U.S. patent application number 13/864359 was filed with the patent office on 2013-09-05 for programmable resistive memory cell with sacrificial metal.
This patent application is currently assigned to SEAGATE TECHNOLOGY LLC. The applicant listed for this patent is SEAGATE TECHNOLOGY LLC. Invention is credited to Dadi Setiadi, Ming Sun, Venkatram Venkatasamy.
Application Number | 20130228734 13/864359 |
Document ID | / |
Family ID | 42130292 |
Filed Date | 2013-09-05 |
United States Patent
Application |
20130228734 |
Kind Code |
A1 |
Venkatasamy; Venkatram ; et
al. |
September 5, 2013 |
PROGRAMMABLE RESISTIVE MEMORY CELL WITH SACRIFICIAL METAL
Abstract
Programmable metallization memory cells include an
electrochemically active electrode and an inert electrode and an
ion conductor solid electrolyte material between the
electrochemically active electrode and the inert electrode. A
sacrificial metal is disposed between the electrochemically active
electrode and the inert electrode. The sacrificial metal has a more
negative standard electrode potential than the filament forming
metal
Inventors: |
Venkatasamy; Venkatram;
(Edina, MN) ; Sun; Ming; (Eden Prairie, MN)
; Setiadi; Dadi; (Edina, MN) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
SEAGATE TECHNOLOGY LLC |
Cupertino |
CA |
US |
|
|
Assignee: |
SEAGATE TECHNOLOGY LLC
Cupertino
CA
|
Family ID: |
42130292 |
Appl. No.: |
13/864359 |
Filed: |
April 17, 2013 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
13348255 |
Jan 11, 2012 |
8435827 |
|
|
13864359 |
|
|
|
|
12500899 |
Jul 10, 2009 |
8097874 |
|
|
13348255 |
|
|
|
|
61109583 |
Oct 30, 2008 |
|
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Current U.S.
Class: |
257/3 ;
438/381 |
Current CPC
Class: |
H01L 45/085 20130101;
H01L 45/1233 20130101; H01L 45/16 20130101; H01L 45/1608 20130101;
H01L 45/1266 20130101 |
Class at
Publication: |
257/3 ;
438/381 |
International
Class: |
H01L 45/00 20060101
H01L045/00 |
Claims
1. A programmable metallization memory cell comprising: an
electrochemically active electrode and an inert electrode, the
electrochemically active electrode comprising filament forming
metal; an ion conductor solid electrolyte material between the
electrochemically active electrode and the inert electrode; and a
sacrificial metal disposed between the ion conductor solid
electrolyte material and the inert electrode, the sacrificial metal
having a more negative standard electrode potential than the
filament forming metal.
2. The programmable metallization memory cell of claim 1 wherein
the sacrificial metal has a smaller atomic radius than the filament
forming metal.
3. The programmable metallization memory cell of claim 1 wherein
the filament forming metal is silver and the sacrificial metal is
chromium, nickel or zinc.
4. The programmable metallization memory cell of claim 1 wherein
sacrificial metal donates electrons to the filament forming metal
to stabilize filaments formed by the filament forming metal, the
filaments electrically connecting the electrochemically active
electrode and the inert electrode.
5. The programmable metallization memory cell of claim 1 wherein
the ion conductor solid electrolyte material comprises a
chalcogenide material
6. The programmable metallization memory cell of claim 1 wherein
the sacrificial metal forms a sacrificial metal layer on either the
electrochemically active electrode or the inert electrode and the
layer having a thickness of less than 50 nanometers.
7. The programmable metallization memory cell of claim 1 wherein
the sacrificial metal is dispersed within the ion conductor solid
electrolyte material.
8. The programmable metallization memory cell of claim 1 wherein
the sacrificial metal is in the form of metal ions.
9. A programmable metallization memory cell comprising: an
electrochemically active electrode and an inert electrode, the
electrochemically active electrode comprising filament forming
metal; an ion conductor solid electrolyte material between the
electrochemically active electrode and the inert electrode; and
sacrificial metal particles dispersed within the ion conductor
solid electrolyte material, the sacrificial metal having a more
negative standard electrode potential than the filament forming
metal.
10. The programmable metallization memory cell of claim 9 wherein
the sacrificial metal has a smaller atomic radius than the filament
forming metal.
11. The programmable metallization memory cell of claim 9 wherein
the filament forming metal is silver and the sacrificial metal is
chromium, nickel or zinc.
12. The programmable metallization memory cell of claim 9 wherein
sacrificial metal donates electrons to the filament forming metal
to stabilize filaments formed by the filament forming metal, the
filaments electrically connecting the electrochemically active
electrode and the inert electrode.
13. The programmable metallization memory cell of claim 9 wherein
the ion conductor solid electrolyte material comprises a
chalcogenide material.
14. A method comprising: depositing an ion conductor solid
electrolyte layer on an inert electrode; depositing a sacrificial
metal layer on the ion conductor solid electrolyte layer;
depositing an electrochemically active electrode on the a
sacrificial metal layer to form a programmable metallization memory
cell, the electrochemically active electrode comprising filament
forming metal and the sacrificial metal particles have a more
negative standard electrode potential than the filament forming
metal.
15. The method of claim 14, wherein the sacrificial metal layer has
a thickness of less than 50 nanometers.
16. The method of claim 14, wherein the sacrificial metal layer is
formed of particles having a smaller atomic radius than the
filament forming metal.
17. The method of claim 14 wherein the filament forming metal is
silver and the sacrificial metal layer is chromium, nickel or
zinc.
18. The method of claim 14 wherein sacrificial metal donates
electrons to the filament forming metal to stabilize filaments
formed by the filament forming metal, the filaments electrically
connecting the electrochemically active electrode and the inert
electrode.
19. The method of claim 14 wherein the ion conductor solid
electrolyte material comprises a chalcogenide material.
20. The method of claim 14 wherein the filament forming metal is
silver and the sacrificial metal particles are chromium or nickel.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation of U.S. application Ser.
No. 13/348,255, filed Jan. 11, 2012, which is a continuation of
U.S. application Ser. No. 12/500,899 filed Jul. 10, 2009, now U.S.
Pat. No. 8,097,874, which claims the benefit of U.S. Provisional
Application No. 61/109,583 filed Oct. 30, 2008, the contents of
which is hereby incorporated by reference in its entirety.
BACKGROUND
[0002] Memory devices are common in electronic systems and
computers to store data. These memory devices may be volatile
memory, where the stored data is lost if the power source is
disconnected or removed, or non-volatile, where the stored data is
retained even during power interruption. An example of a
non-volatile memory device is a programmable metallization cell
(PMC).
[0003] A PMC utilizes a fast ion conductor such as a
chalcogenide-type or an oxide-type (e.g., NiO) and at least two
electrodes (e.g., an anode and a cathode) with the fast ion
conductor between the electrodes. When a voltage is applied across
the electrodes, superionic clusters or conducting filaments rapidly
grow from the cathode through the fast ion conductor towards the
anode. When the clusters or filaments are present, the cell is in a
low resistance state. When an electric field of opposite polarity
is applied across the electrodes, the conducting filaments dissolve
and the conducing paths are disrupted, providing the cell with a
high resistance state. The two resistance states are switchable by
the application of the appropriate electric field and are used to
store the memory data bit of "1" or "0".
[0004] While a high ionic conductive solid electrolyte (e.g.,
chalcogenide) provides a high speed switch between the two
resistance states of the PMC, this material can suffer from poor
data state retention. Another lower ionic conductive solid
electrolyte (e.g., oxide electrolyte) provides for good data state
retention, but this material can suffer from slow switching between
the two resistance states of the PMC. Thus, there is a tradeoff
between switching speed and data retention in a PMC cell depending
on what solid electrolyte (in regards to the material property
differences) is provided in the PMC cell. There is a need for a PMC
cell that can provide both fast switching speeds and extended data
retention.
BRIEF SUMMARY
[0005] The present disclosure relates to programmable metallization
memory cells having sacrificial metal that has a more negative
standard electrode potential than the filament forming metal. The
sacrificial metal can donate electrons to the filament forming
metal in the low resistance state of the programmable metallization
memory cell to stabilize the low resistance state of the
programmable metallization memory cell and improve the data
retention of the programmable metallization memory cell.
[0006] In one illustrative embodiment, a programmable metallization
memory cell includes an electrochemically active electrode and an
inert electrode and an ion conductor solid electrolyte material
between the electrochemically active electrode and the inert
electrode. A sacrificial metal is disposed between the
electrochemically active electrode and the inert electrode. The
sacrificial metal has a more negative standard electrode potential
than the filament forming metal.
[0007] These and various other features and advantages will be
apparent from a reading of the following detailed description.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] The disclosure may be more completely understood in
consideration of the following detailed description of various
embodiments of the disclosure in connection with the accompanying
drawings, in which:
[0009] FIG. 1 is a schematic side view diagram of an illustrative
programmable metallization memory cell having a sacrificial metal
layer;
[0010] FIG. 2 is a schematic side view diagram of an illustrative
programmable metallization memory cell having a sacrificial metal
particles;
[0011] FIG. 3A is a schematic side view diagram of an illustrative
programmable metallization memory cell in a low resistance
state;
[0012] FIG. 3B is schematic side view diagram of the illustrative
programmable metallization memory cell in a high resistance
state;
[0013] FIG. 4 is a schematic diagram of an illustrative
programmable metallization memory unit including a semiconductor
transistor;
[0014] FIG. 5 is a schematic diagram of an illustrative
programmable metallization memory array;
[0015] FIG. 6 is a flow diagram of an illustrative method of
forming a programmable metallization memory cell with sacrificial
metal;
[0016] FIGS. 7A-7C are schematic cross-section views of another
programmable metallization memory cell with oxide layer at various
stages of manufacture.
[0017] FIG. 8 is a flow diagram of another illustrative method of
forming a programmable metallization memory cell with sacrificial
metal; and
[0018] FIGS. 9A-9B are schematic cross-section views of another
programmable metallization memory cell with oxide layer at various
stages of manufacture.
[0019] The figures are not necessarily to scale. Like numbers used
in the figures refer to like components. However, it will be
understood that the use of a number to refer to a component in a
given figure is not intended to limit the component in another
figure labeled with the same number.
DETAILED DESCRIPTION
[0020] In the following description, reference is made to the
accompanying set of drawings that form a part hereof and in which
are shown by way of illustration several specific embodiments. It
is to be understood that other embodiments are contemplated and may
be made without departing from the scope or spirit of the present
disclosure. The following detailed description, therefore, is not
to be taken in a limiting sense.
[0021] Unless otherwise indicated, all numbers expressing feature
sizes, amounts, and physical properties used in the specification
and claims are to be understood as being modified in all instances
by the term "about." Accordingly, unless indicated to the contrary,
the numerical parameters set forth in the foregoing specification
and attached claims are approximations that can vary depending upon
the desired properties sought to be obtained by those skilled in
the art utilizing the teachings disclosed herein.
[0022] As used in this specification and the appended claims, the
singular forms "a", "an", and "the" encompass embodiments having
plural referents, unless the content clearly dictates otherwise. As
used in this specification and the appended claims, the term "or"
is generally employed in its sense including "and/or" unless the
content clearly dictates otherwise.
[0023] Spatially related terms, including but not limited to,
"lower", "upper", "beneath", "below", "above", and "on top", if
used herein, are utilized for ease of description to describe
spatial relationships of an element(s) to another. Such spatially
related terms encompass different orientations of the device in use
or operation in addition to the particular orientations depicted in
the figures and described herein. For example, if a cell depicted
in the figures is turned over or flipped over, portions previously
described as below or beneath other elements would then be above
those other elements.
[0024] As used herein, when an element, component or layer for
example is described as being "on" "connected to", "coupled with"
or "in contact with" another element, component or layer, it can be
directly on, directly connected to, directly coupled with, in
direct contact with, or intervening elements, components or layers
may be on, connected, coupled or in contact with the particular
element, component or layer, for example. When an element,
component or layer for example is referred to as begin "directly
on", "directly connected to", "directly coupled with", or "directly
in contact with" another element, there are no intervening
elements, components or layers for example.
[0025] The present disclosure relates to programmable metallization
memory cells having sacrificial metal that has a more negative
standard electrode potential than the filament forming metal. The
sacrificial metal can donate electrons to the filament forming
metal in the low resistance state of the programmable metallization
memory cell to stabilize the low resistance state of the
programmable metallization memory cell and improve the data
retention of the programmable metallization memory cell. While the
present disclosure is not so limited, an appreciation of various
aspects of the disclosure will be gained through a discussion of
the examples provided below.
[0026] FIG. 1 is a schematic side view diagram of an illustrative
programmable metallization memory cell 10 having a sacrificial
metal layer 15. Memory cell 10 includes an electrochemically inert
electrode 12, an electrochemically active electrode 14, and an ion
conductor solid electrolyte material 16. The ion conductor solid
electrolyte material 16 is between the electrochemically inert
electrode 12 and the electrochemically active electrode 14. A
sacrificial metal 15 is disposed between the electrochemically
active electrode 14 and the inert electrode 12. The sacrificial
metal 15 has a more negative standard electrode potential than the
filament forming metal forming the electrochemically active
electrode 14.
[0027] In many embodiments, the programmable metallization memory
cell 10 is constructed with a sacrificial metal layer 15 disposed
on either the electrochemically active electrode 14 and the inert
electrode 12. The sacrificial metal 15 can have a smaller atomic
radius than the filament forming metal forming the
electrochemically active electrode 14. In many embodiments, the
filament forming metal 14 is silver and the sacrificial metal 15 is
nickel, chromium or zinc, for example.
[0028] As described below, the sacrificial metal 15 donates
electrons to the filament forming metal 14 to stabilize filaments
formed by the filament forming metal 14 when the programmable
metallization memory cell 10 is in the low resistance state. The
sacrificial metal layer 15 is deposited thin enough so it does not
participate in the formation of the filaments formed by the
filament forming metal 14 when the programmable metallization
memory cell 10 is in the low resistance state. In many embodiments
the sacrificial metal layer 15 has a thickness of less than 50
nanometers, or less than 40 nanometers, or less than 30
nanometers.
[0029] The electrochemically active electrode 14 can be formed of
any useful electrochemically active material such as, silver (Ag)
or copper (Cu). The active electrode 14 can have any useful
thickness, for example, from 50 Angstroms to 5000 Angstroms. In
many embodiments the active electrode 14 has a greater thickness
than the sacrificial metal layer 15. A top electrode (not shown)
can be disposed on the electrochemically active electrode 14. The
top electrode can be formed of any useful electrochemically inert
metallic material, as described below.
[0030] The inert electrode 12 can be formed of any useful
electrochemically inert metallic material. In many embodiments, the
inert electrode 12 is formed of electrochemically inert metal such
as, tungsten (W), nickel (Ni), molybdenum (Mo), platinum (Pt), gold
(Au), palladium (Pd), and rhodium (Rh) for example. In some
embodiments the inert electrode 12 has two or more metal layers,
where the metal layer closest to the ion conductor solid
electrolyte material 16 is electrochemically inert while additional
layers can be electrochemically active. The inert electrode 12 can
also be referred to as a bottom electrode. The inert electrode 12
can be, but need not be formed on a substrate. The substrate, if
utilized, can include silicon, a mixture of silicon and germanium,
and other similar materials. FIG. 1 and FIG. 2 does not depict an
optional substrate.
[0031] The ion conductor solid electrolyte material 16 can be
formed of any useful material that provides for the formation of
conducting filaments 18 within the ion conductor solid electrolyte
material and extend between the electrochemically active electrode
14 and the inert metal contact 12 upon application of an electric
field EF+. In many embodiments the ion conductor solid electrolyte
material 16 is a chalcogenide-type material such as, for example,
GeS.sub.2, GeSe.sub.2, CuS.sub.2, CuTe, and the like. In other
embodiments the ion conductor solid electrolyte material 16 is an
oxide-type material such as, for example, WO.sub.3, SiO.sub.2,
Gd.sub.2O.sub.3and the like.
[0032] FIG. 2 is a schematic side view diagram of an illustrative
programmable metallization memory cell 10 having a sacrificial
metal particles 15. Memory cell 10 includes an electrochemically
inert electrode 12, an electrochemically active electrode 14, and
an ion conductor solid electrolyte material 16, as described above.
Sacrificial metal 15 particles are dispersed within the ion
conductor solid electrolyte material 16. The sacrificial metal 15
particles have a more negative standard electrode potential than
the filament forming metal forming the electrochemically active
electrode 14. The sacrificial metal 15 particles can have a smaller
atomic radius than the filament forming metal forming the
electrochemically active electrode 14. In many embodiments, the
filament forming metal 14 is silver and the sacrificial metal 15 is
nickel, chromium or zinc, for example.
[0033] As described below, the sacrificial metal 15 particles
donate electrons to the filament forming metal 14 to stabilize
filaments formed by the filament forming metal 14 when the
programmable metallization memory cell 10 is in the low resistance
state. The sacrificial metal 15 particles are co-deposited with the
ion conductor solid electrolyte material 16 at a concentration that
is low enough so it does not participate in the formation of the
filaments formed by the filament forming metal 14 when the
programmable metallization memory cell 10 is in the low resistance
state.
[0034] FIGS. 3A and 3B are cross-sectional schematic diagrams of an
illustrative programmable metallization memory cell 10. In FIG. 3A,
memory cell 10 is in the low resistance state. In FIG. 3B, cell 10
is in the high resistance state. Programmable metallization cell
(PMC) memory is based on the physical re-location of superionic
regions and forming conducting filaments 18 within an ion conductor
solid electrolyte material 16.
[0035] Application of an electric field EF+ across the
electrochemically active electrode 14 and the inert metal contact
12 allow metal cations (i.e., silver ions) to migrate toward the
inert metal contact 12, electrically connecting the inert metal
contact 12 to the electrochemically active electrode 14. This
electrical connection gives rise to the low resistance state of the
programmable metallization memory cell 10.
[0036] Reading the PMC 10 simply requires a small voltage applied
across the cell. If the conducting filaments 18 electrically
connect the inert metal contact 12 to the electrochemically active
electrode 14, the resistance will be low, leading to higher
current, which can be read as a "1". If conducting filaments 18 do
not electrically connect the inert metal contact 12 to the
electrochemically active electrode 18, the resistance is higher,
leading to low current, which can be read as a "0" as illustrated
in FIG. 3B.
[0037] When the external bias or electric field EF+ is removed, the
conducting filaments 18 tend to disintegrate into ions (e.g.,
silver ions) and start to retreat back to the anode or disperse
into the ion conductor solid electrolyte material 16. The
sacrificial metal 15 has a more negative standard potential than
the metal forming the conducting filaments 18, thus electrons will
flow from the sacrificial metal 15 to the conducting filaments 18
to stabilize the conducting filaments 18 and thereby improving the
low resistance data state retention. In this low resistance state,
after donating the electrons, the sacrificial metal is in the ionic
state 15A in ion conductor solid electrolyte material 16.
[0038] FIG. 3B is schematic diagram of an illustrative programmable
metallization memory cell 10 in a high resistance state.
Application of an electric field of opposite polarity FE- ionizes
the conducting filaments 18 and dissolves ions from the
electrically conducting filaments 18 back to the electrochemically
active electrode 14, breaking the electrical connection between the
inert metal contact 12 to the electrochemically active electrode 14
and gives rise to the high resistance state of the programmable
metallization memory cell 10. The sacrificial metal ions 15A move
toward the negative charged anode and reduce into the metallic
state. The low resistance state and the high resistance state are
switchable with an applied electric field and are used to store the
memory bit "1" and "0".
[0039] FIG. 4 is a schematic diagram of an illustrative
programmable metallization memory unit 20 including a semiconductor
transistor 22. Memory unit 20 includes a programmable metallization
memory cell 10, as described herein, electrically coupled to
semiconductor transistor 22 via an electrically conducting element
24. Transistor 22 includes a semiconductor substrate 21 having
doped regions (e.g., illustrated as n-doped regions) and a channel
region (e.g., illustrated as a p-doped channel region) between the
doped regions. Transistor 22 includes a gate 26 that is
electrically coupled to a word line WL to allow selection and
current to flow from a bit line BL to memory cell 10. An array of
programmable metallization memory units 20 can be formed on a
semiconductor substrate utilizing semiconductor fabrication
techniques.
[0040] FIG. 5 is a schematic diagram of an illustrative
programmable metallization memory array 30. Memory array 30
includes a plurality of word lines WL and a plurality of bit lines
BL forming a cross-point array. At each cross-point a programmable
metallization memory cell 10, as described herein, is electrically
coupled to word line WL and bit line BL. A select device (not
shown) can be at each cross-point or at each word line WL and bit
line BL.
[0041] FIG. 6 is a flow diagram of an illustrative method of
forming a programmable metallization memory cell with an oxide
layer. FIGS. 5A-5C are schematic cross-section views of a
programmable metallization memory cell with an oxide layer at
various stages of manufacture.
[0042] At FIG. 7A an ion conductor solid electrolyte layer 16 is
deposited on an inert electrode 12 at block 110 of FIG. 6. Both the
ion conductor solid electrolyte layer 16 and the inert electrode 12
can be formed using known deposition methods such as physical vapor
deposition, chemical vapor deposition, electrochemical deposition,
molecular beam epitaxy and atomic layer deposition. While not
illustrated, the inert electrode 12 can be deposited on a
substrate. The substrate includes, but is not limited to silicon, a
mixture of silicon and germanium, and other similar material.
[0043] At FIG. 7B a sacrificial metal layer 15 is deposited on the
ion conductor solid electrolyte layer 16 at block 120 of FIG. 6.
The sacrificial metal layer 15 can be formed using known deposition
methods, as described above. The sacrificial metal 15 has a
thickness in a range from 0.5 to 50 nanometers or from 1 to 25
nanometers. The sacrificial metal 15 can be formed of any useful
metal that has a more negative standard electrode potential than
the filament forming metal forming the electrochemically active
electrode, described above. The sacrificial metal 15 has a smaller
atomic radius than the filament forming metal forming the
electrochemically active electrode. In many embodiments, the
filament forming metal is silver and the sacrificial metal 15 is
nickel, chromium or zinc, for example. The sacrificial metal 15
donates electrons to the filament forming metal to stabilize
filaments formed by the filament forming metal when the
programmable metallization memory cell is in the low resistance
state. The sacrificial metal layer 15 is deposited thin enough so
it does not participate in the formation of the filaments formed by
the filament forming metal when the programmable metallization
memory cell 10 is in the low resistance state.
[0044] At FIG. 7C an electrochemically active electrode 14 is
deposited on the sacrificial metal layer 15 at block 130 of FIG. 6.
The electrochemically active electrode 14 can be formed using known
deposition methods, as described above. Additional metal contact
layer(s) can be formed on the electrochemically active electrode
14. In many embodiments, at least one inert metal contact layer is
deposited on the electrochemically active electrode 14 (not
shown).
[0045] FIG. 8 is a flow diagram of another illustrative method of
forming a programmable metallization memory cell with an oxide
layer. FIGS. 9A-9B are schematic cross-section views of another
programmable metallization memory cell with oxide layer at various
stages of manufacture.
[0046] At FIG. 9A an ion conductor solid electrolyte layer 16 is
co-deposited with sacrificial metal particles 15 on an inert
electrode 12 at block 210 of FIG. 8. The ion conductor solid
electrolyte layer 16 and sacrificial metal particles 15 and the
inert electrode 12 can be formed using known deposition methods
such as physical vapor deposition, chemical vapor deposition,
electrochemical deposition, molecular beam epitaxy and atomic layer
deposition. While not illustrated, the inert electrode 12 can be
deposited on a substrate. The substrate includes, but is not
limited to silicon, a mixture of silicon and germanium, and other
similar material.
[0047] At FIG. 9B illustrates an electrochemically active electrode
14 deposited on the co-deposited ion conductor solid electrolyte 16
and sacrificial metal particle 15 layer at block 220 of FIG. 8. The
electrochemically active electrode 14 can be formed using known
deposition methods, as described above. Additional metal contact
layer(s) can be formed on the electrochemically active electrode
14. In many embodiments, at least one inert metal contact layer is
deposited on the electrochemically active electrode 14 (not
shown).
[0048] Thus, embodiments of the PROGRAMMABLE RESISTIVE MEMORY CELL
WITH
[0049] SACRIFICIAL METAL are disclosed. The implementations
described above and other implementations are within the scope of
the following claims. One skilled in the art will appreciate that
the present disclosure can be practiced with embodiments other than
those disclosed. The disclosed embodiments are presented for
purposes of illustration and not limitation, and the present
invention is limited only by the claims that follow.
* * * * *