U.S. patent application number 13/937237 was filed with the patent office on 2014-01-16 for apparatus and a method for investigating a sample by means of several investigation methods.
The applicant listed for this patent is JPK Instruments AG. Invention is credited to GERD BEHME, TORSTEN JAHNKE, TILO JANKOWSKI.
Application Number | 20140016119 13/937237 |
Document ID | / |
Family ID | 49781630 |
Filed Date | 2014-01-16 |
United States Patent
Application |
20140016119 |
Kind Code |
A1 |
BEHME; GERD ; et
al. |
January 16, 2014 |
APPARATUS AND A METHOD FOR INVESTIGATING A SAMPLE BY MEANS OF
SEVERAL INVESTIGATION METHODS
Abstract
A sample carrier suitable for receiving a sample, a first
investigation device for investigating the sample and having a
first optical beam path for a first measurement light, a second
investigation device for investigating the sample and having a
second optical beam path for a second measurement light, wherein
the first or the second investigation device comprises a probe
microscope suitable for investigating the sample and an optical
component having a light-permeable section for the first
measurement light and an at least partially reflecting section for
the second measurement light and disposed in the first and in the
second beam path such that the first optical beam path is formed by
a material of the optical component in the light-permeable section
and that the second optical beam path is formed with a
light-reflecting deflection at the at least one partially
reflecting section is provided. An associated method is also
provided.
Inventors: |
BEHME; GERD; (BERLIN,
DE) ; JANKOWSKI; TILO; (BERLIN, DE) ; JAHNKE;
TORSTEN; (BERLIN, DE) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
JPK Instruments AG |
Berlin |
|
DE |
|
|
Family ID: |
49781630 |
Appl. No.: |
13/937237 |
Filed: |
July 9, 2013 |
Current U.S.
Class: |
356/72 ;
356/73 |
Current CPC
Class: |
G01Q 60/02 20130101;
G01N 21/65 20130101; G01N 21/00 20130101; G01Q 30/02 20130101 |
Class at
Publication: |
356/72 ;
356/73 |
International
Class: |
G01N 21/00 20060101
G01N021/00 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 10, 2012 |
DE |
10 2012 013 855.5 |
Claims
1. An apparatus for investigating a sample by means of several
investigation methods comprising: a sample carrier suitable for
receiving a sample to be investigated in a sample receiving region;
a first investigation device suitable for investigating the sample
according to at least one first investigation method, the first
investigation device having a first optical beam path for a first
measurement light; a second investigation device suitable for
investigating the sample according to at least one second
investigation method different from the at least one first
investigation method, the first investigation device having second
optical beam path for a second measurement light, wherein the first
or the second investigation device comprises a probe microscope
suitable for investigating the sample by probe microscopy; and an
optical component having a light-permeable section for the first
measurement light as well as an at least partially reflecting
section for the second measurement light and which is disposed in
the first optical beam path and in the second optical beam path in
such a manner that the first optical beam path is formed by a
material of the optical component in the light-permeable section,
and that the second optical beam path is formed with a
light-reflecting deflection at the at least one partially
reflecting section.
2. The apparatus according to claim 1, wherein the optical
component in the region of the at least partially reflecting
section has a flat at least partially reflecting surface.
3. The apparatus according to claim 1, wherein the optical
component is disposed on the first investigation device.
4. The apparatus according to claim 1, wherein the optical
component is connected to a displacement device which is assigned
to the first and/or the second investigation device in such a
manner that as a result of an investigation-dependent displacement
executed with the aid of the displacement device the optical
component is co-displaced in the first and/or the second
investigation device.
5. The apparatus according to claim 1, wherein the sample to be
investigated is not transparent at least for the second measurement
light.
6. The apparatus according to claim 1, wherein the sample carrier
at least in sections consists of a transparent material for the
second measurement light.
7. The apparatus according to claim 1, wherein measurement light
beams of the second measurement light on the path towards the
sample and/or on the path away from the sample along the second
optical beam path are deflected at the at least partially
reflecting section.
8. The apparatus according to claim 1, wherein measurement light
beams of the first measurement light on the path towards the sample
and/or on the path away from the sample along the first optical
beam path run through the light-permeable section of the optical
component.
9. The apparatus according to claim 1, wherein the at least
partially reflecting section is formed on an inner surface of the
optical component.
10. The apparatus according to claim 1, wherein the first
investigation device is formed on a side of the sample carrier on
which the sample receiving region is formed.
11. The apparatus according to claim 1, wherein the second
investigation device is formed on an opposite side of the sample
carrier facing away from the sample receiving region.
12. The apparatus according to claim 1, wherein the first and/or
the second investigation device comprises an investigation device
from the following group of investigation devices: atomic force
microscope, Raman spectroscope, epi illumination, optical
microscope, absorption measuring device and fluorescence measuring
device.
13. A method for investigating a sample by means of several
investigation methods comprising the following process steps:
disposing a sample to be investigated in a sample receiving region
of a sample carrier; performing a probe microscopic investigation
of the sample using a first investigation method by means of a
first investigation device which comprises a probe microscope using
a first measurement light, wherein a first optical beam path is
formed for the first measurement light which is assigned to the
probe microscope; and performing a further investigation of the
sample using a second investigation method by means of a second
investigation device different from the first investigation method
using a second measurement light, wherein a second optical beam
path is formed for the second measurement light, wherein, when
performing the probe-microscopic investigation, the first optical
beam path is formed by a material of the optical component in a
light-permeable section of an optical component, wherein, when
performing the further investigation, the second optical beam path
is deflected at an at least partially reflecting section of the
optical component by means of light reflection or conversely.
14. The method according to claim 13, wherein the first and the
second investigation are carried out at least temporarily
simultaneously in such a manner that measurement light beams of the
first measurement light run along the first optical beam path and
measurement light beams of the second measurement light run along
the second optical beam path simultaneously.
Description
FIELD OF TECHNOLOGY
[0001] The following relates to an apparatus and a method for
investigating a sample by means of several investigation
methods.
BACKGROUND
[0002] There are numerous methods in which superstructures are
required to investigate a non-transparent sample which require and
therefore restrict the geometric space in the vicinity of the
sample. As an example, mention may be made here of the desire to
examine the object optically with high resolution. For this purpose
an objective is required which, with a high numerical aperture and
good imaging properties, is usually at a short distance from the
object and has a diameter of a few centimetres.
[0003] A further method, for example, a probe microscope, must now
make do with the available space. In this case, however, an optimal
superstructure also requires that the probe and its holder and
adjuster are arranged very compactly. A deviation from this
principle usually results in an embodiment which is no longer
optimal in the sense of the measurement. Accordingly, a compromise
must be found in which the quality of the optical method and the
quality of the other methods must be weighed up against one
another. In the case of the probe microscope, in most cases light
is used for detection in order, for example, to determine the
deflection of the cantilever. It can also be the case that the two
methods must be operated in combination. This is the case, for
example, for TERS ("Tip-Enhanced Raman Spectroscopy"), a method in
which light is guided onto the tip of a probe microscope and
returning light is supplied to a Raman analysis.
SUMMARY
[0004] One aspect relates to an apparatus and a method for
investigating a sample by means of several investigation methods
which, in an integrated measurement system, facilitates the
non-colliding use of the investigation methods executed with the
aid of various investigation devices on one and the same sample.
The apparatus may investigate a sample by means of several
investigation methods according to the independent claim 1 and a
method for investigating a sample by means of several investigation
methods according to the independent claim 13. Exemplary
embodiments are the subject matter of dependent claims.
[0005] An apparatus for investigating a sample by means of several
investigation methods is provided comprising a sample carrier which
is suitable for receiving a sample to be investigated in a sample
receiving region. The sample carrier can consist of one or several
materials. It can have sections which are transparent to light
and/or not transparent to light. It can be provided that the sample
carrier comprises a flat component, for example, a sample carrier
plate. The sample carrier can be received at a retaining device.
The apparatus has a first and a second investigation device which
are suitable for providing a first and a second method of
investigation different from the first for a determination of the
sample. With the aid of the investigation devices, a sample
disposed in the sample receiving region of the sample carrier can
be investigated in various ways, in particular to detect different
measurement results for the sample. In this case, the sample can be
received on the sample carrier in a fluid environment, for example,
a liquid environment.
[0006] The first investigation device has a first optical beam path
for a first measurement light which is used in the first
investigation method. Light beams of the first measurement light
are guided along the first optical beam path when executing the
first investigation method. The second investigation device has a
second beam path for a second measurement light along which light
beams of the second measurement light run when executing the second
investigation method. It can be provided that the first and the
second beam path overlap in one or more subsections which can be
formed separately or cohesively. With the apparatus, an integrated
measurement system is provided which enables the investigation of
samples using several different investigation methods.
[0007] The first and/or the second investigation device comprise a
probe microscope by which means the sample to be investigated can
be investigated by probe microscopy. In the respective
investigation device, the probe microscope can be functionally
assigned the first/second optical beam path in such a manner that
the first/second measurement light is used in the probe-microscopic
investigation of the sample in order to guide the measurement light
along the beam path. Probe microscopes are known in various designs
as such, for example, as a scanning probe microscope, for example,
in the form of an atomic force microscope.
[0008] The apparatus furthermore has an optical component which has
a light-permeable section in which the material of the optical
component is at least partially transparent at least for the first
measurement light. The transparency of the material of the optical
component in the light-permeable section can provide an almost
complete transmission or only a partial transmission for the first
measurement light. The optical component has an at least partially
reflecting section, for example, an at least partially reflecting
surface, which is designed to be light-reflecting at least for the
second measurement light. As a result, light beams of the second
measurement light are reflected at the at least partially
reflecting surface. The reflection can be specific or selective,
for example, with regard to a wavelength-selective reflection
and/or the reflection of selected polarization components. The
first optical beam path runs through the material of the optical
component in the light-permeable section. The second optical beam
path, which is assigned to the second investigation device,
exhibits a deflection of the light beams at the at least one
partially reflecting section which is brought about by light
reflection. The optical component thus enables a configuration both
of the first and of the second optical beam path which does not
hinder the analysis or investigation of the sample, whether this be
at least temporarily simultaneously at different times of the
sample investigation. Both investigation methods can be implemented
using the respective beam path without mutual hindrance,
particularly in the case of a sample which is not transparent
(impermeable to light) for the first and/or the second measurement
light.
[0009] Furthermore, a method for investigating a sample by means of
several investigation methods is provided which comprises the
following process steps: arranging a sample to be investigated in a
sample receiving region of a sample carrier; executing a probe
microscopic investigation of the sample using a first investigation
method by means of a first investigation device comprising a probe
microscope using a first measurement light, where a first optical
beam path is formed for the first measurement light which is
assigned to the probe microscope; and executing a further
investigation of the sample using a second investigation method by
means of a second investigation device different from the first
using a second measurement light where a second optical beam path
is formed here for the second measurement light; where when
executing the probe-microscopic investigation, the first optical
beam path is formed by a material of the optical component in a
light-permeable section of an optical component and where when
executing the further investigation, the second optical beam path
is deflected at an at least partially reflecting section of the
optical component by means of light reflection or conversely. A
probe microscope can be provided in conjunction with the first or
the second investigation device. In the case of providing a
respective probe microscope in the two investigation devices, the
first and the second investigation method can comprise a
probe-microscopic investigation of the sample.
[0010] It can be provided that the sample carrier is received at a
retaining device in such a manner that a relative displacement
between sample carrier with sample in the sample receiving region
on the one hand and elements of the first and/or the second
investigation device on the other hand is possible. For example, a
relative displacement between a measurement probe or a measurement
head of one or both investigation devices relative to the sample
can be made possible in this way.
[0011] In one embodiment the second beam path can additionally run
through the sample carrier, whether this be through an opening
formed therein and/or an at least partially transparent material
section of the sample carrier for the second measurement light. In
general, the optical beam paths are implemented with the aid of
light-guiding components, in particular light-conducting and/or
light-reflecting components. Light beams of the respective
measurement light can then propagate along an optical beam path
thus formed in a guided and directed manner. The optical beam path
can run in air and/or through any at least partially transparent
materials.
[0012] The optical component can, for example, comprise a glass or
a plastic body. The light-permeable section can be formed in a
region of the optical component having mutually plane-parallel end
faces. Quite generally the optical component for the optical beam
paths assigned to the different investigation methods jointly takes
over functional tasks, for example, therefore light deflection
and/or light transmission. The optical component is in this respect
assigned to both investigation devices.
[0013] A further development provides that the optical component
has a flat at least partially reflecting surface in the region of
the at least partially reflecting surface. The flat at least
partially reflecting surface can be formed as an outer surface on
the optical component. In one embodiment the flat surface can be
disposed substantially parallel to the plane of the sample receipt,
for example, in a horizontal position. It can be provided that the
parallel arrangement is also retained in an investigation-dependent
displacement of the optical component relative to the sample. Here
the displacement can be executed free from any change in the
reflection behaviour in the region of the at least partially
reflecting section.
[0014] In one embodiment it can be provided that the optical
component is disposed on the first investigation device. In this
case, the optical element can be held and mounted on an element of
the first investigation device, for example, on the probe
microscope. For example, the optical component on the first
investigation device can be disposed on a side facing the sample
receiving region. If the first investigation device, whether this
be in the design with or without the probe microscope, is disposed
substantially above the sample carrier, the optical component can
be disposed on a lower side of an element of the first
investigation device, detachably or non-detachably. In this or
other embodiments it can be provided that the optical component is
coupled to an adjusting or displacement device which enables the
relative position of the optical component to be varied in relation
to other components of the apparatus for investigating the sample.
For example, the optical component can be received on an adjusting
element which enables a displacement in the x, y and/or z
direction.
[0015] One embodiment provides that the optical component is
connected to a displacement device which is assigned to the first
and/or the second investigation device in such a manner that as a
result of an investigation-dependent displacement executed with the
aid of the displacement device in the first and/or the second
investigation device, the optical component is co-displaced. A
co-displacement of the optical component can take place, for
example, if in one of the investigation methods a measurement probe
or a measurement head is displaced relative to the sample receiving
region with the sample to be investigated. In one embodiment it can
be ensured in this way that the relative position of optical
component to measurement probe or measurement head is maintained so
that in this respect and in this region the associated optical beam
path remains unchanged. Here it can also be provided that the
optical component can be re-adjusted with the aid of the adjusting
device associated with said component.
[0016] A further development provides that the sample to be
investigated is not transparent at least for the second measurement
light. Alternatively the sample to be investigated can be not
transparent for the first measurement light or the first and the
second measurement light. The transparency or non-transparency of
the sample to be investigated can relate to narrower or broader
wavelength ranges, for example, the entire visible range of the
light or sections thereof. However, a transparent or substantially
non-transparent design of the sample can also be given only with
respect to individual wavelengths.
[0017] In one embodiment it can be provided that the sample carrier
consists of a material which is transparent for the second
measurement light, at least in sections. In this way it is possible
that the second optical beam path is also formed through the sample
carrier. Alternatively or additionally to the transparent design of
the material of the sample carrier, one or more openings can be
provided in the sample carrier to provide a light passage at least
for the second measurement light. The sample carrier can be
received in a holder which for its part is impermeable to light.
The sample carrier holder can be formed along the circumferential
edge of the sample carrier on one or more sides, where continuous
and/or interrupted retaining sections can be provided.
[0018] A further development provides that measurement light beams
of the second measurement light on the path towards the sample
and/or on the path away from the sample are deflected along the
second optical beam path at the at least one partially reflecting
section. The measurement light beams of the second measurement
light which are guided along the second optical beam path can run
through the light-permeable section of the optical component on
their path towards the sample receiving region and/or on their path
away from the sample receiving region. In this case, the second
optical beam path does not necessarily detect a direct interaction
of the measurement light beams of the first light with the sample.
On the contrary, for example, the second optical beam path can
exhibit a light deflection at a measurement probe or a measurement
head. Such an investigation method can, for example, be used in
probe microscopes, in particular scanning probe microscopes. There
a so-called cantilever has a light-reflecting surface at which
measurement light beams are deflected. The interaction of the
cantilever with the sample to be investigated changes the light
deflection of the measurement light and delivers a measurement
signal without the measurement light interacting directly with the
sample to be investigated. In other investigation methods, for
example, fluorescence spectroscopy, exciting light is applied to
the sample to be investigated along the optical beam path used.
From the sample fluorescence light beams then pass along the
optical beam path of the investigation device. The aforesaid
explanations apply generally for the various investigation devices
of the apparatus described here. The section of the optical beam
path away from the sample usually leads to a detector device by
which means measurement light beams are detected, whether this be,
for example, fluorescence light or measurement light deflected at
the cantilever.
[0019] In one embodiment it can be provided that measurement light
beams of the first measurement light on the path towards the sample
and/or on the path away from the sample run along the first optical
beam path through the light-permeable section of the optical
component. The explanations put forward previously in connection
with the measurement light beams of the second measurement light
apply accordingly to the measurement light beams of the first
measurement light.
[0020] In one embodiment it can be provided that the at least
partially reflecting section is formed on an inner surface of the
optical component. For example, the inner surface can be formed on
a prism component. The inner surface can be flat or also
curved.
[0021] One embodiment provides that the first investigation device
is disposed on a side of the sample carrier on which the sample
receiving region is formed. The first investigation device can in
this case be disposed above the sample carrier. The sample carrier
divides the spatial region around the sample receiving region with
the sample so that a spatial region above the sample carrier and a
spatial region below the sample carrier are provided. The use of
the proposed optical component enables the investigation devices,
in particular measurement heads or probes provided here, to be
displaced in the immediate vicinity above and/or below the sample
carrier and consequently at a desired measurement distance from the
sample.
[0022] A further development preferably provides that the second
investigation device is disposed on an opposite side of the sample
carrier, facing away from the sample receiving region. If the first
investigation device is disposed on one side of the sample carrier,
an investigation or measurement system is provided with the
embodiment proposed here in which the first investigation device is
disposed on one side of the sample carrier and the second
investigation device is disposed on the opposite side of the sample
carrier. In these or other embodiments it can be provided that the
optical component is disposed on one side of the sample carrier,
i.e. in particular above the sample carrier.
[0023] In one embodiment it can be provided that the first and/or
the second investigation device are an investigation device from
the following group of investigation devices: atomic force
microscope, Raman spectroscope, epi illumination, optical
microscope, absorption measurement device and fluorescence
measurement device. In the various investigation devices, the
respectively associated optical beam path can comprise a light path
between a light source, the region around the sample receiving,
whether this be in direct or non-direct contact with the sample,
and a detector device. In one embodiment, a probe microscope, in
particular scanning probe microscope which has a measurement device
with a cantilever is disposed above the sample carrier. A Raman
spectroscope or spectrometer can be disposed on the underside.
[0024] In connection with the method for investigating the sample
by means of several investigation methods, the explanations put
forward previously for embodiments apply accordingly. It can be
provided that the first and the second investigation by means of
the first and the second investigation method are conducted at
least temporarily simultaneously in such a manner that measurement
light beams of the first measurement light pass along the first
optical beam path and measurement light beams of the second
measurement light pass along the second optical beam path
simultaneously. For this embodiment the optical component also
supports a collision-free investigation.
[0025] At least measurement light beams of the second measurement
light can be guided along the second optical beam path on one or
more sides of the sample past the sample carrier.
[0026] In one embodiment the measurement light beams of one
investigation method can be guided past the sample from below and
directed from a coated glass surface on the optical component back
to the sample. The glass surface itself can be transparent for the
measurement light beams of the other method.
[0027] The glass surface can be exchangeable and adapted to the
particular measurement process.
[0028] The coated glass surface on the optical component can be
provided with an angle or a curvature. It can be provided to add a
further glass surface in order to provide only two parallel
effective boundary surfaces for the light of the other
investigation method. This can be achieved, for example, by
cementing two glass bodies where the cemented surface contains the
necessary coating.
[0029] Light of different wavelength can be used as differentiation
of the measurement beams of the two investigation methods.
Alternatively a different differentiation such as, for example, the
polarisation can also be used.
[0030] A Raman spectrometer or a fluorescence device can be used as
one method. Alternatively an epi illumination or another standard
method can be provided. A combination of these methods can also be
provided. Another method could be illumination.
BRIEF DESCRIPTION
[0031] Further exemplary embodiments are explained in detail
hereinafter with reference to figures of the drawings. In the
figures:
[0032] FIG. 1 shows a schematic view of an apparatus for optical
investigation of a sample;
[0033] FIG. 2 shows a schematic view of an apparatus for optical
investigation of a sample using TERS;
[0034] FIG. 3a shows a first schematic view of a glass body which
can be used as an optical component; and
[0035] FIG. 3b shows a second schematic view of a glass body which
can be used as an optical component.
DETAILED DESCRIPTION
[0036] FIG. 1 shows a sample 1 which is mounted on a transparent
carrier 2. The sample 1 is assumed to be non-transparent.
Transparent in this case always relates to the wavelength used in
each case, which can also lie in the non-visible range.
[0037] By means of the objective 10, light is now sent through the
transparent sample carrier 2 and reflected at a glass body 11
having a coating 17 and focussed to the point 12. The coating 17 is
reflective at least for the wavelength range of interest. The light
beams are represented by the beams 13 and 14, where 13 represents
the outer boundary of the beam and 14 represents the inner boundary
since light having a smaller angle of incidence than 13 will not be
transmitted by the sample 12. A light cone is thus obtained having
a conical cavity in the centre. The smaller the sample 12, the
smaller is the cavity.
[0038] The apparatus 20 for another method which is disposed above
the sample 1 is now only restricted by the glass body 11 and the
light cone spanned by the beams 13 and 14, which in the ideal case
should not be disturbed at all or at least only a little. The other
method requires an optical beam path 29 which must pass through the
glass body 11. For this purpose the glass body 11 and the coating
17 must be constituted so that both are transparent for the light
wavelengths used, at least partially transparent. The beam path 29
can now be used only in one direction or also in both directions.
The beam 29 is only shown as an example and it can be the case that
the light, for example is emitted or detected over the entire
surface 11 in the direction of the sample.
[0039] The body 11 can also consist of a different transparent
material such as, for example, calcium fluoride. It would also be
possible to take a material which has the desired reflecting and
transmitting properties without a coating.
[0040] The space between 2 and 1 and 11 can also be filled with a
fluid without any problems if this is sufficiently transparent for
the methods used.
[0041] FIG. 2 shows an embodiment of an apparatus for determination
of a sample by means of two investigation devices which shows a
TERS measurement ("Tip-enhanced Raman Spectroscopy") on a
non-transparent sample using a probe microscope which can comprise
a scanning probe microscope, in particular an atomic force
microscope. Here the two methods work together in the sense that
the tip 28 of the cantilever 21 is impinged upon by the light cone
reflected at the glass body 11, of which only the left-hand beam 13
is shown here for the sake of clarity. The Raman spectrum amplified
by the tip 28 is then measured in reflection, i.e. it is again
reflected by the glass body 11 into the objective and then fed
behind the objective to a Raman spectrometer not shown. The
cantilever 21 is fastened to a chip 22 which for its part is again
fastened to a holder 23.
[0042] The remaining structure of the probe microscope is
designated in summary by the reference number 27. Only the
detection light is indicated. The beam 24 is the light focussed
onto the cantilever which is frequently produced by a laser and the
beam 25 shows the light reflected by the cantilever. Both light
beams here pass through the glass body 11 according to the
invention. The sample 1 is in turn mounted on a transparent
substrate 2 which is again held by the holder 26.
[0043] Since it can be very important for TERS that the tip 28 is
fixed in relation to the light beam 13, during the TERS measurement
the sample is moved over the scanner 30, where a known embodiment
would be a piezoscanner in three spatial directions. Other scanners
are naturally also feasible. In order that the emitted light 13
effectively illuminates the tip 28, it is generally necessary to
carry out a motion. This can either be achieved by means of a
movement of the light cone 13 or by means of a movement of the tip
28. The movement of the light cone could be achieved, for example,
by executing an angular movement of the light for example in the
rear focal plane of the objective. By means of a movement of the
objective in the vertical direction the focus could be brought onto
the sample. The movement of the tip could be achieved by moving the
holder 23 by means of a scanner 31. Here care should be taken to
ensure that the detection light remains on the cantilever, for
example, by co-scanning it. Naturally the scanner could also be
arranged so that the glass body 11 is co-scanned. The space between
1 and 2 and 11 can be filled with a fluid.
[0044] FIGS. 3a and 3b show other embodiments of the glass body 11
from FIG. 1 and FIG. 2, where glass is only mentioned here as an
example of a possible material.
[0045] FIG. 3a shows two glass bodies 40 and 41 which are cemented
to one another. The sloping boundary surface 42 is coated in the
sense of the invention so that it is reflective for wavelengths of
one method which is located substantially below the sample and is
substantially transparent for wavelengths of the upper method. If,
for example, a parallel glass block was used for example for the
other method located above the sample, almost nothing changes as a
result of the new glass body composed of 40 and 41 and the
measurement can take place undisturbed in the usual manner. The
possible light beams 43 for example for TERS are indicated. These
again come from an objective not shown, which produces a focussing.
In this case, the focus lies outside the optic axis of the
objective.
[0046] FIG. 3b again shows a glass body consisting of two parts 45
and 46 in which the focussing of the light beams 48 required, for
example, for TERS is performed by the boundary surface 47 coated in
the sense of the invention. An objective for one method could then
be dispensed with. In the case of parallel beams 48, the boundary
surface 47 would then be hyperbolic-shaped in the optimal case. A
spherical surface would certainly be easier to produce but would
result in imaging errors. In principle the entire space can be used
here. In particular in the case of an atomic force microscope as
another method, the cantilever can result in a shadowing.
[0047] Other configurations for the boundary surface are naturally
also feasible. It would also be possible for the glass body to
consist of more than two sub-bodies or of different glasses or
materials.
[0048] For the embodiments shown in FIGS. 3a and 3b it can be
provided to arrange the body movably relative to the tip 28 from
FIG. 2 since for TERS for example, the tip must be very accurately
impinged upon by the focal point and in particular for the body
from FIG. 3b there is only one fixed focal point. It may possibly
be sufficient to move the tip with the scanner (31 from FIG. 2) but
it can also be the case that a rough adjustment must be made
previously so that a good adjustment is found in the region of the
scanner.
[0049] The features of the invention disclosed in the preceding
description, the claims and the drawings can be of importance both
individually and in any combination for the implementation of the
invention in its various embodiments.
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