U.S. patent application number 13/512213 was filed with the patent office on 2013-02-21 for film substrate conveying device.
This patent application is currently assigned to FUJI ELECTRIC CO., LTD.. The applicant listed for this patent is Masanori Nishizawa, Takanori Yamada, Shoji Yokoyama. Invention is credited to Masanori Nishizawa, Takanori Yamada, Shoji Yokoyama.
Application Number | 20130043294 13/512213 |
Document ID | / |
Family ID | 44167144 |
Filed Date | 2013-02-21 |
United States Patent
Application |
20130043294 |
Kind Code |
A1 |
Nishizawa; Masanori ; et
al. |
February 21, 2013 |
FILM SUBSTRATE CONVEYING DEVICE
Abstract
A film substrate conveying device is a device for conveying a
belt-like film substrate while placing the film substrate upright,
with one end part thereof being on an upper side in a width
direction thereof. The film substrate conveying device has at least
a pair of first grip rollers disposed to sandwich an upper end part
of the film substrate therebetween; and a first angle adjusting
mechanism capable of adjusting an inclination direction and an
inclination angle of the first grip rollers to be capable of
inclining a rotation angle of the first grip rollers such that a
rotation direction of the first grip rollers is on an upper side
with respect to a conveying direction.
Inventors: |
Nishizawa; Masanori; (San
Jose, CA) ; Yokoyama; Shoji; (Hachioji-shi, JP)
; Yamada; Takanori; (Hachioji-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Nishizawa; Masanori
Yokoyama; Shoji
Yamada; Takanori |
San Jose
Hachioji-shi
Hachioji-shi |
CA |
US
JP
JP |
|
|
Assignee: |
FUJI ELECTRIC CO., LTD.
Kawasaki-shi,
JP
|
Family ID: |
44167144 |
Appl. No.: |
13/512213 |
Filed: |
November 22, 2010 |
PCT Filed: |
November 22, 2010 |
PCT NO: |
PCT/JP2010/070787 |
371 Date: |
August 9, 2012 |
Current U.S.
Class: |
226/15 ;
226/181 |
Current CPC
Class: |
B65H 23/0324 20130101;
B65H 23/038 20130101; B65H 2301/323 20130101; B65H 9/166 20130101;
B65H 2403/942 20130101; B65H 2404/14212 20130101 |
Class at
Publication: |
226/15 ;
226/181 |
International
Class: |
B65H 23/038 20060101
B65H023/038; B65H 20/02 20060101 B65H020/02 |
Foreign Application Data
Date |
Code |
Application Number |
Dec 14, 2009 |
JP |
2009-282865 |
Claims
1-6. (canceled)
7. A film substrate conveying device for conveying a belt-like film
substrate while placing the film substrate upright, with one end
part thereof being on an upper side in a width direction thereof,
the film substrate conveying device comprising: at least a pair of
first grip rollers disposed to sandwich an upper end part of the
film substrate therebetween; and a first angle adjusting mechanism
capable of adjusting an inclination direction and an inclination
angle of the first grip rollers to be capable of inclining a
rotation axis angle of the first grip rollers such that a rotation
direction of the first grip rollers is on an upper side with
respect to a conveying direction.
8. A film substrate conveying device according to claim 7, further
comprising: at least a pair of second grip rollers disposed to
sandwich a lower end part of the film substrate therebetween; and a
second angle adjusting mechanism capable of adjusting an
inclination direction and an inclination angle of the second grip
rollers to be capable of inclining a rotation axis angle of the
second grip rollers such that a rotation direction of the second
grip rollers is on a lower side with respect to the conveying
direction.
9. A film substrate conveying device according to claim 7, further
comprising a detection device for detecting a level of a width
direction end part of the film substrate, wherein when the
detection device detects a displacement of the film substrate, the
first angle adjusting mechanism and/or the second angle adjusting
mechanism controls the first grip rollers and/or the second grip
rollers to incline in the inclination direction corresponding to
the conveying direction of the film substrate.
10. A film substrate conveying device according to claim 7, wherein
the first angle adjusting mechanism and/or the second angle
adjusting mechanism controls to change the inclination angle of the
first grip rollers and/or the second grip rollers to correct a
displacement of the substrate.
11. A film substrate conveying device according to claim 8, wherein
the second angle adjusting mechanism comprises: a roller attachment
part to which the second grip rollers are rotatably attached, and
movable to change the rotation direction of the second grip rollers
between an upper side and a lower side with respect to the
conveying direction; an urging device urging the roller attachment
part to change the rotation direction of the second grip rollers
toward the upper side or the lower side with respect to the
conveying direction; an engaging roller configured to move in
conjunction with a movement of the roller attachment part; an arm
engaging with the engaging roller against a movement of the
engaging roller with an urge of the roller attachment part from the
urging device; and an actuator to drive the arm, wherein a drive of
the arm moves the engaging roller and the roller attachment part,
and changes the rotation direction of the second grip rollers.
12. A film substrate conveying device according to claim 7, wherein
the first angle adjusting mechanism comprises: a roller attachment
part to which the first grip rollers are attached rotatably, and
movable to change the rotation direction of the first grip rollers
between the upper side and the lower side with respect to the
conveying direction; an urging device urging the roller attachment
part to change the rotation direction of the first grip rollers
toward the upper side or the lower side with respect to the
conveying direction; an engaging roller configured to move in
conjunction with a movement of the roller attachment part; an arm
engaging with the engaging roller against a movement of the
engaging roller with an urge of the roller attachment part from the
urging device; and an actuator to drive the arm, wherein a drive of
the arm moves the engaging roller and the roller attachment part,
and changes the rotation direction of the first grip rollers.
Description
TECHNICAL FIELD
[0001] The present invention relates to a film substrate conveying
device for conveying a film substrate (referred to as "substrate"
hereinafter) while placing the substrate upright, with one end part
thereof being on an upper side with respect to a width direction
thereof.
BACKGROUND ART
[0002] A device for manufacturing a thin-film laminated body
(referred to as "manufacturing device" hereinafter) is used for
forming, on a surface of a substrate, a photoelectric conversion
layer composed of a thin-film photoelectric conversion element.
This manufacturing device is configured to hermetically form the
substrate within a film-forming chamber thereof. Furthermore, in
order to convey the substrate into the film-forming chamber, the
substrate wound by an unwinding core is dispatched toward the
film-forming chamber, passes through the film-forming chamber, and
then wound by a winding core.
[0003] As a substrate conveying method of a film substrate
conveying device (referred to as "conveying device" hereinafter)
provided mainly in the above-described manufacturing device, an
upright conveying method is adopted where a substrate is conveyed
while being upright, with one end part thereof being on upper side
with respect to a width direction thereof. A conveying device using
this upright conveying method is excellent in terms of preventing
contamination of the substrate because particles cannot accumulate
on the surface of the substrate, and in terms of reducing the space
of the manufacturing device by placing the substrate upright.
Meanwhile, the substrate is pulled and held mainly between the
unwinding core and winding core. Therefore, the substrate tends to
be weighed down and might meander in the width direction. In such a
case, the position of the substrate is displaced in the width
direction, causing warpage of the substrate in the width direction.
Stress is concentrated unevenly in the substrate due to this
warpage, causing wrinkles on the substrate. Due to the wrinkles,
the characteristics of the thin-film photoelectric conversion
element and the like formed on the substrate deteriorate.
[0004] For this reason, the structure disclosed in Patent Document
1 is adopted in which grip rollers for adjusting the position of a
substrate in a width direction are provided in a conveying device
for conveying the substrate in a forward feed direction. In this
manufacturing device, the plurality of pairs of grip rollers is
provided in a manner as to sandwich an upper end part and a lower
end part of the substrate. The pair of grip rollers holding the
upper end part is tilted upward with respect to the forward feed
direction of the substrate, whereas the pair of grip rollers
holding the lower end part is tilted downward with respect to the
forward feed direction of the substrate.
[0005] An outer circumferential surface of each pair of grip
rollers is provided with an elastic body for protecting the
substrate. However, when the elastic body wears out and becomes
weak, the gripping force acting between each grip roller and the
substrate becomes low, and, consequently, adequate lifting force
for lifting up the substrate cannot be obtained. For this reason,
Patent Document 1 is designed to enhance the gripping force of the
pairs of grip rollers by increasing the force of the grip rollers
sandwiching the substrate therebetween (referred to as "substrate
sandwiching force" hereinafter), in order to deal with the
deterioration of the elastic body.
[0006] Patent Document 1: Japanese Patent Application Publication
No. 2009-38276
[0007] However, in Patent Document 1, the grip rollers holding the
upper end part are tilted upward only with respect to the forward
feed direction of the substrate, whereas the grip rollers holding
the lower end part are tilted downward only with respect to the
forward feed direction of the substrate. Thus, when the substrate
is conveyed in both the forward feed direction and a backward feed
direction, these grip rollers can accurately adjust the position of
the substrate conveyed in the forward feed direction but cannot
adjust the position of the substrate conveyed in the backward feed
direction.
[0008] Moreover, in Patent Document 1, when increasing the
substrate sandwiching force of the grip rollers that is obtained by
the elastic body on the outer circumferential surface, the elastic
body on the outer circumferential surface might be squashed,
changing the shape of the cross-section of the outer
circumferential surface into an ellipse, as well as the diameter of
the grip rollers. In such a case, a desired gripping force and
adequate lifting force for lifting up the substrate cannot be
obtained, which makes it difficult to move the substrate to a
desired position. This leads to a decrease of the accuracy of
adjusting the position of the substrate.
DISCLOSURE OF THE INVENTION
[0009] The present invention has been made in view of the
circumstances described above, and an object thereof is to provide
a film substrate conveying device capable of adjusting, with a high
degree of accuracy, the position of each of substrates conveyed in
both a forward feed direction and a backward feed direction.
[0010] In order to achieve the object described above, a film
substrate conveying device of the present invention is a film
substrate conveying device for conveying a belt-like film substrate
while placing the film substrate upright, with one end part thereof
being on an upper side in a width direction thereof. This film
substrate conveying device having at least a pair of first grip
rollers that is disposed so as to sandwich an upper end part of the
film substrate therebetween; and a first angle adjusting mechanism
that is capable of adjusting an inclination direction and an
inclination angle of the first grip rollers so as to be able to
incline a rotation axis angle of the first grip rollers such that a
rotation direction of the first grip rollers is on an upper side
with respect to a conveying direction.
[0011] The film substrate conveying device according to the present
invention further has at least a pair of second grip rollers that
is disposed so as to sandwich a lower end part of the film
substrate therebetween; and a second angle adjusting mechanism that
is capable of adjusting an inclination direction and an inclination
angle of the second grip rollers so as to be able to incline a
rotation axis angle of the second grip rollers such that a rotation
direction of the second grip rollers is on a lower side with
respect to the conveying direction.
[0012] The film substrate conveying device according to the present
invention further has a detection device for detecting a level of a
width direction end part of the film substrate. When the detection
device detects a displacement of the film substrate, the first
angle adjusting mechanism and/or the second angle adjusting
mechanism controls the first grip rollers and/or the second grip
rollers to incline in an inclination direction corresponding to the
conveying direction of the film substrate.
[0013] In the film substrate conveying device according to the
present invention, the first angle adjusting mechanism and/or the
second angle adjusting mechanism performs control to change the
inclination angle of the first grip rollers and/or the second grip
rollers in order to correct the displacement of the substrate.
[0014] The film substrate conveying device of the present invention
can accomplish the following effects.
[0015] The film substrate conveying device according to the present
invention is a film substrate conveying device for conveying a
belt-like film substrate while placing the film substrate upright,
with one end part thereof being on an upper side in a width
direction thereof and conveying the film substrate. The film
substrate conveying device has at least a pair of first grip
rollers that is disposed so as to sandwich an upper end part of the
film substrate therebetween; and a first angle adjusting mechanism
that is capable of adjusting an inclination direction and an
inclination angle of the first grip rollers so as to be able to
incline a rotation angle of the first grip rollers such that a
rotation direction of the first grip rollers is on an upper side
with respect to a conveying direction.
[0016] The film substrate conveying device further has at least a
pair of second grip rollers that is disposed so as to sandwich a
lower end part of the film substrate therebetween; and a second
angle adjusting mechanism that is capable of adjusting an
inclination direction and an inclination angle of the second grip
rollers, so as to be able to incline a rotation angle of the second
grip rollers such that a rotation direction of the second grip
rollers is on a lower side with respect to the conveying
direction.
[0017] The film substrate conveying device further has a detection
device for detecting a level of a width direction end part of the
film substrate, wherein when the detection device detects a
displacement of the film substrate, the first angle adjusting
mechanism and/or the second angle adjusting mechanism controls the
first grip rollers and/or the second grip rollers to incline in the
inclination direction corresponding to the conveying direction of
the film substrate.
[0018] In this manner, the position of the film substrate conveyed
in the forward feed direction and the backward feed direction can
be adjusted with a high degree of accuracy.
[0019] In the film substrate conveying device according to the
present invention, the first angle adjusting mechanism and/or the
second angle adjusting mechanism performs control to change the
inclination angle of the first grip rollers and/or the second grip
rollers in order to correct the displacement of the substrate. For
instance, when the gripping force of the first grip rollers weakens
due to the wear of the first grip rollers, and adequate lifting
force for lifting the film substrate cannot be obtained, the
position of the film substrate can be corrected by increasing the
inclination of the first grip rollers and the distance in which the
substrate moves in the width direction. As a result, imposing an
excess load onto the film substrate can be inhibited without
increasing the force of the first grip rollers sandwiching the film
substrate. On the other hand, when the gripping force of the first
grip rollers fluctuates and therefore becomes so high that the
lifting force for lifting up the film substrate becomes excessively
strong, the position of the film substrate can be corrected by
reducing the inclination or the first grip rollers and the distance
in which the film substrate moves in the width direction. As a
result, the accuracy of adjusting the position of the film
substrate can be prevented from dropping.
BRIEF DESCRIPTION OF THE DRAWINGS
[0020] FIG. 1 is a cross-sectional plan view schematically showing
a device for manufacturing a thin-film laminated body according to
a first embodiment of the present invention;
[0021] FIG. 2(a) is a cross-sectional plan view schematically
showing an enlarged view of a film-forming chamber of FIG. 1, and
FIG. 2(b) is a cross-sectional diagram taken along a line C-C shown
in FIG. 2(a);
[0022] FIG. 3(a) is a schematic front view showing an angle
adjusting mechanism used when a rotation axis of a grip roller is
placed along a width direction of a film substrate, according to
the first embodiment of the present invention, FIG. 3(b) is a
schematic side view of the angle adjusting mechanism shown in FIG.
3(a), and FIG. 3(c) is a cross-sectional diagram taken along a line
D-D shown in FIG. 3(a);
[0023] FIG. 4(a) is a schematic front view showing the angle
adjusting mechanism that inclines the grip roller to adjust the
position of the substrate conveyed in a forward feed direction,
according to the first embodiment of the present invention, and
FIG. 4(b) is a cross-sectional diagram taken along a line D'-D'
shown in FIG. 4(a);
[0024] FIG. 5 is a schematic enlarged front view showing the grip
roller of FIG. 4(a);
[0025] FIG. 6(a) is a schematic front view showing an angle
adjusting mechanism that inclines the grip roller to adjust the
position of the substrate conveyed in a backward feed direction,
according to the first embodiment of the present invention, and
FIG. 6(b) is a cross-sectional diagram taken along a line D''-D''
shown in FIG. 6(a);
[0026] FIG. 7 is a schematic enlarged front view showing the grip
roller of FIG. 6(a);
[0027] FIG. 8 is a cross-sectional diagram taken along the line C-C
shown in FIG. 2(a), according to a second embodiment of the present
invention; and
[0028] FIG. 9 is a graph showing a relationship between an
inclination angle of the grip roller and a lifting force of the
grip roller for lifting up the film substrate.
BEST MODE FOR CARRYING OUT THE INVENTION
First Embodiment
[0029] A film substrate conveying device according to a first
embodiment of the present invention is described hereinafter.
[0030] As shown in FIG. 1, in a device for manufacturing a
thin-film laminated body (referred to as "manufacturing device"
hereinafter) 1 that includes a film substrate conveying device
(referred to as "conveying device" hereinafter), a belt-like film
substrate (referred to as "substrate" hereinafter) 2 is placed
upright with one end part thereof being on an upper side in a width
direction thereof, and then conveyed. A thin film is then formed on
a surface of the substrate 2. The first embodiment illustrates a
situation in which the width direction of the substrate 2 follows a
perpendicular direction, but the present invention is not limited
thereto.
[0031] In order to convey the substrate 2, the manufacturing device
1 is provided with an unwinding chamber 3 for unwinding the
substrate 2 and a winding chamber 4 for winding the substrate 2.
Six film-forming chambers 5a to 5f, for example, are provided
between the unwinding chamber 3 and the winding chamber 4.
Furthermore, the substrate 2 can be conveyed in a forward feed
direction from the unwinding chamber 3 to the winding chamber 4
(shown by an arrow A in the diagram), and a backward feed direction
from the winding chamber 4 to the unwinding chamber 3 (shown by an
arrow B in the diagram). Moreover, a conveying section between the
unwinding chamber 3 and the film-forming chamber 5a, conveying
sections between the five adjacent film-forming chambers, and a
conveying section between the winding chamber 4 and the
film-forming chamber 5f, are each provided with, for example, a
pair of first grip rollers 6.
[0032] An unwinding core 3a capable of unwinding the wound
substrate 2 is provided on the inside of the unwinding chamber 3,
in a manner as to be rotatable around its own rotation axis that is
along the width direction of the substrate 2. Five rollers 3b to
3f, for example, driven to convey the substrate 2 and controlling
the tension thereof are provided on the inside of the unwinding
chamber 3 and on a forward feed direction downstream side from the
unwinding core 3a, in a manner as to be rotatable around their own
rotation axes that are along the width direction of the substrate
2. The unwinding core 3a and the rollers 3b to 3f are configured to
rotate in a manner as to be able to convey the substrate 2 in the
forward feed direction and the backward feed direction. Note that
the number of rollers provided to be driven for conveying the
substrate 2 and controlling the tension thereof as shown in FIG. 1
is merely an example and may not only be the number described
above, but also any number that can be changed in accordance with
specifications of the manufacturing device 1. It is not necessary
to provide the rollers driven to convey the substrate 2 and
controlling the tension thereof.
[0033] A winding core 4a capable of winding the substrate 2 is
provided on the inside of the winding chamber 4, in a manner as to
be rotatable around its own rotation axis that is along the width
direction of the substrate 2. Seven rollers 4b to 4h for conveying
the substrate 2 and controlling the tension thereof are provided,
as an example, on the inside of the winding chamber 4 and on a
forward feed direction upstream side from the winding core 4a, in a
manner as to be rotatable around their own rotation axes that are
along the width direction of the substrate 2. The winding core 4a
and the rollers 4b to 4h are configured to rotate in a manner as to
be able to convey the substrate 2 in the forward feed direction and
the backward feed direction. Note that the number of rollers
provided for conveying the substrate 2 and controlling the tension
thereof as shown in FIG. 1 is merely an example and may not only be
the number described above, but also any number that can be changed
in accordance with the specifications of the manufacturing device
1. It is not necessary to provide rollers for conveying the
substrate 2 and controlling the tension thereof.
[0034] A structure of each of the film-forming chambers 5a to 5f is
described with reference to FIGS. 2(a) and 2(b). As shown in FIGS.
2(a) and 2(h), the substrate 2 is fed in the forward feed direction
(the arrow A), and the first grip rollers 6 are accommodated to the
substrate fed in the forward reed direction. High-voltage
electrodes 7a to 7f and ground electrodes 8a to 8f are placed,
face-to-face, in the film-forming chambers 5a to 5f, respectively.
The substrate 2 passes through between each of the high-voltage
electrodes 7a to 7f and each of the ground electrodes 8a to 8f. The
high-voltage electrodes 7a to 7f and the ground electrodes 8a to 8f
are shorter, in the width direction of the substrate 2, than the
with of the substrate 2. The thin-film laminated body is not formed
neither an upper end part nor a lower end part of the substrate 2
in the width direction. Film formation gas is supplied into the
film-forming chambers 5a to 5f. The film-forming chambers 5a to 5f
can be kept hermetic. In these film-forming chambers 5a to 5f, the
thin film is formed on the substrate 2 when the substrate 2 is
positioned between each of the high-voltage electrodes 7a to 7f and
each of the ground electrodes 8a to 8f. Examples of a method for
forming a film on the surface of the substrate 2 include CVD
(Chemical Vapor Deposition), PVD (Physical Vapor Deposition) and
the like. The number film-forming chambers shown in FIG. 1 is used
an example, and is not limited to the one described above and can
be changed in accordance with the specifications of the
manufacturing device 1. In addition to the film-forming chambers, a
heat chamber for heating the substrate 2 may be provided.
[0035] The manufacturing device 1 is further provided with a
detection device 9 for detecting the position of the substrate 2 in
the width direction. The detection device 9 may be configured to be
able to detect, for example, the position of an edge part of the
substrate in the width direction. In addition, it is particularly
preferred that the detection device 9 be a noncontact sensor or,
for example, a transmission-type laser sensor or a reflective
photosensor. The detection device 9 is connected to a control
device 10.
[0036] Each pair of first grip rollers 6 is configured to be
rotatable-around rotation axes 6a thereof, and is placed between
the adjacent film-forming chambers, in a manner as to sandwich the
upper end part of the substrate 2 therebetween. In other words, the
pair of first grip rollers 6 sandwiches a section of the substrate
2 that does not have the thin-film laminated body formed thereon.
An outer circumferential surface 6b of each of the first grip
rollers 6 may be formed of an elastic body. Examples of the elastic
body include silicon rubber, fluorine rubber, and other
heat-resistant rubbers. In another instance, the outer
circumferential surface 6b of each of the first grip rollers 6 may
be formed of a synthetic resin such as PTFE and polyimide or may be
formed of a material applied with stainless steel, iron, or chrome.
Moreover, the outer circumferential surface 6b of each of the first
grip rollers 6 may be formed of any materials as long as
predetermined performances such as a force for protecting and
gripping the substrate 2 can be obtained.
[0037] The first grip rollers 6 are configured to be able to adjust
the inclination thereof. A first angle adjusting mechanism 11 for
adjusting the inclination of the first grip rollers 6 is described
with reference to FIGS. 3(a) to 3(c). As shown in FIGS. 3(a) to
3(c), by mean of the first angle adjusting mechanism 11, the
rotation axis 6a of each of the first grip rollers 6 is adjusted to
be placed neutrally along the width direction of the substrate 2. A
roller shaft 6c is disposed in the first grip roller 6, in a manner
as to extend upward from an upper end of the first grip roller 6
along the width direction of the substrate 2. An upper end of the
roller shaft 6c is attached rotatably to a roller attachment part
12. A link 13 is also disposed in a manner as to extend upward from
the roller attachment part 12 along the width direction of the
substrate 2. An upper part of the link 13 is provided with an
engaging roller 14. In the link 13, a link attachment part 13a is
provided in the middle of the width direction of the substrate 2,
which is located between the roller attachment part 12 and the
engaging roller 14. This link attachment part 13a is configured to
be able to rotate the link 13 around a link rotation axis 13b that
extends in the width direction with respect to the surface of the
substrate 2, and is attached to a supporting part 15. Therefore,
the link 13 can rotate with respect to the supporting part 15.
Moreover, an urging device 16 is disposed between the link 13 and
the supporting part 15 and along a conveying direction of the
substrate 2. This urging device 16 may be configured to be able to
return the link 13 to a neutral position thereof, by using a coil
spring, a plate spring, a torsion spring, a rubber member or the
like.
[0038] An actuator 17 is disposed above the link 13. The actuator
17 has an arm 18 that is placed along the width direction with
respect to the surface of the substrate 2. A tip end part 18a of
the arm 18 is engaged with the engaging roller 14 attached to the
link 13. On the other hand, a rotating shaft 19 extending along the
width direction of the substrate 2 is attached to a base end part
18b of the arm 18. A lower end of the rotating shaft 19 is attached
to the base end part 18b of the arm 18, and an upper end of the
rotating shaft 19 is attached to a drive source 20. Therefore, the
arm 18 can be rotated by the rotary drive of the drive source 20.
Note that this drive source 20 is supported by the supporting part
15, and the drive source 20 of the actuator 17 is connected to the
control device 10.
[0039] Operations of the manufacturing device 1 according to the
first embodiment of the present invention are now described.
[0040] Conveying the substrate 2 and performing film formation on
the substrate 2 in the manufacturing device 1 is described with
reference to FIG. 1 again. In the unwinding chamber 3, the
substrate 2 wound by the unwinding core 3a is unwound while being
driven and guided by the rollers 3b to 3f. This substrate 2 leaves
the unwinding chamber 3, and is then conveyed sequentially through
the film-forming chambers 5a to 5f along the forward feed
direction. Subsequently, various thin films are formed on the
surface of the substrate 2 in the film-forming chambers 5a to 5f.
The substrate 2 obtained after the film formation is conveyed into
the winding chamber 4 and wound by the winding core 4a while being
driven and guided by the rollers 4b to 4h. The substrate 2 is
conveyed along the backward feed direction, if needed.
[0041] Adjusting the position of the substrate 2 conveyed in the
forward feed direction is described with reference to FIGS. 4(a),
4(b) and 5. When the detection device 9 (see FIG. 2(h)) detects a
downward displacement of the substrate 2 conveyed in the forward
feed direction, the detection device 9 sends a signal to the
control device 10 (see FIG. 2(h)). Next, the control device 10
sends the signal to the drive source 20 of the actuator 17, and the
drive source 20 is subjected to rotation control such that the tip
end part 18a of the arm 18 is moved in toward the backward feed
direction. At this moment, the engaging roller 14 that is engaged
with the tip end part 18a of the arm 18 also moves toward the
backward feed direction, and the link 13 rotates around the link
rotation axis 13b. As a result, the first grip rollers 6 are
inclined by an inclination angle .theta..sub.1 with respect to the
width direction of the substrate 2 such that the lower sides of the
first grip rollers 6 are directed toward the forward feed direction
along the surface of the substrate 2. In other words, the first
grip rollers 6 are inclined upward with respect to the forward feed
direction of the substrate 2. Note that in the state in which the
first grip rollers 6 are inclined by the inclination angle
.theta..sub.1, the link 13 is urged by the urging device 16 such
that the first grip rollers 6 are returned to a neutral position
thereof.
[0042] Adjusting the position of the substrate 2 conveyed in the
backward feed direction is described, with reference to FIGS. 6(a),
6(b) and 7. When the detection device 9 (see FIG. 2(b)) detects a
downward displacement of the substrate 2 conveyed in the backward
feed direction, the detection device 9 sends a signal to the
control device 10 (see FIG. 2(b)). Next, the control device 10
sends the signal to the drive source 20 of the actuator 17, and the
drive source 20 is subjected to rotation control such that the tip
end part 18a of the arm 18 is moved in toward the forward feed
direction. At this moment, the engaging roller 14 that is engaged
with the tip end part 18a of the arm 18 also moves toward the
forward feed direction, and the link 13 rotates around the link
rotation axis 13b. As a result, the first grip rollers 6 are
inclined by an inclination angle .theta..sub.2 with respect to the
width direction of the substrate 2 such that the lower sides of the
first grip rollers 6 are directed toward the backward feed
direction along the surface of the substrate 2. In other words, the
first grip rollers 6 are inclined upward with respect to the
backward feed direction of the substrate 2. Note that in the state
in which the first grip rollers 6 are inclined by the inclination
angle .theta..sub.2, the link 13 is urged by the urging device 16
such that the first grip rollers 6 are returned to the neutral
position thereof.
[0043] Here, when the detection device 9 detects that adequate
lifting force cannot be obtained due to a lowered gripping force of
the first grip rollers 6 and that the substrate 2 remains displaced
downward even after position correction is performed thereon, the
control device 10 controls the drive source 20 of the actuator 17,
in a manner as to increase the inclination angle .theta..sub.1 or
.theta..sub.2 of the first grip rollers 6. As a result, the
position of the substrate 2 is corrected. However, when the
detection device 9 detects that the lifting force is strong due to
an excessively increased gripping force of the first grip rollers 6
and that the substrate 2 is displaced upward after the position
correction is performed thereon, the control device 10 controls the
drive source 20 of the actuator 17, in a manner as to reduce the
inclination angle .theta..sub.1 or .theta..sub.2 of the first grip
rollers 6. As a result, the position of the substrate 2 is
corrected.
Second Embodiment
[0044] A device for manufacturing a thin-film laminated body
according to a second embodiment of the present invention is
described hereinafter. The basic configuration of the device for
manufacturing a thin-film laminated body according to the second
embodiment is the same as that of the device for manufacturing a
thin-film laminated body according to the first embodiment. The
same reference numerals and names as those of the first embodiment
are used to describe the same components of the first embodiment.
The configurations that are different than those of the first
embodiment are now described.
[0045] As shown in FIG. 8, a pair of second grip rollers 6' is
further provided in a manner as to sandwich the lower end part of
the substrate 2 therebetween. As with the first grip rollers 6,
each of the second grip rollers 6' has a rotation axis 6a' and an
outer circumferential surface 6b'. Although not shown, a second
angle adjusting mechanism capable of adjusting an inclination
direction and an inclination angle of the second grip rollers 6' is
provided to incline the second grip rollers 6' downward with
respect to the conveying direction and toward both the forward feed
direction and the backward feed direction with respect to the
conveying direction, with the outer circumferential surfaces 6b
positioned along the surface of the substrate 2. This second angle
adjusting mechanism corresponds to the second grip rollers 6' and
has the basic configuration as the first angle adjusting mechanism
11. Note that FIG. 8 shows a state in which the substrate 2 is fed
in the forward feed direction (the arrow A) and upper sides of the
second grip rollers 6' are inclined in the forward feed direction
so as to correspond to the substrate 2 fed in the forward feed
direction.
[0046] According to the first embodiment and the second embodiment
of the present invention described above, the inclination direction
and the inclination angle of the first and/or second grip rollers
6, 6' are adjusted by the first angle adjusting mechanism 11 and/or
the second angle adjusting mechanism, in a manner that the first
and/or second grip rollers 6, 6' are inclined toward both the
forward feed direction and the backward feed direction in the
conveying direction of the substrate 2. In this manner, the
position of the substrate 2 conveyed in the forward feed direction
and the backward feed direction can be adjusted with a high degree
of accuracy.
[0047] According to the first embodiment and the second embodiment
of the present invention, for instance, when he gripping force of
the first grip rollers 6 weakens due to the wear of the first grip
rollers 6, and adequate lifting force for lifting the substrate 2
cannot be obtained, the position of the substrate 2 can be
corrected by increasing the inclination of the first grip rollers 6
and the distance in which the substrate 2 moves in the width
direction. As a result, imposing an excess load onto the substrate
2 can be inhibited without increasing the force of the first grip
rollers 6 sandwiching the substrate 2. On the other hand, when the
gripping force of the first grip rollers 6 fluctuates and therefore
becomes so high that the lifting force for lifting up the substrate
2 becomes excessively strong, the position of the substrate 2 can
be corrected by reducing the inclination of the first grip rollers
6 and the distance in which the substrate 2 moves in the width
direction. As a result, the accuracy of adjusting the position of
the substrate 2 can be prevented from dropping.
[0048] The above has described the embodiments of the present
invention. However, the present invention is not limited to these
above-described embodiments and can be modified and changed in
various ways based on the technical idea of the present
invention.
[0049] in a first modification of the embodiments of the present
invention, the first and/or second grip rollers 6, 6' may be
configured such that the force thereof for sandwiching the
substrate 2 therebetween (referred to as "substrate sandwiching
force" hereinafter) can be adjusted. For example, when the
detection device 9 detects that adequate lifting force for lifting
up the substrate 2 cannot be obtained due to a lowered gripping
force of the first grip rollers 6 and that the substrate 2 remains
displaced downward even after position correction is performed
thereon, the control device 10 may control the pair of first grip
rollers 6 to correct the position of the substrate 2, in a manner
as to increase the substrate sandwiching force of the pair of first
grip rollers 6. However, when the detection device 9 detects that
the lifting force for lifting up the substrate 2 is strong due to
an excessively increased gripping force of the first grip rollers 6
and that the substrate 2 is displaced upward after the position
correction is performed thereon, the control device 10 may control
the pair of first grip rollers 6 to correct the position of the
substrate 2, in a manner as to reduce the substrate sandwiching
force of the pair of first grip rollers 6. In this manner, the same
effects as those of the present invention can be obtained.
[0050] In a second modification of the embodiments of the present
invention, the first and/or second grip rollers 6, 6' may be
provided in at least one conveying section out of the conveying
section between the unwinding chamber 3 and the film-forming
chamber 5a, the conveying sections between the five adjacent
film-forming chambers, and the conveying section between the
winding chamber 4 and the film-forming chamber 5f. The number of
conveying sections provided with the first and/or second grip
rollers 6, 6' can be changed such that the position of the
substrate 2 can be adjusted appropriately. In addition, the number
of the first and/or second grip rollers 6, 6' provided in each
conveying section may be two or more. In this manner, the same
effects as those of the present invention can be obtained.
[0051] In a third modification of the embodiments of the present
invention, in place of the roller attachment part 12, a drive
source for rotating the first and/or second grip rollers 6, 6' may
be provided so that the first and/or second grip rollers 6, 6' can
be rotated by this drive source. This drive source may be connected
to the control device 10 to rotate the first and/or second grip
rollers 6, 6'. In this manner, the same effects as those of the
present invention can be obtained.
EXAMPLE
[0052] An example using the manufacturing device 1 of the first
embodiment of the present invention is now described. In the
example according to the present invention, the substrate
sandwiching force of a pair of the first grip rollers 6 was set at
4.4 N, 8.9 N or 16.3 N, and changes in a lifting force F of the
pair of first grip rollers 6 (referred to as "lifting force"
hereinafter) for lifting up the substrate 2 were measured when the
inclination angle .theta..sub.1 or .theta..sub.2 of the first grip
rollers 6 was changed between 0.degree. to 8.degree..
[0053] FIG. 9 shows a relationship between the inclination angle
.theta..sub.1 or .theta..sub.2 of the first grip rollers 6 and the
lifting force F of the first grip roller 6 for lifting up the
substrate 2, wherein a solid line P shows that the substrate
sandwiching force is 4.4 N, a dashed line Q shows that the
substrate sandwiching force is 8.9 N, and a chain line R shows that
the substrate sandwiching force is 16.3 N.
[0054] As shown in FIG. 9, it is clear that the lifting force F
increases in proportion to the inclination angle .theta..sub.1 or
.theta..sub.2. For example, in order to obtain approximately 2 N
for the lifting force F for lifting the substrate 2, and when the
substrate sandwiching force is 4.4 N, the inclination angle
.theta..sub.1 or .theta..sub.2 may be approximately 3.5.degree..
When the substrate sandwiching force is 8.9 N, the inclination
angle .theta..sub.1 or .theta..sub.2 may be approximately
2.degree.. When the substrate sandwiching force is 16.3 N, the
inclination angle .theta..sub.1 or .theta..sub.2 may he
approximately 1.degree.. According to the example of the present
invention illustrated above, it was confirmed that, instead of
increasing the substrate sandwiching force of the pair of first
grip rollers 6, the lifting force F can be increased by increasing
the inclination angle .theta..sub.1 or .theta..sub.2 of the first
grip rollers 6.
EXPLANATION OF REFERENCE NUMERALS
[0055] 1 Device for manufacturing thin-film laminated body
(manufacturing device)
[0056] 2 Film substrate (substrate)
[0057] 6 First grip roller
[0058] 6' second grip roller
[0059] 6a, 6a' Rotation axis
[0060] 6h, 6h' Outer circumferential surface
[0061] 9 Detection device
[0062] 11 Angle adjusting mechanism
[0063] A, B, C, D, D', D'' Arrow
[0064] F Lifting force
[0065] .theta..sub.1, .theta..sub.2 Inclination angle
[0066] P Solid line
[0067] Q Dashed line
[0068] R Chain line
* * * * *