U.S. patent application number 13/985986 was filed with the patent office on 2013-12-05 for cooling ring for welding bellows generating less metal powder.
This patent application is currently assigned to KSM CO., LTD.. The applicant listed for this patent is Yun Ho Kim. Invention is credited to Yun Ho Kim.
Application Number | 20130319649 13/985986 |
Document ID | / |
Family ID | 47883490 |
Filed Date | 2013-12-05 |
United States Patent
Application |
20130319649 |
Kind Code |
A1 |
Kim; Yun Ho |
December 5, 2013 |
COOLING RING FOR WELDING BELLOWS GENERATING LESS METAL POWDER
Abstract
Provided is a cooling ring for welding used to manufacture a
bellows including a plurality of pairs of barriers, each pair
formed of a first barrier and a second barrier disposed to face the
first barrier. The cooling ring includes a body formed as a
circular arc shape, disposed to attach the first barrier and the
second barrier closely to each other while being in contact with at
least one of the first barrier and the second barrier, the body
including copper and a plating layer plating the body. The plating
layer includes at least one selected from the group consisting of
nickel and chrome. Since the cooling ring includes the body having
the circular arc shape including copper and the plating layer
plating the body, it is possible to prevent powder of a metal
having high electrical conductivity, such as copper, aluminum,
gold, and silver, during a welding process.
Inventors: |
Kim; Yun Ho; (Seoul,
KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Kim; Yun Ho |
Seoul |
|
KR |
|
|
Assignee: |
KSM CO., LTD.
Gimpo-Si, Gyeonggi-do
KR
|
Family ID: |
47883490 |
Appl. No.: |
13/985986 |
Filed: |
May 24, 2012 |
PCT Filed: |
May 24, 2012 |
PCT NO: |
PCT/KR2012/004108 |
371 Date: |
August 16, 2013 |
Current U.S.
Class: |
165/185 |
Current CPC
Class: |
B23K 37/003 20130101;
F28F 21/08 20130101; F16J 3/047 20130101 |
Class at
Publication: |
165/185 |
International
Class: |
F28F 21/08 20060101
F28F021/08 |
Foreign Application Data
Date |
Code |
Application Number |
Sep 16, 2011 |
KR |
10-2011-0093651 |
May 23, 2012 |
KR |
10-2012-0054945 |
Claims
1. A cooling ring for welding used to manufacture a bellows
comprising a plurality of pairs of barriers, each pair being formed
of a first barrier and a second barrier disposed to face the first
barrier, the cooling ring comprising: a body formed as a circular
arc shape, disposed to attach the first barrier and the second
barrier closely to each other while being in contact with at least
one of the first barrier and the second barrier, the body
comprising copper; and a plating layer plating the body, wherein
the plating layer comprises at least one selected from the group
consisting of nickel and chrome.
2. The cooling ring of claim 1, wherein the plating layer contains
99 or more parts by weight of nickel for the total 100 parts by
weight.
3. The cooling ring of claim 1, wherein the plating layer contains
99 or more parts by weight of chrome for the total 100 parts by
weight.
4. A cooling ring for welding used to manufacture a bellows
comprising a plurality of pairs of barriers, each pair being formed
of a first barrier and a second barrier disposed to face the first
barrier, the cooling ring disposed to attach the first barrier and
the second barrier closely to each other while being in contact
with at least one of the first barrier and the second barrier, and
the cooling ring comprising at least one selected from the group
consisting of tungsten, molybdenum, nickel, and chrome.
5. The cooling ring of claim 4, containing 99 or more parts by
weight of tungsten for the total 100 parts by weight.
6. The cooling ring of claim 4, containing 99 or more parts by
weight of molybdenum for the total 100 parts by weight.
7. The cooling ring of claim 4, containing 99 or more parts by
weight of nickel for the total 100 parts by weight.
8. The cooling ring of claim 4, containing 99 or more parts by
weight of chrome for the total 100 parts by weight.
Description
TECHNICAL FIELD
[0001] The present invention relates to a cooling ring for welding
a bellows, and more particularly, to a cooling ring for welding a
bellows, which does not generate powder of a metal having high
electrical conductivity such as copper, aluminum, gold, and silver
during a welding process.
BACKGROUND ART
[0002] Bellows are wrinkled tubes capable of maintaining a gastight
seal and simultaneously with stretching, which are generally used
in vacuum devices, semiconductor manufacturing equipment, small
industrial machines, and precision machinery.
[0003] FIGS. 1 and 2 illustrate an example of a bellows 100. The
bellows 100 is used while both ends thereof are being coupled with
flanges 1. A plurality of pairs of barriers 10 and 20 are arranged
in a line in which a first barrier 10 and a second barrier 20
disposed to face the first barrier 10 form one pair thereof and the
first barriers 10 and the second barriers 20, adjacent to each
other are alternately connected to have the shape of a wrinkled
tube.
[0004] To describe a method of manufacturing the bellows 100 in
detail, as shown in FIG. 3, the first barrier 10 and the second
barrier 20 are manufactured by pressing respective metallic sheets,
as shown in FIG. 4, an inner circumferential surface welding part
IW is formed by welding inner ends of the first barrier 10 and the
second barrier to one another, as shown in FIG. 5, the plurality of
pairs of barriers 10 and 20 welded by the inner circumferential
surface welding parts IW are arranged in one line, and as shown in
FIG. 6, an outer circumferential surface welding part OW is formed
by welding outer ends of the first barrier 10 and the second
barrier 20 of mutually adjacent pairs to one another.
[0005] In this case, to form the outer circumferential surface
welding part OW, there are used cooling rings 30 and 130 for
welding a bellows, formed of respective metallic materials, whose
planar shapes are shown in FIGS. 7 and 8 and cross-sectional shapes
are shown in FIGS. 6 and 9.
[0006] The cooling rings 30 and 130 are inserted between outer ends
of the first barrier 10 and the second barrier 20 of each of the
pairs to maintain a distance between the outer ends of the first
barrier 10 and the second barrier 20 to be uniform in such a way
that the first barrier 10 and the second barrier 20 are attached
and clamped closely to each other while rapidly dissipating welding
heat generated when forming the outer circumferential surface part
OW.
[0007] However, since the typical cooling rings 30 and 130 are
formed of a soft metal such as copper, a copper alloy, aluminum,
gold, and silver, metallic powder such as minute copper powder or
aluminum powder are left on an outer circumferential surface of the
bellows 100 after using the cooling rings 30 and 130. Since such
metallic powder has high electrical conductivity, when the bellows
100 is used for a semiconductor device, a defect is caused by an
electrical short-circuit due to the metallic powder in a
semiconductor manufacturing process.
[0008] Accordingly, when using the cooling rings 30 and 130, before
mounting the bellows 100 on a semiconductor device, it is necessary
to remove metallic powder such as copper powder left on the outer
circumferential surface of the bellows 100. Particularly, since the
copper powder is very chemically stable and has high adsorption due
to properties of copper, it is not easily removed from a surface of
the bellows 100 by spraying high pressure gas or chemically
cleaning. Accordingly, it is necessary to manually remove residual
copper powder on the outer circumferential surface of the bellows
100 one by one by a worker.
DETAILED DESCRIPTION OF THE INVENTION
Technical Problem
[0009] The present invention provides a cooling ring for welding a
bellows, whose configuration is improved not to generate powder of
a metal having high electrical conductivity, such as copper,
aluminum, gold, and silver, during a welding process
Technical Solution
[0010] According to an aspect of the present invention, there is
provided a cooling ring for welding used to manufacture a bellows
including a plurality of pairs of barriers, in which each pair is
formed of a first barrier and a second barrier disposed to face the
first barrier. The cooling ring includes a body formed as a
circular arc shape, disposed to attach the first barrier and the
second barrier closely to each other while being in contact with at
least one of the first barrier and the second barrier, the body
including copper and a plating layer plating the body. The plating
layer includes at least one selected from the group consisting of
nickel and chrome.
[0011] The plating layer may contain 99 or more parts by weight of
nickel for the total 100 parts by weight.
[0012] The plating layer may contain 99 or more parts by weight of
chrome for the total 100 parts by weight.
[0013] According to another aspect of the present invention, there
is provided a cooling ring for welding used to manufacture a
bellows including a plurality of pairs of barriers, each pair being
formed of a first barrier and a second barrier disposed to face the
first barrier. The cooling ring is disposed to attach the first
barrier and the second barrier closely to each other while being in
contact with at least one of the first barrier and the second
barrier. The cooling ring includes at least one selected from the
group consisting of tungsten, molybdenum, nickel, and chrome.
[0014] The cooling ring may contain 99 or more parts by weight of
tungsten for the total 100 parts by weight.
[0015] The cooling ring may contain 99 or more parts by weight of
molybdenum for the total 100 parts by weight.
[0016] The cooling ring may contain 99 or more parts by weight of
nickel for the total 100 parts by weight.
[0017] The cooling ring may contain 99 or more parts by weight of
chrome for the total 100 parts by weight.
Advantageous Effects
[0018] Since the cooling ring includes the body having the circular
arc shape including copper and the plating layer plating the body,
it is possible to prevent powder of a metal having high electrical
conductivity, such as copper, aluminum, gold, and silver, during a
welding process.
DESCRIPTION OF THE DRAWINGS
[0019] FIG. 1 is a cross-sectional perspective view illustrating a
general bellows;
[0020] FIG. 2 is a cross-sectional view illustrating the bellows
shown in FIG. 1, cut along a line II-II;
[0021] FIG. 3 is a cross-sectional view illustrating a state in
which a first barrier and a second barrier manufactured by pressing
respective metallic sheets are arranged to face each other;
[0022] FIG. 4 is a cross-sectional view illustrating a state in
which inner ends of a pair of the first barrier and the second
barrier shown in FIG. 3 are welded to each other to form an inner
circumferential surface welding part;
[0023] FIG. 5 is a cross-sectional view illustrating a state in
which, when a plurality of pairs of barriers welded at inner
circumferential surface welding parts are arranged in a line,
cooling rings for welding a bellows are inserted between outer ends
of the first barriers and second barriers of the respective pairs
thereof;
[0024] FIG. 6 is a cross-sectional view illustrating a state in
which outer ends of a mutually adjacent pair of the first barrier
and the second barrier are welded to each other to form outer
circumferential surface welding parts;
[0025] FIG. 7 is a top view illustrating an example of the cooling
ring shown in FIG. 5;
[0026] FIG. 8 is a top view illustrating another example of the
cooling ring shown in FIG. 5;
[0027] FIG. 9 is a cross-sectional view illustrating a state in
which outer ends of a mutually adjacent pair of the first barrier
and the second barrier are welded to each other to form outer
circumferential surface welding parts, using cooling rings for
welding a bellows, which has another cross-sectional shape in
addition to a circular shape;
[0028] FIG. 10 is a cross-sectional view illustrating a cooling
ring for welding a bellows according to an embodiment of the
present invention;
[0029] FIG. 11 is a cross-sectional view illustrating a cooling
ring for welding a bellows according to another embodiment of the
present invention;
[0030] FIG. 12 is a cross-sectional view illustrating a cooling
ring for welding a bellows according to still another embodiment of
the present invention;
[0031] FIG. 13 is a cross-sectional view illustrating a cooling
ring for welding a bellows according to yet another embodiment of
the present invention;
[0032] FIG. 14 is a view illustrating a state in which inner ends
of a pair of the first barrier and a second barrier are welded to
each other by using the cooling rings shown in FIG. 12;
[0033] FIG. 15 is a partially enlarged view illustrating a circled
portion XV of the cooling rings shown in FIG. 14; and
[0034] FIG. 16 is a view illustrating a state in which an inner
circumferential surface welding part is formed on the inner ends of
the pair of the first barrier and the second barrier welded to each
other by using the cooling rings shown in FIG. 15.
BEST MODE
[0035] Hereinafter, the embodiments of the present invention will
be described in detail with reference to the attached drawings.
[0036] FIG. 7 is a top view illustrating a cooling ring 30 for
welding a bellows according to an embodiment of the present
invention, and FIG. 10 is a cross-sectional view illustrating the
cooling ring 30.
[0037] Referring to FIGS. 7 and 10, the cooling ring 30 is used for
manufacturing a bellows 100 and is, as shown in FIG. 1, inserted
into an interval between a first barrier 10 and a second barrier 20
in order to attach the first barrier 10 and the second barrier 20
closely to each other while being in contact with at least one of
the first barrier 10 and the second barrier 20. The cooling ring 30
includes a body 35 and a plating layer 36.
[0038] The body 35 is, as shown in FIGS. 7 and 10, a ring element
having the shape of a circular arc with a gap 33 and may include at
least one of metals such as copper, an copper alloy, aluminum,
gold, and silver, whose melting points are relatively low and
electrical conductivities are relatively high. In the present
embodiment, the body 35 is formed of copper. In this case, pure
copper has heat conductivity of 401 W/m, a melting point of 1084,
and Vickers hardness of 369 Mpa, in which the heat conductivity is
relatively high and the Vickers hardness is relatively low.
[0039] The plating layer 36, as shown in FIG. 10, is a metallic
layer plating the body 35 and includes at least one selected from
the group consisting of nickel and chrome. In the present
embodiment, the plating layer 36 contains 99 or more parts by
weight of nickel for the total 100 parts by weight, which is close
to pure nickel. In this case, pure nickel has heat conductivity of
90.9 W/m, a melting point of 1455, and hardness of 638 Mpa, and
pure chrome has heat conductivity of 93.9 W/m, a melting point of
1907, and Vickers hardness of 1060 Mpa. Accordingly, in the case of
nickel and chrome, heat conductivities thereof are lower than that
of copper but melting points and Vickers hardness thereof are
higher than those of copper. On the other hand, since electrical
conductivity of a metal is proportional to heat conductivity
thereof, copper has higher electrical conductivity than nickel and
chrome.
[0040] Since the cooling ring 30 formed as described above includes
the body 35 having the shape of a circular arc including copper and
the plating layer 36 formed of nickel plating the body 35, the body
35 formed of copper having relatively lower Vickers hardness and
melting point is protected by the plating layer 36 formed of nickel
having relatively higher Vickers hardness and melting point.
Accordingly, as shown in FIG. 6, although being used for welding
the bellows 100, copper powder having high electrical conductivity
is not left on an outer circumferential surface of the bellows
100.
[0041] Accordingly, when the bellows 100 is used for a
semiconductor device, the cooling ring 30 does not cause a defect
occurring due to the copper powder in a semiconductor manufacturing
process. On the other hand, in the case of the cooling ring 30,
although a tiny amount of nickel powder may occur, since the
melting point and Vickers hardness of nickel are relatively high
and electrical conductivity thereof is relatively low, a defect
does not occur in the semiconductor manufacturing process.
[0042] In the present embodiment, although a metal close to pure
nickel is used as the plating layer 36, since containing 99 or more
parts by weight of chrome for the total 100 parts by weight, the
plating layer 36 may be a metal close to pure chrome.
[0043] In the present embodiment, the cooling ring 30 is formed as
a ring element having the shape of a circular arc including the gap
33 but, as shown in FIG. 8, may include a pair of semicircular
elements 31 and 32. When using the pair of semicircular elements 31
and 32, the cooling ring 30 may be separated from the bellows 100
with no deformation and may be reused repetitively.
[0044] In the present embodiment, the cooling ring 30 is formed to
have a circular cross-section. However, as shown in FIGS. 9 and 11,
a cooling ring 130 having another cross-section other than a
circular shape may be formed. The cooling ring 130 includes a first
surface 131 corresponding to a shape of the first barrier 10, a
second surface 132 corresponding to a shape of the second barrier
20, an outer circumferential surface 133 connecting outer ends of
the first surface 131 and the second surface 132 to each other.
Step parts 134 that are depressed are formed on both ends of the
outer circumferential surface 133. The cooling ring 130 may easily
provide a work space needed while welding the outer circumferential
surface welding part OW due to the step parts 134, and a depth of
insertion into the interval between the first barrier 10 and the
second barrier 20 may be easily controlled by the first surface 131
and the second surface 132.
[0045] On the other hand, in FIG. 12, there is shown a cooling ring
230 for welding a bellows according to still another embodiment of
the present invention. The cooling ring 230, different from the
cooling ring 30, does not include the plating layer 36 and is
formed of a metallic material including at least one selected from
the group consisting of tungsten, molybdenum, nickel, and chrome.
In this case, pure tungsten has heat conductivity of 173 W/m, a
melting point of 3420, and Vickers hardness of 3430 Mpa, and pure
molybdenum has heat conductivity of 138 W/m, a melting point of
2623, and Vickers hardness of 1530 Mpa. Accordingly, in the case of
the tungsten and the molybdenum, the heat conductivities thereof
are lower than that of copper but the melting points and the
Vickers hardness thereof are very higher than those of copper. All
electrical conductivities, the melting points, the Vickers hardness
of the tungsten and the molybdenum are relatively higher than those
of nickel and chrome. On the contrary, costs of the tungsten and
the molybdenum are higher than those of nickel and chrome.
[0046] In the present embodiment, the cooling ring 230 is formed of
a metallic material containing 99 or more parts by weight of
tungsten for the total 100 parts by weight, which is close to pure
tungsten.
[0047] Since the cooling ring 230 formed as described above is
formed of the metallic material close to pure tungsten having both
melting point and Vickers hardness relatively higher than those of
copper, nickel, and chrome, although being used for manufacturing a
large size of the bellows 100, in which a welding temperature is
high and a large amount of welding heat occurs, the cooling ring
230 is not easily melted down and does not leave copper powder.
[0048] Also, since the cooling ring 230 uses tungsten having more
excellent electrical conductivity than that of nickel used for the
cooling ring 30, welding heat occurring during a welding process
may be more rapidly dissipated than the cooling ring 30.
[0049] In the present embodiment, the cooling ring 230 is formed of
the metallic material close to pure tungsten. However, the cooling
ring 230 may be formed of one selected from the group consisting of
a metal containing 99 or more parts by weight of molybdenum for the
total 100 parts by weight, close to pure molybdenum, a metal
containing 99 or more parts by weight of nickel for the total 100
parts by weight, close to pure nickel, and a metal containing 99 or
more parts by weight of chrome for the total 100 parts by weight,
close to pure chrome.
[0050] In the present embodiment, the cooling ring 230 is formed to
have a circular cross-section. However, as shown in FIGS. 9 and 13,
a cooling ring 330 having another cross-section other than a
circular shape may be formed.
[0051] On the other hand, FIG. 14 illustrates a state in which the
inner ends of a pair of the first barrier 10 and the second barrier
20 are welded to each other by using the cooling rings 230.
[0052] The cooling rings 230 are provided as one pair thereof and
are mounted on a first jig 40 and a second jig 50,
respectively.
[0053] The first jig 40 is a metallic element having a ring shape
manufactured by using stainless steel, in which a hollow part 44 is
formed in the center and a first mounting part 41, a first space
part 42, and a first coupling part 43 are formed on a bottom
surface.
[0054] The first mounting part 41 is projected downwards along an
edge of a bottom end of the hollow part 44, the first space part 42
is a space formed outside the first mounting part 41, and the first
coupling part 43 is a groove formed outside the first space part
42.
[0055] On a bottom end of the first mounting part 41, one of the
cooling rings 230 is mounted.
[0056] The first jig 50 is a metallic element having the shape of a
circular plate manufactured by using stainless steel, in which a
second mounting part 51, a second space part 52, and a second
coupling part 53 are formed on a top surface.
[0057] The second mounting part 51 is a part on which the other of
the cooling rings 230 is mounted, is projected upwards from a top
surface of a bottom part 54, and is formed at a location
corresponding to the first mounting part 41.
[0058] The second space part 52 is a space formed outside the
second mounting part 51, is formed in a location corresponding to
the first space part 42, and may contain outer ends of the pair of
the first barrier 10 and the second barrier 20 in cooperation with
the first space part 42.
[0059] The second coupling part 53 is a projected part formed
outside the second space part 52, which is detachably coupled and
fastened to the first coupling part 43.
[0060] An inner surface 55 of the second coupling part 53 is formed
of a cylindrical circumferential surface having a predetermined
diameter to allow outer end parts of the pair of the first barrier
10 and the second barrier 20 to be in contact therewith and
supported thereby.
[0061] The pair of the first barrier 10 and the second barrier 20
are disposed on a top surface of the second jig 50 as described
above, a bottom surface of the first jig 40 is disposed to face the
top surface of the second jig 50, and then the first jig 40 and the
second jig 50 are attached closely to each other. Then, as shown in
FIG. 15, the cooling ring 230 of the first jig 40 is depressed in
contact with a top surface of an inner end of the first barrier 10
and the cooling ring 230 of the second jig 50 is depressed in
contact with a bottom surface of an inner end of the second barrier
20.
[0062] As described above, in a state in which the first barrier 10
and the second barrier 20 are attached closely to each other, when
the inner ends of the first barrier 10 and the second barrier 20
are welded to each other through the hollow part 44 of the first
jig 40, an inner circumferential surface welding part IW is formed
as shown in FIG. 16.
[0063] Since the first jig 40 includes the hollow part 44 formed in
the center, as shown in FIG. 15, accessibility to the inner ends of
the first barrier 10 and the second barrier 20 attached closely to
each other is excellent, thereby conveniently welding the inner
ends of the first barrier 10 and the second barrier 20.
[0064] Also, since the second jig 50 includes the second coupling
part 53 including the cylindrical inner surface 55 having the
predetermined diameter to allow the outer end parts of the pair of
the first barrier 10 and the second barrier 20 to be in contact
therewith and supported thereby, the first barrier 10 and the
second barrier 20 may be stably fastened to an accurate location
with no shake.
[0065] Also, since including the first coupling part 43 and the
second coupling part 53 coupled and fastened to each other to be
detachable, respectively, the first jig 40 and the second jig 50
may be easily coupled with each other at an accurate location with
no shake in a coupled state.
[0066] While the present invention has been particularly shown and
described with reference to exemplary embodiments thereof, it will
be understood by those of ordinary skill in the art that various
changes in form and details may be made therein without departing
from the spirit and scope of the present invention as defined by
the following claims.
* * * * *