U.S. patent application number 13/774521 was filed with the patent office on 2014-08-28 for thermally-assisted magnetic recording head using near-field light.
This patent application is currently assigned to c/o TDK Corporation. The applicant listed for this patent is C/O TDK CORPORATION. Invention is credited to Ryo HOSOI, Tetsuya ROPPONGI, Kosuke TANAKA, Takeshi TSUTSUMI.
Application Number | 20140241136 13/774521 |
Document ID | / |
Family ID | 51358599 |
Filed Date | 2014-08-28 |
United States Patent
Application |
20140241136 |
Kind Code |
A1 |
TSUTSUMI; Takeshi ; et
al. |
August 28, 2014 |
THERMALLY-ASSISTED MAGNETIC RECORDING HEAD USING NEAR-FIELD
LIGHT
Abstract
A plasmon generator of a thermally-assisted magnetic recording
head has a first configuration member having a near-field light
generation end surface at an ABS, and a second configuration member
being in contact with main magnetic pole, and terminating at a
front end portion of a slope positioned at the position recessed
from the ABS. An end part of a separator layer, which is interposed
between the main magnetic pole and the first configuration member,
on a side opposite to the ABS is at a position more recessed from
the air bearing surface than the front end portion of the slope of
the second configuration member.
Inventors: |
TSUTSUMI; Takeshi; (Tokyo,
JP) ; HOSOI; Ryo; (Tokyo, JP) ; ROPPONGI;
Tetsuya; (Tokyo, JP) ; TANAKA; Kosuke; (Tokyo,
JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
C/O TDK CORPORATION |
Tokyo |
|
JP |
|
|
Assignee: |
c/o TDK Corporation
Tokyo
JP
|
Family ID: |
51358599 |
Appl. No.: |
13/774521 |
Filed: |
February 22, 2013 |
Current U.S.
Class: |
369/13.13 ;
29/603.07 |
Current CPC
Class: |
G11B 5/6088 20130101;
G11B 2005/0021 20130101; G11B 5/3163 20130101; Y10T 29/49032
20150115; G11B 5/314 20130101 |
Class at
Publication: |
369/13.13 ;
29/603.07 |
International
Class: |
G11B 13/08 20060101
G11B013/08 |
Claims
1. A thermally-assisted magnetic recording head that has an air
bearing surface opposing a magnetic recording medium and that
performs magnetic recording while heating the magnetic recording
medium by using near-field light, comprising: a waveguide through
which incident light propagates toward the air bearing surface; a
main magnetic pole of which one end part is positioned at the air
bearing surface; a plasmon generator that is positioned between the
waveguide and the main magnetic pole, that is provided along the
waveguide in a manner opposing the waveguide, and of which one end
part is positioned at the air bearing surface, the plasmon
generator including: a first configuration member that extends to
the air bearing surface; and a second configuration member that is
provided to be in contact with the first configuration member or is
integrally provided with the first configuration member, and that
is in contact with main magnetic pole, the second configuration
member terminating at a position recessed from the air bearing
surface without extending to the air bearing surface, wherein the
first configuration member has a near-field light generation end
surface at the one end part positioned at the air bearing surface,
and the second configuration member terminating at a front end
portion of a slope positioned at the position recessed from the air
bearing surface; and a separator layer that is interposed between
the main magnetic pole and the first configuration member of the
plasmon generator, and that extends from a position recessed from
the air bearing surface to the air bearing surface, an end part of
the separator layer on a side opposite to the air bearing surface
being at a position more recessed from the air bearing surface than
the front end portion of the slope of the second configuration
member.
2. A thermally-assisted magnetic recording head that has an air
bearing surface opposing a magnetic recording medium and performs
magnetic recording while heating the magnetic recording medium by
using near-field light, comprising: a waveguide through which
incident light propagates toward the air bearing surface; a main
magnetic pole of which one end part is positioned at the air
bearing surface; a plasmon generator that is positioned between the
waveguide and the main magnetic pole, that is provided along the
waveguide in a manner opposing the waveguide, and of which one end
part is positioned at the air bearing surface, the plasmon
generator including: a first configuration member that extends to
the air bearing surface; and a second configuration member that is
provided to be in contact with the first configuration member or is
integrally provided with the first configuration member, and that
is in contact with main magnetic pole, the second configuration
member terminating at a position recessed from the air bearing
surface without extending to the air bearing surface, wherein the
first configuration member has a near-field light generation end
surface at the one end part positioned at the air bearing surface,
and the second configuration member terminating at a front end
portion of a slope positioned at the position recessed from the air
bearing surface; and a separator layer that is interposed between
the main magnetic pole and the first configuration member of the
plasmon generator, and that extends from a position recessed from
the air bearing surface to the air bearing surface, the separator
layer penetrating into on interior of the second configuration
member, and a portion of the second configuration member
overlapping on top of a portion of the separator layer.
3. The thermally-assisted magnetic recording head according to
claim 1, wherein the first configuration member of the plasmon
generator couples in a surface plasmon mode with light propagating
through the waveguide to generate surface plasmons, allows the
surface plasmons to propagate toward the air bearing surface, and
generates near-field light at the near-field light generation end
surface.
4. The thermally-assisted magnetic recording head according to
claim 3, further comprising: a cladding layer positioned between
the waveguide and the plasmon generator.
5. The thermally-assisted magnetic recording head according to
claim 1, further comprising an etching stopper layer between the
separator layer and the second configuration member.
6. The thermally-assisted magnetic recording head according to
claim 5, wherein the etching stopper layer includes a nonmagnetic
body layer or a dielectric body layer, and extends, in a direction
away from the air bearing surface, from the front end portion of
the slope of the second configuration member to the end part of the
separator layer on the side opposite to the air bearing surface or
to a position beyond the end part.
7. The thermally-assisted magnetic recording head according to
claim 5, wherein the etching stopper layer includes a magnetic body
layer, and extends, in a direction away from the air bearing
surface, from the air bearing surface to the end part of the
separator layer on the side opposite to the air bearing surface or
to a position beyond the end part.
8. A manufacturing method of a thermally-assisted magnetic
recording head that has an air bearing surface opposing a magnetic
recording medium and that performs magnetic recording while heating
the magnetic recording medium by using near-field light,
comprising: a step of forming a first configuration member on a
waveguide, the waveguide allowing incident light to propagate
therethrough toward the air bearing surface, the first
configuration member extending to the air bearing surface along the
waveguide in a manner opposing the waveguide and having a
near-field light generation end surface on the air bearing surface;
a step of forming a separator layer on the first configuration
member, the separator layer extending from a position recessed from
the air bearing surface to the air bearing surface; a step of
forming a second configuration member on the separator layer and
the first configuration member, the second configuration member
terminating without extending to the air bearing surface,
configuring a plasmon generator together with the first
configuration member, and having a slope formed to have a front end
portion at a position recessed from the air bearing surface, said
front end portion being positioned closer to the air bearing
surface than an end part of the separator layer on a side opposite
to the air bearing surface, the second configuration member
terminating at the front end portion of the slope; and a step of
forming a main magnetic pole in contact with the second
configuration member in such a manner that, at least at the air
bearing surface, the main magnetic pole opposes the first
configuration member via the separator layer.
9. The manufacturing method of a thermally-assisted magnetic
recording head according to claim 8, wherein, in the step of
forming the second configuration member, a portion of the second
configuration member overlaps a portion of the separator layer.
10. The manufacturing method of a thermally-assisted magnetic
recording head according to claim 9, wherein the first
configuration member of the plasmon generator couples in a surface
plasmon mode with light propagating through the waveguide to
generate surface plasmons, allows the surface plasmons to propagate
toward the air bearing surface, and generates near-field light at
the near-field light generation end surface.
11. The manufacturing method of a thermally-assisted magnetic
recording head according to claim 8, further comprising: a step of
forming a cladding layer on the waveguide, wherein the first
configuration member is formed on the cladding layer.
12. The manufacturing method of a thermally-assisted magnetic
recording head according to claim 8, wherein the step of forming
the second configuration member comprises: forming an etching
stopper layer on the separator layer; laminating a flat layer on
the separator layer and the first configuration member; and etching
the laminated flat layer to form the slope to terminate the second
configuration member at the front end portion of the slope.
13. The manufacturing method of a thermally-assisted magnetic
recording head according to claim 12, wherein the etching stopper
layer includes a nonmagnetic body layer or a dielectric body layer,
and is formed to extend, in a direction away from the air bearing
surface, to the end part of the separator layer on the side
opposite to the air bearing surface or to a position beyond the end
part, and, after the etching is completed, a portion of the
separator layer in a region from the air bearing surface to the
front end portion of the slope of the second configuration member
is removed.
14. The manufacturing method of a thermally-assisted magnetic
recording head according to claim 12, wherein the etching stopper
layer includes a magnetic material layer, and is formed to extend,
in a direction away from the air bearing surface, from the air
bearing surface to the end part of the separator layer on the side
opposite to the air bearing surface or to a position beyond the end
part, and, after the etching is completed, remains without being
removed and is brought into contact with the main magnetic pole to
become a part of the main magnetic pole.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a thermally-assisted
magnetic recording head performing recording of information by
irradiating a magnetic recording medium with near-field light to
reduce an anisotropy field (coercive force) of the magnetic
recording medium.
[0003] 2. Description of the Related Art
[0004] In the field of magnetic recording using a magnetic head and
a magnetic recording medium, along with the advancement of high
recording density of a magnetic disk apparatus, further improvement
in the performance of a thin film magnetic head and a magnetic
recording medium is demanded. As the thin film magnetic head, a
composite-type thin film magnetic head is widely used having a
structure in which a magnetoresistive (MR) element for reading and
an induction-type electromagnetic transducer element (magnetic
recording element) are laminated on a substrate. In the magnetic
disk apparatus, the thin film magnetic head is provided in a slider
that flies slightly above a surface of the magnetic recording
medium.
[0005] In such a magnetic recording device, along with the
advancement of high density in magnetic recording, so-called
thermally-assisted magnetic recording is proposed in which a
magnetic material with large magnetic anisotropy energy Ku is used
as the recording medium, and a magnetic field is applied to perform
writing after the coercive force is reduced by applying heat to the
magnetic recording medium. In the thermally-assisted magnetic
recording, methods in which laser light is used in order to apply
heat to the magnetic recording medium are common. Among such
methods, there is a method (near-field light heating) in which the
laser light is converted to near-field light and in which the
magnetic recording medium is heated by irradiating the magnetic
recording medium with the near-field light. The near-field light is
a kind of electromagnetic field that is formed around a substance
and has a property that a diffraction limit due to the wavelength
of the light can be ignored. By irradiating a microstructure body
with light having aligned wavelengths, near-field light that
depends on the scale of the microstructure body is generated, and
focusing of the light to a minimum region of about several tens of
nm is possible.
[0006] A specific configuration of a near-field light probe that
generates near-field light is disclosed in JP2001-255254A and
JP2003-114184A. The near-field light probe disclosed in
JP2001-255254A and JP2003-114184A has a metallic scatter of a shape
of a conical body, a triangle and the like. When light is incident
onto the scatter of the near-field light probe, near-field light is
generated at a vertex portion of the scatter. In a case where such
a near-field light probe is used in thermally-assisted magnetic
recording, the near-field light probe is arranged in the magnetic
recording head in such a manner that the vertex of the scatter is
positioned on an air bearing surface (ABS) opposing the recording
medium. The scatter is irradiated with light from an opposite side
of the ABS, and near-field light is radiated from the vertex of the
scatter toward the recording medium. Such a near-field light probe
is referred to as a plasmon antenna.
[0007] However, in a method in which the plasmon antenna is
directly irradiated with light as described above, the efficiency
of converting the light radiated onto the plasmon antenna to the
near-field light is low. Most of the energy of the light radiated
onto the plasmon antenna is reflected at the surface of the plasmon
antenna or converted into heat. The vertex (near-field light
generator) of the plasmon antenna is formed to have a dimension
smaller than the wavelength of the light. Therefore, the volume of
the plasmon antenna is small. Thus, in the plasmon antenna,
temperature rise accompanying the conversion of the energy of the
incident light to heat is very large. Due to this temperature rise,
the plasmon antenna causes volume expansion. If such a plasmon
antenna is arranged on the ABS of the thermally-assisted magnetic
recording head that opposes the magnetic recording medium, the
plasmon antenna protrudes from the ABS due to the volume expansion.
In order to prevent the magnetic recording head from contacting the
magnetic recording medium during the expansion, an end part of the
MR element positioned on the ABS is kept far away from the magnetic
recording medium. As a result, a problem occurs that, for example,
signals recorded in the magnetic recording medium cannot be read
during a recording operation, which impairs the reliability of the
recording head. Further, when heat generation is large, problems
occur, such as breakage (e.g., melting) of the plasmon antenna,
degradation in performance (heating capability) that accompanies
deformation due to migration of the material that configures the
plasmon antenna, and damage to the magnetic recording medium.
[0008] Therefore, thermally-assisted magnetic recording heads using
surface plasmon are proposed in JP2005-116155A and JP2012-22768A.
In these thermally-assisted magnetic recording heads, instead of
being directly radiated to the plasmon antenna, propagation light
that propagates through a waveguide couples with the plasmon
generator in a surface plasmon mode via a cladding layer. The light
propagating through the waveguide is totally reflected at an
interface between the waveguide and the cladding layer. In this
case, light that is referred to as evanescent light and that exudes
to the cladding layer is generated. The evanescent light and
collective oscillations of electric charges in the plasmon
generator are coupled, and surface plasmons are excited in the
plasmon generator. The excited surface plasmons propagate to a
near-field light generation end surface that is an ABS side end
part of the plasmon generator, and near-field light is generated at
the near-field light generation end surface.
[0009] However, even for a thermally-assisted magnetic recording
head using the surface plasmons, temperature rise to some extent in
the plasmon generator onto which the light is focused cannot be
avoided, and additional measures are required to prevent
overheating. To prevent overheating in the plasmon generator, it is
effective that a structure body having a large volume is provided
in contact with the plasmon generator or is integrally provided
with the plasmon generator to function as a heat sink. Because the
structure body is in contact with the plasmon generator or is
integrated with the plasmon generator, the structural body must be
made of a material (specifically, noble metal such as Au and Ag
that can be used as the material of the plasmon generator) that
does not interfere with the generation of the near-field light.
From a point of view of heat dissipation efficiency, it is
preferable that the structure body be exposed on the ABS. However,
in practice, it is difficult to expose the structure body on the
ABS due to an influence on the near-field light and a problem when
processing the slider.
[0010] Further, a main magnetic pole for applying a writing
magnetic field to the recording medium is provided above the
plasmon generator. A separator layer that does not absorb much of
the near-field light is provided between the near-field light
generation end surface, which is the ABS side end part of the
plasmon generator, and the main magnetic pole.
SUMMARY OF THE INVENTION
[0011] A purpose of the present invention is to provide a
thermally-assisted magnetic recording head that allows heat of a
plasmon generator to be efficiently dissipated and that achieves
excellent generation of near-field light and application of a
writing magnetic field from a main magnetic pole.
[0012] A thermally-assisted magnetic recording head of the present
invention that has an air bearing surface opposing a magnetic
recording medium and that performs magnetic recording while heating
the magnetic recording medium by using near-field light includes: a
waveguide through which incident light propagates toward the air
bearing surface; a main magnetic pole of which one end part is
positioned at the air bearing surface; a plasmon generator that is
positioned between the waveguide and the main magnetic pole, that
is provided along the waveguide in a manner opposing the waveguide,
and of which one end part is positioned at the air bearing surface,
and a separator layer that is interposed between the main magnetic
pole and a first configuration member of the plasmon generator, and
that extends from a position recessed from the air bearing surface
to the air bearing surface. The plasmon generator includes: the
first configuration member that extends to the air bearing surface;
and a second configuration member that is provided to be in contact
with the first configuration member or is integrally provided with
the first configuration member, and that is in contact with main
magnetic pole, the second configuration member terminating at a
position recessed from the air bearing surface without extending to
the air bearing surface. The first configuration member has a
near-field light generation end surface at the one end part
positioned at the air bearing surface, and the second configuration
member terminates at a front end portion of a slope positioned at
the position recessed from the air bearing surface. An end part of
the separator layer on a side opposite to the air bearing surface
is at a position more recessed from the air bearing surface than
the front end portion of the slope of the second configuration
member.
[0013] The separator layer penetrates into on interior of the
second configuration member, and a portion of the second
configuration member overlaps on top of a portion of the separator
layer.
[0014] The first configuration member of the plasmon generator
couples in a surface plasmon mode with light propagating through
the waveguide to generate surface plasmons, allows the surface
plasmons to propagate toward the air bearing surface, and generates
near-field light at the near-field light generation end
surface.
[0015] A manufacturing method of the present invention of a
thermally-assisted magnetic recording head that has an air bearing
surface opposing a magnetic recording medium and that performs
magnetic recording while heating the magnetic recording medium by
using near-field light includes: a step of forming a first
configuration member on a waveguide, the waveguide allowing
incident light to propagate therethrough toward the air bearing
surface, the first configuration member extending to the air
bearing surface along the waveguide in a manner opposing the
waveguide and having a near-field light generation end surface on
the air bearing surface; a step of forming a separator layer on the
first configuration member, the separator layer extending from a
position recessed from the air bearing surface to the air bearing
surface; a step of forming a second configuration member on the
separator layer and the first configuration member, the second
configuration member terminating without extending to the air
bearing surface, configuring a plasmon generator together with the
first configuration member; and a step of forming a main magnetic
pole in contact with the second configuration member in such a
manner that, at least at the air bearing surface, the main magnetic
pole opposes the first configuration member via the separator
layer. In the step of forming the second configuration member, a
slope is formed to have a front end portion at a position recessed
from the air bearing surface, said front end portion being
positioned closer to the air bearing surface than an end part of
the separator layer on a side opposite to the air bearing surface.
The second configuration member terminates at the front end portion
of the slope.
[0016] According to the present invention, the front end portion of
the slope at which the second configuration member of the plasmon
generator terminates can be arranged close to the ABS regardless of
the length of the separator layer. For example, in a
thermally-assisted magnetic recording head described in U.S. patent
application Ser. No. 13/568,542, a second configuration member does
not overlap a separator layer (nonmagnetic insulating material
layer). Therefore, when a long separator layer is provided in a
manner that absorption of surface plasmons by a main magnetic pole
can be sufficiently suppressed, a front end portion of the second
configuration member is distant away from the ABS. However, in the
present invention, the second configuration member overlaps the
separator layer, and, while ensuring a sufficient length of the
separator layer, the front end portion of the second configuration
member can be arranged close to the ABS. Thereby, the volume and
surface area of the second configuration member can be increased.
Therefore, the heat dissipation effect can be increased, and
overheating of the plasmon generator can be prevented. In addition,
because the main magnetic pole is not made small, and because
distance between the main magnetic pole and the near-field light
generation end surface is not increased, sufficient heating of the
magnetic recording medium and application of a writing magnetic
field can be performed to achieve excellent thermally-assisted
magnetic recording.
[0017] The above-described purpose, features and advantages and
other purposes, features and advantages of the present invention
will be clear by reading the following explanation with reference
to the accompanying drawings that illustrate the embodiments of the
present invention.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] FIG. 1 is a cross-sectional view of a main part of a
thermally-assisted magnetic recording head according to a first
embodiment of the present invention.
[0019] FIG. 2 illustrates an ABS of the main part of the
thermally-assisted magnetic recording head according to the first
embodiment.
[0020] FIG. 3A is a graph illustrating a relation between a length
of a separator layer of the thermally-assisted magnetic recording
head according to the first embodiment and a thermal gradient at a
recording point of a magnetic recording medium.
[0021] FIG. 3B is a graph illustrating a relation between the
length of the separator layer of the thermally-assisted magnetic
recording head according to the first embodiment and a maximum
temperature in a recording layer of the magnetic recording medium
that has been heated.
[0022] FIG. 3C is a graph illustrating a relation between a
thickness of the separator layer of the thermally-assisted magnetic
recording head according to the first embodiment and the thermal
gradient at the recording point of the magnetic recording
medium.
[0023] FIG. 3D is a graph illustrating a relation between the
thickness of the separator layer of the thermally-assisted magnetic
recording head according to the first embodiment and the maximum
temperature in the recording layer of the magnetic recording medium
that has been heated.
[0024] FIG. 4A is a graph illustrating a relation between a
recession distance from an ABS of an end part of a slope of the
thermally-assisted magnetic recording head according to the first
embodiment and a temperature rise in a plasmon generator.
[0025] FIG. 4B is a graph illustrating a relation between the
recession distance from the ABS of the end part of the slope of the
thermally-assisted magnetic recording head according to the first
embodiment and the thermal gradient at the recording point of the
magnetic recording medium.
[0026] FIG. 4C is a graph illustrating a relation between the
recession distance from the ABS of the end part of the slope of the
thermally-assisted magnetic recording head according to the first
embodiment and the maximum temperature in the recording layer of
the magnetic recording medium that has been heated.
[0027] FIGS. 5A-5F are cross-sectional views sequentially
illustrating main parts of a manufacturing method of the
thermally-assisted magnetic recording head according to the first
embodiment.
[0028] FIG. 6 is a cross-sectional view of a main part of a
thermally-assisted magnetic recording head according to a second
embodiment of the present invention.
[0029] FIGS. 7A-7E are cross-sectional views sequentially
illustrating main parts of a manufacturing method of the
thermally-assisted magnetic recording head according to the second
embodiment.
[0030] FIG. 8 is a cross-sectional view of a main part of a
thermally-assisted magnetic recording head according to a third
embodiment of the present invention.
[0031] FIG. 9 is a cross-sectional view of a main part of a
thermally-assisted magnetic recording head according to a fourth
embodiment of the present invention.
[0032] FIGS. 10A-10E are cross-sectional views sequentially
illustrating main parts of a manufacturing method of the
thermally-assisted magnetic recording head according to the fourth
embodiment.
[0033] FIG. 11 is a cross-sectional view of a main part of a
thermally-assisted magnetic recording head according to a fifth
embodiment of the present invention.
[0034] FIG. 12 is a cross-sectional view of a main part of a slider
containing the thermally-assisted magnetic recording head according
to the first embodiment of the present invention.
[0035] FIG. 13 is a perspective view of the slider illustrated in
FIG. 12.
[0036] FIG. 14 is a perspective view of a head gimbal assembly
containing the slider illustrated in FIGS. 12-13.
[0037] FIG. 15 is a side view of a main part of a hard disk drive
apparatus containing the head gimbal assembly illustrated in FIG.
14.
[0038] FIG. 16 is a plan view of the hard disk drive apparatus
containing the head gimbal assembly illustrated in FIG. 14.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0039] A thermally-assisted magnetic recording head of the present
invention is explained with reference to the drawings.
[0040] First, a basic configuration of a main part of a
thermally-assisted magnetic recording head 1 of the present
invention is explained. The thermally-assisted magnetic recording
head 1 performs so-called thermally-assisted magnetic recording in
which information is recorded by applying a magnetic field in a
state in which a coercive force has been partially reduced by
applying heat to a magnetic recording medium 17. In the following
explanation, a width direction of an air bearing surface (ABS) of
the magnetic recording head 1, a height direction of the ABS, and a
depth direction orthogonal to the ABS are respectively illustrated
as an X-direction, a Z-direction, and a Y-direction, the ABS
opposing the magnetic recording medium 17.
[0041] As illustrated in FIGS. 1 and 2, the thermally-assisted
magnetic recording head 1 includes a waveguide (core) 2 onto which
laser light used for heating the magnetic recording medium 17 is
incident. The waveguide 2 can be formed, for example, with
TaO.sub.x. TaO.sub.x means tantalum oxide of any composition.
Typical examples of TaO.sub.x include, but not limited to,
Ta.sub.2O.sub.5, TaO, TaO.sub.2, and the like.
[0042] A plasmon generator 3 is provided in a manner opposing a
part of the waveguide 2. The plasmon generator 3 is formed from Au,
Ag, Cu, Al, Pd, Ru, Pt, Rh, Ir or an alloy having these metals as a
main component, and extends to the ABS. The plasmon generator 3 has
a near-field light generation end surface 3a.sub.1 on an ABS side
end part. The near-field light generation end surface 3a.sub.1, on
the ABS, opposes the magnetic recording medium 17.
[0043] A main magnetic pole 4 is provided on the plasmon generator
3. The main magnetic pole 4 is exposed on the ABS and opposes the
magnetic recording medium 17. The main magnetic pole 4 is formed
with an alloy that is formed from any two or three of Ni, Fe and
Co.
[0044] A cladding layer 5 is provided below the plasmon generator 3
and between the plasmon generator 3 and the waveguide 2. The
cladding layer 5 can be formed, for example, with AlO.sub.x. Here,
AlO.sub.x means aluminum oxide of any composition. A typical
example of AlO.sub.x is, but not limited to, Al.sub.2O.sub.3.
[0045] Further, a return shield layer 12 is provided below the
waveguide 2. The return shield layer 12 is formed with an alloy
that is formed from any two or three of Ni, Fe and Co. Magnetic
flux 24 that is generated by passing a current to a coil 15 (see
FIG. 12) (to be described later) is emitted from a tip end portion
of the main magnetic pole 4 toward the magnetic recording medium
17, travels along a perpendicular direction (Y-direction) through a
recording layer 17a that is a surface layer of the magnetic
recording medium 17 for perpendicular magnetic recording, and
magnetizes each recording bit of the recording layer 17a along the
perpendicular direction. After passing through the recording layer
17a and in an under layer 17b that is below the recording layer 17a
and that is made of a soft magnetic material, the magnetic flux 24
changes a magnetic path to a surface direction (Z-direction) of the
magnetic recording medium 17. The magnetic flux 24 further changes
orientation again to the perpendicular direction (Y-direction) in
the vicinity of the return shield layer 12 and is absorbed by the
return shield layer 12. That is, the return shield layer 12 plays
the role of controlling the magnetic flux 24 in such a manner that
the magnetic flux 24 perpendicularly passes through the recording
layer 17a and travels a U-shape magnetic path.
[0046] In the thermally-assisted magnetic recording head 1,
propagation light that propagates through the waveguide 2 is
coupled with the plasmon generator 3 in a surface plasmon mode via
the cladding layer 5 to excite surface plasmons in the plasmon
generator 3. The excited surface plasmons propagate along a surface
of a surface plasmon mode coupling part 3a.sub.2 of the plasmon
generator 3 to the near-field light generation end surface 3a.sub.1
to generate near-field light at the near-field light generation end
surface 3a.sub.1. In FIG. 1, a region 19 where the near-field light
is generated is schematically illustrated. In this way, by
irradiating the magnetic recording medium 17 with the near-field
light, the magnetic recording medium 17 is partially heated and the
coercive force is reduced. By applying a magnetic field from the
main magnetic pole 4 to the portion where the coercive force is
reduced, as mentioned above, thermally-assisted magnetic recording
to the magnetic recording medium 17 is performed.
[0047] In the present invention, in order to prevent overheating
the plasmon generator 3, a structure body (heat sink) having a heat
dissipation effect is provided. Specifically, the plasmon generator
3 of the present invention includes a first configuration member 3a
and a second configuration member 3b that is integrally provided on
top of the first configuration member 3a and that functions as a
heat sink. The first configuration member 3a includes the
near-field light generation end surface 3a.sub.1 that generates
near-field light and the surface plasmon mode coupling part
3a.sub.2 that couples in the surface plasmon mode with the
propagation light propagating through the waveguide 2. Similar to a
conventional plasmon generator, the first configuration member 3a
has a cross-sectional shape of a certain quadrangle (rectangle,
trapezoid, or inverted trapezoid) and extends to the ABS. The
cross-sectional shape of the first configuration member 3a, that
is, shape and dimensions of the near-field light generation end
surface 3a.sub.1 at the ABS, are set to be a relatively small
quadrangle, for example, that has a height (thickness) in the
Z-direction of about 40-120 nm, in order to generate near-field
light to satisfactorily perform the thermally-assisted magnetic
recording. The second configuration member 3b is formed of the same
material as that of the first configuration member 3a, and, as
illustrated in FIG. 1, is integrally joined to the top of the first
configuration member 3a. An ABS side end part of the second
configuration member 3b, without reaching the ABS, stops at a slope
3b.sub.1 at a position recessed from the ABS. A portion of the
second configuration member 3b excluding the slope 3b.sub.1 has a
height (thickness) in the Z-direction of about 50-200 nm. It is
also possible to have a configuration in which the second
configuration member 3b is formed of a material different from that
of the first configuration member 3a and at least a portion of the
second configuration member 3b is in contact with the first
configuration member 3a.
[0048] A separator layer 6 that is made of a material (for example,
aluminum oxide) that does not absorb much of the near-field light
is interposed between the first configuration member 3a, and the
main magnetic pole 4 and a portion (on the ABS side) of the second
configuration member 3b. The separator layer 6, when viewed in the
Y-direction, extends from a position that is recessed from the ABS
to the ABS. The separator layer 6 penetrates into a position (inner
part) that is more recessed from the ABS than the slope 3b.sub.1 of
the second configuration member 3b. That is, an end part 6a of the
separator layer 6 on a side opposite to the ABS is at a position
that is more recessed from the ABS as compared to a front end
portion 3b.sub.2 of the slope 3b.sub.1 of the second configuration
member 3b, that is, 6a>3b.sub.2 when expressed using coordinates
in the Y-direction with a direction toward the ABS as a negative
(-) direction and a direction away from the ABS as a positive (+)
direction. However, the end part 6a of the separator layer 6 on the
side opposite to the ABS may also be positioned at a position
opposing an intermediate part (middle) of the slope 3b.sub.1 in the
depth direction (Y-direction) as far as the position is more
recessed from the ABS than the front end portion 3b.sub.2 of the
slope 3b.sub.1 of the second configuration member 3b. The separator
layer 6 is made of oxide or nitride (such as alumina, silica and
MgO) or a lamination film of the oxide or nitride, the oxide or
nitride having transparency to the light (laser light) that
propagates through the waveguide 2.
[0049] Technical significance of this configuration is explained in
the following. The second configuration member 3b is mainly used as
a heat sink for preventing overheating of the first configuration
member 3a. In order to achieve sufficient heat dissipation effect
as a heat sink, a volume and a surface area, large to some extent,
are required. Further, when a distance between the near-field light
generation end surface 3a.sub.1 of the first configuration member
3a and the main magnetic pole 4 is large at the ABS, a portion that
is heated by the irradiation of the near-field light and a portion
onto which a writing magnetic field is applied are positioned away
from each other at the magnetic recording medium 17. Therefore,
high-density thermally-assisted magnetic recording cannot be
effectively performed in which writing to a small portion where the
coercive force is sufficiently reduced is performed. That is, at
least at the ABS, the distance between the near-field light
generation end surface 3a.sub.1 of the first configuration member
3a and the main magnetic pole 4 must be small and it is not
preferable that the second configuration member 3b is interposed
between the two. Further, in order to apply a satisfactory writing
magnetic field from the main magnetic pole 4, at least in the
vicinity of the ABS, it is not preferable that the volume of the
main magnetic pole 4 is small. Therefore, in order to reduce the
distance between the near-field light generation end surface
3a.sub.1 of the first configuration member 3a and the main magnetic
pole 4, the front end portion 3b.sub.2 of the slope 3b.sub.1 of the
second configuration member 3b is recessed from the ABS, and, in
order to increase the volumes and surface areas of both the second
configuration member 3b and the main magnetic pole 4, slopes
3b.sub.1, 4a are respectively formed in the second configuration
member 3b and the main magnetic pole 4 and the slopes 3b.sub.1, 4a
overlap each other forming a laminated form. The slope 3b.sub.1 has
an inclination angle of, for example, 30-60 degrees.
[0050] In such a configuration, in order to obtain a higher heat
dissipation effect, it is preferable that the front end portion
3b.sub.2 of the slope 3b.sub.1 of the second configuration member
3b is positioned further closer to the ABS. However, in order to
obtain desired characteristics of the magnetic recording head by
suppressing absorption of the surface plasmons, which are generated
in and propagate through the plasmon generator 3, by the main
magnetic pole 4, it is necessary that the separator layer 6 that is
positioned between the first configuration member 3a and the main
magnetic pole 4 be formed to have predetermined dimensions. For
example, FIGS. 3A-3D illustrate relations between dimensions of the
separator layer 6 and characteristics of the magnetic recording
head 1 in an embodiment of the present invention. FIG. 3A
illustrates a relation between the length in the Y-direction of the
separator layer 6 and a thermal gradient at a recording point of
the magnetic recording medium 17 when the magnetic recording medium
17 is heated by the magnetic recording head 1. FIG. 3B illustrates
a relation between the length in the Y-direction of the separator
layer 6 and a maximum temperature in the recording layer of the
magnetic recording medium 17 when the magnetic recording medium 17
is heated by the magnetic recording head 1. FIG. 3C illustrates a
relation between a thickness in the Z-direction of the separator
layer 6 and the thermal gradient at the recording point of the
magnetic recording medium 17 when the magnetic recording medium 17
is heated by the magnetic recording head 1. FIG. 3D illustrates a
relation between the thickness in the Z-direction of the separator
layer 6 and the maximum temperature in the recording layer of the
magnetic recording medium 17 when the magnetic recording medium 17
is heated by the magnetic recording head 1. Referring to FIGS.
3A-3D, in both the case where the length in the Y-direction of the
separator layer 6 is short and the case where the thickness in the
Z-direction of the separator layer 6 is thin, both characteristics
of the thermal gradient and characteristics of the maximum
temperature of the magnetic recording medium 17 deteriorate. That
is, both the length in the Y-direction and the thickness in the
Z-direction of the separator layer 6 affect the absorption of
light.
[0051] As described above, in order to suppress overheating by
increasing the volume and surface area of the second configuration
member 3b to enhance the heat dissipation effect, it is preferable
that the front end portion 3b.sub.2 of the slope 3b.sub.1 of the
second configuration member 3b is positioned further closer to the
ABS. However, suppose, for that purpose, that the separator layer 6
is made to have dimensions smaller than those predetermined, the
effect of suppressing absorption of the surface plasmons by the
main magnetic pole 4 is reduced and, as illustrated in FIGS. 3A-3D,
the characteristics of the magnetic recording head 1 deteriorate.
Therefore, this is not preferable. Therefore, in the present
invention, in order to position the front end portion 3b.sub.2 of
the slope 3b.sub.1 of the second configuration member 3b further
closer to the ABS without having to make the separator layer 6
small, a configuration is adopted in which the separator layer 6
penetrates toward the direction opposite to the ABS into the
interior of the second configuration member 3b. Thereby, the
separator layer 6 is kept to have the predetermined dimensions, and
desired characteristics of the magnetic recording head 1 can be
obtained. In addition, the volume and surface area of the second
configuration member 3b can be increased to further improve the
heat dissipation effect. These points will be explained later in
detail with reference to the drawings.
[0052] In this way, in the configuration illustrated in FIGS. 1 and
2, the separator layer 6 that is positioned between the first
configuration member 3a and the main magnetic pole 4 penetrates
toward the direction opposite to the ABS into the interior of the
second configuration member 3b, and the front end portion 3b.sub.2
of the slope 3b.sub.1 of the second configuration member 3b is
positioned further closer to the ABS by overlapping the front end
portion 3b.sub.2 on top of the separator layer 6. That is, the end
part 6a of the separator layer 6 on the side opposite to the ABS
and the front end portion 3b.sub.2 of the slope 3b.sub.1 of the
second configuration member 3b are formed in such a manner that
6a>3b.sub.2 in the Y-direction. Thus, as described above,
desired characteristics of the magnetic recording head 1 can be
ensured and the heat dissipation effect for preventing overheating
of the plasmon generator 3 can be improved. Further, particularly
at the ABS and in its vicinity, by increasing the volume and
surface area of the main magnetic pole 4, a sufficient writing
magnetic field can be applied, and, by decreasing the distance
between the main magnetic pole 4 and the near-field light
generation end surface 3a.sub.1 of the first configuration member
3a, the efficiency of the thermally-assisted magnetic recording can
be increased and the performance of the magnetic recording can be
improved.
[0053] The recession distance of the front end portion 3b.sub.2 of
the slope 3b.sub.1 of the second configuration member 3b from the
ABS (the distance in the Y-direction between the front end portion
3b.sub.2 and the ABS) affects the heat dissipation effect of the
second configuration member 3b and thus the magnitude of the
temperature rise in the plasmon generator 3 itself. Therefore, FIG.
4A illustrates a relation between the recession distance of the
front end portion 3b.sub.2 of the slope 3b.sub.1 from the ABS and
the magnitude of the temperature rise in the plasmon generator 3.
FIG. 4B illustrates a relation between the recession distance of
the front end portion 3b.sub.2 from the ABS and the thermal
gradient at the recording point of the magnetic recording medium 17
when the magnetic recording medium 17 is heated by the magnetic
recording head 1. FIG. 4C illustrates a relation between the
recession distance of the front end portion 3b.sub.2 from the ABS
and the maximum temperature in the recording layer of the magnetic
recording medium 17 when the magnetic recording medium 17 is heated
by the magnetic recording head 1.
[0054] From FIGS. 3A and 3B, it is clear that it is preferable that
the separator layer 6 has a length of about 150 nm or more in order
to ensure a large thermal gradient and a high maximum temperature
of the magnetic recording medium 17. Suppose that the second
configuration member is designed not to overlap the separator
layer, in the case where the separator layer is formed to extend
over a distance of 150 nm from the ABS, the front end portion of
the second configuration member cannot be positioned within this
region (a range of 150 nm from the ABS); that is, the second
configuration member has to be formed in such a manner that the
front end portion is positioned 150 nm or more away from the ABS.
This means the volume of the second configuration member is small,
and accordingly, the heat dissipation effect is reduced. For
example, referring to FIG. 4A, in the case where the front end
portion of the second configuration member is positioned 150 nm or
more away from the ABS, the temperature rise of the plasmon
generator 3 is 170.degree. C. or more.
[0055] However, in the present invention, the second configuration
member 3b is formed to overlap on top of the separator layer 6.
Therefore, the front end portion 3b.sub.2 can be positioned closer
to the ABS. When the front end portion 3b.sub.2 is positioned
closer to the ABS, the volume of the second configuration member 3b
can be increased. Therefore, a larger heat dissipation effect can
be obtained. Specifically, as illustrated in FIG. 4A, when the
second configuration member 3b is formed in such a manner that the
front end portion 3b.sub.2 is positioned 50 nm away from the ABS,
the temperature rise of the plasmon generator 3 is 160.degree. C.
or less. As compared to the case where the front end portion is
positioned 150 nm away from the ABS, the temperature rise of the
plasmon generator 3 can be reduced by about 10-25 degrees, which is
preferable. As illustrated in FIGS. 4B and 4C, even when the
recession distance of the front end portion 3b.sub.2 from the ABS
is small, the thermal gradient is not reduced and the maximum
temperature of the magnetic recording medium 17 even increases
(rises). Therefore, there is no problem to position the front end
portion 3b.sub.2 of the second configuration member 3b close to the
ABS.
[0056] As described above, in the present invention, a
configuration is adopted in which the separator layer 6 penetrates
into the interior of the second configuration member 3b and a
portion of the second configuration member 3b overlaps a portion of
the separator layer 6. Therefore, a particular effect is obtained
that a desired length (for example, 150-200 nm) of the separator
layer 6 and a desired recession distance (for example, 50 nm or
less) of the front end portion 3b.sub.2 of the slope 3b.sub.1 of
the second configuration member 3b from the ABS can be
simultaneously realized.
[0057] From FIGS. 3C and 3D, it is clear that, from a point of view
of the thermal gradient and the maximum temperature of the magnetic
recording medium 17, the separator layer 6 is preferably thick.
However, when the separator layer 6 is too thick, the main magnetic
pole 4 is far away from the near-field light generation end surface
3a.sub.1 at the ABS. Therefore, the performance of the recording to
the magnetic recording medium 17 by the magnetic field applied from
the main magnetic pole 4 is reduced. Thus, it is not preferable
that the separator layer 6 is extremely thick. As will be described
later, it is preferable that the separator layer 6 is accurately
formed by using an etching stopper 20. According to FIGS. 3C and
3D, a preferred range for the thickness of the separator layer 6 is
approximately 15-30 nm.
[0058] An example of a manufacturing method of the magnetic
recording head 1 is now explained. Here, as illustrated in FIGS.
5A-5F, a process of forming the separator layer 6, the second
configuration member 3b and the main magnetic pole 4 on top of the
first configuration member 3a of the plasmon generator 3 is
explained. First, as illustrated in FIG. 5A, the separator layer 6
is formed on top of the first configuration member 3a that has been
formed on top of the cladding layer 5. Next, as illustrated in FIG.
5B, the etching stopper layer 20 is formed on top of the separator
layer 6. The etching stopper layer 20 prevents the separator layer
6 from being etched during an etching process such as ion milling
(to be described later) and defines the position of the front end
portion 3b.sub.2 of the slope 3b.sub.1 of the second configuration
member 3b.
[0059] As illustrated in FIG. 5C, the second configuration member
3b is formed. At this time, the second configuration member 3b is
not yet in a desired shape, but is formed as a flat layer without
the slope 3b.sub.1. An anti-etching resist 21 is laminated on a
place on the second configuration member 3b, excluding a portion
where the slope 3b.sub.1 will be formed. Next, as illustrated in
FIG. 5D, etching such as ion milling is performed. At this time,
the portion of the second configuration member 3b that is covered
by the resist 21 is not etched. The portion that is not covered by
the resist 21 is removed in such a manner that the thickness of
this portion gradually decreases from a portion close to the resist
21 toward a portion close to the etching stopper layer 20, and the
slope 3b.sub.1 is formed. The separator layer 6 is covered by the
second configuration member 3b and the etching stopper layer 20 and
is thus not removed. Then, as illustrated in FIG. 5E, the etching
stopper layer 20 and the resist 21 are removed. On top of the
plasmon generator 3 and the separator layer 6 that are formed as
described above, the main magnetic pole 4 is formed, as illustrated
in FIG. 5F. Thereafter, at an appropriate timing (for example,
after various other layers are formed), by removing along a line
22, the magnetic recording head 1 in a desired shape is formed. The
end surface after the removal along the line 22 forms the ABS.
[0060] According to this manufacturing method, the magnetic
recording head 1 of the present invention can be easily and
accurately manufactured. In particular, instead of using a liftoff
method in which a layer of a desired shape including the slope
3b.sub.1 is laminated on top of the first configuration member 3a,
the second configuration member 3b of the plasmon generator 3 is
processed into the desired shape by etching after forming a flat
layer. Thereby, the shape of the slope 3b.sub.1, the position of
the front end portion 3b.sub.2, and the like, can be more
accurately formed. In particular, as described above, the position
(the recession distance from the ABS) of the front end portion
3b.sub.2 of the second configuration member 3b affects the
performance of the thermally-assisted magnetic recording.
Therefore, it is highly preferable that high-accuracy processing is
possible by using etching instead of a liftoff method. Further, as
described above, the length and thickness of the separator layer 6
also greatly affect the performance of the thermally-assisted
magnetic recording. Therefore, in the present embodiment, it is
highly effective to maintain dimensional accuracy by using the
etching stopper layer 20 to protect the separator layer 6.
[0061] Next, other embodiments of the thermally-assisted magnetic
recording head 1 of the present invention are explained. A second
embodiment of the thermally-assisted magnetic recording head 1 of
the present invention is illustrated in FIGS. 6-7E. In the present
embodiment, the etching stopper layer 20 is formed of a material
that can be selectively removed (for example, alumina and MgO that
can be removed by wet etching; or Ta, Ti and Ru, or a lamination
film of Ta, Ti and Ru, which can be removed by Reactive Ion Etching
(RIE)), and is removed at a position aligned with the front end
portion 3b.sub.2 of the slope 3b.sub.1 of the second configuration
member 3b. Other configurations are the same as the above-described
first embodiment. Although not illustrated in the drawings, the
etching stopper layer 20 may adopt a multilayer structure including
an under layer below the layer of the selectively-removable
material described above.
[0062] A manufacturing method of the thermally-assisted magnetic
recording head 1 of the present embodiment is similar to that of
the thermally-assisted magnetic recording head 1 of the first
embodiment and includes the following. The separator layer 6 is
formed on top of the first configuration member 3a (FIG. 7A). The
etching stopper layer 20 is formed on top of the separator layer 6,
the etching stopper layer 20 being formed of a selectively
removable material and having the same length as the separator
layer 6 (FIG. 7B). Then, the second configuration member 3b in a
flat shape is formed and the anti-etching resist 21 is formed on a
place excluding a portion where the slope 3b.sub.1 will be formed
(FIG. 7C). Etching such as ion milling is performed and the slope
3b.sub.1 is formed in the second configuration member 3b (FIG. 7D).
Next, in the present embodiment, by selective etching, the etching
stopper layer 20 is removed in such a manner that the etching
stopper layer 20 aligns with the front end portion 3b.sub.2 of the
slope 3b.sub.1, and the resist 21 is removed (FIG. 7E). Thereafter,
the main magnetic pole 4 is formed, and, at an appropriate timing
(for example, after various other layers are formed), by removing
along the line 22, the magnetic recording head 1 as illustrated in
FIG. 6 is formed. According to the present embodiment, the
separator layer 6 can be protected by preventing the separator
layer 6 from being unintentionally removed. Further, by using
selective etching to remove the etching stopper layer 20 in the
manner that the etching stopper layer 20 aligns with the front end
portion 3b.sub.2 of the slope 3b.sub.1, the distance between the
main magnetic pole 4 and the first configuration member 3a of the
plasmon generator 3 is not increased.
[0063] A third embodiment of the thermally-assisted magnetic
recording head 1 of the present invention is illustrated in FIG. 8.
In the present embodiment, the etching stopper layer 20 of the same
material as in the second embodiment is formed in a manner to cover
the end part 6a of the separator layer 6. Other configurations are
the same as the second embodiment. In the present embodiment, the
etching stopper layer 20 longer than the separator layer 6 in the
Y-direction is formed on top of the separator layer 6. Next,
similar to the second embodiment, after forming the second
configuration member 3b, laminating the resist 21 and forming the
slope 3b.sub.1, the etching stopper layer 20 is removed in a manner
that the etching stopper layer 20 is aligned with the front end
portion 3b.sub.2 of the slope 3b.sub.1, and the resist 21 is
removed. Then, the main magnetic pole 4 is formed, and, at an
appropriate timing, removal along the line 22 is performed.
According to this configuration, the separator layer 6 can be more
surely protected.
[0064] A fourth embodiment of the thermally-assisted magnetic
recording head 1 of the present invention is illustrated in FIGS.
9-10E. In the present embodiment, an etching stopper layer 4b is
formed of a magnetic material (for example, FeCo) same as that of
the main magnetic pole 4. This etching stopper layer 4b remains
unchanged after formation without being removed, and functions as a
part of the main magnetic pole 4. That is, similar to the second
embodiment, the separator layer 6 is formed on the first
configuration member 3a (FIG. 10A). The etching stopper layer 4b
having a length same as that of the separator layer 6 is formed
(FIG. 10B). The second configuration member 3b is formed, and the
resist 21 is laminated (FIG. 10C). The slope 3b.sub.1 is formed in
the second configuration member 3b (FIG. 10D). Next, in the present
embodiment, the resist 21 is removed without removing the etching
stopper layer 20 in the manner to align the etching stopper layer
20 with the front end portion 3b.sub.2 of the slope 3b.sub.1 (FIG.
10E). Thereafter, the main magnetic pole 4 is formed, and, at an
appropriate timing, removal along the line 22 is performed.
According to the present embodiment, the separator layer 6 can be
protected by preventing the separator layer 6 from being
unintentionally removed. Next, since the etching stopper layer 4b
can function as a part of the main magnetic pole 4, the distance
between the main magnetic pole 4 and the first configuration member
3a of the plasmon generator 3 does not increase even without
selective etching and the like. Therefore, the manufacturing of the
magnetic recording head can be simplified. The etching stopper
layer 4b is not limited to a material that is exactly the same as
that of the main magnetic pole 4, and, for example, may have a
multilayer structure that includes a metal layer containing at
least one of Fe, Co and Ni and an under layer below the metal
layer. When the etching stopper layer 4b is metallic, the thermal
conductivity is good. Therefore, there is an effect of lowering the
temperature of the plasmon generator 3.
[0065] A fifth embodiment of the thermally-assisted magnetic
recording head 1 of the present invention is illustrated in FIG.
11. In the present embodiment, the etching stopper layer 4b, which,
similar to the fourth embodiment, functions as a part of the main
magnetic pole 4, is formed in a manner similar to the third
embodiment to cover the end part 6a of the separator layer 6. Other
configurations are the same as the fourth embodiment. In the
present embodiment, the etching stopper layer 4b longer than the
separator layer 6 in the Y-direction is formed on top of the
separator layer 6. Next, after forming the second configuration
member 3b, laminating the resist 21 and forming the slope 3b.sub.1,
without removing the etching stopper layer 4b in a manner to align
the etching stopper layer 4b with the front end portion 3b.sub.2 of
the slope 3b.sub.1, the resist 21 is removed. Then, the main
magnetic pole 4 is formed, and, at an appropriate timing, removal
along the line 22 is performed. According to this configuration,
the separator layer 6 can be more surely protected.
[0066] Next, a slider 7 containing the thermally-assisted magnetic
recording head 1 of the present invention is explained. As
illustrated in FIG. 12, which is a cross-sectional view of a main
part of the slider 7, the slider 7 has a configuration in which an
MR element 9 that configures a reproducing head part and the
thermally-assisted magnetic recording head 1 that is a recording
head part are laminated on top of a substrate 8 that is formed of
ALTIC (Al.sub.2O.sub.3--TiC). In the example illustrated in FIG.
12, the above-described thermally-assisted magnetic recording head
1 of the first embodiment (see FIG. 1) is provided. In the
following explanation, a "lamination direction" means a film
formation direction in a wafer process and a direction orthogonal
to a film surface, and corresponds to the Z-direction in each of
the drawings. An "upward lamination direction" means a direction
oriented from the substrate 8 toward an overcoat layer 14, and a
"downward lamination direction" means a direction oriented from the
overcoat layer 14 toward the substrate 8.
[0067] The slider 7 includes as the reproducing head part the MR
element 9 having its front end portion exposed on the ABS, and an
upper shield layer 10 and a lower shield layer 11 that are provided
in a manner sandwiching the MR element 9 from upper and lower sides
in the lamination direction. The MR element 9 may have an arbitrary
configuration that uses a magnetoresistive effect, such as a CIP
(Current In Plane)-GMR (Gigantic Magneto Resistive) element in
which a sense current flows in a direction parallel to a film
surface, a CPP (Current Perpendicular to Plane)-GMR element in
which a sense current flows in a direction (the lamination
direction) perpendicular to a film surface, and a TMR (Tunneling
Magneto Resistive) element that uses a tunnel effect. When the MR
element 9 is a CPP-GMR element or a TMR element, the upper shield
layer 10 and the lower shield layer 11 are also used as electrodes
supplying the sense current.
[0068] Further, the slider 7 is provided with as the recording head
part the thermally-assisted magnetic recording head 1 for so-called
perpendicular magnetic recording. The thermally-assisted magnetic
recording head 1 has the main magnetic pole 4 for recording. The
main magnetic pole 4 is connected to a yoke 16, and these are
formed with alloys that are formed from any two or three of Ni, Fe
and Co. In the downward lamination direction of the main magnetic
pole 4, the return shield layer 12 is provided. The return shield
layer 12 includes a first main body part 12a and a second main body
part 12b, and is formed with alloy that is formed from any two or
three of Ni, Fe and Co. The yoke 16 that is connected to the main
magnetic pole 4 and the return shield layer 12 are magnetically
coupled to each other by a contact part 13. In the present
embodiment, the return shield layer 12 is provided in the downward
lamination direction of the main magnetic pole 4 and the yoke 16.
However, the return shield layer 12 can also be provided in the
upward lamination direction of the main magnetic pole 4 and the
yoke 16. In the upward lamination direction of the main magnetic
pole 4 and the yoke 16, the overcoat layer 14 formed of
Al.sub.2O.sub.3 is provided.
[0069] Between the main magnetic pole 4 and yoke 16 and the return
shield layer 12, a coil 15 is wound around the contact part 13.
Magnetic flux can be generated by applying a current from outside
to the coil 15. The coil 15 is formed from a conductive material
such as Cu, and the number of turns of the coil 15 is not
limited.
[0070] Although not illustrated in the drawings, the main magnetic
pole 4 is focused toward the ABS in the direction (Z-direction)
orthogonal to the film surface and the cross-track direction
(X-direction). Generated magnetic flux in the interior of the main
magnetic pole 4 is focused toward the ABS, and, from the front end
portion located at the ABS, fine and strong writing magnetic flux
24 (see FIG. 1) suitable for high density recording is emitted
toward the magnetic recording medium 17. As described above, the
magnetic flux 24 emitted from the front end portion of the main
magnetic pole 4 travels a U-shaped magnetic path, in which, after
magnetizing each recording bit of the recording layer 17a along the
perpendicular direction, the magnetic flux 24 changes orientation
to pass through the under layer 17b and then changes orientation
again to pass through the recording layer 17a to be absorbed by the
return shield layer 12.
[0071] The second main body part 12b of the return shield layer 12
forms a leading shield part that has a broader layer cross section
than the second main body part 12a in the cross-track direction
(X-direction). By adopting such a configuration, magnetic field
gradient between the return shield layer 12 and the main magnetic
pole 4 in the vicinity of the ABS becomes steeper. As a result,
signal output jitter is reduced so that error rate during reading
can be reduced.
[0072] As described above, the waveguide 2 and the plasmon
generator 3 are provided between the main magnetic pole 4 and the
return shield layer 12. The waveguide 2 is a so-called core, and
the cladding layer 5 having a refractive index lower than that of
the waveguide 2 is provided. The waveguide 2 extends from the ABS
to a back surface 7a of the slider 7 so as to be connected to a
light source 18 (to be described later). Laser light incident from
the light source 18 propagates toward the ABS while being totally
reflected at the interface between the waveguide 2 and the cladding
layer 5. The plasmon generator 3 includes the first configuration
member 3a and the second configuration member 3b. The first
configuration member 3a has the near-field light generation end
surface 3a.sub.1 and the surface plasmon mode coupling part
3a.sub.2. The second configuration member 3b has the slope 3b.sub.1
and the front end portion 3b.sub.2 of the slope 3b.sub.1. The
separator layer 6 is interposed between the first configuration
member 3a and the second configuration member 3b and the main
magnetic pole 4. The end part 6a of the separator layer 6 on the
side opposite to the ABS is at a position that is more away from
the ABS than the front end portion 3b.sub.2 of the slope 3b.sub.1
of the second configuration member 3b.
[0073] As illustrated in FIG. 12, on the back surface 7a of the
slider 7, that is, the surface on the side opposite to the ABS, the
light source 18 is coupled. The light source 18 is a laser diode,
and includes a pair of electrodes 18a and 18b, P (Positive) type
and N (Negative) type claddings 18c and 18d that are sandwiched by
the electrodes 18a and 18b, and an active layer 18e positioned
between the two claddings 18c and 18d, and a cleavage surface has a
reflector structure. The light source 18 is fixed to the slider 7
using an appropriate method. The active layer 18e in which laser
light is continuously oscillated is arranged on the same straight
line as the waveguide 2 of the thermally-assisted magnetic
recording head 1, and laser light 19 generated in the active layer
18e is incident onto the waveguide 2. The wavelength of the laser
light 19 is not particularly limited, and, as an example, is about
800 nm.
[0074] Because of the configuration as described above, when
magnetic recording to the magnetic recording medium 17 is performed
by using the slider 7, power is supplied to the pair of electrodes
18a and 18b of the light source 18 that is coupled to the back
surface 7a of the slider 7, and laser light is generated in the
active layer 18e and is incident onto the waveguide 2 that opposes
the active layer 18e. The incident laser light propagates through
the waveguide 2 toward the ABS. The surface plasmon mode coupling
part 3a.sub.2 of the plasmon generator 3 couples in a surface
plasmon mode with the propagation light propagating through the
waveguide 2 and generates surface plasmons. When the generated
surface plasmons propagate toward the ABS and reach the near-field
light generation end surface 3a.sub.1, near-field light is
generated. By the near-field light, a portion of the recording
layer 17a of the magnetic recording medium 17 is heated and the
coercive force is reduced. At the same time as when such heating is
performed, current is applied to a coil 15 to generate magnetic
flux, which is emitted from the main magnetic pole 4, and writing
of information to the magnetic recording medium 17 is performed.
The near-field light generation end surface 3a.sub.1 that generates
the near-field light in order to perform heating and the main
magnetic pole 4 that generates the magnetic field in order to
perform writing are close to each other. Therefore, writing of
information to the portion, where the coercive force has been
reduced due to heating, of the recording layer 17a of the magnetic
recording medium 17 can be efficiently performed.
[0075] The slider 7 in which such a magnetic head 1 is formed is
illustrated in FIG. 13. The slider 7 has a nearly hexahedral shape,
and one of the six surfaces is the ABS that opposes the magnetic
recording medium 17. As illustrated in FIG. 14, a head gimbal
assembly 220 is provided with the slider 7 and a suspension 221
that elastically supports the slider 7. The suspension 221 includes
a load beam 222 that is formed of stainless steel and has a shape
of a plate spring, a flexure 223 that is provided on one end part
of the load beam 222, and a base plate 224 that is provided on the
other end part of the load beam 222. The slider 7 is bonded to the
flexure 223, and an appropriate degree of freedom is provided to
the slider 7. A gimbal part is provided for keeping a posture of
the slider 7 constant on a portion of the flexure 223 on which the
slider 7 is mounted.
[0076] The slider 7 is arranged inside a hard disk drive apparatus
in a manner opposing the magnetic recording medium (hard disk) 17
that is a recording medium of a discotic shape and is rotatably
driven. When the magnetic recording medium 17 rotates, air flow
passing between the magnetic recording medium 17 and the slider 7
generates a lifting force on the slider 7 downward in the
Y-direction. The slider 7 flies from the surface of the magnetic
recording medium 17 due to the lifting force. The flying height can
be finely adjusted by using thermal expansion of the slider 7 due
to heating by a heater (not illustrated). The thin film magnetic
recording head 1 is formed in the vicinity of an end part on an air
outflow side of the slider 7 (end part on the lower left side in
FIG. 13).
[0077] An assembly in which the head gimbal assembly 220 is mounted
on an arm 230 is referred to as a head arm assembly. The arm 230
moves the slider 7 in the track crossing direction (X-direction) of
the magnetic recording medium 17. One end of the arm 230 is mounted
on the base plate 224. On the other end part of the arm 230, a coil
231 that forms a part of a voice coil motor is mounted. A bearing
part 233 is provided in a middle portion of the arm 230. The arm
230 is rotatably supported by a shaft 234 mounted on the bearing
part 233. The arm 230 and the voice coil motor that drives the arm
230 configure an actuator.
[0078] Next, a head stack assembly in which the above-described
slider 7 is incorporated and a hard disk drive apparatus are
explained. The head stack assembly is an assembly in which the head
gimbal assembly 220 is mounted on each arm of a carriage that has a
plurality of arms. FIG. 15 is a side view of the head stack
assembly and FIG. 16 is a plan view of the hard disk drive
apparatus. The head stack assembly 250 has a carriage that has a
plurality of arms 230. The carriage configures the above-described
bearing part 233. The head gimbal assemblies 220 are mounted on the
arms 230 in a manner to align themselves in the perpendicular
direction at intervals from each other. On an opposite side of the
arm 230 of the carriage, the coil 231 that forms a part of the
voice coil motor is mounted. The voice coil motor has permanent
magnets 263 arranged at positions opposing each other across the
coil 231.
[0079] Referring to FIGS. 15 and 16, the head stack assembly 250 is
incorporated into the hard disk drive apparatus. The hard disk
drive apparatus has a plurality of magnetic recording media 17
mounted to a spindle motor 23 that is a rotary holding mechanism.
For each magnetic recording medium 17, two sliders 7 are arranged
in a manner opposing each other across the magnetic recording
medium 17. The head stack assembly 250 and the actuator, excluding
the sliders 7, correspond to the device, support the sliders 7 and
position the sliders 7 with respect to the magnetic recording media
17. The sliders 7 are moved by the actuator in the track crossing
direction (X-direction) of the magnetic recording media 17 and are
positioned with respect to the magnetic recording media 17. The
magnetic recording head 1 that is a thin film recording head part
contained in the slider 7 records magnetic information to the
magnetic recording medium 17, and the MR element 9 that is a
reproducing head part reproduces the information recorded in the
magnetic recording medium 17.
[0080] The preferred embodiments of the present invention are
presented and explained in detail. However, these explanations are
exemplary. It should be understood that various changes and
modifications are possible without departing from the spirit or
scope of the appended claims.
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