U.S. patent application number 13/670860 was filed with the patent office on 2013-03-14 for semiconductor device with high-voltage breakdown protection.
This patent application is currently assigned to Seiko Epson Corporation. The applicant listed for this patent is Seiko Epson Corporation. Invention is credited to Hideyuki Akanuma, Tomoyuki Furuhata, Hiroaki Nitta.
Application Number | 20130062694 13/670860 |
Document ID | / |
Family ID | 41463708 |
Filed Date | 2013-03-14 |
United States Patent
Application |
20130062694 |
Kind Code |
A1 |
Furuhata; Tomoyuki ; et
al. |
March 14, 2013 |
SEMICONDUCTOR DEVICE WITH HIGH-VOLTAGE BREAKDOWN PROTECTION
Abstract
A semiconductor device includes: a semiconductor substrate
having a first conductivity type; a well having a second
conductivity type and provided inside the semiconductor substrate;
a first impurity region having the first conductivity type and
provided within the well; a second impurity region having the
second conductivity type, provided inside the well and away from
the first impurity region; and a third impurity region having a
first conductivity type, provided surrounding the well and away
from the second impurity region. In this semiconductor device, the
well is formed to be deeper than the first impurity region, the
second impurity region, and the third impurity region, in a
thickness direction of the semiconductor substrate; and a minimum
distance between the first impurity region and the second impurity
region is smaller than a minimum distance between the second
impurity region and the third impurity region.
Inventors: |
Furuhata; Tomoyuki;
(Suwa-shi, JP) ; Akanuma; Hideyuki; (Minowa-machi,
JP) ; Nitta; Hiroaki; (Sakata-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Seiko Epson Corporation; |
Shinjuku-ku |
|
JP |
|
|
Assignee: |
Seiko Epson Corporation
Shinjuku-ku
JP
|
Family ID: |
41463708 |
Appl. No.: |
13/670860 |
Filed: |
November 7, 2012 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
12492082 |
Jun 25, 2009 |
8330219 |
|
|
13670860 |
|
|
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|
Current U.S.
Class: |
257/343 ;
257/E29.256 |
Current CPC
Class: |
H01L 29/0638 20130101;
H01L 29/42368 20130101; H01L 29/1095 20130101; H01L 27/0922
20130101; H01L 21/823814 20130101; H01L 29/0878 20130101; H01L
21/823807 20130101; H01L 29/0696 20130101; H01L 29/7816 20130101;
H01L 29/402 20130101 |
Class at
Publication: |
257/343 ;
257/E29.256 |
International
Class: |
H01L 29/78 20060101
H01L029/78 |
Foreign Application Data
Date |
Code |
Application Number |
Jul 3, 2008 |
JP |
2008-174352 |
Claims
1. A semiconductor device, comprising: a semiconductor substrate
having a first conductivity type; a well having a second
conductivity type and provided inside the semiconductor substrate;
a first impurity region having the first conductivity type and
provided within the well; a second impurity region having the
second conductivity type, provided inside the well and away from
the first impurity region; and a third impurity region having a
first conductivity type, provided surrounding the well and away
from the second impurity region; wherein the well is formed to be
deeper than the first impurity region, the second impurity region,
and the third impurity region, in a thickness direction of the
semiconductor substrate; and a minimum distance between the first
impurity region and the second impurity region is smaller than a
minimum distance between the second impurity region and the third
impurity region.
2. The semiconductor device according to claim 1, wherein the first
impurity region constitutes a body region of a lateral diffused
metal oxide semiconductor (LDMOS).
3. The semiconductor device according to claim 1, wherein the first
impurity region constitutes a drift region of an offset drain metal
oxide semiconductor (MOS).
4. The semiconductor device according to claim 1, wherein at least
part of a periphery of the second impurity region exists outside a
perimeter of the well.
5. The semiconductor device according to claim 1, wherein: the well
is formed by a drive-in diffusion method; and the first, the
second, and the third impurity regions are retrograde wells formed
by a high-energy ion implantation method.
6. The semiconductor device according to claim 1, wherein an
impurity concentration of the well is lower than that of the second
impurity region.
Description
[0001] The entire disclosure of Japanese Patent Application No:
2008-174352, filed Jul. 3, 2008 is expressly incorporated by
reference herein.
BACKGROUND
[0002] 1. Technical Field
[0003] The present invention relates to a semiconductor device.
[0004] 2. Related Art
[0005] High breakdown voltage metal oxide semiconductors (MOS)
which operate in high speed are in demand for improving the
performance of semiconductor devices. Examples of suggested MOS
devices with such features include lateral diffused MOS (LDMOS) and
offset MOS having offset gates or drains.
[0006] Such MOS devices include, for instance, a P-type substrate,
deep N-type wells formed therein, and P-type shallow impurity
regions formed inside the N-type wells. Field-effect transistors
(FET) are formed using these shallow impurity regions. These MOS
devices are driven in higher voltages compared to common
low-voltage transistors. Hereafter, these MOS devices may also be
referred to as high voltage MOS (HVMOS) devices.
[0007] Since a relatively high operating voltage (approximately 30V
or more) is input into the HVMOS for its operation, deviation of
operating voltage may cause a negative effect on other low-voltage
elements formed in the same substrate. For instance, JP-A-5-129425
discloses a semiconductor device that reduces malfunctions of the
low-voltage elements caused by a noise or a fluctuation of a
voltage which is input into the high-voltage elements formed on the
same substrate as the low-voltage elements. This semiconductor
device includes a well formed in the substrate, another well formed
inside that well, and the low-voltage elements formed inside the
second well. The first well has an opposite conductivity type as
that of the substrate, and the second well has the same
conductivity type as that of the substrate.
[0008] However, protecting the low-voltage elements from the noise
and the fluctuation of a high-voltage does not sufficiently reduce
the deviation of a substrate potential, and therefore a reliable
operation of semiconductor device is not necessarily achieved.
Moreover, the high-voltage operation of the HVMOS causes the
breakdowns in element isolation structures. These breakdowns
generate deviation of the substrate potential, and may damage not
only the low-voltage elements but also other elements formed on the
semiconductor substrate.
SUMMARY
[0009] An advantage of the invention is to provide a semiconductor
device that minimizes the damage of non-high-voltage elements when
the breakdown occurs in high-voltage elements.
[0010] According to an aspect of the invention, the semiconductor
device includes: a semiconductor substrate having a first
conductivity type; a well having a second conductivity type and
provided inside the semiconductor substrate; a first impurity
region having the first conductivity type and provided within the
well; a second impurity region having the second conductivity type,
provided inside the well and away from the first impurity region;
and a third impurity region having a first conductivity type,
provided surrounding the well and away from the second impurity
region. In this semiconductor device, the well is formed to be
deeper than the first impurity region, the second impurity region,
and the third impurity region, in a thickness direction of the
semiconductor substrate. Moreover, a minimum distance between the
first impurity region and the second impurity region is smaller
than a minimum distance between the second impurity region and the
third impurity region.
[0011] In this semiconductor device, the breakdown of the
high-voltage element occurs therein. This minimizes the effect of
the breakdown on other elements formed on the semiconductor
substrate.
[0012] In this case, the first impurity region may constitute a
body region of an LDMOS.
[0013] At the same time, the first impurity region may constitute a
drift region of an offset drain MOS.
[0014] Moreover, at least part of a periphery of the second
impurity region may exist outside a periphery of the well.
[0015] In this case, the well may be formed by a drive-in diffusion
method, and the first, the second, and the third impurity regions
may be retrograde wells formed by a high-energy ion implantation
method.
BRIEF DESCRIPTION OF THE DRAWINGS
[0016] FIG. 1 is a sectional view schematically illustrating a
semiconductor device 100 according to an embodiment.
[0017] FIG. 2 is a plan view schematically illustrating the
semiconductor device 100 according to the embodiment.
[0018] FIG. 3 is a sectional view schematically illustrating the
semiconductor device 100 according to the embodiment.
[0019] FIG. 4 is a plan view schematically illustrating the
semiconductor device 100 according to the embodiment.
DESCRIPTION OF EXEMPLARY EMBODIMENT
[0020] An embodiment of the invention will now be described with
references to the accompanying drawings. The embodiment which will
be described hereafter represent one example of the invention.
[0021] FIG. 1 is a sectional view schematically illustrating main
parts of the semiconductor device 100 according to the embodiment.
FIG. 2 is a plan view schematically illustrating the main parts of
the semiconductor device 100 according to the embodiment. FIG. 1
illustrates a section along a line X-X in FIG. 2. Moreover,
illustrations of a gate electrode 70, an element isolation
insulating layer 80 and a conductive layer 90 are omitted in FIG.
2. FIG. 3 is a sectional view schematically illustrating the main
parts of the semiconductor device 100 according to the embodiment.
FIG. 4 is a plan view schematically illustrating the main parts of
the semiconductor device 100 according to the embodiment.
[0022] The semiconductor device 100 according to the embodiment
includes, as shown in FIG. 1, a P-type semiconductor substrate 10,
an N-type well 20, a P-type first impurity region 30, an N-type
second impurity region 40, and a P-type third impurity region 50.
In this embodiment, the description refers to the first
conductivity type as P-type, and the second conductivity type as
N-type.
[0023] The semiconductor device 100 includes an element isolation
region 102, and an element region 104 partitioned by the element
isolation region 102. The element region 104 may be formed either
in singular or in a plurality. In this embodiment, an example
refers to the forming of any one of an LDMOS 106 and an offset
drain MOS 108 in the element region 104. In this case, the element
region 104 is provided in plurality. Other low-voltage elements
such as CMOS devices may also be formed in the element regions 104.
In this embodiment, the LDMOS 106 has an N-type channel, and the
offset drain MOS 108 has a P-type channel.
[0024] The semiconductor substrate 10 is made of, for instance, a
silicon substrate. The semiconductor substrate 10 in this
embodiment has P-type conductivity.
[0025] A well 20 is formed in each of the element regions 104 of
the semiconductor substrate 10. The well 20 in this embodiment has
N-type conductivity. The well 20 is formed to have a greater depth
than other impurity regions (described later) in a thickness
direction of the semiconductor substrate 10. The well 20 has a
lower impurity concentration compared to that of the N-type second
impurity region 40 which will be described later. The well 20 is
formed inside each of the element regions 104 in plan view. The
periphery of the well 20 may either be in contact with or not in
contact with the element isolation region 102. The well 20 in the
example illustrated in FIGS. 1 and 2 has a rectangular shape in
plan view. The periphery drawn in a dotted line in FIG. 2 contacts
the element isolation region 102. The well 20 in the example
illustrated in FIGS. 3 and 4 does not contact the element isolation
region 102. The dotted line in FIG. 4 indicates the periphery of
the well 20. The well 20 has a functionality to electrically
isolate the MOS formed on each of the element regions 104 from the
substrate. The well 20 becomes one of the components that
constitute the MOS formed on the element regions 104. For instance,
in the LDMOS 106 formed in one of the element regions 104, the well
20 becomes part of a drain of the LDMOS 106, and in the offset
drain MOS 108 formed in one of the element regions 104, the well 20
forms a gate (channel) of the offset drain MOS 108. The well 20 is
formed by drive-in diffusion. During the drive-in diffusion, the
heat carries out impurity diffusion after N-type impurity
implantation. This facilitates providing the depth of the well 20.
The well 20 may also be formed by high-energy ion implantation (the
details will be described later). This method allows for forming
the well 20 deep as well as increasing the precision of its shape
in a direction orthogonal to a thickness direction of the
semiconductor substrate 10.
[0026] The first impurity region 30 is formed inside the well 20 of
each of the element regions 104. In this embodiment, the first
impurity region 30 has P-type conductivity.
[0027] In the LDMOS 106 formed in one of the element regions 104,
part of the first impurity region 30 forms a channel region,
thereby constituting a so-called body region (refer to the LDMOS
106 in FIG. 1). In this case, an N-type source region 34a that
becomes a source of the LDMOS 106 is formed in a first impurity
region 30a. N-type impurities are implanted in the source region
34a in a high concentration. At this time, a region, which is
within the first impurity region 30a under a gate oxidation film
60a and between the edges of the source region 34a and the N-type
well 20, becomes a channel region 106c. A P-type contact region 32a
is formed in the first impurity region 30a. P-type impurities are
implanted in the contact region 32a in a high concentration.
[0028] The first impurity region 30 of the offset drain MOS 108
formed in one of the element regions 104 constitutes a drain region
(refer to the offset drain MOS 108 in FIG. 1). In this case, part
of or all of a first impurity region 30b becomes the drain region.
Moreover, an area under a gate oxidation film 60b, between the
edges of the first impurity region 30b and a P-type source region
44b, in the well 20 and a second impurity region 40b (described
later), becomes a channel region 108c. A P-type contact region 32b
is formed in the first impurity region 30b. P-type impurities are
implanted in the contact region 32b in a high concentration.
Moreover, a P-type offset region 34b is formed in the first
impurity region 30b, in order to improve the conductivity of the
drain region. P-type impurities are implanted in the offset region
34b in a high concentration, and the impurity concentration is
equal to or lower than that of the contact region 32b.
[0029] The first impurity region 30 is a retrograde well formed by
the high-energy ion implantation. Consequently, the first impurity
region 30 is formed without thermal diffusion. This facilitates the
shape control of the first impurity region 30 in the direction
orthogonal to the thickness direction of the semiconductor
substrate 10, and allows for forming the LDMOS 106 and the offset
drain MOS 108 to have desired channel lengths in high
precision.
[0030] The second impurity region 40 is formed in the well 20 in
one of the element regions 104, around and away from the perimeter
of the first impurity region 30. Here, at least part of the second
impurity region 40 is positioned in the well 20. This allows for
reducing the length of the well 20 that secures a punch-through
breakdown voltage, in a direction orthogonal to the thickness
direction of the semiconductor substrate 10. Consequently, it is
possible to reduce a planar area of, for instance, the LDMOS 106
and the offset drain MOS (hereafter also referred to as EDMOS) 108
formed the element regions 104. Moreover, this allows for
increasing the level of integration of the semiconductor device 100
that includes a plurality of MOS devices formed therein. Further,
the second impurity region 40 also functions as a channel
stopper.
[0031] The second impurity region 40 is formed away from the first
impurity region 30 in plan view. In this embodiment, the second
impurity region 40 has N-type conductivity. As shown in FIGS. 2 and
4, a distance A between the second impurity region 40 and the first
impurity region 30 indicates the closest distance between these
regions in plan view.
[0032] The second impurity region 40 forms a drain region of the
LDMOS 106 formed in one of the element regions 104 (refer to the
LDMOS 106 in FIG. 1), thereby constituting a so-called drift
region. Here, the contact region 42a is formed in a second impurity
region 40a. N-type impurities are implanted in the contact region
42a in a high concentration.
[0033] Referring to the offset drain MOS 108 in FIG. 1, the second
impurity region 40 of the offset drain MOS 108 in one of the
element regions 104 constitutes part of a gate (channel region
108c). The P-type source region 44b which serves as a source of the
offset drain MOS 108 is formed in the second impurity region 40b.
P-type impurities are implanted in the source region 44b in a high
concentration. An N-type contact region 42b is formed in the second
impurity region 40b. N-type impurities are implanted in the contact
region 42b in a high concentration.
[0034] The second impurity region 40 is, similar to the first
impurity region 30, a retrograde well formed by the high-energy ion
implantation. Consequently, the first impurity region 40 is formed
without thermal diffusion. This facilitates the shape control of
the first impurity region 30 in the direction orthogonal to the
thickness direction of the semiconductor substrate 10, and allows
for forming the LDMOS 106 and the offset drain MOS 108 to have
desired channel lengths in high precision.
[0035] Here, the second impurity region 40 which is formed in any
one of the LDMOS 106 and the offset drain MOS 108 is the retrograde
well formed by the high-energy ion implantation. In this case,
adjusting the concentration profile of the retrograde in a depth
direction provides the second impurity region 40 with
functionalities such as a channel stopper under a drain-side offset
insulating layer 62, a threshold adjustment in each MOS transistor,
and a reduction of punch-through effects. Moreover, employing the
retrograde well does not suppress the resistance in the second
impurity region 40 more than necessary at the surface side, thereby
ensuring the breakdown voltage of each MOS transistor. Further,
employing the retrograde well provides the second impurity region
40 with a function of reducing the resistance of each MOS
transistor during its operation. In other words, forming the second
impurity region 40 to be the retrograde well secures the breakdown
voltage in a shallow area and reduces the resistance of a deep area
during the MOS operation. That is to say, adjusting the
concentration profile of the retrograde in the depth direction
allows for adjusting the balance between the breakdown voltage and
the resistance during operation of MOS transistors.
[0036] As shown in FIGS. 1 and 2, the entire second impurity region
40 may be formed inside the well 20. Alternatively, as shown in
FIGS. 3 and 4, the periphery of the second impurity region 40 may
exist outside the periphery of the well 20. Here, either part of or
an entire periphery of the second impurity region 40 may be outside
the periphery of the well 20. FIGS. 3 and 4 illustrate an example
of the second impurity region 40 in which the periphery thereof
(three sides in the periphery of the second impurity region 40)
exists outside the periphery of the well 20, in the area in which
the first impurity region 30 gets close to the element isolation
region 102.
[0037] The third impurity region 50 is formed around the well 20,
and away from the second impurity region 40. The third impurity
region 50 is formed inside the element isolation region 102. In
this embodiment, the third impurity region 50 has P-type
conductivity. The third impurity region 50 may either be in contact
with or not in contact with the well 20. Moreover, a P-type contact
region 52 is formed in the third impurity region 50. P-type
impurities are implanted in the contact region 52 in a high
concentration, so that the potential of the contact region 52
becomes the same as that of the P-type semiconductor substrate 10.
Similar to the first impurity region 30 and the second impurity
region 40, the third impurity region 50 is the retrograde well
formed by the high-energy ion implantation.
[0038] A distance B between the third impurity region 50 and the
second impurity region 40 indicates the closest distance in an area
between these regions in plan view. The third impurity region 50 in
the examples illustrated in FIGS. 2 and 4 is formed around the
second impurity region 40 at a constant distance therefrom.
[0039] The LDMOS 106 is formed in one of the element regions 104.
The N-type source region 34a constitutes the source of the
n-channel LDMOS 106 as shown in FIGS. 1 and 3. The N-type well 20,
the N-type second impurity region 40a, and, as needed, the N-type
contact region 42a constitute the drain of the LDMOS 106. The
P-type first impurity region 30a and, as needed, the P-type contact
region 32a constitute the gate of the LDMOS 106. Moreover, the
LDMOS 106 includes the gate oxidation film 60a, a gate electrode
70a, and, as needed, a drain-side offset insulating layer 62a. The
N-type second impurity region 40a is formed away from and around
the perimeter of the first impurity region 30a in plan view. The
element isolation insulating layer 80 is formed around the LDMOS
106. Structures of components not explained above will now be
described.
[0040] The gate oxidation film 60a can be formed on the P-type
first impurity region 30a, the N-type well 20, and the drain-side
offset insulating layer 62a. The gate oxidation film 60a is made
of, for instance, silicon oxide. The gate electrode 70a is formed
on the gate oxidation film 60a. The gate electrode 70a is made of,
for instance, polysilicon.
[0041] The drain-side offset insulating layer 62a is formed in the
second impurity region 40a. The gate oxidation film 60a (hereafter
also referred to as "gate insulating film 60a") and the gate
electrode 70a are formed on the drain-side offset insulating layer
62a. In other words, the gate of the LDMOS 106 is offset at the
drain side. This provides the LDMOS 106 with a high breakdown
voltage. Examples of the drain-side offset insulating layer 62a
include a local oxidation of silicon (LOCOS) layer, a semi-recessed
LOCOS layer, and a trench insulating layer. In the examples shown
in the drawings, the drain-side offset insulating layer 62a is
illustrated as the LOCOS layer.
[0042] The element isolation insulating layer 80 is formed in order
to isolate the MOS transistor from other elements. The element
isolation insulating layer 80 is formed on the semiconductor
substrate 10, around each of the element regions 104 and over the
element isolation region 102. Examples of the element isolation
insulating layer 80 include a LOCOS layer and a semi-recessed LOCOS
layer. In the examples shown in the drawings, the element isolation
insulating layer 80 is illustrated as a LOCOS layer.
[0043] The conductive layer 90 is formed on the element isolation
insulating layer 80. The conductive layer 90 is made of, for
instance, polysilicon. The conductive layer 90 can, for instance,
prevent the inversion of the conductivity type of wells under the
element isolation insulating layer 80. In the semiconductor device
100, the conductive layer 90 is formed so as to overlap with the
N-type second impurity region 40 which is under the element
isolation insulating layer 80 in plan view. Moreover, the second
impurity region 40 and the conductive layer 90 are electrically
connected so that the potential of the conductive layer 90 becomes
the same as that of the first impurity region 30. This increases
the performance of the second impurity region 40 as a channel
stopper.
[0044] The offset drain MOS 108 is formed in one of the element
regions 104. The P-type source region 44b constitute the source of
the p-channel offset drain MOS 108 as shown in FIGS. 1 and 3. The
P-type first impurity region 30b, and, as needed, the P-type
contact region 32b and the P-type offset region 34b constitute the
drain of the offset drain MOS 108. The N-type second impurity
region 40b and the well 20 constitute the gate of the offset drain
MOS 108. Moreover, the offset drain MOS 108 includes the gate
oxidation film 60b, a gate electrode 70b, and, as needed, a
drain-side offset insulating layer 62b. The N-type second impurity
region 40b is formed away from and around the perimeter of the
first impurity region 30b in plan view. The element isolation
insulating layer 80 is formed around the offset drain MOS 108.
Structures of the offset drain MOS 108 that are not similar to the
previously-recited LDMOS 106 will now be described.
[0045] The gate oxidation film 60b can be formed on the N-type
second impurity region 40b, the N-type well 20, and the drain-side
offset insulating layer 62b. The gate electrode 70b is formed on
the gate oxidation film 60b. Materials of the gate oxidation film
60b and the gate electrode 70a are the same as that of the LDMOS
106.
[0046] The drain-side offset insulating layer 62b is formed in the
first impurity region 30b. The gate oxidation film 60b (hereafter
also referred to as "gate insulating film 60b") and the gate
electrode 70b are formed on the drain-side offset insulating layer
62b. In other words, the gate of the offset drain MOS 108 is offset
at the drain side. This provides the offset drain MOS 108 with a
high breakdown voltage. Examples of the drain-side offset
insulating layer 62b includes a LOCOS layer and a semi-recessed
LOCOS layer. In the examples shown in the drawings, the drain-side
offset insulating layer 62b is illustrated as the LOCOS layer. The
structure of the element isolation insulating layer 80 is the same
as that of the LDMOS 106.
[0047] The offset region 34b can be formed inside the second
impurity region 30b, under the drain-side offset insulating layer
62b. The impurity concentration of the P-type offset region 34b can
be adjusted to a range that allows a current to flow under the
drain-side offset insulating layer 62b, while securing the
breakdown voltage of the offset drain MOS 108.
[0048] As shown in FIGS. 1 and 4, the semiconductor device 100 has
a plurality of element regions 104. The LDMOS 106, the EDMOS 108,
and other elements are formed in the plurality of element regions
104. These other elements formed in the element regions 104 may
also include components such as low-voltage transistors. The LDMOS
106, the EDMOS 108, and other elements are arranged arbitrarily. In
the examples shown in the drawings, the element isolation region
102 is a grid arranged among the element regions 104, and the LDMOS
106 and the EDMOS 108 are formed adjacently to each other.
[0049] An un-illustrated opening is formed in the element isolation
insulating layer 80 formed over the element isolation region 102,
so that the potential of the semiconductor substrate 10 is lead
through the third impurity region 50. Moreover, the semiconductor
device 100 can further include, over the structure shown in FIG. 1,
un-illustrated components such as an interlayer insulating film, a
protection film, a contact hole, a contact, and a wiring layer.
[0050] The semiconductor device 100 is manufactured, for instance,
in the following steps.
[0051] Initially, the element isolation insulating layer 80 is
formed on the P-type semiconductor substrate 10, at the same time
as, for instance, forming the drain-side offset insulating layer 62
respectively for the LDMOS 106 and the offset drain MOS 108. The
element isolation insulating layer 80 and the drain-side offset
insulating layer 62 are formed, for instance, with the LOCOS
method.
[0052] Thereafter, the N-type well 20 is formed. The well 20 is
formed by, for instance, drive-in diffusion. That is to say, N-type
impurities are implanted in the semiconductor substrate 10 either a
single time or a plurality of times using techniques such as
photolithography. Thereafter, the implanted N-type impurities are
thermally diffused by heat treatment, thereby forming the well 20.
Alternatively, the N-type well 20 may be formed by, for instance,
the high-energy ion implantation. The high-energy ion-implantation
uses a high acceleration voltage with a range of, for instance,
between 1 MeV and 5 MeV. Therefore, the high-energy ion
implantation allows for increasing the depth of the impurity
implantation without thermal diffusion. Excluding thermal diffusion
process allows for increasing the precision of the shape of the
well 20 in a direction orthogonal to a thickness direction of the
semiconductor substrate 10. Moreover, the well 20 is formed
concurrently with the plurality of element regions 104.
[0053] Subsequently, the P-type first impurity region 30, the
N-type second impurity region 40, and the P-type third impurity
region 50 are formed by the high-energy ion implantation.
Specifically, impurities for respective conductivity types are
implanted in the semiconductor substrate 10 by techniques such as
photolithography, so as to form the first impurity region 30, the
second impurity region 40, and the third impurity region 50. This
implantation is carried out plurality of times, and there is no
limitation imposed on the order of implantations. The acceleration
voltage during the ion implantations is set to be lower than a
voltage during the forming of the well 20. Consequently, the first
impurity region 30, the second impurity region 40, and the third
impurity region 50 become retrograde wells that have the impurity
concentration profile in the depth direction. The high-energy ion
implantation, for instance, may also be used for forming the P-type
offset region 34b in the offset drain MOS 108.
[0054] Subsequently, the gate insulating film 60 is formed. The
gate insulating film 60 is formed by, for instance, thermal
oxidation. The gate electrode 70 and, if needed, the conductive
layer 90 is then formed. The gate electrode 70 and the conductive
layer 90 are formed by, for instance, forming the polysilicon layer
on the entire surface of the semiconductor substrate 10 followed by
patterning.
[0055] Thereafter, components such as an interlayer insulating
film, a protection film, a contact hole, a contact, and a wiring
layer are formed as needed by known methods, and thus the
semiconductor device 100 is manufactured.
[0056] The semiconductor device 100 according to the embodiment
described above has a structure in which the minimum distance (the
aforementioned distance A) between the first impurity region 30 and
the second impurity region 40 is smaller than the minimum distance
(the aforementioned distance B) between the second impurity region
40 and the third impurity region 50. This provides the
semiconductor device 100 with the following characteristics.
[0057] In the semiconductor device 100, since the distance B is
larger than the distance A, the breakdowns of the elements formed
in the element regions 104 occurs within those elements. In other
words, the places in which the breakdowns occur in the
semiconductor device 100 are inside the elements formed in the
element regions 104 (between the first impurity region 30 and the
second impurity region 40). Therefore, the breakdown is less likely
to occur between the semiconductor substrate and the elements
(between the second impurity region 40 and the third impurity
region 50). As a result, the substrate potential of the
semiconductor device 100 is less likely to deviate during the
breakdown. Consequently, breakdowns cause minimum effect on other
elements formed in the other element regions 104 of the
semiconductor substrate 10.
[0058] The present invention shall not be limited to the embodiment
described above, and may include various modifications. For
instance, included within a scope of the invention is a structure
substantially the same as those described in the embodiment, such
as a structure with the same function, method, and resulting effect
as that of the embodiment, and, a structure with the same purpose
and the resulting effect. Moreover, the invention also includes,
within the scope thereof, a structure with an alternative portion
which replaces a portion not essential to the structures described
in the embodiment. The invention further includes, within the scope
thereof, a structure which exhibits the same effect as the one
described in the embodiment, as well as a structure which achieves
the same purpose as the ones described in the embodiment. Still
further, the invention includes, within the scope thereof, a
structure including known techniques applied to the structures
described in the embodiment.
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