U.S. patent application number 13/663159 was filed with the patent office on 2013-09-19 for swirl flow type pre-mixed low-pollution combustion apparatus.
This patent application is currently assigned to GLOBAL STANDARD TECHNOLOGY CO., LTD. The applicant listed for this patent is GLOBAL STANDARD TECHNOLOGY CO., LTD. Invention is credited to Jong-Kook CHUNG, Jong-Chul KIM, Sun-Ho KIM, Won-Ki KIM, Sung-Wook LEE, Wan-Gi ROH.
Application Number | 20130239857 13/663159 |
Document ID | / |
Family ID | 49156484 |
Filed Date | 2013-09-19 |
United States Patent
Application |
20130239857 |
Kind Code |
A1 |
KIM; Jong-Chul ; et
al. |
September 19, 2013 |
SWIRL FLOW TYPE PRE-MIXED LOW-POLLUTION COMBUSTION APPARATUS
Abstract
The disclosure relates to a waste gas purification apparatus,
and more particularly, to a waste gas combustion apparatus to burn
and process waste gases. The disclosure provides the waste gas
combustion apparatus to process the waste gases generated in an
industrial process, such as a chemical process, a semiconductor
manufacturing process, or an LCD manufacturing process. The waste
gas combustion apparatus includes a combustion gas supply unit
provided with a first combustion region in which the waste gases
are primarily burned by supply of fuel gases which are pre-mixed
with diluted fuel gases, and a second combustion region which is
supplied with support gases so as to completely burn fuel gases
which are not reacted in the first combustion region.
Inventors: |
KIM; Jong-Chul;
(Gyeonggi-do, KR) ; CHUNG; Jong-Kook;
(Gyeonggi-do, KR) ; LEE; Sung-Wook; (Gyeonggi-do,
KR) ; KIM; Sun-Ho; (Gyeonggi-do, KR) ; KIM;
Won-Ki; (Gyeonggi-do, KR) ; ROH; Wan-Gi;
(Gyeonggi-do, KR) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
GLOBAL STANDARD TECHNOLOGY CO., LTD |
Gyeonggi-do |
|
KR |
|
|
Assignee: |
GLOBAL STANDARD TECHNOLOGY CO.,
LTD
Gyeonggi-do
KR
|
Family ID: |
49156484 |
Appl. No.: |
13/663159 |
Filed: |
October 29, 2012 |
Current U.S.
Class: |
110/213 ;
110/214; 431/181; 431/354 |
Current CPC
Class: |
F23G 5/32 20130101; F23C
5/08 20130101; F23D 14/02 20130101; F23G 7/065 20130101 |
Class at
Publication: |
110/213 ;
431/354; 431/181; 110/214 |
International
Class: |
F23G 7/06 20060101
F23G007/06; F23D 14/02 20060101 F23D014/02; F23C 5/08 20060101
F23C005/08; F23B 10/00 20110101 F23B010/00; F23G 5/32 20060101
F23G005/32 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 16, 2012 |
KR |
10-2012-0026861 |
Claims
1. A swirl flow type pre-mixed low-pollution combustion apparatus
to process waste gases generated in an industrial process, such as
a chemical process, a semiconductor manufacturing process, or an
LCD manufacturing process, the combustion apparatus comprising: a
combustion gas supply unit provided with a first combustion region,
the first combustion region being a space where a flame is formed
by supply of pre-mixed fuel gases, which are pre-mixed with diluted
fuel gases, and support gases; and an ignition unit which includes
an ignition device and is provided with a second combustion region,
the second combustion region being a space where the flame formed
in the first combustion region is diffused.
2. The combustion apparatus according to claim 1, wherein the
combustion gas supply unit is formed therein with the first
combustion region, and further includes a gas nozzle member, which
is provided with a pre-mixed fuel gas nozzle to inject the
pre-mixed fuel gases and a support gas nozzle to inject the support
gases.
3. The combustion apparatus according to claim 2, wherein the
pre-mixed fuel gas nozzle is comprised of a plurality of pre-mixed
fuel gas nozzles which are disposed to be inclined toward one side
with respect to a radial direction so that the pre-mixed fuel gases
are rotated in the first combustion region, and wherein the support
gas nozzle is comprised of a plurality of support gas nozzles which
are disposed to be inclined toward one side with respect to a
radial direction so that the support gases are rotated in the first
combustion region.
4. The combustion apparatus according to claim 2, further
comprising: a waste gas supply unit provided with a guide pipe of
which at least a portion is inserted into the first combustion
region so as to supply the waste gases, wherein the guide pipe is
formed with a plurality of waste gas guide passages which are
separated from one another.
5. The combustion apparatus according to claim 4, further
comprising a by-product processing unit to remove powders which are
fixed on the waste gas guide passages.
6. The combustion apparatus according to claim 1, further
comprising: a third combustion region adjacent to the second
combustion region, wherein air is introduced into the third
combustion region from the outside.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims priority to Korean Patent
Application No. 10-2012-0026861, filed on Mar. 16, 2012 in the
Korean Intellectual Property Office, which is incorporated herein
by reference in its entirety.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] Exemplary embodiments of the present invention relate to a
waste gas purification apparatus, and more particularly, to a waste
gas combustion apparatus to burn and process waste gases.
[0004] 2. Description of the Related Art
[0005] In general, waste gases, which are generated in an
industrial process such as a semiconductor or LCD (Liquid Crystal
Display) manufacturing process or a chemical process, have highly
toxic, explosive, and corrosive properties. Accordingly, the waste
gases are released as they are into the atmosphere to allow
environmental pollution to be caused. Therefore, a purification
process should be necessarily performed to reduce an amount of
noxious components contained in the waste gases below the allowable
concentration.
[0006] As a method of processing the waste gases generated in the
semiconductor manufacturing process or the like, there is a burning
method of decomposing, reacting, or burning a pyrophoric gas with a
hydrogen radical or the like in a high temperature combustion
chamber, a wet method of dissolving a water-soluble gas in water
while the water-soluble gas passes through the water stored in a
water reservoir, or an adsorption method of purifying a toxic gas,
which is not pyrophoric and soluble, in such a manner that the
toxic gas is adsorbed onto an adsorbent by physical or chemical
adsorption during passing through the adsorbent.
[0007] The burning method utilizes a combustion apparatus to burn
the waste gases. There is, however, a problem in that, in the
combustion apparatus of the related art, the waste gases generated
in the semiconductor manufacturing process and N.sub.2 gases used
in a dry vacuum pump or the like are oxidized at a high temperature
while being introduced into the combustion apparatus, thereby
allowing large nitrogen oxides to be rapidly generated.
SUMMARY OF THE INVENTION
[0008] Accordingly, the present invention is directed to a swirl
flow type pre-mixed low-pollution combustion apparatus that
substantially obviates one or more problems due to limitations and
disadvantages of the related art.
[0009] An object of the present invention is to provide a waste gas
combustion apparatus capable of achieving high efficiency and low
pollution (namely, low NO.sub.x and low CO).
[0010] Additional advantages, objects, and features of the
invention will be set forth in part in the description which
follows and in part will become apparent to those having ordinary
skill in the art upon examination of the following or may be
learned from practice of the invention. The objectives and other
advantages of the invention may be realized and attained by the
structure particularly pointed out in the written description and
claims hereof as well as the appended drawings.
[0011] In accordance with one aspect of the present invention, a
swirl flow type pre-mixed low-pollution combustion apparatus to
process waste gases generated in an industrial process, such as a
chemical process, a semiconductor manufacturing process, or an LCD
manufacturing process, includes a combustion gas supply unit
provided with a first combustion region, the first combustion
region being a space where a flame is formed by supply of pre-mixed
fuel gases, which are pre-mixed with diluted fuel gases, and
support gases; and an ignition unit which includes an ignition
device and is provided with a second combustion region, the second
combustion region being a space where the flame formed in the first
combustion region is diffused.
[0012] The combustion gas supply unit may be formed therein with
the first combustion region, and may further include a gas nozzle
member, which is provided with a pre-mixed fuel gas nozzle to
inject the pre-mixed fuel gases and a support gas nozzle to inject
the support gases.
[0013] The pre-mixed fuel gas nozzle may be constituted of a
plurality of pre-mixed fuel gas nozzles which are disposed to be
inclined toward one side with respect to a radial direction so that
the pre-mixed fuel gases are rotated in the first combustion
region, and the support gas nozzle may be constituted of a
plurality of support gas nozzles which are disposed to be inclined
toward one side with respect to a radial direction so that the
support gases are rotated in the first combustion region.
[0014] The combustion apparatus may further include a waste gas
supply unit provided with a guide pipe of which at least a portion
is inserted into the first combustion region so as to supply the
waste gases, and the guide pipe may be formed with a plurality of
waste gas guide passages which are separated from one another.
[0015] The combustion apparatus may further include a by-product
processing unit to remove powders which are fixed on the waste gas
guide passages.
[0016] The combustion apparatus may further include a third
combustion region adjacent to the second combustion region, and air
may be introduced into the third combustion region from the
outside.
[0017] It is to be understood that both the foregoing general
description and the following detailed description of the present
invention are exemplary and explanatory and are intended to provide
further explanation of the invention as claimed.
BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The above and other objects, features and other advantages
of the present invention will be more clearly understood from the
following detailed description taken in conjunction with the
accompanying drawings, in which:
[0019] FIG. 1 is a perspective view illustrating a waste gas
combustion apparatus according to an embodiment of the present
invention;
[0020] FIG. 2 is a side view of the waste gas combustion apparatus
shown in FIG. 1;
[0021] FIG. 3 is a partial cutaway side view of the waste gas
combustion apparatus shown in FIG. 1;
[0022] FIG. 4 is a longitudinal cross-sectional view of the waste
gas combustion apparatus shown in FIG. 1;
[0023] FIG. 5 is an enlarged cross-sectional view of portion "A" in
FIG. 4;
[0024] FIG. 6 is a side view of a gas nozzle member shown in FIG.
5;
[0025] FIG. 7 is a top view for explaining a fuel gas supply
structure of the waste gas combustion apparatus shown in FIG. 1;
and
[0026] FIG. 8 is a top view for explaining a waste gas introduction
structure of the waste gas combustion apparatus shown in FIG. 1
DETAILED DESCRIPTION OF EMBODIMENTS
[0027] Exemplary embodiments of the present invention will be
described below in more detail with reference to the accompanying
drawings. The present invention may, however, be embodied in
different forms and should not be construed as limited to the
embodiments set forth herein. Rather, these embodiments are
provided so that this disclosure will be thorough and complete, and
will fully convey the scope of the present invention to those
skilled in the art. Throughout the disclosure, like reference
numerals refer to like parts throughout the various figures and
embodiments of the present invention. The drawings are not
necessarily to scale and in some instances, proportions may have
been exaggerated in order to clearly illustrate features of the
embodiments.
[0028] FIG. 1 is a perspective view illustrating a waste gas
combustion apparatus according to an embodiment of the present
invention, FIG. 2 is a side view of the waste gas combustion
apparatus shown in FIG. 1, FIG. 3 is a partial cutaway side view of
the waste gas combustion apparatus shown in FIG. 1, and FIG. 4 is a
longitudinal cross-sectional view of the waste gas combustion
apparatus shown in FIG. 1. With reference to FIGS. 1 to 4, the
waste gas combustion apparatus, which is designated by reference
numeral 100, includes a waste gas supply unit 110, a by-product
processing unit 120, a combustion gas supply unit 130, an ignition
unit 140, and a body 150.
[0029] The waste gas supply unit 110 includes a guide pipe 111, and
first to fourth injection pipes 112a, 112b, 112c, and 112d. The
waste gas supply unit 110 supplies a combustion region defined
within the waste gas combustion apparatus 100 with waste gases,
which are a target to be treated, generated in a semiconductor
manufacturing process, a chemical process, or the like.
[0030] The guide pipe 111 has a cylindrical shape which is
elongated in an upward and downward direction. With reference to
FIG. 8, the guide pipe 111 includes first to fourth waste gas guide
passages 111a, 111b, 111c, and 111d of which each extends
vertically therein and is opened at opposite ends thereof, and
which are separated from one another. Each of the waste gas guide
passages 111a, 111b, 111c, and 111d is individually formed for each
type of waste gas to be introduced, so that it may be possible to
solve a problem in that the waste gases are reacted with one
another in the waste gas combustion apparatus.
[0031] The first to fourth injection pipes 112a, 112b, 112c, and
112d are arranged around the side of the guide pipe 111 along the
circumferential direction thereof in the form of protruding in an
outwardly radial direction. The first injection pipe 112a is
connected to the first waste gas guide passage 111a, the second
injection pipe 112b is connected to the second waste gas guide
passage 111b, the third injection pipe 112c is connected to the
third waste gas guide passage 111c, and the fourth injection pipe
112d is connected to the fourth waste gas guide passage 111d. The
waste gases are introduced into the waste gas guide passages 111a,
111b, 111c, and 111d through the injection pipes 112a, 112b, 112c,
and 112d, respectively.
[0032] The waste gas supply unit 110 has been described as
including the four individual waste gas guide passages 111a, 11b,
111c, and 111d, and the four injection pipes 112a, 112b, 112c, and
112d which respectively correspond to the same in the present
embodiment. However, unlike the above-mentioned configuration,
three or less or five or more individual waste gas guide passages
and injection pipes which respectively correspond to the same may
be used depending on types of waste gases which are the target to
be treated. Of course, one waste gas guide passage may also be used
in which the waste gas guide passages are integrated with one
another.
[0033] The by-product processing unit 120 includes first to fourth
cylinders 121a, 121b, 121c, and 121d, and piston rods 122a and 122d
(only two piston rods being shown in the drawings) provided to
respectively correspond to the same. The by-product processing unit
120 serves to remove powders (dust powders) which are fixed on
inner walls of the respective waste gas guide passages 111a, 111b,
111c, and 111d of the waste gas supply unit 110 during a combustion
process.
[0034] The first to fourth cylinders 121a, 121b, 121c, and 121d are
coupled to an upper end 1111 of the guide pipe 111 of the waste gas
supply unit 110. The first cylinder 121a is located to correspond
to the first waste gas guide passage 111a, the second cylinder 121b
is located to correspond to the second waste gas guide passage
111b, the third cylinder 121c is located to correspond to the third
waste gas guide passage 111c, and the fourth cylinder 121d is
located to correspond to the fourth waste gas guide passage 111d.
The piston rods 122a and 122d provided to correspond to the
respective cylinders 121a, 121b, 121c, and 121d are moved (perform
linear and/or rotational movement) within the corresponding waste
gas guide passages 111a, 111b, 111c, and 111d, respectively. The
piston rods 122a and 122d are respectively coupled, at ends
thereof, with removal members 123a and 123d which are able to scrub
and remove the powders fixed on the inner walls of the waste gas
guide passages 111a, 111b, 111c, and 111d.
[0035] Although the by-product processing unit 120 has been
described as removing the powders fixed on the inner walls of the
waste gas guide passages during the movement of the piston rods in
the present embodiment, it may also be possible to remove the fixed
powders by purging a heated nitrogen gas (N.sub.2) and the like to
each waste gas guide passage, other than the above-mentioned
configuration.
[0036] The combustion gas supply unit 130 includes a case 131, a
gas nozzle member 132, a pre-mixed fuel gas injection portion 136,
and a support gas injection portion 137. The combustion gas supply
unit 130 serves to supply fuel gases and support gases required for
the combustion of the waste gases.
[0037] The case 131 has a hollow cylindrical shape and is located
at an upper portion of the ignition unit 140. The case 131 includes
an upper wall 131a, an outer side wall 131b, and an inner side wall
131c. The upper wall 131a is formed, at a central portion thereof,
with a through hole 131a1 through which the gas nozzle member 132
passes. The outer side wall 131b extends downwards from the upper
wall 131a so that a lower end of the outer side wall 131b is
coupled to an upper end of the ignition unit 140. The inner side
wall 131c extends downwards from the upper wall 131a so that a
lower end of the inner side wall 131c is coupled to the upper end
of the ignition unit 140. The inner side wall 131c is located at
the inside of the outer side wall 131b. A separate space 1311 is
defined between the outer side wall 131b and the inner side wall
131c. This space 1311 functions as a cooling water circulation
space.
[0038] The gas nozzle member 132 has a cylindrical shape which
extends in an upward and downward direction. The gas nozzle member
132 is provided therein with an inner space 1313, which extends
along a center line thereof in an upward and downward direction and
passes through the gas nozzle member 132. This inner space 1313
functions as a first combustion region which is a space where a
flame is formed. The gas nozzle member 132 is accommodated, at a
lower portion thereof, in an inner space of the inner side wall
131c while protruding, at an upper portion thereof, upwards of the
upper wall 131a via the through hole 131a1 of the upper wall 131a.
The gas nozzle member 132 is abutted, at a lower end thereof, onto
the upper end of the ignition unit 140. The gas nozzle member 132
is provided, at an outer wall thereof, with separate flanges 133 of
which each has an annular shape and protrudes in an outwardly
radial direction. Each of the separate flanges 133 is provided with
an annular groove 133a formed along the separate flange 133. The
annular groove 133a is fitted with a seal ring 133b. The seal ring
133b comes into contact with the inner side wall 131c to allow a
space 1312 to be defined between the inner side wall 131c and the
outer wall of the gas nozzle member 132. The space 1312 is divided
into a first upper gas space 1312a and a second lower gas space
1312b. The outer wall of the gas nozzle member 132 is provided with
a plurality of pre-mixed fuel gas nozzles 134 to communicate the
first gas space 1312a with the inner space 1313 of the gas nozzle
member 132, and a plurality of support gas nozzles 135 to
communicate the second gas space 1312b with the inner space 1313 of
the gas nozzle member 132. Pre-mixed fuel gases are supplied to the
inner space 1313 of the gas nozzle member 132 through the plural
pre-mixed fuel gas nozzles 134. The plural pre-mixed fuel gas
nozzles 134 are disposed to be inclined toward one side with
respect to the radial direction. Accordingly, the pre-mixed fuel
gases are rotatably supplied when being introduced into the inner
space 1313 of the gas nozzle member 132 through the plural
pre-mixed fuel gas nozzles 134, thereby being smoothly mixed.
Consequently, the generation of thermal NO.sub.x and CO may be
reduced. The plural support gas nozzles 135 are disposed to be
inclined toward one side with respect to the radial direction.
Accordingly, the support gases are rotatably supplied when being
introduced into the inner space 1313 of the gas nozzle member 132,
thereby allowing the diffusion combustion to be properly carried
out and the temperature distribution to be uniformly maintained.
The guide pipe 111 of the waste gas supply unit 110 is inserted and
accommodated, at a lower portion thereof, in the inner space 1313
of the gas nozzle member 132. The guide pipe 111 has a lower end
1112 which is located beneath the support gas nozzles 135.
[0039] The pre-mixed fuel gas injection portion 136 passes through
the outer side wall 131b and inner side wall 131c of the case 131
to be connected with the first gas space 1312a. The fuel gas
injection portion 136 produces the fuel gases in a state of being
diluted by mixing the combustible gases with the support gases, and
then injects the pre-mixed fuel gases, which are produced, into the
first gas space 1312a. There may be utilized a liquefied natural
gas, a liquefied petroleum gas, a hydrogen gas, and the like, as
the fuel gases.
[0040] The support gas injection portion 137 passes through the
outer side wall 131b and inner side wall 131c of the case 131 to be
connected with the second gas space 1312b. The support gas
injection portion 137 injects the support gases such as an oxygen
gas into the second gas space 1312b.
[0041] The ignition unit 140 includes a case 141, an ignition
device 142, a display window 143, and first and second combustion
detection sensors 144a and 144b.
[0042] The case 141 has a substantially hollow cylindrical shape
and is located at an upper portion of the body 150. The case 141
includes an upper wall 141a, an outer side wall 141b, an inner side
wall 141c, a flame guide wall 141d, and a bottom plate 141e which
faces the upper wall 141a and is formed, at a central portion
thereof, with a through hole 141e1. The upper wall 141a is formed,
at a central portion thereof, with a through hole 141a1 which is
communicated with the inner space 1313 of the gas nozzle member
132. The outer side wall 141b extends downwards from the upper wall
141a so that a lower end of the outer side wall 141b is coupled to
the bottom plate 141e. The inner side wall 141c extends downwards
from the upper wall 141a so that a lower end of the inner side wall
141c is coupled to the bottom plate 141e. The inner side wall 141c
is located at the inside of the outer side wall 141b. A separate
space 1411 is defined between the outer side wall 141b and the
inner side wall 141c. The flame guide wall 141d extends downwards
from the upper wall 141a so that a lower end of the flame guide
wall 141d is located in the through hole 141e1formed at the bottom
plate 141e. A space 1411c is defined between the flame guide wall
141d and the inner side wall 141c. The flame guide wall 141d is
provided therein with a space 1411d, which is connected with the
inner space 1313 of the gas nozzle member 132, an inner portion of
the body 150, and the space 1411c between the flame guide wall 141d
and the inner side wall 141c. This space 1411d functions as a
second combustion region which is a space where the flame is
diffused. The flame guide wall 141d enables the flame generated in
the first combustion region 1313 to be excessively swirled so as to
prevent the contact between the flame and the waste gas from being
reduced. Furthermore, the flame guide wall 141d enables the flame
to be properly diffused and to smoothly come into contact with the
waste gas, thereby resulting in high processing efficiency of the
waste gas.
[0043] The ignition device 142 passes through the outer side wall
141b, inner side wall 141c, and flame guide wall 141d of the case
141 to be connected with the space within the flame guide wall
141d. The ignition device 142 supplies an ignition source to the
space within the flame guide wall 141d. The ignition device 142
includes an ignition plug and supplies CDA (Compressed Dry Air) to
maintain a burner part in a dry state. When moisture is created in
the burner part, powder fixation is activated.
[0044] The display window 143 passes through the outer side wall
141b, inner side wall 141c, and flame guide wall 141d of the case
141 to be connected with the space within the flame guide wall
141d. The display window 143 allows an ignition phenomenon and a
combustion phenomenon to be visually observed. The display window
143 has a fuzzy function because of being affected by the high
temperature.
[0045] Each of the first and second combustion detection sensors
144a and 144b passes through the outer side wall 141b, inner side
wall 141c, and flame guide wall 141d of the case 141 to be
connected with the space within the flame guide wall 141d. The
first and second combustion detection sensors 144a and 144b detect
the flames generated in the first and second combustion regions
1313a and 1313b.
[0046] The bottom plate 141e is provided therein with a cooling
water circulation space formed to enclose the through hole
141e1.
[0047] The body 150 includes an outer case member 151, an inner
wall member 152, and a plurality of air inlet portions 153a and
153b.
[0048] The case member 151 has a substantially hollow cylindrical
shape and includes an upper wall 151a, a bottom plate 151b, and a
side wall 151c. The upper wall 151a is coupled to a lower surface
of the bottom plate 141e of the ignition unit 140. The upper wall
151a is provided, at a central portion thereof, with a through hole
151a1. The through hole 151a1 is formed larger than the through
hole 141e1of the bottom plate 141e of the ignition unit 140. The
bottom plate 151b faces the upper wall 151a and is provided, at a
central portion thereof, with through hole 1511b. The side wall
151c extends between the upper wall 151a and the bottom plate
151b.
[0049] The inner wall member 152 has a hollow cylindrical shape
which is opened at opposite ends thereof, and is coupled within the
case member 151. The opened upper end of the inner wall member 152
is connected to the through hole 151a1 of the upper wall 151a,
whereas the opened lower end of the inner wall member 152 is
connected to the through hole 1511b of the bottom plate 151b. The
inner wall member 152 is provided, at a wall thereof, with a
plurality of holes 1521 to communicate inner and outer portions of
the inner wall member 152. A space of the inner portion of the
inner wall member 152 defines a third combustion region 1522.
[0050] The plural air inlet portions 153a and 153b are mounted to
the case member 151 and introduce outdoor air into the case member
151. The air, which is introduced through the air inlet portions
153a and 153b, is supplied to the third combustion region 1522 so
as to uniformly distribute heat generated in the third combustion
region 1522, thereby reducing the generation of thermal
NO.sub.x.
[0051] Although not shown, circulating water or the like flows
around along the wall surface of the inner wall member 152 to flow
downwards, and thus it may also be possible to prevent the fixation
of the powders created during the combustion of the waste
gases.
[0052] Hereinafter, an operation of the above-mentioned embodiment
will be described with reference to FIGS. 1 to 8.
[0053] The waste gases generated in the industrial process, such as
the chemical process, the semiconductor manufacturing process, or
the LCD manufacturing process, and N.sub.2 gases used in a dry
vacuum pump or the like are individually supplied to the inner
space 1313 of the gas nozzle member 132, which is the first
combustion region, through the respective waste gas guide passages
111a, 111b, 111c, and 111d formed at the guide pipe 111 of the
waste gas supply unit 110, depending on the types of waste gases.
In this case, the fuel gases are rotatably supplied to the first
combustion region 1313 which is the space forming the flame by
reaction of the fuel gases and oxidizer gases, thereby being
smoothly mixed. Thus, the diluted fuel gases are pre-mixed and the
generation of the thermal NO.sub.x and CO is reduced. In addition,
in the second combustion region 1411d which is a region of
completely burning fuel gases which are not reacted in the first
combustion region, the diffusion combustion is properly carried out
and the temperature distribution to be uniformly maintained,
thereby reducing the generation of the thermal NO.sub.x.
Subsequently, the third combustion is performed with respect to the
waste gases in the third combustion region 1522. At this time, the
air, which is introduced through the plural air inlet portions 153a
and 153b, allows heat to be uniformly distributed, thereby reducing
the generation of the thermal NO.sub.x. The waste gases processed
by the above-mentioned combustion process may be discharged through
the through hole 1511b formed at the bottom plate 151b.
[0054] As is apparent from the above description, the entire
objects of the present invention may be achieved. Specifically,
there is provided a combustion apparatus capable of achieving high
efficiency and low pollution in such a manner that fuel gases and
support gases are pre-mixed in a state where the fuel gases are
diluted.
[0055] While the present invention has been described with respect
to the illustrative embodiments, it will be apparent to those
skilled in the art that various variations and modifications may be
made without departing from the spirit and scope of the invention
as defined in the following claims.
* * * * *