U.S. patent application number 13/774129 was filed with the patent office on 2014-03-06 for detection and mitigation of aerodynamic error sources for micromachined inertial sensors.
This patent application is currently assigned to ANALOG DEVICES, INC.. The applicant listed for this patent is Analog Devices, Inc.. Invention is credited to William A. Clark, John A. Geen.
Application Number | 20140060186 13/774129 |
Document ID | / |
Family ID | 43604220 |
Filed Date | 2014-03-06 |
United States Patent
Application |
20140060186 |
Kind Code |
A1 |
Clark; William A. ; et
al. |
March 6, 2014 |
Detection and Mitigation of Aerodynamic Error Sources for
Micromachined Inertial Sensors
Abstract
Error sources related to aerodynamics of an inertial sensor
resonator are detected by modulating the distance between the
resonator and the underlying substrate and sensing modulated error
signals in the accelerometer that are induced by such modulation.
Compensating signals may be provided to substantially cancel errors
caused by such error sources.
Inventors: |
Clark; William A.;
(Winchester, MA) ; Geen; John A.; (Tewksbury,
MA) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Analog Devices, Inc.; |
|
|
US |
|
|
Assignee: |
ANALOG DEVICES, INC.
Norwood
MA
|
Family ID: |
43604220 |
Appl. No.: |
13/774129 |
Filed: |
February 22, 2013 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
12545334 |
Aug 21, 2009 |
|
|
|
13774129 |
|
|
|
|
Current U.S.
Class: |
73/514.29 |
Current CPC
Class: |
G01C 19/5712 20130101;
G01P 15/097 20130101 |
Class at
Publication: |
73/514.29 |
International
Class: |
G01P 15/097 20060101
G01P015/097 |
Claims
1. A method of detecting at least one error source relating to
aerodynamic effects of a resonator in an inertial sensor having a
resonator and an accelerometer for measuring an acceleration
signal, wherein at least one error source relating to aerodynamics
of the resonator induces corresponding error signals in the
accelerometer, the resonator supported by an underlying substrate,
the method comprising: providing a drive signal to cause resonance
of the resonator; providing a modulated test signal to modulate the
distance between the resonator and the underlying substrate while
the resonator is resonating so as to induce corresponding modulated
error signals in the accelerometer, wherein the modulated error
signals are related to aerodynamic force changes resulting from
modulation of the distance between the resonator and the underlying
substrate while the resonator is resonating; and sensing the
modulated error signals in the accelerometer to detect at least one
error source relating to aerodynamics of the resonator.
2. A method according to claim 1, wherein providing the modulated
test signal comprises: modulating the test signal using one of
amplitude modulation, frequency modulation, on/off keying, or a
spread spectrum modulation.
3. A method according to claim 1, wherein the modulated test signal
is applied to at least one of: a set of quadrature-compensating
electrodes; a set of in-phase compensating electrodes; or a
separate set of test electrodes.
4. A method according to claim 1, wherein sensing the modulated
error signals in the accelerometer includes demodulating
accelerometer signals based on a modulation signal used to modulate
the test signal.
5. A method according to claim 1, further comprising: providing at
least one compensating signal responsive to the sensed modulated
error signals to substantially cancel errors relating to
aerodynamics of the resonator.
6. A method according to claim 5, wherein providing at least one
compensating signal to substantially cancel errors relating to
aerodynamics of the resonator comprises: providing at least one
compensating signal to a set of in-phase compensating
electrodes.
7. A method according to claim 1, wherein the resonator includes a
plurality of shuttles, and wherein the shuttles are coupled to
resonate at a single resonance frequency.
8. An inertial sensor comprising: a resonator supported by a
substrate; an accelerometer for measuring an acceleration signal,
wherein at least one error source relating to aerodynamics of the
resonator induces corresponding error signals in the accelerometer;
a resonator driver configured to provide a drive signal to the
resonator to cause resonance of the resonator; a test signal
generator configured to provide a modulated test signal to modulate
the distance between the resonator and the substrate while the
resonator is resonating so as to induce corresponding modulated
error signals in the accelerometer, wherein the modulated error
signals are related to aerodynamic force changes resulting from
modulation of the distance between the resonator and the underlying
substrate while the resonator is resonating; and a detector
configured to sense modulated accelerometer signals induced by the
modulated test signal to detect at least one error source relating
to aerodynamics of the resonator.
9. An inertial sensor according to claim 8, wherein the test signal
generator is configured to modulate the test signal using one of
amplitude modulation, frequency modulation, on/off keying, or a
spread spectrum modulation.
10. An inertial sensor according to claim 8, wherein the modulated
test signal is applied to at least one of: a set of
quadrature-compensating electrodes; a set of in-phase compensating
electrodes; or a separate set of test electrodes.
11. An inertial sensor according to claim 8, wherein the detector
is configured to demodulate accelerometer signals based on a
modulation signal used to modulate the test signal.
12. An inertial sensor according to claim 8, further comprising: a
servo configured to provide at least one compensating signal
responsive to the sensed modulated error signals to substantially
cancel errors relating to aerodynamics of the resonator.
13. An inertial sensor according to claim 12, wherein the servo is
configured to provide the at least one compensating signal to set
of in-phase compensating electrodes.
14. An inertial sensor according to claim 8, wherein the resonator
includes a plurality of shuttles, and wherein the shuttles are
coupled to resonate at a single resonance frequency.
15. A controller for detecting at least one error source relating
to aerodynamics of a resonator of an inertial sensor including the
resonator and an accelerometer for measuring an acceleration
signal, wherein at least one error source relating to aerodynamics
of the resonator induces corresponding error signals in the
accelerometer, the resonator supported by a substrate, the
controller comprising: a resonator driver configured to provide a
drive signal to the resonator to cause resonance of the resonator;
a test signal generator configured to provide a modulated test
signal to modulate the distance between the resonator and the
substrate while the resonator is resonating so as to induce
corresponding modulated error signals in the accelerometer, wherein
the modulated error signals are related to aerodynamic force
changes resulting from modulation of the distance between the
resonator and the underlying substrate while the resonator is
resonating; and a detector configured to sense modulated
accelerometer signals induced by the modulated test signal to
detect at least one error source relating to aerodynamics of the
resonator.
16. A controller according to claim 15, wherein the test signal
generator is configured to modulate the test signal using one of
amplitude modulation, frequency modulation, on/off keying, or a
spread spectrum modulation.
17. A controller according to claim 15, wherein the modulated test
signal is applied to at least one of: a set of
quadrature-compensating electrodes; a set of in-phase compensating
electrodes; or a separate set of test electrodes.
18. A controller according to claim 15, wherein the detector is
configured to demodulate accelerometer signals based on a
modulation signal used to modulate the test signal.
19. A controller according to claim 15, further comprising: a servo
configured to provide at least one compensating signal responsive
to the sensed modulated error signals to substantially cancel
errors relating to aerodynamics of the resonator.
20. A controller according to claim 19, wherein the servo is
configured to provide at least one compensating signal to a set of
in-phase compensating electrodes of the inertial sensor.
21. A controller according to claim 15, wherein the resonator
includes a plurality of shuttles, and wherein the shuttles are
coupled to resonate at a single resonance frequency.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a divisional of, and therefore claims
priority from, U.S. patent application Ser. No. 12/545,334 entitled
Offset Detection and Compensation For Micromachined Inertial
Sensors filed on Aug. 21, 2009 (Attorney Docket No. 2550/C27),
which is hereby incorporated herein by reference in its
entirety.
[0002] This application also may be related to commonly-owned U.S.
patent application Ser. No. 12/469,899 entitled Mode-Matching
Apparatus and Method For Micromachined Inertial Sensors filed on
May 21, 2009 (Attorney Docket No. 2550/C21), which is hereby
incorporated herein by reference in its entirety.
TECHNICAL FIELD
[0003] The present invention relates to micromachined inertial
sensors, and more particularly to detecting and/or reducing offset
error in micromachined inertial sensors.
BACKGROUND ART
[0004] Micromachined (MEMS) gyroscopes have become established as
useful commercial items. Generally speaking, a MEMS gyroscope
incorporates two high-performing MEMS devices, specifically a
self-tuned resonator in the drive axis and a micro-acceleration
sensor in the sensing axis. Gyroscope performance is very sensitive
to such things as manufacturing variations, errors in packaging,
driving, linear acceleration, and temperature, among other things.
Basic principles of operation of angular-rate sensing gyroscopes
are well understood and described in the prior art (e.g., Geen, J.
et al., New iMEMS Angular-Rate-Sensing Gyroscope, Analog Devices,
Inc., Analog Dialog 37-03 (2003), available at
http://www.analog.com/library/analogDialogue/archives/37-03/gyro.html,
which is hereby incorporated herein by reference in its
entirety).
[0005] The principles of vibratory sensing angular rate gyroscopes
with discrete masses are long-established (see, for example, Lyman,
U.S. Pat. No. 2,309,853 and Lyman, U.S. Pat. No. 2,513,340, each of
which is hereby incorporated herein by reference in its entirety).
Generally speaking, a vibratory rate gyroscope works by oscillating
a proof mass (also referred to herein as a "shuttle" or
"resonator"). The oscillation is generated with a periodic force
applied to a spring-mass-damper system at the resonant frequency.
Operating at resonance allows the oscillation amplitude to be large
relative to the force applied. When the gyroscope is rotated,
Coriolis acceleration is generated on the oscillating proof mass in
a direction orthogonal to both the driven oscillation and the
rotation. The magnitude of Coriolis acceleration is proportional to
both the velocity of the oscillating proof mass and the rotation
rate. The resulting Coriolis acceleration can be measured by
sensing the deflections of the proof mass. The electrical and
mechanical structures used to sense such deflections of the proof
mass are referred to generally as the accelerometer.
[0006] Many MEMS gyroscopes employ balanced comb drives of the type
described generally in Tang, U.S. Pat. No. 5,025,346, which is
hereby incorporated herein by reference in its entirety. General
use of a micromachined layer above a semiconductor substrate with
Coriolis sensing perpendicular to that substrate is described
generally in Zabler, U.S. Pat. No. 5,275,047, which is hereby
incorporated herein by reference in its entirety. Exemplary MEMS
gyroscopes are described in Bernstein, U.S. Pat. No. 5,349,855;
Dunn, U.S. Pat. No. 5,359,893; Geen, U.S. Pat. No. 5,635,640; Geen,
U.S. Pat. No. 5,869,760; Zerbini, U.S. Pat. No. 6,370,954; and Geen
U.S. Pat. No. 6,837,107, each of which is hereby incorporated
herein by reference in its entirety. The latter four patents employ
rotationally vibrated mass(es).
[0007] One problem in the manufacture of MEMS gyroscopes is that
the Coriolis signals on which they depend are relatively small. It
has been long recognized (e.g. Ljung, U.S. Pat. No. 4,884,446 or
O'Brien, U.S. Pat. No. 5,392,650 or Clark, U.S. Pat. No. 5,992,233,
each of which is hereby incorporated herein by reference in its
entirety) that the signal size of a vibratory gyroscope can be
magnified by operating the Coriolis accelerometer at resonance,
i.e., by matching the frequencies of the accelerometer to that of
the vibrating shuttle. Generally speaking, this increase in signal
size eases the associated electronics requirements and thereby
reduces cost. However, generally speaking, the larger the resonant
amplification, the more sensitive is the accelerometer phase shift
to small frequency perturbations. Such phase shifts are
particularly deleterious to gyroscope performance, so it is
generally necessary, in practice, to either well separate the
frequencies or tightly servo the frequency of the accelerometer to
the frequency of the shuttle. A mechanism for controlling the
frequency of a differential capacitance accelerometer is
conveniently available from changing the applied common mode
voltage.
[0008] In vibratory rate gyroscopes, numerous factors, such as
imperfections in the various mechanical structures and in the
electronics used for driving and sensing, can cause oscillations of
the accelerometer that can be confused with Coriolis acceleration
and rotation rate. Such error sources are often referred to
collectively as gyroscope offset. There are two main classes of
gyroscope offset error, namely quadrature errors and in-phase
errors.
[0009] In the presence of in-phase errors, the accelerometer
experiences forces that are largely proportional to the resonator
velocity (which at resonance are also proportional to the vibratory
drive force) and are substantially in-phase or synchronous with the
Coriolis acceleration signal. There are two main classes of
in-phase errors, namely in-phase errors that are proportional to
resonator velocity and in-phase errors that are in-phase or
synchronous with resonator velocity but have origins other than the
actual motion of the resonator. An example of the former includes
aerodynamic effects on the resonator. Examples of the latter
include in-phase error caused by misalignment of the resonator
drive mechanism such that the vibratory drive force is not
perfectly orthogonal to the accelerometer and in-phase error caused
by electrical feed-through from the drive system to the
accelerometer sense electronics.
[0010] In the presence of in-phase errors, the accelerometer
experiences forces that are largely proportional to the resonator
velocity (which at resonance are also proportional to the vibratory
drive force) and are substantially in-phase or synchronous with the
Coriolis acceleration signal. There are two main classes of
in-phase errors, namely in-phase errors that are proportional to
resonator velocity and in-phase errors that are in-phase or
synchronous with resonator velocity but have origins other than the
actual motion of the resonator. An example of the former includes
aerodynamic effects on the resonator. Examples of the latter
include in-phase error caused by misalignment of the resonator
drive mechanism such that the vibratory drive force is not
perfectly orthogonal to the accelerometer and in-phase error caused
by electrical feed-through from the drive system to the
accelerometer sense electronics.
[0011] Gyroscope offset error can be reduced to some degree through
device design, manufacture, and packaging, but there are practical
limits to these approaches, particularly where gyroscope offset can
vary over time, for example, due to changes in temperature or
stress.
SUMMARY OF THE INVENTION
[0012] In accordance with one aspect of the invention there is
provided a method, an inertial sensor, and a controller for
detecting at least one error source relating to aerodynamics of an
inertial sensor resonator by providing a drive signal to cause
resonance of the resonator, providing a modulated test signal to
modulate the distance between the resonator and an underlying
substrate while the resonator is resonating so as to induce
corresponding modulated error signals in the accelerometer, and
sensing the modulated error signals in the accelerometer to detect
the at least one error source relating to aerodynamics of the
resonator.
[0013] In any of the above embodiments, the test signal may be
modulated using one of amplitude modulation, frequency modulation,
on/off keying, or a spread spectrum modulation. The modulated test
signal may be applied to at least one of a set of
quadrature-compensating electrodes, a set of in-phase compensating
electrodes, or a separate set of test electrodes. Detecting
accelerometer signals induced by the modulated test signal may
include demodulating accelerometer signals based on a modulation
signal used to modulate the test signal. At least one compensating
signal may be provided responsive to the sensed modulated error
signals to substantially cancel at least one error relating to
aerodynamics of the resonator (e.g., a compensating signal may be
provided to a set of in-phase-compensating electrodes, e.g., to
substantially cancel aerodynamic effects). The resonator may
include one or more shuttles, and in embodiments including a
plurality of shuttles, the shuttles may be coupled to resonate at a
single resonance frequency.
BRIEF DESCRIPTION OF THE DRAWINGS
[0014] The foregoing features of the invention will be more readily
understood by reference to the following detailed description,
taken with reference to the accompanying drawings, in which:
[0015] FIG. 1 is a schematic top-view diagram of a vibratory X-Y
axis gyroscope in accordance with an exemplary embodiment of the
present invention, highlighting the device layer structures;
[0016] FIG. 2 is a schematic top-view diagram of a vibratory X-Y
axis gyroscope in accordance with an exemplary embodiment of the
present invention, highlighting the substrate layer structures in
relation to the device layer structures highlighted in FIG. 1;
[0017] FIG. 3 is a schematic block diagram showing electronic
control circuitry suitable for use with the gyroscope 100 for
detecting in-phase offset errors, in accordance with an exemplary
embodiment of the present invention;
[0018] FIG. 4 is a schematic block diagram showing the electronic
control circuitry of FIG. 3 including an optional in-phase
compensating servo for mitigating in-phase offset errors, in
accordance with an exemplary embodiment of the present
invention;
[0019] FIG. 5 is a schematic block diagram showing the electronic
control circuitry of FIG. 3 including an optional in-phase
compensating servo configured for mitigating the effects of
resonator drive force misalignment, in accordance with an exemplary
embodiment of the present invention;
[0020] FIG. 6 is a schematic block diagram showing the electronic
control circuitry of FIG. 3 including an optional in-phase
compensating servo configured for mitigating the effects of
electrical feed-through from the drive electronics to the Coriolis
sensing electronics, in accordance with an exemplary embodiment of
the present invention;
[0021] FIG. 7 is a schematic top-view diagram of a vibratory
gyroscope in accordance with an alternative embodiment of the
present invention, in which FIG. 7A is a top view of the structures
and FIG. 7B is a magnified view of certain structures;
[0022] FIG. 8 is a schematic top-view diagram of an exemplary
vibratory Z axis gyroscope in accordance with another alternative
embodiment of the present invention;
[0023] FIG. 9 is a schematic top-view diagram of a cross-quad Z
axis gyroscope in accordance with another alternative embodiment of
the present invention; and
[0024] FIG. 10 shows a specific cross-quad gyroscope configuration
that can be adapted for mode matching, in accordance with the
embodiment shown in FIG. 9.
[0025] It should be noted that the foregoing figures and the
elements depicted therein are not necessarily drawn to consistent
scale or to any scale. Unless the context otherwise suggests, like
elements are indicated by like numerals.
DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS
[0026] Definitions. As used in this description and the
accompanying claims, the following terms shall have the meanings
indicated, unless the context otherwise requires.
[0027] A "set" includes one or more elements.
[0028] An "electrode" is a structure through which an electrical or
electromechanical effect is applied and/or sensed. In exemplary
embodiments, various electrodes are used for applying and/or
sensing electrical or electromechanical effects through capacitive
coupling, although it should be noted that other types of
electrodes and couplings may be used (e.g., piezoelectric).
[0029] The term "quality factor" or "Q-factor" or simply "Q"
denotes a dimensionless parameter that compares the time constant
for decay of an oscillating physical system's amplitude to its
oscillation period. Equivalently, it compares the frequency at
which a system oscillates to the rate at which it dissipates its
energy. A higher Q indicates a lower rate of energy dissipation
relative to the oscillation frequency, so the oscillations die out
more slowly. A system with a high Q resonates with a greater
amplitude (at the resonant frequency) than one with a low Q factor,
and its response falls off more rapidly as the frequency moves away
from resonance.
[0030] The term "f.sub.0" may be used as a shorthand to refer to
the resonance frequency of the resonator.
[0031] The "mode" of a resonating body is the shape of motion of
the body at resonance.
[0032] Embodiments of the present invention provide for detecting
and reducing certain types of gyroscope error sources in-situ. One
error source is quadrature error, which is measured and cancelled
using quadrature cancellation electrodes. A second is associated
with an imperfection in the drive source that results in in-phase
error. A third in-phase error source results from parasitic
feed-through. A fourth in-phase error source is associated with the
aerodynamics of the structure. In all these examples, the error
source is measured and driven to zero. Quadrature is demodulated
from the main signal and cancelled using special electrodes. For
in-phase error sources (e.g., drive imperfection, parasitic
feed-through, and aerodynamics), measurement of the error source
involves additional stimulation.
[0033] In exemplary embodiments, measuring drive imperfection is
done by modulating the drive force, demodulating the resulting
signal to arrive at a measure of drive imperfection, and then
applying a cancellation force.
[0034] Similarly, the aerodynamic error source is also modulated to
allow detection. Aerodynamic error results from lift generated as
the gyro structure moves through the surrounding gas/fluid. This
error is a strong function of the geometric imperfection of both
the gyroscope structure and the underlying substrate. Modulation of
the error is accomplished by altering or modulating the "fly
height" of the gyroscope structure. The fly height is altered by
applying a force (such as electrostatic force) perpendicular to the
substrate. The aerodynamic force changes with fly height modulation
and can be demodulated and again cancelled with electrostatics
similar to the drive imperfections.
[0035] In embodiments of the present invention, various gyroscope
error sources associated with the force used to drive the proof
mass oscillation are detected by modulating the drive force and
sensing corresponding signals that are induced in the Coriolis
channel. Because the magnitude of in-phase offset error is related
to the magnitude of the drive force, modulation of the drive force
generally results in modulation of the in-phase offset error. This
source of offset error may be cancelled with feedback
electronically, electro-mechanically, or otherwise, without
disturbing the Coriolis acceleration signal used to identify
rotation rate. The drive signal may be modulated using amplitude
modulation, frequency modulation, on/off keying, a spread spectrum
technique, or other appropriate modulation technique. Certain
exemplary embodiments modulate the magnitude of the drive force
using an easily generated test signal at a frequency that is
sufficiently high for the resonator amplitude to remain largely
unchanged so as to leave the Coriolis acceleration unmodulated. The
test signal frequency is typically an integer fraction of the
resonance frequency (e.g., f.sub.0/8).
[0036] In order to detect and/or reduce in-phase errors,
particularly in-phase errors having origins other than the actual
motion of the resonator (e.g., in-phase error caused by
misalignment of the resonator drive mechanism and in-phase error
caused by electrical feed-through from the drive system to the
accelerometer sense electronics, which are generally considered to
be the largest sources of in-phase error in gyroscopes of the type
shown in FIGS. 1 and 2), embodiments of the present invention
modulate the drive signal provided to the drive combs 128 by a
high-frequency test (carrier) signal to induce in-phase
accelerometer offset signals in the Coriolis output. The test
signal is provided in a manner that does not affect the Coriolis
signals, such as at an out-of-band frequency sufficiently below the
resonator frequency, so that the shuttles will respond to the test
signals without substantially changing the resonator amplitude. For
example, in an exemplary embodiment, the gyroscope response may be
below approximately 32 Hz, and the resonator frequency (fo) may be
approximately 64 KHz, and the test signal frequency may be
approximately 1 KHz to 8 KHz (i.e., f.sub.0/64 to f.sub.0/8).
Furthermore, the modulation applied to the drive signal preferably
averages to zero over time.
[0037] Similarly, electrical pass-through from the drive
electronics to other electronic systems such as the Coriolis sense
electronics may be detected through modulation of the drive signal
and may be mitigated electronically, electro-mechanically, or
otherwise.
[0038] Because the resonator is a high Q system, modulation of the
drive force can be done without substantially changing the
oscillation of the resonator and hence the Coriolis acceleration
generated by a rotation rate. However, the acceleration sensor and
the associated sense electronics react quickly to a change to the
resonator drive. A modulation of the drive force can be use to
expose a major source of offset without disturbing the primary
signal.
[0039] FIGS. 1 and 2 are schematic top-view diagrams of a vibratory
X-Y axis gyroscope 100 in accordance with an exemplary embodiment
of the present invention. This vibratory gyroscope operates
generally as disclosed in Geen, U.S. Pat. No. 5,635,640, which is
hereby incorporated herein by reference in its entirety.
Specifically, this vibratory gyroscope includes various
micromachined gyroscope structures in a device layer oriented above
an underlying substrate having various substrate layer structures.
For convenience, relevant gyroscope structures are described below
with reference to axes labeled "a" and "b" in the device plane. The
axes labeled "x" and "y" represent the axes about which Coriolis
acceleration, and hence rotation rate, is sensed (i.e., the
gyroscope sensing axes).
[0040] The gyroscope structures in the device plane include two
rotationally-dithered masses (referred to hereinafter as shuttles)
102 and 104, each including an outer rim suspended via a number of
spokes (in this case, twelve spokes, although different embodiments
may use different numbers of spokes) from a central hub that is
movably coupled to the substrate via a post (shaped like a "+") and
suspension flexures 101 (for convenience, only one of the two post
and suspension flexure arrangements is highlighted). The posts are
affixed to the substrate, and the suspension flexures allow the
shuttles to oscillate rotationally, with coupling flexure 106 and
support flexures 108 and 110 helping to ensure that the shuttles
oscillate in anti-phase with one another (i.e., shuttle 104 rotates
counterclockwise when shuttle 102 is rotating clockwise, and vice
versa) nominally within the device plane. For convenience, the
dithered gyroscope structures in the device plane may be referred
to collectively as a resonator.
[0041] Each of the spokes includes finger structures that
interdigitate with corresponding comb structures 128 affixed to the
substrate (for convenience, only two of the twenty-four sets of
combs are highlighted, with each set including two combs). In this
exemplary embodiment, the twenty-four sets of combs 128 are used
for driving motion of the shuttles, where one comb in each pair is
used for driving the shuttle in a clockwise direction and the other
is used for driving the shuttle in a counterclockwise direction,
specifically by applying alternating electrical signals to the
combs to cause the shuttles 102 and 104 to oscillate through
capacitive coupling with the finger structures of the spokes.
Velocity sensing electrodes are used in a feedback loop to sense
and control oscillation of the shuttles. In this exemplary
embodiment, velocity sensing electrodes 130 on the substrate
underlying the radial edges of the a-oriented and b-oriented spokes
(i.e., four spokes of each shuttle) are used for velocity sensing
(for convenience, only one of the eight pairs of velocity sensing
electrodes 130 is highlighted). It should be noted that some of the
combs 128 may be used for velocity sensing in addition to, or in
lieu of, separate velocity sensing electrodes 130.
[0042] In this exemplary embodiment, each of the shuttles includes
four protruding plates that overlie corresponding electrode
arrangements on the substrate, with each electrode arrangement
including a Coriolis-sensing electrode, an in-phase-compensating
electrode, and a pair of quadrature-compensating electrodes on
either side of the Coriolis-sensing and in-phase-compensating
electrodes. Specifically, shuttle 102 includes plates 112, 114,
116, and 118 that respectively overlie arrangements (112C, 112P,
112Q), (114C, 114P, 114Q), (116C, 116P, 116Q), and (118C, 118P,
118Q), while shuttle 104 includes plates 120, 122, 124, and 126
that respectively overlie arrangements (120C, 120P, 120Q), (122C,
122P, 122Q), (124C, 124P, 124Q), and (126C, 126P, 126Q), where "C"
designates the Coriolis-sensing electrode, "P" designates the
in-phase-compensating electrode, and "Q" designates the
quadrature-compensating electrodes. Each plate completely overlies
the Coriolis-sensing and in-phase-compensating electrodes but only
partially overlies the quadrature-compensating electrodes, such
that capacitive coupling between the plate and each of the
quadrature-compensating electrodes is dependent on the rotational
position of the shuttle while capacitive coupling between the plate
and the Coriolis-sensing and in-phase-compensating electrodes is
substantially independent of the rotational position of the
shuttle. In this exemplary embodiment, the plates are positioned so
as to align with the x and y axes (i.e., at approximately 45 degree
angles relative to the a and b axes). It should be noted that, in
this exemplary embodiment, the Coriolis-sensing electrodes are not
aligned with any of the drive combs 128. It also should be noted
that the velocity sensing electrodes 130 and the
quadrature-compensating electrodes are somewhat interchangeable; a
particular pair of electrodes may be used for velocity sensing
and/or quadrature adjustment as desired for a particular
implementation. The various electrodes are discussed in more detail
below.
[0043] While the shuttles are oscillating at their resonance
frequency (f.sub.0), driven via the drive combs 128 with feedback
provided via the velocity sensing electrodes 130, out-of-plane
movements of the gyroscope about the x and y axes cause the
shuttles 102 and 104 to tip out-of-plane relative to the substrate
through Coriolis forces, and these out-of-plane (i.e., Coriolis
axis) movements of the shuttles are detected via the
Coriolis-sensing electrodes through capacitive coupling with the
plates. In this exemplary embodiment, such Coriolis forces are
sensed in two axes by differential capacitance with respect to the
Coriolis-sensing electrodes. For example, a rotation of the
gyroscope about the x-axis can cause plates 114 and 124 to move
toward their respective Coriolis-sensing electrodes while plates
118 and 120 move away from their respective Coriolis-sensing
electrodes, and these movements are detected by changes in
capacitance between each plate and its corresponding
Coriolis-sensing electrode, with the signals obtained from the four
Coriolis-sensing electrodes combined to provide a gyroscope output
signal representing the movement of the gyroscope. Similarly, a
rotation of the gyroscope about the y-axis can cause plates 116 and
126 to move toward their respective Coriolis-sensing electrodes
while plates 112 and 122 move away from their respective
Coriolis-sensing electrodes. It should be noted that the plates
112, 114, 116, 118, 120, 122, 124, and 126 fully overlay their
respective Coriolis-sensing electrodes throughout the entire
rotational range of motion of the shuttles so that signals obtained
from the Coriolis-sensing electrodes are substantially independent
of the rotational displacement of the shuttles.
[0044] As discuss above, even in the absence of any external
movement of the gyroscope, oscillation of the shuttles typically
results in slight out-of-plane movements of the shuttles, for
example, due to imbalances in the shuttles and their respective
support structures, and such out-of-plane movements of the shuttles
can be misinterpreted as Coriolis signals and therefore represent
error signals. As discussed above, such error signals may include
an in-phase component and a quadrature component. While the
quadrature error signals can be substantially greater than the
phase error signals and therefore can swamp electronic circuitry
that compensates for phase errors, it is generally desirable to
remove both error components. In a gyroscope of the type shown in
FIGS. 1 and 2, where the accelerometer resonance mode is
out-of-plane with the shuttle resonance mode, it is generally
impractical to use mechanical structures (e.g., levers and
flexures) to eliminate the quadrature and in-phase error
components.
[0045] In order to detect and/or reduce in-phase errors such as
in-phase error caused by misalignment of the resonator drive
mechanism, in-phase error caused by aerodynamic effects, and
in-phase error caused by electrical feed-through from the drive
system to the accelerometer sense electronics, embodiments of the
present invention modulate the drive signal provided to the drive
combs 128 by a high-frequency test (carrier) signal to induce
in-phase accelerometer offset signals in the Coriolis output. The
test signal is provided in a manner that does not affect the
Coriolis signals, such as at an out-of-band frequency sufficiently
below the resonator frequency, so that the shuttles will respond to
the test signals without substantially changing the resonator
amplitude. For example, in an exemplary embodiment, the gyroscope
response may be below approximately 32 Hz, and the resonator
frequency (f0) may be approximately 64 KHz, and the test signal
frequency may be approximately 1 KHz to 8 KHz (i.e., f0/64 to
f0/8). The drive signal may be modulated using amplitude
modulation, frequency modulation, on/off keying, a spread spectrum
technique, or other appropriate modulation technique. Furthermore,
the modulation applied to the drive signal preferably averages to
zero over time.
[0046] The in-phase offset errors may be reduced by imparting
compensating forces on the resonator and/or the accelerometer to
adjust such things as movement of the shuttles in the device plane
(e.g., using trim electrodes that affect in-plane movements of the
shuttles) or movement of the shuttles out-of-plane (e.g., in the
accelerometer axis) based on the induced in-phase accelerometer
offset signals in the Coriolis output, e.g., by placing an
appropriate biasing voltage on the in-phase-compensating electrodes
until there are no signals in the Coriolis output corresponding to
the test signal. Additionally or alternatively, pass-through from
the drive electronics to other electronic systems such as the
Coriolis sensing electronics may be reduced electronically based on
the induced in-phase accelerometer offset signals in the Coriolis
output, e.g., by applying a compensating signal at the input of the
Coriolis channel amplifier. Some exemplary circuit configurations
for mitigating in-phase offset errors and mitigating signal
pass-through are described below.
[0047] Quadrature errors may be reduced by exerting a net torque on
the shuttles in the Coriolis axis (i.e., out of the device plane)
in a manner similar to that described by Clark in U.S. Pat. No.
5,992,233 or Geen in U.S. Pat. No. 7,032,451, each of which is
hereby incorporated herein by reference in its entirety. In the
exemplary embodiment shown in FIGS. 1 and 2,
quadrature-compensating electrodes on the substrate positioned
under the edges of the plates (i.e., quadrature-compensating
electrodes 112Q, 114Q, 116Q, 118Q, 120Q, 122Q, 124Q, and 126Q) as
well as under the radial edges of the eight spokes of each shuttle
positioned between the a-oriented and b-oriented spokes (i.e.,
quadrature-compensating electrodes 132; for convenience, only four
of the sixteen pairs of quadrature-compensating electrodes 132 are
highlighted) are used for making quadrature adjustments, although
in alternative embodiments, similar quadrature adjustments can be
made, for example, by applying bias voltages to the Coriolis
sensing electrodes. A DC quadrature adjustment signal is applied to
the quadrature adjusting electrodes so as to exert a net torque on
the shuttles. Since the quadrature-compensating electrodes extend
beyond the edges of the plates and spokes, the torque produced by
the quadrature-compensating electrodes is proportional to the
vibratory displacement of the shuttles in the device plane and is a
function of the difference between the potentials of the
electrodes. Thus, the torque causes a quadrature motion in the
Coriolis axis (i.e., the axis normal to the device plane) that is
modulated by the potential of the quadrature-compensating
electrodes. Quadrature suppression is also discussed in Lemkin,
U.S. Pat. No. 7,051,590; in Chaumet, U.S. Patent Application
Publication No. 2008/0282833; and in Saukoski, M., System and
Circuit Design for a Capacitive MEMS Gyroscope, Doctoral
Dissertation, TKK Dissertations 116, Helsinki University of
Technology, Espoo, Finland (2008), each of which is hereby
incorporated herein by reference in its entirety.
[0048] FIG. 3 is a schematic block diagram showing electronic
control circuitry suitable for use with the gyroscope 100 for
detecting in-phase offset errors, in accordance with an exemplary
embodiment of the present invention. Among other things, this
electronic circuitry includes an offset detector 310, a quadrature
compensating servo 320, a Coriolis output circuit 330, a shuttle
drive servo 340, and related circuitry.
[0049] The shuttle resonance drive servo 340 provides a modulated
drive signal to the drive combs based on signals received from the
velocity sensing electrodes. The drive signal may be modulated
using amplitude modulation, frequency modulation, on/off keying, a
spread spectrum technique, or other appropriate modulation
technique. In this exemplary embodiment, the drive signal is
modulated using a test signal (labeled in the figure as "MOD")
derived from the phase-locked loop (PLL) circuit 341 that feeds the
resonator drive electronics; in other embodiments, the test signal
may be derived from other sources. Because the resonator is a high
Q system, modulation of the drive force can be done without
substantially changing the oscillation of the resonator and hence
the Coriolis acceleration generated by a rotation rate. As
discussed in detail below, the MOD signal also feeds a demodulator
in the offset detector 310 for extracting a signal representative
of the offset, and the MOD signal may be used to feed a modulator
in the optional in-phase compensating servo 350. The shuttle
resonance drive servo 340 also provides phase and quadrature
reference signals.
[0050] The offset detector 310 receives amplified (301) Coriolis
channel signals from the Coriolis-sensing ("Cor") electrodes,
demodulates (311) the Coriolis channel signals with the MOD
reference, and integrates (312) the demodulated signals to produce
an offset output signal reflecting the offset error. This offset
output signal may be used in and of itself, for example, for
in-situ quality assurance testing during manufacturing or for
device calibration or testing. Additionally or alternatively,
circuitry may be included to mitigate the offset error (e.g., by
adjusting the motion of the shuttles in the device plane) and/or
the effects of offset error based on the offset output signal
(e.g., by adjusting motion of the shuttles in the accelerometer
axis or by adjusting the Coriolis channel signals to remove offset
effects).
[0051] The quadrature servo 320 receives amplified (301) Coriolis
channel signals from the Coriolis-sensing ("Cor") electrodes,
demodulates (321) the Coriolis channel signals with the quadrature
reference, and integrates (322) the demodulated signals to produce
low-frequency differential quadrature nullifying signals that are
fed back to the quadrature adjustment ("Quad") electrodes, as shown
by the feedback signals from the quadrature servo 320 to the
quadrature-compensating (Quad) electrodes.
[0052] The Coriolis output circuit 330 receives amplified (301)
Coriolis channel signals from the Coriolis-sensing ("Cor")
electrodes, demodulates (331) the Coriolis channel signals with the
phase reference, filters (332) the demodulated signals to remove
high-frequency components, and amplifies (333) the filtered signals
to produce the gyroscope output signal.
[0053] FIG. 4 is a schematic block diagram showing the electronic
control circuitry of FIG. 3 including an optional in-phase
compensating servo 350 for mitigating in-phase offset errors, in
accordance with an exemplary embodiment of the present invention.
The in-phase compensating servo 350 generates one or more
compensating signals based on the phase reference, the MOD
reference, the offset output signal from the offset detector 310,
and/or a trim quantity. The compensating signals may be used to
impart compensating forces on the resonator and/or the
accelerometer to adjust such things as movement of the shuttles in
the device plane (e.g., using trim electrodes that affect in-plane
movements of the shuttles) or movement of the shuttles out-of-plane
(e.g., in the accelerometer axis). Additionally or alternatively,
the compensating signals may be used to electronically cancel
pass-through from the drive electronics to other electronic systems
such as the Coriolis sensing electronics.
[0054] FIG. 5 is a schematic block diagram showing the electronic
control circuitry of FIG. 3 including an optional in-phase
compensating servo 360 configured for mitigating the effects of
resonator drive force misalignment, in accordance with an exemplary
embodiment of the present invention. The in-phase compensating
servo 360 includes a modulator 361 that provides a modulated
compensating signal to the in-phase-compensating electrodes. The
modulator 361 is driven by the phase (Ph) and MOD references and by
an in-phase trim 362 (i.e., the offset output signal from the
offset detector 310 adjusted by a trim factor). The in-phase trim
362 is adjusted to cancel in-phase offsets due to resonator drive
misalignment. Since this modulator is intended to cancel
imperfections in the drive system, it should be modulated in
concert with the resonator drive so that the already compensated
imperfections are not exposed by the modulation of the drive
signals. If additional offset is discovered, that offset can be
fed-back into a separate offset cancelling mechanism, for example,
to adjust motion of the shuttles in the device plane. In this
manner, changes in offset can be detected and cancelled without
disturbing the signal of interest, Coriolis acceleration, or
equivalently, rotation rate.
[0055] FIG. 6 is a schematic block diagram showing the electronic
control circuitry of FIG. 3 including an optional in-phase
compensating servo 370 configured for mitigating the effects of
electrical feed-through from the drive electronics to the Coriolis
sensing electronics, in accordance with an exemplary embodiment of
the present invention. The in-phase compensating servo 370 includes
a modulator 371 that provides a modulated compensating signal that
is capacitively coupled at the input of the Coriolis channel
amplifier 301 rather than to the in-phase-compensating electrodes.
The modulator 371 is driven by the phase (Ph) and MOD references
and may also be driven by a trim quantity and/or feedback from the
offset detector 310 as shown in the figure. It should be noted that
the servo 370 is similar to the servo 360 shown in FIG. 5 although
the signal processing and signal levels for the offset cancellation
may be different.
[0056] It should be noted that the electronic control circuitry may
include multiple servos, e.g., one coupled to the
in-phase-compensating electrodes for mitigating drive force
misalignment as discussed above with reference to FIG. 5 and
another coupled to the Coriolis channel amplifier 301 for
mitigating feed-through as discussed above with reference to FIG.
6.
[0057] In the exemplary embodiment shown in FIGS. 1 and 2, each
shuttle includes plates that extend outwardly from the perimeter of
the shuttle, with each plate completely overlaying a corresponding
Coriolis (acceleration sensor) electrode and partially overlaying a
pair of quadrature electrodes on opposite sides of the Coriolis
electrode, such that capacitive coupling between the plate and the
quadrature electrodes is dependent on the rotational position of
the shuttle while capacitive coupling between the plate and the
Coriolis electrode is substantially independent of the rotational
position of the shuttle. It should be noted, however, that
different shuttle and/or electrode configurations may be used in
alternative embodiments. For example, in certain alternative
embodiments, portions of the shuttle perimeter may be in capacitive
coupling with the Coriolis-sensing electrodes.
[0058] FIG. 7 is a schematic top-view diagram of a vibratory
gyroscope in accordance with one alternative embodiment of the
present invention. This vibratory gyroscope operates generally as
the one described above with reference to FIGS. 1 and 2, but is
considered to be a simpler design by virtue of having fewer
structures. Also, the predominant gyroscope structures are oriented
along the up and down axes or at 45 degree angles thereto, which
facilitates micromachining because micromachining equipment (e.g.,
etching equipment) often produce etches based upon a rectilinear
grid and so structures that are aligned with the grid or at 45
degree angles thereto generally may be produced more consistently
and with straighter edges.
[0059] It should be noted that the present invention is not limited
to the gyroscope designs shown in FIGS. 1-2 and 7. In various
alternative embodiments, gyroscopes having one, two, or more (e.g.,
four) shuttles of the types shown and described in Geen, U.S. Pat.
No. 5,635,640 may be used. Furthermore, the present invention is
not limited to shuttles that oscillate rotationally but can be
applied more generally to other types of inertial sensors, e.g.,
vibratory and tuning-fork type gyroscopes, that operate under
similar principles, in which the drive signal can be modulated to
induce corresponding signals in the Coriolis channel. In various
embodiments, the accelerometer mode may be in-plane or out-of-plane
compared with the resonator mode.
[0060] FIG. 8 is a schematic top-view diagram of a vibratory Z axis
gyroscope in accordance with another alternative embodiment of the
present invention. This gyroscope operates generally as disclosed
in Geen, U.S. Pat. No. 6,877,374, which is hereby incorporated
herein by reference in its entirety. Among other things, this
gyroscope structure includes a substantially square frame 210 that
is suspended at its four corners by accelerometer suspension
flexures 202, 204, 206, and 208. On the outside four edges of the
frame 210 are fingers 212, 213, 214, 215, 216, 217, 218, and 219.
Various resonating structures are suspended within the frame 210.
These resonating structures include four movable shuttles 220, 222,
224, and 226, four levers 228, 230, 232, and 234, and two forks 236
and 238. It should be noted that the shuttles 222, 224, and 226 are
substantially the same shape, size, and mass as the shuttle 220,
and are oriented as mirror images of the shuttle 220 along the x
and/or y axes. It should be noted that the levers 230, 232, and 234
are substantially the same shape, size, and mass as the lever 228,
and are oriented as mirror images of the lever 228 along the x
and/or y axes. The four movable shuttles 220, 222, 224, and 226 are
suspended from the frame 210 by flexures 240, 242, 244, and 246,
respectively. Movement of the four movable shuttles 220, 222, 224,
and 226 is controlled electrostatically using electrostatic drivers
248, 250, 252, 254, 256, 258, 260, and 262. There are also
electrostatic structures associated with the levers 228, 230, 232,
and 234 that can be used for driving motion of the levers or
sensing motion of the levers. These and other features of the
micromachined gyroscope structure are described in more detail
below.
[0061] The four accelerometer suspension flexures 202, 204, 206,
and 208 are anchored to the substrate and are configured so as to
substantially restrict movement of the frame 210 along the x axis
and along the y axis (i.e., translational movement) while allowing
the frame 210 to rotate more freely in either direction (i.e.,
rotational movement). Such rotational movement of the frame 110 is
caused mainly from the Coriolis effect due to movement of the frame
of reference of the resonating structures.
[0062] The fingers 212, 213, 214, 215, 216, 217, 218, and 219
extend from the four sides of the frame 210. Positioned between the
fingers 212, 213, 214, 215, 216, 217, 218, and 219 are two sets of
Coriolis sensors that are mechanically coupled to the substrate and
do not move relative to the substrate. Movement of the frame 210
results in movement of the fingers 212, 213, 214, 215, 216, 217,
218, and 219 relative to the Coriolis sensors, which produces a
change in capacitance that can be measured by electronic circuitry
(not shown).
[0063] The resonating structures, including the shuttles 220, 222,
224, and 226, the flexures 240, 242, 244, and 246, the levers 228,
230, 232, and 234, and the forks 236 and 238, are mechanically
coupled. The shuttles 220 and 222 are mechanically coupled via a
pivot flexure 264, and the shuttles 224 and 226 are mechanically
coupled via a pivot flexure 266. The shuttles 220 and 224 are
mechanically coupled via the levers 228 and 230 and the fork 236,
and the shuttles 222 and 226 are mechanically coupled via the
levers 232 and 234 and the fork 238. The pivot flexures 264 and
266, the levers 228, 230, 232, and 234, and the forks 236 and 238
allow the shuttles 220, 222, 224, and 226 to move together.
[0064] The shuttle 220 is suspended from the frame 210 by the
flexure 240, from the shuttle 222 by the pivot flexure 264, and
from the lever 228 by the pivot flexure 268. The shuttle 222 is
suspended from the frame 210 by the flexure 242, from the shuttle
220 by the pivot flexure 264, and from the lever 232 by the pivot
flexure 272. The shuttle 224 is suspended from the frame 210 by the
flexure 244, from the shuttle 226 by the pivot flexure 266, and
from the lever 230 by the pivot flexure 276. The shuttle 226 is
suspended from the frame 210 by the flexure 246, from the shuttle
224 by the pivot flexure 266, and from the lever 234 by the pivot
flexure 280.
[0065] The lever 228 is suspended from the frame 210 by the pivot
flexure 270, from the shuttle 220 by the pivot flexure 268, and
from the lever 230 by the fork 236. The lever 230 is suspended from
the frame 210 by the pivot flexure 278, from the shuttle 224 by the
pivot flexure 276, and from the lever 228 by the fork 236. The
lever 232 is suspended from the frame 210 by the pivot flexure 274,
from the shuttle 222 by the pivot flexure 272, and from the lever
234 by the fork 238. The lever 234 is suspended from the frame 210
by the pivot flexure 282, from the shuttle 226 by the pivot flexure
280, and from the lever 232 by the fork 238.
[0066] The flexures 240, 242, 244, and 246 substantially restrict
movement of the shuttles 220, 222, 224, and 226 respectively along
the y axis, but allow movement of the shuttles 220, 222, 224, and
226 respectively along the x axis. The flexures 240, 242, 244, and
246 also allow the shuttles 220, 222, 224, and 226 respectively to
pivot slightly as they move.
[0067] The pivot flexure 264 essentially locks the shuttles 220 and
222 together so that they move together. Likewise, the pivot
flexure 266 essentially locks the shuttles 224 and 226 together so
that they move together (although oppositely to the shuttles 220
and 222).
[0068] The levers 228 and 230, the fork 236, and the pivot flexures
268, 270, 276, and 278 essentially lock the shuttles 220 and 224
together so that they move in substantially equal but opposite
directions. Likewise, the levers 232 and 234, the fork 238, and the
pivot flexures 272, 274, 280, and 282 essentially lock the shuttles
222 and 226 together so that they move in substantially equal but
opposite directions.
[0069] FIG. 9 is a schematic top-view diagram of a cross-quad Z
axis gyroscope in accordance with another alternative embodiment of
the present invention. This gyroscope operates generally as
disclosed in Geen, U.S. Pat. 7,421,897, which is hereby
incorporated herein by reference in its entirety. Specifically,
four gyroscopes 16A-D are arranged in a vertically and horizontally
coupled cross-quad configuration such that the top pair of
gyroscope frames and the bottom pair of gyroscope frames are
interconnected by couplings 99 that allow anti-phase movements of
the frames along separate parallel Y axes, while the left side pair
of gyroscope frames and the right side pair of gyroscope frames are
interconnected by couplings 95 that allow co-linear anti-phase
movements of the frames. Each gyroscope is preferably supported on
the side opposite the vertical coupling 95 by a suspension 93. The
gyroscopes 16A-D may be similar to the gyroscopes disclosed in U.S.
Pat. Nos. 6,505,511 and 6,122,961, which are hereby incorporated
herein by reference in their entireties.
[0070] FIG. 10 shows a specific cross-quad gyroscope configuration
that can be adapted for mode matching, in accordance with another
alternative embodiment of the present invention. Here, each
gyroscope 50A, 50B, 50C, 50D includes a frame (52A, 52B, 52C, 52D)
and a resonator (54A, 54B, 54C, 54D) movably suspended within the
inner periphery of the frame. The frames 52A and 52B of gyroscopes
50A and 50B are coupled to one another, as are the frames 52C and
52C of gyroscopes 50C and 50D. Furthermore, the frames 52A and 52C
of gyroscopes 50A and 50C are coupled to one another, as are the
frames 52B and 52D of gyroscopes 50B and 50D.
[0071] The resonators of each pair of gyroscopes 50A/50B and
50C/50D operate in anti-phase to one another. Furthermore, in an
exemplary embodiment of the invention, the resonators of gyroscopes
50A and 50B operate in anti-phase to the corresponding resonators
of gyroscopes 50C and 50D. Therefore, the resonators of gyroscopes
that are diagonally opposite operate in phase with one another,
while the resonators of any pair of adjacent gyroscopes operate in
anti-phase with one another.
[0072] Also, the frames of each pair of gyroscopes 50A/50B and
50C/50D are coupled to allow movement in opposite directions but
substantially restrict movement in the same direction. Furthermore,
in accordance with an exemplary embodiment of the invention, the
frames of gyroscopes 50A and 50C are coupled to allow movement in
opposite directions but substantially restrict movement in the same
direction, as are frames of gyroscopes 50B and 50D. The frames of
gyroscopes 50A/50C move in anti-phase to the frames of gyroscopes
50B/50D. Therefore, the frames of gyroscopes that are diagonally
opposite operate in phase with one another, while the frames of any
pair of adjacent gyroscopes operate in anti-phase with one
another.
[0073] The resonators are caused to resonate back and forth in the
X-axis. Rotation of the inertial sensor about the Z-axis causes
displacement of the frames in the Y-axis. For example, under some
conditions, frames 52A and 52C of gyroscopes 50A and 50C move
toward one another while frames 52B and 52D of gyroscopes 50B and
50D move away from one another. Under some other conditions, frames
52A and 52C of gyroscopes 50A and 50C move away from one another
while frames 52B and 52D of gyroscopes 50B and 50D move toward one
another.
[0074] As in the exemplary embodiments described above with
reference to FIGS. 1-2 and 7, the gyroscopes described above with
reference to FIGS. 8-10 are subject to in-phase offset errors,
electronic pass-through, and other errors relating to the drive
signal. For example, in the gyroscope described above with
reference to FIG. 8, in-phase offset errors may impart rotational
forces on the gyroscope frame that produce error signals in the
Coriolis channel. Similarly, in the gyroscope described above with
reference to FIG. 10, in-phase offset errors may impart y-axis
forces on the gyroscope frames that produce error signals in the
Coriolis channel. Errors relating to the drive signal can be
detected by modulating the drive signal and sensing corresponding
signals induced in the Coriolis channel and can be mitigated
electronically, electro-mechanically, or otherwise, e.g.,
substantially as described above with reference to FIGS. 3-6.
[0075] Thus, embodiments of the present invention may include
one-axis (e.g, x-axis, y-axis, or z-axis) inertial sensors,
two-axis (e.g., x-y axis or x-z axis) inertial sensors, and
three-axis inertial sensors.
[0076] Similar to detecting error sources relating to the drive
signal as described above, certain embodiments of the present
invention additionally or alternatively detect error sources
relating to the aerodynamics of the resonator by modulating the
distance between the resonator and the underlying substrate and
detecting accelerometer signals induced by such modulation. Thus,
for example, a drive signal may be provided so as to cause
resonance of the resonator, a modulated test signal may be provided
(e.g., to the quadrature-compensating electrodes, the in-phase
compensating electrodes, and/or to separate test electrodes) to
modulate the distance between the resonator and the underlying
substrate, and accelerometer signals induced by the modulated test
signal may be sensed in order to detect and/or compensate for the
aerodynamics of the resonator. As in embodiments described above,
the test signal may be modulated using one of amplitude modulation,
frequency modulation, on/off keying, and a spread spectrum
modulation. The accelerometer signals may be demodulated based on
the modulation signal used to modulate the test signal. A
compensating signal may be provided to substantially cancel errors
caused by the aerodynamic effects. Compensating signals may be
provided via the in-phase compensating electrodes or other suitable
electrodes. A servo of the type shown in FIG. 5 for driving the
in-phase-compensating electrodes based on the Coriolis channel
output in concert with the modulated test signal used to modulate
the distance between the resonator and the substrate may be used to
detect and/or mitigate aerodynamic effects.
[0077] The embodiments of the invention described above are
intended to be merely exemplary; numerous variations and
modifications will be apparent to those skilled in the art. All
such variations and modifications are intended to be within the
scope of the present invention as defined in any appended
claims.
* * * * *
References