U.S. patent application number 14/052024 was filed with the patent office on 2014-04-17 for cmos image sensors with photogate structures and sensing transistors, operation methods thereof, and image processing systems including the same.
The applicant listed for this patent is Young Gu JIN, Ju Hwan JUNG, Min Ho KIM, Tae Chan KIM, Kwang Hyun LEE, Tae Yon LEE, Dong Ki MIN, Tae Seok OH, Sang Chul SUL. Invention is credited to Young Gu JIN, Ju Hwan JUNG, Min Ho KIM, Tae Chan KIM, Kwang Hyun LEE, Tae Yon LEE, Dong Ki MIN, Tae Seok OH, Sang Chul SUL.
Application Number | 20140103413 14/052024 |
Document ID | / |
Family ID | 50474612 |
Filed Date | 2014-04-17 |
United States Patent
Application |
20140103413 |
Kind Code |
A1 |
JIN; Young Gu ; et
al. |
April 17, 2014 |
CMOS IMAGE SENSORS WITH PHOTOGATE STRUCTURES AND SENSING
TRANSISTORS, OPERATION METHODS THEREOF, AND IMAGE PROCESSING
SYSTEMS INCLUDING THE SAME
Abstract
ACMOS image sensor includes a pixel array having a plurality of
pixels. Each of the plurality of pixels includes: a photogate
structure configured to be controlled based on a first gate
voltage; and a sensing transistor including a charge pocket region
formed in a substrate region, the sensing transistor being
configured to be controlled based on a second gate voltage. Based
on the first gate voltage, the photogate structure is configured to
integrate charges generated in response to light incident on the
substrate region. The sensing transistor is configured to adjust at
least one of a threshold voltage of the sensing transistor and a
current flow in the sensing transistor according to charges
transferred from the photogate structure to the charge pocket
region based on a difference between the first gate voltage and the
second gate voltage.
Inventors: |
JIN; Young Gu; (Osan-si,
KR) ; KIM; Min Ho; (Seongnam-si, KR) ; KIM;
Tae Chan; (Yongin-si, KR) ; MIN; Dong Ki;
(Seoul, KR) ; SUL; Sang Chul; (Suwon-si, KR)
; OH; Tae Seok; (Seoul, KR) ; LEE; Kwang Hyun;
(Seongnam-si, KR) ; LEE; Tae Yon; (Seoul, KR)
; JUNG; Ju Hwan; (Seoul, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
JIN; Young Gu
KIM; Min Ho
KIM; Tae Chan
MIN; Dong Ki
SUL; Sang Chul
OH; Tae Seok
LEE; Kwang Hyun
LEE; Tae Yon
JUNG; Ju Hwan |
Osan-si
Seongnam-si
Yongin-si
Seoul
Suwon-si
Seoul
Seongnam-si
Seoul
Seoul |
|
KR
KR
KR
KR
KR
KR
KR
KR
KR |
|
|
Family ID: |
50474612 |
Appl. No.: |
14/052024 |
Filed: |
October 11, 2013 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
61713175 |
Oct 12, 2012 |
|
|
|
Current U.S.
Class: |
257/292 |
Current CPC
Class: |
H04N 5/378 20130101;
H01L 27/14643 20130101; H04N 5/374 20130101; H01L 27/14614
20130101; H04N 5/3742 20130101; H04N 5/363 20130101; H01L 27/1461
20130101; H01L 27/14612 20130101; H04N 5/3745 20130101 |
Class at
Publication: |
257/292 |
International
Class: |
H01L 27/146 20060101
H01L027/146 |
Claims
1. A complementary-metal-oxide-semiconductor (CMOS) image sensor
comprising: a pixel array having a plurality of pixels, each of the
plurality of pixels including, a photogate structure configured to
be controlled based on a first gate voltage, and a sensing
transistor including a charge pocket region formed in a substrate
region, the sensing transistor being configured to be controlled
based on a second gate voltage, wherein based on the first gate
voltage, the photogate structure is configured to integrate charges
generated in response to light incident on the substrate region,
and the sensing transistor is configured to adjust at least one of
a threshold voltage of the sensing transistor and a current flow in
the sensing transistor according to charges transferred from the
photogate structure to the charge pocket region based on a
difference between the first gate voltage and the second gate
voltage.
2. The CMOS image sensor of claim 1, further comprising: a readout
circuit; wherein the photogate structure includes a photogate
transistor having a drain and a source in the substrate region, the
photogate transistor is configured to output a pixel signal
corresponding to at least one of the adjusted threshold voltage and
the adjusted current flow, and the readout circuit is configured to
output a digital image signal based on the pixel signal.
3. The CMOS image sensor of claim 2, wherein the photogate
transistor and the sensing transistor share one of the drain and
the source, and wherein the photogate transistor and the sensing
transistor are embodied in a planar structure.
4. The CMOS image sensor of claim 2, wherein the photogate
transistor and the sensing transistor are embodied in a vertical
structure and share one of the drain and the source.
5. The CMOS image sensor of claim 1, further comprising: a readout
circuit; wherein the sensing transistor is configured to output a
pixel signal corresponding to at least one of the adjusted
threshold voltage and the adjusted current flow, and the readout
circuit is configured to output a digital image signal based on the
pixel signal.
6. The CMOS image sensor of claim 1, wherein the photogate
structure and the sensing transistor are arranged in parallel.
7. The CMOS image sensor of claim 1, wherein the photogate
structure includes a photodiode in the substrate region.
8. The CMOS image sensor of claim 1, wherein each pixel further
includes a reset electrode configured to reset the pixel.
9. The CMOS image sensor of claim 1, wherein: the photogate
structure includes, a first gate electrode configured to receive
the first gate voltage, a first region in the substrate region, the
first region being configured to output a pixel signal
corresponding to at least one of the adjusted threshold voltage and
the adjusted current flow, and a shared region in the substrate
region, the photogate structure and the sensing transistor sharing
the shared region; and the sensing transistor includes, a second
gate electrode configured to receive the second gate voltage, and a
second region in the substrate region, the charge pocket region
being under the second gate electrode between the shared region and
the second region.
10. The CMOS image sensor of claim 9, wherein the sensing
transistor further includes a channel region on or over the charge
pocket region in the substrate region.
11. The CMOS image sensor of claim 1, wherein: the photogate
structure includes, a first gate electrode configured to receive
the first gate voltage, a first region in the substrate region, the
first region being configured to output a pixel signal
corresponding to at least one of the adjusted threshold voltage and
the adjusted current flow, and a shared region partially in the
substrate region, the photogate structure and the sensing
transistor sharing the shared region; and the sensing transistor
includes, a second gate electrode configured to receive the second
gate voltage, and a second region over the shared region, the
charge pocket region being between the shared region and the second
region.
12. The CMOS image sensor of claim 1, wherein: the photogate
structure includes, a first gate electrode configured to receive
the first gate voltage, a first region on the substrate region, the
first region being configured to output a pixel signal
corresponding to at least one of the adjusted threshold voltage and
the adjusted current flow, and a shared region partially in the
substrate region, the photogate structure and the sensing
transistor sharing the shared region; and the sensing transistor
includes, a second gate electrode configured to receive the second
gate voltage, and a second region over the shared region, the
charge pocket region being between the shared region and the second
region.
13. The CMOS image sensor of claim 1, wherein: the photogate
structure includes, a first gate electrode on the substrate region,
the first gate electrode being configured to receive the first gate
voltage; and the sensing transistor includes, a second gate
electrode configured to receive the second gate voltage, a first
region in the substrate region, the first region being configured
to output a pixel signal corresponding to at least one of the
adjusted threshold voltage and the adjusted current flow, and a
second region in the substrate region, the charge pocket region
being under the second gate electrode and between the first region
and the second region.
14. The CMOS image sensor of claim 13, wherein the photogate
structure further includes a photodiode under the first gate
electrode in the substrate region.
15. The CMOS image sensor of claim 1, wherein each pixel further
includes a reset region in the substrate region, the reset region
being connected to a reset electrode configured to reset the
pixel.
16. The CMOS image sensor of claim 1, further comprising: a row
driver configured to, set the first gate voltage to one of a ground
voltage and a negative voltage, and set the second gate voltage to
the ground voltage to integrate the charges.
17. The CMOS image sensor of claim 1, wherein the first gate
voltage is greater than the second gate voltage, and wherein the
CMOS image sensor further includes, a row driver configured to
supply the first gate voltage to transfer the charges from the
photogate structure to the charge pocket region.
18. The CMOS image sensor of claim 1, wherein the second gate
voltage is greater than or equal to the first gate voltage, and the
CMOS image sensor further includes, a row driver configured to
supply the second gate voltage, wherein the photogate structure
includes a photogate transistor having a drain and a source in the
substrate region, and the photogate transistor is configured to
output a pixel signal corresponding to at least one of the adjusted
threshold voltage and the adjusted current flow through one of the
drain and the source.
19. The CMOS image sensor of claim 1, wherein the second gate
voltage is less than or equal to the first gate voltage, and
wherein the CMOS image sensor further includes, a row driver
configured to supply the second gate voltage, wherein the sensing
transistor is configured to output a pixel signal corresponding to
at least one of the adjusted threshold voltage and the adjusted
current flow.
20. An image processing system comprising: a CMOS image sensor
including a pixel array having a plurality of pixels; and a
processor configured to control an operation of the CMOS image
sensor; wherein each of the plurality of pixels includes, a
photogate structure configured to be controlled based on a first
gate voltage, and a sensing transistor including a charge pocket
region in a substrate region, the sensing transistor being
configured to be controlled based on a second gate voltage, wherein
based on the first gate voltage, the photogate structure is
configured to integrate charges generated in response to light
incident on the substrate region, and the sensing transistor is
configured to adjust at least one of a threshold voltage of the
sensing transistor and a current flow in the sensing transistor
according to charges transferred from the photogate structure to
the charge pocket region based on a difference between the first
gate voltage and the second gate voltage.
21. The image processing system of claim 20, further comprising: a
readout circuit; wherein the photogate structure includes a
photogate transistor having a drain and a source in the substrate
region, the photogate transistor is configured to output a pixel
signal corresponding to at least one of the adjusted threshold
voltage and the adjusted current flow, and the readout circuit is
configured to output a digital image signal corresponding to the
pixel signal.
22. The image processing system of claim 20, further comprising: a
readout circuit; wherein the sensing transistor is configured to
output a pixel signal corresponding to at least one of the adjusted
threshold voltage and the adjusted current flow, and the readout
circuit is configured to output a digital image signal
corresponding to the pixel signal.
23. The image processing system of claim 20, wherein the CMOS image
sensor and the processor are configured to communicate with each
other using a MIPI camera serial interface (CSI).
24. A method of operating a CMOS image sensor, the method
comprising: integrating charges based on a first gate voltage
supplied to a photogate structure, the charges being generated in
response to light incident on a substrate region of the photogate
structure; transferring the integrated charges to a sensing
transistor based on a difference between the first gate voltage and
a second gate voltage supplied to the sensing transistor; and
adjusting at least one of a threshold voltage of the sensing
transistor and a current flow in the sensing transistor in response
to charges transferred to the sensing transistor.
25. The method of claim 24, further comprising: outputting a pixel
signal corresponding to at least one of the adjusted threshold
voltage and the adjusted current flow using one of the photogate
structure and the sensing transistor.
26. A pixel of an image sensor, the pixel comprising: a sensing
transistor having a first gate electrode and including a charge
pocket region, the first gate electrode being configured to receive
a first gate voltage; and a photogate transistor having a second
gate electrode configured to receive a second gate voltage, the
photogate transistor being configured to transfer accumulated
charges to the charge pocket region based on a difference between
the first gate voltage and the second gate voltage, the
photocharges being accumulated in response to light incident on a
substrate portion of the photogate transistor; wherein the sensing
transistor and the photogate transistor share one of a source and a
drain region.
27. The pixel of claim 26, wherein the charge pocket region is
under the first gate electrode between a source region and a drain
region of the sensing transistor.
28. The pixel of claim 26, wherein the sensing transistor is
configured such that at least one of a threshold voltage of the
sensing transistor and a current flow through the sensing
transistor is adjusted according to the charges transferred from
the photogate transistor to the charge pocket region.
29. The pixel of claim 26, wherein the photogate transistor and the
sensing transistor are embodied in a vertical structure.
30. An image processing system comprising: a
complementary-metal-oxide-semiconductor (CMOS) image sensor, the
CMOS image sensor including a pixel array having a plurality of
pixels, each of the plurality of pixels including, a sensing
transistor having a first gate electrode and including a charge
pocket region, the first gate electrode being configured to receive
a first gate voltage, and a photogate transistor having a second
gate electrode configured to receive a second gate voltage, the
photogate transistor being configured to transfer accumulated
charges to the charge pocket region based on a difference between
the first gate voltage and the second gate voltage, the
photocharges being accumulated in response to light incident on a
substrate portion of the photogate transistor; wherein the sensing
transistor and the photogate transistor share one of a source and a
drain region; and a processor configured to control operation of
the CMOS image sensor.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims priority under 35 U.S.C.
.sctn.119(e)to U.S. provisional patent application No. 61/713,175
filed on Oct. 12, 2012, and under 35 U.S.C. .sctn.119(a) to Korean
Patent Application No. 10-2013-0101728 filed on Aug. 27, 2013, the
entire contents of each of which are hereby incorporated by
reference.
BACKGROUND
[0002] 1. Field
[0003] Example embodiments of inventive concepts relate to a
structures of image sensors, and more particularly, to image
sensors including photogate structures and sensing transistors, an
operation method thereof, and image processing systems including
the same.
[0004] 2. Description of Conventional Art
[0005] An image sensor is a device that converts an optical image
into an electrical signal. The image sensor is divided into a
charged coupled device (CCD) image sensor and a complementary
metal-oxide-semiconductor (CMOS) image sensor.
[0006] A CMOS image sensor or a CMOS image sensor chip is a type of
active pixel sensor manufactured using a CMOS semiconductor
process. The CMOS image sensor chip includes a pixel array
including a plurality of pixels. Each of the plurality of pixels
includes a photo-electric conversion element generating photo
charges in response to incident light, and an additional circuit
generating a pixel signal from the photo charges. The additional
circuit may include three transistors, four transistors, or five
transistors.
SUMMARY
[0007] At least some example embodiments provide CMOS image sensors
including photogate structures and sensing transistors, which may
ensure FWC and reduce kTC noise occurring during a reset operation
even while reducing the number of transistors included in an
additional circuit. At least some example embodiments also provide
operation methods for CMOS image sensors, and image processing
systems including CMOS image sensors.
[0008] At least one example embodiment provides a
complementary-metal-oxide-semiconductor (CMOS) image sensor
including: a pixel array having a plurality of pixels. Each of the
plurality of pixels includes: a photogate structure configured to
be controlled based on a first gate voltage; and a sensing
transistor including a charge pocket region formed in a substrate
region, the sensing transistor being configured to be controlled
based on a second gate voltage. Based on the first gate voltage,
the photogate structure is configured to integrate charges
generated in response to light incident on the substrate region.
The sensing transistor is configured to adjust at least one of a
threshold voltage of the sensing transistor and a current flow in
the sensing transistor according to charges transferred from the
photogate structure to the charge pocket region based on a
difference between the first gate voltage and the second gate
voltage.
[0009] The CMOS image sensor may further include: a readout
circuit. The photogate structure may include a photogate transistor
having a drain and a source in the substrate region, The photogate
transistor may be configured to output a pixel signal corresponding
to at least one of the adjusted threshold voltage and the adjusted
current flow, and the readout circuit may be configured to output a
digital image signal based on the pixel signal.
[0010] The photogate transistor and the sensing transistor may
share one of the drain and the source, and the photogate transistor
and the sensing transistor may be embodied in a planar
structure.
[0011] The photogate transistor and the sensing transistor may be
embodied in a vertical structure and share one of the drain and the
source.
[0012] The CMOS image sensor may further include: a readout
circuit. The sensing transistor may be configured to output a pixel
signal corresponding to at least one of the adjusted threshold
voltage and the adjusted current flow, and the readout circuit may
be configured to output a digital image signal based on the pixel
signal.
[0013] The photogate structure and the sensing transistor may be
arranged in parallel.
[0014] The photogate structure may include a photodiode in the
substrate region.
[0015] Each pixel may further include a reset electrode configured
to reset the pixel.
[0016] The photogate structure may include: a first gate electrode
configured to receive the first gate voltage; a first region in the
substrate region, the first region being configured to output a
pixel signal corresponding to at least one of the adjusted
threshold voltage and the adjusted current flow; and a shared
region in the substrate region, the photogate structure and the
sensing transistor sharing the shared region. The sensing
transistor may include: a second gate electrode configured to
receive the second gate voltage; and a second region in the
substrate region, the charge pocket region being under the second
gate electrode between the shared region and the second region. The
sensing transistor may further include a channel region on or over
the charge pocket region in the substrate region.
[0017] The photogate structure may include: a first gate electrode
configured to receive the first gate voltage; a first region in the
substrate region, the first region being configured to output a
pixel signal corresponding to at least one of the adjusted
threshold voltage and the adjusted current flow; and a shared
region partially in the substrate region, the photogate structure
and the sensing transistor sharing the shared region. The sensing
transistor may include: a second gate electrode configured to
receive the second gate voltage; and a second region over the
shared region, the charge pocket region being between the shared
region and the second region.
[0018] The photogate structure may include: a first gate electrode
configured to receive the first gate voltage; a first region on the
substrate region, the first region being configured to output a
pixel signal corresponding to at least one of the adjusted
threshold voltage and the adjusted current flow; and a shared
region partially in the substrate region, the photogate structure
and the sensing transistor sharing the shared region. The sensing
transistor includes: a second gate electrode configured to receive
the second gate voltage; and a second region over the shared
region, the charge pocket region being between the shared region
and the second region.
[0019] The photogate structure may include: a first gate electrode
on the substrate region, the first gate electrode being configured
to receive the first gate voltage. The sensing transistor may
include: a second gate electrode configured to receive the second
gate voltage; a first region in the substrate region, the first
region being configured to output a pixel signal corresponding to
at least one of the adjusted threshold voltage and the adjusted
current flow; and a second region in the substrate region, the
charge pocket region being under the second gate electrode and
between the first region and the second region. The photogate
structure may further include a photodiode under the first gate
electrode in the substrate region.
[0020] Each pixel may further include a reset region in the
substrate region, the reset region being connected to a reset
electrode configured to reset the pixel.
[0021] The CMOS image sensor may further include a row driver
configured to: set the first gate voltage to one of a ground
voltage and a negative voltage, and set the second gate voltage to
the ground voltage to integrate the charges.
[0022] The first gate voltage may be greater than the second gate
voltage, and the CMOS image sensor may further includes: a row
driver configured to supply the first gate voltage to transfer the
charges from the photogate structure to the charge pocket
region.
[0023] The second gate voltage may be greater than or equal to the
first gate voltage, and the CMOS image sensor may further include:
a row driver configured to supply the second gate voltage. The
photogate structure may include a photogate transistor having a
drain and a source in the substrate region. The photogate
transistor may be configured to output a pixel signal corresponding
to at least one of the adjusted threshold voltage and the adjusted
current flow through one of the drain and the source.
[0024] The second gate voltage may be less than or equal to the
first gate voltage, and the CMOS image sensor may further include:
a row driver configured to supply the second gate voltage. The
sensing transistor may be configured to output a pixel signal
corresponding to at least one of the adjusted threshold voltage and
the adjusted current flow.
[0025] At least one other example embodiment provides an image
processing system including: a CMOS image sensor including a pixel
array having a plurality of pixels; and a processor configured to
control an operation of the CMOS image sensor. Each of the
plurality of pixels includes: a photogate structure configured to
be controlled based on a first gate voltage; and a sensing
transistor including a charge pocket region in a substrate region,
the sensing transistor being configured to be controlled based on a
second gate voltage. Based on the first gate voltage, the photogate
structure is configured to integrate charges generated in response
to light incident on the substrate region. The sensing transistor
is configured to adjust at least one of a threshold voltage of the
sensing transistor and a current flow in the sensing transistor
according to charges transferred from the photogate structure to
the charge pocket region based on a difference between the first
gate voltage and the second gate voltage.
[0026] The image processing system may further include a readout
circuit. The photogate structure may include a photogate transistor
having a drain and a source in the substrate region. The photogate
transistor may be configured to output a pixel signal corresponding
to at least one of the adjusted threshold voltage and the adjusted
current flow. The readout circuit may be configured to output a
digital image signal corresponding to the pixel signal.
[0027] The image processing system may further include a readout
circuit. The sensing transistor may be configured to output a pixel
signal corresponding to at least one of the adjusted threshold
voltage and the adjusted current flow. The readout circuit may be
configured to output a digital image signal corresponding to the
pixel signal.
[0028] The CMOS image sensor and the processor may be configured to
communicate with each other using a MIPI camera serial interface
(CSI).
[0029] At least one other example embodiment provides method of
operating a CMOS image sensor, the method including: integrating
charges based on a first gate voltage supplied to a photogate
structure, the charges being generated in response to light
incident on a substrate region of the photogate structure;
transferring the integrated charges to a sensing transistor based
on a difference between the first gate voltage and a second gate
voltage supplied to the sensing transistor; and adjusting at least
one of a threshold voltage of the sensing transistor and a current
flow in the sensing transistor in response to charges transferred
to the sensing transistor.
[0030] The method may further include: outputting a pixel signal
corresponding to at least one of the adjusted threshold voltage and
the adjusted current flow using one of the photogate structure and
the sensing transistor.
[0031] At least one other example embodiment provides a pixel of an
image sensor, the pixel including: a sensing transistor having a
first gate electrode and including a charge pocket region, the
first gate electrode being configured to receive a first gate
voltage; and a photogate transistor having a second gate electrode
configured to receive a second gate voltage, the photogate
transistor being configured to transfer accumulated charges to the
charge pocket region based on a difference between the first gate
voltage and the second gate voltage, the photocharges being
accumulated in response to light incident on a substrate portion of
the photogate transistor. The sensing transistor and the photogate
transistor share one of a source and a drain region.
[0032] The charge pocket region may be under the first gate
electrode gate electrode between a source region and a drain region
of the sensing transistor.
[0033] The sensing transistor may be configured such that at least
one of a threshold voltage of the sensing transistor and a current
flow through the sensing transistor is adjusted according to the
charges transferred from the photogate transistor to the charge
pocket region.
[0034] The photogate transistor and the sensing transistor may be
embodied in a vertical structure.
At least one other example embodiment provides an image processing
system including: a complementary-metal-oxide-semiconductor (CMOS)
image sensor and a processor configured to control operation of the
CMOS image sensor. The CMOS image sensor includes a pixel array
having a plurality of pixels. Each of the plurality of pixels
includes: a sensing transistor having a first gate electrode and
including a charge pocket region, the first gate electrode being
configured to receive a first gate voltage; and a photogate
transistor having a second gate electrode configured to receive a
second gate voltage, the photogate transistor being configured to
transfer accumulated charges to the charge pocket region based on a
difference between the first gate voltage and the second gate
voltage, the photocharges being accumulated in response to light
incident on a substrate portion of the photogate transistor. The
sensing transistor and the photogate transistor share one of a
source and a drain region.
BRIEF DESCRIPTION OF THE DRAWINGS
[0035] These and/or other aspects and advantages of inventive
concepts will become apparent and more readily appreciated from the
following description of example embodiments, taken in conjunction
with the accompanying drawings of which:
[0036] FIG. 1 is a cross-sectional diagram of an image sensor
including two NMOS transistors according to an example embodiment
of inventive concepts;
[0037] FIG. 2 is a cross-sectional diagram for describing a reset
operation of an image sensor illustrated in FIG. 1;
[0038] FIG. 3 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIG.
1;
[0039] FIG. 4 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIG. 1;
[0040] FIG. 5 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIG. 1;
[0041] FIG. 6 is a table of voltages for an operation of each image
sensor illustrated in FIGS. 1 to 5;
[0042] FIG. 7 is a waveform of a voltage supplied to each region of
each image sensor illustrated in FIGS. 1 to 5;
[0043] FIG. 8 is a cross-sectional diagram of an image sensor
including two NMOS transistors according to another example
embodiment of inventive concepts;
[0044] FIG. 9 is a cross-sectional diagram of an image sensor
including two NMOS transistors according to still another example
embodiment of inventive concepts;
[0045] FIG. 10 is a cross-sectional diagram of an image sensor
including two PMOS transistors according to still another example
embodiment of inventive concepts;
[0046] FIG. 11 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIG. 10;
[0047] FIG. 12 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIG.
10;
[0048] FIG. 13 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIG. 10;
[0049] FIG. 14 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIG. 10;
[0050] FIG. 15 is a table of voltages for operation of each image
sensor illustrated in FIGS. 10 to 14;
[0051] FIG. 16 is a cross-sectional diagram of an image sensor
including two PMOS transistors according to still another example
embodiment of inventive concepts;
[0052] FIG. 17 is a cross-sectional diagram of an image sensor
including two PMOS transistors according to still another example
embodiment of inventive concepts;
[0053] FIG. 18 is a conceptual circuit diagram of the image sensor
illustrated in FIG. 1, 8, 9, 10, 16, or 17;
[0054] FIG. 19 is an example embodiment of a pixel array including
the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or 17, and
driven in a rolling shutter method;
[0055] FIG. 20 is an example embodiment of a pixel array including
the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or 17, and
driven in a global shutter method;
[0056] FIG. 21 is another example embodiment of the pixel array
including the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or
17, and driven in a rolling shutter method;
[0057] FIG. 22 is another example embodiment of the pixel array
including the image sensor illustrated in FIGS. 1, 8, 9, 10, 16,
and 17, and driven in a global shutter method;
[0058] FIG. 23 is a plan view of an image sensor including a
photogate and an NMOS transistor according to an example embodiment
of inventive concepts;
[0059] FIG. 24 is a cross-sectional diagram of the image sensor
illustrated in FIG. 23 taken along a line III-III';
[0060] FIG. 25 is a cross-sectional diagram of the image sensor
illustrated in FIG. 23 taken along a line IV-IV';
[0061] FIG. 26 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIGS. 23 to 25;
[0062] FIG. 27 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIGS. 23
to 25;
[0063] FIG. 28 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIGS. 23 to
25;
[0064] FIG. 29 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIGS. 23 to 25;
[0065] FIG. 30 is a table of voltages for operation of each image
sensor illustrated in FIGS. 23 to 29;
[0066] FIG. 31 is a waveform of a voltage supplied to each region
of each image sensor illustrated in FIGS. 23 to 29;
[0067] FIG. 32 is a plan view of an image sensor including a
photogate having a p-type photodiode and an NMOS transistor
according to another example embodiment of inventive concepts;
[0068] FIG. 33 is a cross-sectional diagram of the image sensor
illustrated in FIG. 32 taken along a line III-III';
[0069] FIG. 34 is a cross-sectional diagram of the image sensor
illustrated in FIG. 32 taken along a line IV-IV';
[0070] FIG. 35 is a plan view of an image sensor including a wide
photogate and an NMOS transistor according to still another example
embodiment of inventive concepts;
[0071] FIG. 36 is a cross-sectional diagram of the image sensor
illustrated in FIG. 35 taken along a line III-III';
[0072] FIG. 37 is a cross-sectional diagram of the image sensor
illustrated in FIG. 35 taken along a line IV-IV';
[0073] FIG. 38 is a plan view of an image sensor including a wide
photogate having the p-type photodiode and the NMOS transistor
according to another example embodiment of inventive concepts;
[0074] FIG. 39 is a cross-sectional diagram of the image sensor
illustrated in FIG. 38 taken along a line III-III';
[0075] FIG. 40 is a cross-sectional diagram of the image sensor
illustrated in FIG. 38 taken along a line IV-IV';
[0076] FIG. 41 is a plan view of an image sensor including a reset
electrode, a photogate, and the NMOS transistor according to still
another example embodiment of inventive concepts;
[0077] FIG. 42 is a cross-sectional diagram of the image sensor
illustrated in FIG. 41 taken along a line III-III';
[0078] FIG. 43 is a cross-sectional diagram of the image sensor
illustrated in FIG. 41 taken along a line IV-IV';
[0079] FIG. 44 is a plan view of an image sensor including the
photogate and the PMOS transistor according to another example
embodiment of inventive concepts;
[0080] FIG. 45 is a cross-sectional diagram of the image sensor
illustrated in FIG. 44 taken along a line III-III';
[0081] FIG. 46 is a cross-sectional diagram of the image sensor
illustrated in FIG. 44 taken along a line IV-IV';
[0082] FIG. 47 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIGS. 44 to 46;
[0083] FIG. 48 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIGS. 44
to 46;
[0084] FIG. 49 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIGS. 44 to
46;
[0085] FIG. 50 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIGS. 44 to 46;
[0086] FIG. 51 is a waveform of a voltage supplied to each region
of each image sensor illustrated in FIGS. 47 to 50;
[0087] FIG. 52 is an example embodiment of a pixel array of the
image sensor illustrated in FIGS. 23 to 50;
[0088] FIG. 53 is a block diagram of an image processing system
including a pixel according to an example embodiment of inventive
concepts;
[0089] FIG. 54 is a block diagram depicting an example embodiment
of the image processing system including the image sensor of FIG.
53;
[0090] FIG. 55 is a block diagram depicting another example
embodiment of the image processing system including the image
sensor of FIGS. 53; and
[0091] FIG. 56 is a flowchart for describing operation of an
example embodiment of an image pixel.
DETAILED DESCRIPTION
[0092] Inventive concepts now will be described more fully
hereinafter with reference to the accompanying drawings, in which
some example embodiments are shown. Inventive concepts may,
however, be embodied in many different forms and should not be
construed as limited to the example embodiments set forth herein.
Rather, these example embodiments are provided so that this
disclosure will be thorough and complete, and will fully convey the
scope to those skilled in the art. In the drawings, the size and
relative sizes of layers and regions may be exaggerated for
clarity. Like numbers refer to like elements throughout.
[0093] It will be understood that when an element is referred to as
being "connected" or "coupled" to another element, it can be
directly connected or coupled to the other element or intervening
elements may be present. In contrast, when an element is referred
to as being "directly connected" or "directly coupled" to another
element, there are no intervening elements present. As used herein,
the term "and/or" includes any and all combinations of one or more
of the associated listed items and may be abbreviated as "/".
[0094] It will be understood that, although the terms first,
second, etc. may be used herein to describe various elements, these
elements should not be limited by these terms. These terms are only
used to distinguish one element from another. For example, a first
signal could be termed a second signal, and, similarly, a second
signal could be termed a first signal without departing from the
teachings of the disclosure.
[0095] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
inventive concepts. As used herein, the singular forms "a", "an"
and "the" are intended to include the plural forms as well, unless
the context clearly indicates otherwise. It will be further
understood that the terms "comprises" and/or "comprising," or
"includes" and/or "including" when used in this specification,
specify the presence of stated features, regions, integers, steps,
operations, elements, and/or components, but do not preclude the
presence or addition of one or more other features, regions,
integers, steps, operations, elements, components, and/or groups
thereof.
[0096] Unless otherwise defined, all terms (including technical and
scientific terms) used herein have the same meaning as commonly
understood by one of ordinary skill in the art to which inventive
concepts belong. It will be further understood that terms, such as
those defined in commonly used dictionaries, should be interpreted
as having a meaning that is consistent with their meaning in the
context of the relevant art and/or the present application, and
will not be interpreted in an idealized or overly formal sense
unless expressly so defined herein.
[0097] A photogate structure includes a photogate or a photogate
transistor having a source and a drain.
[0098] FIG. 1 is a cross-sectional diagram of an image sensor
including two NMOS transistors according to an example embodiment
of inventive concepts. Referring to FIG. 1, a pixel 100A of an
image sensor includes a first NMOS transistor TR1 and a second NMOS
transistor TR2 which share a shared region 115. That is, the pixel
100A may be embodied in two NMOS transistors TR1 and TR2.
[0099] The pixel 100A of the image sensor may be embodied in a
planar transistor type.
[0100] The first NMOS transistor TR1 includes a first region 113
doped with n-type impurities, the shared region 115 doped with
n-type impurities, and a first gate electrode 123.
[0101] A doping density (or concentration) n+ of the first region
113 may be higher than a doping density (or concentration)n of the
shared region 115. Each region 113 and 115 is formed in a first
substrate region 111 doped with p-type impurities. For example,
each region 113 and 115 may be formed through an ion implantation
process.
[0102] The second NMOS transistor TR2 includes the shared region
115, a second region 117 doped with n-type impurities, a second
gate electrode 125, and a hole pocket region 119 doped with p-type
impurities. Each region 117 and 119 is formed in the first
substrate region 111. For example, each region 117 and 119 may be
formed through the ion implantation process. A doping density n+ of
the second region 117 may be higher than a doping density n of the
shared region 115.
[0103] A doping density p of the hole pocket region 119 according
to an example embodiment of a charge pocket region may be higher
than a doping density p- of the first substrate region 111.
[0104] The hole pocket region 119 may be formed between the shared
region 115 and the second region 117, and under the second gate
electrode 125 at a given (or alternatively desired or
predetermined) depth from the upper surface of the first substrate
region 111. Each insulation layer may be formed between each gate
electrode 123 and 125 and the upper surface of the first substrate
region 111.
[0105] An output signal Vout is output through the first region
113, a first gate voltage Vpg is input to the first gate electrode
123, a second gate voltage Vsl is supplied to the second gate
electrode 125, and a source voltage Vsrc is supplied to the second
region 117. The output signal Vout, that is, a pixel signal, may be
a voltage or a current.
[0106] According to an example embodiment, an n-channel region 121
may be formed under the upper surface of the first substrate region
111 between the shared region 115 and the second region 117. Here,
the n-channel region 121 may be formed through the ion implantation
process.
[0107] The n-channel region 121 may be formed on or over the hole
pocket region 119. The n-channel region 121 may be embodied so as
to adjust a threshold voltage of the second NMOS transistor TR2.
That is, when the pixel 100A includes the n-channel region 121, a
threshold voltage of the second NMOS transistor TR2 decreases.
[0108] Accordingly, even if the second gate voltage Vsl supplied to
the second gate electrode 125 of the pixel 100A including the
n-channel region 121 is lower than a second gate voltage Vsl
supplied to the second gate electrode 125 of the pixel 100A which
does not include the n-channel region 121, the second NMOS
transistor TR2 may operate.
[0109] According to another example embodiment, the pixel 100A may
further include a second substrate region 127 formed at the lower
portion of the first substrate region 111 and doped with n-type
impurities.
[0110] A doping density n or n- of the second substrate region 127
may be equal to or lower than the doping density n of the shared
region 115. The first substrate region 111 and the second substrate
region 127 may be included in a silicon substrate or an epitaxial
layer.
[0111] According to example embodiments, the pixel 100A may include
at least one of the n-channel region 121 and the second substrate
region 127. According to an example embodiment, a role of the first
region 113 and a role of the second region 117 may be changed to
each other.
[0112] When each gate electrode 123 and 125 is embodied in
polysilicon, an image sensor including the pixel 100A may be
embodied in a back side illumination (BSI) structure. However, when
each gate electrode 123 and 125 is embodied in a transparent
electrode material, an image sensor including the pixel 100A may be
embodied in a front side illumination (FSI) structure. For example,
the transparent electrode material may be embodied in Indium tin
oxide (ITO), TiO2, ZnO, or SnO2.
[0113] The first NMOS transistor TR1 may be used as a photogate
transistor, and the first NMOS transistor TR1 may adjust a charge
collection (or charge integration) capability and a full well
capacity (FWC) based on the first gate electrode Vpg supplied to
the first gate electrode 123.
[0114] The second NMOS transistor TR2 may be used as a sensing
transistor, and a threshold voltage of the second NMOS transistor
TR2 and/or a current flowing in a channel of the second NMOS
transistor TR2 may be adjusted according to photocharges
transferred from the first NMOS transistor TR1. Here, the first
region 113 of the first NMOS transistor TR1 may output an output
signal Vout corresponding to a threshold voltage of the adjusted
second NMOS transistor TR2 and/or a current flowing in a channel of
the adjusted second NMOS transistor TR2.
[0115] Operation orders of the pixel 100A may be variously set as
follows.
[0116] First, the pixel 100A may operate in an order of a reset
operation, a charge integration operation, a charge transfer
operation, and a read operation.
[0117] Second, the pixel 100A may operate in an order of a reset
operation, a charge integration operation, a read operation, a
charge transfer operation, and a read operation.
[0118] Third, the pixel 100A may operate in an order of a reset
operation, a read operation, a charge integration operation, a
charge transfer operation, and a read operation.
[0119] In order to compare pixel signals output from the pixel 100A
before and after the charge integration operation, two-time read
operations may be performed. Here, an image sensor including the
pixel 100A may include correlated double sampling (CDS) circuits
which may perform a CDS operation on the pixel signals.
[0120] FIG. 2 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIG. 1, FIG. 6 is a
table of voltages for operation of each image sensor illustrated in
FIGS. 1 to 5, and FIG. 7 is a waveform of a voltage supplied to
each region of each image sensor illustrated in FIGS. 1 to 5.
[0121] Referring to FIGS. 1, 2, 6 and 7, during a reset operation
RESET, holes h+ inside the hole pocket region 119 are removed
through the second region 117. Accordingly, during the reset
operation RESET, the pixel 100A is initiated. Here, a source
voltage Vsrc may be lower than -1.5V as a reset voltage Vreset, and
a first gate voltage Vpg and a second gate voltage Vsl may be 0V or
a ground voltage.
[0122] FIG. 3 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIG.
1.
[0123] Referring to FIGS. 1, 3, 6, and 7, during a charge
integration operation INTEGRATION, photo charges are generated in
the first substrate region 111 by light incident into the first
substrate region 111, and holes h+ among the photo charges are
integrated or collected in the first substrate region 111
positioned under the first gate electrode 123 based on the first
gate voltage Vpg supplied to the first gate electrode 123.
[0124] For example, the number of photo charges may be determined
according to the intensity of incident light. Here, the source
voltage Vsrc and the second gate voltage Vsl are 0V or a ground
voltage, respectively, and the first gate voltage Vpg may be 0V or
a negative voltage as a charge integration voltage Vint. The
negative voltage may be a voltage between -5V and 0V.
[0125] FIG. 4 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIG. 1.
Referring to FIGS. 1, 4, 6, and 7, during a charge transfer
operation TRANSFER, holes h+ integrated or collected in the first
substrate region 111 move (or transfer) to the hole pocket region
119 based on a difference between the first gate voltage Vpg and
the second gate voltage Vsl.
[0126] Here, the source voltage Vsrc is 0V, the first gate voltage
Vpg is a first charge transfer voltage Vtrans1, the second gate
voltage Vsl is a second charge transfer voltage Vtran2, and each
voltage Vtran1 and Vtran2 may be a voltage between -3V and +3V.
Here, the first charge transfer voltage Vtran1 may be higher than
the second charge transfer voltage Vtran2.
[0127] FIG. 5 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIG. 1.
[0128] Referring to FIGS. 1, 5, 6, and 7, during a selection
operation or a read operation SELECT/READ, when each of the first
gate voltage Vpg and the second gate voltage Vsl is a positive
voltage, a threshold voltage of the second NMOS transistor TR2
and/or a current flowing in a channel of the second NMOS transistor
TR2 may be adjusted according to the number of holes h+ stored in
the hole pocket region 119.
[0129] Here, an output signal Vout corresponding to the adjusted
threshold voltage of the second NMOS transistor TR2 and/or the
adjusted current flowing in a channel of the second NMOS transistor
TR2 may be output through a first region 113 of the first NMOS
transistor TR1.
[0130] Here, the source voltage Vsrc is a voltage between -3V and
+3V as an operation voltage Vdd, the first gate voltage Vpg is a
first read voltage Vread1, the second gate voltage Vsl is a second
read voltage Vread2, and each read voltage Vread1 and Vread2 may be
a positive voltage, e.g., a voltage between 0V and +3V. Here, the
first read voltage Vread1 may be slightly lower than the second
read voltage Vread2. When the selection operation and the read
operation SELECT/READ are not performed, the first gate voltage Vpg
and the second gate voltage Vsl are 0V, respectively.
[0131] Each voltage Vsrc, Vpg, and Vsl and waveforms illustrated in
FIGS. 6 and 7 are merely exemplifications for convenience of
description, and may be variously changed according to an image
sensor design specifications.
[0132] FIG. 8 is a cross-sectional diagram of an image sensor
including two NMOS transistors according to another example
embodiment of inventive concepts. Referring to FIG. 8, a pixel 100B
of an image sensor includes a first NMOS transistor and a second
NMOS transistor which share a shared region 115a. That is, the
pixel 100B may be embodied in two NMOS transistors.
[0133] The pixel 100B of the image sensor may be embodied in a
vertical transistor type. The first NMOS transistor performing a
function of the photogate structure, i.e., the photogate
transistor, includes a first region 113a doped with n-type
impurities, the shared region 115a doped with n-type impurities,
and a first gate electrode 123a receiving a first gate voltage
Vpg.
[0134] Each region 113a and 115a may be formed in the first
substrate region 111 according to the ion implantation process.
Here, at least some of the shared region 115a may be formed in the
first substrate region 111.
[0135] The second NMOS transistor which may perform a function of
the sensing transistor includes the shared region 115a, a second
region 117a doped with n-type impurities, a second gate electrode
125a receiving the second gate voltage Vsl, and a hole pocket
region 119a doped with p-type impurities. Each region 115a, 117a,
and 119a may be vertically embodied.
[0136] A function and a doping density of each region 113a, 115a,
117a, and 119a in FIG. 8 are substantially the same as a function
and a doping density of each region 113, 115, 117, and 119 in FIG.
1.
[0137] As described referring to FIG. 1, according to which
substance (or material) is used to form each gate electrode 123a
and 125a, an image sensor including the pixel 100B may be embodied
in a BSI structure or a FSI structure. The pixel 100B may or may
not include the second substrate region 127. Although not
illustrated in FIG. 8, an n-channel region which may perform the
same function as the n-channel region 121 of FIG. 1 may be formed
between the shared region 115a and the second region 117a.
[0138] An insulation layer may be formed between the first gate
electrode 123a and the first substrate region 111, and an
insulation layer may be formed between the second gate electrode
125a and the hole pocket region 119a.
[0139] When the n-channel region which may perform the same
function as the n-channel region 121 of FIG. 1 is formed between
the shared region 115a and the second region 117a, an insulation
layer may be formed between the second gate electrode 125a and the
n-channel region. According to an example embodiment, the n-channel
region and the hole pocket region 119a may be in contact with each
other or be separated from each other. The pixel 100B having the
structure illustrated in FIG. 8 may be embodied according to
various CMOS processes.
[0140] FIG. 9 is a cross-sectional diagram of an image sensor
including two NMOS transistors according to still another example
embodiment of inventive concepts. Referring to FIG. 9, a pixel 100C
of the image sensor includes the first NMOS transistor and the
second NMOS transistor which share a shared region 15b. That is,
the pixel 100C may be embodied in two NMOS transistors.
[0141] The pixel 100C of the image sensor may be embodied in a
vertical transistor type.
[0142] The first NMOS transistor performing a function of the
photogate structure, i.e., the photogate transistor, includes a
first region 113b doped with n-type impurities, the shared region
115b doped with n-type impurities, and a first gate electrode 123b
receiving a first gate voltage Vpg. The first region 113b may be
formed on the first substrate region 111. According to an example
embodiment, a portion of the first region 113b may be embodied in
the first substrate region 111.
[0143] The second NMOS transistor which may perform a function of
the sensing transistor includes the shared region 115b, the second
region 117b doped with n-type impurities, the second gate electrode
125b receiving the second gate voltage Vsl, and the hole pocket
region 119b doped with p-type impurities. At least portion of the
shared region 115b may be embodied in the first substrate region
111. Each region 115b, 117b, and 119b may be vertically
embodied.
[0144] A function and a doping density of each region 113b, 115b,
117b, and 119b of FIG. 9 are substantially the same as the function
and the doping density of each region 113, 115, 117, and 119 of
FIG. 1.
[0145] As described referring to FIG. 1, according to which
substance (or material) is used to form each gate electrode 123b
and 125b, an image sensor including the pixel 100C may be embodied
in a BSI structure or a FSI structure.
[0146] The pixel 100C may or may not include the second substrate
region 127. Although not illustrated in FIG. 9, an n-channel region
which may perform the same function as the n-channel region 121 of
FIG. 1 may be formed between the shared region 115b and the second
region 117b. An insulation layer may be formed between the first
gate electrode 123b and the first substrate region 111, and an
insulation layer may be formed between the second gate electrode
125b and the hole pocket region 119b.
[0147] When the n-channel region which may perform the same
function as the n-channel region 121 of FIG. 1 is formed between
the shared region 115b and the second region 117b, an insulation
layer may be formed between the second gate electrode 125b and the
n-channel region.
[0148] The pixel 100C illustrated in FIG. 9 includes a thin body,
thereby improving sensing margin and inhibiting leakage
current.
[0149] FIG. 10 is a cross-sectional diagram of an image sensor
including two PMOS transistors according to still another example
embodiment of inventive concepts. Referring to FIGS. 1 and 10, a
pixel 100D of the image sensor includes a first PMOS transistor and
a second PMOS transistor which share a shared region 115-1. That
is, the pixel 100D may be embodied in two PMOS transistors.
[0150] The pixel 100D of the image sensor may be embodied in a plan
transistor type.
[0151] The first PMOS transistor which performs a function of the
photogate structure, i.e., the photogate transistor, includes the
first region 113-1 doped with p-type impurities, the shared region
115-1 doped with p-type impurities, and the first gate electrode
123-1 receiving the first gate voltage Vpg.
[0152] A doping density p+ of the first region 113-1 may be higher
than a doping density p of the shared region 115-1. Each region
113-1 and 115-1 is formed in the first substrate region 111-1 doped
with n-type impurities. For example, each region 113-1 and 115-1
may be formed through the ion implantation process.
[0153] The second PMOS transistor which performs a function of the
sensing transistor includes the shared region 115-1, the second
region 117-1 doped with p-type impurities, the second gate
electrode 125-1 receiving the second gate voltage Vsl, and the
electronic pocket region 119-1 doped with n-type impurities. Each
pocket region 119 and 119-1 may perform a function of a photo
charge pocket region.
[0154] Each region 117-1 and 119-1 is formed in the first substrate
region 111-1. For example, each region 117-1 and 119-1 may be
formed through the ion implantation process. A doping density p+ of
the second region 117-1 may be higher than a doping density p of
the shared region 115-1. A doping density n of the electronic
pocket region 119-1 may be higher than a doping density n- of the
first substrate region 111-1.
[0155] The electronic pocket region 119-1 may be formed between the
shared region 115-1 and the second region 117-1, and under the
second gate electrode 125-1 at a given (or alternatively desired or
predetermined) depth from the upper surface of the first substrate
region 111-1.
[0156] Each insulation layer may be formed between each gate
electrode 123-1 and 125-1 and the upper surface of the first
substrate region 111-1. An output signal Vout is output through the
first region 113-1, a first gate voltage Vpg is input to the first
gate electrode 123-1, a second gate voltage Vsl is supplied to the
second gate electrode 125-1, and a source voltage Vsrc is supplied
to the second region 117-1. As described above, the output signal
Vout, i.e., a pixel signal, may be a voltage or a current.
[0157] According to an example embodiment, a p-channel region 121-1
may be formed under the upper surface of the first substrate region
111-1 between the shared region 115-1 and the second region 117-1.
Here, the p-channel region 121-1 may be formed through the ion
implantation process.
[0158] The p-channel region 121-1 may be formed on or over the
electronic pocket region 119-1. The p-channel region 121-1 may be
embodied so as to adjust a threshold voltage of the second PMOS
transistor. That is, when the pixel 100D includes the p-channel
region 121-1, a threshold voltage of the second PMOS transistor
decreases.
[0159] According to another example embodiment, the pixel 100D may
further include a second substrate region 127-1 formed at the lower
portion of the first substrate region 111-1 and doped with p-type
impurities. A doping density p or p- of the second substrate region
127-1 may be equal to or lower than a doping density p of the
shared region 115-1.
[0160] The first substrate region 111-1 and the second substrate
region 127-1 may be included in a silicon substrate or an epitaxial
layer. According to an example embodiment, the pixel 100D may
include at least one of the p-channel region 121-1 and the second
substrate region 127-1. According to an example embodiment, a role
of the first region 113-1 and a role of the second region 117-1 may
be changed to each other.
[0161] When each gate electrode 123-1 and 125-1 is embodied in a
polysilicon, an image sensor including the pixel 100D may be
embodied in a BSI structure. However, when each gate electrode
123-1 and 125-1 is embodied in a transparent electrode material,
the image sensor including the pixel 100D may be embodied in a FSI
structure.
[0162] The first PMOS transistor may be embodied in a photogate
transistor, and the first PMOS transistor may adjust a charge
integration capability and FWC based on a first gate voltage Vpg
supplied to the first gate electrode 123-1.
[0163] FIG. 11 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIG. 10, and FIG. 15
is a table of voltages for operation of each image sensor
illustrated in FIGS. 11 to 14. Referring to FIGS. 6, 10, 11, and
15, during a reset operation RESET, electrons e- in the electronic
pocket region 119-1 are removed through the second region 117-1.
During the reset operation RESET, the pixel 100D is
initialized.
[0164] Here, the source voltage Vsrc may be higher than 1.5V as a
reset voltage Vreset, and the first gate voltage Vpg and the second
gate voltage Vsl may be 0V or a ground voltage, respectively.
[0165] FIG. 12 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIG. 10.
Referring to FIGS. 6, 10, 12, and 15, during a charge integration
operation INTEGRATION, photo charges are generated in the first
substrate region 111-1 by light incident into the first substrate
region 111-1, and electrons e- among the photo charges are
integrated or collected in the first substrate region 111-1
positioned under the first gate electrode 123-1 according to the
first gate voltage Vpg supplied to the first gate electrode 123-1.
For example, the number of photo charges may be determined
according to the intensity of incident light.
[0166] Here, the source voltage Vsrc and the second gate voltage
Vsl are 0V or a ground voltage, respectively, and the first gate
voltage Vpg may be 0V or a positive voltage as a charge integration
voltage Vint. The positive voltage may be a voltage between 0V and
5V.
[0167] FIG. 13 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIG. 10.
Referring to FIGS. 6, 10, 13, and 15, during a charge transfer
operation TRANSFER, electrons e- integrated or collected in the
first substrate region 111-1 move to the electronic pocket region
119-1 according to a difference between the first gate voltage Vpg
and the second gate voltage Vsl.
[0168] Here, the source voltage Vsrc may be 0V, the first gate
voltage Vpg may be a first charge transfer voltage Vtran1, the
second gate voltage Vsl may be a second charge transfer voltage
Vtran2, and each voltage Vtran1 and Vtran2 may be a voltage between
-3V and +3V. Here, the first charge transfer voltage Vtran1 may be
lower than the second charge transfer voltage Vtran2.
[0169] FIG. 14 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIG. 10. Referring to FIGS. 6, 10, 14, and 15,
during a selection operation and a read operation SELECT/READ, when
each of the first gate voltage Vpg and the second gate voltage Vsl
is a negative voltage, a threshold voltage of the second PMOS
transistor or a current flowing in a channel of the second PMOS
transistor is determined according to the number of electrons e-
stored in the electronic pocket region 119-1.
[0170] Here, an output signal Vout corresponding to the adjusted
threshold voltage of the second PMOS transistor and/or the adjusted
current flowing in a channel of the second PMOS transistor may be
output through the first region 113-1 of the first PMOS
transistor.
[0171] Here, the source voltage Vsrc may be a voltage between -3V
and +3V as an operation voltage Vdd, the first gate voltage Vpg may
be a first read voltage Vread, the second gate voltage Vsl may be a
second read voltage Vread2, and each voltage Vread1 and Vread2 may
be a negative voltage, e.g., a voltage between -3V and 0V. Here,
the first read voltage Vread1 is slightly higher than the second
read voltage Vread2. When the selection operation and the read
operation SELECT/READ are not performed, the first gate voltage Vpg
and the second gate voltage Vsl are 0V, respectively.
[0172] Each voltage Vsrc, Vpg, and Vsl and the waveforms
illustrated in FIGS. 6 and 15 are merely exemplifications for
convenience of description, and may be variously changed according
to an image sensor design specification.
[0173] FIG. 16 is a cross-sectional diagram of an image sensor
including two PMOS transistors according to still another example
embodiment of inventive concepts. Referring to FIG. 16, a pixel
100E of an image sensor includes the first PMOS transistor and the
second PMOS transistor which share a shared region 115a-1. That is,
the pixel 100E may be embodied in two PMOS transistors. The pixel
100E of the image sensor may be embodied in a vertical transistor
type.
[0174] The first PMOS transistor performing a function of the
photogate structure, i.e., a photogate transistor, includes a first
region 113a-1 doped with p-type impurities, the shared region
115a-1 doped with p-type impurities, and a first gate electrode
123a-1 receiving the first gate voltage Vpg. Each region 113a-1 and
115a-1 is formed in the first substrate region 111-1 according to
the ion implantation process.
[0175] The second PMOS transistor performing a function of a
sensing transistor includes the shared region 115a-1, the second
region 117a-1 doped with p-type impurities, the second gate
electrode 125a-1 receiving the second gate voltage Vsl, and the
electronic pocket region 119a-1 doped with n-type impurities. Each
region 115a-1, 117a-1, and 119a-1 may be embodied in a vertical
structure.
[0176] Except that the pixel 100B of FIG. 8 has an NMOS transistor
structure and the pixel 100E of FIG. 16 has a PMOS transistor
structure, a structure and an operation of each pixel 100B and 100E
are substantially the same as each other.
[0177] FIG. 17 is a cross-sectional diagram of an image sensor
including two PMOS transistors according to still another example
embodiment of inventive concepts. Referring to FIG. 17, a pixel
100F of an image sensor includes the first PMOS transistor and the
second PMOS transistor which share a shared region 115b-1. That is,
the pixel 100F may be embodied in two NMOS transistors. The pixel
100F of the image sensor may be embodied in a vertical transistor
type.
[0178] The first PMOS transistor performing a function of the
photogate transistor includes a first region 113b-1 doped with
p-type impurities, the shared region 115b-1 doped with p-type
impurities, and the first gate electrode 123b-1.
[0179] The second NMOS transistor performing a function of a
sensing transistor includes the shared region 115b-1, the second
region 117b-1 doped with p-type impurities, the second gate
electrode 125b-1, and the electronic pocket region 119-b-1 doped
with n-type impurities.
[0180] Except that the pixel 100C of FIG. 9 has an NMOS transistor
structure and the pixel 100F of FIG. 17 has a PMOS transistor
structure, a structure and an operation of each pixel 100C and 100F
are substantially the same as each other.
[0181] FIG. 18 is a conceptual circuit diagram of the image sensor
illustrated in FIG. 1, 8, 9, 10, 16, or 17. Referring to FIGS. 1,
8, 9, 10, 16, 17, and 18, each pixel 100A to 100F, collectively
"100", as illustrated in FIG. 18, may be modeled into two
transistors TR1 and TR2 which share the shared region 115, 115-1,
115a, 115a-1, 115b, or 115b-1.
[0182] FIG. 19 is an example embodiment of a pixel array including
the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or 17, and
driven in a rolling shutter method. Referring to FIG. 19, a pixel
array 510A of the image sensor includes a plurality of pixels 100,
and each operation of the plurality of pixels 100 is controlled by
a row driver 520A. Each of the plurality of pixels 100 outputs an
output signal Vout1-Voutn.
[0183] A plurality of pixels is embodied in a first row, and each
operation of the plurality of pixels embodied in the first row is
controlled by control signals Vpg1, Vs11, and Vsrc1. In addition, a
plurality of pixels is embodied in an m.sup.th row, and each
operation of the plurality of pixels embodied in the m.sup.th row
is controlled by control signals Vpgm, Vslm, and Vsrcm.
[0184] That is, a plurality of pixels embodied in each row is
controlled by control signals Vpgi, Vsli, and Vsrci, where i is
equal to or greater than 1 and equal to or less than m, and i and m
are natural numbers. For example, a reset operation of a plurality
of pixels embodied in each row may be controlled by row.
[0185] FIG. 20 is an example embodiment of a pixel array which
includes the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or
17 and is driven in a global shutter method.
[0186] A pixel array 510B of the image sensor includes a plurality
of pixels 100, and each operation of the plurality of pixels 100 is
controlled by a row driver 520B. Each of the plurality of pixels
100 outputs an output signal Vout1 to Voutn.
[0187] A plurality of pixels is embodied in a first row, and each
operation of the plurality of pixels embodied in the first row is
controlled by control signals Vpg1, Vs11, and Vsrc. In addition, a
plurality of pixels is embodied in a m.sup.th row, and each
operation of the plurality of pixels embodied in the m.sup.th row
is controlled by control signals Vpgm, Vslm, and Vsrc.
[0188] That is, a plurality of pixels embodied in each row is
controlled by control signals Vpgi, Vsli, and Vsrc output by row,
where i is equal to or greater than 1 and equal to or less than m,
and i and m are natural numbers. According to a global shutter
operation, a reset operation of all pixels 100 embodied in the
pixel array 510B may be controlled according to one source voltage
Vsrc.
[0189] FIG. 21 is another example embodiment of the pixel array
including the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or
17, and driven in a rolling shutter method. Referring to FIGS. 19
and 21, a pixel array 510C includes a plurality of pixel units PU.
In FIG. 19, the pixel unit PU includes one pixel 100, but one pixel
unit PU in FIG. 21 includes four pixels 100. According to an
example embodiment, the pixel unit PU may include four or more
pixels 100.
[0190] FIG. 22 is another example embodiment of the pixel array
including the image sensor illustrated in FIG. 1, 8, 9, 10, 16, or
17, and driven in a global shutter method. Referring to FIGS. 20
and 22, a pixel array 510D includes a plurality of pixel units PU.
A pixel unit PU in FIG. 20 includes one pixel 100, but a pixel unit
PU in FIG. 22 includes four pixels 100. According to an example
embodiment, the pixel unit PU may include four or more pixels
100.
[0191] FIG. 23 is a plan view of an image sensor including a
photogate and an NMOS transistor according to an example embodiment
of inventive concepts, FIG. 24 is a cross-sectional diagram of the
image sensor illustrated in FIG. 23 taken along a line III-III',
and FIG. 25 is a cross-sectional diagram of the image sensor
illustrated in FIG. 23 taken along a line IV-IV'. Referring to
FIGS. 23 to 25, a pixel 100G including a photogate PG and an NMOS
transistor STR includes a third region 201, a second gate electrode
203, a fourth region 205, and a first gate electrode 207.
[0192] The first gate electrode 207 of the photogate structure,
i.e., photogate PG, may adjust a charge integration capability and
full well capacity (FWC) based on the first gate voltage Vpg.
[0193] The sensing transistor STR including regions 201, 203, and
205 may perform a selection operation and a read operation. A pixel
100G including a big photogate PG and a small sensing transistor
STR may enhance light guiding (or receiving) efficiency and sensing
sensitivity.
[0194] The sensing transistor STR includes the third region 201
doped with n-type impurities, the second gate electrode 203, the
fourth region 205 doped with n-type impurities, and the hole pocket
region 213. Each region 201, 205, and 213 is formed in the first
substrate region 211 doped with p-type impurities. For example,
each region 201, 205, and 213 may be formed through the ion
implantation process.
[0195] A doping density p of the hole pocket region 213 may be
higher than a doping density p- of the first substrate region 211.
The hole pocket region 213 may be formed between a third region 201
and a fourth region 205 and under the second gate electrode 203 at
a given (or alternatively desired or predetermined) depth from the
upper surface of the first substrate region 211. Each insulation
layer may be formed between each gate electrode 203 and 207 and the
upper surface of the first substrate region 211.
[0196] An output signal Vout is output through the third region
201, the first gate voltage Vpg is input to the first gate
electrode 207, the second gate voltage Vsl is supplied to the
second gate electrode 203, and the source voltage Vsrc is supplied
to the fourth region 205.
[0197] According to an example embodiment, the n-channel region 215
may be formed under the upper surface of the first substrate region
211 between the third region 201 and the fourth region 205. Here,
the n-channel region 215 may be formed through the ion implantation
process.
[0198] The n-channel region 215 may be embodied so as to adjust a
threshold voltage of the sensing transistor STR. That is, when a
pixel 100G includes the n-channel region 215, a threshold voltage
of the sensing transistor STR decreases. According to another
example embodiment, the pixel 100G may further include a second
substrate region 217 formed under the first substrate region 211
and doped with n-type impurities.
[0199] A doping density n or n- of the second substrate region 217
is equal to or lower than a doping density n+ of each region 201
and 205. The first substrate region 211 and the second substrate
region 217 may be included in a silicon substrate or an epitaxial
layer.
[0200] According to example embodiments, the pixel 100G may include
at least one of the n-channel region 215 and the second substrate
region 217. According to an example embodiment, a role of the third
region 201 and a role of the fourth region 205 may be changed to
each other. For example, when the fourth region 205 is a source,
the third region 201 may be a drain.
[0201] When each gate electrode 203 and 207 is embodied in
polysilicon, an image sensor including the pixel 100G may be
embodied in a BSI structure. However, when each gate electrode 203
and 207 is embodied in a transparent electrode material, the image
sensor including the pixel 100G may be embodied in a FSI
structure.
[0202] The pixel 100G operates in an order as follow.
[0203] First, the pixel 100G may operate in an order of a reset
operation, a charge integration operation, a charge transfer
operation, and a read operation.
[0204] Second, the pixel may operate in an order of a reset
operation, a charge integration operation, a read operation, a
charge transfer operation, and a read operation.
[0205] Third, the pixel 100G may operate in an order of a reset
operation, a read operation, a charge integration operation, a
charge transfer operation, and a read operation.
[0206] Before and after the charge integration operation, in order
to compare pixel signals output from the pixel 100G, two-time read
operations may be performed. Here, the image sensor including the
pixel 100G may include CDS circuits which may perform a CDS
operation for the pixel signals.
[0207] FIG. 26 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIGS. 23 to 25, FIG.
30 is a table of voltages for operation of each image sensor
illustrated in FIGS. 23 to 29, and FIG. 31 is a waveform of a
voltage supplied to each region of each image sensor illustrated in
FIGS. 23 to 29.
[0208] Referring to FIGS. 24, 25, 26, 30, and 31, during a reset
operation RESET, holes h+ in the hole pocket region 213 of the
sensing transistor STR are removed through the fourth region 205.
That is, the pixel 100G is initialized. Here, the source voltage
Vsrc may be lower than -1.5V as a reset voltage Vreset, the first
gate voltage Vpg may be higher than 0V, and the second gate voltage
Vsl may be 0V or a ground voltage.
[0209] FIG. 27 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIGS. 23
to 25.
[0210] Referring to FIGS. 24, 25, 27, 30, and 31, during a charge
integration operation INTEGRATION, photo charges are generated in
the first substrate region 211 by light incident into the first
substrate region 211, and holes h+ among the photo charges are
integrated or collected in the first substrate region 211
positioned under the first gate electrode 207 according to the
first gate voltage Vpg supplied to the first gate electrode 207.
The charge integration operation is performed by the photogate PG.
For example, the number of photo charges may be determined by the
intensity of incident light.
[0211] Here, the source voltage Vsrc and the second gate voltage
Vsl are 0V or a ground voltage, respectively, and the first gate
voltage Vpg may be 0V or a negative voltage as a charge integration
voltage Vint. The negative voltage may be a voltage between -5V and
0V.
[0212] FIG. 28 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIGS. 23 to
25. Referring to FIGS. 24, 25, 28, 30, and 31, during a charge
transfer operation TRANSFER, holes h+ integrated or collected in
the first substrate region 211 move to the hole pocket region 213
according to a difference between the first gate voltage Vpg and
the second gate voltage Vsl.
[0213] Here, the source voltage Vsrc may be 0V, the first gate
voltage Vpg may be a first charge transfer voltage Vtran1, the
second gate voltage Vsl may be a second charge transfer voltage
Vtran2, and each voltage Vtran1 and Vtran2 may be a voltage between
-3V and +3V. Here, the first charge transfer voltage Vtran1 may be
higher than the second charge transfer voltage Vtran2.
[0214] FIG. 29 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIGS. 23 to 25. Referring to FIGS. 24, 25, 29, 30,
and 31, during a selection operation and a read operation
SELECT/READ, when each of the first gate voltage Vpg and the second
gate voltage Vsl is a positive voltage, an output signal Vout of
the pixel 100G is output according to the holes h+ stored in the
hole pocket region 213.
[0215] For example, a threshold voltage of the sensing transistor
STR and/or a current flowing in a channel of the sensing transistor
STR may be adjusted according to the number of the holes h+ stored
in the hold pocket region 213.
[0216] An output signal Vout corresponding to the adjusted
threshold voltage of the sensing transistor STR and/or the adjusted
current flowing in a channel of the sensing transistor STR may be
output through the first region 113 of the sensing transistor
STR.
[0217] Here, the source voltage Vsrc may be a voltage between -3V
and +3V as an operation voltage Vdd, the first gate voltage Vpg may
be a first read voltage Vread1, the second gate voltage Vsl may be
a second read voltage Vread2, and each read voltage Vread1 and
Vread2 may be a positive voltage, e.g., a voltage between 0V and
+3V. Here, a first read voltage Vread1 may be slightly higher than
a second read voltage Vread2. When a selection operation and a read
operation SELECT/READ are not performed, the first gate voltage Vpg
and the second gate voltage Vsl are 0V, respectively.
[0218] Each voltage Vsrc, Vpg, and Vsl and the waveforms
illustrated in FIGS. 30 and 31 are merely exemplifications for
convenience of description, and may be variously changed according
to a design specification.
[0219] FIG. 32 is a plan view of an image sensor including a
photogate having a p-type photodiode and an NMOS transistor
according to another example embodiment of inventive concepts, FIG.
33 is a cross-sectional diagram of the image sensor illustrated in
FIG. 32 taken along a line III-III', and FIG. 34 is a
cross-sectional diagram of the image sensor illustrated in FIG. 32
taken along a line IV-IV'.
[0220] Except for a photodiode 219 doped with p-type impurities, a
structure and an operation of the pixel 100G described referring to
FIGS. 23 to 31 are substantially the same as a structure and an
operation of a pixel 100H illustrated in FIGS. 32 to 34. For
example, a doping density pl of the photodiode 219 may be lower
than the doping density p of the hole pocket region 213, and higher
than the doping density p- of the first substrate region 211.
[0221] FIG. 35 is a plan view of an image sensor including a wide
photogate and an NMOS transistor according to still another example
embodiment of inventive concepts, FIG. 36 is a cross-sectional
diagram of the image sensor illustrated in FIG. 35 taken along a
line III-III', and FIG. 37 is a cross-sectional diagram of the
image sensor illustrated in FIG. 35 taken along a line IV-IV'.
[0222] Except for a size of the first gate electrode 207a of the
photogate PG, a structure and an operation of the pixel 100G
described referring to FIGS. 23 to 31 are substantially the same as
the structure and the operation of a pixel 100I illustrated in
FIGS. 35 to 37. The size of the first gate electrode 207a of a
photogate PG of the pixel 100I is greater than a size of the first
gate electrode 207 of a photogate PG of the pixel 100G. For
example, a size of the photogate PG may be defined as a size of the
first gate electrode 207 or 207a.
[0223] FIG. 38 is a plan view of an image sensor including a wide
photogate having a p-type photodiode and an NMOS transistor
according to another example embodiment of inventive concepts, FIG.
39 is a cross-sectional diagram of the image sensor illustrated in
FIG. 38 taken along a line III-III', and FIG. 40 is a
cross-sectional diagram of the image sensor illustrated in FIG. 38
taken along a line IV-IV'.
[0224] Except for the first gate electrode 207a and a size of the
p-type photodiode 219, a structure and an operation of the pixel
100G described referring to FIGS. 23 to 31 are substantially the
same as a structure and an operation of a pixel 100J described in
FIGS. 38 to 40.
[0225] FIG. 41 is a plan view of an image sensor including a reset
electrode, a photogate, and the NMOS transistor according to still
another example embodiment of inventive concepts, FIG. 42 is a
cross-sectional diagram of the image sensor illustrated in FIG. 41
taken along a line III-III', and FIG. 43 is a cross-sectional
diagram of the image sensor illustrated in FIG. 41 taken along a
line IV-IV'.
[0226] Except for an embodiment position and a size of the first
gate electrode 207b and a reset region 208, a structure and an
operation of the pixel 100G described referring to FIGS. 23 to 31
are substantially the same as a structure and an operation of a
pixel 100K described in FIGS. 41 to 43. A reset voltage Vreset is
supplied to a reset region 208 through a reset electrode. A doping
density p+ of the reset region 208 may be embodied to be higher
than the doping density p of the hold pocket region 213.
[0227] FIG. 44 is a plan view of an image sensor including the
photogate and the PMOS transistor according to another example
embodiment of inventive concepts, FIG. 45 is a cross-sectional
diagram of the image sensor illustrated in FIG. 44 taken along a
line III-III', and FIG. 46 is a cross-sectional diagram of the
image sensor illustrated in FIG. 44 taken along a line IV-IV'.
[0228] Referring to FIGS. 44 to 46, a pixel 100L including a
photogate and a PMOS transistor includes a third region 201-1, a
second gate electrode 203-1, a fourth region 205-1, and a first
gate electrode 207-1.
[0229] The first gate electrode 207-1 of the photogate may adjust a
charge integration capability and full well capacity (FWC) based on
the first gate voltage Vpg. The sensing transistor STR including
regions 201-1, 203-1, and 205-1 may perform a selection operation
and a read operation.
[0230] The sensing transistor STR includes the third region 201-1
doped with p-type impurities, the second gate electrode 203-1, the
fourth region 205-1 doped with p-type impurities, and an electronic
pocket region 213-1. Each region 201-1, 205-1, and 213-1 is formed
in the first substrate region 211-1 doped with n-type impurities.
For example, each region 201-1, 205-1, and 213-1 may be formed
through the ion implantation process.
[0231] A doping density n of the electronic pocket region 213-1 may
be higher than the doping density n- of the first substrate region
211-1. The electronic pocket region 213-1 may be formed between the
third region 201-1 and the fourth region 205-1 and under the second
gate electrode 203-1 at a given (or alternatively desired or
predetermined) depth from the upper surface of the first substrate
region 211-1. An insulation layer may be formed between each gate
electrode 203-1 and 207-1 and the upper surface of the first
substrate region 211-1.
[0232] An output signal Vout is output through the third region
201-1, the first gate voltage Vpg is input to the first gate
electrode 207-1, the second gate voltage Vsl is supplied to the
second gate electrode 203-1, and the source voltage Vsrc is
supplied to the fourth region 205-1.
[0233] According to an example embodiment, a p-channel region 215-1
may be formed under the upper surface of the first substrate region
211-1 between the third region 201-1 and the fourth region 205-1.
Here, the p-channel region 215-1 may be formed through the ion
implantation process.
[0234] The p-channel region 215-1 may be embodied so as to adjust a
threshold voltage of the sensing transistor STR. That is, when a
pixel 100L includes the p-channel region 215-1, the threshold
voltage of the sensing transistor STR decreases. According to
another example embodiment, the pixel 100L may further include a
second substrate region 217-1 formed under the first substrate
region 211-1 and doped with p-type impurities.
[0235] A doping density p or p- of the second substrate region
217-1 may be equal to or lower than the doping density p+ of each
region 201-1 and 205-1. According to example embodiments, the pixel
100L may include at least one of the p-channel region 215-1 and the
second substrate region 217-1.
[0236] According to an example embodiment, a role of the third
region 201-1 and a role of the fourth region 205-1 may be changed
to each other. When each gate electrode 203-1 and 207-1 is embodied
in polysilicon, an image sensor including the pixel 100L may be
embodied in a BSI structure. However, when each gate electrode
203-1 and 207-1 is embodied in a transparent electrode material,
the image sensor including the pixel 100L may be embodied in a FSI
structure.
[0237] FIG. 47 is a cross-sectional diagram for describing a reset
operation of the image sensor illustrated in FIGS. 44 to 46, and
FIG. 51 is a waveform of a voltage supplied to each region of each
image sensor illustrated in FIGS. 47 to 50. Referring to FIGS. 45,
46, 47, and 51, during a reset operation RESET, electrons e- in the
electronic pocket region 213-1 are removed through the fourth
region 205-1. Here, the source voltage Vsrc may be higher than 1.5V
as a reset voltage Vreset, the first gate voltage Vpg may be lower
than 0V, and the second gate voltage Vsl may be 0V or a ground
voltage.
[0238] FIG. 48 is a cross-sectional diagram for describing a charge
integration operation of the image sensor illustrated in FIGS. 44
to 46. Referring to FIGS. 45, 46, 48, and 51, photo charges are
generated in a first substrate region 211-1 by light incident into
the first substrate region 211-1, and electrons e- among the photo
charges are integrated or collected in the first substrate region
211-1 positioned under the first gate electrode 203-1 according to
the first gate voltage Vpg supplied to the first gate electrode
203-1.
[0239] Here, the source voltage Vsrc and the second gate voltage
Vsl are 0V or a ground voltage, respectively, and the first gate
voltage Vpg may be 0V or a positive voltage as a charge integration
voltage Vint. The positive voltage may be a voltage between 0V and
5V.
[0240] FIG. 49 is a cross-sectional diagram for describing a charge
transfer operation of the image sensor illustrated in FIGS. 44 to
46. Referring to FIGS. 45, 46, 49, and 51, during a charge transfer
operation TRANSFER, electrons e- integrated or collected in the
first substrate region 211-1 move to the electronic pocket region
213-1 according to a difference between the first gate voltage Vpg
and the second gate voltage Vsl.
[0241] Here, the source voltage Vsrc may be 0V, the first gate
voltage Vpg may be a first charge transfer voltage Vtran1, the
second gate voltage Vsl may be a second charge transfer voltage
Vtran2, and each voltage Vtran1 and Vtran2 may be a voltage between
-3V and +3V. Here, the first charge transfer voltage Vtran1 may be
lower than the second charge transfer voltage Vtran2.
[0242] FIG. 50 is a cross-sectional diagram for describing a
selection operation and a read operation of the image sensor
illustrated in FIGS. 44 to 46. Referring to FIGS. 45, 46, 50, and
51, during a selection operation and a read operation SELECT/READ,
when each of the first gate voltage Vpg and the second gate voltage
Vsl is a negative voltage, an output signal Vout of the pixel 100L
is output according to the electrons e- stored in the electronic
pocket region 213-1.
[0243] Here, the source voltage Vsrc may be a voltage between -3V
and +3V, the first gate voltage Vpg may be a first read voltage
Vread1, the second gate voltage Vsl may be a second read voltage
Vread2, and each voltage Vread1 and Vread2 may be a negative
voltage, e.g., a voltage between -3V and 0V. Here, the first read
voltage Vread1 may be slightly lower than the second read voltage
Vread2. When the selection operation and the read operation
SELECT/READ are not performed, the first gate voltage Vpg and the
second gate voltage Vsl are 0V.
[0244] Each voltage Vsrc, Vpg, and Vsl and the waveforms
illustrated in FIG. 51 are merely exemplifications for convenience
of description, and may be variously changed according to a design
specification.
[0245] FIG. 52 is an example embodiment of a pixel array of the
image sensor illustrated in FIGS. 23 to 50. Referring to FIG. 52, a
pixel array 510E of an image sensor includes a plurality of pixels
100', and an operation of each of the plurality of pixels 100' is
controlled by a row driver 520E. The pixel 100' collectively
denotes a pixel 100G to 100H including the photogate PG and the
sensing transistor STR.
[0246] A plurality of pixels is embodied in a first row, and an
operation of each of the plurality of pixels embodied in the first
row is controlled by control signals Vpg1, Vs11, and Vsrc1. In
addition, a plurality of pixels is embodied in a m.sup.th row, and
each operation of the plurality of pixels embodied in the m.sup.th
row is controlled by control signals Vpgm, Vslm, and Vsrcm. As
described referring to FIGS. 19 to 22, a structure of the pixel
array 510E may be embodied the same as a structure of each pixel
array 510A to 510E.
[0247] FIG. 53 is a block diagram of an image processing system
including a pixel according to an example embodiment of inventive
concepts. Referring to FIGS. 1 to 53, an image processing system
500 may be embodied in a portable electronic device including a
digital camera, a camcorder, or a CMOS image sensor 505. The
portable electronic device may be embodied in a mobile phone, a
smart phone, a tablet PC, or a mobile internet device (MID).
[0248] The image processing system 500 includes an optical lens
503, a CMOS image sensor 505, a digital signal processor 600, and a
display 640. The CMOS image sensor 505 may generate image data
IDATA for an object 501 incident through the optical lens 503.
[0249] The CMOS image sensor 505 includes a pixel array 510A, 510B,
510C, or 510E, collectively "510", a row driver 520A, 520B, 520C,
520D, or 520E, collectively "520", a readout circuit 525, a timing
generator 530, a control register block 550, a reference signal
generator 560, and a buffer 570.
[0250] The pixel array 510 includes a plurality of pixels 100 or
100', collectively "100t". The pixel 100t collectively denotes one
of pixels 100A to 100L. The pixel 100t of an image sensor may be
manufactured using a CMOS manufacture process. The pixel array 510
includes pixels 100t arranged in a matrix shape. Each pixel 100t
transfers an output signal Vout to each column line.
[0251] The row driver 520 drives control voltages, e.g., Vpg, Vsl,
and Vsrc, for controlling each operation of the pixels 100t to the
pixel array 510 according to a control of a timing generator 530.
The row driver 520 may perform a function of a voltage generator
which may generate control voltages, e.g., Vpg, Vsl, and Vsrc.
According to an example embodiment, the control voltages, e.g.,
Vpg, Vsl, and Vsrc, may be output from another voltage generator
other than the row driver 520.
[0252] The timing controller 530 controls an operation of the row
driver 520, the readout circuit 525, and the reference signal
generator 560 according to a control of the control register block
550.
[0253] The readout circuit 525 includes an analog-to-digital
converter by column and a memory 527 by column. According to an
example embodiment, the analog-to-digital converter 526 may perform
a function of correlated double sampling. The readout circuit 525
outputs a digital image signal corresponding to a pixel signal Vout
output from each pixel.
[0254] When the pixel 100t is a pixel including the photogate
transistor TR1 and the sensing transistor TR2 described referring
to FIGS. 1 to 22, the photogate transistor TR1 included in the
pixel 100t collects photo charges, e.g., holes h+ or electrons e-,
based on the first gate voltage Vpg supplied to the first gate
electrode, and the sensing transistor TR2 included in the pixel
100t changes a state of the sensing transistor TR2 based on the
photo charges.
[0255] When the pixel 100t is a pixel including the photogate PG
and the sensing transistor STR described referring to FIGS. 23 to
52, the photogate PG included in the pixel 100t collects optical
charges, e.g., holes h+ or electrons e-, based on the first gate
voltage Vpg supplied to the first gate electrode, and the sensing
transistor STR included in the pixel 100t changes a state of the
sensing transistor STR based on the optical charges.
[0256] As described above, a photogate structure may be the
photogate transistor TR1 or the photogate PG.
[0257] A change in the state of the sensing transistor TR2 may be
reflected to an output signal Vout. Here, the change in the state
may be a change in the threshold voltage of the sensing transistor
TR2 or a change in a current flowing through a channel of the
sensing transistor TR2. The readout circuit 525 performs an
analog-to-digital conversion on the output signal Vout.
[0258] A control register block 550 controls an operation of the
timing controller 530, the reference signal generator 560, and the
buffer 570 according to a control of a digital signal processor
600. The buffer 570 transfers image data IDATA corresponding to a
plurality of digital image signals output from the readout circuit
525 to the digital signal processor 600.
[0259] The digital signal processor 600 includes an image signal
processor 610, a sensor controller 620, and an interface 630. The
image signal processor 610 controls the sensor controller 620
controlling a control register block 550, and an interface 630.
[0260] According to an example embodiment, the CMOS image sensor
505 and the digital signal processor 600 may be embodied in one
package, e.g., a multi-chip package. According to another example
embodiment, the CMOS image sensor 505 and the image signal
processor 610 may be embodied in one package, e.g., a multi-chip
package.
[0261] The image signal processor 610 processes image data IDATA
transmitted from the buffer 570, and transmits the processed image
data to the interface 630. The sensor controller 620 may generate
various control signals for controlling the control register block
550 according to a control of the image signal processor 610. The
interface 630 may transmit image data processed by the image signal
processor 610 to a display 640.
[0262] The display 640 may display image data output from the
interface 630. The display 640 may be embodied in a thin film
transistor-liquid crystal display (TFT-LCD), a light emitting diode
(LED) display, an organic LED (OLED) display, an active-matrix OLED
(AMOLED), or a flexible display.
[0263] FIG. 54 is a block diagram depicting an example embodiment
of the image processing system including the image sensor of FIG.
53. Referring to FIGS. 53 and 54, the image processing system 600
may be embodied in a portable electronic device which may use or
support a mobile industry processor interface (MIPI.RTM.).
[0264] The portable electronic device includes a processing circuit
which may include a CMOS image sensor 505 and a processing circuit
which may include image data IDATA output from the CMOS image
sensor 505. The image processing system 600 includes an application
processor (AP) 610, an image sensor 505, and a display 630.
[0265] A camera serial interface (CSI) host 613 embodied in the AP
610 may perform a serial communication with a CSI device 506 of the
image sensor 505 through a camera serial interface (CSI). According
to an example embodiment, a de-serializer DES may be embodied in
the CSI host 613, and a serializer SER may be embodied in the CSI
device 506.
[0266] A display serial interface (DSI) host 611 embodied in the AP
610 may perform a serial communication with the DSI device 631 of
the display 630 through a display serial interface. According to an
example embodiment, a serializer SER may be embodied in a DSI host
611, and a de-serializer DES may be embodied in a DSI device 631.
Each of the de-serializer DES and the serializer SER may process an
electrical signal or an optical signal.
[0267] The image processing system 600 may further include a radio
frequency (RF) chip 640 which may communicate with the AP 610. A
physical layer (PHY) 615 of the AP 610 and a PHY 641 of the RF chip
640 may transmit and receive data each other according to MIPI
DigRF. The image processing system 600 may further include a GPS
650 receiver, a memory 651 like a dynamic random access memory
(DRAM), a data storage device 653 embodied in a non-volatile memory
like a NAND flash-based memory, a microphone 655, or a speaker
657.
[0268] The image processing system 600 may communicate with an
external device using at least one communication protocol or
communication standard, e.g., worldwide interoperability for
microwave access (WiMAX) 659, Wireless LAN (WLAN) 661,
ultra-wideband (UWB) 663, or long term evolution (LTE.TM.) 665. The
image processing system 600 may communicate with an external
wireless communication device using Bluetooth or WiFi.
[0269] According to an example embodiment, the AP 610 may further
include each component 711, 720, 740, and 750 illustrated in FIG.
55.
[0270] FIG. 55 is a block diagram depicting another example
embodiment of the image processing system including the image
sensor of FIG. 53. Referring to FIGS. 53 and 55, an image
processing system 700 may be embodied in a personal computer (PC)
or a portable electronic device. The portable electronic device
includes a CMOS image sensor 505 and a processing circuit which may
include image data IDATA output from the CMOS image sensor 505 as
described above.
[0271] The image processing system 700 may include an image sensor
505, a processor 710, a memory 760, and a display or display device
770. The image sensor 505 may be included in a camera module. The
camera module may include mechanical components which may control
an operation of the image sensor 505.
[0272] The processor 710 may be embodied in an integration circuit,
a system on chip (SoC), an application processor, or a mobile
application processor. The processor 710 may control an operation
of the image sensor 505, the memory 760, and the display 770,
process image data output from the image sensor 505, and store the
processed image data in the memory 760 or display the processed
image data through the display 770. The processor 710 includes a
central processing unit (CPU) 720, a camera interface 730, a memory
interface 740, and a display controller 750.
[0273] The CPU 720 may control operations of the camera interface
730, the memory interface 740, and the display controller 750
through a bus 711. The CPU 720 may be embodied in a multi-core
processor or a multi-CPU. According to a control of the CPU 720,
the camera interface 730 may transmit control signals for
controlling the image sensor 505 to the image sensor 505, and
transmit an image data signal output from the image sensor 505 to
the CPU 720, the memory interface 740, and/or the display
controller 750.
[0274] The memory interface 740 may interface data transmitted and
received between the processor 710 and the memory 760. The display
controller 750 may transfer data to be displayed on the display 770
to the display 770. The memory 760 may be a volatile memory like a
DRAM or a flash-based memory. The flash-based memory may be
embodied in a multimedia card (MMD), an embedded MMC (eMMC), an
embedded solid state drive (eSSD) or a universal flash memory
(UFS).
[0275] FIG. 56 is a flowchart for describing an operation of an
image pixel according to each embodiment of inventive concepts.
Referring to FIGS. 1 to 56, a pixel 100t integrates charges, which
are generated in response to light incident into a substrate region
111, 111-1, 211, or 211-1 included in the photogate structure TR1
or PG, to the upper of the substrate region 111, 111-1, 211, or
211-1 based on the first gate voltage Vpg supplied to the photogate
structure TR1 or PG (S110).
[0276] The pixel 100t transfers the charges integrated in the
photogate structure TR1 or PG to the sensing transistor TR2 or STR,
e.g., a charge pocket region 119, 119-1, 119a, 119a-1, 119b,
119b-1, 213, or 213-1, based on a difference between the first gate
voltage Vpg and the second gate voltage Vsl supplied to the sensing
transistor TR2 or STR (S120).
[0277] The pixel 100t adjusts at least one of a threshold voltage
of the sensing transistor TR2 or STR and a current flowing in the
sensing transistor TR2 or STR in response to charges transmitted to
the sensing transistor TR2 or STR (S130).
[0278] The pixel 100t outputs a pixel signal Vout corresponding to
at least one of the adjusted threshold voltage and the adjusted
current by using one of the photogate structure TR1 and the sensing
transistor STR (S140). That is a change in the threshold voltage of
the sensing transistor TR2 or STR and/or a change in a current
flowing in the sensing transistor TR2 or STR may be reflected to
the pixel signal Vout through the photogate structure TR1 or the
sensing transistor STR.
[0279] CMOS image sensors according to example embodiments of
inventive concepts includes two transistors sharing one shared
region, so that the CMOS image sensor is advantageous to be made
smaller. The pixel may ensure FSC and/or reduce kTC noises even
while including two transistors. Image sensors according to example
embodiments of inventive concepts include a photogate and one
transistor, so that the image sensors are advantageous to be made
smaller. The pixel may ensure FWC and/or reduce kTC noises even
while including one transistor
[0280] Although a few example embodiments of the inventive concepts
have been shown and described, it will be appreciated by those
skilled in the art that changes may be made in these example
embodiments without departing from the principles and spirit of the
inventive concepts, the scope of which is defined in the appended
claims and their equivalents.
* * * * *