U.S. patent application number 14/221921 was filed with the patent office on 2014-07-24 for semiconductor device comprising a passive component of capacitors and process for fabrication.
This patent application is currently assigned to STMICROELECTRONICS (GRENOBLE 2) SAS. The applicant listed for this patent is STMICROELECTRONICS (GRENOBLE 2) SAS. Invention is credited to Romain Coffy, Yvon Imbs, Laurent Marechal.
Application Number | 20140206154 14/221921 |
Document ID | / |
Family ID | 43303944 |
Filed Date | 2014-07-24 |
United States Patent
Application |
20140206154 |
Kind Code |
A1 |
Coffy; Romain ; et
al. |
July 24, 2014 |
SEMICONDUCTOR DEVICE COMPRISING A PASSIVE COMPONENT OF CAPACITORS
AND PROCESS FOR FABRICATION
Abstract
A semiconductor device includes a wafer having a frontside and a
backside. The wafer is formed from at least one integrated circuit
chip having an electrical connection frontside co-planar with the
wafer frontside and a backside co-planar with the wafer backside. A
passive component including at least one conductive plate and a
dielectric plate is positioned adjacent the integrated circuit
chip. An encapsulation block embeds the integrated circuit chip and
the passive component, the block having a frontside co-planar with
the wafer frontside and a backside co-planar with the wafer
backside. An electrical connection is made between the electrical
connection frontside and the passive component. That electrical
connection includes connection lines placed on the wafer frontside
and wafer backside. The electrical connection further includes at
least one via passing through the encapsulation block.
Inventors: |
Coffy; Romain; (Voiron,
FR) ; Imbs; Yvon; (Quaix En Chartreuse, FR) ;
Marechal; Laurent; (Grenoble, FR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
STMICROELECTRONICS (GRENOBLE 2) SAS |
Grenoble |
|
FR |
|
|
Assignee: |
STMICROELECTRONICS (GRENOBLE 2)
SAS
Grenoble
FR
|
Family ID: |
43303944 |
Appl. No.: |
14/221921 |
Filed: |
March 21, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13179640 |
Jul 11, 2011 |
|
|
|
14221921 |
|
|
|
|
Current U.S.
Class: |
438/127 |
Current CPC
Class: |
H01L 2924/14 20130101;
H05K 1/185 20130101; H01L 2224/97 20130101; H01L 2224/97 20130101;
H05K 2201/10674 20130101; H01L 24/18 20130101; H01L 24/97 20130101;
H01L 2224/97 20130101; H01L 2224/9222 20130101; H01L 2924/19105
20130101; H01L 23/642 20130101; H01L 24/96 20130101; H01L
2924/01058 20130101; H01L 25/16 20130101; H01L 24/82 20130101; H01L
2924/18162 20130101; H01L 2224/73267 20130101; H01L 2224/18
20130101; H01L 2224/04105 20130101; H01L 2924/14 20130101; H01L
23/5389 20130101; H01L 2924/15311 20130101; H01L 2224/82 20130101;
H01L 2924/15311 20130101; H01L 2924/00 20130101; H01L 24/19
20130101; H01L 21/568 20130101; H01L 21/56 20130101; H01L
2224/24195 20130101; H01L 2224/12105 20130101; H01L 23/5383
20130101; H05K 2203/1469 20130101; H01L 2924/01033 20130101; H05K
2201/10015 20130101 |
Class at
Publication: |
438/127 |
International
Class: |
H01L 21/56 20060101
H01L021/56 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 27, 2010 |
FR |
1056159 |
Claims
1. A process for fabricating a semiconductor device, comprising:
placing, in at least one location on a receiving surface of a
carrier, an electrical connection frontside of at least one
integrated circuit chip and a frontside of at least one passive
component comprising at least one conductive plate and a dielectric
plate for forming a capacitor; forming on the receiving surface a
layer of an encapsulation material so as to obtain, in the
location, a wafer comprising an encapsulation block in which the
chip and the passive component are embedded and having a frontside
comprising the frontside of the chip and the frontside of the
passive component; then selectively connecting the at least one
conductive plate to the chip, so that the capacitor is connected to
the chip.
2. The process according to claim 1, further comprising forming at
least one front electrical connection track on the frontside of the
wafer.
3. The process according to claim 2, further comprising: forming at
least one back electrical connection track on the backside of the
wafer; and forming an electrical connection via through the wafer
and forming a front electrical connection track on the frontside of
the wafer, the back track and the front track being connected by
the electrical connection via.
4. The process according to claim 1, further comprising placing the
passive component such that the at least one conductive plate
extends perpendicular to the receiving surface, then selectively
connecting an edge of the at least one conductive plate to the
chip.
5. The process according to claim 1, further comprising placing the
passive component such that the at least one plate extends parallel
to the receiving surface.
6. The process according to claim 5, further comprising: placing
the passive component having a dielectric plate on the receiving
surface; and forming at least one additional conductive plate on
the frontside of this dielectric plate so as to form the capacitor
comprising the additional conductive plate and the at least one
conductive plate separated by the first dielectric plate.
7. A process comprising: placing an electrical connection frontside
of an integrated circuit chip on a receiving surface of a carrier;
placing a capacitive structure comprising at least one conductive
plate and at least one dielectric plate on the receiving surface of
the carrier adjacent to the integrated circuit chip; providing an
encapsulating material layer surrounding the integrated circuit
chip and the capacitive structure, the encapsulating material layer
having a backside co-planar with a backside of the integrated
circuit chip; forming an electrical connection between the
electrical connection frontside of the integrated circuit chip and
the at least one conductive plate of the capacitive structure, the
electrical connection comprising a via passing through the
encapsulating material layer and a connection line formed on the
backside of the encapsulating material layer.
8. The process of claim 7, wherein placing the capacitive structure
comprises orienting the at least one conductive plate parallel to
the receiving surface of the carrier.
9. The process of claim 8, wherein forming the electrical
connection further comprises another via passing through the
encapsulating material layer between the connection line formed on
the backside of the encapsulating material layer and the at least
one conductive plate.
10. The process of claim 9, further comprising: removing the
carrier, the electrical connection frontside of the integrated
circuit chip being co-planar with a frontside of the encapsulating
material layer; forming another conductive plate and another
electrical connection between the electrical connection frontside
of the integrated circuit chip and the another conductive plate,
the another electrical connection comprising a connection line
formed on the frontside of the encapsulating material layer.
11. The process of claim 7, wherein placing the capacitive
structure comprises orienting the at least one conductive plate
perpendicular to the receiving surface of the carrier.
12. The process of claim 11, wherein forming the electrical
connection further comprises making an electrical connection
between the connection line formed on the backside of the
encapsulating material layer and an edge of the at least one
conductive plate.
13. The process of claim 12, wherein the capacitive structure
comprises an another conductive plate oriented perpendicular to the
receiving surface of the carrier, further comprising: removing the
carrier, the electrical connection frontside of the integrated
circuit chip being co-planar with a frontside of the encapsulating
material layer; forming another electrical connection between the
electrical connection frontside of the integrated circuit chip and
the another conductive plate, the another electrical connection
comprising a connection line formed on the frontside of the
encapsulating material layer.
14. The process of claim 13, wherein forming the another electrical
connection further comprises making an electrical connection
between the connection line formed on the frontside of the
encapsulating material layer and an edge of the another conductive
plate.
15. A method for fabricating a device having a passive component
having at least one capacitor, the method comprising: placing a
frontside of an integrated circuit chip and a frontside of the
capacitor in at least one location on a receiving surface of a
carrier; encapsulating the receiving surface, the integrated
circuit chip, and the capacitor in an encapsulation layer to define
an encapsulated structure having a front surface and a back
surface; exposing a backside of at least one plate of the
capacitor; and electrically connecting the backside of the
capacitor plate to the frontside of integrated circuit chip using
one or more vias which extend through the encapsulation layer at a
location between the integrated circuit chip and the passive
component.
16. The method of claim 15, wherein electrically connecting
comprises: forming a first conductive track on the front surface
between the integrated circuit chip and the via; and forming a
second conductive track on the back surface between the via and the
backside of the at least one plate of the capacitor.
17. The method of claim 16, further comprising forming an
additional via between the second conductive track and the backside
of the at least one plate of the capacitor.
18. The method of claim 15, further comprising singulating the
device from a wafer-scale production of multiple same devices.
19. The method of claim 15, wherein the capacitor is oriented with
the plate parallel to the front and back surfaces.
20. The method of claim 15, wherein the capacitor is oriented with
the plate perpendicular to the front and back surfaces.
Description
PRIORITY CLAIM
[0001] This application is a divisional application of U.S.
application patent Ser. No. 13/179,640 filed on Jul. 11, 2011,
which claims priority from French Application for Patent No.
1056159 filed Jul. 27, 2010, the disclosures of which are hereby
incorporated by reference.
TECHNICAL FIELD
[0002] This disclosure relates to the field of semiconductor
devices.
BACKGROUND
[0003] It is known to produce reconstituted wafers comprising, in
locations, integrated circuit chips embedded in an encapsulation
material and to saw these wafers so as to form individual
semiconductor devices.
[0004] Nevertheless, it is not possible at the present time to
integrate into the wafers, near the chips, capacitors such as those
currently used, especially due to their shape and their electrical
connection means.
SUMMARY
[0005] A process for fabricating a semiconductor device is
provided.
[0006] This process comprises: placing, in at least one location on
a receiving surface of a carrier, an electrical connection
frontside of at least one integrated circuit chip and a frontside
of at least one passive component comprising conductive plates
separated by dielectric plates forming capacitors; forming on the
receiving surface a layer of an encapsulation material so as to
obtain, in the location, a wafer comprising an encapsulation block
in which the chip and the passive component are embedded and having
a frontside comprising the frontside of the chip and the frontside
of the passive component; then selectively connecting at least some
of the conductive plates to the chip, so that at least some of the
capacitors are connected to the chip.
[0007] It is thus possible to prefabricate a passive component
having a simple structure, to integrate it into the encapsulation
block, and then to form one or more capacitors, as required, when
electrical connections are made to the chip.
[0008] The process may comprise: forming at least one front
electrical connection track on the frontside of the wafer.
[0009] The process may comprise: forming at least one back
electrical connection track on the backside of the wafer, an
electrical connection via through the wafer and a front electrical
connection track on the frontside of the wafer, the back track and
the front track being connected by the electrical connection
via.
[0010] The process may comprise: placing the passive component such
that the plates extend perpendicularly to the receiving surface,
then selectively connecting at least some of the lands of the
conductive plates to the chip.
[0011] The process may comprise: placing the passive component such
that the plates extend parallel to the receiving surface.
[0012] The process may comprise: placing a passive component having
a dielectric plate on the receiving surface, then forming at least
one additional conductive plate on the frontside of this dielectric
plate so as to form a capacitor comprising this conductive plate
and the adjacent conductive plate of the passive component, which
are separated by this first dielectric plate.
[0013] A semiconductor device is also provided, which comprises a
wafer having a frontside and comprising at least one integrated
circuit chip having an electrical connection frontside, at least
one passive component having a frontside and comprising conductive
plates separated by dielectric plates, forming capacitors, and an
encapsulation block in which the integrated circuit chip and the
passive component are embedded, a frontside of the encapsulation
block, the frontside of the integrated circuit chip and the
frontside of the passive component forming the frontside of the
wafer, and an electrical connection means connecting at least some
of the conductive plates and the integrated circuit chip, the
electrical connection means being formed on the frontside of the
wafer and/or on the backside of the wafer through the encapsulation
block and on the frontside of the wafer.
[0014] The passive component may comprise plates which extend
perpendicularly to the frontside of the wafer, the electrical
connection means being connected to the lands of the conductive
plates.
[0015] The plates may extend through the thickness of the
wafer.
[0016] The passive component may comprise plates which extend
parallel to the frontside of the wafer.
[0017] The passive component may comprise a dielectric plate
adjacent to the frontside of the wafer, at least one conductive
plate being formed on the frontside of this dielectric plate.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Semiconductor devices will now be described by way of
non-limiting example, illustrated by the drawings in which:
[0019] FIG. 1 shows a cross section of a semiconductor device;
[0020] FIG. 2 shows a front view of the semiconductor device in
FIG. 1, without a surface layer;
[0021] FIG. 3 shows a perspective view of a passive component of
the semiconductor device in FIG. 1;
[0022] FIG. 4 shows the semiconductor device in FIG. 1, according
to one fabrication step;
[0023] FIG. 5 shows the semiconductor device in FIG. 1, according
to another fabrication step;
[0024] FIG. 6 shows the semiconductor device in FIG. 1, according
to another fabrication step;
[0025] FIG. 7 shows the semiconductor device in FIG. 1, according
to another fabrication step;
[0026] FIG. 8 shows a cross section of another semiconductor
device;
[0027] FIG. 9 shows a front view of the semiconductor device in
FIG. 8, without a surface layer;
[0028] FIG. 10 shows a perspective view of a passive component of
the semiconductor device in FIG. 8;
[0029] FIG. 11 shows the semiconductor device in FIG. 8, according
to one fabrication step;
[0030] FIG. 12 shows the semiconductor device in FIG. 8, according
to another fabrication step;
[0031] FIG. 13 shows the semiconductor device in FIG. 8, according
to another fabrication step; and
[0032] FIG. 14 shows the semiconductor device in FIG. 8, according
to another fabrication step.
DETAILED DESCRIPTION
[0033] A semiconductor device 1 illustrated in FIGS. 1 to 3
comprises a wafer 2 which has a frontside 3 and a backside 4, in
parallel.
[0034] The wafer 2 comprises a block of a dielectric encapsulation
material 5 in which a prefabricated integrated circuit chip 6 and a
prefabricated passive component 7 are embedded, these being placed
so that a frontside 8 of the chip 6, in which the integrated
circuits are formed and which has electrical connection pads, a
frontside 9 of the passive component 7 and a frontside 10 of the
encapsulation block 5 are in the same plane forming the frontside 3
of the wafer 2, the passive component 7 being placed at a distance
to the side of the chip 6. Thus, the frontside 8 of the chip 6 and
the frontside 9 of the passive component 7 are not covered by the
encapsulation block 5.
[0035] The passive component 7 comprises a plurality of superposed
plates, which are placed parallel to the frontside 3 of the wafer
2. According to the example shown, the passive component 7
comprises in succession, in the thickness direction of the wafer 2,
a dielectric plate 11 having the aforementioned side 9, a
conductive plate 12, a dielectric plate 13 and a conductive plate
14, the conductive plates 12 and 14 being for example metallic. The
plate 12 completely covers the plate 11, the plate 13 does not
completely cover the plate 12 and the plate 14 completely covers
the plate 13, the conductive plate 14 being, in the example shown,
distant from the backside 4 of the wafer 2.
[0036] On the frontside 3 of the wafer 2, two conductive front
plates 15 and 16 are formed, which are connected to electrical
connection pads on the frontside 8 of the chip 6 by front
electrical connection tracks 17 and 18, the conductive plates 15
and 16 being located on the frontside 9 of the dielectric plate 11
and being distant from each other. The conductive front plates 15
and 16 have the same thickness as the front electrical connection
tracks 17 and 18.
[0037] Behind the plates 12 and 14, and between the plates 12 and
14 and the backside 4 of the wafer 2, holes 19 and 20 are provided
in the encapsulation block 5, which are filled with a conductive
material so as to form electrical connection vias 21 and 22.
[0038] According to one variant, the passive component 7 could have
the same thickness as the wafer 2. In this case, the electrical
connection via 22 could be omitted.
[0039] To the side of the chip 6 and the passive component 7, and
between the frontside 3 and the backside 4 of the wafer 2,
through-holes 23 and 24 are provided in the encapsulation block 5
and are filled with a conductive material so as to form electrical
connection vias 25 and 26.
[0040] On the frontside 3 of the wafer 2, front electrical
connection tracks 27 and 28 are formed connecting the vias 25 and
26, respectively, to electrical connection pads on the frontside 8
of the chip 6 and, on the backside 4 of the wafer 2, back
electrical connection tracks 29 and 30 are formed connecting the
vias 21 and 22 to the vias 25 and 26, respectively.
[0041] Thus, the passive component 7 defines three capacitors
connected to the chip 6, namely a first capacitor C1 comprising the
conductive plate 12 and the conductive plate 15 which are separated
by the dielectric plate 11, a second capacitor C2 comprising the
conductive plate 12 and the conductive plate 16 which are separated
by the dielectric plate 11, and a third capacitor C3 comprising the
conductive plates 12 and 14 which are separated by the dielectric
plate 13.
[0042] On the frontside 3 of the wafer 2, and covering the
conductive plates 15 and 16 and the electrical connection tracks
17, 18, 27 and 28, a dielectric layer 31 is provided, incorporating
an electrical connection network 32 allowing electrical connection
pads, on the frontside 8 of the chip 6, and external electrical
connection bumps 33, placed on a frontside of the layer 31, to be
selectively connected.
[0043] A protective dielectric layer 34 is provided on the backside
4 of the wafer 2, covering the electrical connection tracks 29 and
30.
[0044] The semiconductor device 1 may be produced in the following
way, by suitably employing means used in the microelectronics
field.
[0045] As illustrated in FIG. 4, in respective adjacent, for
example square, locations 35 in a receiving surface 36 of a carrier
37, chips 6 and passive components 7 are placed, their frontsides 8
and 9 being placed against the receiving surface 36, the receiving
surface 36 being for example self-adhesive.
[0046] As illustrated in FIG. 5, an encapsulation layer 38 is
formed on the receiving surface 36 of the carrier 37, embedding the
chips 6 and the passive components 7 and layer 38 is then leveled
or thinned, for example as far as the backside of the chips 6, so
as to obtain a large reconstituted wafer 39 forming, respectively
in the locations 35, encapsulation blocks 5 holding chips 6 and
passive components 7.
[0047] In FIG. 6, holes 19, 20, 23 and 24 are produced,
respectively in the locations 35, and in the encapsulation layer 38
and these holes are filled with a conductive material so as to form
vias 21, 22, 25 and 26, respectively, in the encapsulation blocks
5.
[0048] In FIG. 7 and more fully shown in FIG. 1, the layer 31 is
produced on the frontside 3 of the wafer 2, incorporating therein,
respectively in the locations 35, and on the same metallization
level, the conductive plates 15 and 16, the front electrical
connection tracks 17, 18, 27 and 28, and the electrical connection
network 32. An intermediate dielectric layer could be formed
directly on the frontside of the wafer 2, the conductive plates 15
and 16, the front electrical connection tracks 17, 18, 27 and 28
and the electrical connection network 32 then being produced on
this intermediate dielectric layer and passing through the latter
in places where electrical connection is required. Moreover, the
electrical connection network 32 could nevertheless comprise
several metallic levels.
[0049] On the backside 4 of the wafer 2, the layer 34 is produced,
incorporating therein, in the locations 35 respectively, and on the
same metallization level, the back electrical connection tracks 29
and 30.
[0050] The electrical connection bumps 33 are placed on the front
layer 31.
[0051] Finally, the large wafer 39 obtained is singulated, along
the edges of the location 35, for example by sawing, so as to
obtain a plurality of semiconductor devices 1.
[0052] When the conductive front plates 15 and 16 are produced, at
the same time as the front electrical connection tracks 17 and 18,
the capacitances of the capacitors C1 and C2 are defined,
especially by choosing the areas of these plates 15 and 16. Of
course, one or more capacitors could be produced by forming one or
more conductive plates on the frontside 3, at the same time as one
or more tracks for electrical connection to the chip 6.
[0053] In addition, being provided with a prefabricated passive
component comprising several capacitors, only some of the
capacitors could be connected, as a function of the chip 6 used and
of the requirements related to the operation and applications of
the latter.
[0054] Another semiconductor device 50, illustrated in FIGS. 8-10,
comprises a wafer 51 which has a frontside 52 and a backside 53, in
parallel.
[0055] The wafer 51 comprises a block of an encapsulation material
54 in which a prefabricated integrated circuit chip 55 and a
prefabricated passive component 56 are embedded, these being placed
so that an electrical connection frontside 57 of the chip 55, a
frontside 58 of the passive component 56, and a frontside 59 of the
encapsulation block 5 are in the same plane formed by the frontside
52 of the wafer 51, the passive component 56 being placed at a
distance to the side of the chip 55.
[0056] The passive component 56 comprises a plurality of superposed
plates, placed perpendicular to the frontside 52 of the wafer 51.
According to the example shown, the passive component 56 comprises
four parallel, for example metallic, conductive plates 60, 61, 62
and 63, separated by three dielectric plates 64, 65 and 66, so as
to form three capacitors C10, C11 and C12.
[0057] The conductive plates 60-63 and the dielectric plates 64-66
are placed so as to have front lands which form the side 58 of the
passive component 56 in the plane of the frontside 57 of the wafer
51, and opposite back lands which are in the plane of the backside
53 of the wafer 51, the conductive plates 60-63 and the dielectric
plates 64-66 consequently having, between these opposite lands, a
width corresponding to the thickness of the wafer 51.
[0058] By way of example, the capacitors C10-C12 may be connected
to the chip 55 in the following way.
[0059] For example, front electrical connection tracks 67, 68 and
69 may be formed on the frontside 52 of the wafer 51 so as to
connect the front lands of the conductive plates 60, 61 and 62 to
front pads of the chip 55, by extending onto these front lands and
onto these pads, so that the capacitors C10 and C11 are connected
to the chip 55 by the front tracks 67 and 68 and by the front
tracks 68 and 69, respectively.
[0060] Furthermore, the encapsulation block 54 may have a
through-hole 70 filled with a material forming an electrical
connection via 71, a front electrical connection track 72 possibly
being formed on the frontside 52 of the wafer 51 so as to connect
the via 71 and a front pad of the chip 55, by extending over this
via and this pad, and a back electrical connection track 73
possibly being formed on the backside 53 of the wafer 51 so as to
connect the via 71 and the back land of the conductive plate 63, by
extending over this via and this land, so that the capacitor C12 is
connected to the chip 55 by the via 71, the front electrical
connection track 72 and the back electrical connection track
73.
[0061] On the frontside 52 of the wafer 51, and covering the
frontside of the passive component 56 and the front electrical
connection tracks 67-69 and 72, a dielectric layer 74 is provided,
incorporating an electrical connection network 75 allowing
electrical connection pads, on the frontside 57 of the chip 55, and
external electrical connection bumps 76, placed on a frontside of
the layer 74, to be selectively connected.
[0062] A protective dielectric layer 77 is provided on the backside
53 of the wafer 51, covering the backside of the passive component
56 and the back electrical connection track 73.
[0063] The semiconductor device 50 may be produced in the following
way.
[0064] In FIG. 11, in respective adjacent locations 78 (e.g.,
squares) in a receiving surface 79 of a carrier 80, chips 55 and
passive components 56 are placed, their frontsides 57 and 58 being
placed against the receiving surface 79, the receiving surface 79
being for example self-adhesive.
[0065] In FIG. 12, an encapsulation layer 81 is formed on the
receiving surface 79 of the carrier 80, embedding the chips 55 and
the passive components 56 and the layer 81 is then leveled or
thinned, until the backsides of the passive components 56 are
exposed, so as to obtain a large reconstituted wafer 82 forming,
respectively in the locations 78, encapsulation blocks 54 holding
chips 55 and passive components 56.
[0066] In FIG. 13, a hole 70 is produced, respectively in the
locations 78, in the encapsulation layer 81 and this hole 70 is
filled with a conductive material so as to form the via 71,
respectively, in the encapsulation blocks 54.
[0067] In FIG. 14 and more fully shown in FIG. 8, and in a way
equivalent to that described above, with reference to FIGS. 1 and
7, in relation to the device 1, on the one hand, front electrical
connection tracks 67, 68, 69 and 72 and the network 75 are
produced, respectively in the locations 78, in the dielectric front
layer 74 and, on the other hand, the back electrical connection
track 73 is produced in the dielectric back layer 77.
[0068] Then the bumps 76 are placed in each location 7.
[0069] Finally, the large wafer 82 obtained is singulated, along
the edges of the locations 78, for example by sawing, so as to
obtain a plurality of semiconductor devices 50.
[0070] In the two examples described, being provided with a
prefabricated passive component comprising several capacitors, only
some of the capacitors could be connected, as a function of the
chip 55 used and of the requirements related to the operation and
applications of the latter.
[0071] According to a variant embodiment, a semiconductor device
could comprise a passive component some of the capacitors of which
would be connected in series or in parallel, so as to create a
resultant capacitor connected to the chip.
[0072] According to a variant embodiment, a semiconductor device
could comprise a passive component at least one of the capacitors
of which would be directly connected to one of the external
electrical connection bumps.
[0073] According to a variant embodiment, a semiconductor device
could comprise a passive component at least one of the capacitors
of which would be directly connected to another semiconductor
device, for example stacked on its backside.
[0074] This disclosure is not limited to the examples described
above. Many other variant embodiments are possible without
departing from the scope defined by the appended claims.
* * * * *