U.S. patent application number 14/107836 was filed with the patent office on 2014-04-17 for die mounting substrate and method of fabricating the same.
This patent application is currently assigned to SAMSUNG ELECTRO-MECHANICS CO., LTD.. The applicant listed for this patent is SAMSUNG ELECTRO-MECHANICS CO., LTD.. Invention is credited to Jun Oh HWANG, Eung Suek LEE, Jee Soo MOK.
Application Number | 20140106510 14/107836 |
Document ID | / |
Family ID | 44061271 |
Filed Date | 2014-04-17 |
United States Patent
Application |
20140106510 |
Kind Code |
A1 |
LEE; Eung Suek ; et
al. |
April 17, 2014 |
DIE MOUNTING SUBSTRATE AND METHOD OF FABRICATING THE SAME
Abstract
In accordance with various embodiments, there is provided a
method of fabricating a die mounting substrate, including the steps
of preparing a mounting substrate including a pad and a die
including a terminal, and printing a conductive paste bump on one
of the pad or the terminal. The method further includes the step of
connecting the pad and the terminal to each other using the
conductive paste bump, thereby surface-mounting the die on the
mounting substrate.
Inventors: |
LEE; Eung Suek; (Seoul,
KR) ; MOK; Jee Soo; (Gyunggi-do, KR) ; HWANG;
Jun Oh; (Gyunggi-do, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
Gyunggi-do |
|
KR |
|
|
Assignee: |
SAMSUNG ELECTRO-MECHANICS CO.,
LTD.
Gyunggi-do
KR
|
Family ID: |
44061271 |
Appl. No.: |
14/107836 |
Filed: |
December 16, 2013 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12714077 |
Feb 26, 2010 |
8633396 |
|
|
14107836 |
|
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Current U.S.
Class: |
438/124 |
Current CPC
Class: |
H01L 2924/01074
20130101; H05K 3/321 20130101; H01L 24/11 20130101; H01L 2924/14
20130101; H01L 2224/16 20130101; H01L 2924/0001 20130101; H05K
2201/10977 20130101; H01L 2924/01005 20130101; H01L 2924/01047
20130101; H01L 2924/01078 20130101; H01L 2924/01006 20130101; H01L
2224/13099 20130101; H01L 2224/13016 20130101; H01L 2924/01029
20130101; H01L 2224/1132 20130101; H01L 2224/13147 20130101; H01L
24/13 20130101; H01L 2224/13147 20130101; H01L 2924/01033 20130101;
H01L 2924/014 20130101; H01L 2224/11901 20130101; H01L 2924/14
20130101; H01L 24/81 20130101; H01L 24/16 20130101; H01L 21/563
20130101; H01L 2924/01013 20130101; H05K 2201/10674 20130101; H01L
2224/13099 20130101; H01L 2924/00014 20130101; H01L 2924/00014
20130101; H01L 2924/00 20130101; H01L 2924/0001 20130101; H01L
2224/13139 20130101; H01L 2224/13139 20130101; H01L 24/742
20130101 |
Class at
Publication: |
438/124 |
International
Class: |
H01L 23/00 20060101
H01L023/00 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 25, 2009 |
KR |
10-2009-0114719 |
Claims
1. A method of fabricating a die mounting substrate, comprising:
(A) preparing a mounting substrate comprising a pad and a die
including a terminal; (B) printing a conductive paste bump on one
of the pad or the terminal; and (C) connecting the pad and the
terminal to each other using the conductive paste bump, thereby
surface-mounting the die on the mounting substrate.
2. The method as set forth in claim 1, wherein the conductive paste
bump is printed by means of a screen printer using a conductive
paste to have a predetermined height through continuous
printing.
3. The method as set forth in claim 1, wherein one side of the
conductive paste bump comprises a size same as the pad, and the
other side of the conductive bump comprises a size same as the
terminal.
4. The method as set forth in claim 1, wherein the conductive paste
bump comprises a cross-sectional shape of a trapezoid or an
inverted trapezoid.
5. The method as set forth in claim 1, wherein the conductive paste
bump comprises copper, silver, or carbon nanotubes.
6. The method as set forth in claim 1, further comprising: (D)
applying an underfill resin between the mounting substrate and the
die, after (C).
Description
RELATED APPLICATION
[0001] This application is a divisional application of U.S. patent
application Ser. No. 12/714,077, filed on Feb. 26, 2010, and claims
the benefit of and priority to Korean Patent Application No. KR
10-2009-0114719, filed on Nov. 25, 2009, all of which are
incorporated herein by reference in their entirety into this
application.
BACKGROUND
[0002] 1. Field of the Invention
[0003] The present invention relates to die mounting substrate and
a method of fabricating the same.
[0004] 2. Description of the Related Art
[0005] With the recent reduction in size and fabrication cost of
electronic apparatuses, electronic components such as semiconductor
chips or packages for molding the semiconductor chips, including
BGA, CSP, WLP and so on, are surface-mounted on a mounting
substrate by a flip chip bonding process using a solder base
material (solder ball).
[0006] However, the flip chip bonding process using solder balls is
difficult to apply when a mounting substrate has the same size as
that of an electronic component. In particular, in the case where
soldering is performed using a typical solder paste having an
average particle size of 5.about.20 .mu.m, solder balls have a
diameter of 105.about.120 .mu.m, undesirably making it difficult to
cope with fineness of a circuit pattern. Also, because solder balls
subjected to reflow have a spherical shape, the adhesion area of
the solder balls to the circuit pattern is reduced, undesirably
weakening an interfacial adhesion force and bringing adjacent
solder balls into contact with each other. As well, in order to
solve problems with reliability resulting from different
coefficients of thermal expansion between the mounting substrate
and the electronic component, shear stress should be relieved at
the connection portions. In the case where the height of solder
balls is increased, shear stress at the connection portions may be
relieved. However, limitations are imposed on increasing the height
of solder balls which use a solder base material.
[0007] With the goal of solving the above problems, there have been
proposed methods of forming copper pillars on the mounting
substrate or electronic component through plating and
photolithography and then printing solder balls thereon, but the
plating and photolithography increase the process costs and are
complicated, undesirably lowering the process yield.
[0008] In addition, although attempts to use a double solder ball
structure are being made, problems of interfacial adhesion force of
the solder balls to the circuit pattern being reduced due to
fineness of the circuit pattern and of adjacent solder balls coming
into contact with each other still occur.
SUMMARY
[0009] Accordingly, the present invention has been made keeping in
mind the problems encountered in the related art and the present
invention is intended to provide a die mounting substrate in which
shear stress is relieved thus preventing reliability from
decreasing due to a difference in the coefficient of thermal
expansion between a die and a mounting substrate and also
preventing a force of adhesion of bumps from decreasing due to the
fineness of a circuit pattern, and a method of fabricating the
same.
[0010] In accordance with at least one embodiment, there is
provided a die mounting substrate, including a mounting substrate
having a pad, a die having a terminal and surface-mounted on the
mounting substrate, and a conductive paste bump formed on the pad
or the terminal so as to connect the pad and the terminal to each
other.
[0011] In accordance with an embodiment, the conductive paste bump
has the same size as the pad or the terminal on which the
conductive paste bump is formed.
[0012] In accordance with another embodiment, one side of the
conductive paste bump has the same size as the pad, and the other
side of the conductive bump has the same size as the terminal.
[0013] In accordance with another embodiment, the conductive paste
bump has the cross-sectional shape of a trapezoid or an inverted
trapezoid.
[0014] In accordance with another embodiment, the conductive paste
bump includes copper, silver, or carbon nanotubes.
[0015] In accordance with another embodiment, an underfill resin is
applied between the mounting substrate and the die.
[0016] In accordance with at least one embodiment, there is
provided a method of fabricating the die mounting substrate,
including (A) preparing a mounting substrate having a pad and a die
having a terminal, (B) printing a conductive paste bump on the pad
or the terminal, and (C) connecting the pad and the terminal to
each other using the conductive paste bump, thus surface-mounting
the die on the mounting substrate.
[0017] In accordance with an embodiment, the conductive paste bump
is printed by means of a screen printer using a conductive paste to
have a predetermined height through continuous printing.
[0018] In accordance with another embodiment, one side of the
conductive paste bump has the same size as the pad, and the other
side of the conductive bump has the same size as the terminal.
[0019] In accordance with another embodiment, the conductive paste
bump has the cross-sectional shape of a trapezoid or an inverted
trapezoid.
[0020] In accordance with another embodiment, the conductive paste
bump includes copper, silver, or carbon nanotubes.
[0021] In accordance with another embodiment, the method further
includes (D) applying an underfill resin between the mounting
substrate and the die, after (C).
[0022] Various objects, advantages and features of the invention
will become apparent from the following description of embodiments
with reference to the accompanying drawings.
BRIEF DESCRIPTION OF DRAWINGS
[0023] These and other features, aspects, and advantages of the
invention are better understood with regard to the following
Detailed Description, appended Claims, and accompanying Figures. It
is to be noted, however, that the Figures illustrate only various
embodiments of the invention and are therefore not to be considered
limiting of the invention's scope as it may include other effective
embodiments as well.
[0024] FIGS. 1A and 1B are cross-sectional views showing die
mounting substrates, in accordance with embodiments of the
invention.
[0025] FIGS. 2 to 5 are cross-sectional views sequentially showing
a process of fabricating a die mounting substrate, in accordance
with embodiments of the invention.
[0026] FIG. 6 is a schematic top plan view showing a screen printer
used for bump printing, in accordance with an embodiment of the
invention.
[0027] FIG. 7 is a schematic cross-sectional view showing a
printing portion of the screen printer of FIG. 6, in accordance
with embodiments of the invention.
DETAILED DESCRIPTION
[0028] The present invention will now be described more fully
hereinafter with reference to the accompanying drawings, which
illustrate embodiments of the invention. This invention may,
however, be embodied in many different forms and should not be
construed as limited to the illustrated embodiments set forth
herein. Rather, these embodiments are provided so that this
disclosure will be thorough and complete, and will fully convey the
scope of the invention to those skilled in the art. Like numbers
refer to like elements throughout. Prime notation, if used,
indicates similar elements in alternative embodiments.
Die Mounting Substrate
[0029] FIGS. 1A and 1B are cross-sectional views showing die
mounting substrates, in accordance with embodiments of the
invention. With reference to these drawings, the die mounting
substrates 100a, 100b according to the embodiments of the present
invention are described below.
[0030] As shown in FIGS. 1A and 1B, the die mounting substrate
100a, 100b according to the present embodiment is configured such
that pads 132 of a mounting substrate 130 and terminals 112 of a
die 110 are connected to each other using conductive paste bumps
120 and the die 110 is surface-mounted on the mounting substrate
130. Specifically, in the present embodiment, the die 110 is
connected and mounted on the mounting substrate 130 not using
solder balls but using conductive paste bumps 120.
[0031] The die 110 is configured such that the terminals 112 are
formed on the upper surface of a wafer chip body made of silicon
and including an integrated circuit (not shown) therein so as to
form an electrical connection to the integrated circuit, and a
passivation layer is formed on the upper surface of the wafer chip
body to expose the terminals 112.
[0032] The conductive paste bumps 120 are used to connect the
terminals 112 of the die 110 and the pads 132 of the mounting
substrate 130 to each other, and are provided between the terminals
112 of the die 110 and the pads 132 of the mounting substrate
130.
[0033] As such, the conductive paste bumps 120 are formed to have
the same size as the terminals 112 or the pads 132 on which they
are formed, thus enlarging the adhesion area to thereby enhance the
force of adhesion. This is possible because the conductive paste
bumps 120 are formed by printing a conductive paste using a screen
printing process, without an additional reflow process. The
formation method thereof is described below.
[0034] For example, as shown in FIG. 1A, in the case where the
conductive paste bumps 120 are formed on the terminals 112 of the
die 110 and are mounted in inverted form on the mounting substrate,
the conductive paste bumps 120 have the cross-sectional shape of an
inverted trapezoid, and one side of the conductive paste bumps 120
is formed to have the same size as do the terminals 112. As shown
in the cross-sectional view, the diameter D1 of one side of the
conductive paste bumps 120 formed on the terminals 112 is formed to
be the same as the width W1 of the terminals 112. Typically, the
terminals 112 of a die 110 are smaller than the pads 132 of a
mounting substrate. Thus, in the case where the conductive paste
bumps 120 are formed to have the cross-sectional shape of an
inverted trapezoid on the terminals 112, the diameter D2 of the
other side of the conductive paste bumps 120 is smaller than the
width W2 of the pads 132.
[0035] As shown in FIG. 1B, in the case where the conductive paste
bumps 120 are formed on the pads 132 of the mounting substrate 130
and are mounted on the mounting substrate 130, the conductive paste
bumps 120 have the cross-sectional shape of a trapezoid, and one
side of the conductive paste bumps 120 in contact with the pads 132
is formed to have the same size as do the pads 132. As shown in the
cross-sectional view, the diameter D1 of one side of the conductive
paste bumps 120 formed on the pads 132 is formed to be the same as
the width W2 of the pads 132. Because the diameter D2 of the other
side of the conductive paste bumps 120 having the trapezoidal shape
is formed to be smaller than the diameter D1 of one side thereof,
the diameter D2 of the other side of the conductive paste bumps 120
in contact with the terminals 112 is made to be the same as the
width W1 of the terminals 112, thus maximizing the area of contact
between the terminals 112 and the conductive paste bumps 120.
[0036] In accordance with at least one embodiment, the conductive
paste bumps 120 is made of any conductive material, for example,
copper (Cu) or silver (Ag) paste. In the case of the Ag paste,
because the Ag particles have an average diameter of about
1.about.3 .mu.m, it is possible to print the conductive paste bumps
120 having a diameter of about 80 .mu.m, thus coping with fineness
of the terminals 112 or the pads 132.
[0037] In addition, as shown in Table 1 below, the conductive paste
bumps 120, according to an embodiment of the invention, includes
carbon nanotubes having much higher electrical properties compared
to a metal material such as aluminum or copper which is superior in
terms of electrical conductivity and specific resistance, thus
improving interlayer connection reliability and increasing heat
dissipating efficiency.
TABLE-US-00001 TABLE 1 Physical property Carbon Nanotubes
Comparative Materials Density 1.33~1.40 g/cm.sup.3 2.7 g/cm.sup.3
(Al) Current density 1 .times. 10.sup.9 A/cm.sup.2 1 .times.
10.sup.6 A/cm.sup.2 (copper cable) Thermal 6000 W/mK 400 W/mk
(copper) conductivity Specific 1 .times. 10.sup.-10 .OMEGA.cm 1
.times. 10.sup.-10 .OMEGA. (copper) resistance
[0038] The mounting substrate 130 indicates a printed circuit board
on which the die 110 is mounted. The configuration thereof is not
particularly limited, and any configuration may be used so long as
pads 132 are formed on an insulating layer.
[0039] In order to improve reliability of the connection of the
conductive paste bumps 120 for connecting the die 110 and the
mounting substrate 130 and to protect the substrate from the
external environment, an underfill resin 140 is applied between the
die 110 and the mounting substrate 130.
Fabrication of Die Mounting Substrate
[0040] FIGS. 2 to 5 are cross-sectional views sequentially showing
the process of fabricating the die mounting substrate, in
accordance with embodiments of the invention. With reference to
these drawings, the method of fabricating the die mounting
substrate according to the present embodiment is described
below.
[0041] As shown in FIG. 2, conductive paste bumps 120 are printed
on the terminals 112 of a wafer chip 110a.
[0042] As such, the conductive paste bumps 120, in accordance with
at least one embodiment, is printed on the terminals of the wafer
chip 110a using a screen printing process for printing bumps in
which conductive paste is transferred via a mask having openings.
Specifically, the screen printing process is performed by applying
the conductive paste on the upper surface of the mask and then
pressing the conductive paste using a squeegee so that the
conductive paste is transferred onto the terminals via the openings
of the mask, and enables the formation of bumps having the desired
height and shape by controlling the number of continuous cycles of
a screen printer, the printing speed of a screen printer, the
viscosity and thixotropy of a conductive paste, and the aspect
ratio of a mask.
[0043] The conductive paste bumps 120 are formed such that the
diameter D1 of one side of the conductive paste bumps 120 connected
to the terminals 112 is greater than the diameter D2 of the other
side thereof, so that the whole assumes, for example, the
cross-sectional shape of a trapezoid. Because the conductive paste
bumps 120 are formed such that the one side of the conductive paste
bumps 120 connected to the terminals 112 has the same shape as the
terminals 112, that is, D1=W1, the area of contact is enlarged thus
enhancing the force of adhesion of the conductive paste bumps 120
to the terminals 112.
[0044] In accordance with at least one embodiment, the height of
the conductive paste bumps 120 is increased by controlling the
number of continuous cycles of a screen printer, and the viscosity
and thixotropy of the conductive paste. For example, in the case
where the conductive paste has a viscosity and thixotropy adapted
for high printability, the number of continuous cycles of the
screen printer is increased, thus increasing the height of the
conductive paste bumps 120. In addition, the shape of the
conductive paste bumps 120 is varied by controlling the printing
speed of the screen printer, the viscosity and thixotropy of the
conductive paste, and the aspect ratio of the mask. As such, as the
shape of the conductive paste bumps 120 is controlled, the area of
contact with the terminals is increased, thus improving reliability
of adhesion.
[0045] Next, as shown in FIG. 3, the wafer chip 110a is cut along
the dicing line DL using a dicing device, thus preparing the die
110 on which the conductive paste bumps 120 are printed on the
terminals 112.
[0046] Next, as shown in FIG. 4, the conductive paste bumps 120 are
connected to the pads 132 of the mounting substrate 130, thereby
surface-mounting the die 110 on the mounting substrate 130.
[0047] Finally, as shown in FIG. 5, an underfill resin 140 is
applied between the die 110 and the mounting substrate 130 using a
dispensing process and is then cured, thus completing the die
mounting substrate 100a.
[0048] The method of fabricating the die mounting substrate 100a of
FIG. 1A is described as above, and may be applied to the
fabrication of the die mounting substrate 100b of FIG. 1B, as is
apparent to those skilled in the art. Specifically, the conductive
paste bumps 120 are formed on the pads 132 of the mounting
substrate 130, the die 110 is mounted thereon, and the underfill
resin 140 is applied, thus fabricating the die mounting substrate
100b as shown in FIG. 1B.
Screen Printer
[0049] FIG. 6 is a top plan view schematically showing a screen
printer used for printing the bumps, in accordance with an
embodiment of the invention. FIG. 7 is a cross-sectional view
schematically showing the printing portion of the screen printer of
FIG. 6, in accordance with embodiments of the invention. The screen
printer 200 is described below with reference to these
drawings.
[0050] As shown in FIGS. 6 and 7, a screen printer 200 is moved in
the directions of X, Y, Z and .theta., and includes a printing
table 210 on which a printing member 220 is mounted through vacuum
adsorption, a mask 230 which is installed in a non-contact state on
the printing table 210 and has a plurality of openings 232 for
printing the bumps, and a squeegee 240.
[0051] The mask 230 includes plate lifters 234a, 234b for lifting
the side portions of the mask 230 upward so that the spread of
bumps is minimized thus maintaining the shape of bumps and also so
that the printed bumps are not brought into contact with the mask
thus improving the quality of the printing, depending on the
direction of movement of the squeegee 240. As such, the plate
lifters 234a, 234b include a first plate lifter 234a and a second
plate lifter 234b provided at both sides of the mask 230 in order
to enable the separation of the plate along the direction of
movement of the squeegee 240. For example, in the case where the
squeegee is moved in a first printing direction (to the right in
the drawing), the first plate lifter 234a lifts one side of the
mask 230 upward so that the printed bumps are not brought into
contact with the mask 230. In contrast, in the case where the
squeegee is moved in a second printing direction (to the left in
the drawing), the second plate lifter 234b lifts the other side of
the mask 230 upward so that the printed bumps are not brought into
contact with the mask 230.
[0052] The squeegee 240 functions to press the paste into the
openings of the mask so that the bumps are printed on the printing
member 220, and includes a squeegee holder 242 and a squeegee
rubber 244 removably mounted to the squeegee holder 242. The
squeegee 240 is moved upward/downward and rightward/leftward by a
squeegee driving portion (not shown).
[0053] As described hereinbefore, the present invention provides a
die mounting substrate and a method of fabricating the same.
According to the present invention, a die is connected and mounted
on a mounting substrate using conductive paste bumps, thus
relieving shear stress, and thereby preventing the reliability from
decreasing due to a difference in the coefficient of thermal
expansion between the die and the mounting substrate and also
preventing the force of adhesion of bumps from decreasing due to
the reduction in size of the pads formed on the mounting
substrate.
[0054] Also, according to the present invention, it is easy to
control the height and shape of the conductive paste bumps for
connecting the die and the mounting substrate, thus coping with the
fineness of a circuit pattern and increasing the height of bumps,
thereby relieving shear stress at the connected portions.
[0055] Embodiments of the present invention may suitably comprise,
consist or consist essentially of the elements disclosed and may be
practiced in the absence of an element not disclosed. For example,
it can be recognized by those skilled in the art that certain steps
can be combined into a single step.
[0056] The terms and words used in the present specification and
claims should not be interpreted as being limited to typical
meanings or dictionary definitions, but should be interpreted as
having meanings and concepts relevant to the technical scope of the
present invention based on the rule according to which an inventor
can appropriately define the concept of the term to describe the
best method he or she knows for carrying out the invention.
[0057] The singular forms "a," "an," and "the" include plural
referents, unless the context clearly dictates otherwise.
[0058] As used herein and in the appended claims, the words
"comprise," "has," and "include" and all grammatical variations
thereof are each intended to have an open, non-limiting meaning
that does not exclude additional elements or steps.
[0059] Ranges may be expressed herein as from about one particular
value, and/or to about another particular value. When such a range
is expressed, it is to be understood that another embodiment is
from the one particular value and/or to the other particular value,
along with all combinations within said range.
[0060] Although the present invention has been described in detail,
it should be understood that various changes, substitutions, and
alterations can be made hereupon without departing from the
principle and scope of the invention. Accordingly, the scope of the
present invention should be determined by the following claims and
their appropriate legal equivalents.
* * * * *