U.S. patent application number 14/163228 was filed with the patent office on 2014-07-03 for non-volatile memory devices including blocking insulation patterns with sub-layers having different energy band gaps.
This patent application is currently assigned to Samsung Electronics Co., Ltd.. The applicant listed for this patent is Samsung Electronics Co., Ltd.. Invention is credited to Sung-II CHANG, Jung-Dal CHOI, Chang-Seok KANG, Ju-Hyung Kim.
Application Number | 20140183615 14/163228 |
Document ID | / |
Family ID | 40622903 |
Filed Date | 2014-07-03 |
United States Patent
Application |
20140183615 |
Kind Code |
A1 |
Kim; Ju-Hyung ; et
al. |
July 3, 2014 |
NON-VOLATILE MEMORY DEVICES INCLUDING BLOCKING INSULATION PATTERNS
WITH SUB-LAYERS HAVING DIFFERENT ENERGY BAND GAPS
Abstract
A non-volatile memory device may include a semiconductor
substrate and an isolation layer on the semiconductor substrate
wherein the isolation layer defines an active region of the
semiconductor substrate. A tunnel insulation layer may be provided
on the active region of the semiconductor substrate, and a charge
storage pattern may be provided on the tunnel insulation layer. An
interface layer pattern may be provided on the charge storage
pattern, and a blocking insulation pattern may be provided on the
interface layer pattern. Moreover, the block insulation pattern may
include a high-k dielectric material, and the interface layer
pattern and the blocking insulation pattern may include different
materials. A control gate electrode may be provided on the blocking
insulating layer so that the blocking insulation pattern is between
the interface layer pattern and the control gate electrode. Related
methods are also discussed.
Inventors: |
Kim; Ju-Hyung; (Yongin-si,
KR) ; CHANG; Sung-II; (Suwon-si, KR) ; KANG;
Chang-Seok; (Seongnam-si, KR) ; CHOI; Jung-Dal;
(Seoul, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Samsung Electronics Co., Ltd. |
Suwon-si |
|
KR |
|
|
Assignee: |
Samsung Electronics Co.,
Ltd.
Suwon-si
KR
|
Family ID: |
40622903 |
Appl. No.: |
14/163228 |
Filed: |
January 24, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13305930 |
Nov 29, 2011 |
8643077 |
|
|
14163228 |
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|
12266032 |
Nov 6, 2008 |
8089114 |
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13305930 |
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Current U.S.
Class: |
257/316 ;
257/324 |
Current CPC
Class: |
H01L 27/11529 20130101;
H01L 27/115 20130101; H01L 29/792 20130101; H01L 27/11563 20130101;
H01L 29/788 20130101; H01L 29/66833 20130101; H01L 27/11517
20130101; H01L 29/66825 20130101; H01L 29/40114 20190801; H01L
29/7883 20130101; H01L 29/513 20130101; H01L 29/4234 20130101; H01L
29/42324 20130101; H01L 29/51 20130101; H01L 27/11568 20130101;
H01L 29/40117 20190801; H01L 29/42348 20130101; H01L 29/518
20130101; H01L 29/517 20130101 |
Class at
Publication: |
257/316 ;
257/324 |
International
Class: |
H01L 29/788 20060101
H01L029/788; H01L 29/792 20060101 H01L029/792 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 8, 2007 |
KR |
10-2007-0113796 |
Mar 14, 2008 |
KR |
10-2008-0023972 |
Claims
1. A non-volatile memory device comprising: a semiconductor
substrate; a tunnel insulation layer on the semiconductor
substrate; a charge storage pattern on the tunnel insulation layer
so that the tunnel insulation layer is between the charge storage
pattern and the semiconductor substrate; and a blocking insulation
pattern on the charge storage pattern so that the charge storage
pattern is between the tunnel insulation layer and the blocking
insulation pattern, wherein the blocking insulation pattern
comprises a first blocking insulation sub-layer, a second blocking
insulation sub-layer, and a third blocking insulation sub-layer,
wherein the second blocking insulation sub-layer is between the
first and third blocking insulation sub-layers, and wherein an
energy band gap of the second blocking insulation sub-layer is
greater than energy band gaps of the first and third blocking
insulation sub-layers.
2. A non-volatile memory device according to claim 1 wherein the
charge storage pattern comprises a charge trapping insulating layer
or a conductive floating gate.
3. A non-volatile memory device according to claim 1 wherein a
permittivity of the second blocking insulation sub-layer is less
than permittivities of the first and third blocking insulation
sub-layers.
4. A non-volatile memory device according to claim 1 wherein the
blocking insulation pattern further comprises a fourth blocking
insulation sub-layer so that the third blocking insulation
sub-layer is between the second and fourth blocking insulation
sub-layers, wherein the first and third blocking insulation
sub-layers comprise respective layers of a first material, wherein
the second and fourth blocking insulation sub-layers comprise
respective layers of a second material, and wherein the first and
second materials are different.
5. A non-volatile memory device according to claim 1 wherein the
first and third blocking insulation sub-layers each comprises at
least one of a metal oxide layer, a metal nitride layer, and/or a
metal oxide nitride layer.
6. A non-volatile memory device according to claim 1 wherein the
second blocking insulation sub-layer comprises at least one of a
silicon oxide layer, a metal oxide layer, a metal nitride layer,
and/or a metal oxide nitride layer.
7. A non-volatile memory device according to claim 1 wherein the
charge storage pattern comprises at least one of a silicon nitride
pattern, a metal quantum dot pattern, a silicon quantum dot
pattern, a metal pattern, a doped silicon pattern, and/or a doped
germanium pattern.
8. A non-volatile memory device according to claim 1 wherein the
charge storage pattern comprises at least one of an n-type
conductive polysilicon pattern, a p-type conductive polysilicon
pattern, a metal pattern, and a doped germanium pattern.
9. A non-volatile memory device according to claim 1 further
comprising: a control gate electrode on the blocking insulation
pattern, wherein the blocking insulation pattern is between the
control gate electrode and the semiconductor substrate, and wherein
the control gate electrode comprises layer of a barrier metal and a
layer of a high work function metal.
Description
RELATED APPLICATIONS
[0001] This U.S. non-provisional patent application claims the
benefit of priority as a continuation of U.S. application Ser. No.
13/305,930 filed Nov. 29, 2011, which claims the benefit of
priority as a divisional of U.S. application Ser. No. 12/266,032
filed Nov. 6, 2008, which claims the benefit of priority under 35
U.S.C. .sctn.119 of Korean Patent Application No. 10-2007-0113796,
filed on Nov. 8, 2007, and Korean Patent Application No.
10-2008-0023972, filed on Mar. 14, 2008. The disclosures of all of
the above referenced U.S. and Korean applications are hereby
incorporated herein by reference in their entities.
BACKGROUND
[0002] The present invention disclosed herein relates to memory
devices, and more particularly, to non-volatile memory devices.
[0003] A non-volatile memory device retains its stored information
even when there is no power supply. A flash memory device as a
representative non-volatile memory device stores information based
on whether electric charges are stored or not in a floating gate
interposed between a control gate and a substrate.
[0004] FIG. 1 is a cross sectional view of a conventional
non-volatile memory device.
[0005] Referring to FIG. 1, a device isolation layer 12 is formed
in a semiconductor substrate 10 to define an active region and a
tunnel insulation layer 14 is formed on the active region in a
non-volatile memory device such as a flash memory device. A
floating gate 16 is formed on the tunnel insulation layer 14, and a
blocking insulation pattern 18 is formed on the floating gate 16
and the device isolation layer 12. A control gate electrode 20 is
formed on the blocking insulation pattern 18. In a typical
non-volatile memory device, the floating gate 16 is formed
protruding higher than the device isolation layer 12 in order to
augment a coupling ratio by increasing a surface area of the
floating gate 16 that contacts the blocking insulation pattern 18.
A typical structure of this non-volatile memory device may have
various limitations if an interval between the floating gates 16 is
decreased due to the high degree of integration. If the height of
the floating gate 16 is increased and the interval between the
floating gates 16 is decreased, a conductive layer for forming the
control gate electrode 20 may not be completely filled between the
floating gates 16. Additionally, as illustrated in FIG. 1, a
parasitic capacitance C1 may be formed between the floating gates
16, and as the interval between the floating gates 16 is reduced,
the parasitic capacitance may increase. Therefore, an interference
phenomenon between adjacent memory cells may be significant.
Additionally, if a high-k dielectric layer is used as the blocking
insulation pattern 18 between the charge storage pattern 16 and the
control gate electrode 20 to increase the coupling ratio, a leakage
current I.sub.leakage may increase between the charge storage
pattern 16 and the control gate electrode 20.
[0006] In a case of an erase operation of a non-volatile flash
memory including a doped silicon/oxide/nitride/oxide/silicon
(SONOS) structure and a floating gate, because a back tunneling
current flows, a speed of the erase operation may deteriorate.
SUMMARY
[0007] According to some embodiments of the present invention, a
non-volatile memory device may include a semiconductor substrate
and an isolation layer on the semiconductor substrate, and the
isolation layer may define an active region of the semiconductor
substrate. A tunnel insulation layer may be on the active region of
the semiconductor substrate, and a charge storage pattern may be on
the tunnel insulation layer so that the tunnel insulation layer is
between the charge storage pattern and the active region of the
semiconductor substrate. An interface layer pattern may be on the
charge storage pattern so that the charge storage pattern is
between the tunnel insulation layer and the interface layer
pattern. A blocking insulation pattern may be on the interface
layer pattern so that the interface layer pattern is between the
charge storage pattern and the blocking insulation pattern.
Moreover, the block insulation pattern may include a high-k
dielectric material, and the interface layer pattern and the
blocking insulation pattern comprise different materials. A control
gate electrode may be on the blocking insulating layer so that the
blocking insulation pattern is between the interface layer pattern
and the control gate electrode.
[0008] According to some other embodiments of the present
invention, a non-volatile memory device may include a semiconductor
substrate and a tunnel insulation layer on the semiconductor
substrate. A charge storage pattern may be on the tunnel insulation
layer so that the tunnel insulation layer is between the charge
storage pattern and the semiconductor substrate. A blocking
insulation pattern may be on the charge storage pattern so that the
charge storage pattern is between the tunnel insulation layer and
the blocking insulation pattern. Moreover, the blocking insulation
pattern may include a first blocking insulation sub-layer, a second
blocking insulation sub-layer, and a third blocking insulation
sub-layer. The second blocking insulation sub-layer may be between
the first and third blocking insulation sub-layers, and an energy
band gap of the second blocking insulation may be greater than
energy band gaps of the first and third blocking insulation
sub-layers.
[0009] Embodiments of the present invention may provide a
non-volatile memory device of a structure with a reduced leakage
current between a charge storage pattern and a gate electrode.
[0010] Embodiments of the present invention may also provide
methods of fabricating non-volatile memory devices having
structures with reduced leakage current between charge storage
patterns and control gate electrodes.
[0011] Embodiments of the present invention may also provide a
non-volatile memory with a reduced back tunneling current.
[0012] Embodiments of the present invention may also provide a
non-volatile memory device with an increased retention time.
[0013] Embodiments of the present invention may provide
non-volatile memory devices including a device isolation layer, a
charge storage pattern, an interface layer pattern, a blocking
insulation pattern, and a control gate electrode. The device
isolation layer may define a plurality of active regions in a
semiconductor substrate. The charge storage pattern may be formed
by interposing a tunnel insulation layer on the active regions. The
interface layer pattern may be formed on the charge storage
pattern. The blocking insulation pattern may include a high-k
dielectric on the interface layer pattern. The control gate
electrode may be formed on the blocking insulation pattern, and the
interface layer pattern may include a material different from that
of the blocking insulation pattern.
[0014] In some embodiments, the interface layer pattern may reduce
a leakage current between the charge storage pattern and the
control gate electrode.
[0015] In other embodiments, the interface layer pattern may be
conductor or a semiconductor, and the interface layer patterns on
the active regions may be separated from each other.
[0016] In still other embodiments, the interface layer pattern may
include at least one of metal, a metal compound, metal silicide,
silicon, and a metal nitride layer.
[0017] In even other embodiments, the interface layer pattern may
be a dielectric and may extend on the device isolation layer.
[0018] In yet other embodiments, the interface layer pattern may
include at least of one of a silicon oxide layer, a silicon nitride
layer, and a silicon oxide nitride layer.
[0019] In further embodiments, a top of the device isolation layer
may be higher than that of the active region. The tunnel insulation
layer and the charge storage pattern may be sequentially-stacked on
the active region. The tunnel insulation layer and bottom sides of
the charge storage pattern may be aligned to each other. A top of
the charge storage pattern may be higher than that of the device
isolation layer, the charge storage patterns may be separated from
each other, and the interface layer pattern may be disposed on a
top and a top side of the charge storage pattern.
[0020] In still further embodiments, a top of the device isolation
layer may be higher than that of the active region. The tunnel
insulation layer and the charge storage pattern may be
sequentially-stacked on the active region. The interface layer
pattern may be disposed on the charge storage pattern. Sides of the
tunnel insulation layer, the charge storage pattern, and interface
layer pattern may be aligned to each other, and a height of a top
of the interface layer pattern may be the same as that of the
device isolation layer.
[0021] In even further embodiments, a top of the device isolation
layer may be higher than that of the active region. The tunnel
insulation layer and the charge storage pattern may be
sequentially-stacked on the active region. The interface layer
pattern may be disposed on the charge storage pattern. Sides of the
tunnel insulation layer and the charge storage pattern may be
aligned to each other. The interface layer pattern may extend on
the device isolation layer, and a height of a top of the charge
storage pattern may be the same as that of the device isolation
layer.
[0022] In yet further embodiments, a top of the device isolation
layer may be higher than that of the active region. The tunnel
insulation layer and the charge storage pattern may be
sequentially-stacked on the active region. The tunnel insulation
layer and bottom sides of the charge storage pattern may be aligned
to each other. A top of the charge storage pattern may be higher
than that of the device isolation layer, and the interface layer
pattern may be disposed on a top and a top side of the charge
storage pattern.
[0023] In yet further embodiments, a top of the device isolation
layer may be higher than that of the active region. The tunnel
insulation layer and the charge storage pattern may be
sequentially-stacked on the active region. The tunnel insulation
layer and bottom sides of the charge storage pattern may be aligned
to each other. A top of the charge storage pattern may be higher
than that of the device isolation layer, and the interface layer
pattern may be disposed on a top and a top side of the charge
storage pattern and on the device isolation layer.
[0024] In yet further embodiments, a top of the device isolation
layer may be higher than that of the active region. The tunnel
insulation layer and the charge storage pattern may be
sequentially-stacked on the active region. The tunnel insulation
layer and bottom sides of the charge storage pattern may be aligned
to each other. A top of the charge storage pattern may be higher
than that of the device isolation layer. The interface layer
pattern may be disposed on a top of the charge storage pattern, and
top sides of the interface layer pattern and the charge storage
pattern may be aligned to each other.
[0025] In yet further embodiments, the blocking insulation pattern
may include a sequentially-stacked first blocking insulation
pattern, a second blocking insulation pattern, and a third blocking
insulation pattern. A permittivity of the second blocking
insulation pattern may be less than permittivities of the first
blocking insulation pattern and the third blocking insulation
pattern.
[0026] In yet further embodiments, the charge storage pattern may
include at least one of doped silicon, metal, and a metal
compound.
[0027] In yet further embodiments, the control gate electrode may
include at least one of sequentially-stacked barrier metal/high
work function metal, sequentially-stacked metal/barrier
metal/metal, sequentially-stacked doped polysilicon/barrier
metal/high work function metal, metal, and doped polysilicon.
[0028] In yet further embodiments, the barrier metal may include a
metal nitride layer.
[0029] In other embodiments of the present invention, non-volatile
memory device may include a tunnel insulation pattern, a charge
storage pattern, a blocking insulation pattern, and a control gate
electrode. The tunnel insulation pattern may be formed on a
semiconductor substrate. The charge storage pattern may be formed
on the tunnel insulation pattern. The blocking insulation pattern
may be formed on the charge storage pattern. The control gate
electrode may be formed on the blocking insulation pattern. The
blocking insulation pattern may include a sequentially-stacked
first blocking insulation pattern, second blocking insulation
pattern, and third blocking insulation pattern. An energy band gap
of the second blocking insulation pattern may be greater than those
of the first blocking insulation pattern and the third blocking
insulation pattern.
[0030] In some embodiments, the charge storage pattern may be an
insulating material with a charge trap site or a conductive
floating gate.
[0031] In other embodiments, a permittivity of the second blocking
insulation pattern may be less than permittivities of the first
blocking insulation pattern and the third blocking insulation
pattern.
[0032] In still other embodiments, a trap density of the second
blocking insulation pattern may be less than trap densities of the
first blocking insulation pattern and the third blocking insulation
pattern.
[0033] In even other embodiments, the blocking insulation pattern
may further include a fourth blocking insulation pattern on the
third blocking insulation pattern to alternate a material of a
different energy band gap.
[0034] In yet other embodiments, the first blocking insulation
pattern and the third blocking insulation pattern may include at
least one of a metal oxide layer, a metal nitride layer, and a
metal oxide nitride layer.
[0035] In further embodiments, the second blocking insulation
pattern may include at least one of a silicon oxide layer, a metal
oxide layer, a metal nitride layer, and a metal oxide nitride
layer.
[0036] In still further embodiments, the charge storage pattern may
include at least one of a silicon nitride layer, a metal quantum
dot, a silicon quantum dot, metal, doped silicon, and doped
germanium.
[0037] In even further embodiments, the floating gate may include
at least one of n-type conductive polysilicon, p-type conductive
polysilicon, metal, and doped germanium.
[0038] In yet further embodiments, the metal may include at least
one of a pure metal and a metal compound.
[0039] In yet further embodiments, the control gate electrode may
have a structure of a sequentially-stacked barrier metal and high
work function metal.
[0040] In yet further embodiments, the high work function metal may
have a work function of more than 4.5 eV.
[0041] In yet further embodiments, the barrier metal may include at
least one of a metal nitride layer, a silicon nitride layer, and a
combination thereof, each of which may reduce reaction between the
high work function metal and the blocking insulation layer.
[0042] In yet further embodiments, the control gate electrode may
include at least one of a high work function metal and doped
polysilicon, each of which is interposed between the barrier metal
and the blocking insulation layer.
[0043] In yet further embodiments, the control gate electrode may
include a sequentially-stacked doped silicon and metal, a pure
metal, and a metal containing material.
[0044] In yet further embodiments, the first blocking insulation
pattern may include the same material as the third blocking
insulation pattern and the first blocking insulation pattern may
have the same energy band gap as the third blocking insulation
pattern.
BRIEF DESCRIPTION OF THE FIGURES
[0045] The accompanying figures are included to provide a further
understanding of the present invention, and are incorporated in and
constitute a part of this specification. The drawings illustrate
examples of embodiments of the present invention and, together with
the description, serve to explain principles of the present
invention. In the figures:
[0046] FIG. 1 is a cross sectional view of a conventional
non-volatile memory device;
[0047] FIG. 2 is a block diagram illustrating a non-volatile memory
device including a memory cell array according to embodiments of
the present invention;
[0048] FIGS. 3A through 3C are respective plan and cross sectional
views illustrating a NAND non-volatile memory device according to
embodiments of the present invention;
[0049] FIGS. 4 through 8 are perspective views illustrating a
non-volatile memory device according to some embodiments of the
present invention;
[0050] FIGS. 9 through 13 are cross-sectional views illustrating a
non-volatile memory device according to embodiments of the present
invention;
[0051] FIGS. 14A through 14D are cross-sectional views illustrating
operations of fabricating a non-volatile memory device according to
some embodiments of the present invention;
[0052] FIGS. 15A and 15B are respective plan and cross sectional
views illustrating a NOR non-volatile memory device according to
embodiments of the present invention;
[0053] FIG. 16 is a block diagram illustrating an electronic system
with a non-volatile memory device according to embodiments of the
present invention;
[0054] FIG. 17 is a block diagram illustrating a memory card with a
non-volatile memory device according to embodiments of the present
invention;
[0055] FIGS. 18A and 18B are respective plan and cross sectional
views illustrating a NAND non-volatile memory device according to
embodiments of the present invention;
[0056] FIGS. 19A and 19B are respective plan and cross sectional
views illustrating a NOR non-volatile memory device according to
embodiments of the present invention;
[0057] FIG. 20 is a cross-sectional view taken along a line V-V' of
FIG. 18A illustrating a charge trap non-volatile memory device
according to some embodiments of the present invention;
[0058] FIGS. 21A through 21D illustrate flat band energy band
diagrams of a non-volatile memory device according to some
embodiments of the present invention;
[0059] FIG. 22 illustrates an energy band diagram when a negative
erase voltage V.sub.0 is applied to a non-volatile memory device
according to embodiments of the present invention;
[0060] FIG. 23 is a cross-sectional view taken along a line V-V' of
FIG. 18A illustrating a floating gate non-volatile memory device
according to other embodiments of the present invention; and
[0061] FIGS. 24A through 24C illustrate flat band energy band
diagrams of a non-volatile memory device according to other
embodiments of the present invention.
DETAILED DESCRIPTION
[0062] The present invention is described more fully hereinafter
with reference to the accompanying drawings, in which embodiments
of the present invention are shown. This invention may, however, be
embodied in many different forms and should not be construed as
limited to the embodiments set forth herein. Rather, these
embodiments are provided so that this disclosure will be thorough
and complete, and will fully convey the scope of the present
invention to those skilled in the art. In the drawings, the sizes
and relative sizes of layers and regions may be exaggerated for
clarity. Like numbers refer to like elements throughout.
[0063] It will be understood that when an element or layer is
referred to as being "on", "connected to" or "coupled to" another
element or layer, it can be directly on, connected or coupled to
the other element, or layer or intervening elements or layers may
be present. In contrast, when an element is referred to as being
"directly on," "directly connected to" or "directly coupled to"
another element or layer, there are no intervening elements or
layers present. As used herein, the term "and/or" includes any and
all combinations of one or more of the associated listed items.
[0064] It will be understood that, although the terms first,
second, third etc. may be used herein to describe various elements,
components, regions, layers and/or sections, these elements,
components, regions, layers and/or sections should not be limited
by these terms. These terms are only used to distinguish one
element, component, region, layer or section from another region,
layer or section. Thus, a first element, component, region, layer
or section discussed below could be termed a second element,
component, region, layer or section without departing from the
teachings of the present invention.
[0065] Spatially relative terms, such as "beneath", "below",
"lower", "above", "upper", "top", "higher", and the like, may be
used herein for ease of description to describe one element or
feature's relationship to another element(s) or feature(s) as
illustrated in the figures. It will be understood that the
spatially relative terms are intended to encompass different
orientations of the device in use or operation in addition to the
orientation depicted in the figures. For example, if the device in
the figures is turned over, elements described as "below" or
"beneath" other elements or features would then be oriented "above"
the other elements or features. Thus, the exemplary term "below"
can encompass both an orientation of above and below. The device
may be otherwise oriented (rotated 90 degrees or at other
orientations) and the spatially relative descriptors used herein
interpreted accordingly. Also, as used herein, "lateral" refers to
a direction that is substantially orthogonal to a vertical
direction.
[0066] The terminology used herein is for the purpose of describing
particular embodiments only, and is not intended to be limiting of
the present invention. As used herein, the singular forms "a", "an"
and "the" are intended to include the plural forms as well, unless
the context clearly indicates otherwise. It will be further
understood that the terms "comprises" and/or "comprising," when
used in this specification, specify the presence of stated
features, integers, steps, operations, elements, and/or components,
but do not preclude the presence or addition of one or more other
features, integers, steps, operations, elements, components, and/or
groups thereof.
[0067] Example embodiments of the present invention are described
herein with reference to cross-section illustrations that are
schematic illustrations of idealized embodiments (and intermediate
structures) of the invention. As such, variations from the shapes
of the illustrations as a result, for example, of manufacturing
techniques and/or tolerances, are to be expected. Thus, embodiments
of the present invention should not be construed as limited to the
particular shapes of regions illustrated herein but are to include
deviations in shapes that result, for example, from manufacturing.
For example, an implanted region illustrated as a rectangle will,
typically, have rounded or curved features and/or a gradient of
implant concentration at its edges rather than a binary change from
implanted to non-implanted region. Likewise, a buried region formed
by implantation may result in some implantation in the region
between the buried region and the surface through which the
implantation takes place. Thus, the regions illustrated in the
figures are schematic in nature and their shapes are not intended
to illustrate the actual shape of a region of a device and are not
intended to limit the scope of the present invention.
[0068] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which this
invention belongs. Accordingly, these terms can include equivalent
terms that are created after such time. It will be further
understood that terms, such as those defined in commonly used
dictionaries, should be interpreted as having a meaning that is
consistent with their meaning in the present specification and in
the context of the relevant art, and will not be interpreted in an
idealized or overly formal sense unless expressly so defined
herein. All publications, patent applications, patents, and other
references mentioned herein are incorporated by reference in their
entirety.
[0069] FIG. 2 is a block diagram illustrating a non-volatile memory
device including a memory cell array according to some embodiments
of the present invention. The memory cell array 1 includes a
plurality of cell transistors M1. Each cell transistor M1 is
provided on a conductive semiconductor substrate and includes
conductive source and drain regions spaced a predetermined distance
apart from each other, a charge storage pattern (not shown) storing
charges and disposed on a channel region between the source and
drain regions, an interface layer (not shown) disposed on the
charge storage pattern, a blocking insulation pattern (not shown)
formed on the interface layer pattern, and a control gate electrode
(not shown) disposed on the blocking insulation pattern.
[0070] Referring to FIG. 2, the memory cell array 1 includes a
plurality of cell strings 2 corresponding to respective bit lines
BL. Each cell string 2 includes a string selection transistor SST
as a first selection transistor, a ground selection transistor GST
as a second selection transistor, and a plurality of memory cells
M1 connected in series between the string and ground selection
transistors SST and GST. The string selection transistor SST
includes a drain connected to the corresponding bit line BL and a
gate connected to a string selection line SSL. The ground selection
transistor GST includes a source connected to a common source line
CSL and a gate connected to a ground selection line GSL. The memory
cells M1 are connected in series between the source of the string
selection transistor SST and the drain of the ground selection
transistor GST. The memory cells M1 are connected to the
corresponding word lines WL, respectively. The word lines WL, the
string selection line SSL, and the ground selection line GSL are
connected to an X-decoder.
[0071] FIGS. 3A through 3C are views illustrating a NAND
non-volatile memory device according to embodiments of the present
invention. FIG. 3B is a cross-sectional view taken along line I-I'.
FIG. 3C is a cross-sectional view taken along line II-II' of FIG.
3A.
[0072] Referring to FIGS. 3A and 3B, the NAND non-volatile memory
device includes a semiconductor substrate 100 having a cell region.
A device isolation layer 102 is disposed in the semiconductor
substrate 100. The device isolation layer 102 defines active
regions 104. The active regions 104 extend in one direction. A
string selection line SSL and a ground selection line GSL laterally
cross over the active regions 104 and a plurality of word lines WL
laterally cross over the active regions 104 between the string
selection line SSL and the ground selection line GSL. The string
selection line SSL, the ground selection line GSL, and the word
lines WL extend in another direction crossing over the one
direction. The string selection line SSL, the word lines WL, and
the ground selection lines GSL may be included in a cell string
group. The cell string group may be repeatedly disposed along the
one direction in mirror symmetry.
[0073] Impurity regions 107 corresponding to a source and a drain
may be disposed in the active regions 104 on the both sides of each
of the string selection line SSL, the word lines WL, and the ground
selection line GSL. The word line WL and the impurity regions 107c
on the both sides of the word line WL provide a cell transistor.
The ground selection line GSL and impurity regions 107a and 107b on
both sides of the ground selection line GSL provide a ground
selection transistor GST. The string selection line SSL and
impurity regions 107d and 107e on both sides of the string
selection line SSL provide a string selection transistor SST.
[0074] The word line WL may include a tunnel insulation layer 110,
a charge storage pattern 120, an interface layer pattern 130, a
blocking insulation pattern 140, and a control gate electrode 150.
The tunnel insulation layer 110 may include at least one of a
silicon oxide layer and a high-k dielectric layer (i.e., a layer of
a dielectric material having a relatively high dielectric
constant). A high-k dielectric layer, for example, may be a layer
of a dielectric material having a dielectric constant greater than
that of silicon oxide. The charge storage pattern 120 may be a
conductor or a dielectric based on a floating gate non-volatile
memory or a charge trap non-volatile memory. The charge storage
pattern 120 may include doped polysilicon for a floating gate
non-volatile memory. The charge storage pattern 120 may include a
silicon nitride layer for charge trap non-volatile memory.
[0075] A hard mask pattern (not shown) may be disposed on the
control gate electrode 150. The ground selection line GSL and the
string selection ling SSL may have the same structure as a word
line WL, or widths of the string selection ling SSL and the ground
selection line GSL may be different from that of a word line WL.
More particularly, a portion or the entirety of the interface layer
pattern 130 and the blocking insulation pattern 140 may be removed
from the string selection line SSL and the ground selection line
GSL such that a butting contact is formed to electrically connect
the charge storage pattern 120 with the control gate electrode
150.
[0076] According to a modified embodiment of the present invention,
layers of the ground and string selection lines GSL and SSL
corresponding to the tunnel insulation layer 110, the charge
storage pattern 120, the interface layer pattern 130, and the
blocking insulation pattern 140 may be used as a gate dielectric
and insulation layers of the ground and string selection
transistors.
[0077] The common source line CSL is disposed on the sources 107a
of the ground selection transistors GST, and the common source line
CSL may extend a direction perpendicular with respect to the bit
lines. A respective bit line contact BC is disposed on the drain
107e of each string selection transistor SST. The bit line contact
BC is connected to the bit line BL that extends in a direction
perpendicular with respect to the word lines.
[0078] FIG. 4 is a perspective view illustrating a non-volatile
memory device according to some embodiments of the present
invention.
[0079] Referring to FIG. 4, a device isolation layer 102 is formed
in a semiconductor substrate 100 to define an active region 104.
The device isolation layer 102 may be formed by applying a shallow
trench isolation (STI) technique. The top of the device isolation
layer 102 may be higher than that of the active region 104. A
tunnel insulation layer 110 may be formed on the active region 104.
The tunnel insulation layer 110 may be formed using a thermal oxide
process. Charge storage patterns 120 may be formed on the tunnel
insulation layer 110 and the device isolation layer 102. Each
charge storage pattern 120 may be separated from adjacent charge
storage patterns 120 so that the charge storage patterns 120 formed
on the active regions 104 may be separated from each other. The
charge storage pattern 120 may cover a portion of the device
isolation layer 102. Accordingly, the top of the charge storage
pattern 120 may be higher than that of the device isolation layer
102. The charge storage pattern 120 may be formed by forming and
patterning a charge storage layer (not shown) on the tunnel
insulation layer 110. Accordingly, charge storage patterns 120 on
an adjacent active region 104 may be separated from each other. An
interface layer pattern 130, a blocking insulation pattern 140, and
a control gate electrode 150 may be sequentially disposed on the
charge storage pattern 120 and the device isolation layer 102. The
interface layer pattern 130 may be conformally formed on the charge
storage pattern 120 and the device isolation layer 102. The top of
the interface layer pattern 130 may have a curved shape. The
interface layer pattern 130 may extend toward the charge storage
pattern 120 on other adjacent active regions 104. The sides of the
charge storage pattern 120, the interface layer pattern 130, the
blocking insulation pattern 140, and the control gate electrode 150
may be aligned. The interface layer pattern 130 may reduce transfer
of charges stored in charge storage patterns 120. When the blocking
insulation pattern 140 includes a high-k dielectric layer, the
interface layer pattern 130 may reduce a leakage current between
the control gate electrode 150 and the charge storage pattern 120.
The interface layer pattern 130 may be formed of a material that
improves an interface junction characteristic between the blocking
insulation pattern 140 and the charge storage pattern 120. A first
interlayer insulation layer 160 and a second interlayer insulation
layer 170 may be formed on the control gate electrode 150. Bit
lines BL may be formed on the second interlayer insulation layer
170.
[0080] The device isolation layer 102 may be formed using an STI
technique. The device isolation layer may be a silicon oxide
layer.
[0081] The tunnel insulation layer 110 may include a thermal oxide
layer having the thickness in the range of about 20 .ANG.
(Angstroms) to 100 .ANG. (Angstroms) and may be formed using
in-situ steam generation (ISSG). That is, an oxide layer may be
formed by injecting hydrogen and oxygen in a chamber at 850.degree.
C. (degrees C.) to 900.degree. C. (degrees C.) at a pressure in the
rage of about 5 Torr to 100 Torr. The tunnel insulation layer 110
is not limited to the silicon oxide layer and may include at least
one of a silicon oxide nitride layer and/or a metal oxide
layer.
[0082] The charge storage pattern 120 may be formed of polysilicon.
The polysilicon may be polysilicon that is in-situ doped during a
deposition process. The charge storage pattern 120 is not limited
to polysilicon and may include at least one of doped silicon, a
metal, and/or a metal compound.
[0083] The charge storage pattern 120 may be a charge trap layer.
The charge trap layer may include a silicon nitride layer. The
charge storage pattern 120 is not limited to a single layer
structure and may have a multilayered structure. The charge storage
pattern 120 may include at least one of a silicon quantum dot, a
metal quantum dot, high concentration silicon, and high
concentration germanium, each of which is included in an insulation
layer.
[0084] The interface layer pattern 130 may include at least one of
a dielectric, a conductor, and/or a semiconductor. If the interface
layer pattern 130 is a dielectric, it may include at least one of a
silicon oxide layer, a silicon nitride layer, and/or a silicon
oxide nitride layer. If the charge storage pattern 120 is formed of
polysilicon, and if the blocking insulation pattern 140 includes an
aluminum oxide layer, the interface layer pattern 130 may be formed
of a silicon oxide layer. If the interface layer pattern 130 is a
dielectric, the interface patterns 130 disposed on adjacent active
regions 104 may be connected to each other.
[0085] According to other embodiments of the present invention, if
the interface layer pattern 130 is a conductor or a semiconductor,
the interface layer patterns 130 disposed on adjacent active
regions 104 may be separated from each other. If the interface
layer pattern 130 is a conductor or a semiconductor, the interface
layer pattern 130 may include at least one of a metal, a metal
compound, metal silicide, silicon, and a metal nitride layer. For
example, if the charge storage pattern 120 is a conductor or a
semiconductor and the blocking insulation pattern 140 is an
aluminum oxide layer, the interface layer pattern 130 may include a
metal nitride layer.
[0086] The blocking insulation pattern 140 may include a high-k
dielectric layer. The high-k dielectric layer may have a higher
permittivity than a silicon oxide layer. The high-k dielectric
layer can increase the above-mentioned coupling ratio. The blocking
insulation pattern 140 may include a first blocking insulation
pattern, a second blocking insulation pattern, and a third blocking
insulation pattern, which are sequentially-stacked. A permittivity
of the second blocking insulation pattern may be less than those of
the first blocking insulation pattern and the third blocking
insulation pattern. More particularly, an aluminum oxide layer may
be used as the first and third blocking insulation patterns, and a
silicon oxide layer may be used as the second blocking insulation
pattern. The blocking insulation pattern may further include a
fourth blocking insulation pattern on the third blocking insulation
pattern. The fourth blocking insulation pattern may have the same
material as the second blocking insulation pattern. The first
blocking insulation pattern may include at least one of a metal
oxide layer, a metal nitride layer, and/or a metal oxide nitride
layer, each of which has a higher permittivity than a silicon oxide
layer. The metal oxide layer may include at least one of an
aluminum oxide layer, a hafnium oxide layer, a zirconium oxide
layer, and/or a hafnium aluminum oxide layer. The second blocking
insulation pattern may include at least one of a silicon oxide
layer, a silicon oxide nitride layer, a silicon nitride layer, a
metal oxide layer, a metal nitride layer, and/or a metal oxide
nitride layer.
[0087] The control gate electrode 150 may include at least one of
sequentially-stacked barrier metal/high work function metal,
sequentially-stacked high work function metal/barrier metal/metal,
sequentially-stacked doped polysilicon/barrier metal/metal,
sequentially-stacked metal/doped polysilicon, metal, and/or doped
polysilicon. The barrier metal may include at least one of a metal
nitride layer and/or a metal oxide nitride layer.
[0088] FIG. 5 is a perspective view illustrating a non-volatile
memory device according to other embodiments of the present
invention.
[0089] Referring to FIG. 5, a device isolation layer 102 is formed
in a semiconductor substrate 100 to define an active region 104.
The device isolation layer 102 may be formed using an a STI
technique. The top of the device isolation layer 102 may be higher
than that of the active regions 104. The tunnel insulation layer
110 may be formed on the active regions 104. The tunnel insulation
layer 110 may be formed using a thermal oxide process. The charge
storage pattern 120 may be formed on the tunnel insulation layer
110 and the device isolation layer 102. Each charge storage pattern
120 may be separated from adjacent charge storage patterns 120.
That is, the charge storage patterns 120 formed on the active
regions 104 may be separated from each other. Each charge storage
pattern 120 may cover a portion of the device isolation layer 102.
Accordingly, the top of a charge storage pattern 120 may be higher
than that of the device isolation layer 102. Sidewalls of a charge
storage pattern 120 and an interface layer pattern 130 thereon
aligned with each other. An interface layer pattern 130 of a charge
storage pattern 120 may be separated from another interface layer
pattern 130 on an adjacent charge storage pattern 120. A blocking
insulation pattern 140 is conformally formed on the charge storage
pattern 120 and the device isolation layer 102. The blocking
insulation pattern 140 may fill space between adjacent charge
storage patterns 120. The top of the blocking insulation pattern
140 may be uneven.
[0090] A control gate electrode 150 is disposed on the blocking
insulation pattern 140. The interface layer pattern 130 may reduce
transfer of charges stored in the charge storage pattern 120. When
the blocking insulation pattern 140 includes a high-k dielectric
layer, the interface layer pattern 130 may reduce a leakage current
between the control gate electrode 150 and the charge storage
pattern 120. The interface layer pattern 130 may be formed of a
material that improves an interface junction characteristic between
the blocking insulation pattern 140 and the charge storage pattern
120. A first interlayer insulation layer
[0091] Referring to FIG. 7, a device isolation layer 102 is formed
on a semiconductor substrate 100 to define active regions 104. The
device isolation layer 102 may be formed using an STI technique.
The top of the device isolation layer 102 may be higher than that
of the active regions 104. A tunnel insulation layer 110 may be
formed on the active regions 104. The tunnel insulation layer 110
may be formed using a thermal oxide process. A charge storage
pattern 120 may be formed on the tunnel insulation layer 110 and
the device isolation layer 102. Each charge storage pattern 120 may
be separated from adjacent charge storage patterns 120. The charge
storage patterns 120 formed on the active regions 104 may be
separated from each other. The charge storage patterns 120 may be
disposed between adjacent device isolation layers 102. Accordingly,
the top of each charge storage pattern 120 may be lower than that
of the device isolation layer 102. Accordingly, a parasitic
capacitance can be reduced between adjacent charge storage patterns
120. An interface layer pattern 130 may be disposed on each charge
storage pattern 120. The top of each interface layer pattern 130
may be substantially even with that of the device isolation layer
130. Additionally, each interface layer pattern 130 may be
separated from other interface patterns 130 disposed on adjacent
active regions 104. The interface layer pattern 130 may be formed
of a conductor, a dielectric, and/or a semiconductor. The interface
layer pattern 130 may include a metal silicide and/or a thermal
oxide layer.
[0092] A blocking insulation pattern 140 and a control gate
electrode 150 are sequentially disposed on the interface layer
pattern 130 and the device isolation layer 102. The interface layer
pattern 130 may reduce transfer of charges stored in the charge
storage pattern 120. When the blocking insulation pattern 140
includes a high-k dielectric layer, the interface layer pattern 130
may reduce a leakage current between the control gate electrode 150
and the charge storage pattern 120. The interface layer pattern 130
may be formed of a material that improves an interface junction
characteristic between the blocking insulation pattern 140 and the
charge storage pattern 120. A first interlayer insulation layer 160
and a second interlayer insulation layer 170 may be formed on the
control gate electrode(s) 150. A bit line(s) BL may be formed on
the second interlayer insulation layer 170.
[0093] FIG. 8 is a perspective view illustrating a non-volatile
memory device according to further other embodiments of the present
invention.
[0094] Referring to FIG. 8, a memory cell array may be
multilayered. A device isolation layer 102a is formed on a
semiconductor substrate 100 to define first active regions 104a.
The device isolation layer 102a may be formed by using an STI
technique. The top of the device isolation layer 102a may be higher
than that of the first active regions 104a. A 160 and a second
interlayer insulation layer 170 may be formed on the control gate
electrode(s) 150. A bit line(s) BL may be formed on the second
interlayer insulation layer 170. Further description of elements
previously discussed with respect to FIG. 4 will be omitted for
conciseness.
[0095] FIG. 6 is a perspective view illustrating a non-volatile
memory device according to further embodiments of the present
invention.
[0096] Referring to FIG. 6, a device isolation layer 102 is formed
on a semiconductor substrate 100 to define active regions 104. The
device isolation layer 102 may be formed using an STI technique.
The top of the device isolation layer 102 may be higher than that
of the active region 104. The tunnel insulation layer 110 may be
formed on the active region 104. The tunnel insulation layer 110
may be formed using a thermal oxide process. A charge storage
pattern 120 may be formed on the tunnel insulation layer 110 and
the device isolation layer 102. Each charge storage pattern 120 may
be separated from adjacent charge storage patterns 120. That is,
the charge storage patterns 120 formed on the active regions 104
may be separated from each other. The top of each charge storage
pattern 120 may have the same height as that of the device
isolation layer 102. An interface layer pattern 130, a blocking
insulation pattern 140, and a control gate electrode 150 may be
sequentially disposed on the charge storage pattern 120 and the
device isolation layer 102. Sidewalls of the charge storage pattern
120, the interface pattern 130, the blocking insulation pattern
140, and the control gate electrode 150 may be aligned with each
other. The interface layer pattern 130 may be formed of a
dielectric and may extend in a direction of the word line WL.
[0097] The interface layer pattern 130 may reduce transfer of
charges stored in the charge storage pattern 120. When the blocking
insulation pattern 140 includes a high-k dielectric layer, the
interface layer pattern 130 may reduce a leakage current between
the control gate electrode 150 and the charge storage pattern 120.
The interface layer pattern 130 may be formed of a material that
improves an interface junction characteristic between the blocking
insulation pattern 140 and the charge storage pattern 120. A first
interlayer insulation layer 160 and a second interlayer insulation
layer 170 may be formed on the control gate electrode(s) 150. A bit
line(s) BL may be formed on the second interlayer insulation layer
170. Further description of elements previously discussed with
respect to FIG. 4 will be omitted for conciseness.
[0098] FIG. 7 is a perspective view illustrating a non-volatile
memory device according to further embodiments of the present
invention.
tunnel insulation layer 110a may be formed on the first active
region 104a. The tunnel insulation layer 110a may be formed using a
thermal oxide process. First charge storage patterns 120a may be
formed on the tunnel insulation layer 110a. The first charge
storage patterns 120a may be separated from adjacent first charge
storage patterns 120. That is, the first charge storage patterns
120a formed on the first active regions 104a may be separated from
each other. The charge storage patterns 120a may be disposed
between adjacent first device isolation layers 102a. Accordingly,
tops of the first charge storage patterns 120a may be lower than
that of the device isolation layer 102a. First interface layer
patterns 130a may be disposed on the first charge storage patterns
120a. Top of the first interface layer patterns 130a may be
substantially even with tops of the first device isolation layer
102a. Additionally, first interface layer patterns 130a are
separated from other first interface layer patterns 130a disposed
on an adjacent active regions 104a.
[0099] A first blocking insulation pattern 140a and a first control
gate electrode 150a are sequentially disposed on the first
interface layer patterns 130a and the first device isolation layer
102a. The first interface layer patterns 130a may reduce transfer
of charges stored in the charge storage pattern 120a. When the
first blocking insulation pattern 140a includes a high-k dielectric
layer, the first interface layer pattern 130a may reduce a leakage
current between the first control gate electrode 150a and the first
charge storage pattern 120a. The first interface layer pattern 130a
may be formed of a material that improves an interface junction
characteristic between the first blocking insulation pattern 140a
and the first charge storage patterns 120a. A lower interlayer
insulation layer 160a may be formed on the first control gate
electrode(s) 150a.
[0100] A silicon single crystalline layer 180 may be formed on or
bonded to a semiconductor substrate 100 having the lower interlayer
insulation layer 160a. A second device isolation layer 102b is
formed in the silicon single crystalline layer 180 to define second
active regions 104b. The second device isolation layer 102b may be
formed using an STI technique. The top of the second device
isolation layer 102b is higher than that of the second active
regions 104b. A second tunnel insulation layer 110b is formed on
the second active regions 104b. The second tunnel insulation layer
110b may be formed using a thermal oxide process. Second charge
storage patterns 120b are formed on the second tunnel insulation
layers 110b. Each second charge storage pattern 120b may be
separated from adjacent second charge storage patterns 120b. That
is, the second charge storage patterns 120b formed on the second
active regions 104b are separated from each other. The second
charge storage pattern 120b may be disposed between adjacent second
device isolation layers 102b. Accordingly, the top of the second
charge storage patterns 120b may be lower than that of the second
device isolation layer 102b. Second interface layer patterns 130b
may be disposed on the second charge storage patterns 120b. The top
of the second interface layer pattern 130b may be substantially
even with tops of the second device isolation layer 1021).
Additionally, each second interface layer pattern 130b may be
separated from other second interface layer patterns 130b disposed
on an adjacent second active region 104b.
[0101] A second blocking insulation pattern 140b and a second
control gate electrode 150b are sequentially disposed on the second
interface layer patterns 130b and the second device isolation layer
102b. The second interface layer patterns 130b may reduce transfer
of charges stored in the second charge storage pattern 120b. That
is, when the second blocking insulation pattern 140b includes a
high-k dielectric layer, the second interface layer patterns 130b
may reduce a leakage current between the second control gate
electrode 150b and the second charge storage pattern 1201). The
second interface layer pattern 130b may be formed of a material for
that improves an interface junction characteristic between the
second blocking insulation pattern 140b and the second charge
storage pattern 1201). An upper interlayer insulation layer 190 may
be formed on the second control gate electrode(s) 150b. A bit
line(s) BL may be formed on the upper interlayer insulation layer
190.
[0102] FIGS. 9 through 13 are cross-sectional views illustrating a
non-volatile memory devices according to embodiments of the present
invention.
[0103] Referring to FIG. 9, a device isolation layer 202 may be
formed on/in a semiconductor substrate 200 to define an active
region 204. The device isolation layer 202 may be formed using a
shallow trench isolation (STI) technique. The top of the device
isolation layer 202 may be higher than that of the active region
204. A tunnel insulation layer 210 may be formed on the active
region 204. The tunnel insulation layer 210 may be formed using a
thermal oxide process. A charge storage pattern 220 is formed on
the tunnel insulation layer 210. The charge storage pattern 220 may
be separated from adjacent charge storage patterns 220. The charge
storage patterns 220 formed on the active regions 204 are separated
from each other. The top of the charge storage pattern 220 may be
higher than that of the device isolation layer 202. An interface
layer pattern 230 is formed on the charge storage pattern 220.
Sidewalls of the upper portion of the charge storage pattern 220
and sidewalls of the interface layer pattern 230 may be
substantially aligned with each other. The interface layer pattern
230 may be formed of a dielectric or a conductor. In greater
detail, if the interface layer pattern 230 is formed of a
dielectric, it may be formed by oxidizing a top portion of the
charge storage pattern 220 before patterning the charge storage
pattern 220. If the charge storage pattern 220 is formed of
polysilicon, the interface layer pattern 230 may be formed of a
metal silicide, or by depositing a material providing an improved
interface characteristic on the charge storage pattern 220.
[0104] A blocking insulation pattern 240 and a control gate
electrode 250 are sequentially disposed on the interface layer
pattern 230 and on the device isolation layer 202. The interface
layer pattern 230 reduces transfer of charges stored in the charge
storage pattern 220. That is, when the blocking insulation pattern
240 includes a high-k dielectric layer, the interface layer pattern
230 may reduce a leakage current between the gate electrode 250 and
the charge storage pattern 220. The interface layer pattern 230 may
be formed of a material that improves an interface junction
characteristic between the blocking insulation pattern 240 and the
charge storage pattern 220. The blocking insulation pattern 240 may
include a first blocking insulation pattern 240a, a second blocking
insulation pattern 240b, and a third blocking insulation pattern
240c. The first and third blocking insulation patterns 240a and
240c may be formed of a same material. Permittivities of the first
and third blocking insulation patterns 240a and 240c may be greater
than a permittivity of the second blocking insulation pattern 240b.
For example, the second blocking insulation pattern 240b is formed
of a silicon oxide layer and each of the first and third blocking
insulation patterns 240a and 240c may be formed of a high-k
dielectric layers such as an aluminum oxide layer.
[0105] Referring to FIG. 10, a device isolation layer 302 is formed
on/in a semiconductor substrate 300 to define an active region 304.
The device isolation layer 302 may be formed using an STI
technique. The top of the device isolation layer 302 may be higher
than that of the active region 304. A tunnel insulation layer 310
may be formed on the active region 304. The tunnel insulation layer
310 may be formed using a thermal oxide process. A charge storage
pattern 320 may be formed on the tunnel insulation layer 310. The
charge storage pattern 320 may be separated from a adjacent charge
storage patterns 320. That is, charge storage patterns 320 formed
on the active regions 304 may be separated from each other. A top
of the charge storage pattern 320 may be lower than that of the
device isolation layer 302. The top of an interface layer pattern
330 may be substantially even with a top of the device isolation
layer 302. A blocking insulation pattern 340 and a control gate
electrode 350 may be sequentially disposed on the interface layer
pattern 330 and the device isolation layer 302. The interface layer
pattern 330 may reduce transfer of charges stored in the charge
storage pattern 320. The interface layer pattern 330 may be formed
of a conductor, a semiconductor, or a dielectric. The charge
storage pattern 320 may be formed of polysilicon, and the interface
layer pattern 330 may be formed of a silicon oxide layer (i.e., a
dielectric layer), and the silicon oxide layer may be formed using
a thermal oxide process. If the interface layer pattern 330 is a
conductor, the interface layer pattern 330 may be formed using a
metal silicide process. In greater detail, the interface layer
pattern 330 may be formed using a silicide process. The interface
layer pattern 330 is not limited to metal silicide and may include
another conductive layer that may reduce a leakage current.
[0106] If the blocking insulation pattern 340 includes a high-k
dielectric layer, the interface layer pattern 330 can reduce a
leakage current between the control gate electrode 350 and the
charge storage pattern 320. The interface layer pattern 330 may be
formed of a material that improves an interface junction
characteristic between the blocking insulation pattern 340 and the
charge storage pattern 320. The blocking insulation pattern 340 may
include a first blocking insulation pattern 340a, a second blocking
insulation pattern 340b, and a third blocking insulation pattern
340c. The first blocking insulation pattern 340a and the third
blocking insulation pattern 340c may be formed of a same material.
Permittivities of the first blocking insulation pattern 340a and
the third blocking insulation pattern 340c may be higher than a
permittivity of the second blocking insulation pattern 340b. For
example, the second blocking insulation pattern 340b may be formed
of a silicon oxide layer and each of the first and third blocking
insulation patterns 340a and 340c may be formed of a high-k
dielectric layer such as an aluminum oxide layer. That is, high-k
dielectric layers may be used as the first and third blocking
insulation patterns 340a and 340c such that a coupling ratio may be
increased. A silicon oxide layer may be used as the second blocking
insulation pattern 340b to reduce leakage current.
[0107] According to modified embodiments of the present invention,
the first and third blocking insulation patterns 340a and 340c may
be formed of respective different materials. For example, the first
blocking insulation pattern may be formed of an aluminum oxide
layer and the third blocking insulation pattern may be formed of a
hafnium oxide layer.
[0108] Referring to FIG. 11, a device isolation layer 402 is formed
in a semiconductor substrate 400 to define an active region 404.
The device isolation layer 402 may be formed using an STI
technique. The top of the device isolation layer 402 may be higher
than that of the active region 404. A tunnel insulation layer 410
may be formed on the active region 404. The tunnel insulation layer
410 may be formed using a thermal oxide process. A charge storage
pattern 420 may be formed on the tunnel insulation layer 410. The
charge storage pattern 420 may be separated from adjacent charge
storage patterns 420. That is, charge storage patterns 420 formed
on the active regions 404 may be separated from each other. The top
of the charge storage pattern 420 may be substantially even with
the top of the device isolation layer 402. The blocking insulation
pattern 440 and the control gate electrode 450 may be sequentially
disposed on the interface layer pattern 430 and the device
isolation layer 402. The interface layer pattern 430 may reduce
transfer of charges stored in the charge storage pattern 420. The
interface layer pattern 430 may be formed of a dielectric. The
charge storage pattern 420 may be formed of polysilicon, and the
interface layer pattern 440 may be formed of a dielectric layer
such as silicon oxide layer.
[0109] If the blocking insulation pattern 440 includes a high-k
dielectric layer, the interface layer pattern 430 may reduce a
leakage current between the control gate electrode 450 and the
charge storage pattern 420. The interface layer pattern 430 may be
formed of a material that improves an interface junction
characteristic between the blocking insulation pattern 440 and the
charge storage pattern 420. The blocking insulation pattern 440 may
include a first blocking insulation pattern 440a, a second blocking
insulation pattern 440b, and a third blocking insulation pattern
440c. The first blocking insulation pattern 440a and the third
blocking insulation pattern 440c may be formed of a same material.
Permittivities of the first blocking insulation pattern 440a and
the third blocking insulation pattern 440c may be higher than a
permittivity of the second blocking insulation pattern 440b. For
example, the second blocking insulation pattern 440b may be formed
of a silicon oxide layer and each of the first and third blocking
insulation pattern 440a and 440c may be formed of a high-k
dielectric layer such as an aluminum oxide layer.
[0110] Referring to FIG. 12, a device isolation layer 502 is formed
on/in a semiconductor substrate 500 to define an active region 504.
The device isolation layer 502 may be formed using an STI
technique. The top of the device isolation layer 502 may be higher
than that of the active region 504. A tunnel insulation layer 510
may be formed on the active region 504. The tunnel insulation layer
510 may be formed using a thermal oxide process. A charge storage
pattern 520 may be formed on the tunnel insulation layer 510. The
charge storage pattern 520 may be separated from adjacent charge
storage patterns 520. That is, charge storage patterns 520 formed
on the active regions 504 may be separated from each other. The top
of the charge storage pattern 520 may be higher than a top of the
device isolation layer 502. The charge storage pattern 520 may be
separated from the device isolation layer 502. The interface layer
pattern 530 may be formed on the top surface and sidewalls of the
charge storage pattern 520. The interface layer pattern 530 may be
formed of a dielectric and/or a conductor. In greater detail, if
the interface layer pattern 530 is formed of a dielectric, it may
be formed by oxidizing a portion of the top surface and sidewalls
of the charge storage pattern 520. If the charge storage pattern
520 is formed of polysilicon, the interface layer pattern 530 may
be formed of metal silicide.
[0111] A blocking insulation pattern 540 and a control gate
electrode 559 are sequentially formed on the interface layer
pattern 530 and the device isolation layer 502. The interface layer
pattern 530 may reduce transfer of charges stored in the charge
storage pattern 520. If the blocking insulation pattern 540
includes a high-k dielectric layer, the interface layer pattern 530
can reduce a leakage current between the control gate electrode 550
and the charge storage pattern 520. The interface layer pattern 530
may be formed of a material that improves an interface junction
characteristic between the blocking insulation pattern 540 and the
charge storage pattern 520. The blocking insulation pattern 540 may
include a first blocking insulation pattern 540a, a second blocking
insulation pattern 540b, and a third blocking insulation pattern
540c. The first blocking insulation pattern 540a and the third
blocking insulation pattern 540c may be formed of the same
material. Permittivities of the first blocking insulation pattern
540a and the third blocking insulation pattern 540c may be higher a
permittivity that of the second blocking insulation pattern 540b.
For example, the second blocking insulation pattern 540b may be
formed of a silicon oxide layer and each of the first and third
blocking insulation patterns 540a and 540c may be formed of a
high-k dielectric layer such as an aluminum oxide layer.
[0112] Referring to FIG. 13, a device isolation layer 602 is formed
on/in a semiconductor substrate 600 to define an active region 604.
The device isolation layer 602 may be formed using an STI
technique. The top of the device isolation layer 602 may be higher
than that of the active region 604. The tunnel insulation layer 610
may be formed on the active region 604. The tunnel insulation layer
610 may be formed using a thermal oxide process. The charge storage
pattern 620 may be formed on the tunnel insulation layer 610. The
charge storage pattern 620 may cover a portion of the top of the
device isolation layer 602. The charge storage pattern 620 may be
separated from adjacent charge storage patterns 620. That is,
charge storage patterns 620 formed on the active regions 604 may be
separated from each other. A top surface of the charge storage
pattern 620 may be higher than that of the device isolation layer
602. The interface layer pattern 630 is formed on the top surface
of the charge storage pattern 620, sidewalls of the upper portion
of the charge storage pattern 620, and the device isolation layer
602 and extends thereon. The interface layer pattern 630 may be a
dielectric. In greater detail, the interface layer pattern 630 may
be formed of a silicon oxide layer.
[0113] A blocking insulation pattern 640 and a control gate
electrode 650 are sequentially-stacked on the interface layer
pattern 630 and the device isolation layer 602. The interface layer
pattern 630 may reduce transfer of charges stored in the charge
storage pattern 620. If the blocking insulation pattern 640
includes a high-k dielectric layer, the interface layer pattern 630
may reduce a leakage current between the control gate electrode 650
and the charge storage pattern 620. The interface layer pattern 630
may be formed of a material that improves an interface junction
characteristic between the blocking insulation pattern 640 and the
charge storage pattern 620. The blocking insulation pattern 640 may
include a first blocking insulation pattern 640a, a second blocking
insulation pattern 640b, and a third blocking insulation pattern
640c. The first blocking insulation pattern 640a and the third
blocking insulation pattern 640c may be formed of a same material.
Permittivities of the first blocking insulation pattern 640a and
the third blocking insulation pattern 640c may be higher than a
permittivity of the second blocking insulation pattern 640b. That
is, the second blocking insulation pattern 640b may be formed of a
silicon oxide layer and the first and third blocking insulation
pattern 640a and 640c may be formed of a high-k dielectric layer
such as an aluminum oxide layer.
[0114] Referring to FIGS. 9 through 13, the control gate electrodes
650, 550, 450, 350, and 250 may include at least one of
sequentially-stacked barrier metal/high work function metal,
sequentially-stacked high work function metal/barrier metal/metal,
sequentially-stacked doped polysilicon/barrier metal/metal,
sequentially-stacked metal/doped polysilicon, metal, and/or doped
polysilicon. A barrier metal may include at least one of a metal
nitride layer and a metal oxide nitride layer. A high work function
metal may be a conductive material whose work function is greater
than 4 eV. For example, a high work function metal may include at
least one of TaN, W, WN, TiN, and/or CoSi.sub.x.
[0115] FIGS. 14A through 14D are cross-sectional views illustrating
operations of fabricating a non-volatile memory device according to
some embodiments of the present invention. Moreover, FIGS. 14A
through 14D are taken along lines I-I' and of FIG. 3A.
[0116] Referring to FIG. 14A, the non-volatile memory device may be
formed using self aligned shallow trench isolation. In greater
detail, a tunnel insulation layer 410 and a charge storage layer
420 are stacked on a semiconductor substrate 400. The charge
storage layer 420, the tunnel insulation layer 410, and the
semiconductor substrate 400 are sequentially patterned to form a
trench 403. As a result, the tunnel insulation layer 410 and the
charge storage pattern 420 are formed on the semiconductor
substrate 400, and the trench 403 is aligned with sidewalls of the
charge storage pattern 420.
[0117] Referring to FIG. 14B, an insulation layer is filled in the
trench 403 to form the device isolation layer 402. The insulation
layer is planarized using etch back and/or chemical mechanical
polishing (CMP), and then removed until the charge storage pattern
420 is exposed. As a result, the charge storage pattern 420 is
provided on an active region between the device isolation layers
402. The top of the charge storage pattern 420 may have
substantially the same height as that of the device isolation layer
402.
[0118] Referring to FIG. 14C, an interface layer 430 and a blocking
insulation layer 442 are sequentially formed on an entire surface
of the resulting structure where the charge storage pattern 420 is
formed. The interface layer 430 may be a conductor, a
semiconductor, or a dielectric. The interface layer 430 may include
at least one of a silicon oxide layer, a silicon nitride layer,
and/or a silicon oxide nitride layer.
[0119] A blocking insulation layer 442 is formed on the interface
layer 430. The blocking insulation layer 442 may include a high-k
dielectric material and may be formed of a multilayer of at least
one layer selected from an aluminum oxide layer, a yttrium oxide
layer, a hafnium oxide layer, a tantalum oxide layer, a zirconium
oxide layer, and/or a titanium oxide layer. At this point, the
blocking insulation layer 430 may be formed with an equivalent
oxide thickness (EOT) to provide a required coupling ratio.
Generally, a non-volatile memory device requires an EOT in the
range of about 60 .ANG. (Angstroms) to 150 .ANG. (Angstroms).
[0120] The blocking insulation layer 442 includes a first blocking
insulation layer 442a, a second blocking insulation layer 442b, and
a third blocking insulation layer 442c, which are
sequentially-stacked. A permittivity of the second blocking
insulation layer 442b may be less than permittivities of the first
blocking insulation layer 442a and the third blocking insulation
layer 442c. For example, the first blocking insulation layer 442a
and the third blocking insulation layer 442c may be formed of a
high-k dielectric material, and the second blocking insulation
layer 442b may be formed of a silicon oxide layer.
[0121] The first blocking insulation layer 442a or the third
blocking insulation layer 442c may include at least one of a metal
oxide layer, a metal nitride layer, and/or a metal oxide nitride
layer, each of which has a higher permittivity than a silicon oxide
layer. The second blocking insulation layer 442b may include at
least one of a silicon oxide layer, a silicon oxide nitride layer,
a silicon nitride layer, a metal oxide layer, a metal nitride
layer, and/or a metal oxide nitride layer.
[0122] A control gate conductive layer 450 is formed on the
blocking insulation layer 442. Although the control gate conductive
layer 450 may be formed, for example, of polysilicon, it may also
be formed of a single layer or a multilayer of metal, a conductive
metal nitride layer, and/or a conductive oxide layer. The control
gate conductive layer 450 may include at least one of
sequentially-stacked barrier metal/high work function metal,
sequentially-stacked high work function metal/barrier metal/metal,
sequentially-stacked doped polysilicon/barrier metal/metal,
sequentially-stacked metal/doped polysilicon, metal, and/or doped
polysilicon. A barrier metal may include a metal nitride layer.
[0123] Referring to FIG. 14d, the control gate conductive layer
450, the blocking insulation layer 442, the interface layer 430,
and the charge storage pattern 420 are patterned to form a control
gate electrode 450, a blocking insulation pattern 440, an interface
layer pattern 430, and a charge storage pattern 420.
[0124] FIGS. 15A and 15B are respective plan and cross sectional
views illustrating a NOR non-volatile memory device according to
embodiments of the present invention. FIG. 15B is a cross-sectional
view taken along a line of FIG. 15A.
[0125] Referring to FIGS. 15A and 15B, the NOR non-volatile memory
device includes a semiconductor substrate 100 having a cell region.
A device isolation layer defines active regions 1500, 1510, and
1520. The first active regions 1500 are laterally arranged in a
first direction. Source strapping active regions 1510 are regularly
arranged in the first direction at both sides of the first active
regions 1500. Second active regions 1520 crossing over the first
active regions 1500 are laterally arranged in a second direction.
The second active regions 1520 serve as source lines.
[0126] A pair of word lines WL crosses over the first active
regions 1500 and the source strapping active regions 1510 and
extend in the second direction. Active regions disposed on the both
sides of the pair of word lines WL become drains of a transistor,
and an active region between the pair of word lines WL becomes a
source of the transistor. The drain of the transistor is
electrically connected to a bit line through a bit line contact
plug 1540.
[0127] Moreover, the sources of the transistor are electrically
connected to sources adjacent in the second direction through the
second active region 1520. Therefore, the second active region 1520
serves as a source line. A source contact 1530 is formed at a
position where the second active region 1520 and the source
strapping active region 1510 intersect.
[0128] The word line WL may include a tunnel insulation layer 110,
a charge storage pattern 120, an interface layer pattern 130, a
blocking insulation pattern 140, and a control gate electrode 150,
which are sequentially-stacked on the semiconductor substrate 100.
The interface layer pattern 130 reduces transfer of charges stored
in the charge storage pattern 120. That is, because the blocking
insulation pattern 140 is formed of a high-k dielectric layer, the
interface layer pattern 130 can reduce a leakage current between
the control gate electrode 150 and the charge storage pattern 120.
The interface layer pattern 130 may be formed of a material that
improves an interface junction characteristic between the blocking
insulation layer 140 and the charge storage pattern 120.
[0129] The charge storage pattern 120 may be formed of polysilicon.
The polysilicon may be in-situ doped polysilicon during a
deposition process. The charge storage pattern 120 is not limited
to polysilicon and may include at least one of doped silicon,
metal, and/or a metal compound.
[0130] The interface layer pattern 130 may include at least one of
a dielectric, a conductor, and/or a semiconductor. If the interface
layer pattern 130 is a dielectric, it may include at least one of a
silicon oxide layer, a silicon nitride layer, and/or a silicon
oxide nitride layer. For example, the charge storage pattern 120
may be formed of polysilicon, the blocking insulation pattern 140
may includes an aluminum oxide layer, and the interface layer
pattern 130 may be formed of a silicon oxide layer.
[0131] The blocking insulation pattern 140 may include a high-k
dielectric layer. The high-k dielectric layer may be a material
having a higher permittivity than a silicon oxide layer. The high-k
dielectric layer may increase the above-mentioned coupling ratio.
The blocking insulation pattern 140 may include a first blocking
insulation pattern, a second blocking insulation pattern, and a
third blocking insulation pattern, which are sequentially-stacked.
The permittivity of the second blocking insulation pattern may be
less than permittivities of the first and third blocking insulation
patterns. For example, aluminum oxide layers may be used for the
first and third blocking insulation patterns, and a silicon oxide
layer may be used for the second blocking insulation pattern. The
blocking insulation pattern may further include a fourth blocking
insulation pattern on the third blocking insulation pattern. The
fourth blocking insulation pattern may include the same material as
the second blocking insulation pattern. The first blocking
insulation pattern may include at least one of a metal oxide layer,
a metal nitride layer, and/or a metal oxide nitride layer, each of
which has a higher permittivity than a silicon oxide layer. The
metal oxide layer may include at least one of an aluminum oxide
layer, a hafnium oxide layer, a zirconium oxide layer, and/or a
hafnium aluminum oxide layer. The second blocking insulation
pattern may include at least one of a silicon oxide layer, a
silicon oxide nitride layer, a silicon nitride layer, a metal oxide
layer, a metal nitride layer, and/or a metal oxide nitride
layer.
[0132] The control gate electrode 150 may include at least one of
sequentially-stacked barrier metal/high work function metal,
sequentially-stacked high work function metal/barrier metal/metal,
sequentially-stacked doped polysilicon/barrier metal/metal,
sequentially-stacked metal/doped polysilicon, metal, and/or doped
polysilicon. A barrier metal may include at least one of a metal
nitride layer and/or a metal oxide nitride layer.
[0133] According to additional embodiments of the present
invention, the non-volatile memory device may be included in an
electronic system. Electronic systems will be described with
reference to FIG. 16.
[0134] FIG. 16 is a block diagram illustrating an electronic system
with a non-volatile memory device according to some embodiments of
the present invention.
[0135] Referring to FIG. 16, electronic system 1300 may include a
controller 1310, an input/output device 1320, and a memory device
1330, all of which may be connected to each other through a bus
1350. The bus 1350 provides a path through which data can be
transferred. The controller 1310 may include at least one of a
microprocessor, a digital signal processor, a microcontroller,
and/or logic devices capable performing similar functions thereof.
The input/output device 1320 may include at least one of a keypad
and a display device. The memory device 1330 is a device that
stores data. The memory device 1330 may store data or commands that
can be executed by the controller 1310. The memory device 1330 may
include at least one of the non-volatile memory devices disclosed
in the above mentioned embodiments. The electronic system 1300 may
further include an interface 1340 to transmit data to a
communication network and/or receive data from the communication
network. The interface 1340 may be coupled to the network via a
wired and/or wireless coupling. For example, the interface 1340 may
include an antenna or a wired/wireless transceiver.
[0136] The electronic system 1300 may be a mobile system, a
personal computer, an industrial computer, and/or a system that
performs various functions. For example, the mobile system may be a
personal digital assistant (PDA), a portable computer, a web
tablet, a mobile phone, a wireless phone, a laptop computer, a
memory card, a digital music system, or an information
transmitting/receiving system. If the electronic system 1300 is
equipment used for wireless communication, it may include a
communication interface protocol for third generation communication
systems such as Code Division Multiple Access (CDMA), Global System
for Mobile Communications (GSM), North American Digital Cellular
(NADC), Extended-Time Division Multiple Access (E-TDMA), and
CDMA2000.
[0137] Next, a memory card according to embodiments of the present
invention will be described with reference to FIG. 17.
[0138] Referring to FIG. 17, the memory card 1400 includes a
non-volatile memory device 1410 and a memory controller 1420. The
non-volatile memory device 1410 can store data and read the stored
data. The non-volatile memory device 1410 includes at least one of
the non-volatile memory devices disclosed in the above-mentioned
embodiments. The memory controller 1420 controls the non-volatile
memory device (e.g., a flash memory device) 1410 to read stored
data or store data therein in response to a read/write request of a
host.
[0139] A charge trap flash memory includes a charge storage pattern
that has an insulating material interposed between a control gate
electrode and a semiconductor substrate. A tunnel insulation
pattern is formed between the charge storage pattern and the
semiconductor substrate, and a blocking insulation pattern is
formed between the charge storage pattern and the control gate
electrode. The charge storage pattern has a trap site for storing
electric charges. Whether electric charges are charged in the trap
site or not is determined by information stored in the charge trap
flash memory.
[0140] The charge trap flash memory may reduce a parasitic
capacitance and a coupling coefficient of a control gate when
compared to a flash memory with a floating gate. Additionally, the
charge trap flash memory should maintain a certain state stored in
the charge storage pattern for a predetermined time (a retention
time).
[0141] While an erase operation is performed in a charge trap flash
memory with a silicon/oxide/nitride/oxide/silicon (SONOS) cell
structure, a back tunneling current may occur through a blocking
insulation pattern such that an operating speed of the erase
operation may be reduced. By using a high-k dielectric insulation
layer as the blocking insulation pattern, an electric field applied
to the high-k dielectric insulation layer can be reduced. A charge
trap flash memory may be provided with a
TaN/Al.sub.20.sub.3/Nitride/Oxide/Silicon (TANOS) cell structure.
Back tunneling current flowing through a high-k dielectric
insulation layer may control an amount of FN tunneling by
appropriately adjusting an energy band.
[0142] If an aluminum oxide layer Al.sub.2O.sub.3 is used as the
high-k dielectric insulation layer, an electric field applied to
the high-k dielectric insulation layer may be reduced and thus the
back tunneling current flowing through the high-k dielectric
insulation layer can be reduced. Additionally, the back tunneling
current can be further reduced by using a conductive material
(e.g., TaN, WN, TiN, CoSi.sub.x, polysilicon) having a high work
function of more than 4.5 eV as the control gate electrode.
[0143] On the other hand, since a high-k dielectric insulation
layer as the blocking insulation pattern may include a bulk trap
density, the bulk trap density can reduce a retention time of the
charge storage pattern and reliability of the charge trap flash
memory. To increase retention time and/or reliability, a plurality
of blocking insulation patterns can be used. The back tunneling
current can be adjusted by appropriately controlling an energy band
gap of the blocking insulation pattern.
[0144] The flash memory with a floating gate structure includes a
charge storage pattern that has a conductor interposed between a
control gate and a semiconductor substrate. A tunnel insulation
pattern is formed between the charge storage pattern and the
semiconductor substrate, and a blocking insulation pattern is
formed between the charge storage pattern and the control gate
electrode. The charge storage pattern may include a floating gate.
The floating gate may include a conductive material. Whether
electric charges are stored in the floating gate or not determines
information stored in the flash memory. The back tunneling current
can be adjusted by appropriately controlling an energy band gap of
the plurality of blocking insulation patterns.
[0145] FIGS. 18A and 18B are respective plan and cross sectional
views illustrating a NAND non-volatile memory device according to
embodiments of the present invention. FIG. 18B is a cross-sectional
view taken along a line IV-IV' of FIG. 18A.
[0146] Referring to FIGS. 18A and 18B, the NAND non-volatile memory
device according to embodiments of the present invention includes a
semiconductor substrate 2100 having a cell region. A device
isolation layer 2300 is disposed on the semiconductor substrate
2100. The device isolation layer 2300 defines active regions ACT.
The active regions ACT are laterally arranged in a first direction.
A string selection line SSL and a ground selection line GSL
laterally cross over the active regions ACT and also word lines WL
laterally cross over the active regions ACT between the string
selection line SSL and the ground selection ling GSL. The string
selection line SSL, the ground selection line GSL, and the word
lines WL laterally extend along a second direction perpendicular to
the first direction. The string selection line SSL, the word lines
WL, and the ground selection line GSL may be included in a cell
string group. Cell string groups may be repeatedly arranged along
the first direction in mirror symmetry.
[0147] Impurity regions 2200 corresponding to a source and a drain
may be disposed on active regions ACT on the both sides of each of
the string selection line SSL, the word lines WL, and the ground
selection lines GSL. A word line WL and the impurity regions 2200
on the both sides of the word line WL provide a cell transistor.
The ground selection line GSL and impurity regions 2200 on the both
sides of the ground selection line GSL provide a ground selection
transistor GST. The string selection line SSL and impurity regions
2200 on the both sides of the string selection line SSL provide a
string selection transistor SST.
[0148] The word line WL may include a tunnel insulation layer 2110,
a charge storage pattern 2120, a blocking insulation pattern 2150,
and a control gate electrode 2160. A hard mask pattern (not shown)
may be disposed on the control gate electrode 2160. The ground
selection line GSL and the string selection line SSL may have the
same structure as the word line WL. However, the widths of the
string selection ling SSL and the ground selection line GSL may be
different from that of the word line WL. Especially, the widths of
the string selection ling SSL and the ground selection line GSL may
be greater than the width of a word lines WL. Layers of the ground
and string selection lines GSL and SSL corresponding to the tunnel
insulation layer 2110, the charge storage pattern 2120, and the
blocking insulation pattern 2150 may be used as a gate insulation
layer of the ground and string selection transistors.
[0149] The tunnel insulation layer 2110, the charge storage pattern
2120, and the blocking insulation pattern 2150 may extend adjacent
another semiconductor substrate. The word lines WL may share the
tunnel insulation layer 2110, the charge storage pattern 2120, and
the blocking insulation pattern 2150. Additionally, the ground and
string selection lines GSL and SSL may share the tunnel insulation
layer 2110, the charge storage pattern 2120, and the blocking
insulation pattern 2150. A cell spacer (not shown) may be disposed
on the sidewalls of the control gate electrode 2160. The cell
spacer may be disposed on the extended blocking insulation pattern
2150.
[0150] The blocking insulation pattern 2150 may include a first
blocking insulation pattern 2150a, a second blocking insulation
pattern 2150b, and a third blocking insulation pattern 2150c.
[0151] FIGS. 19A and 19B are views illustrating a NOR non-volatile
memory device according to embodiments of the present invention.
FIG. 19B is a cross-sectional view taken along a line VI-VI' of
FIG. 19A.
[0152] Referring to FIGS. 19A and 19B, the NOR non-volatile memory
device according to embodiments of the present invention includes a
semiconductor substrate 2100 having a cell region. A device
isolation layer 2300 is disposed on the semiconductor substrate
2100. The device isolation layer 2300 defines active regions 2500,
2510, and 2520. The first active regions 2500 are arranged
laterally in a first direction. The source strapping active regions
2510 are regularly arranged in a first direction at the both sides
of the first active regions 2500. The second active regions 2520
that laterally cross over the first active regions 2500 are
disposed in a second direction. The second active regions 2520
serve as a source line.
[0153] A pair of word lines WL is disposed in the second direction
and crosses over the first active regions 2500 and the source
strapping active regions 2510. Active regions disposed on the both
sides of the pair of word lines become drains of a transistor, and
an active region between the pair of word lines becomes a source of
a transistor. The drain of the transistor is electrically connected
to a bit line through a bit line contact plug 2540.
[0154] Moreover, the sources of a transistor are electrically
connected to adjacent sources in the second direction through the
second active region 2520. Accordingly, the second active region
2520 serves as a source line. A source contact 2530 is formed at a
position where the second active region 2520 and the source
strapping active region 2510 intersect.
[0155] The word line WL includes a tunnel insulation pattern 2110,
a charge storage pattern 2120, a blocking insulation pattern 2150,
and a control gate electrode 2160, which are sequentially-stacked
on the semiconductor substrate 2100.
[0156] The tunnel insulation pattern 2110, the charge storage
pattern 2120, and the blocking insulation pattern 2150 may extend
in the second direction, and the word line WL may share the tunnel
insulation pattern 2110, the charge storage pattern 2120, and the
blocking insulation pattern 2150. A spacer (not shown) may be
disposed on the extended blocking insulation pattern 2150.
[0157] The blocking insulation pattern 2150 includes a first
blocking insulation layer 2150a, a second blocking insulation layer
2150b, and a third blocking insulation layer 2150c.
[0158] FIG. 20 is a cross-sectional view taken along a line V-V' of
FIG. 18A illustrating a charge trap non-volatile memory device
according to some embodiments of the present invention. FIGS. 21A
through 21D illustrate flat band energy band diagrams of a
non-volatile memory device according to embodiments of the present
invention.
[0159] Referring to FIGS. 20 and 21A through 21D, the non-volatile
memory device includes a tunnel insulation pattern 2110 formed on a
semiconductor substrate 2100, a charge storage pattern 2120 formed
on the tunnel insulation pattern 2110, a blocking insulation
pattern 2150 formed on the charge storage pattern 2120, and a
control gate electrode 2160 formed on the blocking insulation
pattern 2150. Additionally, a device isolation layer 2300 is formed
in the semiconductor substrate 2100 to define active regions ACT.
The charge storage pattern 2120 may not be separated by a unit
cell. The blocking insulation pattern 2150 includes a first
blocking insulation pattern 2150a, a second blocking insulation
pattern 2150b, and a third blocking insulation pattern 2150c, which
are sequentially-stacked. The first blocking insulation pattern
2150a and the third blocking insulation pattern may be formed of
the same material. An energy band gap E.sub.g2 of the second
blocking insulation pattern 2150b may be greater than energy band
gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. The device isolation layer
2300 is disposed on the semiconductor substrate 2100 to define
active regions ACT. This non-volatile memory device may have a
structure in which the charge storage pattern 2120 is not divided
by unit cells.
[0160] The semiconductor substrate 2100 may include one selected
from a single crystalline silicon layer, a silicon on insulator
(SOI), a silicon layer on a silicon germanium layer, a silicon
single crystalline layer on an insulation layer, and/or a
polysilicon layer on an insulation layer.
[0161] The tunnel insulation pattern 2110 may include at least one
of a silicon oxide layer, a silicon oxide nitride layer, and/or a
high-k dielectric material. The high-k dielectric material includes
at least one of an aluminum oxide layer, a hafnium oxide layer, a
hafnium aluminum oxide layer, a hafnium silicon oxide layer, a
zirconium oxide layer, and a tantalum oxide layer. The silicon
oxide layer may be a thermal oxide layer.
[0162] The charge storage pattern 2120 may be formed of a material
having traps to store electric charges. The charge storage pattern
2120 may include a dielectric layer. The charge storage pattern
2120 may include at least one of a silicon nitride layer, a metal
quantum dot, a silicon quantum dot, metal, doped silicon, and doped
germanium. A metal for the charge storage pattern 2120 may include
at least one of a pure metal and/or a metal compound. The charge
storage pattern 2120 may include a multilayer of at least one
selected from nano crystalline silicon, nano crystalline metal, a
germanium quantum dot, a metal quantum dot, and/or a silicon
quantum dot. The charge storage pattern 2120 may have a metal trap
site provided by metal doping. Additionally, a deep trap site may
be formed in an energy band of the charge storage pattern 2120
using a wet oxidation operation after the charge storage pattern
2120 is formed.
[0163] The blocking insulation pattern 2150 may include a first
blocking insulation pattern 2150a, a second blocking insulation
pattern 2150b, and a third blocking insulation pattern 2150c. The
first blocking insulation pattern 2150a is disposed on the charge
storage pattern 2120, the second blocking insulation pattern 2150b
is disposed on the first blocking insulation pattern 2150a, and the
third blocking insulation layer pattern 2150c is disposed on the
second blocking insulation pattern 2150b. Moreover, an energy band
gap E.sub.g3 of the second blocking insulation pattern 2150b may be
greater than energy band gaps E.sub.g1 of E.sub.g3 of the first
blocking insulation pattern 2150a and the third blocking insulation
pattern 2150c. The blocking insulation pattern 2150 may have a
permittivity and a charge trap. The charge trap density of the
blocking insulation pattern 2150 may increase in proportion to the
permittivity.
[0164] According to some embodiments of the present invention, a
permittivity of the second blocking insulation pattern 2150b may be
less than permittivities of the first and third blocking insulation
pattern 2150a and 2150c, and a charge trap density of the second
blocking insulation pattern 2150b may be less than charge trap
densities of the first and third blocking insulation pattern 2150a
and 2150c. The charge trap densities of the first blocking
insulation pattern 2150a, the second blocking insulation pattern
2150b, and the third blocking insulation pattern 2150c may be in
proportion to their permittivities.
[0165] The first and third blocking insulation patterns 2150a and
2150c may each include at least one of a metal oxide layer, a metal
nitride layer, and/or a metal oxide nitride layer. A metal oxide
layer may include at least one of a hafnium silicon oxide layer, a
zirconium oxide layer, a hafnium aluminum oxide layer, a hafnium
oxide layer, and/or an aluminum oxide layer.
[0166] The second blocking insulation pattern 2150b may include at
least one of a silicon oxide layer, a metal oxide layer, a metal
nitride layer, and/or a metal oxide nitride layer. The metal oxide
layer may include at least one of a hafnium silicon oxide layer, a
zirconium oxide layer, a hafnium aluminum oxide layer, a hafnium
oxide layer, and/or an aluminum oxide layer. The blocking
insulation pattern 2150 may be formed using an atomic layer
deposition (ALD), chemical vapor deposition (CVD), and/or physical
vapor deposition (PVD) process.
[0167] After the first blocking insulation pattern 2150a, the
second blocking insulation pattern 2150b, and the third blocking
insulation pattern 2150c are formed, an anneal process including at
least one of O.sub.2, N.sub.2, and NH.sub.3 and/or a plasma process
may be performed. By providing and anneal and/or a plasma process,
charge trap densities of the first blocking insulation pattern
2150a, the second blocking insulation pattern 2150b, and the third
blocking insulation pattern 2150c may be reduced.
[0168] The control gate electrode 2160 may be a conductive material
having a work function that is greater than 4.5 eV. For example,
the control gate electrode 2160 may include at least one of TaN,
polysilicon, W, WN, TiN, and/or CoSi.sub.x. The control gate
electrode 2160 may include another conductive material. For
example, the control gate electrode 2160 may include a structure of
a multilayered barrier metal and a high work function metal. The
high work function metal may have a work function of greater than
4.5 eV. The barrier metal may include at least one of a metal
nitride layer, a silicon nitride layer, and/or a combination
thereof, each of which may reduce reaction between the high work
function metal and the blocking insulation layer. The control gate
electrode 2160 may further include at least one of a high work
function metal and doped polysilicon interposed between the barrier
metal and the blocking insulation pattern 2150. The control gate
electrode 2160 may include at least one of sequentially-stacked
doped silicon and metal, a pure metal, and/or a metal containing
material.
[0169] Referring to FIG. 21A, an energy band gap E.sub.g2 of the
second blocking insulation pattern 2150b is greater than energy
band gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. A conduction band of the
second blocking insulation pattern 2150b is higher than conduction
bands of the first and third blocking insulation patterns 2150a and
2150c. A valence band of the second blocking insulation pattern
2150b is higher than valence bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0170] Referring to FIG. 21B, an energy band gap E.sub.g2 of the
second blocking insulation pattern 2150b is greater than energy
band gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. A conduction band of the
second blocking insulation pattern 2150b is higher than conduction
bands of the first and third blocking insulation patterns 2150a and
2150c. A valence band of the second blocking insulation pattern
2150b is lower than valence bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0171] Referring to FIG. 21C, an energy band gap E.sub.g2 of the
second blocking insulation pattern 2150b is greater than energy
band gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. A conduction band of the
second blocking insulation pattern 2150b is lower than conduction
bands of the first and third blocking insulation patterns 2150a and
2150c. A valence band of the second blocking insulation pattern
2150b is lower than valence bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0172] Referring to FIG. 21D, the blocking insulation pattern 2150
may further include a fourth blocking insulation pattern 2150d to
allow two materials having respectively different energy band gaps
to be alternately disposed. The fourth blocking insulation pattern
2150d is formed of the same material as the second blocking
insulation pattern 2150b. Accordingly, an energy band gap E.sub.g4
of the fourth blocking insulation pattern is the same as that of
the second blocking insulation 2150b. Additionally, according to
modified embodiments of the present invention, the blocking
insulation pattern 2150 may further include the fourth blocking
insulation pattern 2150d and a fifth blocking insulation pattern
(not shown). The fourth blocking insulation pattern 2150d is formed
of the same material as the second blocking insulation pattern
2150d, and the fifth blocking insulation layer may be formed of the
same material as the first blocking insulation pattern 2150a.
[0173] FIG. 22 illustrates an energy band diagram when a negative
erase voltage V.sub.0 is applied to a non-volatile memory device
according to embodiments of the present invention. FIG. 22
illustrates a state where electric charges stored in the charge
storage pattern 2120 are substantially and/or completely removed by
the negative erase voltage V.sub.0 applied from an external
source.
[0174] In more detail, when the negative erase voltage V.sub.0 is
applied between the control gate electrode 2160 of the
semiconductor substrate 2100, an electric field is generated in the
tunnel insulation pattern 2110, the charge storage pattern 2120,
and the blocking insulation pattern 2150. Each electric field may
be calculated using a voltage distribution model. A back tunneling
current flowing through the blocking insulation pattern 2150 may
depend on an electric field of the blocking insulation pattern
2150. The back tunneling current can be controlled by adjusting a
structure, a band gap, a thickness, and/or a permittivity of the
blocking insulation pattern 2150. Each electric filed may be
calculated as follows.
V i = V 0 t i t i + i j = 1 , i .noteq. j n = 5 ( ti i )
##EQU00001##
where the suffixes i and j may be 1 through 5. The suffixes 1
through 5 represent the tunnel insulation pattern 2110, the charge
storage pattern 2120, the first blocking insulation pattern 2150a,
the second blocking insulation pattern 2150b, and the third
blocking insulation pattern 2150d, respectively. The variable t
represents a thickness and the variables represents a
permittivity.
[0175] For example, by increasing the thicknesses of the first
blocking insulation pattern 2150a and the third blocking insulation
pattern 2150c having relatively high permittivities, electric
fields of the first blocking insulation pattern 2150a and the third
blocking insulation pattern 2150c can be reduced. The first
blocking insulation pattern 2150a and the third blocking insulation
pattern 2150c, however, may have a high charge trap density due to
a high permittivity. Moreover, electric charges captured in the
charge trap may easily transfer to an external electric field.
Accordingly, there may be limits to increasing thicknesses of the
first and second blocking insulation patterns 2150a and 2150c of
high permittivities.
[0176] On the other hand, by increasing a work function difference
between the third blocking insulation pattern 2150c and the control
gate electrode 2160, a threshold energy for generating a back
tunneling phenomenon may be increased to reduce a back tunneling
current. If an energy band gap of the second blocking insulation
pattern 2150b is less than energy band gaps of the third blocking
insulation pattern 2150c and the first blocking insulation pattern
2150c, electrons or electron holes may be stored in an energy well
of the second blocking insulation pattern 2150b. Accordingly, an
energy band of the second blocking insulation pattern 2150b may be
greater than energy bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0177] According to some embodiments of the present invention, the
permittivities and charge trap densities of each of the first
blocking insulation pattern 2150a and the third blocking insulation
pattern 2150c may be greater than a permittivity and a charge trap
density of the second blocking insulation pattern 2150b. Electric
charges trapped in the first blocking insulation pattern 2150a may
not easily pass through the second blocking insulation pattern
2150b due to an external electric field so that reliability may be
improved.
[0178] FIG. 23 is a cross-sectional view taken along a line V-V' of
FIG. 18A to illustrate a floating gate non-volatile memory device
according to other embodiments of the present invention. Further
description of elements previously discussed with respect to FIGS.
20 and 21 will be omitted for conciseness.
[0179] Referring to FIG. 23, the floating gate non-volatile memory
device includes a tunnel insulation pattern 2110 formed on a
semiconductor substrate 2100, a charge storage pattern 2120 formed
on the tunnel insulation pattern 2110, a blocking insulation
pattern 2150 formed on the charge storage pattern 2120, and a
control gate electrode 160 formed on the blocking insulation
pattern 2150. Moreover, a device isolation layer 2300 is formed in
the semiconductor substrate 2100 to define the active regions ACT.
The charge storage pattern 2120 may have a structure in which the
charge storage patterns 2120 of each unit cell are separated.
[0180] The charge storage pattern 2120 may be a floating gate, and
the charge storage pattern 2120 may include a conductive material.
The floating gate may include at least one of n-type conductive
polysilicon, p-type conductive polysilicon, metal, doped silicon,
and/or doped germanium.
[0181] The control gate electrode 2160 may include at least one of
polysilicon doped with a conductive material, metal, metal
silicide, a metal compound, and/or a multilayer structure
thereof.
[0182] FIGS. 24A through 24C illustrate flat band energy band
diagrams of a non-volatile memory device according to other
embodiments of the present invention. However, FIGS. 24A though 24C
illustrate energy band diagrams when doped polysilicon is used as
the charge storage pattern 2120 and doped polysilicon is used as
the control gate electrode 2160.
[0183] Referring to FIG. 24A, an energy band gap E.sub.g2 of the
second blocking insulation pattern 2150b is greater than energy
band gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. A conduction band of the
second blocking insulation pattern 2150b is higher than conduction
bands of the first and third blocking insulation patterns 2150a and
2150c. A valence band of the second blocking insulation pattern
2150b is higher than valence bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0184] Referring to FIG. 24B, an energy band gap E.sub.g2 of the
second blocking insulation pattern 2150b is greater than energy
band gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. A conduction band of the
second blocking insulation pattern 2150b is higher than conduction
bands of the first and third blocking insulation patterns 2150a and
2150c. A valence band of the second blocking insulation pattern
2150b is lower than valence bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0185] Referring to FIG. 24C, an energy band gap E.sub.g2 of the
second blocking insulation pattern 2150b is greater than energy
band gaps E.sub.g1 of E.sub.g3 of the first and third blocking
insulation patterns 2150a and 2150c. A conduction band of the
second blocking insulation pattern 2150b is lower than conduction
bands of the first and third blocking insulation patterns 2150a and
2150c. A valence band of the second blocking insulation pattern
2150b is lower than valence bands of the first and third blocking
insulation patterns 2150a and 2150c.
[0186] Referring to FIG. 24A again, according to modified
embodiments of the present invention, the blocking insulation 2150
may further include a fourth blocking insulation pattern (not
shown) to allow two materials having respectively different energy
band gaps to be alternately disposed. The fourth blocking
insulation pattern may be formed of the same material as the second
blocking insulation pattern 2150b. Accordingly, an energy band gap
of the fourth blocking insulation pattern is the same as that of
the second blocking insulation. Additionally, according to modified
embodiments of the present invention, the blocking insulation
pattern 2150 may further include the fourth blocking insulation
pattern and a fifth blocking insulation patter (not shown). The
fourth blocking insulation pattern is formed of the same material
as the second blocking insulation pattern 2150d, and the fifth
blocking insulation layer may be formed of the same material as the
first blocking insulation pattern 2150a.
[0187] According to additional embodiments of the present
invention, non-volatile memory devices disclosed in the
above-mentioned embodiments may be included in an electronic
system.
[0188] According to some embodiments of the present invention, by
forming an interface layer pattern between a charge storage pattern
and a blocking insulation pattern, a leakage current between the
charge storage pattern and the blocking insulation pattern may be
reduced and reliability of a non-volatile memory device may be
improved.
[0189] According to some embodiments of the present invention, by
inserting a large region that includes a plurality of blocking
insulation patterns and has a large energy band gap, a retention
time of a non-volatile memory device may be extended and also its
operating speed may be improved by reducing a back tunneling
current.
[0190] The above-disclosed subject matter is to be considered
illustrative, and not restrictive, and the appended claims are
intended to cover all such modifications, enhancements, and other
embodiments, which fall within the true spirit and scope of the
present invention. Thus, to the maximum extent allowed by law, the
scope of the present invention is to be determined by the broadest
permissible interpretation of the following claims and their
equivalents, and shall not be restricted or limited by the
foregoing detailed description.
* * * * *