U.S. patent application number 13/695763 was filed with the patent office on 2014-02-27 for automatic optical inspection device.
This patent application is currently assigned to SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.. The applicant listed for this patent is Yung-yu Lin. Invention is credited to Yung-yu Lin.
Application Number | 20140055603 13/695763 |
Document ID | / |
Family ID | 47054059 |
Filed Date | 2014-02-27 |
United States Patent
Application |
20140055603 |
Kind Code |
A1 |
Lin; Yung-yu |
February 27, 2014 |
AUTOMATIC OPTICAL INSPECTION DEVICE
Abstract
Disclosed is an automatic optical inspection device. The
automatic optical inspection device comprises a substrate support
platform, a sensor fixed platform, an image sensor, and a backlight
source. The automatic optical inspection device of the present
invention is capable of inspecting defects in an interior of a
substrate for solving the technical problem that the conventional
automatic optical inspection device fails to inspect the defects in
the interior of the substrate.
Inventors: |
Lin; Yung-yu; (Guangdong,
CN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Lin; Yung-yu |
Guangdong |
|
CN |
|
|
Assignee: |
SHENZHEN CHINA STAR OPTOELECTRONICS
TECHNOLOGY CO., LTD.
Guangdong
CN
|
Family ID: |
47054059 |
Appl. No.: |
13/695763 |
Filed: |
September 21, 2012 |
PCT Filed: |
September 21, 2012 |
PCT NO: |
PCT/CN12/81734 |
371 Date: |
November 1, 2012 |
Current U.S.
Class: |
348/126 |
Current CPC
Class: |
G01N 21/958 20130101;
G01N 21/95 20130101; G01N 2021/9513 20130101 |
Class at
Publication: |
348/126 |
International
Class: |
G01N 21/95 20060101
G01N021/95 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 25, 2012 |
CN |
201210259431.0 |
Claims
1. An automatic optical inspection device, comprising: a substrate
support platform for supporting a substrate to be inspected; a
sensor fixed platform disposed above the substrate to be inspected;
an image sensor disposed to the sensor fixed platform for capturing
the substrate to be inspected; and a backlight source disposed
beneath the substrate to be inspected and corresponding to a
position of the image sensor for irradiating an inspection part of
the substrate to be inspected; the substrate support platform
having a gap part disposed therein, the backlight source movably
disposed in the gap part, the backlight source and the sensor fixed
platform moving synchronously; the gap part further comprising a
blower module disposed therein for providing a lift force for the
substrate to be inspected, the blower module setting wind pressure
according to a weight of the substrate to be inspected, the
backlight source disposed above the blower module.
2. An automatic optical inspection device, comprising: a substrate
support platform for supporting a substrate to be inspected; a
sensor fixed platform disposed above the substrate to be inspected;
an image sensor disposed to the sensor fixed platform for capturing
the substrate to be inspected; and a backlight source disposed
beneath the substrate to be inspected and corresponding to a
position of the image sensor for irradiating an inspection part of
the substrate to be inspected; the substrate support platform
having a gap part disposed therein, the backlight source disposed
in the gap part; the gap part further comprising a transparent
glass support plate disposed therein for supporting the substrate
to be inspected, the backlight source disposed beneath the
transparent glass support plate; an upper surface of the
transparent glass support plate being flush with an upper surface
of the substrate support platform; a light absorbing patch adhered
to the upper surface of the transparent glass support plate for
preventing light on the upper surface of the transparent glass
support plate from being reflected.
3. The automatic optical inspection device of claim 2, wherein the
backlight source is disposed in the gap part, and the backlight
source and the sensor fixed platform move synchronously.
4. The automatic optical inspection device of claim 2, wherein the
backlight source is fixedly disposed in the whole gap part.
5. An automatic optical inspection device, comprising: a substrate
support platform for supporting a substrate to be inspected; a
sensor fixed platform disposed above the substrate to be inspected;
an image sensor disposed to the sensor fixed platform for capturing
the substrate to be inspected; and a backlight source disposed
beneath the substrate to be inspected and corresponding to a
position of the image sensor for irradiating an inspection part of
the substrate to be inspected.
6. The automatic optical inspection device of claim 5, wherein the
substrate support platform has a gap part disposed therein, and the
backlight source is disposed in the gap part.
7. The automatic optical inspection device of claim 6, wherein the
gap part further comprises a blower module disposed therein for
providing a lift force for the substrate to be inspected, and the
backlight source is disposed above the blower module.
8. The automatic optical inspection device of claim 7, wherein the
blower module sets wind pressure according to a weight of the
substrate to be inspected.
9. The automatic optical inspection device of claim 7, wherein the
backlight source is movably disposed in the gap part, and the
backlight source and the sensor fixed platform move
synchronously.
10. The automatic optical inspection device of claim 6, wherein the
gap part further comprises a transparent glass support plate
disposed therein for supporting the substrate to be inspected, and
the backlight source is disposed beneath the transparent glass
support plate.
11. The automatic optical inspection device of claim 10, wherein an
upper surface of the transparent glass support plate is flush with
an upper surface of the substrate support platform.
12. The automatic optical inspection device of claim 10, wherein
the backlight source is movably disposed in the gap part, and the
backlight source and the sensor fixed platform move
synchronously.
13. The automatic optical inspection device of claim 10, wherein
the backlight source is fixedly disposed in the whole gap part.
14. The automatic optical inspection device of claim 10, wherein a
light absorbing patch is adhered to the upper surface of the
transparent glass support plate for preventing light on the upper
surface of the transparent glass support plate from being
reflected.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention generally relates to a substrate
defect inspection field, and more particularly to an automatic
optical inspection device for inspecting defects of a
substrate.
[0003] 2. Description of Prior Art
[0004] Automatic optical inspection is a commonly used method for
inspecting a substrate material, such as a glass substrate et al.,
and a semifinished material in a liquid crystal industry. An
automatic optical inspection device may be used for inspecting
whether an image on a surface of a substrate conforms to rules and
whether dot defects exist due to disruptive materials, and
accurately determining positions of the dot defects due to the
disruptive materials. Generally, a charge-coupled device (CCD)
image sensor of the automatic optical inspection device captures a
substrate to be inspected for obtaining a gray level image of the
substrate to be inspected. Then, it is determined that whether the
dot defects exist on the substrate to be inspected by analyzing the
gray level image.
[0005] FIG. 1 shows a structural diagram of a conventional
automatic optical inspection device. The automatic optical
inspection device comprises an image sensor 11, a sensor fixed
platform 12, a substrate support platform 13, and a substrate
transport module (not shown). When the automatic optical inspection
device is in use, the substrate transport module drives a substrate
14 to be inspected (e.g. a glass substrate) to move on the
substrate support platform 13. Meanwhile, the image sensor 11
captures a surface of the substrate 14 to be inspected. After the
captured image is converted to a gray level image, the gray level
image is compared with a substrate gray level image which is
inputted in advance for determining whether the dot defects exists
on the substrate and positions of the dot defects.
[0006] However, the automatic optical inspection device only can
inspect the dot defects on the surface of the substrate 14 to be
inspected. When the dot defects exist in an interior of the
substrate 14 to be inspected, the dot defects cannot be inspected
and thus the unqualified substrate is transported to a next
process.
[0007] Consequently, there is a need to provide an automatic
optical inspection device for solving the problem in the prior
arts.
SUMMARY OF THE INVENTION
[0008] An objective of the present invention is to provide an
automatic optical inspection device capable of inspecting defects
in an interior of a substrate for solving the technical problem
that the conventional automatic optical inspection device fails to
inspect the defects in the interior of the substrate.
[0009] To solve the above-mentioned problem, a technical scheme
provided by the present invention is as the following.
[0010] The present invention relates to an automatic optical
inspection device. The automatic optical inspection device
comprises:
[0011] a substrate support platform for supporting a substrate to
be inspected;
[0012] a sensor fixed platform disposed above the substrate to be
inspected;
[0013] an image sensor disposed to the sensor fixed platform for
capturing the substrate to be inspected; and
[0014] a backlight source disposed beneath the substrate to be
inspected and corresponding to a position of the image sensor for
irradiating an inspection part of the substrate to be
inspected;
[0015] the substrate support platform having a gap part disposed
therein, the backlight source movably disposed in the gap part, the
backlight source and the sensor fixed platform moving
synchronously;
[0016] the gap part further comprising a blower module disposed
therein for providing a lift force for the substrate to be
inspected, the blower module setting wind pressure according to a
weight of the substrate to be inspected, the backlight source
disposed above the blower module.
[0017] The present invention further relates to an automatic
optical inspection device. The automatic optical inspection device
comprises:
[0018] a substrate support platform for supporting a substrate to
be inspected;
[0019] a sensor fixed platform disposed above the substrate to be
inspected;
[0020] an image sensor disposed to the sensor fixed platform for
capturing the substrate to be inspected; and
[0021] a backlight source disposed beneath the substrate to be
inspected and corresponding to a position of the image sensor for
irradiating an inspection part of the substrate to be
inspected;
[0022] the substrate support platform having a gap part disposed
therein, the backlight source disposed in the gap part;
[0023] the gap part further comprising a transparent glass support
plate disposed therein for supporting the substrate to be
inspected, the backlight source disposed beneath the transparent
glass support plate;
[0024] an upper surface of the transparent glass support plate
being flush with an upper surface of the substrate support
platform;
[0025] a light absorbing patch adhered to the upper surface of the
transparent glass support plate for preventing light on the upper
surface of the transparent glass support plate from being
reflected.
[0026] In the automatic optical inspection device of the present
invention, the backlight source is disposed in the gap part, and
the backlight source and the sensor fixed platform move
synchronously.
[0027] In the automatic optical inspection device of the present
invention, the backlight source is fixedly disposed in the whole
gap part.
[0028] The present invention further relates to an automatic
optical inspection device. The automatic optical inspection device
comprises:
[0029] a substrate support platform for supporting a substrate to
be inspected;
[0030] a sensor fixed platform disposed above the substrate to be
inspected;
[0031] an image sensor disposed to the sensor fixed platform for
capturing the substrate to be inspected; and
[0032] a backlight source disposed beneath the substrate to be
inspected and corresponding to a position of the image sensor for
irradiating an inspection part of the substrate to be
inspected.
[0033] In the automatic optical inspection device of the present
invention, the substrate support platform has a gap part disposed
therein, and the backlight source is disposed in the gap part.
[0034] In the automatic optical inspection device of the present
invention, the gap part further comprises a blower module disposed
therein for providing a lift force for the substrate to be
inspected, and the backlight source is disposed above the blower
module.
[0035] In the automatic optical inspection device of the present
invention, the blower module sets wind pressure according to a
weight of the substrate to be inspected.
[0036] In the automatic optical inspection device of the present
invention, the backlight source is movably disposed in the gap
part, and the backlight source and the sensor fixed platform move
synchronously.
[0037] In the automatic optical inspection device of the present
invention, the gap part further comprises a transparent glass
support plate disposed therein for supporting the substrate to be
inspected, and the backlight source is disposed beneath the
transparent glass support plate.
[0038] In the automatic optical inspection device of the present
invention, an upper surface of the transparent glass support plate
is flush with an upper surface of the substrate support
platform.
[0039] In the automatic optical inspection device of the present
invention, the backlight source is movably disposed in the gap
part, and the backlight source and the sensor fixed platform move
synchronously.
[0040] In the automatic optical inspection device of the present
invention, the backlight source is fixedly disposed in the whole
gap part.
[0041] In the automatic optical inspection device of the present
invention, a light absorbing patch is adhered to the upper surface
of the transparent glass support plate for preventing light on the
upper surface of the transparent glass support plate from being
reflected.
[0042] Comparing with the conventional automatic optical inspection
device, the automatic optical inspection device of the present
invention is capable of inspecting the defects in the interior of
the substrate for solving the technical problem that the
conventional automatic optical inspection device fails to inspect
the defects in the interior of the substrate.
[0043] For a better understanding of the aforementioned content of
the present invention, preferable embodiments are illustrated in
accordance with the attached figures for further explanation:
BRIEF DESCRIPTION OF THE DRAWINGS
[0044] FIG. 1 shows a structural diagram of a conventional
automatic optical inspection device;
[0045] FIG. 2 shows a side view structural diagram of an automatic
optical inspection device according to a first preferable
embodiment of the present invention;
[0046] FIG. 3 shows a cross-sectional view along a sectional line
A-A' in FIG. 2;
[0047] FIG. 4 shows a side view structural diagram of an automatic
optical inspection device according to a second preferable
embodiment of the present invention;
[0048] FIG. 5 shows a cross-sectional view along a sectional line
B-B' in FIG. 4.
[0049] Numerals in the appended figures are described as the
following: [0050] 21: image sensor [0051] 22: sensor fixed platform
[0052] 23: substrate support platform [0053] 231: gap part [0054]
232: blower module [0055] 333: transparent glass support plate
[0056] 334: light absorbing patch [0057] 24: substrate [0058] 25:
backlight source
DETAILED DESCRIPTION OF THE INVENTION
[0059] The following descriptions for the respective embodiments
are specific embodiments capable of being implemented for
illustrations of the present invention with referring to appended
figures. For example, the terms of up, down, front, rear, left,
right, interior, exterior, side, etcetera are merely directions of
referring to appended figures. Therefore, the wordings of
directions are employed for explaining and understanding the
present invention but not limitations thereto.
[0060] In the appended figures, elements having similar structures
are represented as the same numeral.
[0061] Please refer to FIG. 2 and FIG. 3. FIG. 2 shows a side view
structural diagram of an automatic optical inspection device
according to a first preferable embodiment of the present
invention. FIG. 3 shows a cross-sectional view along a sectional
line A-A' in FIG. 2. The automatic optical inspection device
comprises a substrate support platform 23, a sensor fixed platform
22, an image sensor 21, and a backlight source 25. The substrate
support platform 23 is utilized for supporting a substrate 24 to be
inspected (hereinafter referred to as "inspected substrate"). The
sensor fixed platform 22 is disposed above the inspected substrate
24. The image sensor 21 is disposed to the sensor fixed platform 22
for capturing the inspected substrate 24 and acquiring a gray level
image of the inspected substrate 24. The backlight source 25 is
disposed beneath the inspected substrate 24 and corresponding to a
position of the image sensor 21. The image sensor 21 is capable of
accurately determining whether the inspected substrate 24 has
defects (such as dot defects et al.) in an interior of the
inspected substrate 24 by irradiating an inspection part of the
inspected substrate 24.
[0062] The substrate support platform 23 has a gap part 231
disposed therein. The backlight source 25 is movably disposed in
the gap part 231. The backlight source 25 and the sensor fixed
platform 22 move synchronously for ensuring a position of the
backlight source 25 is corresponding to the position of the image
sensor 21. The gap part 231 further comprises a blower module 232
(e.g. an air jet) disposed therein for providing a lift force for
the inspected substrate 24. The backlight source 25 is disposed
above the blower module 232 and movable above the blower module
232. The blower module 232 is capable of setting wind pressure
according to a weight of the inspected substrate 24, such that the
inspected substrate 24 may stably pass above the gap part 231. That
is, a situation that the inspected substrate 24 collides with an
edge of the substrate support platform 23 does not occur when the
wind pressure is small, and a situation that the inspected
substrate 24 moves unstably does not occur when the wind pressure
is large. If the inspected substrate 24 is heavy, the wind pressure
of the blower module 232 is set to be high. If the inspected
substrate 24 is light, the wind pressure of the blower module 232
is set to be low.
[0063] When the automatic optical inspection device of the present
embodiment is in use, the wind pressure of the blower module 232 is
set according to the weight of the inspected substrate 24. Then,
the inspected substrate 24 is placed on the substrate support
platform 23. A substrate transport module (not shown) drives the
inspected substrate 24 to move in an X-direction in FIG. 2. When
the inspected substrate 24 passes the gap part 231 of the substrate
support platform 23, the inspected substrate 24 is above the gap
part 231 due to effect of the blower module 232. The backlight
source 25 and the sensor fixed platform 22 move synchronously (in a
direction as shown in FIG. 3). The image sensor 21 of the sensor
fixed platform 22 performs a defect inspection on the inspected
substrate 24 on the gap part 231. Since the backlight source 25 is
disposed beneath the inspected substrate 24 and the image sensor 21
is disposed above the inspected substrate 24, light emitted from
the backlight source 25 can pass through an inspection part of the
inspected substrate 24. In such a manner, defects on a surface of
the inspected substrate 24 affect the gray level image acquired by
the image sensor 21, and the defects in the interior of the
inspected substrate 24 also affect the gray level image acquired by
the image sensor 21. Accordingly, it may be determined that whether
the detects exist on the surface or in the interior of the
inspected substrate 24 by comparing the gray level image acquired
by the image sensor 21 with a substrate gray level image which is
inputted in advance. Herein, the inspected substrate 24 may be a
pure glass substrate or a substrate which comprises a metal layer
(an opaque material and so on) deposited therein and has a specific
function.
[0064] Please refer to FIG. 4 and FIG. 5. FIG. 4 shows a side view
structural diagram of an automatic optical inspection device
according to a second preferable embodiment of the present
invention. FIG. 5 shows a cross-sectional view along a sectional
line B-B' in FIG. 4. A difference between the present embodiment
and the first embodiment is that the present embodiment does not
comprise the blower module disposed in the gap part 231 of the
substrate support platform 23, but a transparent glass support
plate 333 is disposed for supporting the inspected substrate 24.
The backlight source 25 is disposed beneath the transparent glass
support plate 333. An upper surface of the transparent glass
support plate 333 is flush with an upper surface of the substrate
support platform 23.
[0065] The backlight source 25 is movably disposed in the gap part
231. Meanwhile, the backlight source 25 and the sensor fixed
platform 22 move synchronously for ensuring performing a defect
inspection on an inspection part of the inspected substrate 24.
[0066] Certainly, the backlight source 24 may be fixedly disposed
in the whole gap part 231. Accordingly, the backlight source 25 is
not required moving. The sensor fixed platform 22 drives the image
sensor 21 to move above the gap part 231 for performing the defect
inspection on the inspection part of the inspected substrate
24.
[0067] To improve inspection effect of the image sensor 21, a light
absorbing patch 334 is adhered to an upper surface of the
transparent glass support plate 333 for preventing reflection (a
thickness ratio of the light absorbing patch 334 and the
transparent glass support plate 333 is only exemplary and not a
practical thickness ratio). The light absorbing patch 334 may avoid
that an erroneous judgment occurs when light on the upper surface
of the transparent glass support plate 333 reflects and influences
the gray level image which is acquired by the image sensor 21. The
light absorbing patch 334 absorbs only unidirectional light. The
light from the backlight source 25 may pass through the light
absorbing patch 334 without being absorbed.
[0068] When the automatic optical inspection device of the present
embodiment is in use, the inspected substrate 24 is placed on the
substrate support platform 23. A substrate transport module (not
shown) drives the inspected substrate 24 to move in a Y-direction
in FIG. 4. When the inspected substrate 24 passes the transparent
glass support plate 333 (i.e. the gap part 231 of the substrate
support platform 23), the backlight source 25 and the sensor fixed
platform 22 move synchronously (in a direction as shown in FIG. 5,
certainly, the backlight source 25 may also be fixedly disposed).
The image sensor 21 of the sensor fixed platform 22 performs the
defect inspection on the inspected substrate 24 on the transparent
glass support plate 333. Since the backlight source 25 is disposed
beneath the inspected substrate 24 and the image sensor 21 is
disposed above the inspected substrate 24, light emitted from the
backlight source 25 can pass through an inspection part of the
inspected substrate 24. In such a manner, defects on a surface of
the inspected substrate 24 affect a gray level image acquired by
the image sensor 21, and detects in an interior of the inspected
substrate 24 also affect the gray level image acquired by the image
sensor 21. Accordingly, it may be determined that whether detects
exist on the surface or in the interior of the inspected substrate
24 by comparing the gray level image acquired by the image sensor
21 with a substrate gray level image which is inputted in advance.
Herein, the inspected substrate 24 may be a pure glass substrate or
a substrate which comprises a metal layer (an opaque material and
so on) deposited therein and has a specific function.
[0069] Since the transparent glass support plate 333 is substituted
for the blower module for supporting the inspected substrate 24 on
the gap part 231 and the upper surface of the transparent glass
support plate 333 is flush with the upper surface of the substrate
support platform 23, the weight of the inspected substrate 24 does
not influence the moving of the inspected substrate 24.
Accordingly, the inspected substrate does not collide with an edge
of the substrate support platform 23. Compatibility of the
automatic optical inspection device of the present invention may be
increased for different sizes of the inspected substrate 24.
[0070] The automatic optical inspection device of the present
invention is capable of inspecting the defects in the interior of
the substrate for solving the technical problem that the
conventional automatic optical inspection device fails to inspect
the defects in the interior of the substrate.
[0071] As is understood by a person skilled in the art, the
foregoing preferred embodiments of the present invention are
illustrative rather than limiting of the present invention. It is
intended that they cover various modifications and similar
arrangements be included within the spirit and scope of the
appended claims, the scope of which should be accorded the broadest
interpretation so as to encompass all such modifications and
similar structure.
* * * * *