U.S. patent application number 13/710816 was filed with the patent office on 2013-04-25 for trench mos device with schottky diode and method for manufacturing same.
This patent application is currently assigned to DIODES INCORPORATED. The applicant listed for this patent is Chiao-Shun Chuang. Invention is credited to Chiao-Shun Chuang.
Application Number | 20130099310 13/710816 |
Document ID | / |
Family ID | 44081188 |
Filed Date | 2013-04-25 |
United States Patent
Application |
20130099310 |
Kind Code |
A1 |
Chuang; Chiao-Shun |
April 25, 2013 |
Trench MOS Device with Schottky Diode and Method for Manufacturing
Same
Abstract
In one embodiment the present invention includes a semiconductor
device. The semiconductor device comprises a first semiconductor
region, a second semiconductor region and a trench region. The
first semiconductor region is of a first conductivity type and a
first conductivity concentration. The trench region includes a
metal layer in contact with the first semiconductor region to form
a metal-semiconductor junction. The second semiconductor region is
adjacent to the first semiconductor region that has a second
conductivity type and a second conductivity concentration. The
second semiconductor region forms a PN junction with the first
semiconductor region, and the trench region has a depth such that
the metal-semiconductor junction is proximate to the PN
junction.
Inventors: |
Chuang; Chiao-Shun;
(Kaohsiung City, TW) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Chuang; Chiao-Shun |
Kaohsiung City |
|
TW |
|
|
Assignee: |
DIODES INCORPORATED
Plano
TX
|
Family ID: |
44081188 |
Appl. No.: |
13/710816 |
Filed: |
December 11, 2012 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12630088 |
Dec 3, 2009 |
8368140 |
|
|
13710816 |
|
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Current U.S.
Class: |
257/330 |
Current CPC
Class: |
H01L 29/66734 20130101;
H01L 29/7827 20130101; H01L 29/7806 20130101; H01L 29/41766
20130101; H01L 27/0727 20130101; H01L 29/1095 20130101; H01L
29/66727 20130101; H01L 29/7813 20130101 |
Class at
Publication: |
257/330 |
International
Class: |
H01L 29/78 20060101
H01L029/78 |
Claims
1. A semiconductor device comprising: a first trench having a first
top opening at a top surface of the semiconductor device and
sidewalls lined with a layer of first dielectric material of a
first thickness and filled with a conductive material and covered
with a layer of a second dielectric material; the second dielectric
material having a second thickness greater than the first
thickness; the layer of second dielectric material extending over a
portion of the top surface adjacent to the top opening; a second
trench having a second top opening at a surface distant from the
top surface by the second thickness and a bottom terminated at a
first semiconductor region, the second trench filled with a
metallic element; and a metal semiconductor junction between the
metallic element and the first semiconductor region, a portion of
the junction being a Schottky junction.
2. The semiconductor device of claim 1 further comprising a second
semiconductor region boarded by the first, the second trench, and
the second dielectric material, and doped more heavily with dopant
of a first polarity than of a second polarity opposite the first
polarity.
3. The semiconductor device of claim 2, in which the Schottky
junction is formed between the metallic element and a region of
semiconductor doped with dopant of the first polarity.
4. The semiconductor device of claim 3, further comprising a third
semiconductor region boarded by the layer of the first dielectric
material, the second trench, and the second semiconductor region,
and doped more heavily with dopant of the second polarity than of
the first polarity, and when under a biasing condition forms an
inversion layer in the third semiconductor region adjacent the
layer of the first dielectric material.
5. The semiconductor device of claim 4, in which the third
semiconductor region forms a p-n junction near the bottom of the
second trench.
6. The semiconductor device of claim 5, in which the p-n junction
meets the Schottky junction.
7. The semiconductor device of claim 1, in which the second trench
reaches deeper into the device than the second trench.
8. The semiconductor device of claim 4, further comprising a trench
MOS device with the third semiconductor region as the body region
of the MOS device.
9. The semiconductor device of claim 1, in which the second
dielectric material is suitable as an etch mask for forming the
second trench.
10. The semiconductor device of claim 1, in which the metallic
element extends over the second trench and covers a top portion of
the second dielectric material layer.
11. The semiconductor device of claim 4, in which the second trench
has a sidewall portion below the second dielectric material layer
and the metallic element makes contact with the second and third
semiconductor regions only at the sidewall portion.
Description
BACKGROUND
[0001] The present invention relates to trench
metal-oxide-semiconductor (MOS) devices, and in particular, to
trench MOS devices with Schottky diode and method for manufacturing
same.
[0002] Unless otherwise indicated herein, the approaches described
in this section are not prior art to the claims in this application
and are not admitted to be prior art by inclusion in this
section.
[0003] Trench MOS devices are typically employed as transistors in
power integrated circuits. Trench MOS devices may be manufactured
in parallel with conventional PN diodes in order to decrease the
turn-on voltage of the device when forward biased. The threshold of
the MOS transistor may be designed to be much less than the 0.6V
turn-on voltage of the typical PN junction. The reduction in
turn-on voltage translates into a smaller voltage drop for any
given current and therefore, an overall power savings for the
device.
[0004] In rectifier applications, the trench MOS devices may
typically have a slow switching response time such that the PN
junction may be fully biased at 0.6V for a portion of time prior to
the trench MOS device responding and reducing the forward voltage.
The higher the frequency of the switching, the more pronounced this
characteristic may be and more power may be wasted.
[0005] Thus, there is a need for improved trench MOS devices. The
present invention solves these and other problems by providing
trench MOS devices with Schottky diode and methods for
manufacturing same.
SUMMARY
[0006] In one embodiment the present invention includes a
semiconductor device. The semiconductor device comprises a first
semiconductor region, a second semiconductor region and a trench
region. The first semiconductor region is of a first conductivity
type and a first conductivity concentration. The trench region
includes a metal later in contact with the first semiconductor
region to form a metal-semiconductor junction. The second
semiconductor region is adjacent to the first semiconductor region
that has a second conductivity type and a second conductivity
concentration. The second semiconductor region forms a PN junction
with the first semiconductor region, and the trench region has a
depth such that the metal-semiconductor junction is proximate to
the PN junction.
[0007] The following detailed description and accompanying drawings
provide a better understanding of the nature and advantages of the
present inventions.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] FIG. 1 illustrates a semiconductor device according to one
embodiment of the present invention.
[0009] FIG. 2A-C illustrates a method for manufacturing a
semiconductor device according to one embodiment of the present
invention.
[0010] FIG. 3 illustrates cross section of a semiconductor device
having a plurality of trench MOS devices and Schottky diodes
according to one embodiment of the present invention.
DETAILED DESCRIPTION
[0011] Described herein are techniques for trench MOS devices with
Schottky diodes and method for manufacturing same. In the following
description, for purposes of explanation, numerous examples and
specific details are set forth in order to provide a thorough
understanding of the present invention. It will be evident,
however, to one skilled in the art that the present invention as
defined by the claims may include some or all of the features in
these examples alone or in combination with other features
described below, and may further include modifications and
equivalents of the features and concepts described herein.
[0012] FIG. 1 illustrates a semiconductor device 100 according to
one embodiment of the present invention. Semiconductor device 100
may function as a rectifier passing current in a forward biased
state and blocking current in a reverse biased state. Semiconductor
device 100 includes trench 129 integrated between trench MOS device
102 and trench MOS device 103. Trench 129 may be filled with a
metal to form a Schottky diode 101 at the bottom of the trench as
described in more detail below. Trench MOS devices 102 and 103
provide a reduced turn-on voltage in the forward bias state, and
Schottky diode 101 provides a reduced turn-on voltage during
transitions to the forward bias state. Power may be conserved both
in the forward bias state and transitions to the forward bias state
by maintaining a low turn-on voltage.
[0013] Trench MOS device 102 passes current in the forward bias
steady state. P+ semiconductor region 109 may have a concentration
greater than P- semiconductor region 111, and may, therefore,
establish a better contact with metal layer 128. Metal layer 128
may be coupled to an anode terminal of semiconductor device 100.
When forward biased, current may flow from P+ semiconductor region
109 to P- semiconductor region 111. PN junction 131 may be forward
biased and current may flow from P- semiconductor region 111 to
n-epi region 115. Substrate 116 may receive this current and may be
coupled to a cathode terminal of the semiconductor device 100. P-
extension region 113 may modify the locations of PN junctions
131.
[0014] Trench MOS device 102 is configured to provide a reduction
in turn-on voltage. PN junction 131 may have a turn-on voltage of
0.6V which may be reduced by low threshold MOS devices located in
parallel to the junctions. Trench MOS device 102 includes N+
regions 106, P- regions 109 and 111, n-epi region 115, gate 134.
Gate 134 may include a conductive material such as polysilicon.
When biased greater than the threshold, gate 134 may create an
inversion layer within P- region 111. This inversion layer may be
located along the side portion of gate 134 beyond dielectric layer
114. This inversion layer may be initiated at a low threshold of
less than 0.2V and may provide a reduction in turn-on voltage.
[0015] Trench MOS device 103 operates similarly to trench MOS
device 102. Trench MOS device 103 includes gate 135, N+
semiconductor regions 118, inter-layer dielectric (ILD) 120, P+0
semiconductor regions 121, P- semiconductor regions 123, P-
extension regions 125, gate oxide layer 127, n-epi region 115, n+
substrate 116, and metal layer 128 which correspond to gate 134, N+
semiconductor region 106, inter-layer dielectric (ILD) 107, P+
semiconductor region 109, P- semiconductor region 111, P- extension
region 113, gate oxide layer 114, n-epi region 115, n+ substrate
116, and metal layer 128 of trench MOS device 102.
[0016] Schottky diode 101 provides a fast switching diode with a
low threshold which may reduce the turn-on voltage during
transitions. Semiconductor device 100 may switch as a rectifier and
the low threshold MOS devices in parallel with the PN junctions may
not respond quickly enough. The turn-on voltage of Schottky diode
101 may be a few tenths of a volt and may have a quick response
time. Schottky diode 101 is formed between the metal-semiconductor
junction between n-epi region 115 and metal layer 128. The location
of Schottky diode 101 may aid in reducing the turn-on voltage of
semiconductor device 100 during transitions.
[0017] Width 139 of Schottky diode 101 may be adjusted by P-
extension regions 113 and 125. The wider the P- extensions 113 and
125 become, the smaller the width 139 of Schottky diode 101. Width
139 may be reduced to improve the reverse leakage. Reduction in
width 139 may also increase the turn-on voltage characteristic of
Schottky diode 101.
[0018] Trench region 129 has a depth 136 which places Schottky
diode 101 proximate with PN junctions 131 and 132. PN junction 131
curves upward from an intersection with a lower side of trench 104
to an intersection with the bottom of trench 129. P- extension 113
adjusts the placement of the intersection of PN junction 131 with
trench 129 and P- semiconductor region 111 defines the intersection
of PN junction 131 with trenches 104 and 129. The width of P-
semiconductor region 111 as well as the depth 16 may influence
current flow and speed at which Schottky 101 may reduce the turn-on
voltage during transitions.
[0019] Semiconductor device 100 may also include additional trench
MOS devices 140-141. Trench MOS devices 140 and 141 may be formed
as complimentary structures to trench MOS devices 102 and 103,
respectively, and function in a similar manner. Trench MOS device
140 includes gate 134, N+0 semiconductor regions 105, inter-layer
dielectric (ILD) 107, P+ semiconductor region 108, P- semiconductor
regions 110, P- extension regions 112, gate oxide layer 114, n-epi
region 115, n+ substrate 115, and metal layer 128 which correspond
to gate 134, N+ semiconductor region 106, inter-layer dielectric
(ILD) 107, P+ semiconductor region 109, P- semiconductor region
111, P- extension region 113, gate oxide layer 114, n-epi region
115, n+ substrate 116, and metal layer 128 of trench MOS device
102. P- extension 112 also may contribute to the width of Schottky
diode 137. PN junction 130 may be proximate to Schottky diode
137.
[0020] Trench MOS device 141 includes gate 135, N+ semiconductor
regions 119, inter-layer dielectric (ILD) 120, P+ semiconductor
region 122, P- semiconductor regions 124, P- extension regions 126,
gate oxide layer 127, n-epi region 115, n+ substrate 116, and metal
layer 128 which correspond to gate 135, N+ semiconductor region
118, inter-layer dielectric (ILD) 120, P+ semiconductor region 121,
P- semiconductor region 123, P- extension region 125, gate oxide
layer 127, n-epi region 115, n+ substrate 116, and metal layer 128
of trench MOS device 103. P- extension 126 may contribute to the
width of Schottky diode 138. PN junction 133 may be proximate to
Schottky diode 138.
[0021] FIG. 2A-C illustrates a method 200 for manufacturing a
trench MOS device according to one embodiment of the present
invention.
[0022] At 201, mask oxide 210 may be deposited on the surface of a
n-epi region 214 residing atop a n-type substrate region 215. A
chemical vapor deposition (CVD) process may be used to deposit mask
oxide 210. A trench photo is used to make openings 211 in mask
oxide 210. P type material 212-213 may be implanted in two steps by
first providing a high energy implant 212 followed by a lower
energy implant 213. At 202, the P-body may be driven to for P-
semiconductor regions 216 and 217 within n-epi region 214.
[0023] At 203, trenches 218 and 219 may be etched into P-
semiconductor regions 216 and 217 to a depth deeper than the depth
of the P regions 216/217. Trench 218 splits P- semiconductor region
216 into region 216a and 216b. Trench 219 splits P- semiconductor
region 217 into region 217a and 217b. The mask oxide 210 has been
removed and gate oxide 220 may be added. At 204, polysilicon may be
added and then etched back to form gates 220 and 221. At 205, a
source photo mask 222 may be used to provide source implant. After
driving-in the source implant, N+ semiconductor regions 223-226 may
result.
[0024] At 206, A CVD process may be used to provide ILD regions 227
and 228. Additionally, a contact photo may be used to etch through
the ILD. A P+ semiconductor regions 229-231 may be formed by adding
P+ implant and driving-in the implant.
[0025] At 207, trenches 232-234 are etched. Trench 233 has a depth
d and a width w. Trenches 232 and 234 may also have a similar depth
and width. The etching may be deeper than, and cut through, P+
region 229-231. This may result in P+ regions 229b, 230a, 230b, and
231a. At 208, and implant of P- material may be added to form P-
extension regions 235-238. At 209, metal layer 239 is added and a
metal semiconductor junction is formed at location 240-242.
[0026] FIG. 3 illustrates cross section of semiconductor device 300
using a plurality of trench MOS devices (e.g. MOS devices 305-312)
according to one embodiment of the present invention. Semiconductor
device 300 includes diodes 301-304. Diode 301 includes Schottky
diode 317 integrated within trench 313 and located between trench
MOS devices 305 and 306. Diode 302 includes Schottky diode 318
integrated within trench 314 and located between trench MOS devices
307 and 308. Diode 303 includes Schottky diode 319 integrated
within trench 315 and located between trench MOS device 309 and
310. Diode 304 includes Schottky diode 320 integrated within trench
316 and located between trench MOS devices 311 and 312.
Semiconductor device 300 uses a plurality of trenches to place a
plurality of Schottky diodes (e.g. Schottky diodes 317-320) and MOS
devices (e.g. trench MOS devices 305-312) in parallel with a
plurality of PN junctions in order to reduce the turn-on voltage of
diodes 301-304 in a forward bias state and during transitions to
the forward bias state. Power may be conserved both in the forward
bias state and transitions to the forward bias state by maintaining
a low turn-on voltage.
[0027] The above description illustrates various embodiments of the
present invention along with examples of how aspects of the present
invention may be implemented. The above examples and embodiments
should not be deemed to be the only embodiments, and are presented
to illustrate the flexibility and advantages of the present
invention as defined by the following claims. Based on the above
disclosure and the following claims, other arrangements,
embodiments, implementations and equivalents will be evident to
those skilled in the art and may be employed without departing from
the spirit and scope of the invention as defined by the claims.
* * * * *