U.S. patent application number 13/328994 was filed with the patent office on 2013-06-20 for machine learning approach to correct lithographic hot-spots.
This patent application is currently assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION. The applicant listed for this patent is Kanak Behari Agarwal, Shayak Banerjee. Invention is credited to Kanak Behari Agarwal, Shayak Banerjee.
Application Number | 20130159943 13/328994 |
Document ID | / |
Family ID | 48538535 |
Filed Date | 2013-06-20 |
United States Patent
Application |
20130159943 |
Kind Code |
A1 |
Agarwal; Kanak Behari ; et
al. |
June 20, 2013 |
MACHINE LEARNING APPROACH TO CORRECT LITHOGRAPHIC HOT-SPOTS
Abstract
A method, system, and computer program product for machine
learning approach for detecting and correcting lithographic
hot-spots in an integrated circuit (IC) design are provided in the
illustrative embodiments. A layout corresponding to the IC design
is received at a machine learning model (ML model). At the ML model
using a hardware component, a set of input objects is identified
corresponding to a target shape in the layout. A retargeting value
is predicted for the target shape using the set of input objects,
such that applying the retargeting value to the target shape in the
layout causes the target shape to be modified into a modified
target shape, wherein printing the modified target shape instead of
the target shape eliminates a lithographic hot-spot that would
otherwise occur from printing the target shape in a printed circuit
corresponding to the IC design.
Inventors: |
Agarwal; Kanak Behari;
(Austin, TX) ; Banerjee; Shayak; (Austin,
TX) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Agarwal; Kanak Behari
Banerjee; Shayak |
Austin
Austin |
TX
TX |
US
US |
|
|
Assignee: |
INTERNATIONAL BUSINESS MACHINES
CORPORATION
Armonk
NY
|
Family ID: |
48538535 |
Appl. No.: |
13/328994 |
Filed: |
December 16, 2011 |
Current U.S.
Class: |
716/52 |
Current CPC
Class: |
G03F 7/70441 20130101;
G03F 7/70433 20130101; G03F 1/36 20130101 |
Class at
Publication: |
716/52 |
International
Class: |
G06F 17/50 20060101
G06F017/50 |
Claims
1. A method for detecting and correcting lithographic hot-spots in
an integrated circuit (IC) design, the method comprising: receiving
at a machine learning model (ML model) a layout corresponding to
the IC design; identifying, at the ML model using a hardware
component, a set of input objects corresponding to a target shape
in the layout; and predicting a retargeting value for the target
shape using the set of input objects, such that applying the
retargeting value to the target shape in the layout causes the
target shape to be modified into a modified target shape, wherein
printing the modified target shape instead of the target shape
eliminates a lithographic hot-spot that would otherwise occur from
printing the target shape in a printed circuit corresponding to the
IC design.
2. The method of claim 1, further comprising: training the ML model
using a collection of training sets, a training set in the
collection of training sets including a training layout of a
training IC design, a training set of factors corresponding to the
training layout, and a training set of retargeting values
corresponding to the training set of factors in the training
layout.
3. The method of claim 1, wherein identifying the set of input
objects comprises: performing a shape processing operation on the
target shape, the shape processing segmenting an edge of the target
shape into a set of edge segments; and calculating, for each edge
segment in the set of edge segments, an input object in the set of
input objects by computing a distance from another shape in a
neighborhood of the edge segment in the layout.
4. The method of claim 3, wherein the set of input objects
corresponds to the edge segment, wherein the retargeting value
modifies the edge segment.
5. The method of claim 4, wherein a new set of input objects is
identified for each edge segment in the set of edge segments, and
wherein a new retargeting value is predicted for each edge segment
using the corresponding new set of input objects.
6. The method of claim 1, wherein the lithographic hot-spot is a
lithographic anomaly at a location in the layout where a variation
between a printed shape and the target shape exceeds a
threshold.
7. The method of claim 1, wherein the set of input object comprises
a set of factors associated with the target shape in the layout,
wherein the set of factors is determined based on a training set of
factors used to train the ML model.
8. The method of claim 1, wherein the ML model is an application,
the hardware component is a processor, and the application executes
using the processor.
9. The method of claim 1, wherein the ML model is implemented to
include the hardware component.
10. The method of claim 1, wherein the ML model includes an
artificial intelligence neural network.
11. A computer usable program product comprising a computer usable
storage device including computer usable code for detecting and
correcting lithographic hot-spots in an integrated circuit (IC)
design, the computer usable code comprising: computer usable code
for receiving at a machine learning model (ML model) a layout
corresponding to the IC design; computer usable code for
identifying, at the ML model using a hardware component, a set of
input objects corresponding to a target shape in the layout; and
computer usable code for predicting a retargeting value for the
target shape using the set of input objects, such that applying the
retargeting value to the target shape in the layout causes the
target shape to be modified into a modified target shape, wherein
printing the modified target shape instead of the target shape
eliminates a lithographic hot-spot that would otherwise occur from
printing the target shape in a printed circuit corresponding to the
IC design.
12. The computer usable program product of claim 11, further
comprising: computer usable code for training the ML model using a
collection of training sets, a training set in the collection of
training sets including a training layout of a training IC design,
a training set of factors corresponding to the training layout, and
a training set of retargeting values corresponding to the training
set of factors in the training layout.
13. The computer usable program product of claim 11, wherein
identifying the set of input objects comprises: computer usable
code for performing a shape processing operation on the target
shape, the shape processing segmenting an edge of the target shape
into a set of edge segments; and computer usable code for
calculating, for each edge segment in the set of edge segments, an
input object in the set of input objects by computing a distance
from another shape in a neighborhood of the edge segment in the
layout.
14. The computer usable program product of claim 13, wherein the
set of input objects corresponds to the edge segment, wherein the
retargeting value modifies the edge segment.
15. The computer usable program product of claim 14, wherein a new
set of input objects is identified for each edge segment in the set
of edge segments, and wherein a new retargeting value is predicted
for each edge segment using the corresponding new set of input
objects.
16. The computer usable program product of claim 11, wherein the
lithographic hot-spot is a lithographic anomaly at a location in
the layout where a variation between a printed shape and the target
shape exceeds a threshold.
17. The computer usable program product of claim 11, wherein the
set of input object comprises a set of factors associated with the
target shape in the layout, wherein the set of factors is
determined based on a training set of factors used to train the ML
model.
18. The computer usable program product of claim 11, wherein the
computer usable code is stored in a computer readable storage
medium in a data processing system, and wherein the computer usable
code is transferred over a network from a remote data processing
system.
19. The computer usable program product of claim 11, wherein the
computer usable code is stored in a computer readable storage
medium in a server data processing system, and wherein the computer
usable code is downloaded over a network to a remote data
processing system for use in a computer readable storage medium
associated with the remote data processing system.
20. A data processing system for detecting and correcting
lithographic hot-spots in an integrated circuit (IC) design, the
data processing system comprising: a storage device, wherein the
storage device stores computer usable program code; and a
processor, wherein the processor executes the computer usable
program code, and wherein the computer usable program code
comprises: computer usable code for receiving at a machine learning
model (ML model) a layout corresponding to the IC design; computer
usable code for identifying, at the ML model using a hardware
component, a set of input objects corresponding to a target shape
in the layout; and computer usable code for predicting a
retargeting value for the target shape using the set of input
objects, such that applying the retargeting value to the target
shape in the layout causes the target shape to be modified into a
modified target shape, wherein printing the modified target shape
instead of the target shape eliminates a lithographic hot-spot that
would otherwise occur from printing the target shape in a printed
circuit corresponding to the IC design.
Description
TECHNICAL FIELD
[0001] The present invention relates generally to a computer
implemented method, system, and computer program product for
improving an integrated circuit (IC) design. Particularly, the
present invention relates to a computer implemented method, system,
and computer program product for a machine learning approach to
correct lithographic hot-spots (hot-spots, singular hot-spot).
BACKGROUND
Description of the Related Art
[0002] Modern day electronics include components that use
integrated circuits. Integrated circuits are electronic circuits
formed using Silicon as a substrate and by adding impurities to
form solid-state electronic devices, such as transistors, diodes,
and resistors. Commonly known as a "chip", an integrated circuit is
generally encased in hard plastic, forming a "package".
[0003] The software tools used for designing ICs produce,
manipulate, or otherwise work with the circuit layout and circuit
components on very small scales. Some of the components that such a
tool may manipulate may only measure tens of nanometer across when
formed in Silicon. The designs produced and manipulated using these
software tools are complex, often including hundreds of thousands
of such components interconnected to form an intended electronic
circuitry.
[0004] A wire is a connection between parts of electronic
components, and is formed using a metallic material that conducts
electricity. An IC may contain many layers of metal interconnects
to implement a circuit. Metal interconnects in different layers are
isolated from each other with inter layer dielectric. The metal
layers can be connected by creating vias in the dielectric.
[0005] In an IC design process, design components such as
transistors are placed and interconnected to determine the
resulting circuit's characteristics. Components can be moved or
changed if certain characteristics have to be altered. The design
layout is constructed using different design layers (e.g.
polysilicon, metal-1, metal-2, etc.) as specified by the
technology. The technology specifications also provide a set of
design rules that represent the manufacturing capability of the
process. These technology ground rules or design rules should be
followed during layout design to create a manufacturable
design.
[0006] Once a design layout, also referred to simply as a layout,
has been finalized for an IC, the design is converted into a set of
masks or reticles. During manufacture, a semiconductor wafer is
exposed to light or radiation through a mask to form microscopic
components of the IC. This process is known as
photolithography.
[0007] A manufacturing mask is a mask usable for successfully
manufacturing or printing the contents of the mask onto wafer.
During the printing process, radiation is focused through the mask
and at certain desired intensity of the radiation. This intensity
of the radiation is commonly referred to as "dose". The focus and
the dosing of the radiation have to be precisely controlled to
achieve the desired shape and electrical characteristics on the
wafer.
SUMMARY
[0008] The illustrative embodiments provide a method, system, and
computer program product for machine learning approach to correct
lithographic hot-spots. An embodiment receives, at a machine
learning model (ML model) a layout corresponding to the IC design.
The embodiment identifies, at the ML model using a hardware
component, a set of input objects corresponding to a target shape
in the layout. The embodiment predicts a retargeting value for the
target shape using the set of input objects, such that applying the
retargeting value to the target shape in the layout causes the
target shape to be modified into a modified target shape, wherein
printing the modified target shape instead of the target shape
eliminates a lithographic hot-spot that would otherwise occur from
printing the target shape in a printed circuit corresponding to the
IC design.
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
[0009] The novel features believed characteristic of the
embodiments are set forth in the appended claims. The invention
itself, however, as well as a preferred mode of use, further
objectives and advantages thereof, will best be understood by
reference to the following detailed description of an illustrative
embodiment when read in conjunction with the accompanying drawings,
wherein:
[0010] FIG. 1 depicts a pictorial representation of a network of
data processing systems in which illustrative embodiments may be
implemented;
[0011] FIG. 2 depicts a block diagram of a data processing system
in which illustrative embodiments may be implemented;
[0012] FIG. 3 depicts an example target layout within which a
hot-spot can be detected and remedied using an ML model in
accordance with an illustrative embodiment;
[0013] FIG. 4 depicts a block diagram of training an ML model for
detecting and correcting lithographic hot spots in accordance with
an illustrative embodiment;
[0014] FIG. 5 depicts a block diagram of an ML model configured to
detect and correct lithographic hot-spots in accordance with an
illustrative embodiment;
[0015] FIG. 6 depicts a flowchart of a process of using a machine
learning approach to detect and correct lithographic hot-spots in
accordance with an illustrative embodiment;
[0016] FIG. 7 depicts a flowchart of a process for training an ML
model for detecting and correcting lithographic hot-spots in IC
design layouts in accordance with an illustrative embodiment.
DETAILED DESCRIPTION
[0017] A layout includes shapes that the designer selects and
positions to achieve a design objective. Through a process known as
optical proximity correction (OPC), the shapes are transformed in a
mask to correct for optical and other manufacturing related
idiosyncrasies. This is generally done by counterbiasing the mask
at each of a number of segments along the edges of the mask shapes.
These segments are also known as fragments.
[0018] For example, a designer may place a geometric shape in a
layout that, if formed on wafer using photolithography
(lithography), would cause a constricted or pinched area to be
printed on the wafer. Such shape variations during lithography,
including but not limited to pinching, are called lithographic
hot-spots.
[0019] A goal of OPC is to find a mask that when exposed during
lithography, achieves good pattern fidelity of drawn target
(layout) shape and on-wafer printed image. For example, when
printing a rectangular target, the printed wafer contour may show
significantly rounded corners. The mask optimization flow in OPC
tries to compensate for this rounding and other mismatches between
the target and the printed image by finding a mask that minimizes
the difference between target and printed image. OPC starts with an
initial mask, fragments the mask into segments, performs
lithographic simulation, looks at the printed contour for the mask
to calculate the edge placement errors between printed wafer
contour and the drawn target, and moves different mask fragments to
compensate for these edge placement errors. This process is
repeated iteratively until the edge placement errors are within a
specified limit. Presently, OPC can be configured to modify a mask
such that certain known hot-spots can be remedied before
manufacturing.
[0020] In deep subwavelength lithography, OPC may not be sufficient
for correcting all lithographic hot-spots. For certain hot-spots,
the target itself has to be reconfigured using a process called
retargeting. Retargeting changes the shape, dimensions,
positioning, or a combination thereof of a target to result in a
modified target. The modified target when converted to a mask
through mask optimization techniques such as OPC has better
printability than the original target.
[0021] Presently available methods accomplish retargeting in one of
two following ways. A first method employs a set of retargeting
rules for retargeting. A retargeting rule is configured to detect a
target satisfying a pre-defined hot-spot condition, and apply a
pre-determined correction (a retargeting value) to the target to
result in a modified target, which no longer satisfies the
pre-defined hot-spot condition.
[0022] As an example, a retargeting rule may be that if a metal-1
(M1) target has a specified pitch and width (the pre-defined
hot-spot condition), bias the metal shapes by x nanometers (nm)
(the correction or retargeting value). As another example, another
retargeting rule may be that if a notch is less than or equal to y
nm (the pre-defined hot-spot condition), fill the notch by z nm
(the correction or retargeting value).
[0023] The illustrative embodiments recognize that a rules based
retargeting method is limited in several ways. For example, a
retargeting rules library includes a limited set of rules, and
cannot include rules for all possible hot-spot conditions. For
example, just for testing three factors with three example possible
value ranges for detecting a hot-spot condition, such as an edge's
run-length, an adjacent edge's run-length, and an external spacing
between the two edges, 3.sup.3 rules (twenty seven rules) have to
be created, evaluated, and applied to each candidate target.
(Generally, for other possible value ranges (buckets), n1*n2*n3
rules are required, where n1 is the # of buckets for factor 1, n2
is the # of buckets for factor 2, and n3 is the # of buckets for
factor 3.) With just one additional factor, such as an internal
spacing of the first edge, the number of rules grows exponentially
in a similar manner. A factor, or a hot-spot factor, is a
characteristic of a target in a layout, the characteristic
contributing to a hot-spot involving the target.
[0024] The illustrative embodiments recognize that creating,
evaluating, and applying a large set of rules to potentially tens
of thousands, even millions, of target shapes in a typical design
layout can be computationally intensive. Thus, the illustrative
embodiments recognize that rules based retargeting is necessarily
simplistic, considering far fewer factors than the potential number
of factors that can contribute to hot-spots in a layout.
[0025] The illustrative embodiments further recognize that the
retargeting rules can be created only for hot-spot conditions that
have been previously observed. Retargeting using a rule based
method is not usable for detecting yet unseen hot-spot condition
that may arise due to a particular combination of particular values
of several factors for a target in a given layout.
[0026] Another presently used method is a lithographic simulation
based hot-spot correction. Such a method requires a full
lithographic simulation to detect hot-spots in a given design. The
targets including the detected hot-spots can then be modified using
suitable retargeting values.
[0027] The illustrative embodiments recognize that simulation based
retargeting greatly increases runtime complexity of the mask
synthesis process. If retargeting is integrated with OPC, OPC has
to modify the target as well as find optimized mask for the
modified target. Thus, the illustrative embodiments recognize that
performing retargeting in OPC, while allows detection and
correction of a variety of hot-spots in a given layout, causes the
OPC process to become computationally expensive.
[0028] The illustrative embodiments further recognize that
simulation based retargeting at OPC does not involve the designer,
and therefore is not able to account for timing, power, and other
design constraints that the designer considers while creating the
design rule clean layout. Therefore, simulation based retargeting
at OPC has to be limited in scope to avoid violating a design
constraint.
[0029] Some other methods provide other techniques for detecting
the hot-spots. Such techniques, however, leave the remedy for the
detected hot-spots to the designer. If a hot-spot is detected but
no corrective information is provided, the correction process has
to fall back to manual intervention by the designer.
[0030] The illustrative embodiments used to describe the invention
generally address and solve the above-described problems and other
problems related to hot-spot detection and correction. The
illustrative embodiments provide a method, system, and computer
program product for machine learning approach to correct
lithographic hot-spots. An embodiment offers an improved manner of
detecting and correcting hot-spot conditions in a given layout. An
embodiment uses a machine learning model, such as based on an
artificial neural network (ANN), a support vector machine (SVM), or
another machine learning methodology, to learn the hot-spot
detection and correction considerations from a library of training
sets.
[0031] A training set is a collection of layouts with known
hot-spots conditions, factors causing those hot-spots, and desired
retargeting values for correcting those hot-spots. A machine
learning model (ML model) is hardware or software, configured to
use the factors and produce those desired retargeting values for
those hot-spot conditions in the training set.
[0032] An ML model according to an embodiment is trained using
several training sets. The resulting trained ML model is a model
that, when provided with a new layout, can use a combination of the
learned factors to detect hot-spot conditions in the layout and
predict corresponding retargeting values.
[0033] An embodiment adds the layout, the detected hot-spots, and
the set of known desired retargeting values, to the training sets
as a new training set. Over time, with an increasing collection of
training sets, the ML model can be trained/retrained with more and
more training sets. Training with increasing number and variety of
training sets improves the accuracy of the ML model of an
embodiment. For example, a retrained ML model can detect hot-spots
with greater accuracy as compared to a lesser trained ML model,
predict retargeting values with greater accuracy, and detect
hot-spots not included in a training set but based on the training
set factors.
[0034] The embodiments are described using a particular set of
factors only for the clarity of the description and not as a
limitation on the illustrative embodiments. In a typical design,
the ML model according to an embodiment is usable with a
combination of any number of factors within the scope of the
illustrative embodiments.
[0035] The illustrative embodiments are described with respect to
certain design shapes and targets only as examples. Such
descriptions are not intended to be limiting on the illustrative
embodiments. For example, an illustrative embodiment described with
respect to edges in layout can be implemented with respect to
corner types, e.g., convex, concave, internal or external spacing
between edges, and many other similar features in the design within
the scope of the illustrative embodiments.
[0036] Similarly, the illustrative embodiments are described with
respect to a certain ML model, such as ANN or SVM, only as
examples. Such descriptions are not intended to be limiting on the
illustrative embodiments.
[0037] Furthermore, the illustrative embodiments may be implemented
with respect to any type of data, data source, or access to a data
source over a data network. Any type of data storage device may
provide the data to an embodiment of the invention, either locally
at a data processing system or over a data network, within the
scope of the invention.
[0038] The illustrative embodiments are further described with
respect to certain applications only as examples. Such descriptions
are not intended to be limiting on the invention. An embodiment of
the invention may be implemented with respect to any type of
application, such as, for example, applications that are served,
the instances of any type of server application, a platform
application, a stand-alone application, an administration
application, or a combination thereof.
[0039] An application, including an application implementing all or
part of an embodiment, may further include data objects, code
objects, encapsulated instructions, application fragments,
services, and other types of resources available in a data
processing environment. For example, a Java.RTM. object, an
Enterprise Java Bean (EJB), a servlet, or an applet may be
manifestations of an application with respect to which the
invention may be implemented. (Java and all Java-based trademarks
and logos are trademarks or registered trademarks of Oracle and/or
its affiliates).
[0040] An illustrative embodiment may be implemented in hardware,
software, or a combination thereof. An illustrative embodiment may
further be implemented with respect to any type of computing
resource, such as a physical or virtual data processing system or
components thereof, that may be available in a given computing
environment.
[0041] The illustrative embodiments are described using specific
code, designs, architectures, layouts, schematics, and tools only
as examples and are not limiting on the illustrative embodiments.
Furthermore, the illustrative embodiments are described in some
instances using particular software, tools, and data processing
environments only as an example for the clarity of the description.
The illustrative embodiments may be used in conjunction with other
comparable or similarly purposed structures, systems, applications,
or architectures.
[0042] The examples in this disclosure are used only for the
clarity of the description and are not limiting on the illustrative
embodiments. Additional data, operations, actions, tasks,
activities, and manipulations will be conceivable from this
disclosure and the same are contemplated within the scope of the
illustrative embodiments.
[0043] Any advantages listed herein are only examples and are not
intended to be limiting on the illustrative embodiments. Additional
or different advantages may be realized by specific illustrative
embodiments. Furthermore, a particular illustrative embodiment may
have some, all, or none of the advantages listed above.
[0044] With reference to the figures and in particular with
reference to FIGS. 1 and 2, these figures are example diagrams of
data processing environments in which illustrative embodiments may
be implemented. FIGS. 1 and 2 are only examples and are not
intended to assert or imply any limitation with regard to the
environments in which different embodiments may be implemented. A
particular implementation may make many modifications to the
depicted environments based on the following description.
[0045] FIG. 1 depicts a pictorial representation of a network of
data processing systems in which illustrative embodiments may be
implemented. Data processing environment 100 is a network of
computers in which the illustrative embodiments may be implemented.
Data processing environment 100 includes network 102. Network 102
is the medium used to provide communications links between various
devices and computers connected together within data processing
environment 100. Network 102 may include connections, such as wire,
wireless communication links, or fiber optic cables. Server 104 and
server 106 couple to network 102 along with storage unit 108.
Software applications may execute on any computer in data
processing environment 100.
[0046] In addition, clients 110, 112, and 114 couple to network
102. A data processing system, such as server 104 or 106, or client
110, 112, or 114 may contain data and may have software
applications or software tools executing thereon.
[0047] A data processing system, such as server 104 may include
machine learning model training application 105. Application 105 is
usable for training an ML model according to an embodiment. A data
processing system, such as client 112, may include design tool 113
executing thereon. Design tool 113 may include a presently
available shape processing tool, and may be modified according to
an embodiment. Machine learning model 115 is an ML model according
to an embodiment. ML model 115 can be implemented in hardware,
software, or a combination thereof. Application 105 uses training
sets 109 to train ML model 115. ML model 115 may execute in
conjunction with design tool 113 on client 112 or a different data
processing system. In one embodiment, ML model 115 is a part of
design tool 113. In another embodiment, ML model 115 is a separate
application operating in conjunction with design tool 113 on client
112 or a different data processing system.
[0048] Servers 104 and 106, storage unit 108, and clients 110, 112,
and 114 may couple to network 102 using wired connections, wireless
communication protocols, or other suitable data connectivity.
Clients 110, 112, and 114 may be, for example, personal computers
or network computers.
[0049] In the depicted example, server 104 may provide data, such
as boot files, operating system images, and applications to clients
110, 112, and 114. Clients 110, 112, and 114 may be clients to
server 104 in this example. Clients 110, 112, 114, or some
combination thereof, may include their own data, boot files,
operating system images, and applications. Data processing
environment 100 may include additional servers, clients, and other
devices that are not shown.
[0050] In the depicted example, data processing environment 100 may
be the Internet. Network 102 may represent a collection of networks
and gateways that use the Transmission Control Protocol/Internet
Protocol (TCP/IP) and other protocols to communicate with one
another. At the heart of the Internet is a backbone of data
communication links between major nodes or host computers,
including thousands of commercial, governmental, educational, and
other computer systems that route data and messages. Of course,
data processing environment 100 also may be implemented as a number
of different types of networks, such as for example, an intranet, a
local area network (LAN), or a wide area network (WAN). FIG. 1 is
intended as an example, and not as an architectural limitation for
the different illustrative embodiments.
[0051] Among other uses, data processing environment 100 may be
used for implementing a client-server environment in which the
illustrative embodiments may be implemented. A client-server
environment enables software applications and data to be
distributed across a network such that an application functions by
using the interactivity between a client data processing system and
a server data processing system. Data processing environment 100
may also employ a service oriented architecture where interoperable
software components distributed across a network may be packaged
together as coherent business applications.
[0052] With reference to FIG. 2, this figure depicts a block
diagram of a data processing system in which illustrative
embodiments may be implemented. Data processing system 200 is an
example of a computer, such as server 104 or client 110 in FIG. 1,
in which computer usable program code or instructions implementing
the processes of the illustrative embodiments may be located for
the illustrative embodiments.
[0053] In the depicted example, data processing system 200 employs
a hub architecture including North Bridge and memory controller hub
(NB/MCH) 202 and south bridge and input/output (I/O) controller hub
(SB/ICH) 204. Processing unit 206, main memory 208, and graphics
processor 210 are coupled to north bridge and memory controller hub
(NB/MCH) 202. Processing unit 206 may contain one or more
processors and may be implemented using one or more heterogeneous
processor systems. Graphics processor 210 may be coupled to the
NB/MCH through an accelerated graphics port (AGP) in certain
implementations.
[0054] In the depicted example, local area network (LAN) adapter
212 is coupled to south bridge and I/O controller hub (SB/ICH) 204.
Audio adapter 216, keyboard and mouse adapter 220, modem 222, read
only memory (ROM) 224, universal serial bus (USB) and other ports
232, and PCI/PCIe devices 234 are coupled to south bridge and I/O
controller hub 204 through bus 238. Hard disk drive (HDD) 226 and
CD-ROM 230 are coupled to south bridge and I/O controller hub 204
through bus 240. PCI/PCIe devices may include, for example,
Ethernet adapters, add-in cards, and PC cards for notebook
computers. PCI uses a card bus controller, while PCIe does not. ROM
224 may be, for example, a flash binary input/output system (BIOS).
Hard disk drive 226 and CD-ROM 230 may use, for example, an
integrated drive electronics (IDE) or serial advanced technology
attachment (SATA) interface. A super I/O (SIO) device 236 may be
coupled to south bridge and I/O controller hub (SB/ICH) 204.
[0055] An operating system runs on processing unit 206. The
operating system coordinates and provides control of various
components within data processing system 200 in FIG. 2. The
operating system may be a commercially available operating system
such as Microsoft.RTM. Windows.RTM. (Microsoft and Windows are
trademarks of Microsoft Corporation in the United States, other
countries, or both), or Linux.RTM. (Linux is a trademark of Linus
Torvalds in the United States, other countries, or both). An object
oriented programming system, such as the Java.TM. programming
system, may run in conjunction with the operating system and
provides calls to the operating system from Java.TM. programs or
applications executing on data processing system 200 (Java and all
Java-based trademarks and logos are trademarks or registered
trademarks of Oracle and/or its affiliates).
[0056] Program instructions for the operating system, the
object-oriented programming system, the processes of the
illustrative embodiments, and applications or programs are located
on storage devices, such as hard disk drive 226, and may be loaded
into a memory, such as, for example, main memory 208, read only
memory 224, or one or more peripheral devices, for execution by
processing unit 206. Program instructions may also be stored
permanently in non-volatile memory and either loaded from there or
executed in place. For example, the synthesized program according
to an embodiment can be stored in non-volatile memory and loaded
from there into DRAM.
[0057] The hardware in FIGS. 1-2 may vary depending on the
implementation. Other internal hardware or peripheral devices, such
as flash memory, equivalent non-volatile memory, or optical disk
drives and the like, may be used in addition to or in place of the
hardware depicted in FIGS. 1-2. In addition, the processes of the
illustrative embodiments may be applied to a multiprocessor data
processing system.
[0058] In some illustrative examples, data processing system 200
may be a personal digital assistant (PDA), which is generally
configured with flash memory to provide non-volatile memory for
storing operating system files and/or user-generated data. A bus
system may comprise one or more buses, such as a system bus, an I/O
bus, and a PCI bus. Of course, the bus system may be implemented
using any type of communications fabric or architecture that
provides for a transfer of data between different components or
devices attached to the fabric or architecture.
[0059] A communications unit may include one or more devices used
to transmit and receive data, such as a modem or a network adapter.
A memory may be, for example, main memory 208 or a cache, such as
the cache found in north bridge and memory controller hub 202. A
processing unit may include one or more processors or CPUs.
[0060] The depicted examples in FIGS. 1-2 and above-described
examples are not meant to imply architectural limitations. For
example, data processing system 200 also may be a tablet computer,
laptop computer, or telephone device in addition to taking the form
of a PDA.
[0061] With reference to FIG. 3, this figure depicts an example
target layout within which a hot-spot can be detected and remedied
using an ML model in accordance with an illustrative embodiment.
Shapes 302 and 304 may be example shapes present in an example
design layout and available to a shape processing tool, such as a
shape processing tool in design tool 113 in FIG. 1.
[0062] Shapes 302 and 304 together form a target that includes edge
fragment 306 for which a set of factors are defined, as illustrated
in table 308. Similarly, these or different combinations of factors
can be considered for other edge fragments or layout artifacts.
Table 308 lists twelve example factors that can contribute to or
are otherwise associated with edge fragment 306, as indicated by
corresponding numeric labels.
[0063] A factor, such as a factor in table 308, is also known as an
input object. As an example, in one embodiment, an input object is
calculated as follows--for a given target shape, a shape processing
operation segments different edges of the target shape into edge
segments. The embodiment then calculates the input object for an
edge segment by computing distances between the edge segment and
another edge segment, another edge, another shape, or a combination
thereof, that is in a defined neighborhood (within a defined
proximity) of the edge segment. Several distances from various
neighborhood edges or shapes forms the input object set for that
edge segment. A set of factors, such as factors 1-12 in FIG. 3, can
be a part of a training set provided to an ML model training
application, such as ML model training application 105 in FIG. 1,
or to an ML model, such as ML model 115 in FIG. 1.
[0064] Any combination of the twelve example factors in table 308
could contribute to retargeting of edge fragment 306. An ML model
according to an embodiment can be trained to consider a large set
of factors, such as in table 308 to predict retargeting values,
without the limited flexibility of a rule based retargeting method
or the computational expense of a simulation based retargeting
method. As an example, in a rule based retargeting method, if ten
example factors were to be considered for predicting retargeting
values using twelve example value ranges for each factor, 12.sup.10
rules (sixty one billion nine hundred and seventeen million three
hundred sixty four thousand two hundred and twenty four rules)
would have to be created and evaluated to predict retargeting
values.
[0065] With reference to FIG. 4, this figure depicts a block
diagram of training an ML model for detecting and correcting
lithographic hot spots in accordance with an illustrative
embodiment. Training sets 109 in FIG. 1 can be used as training
sets 402.
[0066] In one embodiment, input object vector 404 can include some
or all of the factors in table 308 in FIG. 3. ML model training
application 105 in FIG. 1 can be used as ML model training
application 406. ML model 408 can be used as ML model 115 in FIG.
1.
[0067] Training sets 402 include one or more training set of
training layout, training factors, training hot spots, and desired
retargeting values. Of course, an implementation may include other
information in training sets 402 as well, without digressing from
the scope of the illustrative embodiments. Input object vector 404
is formed using the training factors that serve as input to the
model. Desired retargeting values are the desired output from the
model. The model training process builds a model that predicts the
desired retargeting values as output for the given set of values of
input object vector 404. The desired retargeting values are applied
to the target shape, target shape's edge or edge segment based on
which input object vector 404 was constructed. Because a hot-spot
is a lithographic anomaly at a location in a layout where a
variation between a printed shape and a corresponding drawn target
shape exceeds a threshold, the retargeting of an edge segment of
the target shape modifies the target shape, where printing the
modified target shape removes the possibility of the hot-spot when
the layout is printed.
[0068] ML model training application 406 produces ML model 408
using input object vector 404 and the desired retargeting values.
When executed, as in FIG. 5, ML model 408 can detect hot-spots in
new layouts using input factors included in the set of training
factors, and produce retargeting values commensurate with the
desired retargeting values during the training.
[0069] With reference to FIG. 5, this figure depicts a block
diagram of an ML model configured to detect and correct
lithographic hot-spots in accordance with an illustrative
embodiment. Layout 502 may be a layout that has to be printed using
photolithography. Layout 502 includes a set of one or more
hot-spots 504 that have to be detected and remedied. ML model 408
in FIG. 4 can be used as ML model 506.
[0070] ML model 506 receives as input layout 502. Based on the
configuration within ML model 506, which was formed using training
sets 402 and corresponding input object vector 404 in FIG. 4, ML
model 506 outputs predicted retargeting values 508. Predicted
retargeting values 508 identifies hot-spots 504 and provides
suggested (predicted) retargeting values 508 to avoid them.
[0071] Normally training sets 512 include known patterns with known
retargeting values, which are characterized through full litho
simulation. The known patterns can be known hot-spots, some
canonical patterns such as width/space combinations, or some other
patterns generated through sampling of input features. An
embodiment increases training sets 512 with an addition training
set with new retargeting values for new sets of input objects that
may be computed using lithographic simulations. Increased training
sets 512 can be used to retrain ML model 506, to improve model
506's accuracy for future layouts.
[0072] With reference to FIG. 6, this figure depicts a flowchart of
a process of using a machine learning approach to detect and
correct lithographic hot-spots in accordance with an illustrative
embodiment. Process 600 can be implemented in an ML model, such as
ML model 506 in FIG. 5.
[0073] Process 600 begins by receiving a design rule clean layout,
such as layout 502 in FIG. 5 (step 602). Process 600 identifies in
the layout, a set of input objects, such as input object vector 404
in FIG. 4 (step 604). For example, at step 604, an embodiment can
perform fragmentation of the layout edges and then compute the
values of input factors for each fragment.
[0074] Process 600 identifies a set of lithographic hot-spots in
the layout using the set of input objects (step 606). Process 600
predicts a set of retargeting values corresponding to the set of
hot-spots detected in step 606 (step 608). Process 600 ends
thereafter.
[0075] With reference to FIG. 7, this figure depicts a flowchart of
a process for training an ML model for detecting and correcting
lithographic hot-spots in IC design layouts in accordance with an
illustrative embodiment. Process 700 can be implemented in an ML
model training application, such as ML model training application
406 in FIG. 4.
[0076] Process 700 begins by receiving one or more training sets,
such as training sets 402 in FIG. 4 (step 702). Process 700
receives a set of input objects, such as input objects 404 in FIG.
4 (step 704). The set of input objects of step 704 can be
constructed from the collection of training sets of step 702 in the
example manner described earlier.
[0077] Process 700 configures an ML model to predict retargeting
values for a set of hot-spots in a layout, by using known hot-spots
and known corresponding retargeting values from the training sets
(step 706). Process 700 ends thereafter.
[0078] The flowchart and block diagrams in the Figures illustrate
the architecture, functionality, and operation of possible
implementations of systems, methods, and computer program products
according to various embodiments of the present invention. In this
regard, each block in the flowchart or block diagrams may represent
a module, segment, or portion of code, which comprises one or more
executable instructions for implementing the specified logical
function(s). It should also be noted that, in some alternative
implementations, the functions noted in the block may occur out of
the order noted in the figures. For example, two blocks shown in
succession may, in fact, be executed substantially concurrently, or
the blocks may sometimes be executed in the reverse order,
depending upon the functionality involved. It will also be noted
that each block of the block diagrams and/or flowchart
illustration, and combinations of blocks in the block diagrams
and/or flowchart illustration, can be implemented by special
purpose hardware-based systems that perform the specified functions
or acts, or combinations of special purpose hardware and computer
instructions.
[0079] Thus, a computer implemented method, system, and computer
program product are provided in the illustrative embodiments for
using a machine learning approach to detect and correct
lithographic hot-spots in an IC design layout. Using an embodiment
of the invention, lithographic hot-spots resulting from a
combination of factors can be detected. An embodiment allows such
detection with a much larger collection of factors while keeping
the computational cost of the detection similar to the
computational cost of a rule based detection method using
significantly fewer factors. Furthermore, an embodiment also
detects hot-spots that are not previously known in the training
sets for the ML model of the embodiment.
[0080] As will be appreciated by one skilled in the art, aspects of
the present invention may be embodied as a system, method, or
computer program product. Accordingly, aspects of the present
invention may take the form of an entirely hardware embodiment, an
entirely software embodiment (including firmware, resident
software, micro-code, etc.) or an embodiment combining software and
hardware aspects that may all generally be referred to herein as a
"circuit," "module" or "system." Furthermore, aspects of the
present invention may take the form of a computer program product
embodied in one or more computer readable storage device(s) or
computer readable media having computer readable program code
embodied thereon.
[0081] Any combination of one or more computer readable storage
device(s) or computer readable media may be utilized. The computer
readable medium may be a computer readable signal medium or a
computer readable storage medium. A computer readable storage
device may be, for example, but not limited to, an electronic,
magnetic, optical, electromagnetic, infrared, or semiconductor
system, apparatus, or device, or any suitable combination of the
foregoing. More specific examples (a non-exhaustive list) of the
computer readable storage device would include the following: an
electrical connection having one or more wires, a portable computer
diskette, a hard disk, a random access memory (RAM), a read-only
memory (ROM), an erasable programmable read-only memory (EPROM or
Flash memory), an optical fiber, a portable compact disc read-only
memory (CD-ROM), an optical storage device, a magnetic storage
device, or any suitable combination of the foregoing. In the
context of this document, a computer readable storage device may be
any tangible device or medium that can contain, or store a program
for use by or in connection with an instruction execution system,
apparatus, or device.
[0082] Program code embodied on a computer readable storage device
or computer readable medium may be transmitted using any
appropriate medium, including but not limited to wireless,
wireline, optical fiber cable, RF, etc., or any suitable
combination of the foregoing.
[0083] Computer program code for carrying out operations for
aspects of the present invention may be written in any combination
of one or more programming languages, including an object oriented
programming language such as Java, Smalltalk, C++ or the like and
conventional procedural programming languages, such as the "C"
programming language or similar programming languages. The program
code may execute entirely on the user's computer, partly on the
user's computer, as a stand-alone software package, partly on the
user's computer and partly on a remote computer or entirely on the
remote computer or server. In the latter scenario, the remote
computer may be connected to the user's computer through any type
of network, including a local area network (LAN) or a wide area
network (WAN), or the connection may be made to an external
computer (for example, through the Internet using an Internet
Service Provider).
[0084] Aspects of the present invention are described herein with
reference to flowchart illustrations and/or block diagrams of
methods, apparatus (systems) and computer program products
according to embodiments of the invention. It will be understood
that each block of the flowchart illustrations and/or block
diagrams, and combinations of blocks in the flowchart illustrations
and/or block diagrams, can be implemented by computer program
instructions. These computer program instructions may be provided
to one or more processors of one or more general purpose computers,
special purpose computers, or other programmable data processing
apparatuses to produce a machine, such that the instructions, which
execute via the one or more processors of the computers or other
programmable data processing apparatuses, create means for
implementing the functions/acts specified in the flowchart and/or
block diagram block or blocks.
[0085] These computer program instructions may also be stored in
one or more computer readable storage devices or computer readable
that can direct one or more computers, one or more other
programmable data processing apparatuses, or one or more other
devices to function in a particular manner, such that the
instructions stored in the one or more computer readable storage
devices or computer readable medium produce an article of
manufacture including instructions which implement the function/act
specified in the flowchart and/or block diagram block or
blocks.
[0086] The computer program instructions may also be loaded onto
one or more computers, one or more other programmable data
processing apparatuses, or one or more other devices to cause a
series of operational steps to be performed on the one or more
computers, one or more other programmable data processing
apparatuses, or one or more other devices to produce a computer
implemented process such that the instructions which execute on the
one or more computers, one or more other programmable data
processing apparatuses, or one or more other devices provide
processes for implementing the functions/acts specified in the
flowchart and/or block diagram block or blocks.
[0087] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to be limiting of
the invention. As used herein, the singular forms "a", "an" and
"the" are intended to include the plural forms as well, unless the
context clearly indicates otherwise. As used herein, a set includes
one or more member unless the context clearly indicates otherwise.
It will be further understood that the terms "comprises" and/or
"comprising," when used in this specification, specify the presence
of stated features, integers, steps, operations, elements, and/or
components, but do not preclude the presence or addition of one or
more other features, integers, steps, operations, elements,
components, and/or groups thereof.
[0088] The corresponding structures, materials, acts, and
equivalents of all means or step plus function elements in the
claims below are intended to include any structure, material, or
act for performing the function in combination with other claimed
elements as specifically claimed. The description of the present
invention has been presented for purposes of illustration and
description, but is not intended to be exhaustive or limited to the
invention in the form disclosed. Many modifications and variations
will be apparent to those of ordinary skill in the art without
departing from the scope and spirit of the invention. The
embodiments were chosen and described in order to best explain the
principles of the invention and the practical application, and to
enable others of ordinary skill in the art to understand the
invention for various embodiments with various modifications as are
suited to the particular use contemplated.
* * * * *