U.S. patent application number 13/854882 was filed with the patent office on 2013-11-14 for material storage and dispensing packages and methods.
The applicant listed for this patent is ADVANCED TECHNOLOGY MATERIALS, INC. Invention is credited to Michele J. Alberg, Tim Hoyt, John R. Kingery, Kirk Mikkelsen, Kevin T. O'Dougherty, Patrick M. Olson, Glenn M. Tom.
Application Number | 20130301959 13/854882 |
Document ID | / |
Family ID | 37215401 |
Filed Date | 2013-11-14 |
United States Patent
Application |
20130301959 |
Kind Code |
A1 |
Tom; Glenn M. ; et
al. |
November 14, 2013 |
MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS
Abstract
Packages and methods for storage and dispensing of materials,
e.g., high purity liquid reagents and chemical mechanical polishing
compositions used in the manufacture of microelectronic device
products, including containment structures and methods adapted for
pressure-dispensing of high-purity liquids. Liner packaging of
liquid or liquid-containing media is described, in which zero or
near-zero head space conformations are employed to minimize adverse
effects of particle generation, formation of bubbles and
degradation of contained material.
Inventors: |
Tom; Glenn M.; (Bloomington,
MN) ; Kingery; John R.; (Eden Prairie, MN) ;
O'Dougherty; Kevin T.; (Arden Hills, MN) ; Mikkelsen;
Kirk; (Chaska, MN) ; Alberg; Michele J.;
(Minnetonka, MN) ; Olson; Patrick M.; (Victoria,
MN) ; Hoyt; Tim; (Prior Lake, MN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
ADVANCED TECHNOLOGY MATERIALS, INC |
Danbury |
CT |
US |
|
|
Family ID: |
37215401 |
Appl. No.: |
13/854882 |
Filed: |
April 1, 2013 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
11912629 |
Dec 23, 2008 |
|
|
|
PCT/US2006/015605 |
Apr 25, 2006 |
|
|
|
13854882 |
|
|
|
|
60674578 |
Apr 25, 2005 |
|
|
|
60761608 |
Jan 24, 2006 |
|
|
|
Current U.S.
Class: |
383/109 |
Current CPC
Class: |
B65D 83/62 20130101;
B65D 33/00 20130101; Y10T 428/31757 20150401; B65B 31/003 20130101;
B65D 83/0061 20130101; Y10T 428/249981 20150401 |
Class at
Publication: |
383/109 |
International
Class: |
B65D 33/00 20060101
B65D033/00 |
Claims
1. A liner arranged to hold a liquid or liquid-containing material,
the liner comprising: a first sheet including an inner ply adjacent
to a separate outer ply that includes at least one of an ethylene
vinyl alcohol (EVOH) layer and a nylon layer; a second sheet
including an inner ply adjacent to a separate outer ply that
includes at least one of an EVOH layer and a nylon layer; and at
least one welded edge seam joining the first sheet to the second
sheet proximate to edges of the first sheet and the second sheet to
form a liner adapted to hold a liquid or liquid-containing material
therein.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. patent
application Ser. No. 11/912,629 filed on Oct. 25, 2007, which was
filed under the provisions of 35 U.S.C. .sctn.371 based on and
claiming priority of International Patent Application No.
PCT/US06/15605 filed on Apr. 25, 2006, which claims priority of
U.S. Provisional Patent Application No. 60/674,578 filed on Apr.
25, 2005 and entitled "ZERO HEAD SPACE/MINIMUM HEAD SPACE
LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS ADAPTED FOR
PRESSURE DISPENSING and further claims priority of U.S. Provisional
Patent Application No. 60/761,608 filed on Jan. 24, 2006 and
entitled MATERIAL STORAGE AND DISPENSING PACKAGES AND METHODS.
Related subject matter is also disclosed U.S. Provisional Patent
Application No. 60/674,579 filed on Apr. 25, 2005 and entitled
"LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY
DETECTION CAPABILITY," and U.S. Provisional Patent Application No.
60/674,577 filed on Apr. 25, 2005 and entitled for "APPARATUS AND
PROCESS FOR STORAGE AND DISPENSING OF CHEMICAL REAGENTS AND
COMPOSITIONS." The disclosures of all such applications are hereby
incorporated by reference herein in their respective
entireties.
FIELD OF THE INVENTION
[0002] The present invention relates generally to material
containment systems that are useful for storage and dispensing of
chemical reagents and compositions, e.g., high purity liquid
reagents and chemical mechanical polishing compositions used in the
manufacture of microelectronic devices, and in various embodiments
adapted for pressure dispensing of liquids or other fluids.
DESCRIPTION OF THE RELATED ART
[0003] In many industrial applications, chemical reagents and
compositions are required to be supplied in a high purity state,
and specialized packaging has been developed to ensure that the
supplied material is maintained in a pure and suitable form,
throughout the package fill, storage, transport, and ultimate
dispensing operations.
[0004] In the field of microelectronic device manufacturing, the
need for suitable packaging is particularly compelling for a wide
variety of liquids and liquid-containing compositions, since any
contaminants in the packaged material, and/or any ingress of
environmental contaminants to the contained material in the
package, can adversely affect the microelectronic device products
that are manufactured with such liquids or liquid-containing
compositions, rendering the microelectronic device products
deficient or even useless for their intended use.
[0005] As a result of these considerations, many types of
high-purity packaging have been developed for liquids and
liquid-containing compositions used in microelectronic device
manufacturing, such as photoresists, etchants, chemical vapor
deposition reagents, solvents, wafer and tool cleaning
formulations, chemical mechanical polishing compositions, etc.
[0006] One type of high-purity packaging that has come into such
usage includes a rigid outer pack containing a liquid or
liquid-based composition, or other material, in a flexible liner or
bag that is secured in position in the rigid outer pack by
retaining structure such as a lid or cover. Such packaging is
commonly and variously referred to as "bag-in-box,"
"bag-in-container," or "bag-in-drum" packaging, depending on the
specific form of the rigid outer pack. The rigid outer pack of the
packaging may for example be formed of a high-density polyethylene
or other polymer or metal, and the liner may be provided as a
pre-cleaned, sterile collapsible bag of a polymeric film material,
such as polytetrafluoroethylene (PTFE), low-density polyethylene,
polyethylene-based multilayer laminates, PTFE-based multilayer
laminates, polyurethane, or the like, selected to be inert to the
contained liquid or liquid-based material to be contained in the
liner. Packaging of such type is commercially available under the
trademark NOWPAK from ATMI, Inc. (Danbury, Conn., USA).
[0007] In the dispensing operation involving such liner packaging
of liquids and liquid-based compositions, the liquid is dispensed
from the liner by connecting a dispensing assembly including a dip
tube to a port of the liner, with the dip tube immersed in the
contained liquid. After the dispensing assembly has been thus
coupled to the liner, fluid pressure is applied on the exterior
surface of the liner, so that it progressively collapses and forces
liquid through the dispensing assembly for discharge to associated
flow circuitry to an end-use site. Alternatively, a negative
pressure can be applied to the outlet of the liner or to a
dispensing assembly connected thereto, in order to draw the liquid
out of the package.
[0008] When liquid materials are shipped in liner-based packages of
such type, a gas space is generally maintained above the liquid, as
a headspace gas to accommodate thermal expansion and contraction of
the liquid without excessive mechanical strain being placed on the
container.
[0009] In consequence, however, as the liquid is agitated during
transport and other movement of the package, bubbles can become
entrained in the packaged liquid. If the liquid material has high
viscosity, such bubbles, particularly small ones, can persist in
the liquid material for a very long time. Such bubbles are
extremely deleterious in use of the liquid, since the entrained
bubbles are treated as particles by particle analyzers typically
utilized in quality assurance sampling, and in actual dispensing
operations. The use of such particle analyzers is intended to
monitor the purity of the liquid for its intended purpose. An
erroneous particle count, due to the presence of entrained
microbubbles, can result in the rejection or reworking of the
liquid material that is in fact of a desired purity character.
[0010] Additionally, the presence of microbubbles in the liquid
medium may be problematic from the standpoint of the presence of
gas therein. The entrained gas may interfere with subsequent
processing of the liquid material, or it may adversely affect a
product manufactured with the liquid material, and render it
deficient or even useless for its intended purpose. Accordingly,
elimination of bubble formation in the liner-packaged liquid
material is important in relation to the accuracy and reliability
of particle counts determine for the material, as well as for
efficient processing as well as manufacturing of end products using
the liquid material.
[0011] Considering now the liner itself, the liner desirably is
characterized by low permeability, to limit the penetration of
ambient gases through the liner into the liquid therein. High
permeability liners result in increased contact area for gas
penetration and contact with the liquid material contained in the
liner. Accordingly, liner film materials, having superior barrier
properties against gases in the ambient environment of the liner,
are or may be critical to the utilization of liner-based packaging
for containment of liquid materials that are adversely affected by
such ambient gases.
[0012] Another characteristic of liners that is of primary
importance in many applications is the particle-generating
character of the liner, viz., the susceptibility of the liner to
shed particles into the liquid material contained therein, e.g.,
under conditions of expansion and contraction of the liner, flexing
and translational movement of the liner, etc. For purposes of
maintaining the quality and purity of the liquid material in the
liner, it is desirable to minimize, and preferably eliminate, such
particle shedding by the liner. As a result, efforts have been
focused on the development of liner film materials that are
particle shedding-resistant.
[0013] A number of liners are commercially available for
liner-based packaging of a wide variety of materials. One such
liner is commercially available from ATMI, Inc. (Danbury, Conn.)
under the trademark ULTRA, which includes polytetrafluoroethylene
as a film material. Such liner is characterized by extremely low
particle counts and thus superior particle shedding-resistance, as
well has superior chemical inertness in consequence of its
polytetrafluoroethylene film material.
[0014] Another liner product is commercially available from ATMI,
Inc. (Danbury, Conn.) under the trademark N400 (formerly FX), which
is fabricated of a multilayer laminate and is characterized by
extremely low gas permeation rates as well as superior inertness as
a result of the use of specially formulated polyethylene-based film
materials in the laminate.
[0015] The aforementioned polytetrafluoroethylene film-containing
liners have found widespread commercial success. In many
applications, however, it is desirable to effect the dispensing
operation by application of pressure on the exterior surface of the
liner to progressively compress and compact the liner and thereby
effect discharge of the liquid material from the liner, as
discussed above. In such applied-pressure dispensing operations,
the inherent permeability of polytetrafluoroethylene allows the
pressurizing gas to penetrate the polytetrafluoroethylene film,
thereby creating a higher probability of microbubble formation in
the liquid material contained in the liner.
[0016] In general, film materials that have been utilized in
fabrication liners vary widely in their permeability and other
physical and chemical properties. The art has implemented a variety
of multilayer films in the fabrication of liners, in attempts to
optimize the overall characteristics of the liner. As mentioned
above, polytetrafluoroethylene has been utilized for reasons of its
chemical inertness, e.g. in the aforementioned ULTRA liner.
Ethylene vinyl alcohol (EVOH) and nylon have also been utilized due
to their very low permeation constants, e.g., in the aforementioned
N400 (formerly FX) multilayer laminate including such materials, as
well as polyethylene. The N400 laminate, while affording good
performance properties in many liquid containment applications, may
not be preferred in other applications, since (i) the inner layer
of such laminate is polyethylene, which is not as chemically inert
as other materials, e.g., polytetrafluoroethylene, (ii)
polyethylene cannot be welded to polytetrafluoroethylene, (iii) air
trapped between the liner layers represents a virtual leak and (iv)
the EVOH film in such laminate, although it provides a good barrier
to nitrogen, does not provide a superior moisture barrier.
[0017] A problem related to the foregoing issue of permeation
barrier characteristics of liner films, is dissolution of
penetrated gases in the liquid material. The occurrence of
permeation of pressurized gases through the liner will invariably
result in some dissolution of gas in the liquid material, depending
on the solubility of the gas and its partial pressure and
concentration in the headspace gas. Such dissolution of gas is
particularly prone to occur during pressure-dispensing of liquid
from the liner. The resulting dissolved gas thereafter may form
bubbles in the liquid material, as the liquid material is dispensed
and encounters decreased pressure conditions in downstream flow
circuitry and process equipment, relative to the
pressure-dispensing conditions that effected gas dissolution in the
first instance. These bubbles may in turn adversely affect the
processing of the liquid material and the products manufactured
using such liquid material.
[0018] For example, in the pressure-dispensing of materials such as
photoresists, top anti-reflective coatings (TARCs) and bottom
anti-reflective coatings (BARCs), the formation of microbubbles
having a size in a range of 0.1 the 20 .mu.m is a source of
potential defects when these materials are deposited on wafers.
These materials are typically filled into containers in a
gas-saturated condition (e.g., saturated with air). If the
container then is pressurized, more gas will enter solution. In
liner-based packages having headspace gas overlying the liquid
material, the gas from the headspace will also dissolve into the
liquid material if the annular space between the liner and the
associated rigid container is pressurized. The dissolved gas then
is very prone to desorb from the liquid material when the applied
pressure is reduced, such as in dispensing pumps on their fill
cycle during the dispensing of the liquid from the liner.
[0019] The art continues to seek improvements in packaging of
materials, e.g., solids, liquids and liquid-containing
compositions, and particularly in liner-based packaging, including
efforts focused on the development of improved liners having low
permeabilities and superior chemical inertness, and improvements in
liner-based package construction, including coupling arrangements
and structure for connecting the liner to package closures and/or
flow circuitry for filling of the liner or dispensing of material
therefrom. SJH--stopped here
SUMMARY
[0020] The present invention relates generally to material
containment systems that are useful for storage and dispensing of
materials such as chemical reagents and compositions, e.g., high
purity liquid reagents and compositions such as chemical mechanical
polishing compositions used in the manufacture of microelectronic
devices.
[0021] In one aspect, the invention relates to a fluid storage and
dispensing package, comprising: a vessel having an interior volume;
a liner in said interior volume, arranged to contain a liquid
medium; a flexible, inflatable bladder in said interior volume,
said bladder being inflatable with a fluid medium to contact and
retain the liner in position when the liner contains a liquid
medium; and a gas removal compartment arranged in restricted fluid
penetration communication with said interior volume of said vessel,
and adapted to remove gas from the interior volume of the vessel
when the liner contains liquid medium and the bladder is
inflated.
[0022] In a further aspect, the invention relates to fluid storage
and dispensing package, comprising a vessel arranged to hold fluid,
e.g., liquid, and a movable and/or flexible barrier that is adapted
to (i) apply pressure to fluid in the vessel during dispensing to
effect pressure dispensing of fluid from the vessel, without
deleterious fluid/fluid interactions of the fluid in the vessel
with other fluid(s) and (ii) restrict head space of fluid in the
vessel during non-dispensing storage of fluid in the vessel.
[0023] Another aspect of the invention relates to a container
including a liner for storing and/or delivering a liquid medium and
an inflatable member arranged to either impart rigidity to the
liner or effect dispensing therefrom of the liquid medium.
[0024] A still further aspect of the invention relates to a fluid
storage and dispensing package, comprising a vessel arranged to
hold fluid, e.g., liquid, and a bladder in the vessel in contact
with the fluid, wherein the bladder is inflated with an inflation
medium and arranged to expand or contract in response to respective
contraction or expansion of the fluid in the vessel, so that the
bladder compensates for changes in volume of the fluid in the
vessel.
[0025] Another aspect of the invention relates to a bag-in-bag
package, comprising an inner bag of a first flexible, expandable
material, an outer bag of a second flexible, expandable material,
wherein the inner and outer bags are joined to one another to form
an inflatable space therebetween, and further comprising an
inflation passage for introducing an inflation fluid into the
inflatable space, whereby compressive force is exerted on one of
the inner and outer bags to rigidify the package and/or to effect
pressure dispensing of fluid therefrom.
[0026] A still further aspect of the invention relates to a
bag-in-bag package including inflatable compartments that are
selectively inflatable and/or fillable, wherein one or more
compartment(s) are arranged to contain a fluid medium adapted for
dispensed use, and the other or others of the compartment(s) are
arranged to be inflated to rigidify the package, with the inflated
compartment(s) being adapted to be further inflated at a point of
use to effect pressure dispensing of the fluid medium from the
compartment(s) containing same.
[0027] Another aspect of the invention relates to a liquid medium
storage and dispensing package, comprising a container having an
interior volume for holding liquid medium, said container including
a semi-flexible portion that is shape-shiftable to vary size of
said interior volume available to hold the liquid medium, whereby
the interior volume is selectively variable between an expanded
volumetric state providing a greater head space for said liquid
medium and a compacted volumetric state providing a smaller head
space for said liquid medium.
[0028] A further aspect of the invention relates to a liquid medium
storage and dispensing package, comprising a container having an
interior volume for holding liquid medium with a head space
thereover, said container being constructed and arranged to (i)
provide sufficient space in the interior volume to accommodate
expansion/contraction effects of said liquid medium, and (ii) avoid
production of a saturated pressure equal to or greater than 3 psig
(0.21 kg/cm.sup.2) in the head space, so that the liquid medium
does not saturate to a pressure of 3 psig or greater when mixed and
dispensed.
[0029] The invention also relates in one aspect to a method of
storing and dispensing a high-purity liquid medium, comprising
storing the high-purity liquid medium in a liner disposed in a
vessel having an interior volume, retaining the liner in a fixed
position in said interior volume, with a flexible, inflatable
bladder inflated with a fluid medium, and removing gas from the
interior volume of the vessel during storage of the high-purity
liquid medium in the liner in a fixed position in the vessel, to
maintain the high purity of said liquid medium.
[0030] An additional aspect of the invention relates to a method of
storing and dispensing a fluid, comprising introducing fluid into a
vessel, and deploying a movable and/or flexible barrier to (i)
apply pressure to fluid in the vessel during dispensing to effect
pressure dispensing of fluid from the vessel, without deleterious
fluid/fluid interactions of the fluid in the vessel with other
fluid(s) and (ii) restrict head space of fluid in the vessel during
non-dispensing storage of fluid in the vessel.
[0031] Another aspect of the invention relates to a method of
storing and dispensing a fluid, comprising introducing fluid into a
vessel and disposing a bladder in the vessel in contact with the
fluid, wherein the bladder is inflated with an inflation medium and
arranged to expand or contract in response to respective
contraction or expansion of the fluid in the vessel, so that the
bladder compensates for changes in volume of the fluid in the
vessel.
[0032] A further aspect of the invention relates to a method of
packaging a material for subsequent dispensing, comprising
providing a bag-in-bag package, comprising an inner bag of a first
flexible, expandable material, an outer bag of a second flexible,
expandable material, wherein the inner and outer bags are joined to
one another to form an inflatable space therebetween, introducing
into the inner bag a material for subsequent dispensing, and
inflating the inflatable space to exert compressive force on the
inner bag, to rigidify the package.
[0033] A still further aspect of the invention relates to a method
of storing and dispensing a liquid medium, comprising (i) packaging
the liquid medium in a container having an interior volume holding
the liquid medium, said container including a semi-flexible portion
that is shape-shiftable to vary size of said interior volume
available to hold the liquid medium, whereby the interior volume is
selectively variable between an expanded volumetric state providing
a greater head space for said liquid medium and a compacted
volumetric state providing a smaller head space for said liquid
medium, (ii) positioning the semi-flexible portion to provide the
compacted volumetric state for storage of the liquid medium, (iii)
after storage in the compacted volumetric state, repositioning the
semi-flexible portion to provide the expanded volumetric state for
dispensing of the liquid medium, and (iv) dispensing the liquid
medium from the container while the interior volume of the
container is in the expanded volumetric state.
[0034] Yet another aspect of the invention relates to a method of
storing a liquid medium, comprising packaging the liquid medium in
a container with a head space over the liquid medium, wherein said
packaging (i) provides sufficient space in the interior volume to
accommodate expansion/contraction effects of said liquid medium,
and (ii) avoids production of a saturated pressure equal to or
greater than 3 psig (0.21 kg/cm.sup.2) in the head space, so that
the liquid medium does not saturate to a pressure of 3 psig or
greater when mixed and dispensed.
[0035] In another aspect, the invention relates to a bag-in-bag
package for storage and dispensing of liquid medium, comprising a
rigid overpack enclosing an interior volume, having disposed
therein a first bag surrounding a second bag, wherein the one of
the bags is adapted to hold liquid medium and the other of the bags
is inflatable by introduction of externally supplied gas thereinto,
to exert compression on the one bag for fixation thereof prior to
dispensing, and during dispensing operation is further inflatable
to effect pressure dispensing from the one bag.
[0036] A further aspect of the invention relates to a
pressure-dispense package for storage and dispensing of liquid
medium, comprising a vessel adapted to contain liquid medium
therein, with an outlet for dispensing liquid medium therefrom, and
an inflatable bag disposed in a central region of the vessel,
adapted for coupling to an external gas supply for inflation of the
bag to effect pressure-dispensing of liquid medium from the vessel
through the outlet.
[0037] Another aspect of the invention relates to a polymeric film
laminate, comprising an inner ply formed of high purity medium
density polyethylene, and an outer ply including seven film layers
comprising successively a first layer, adjacent the inner ply, of
linear low density polyethylene and medium density polyethylene
including an anti-block agent, a first tie layer of
anhydride-modified polyethylene adjacent the first layer, a first
polyamide layer adjacent the anhydride-modified polyethylene tie
layer, an EVOH layer adjacent the first polyamide layer, a second
layer of polyamide adjacent the EVOH layer on a side thereof
opposite the side adjacent the first polyamide layer, a second tie
layer of anhydride-modified polyethylene adjacent the second
polyamide layer, and a layer of linear low density polyethylene and
high density polyethylene including an anti-block agent.
[0038] Yet another aspect of the invention relates to a liquid
medium-supplied manufacturing system, comprising:
a manufacturing tool adapted to utilize a liquid medium; and a
liquid medium dispensing source joined in flow communication with
the manufacturing tool, to dispense the liquid medium thereto;
wherein the liquid medium source comprises a source as described
herein.
[0039] A further aspect of the invention relates to a method for
storage and dispensing of liquid medium, comprising providing a
rigid overpack enclosing an interior volume, having disposed
therein a first bag surrounding a second bag, filling one of the
bags with liquid medium and inflating the other of the bags with
gas, to exert compression on the one bag for fixation thereof prior
to dispensing, and during dispensing operation further inflating
the other of the bags to effect pressure dispensing from the one
bag.
[0040] In another aspect, the invention relates to a method of
storage and dispensing of liquid medium, comprising providing a
vessel adapted to contain liquid medium therein, with an outlet for
dispensing liquid medium therefrom, and an inflatable bag disposed
in a central region of the vessel, and inflating the bag to effect
pressure-dispensing of liquid medium from the vessel through the
outlet.
[0041] A further aspect of the invention relates to a method of
manufacturing a product by a process involving utilization of a
liquid medium, such method comprising supplying said liquid medium
to the process from a liner-based source.
[0042] In one aspect, the invention relates to a material
containment package, comprising a material containment vessel
adapted to contain material potentially susceptible to bubble
formation therein, having a headspace associated therewith, and a
vacuum applicator adapted to place the headspace under vacuum that
is sufficient to reduce bubble formation susceptibility of the
material.
[0043] Another aspect of the invention relates to a material
containment package, comprising a material containment vessel
including an interior volume adapted to contain material therein,
and a port, and a balloon disposed in the interior volume of the
vessel and adapted to be at least partially inflated to accommodate
internal pressure changes due to expansion and contraction of
material contained in the interior volume.
[0044] A further aspect of the invention relates to a material
containment package including a first liner having an interior
volume adapted to hold a first material therein in a sealed
condition, and a second liner having an interior volume adapted to
hold the first liner therein, wherein each of the first and second
liners has a fitment allowing fluid communication with its interior
volume, wherein the fitment of the first liner is coupleable with
the fitment of the second liner to form a fitment assembly for the
package.
[0045] In another aspect, the invention relates to a fitment
adapted to be secured to a liner, said fitment comprising an upper
generally cylindrical main body portion and a lower outwardly
flaring skirt portion defining a flange for liner securement, and a
collar intermediate said generally cylindrical main body portion
and said outwardly flaring skirt portion.
[0046] A further aspect of the invention relates to a fitment
assembly including a first fitment comprising an upper generally
cylindrical main body portion and a lower outwardly flaring skirt
portion defining a flange for liner securement, and a collar
intermediate said generally cylindrical main body portion and said
outwardly flaring skirt portion, and a second fitment including an
upper central axle portion and a lower peripheral flange portion,
wherein said upper central axle portion and lower peripheral flange
portion circumscribe a central opening, and said second fitment is
lockingly engageable with the collar of the first fitment.
[0047] In another aspect, the invention relates to a
liner-within-a-liner material containment package, comprising a
fitment assembly including a first fitment comprising an upper
generally cylindrical main body portion and a lower outwardly
flaring skirt portion defining a flange for liner securement, and a
collar intermediate said generally cylindrical main body portion
and said outwardly flaring skirt portion, and a second fitment
including an upper central axle portion and a lower peripheral
flange portion, wherein said upper central axle portion and lower
peripheral flange portion circumscribe a central opening, and said
second fitment is lockingly engageable with the collar of the first
fitment, with a first liner secured to said flange of said lower
outwardly flaring skirt portion of the first fitment, and a second
liner secured to said lower peripheral flange portion of said
second fitment, with the first liner inside the second liner.
[0048] A composite liner constitutes another aspect of the
invention and includes a primary liner attached at an upper end
thereof to a fitment providing material introduction and removal
communication with an internal volume of the primary liner, and a
secondary liner partially penetrating and secured to the primary
liner with a penetrated portion of the secondary liner disposed in
the internal volume of the primary liner, said secondary liner
including a non-penetrating portion exterior of the primary liner,
wherein said penetrated portion of the secondary liner is
gas-permeable but liquid-impermeable.
[0049] Yet another aspect of the invention relates to a material
containment package including a vessel containing a liner therein
in an interior volume of the vessel, wherein the liner is adapted
to contain a liquid or liquid-containing material susceptible to
dissolved and/or entrained gas comprising a first gas species, and
wherein the interior volume of the vessel outside the liner
contains a second gas species different from said first gas
species.
[0050] In another aspect, the invention relates to a multilayer
laminate comprising from innermost to outermost layers in sequence,
(i) a layer of polytetrafluoroethylene, (ii) a first tie layer,
(iii) a fluoropolymer layer, (iv) a second tie layer, (v) a barrier
layer, (vi) a third tie layer and (vii) an abrasion film layer.
[0051] A liner comprising the multilayer laminate described above
constitutes another aspect of the invention, and a material
containment package comprising such liner constitutes yet another
aspect of the invention.
[0052] A still further aspect of the invention relates to a
semiconductor manufacturing facility comprising a reagent source
coupled in reagent-supplying relationship with a semiconductor
manufacturing tool, wherein said reagent source comprises a package
selected from among the aforementioned material containment
packages of the invention and the liner-within-a-liner containment
package of the invention.
[0053] In one method aspect, the invention relates to a method of
supplying material susceptible to bubble formation therein,
comprising containment of said material under vacuum that is
sufficient to reduce bubble formation susceptibility of the
material.
[0054] A further method aspect of the invention relates to a method
of material containment, comprising providing a material
containment package including a material containment vessel having
an interior volume adapted to contain the material therein, and a
port, disposing a balloon in the interior volume of the vessel and
at least partially inflating the balloon to accommodate internal
pressure changes due to expansion and contraction of the material
contained in the interior volume.
[0055] A method of material containment constitutes another aspect
to the invention, comprising: providing a material containment
package including a first liner having an interior volume adapted
to hold a first material therein in a sealed condition, and a
second liner having an interior volume adapted to hold the first
liner therein, wherein each of the first and second liners has a
fitment allowing fluid communication with its interior volume,
wherein the fitment of the first liner is coupleable with the
fitment of the second liner to form a fitment assembly for the
package; introducing first material into the interior volume of the
first liner through the fitment of the first liner; and introducing
second material into the interior volume of the second liner
outside the first liner.
[0056] In yet another aspect, the invention relates to a method of
material containment, comprising: providing a liner-within-a-liner
material containment package, comprising a fitment assembly
including a first fitment comprising an upper generally cylindrical
main body portion and a lower outwardly flaring skirt portion
defining a flange for liner securement, and a collar intermediate
said generally cylindrical main body portion and said outwardly
flaring skirt portion, and a second fitment including an upper
central axle portion and a lower peripheral flange portion, wherein
said upper central axle portion and lower peripheral flange portion
circumscribe a central opening, and said second fitment is
lockingly engageable with the collar of the first fitment, with a
first liner secured to said flange of said lower outwardly flaring
skirt portion of the first fitment, and a second liner secured to
said lower peripheral flange portion of said second fitment, with
the first liner inside the second liner; introducing a first
material into the first liner; and introducing a second material
into the second liner outside the first liner.
[0057] A method of making a composite liner constitutes yet another
aspect of the invention, comprising attaching a primary liner at an
upper end thereof to a fitment providing material introduction and
removal communication with an internal volume of the primary liner,
and securing to the primary liner a secondary liner partially
penetrating the primary liner with a penetrated portion of the
secondary liner disposed in the internal volume of the primary
liner, with said secondary liner including a non-penetrating
portion exterior of the primary liner, wherein said penetrated
portion of the secondary liner is gas-permeable but
liquid-impermeable.
[0058] A further aspect of the invention relates to a method of
using a composite liner made by the foregoing method, including
introducing a liquid into the primary liner, and coupling the
non-penetrating portion of the secondary liner to a vacuum source
for extraction of dissolved and entrained gas from said liquid.
[0059] In a further aspect, the invention relates to a material
containment method, comprising providing a package including a
vessel containing a liner therein in an interior volume of the
vessel, introducing into the liner a liquid or liquid-containing
material susceptible to dissolved and/or entrained gas comprising a
first gas species, and introducing into the interior volume of the
vessel outside the liner a second gas species different from said
first gas species.
[0060] Another aspect of the invention relates to a method of
fabricating a container for a material, including forming a liner
from a multilayer laminate, in which the multilayer laminate
includes from innermost to outermost layers in sequence, (i) a
layer of polytetrafluoroethylene, (ii) a first tie layer, (iii) a
fluoropolymer layer, (iv) a second tie layer, (v) a barrier layer,
(vi) a third tie layer and (vii) an abrasion film layer.
[0061] A method of storing and dispensing a material is
contemplated in another aspect of the invention, comprising a use
of a package selected from the group consisting of the
aforementioned material containment packages of the invention and
the liner-within-a-liner containment package of the invention.
[0062] A further aspect of the invention relates to a method of
manufacturing a semiconductor device, comprising supplying a
semiconductor manufacturing reagent to a semiconductor
manufacturing tool from a chemical reagent package selected from
the group consisting of the aforementioned material containment
packages of the invention and the liner-within-a-liner containment
package of the invention.
[0063] Another aspect of the invention relates to a method of
operating a semiconductor manufacturing facility comprising
supplying a reagent to a semiconductor manufacturing tool, from a
package selected from the group consisting of the aforementioned
material containment packages of the invention and the
liner-within-a-liner containment package of the invention.
[0064] A still further aspect of the invention relates to a method
of supplying material for semiconductor manufacturing to a
semiconductor manufacturing facility, comprising transporting said
material to said semiconductor manufacturing facility in a package
selected from the group consisting of the aforementioned material
containment packages of the invention and the liner-within-a-liner
containment package of the invention.
[0065] Another aspect of the invention relates to a method of
packaging a material, comprising introducing said material into a
package selected from the group consisting of the aforementioned
material containment packages of the invention and the
liner-within-a-liner containment package of the invention.
[0066] In yet another method aspect of the invention, a method of
packaging a material includes confining the material in a contained
volume using a multilayer laminate comprising from innermost to
outermost layers in sequence, (i) a layer of
polytetrafluoroethylene, (ii) a first tie layer, (iii) a
fluoropolymer layer, (iv) a second tie layer, (v) a barrier layer,
(vi) a third tie layer and (vii) an abrasion film layer, wherein
the layer of polytetrafluoroethylene is disposed in contact with
said material.
[0067] Another aspect of the invention relates to a material
storage and dispensing package, comprising a vessel enclosing an
interior volume and adapted for dispensing of material therefrom, a
first liner disposed in the interior volume and arranged therein
for holding a material to be dispensed from the package during such
dispensing, and a second liner disposed in the interior volume and
adapted to be inflated to exert pressure on the first liner to
effect such dispensing of material from the package.
[0068] A further aspect of the invention relates to a method of
supplying material, comprising use of such package.
[0069] Yet another aspect of the invention relates to a method of
storage and dispensing of a material, comprising providing a vessel
having an interior volume, disposing the material in a first liner
in the interior volume, wherein the first liner is adapted for
dispensing of the material from the vessel, providing a second
liner in the vessel, and inflating the second liner to cause the
second liner to compress the first liner so that the material in
the first liner is dispensed from the vessel.
[0070] Other aspects, features and embodiments of the invention
will be more fully apparent from the ensuing disclosure and
appended claims.
BRIEF DESCRIPTION OF THE DRAWINGS
[0071] FIG. 1 is a sectional elevation view of a liner-based fluid
storage and dispensing package, according to one embodiment of the
present invention.
[0072] FIG. 2 is a schematic perspective view of a fluid storage
and dispensing package according to another embodiment of the
invention.
[0073] FIG. 3 is a schematic perspective view of a fluid storage
and dispensing package according to a further embodiment of the
invention.
[0074] FIG. 4 is a schematic perspective view of a fluid storage
and dispensing package according to yet another embodiment of the
invention.
[0075] FIG. 5 is a schematic representation of a bag-in-bag liquid
medium package according to another embodiment of the invention, in
sectional elevation view.
[0076] FIG. 6 is a schematic representation of a liquid medium
package according to a further embodiment of the invention, in
sectional elevation view.
[0077] FIG. 7 is a schematic representation of a film laminate
according to one aspect of the invention, in cross-section, showing
the component layers of the laminate.
[0078] FIG. 8 is a schematic representation of a liquid
medium-supplied manufacturing system, according to a further aspect
of the invention.
[0079] FIG. 9 is a schematic representation of a material
container, according to one embodiment of the invention
[0080] FIG. 10 is a schematic representation of the FIG. 9
container, upon filling thereof with liquid, and expansion of the
balloon therein, to provide a zero headspace or near-zero headspace
conformation.
[0081] FIGS. 11-20 illustrate the fabrication of a double
liner-based container and the components and structures in the
various assembly steps of the fabrication.
[0082] FIG. 21 is a schematic representation of a composite liner,
according to another embodiment of the invention.
[0083] FIG. 22 is a schematic representation of a liner-based
package, including a rigid outer container enclosing an interior
volume within which it is disposed a liner suspended from the neck
of the vessel, according to another embodiment of the
invention.
[0084] FIG. 23 is a sectional elevation view of a multilayer
laminate useful in the general practice of the present invention
for construction of liners adapted for use in liner-based material
containment packages.
[0085] FIG. 24 is a perspective view of a liner-based package of a
bag-in-bottle type, according to another embodiment of the
invention.
DETAILED DESCRIPTION
[0086] The present invention relates to liner-based liquid
containment systems for storage and dispensing of chemical reagents
and compositions of widely varied character. Although the invention
is hereafter described primarily with reference to storage and
dispensing of liquid or liquid-containing compositions for use in
the manufacture of microelectronic device products, it will be
appreciated that the utility of the invention is not thus limited,
but rather the invention extends to and encompasses a wide variety
of other applications and contained materials.
[0087] Although the invention is discussed hereinafter with
reference to specific embodiments including various liner-based
packages and containers, it will be appreciated that various of
such embodiments, e.g., as directed to pressure-dispense
arrangements or other features of the invention, may be practiced
in liner-less package and container systems.
[0088] The term "microelectronic device" as used herein refers to
resist-coated semiconductor substrates, flat-panel displays,
thin-film recording heads, microelectromechanical systems (MEMS),
and other advanced microelectronic components. The microelectronic
device may include patterned and/or blanketed silicon wafers,
flat-panel display substrates or polymeric, e.g., fluoropolymer,
substrates. Further, the microelectronic device may include
mesoporous or microporous inorganic solids.
[0089] In liner packaging of liquids and liquid-containing
compositions (hereafter referred to as liquid media), it is
desirable to minimize the head space of the liquid medium in the
liner. The head space is the volume of gas overlying the liquid
medium in the liner.
[0090] The liner-based liquid media containment systems of the
present invention have particular utility in application to liquid
media used in the manufacture of microelectronic device products.
Additionally, such systems have utility in numerous other
applications, including medical and pharmaceutical products,
building and construction materials, food products, etc., where
liquid media or liquid materials require packaging.
[0091] As used herein, the term "zero head space" in reference to
fluid in a liner means that the liner is totally filled with liquid
medium, and that there is no volume of gas overlying liquid medium
in the liner.
[0092] Correspondingly, the term "near zero head space" as used
herein in reference to fluid in a liner means that the liner is
substantially completely filled with liquid medium except for a
very small volume of gas overlying liquid medium in the liner,
e.g., the volume of gas is less than 5% of the total volume of
fluid in the liner, preferably being less than 3% of the total
volume of fluid, more preferably less than 2% of the total volume
of fluid and most preferably, being less than 1% of the total
volume of fluid (or, expressed another way, the volume of liquid in
the liner is greater than 95% of the total volume of the liner,
preferably being more than 97% of such total volume, more
preferably more than 98% of such total volume, and most preferably
more than 99% of such total volume).
[0093] The greater the volume of the head space, the greater the
likelihood that the overlying gas will become entrained and/or
solubilized in the liquid medium, since the liquid medium will be
subjected to sloshing, splashing and translation in the liner, as
well as impact of the liner against the rigid surrounding container
during transportation of the package. This circumstance will in
turn result in the formation of bubbles, microbubbles, and
particulates in the liquid medium, which degrade the liquid medium,
and render it potentially unsuitable for its intended purpose. For
this reason, head space is desired to be minimized and preferably
eliminated (i.e., in a zero or near-zero head space conformation)
with complete filling of the interior volume of the liner with
liquid medium.
[0094] Referring now to the drawings, FIG. 1 is a sectional
elevation view of a liner-based fluid storage and dispensing
package 10, according to one embodiment of the present
invention.
[0095] The fluid storage and dispensing package 10 of FIG. 1
includes a vessel with a cylindrical side wall 12, floor 14,
tapered frustoconical shoulder 16, and cylindrical neck 18,
enclosing interior volume 20. In the interior volume 20 is disposed
a liner 22, filled with a liquid or liquid-containing composition
(such liquid or liquid-containing composition hereafter being
referred to as "liquid medium").
[0096] The liquid medium can be of any suitable type, e.g., a
semiconductor manufacturing liquid medium, such as photoresist,
etchant, dopant, chemical vapor deposition reagent, solvent, wafer
or tool cleaning formulation, chemical mechanical polishing
composition, etc.
[0097] The interior volume 20 also has disposed therein a flexible
inflatable bladder 24 that has been inflated with a suitable fluid
medium, such as a gas or liquid. A preferred fluid medium is inert
gas, such as helium, krypton, argon, etc., or a gas that is
non-reactive in exposure to the materials in the interior volume
20, if such fluid medium were to permeate out of the bladder and
enter the free space in the interior volume. The bladder can be of
any suitable type. For example, it can be a non-rigid, or
alternatively a semi-rigid, liner. In one specific embodiment, the
bladder is constituted by a relatively rigid liner that is folded
or rolled up, and unfolds or unrolls when inflated thereby exerting
force to dispense liquid.
[0098] By filling the bladder 24 with a fluid medium of appropriate
volume, the bladder is caused to bear on the liner 22, and to
positionally retain the bladder in position in the interior volume
20. Such fixed positional retention of the liner 22 avoids the
circumstance in which the liquid medium in the liner is subjected
to impact against the interior surfaces of the vessel during
transport, installation, etc., since the resulting forces on and
translation of the liquid medium and liner may cause adverse effect
on the liquid medium, e.g., resulting in particle generation in the
liquid medium reducing its purity and suitability for its ultimate
use.
[0099] Secured to the upper end of the neck 18 of the vessel is a
cap 26, which may be leak-tightly secured to the vessel in any
suitable manner, e.g., by welding, brazing, mechanical fastening,
or any other means or method that is effective to secure the cap in
position.
[0100] The cap as shown is provided with an interior passage 32 in
fluid communication with the interior volume of the bladder 24. The
cap also is provided with a cavity therein receiving a port 28 of
the liner 22. The port is disposed in the cavity, so that the fluid
medium in the liner 22 can be accessed through passage 30 in the
cap. For this purpose, the port may be open to the passage 30, or
the port may be provided with a closure, such as a membrane element
or other seal, serving to keeping the liquid medium in the liner in
an isolated state.
[0101] At its top surface, the cap 26 may be overlaid by a closure
34, such as a gasket or a seal. The closure may for example be
adhesively secured to the cap top surface with a suitable low-tack
adhesive, enabling peel-away removal of the closure when the vessel
is deployed for use, and it is desired to access the liquid medium
for dispensing from the liner in the vessel.
[0102] In the FIG. 1 arrangement, the cap 26 at its upper portion
is threaded on its exterior side surface, to permit the cap to be
threadably engaged with an overcap 36, which is complementarily
threaded on an interior surface at its lower portion, as
illustrated. The overcap may be employed to ensure sealing of the
vessel contents, but may in some embodiments be omitted.
Alternatively, the passages 30 and 32 in the cap 26 may each be
individually sealed by a plug or other closure element (not shown
in FIG. 1).
[0103] In the interior volume 20 of the vessel is a gas removal
compartment 40, which may as illustrated be formed by an enclosure
structure that is secured to the inner surface of the cylindrical
side wall 12 of the vessel, to define an enclosed interior volume
42. The interior volume 42 of the compartment 40 is in restricted
fluid penetration communication with the interior volume 20 of the
vessel outside of compartment 40, i.e., fluid in the interior
volume 20 of the vessel can penetrate into the interior volume 42
of the compartment, but such penetration is restricted by the walls
of the compartment, or in other suitable manner.
[0104] For example, the walls of the compartment 40 may be formed
of a material that is permeable to gas flux therethrough, so that
when pressure in the interior volume 42 of the compartment 40 is
below pressure in the interior volume 20 of the vessel outside of
the compartment 40, the differential in pressure as well as
concentration will mediate a flux of gas through the walls of the
compartment.
[0105] Alternatively, the walls of the compartment 40 may be formed
with openings therein having membranes across the openings, wherein
the membranes are permeable to gas diffusion and permit gas to
enter the enclosure.
[0106] As another alternative, the interior wall surface of the
compartment 40 may have a getter 44 deposited thereon, wherein the
getter is chemisorptive for atmospheric gases that may be present
in the interior volume 20 of the vessel, such as oxygen, nitrogen,
trace hydrocarbons, etc. The getter may be of any suitable
composition, e.g., elemental barium, strontium, or other suitable
material having chemisorptive reactivity with the gas species of
interest that may be present in the interior volume of the vessel,
and which if not removed, may diffuse through the liner into the
liquid medium held therein.
[0107] As a still further alternative, the interior volume 42 of
the compartment 40 may be evacuated. For such purpose, the wall of
the vessel, e.g., side wall 12, may have an evacuation orifice 46
therein, for selective withdrawal of gas from the interior volume
42 of the enclosure 40. Orifice 46 in the illustrated arrangement
communicates with a discharge port 48 having an interior passage
therein (not shown in FIG. 1) and terminating in the coupling
flange 50, by means of which the port may be connected with a
vacuum pump, or other vacuum withdrawal apparatus, e.g., an
eductor, ejector, turbine, fan, cryopump, or the like. The port 48
in the FIG. 1 drawing is shown as being capped at flange 50 of port
48 by closure cap 52. In such arrangement, the evacuation of the
compartment 40 permits any extraneous gas present in the interior
volume 20 of the vessel to permeate into the interior volume 42 of
the compartment 40, whereby the pressure and presence of gas in the
interior volume 20 outside of the compartment, may be
minimized.
[0108] In another alternative arrangement, an evacuated space can
also be provided in the container by providing a space between two
liner layers that can be put under vacuum.
[0109] The arrangement shown in FIG. 1 provides a zero headspace
conformation of the liner to be achieved, wherein the liquid can be
filled to the port 28 of the liner, so that there is no void volume
of air, vapor of the liquid, or other gas in the liner above the
liquid. This is an important feature since the presence of any void
volume of gas above the liquid in the liner has been found to
produce bubbles, such as when pressure is exerted on the exterior
surface of the liner during the dispensing operation, or
alternatively during transport of the package after the liner has
been filled, when any sloshing, splashing or the like that occurs
incident to the transport or movement of the package produces
gas-liquid interfacial area that effects solubilization and
entrainment of the head space gas in the liquid.
[0110] This phenomenon (of sloshing, splashing of the liquid medium
when there is a head space containing gas in the liner) has also
been found to increase the production of particles in the liquid,
which may for example take place as a result of particle shedding
from the interior surface of the liner, or by coalescence or
precipitation and agglomeration of suspended matter in the liquid,
during the sloshing, splashing and other displacement of the liquid
medium.
[0111] Such bubble and particle formation is severely detrimental
in many instances, and is inconsistent with the high-purity desired
for the liquid medium that will ultimately be dispensed from the
liquid medium package. Further, any dissolved gases in the liquid
medium will form bubbles if the pressure in the system is lowered,
such as during the fill cycle of the pump that is used to effect
introduction of liquid medium into the liner during the filling
operation.
[0112] The provision of a zero headspace conformation of the liner,
so that it is fully filled with liquid medium, assists in
minimizing the bubble and particle formation problem discussed
above, but it remains difficult to remove all bubbles from the
package.
[0113] The FIG. 1 package addresses this residual bubbles problem.
The liner 22 is filled with the liquid medium, and the bladder is
expanded with a suitable pressurizing gas, to a pressure above the
dispense pressure of the package. As an illustrative example, the
liner may be subjected to a dispense pressure of 7 psig exerted on
the exterior surface of the liner to effect compression of the
liner and discharge of the liquid medium therefrom. In such
embodiment, the bladder may be pressurized to a pressure of 10
psig, suitably above such dispense pressure level. During this
pressurization, the liner package is vented, as is the interior
volume 20 of the vessel, to accommodate the displacement of fluid
from the liner as well as from the interior volume 20.
[0114] It will be appreciated that the liner and the bladder may
each be provided with valves (not shown in FIG. 1) to isolate them
from the atmosphere or other ambient environment of the
package.
[0115] In a specific illustrative embodiment, the liquid medium is
introduced into the liner to provide a zero head space conformation
of the liner, and the filled package after expansion of the bladder
with a suitable pressurizing gas is sealed. The package is
thereafter maintained in a sealed state for an extended period of
time, e.g., 30-45 days, before the package is opened and dispensing
takes place. In the dispense operation, the package is coupled with
a dispensing assembly including a dip tube connected to a dispense
head, and pressure is exerted on the exterior surface of the liner,
to dispense the liquid medium from the package. In such
arrangement, after the package is filled and prior to the time the
package is coupled to the dispense assembly, the pressure inside
the zero head space liner will be at the pressure in the inflatable
bladder and above the pressure in the interior volume 20 outside of
the liner and the bladder. Such arrangement will cause any residual
gas in the liner, e.g., trapped or solubilized in the liquid
medium, to permeate through the liner to the interior volume 20
outside the liner during the storage, transport and other
non-dispensing use of the package.
[0116] Further, such arrangement of the bladder and liner addresses
the situation in which the fill operation is carried out with less
than complete liquid medium fill of the liner, so as to accommodate
thermal expansion and contraction of the fluid in the liner,
without adverse effect. By providing a pressurized bladder having a
pressure above the dispensing pressure of the fluid in the liner,
head space gas overlying the liquid medium in the liner permeates
out of the liner into the interior volume of the vessel exterior of
the liner. In such fashion, the non-zero head space package tends
to progress in subsequent pre-dispensing circumstances to a true
zero head space package.
[0117] In order to prevent an over-pressure situation from
developing in the interior volume 20 of the vessel, two paths can
be used to relieve any such over-pressure. If the leak rate of the
cap 26 to the ambient environment of the package is sufficient,
then the excess gas pressure from the zero head space liner would
leak out of the package to the ambient environment. If the package
is alternatively very leak-tight, then an interior compartment such
as compartment 40 can be employed, which is constructed and
arranged for gas in-leak into the compartment to alleviate any
overpressure condition in the exterior volume 20 outside the
compartment.
[0118] As discussed above, the compartment can be under vacuum at
the time that the package is sealed after fluid medium filling of
the liner. The compartment provides an expansion volume to prevent
pressure in the interior volume 20 of the vessel from rising as
bubbles in the zero head space liner transpire into the interior
volume 20.
[0119] It will be recognized that in lieu of a compartment secured
to an interior wall surface of the vessel, it may be desirable in
some instances to simply deploy a compartment article as a
discrete, unattached article that is disposed in the interior
volume of the vessel, or that is positionally retained in the
vessel, in an appropriate manner. For example, the compartment
article may comprise a capsule or a canister, e.g., with walls or
other surface permeable to in-leaking gas, or valved for in-flow of
gas when pressure in the interior volume of the vessel exceeds a
set point of an inflow valve provided in such capsule or
canister.
[0120] The bladder in the foregoing arrangement is appropriately
made of a material that is highly impermeable material to prevent
any leakage out of the bladder into the interior volume of the
vessel. Since the bladder does not come into contact with the
liquid medium contained in the liner, there are no compatibility
issues in materials selection for the material of construction of
the bladder.
[0121] The liner in the arrangement described in FIG. 1, in order
to remove gases from the interior volume of the liner, must be made
of a material having some, albeit small, permeability to the gas
species that is desired to be removed. Potential materials of
construction include, without limitation, polyethylene,
polypropylene, polyvinylchloride, polyurethane, polyimide,
polytetrafluoroethylene, and compatible copolymers of monomers
thereof, and laminates including at least one layer of such
polymers or copolymers. The liner can be formed by co-extrusion,
solvent casting, or other appropriate technique.
[0122] The bladder may likewise be formed of any suitable material
of construction that is flexible, resilient and expansible, in
order for the bladder to be inflated to suitable pressure. The
bladder can be formed of any suitable elastomeric material,
including natural rubbers, synthetic elastomers, memory metal
foils, or the like. The pressurizing gas can be any suitable gas,
and preferably is a gas that is not deleterious to the package or
the liquid medium contained therein.
[0123] The bladder provides a mechanical pressurization of the zero
head space liner, and therefore little or no gas diffusion occurs
if pressure in the interior volume 20 of the vessel is not
elevated.
[0124] FIG. 2 is a schematic perspective view of a liquid storage
and dispensing package according to another embodiment of the
invention, which applies a head space to the vessel by a movable
and/or flexible barrier without effecting deleterious gas-liquid
interactions.
[0125] As discussed hereinabove, liquid media that are used in many
applications are susceptible to degradation by factors related to
head space gas interaction with the liquid medium that is package
for storage, transport, and ultimately, dispensing of the liquid
medium. Circumstances relating to such degradation include, without
limitation, gas entrainment, formation of bubbles and microbubbles,
particle generation, particle agglomeration, solvent evaporation,
and concentration variations.
[0126] Currently, various liquid medium vessels are subject to
regulations that require the provision of expansion space in the
vessel, i.e., so that head space gas overlies the liquid.
[0127] The liquid storage and dispensing package 80 shown in FIG. 2
utilizes a flexible and movable barrier in the form of bladder 92
in the interior volume 90 of the vessel 82 of such package. The
vessel 82 includes a cylindrical side wall 84, top end wall 86 and
bottom end wall 88 enclosing such interior volume 90.
[0128] The interior volume 90 contains a liquid medium, which may
for example include a microelectronic device manufacturing liquid
medium, such as photoresist, etchant, chemical vapor deposition
reagent, solvent, wafer or tool cleaning formulation, chemical
mechanical polishing composition, etc. The vessel 82 is coupled
with a dispensing assembly 94, which includes a dip tube 98
extending vertically downwardly into the interior volume of the
vessel, and joined at its upper end to dispense head 96. The
dispense assembly is coupled with the package 80 when it is desired
to dispense the liquid medium from the vessel, or to ready the
package for such future operation. The dip tube, while
illustratively employed in the FIG. 2 embodiment, is not essential
for the dispense operation, and the system may be alternatively
configured without such dip tube, with pressure dispensing being
carried out through a hole in the top of the container.
[0129] The dispense assembly 94 may be coupled in turn to suitable
flow dispensing circuitry, indicated schematically in FIG. 2 by
arrow B, whereby the liquid medium is conveyed to a locus of use,
such as a liquid medium-utilizing apparatus.
[0130] To apply head space to the liquid medium in the vessel 82
without deleterious contacting of the liquid medium, the apparatus
shown in FIG. 2 uses a flexible and/or movable barrier that is used
to apply pressure to the body of liquid medium in the vessel, so
that it is dispensed from the vessel under the action of such
pressure. The flexible and/or movable barrier in the FIG. 2 system
is bladder 92, which is coupled to an inflation assembly
schematically indicated by arrow A in the drawing.
[0131] The inflation assembly can be any source of pressurizing
fluid that is introduced into the interior volume of the bladder 92
for expansion thereof, to confine the liquid, e.g., to provide zero
head space during transport and storage of the package, and upon
installation for dispensing of liquid medium from the vessel, the
bladder 92 may be coupled to an inflation assembly to further
expand the bladder, to effect pressure dispensing of the liquid
medium through the dispensing assembly to the flow circuitry
schematically indicated by arrow B.
[0132] The bladder may for the purpose of pressurization be
accompanied by an inflation assembly that is on-board the liquid
medium package, or provided as a separate module associated with
the package. The bladder may be formed of any suitable material of
construction, such as natural rubbers, synthetic elastomers,
natural/synthetic elastomer blends, etc., and may be pressurized
with any suitable pressurizing gas, such as air, nitrogen, helium,
carbon dioxide, etc.
[0133] The bladder in the FIG. 2 embodiment could alternatively be
replaced by other barrier structure, such as for example a
disc-shaped barrier that has a central opening therein, to
accommodate passage of the dip tube therethrough, wherein the
disc-shaped barrier is aligned in the interior volume of the vessel
with its main top and bottom surfaces parallel to the top end wall
86 and the bottom end wall 88 of the vessel. The barrier in such
arrangement is adapted to translate vertically up and down in the
interior volume 90, with the outer edge of such barrier in
fluid-tight contact with the interior surface of the cylindrical
side wall 84, and the central opening of the barrier being in
fluid-tight contact with the dip tube, so that movement of the
barrier does not mix the liquid medium and the pressurizing gas.
The pressurizing gas thereby is introduced to the vessel 82 to
exert pressure on the top face of the barrier, thereby transmitting
such pressure to the liquid, to effect pressure dispensing of the
liquid medium through the dip tube 98 and the dispense head 96 as
previously described.
[0134] Such arrangement of the flexible and/or movable barrier can
be applied to any vessel, fluid package, etc., including bottles,
bags, boxes, bag-in-box containers, canisters, and the like. The
barrier allows for expansion space in the vessel, where required by
applicable regulations, while keeping the liquid medium separate
from the pressurizing fluid.
[0135] Although described with reference to the use of a
pressurizing gas as the pressurizing fluid for the bladder in the
embodiment of FIG. 2, it will be appreciated that liquid may be
used as the pressurizing fluid for effecting pressure dispensing of
the liquid medium in FIG. 2.
[0136] It will likewise be appreciated that although the embodiment
of FIG. 2 has been described with reference to a liquid medium
being the material dispensed in such embodiment, gas or vapor may
alternatively be the medium contained in the vessel 82 and
dispensed therefrom under the impetus of the expanded bladder being
filled with fluid.
[0137] FIG. 3 is a schematic perspective view of a fluid storage
and dispensing package according to a further embodiment of the
invention, wherein all parts and features are numbered
correspondingly with respect to the same parts and features in the
embodiment shown and described with reference to FIG. 2.
[0138] The FIG. 3 embodiment differs from that shown in FIG. 2, in
the provision of a plug 100 captivating the fluid inside the
bladder 92, so that the fluid in the interior volume of the vessel
82 can expand or contract due to temperature variation, chemical
reactions, etc., with the fluid in the bladder 92 in turn being
correspondingly contracted or expanded during to variation in
pressure in such fluid.
[0139] The fluid in the bladder may be any suitable liquid or
gaseous medium, and the fluid in the interior volume 90 of the
vessel 82 may likewise be any suitable liquid or gaseous medium.
The fluids in the bladder 92 and in the interior volume 90 of the
vessel 82 are thereby in dynamic equilibrium with one another, to
accommodate variations in conditions of the fluids and the
environmental conditions of the vessel, such as ambient
temperature, etc.
[0140] The plug 100 may be provided in the form of a valve,
openable port or the like, to accommodate coupling thereto of a
fluid source, for addition of fluid to the interior volume of the
bladder 92, for pressure dispensing of the fluid in the interior
volume 90 of the vessel 82, or the plug may comprise a pressure
relief valve which can accommodate overpressure conditions
developing in the vessel 82 by releasing fluid from the bladder 92,
whereby the fluid in the vessel can expand to relieve overpressure
increases that would otherwise compromise the safety or structural
integrity of the fluid package 80.
[0141] FIG. 4 is a schematic perspective view of a fluid storage
and dispensing package according to yet another embodiment of the
invention.
[0142] The package 110 of FIG. 4 is a composite package structure
including an outer bag 112 that is circumscribingly arranged about
the periphery of an inner bag 116. The inner and outer bags in the
embodiment shown are formed of sheet film stock, and are welded at
edges of the sheets so that each bag encloses an interior volume,
and is inflatable or fillable with liquid medium, or other fluid or
solid material, or material in some other form. There is a space
between the respective bags that is pressurizable. The inner bag
116 as shown is provided with a fitment 118 thereon, which includes
an end opening 120, to allow ingress and egress of material to and
from the interior volume of the inner bag. The fitment opening 120
may be closed with a suitable closure member, e.g., a cap or other
closure article or material.
[0143] The bag assembly has a weld area 122 representing the
juncture of four films used in the illustrated composite package
article.
[0144] In the illustrated embodiment of FIG. 4, the outer bag 112
is provided with a pressurization air inlet 114 that communicates
with the space between the respective bags 112 and 116. In this
manner, air or other pressurizing gas can be introduced through the
pressurization air inlet to pressurize the space between the bags,
e.g., so that pressure can be exerted on the inner bag to assist in
dispensing liquid medium or other fluid material under the applied
pressure thereon.
[0145] Thus, the inner bag 116 can be filled with a liquid medium
or other material, and subsequent to such filling, pressurizing gas
can be introduced to the pressurization inlet 114 to expand the
outer bag, and place it in compressive bearing relationship to the
inner bag, so as to positionally fix the overall article, and
rigidify same.
[0146] The inflation passage in pressurization air inlet 114 may
contain a self-closing valve, or the air inlet may be cappable or
other closable with a closure of appropriate form.
[0147] At the point of use of the material contained in the inner
bag, the pressurization air inlet may be coupled with a source of
pressurized air or other pressurizing gas, and the space between
the respective bags may be further pressurized to expand the outer
bag and increase the pressure exerted on the bag for effecting
pressure discharge of the contained material from the inner
bag.
[0148] The inner and outer bags may be constructed in any other
suitable manner, to provide selectively inflatable or expansible
compartments or volumes that cooperate to enable filling of one or
more compartment(s) with a fluid medium or other material, and the
other or others of the compartment(s) to be pressurized to rigidify
the overall article for storage, transport, etc., and with the
compartment(s) being able to be further pressurized at the point of
use to achieve pressure-assisted dispensing of the contained fluid
or other material from the storage compartment(s).
[0149] Such multi-volume article provides a convenient and
effective storage and dispensing article for high-purity and
ultra-high purity liquid media, such as chemical reagents used in
the manufacture of microelectronic device devices and products.
[0150] The respective compartments of the multi-compartment storage
and dispensing article can be formed of any suitable materials of
construction, e.g., natural and synthetic rubbers, non-rubber
elastomers, polymeric elastomeric blends, expansible memory metal
films, etc.
[0151] In the FIG. 4 package, the liquid to be dispensed can be
contained (i) in the inner liner, (ii) between the inner and outer
liners, or (iii) in the case of a four-weld liner, in one of the
outer compartments between the liners.
[0152] FIG. 5 is a schematic representation of a bag-in-bag liquid
medium package 200 according to another embodiment of the
invention, in sectional elevation view. The package 200 includes a
vessel 202 which may for example be formed of a polymeric, metal or
other suitable material of construction, forming an overpack
structure, within which is disposed a first bag 204 enclosing
interior volume 205. The first bag 204 surrounds the interiorly
positioned second bag 206 enclosing interior volume 207. The second
bag 206 in its interior volume 207 contains liquid medium such as a
chemical reagent, in a zero head space conformation of the liner
defined by the second bag.
[0153] The first bag 204 surrounding the second bag is filled in
its interior volume 205 with an inflation gas, such as air,
nitrogen, argon, etc. The vessel 202 is capped with a cap 208,
which may be configured with port or coupling elements, for joining
of the package to suitable dispense apparatus, as well as a gas
source of inflation gas, so that the first bag 204 can be inflated
to a desired extent, to effect pressure dispensing of liquid medium
from the second bag 206.
[0154] The first bag 204 by such arrangement circumscribes the
second bag and exerts compressive force thereon. The magnitude of
the compressive force is dependent on the level of inflation
pressure in the first bag 204, and such pressure can be modulated
to progressively increase and thereby expand the first bag, so that
liquid medium is compressively squeezed from the second inner bag
206 under the progressively increasing pressure exerted
thereon.
[0155] In this manner, the liquid medium is dispensed from the
package to an external point of use.
[0156] The FIG. 5 embodiment thus illustrates the use of an
annularly circumscribing bat that serves in essence as a pressure
cuff on the inner bag to effect the pressure dispensing
operation.
[0157] It will be appreciated that the package of FIG. 5 may be
arranged and operated so that it is the inner bag 206 that is
pressurized with inflation gas to expand the bag and exert pressure
compressively against the outer bag. In such arrangement, then the
outer bag would contain the liquid medium, which would be dispensed
from the outer bag through flow passage structure in the cap and to
the external locus of use.
[0158] FIG. 6 is a schematic representation of a liquid medium
package 250 according to a further embodiment of the invention, in
sectional elevation view, which also utilizes a central bag 256 in
a container 252, but without the outer bag as shown in the
embodiment of FIG. 5. In the FIG. 6 arrangement, the central bag is
an inflation gas-filled bag in operation of the package for
dispensing. The bag 256 is surrounded by liquid medium 254 in the
container 252, and as the bag 256 is expanded by the inflation gas
introduced thereinto in gas feed line 264 from gas source 266, the
bag exerts pressure on the liquid medium surrounding it. The liquid
medium, as an incompressible medium, responsively is dispensed from
the container in discharge line 262 in the cap 260.
[0159] FIG. 7 is a schematic representation of a film laminate 300
according to one aspect of the invention, in cross-section, showing
the component layers of the laminate. The laminate is of a
construction that is advantageous for containment of liquid medium,
as a material of construction for liners for use in connection with
liquid medium packages. The laminate thus may be advantageously
used in connection with liquid medium storage and dispensing
packages, including those disclosed herein, and is advantageous in
application to zero head space liners, due to its low permeability
and high strength characteristics.
[0160] The laminate 300 as shown is a two-ply laminate including an
inner ply of high purity medium density polyethylene (MDPE), and an
outer ply including the seven component layers 304-316 that are
co-extruded by a process in which the seven extruded component
layers are passed through a die and then processed as blown film,
slit and consolidated as sheet film stock with the inner ply high
purity MDPE layer. Such co-extrusion and film processing operations
per se are of a conventional character known to those skilled in
the art of polymer processing, but such operations have not been
heretofore to form a laminate of the type illustratively shown in
FIG. 7.
[0161] The laminate of FIG. 7 provides unexpectedly superior liner
performance when used to fabricate liners for use in liner-based
liquid medium pressure-dispense packages. The outer surface layer
provides excellent "slip" characteristics so that a liner formed of
such film is able to move against an adjacent structure in contact
with such surface, without undue wrinkling, binding or surface
hold-up that would otherwise increase the susceptibility of the
liner and liquid therein to particle and microbubble formation.
Such laminate additionally has superior flexural character,
strength and deformation properties that render it suitable for use
in liners of even very large size. Further, the laminate has
superior permeability resistance to gases that might otherwise pass
though the liner film and enter the liner interior volume to
degrade the zero head space character when the liner is deployed in
a zero head space conformation.
[0162] The laminate 300 in the outer ply includes a first inner
layer 304 formed of linear low density polyethylene (LLDPE) blended
with medium density polyethylene (mPE) and formulated with an
anti-block agent. This layer is provided at a thickness that is 30%
of the overall thickness of the outer ply. The outer ply includes,
progressing outwardly from the inner layer 304, a tie layer 306 at
a thickness that is 8% of the total thickness of the outer ply, a
nylon layer 308 that is 8% of the total thickness of the outer ply,
an ethylene vinyl alcohol (EVOH) layer 310 that is 8% of the total
thickness of the outer ply, a nylon layer 312 that is 8% of the
total thickness of the outer ply, a tie layer 314 at a thickness
that is 8% of the total thickness of the outer ply, and an outer
layer 316 that is formed of 30% wt. linear low density polyethylene
(LLDPE) blended with 70% wt. high density polyethylene (HDPE) and
formulated with 4% wt. of an anti-block agent. Outer layer 316
constitutes 30% of the total thickness of the outer ply.
[0163] The layers in the laminate may have any suitable thicknesses
consistent with the specific end use of the laminate.
[0164] In the laminate, the nylon layers 308 and 312 do not require
bonding to the EVOH layer, since such layers naturally adhere to
one another. The nylon layers 308 and 312 nonetheless must be
bonded to the outer polyethylene layers 304 and 316, and the tie
layers 306 and 314 are utilized for such purpose. The tie layers
306 and 314 are formed of anhydride-modified high density
polyethylene or of anhydride-modified linear low density
polyethylene, and such modified polyethylenes are highly effective
in bonding the nylon and the polyethylene layers to one another.
Suitable modified polyethylenes of such type are commercially
available from E.I. du Pont de Nemours and Company (Wilmington,
Del.) as Series 4000, Series 4100 and Series 4200
anhydride-modified polyethylenes.
[0165] The overall thickness of the laminate 300 may be of any
suitable thickness, as necessary or desirable in a given
application of the laminate. In application to liners for liquid
media, the thickness of the outer ply may for example be on the
order of 2-4 mils, and the overall thickness of the laminate,
including the inner ply of high purity medium density polyethylene,
may be 5-6 mils.
[0166] The anti-block agent used in the inner layer 304 and outer
layer 316 of the outer ply can be of any suitable type. An
illustrative anti-block agent that has been used to advantage in
fabricating films for the foregoing laminate is diatomaceous
earth.
[0167] Such laminate may be utilized in sheet form to fabricate a
liner, e.g., by superposition of corresponding sheets, and welding
of same at their edges to form edge seams of a leak-tight
character, such as by ultrasonic welding or other suitable film
processing technique.
[0168] FIG. 8 is a schematic representation of a liquid
medium-supplied manufacturing system 400, according to a further
aspect of the invention.
[0169] The FIG. 8 system 400 includes a container 402 holding
liquid medium. The container 402 may be a liner-based container,
including a liner holding the liquid medium in a rigid overpack or
vessel, or the container may alternatively be a liner-less
container, in which the liquid is held in the vessel, in contact
with the vessel interior surfaces.
[0170] The container 402 is capped with a cap 404 that in the
embodiment shown mates with a dispense head 406 and may include a
dip tube for immersion in the liquid, or the container
alternatively can be arranged for dispensing in some other manner.
The container may be equipped with passage or coupling structure
for connection to a gas source for pressure-mediated dispensing of
liquid medium from the container. The dispense head 406 is
connected to a dispense line 410 that may flow to a valve assembly
408 including an actuator that is selectively actuatable to
initiate the liquid dispensing operation.
[0171] From the valve assembly 408, the liquid medium is flowed in
discharge line 414 optionally having flow monitoring and control
devices, represented schematically at 416, therein. The flow
monitoring and control devices can be of any suitable type or
types, and may for example include mass flow controllers,
temperature sensors, pressure transducers, flow rate monitors,
impurity detectors, component analyzers, restricted flow orifices,
fluid pressure regulators, etc. From the fluid medium discharge
line 414, the fluid medium is flowed into the fluid
medium-utilizing tool 420.
[0172] The tool can be of any suitable type, e.g., a
microelectronic device manufacturing tool, such as a photoresist
application tool, chemical vapor deposition chamber, ion
implantation unit, etching chamber, plasma generator, or other
apparatus appropriate to the manufacturing tool.
[0173] The manufacturing system 400 can optionally be equipped with
automatic control subsystems, for controlling the liquid dispensing
and tool operation process. Accordingly, the system can employ a
CPU 422, which is linked by signal transmission lines to the system
components, including signal transmission line 428 to valve
assembly 408, signal transmission line 426 to flow monitoring and
control devices 416, and signal transmission line 424 to the tool
420. The signal transmission lines may be constructed and arranged
to transmit sensed or generated signals from the system components
to the CPU 422, and/or to send control signals from the CPU 422 to
the controlled components of the system. The CPU can be of any
suitable type, e.g., a microcontroller, programmable logic
controller, microprocessor, CPU of a programmable general purpose
computer, etc.
[0174] The manufacturing system illustratively shown in FIG. 8 can
utilize any of the various liquid medium packages and dispensing
systems described herein, or in the related applications co-filed
herewith and identified hereinabove, for the manufacture of
products of the process carried out in the manufacturing system
using the dispensed liquid medium.
[0175] The zero head space conformation for the filling, storage,
transport, and installation of packages containing high purity
liquid media (e.g., >99.9995% pure) is highly desirable in the
suppression of bubble and particle effects, such as the formation
and agglomeration of particles in the high purity liquid medium,
and formation of bubbles and microbubbles upon decompression of the
liquid.
[0176] The invention in another aspect accommodates the need for an
expansion volume to be provided for the liquid medium in the
container in a zero head space conformation, so that the liquid
medium does not overflow if the liquid medium is at elevated
temperature, by a liquid medium container that has a semi-flexible
portion that is extensible or deformable from an expanded or normal
shape of the container, to provide a compacted volume for the
liquid in which the liquid is in a zero head space conformation, or
a near-zero or lowered head space conformation, for shipping,
transport and installation, but in which the semi-flexible portion
of the container is expansible or extendible at the point that the
package is opened for dispensing or access to the liquid
medium.
[0177] For example, activation of the semi-flexible portion of the
container may be effected by mechanical technique, such as
squeezing the container, to compact it so that the liquid is in the
desired low or no head space conformation. Alternatively, the
package could be subject to vacuum or a pressure differential to
cause extraction of the head space gas to collapse or flex the
semi-flexible portion of the container so that a low or no head
space conformation is achieved. After eliminating the head space,
the container is capped or otherwise maintained in the low or no
head space conformation. This results in a slightly reduced
pressure in the container. The semi-flexible portion of the
container must be constructed so that the absolute pressure in the
container does not approach the vapor pressure of the liquid medium
being contained. Typically, this means that the semi-flexible
portion of the container should not reduce the pressure inside the
container by more than 5 psi (0.35 kg/cm.sup.2).
[0178] A top, bottom or side wall or panel of the container may
constitute the semi-flexible portion of the container, or some
other portion of the container could include or function as such
portion. The semi-flexible portion could also be incorporated into
the structure of the container in any suitable manner, to effect
the compaction or deformation that is productive of the desired low
or no head space conformation of the container in respect of the
liquid medium therein.
[0179] It will be appreciated that a zero or other low head space
conformation of the container may be provided in the first
instance, with a semi-flexible portion of the container being
extensible or otherwise expandible from a normal compact shape of
the container, to provide an expansion volume for the liquid at the
time that the package is opened for dispensing or access to the
liquid medium. This is the inverse situation to that discussed
hereinabove, where the container is normally in an expanded state,
but is compacted to a low profile or smaller conformation to
accommodate the low or no head space conformation. For example, the
container may have a pull-out extension, such as an expandable
bellows or a fold-out passage member that increases the interior
volume available to the liquid medium in the container.
[0180] Accordingly, such approach of the invention is readily
applied by the provision of a container that is shape-shiftable to
vary the interior volume available to the liquid medium in the
container, whereby the interior volume is selectively variable
between an expanded volumetric state providing a greater head space
and a compacted volumetric state providing a smaller head
space.
[0181] The invention in a further aspect relates to minimal head
space systems for high purity (e.g., >99.9995% pure) liquid
media, in which the head space overlying the liquid medium in a
liner or other container is selected to (i) provide sufficient
space to accommodate expansion/contraction effects, and (ii) avoid
production of a saturated pressure equal to or greater than 3 psig
(0.21 kg/cm.sup.2) in the head space, so that the liquid medium
does not saturate to a pressure of 3 psig or greater when mixed and
dispensed.
[0182] The first criterion is necessitated by regulatory
constraints that impose a requirement of an expansion volume in the
liquid container, and the second criterion is based on the fact
that saturation pressures of 3 psig (0.21 kg/cm.sup.2) or higher
have been found to lead to bubble formation upon decompression of
the liquid, e.g., at the point of dispensing of the high purity
liquid medium from the liner or other container. The objective
achieved by the second criterion is keeping the volume of gas low
enough so that even if all gas were to go into solution during
mixing and dispensing, the equilibrium vapor pressure in the
solution would remain below 3 psig.
[0183] The foregoing therefore provides a criterion that permits a
head space volume to be determined for a given high-purity liquid
medium, that will ensure the appropriate performance of the liquid,
such as in the case of microelectronic device manufacturing
reagents that must be free of bubbles, microbubbles and
particulates, in order to be suitable for use in microelectronic
device manufacturing processes.
[0184] The foregoing criterion and its determination in specific
applications to provide a minimum head space for liquid medium in a
liner or other package is illustrated by the following non-limiting
example.
Example
[0185] Propylene glycol methyl ether acetate (PGMEA) is a common
reagent employed extensively in microelectronic device
manufacturing operations. For a four-liter volume of PGMEA, it was
verified that if the saturated pressure, P.sub.sat, of the solution
is below 3 psig (0.21 kg/cm.sup.2), dissolved gases will not form
an appreciable amount of bubbles upon decompression. Four liters of
PGMEA were filled into the liner of a NOWPAK liner package
(commercially available from ATMI, Inc., Danbury, Conn., USA) and
saturated pressures were determined as a function of head space
volume, from which it was found that if the head space volume was
increased from a substantially zero head space condition to about
10 milliliters of head space, the saturation pressure of the liquid
is maintained below 3 psig, and bubble formation did not occur to
any significant extent during decompression of the liquid.
[0186] The present invention as indicated relates generally to
material containment systems for storage, transport and dispensing
of a wide variety of materials. In various embodiments and aspects,
the invention relates to liners for use in material containment
packages, and to packages including such liners. Still further, the
invention relates to multilayer film laminates, other type useful
for manufacture of liners for use in liner-based material
packages.
[0187] Although the ensuing discussion of the present invention is
primarily directed to liner-based material containment packages
utilized for storage and dispensing of liquid materials, it will be
recognized that the liner-based packages of the invention are not
thus limited to liquid materials in utility, but rather are useful
for storage and containment of a wide variety of materials,
including solids, solid-liquid suspensions, liquid- and/or
gas-containing materials, etc.
[0188] The materials that may be contained in liners in liner-based
packages of the present invention include, without limitation,
semiconductor manufacturing reagents, pharmaceutical compositions,
high purity industrial solvents, food products, beverages, forensic
samples, water quality samples, fuels, blood and plasma products,
and plant nutrient solutions, to name but a few. In one preferred
aspect, the material comprises a liquid or liquid-containing
composition used in manufacturing of microelectronic device
products, such as photoresist, etchant, dopant, chemical vapor
deposition reagent, solvent, wafer or tool cleaning formulation,
chemical mechanical planarization composition, etc.
[0189] The term "microelectronic device" as used herein refers to
resist-coated semiconductor substrates, flat-panel displays,
thin-film recording heads, microelectromechanical systems (MEMS),
and other advanced microelectronic components. The microelectronic
device may include patterned and/or blanketed silicon wafers,
flat-panel display substrates or polymeric, e.g., fluoropolymer,
substrates. Further, the microelectronic device may include
mesoporous or microporous inorganic solids.
[0190] As used herein, the term "zero head space" in reference to
fluid in a liner means that the liner is totally filled with liquid
medium, and that there is no volume of gas overlying liquid medium
in the liner.
[0191] Correspondingly, the term "near zero head space" as used
herein in reference to fluid in a liner means that the liner is
substantially completely filled with liquid medium except for a
very small volume of gas overlying liquid medium in the liner,
e.g., the volume of gas is less than 5% of the total volume of
fluid in the liner, preferably being less than 3% of the total
volume of fluid, more preferably less than 2% of the total volume
of fluid and most preferably, being less than 1% of the total
volume of fluid (or, expressed another way, the volume of liquid in
the liner is greater than 95% of the total volume of the liner,
preferably being more than 97% of such total volume, more
preferably more than 98% of such total volume, and most preferably
more than 99% of such total volume).
[0192] The greater the volume of the head space, the greater the
likelihood that the overlying gas will become entrained and/or
solubilized in the liquid medium, since the liquid medium will be
subjected to sloshing, splashing and translation in the liner, as
well as impact of the liner against the rigid surrounding container
during transportation of the package. This circumstance will in
turn result in the formation of bubbles, microbubbles, and
particulates in the liquid medium, which degrade the liquid medium,
and render it potentially unsuitable for its intended purpose. For
this reason, head space is desired to be minimized and preferably
eliminated (i.e., in a zero or near-zero head space conformation)
with complete filling of the interior volume of the liner with
liquid medium.
[0193] In one aspect, the present invention relates generally to a
material containment package in which material potentially
susceptible to bubble formation therein is contained, having a
headspace associated therewith, in which the headspace is placed
under vacuum. Under these conditions, bubbles do not persist in the
material because they are collapsed by the hydrostatic pressure of
the material, e.g., liquid or liquid-containing material. The
vacuum pressure in the headspace is reduced to the vapor pressure
of the most volatile species in the contained material, and
dissolved gases are removed during the filling operation prior to
the sealing of the containment package. The containment package in
such sealed state must be able to accommodate the mechanical forces
associated with the vacuum, without collapsing or sustaining
adverse effect on its structural integrity.
[0194] The containment package desirably is substantially
impermeable to atmospheric gases or other gas species in the
ambient environment of the containment package, to avoid
circumstances in which the pressure outside the containment package
changes to such an extent that it causes formation of bubbles in
the contained material.
[0195] In instances in which the containment package includes a
liner disposed in a container, the permeation barrier can be
constituted at least in part by the liner.
[0196] In another aspect of the invention, a material containment
package is provided, including a vessel having a port therein. A
balloon is inserted into the vessel and inflated, whereby fluid is
displaced from the interior volume of the vessel through the port,
following which the port is closed and the interior volume of the
vessel contains the inflated balloon. In such configuration, the
balloon serves as a pressure equilibration component of the
package, to accommodate internal pressure changes due to expansion
and contraction of the contained material, e.g., liquid.
[0197] As applied to a liquid containment system, this arrangement
is characterized by the absence of a gas/liquid interface (since
the gas in the interior volume of the container is displaced
through the port by the inflation of the balloon to an extent
ensuring complete expulsion of gas from the interior volume of the
container). Since there is no gas/liquid interface, the formation
and entrainment of bubbles in the liquid is avoided.
[0198] In one embodiment of the above-described liquid containment
system, mobility of the inflated balloon in the container is
constrained by use of an open cell foam material introduced into
the balloon as an inflation/expansion medium that is used to
positionally fix and solidify the balloon after the headspace gas
in the container is eliminated from the interior volume.
[0199] FIG. 9 is a schematic representation of a material
container, according to one embodiment of the invention
[0200] As illustrated, the material container 10 includes a vessel
12 having a top wall 14, floor 16 and circumscribing sidewall 18,
which together enclose an interior volume 20 of the container. The
container on its top wall 14 includes a port 42, defining a port
opening 40, and a port 46, defining a port opening 48.
[0201] The vessel 12 is shown as containing liquid 24, which has
been introduced to the interior volume 20, through port 42 or 46,
in a prior filling operation. The liquid 24 is overlaid by a
headspace 22, containing air or other gas.
[0202] Disposed in the interior volume 20, as secured to the port
42, is an inflatable balloon 30 defining an enclosed volume 32
therein. Coupled with the port, by means of a feed line 34, is a
source 36 of inflation gas, such as nitrogen. The inflation gas is
flowed from the source 36 in feed line 34 into the enclosed volume
32 of the balloon 30, for installation of the balloon. As the
balloon is inflated, it displaces gas from headspace 22 through the
opening 48 of port 46, in the direction indicated by arrow A.
[0203] The inflation operation is continued until the balloon 30 is
inflated as shown in FIG. 10, to completely expel the headspace gas
from the vessel, whereupon the port 46 is plugged by plug 50 and
the port 42 is closed by cap 60. The vessel then is in a zero
headspace state (no gas overlying the liquid), or a near-zero
headspace state, with the balloon 30 containing the inflation gas
in the enclosed volume 32, whereby expansion or contraction of the
liquid as a result of temperature or other ambient variation will
correspondingly compress or expand the balloon, so that stress on
the interior walls of the vessel by the liquid is avoided.
[0204] The cap 60 and the plug 50 may be complementarily threaded
to mate with cooperative threading on the outside surfaces of the
ports 42 and 46, respectively. Alternatively, the cap 60 and plug
50 may be lockingly coupled to the respective ports in any other
suitable manner, to provide leak-tight closure of the respective
port openings.
[0205] In another embodiment, in lieu of the use of an inflation
gas, the balloon may be expanded by injection of a non-gaseous
medium, such as a solid, semi-solid, gel, or other medium into the
enclosed volume 32 of the balloon. Such introduced material may be
cured, e.g., by cross-linking, thermosetting, or other cure
modality, to establish an enlarged volume that is positionally
fixed in the interior volume 20 of the vessel, yet is able to
accommodate changes in pressure of the contained liquid in the
vessel without adverse effect.
[0206] In another embodiment, the container 10 shown in FIG. 9 may
be constituted without the balloon 30, and with vacuum pressure
exerted on the headspace 22 by a vacuum pump, for extraction of a
headspace gas in the direction indicated by arrow A, while port
opening 40 is capped by a suitable closure. By such arrangement,
the liquid 24 in the vessel 12 can be placed under vacuum
conditions for storage and transport of the liquid.
[0207] Another aspect of the invention relates to a multi-layer
liner for use in a liner-based package for containment of material.
In the multilayer liner, a highly gas-permeable inner layer is
attached to a low gas-permeable outer layer. The inner and outer
layers may be made of any suitable materials that have the
specified permeability characteristics and are otherwise suitable
for containment of the material to be stored in and dispensed from
the liner-based package. For example, the inner layer may be formed
of a polytetrafluoroethylene film, and the outer liner may be
formed of polyethylene.
[0208] A special fitment is required for introduction of a suitable
gas into the space between the respective liners, as hereinafter
described in greater detail. Such arrangement allows a specific gas
or other suitable chemistry to be introduced into the inter-liner
space, which is beneficial to the contained material. The
beneficial chemistry therefore may include a gas that serves to
extend the shelf life of a chemical composition stored in the inner
liner, a ripening gas for unripe fruit stored in the inner liner,
or other gaseous medium or chemistry that desirably diffuses
through the inner liner into the interior volume of the inner
liner, to benefit the material held in such inner liner.
[0209] At the point of use, any residual gas in the inter-liner
volume and the evacuated from such volume prior to dispensing
operation, so that the respective inner and outer liners are in
contact with one another. At that point, drive gas can be
introduced into the container, into the space between the outer
liner and the interior walls of the container, to effect
pressure-dispensing of material from the inner liner. The drive gas
between the outer liner and the interior walls of the container
therefore progressively collapses and compacts the liner assembly,
to force the contained material therefrom, in the dispensing
operation.
[0210] In another embodiment, the inter-liner space can be filled
with a gas that is of low permeability in respect of either film
bounding such space. In such embodiment, the introduced gas is
placed into the space between the inner and outer liners, in order
to provide a "barrier gas layer" therebetween.
[0211] FIGS. 11-20 illustrate the fabrication of such double
liner-based container and the components and structures in the
various assembly steps of the fabrication.
[0212] FIG. 11 is a front elevation view of the inner liner 100,
comprising an assembly 101 of two superposed sheets of polymeric
film that are in register with one another with respect to their
corresponding edges. The sheets are formed of a suitable polymeric
film material, such as polytetrafluoroethylene, and are heat sealed
to one another at edge regions thereof, including top heat seal
105, bottom heat seal 106, and side heat seals 103 and 104. The
front panel of the inner liner has joined thereto a fitment 102, by
means of which liquid or other material can be introduced into the
interior compartment for containment therein. The fitment 102 may
be formed of perfluoroalkoxy (PFA) resin or other suitable
material.
[0213] FIG. 12 is a front elevation view of an outer liner 110,
comprising an assembly 111 of two superposed sheets of polymeric
film that are in register with one another with respect to their
corresponding edges. The sheets are formed of suitable polymeric
film material, such as polyethylene or other polyolefin material,
and are heat sealed to one another at edge regions thereof,
including bottom heat seal 115 and side seals 113 and 114. The
front panel of the outer liner has a port fitment 112 that is
configured to cooperatively mate with the fitment 102 of the inner
liner (FIG. 11). The fitment 112 may be formed of high-density
polyethylene, or other suitable material of construction.
[0214] FIG. 13 is a front elevation view of the double liner
structure including inner liner assembly 101 (of FIG. 11)
positioned inside outer liner assembly 111 (of FIG. 12), with the
fitment 102 of the inner liner cooperatively mated with the fitment
112 of the outer liner.
[0215] FIG. 14 is a front elevation view of the finished double
liner assembly 120, in which the front and back polymeric film
panels of the outer liner assembly have been heat sealed to one
another along top heat seal 122, and air has been removed from the
space between the inner and outer liners. The space between the
inner and outer liners may subsequently be filled with a gas
beneficial to contents of the inner liner, or otherwise
constituting a desired barrier gas in such space, as discussed
hereinabove.
[0216] FIG. 15 is a front elevation view of a standard fitment 140,
of a type which may be augmented as shown in FIG. 16. FIG. 16 shows
a standard fitment body 144 that has been modified to constitute
augmented fitment 142, by the provision of a collar 150, featuring
an O-ring groove 146 therein, and hemispherical locktabs 148
integrally formed with the collar.
[0217] The collar 150 may be formed as a separate piece that is
subsequently bonded or otherwise secured to the standard fitment
144, e.g., by ultrasonic welding, solvent welding, adhesive
bonding, or other mode of attachment, to form the augmented fitment
142. Alternatively, the collar 150 may be integrally cast or molded
as part of the fitment 142.
[0218] The collar is formed with three hemispherical locktabs 148
(only one is visible in FIG. 16) around the periphery of the
collar, which cooperatively made with the outer liner fitment
described more fully hereinafter.
[0219] FIG. 17 is an elevation view of the augmented fitment 142 of
FIG. 8, with O-ring 152 disposed in the O-ring groove 146 (see FIG.
16). The O-ring is added after the fitment 142 is welded to the
inner liner (not shown in FIG. 17; see FIG. 11).
[0220] FIG. 18 is an elevation view of the outer liner fitment 160
including the central axle section 161 and peripheral flange 162
extending radially outwardly from the lower portion of axle section
161.
[0221] FIG. 19 is an elevation view, in cross-section, of the outer
liner fitment 160 of FIG. 18, showing the central axle section 161
as circumferentially bounding the central bore 164, and the
peripheral flange 162 extending radially outwardly from the lower
portion of the axle section 161.
[0222] FIG. 20 is an elevation view, in partial cut-away and
cross-section, of the completed fitment 142 as including the
standard fitment 144 to which the collar has been mounted as
described in connection with FIGS. 16 and 17. The standard fitment
144 therefore constitutes a lower flange portion to which the inner
liner is welded, and a main cylindrical portion that circumscribes
a central bore for introduction of material into the inner liner,
or dispensing of material from such inner liner.
[0223] The peripheral flange 162 of the outer liner fitment is
welded to the outer liner (not shown in FIG. 20) and the outer
liner fitment then is snap-fitted over the inner liner fitment 142,
so that the O-ring 152 provides a link-tight seal, and so that the
hemispherical locktabs 148 secure the axle section 161 on the outer
liner fitment 160 in sealed position.
[0224] By such cooperative arrangement of the respective inner
liner and outer liner fitment members, a fitment assembly is
provided on the liner-within-a-liner containment structure, which
seals the space between the inner liner and outer liner and permits
gas introduced into such space before the snap-fit sealing of the
respective fitments to one another to be sealingly retained in such
space, e.g., as a barrier or stabilizing medium, to protect or
extend the shelf life of the material contained in the inner
liner.
[0225] Subsequently, at the point of use, the fluid in the space
between the inner liner and outer liner is suitably evacuated,
e.g., by uncoupling the outer liner fitment from the inner liner
fitment and applying pressure to the outer surface of the outer
liner, to collapse the outer liner against the inner liner, to
place the liner assembly in a state whereupon further application
of pressure will effect the pressure-dispensing of the contained
material from the interior volume of the inner liner through the
inner liner fitment 142.
[0226] The above-described liner assembly can be disposed in an
overpack, which may be constituted as a rigid outer container, and
the pressure-dispensing operation may be conducted with
introduction of gas into the space between the overpack and the
outer liner of the liner assembly.
[0227] The double-liner and double-fitment structure described in
connection with FIGS. 11-20 therefore permits a highly efficient
containment of material for storage, transport and dispensing, and
enables a barrier or protective medium to be interposed in the
space between the inner and outer liners, as part of a package in
which the liner assembly is disposed in the interior volume of an
outer containment vessel.
[0228] Another aspect of the invention relates to a composite liner
220 as schematically shown in FIG. 21, comprising a primary liner
222 attached at its upper end to fitment 228 having flange 230 at
its distal end, for dispensing of fluid from the liner in the
direction indicated by arrow A to a downstream semiconductor
manufacturing facility 250 comprising a semiconductor manufacturing
tool utilizing such fluid. The primary liner 220 is arranged as
shown, with a secondary liner 224 penetrating the wall of the
primary liner 222, whereby a portion of the secondary liner 224 is
interiorly disposed in the primary liner 222, in the interior
volume thereof.
[0229] The secondary liner 224 constitutes a gas-permeable sleeve
in the portion thereof that is interiorly disposed in the primary
liner 222, with such sleeve being gas-permeable but
liquid-impermeable, whereby gases in the liquid or headspace in the
primary liner 222 can be extracted through the gas-permeable
portion of the secondary liner 224, when the secondary liner 224 is
coupled with a suitable vacuum source (not shown in FIG. 21) by
means of the vacuum suction line 226.
[0230] By applying vacuum suction on the interior sleeve portion of
the secondary liner 224, dissolved and entrained gases will be
extracted from the liquid in the primary liner 222, to suppress the
formation of the microbubbles in the liquid, as well as in
downstream flow circuitry and components due to pressure drop of
dispensed liquid along the dispensing path. The gas-permeable
sleeve portion of the secondary liner 224 preferably is permeable
to atmospheric gases, as well as the pressurizing gas that is used
for pressure-dispensing of the liquid from the primary liner
222.
[0231] Another aspect of the invention relates to a liner-based
package as schematically shown in FIG. 22, as comprising a rigid
outer container 310 enclosing an interior volume 312 within which
it is disposed a liner 314 suspended from the neck 316 of the
vessel.
[0232] In typical practice, the liners are filled with liquid in an
ambient nitrogen or ambient air environment, which results in
correspondingly nitrogen-saturated or air-saturated liquid, over a
wide range of saturation. If this liquid is highly saturated, then
even minor fluctuations in temperature or pressure conditions can
result in the formation of bubbles in the liquid. Such bubble
formation susceptibility is increased if nitrogen or clean dry air
is used to pressurize the annular space between the liner and the
rigid outer container, since the net flux of gas from the annular
space into the bag further increases the amount of dissolved gas in
the liquid.
[0233] The present invention addresses this deficiency, by
utilizing a gas in the annular space that is different from the gas
in the ambient environment at the time of filling of the liner with
liquid. By utilizing a different gas in the annular space, a
concentration gradient is established that results in dissolved and
entrained gas in the liquid diffusing through the liner into the
annular space between the liner and the container. Such outgoing
permeation of gases from the liquid through the liner into the
annular space reduces the concentration of the original gas species
in the liquid, and thereby decreases the susceptibility of the
liquid to form microbubbles.
[0234] Thus, by way of example, the liner may be filled with liquid
in the first instance, under nitrogen atmosphere, as a result of
which the liquid is at least partially saturated with nitrogen. If
helium gas then it is introduced into the annular space between the
liner and the container, then the nitrogen in the liquid will
diffuse through the liner and enter the annular space containing
helium. While a corresponding concentration gradient will be
established for the helium in the annular space, resulting in its
diffusing through the liner into the liquid contained therein, the
rate of such diffusion will be low and a significant period of time
will be required for the helium to reach saturation conditions in
the liquid in the liner.
[0235] It will be appreciated that the specific gases may be
selected, to constitute the ambient environment when the liquid is
being filled into the liner, and to constitute the different gas
with which the annular space of the liner-based package is filled
after the liquid filling operation has been completed.
[0236] FIG. 22 thus shows helium at 14.7 psig being filled into the
annular space 312 of the liner-based package, and the liquid in the
liner being in a zero headspace ("ZHS") or near-zero headspace
conformation, saturated with nitrogen at 0 psig as a result of the
liquid fill operation taking place under inert nitrogen atmosphere.
FIG. 22 also shows liquid being flowed out of the liner ("Liquid
Out"), which may occur when the helium gas is introduced to the
annular space in interior volume 312, to establish the zero
headspace or near-zero headspace conformation, or subsequently at
the point of the use, when helium gas may be introduced as a driver
gas for pressure-dispensing of the liquid. Thus, the different gas
species in the annular space may be employed as a "packing" or
"fill" gas at the time of liquid package preparation, and the same
or another different gas may be employed as the drive gas for
pressure-dispensing.
[0237] Although the foregoing discussion has been directed to the
use of single component gases in the liquid and in the annular
space of the liner-based package, it will be appreciated that the
originally packaged liquid may contain multiple gas species as
dissolved and/or entrained components in the liquid, and likewise
that the gas employed in the annular space of the liquid
containment package may be a multicomponent gas.
[0238] The invention therefore contemplates the use of a gas medium
in the annular space between the liner and the container that
effects diffusional extraction of the dissolved and entrained gases
from the liquid through the liner, to minimize the formation of the
microbubbles and/or the effervescing of the liquid as the liquid
pressure declines in the dispensing operation, in the flow
circuitry and components associated there with (e.g., pumps,
restricted flow orifice elements, etc.).
[0239] The gas medium in the annular space of the liner-based
package desirably is a gas mixture, since the concentration of gas
in the liquid within the liner can only rise to a maximum
concentration equal to its concentration in the annular space gas,
so the in-permeating gas from the annular space into the liquid
will be below its saturation pressure.
[0240] As another approach for suppressing the formation of
microbubbles and they contained the liquid, the ambient environment
during filling of the liner with liquid can be constituted by a
mixture of gases that all are all present at low mole fraction in
the ambient gas mixture. The individual gases are each desirably
present in the ambient gas mixture at levels that are below their
saturation pressures under use (dispensing) conditions.
[0241] FIG. 23 is a sectional elevation view of a multilayer
laminate useful in the general practice of the present invention
for construction of liners adapted for use in liner-based material
containment packages.
[0242] As illustrated, the multilayer laminate includes an
innermost polytetrafluoroethylene (PTFE) layer, having a tie layer
on its outer face, intermediate the innermost PTFE layer and the
next adjacent outer PTFE layer. The outer layer instead of PTFE may
be constituted by other fluoropolymer or polymeric film.
[0243] On the outer face of the outer layer of PTFE is a second tie
layer, intermediate the outer PTFE layer and the next adjacent
barrier layer. The barrier layer on its outer face has a third tie
layer, intermediate the barrier layer and the outermost abrasion
film layer.
[0244] The multilayer laminate thus includes seven successive
layers, including in sequence (from the innermost layer to the
outermost layer) a PTFE layer, a first tie layer, a PTFE layer, a
second tie layer, a barrier layer, a third tie layer and an
abrasion film layer.
[0245] The first tie layers function to seal successive PTFE layers
to one another, so there is no path to allow movement of liquids
through the seal between these two successive layers. Since PTFE in
thin-film form is susceptible to the presence of pinholes, as
illustrated in the FIG. 23 drawing, the use of two PTFE layers on
either side of the first tie layer serves to dead-end the pinholes
in the respective layers of PTFE, since there is a low probability
that pinholes in the first and second PTFE layers will be aligned
with one another.
[0246] In the multilayer laminate, the innermost PTFE layer is the
liquid-contacting layer of the laminate, and therefore such layer
is desirably highly inert in character. If the tie layer is formed
of a highly inert material, then the tie layer can replace the
inner PTFE layer.
[0247] It is very important to prevent liquid from reaching the
barrier layer of the laminate, in order to maintain the liquid
fully contained within the liner. The fabrication material of the
barrier layer is selected based on desired properties for such
layer. Barrier layer materials of construction include any suitable
materials, but in preferred practice, such materials typically fall
into three classes: metals, e.g., aluminum; ceramics, e.g., glass;
and polymers with high barrier properties, e.g., EVOH, polyamide
(nylon), polyvinylidene chloride (PVDC),
polychlorotrifluoroethylene (PCTFE), polyether-ether-ketone (PEEK)
and liquid crystal polymer (LCP).
[0248] The considerations involved in the material selection for
the barrier layer include factors such as the following; ease of
manufacturing; potential for contamination of liner contents; ease
of formation; weldability; susceptibility to pinholing,
particularly when flexed; and permeability to gases, water and the
material to be retained in the liner, among others. The second tie
layer is disposed between the outer PTFE layer and the barrier
layer.
[0249] Additional barrier layers may be employed in the laminate to
provide specific blocking of diffusion of particular species.
[0250] The outermost layer in the multilayer laminate is an
abrasion film. The third tie layer is disposed between the barrier
layer and the abrasion film. The purpose of the abrasion film layer
is to protect the barrier layer from damage, as well as to prevent
contamination deriving from the barrier layer, e.g., when the
barrier layer is of a potentially contaminating material such as
aluminum.
[0251] The abrasion film may be formed of any suitable material
that is effective to protect the other layers in the laminate.
Examples of illustrative materials that may be utilized to form the
abrasion film in the broad practice of the present invention
include, without limitation, fluoropolymers, polyethylene,
polypropylene, polyether-ether-ketone (PEEK), etc.
[0252] The thicknesses of the layers in the multilayer laminate
shown in FIG. 23 may be any suitable thicknesses that are effective
to provide good performance by the laminate. In a specific
embodiment, the inner PTFE layer has a thickness in a range of from
about 0.25 to about 5 mils, the first tie layer has a thickness in
a range of from about 0.1 to about 0.4 mils, the outer PTFE layer
has a thickness in a range of from about 0.25 to about 5 mils, the
second tie layer has a thickness in a range of from about 0.1 to
about 0.4 mils, the barrier layer has a thickness in a range of
from about 0.25 to about 5 mils, the third tie layer has a
thickness in a range of from about 0.1 to about 0.4 mils, and the
abrasion film layer has a thickness in a range of from about 0.25
to about 5 mils. In such embodiment, each of the tie layers can be
formed of fluorocarbon adhesives, polyethylene adhesives or other
adhesives, such as acrylics, cyanoacrylates, polyamines, epoxies,
hot-melt adhesives, polyurethanes, and silicones. The barrier layer
in such embodiment can be formed of aluminum, ceramics, EVOH,
polyamide (nylon), polyvinylidene chloride (PVDC),
polychlorotrifluoroethylene (PCTFE), polyether-ether-ketone (PEEK),
liquid crystal polymer (LCP), or other suitable material.
[0253] The abrasion film in such embodiment can be formed of
fluoropolymers, polyethylene, polypropylene, polyether-ether-ketone
(PEEK), or other suitable material.
[0254] The liner-based packages of the invention can include a
vessel, in which the liner is disposed, formed of any suitable
material of construction, such as plastics, polymers, ceramics,
metals, composite materials, etc. In applications where
pressurizing gas is introduced into the interior volume of the
vessel, exterior to the liner disposed therein, to effect
pressure-dispensing of the materials contained in the liner, the
vessel is constructed of material that accommodates the stresses of
the pressures involved in progressively compacting the liner to
force the material from the liner through the dispensing passages
of the package.
[0255] In applications in which the pressure of the pressurizing
gas for pressure-dispensing of the liner contents is substantial,
e.g., on the order of 10 psig and above, it generally is preferred
to employ vessels that are constructed of metal. Any suitable
metals may be employed for such purpose, including steel or other
ferrous alloy materials, titanium, brass, copper, etc. A
particularly preferred metal material for the vessel, based on
weight and cost considerations, is aluminum.
[0256] The invention in another aspect relates to a liner-based
package in which the vessel in which the liner is disposed utilizes
a first liner for containment of the material to be dispensed, and
a second liner for a pressurizing fluid, which is selectively
inflatable to exert pressure on the first liner during
pressure-dispensing of the material from the first liner. In such
arrangement, the vessel, as an overpack containing the first and
second liners, can be vented and at ambient pressure conditions, or
it may alternatively be at a subatmospheric pressure allowing the
first liner to de-gas its contents so that any entrained gas
content of the material in the first liner is extracted from the
material in the first liner.
[0257] The advantages of such material-containing
liner/pressurizing liner arrangement include the ability to
optimize the liner materials of construction so that the chemical
reagent or other contents of the package can be stored and
subsequently dispensed at high purity, without formation of
microbubbles and without the presence of dissolved gases
therein.
[0258] In this respect, liner materials such as
polytetrafluoroethylene and other fluoropolymers are desirable for
maintaining high purity in storing chemical reagents and other
substances that must be supplied at zero or near-zero contaminant
concentrations, but such polymers exhibit poor gas barrier
behavior. Although this poor gas barrier characteristic is overcome
in the use of multilayer laminate liners, e.g., in which
polytetrafluoroethylene is used in combination with plies of
material having good gas barrier character, to provide a multilayer
liner having acceptable gas barrier qualities, such multilayer
liners suffer from problems of gas entrapment between layers in the
laminate, contamination susceptibility from adhesives used to bond
or tie successive layers in the laminate to one another, and
reduced ability of the laminate to accommodate processing steps
necessary to form the liner, such as where layers of material
providing good gas barrier character have low melting points and
constrain bonding or other processing operations needed to form the
liner article.
[0259] The use of separate liners, one containing the material to
be stored in and subsequently dispensed from the package, and one
or more other pressure-dispensing liners, adapted to exert pressure
on the storage liner during dispensing, resolves such problems of
the multilayer laminate liners. The "contents" liner, containing
the chemical reagent or other material to be dispensed, is
inflated, filled and connected for pressure dispensing in a normal
manner. The "pressurizing" liner is thus outside of and
functionally separate from the contents liner, and may be formed of
an inexpensive material of construction, such as an inexpensive
single layer polyethylene film, such no stringent barrier
properties are required for such liner.
[0260] At the point of use, the second (pressurizing) liner can be
inflated, e.g., by pressurized air or other suitable gas or liquid.
As the pressurizing liner is inflated, it applies force against the
exterior surface of the first (contents) liner, to force the
contents to be dispensed from first liner. The pressure of the
pressurizing medium in the second liner therefore may be modulated
as necessary to effect dispensing of contents from the first liner
in the desired amount and at the desired rate.
[0261] Throughout such dispensing operation, the air in the vessel,
outside the two liners, remains at atmospheric pressure, as it is
vented to the atmosphere, e.g., through a vent line, valve or port.
As such, no pressure gas will permeate the first liner, and the
contents of the first liner will remain at high purity and free of
bubbles. Alternatively, the gas in the vessel outside the first and
second liners may be at subatmospheric or superatmospheric
pressure. For example, the interior volume of the vessel may be
subjected to vacuum to effect outgassing of any entrained gas in
the first liner, by permeation thereof through the first liner.
Alternatively, the interior volume of the vessel may be pressurized
with a specific gas medium, to infuse such gas medium, e.g., an
inert gas or protective gas, into the contents of the first liner
during dispensing operation.
[0262] Thus, each of the first and second liners may be
individually optimized for its respective individual function(s),
so that the respective liners can be constituted of materials of
construction appropriate to their use and at reduced cost, relative
to the use of multilayer liners that require cost/performance
compromises to be made in their design.
[0263] FIG. 24 is a perspective view of a liner-based package of a
bag-in-bottle type, including a vessel 400 having a dispensing
connector assembly 410 coupled thereto and arranged for dispensing
material from the package, as generally indicated by dispensed
material flow arrow 412. The vessel 400 in this package encloses an
interior volume 402 in which is disposed a first liner 404 holding
the material to be dispensed, and a second liner 406 that is
inflated with a pressurizing gas whose flow is generally indicated
by pressure gas inflow arrow 408.
[0264] In operation, pressure gas is flowed into the second liner
406 to sufficient extent to inflate the second liner and cause it
to exert pressure on the first liner 404 so that the first liner is
progressively compacted under applied pressure and the material in
the first liner is dispensed through the connector, e.g., to
exterior flow circuitry or other apparatus for use of the dispensed
material, e.g., an ultra-high purity photoresist for manufacture of
a microelectronic product such as a semiconductor device, flat
panel display, or the like. The vessel 400 may be vented so that
the interior volume gas is displaced from the vessel as the
inflation of the second liner 406 progresses (vent not shown in
FIG. 24).
[0265] Although the package is illustratively shown in FIG. 24 as
comprising only two liners, it will be appreciated that multiple
pressurizing liners may be employed in specific embodiments of the
invention, and that the liners may be of various shapes and
conformations, as appropriate to their use. For example, the
pressurizing liner may be formed with an annular conformation so
that it circumscribes the first contents liner, as a sleeve
thereon, so that pressure is applied circumferentially in a uniform
radially inwardly fashion on the first liner in the dispensing
operation.
[0266] It will also be appreciated that the second pressurizing
liner, instead of being retained in the interior volume of the
vessel in an uninflated condition prior to dispensing, may
alternatively be partially or fully inflated to positionally secure
the first liner in place in the interior volume, so as to avoid
movement of the first liner in the interior volume during transport
of the package and prior to dispensing operation. The second liner
can thus be sealed at a pressure that positionally stabilizes the
first liner in the package, and at the point of use, the second
liner can be additionally inflated to an extent and at a rate
appropriate for pressure dispense of the first liner contents.
[0267] While the invention has been has been described herein in
reference to specific aspects, features and illustrative
embodiments of the invention, it will be appreciated that the
utility of the invention is not thus limited, but rather extends to
and encompasses numerous other variations, modifications and
alternative embodiments, as will suggest themselves to those of
ordinary skill in the field of the present invention, based on the
disclosure herein. Correspondingly, the invention as hereinafter
claimed is intended to be broadly construed and interpreted, as
including all such variations, modifications and alternative
embodiments, within its spirit and scope.
* * * * *