U.S. patent application number 13/805601 was filed with the patent office on 2013-04-25 for customizable dispense system with smart controller.
This patent application is currently assigned to Entegris, Inc.. The applicant listed for this patent is Jennifer M. Braggin, James Cedrone, Iraj Gashgaee, George L. Gonnella, Paul J. Magoon, Johnathan Owen Vail. Invention is credited to Jennifer M. Braggin, James Cedrone, Iraj Gashgaee, George L. Gonnella, Paul J. Magoon, Johnathan Owen Vail.
Application Number | 20130101438 13/805601 |
Document ID | / |
Family ID | 45441718 |
Filed Date | 2013-04-25 |
United States Patent
Application |
20130101438 |
Kind Code |
A1 |
Cedrone; James ; et
al. |
April 25, 2013 |
CUSTOMIZABLE DISPENSE SYSTEM WITH SMART CONTROLLER
Abstract
Embodiments disclosed provide a customizable dispense system
implementing modular architecture, the customizable dispense system
comprising a smart controller configured to operate various
pneumatic pumps and motor pumps in various semiconductor
manufacturing processes that are sensitive to defects in printed
patterns. The smart controller is configured to, upon switching
from communicating with a first pump to a second pump,
automatically recognize the second pump and apply a control scheme
to control the second pump, which may be a motor pump or a
pneumatic pump. The switching may be due to physical disconnection
of the first pump and physical connection of the second pump or it
can be entirely done via software. The smart controller may be
connected to track and a variety of devices, including smart
filters.
Inventors: |
Cedrone; James; (Braintree,
MA) ; Gashgaee; Iraj; (Marlborough, MA) ;
Magoon; Paul J.; (Merrimack, NH) ; Braggin; Jennifer
M.; (Somerville, MA) ; Gonnella; George L.;
(Pepperell, MA) ; Vail; Johnathan Owen; (Nashua,
NH) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Cedrone; James
Gashgaee; Iraj
Magoon; Paul J.
Braggin; Jennifer M.
Gonnella; George L.
Vail; Johnathan Owen |
Braintree
Marlborough
Merrimack
Somerville
Pepperell
Nashua |
MA
MA
NH
MA
MA
NH |
US
US
US
US
US
US |
|
|
Assignee: |
Entegris, Inc.
Billerica
MA
|
Family ID: |
45441718 |
Appl. No.: |
13/805601 |
Filed: |
June 27, 2011 |
PCT Filed: |
June 27, 2011 |
PCT NO: |
PCT/US11/42018 |
371 Date: |
December 19, 2012 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
61359239 |
Jun 28, 2010 |
|
|
|
Current U.S.
Class: |
417/44.2 ;
417/274 |
Current CPC
Class: |
F04B 49/007 20130101;
F04B 43/06 20130101; B65D 83/00 20130101; F04B 49/02 20130101; H01L
21/67017 20130101 |
Class at
Publication: |
417/44.2 ;
417/274 |
International
Class: |
F04B 49/06 20060101
F04B049/06; F04B 49/00 20060101 F04B049/00 |
Claims
1. A customizable dispense system, comprising: a smart controller
configured to operate a plurality of pumps in semiconductor
manufacturing processes that are sensitive to defects in printed
patterns, the plurality of pumps including at least one pneumatic
pump and at least one motor pump; and a plurality of lines
connecting the smart controller with a track and a variety of
devices, including pump heads for the at least one pneumatic pump
and the at least one motor pump, wherein the smart controller is
configured to, upon switching one of the plurality of lines from
communicating with a first pump to a second pump, automatically
recognize the second pump and apply a control scheme corresponding
to the second pump.
2. A customizable dispense system according to claim 1, wherein the
first pump is a pneumatic pump and the second pump is a motor
pump.
3. A customizable dispense system according to claim 1, wherein
both the first pump and the second pump are motor pumps.
4. A customizable dispense system according to claim 1, wherein
both the first pump and the second pump are pneumatic pumps.
5. A customizable dispense system according to claim 1, wherein the
smart controller is further configured to, upon interfacing with a
newly connected pump, automatically recognize the newly connected
pump and apply a control scheme corresponding to the newly
connected pump, wherein the newly connected pump is a motor pump or
a pneumatic pump.
6. A customizable dispense system according to claim 1, wherein the
smart controller comprises an onboard database storing information
associated with the plurality of pumps.
7. A customizable dispense system according to claim 1, wherein the
variety of devices includes filters with radio-frequency
identification tags.
8. A customizable dispense system according to claim 1, wherein the
plurality of pumps comprises one or more integrated pumps, wherein
each of the one or more integrated pumps comprises two or more
pneumatic pumps physically combined as a unit, wherein the two or
more pneumatic pumps in the unit operate independent of one
another, and wherein the two or more pneumatic pumps in the unit
are independently controlled by the smart controller.
9. A customizable dispense system according to claim 8, wherein the
one or more integrated pumps function as feed pumps.
10. A customizable dispense system according to claim 8, wherein
the one or more integrated pumps function as dispense pumps.
11. A customizable dispense system according to claim 1, wherein
the switching is due to physical disconnection of the first pump
and physical connection of the second pump.
12. A customizable dispense system according to claim 1, wherein
the switching is due to an instruction received at the smart
controller.
13. A customizable dispense system, comprising: a set of feed pumps
for directing chemicals used in semiconductor manufacturing
processes; a set of dispense pumps for dispensing the chemicals;
and a smart controller configured to operate the set of feed pumps
and the set of dispense pumps, wherein the set of feed pumps and
the set of dispense pumps comprise one or more integrated pumps,
each of the one or more integrated pumps comprising two or more
pneumatic pumps physically combined as a unit, wherein the two or
more pneumatic pumps in the unit operate independent of one
another, and wherein the two or more pneumatic pumps in the unit
are independently controlled by the smart controller.
14. A customizable dispense system according to claim 13, wherein
the smart controller is configured to, upon switching from
communicating with a first pump to a second pump, automatically
recognize the second pump and apply a control scheme corresponding
to the second pump.
15. A customizable dispense system according to claim 14, wherein
the first pump is a pneumatic pump and the second pump is a motor
pump.
16. A customizable dispense system according to claim 14, wherein
both the first pump and the second pump are motor pumps.
17. A customizable dispense system according to claim 14, wherein
both the first pump and the second pump are pneumatic pumps.
18. A customizable dispense system according to claim 13, wherein
the smart controller is further configured to, upon interfacing
with a newly connected pump, automatically recognize the newly
connected pump and apply a control scheme corresponding to the
newly connected pump, wherein the newly connected pump is a motor
pump or a pneumatic pump.
19. A customizable dispense system, comprising: a set of feed pumps
for directing chemicals used in semiconductor manufacturing
processes; a set of dispense pumps for dispensing the chemicals; a
smart controller configured to operate the set of feed pumps and
the set of dispense pumps, wherein the set of feed pumps and the
set of dispense pumps comprise one or more integrated pumps, each
of the one or more integrated pumps comprising two or more
pneumatic pumps physically combined as a unit, wherein the two or
more pneumatic pumps in the unit operate independent of one
another, wherein the two or more pneumatic pumps in the unit are
independently controlled by the smart controller, and wherein the
smart controller is further configured to, upon interfacing with a
newly connected pump, automatically recognize the newly connected
pump and apply a control scheme corresponding to the newly
connected pump, wherein the newly connected pump is a motor pump or
a pneumatic pump.
20. A customizable dispense system according to claim 19, wherein
the smart controller is further configured to, upon switching from
communicating with a first pump to a second pump, automatically
recognize the second pump and apply a control scheme corresponding
to the second pump.
21. A customizable dispense system according to claim 20, wherein
the first pump is a pneumatic pump and the second pump is a motor
pump.
22. A customizable dispense system according to claim 20, wherein
both the first pump and the second pump are motor pumps.
23. A customizable dispense system according to claim 20, wherein
both the first pump and the second pump are pneumatic pumps.
24. A customizable dispense system according to claim 20, wherein
the switching is due to physical disconnection of the first pump
and physical connection of the second pump.
25. A customizable dispense system according to claim 20, wherein
the switching is due to an instruction received at the smart
controller.
26. A filtration method, comprising: at a controller of a dispense
system having a feed pump and a dispense pump, determining an
upstream pressure for fluid upstream from a filter positioned
between the feed pump and the dispense pump; setting a feed stage
fluid pressure to the upstream pressure; setting a dispense stage
fluid pressure to a filtration pressure setpoint; opening valves to
allow the fluid flowing from a feed side to a dispense side through
the filter, wherein the feed stage fluid pressure and the dispense
stage fluid pressure cause a differential pressure across the
filter, thereby moving the fluid from the feed side to the dispense
side through the filter; and determining an end of filtration based
on a change in fluid pressure at the dispense side.
Description
TECHNICAL FIELD
[0001] This disclosure relates generally to liquid dispensing in
semiconductor manufacturing processes and, more particularly, to a
new dispense system having a smart controller for controlling
customizable pump operations to meet the diverse needs in the field
of semiconductor manufacturing.
BACKGROUND OF THE INVENTION
[0002] There are many applications for which precise control over
the amount and/or rate at which a fluid is dispensed by a pumping
apparatus is necessary. In semiconductor manufacturing processes,
for example, it is important to control the amount and rate at
which photochemicals, such as photoresist chemicals, are applied to
a semiconductor wafer. A semiconductor manufacturing process refers
to a process used to create integrated circuits that are present in
everyday electrical and electronic devices. It includes a sequence
of photographic and chemical processing steps during which
electronic circuits are gradually created on a wafer made of pure
semiconducting material. The coatings applied to semiconductor
wafers during processing typically require a certain flatness
and/or even thickness across the surface of the wafer that is
measured in angstroms. The rates at which processing chemicals are
applied (i.e., dispensed) onto the wafer have to be controlled
carefully to ensure that the processing liquid is applied
uniformly.
[0003] Photochemicals used in the semiconductor industry can be
very expensive. Therefore, it is highly desirable to ensure that a
minimum but adequate amount of chemical is used and that the
chemical is not damaged by the pumping apparatus. Unfortunately,
these desirable qualities can be extremely difficult to achieve in
today's pumping systems because of the many interrelated obstacles.
For example, due to incoming supply issues, pressure can vary from
system to system. Due to fluid dynamics and properties, pressure
needs vary from fluid to fluid (e.g., a fluid with higher viscosity
requires more pressure). Because these obstacles are interrelated,
sometimes solving one many cause many more problems and/or make the
matter worse. What is more, different applications have different
needs. A pump system that meets the needs of a particular
application may not be suitable for a different application.
SUMMARY OF THE INVENTION
[0004] In semiconductor manufacturing, various pumps may be used to
mix chemicals as well as dispensing the mixture of chemicals onto
wafers. High performance pumps, such as the Entegris IntelliGen
Mini photolithography rolling edge diaphragm pump, can be used to
mix and dispense the chemicals directly (Entegris and IntelliGen
are trademarks of Entegris, Inc. of Chaska, Minn.). These chemicals
may vary from application to application and different applications
may have different needs. Thus, a pump system used in dispensing
the chemicals must consider a plurality of factors, including size,
cost, performance (both speed and accuracy), reliability,
adaptability, and so on.
[0005] Embodiments disclosed herein can address these needs with a
customizable dispense system that is built on modular architecture
and that includes a single main controller for controlling
components in this versatile, "plug-and-play" dispense system.
Within this disclosure, the term "customizable" refers to the fact
that embodiments of a dispense system disclosed herein can be
easily changed, modified, or otherwise altered to suit various
needs. Such a change, modification, or alteration may occur
dynamically whenever such a need arises. For example, one
embodiment of a customizable dispense system disclosed herein may
initially be built with a pneumatic to pneumatic configuration.
Pneumatically driven pumps (pneumatic pumps) are generally less
expensive than motor-driven pumps (motor pumps) and can provide
positive pressure filtration and good throughput, which makes this
pneumatic to pneumatic configuration ideal for handling
applications such as those for non-critical layers. The pneumatic
to pneumatic configuration can be easily changed, modified, or
otherwise altered to a motor to motor configuration for critical
layer applications. In some embodiments, the single main controller
is configured with the necessary intelligence, and hence is
referred to herein as a "smart" controller, to automatically
recognize a change in the customizable dispense system and operate
according to a new configuration and/or a new application.
[0006] In some embodiments, the smart controller of a customizable
dispense system disclosed herein can be configured to operate a
plurality of pumps in semiconductor manufacturing processes that
are sensitive to defects in printed patterns. The plurality of
pumps may include at least one pneumatic pump and at least one
motor pump. The customizable dispense system may further comprise a
plurality of lines connecting the smart controller with a track and
a variety of devices. In some embodiments, the variety of devices
may include filters with radio-frequency identification tags,
sensors, and pump heads.
[0007] In some embodiments, the smart controller is further
configured to, upon switching one of the plurality of lines from
communicating with a first pump to a second pump, automatically
recognize the second pump and apply a control scheme corresponding
to the second pump in order to precisely and accurately control the
second pump without minimal, if any, downtime.
[0008] In some embodiments, the switching may occur between motor
pumps, between pneumatic pumps, or between a mixture of pneumatic
pumps and motor pumps. For example, a user may unplug pneumatic
pumps and plug in motor pumps to take over certain functions of
those pneumatic pumps. Example functions may include chemical feed
and dispense. In some embodiments, no physical
disconnection/connection may be necessary and the switching is done
entirely via software.
[0009] In some embodiments, the smart controller may be configured
to, upon interfacing with a newly connected pump, automatically
recognize the newly connected pump and apply a control scheme
corresponding to the newly connected pump, which may be a motor
pump or a pneumatic pump. The smart controller may comprise an
onboard database storing information associated with a plurality of
pumps.
[0010] In some embodiments, the smart controller may be configured
to control one or more integrated pumps. In some embodiments, an
integrated pump may comprise two or more pneumatic pumps physically
combined as a unit. The two or more pneumatic pumps in the unit may
operate independent of one another. In some embodiments, the smart
controller may be further configured to independently control the
two or more pneumatic pumps in the unit.
[0011] In some embodiments, a customizable dispense system may
include a set of feed pumps and a set of dispense pumps. In some
embodiments, a smart controller may be configured to operate the
set of feed pumps and the set of dispense pumps which may include
one or more integrated pumps.
[0012] Software implementing embodiments disclosed herein may be
implemented in suitable computer-executable instructions that may
reside on one or more non-transitory computer readable medium.
Within this disclosure, the term "computer-readable storage medium"
encompasses all types of data storage medium that can be read by a
processing unit such as a processor or a controller. Examples of
computer-readable storage media can include random access memories,
read-only memories, hard drives, data cartridges, floppy diskettes,
flash memory drives, and the like.
[0013] Embodiments disclosed herein can provide many advantages.
For example, instead of a fixed number of pumps, a customizable
dispense system disclosed herein can support a variable number of
different types of pumps over time. This mix and match flexibility
allows the system to be tailored to each particular application,
reduces the cost of maintaining the system, and provides a way to
easily upgrade to a new type of pumps and/or a new system
setup.
[0014] These, and other, aspects of the disclosure will be better
appreciated and understood when considered in conjunction with the
following description and the accompanying drawings. It should be
understood, however, that the following description, while
indicating various embodiments of the disclosure and numerous
specific details thereof, is given by way of illustration and not
of limitation. Many substitutions, modifications, additions and/or
rearrangements may be made within the scope of the disclosure
without departing from the spirit thereof, and the disclosure
includes all such substitutions, modifications, additions and/or
rearrangements.
BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The drawings accompanying and forming part of this
specification are included to depict certain aspects of the
disclosure. It should be noted that the features illustrated in the
drawings are not necessarily drawn to scale. A more complete
understanding of the disclosure and the advantages thereof may be
acquired by referring to the following description, taken in
conjunction with the accompanying drawings in which like reference
numbers indicate like features and wherein:
[0016] FIG. 1 depicts a diagrammatic representation of an example
multiple stage pump ("multi-stage pump");
[0017] FIGS. 2 and 3 depict perspective views of an example
multi-stage pump;
[0018] FIG. 4 depicts a perspective view of an example single stage
pump;
[0019] FIG. 5 depicts a diagrammatic representation of one example
embodiment of modular architecture for customizable dispense
systems;
[0020] FIG. 6 depicts a diagrammatic representation of one example
embodiment of a customizable dispense system with a smart
controller controlling pneumatic feed pumps and pneumatic dispense
pumps;
[0021] FIG. 7 depicts a diagrammatic representation of one example
embodiment of a customizable dispense system with a smart
controller controlling pneumatic feed pumps and motor dispense
pumps;
[0022] FIG. 8 depicts a diagrammatic representation of one example
embodiment of a customizable dispense system with a smart
controller controlling motor feed pumps and motor dispense
pumps;
[0023] FIG. 9 depicts a diagrammatic representation of one example
embodiment of a customizable dispense system with a pneumatic to
pneumatic configuration;
[0024] FIGS. 10-15 illustrate pump control and sequence operation
of one example embodiment of a customizable dispense system;
[0025] FIGS. 16-17 depict diagrammatic representations of example
embodiments of an integrated pump;
[0026] FIG. 18 depicts a perspective top view of one example
embodiment of an integrated pump; and
[0027] FIG. 19 depicts an exploded view of a pneumatic pump in one
example embodiment of an integrated pump.
DETAILED DESCRIPTION
[0028] The disclosure and various features and advantageous details
thereof are explained more fully with reference to the exemplary,
and therefore non-limiting, embodiments illustrated in the
accompanying drawings and detailed in the following description.
Descriptions of known programming techniques, computer software,
hardware, operating platforms and protocols may be omitted so as
not to unnecessarily obscure the disclosure in detail. It should be
understood, however, that the detailed description and the specific
examples, while indicating the preferred embodiments, are given by
way of illustration only and not by way of limitation. Various
substitutions, modifications, additions and/or rearrangements
within the spirit and/or scope of the underlying inventive concept
will become apparent to those skilled in the art from this
disclosure.
[0029] FIG. 1 depicts a diagrammatic representation of example
multi-stage pump 100. Multi-stage pump 100 includes a feed stage
portion 105 and a separate dispense stage portion 110. Located
between feed stage portion 105 and dispense stage portion 110, from
a fluid flow perspective, is filter 120 to filter impurities from a
process fluid. A number of valves can control fluid flow through
multi-stage pump 100 including, for example, inlet valve 125,
isolation valve 130, barrier valve 135, purge valve 140, vent valve
145 and outlet valve 147. The valves of multi-stage pump 100 are
opened or closed to allow or restrict fluid flow to various
portions of multi-stage pump 100. These valves can be pneumatically
actuated (i.e., gas driven) diaphragm valves that open or close
depending on whether pressure or a vacuum is asserted.
[0030] Dispense stage portion 110 can further include a pressure
sensor 112 that determines the pressure of fluid at dispense stage
110. The pressure determined by pressure sensor 112 can be used to
control the speed of the various pumps as described below. Example
pressure sensors include ceramic and polymer piezoresistive and
capacitive pressure sensors, including those manufactured by
Metallux AG, of Korb, Germany. The face of pressure sensor 112 that
contacts the process fluid can be a perfluoropolymer. Pump 100 can
include additional pressure sensors, such as a pressure sensor that
determines the pressure of fluid at feed stage 105 and/or a
pressure sensor to read pressure in feed chamber 155.
[0031] Feed stage 105 and dispense stage 110 can include rolling
diaphragm pumps to pump fluid in multi-stage pump 100. Feed-stage
pump 150 ("feed pump 150"), for example, includes a feed chamber
155 to collect fluid, a feed stage diaphragm 160 to move within
feed chamber 155 and displace fluid, a piston 165 to move feed
stage diaphragm 160, a lead screw 170 and a stepper motor 175. Lead
screw 170 couples to stepper motor 175 through a nut, gear or other
mechanism for imparting energy from the motor to lead screw 170.
According to one embodiment, feed motor 170 rotates a nut that, in
turn, actuates lead screw 170, causing piston 165 to actuate.
Dispense-stage pump 180 ("dispense pump 180") can similarly include
a dispense chamber 185, a dispense stage diaphragm 190, a piston
192, a lead screw 195, and a dispense motor 200. Feed stage 105 and
dispense stage 110 can each be include a variety of pumps including
pneumatically actuated pumps, hydraulic pumps or other pumps. For
example, a pneumatically actuated pump may be used for the feed
stage and a stepper motor driven hydraulic pump may be used for the
dispense stage.
[0032] In the example shown in FIG. 1, multi-stage pump 100
implements a motor to motor configuration between the feed stage
and the dispense stage. Feed motor 175 and dispense motor 200 can
be any suitable motor. For example, dispense motor 200 can be a
Permanent-Magnet Synchronous Motor ("PMSM"). The PMSM can be
controlled by a digital signal processor ("DSP") utilizing
Field-Oriented Control ("FOC") or other position/speed control
scheme. In some embodiments, a smart controller in multi-stage pump
100 is configured to control dispense motor 200 utilizing the
control schemer.
[0033] Dispense motor 200 can further include an encoder (e.g., a
fine line rotary position encoder) for real time feedback of
dispense motor 200's position. The use of a position sensor enables
accurate and repeatable control of the position of piston 192,
which leads to accurate and repeatable control over fluid movements
in dispense chamber 185. For, example, using a 2000 line encoder,
which may provide 8000 pulses to the DSP, it is possible to
accurately measure to and control dispense motor 200's position at
0.045 degrees of rotation. In addition, a PMSM can run at low
velocities with little or no vibration. Feed motor 175 can also be
a PMSM or a stepper motor. For example, feed motor 175 can be an
EAD Motors of Dover, N.H. stepper motor part no. L1LAB-005 and
dispense motor 200 can be an EAD Motors brushless DC Motor part no.
DA23DBBL-13E17A.
[0034] FIGS. 2 and 3 depict perspective views of an example of a
pump assembly for multi-stage pump 100. Multi-stage pump 100 can
include a dispense block 205 that defines various fluid flow paths
through multi-stage pump 100. Dispense pump block 205 can be a
unitary block of PTFE, modified PTFE or other material. Because
these materials do not react with or are minimally reactive with
many process fluids, the use of these materials allows flow
passages and pump chambers to be machined directly into dispense
block 205 with a minimum of additional hardware. Dispense block 205
consequently reduces the need for piping by providing a fluid
manifold.
[0035] Dispense block 205 can include various external inlets and
outlets including, for example, inlet 210 through which the fluid
is received, vent outlet 215 for venting fluid during the vent
segment, and dispense outlet 220 through which fluid is dispensed
during the dispense segment. Dispense block 205, in the example of
FIG. 2, does not include an external purge outlet as purged fluid
is routed back to the feed chamber. In other implementations,
however, fluid can be purged externally.
[0036] Dispense block 205 routes fluid to the feed pump, dispense
pump and filter 120. A pump cover 225 can protect feed motor 175
and dispense motor 200 from damage, while piston housing 227 can
provide protection for piston 165 and piston 192. In this example,
valve plate 230 provides a valve housing for a system of valves
(e.g., inlet valve 125, isolation valve 130, barrier valve 135,
purge valve 140 and vent valve 145 of FIG. 1) that can be
configured to direct fluid flow to various components of
multi-stage pump 100. According to one embodiment, each of inlet
valve 125, isolation valve 130, barrier valve 135, purge valve 140,
and vent valve 145 is partially integrated into valve plate 230 and
is a diaphragm valve that is either opened or closed depending on
whether pressure or vacuum is applied to the corresponding
diaphragm.
[0037] Valve plate 230 includes a valve control inlet for each
valve to apply pressure or vacuum to the corresponding diaphragm.
For example, inlet 235 corresponds to barrier valve 135, inlet 240
to purge valve 140, inlet 245 to isolation valve 130, inlet 250 to
vent valve 145, and inlet 255 to inlet valve 125. By the selective
application of pressure or vacuum to the inlets, the corresponding
valves are opened and closed. The valves can be opened and closed
in various sequences which may vary from application to
application. Valve plate 230 can be configured to reduce the
hold-up volume of the valves, eliminate volume variations due to
vacuum fluctuations, reduce vacuum requirements and reduce stress
on the valve diaphragm.
[0038] A valve control gas and vacuum are provided to valve plate
230 via valve control supply lines 260, which run from a valve
control manifold (covered by manifold cover 263 or housing cover
225), through dispense block 205 to valve plate 230. Valve control
gas supply inlet 265 provides a pressurized gas to the valve
control manifold and vacuum inlet 270 provides vacuum (or low
pressure) to the valve control manifold. The valve control manifold
acts as a three way valve to route pressurized gas or vacuum to the
appropriate inlets of valve plate 230 via supply lines 260 to
actuate the corresponding valve(s).
[0039] In FIG. 3, dispense block 205 is made transparent to show
the fluid flow passages defined there through. Dispense block 205
defines various chambers and fluid flow passages for multi-stage
pump 100. Feed chamber 155 and dispense chamber 185 can be machined
directly into dispense block 205. Additionally, various flow
passages can be machined into dispense block 205. A fluid flow
passage runs from inlet 210 to the inlet valve. Fluid flow passage
280 runs from the inlet valve to feed chamber 155, to complete the
path from inlet 210 to feed pump 150. Inlet valve 125 in valve
housing 230 regulates flow between inlet 210 and feed pump 150.
Flow passage 285 routes fluid from feed pump 150 to isolation valve
130 in valve plate 230. The output of isolation valve 130 is routed
to filter 120 by another flow passage. Fluid flows from filter 120
through flow passages that connect filter 120 to the vent valve 145
and barrier valve 135. The output of vent valve 145 is routed to
vent outlet 215 while the output of barrier valve 135 is routed to
dispense pump 180 via flow passage 290. During the dispense
segment, the dispense pump can output fluid to outlet 220 via flow
passage 295 or, in the purge segment, to the purge valve through
flow passage 300. During the purge segment, fluid can be returned
to feed pump 150 through flow passage 305. Because the fluid flow
passages can be formed directly in the PTFE (or other material)
block, dispense block 205 can act as the piping for the process
fluid between various components of multi-stage pump 100, obviating
or reducing the need for additional tubing. In other cases, tubing
can be inserted into dispense block 205 to define the fluid flow
passages.
[0040] FIG. 3 further shows supply lines 260 for providing pressure
or vacuum to valve plate 230. Actuation of the valves is controlled
by the valve control manifold 302 that directs either pressure or
vacuum to each supply line 260. Each supply line 260 can include a
fitting (an example fitting is indicated at 318) with a small
orifice (i.e., a restriction). The orifice in each supply line
helps mitigate the effects of sharp pressure differences between
the application of pressure and vacuum to the supply line. This
allows the valves to open and close more smoothly and more
slowly.
[0041] In addition to the examples shown in FIGS. 1-3, other
multi-stage pump configurations, including pneumatic-to-motor and
pneumatic to pneumatic, are also possible. Further, although
described in terms of a multi-stage pump, embodiments disclosed
herein can also be utilized in a single stage pump. FIG. 4 depicts
a perspective view of an example pump assembly for single stage
pump 4000.
[0042] Pump 4000 can be similar to one stage, say the dispense
stage, of multi-stage pump 100 described above. Pump 4000 can
include a pneumatically actuated pump or a rolling diaphragm pump
driven by a stepper motor, brushless DC motor, or other motor. Pump
4000 can include a dispense block 4005 that defines various fluid
flow paths through pump 4000 and at least partially defines a pump
chamber. Dispense pump block 4005 can be a unitary block of PTFE,
modified PTFE or other material. Because these materials do not
react with or are minimally reactive with many process fluids, the
use of these materials allows flow passages and the pump chamber to
be machined directly into dispense block 4005 with a minimum of
additional hardware. Dispense block 4005 consequently reduces the
need for piping by providing an integrated fluid manifold. A
pressure sensor can be positioned to read the pressure in the pump
chamber.
[0043] Dispense block 4005 can include various external inlets and
outlets including, for example, inlet 4010 through which the fluid
is received, purge/vent outlet 4015 for purging/venting fluid, and
dispense outlet 4020 through which fluid is dispensed during the
dispense segment. Dispense block 4005, in the example of FIG. 4,
includes external purge outlet 4010 as the pump only has one
chamber. Appropriate fittings such as o-ring-less low profile
fittings can be utilized to connect the external inlets and outlets
of dispense block 4005 to fluid lines.
[0044] Dispense block 4005 routes fluid from the inlet to an inlet
valve (e.g., at least partially defined by valve plate 4030), from
the inlet valve to the pump chamber, from the pump chamber to a
vent/purge valve and from the pump chamber to outlet 4020. A pump
cover 4025 can protect a pump motor from damage, while piston
housing 4027 can provide protection for a piston. The cover/housing
can be formed of polyethylene or other polymer. Valve plate 4030
provides a valve housing for a system of valves (e.g., an inlet
valve, and a purge/vent valve) that can be configured to direct
fluid flow to various components of pump 4000. Valve plate 4030 and
the corresponding valves can be formed similarly to the manner
described in conjunction with valve plate 230, discussed above. The
purge valve can be the same size as, smaller than, or larger than
the inlet valve. Using a smaller purge valve, however, can reduce
the holdup volume returned to the chamber as described above. Each
of the inlet valve and the purge/vent valve can be partially
integrated into valve plate 4030 and can be a diaphragm valve that
is either opened or closed depending on whether pressure or vacuum
is applied to the corresponding diaphragm. In some implementations,
some of the valves may be external to dispense block 4005 or
arranged in additional valve plates. As an example, a sheet of PTFE
can be sandwiched between valve plate 4030 and dispense block 4005
to form the diaphragms of the various valves. Valve plate 4030
includes a valve control inlet (not shown) for each valve to apply
pressure or vacuum to the corresponding diaphragm.
[0045] In some embodiments, instead of a fixed number of pumps, a
customizable system may support a variable number of pumps over
time. The customizable dispense system employs a flexible, modular
architecture. Embodiments of a customizable dispense system may
also support different types of pumps, including pneumatic and
motor, at any given time. For example, in a multi-stage pump
system, the first stage pump may be driven pneumatically and the
second stage pump may be driven by a motor. This mix and match
flexibility allows the system to be customized for each particular
application. FIG. 5 depicts a diagrammatic representation of one
example embodiment of modular architecture 500 for customizable
dispense systems.
[0046] As illustrated in FIG. 5, different application may have
different needs, perhaps depending upon the chemicals used, the
level of quality/performance desired the cost involved in achieving
the level of quality/performance desired, and so on. For example,
where the cost of chemicals is high and the end product is
sensitive to defects, the system may utilize a motor to motor
configuration, an example of which is shown in FIG. 8, for the best
possible filtration control with the lowest possible defects. Since
this motor to motor configuration can be inherently expensive, in
some cases, a pneumatic to motor configuration may be utilized to
reduce the cost of the system while retaining a desirable level of
throughput and the ability to monitor and control the dispense rate
and volume. An example of a pneumatic to motor configuration is
shown in FIG. 7. In some cases, a pneumatic to pneumatic
configuration may be desirable, particularly if the cost relative
to the dispense volume is a concern and/or where high quality
performance is not needed or required. An example of a pneumatic to
pneumatic configuration is shown in FIG. 6. In embodiments
disclosed herein, modular architecture 500 includes a smart
controller that allows for mixing and matching, sometimes
dynamically and on-the-fly, pneumatic and motor pumps. In this way,
embodiments of a customizable dispense system disclosed herein may
capture the whole spectrum of performance levels for many different
applications to meet the diverse needs in the field of
semiconductor manufacturing.
[0047] This flexible, modular architecture may provide a dispense
system disclosed herein with many advantages. For example, an owner
of the system may start with a pneumatic to pneumatic set up. Over
time, the owner's needs may change and/or after an evaluation, the
pneumatic to pneumatic set up may need an upgrade. One or more of
the pneumatic pumps may be readily swapped out and replaced with
motor driven pump(s) and/or replacement pneumatic pump(s). The
owner would not have to replace the entire dispense system.
[0048] This type of plug-n-play modification to the dispense system
is possible due at least in part to a versatile, smart controller
operable to control various types of pumps automatically and
dynamically. For example, one may unplug a first pump, plug in a
second pump, plumb the line, and begin or resume the operation.
Upon interfacing with the pump head of the second pump, the
controller is operable to automatically recognize the second pump
and apply a control scheme corresponding to the second pump. In
some embodiments, the switching from one pump to another may be
done entirely via software, without having to physically
unplugging-plugging pumps. For example, a user may want to take
Pump A and Pump B off-line and designate Pump C and Pump D to take
over and function as new Pump A and new Pump B.
[0049] In some embodiments, electronically readable tags or code
may be utilized to provide a wide variety of information to the
smart controller. In some embodiments, the smart controller may
connect to various devices identifiable via electronically readable
tags which may or may not be directly affixed on or embedded in
those devices/packages. For example, the smart controller may be
connected to a smart filter via one of its many ports and
information about the smart filter may be provided to the smart
controller via an electronically readable tag associated with the
smart filter. As another example, the smart controller may be
connected to a pack or package and information about the content
contained therein may be provided to the smart controller via an
electronically readable tag associated with the pack or package.
The pack may contain a chemical or substance necessary for a
particular application. Other devices/packages can be connected to
the smart controller in a similar manner.
[0050] In semiconductor manufacturing, different applications often
have different requirements for chemical layer thickness and
coating area. Correspondingly, a wide array of dispense volumes and
rates may be required. Meeting such requirements involves many
different size pumps for all the different track sizes as each pump
must be able to contain all of the fluid required for an individual
dispense. These tracks and pumps may rely on discrete lines for
communication, which means each input line and each output line
would require a physical wire or cabling. The complexity of wiring
adds another layer of challenge to the already complicated fluidic
connections in the dispense system.
[0051] One way to address these challenges is to provide an
input/output (I/O) interface device that can provide serial
communications between individual pump controllers and tracks. In
this way, individual pump controllers for the same type of pumps
can communicate with different tracks through the I/O interface
device. More specifically, the I/O interface device can take a
signal from a track at the front end and serially communicate that
signal to a pump controller at the back end in a format that can be
understood by the pump controller.
[0052] Embodiments of a smart controller disclosed herein can
provide another viable solution. In some embodiments, the smart
controller may comprise a plurality of communication ports for
physical connections to a track and a variety of devices. In some
embodiments, the smart controller may have 24 communication ports
for motor pumps, pneumatic pumps, filters, sensors, etc., each of
which may be plugged into any one of the 24 ports and be
automatically recognized by the smart controller, utilizing an
onboard database. The communication lines between the smart
controller and the devices may be software configurable. In some
embodiments, each type of device may be assigned to a particular
port of the smart controller.
[0053] In some embodiments, the smart controller may comprise
different types of interfaces to communicate serial, parallel, or
analog signals/data to and from various devices, including a track,
pumps, valves, sensors, tag readers, pump heads, and other
components. In some embodiments, the interface to the track may
utilize a proprietary protocol or an industry standard protocol. As
another example, an interface to the track may be a Controller Area
Network (CAN) interface with DeviceNet, an industry standard
Ethernet, or some other industry standard protocol. For example,
the smart controller may utilize the Transmission Control
Protocol/Internet Protocol (TCP/IP) to communicate with the track.
Other interfaces of the smart controller may be used to communicate
with a variety of devices, including individual pump heads, in one
or more protocols. In some embodiments, the variety of devices may
include CAN devices. In some embodiments, the interfaces to the
variety of devices may include stripped down simple proprietary
interfaces.
[0054] In many tracks, Ethernet and DeviceNet or something similar
may be utilized to control the I/O signals of the pumps. For
example, a track would send a DeviceNet command to a DeviceNet
parallel I/O board to set some signals and those signals would go
through connectors and cables to a special pump interface module.
This kind of connection architecture requires delicate and
complicated hardware arrangement in addition to software
programming.
[0055] In some embodiments, the smart controller may implement a
proprietary communications protocol for interfacing/communicating
with the pumps. In some embodiments, the smart controller may
implement a track interface to take the place of a parallel I/O
that is normally used to trigger the pump and get basic status. In
some embodiments, pumps may be implemented as the same parallel
device type and the smart controller may be operable to interpret
the protocol directly. This would eliminate the need for parallel
signals on the pump as well as the track hardware board and cabling
while providing virtually the same programming functions that many
tracks currently use. Following the above example, the track could
send the same DeviceNet command to the pump through the smart
controller and not require additional hardware. Those skilled in
the art will appreciate that this is just one possible example. In
some embodiments, an existing Entegris Networking Protocol may be
used to communicate to the smart controller or pumps.
[0056] In some prior dispense systems, a master controller may be
connected to multiple pumps and each pump may have a dedicated pump
controller coupled thereto. The functionality of this type of
dedicated pump controller may be categorized into two levels: high
and low. High level control functions may include functions
required to run a dispense pump. Low level control functions may
include simple functions such as moving a motor from Point A to
Point B. These pump controllers have a lot of processing power.
Unfortunately, prior dispense systems do not utilize the processing
powers of such pump controllers in an efficient manner. For
example, in a dispense system with multiple pumps, say 30-40, there
may be up to three pumps that are operating at the same time and
the rest of the pumps sit idle. This inefficiency can be
costly.
[0057] Another drawback of a prior dispense system is in its fixed
architecture that cannot be readily modified. The master controller
is generally programmed with a control scheme corresponding to the
type of pump controllers connected thereto. Since the control
scheme is specific to the type of pumps, if a pneumatic pump is
pulled out and replaced with a motor pump, the master controller
will not recognize the motor pump, nor will the master controller
know how to control the motor pump.
[0058] Embodiments of a smart controller disclosed herein can take
the high level functionality out of the pump controllers so they
can share the processing power smartly in order to reduce idle time
and corresponding cost. The low level functionality stays at the
pump head. The distinction between high level functions and low
level functions may be software configurable to customize the
dispense system for a particular implementation. For example, in
some embodiments, the smart controller may send a simple `DISPENSE`
command to a pump head and the pump head has sufficient
intelligence to execute the command and report to the smart
controller when the task is complete. As another example, the smart
controller may give the pump controller (at or local to the pump) a
generic command "DISPENSE RECIPE 4" and the pump controller having
been configured to dispense this particular recipe, performs the
task as instructed. In some embodiments, the pump head may have
only rudimentary or basic functions sufficient to drive a pump
coupled thereto and the smart controller may provide specific
instructions to the pump head in order to perform the task at
hand.
[0059] In some embodiments, the operation of a pump is controlled
by the smart controller using information about a filter that is
connected to the pump. In some embodiments, the filter is a
removable filter disposed in a fluid flow path between a pump inlet
and a pump outlet. The removable filter may implement a quick
change or quick connect mechanism to connect to the pump. In some
embodiments, the smart controller is configured to receive filter
information, receive process fluid information such as a chemical
type, access a library of operating routines (control schemes)
based on the filter information and the process fluid information
to select an operating routine for the pump and operate the pump
according to the selected operating routine. The selected operating
routine can include a priming routine, a dispense cycle, selected
segments of a dispense cycle of other routine.
[0060] FIG. 6 depicts a diagrammatic representation of one example
embodiment of customizable dispense system 600 with smart
controller 610 controlling pneumatic feed pumps 630 at feed stage
601 and pneumatic dispense pumps 640 at dispense stage 602. In this
example, controller 610 is communicatively linked to track 620,
pneumatic feed pumps 630, filters 650, and dispense pumps 640. In
this example, electronic regulator 635 is employed to regulate
pneumatically actuated feed pumps 630 and electronic regulator 645
is employed to regulate pneumatically actuated dispense pumps
640.
[0061] FIG. 7 depicts a diagrammatic representation of one example
embodiment of customizable dispense system 700 with smart
controller 610 controlling pneumatic feed pumps 630 at feed stage
601 and motor-driven dispense pumps 740 at dispense stage 602.
Following the above example, controller 610 is communicatively
linked to track 620, pneumatic feed pumps 630, filters 650, and
dispense pumps 740. In dispense system 700, electronic regulator
635 is employed to regulate pneumatically actuated feed pumps 630.
In this example, smart controller 610 can be configured to control
dispense pumps 740 without an electronic regulator. In some
embodiments, customizable dispense system 700 may nevertheless
include an electronic regulator as a standard component. This
allows for mixing and matching different types of pumps for
dispense pumps 740, if desired, with one or more pneumatic pumps in
dispense pumps 740 connected to the electronic regulator.
[0062] FIG. 8 depicts a diagrammatic representation of one example
embodiment of customizable dispense system 800 with smart
controller 610 controlling motor-driven feed pumps 830 at feed
stage 601 and motor-driven dispense pumps 740 at dispense stage
602. Following the above example, controller 610 is communicatively
linked to track 620, feed pumps 830, filters 650, and dispense
pumps 740. Smart controller 610 can control motor-driven feed pumps
830 and motor-driven dispense pumps 740 in a manner similar to
multi-stage pump 100 described above. In some embodiments,
customizable dispense system 800 may comprise an electronic
regulator for feed stage 601 and an electronic regulator for feed
stage 602 as standard components. This allows for mixing and
matching different types of pumps for feed pumps 830 and dispense
pumps 740, if desired, with one or more pneumatic pumps in feed
pumps 830 connected to the electronic regulator at feed stage 601
and one or more pneumatic pumps in dispense pumps 740 connected to
the electronic regulator at feed stage 602.
[0063] FIGS. 6-8 exemplify the flexibility and versatile of smart
controller 610 which can handle pneumatic feed pumps 630 at feed
stage 601, pneumatic dispense pumps 640 at dispense stage 602,
motor-driven dispense pumps 740 at dispense stage 602, and
motor-driven feed pumps 830 at feed stage 601, as well as various
filters 650. Smart controller 610 provides a plug and play
interface with multiple physical interfaces (ports) for connection
to track 620 and various devices. The same connection line can be
used to communicate with different types of pumps. This
reduces/simplifies wiring for the underlying customizable dispense
system.
[0064] The smart controller may provide proprietary or internally
standardized communication lines to communicate with a variety of
devices, including pneumatic pumps, motor pumps, filters, etc. In
communicating with these devices, the smart controller may identify
each type of device upon connection, look up a corresponding
control scheme, and proceed accordingly. For example, to switch
from communicating with one pump to another, the smart controller
may access an internal or local database for information, including
a control scheme associated with the newly connected pump, and
apply the control scheme accordingly.
[0065] In some embodiments, the smart controller may connect to
filters having electronically readable filter information tags
containing filter information. Some examples of electronically
readable filter information tags may implement the Radio-frequency
identification (RFID) technology. These filters may be of a
removable type implementing a quick change or quick connect
mechanism. In some embodiments, the filter information tags can be
an active or passive RFID tags, bar code or other optically
readable code.
[0066] Radio-frequency identification (RFID) generally has two
parts: readers and tags. Using radio waves, some RFID tags can be
read from several meters away and beyond the line of sight of an
RFID reader. In some embodiments, the range of suitable RFID tags
is intentionally shortened to reduce cross talk of adjacent pumps
reading each other's tags. As an example, in one embodiment, the
range of RFID tags is reduced to about an inch. Other ranges are
also possible, depending upon the distance and/or arrangement of
RFID reader(s) and tag(s). FIG. 10 shows example filters 950a with
RFID tags 952a and example filters 950b with RFID tags 952b. In
some embodiments, RFID tags may be directly affixed on or embedded
with the filters. In some embodiments, RFID tags may not need to be
physically attached to the filters. RFID technology is known to
those skilled in the art and thus is not further described
herein.
[0067] Examples of filter information may include, but are not
limited to, part number, design style, membrane type, retention
rating, generation of the filter, configuration of the filter
membrane, lot number, serial number, a device flow, membrane
thickness, membrane bubble point, particle quality, filter
manufacturer quality information or other information. The design
style indicates the type of pump for which the filter is designed,
the capacity/size of the filter, amount of membrane material in the
filter or other information about the design of the filter. The
membrane type indicates the material and/or thickness of the
membrane. The retention rating indicates the size of particles that
can be removed with a particular efficiency by the membrane. The
generation of the filter indicates whether the filter is a first,
second, third or other generation of the filter design. The
configuration of the filter membrane indicates whether the filter
is pleated, the type of pleating or other information regarding the
design of the membrane. The serial number provides the serial
number of the individual filter. The lot number can specify the
manufacturing lot of the filter or membrane. The device flow
indicates the flow rate the filter can handle while still producing
good dispenses. The device flow can be determined during
manufacture for the individual filter. The membrane bubble point
provides another measure of the flow rates/pressure the filter can
handle and still produce good dispenses. The membrane bubble point
can also be determined during manufacture for the individual
filter. The above examples are provided by way of explanation are
not limiting of the information that can be contained in the filter
information.
[0068] The part number contained in the filter information can
convey a variety of information. For example, each letter in the
example part number format "Aabcdefgh" can convey a different piece
of information. Table 1 below provides an example of information
conveyed by the part number:
TABLE-US-00001 TABLE 1 Letter Information Examples A Connectology a
Design Style --Indicates For IntelliGen Pump the type of pump for
Filters: which the filter is P = wide body pump designed.
(IntelliGen1 or IntelliGen2) 2 or M = IntelliGen3 or IntelliGen
Mini Pump b Membrane Type--Type of A = thin UPE Membrane Used in
Filter U = thick UPE S = asymmetric nylon and UPE or other
combination) M = PCM (chemically modified UPE) N = nylon c
Retention Rating G = 0.2 um V = 0.1 um Z = 0.05 um Y = 30 nm X = 20
nm T = 10 nm F = 5 nm K = 3 nm d Generation--generation of 0 = V1
filter 2 = V2 e RFID R = RFID f Pleat--Type of Pleating 0 =
Standard Used in Filter M = M pleat g Where O-Ring is Located 0 =
OM K = Karlez E = EPDM R = O-ringless h How Many Filters in a 1 = 1
per box Box 3 = 3 per box
[0069] Using the example of Table 1, the part number A2AT2RMR1 for
an Impact pump filter would indicate that the connectology of the
filter, the filter is designed for an IntelliGen2 Pump (Impact and
IntelliGen are trademarks of Entegris, Inc. of Chaska, Minn.), the
membrane is thin UPE, has a retention rating of 10 nm, the filter
is a version 2 filter, the filter includes an RFID tag, the filter
membrane has an M-pleat, the filter is O-ringless and there is one
filter per box. The use of a part number to convey information,
however, is provided by way of example and filter information can
be conveyed in other manners.
[0070] Other suitable filters may also be connected to the smart
controller for various purposes. For example, an earlier version of
a smart filter may need to be swapped out and replaced with a newer
version. This may be done as simple as pulling the old smart filter
out and plugging in the replacement in its place. A set of rules
can be applied to the filter information to determine if the filter
is appropriate. The rules for determining whether a filter is
appropriate can depend on the filter information and other factors,
such as the process fluid, environmental properties, required cycle
time or other factors. For example, a rule may be applied such
that, if the process fluid has a certain viscosity, a filter will
only be considered appropriate if it has a specific part number or
certain part number and bubble point. Thus, the rules applied can
depend on multiple pieces of filter information and other
information. If the filter is not an appropriate filter, a
corresponding action can be taken. Otherwise, operation of the pump
can proceed.
[0071] Smart filters may play an important role in various
semiconductor manufacturing processes that are sensitive to defects
in printed patterns, especially those processes involving very
small, microscopic or submicron feature sizes. Some existing
dispense systems filter at a negative pressure. Some existing
dispense systems are able to monitor and perhaps passively maintain
the pressure needed for the filtration. However, prior dispense
systems are not known to have the ability to accurately and
precisely control the pressure needed for the filtration.
[0072] Some embodiments disclosed herein may control and maintain a
positive pressure in a pump head at the inlet of the pump on the
dispense side to reduce defect-causing bubbles. For a motor pump,
this positive pressure can be controlled by motor movements and by
a feedback loop to a pressure transducer. For example, to provide a
5 psi positive pressure, an upstream electronic regulator may be
set to provide 10 psi in the first stage and a downstream
electronic regulator may be set to provide 5 psi in the second
stage. This pressure differential pushes the fluid across the
filter to the dispense side.
[0073] In a pneumatic pump set up, a pressure transducer is placed
in the fluid path to detect the actual fluid pressure. Based on
information from the smart filters, the smart controller can infer
what the actual filtration rate is for a particular filter and
control that filtration rate accordingly. This allows a user to set
a desired filtration rate, in addition to setting the downstream
pressure. The upstream pressure can be adjusted to get the desired
target rate across the filter.
[0074] As an example, a filtration rate for a pneumatic to
pneumatic pump set up can be calculated as follows: [0075] A user
enters the viscosity of a chemical (FV) for a pneumatic dispense
pump. [0076] The user enters a desired filtration pressure setpoint
(FP) for an RFID filter fluidly connected to the pump. In some
cases, FP may be set to 4 psi. In some cases, FP may be set to from
about 2 psi to about 10 psi. [0077] The user enters a desired
filtration rate (FR) for filtering the chemical. FR may be set to
from about 0.2 cc per sec. to about 1 cc per sec. and perhaps
higher in some cases. [0078] The controller gets a filter flow rate
(FLR) from an RFID tag off of a filter. The information provided by
the RFID tag may include the type of filter and the current flow
rate of the fluid flowing through the filter. [0079] The controller
has a resistance constant (FC) stored in the firmware. [0080] The
controller calculates a filter resistance (R), where R=FC/FLR.
[0081] At this point, the controller has all the information needed
to calculate the upstream pressure (UFP), where UFR=(R*FR*FV)+FP.
UFP is needed to obtain the filtration rate desired by the user.
[0082] The controller sets the first stage fluid pressure to UFP
and sets the second stage fluid pressure to FP. [0083] The isolate
and barrier valves open. [0084] Filtration occurs at the given
filtration rate. [0085] When filtration is complete, the 1st stage
fluid pressure will raise from FP to UFP. [0086] The raising
pressure signals the end of filtration.
[0087] As a specific example, a user may desire a filtration rate
of 1.5 cc per sec. and a downstream pressure of 4 psi on the
dispense pump for filtering a fluid having a viscosity of 3
Centipoise (cps). Suppose R=1.55, UFR=10.98 psi. If the pressure
regulator for the feed pump is set at 10.98 psi and the pressure
regulator for the dispense pump is set at 4 psi, the movement of
fluid is caused by the differential pressure across the filter
which in this example causes the fluid to move from the feed side
to the dispense side at a flow rate of 1.5 cc per sec through the
filter. That flow rate will continue until it does not need any
more fluid. At that time, the dispense pump diaphragm will bottom
out and the pressure regulator for the dispense pump will no longer
be able to maintain the 4 psi setpoint. The pressure at the second
stage then begins to drift towards the 10.98 psi setpoint. Once
that drift begins to occur, it signifies the end of filtration and
the dispense pump can move away from filtration and go to the next
step in the cycle. One reason that this is possible is because a
pressure transducer is placed in the fluid path. If the pressure
transducer is only placed in the pneumatic path, a change in the
fluid pressure may not be detected.
[0088] FIG. 9 depicts a diagrammatic representation of one example
embodiment of customizable dispense system 900 with a pneumatic to
pneumatic pump set up for feed stage 901 and dispense stage 902. In
this example, feed pump 930a and feed pump 930b are physically
combined as a unit, but each operates independently from one
another, is independently controlled by an embodiment of a smart
controller disclosed herein (see FIG. 6), and has fluidic
connections with respective sets of bottles 970a, 970b containing
chemicals for a particular dispense application. Advantageously,
this configuration can provide cost savings and high throughput due
to simultaneous dispense. Likewise, dispense pump 940a and dispense
pump 940b are physically combined as a unit, but each operates
independently from one another, is independently controlled by the
smart controller, and has fluidic connections with respective
filters 950a, 950b, purge lines, and dispensing (outlet) valves
leading to dispensing points. In some embodiments, the outlet
valves may include stop/suckback valves (SSBVs). The outlet valves
which may be connected to airborne molecular contamination or other
molecular or chemical monitoring/detection devices. A control
amount of fluid containing processing chemicals is applied
(dispensed) onto a wafer through a dispense nozzle at a dispense
point. The rates at which processing chemicals are applied to the
wafer must be controlled in order to ensure that the processing
liquid is applied uniformly. The thickness of the coating across
the surface of the wafer is typically measured in angstroms.
[0089] The dispense nozzle is generally at atmosphere. Preferably,
the level of pressure at the dispense nozzle remains
undisturbed--no high pressure, no vacuum, no spikes. Placing the
pressure transducer in the fluid path in a pneumatic to pneumatic
set up may ensure that the inlet of the dispense pump has a
positive pressure and that the positive pressure is accurately
controlled at all time, without having to make any assumptions. A
pressure transducer is a type of sensor that can generate a signal
as a function of the pressure imposed. Many suitable pressure
transducers may be used in this set up. In some embodiments, the
positive pressure may be in the range of 0 to about 12 psi. In some
embodiments, the positive pressure may be in the range of about 2
to 10 psi.
[0090] FIGS. 10-15 illustrate pump control and sequence operation
of one example embodiment of customizable dispense system 1000 with
a pneumatic to pneumatic pump configuration for feed stage 901 and
dispense stage 902. In this example embodiment, customizable
dispense system 1000 may comprise various valves, including inlet
valves, isolate valves, vent valves, barrier valves, purge valves,
and outlet valves, which have similar functions as respective
valves described above with reference to multi-stage pump 100.
Further, in this example, electronic regulator 935 is utilized to
independently regulate pneumatic actuation of feed pumps 930a, 930b
and electronic regulator 945 is utilized to independent regulate
pneumatic actuation of dispense pumps 940a, 940b. In this example
embodiment, customizable dispense system 1000 may further comprise
smart filter 950a with RFID tag 952a, smart filter 950b with RFID
tag 952b, PCB 961, and PCB 962. Since, in this example, two pumps
are physically combined as a unit, a printed circuit board (PCB) is
coupled to the unit and the smart controller to run, per an
instruction from the smart controller, one of the pumps or both
pumps at the same time.
[0091] FIG. 11 illustrates example fill and dispense sequence 1100
where chemicals are drawn from bottles 970a into feed pump 930a.
For the sake of simplicity, feed pump 930b and dispense pump 940b
and components/connections associated therewith are not shown in
FIGS. 11-15. Feed pump 930b and dispense pump 940b can have the
same or similar pump control and sequence operation described
herein with reference to respective feed pump 930a and dispense
pump 940a.
[0092] Filter 950a can have tag 952a. In operation, a tag reader
(not shown) can read filter information from tag 952a and
communicates the filter information to the smart controller (see
FIG. 6). The smart controller can process the filter information
and apply rules to the filter information to determine whether and
how to operate feed pump 930a and dispense pump 940a, including
controlling the fill pressure, monitoring a fluid pressure profile,
and generating alarm(s) for excursion(s). Additionally, the smart
controller can adjust the operation of customizable dispense system
1000 during a dispense cycle based on the filter information
obtained from tag 952a.
[0093] The smart controller can also use the filter information to
correlate good or bad operations to filter characteristics. During
operation, the smart controller can track a variety of operational
data for customizable dispense system 1000. The information tracked
by the smart controller can include any operational parameters made
available to the smart controller and any information calculated by
the smart controller. Some non-limiting examples of operational
data may include pressure, parameters related to valve operations,
motor positions, motor speeds, hydraulic pressure or other
parameters (such as temperature if the pump includes temperature
sensors). This information can be used to determine whether a
dispense is/was a good dispense. This can be done after the
dispense has occurred or in real time during the dispense
cycle.
[0094] The operational data can be correlated to the filter
information so that the effect of the various filter parameters on
dispense quality can be identified. As an example, the smart
controller can record the lot number of a filter so that
operational data of customizable dispense system 1000 can be
correlated to that lot. This information can be used to identify
whether a particular lot of filters produced better or worse
results compared to another lot of filters of the same design.
Similarly, the serial number can be used to track operational data
versus individual filter to help determine if an individual filter
was the cause of bad coatings. As yet another example, operational
data can be correlated to membrane bubble points to determine if
filters having the same part number but different membrane bubble
points had different dispense results. Recording information from
tag 952a and tracking information about dispenses can optimize
selection and even manufacture of filters.
[0095] FIG. 12 illustrates example filtration sequence 1200. As
discussed above, smart filters may play an important role in
various semiconductor manufacturing processes. As a specific
example, suppose the first stage fluid pressure setpoint is set to
10 psi and the second stage fluid pressure setpoint is set to 8
psi, the delta between the two setpoints is 2 psi. This delta in
pressure (.DELTA.P) pulls the fluid across the filter. The filter
is a sealed type, so there is no loss in pressure when the fluid is
pushed across it. Depending upon the flow rate and the resistance
of the filter, pressures in the two stages eventually reach
equilibrium over time and filtration ends. Previously, when that
end actually occurs is not precisely known in a pneumatic to
pneumatic set up. In some embodiments, a pressure transducer can be
positioned in the fluid path to provide timely and accurate
information to the pump, so it can move on to the next step without
having to wait unnecessarily. Using the set up shown on FIG. 10 as
an example, the fluid diaphragm on the dispense side eventually
bottoms out and no more fluid can go into the pump. Meanwhile, the
bottle drawer at the feed stage continues to try to push the fluid
through to the dispense side, causing the fluid pressure at the
dispense side to rise, eventually ramp up to 10 psi, signaling the
end of filtration. In a pneumatic to pneumatic set up, this
pressure is detected by the pressure transducer placed in the fluid
path. Again, the flow rate is controlled via coordination with the
dispense stage. At the dispense stage, downstream pressure can be
controlled so that the lowest defects could be produced. Further,
the end-of-filtration sensing can enable the best possible
throughput for the underlying customizable dispense system as the
system does not have to wait a predetermined time period and can go
ahead and proceed to get ready for the next dispensing cycle.
[0096] In a mix and match system, the bottle drawer may utilize
motor pump(s) to pull the fluid(s) from the bottle(s). A negative
pressure may be applied (via an upstream electronic regulator) to
pull the fluid(s) from the bottle(s) into the fluid reservoir in
the first stage. Using a motor pump may have the benefit of a finer
level of controls with respect to rate of the fluid and pressure.
In some embodiments, a pneumatic pump may be utilized at a lower
cost. Thus, in some embodiments, the positive pressure control
scheme described above is not limited to a pneumatic to pneumatic
set up and may be implemented in a motor to motor set up or a motor
to pneumatic set up. The bottle could also be pressurized, and the
feed stage used to control the rate at which chemical fills, and
also determine when the fill is complete.
[0097] In addition to the dispense cycle, the smart controller may
be configured to perform other operations. For example, when a new
filter is connected to a pump, the filter should be primed so that
the filter membrane is fully wetted prior to running a dispense
cycle. An example priming routine may be as follows. First, fluid
is introduced into the dispense chamber. The filter can be vented
for a period of time to remove air bubbles from the upstream
portion of the filter. Next, a recirculating purge segment may
occur. An example recirculating purge sequence 1300 is shown in
FIG. 13. Recirculating purge can remove the bubbles without
chemical waste, in addition to being important for priming the
filter in an efficient manner. In a purge-to-vent segment that
follows, the isolate and purge valves are opened and the barrier
valve is closed. The fluid is directed out of the dispense chamber
and through the vent. This can be followed by a filtration segment,
a vent segment, and a purge segment, after which the filter can be
pressurized and the barrier valve and vent valve can be closed,
while the isolate valve is opened and fluid at the feed stage is
pressurized. A forward flush segment may occur in which fluid is
run through the filter to the dispense chamber and purged out the
purge valve. A purge-to-vent segment may occur again. The priming
routine can be repeated as needed or desired.
[0098] The pumps in a customizable dispense system may be primed
based on the type of filter and process fluid used. Thus, while the
foregoing provides an example priming routine, other priming
routines can be used as would be understood by those of ordinary
skill in the art. A suitable priming routine can involve any number
of different steps and to ensure that the filter membrane is fully
wetted. Some non-limiting examples of sequences of segments that
can be used in a priming routine include, but are not limited to:
I) a fill segment, a vent segment; ii) a fill segment, a
purge-to-vent segment, a filtration segment, a vent segment, a
purge-to-inlet segment; iii) a dispense segment, a fill segment, a
filtration segment and a purge segment. FIG. 14 illustrates example
fill segment 1400 in which customizable dispense system 1000 is
ready for the next dispense. FIG. 15 illustrates example vent
segment 1500 in which customizable dispense system 1000
automatically vents to remove bubbles when they are detected
through pressure monitoring, thus preventing gas from redissolving
under pressure. Additional or alternative segments can be used in
priming routines as needed or desired.
[0099] As discuss above, in some embodiments, a customizable
dispense system may include one or more units of physically
connected pumps. With the help of a PCB, the smart controller can
communicate with these pumps via a single line/port/physical
interface per unit. However, since the pumps are not physically
integrated, each of the pumps still requires a full set of tubing
and parts. In some embodiments, a customizable dispense system
disclosed herein may include integrated pumps with simplified
wiring/tubing requirements.
[0100] FIG. 16 depicts a diagrammatic representation of one example
embodiment of integrated pump 1600 with two pneumatic pumps
physically integrated as a unit. In integrated pump 1600, two
pneumatic pumps (Pump 1, Pump 2) share fluid plate 1610 which is
sandwiched between front plate 1611 and end late 1612. As a
non-limiting example, the fluid plate may be made out of a
polymeric material such as polytetrafluoroethylene (PTFE) or some
other suitable material. As a specific example, a fluid plate may
be 4'' tall, 4'' wide, and 1/4'' thick. Both sides of the fluid
plate may be machined or otherwise shaped to create a dish, recess,
or concave surface. In this example, each of the pneumatic pumps
has an end plate that couples to one side of the fluid plate to
form a cavity or space for holding a fluid therein. Diaphragms
1621, 1622 may be independently pneumatically actuated to direct
fluids 1601, 1602 in or out of integrated pump 1600. A fittings
plate may be sandwiched between the end plates to provide fluidic
connections between the fluid spaces and fittings. As a
non-limiting example, the end plates may be made out of metal.
Other suitable materials such as plastic may also be used.
Referring to FIG. 6, suppose feed pumps 630 comprise a plurality of
integrated pumps 1600, each unit of which has a single control
board connected thereto. Customizable dispense system 600 in this
example can readily increase its operation capacity and
capabilities without having to rewire each of feed pumps 630.
[0101] FIG. 17 depicts a diagrammatic representation of one example
embodiment of integrated pump 1700 with four pneumatic pumps (Pump
1 for Fluid 1701, Pump 2 for Fluid 1702, Pump 3 for Fluid 1703,
Pump 4 for Fluid 1704) physically integrated as a unit. The smart
controller can control these pumps via a single
line/port/interface. Each pump has a fluid side and a pneumatic
side. These pumps share certain parts, including center plate 1710,
front plate 1711, end plate 1712, fluid plate 1721, and fluid plate
1722. In some embodiments, they can also share a fittings plate and
fittings, including fluid fittings and pneumatic fittings.
[0102] FIG. 18 depicts a perspective top view of one example
embodiment of integrated pump 1800. In this example, Pump 1 and
Pump 2 of integrated pump 1800 share fluid plate 810, front plate
1811, end plate 1812, fittings plate 1860, fluid fittings 1885, and
pneumatic fittings 1895.
[0103] FIG. 19 depicts an exploded view of one example embodiment
of integrated pump 1900. For the sake of simplicity, only one
pneumatic pump is shown. Pneumatic pumps of integrated pump 1900
may share certain parts as described above with reference to FIGS.
16-18. In this example, integrated pump 1900 comprises fluid plate
1910, valve plate 1911, end plate 1912, diaphragm 1922 sandwiched
between valve plate 1911 and fluid plate 1910, o-rings 1980
positioned between diaphragm 1922 and valve plate 1911, and
fasteners 1990 holding together fluid plate 1910, valve plate 1911,
end plate 1912, and diaphragm 1922. O-rings 1980 may be partially
seated. Diaphragm 1922 may be made of a sheet of elastomeric
material, PTFE, modified PTFE, a composite material of different
layer types or other suitable material that is preferably
non-reactive with the process fluid. In one embodiment, diaphragm
1922 can be approximately 0.013 inches thick. Fluids may be
directed into and out of integrated pump 1900 through fluid
fittings 1985 which may connect to fluid channels through top
support plate 1970 and fittings plate 1960. Diaphragm 1922 may be
pneumatically actuated via pneumatic fittings 1995. The
displacement volume of the fluid in the cavity (fluid side) may
vary with the amount of pressure/vacuum applied to diaphragm 1922.
This pressure may be measured via pressure nut 1950.
[0104] As those skilled in the art can appreciate, the number of
pumps as well as the type of pumps that can be combined in this way
is not limited to what is shown in the drawings accompanying this
disclosure. For example, motor driven pumps may also be combined:
by forming two or more bore holes--one for each pump--in a single
block, by bolting together two or more rolling diaphragm pumps with
a single control board, etc. In some cases, practical
considerations such as complexity involved in combining the pumps
and benefits that may be provided by such a combination may
influence the number of pumps to be combined. For example, using
two separate pumps in a dispense system may cost X and combining
two pumps may cost a fraction of X. Coming four pumps, however, may
increase that fraction of X. As the number of pumps to be combined
continues to increase, so does the challenges, which diminishes the
value in combining them. There may be a point where that fraction
of X is sufficiently close to X so as to render negligible the
saving from combining the pumps.
[0105] Combining pumps that may be operated independently can
provide many advantages. For example, the integrated pumps may
require a smaller foot print than the total foot print of separate
pumps. Additionally, the integrated pumps may simplify
wiring/cabling, thereby reducing the
installation/configuration/maintenance time. Furthermore, the
integrated pumps may reduce the cost of the overall system, at
least due to the sharing of materials in each unit of the
integrated pumps.
[0106] Although embodiments of a modular, flexible, smart,
cost-effective, and high-performance dispense system have been
described in this disclosure, one of ordinary skill in the art can
appreciate that various modifications and changes can be made
without departing from the spirit and scope of the specific
embodiments disclosed herein. Those skilled in the art will
appreciate that features and aspects disclosed herein may be
independently implemented or in various combinations. Accordingly,
the specification and figures disclosed herein, including in the
accompanying appendices, are to be regarded in an illustrative
rather than a restrictive sense, and all such modifications are
intended to be included within the scope of this disclosure.
Therefore, the scope of the present disclosure should be determined
by the following claims and their legal equivalents.
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