. nonprovisional patent application
Ser. No. 09/______, entitled "Apparatus and Methods for Conducting
Cell Assays and High Throughput Screening" (Atty. docket No.
009195-000200US), filed Nov. 16, 2000; U.S. nonprovisional patent
application Ser. No. 09/______, entitled "Integrated Active Flux
Microfluidic Devices and Methods" (Atty docket no. 0G638-US1),
filed Nov. 16, 2000; and U.S. nonprovisional patent application
Ser. No. 09/______, entitled "Fabrication of Micro and Nano Scale
Devices With Soft Materials" (Atty. docket No. 0H944), filed Nov.
16, 2000.
[0391] "Monolithic Microfabricated Valves and Pumps by Multilayer
Soft Lithography," Unger et al., Science, Vol. 288, pp. 113-116
(Apr. 7, 2000), which is herein incorporated by reference in its
entirety for all purposes.
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